Rotation rate sensor having a substrate and a double rotor and method for operating a rotation rate sensor having a substrate and a double rotor

Abstract

The invention relates to a rotation rate sensor and a method for operating a rotation rate sensor having a substrate and a double rotor, wherein the substrate has a main extension plane with an X-direction and a Y-direction extending perpendicularly thereto, wherein the double rotor has a first rotor and a second rotor arranged at a distance from the first rotor in the X-direction, which rotors are each elastically connected to the substrate via a respective suspension and are elastically connected to each other via a first coupling element, wherein the first rotor is connected to a first seismic mass and a second seismic mass, wherein the second rotor is connected to a third seismic mass and a fourth seismic mass, wherein the first seismic mass is connected to the third seismic mass via a first rocker element extending substantially in the X-direction in such a way that the third seismic mass is deflected in a direction opposite to the radial deflection of the first mass when the first seismic mass is radially deflected, wherein the second seismic mass is connected to the fourth seismic mass via a second rocker element extending substantially in the X-direction in such a way that the fourth seismic mass is deflected in a direction opposite to the radial deflection of the second seismic mass when the second seismic mass is radially deflected.

Description

[0001] Description

[0002] title

[0003] Angular rate sensor with a substrate and a double rotor and method for operating a angular rate sensor with a substrate and a double rotor

[0004] State of the art

[0005] The invention is based on a rotation rate sensor with a substrate and a double rotor according to the preamble of claim 1.

[0006] Such angular rate sensors with a substrate and a double rotor are well known.

[0007] For example, from the document DE 10 2021 200 483 A1, a three-axis yaw rate sensor with a substrate and a double rotor is known, wherein the double rotor has a first and a second rotor, which are elastically connected to one another via a first coupling element such that the two rotors can be excited to antiphase torsional oscillations. The first rotor has a first and a second seismic mass, which are mounted so as to be deflectable relative to the first rotor, and the second rotor has a third and a fourth seismic mass, which are mounted so as to be deflectable relative to the second rotor. Furthermore, it is provided that the first mass and the third mass are connected via a first rocker element such that the third mass is deflected in an opposite radial direction upon a radial deflection of the first mass.Furthermore, it is also provided that the second mass and the fourth mass are connected via a second rocker element in such a way that the fourth mass is deflected in an opposite radial direction upon a radial deflection of the second mass.

[0008] A disadvantage of such known yaw rate sensors is that a coupling of the first and second rocker elements is realized via a second coupling element which - when the rotors are laterally spaced - lies in the middle of the yaw rate sensor, i.e. between the rotors, within a layer for contacting electrode structures. Such a contacting layer is generally many times thinner than a functional layer of such a yaw rate sensor, which is generally designed to withstand mechanical loads, for example due to different vibration modes; for this reason, such a contacting layer is generally less mechanically resilient than such a functional layer. Accordingly, the mechanical stability and robustness of such a coupling by means of a second coupling element designed in this way with respect to external (disturbing) influences, for example accelerations, is low.

[0009] Disclosure of the invention

[0010] Against this background, the task is to provide a yaw rate sensor with a substrate and a double rotor, which, due to its design, does not have the disadvantages mentioned above.

[0011] The yaw rate sensor according to the invention with a substrate and a double rotor has the advantage over the prior art that the first and second rocker elements are elastically connected to one another via first coupling frame elements and via second coupling frame elements in such a way that the radial deflections of the first and second seismic masses occur antiparallel and the radial deflections of the third and fourth seismic masses also occur antiparallel and that the first and second coupling frame elements, together with the rocker elements, at least approximately enclose the rotors in a plane parallel to the main extension plane. Due to this arrangement of the first and second coupling frame elements within a plane parallel to the main extension plane of the yaw rate sensor and thus a coupling of the rocker elements to one another, in which the force is transmitted not in the middle between the rotors, but around the rotors orComprehensively, it is advantageously possible according to the invention for the coupling frame elements to be realized within a mechanically resilient functional layer (or a layer with a higher mechanical resilience than the contacting layer), thus advantageously ensuring mechanical stability and robustness of such a coupling of the rocker elements. Furthermore, operation of the yaw rate sensor can be effectively and efficiently promoted or supported, in particular, by advantageous connections of the first coupling frame elements and the second coupling frame elements, in particular within the plane of the functional layer.Thus, by means of the inventive conception of the yaw rate sensor, in particular the coupling of the first and second rocker elements by the first and second coupling frame elements and encompassing the two rotors, robustness and mechanical stability against mechanical (interference) influences can be ensured, as is preferably required for an application or operation of the yaw rate sensor in the automotive or consumer sector.

