Workpiece setting device

Abstract

A workpiece setting device (1) comprises: a workpiece (10) that supports an article (P) to be processed; a workpiece holding portion (40) that has a plurality of mount portions (45) to which the workpiece can be attached; an image data acquisition unit (30) that can acquire acquired image data of the mount portions of the workpiece holding portion; conveyance mechanisms (20, 28) that convey at least one of the workpiece supporting the article and the workpiece holding portion; and a control unit (60) that controls the movement of the conveyance mechanisms on the basis of at least information from the image data acquisition unit. The control unit compares the acquired image data of the mount portions obtained from the image data acquisition unit with master image data stored in advance to determine whether the workpiece can be attached to one mount portion. When it is determined that the workpiece can be attached to the one mount portion, the workpiece is attached to the one mount portion. When it is determined that the workpiece cannot be attached to the one mount portion, or after the workpiece is attached to the one mount portion, the workpiece is moved relative to the next mount portion.

Description

Work Set Device

[0001] The present invention relates to a workpiece setting device for automatically setting a workpiece capable of supporting a plurality of articles to be processed on a workpiece holder.

[0002] In a conventional substrate processing apparatus described in Patent Document 1, a technique for positioning and holding a substrate on a substrate holder when plating the substrate is disclosed. Specifically, the technique includes controlling a position adjustment mechanism to adjust the position of the substrate based on detection by a first sensor, controlling a second sensor to detect feature points pre-formed on the surface of the substrate whose position has been adjusted based on the detection by the first sensor, checking whether the positions of the feature points detected by the second sensor are within an allowable range, controlling the position adjustment mechanism to adjust the position of the substrate based on the detection by the second sensor if the positions of the feature points detected by the second sensor are within the allowable range, and controlling a substrate attachment / detachment mechanism to attach the substrate to the substrate holder after adjusting the position of the substrate based on the detection by the second sensor.

[0003] Japanese Patent Application Laid-Open No. 2021-109984

[0004] In plating processes, depending on the objects to be processed, multiple objects may be held by a workpiece, and multiple workpieces may be attached to a workpiece holder during plating, allowing multiple objects to be plated at once. In such cases, automation of the process of attaching multiple workpieces to the workpiece holder is required. In particular, when a workpiece holder is used repeatedly, deformation of the workpiece holder or other factors may prevent the workpiece from being attached. In such cases, a machine stoppage due to a setting error can result in a stagnation in the workpiece attachment process, resulting in a decrease in operating rate. Patent Document 1 describes a technology for positioning and attaching a substrate to a substrate holder, but does not address the above-mentioned issues.

[0005] The present invention has been made in view of the above-mentioned circumstances, and its object is to provide a workpiece setting device that can reliably mount a workpiece and has a high availability rate.

[0006] In order to achieve the above object, the present invention provides a work setting device comprising: a work supporting an article to be processed; a work holding unit having a plurality of mounting units to which the work can be attached; an image data acquisition unit capable of acquiring acquired image data of the mounting units of the work holding unit; a transport mechanism that transports the work supporting the article and at least one of the work holding units; and a control unit that controls movement of the transport mechanism based on at least information from the image data acquisition unit, wherein the control unit compares the acquired image data of the mounting units obtained from the image data acquisition unit with pre-stored master image data to determine whether the work can be attached to the mounting unit, and when it is determined that the work can be attached to the mounting unit, it attaches the work to the mounting unit, and when it is determined that the work cannot be attached to the mounting unit, or after the work has been attached to the mounting unit, it moves the work relative to the next mounting unit in the mounting unit.

[0007] According to the present invention, it is possible to provide a workpiece setting device that can reliably mount a workpiece and has a high availability rate.

[0008] Fig. 1 is a schematic perspective view of a work setting device according to the present invention. Fig. 2 is a perspective view showing a work held by the work setting device shown in Fig. 1 and a part of the work holding unit. Fig. 3 is an enlarged front view showing the attached state of the work shown in Fig. 2. Fig. 4 is a perspective view of the gripping arm of the multi-axis robot shown in Fig. 3. Fig. 5 is a flowchart showing control in the work setting device shown in Fig. 1. Fig. 6 is an explanatory diagram showing an example of acquired image data. Fig. 7 is an explanatory diagram showing another example of acquired image data. Fig. 8 is an explanatory diagram explaining position correction when a work is mounted.