[0012] Advantageous embodiments and further developments of the invention can be found in the dependent claims and the description with reference to the drawings.

[0013] According to an advantageous embodiment of the invention, it is provided that one of the first coupling frame elements and one of the second coupling frame elements are connected to one another or are interconnected via a first spring element, so that the first rotor is at least partially enclosed, and that another of the first coupling frame elements and another of the second coupling frame elements are connected to one another or are interconnected via a second spring element, so that the second rotor is at least partially enclosed. By connecting one of the first coupling frame elements and one of the second coupling frame elements by means of the first and second spring elements, it is advantageously possible (in conjunction with the first and second rocker elements) to favor or support the deflections of the seismic masses due to this coupling in such a way that they execute antiparallel radial deflections (iethe first and second seismic masses and the third and fourth seismic masses deflect radially antiparallel), while ensuring advantageous mechanical stability and robustness against external (disturbing) influences. According to an advantageous embodiment of the invention, it is provided that the first spring element and / or the second spring element each comprise at least one substrate suspension, wherein the first spring element and / or the second spring element are connected to the substrate by means of this at least one substrate suspension. Thus, it is advantageously possible to ensure effective and efficient operation of the rotation rate sensor.

[0014] According to an advantageous embodiment of the invention, the first spring element and / or the second spring element, between their connection to the substrate suspension and their connection to the first and second coupling frame elements, comprise or consist of beam elements which are essentially straight in sections. By means of the beam elements which are essentially straight in sections, it is advantageously possible to cushion mechanical influences or bendings which act on the spring elements as a result of the mechanical loading (tilting) of the coupling frame elements, in particular triggered by the mechanical effects (deflections of the seismic masses) on the first and second rocker element during operation of the yaw rate sensor, and due to the connection of the spring elements to the coupling frame elements, or to use or utilize these mechanical influences in such a way that they promote or utilize the operation of the yaw rate sensor.support.

[0015] According to an advantageous embodiment of the invention, three of the beam elements per substrate suspension are connected or interconnected at at least one point. This at least one point allows mechanical influences or deformations acting on the spring elements to be effectively and efficiently utilized for advantageous operation of the yaw rate sensor.

[0016] According to an advantageous embodiment of the invention, it is provided that the partially straight beam elements of the first and / or second spring element are arranged such that

[0017] -- the first and / or second spring element forms or has a meander extending generally in the X-direction and / or

[0018] -- the first and / or second spring element forms or has a meander extending generally in the Y-direction and / or

[0019] -- the first and / or second spring element forms or has an overlay of the meandering in the X direction and the meandering in the Y direction. Due to meanders arranged in different directions or in a superimposed manner by means of the essentially straight beam elements within the first and / or second spring element, it is advantageously possible to ensure or support the functioning of the first and second spring elements within the coupling of the first and second coupling frame elements and the first and second rocker elements. Due to the special structuring of a meander, the mechanical influences or bends acting on the spring elements can be suitably cushioned and utilized. It is therefore advantageously possible to ensure effective and efficient operation of the yaw rate sensor.

[0020] A further subject of the invention is a method for operating a rotation rate sensor with a substrate and a double rotor according to the independent method claim.

[0021] The method according to the invention for operating a rotation rate sensor with a substrate and a double rotor proves to be advantageous compared to the prior art in that the first and second rocker elements are elastically connected to one another via first coupling frame elements and via second coupling frame elements, wherein the radial deflections of the first and second seismic masses occur antiparallel and the radial deflections of the third and fourth seismic masses also occur antiparallel and wherein the first and second coupling frame elements together with the rocker elements at least approximately enclose the rotors in a plane parallel to the main extension plane.

[0022] For the method for operating the yaw rate sensor with a substrate and a double rotor, the advantages and configurations described in connection with the embodiments of the yaw rate sensor according to the invention with a substrate and a double rotor can be applied.