[0009] A workpiece setting device according to one embodiment of the present invention will be described below with reference to Figures 1 to 9. Figure 1 is a schematic perspective view of the workpiece setting device. The drawing shows the movement direction, with the X direction corresponding to the direction along the longitudinal direction of the workpiece (left-right direction) and the Y direction corresponding to the direction along the thickness direction of the workpiece. The X and Y directions are horizontal directions that are perpendicular to each other, and the Z direction corresponds to the vertical direction.

[0010] As shown in FIG. 1, the work set device 1 includes a cassette 10 (see FIG. 2) which is a workpiece configured to be able to support a plurality of articles P (see FIG. 3) to be processed, a hanger 40 which is a workpiece holding unit having a plurality of mounting portions 45 to which the plurality of cassettes 10 can be attached, a multi-axis robot 20 which is a transport mechanism that transports the cassette 10 supporting the articles P, an image pickup camera 30 which is an image data acquisition unit that can acquire mounting position information (i.e., information on the mounting portion 45) where the cassette 10 is mounted, a hanger lifting / lowering device 28 which is a transport mechanism that holds the hanger 40 and moves it up and down, and a control unit 60 which controls the operation of the multi-axis robot 20 and the hanger lifting / lowering device 28 based on information from the image pickup camera 30.

[0011] The multi-axis robot 20 has an arm portion with multiple rotation axes that is connected to one another, and has a gripping arm 21 at the tip thereof that grips and holds the cassette 10, and can move the cassette 10 to a predetermined position. For example, the multi-axis robot 20 attaches the held cassette 10 to a hanger 40 that is arranged opposite the multi-axis robot 20.

[0012] The hanger 40 is, for example, a frame-shaped hanger with a pair of support members 41 and a plurality of mounting portions 45 arranged on the support members 41, and is configured to be suspended during post-processing (such as a plating process). The hanger 40 is appropriately held by the hanger lifting device 28 and held so as to be movable up and down. In FIG. 1, the hanger lifting device 28 is configured by a ball screw mechanism and a pair of guide mechanisms, but other configurations are also possible.

[0013] FIG. 2 is a perspective view showing a part of the cassette 10 and hanger 40 held by the workpiece setting device 1 shown in FIG. 1, and FIG. 3 is an enlarged front view showing the cassette 10 in an attached state.

[0014] 2 and 3, the cassette 10 has a block portion 11 made of, for example, resin and a metal article support portion 12 attached to the block portion 11, and is configured to be able to hang a plurality of metal articles P to be processed. Note that the plurality of cassettes 10 used have the same shape and dimensions.

[0015] The block portion 11 is provided with a liquid circulation hole 11b for circulating the plating solution and two through holes 11a for inserting mounting pins 50 provided on the hanger 40. The liquid circulation hole 11b and the through holes 11a each penetrate the block portion 11 in the thickness direction (Y direction). The through holes 11a are provided near both ends of the block portion 11 in the X direction, and metal foils 11c are applied to the inner surfaces and edges of the through holes 11a. The metal foils 11c are made of stainless steel pipes or metal coatings.

[0016] The item support portion 12 has hook portions 12a for hanging multiple items P, and mounting portions 12b attached to the block portion 11. The hook portions 12a have a generally rectangular plate shape and are arranged so as to be inclined with respect to the Z direction. Furthermore, the upper end of the hook portion 12a in the Z direction has multiple notched grooves 12c lined up in the X direction. An item P can be hung in each groove 12c. The mounting portions 12b are provided at both ends of the hook portion 12a in the X direction and are attached to one surface of the block portion 11 in the Y direction with screws or the like. The mounting portions 12b contact the metal foils 11c in each through-hole 11a of the block portion 11, thereby establishing electrical conductivity between the item support portion 12 and the metal foils 11c.

[0017] The hanger 40 includes two support members 41 arranged in the X direction, mounting pins 50 protruding in the Y direction from each support member 41, elastic pieces 55 provided on the upper sides of the mounting pins 50, and a plurality of mounting portions 45 provided at predetermined intervals in the Z axis direction. The support members 41 are, for example, elongated plate members arranged along the Z direction as shown in the figure, made of a conductive material, and have a structure that allows them to be hung, for example, by a hook structure provided at the upper end.

[0018] As described above, the attachment pin 50 is inserted into the through-hole 11a of the block portion 11. The attachment pin 50 is a component whose characteristics can be grasped by the imaging camera 30, which will be described later. For example, the attachment pin 50 has a perfectly circular shape when viewed from the tip of the pin, and has a predetermined protruding length. The diameter of the attachment pin 50 is smaller than the diameter of the through-hole 11a. For example, the inner diameter of the through-hole 11a is approximately 10 mm, while the diameter of the attachment pin 50 is approximately 3 mm. The attachment pin 50 is made of a conductive material.

[0019] The elastic piece 55 is, for example, a leaf spring, and presses the block portion 11 from above toward the attachment pin 50 when the attachment pin 50 is inserted into the through hole 11a (the state shown in FIG. 3). That is, the elasticity of the elastic piece 55 presses the inner surface (thin metal piece 11c) of the through hole 11a of the cassette 10 against the attachment pin 50 (in the direction of the outline arrow in FIG. 3). In this state, the support member 41 is electrically connected to the article P via the attachment pin 50, the thin metal piece 11c of the through hole 11a, and the article support portion 12.

[0020] The elastic piece 55 has a tip that is inclined in a direction away from the mounting pin 50 (inclined in the Z direction), and is shaped to guide the block portion 11 from the front side of the mounting pin to the mounting pin 50. The mounting portions 45 form a pair, arranged horizontally at the same height between the left and right support members 41, and one cassette 10 is attached to each of the pair of left and right mounting portions 45 (in the X direction).

[0021] When, for example, plating is performed using the hanger 40 described above, a plurality of articles P are attached to the cassette 10 so as to hang on it, and then the cassette 10 is grasped by the multi-axis robot 20 as described below and attached to the hanger 40. During this attachment, the cassette 10 is moved (moved in the Y direction) so that the pair of attachment pins 50 are inserted into the through holes 11a of the cassette 10.

[0022] FIG. 4 is a plan view showing the gripping arm 21 at the tip of the multi-axis robot 20, and FIG. 5 is a perspective view of the gripping arm 21 as seen from the front side.

[0023] As shown in FIGS. 4 and 5 , the gripping arm 21 provided at the tip of the multi-axis robot 20 includes a pair of clamping pins 21b extending from an arm support portion 21a toward the tip. The clamping pins 21b hold the block portion 11 of the cassette 10 by sandwiching both longitudinal ends of the block portion 11. The clamping pins 21b are driven by a pair of left and right cylinders 21c fixed to the arm support portion 21a. For example, the clamping pins 21b are attached to slide blocks 21e that are connected to cylinder shafts 21d of the cylinders 21c and are slidable in the left-right direction (X direction) for movement. The clamping pins 21b open and close by actuation of the cylinders 21c, and can hold the cassette 10 by sandwiching both end faces (both end faces in the X direction) of the block portion 11 of the cassette 10.

[0024] A pair of positioning pins 21f extending from the arm support portion 21a are provided above and inward of the clamping pins 21b. When the cassette 10 is gripped, the positioning pins 21f come into contact with the lower rear end of the block portion 11, thereby regulating the holding position of the cassette 10. The positioning pins 21f are provided to be movable, for example, in the front-rear direction (Y direction), and are configured to allow the holding position of the cassette 10 to be adjusted.

[0025] In this way, the gripping arm 21 grips the cassette 10 so that the front surface of the cassette 10 facing the two support members 41 of the hanger 40 is parallel to the hanger 40 (i.e., parallel to a plane including the surfaces of the two support members 41). When the image of the attachment pins 50 is captured by the imaging camera 30 (described later), the cassette 10 is moved while maintaining its front surface parallel to the hanger 40 (along a plane perpendicular to the Y direction).