[0023] Embodiments of the present invention are illustrated in the drawings and explained in more detail in the following description. Brief description of the drawings:

[0024] Figure 1 shows a schematic representation and a plan view, ie the drawing plane is arranged parallel to the main extension plane (or substrate plane), a rotation rate sensor with a substrate and a double rotor according to the present invention.

[0025] Figures 2a to f show a schematic representation of a first or second spring element according to advantageous embodiments of the present invention.

[0026] Embodiments of the invention:

[0027] Figure 1 shows a schematic representation of a rotation rate sensor with a substrate having a main extension plane with an X-direction and a Y-direction perpendicular thereto (shown in a coordinate system bottom left), and a double rotor according to the present invention. The basic element is formed by a double rotor oscillating in antiphase. In each of the two rotors 1, 2, two seismic masses 3, 4, 5, 6 are separated, which are softly deflected by springs 7 in a direction perpendicular to the oscillation axis of the rotors, ieradially, are mounted; this means that the first rotor 1 is connected to a first seismic mass 3 and a second seismic mass 4 in such a way that these are each mounted so as to be deflectable in the radial direction relative to the first rotor 1 and substantially parallel to the XY plane (mainly in the Y direction), and that the second rotor 2 is connected to a third seismic mass 5 and a fourth seismic mass 6 in such a way that these are each mounted so as to be deflectable in the radial direction relative to the second rotor 2 and substantially parallel to the XY plane (and also mainly in the Y direction). The two rotors 1, 2 are coupled to one another via a first coupling element 8, which in the embodiment shown has a centrally arranged O-shaped section that is spread open when loaded in the X direction (e.g. in the case of larger torsional vibration deflections of the rotors 1, 2).Each of the two separated seismic masses (3 to 5 and 4 to 6) of a rotor 1, 2 is coupled to each other via a rocker element (first rocker element 9 and second rocker element 9', respectively). Rocker elements 9, 9' force an antiphase radial deflection of masses 4 and 6, or 3 and 5, respectively. The two rocker elements 9, 9' are each connected to the substrate via an anchor 14 and are connected to each other via first coupling frame elements 10 and second coupling frame elements 10'.

[0028] The first coupling frame element 10 and the second coupling frame element 10', which together at least partially encompass the first rotor 1 (shown on the left-hand side in Figure 1), are connected to one another or interconnected via a first spring element 20, so that the first rotor 1 is at least partially enclosed. The further first coupling frame element 10 and the further second coupling frame element 10', which together at least partially encompass the second rotor 2 (shown on the right-hand side in Figure 1), are connected to one another or interconnected via a second spring element 20', so that the second rotor 2 is at least partially enclosed.In the illustrated arrangement, the coupling frame elements 10, 10' are arranged such that the first and second coupling frame elements 10, 10', together with the rocker elements 9, 9', at least approximately enclose the rotors 1, 2 in a plane parallel to the main extension plane. In particular, a mechanical frame structure is thus realized which, on the one hand, promotes or supports the radial deflections of the first and second seismic masses 3, 4 and also the radial deflections of the third and fourth seismic masses 5, 6 occurring antiparallel and, on the other hand, ensures that mechanical stability and robustness against the effects of external disturbance factors or accelerations are provided due to the frame-shaped arrangement. Such a frame-shaped arrangement (essentially in the form of the coupling frame elements 10, 10') can advantageously be realized within a functional layer of the yaw rate sensor.This has the advantage over the prior art that, in comparison to couplings which are usually realized laterally between the rotors 1, 2 within a layer for contacting electrode structures, the frame-shaped arrangement according to the invention can be realized in a mechanically more stable and robust functional layer of the yaw rate sensor. Such a functional layer can have a greater layer thickness than the layer for electrode contact. Furthermore, the functioning of the rocker elements 9, 9' is favored by the connection or attachment to the coupling frame elements 10, 10' (and due to this also by the elastic effect of the spring elements 20, 20'), since this supports the antiparallel radial deflections of the seismic masses 3, 4, 5, 6.The two rotors 1, 2, their seismic masses 3, 4, 5, 6, the rocker elements 9, 9' and the first coupling element 8 as well as the first and second coupling frame elements 10, 10' and the first and second spring elements 20, 20', are each designed mirror-symmetrically to both central axes - running in the X and Y directions (horizontal and vertical in Figure 1) - of the double rotor.