[0026] The relative mounting positions of the cassettes 10 to the gripping arm 21 in the X, Y, and Z directions are the same for all of the multiple cassettes 10 mounted on the hanger 40. The reference coordinates (i.e., the workpiece mounting position) of the gripping arm 21 of the multi-axis robot 20 are set, for example, so that when the hanger 40 is placed at a predetermined height, a pair of normal, undeformed mounting pins 50 are positioned at the centers of the two through holes 11a of the cassette 10 mounted on the gripping arm 21.

[0027] An imaging camera 30, which serves as an image data acquisition unit, is provided on one widthwise side of the arm support portion 21a of the gripping arm 21, behind the clamping pins 21b. The imaging camera 30 is capable of capturing images of the tip portions 50a of the pair of attachment pins 50 by moving the multi-axis robot 20. Note that a pair of imaging cameras 30 may be provided on both widthwise sides of the arm support portion 21a, and further, may be capable of simultaneously capturing images of the tip portions 50a of the pair of attachment pins 50 in the reference coordinate system of the gripping arm 21.

[0028] Furthermore, a light 35 is provided near the imaging camera 30. This light 35 is formed, for example, in a ring shape that surrounds the outer periphery of the camera. The light 35 arranged around the outer periphery of the imaging camera 30 in this manner can irradiate light with the same brightness from approximately the front of the mounting pin 50 all around the pin when the imaging camera 30 captures an image of the mounting pin 50.

[0029] As described above, the elastic piece 55 of the hanger 40 has a tip that is inclined in a direction away from the attachment pin 50 and is formed in a generally V-shape. Therefore, when the attachment pin 50 is inserted into the through-hole 10a of the cassette 10, depending on the position of the elastic piece 55, the cassette 10 may be pushed back by the elastic piece 55, making it difficult to insert. For this reason, in this embodiment, although not shown, an elastic structure that allows the clamping pin 21b to move downward may be provided between the clamping pin 21b that clamps the cassette 10 and the arm support portion 21a that holds the clamping pin 21b, making it easier to insert the cassette 10 into the attachment pin 50.

[0030] The control of the control unit 60 of the work set device 1 configured as described above will now be described. The control unit 60 includes at least a storage unit that stores master image data, and a calculation unit. The control unit 60 compares the acquired image data of the attachment pin 50 obtained from the imaging camera 30 with the pre-stored master image data. Specifically, the control unit 60 compares the acquired image data with the allowable range based on the master image data. Based on the comparison result, it is determined whether the cassette 10 can be attached to the attachment unit 45.

[0031] When it is determined that the cassette 10 can be attached to the attachment unit 45, the control unit 60 performs an operation to attach the cassette 10 to the attachment unit 45. On the other hand, when it is determined that the cassette 10 cannot be attached to the attachment unit 45, or after the cassette 10 has been attached to the attachment unit 45, the control unit 60 performs an operation to move the cassette 10 relative to the attachment unit 45 next to the attachment unit 45, so that the next attachment unit 45 faces the gripping arm 21 of the multi-axis robot 20 located at the reference coordinates. Thereafter, the acquired image data of the next attachment pin 50 is compared with the master image data, and the above operation is repeated.

[0032] The image data obtained by the imaging camera 30 also includes shape information and position information of the tip 50a (see FIG. 2) of the attachment pin 50 immediately before attachment. The shape information of the tip 50a here refers to, for example, when the tip shape is originally circular, a perfect circle is used as master data for the shape. The data actually captured by the imaging camera 30 is then compared to determine whether it deviates from a perfect circle. Here, when the shape of the tip 50a does not match a perfect circle, it refers to, for example, when the attachment pin 50 is tilted or bent, and the tip 50a is not a perfect circle and does not match the master data.

[0033] The acquired image data also includes position information of the tips 50a of the attachment pins 50, and furthermore, the distance between the tips 50a of the attachment pins 50 is calculated based on the position information of the pair of attachment pins 50. By measuring the distance between the pair of attachment pins 50, it is possible to determine whether the attachment pins 50 can be attached to the pair of through-holes 11a.

[0034] The actual operation of the workpiece setting device 1 will be described below with reference to the flowchart in Fig. 6 and Figs. 7 to 9. In the following description, the left-right direction refers to the left and right along the X direction as viewed from the gripping arm 21, and the front-rear direction refers to the direction along the Y direction as viewed from the gripping arm 21, with the tip side of the gripping arm 21 being the front.

[0035] First, the cassette 10 to which the article P has been attached in the previous process is held by the gripping arm 21 of the multi-axis robot 20 (step S1).

[0036] After the gripping arm 21 holds the cassette 10, or approximately in synchronization with the timing of holding the cassette 10, the hanger lifting device 28 operates. Then, the hanger 40 is moved so that the uppermost mounting portion 45 of the hanger 40 is positioned at the height of the workpiece mounting position, which is the reference position when mounting the cassette 10 (step S2).

[0037] Next, the gripping arm 21 of the multi-axis robot 20 moves to a predetermined image capturing position (where the image capturing camera 30 is positioned substantially in front of the first left mounting pin 50) (step S3).

[0038] The imaging camera 30 then captures an image of the tip 50a of the first attachment pin 50 to measure its shape. The captured image data is then compared to determine whether the outer shape of the tip 50a matches the perfect circle of the prerecorded master image. In this case, the shape of the tip 50a in the actual captured image is circular, whether the tip 50a is located approximately in the center of a predetermined area, which is the field of view Ar of the camera, as shown in FIG. 7A, or in a corner of the field of view Ar, as shown in FIG. 7B. If the captured shape matches the master image, the image is determined to be OK (step S4).

[0039] On the other hand, as shown in Fig. 8(a), if the tip 50a is in the approximate center of the field of view Ar of the imaging camera 30 but the shape of the tip 50a does not match the circle in the master image, it is determined to be NG. Also, as shown in Fig. 8(b), if the shape of the tip 50a is outside the field of view Ar, it is determined to be NG (step S4). In this case of NG, as described above, control is performed to move to the next attachment part 45, and the process proceeds to step S12, which will be described later.

[0040] If it is determined to be OK in step S4, the image pickup camera 30 measures the position of the first attachment pin 50 (step S5).

[0041] Next, the gripping arm 21 of the multi-axis robot 20 moves to the image capturing position of the other right-side mounting pin 50 (step S6).

[0042] Thereafter, the imaging camera 30 measures the shape of the tip 50a of the second attachment pin 50. In this step S7, if the shape matches that of the master image, as in step S4, it is determined to be OK and the process proceeds to the next step S8. On the other hand, if the shape does not match, that is, if it is NG, the process proceeds to step S12, which will be described later.

[0043] If it is determined to be OK in step S7, the image pickup camera 30 measures the position of the second attachment pin 50 (step S8).

[0044] Thereafter, the control unit 60 calculates the pin spacing (distance) between the tips 50a of the first and second attachment pins 50 based on the values ​​measured in steps S5 and S8, and compares it with the master data. If the pin spacing is outside the preset range, it is determined to be NG, and the process proceeds to step S12, which will be described later. If the pin spacing is within the preset range, it is determined to be OK, and the process proceeds to the next step (step S9).

[0045] If the pin spacing is within a preset range, the cassette 10 set position is corrected based on the values ​​measured in steps S5 and S8. An example of this correction will be described. For example, as shown in FIG. 9 , if the measured pin spacing d2 is smaller than the maximum permissible range d3 and larger than the minimum permissible range d1 relative to the spacing between the pair of through-holes 11a at the workpiece position 10A actually being gripped, it is determined to be OK. However, if the gripping arm 21 is moved forward (in the Y direction) in this state, as shown in FIG. 9A , the attachment pin 50 on one side (the left side in the figure) of the through-hole 11a is misaligned with respect to the through-hole 11a, and the tip 50a of the left attachment pin 50 may not enter the through-hole 11a. Therefore, as shown in FIG. 9B , a position correction is performed to move the workpiece position 10A to the right. Then, the gripping arm 21 is moved forward (in the Y direction) to load (set) the cassette 10. In this manner, the setting of one cassette 10 is completed (step S10).

[0046] When the setting of one cassette 10 is completed in step S10, the gripping arm 21 of the multi-axis robot 20 holds the next cassette 10 (step S11).

[0047] Next, it is determined whether the lowest mounting portion of the hanger 40 is located at the workpiece mounting position. That is, when the lowest mounting portion of the hanger 40 is located at the workpiece mounting position, it means that the last mounting on one hanger 40 has been completed, and the mounting of the cassette 10 on one hanger 40 is complete (step S12).

[0048] On the other hand, if the answer is "NO" in step S12, there are still mounting sections 45 available to mount the cassette 10, so the hanger lifting device 28 is operated upward to move the next mounting section 45 to the work mounting position, and the process returns to step S3 to proceed to the next mounting process (step S13).

[0049] In this manner, a predetermined number of cassettes 10 are mounted on the hanger 40. Thereafter, the hanger 40 is transported into a plating immersion liquid and subjected to plating processing.

[0050] As described above, in the workpiece setting device 1 of this embodiment, before the cassette 10 is attached to the hanger 40 by the control unit 60, the control unit 60 can select whether to proceed with the cassette 10 movement process by attaching it to the attachment pins 50 of the identified attachment unit 45 or by moving it relatively to the next attachment unit 45, based on the acquired image data (pin position and shape) of the attachment position. This eliminates unnecessary approaches to attach the cassette 10 to a location where it cannot be attached. Furthermore, it eliminates machine stoppages due to cassette 10 setting errors and prevents damage to the hanger 40 (damage to the attachment pins 50). As a result, the attachment work is performed reliably, and the machine operating rate can be significantly improved.

[0051] Furthermore, in this embodiment, even if distortion or the like occurs in the support member 41 of the hanger 40 and the tip position of the mounting pin 50 changes slightly, if the pin spacing is within the acceptable range, the position correction of the gripping arm 21 holding the cassette 10 is controlled, making it possible to insert the through hole 11a into the mounting pin 50, and further increasing the reliability of mounting the cassette 10.

[0052] Furthermore, in this embodiment, by moving the hanger 40 either up or down, the operation of bringing the next adjacent mounting portion 45 into opposition to the cassette 10 can be easily performed. In particular, since the gripping arm 21 holds both cassettes 10 in the same position, simply moving the hanger 40 allows for smooth progression to the next mounting operation (image acquisition operation). Furthermore, transition to the next mounting portion 45 requires movement only the vertical distance of the mounting portion 45 (mounting pins 50), which allows for easier control than controlling the multi-axis robot 20.

[0053] Furthermore, in this embodiment, since the imaging camera 30 is provided on the gripping arm 21, it is possible to acquire images from the closest position to the mounting pin 50 of the opposing mounting part 45 and always from the same position, thereby obtaining stable images. As a result, a stable and accurate comparison judgment can always be obtained when comparing the acquired image data with the master image data.

[0054] In addition, in this embodiment, the imaging camera 30 is positioned further back from the cassette 10 than the grasping position of the cassette 10, so it does not become an obstacle when grasping the workpiece, and since the distance between the imaging camera 30 and the held cassette 10 is short, the movement distance between the imaging position and the mounting position of the cassette 10 is short, allowing for quick installation.

[0055] Furthermore, in this embodiment, the lighting 35 is provided on the gripping arm 21 close to the imaging camera 30, so that light can be applied from a position close to the attachment pin 50, enabling a clear image to be acquired. In particular, the lighting 35 is arranged in a ring shape surrounding the outer periphery of the imaging camera 30, so that uniform illumination can be applied around the circumference of the attachment pin 50 when photographing from the front side, allowing an accurate image to be acquired.

[0056] Although one embodiment of the present invention has been described above, the present invention is not limited to this and can be modified as appropriate. For example, in the above embodiment, the mounting portion 45 has the mounting pin 50, but the present invention is not limited to this and may be something other than the mounting pin 50, or may be something else as long as the positional relationship with the workpiece can be specified as the mounting portion.

[0057] In addition, in the above embodiment, the hanger 40 is moved up and down in the control for changing the mounting position of the cassette 10, but this is not limited to this, and for example, it may be performed by moving the multi-axis robot 20.

[0058] Furthermore, in the above embodiment, the work set device 1 is described as a device that performs plating processing, but the present invention is not limited to this and can also be applied to other processing devices, such as polishing devices, grinding devices, film forming devices, and etching devices.

[0059] REFERENCE SIGNS LIST 1 workpiece setting device 10 cassette (workpiece) 11a through-hole 12 article support section 20 multi-axis robot (transport mechanism) 21 gripping arm 28 hanger lifting device (lifting device, transport mechanism) 30 imaging camera (image data acquisition section) 35 lighting 40 hanger (workpiece holding section) 45 mounting section 50 mounting pin 50a tip of mounting pin 60 control section Ar field of view (predetermined area) P article

Claims

1. A work set device (1) comprising: a work (10) for supporting an article (P) to be processed; a work holding part (40) having a plurality of mounting parts (45) to which the work can be attached; an image data acquisition part (30) capable of acquiring acquired image data of the mounting parts of the work holding part; a transport mechanism (20, 28) for transporting at least one of the work supporting the article and the work holding part; and a control part (60) for controlling the movement of the transport mechanism based on at least the information of the image data acquisition part, wherein the control part compares the acquired image data of the mounting parts obtained from the image data acquisition part with master image data stored in advance to determine whether the work can be attached to the mounting parts, attaches the work to the mounting parts when it is determined that the work can be attached to the mounting parts, and moves the work relative to the next mounting part of the mounting parts when it is determined that the work cannot be attached to the mounting parts or after the work is attached to the mounting parts.

2. The work set device according to claim 1, wherein the acquired image data and the master image data include shape information of the mounting parts.

3. The work set device according to claim 1 or 2, wherein the acquired image data and the master image data include position information of the mounting parts.

4. Each of the mounting parts has a pair of mounting parts, and the work set device according to any one of claims 1 to 3, wherein the acquired image data and the master image data include distance information between the pair of mounting parts.

5. The work set device according to claim 1, wherein the control part corrects the mounting position of the work with respect to the mounting parts before attaching the work to the mounting parts.

6. The work set device according to claim 1, wherein the control part compares the acquired image data with an allowable range based on the master image data to determine whether the work can be attached to the mounting parts.

7. The transfer mechanism includes a multi-axis robot having a gripping arm (21) capable of gripping the workpiece, and a lifting device (28) capable of moving the workpiece holding part up and down. The control unit moves the workpiece holding part up or down by the lifting device so that the next mounting part faces the workpiece held by the multi-axis robot. The workpiece setting device according to any one of claims 1 to 6.

8. The mounting part has a pair of mounting pins (50), and the workpiece is provided with a pair of through holes (11a) penetrated by the pair of mounting pins. The workpiece setting device according to any one of claims 1 to 7.

9. In the comparison between the master image data and the acquired image data, the control unit determines whether the workpiece can be attached to the mounting part based on the shape and position of the tip of the mounting pin. The workpiece setting device according to claim 8.

10. In the comparison between the master image data and the acquired image data, the control unit determines whether the distance between the tips of the pair of mounting pins is within an allowable range. The workpiece setting device according to claim 8 or 9.

11. At least the inner surfaces of the mounting pin and the through hole are made of an electrically conductive material. The workpiece is configured such that an article support part (12) for engaging and holding the article is electrically conductive with the through hole. The workpiece holding part is made of a conductive member, and in a state of being immersed in a plating immersion liquid, plating treatment can be performed on the article through the workpiece held by the mounting pin. The workpiece setting device according to claim 8.

12. The transfer mechanism includes a multi-axis robot (20) having a gripping arm (21) capable of gripping the workpiece, and the gripping arm is provided with the image data acquisition unit. The workpiece setting device according to any one of claims 1 to 11.

13. The image data acquisition unit is arranged away from the workpiece relative to the gripping position of the workpiece. The workpiece setting device according to claim 12.

14. In the vicinity of the image data acquisition unit, there is provided an illumination (35) that irradiates light toward the tip side of the gripping arm. The workpiece setting device according to claim 12.

Images