[0029] During operation of the yaw rate sensor, the rotors 1, 2 are set into antiphase torsional oscillations by a drive (not shown). As a result, the rotors 1, 2 undergo or perform both antiphase left and right rotations. This occurs for each rotation up to a certain maximum deflection in the respective direction of rotation. To enable the torsional oscillation of the rotors 1, 2, the rotors 1, 2 each have a central recess in the area of ​​their center of gravity, in which they are connected to an anchor point 13 via spring elements.

[0030] A rotation rate about the Z direction (i.e., perpendicular to the X and Y directions) leads to a radial deflection of the seismic masses 3, 4, 5, 6 and thus to a tilting of the rocker elements 9, 9' (rotation about the Z axis), a resulting tilting of the first and second coupling elements 10, 10', and ultimately to a bending of the first and second spring elements 20, 20'. The bending of the spring elements 20, 20' and the tilting of the coupling frame elements 10, 10' promote the antiparallel radial deflections of the seismic masses (the deflections of the first and second seismic masses 3, 4 and the third and fourth seismic masses 5, 6 each occur antiparallel).

[0031] Figures 2a to f each show a schematic representation of the first or second spring element 20, 20' according to advantageous embodiments of the present invention. Shown here are beam elements 23 that are essentially straight in sections (shown by way of example by the reference symbol in Figure 2a). Thus, between its connection to the substrate suspension 21 and its connection to the respective first coupling frame element 10 and to the respective second coupling frame element 10', the respective spring element 20, 20' has or consists of beam elements 23 that are essentially straight in sections. In both Figure 2a and Figure 2b and Figure 2d, the respective spring element 20, 20' comprises a single substrate suspension 21 and a single point 22 at which three of the essentially straight in sections beam elements 23 are connected to one another or are interconnected.The respective spring element 20, 20' is connected to the substrate by means of the substrate suspension 21. The point 22, which is present once per substrate suspension 21, advantageously enables mechanical loads or bendings which act on the first and second rocker elements 9, 9' during the tilting of the coupling frame elements 10, 10', in particular triggered by the deflections of the seismic masses 3, 4, 5, 6, during operation of the yaw rate sensor and due to the connection of the spring elements 20, 20' to the coupling frame elements 10, 10', to be effectively and efficiently utilized or utilized in such a way that the tilting of the coupling frame elements 10, 10' is supported or promoted. Furthermore, the essentially straight beam elements 23 are arranged such that.

[0032] -- the respective spring element 20, 20' in Figure 2a forms or has a meandering extending generally in the X-direction and

[0033] -- the respective spring element 20, 20' in Figure 2b forms or has a meandering generally extending in the Y direction. The special structuring of a meandering advantageously makes it possible to suitably cushion and utilize the mechanical loads or bendings acting on the respective spring element 20, 20'. The respective preferred cushioning and utilization thus promotes or supports the mechanical effect of the tilting of the first and second coupling elements 10, 10' and thus (via the first and second rocker elements 9, 9') ultimately promotes or supports the radial deflections of the seismic masses 3, 4, 5, 6.

[0034] Figure 2c shows an arrangement with two substrate suspensions 21 and two locations 22, at each of which three of the beam elements 23 are connected or joined together. Figure 2c also shows a meandering arrangement of the beam elements 23. This embodiment with two substrate suspensions 21 (and two locations 22) has the advantage that the mechanical loads or bendings thus act preferentially on the one beam element 23, which runs essentially straight in sections, between the locations 22. Due to this (in combination with the mechanically stabilizing symmetrical arrangement of the substrate suspensions 21 and the locations 22), the tilting of the rocker elements 9, 9' and the coupling frame elements 10, 10' is supported.

[0035] Figures 2e and 2f show mixed forms of meandering, each with two substrate suspensions 21 and two locations 22. In both figures, the beam elements 23, which are essentially straight in sections, are arranged such that the respective spring element 20, 20' forms or has an overlap of the meandering in the X direction and the meandering in the Y direction. Thus, Figure 2e shows an overlap of the meandering with the two substrate suspensions 21 relatively far outside the meandering structure (here essentially shifted in the X direction) and a comparatively large distance between the locations 22 and the respective substrate suspensions 21. In contrast, Figure 2f shows two substrate suspensions 21 relatively far inside the meandering structure (also essentially shifted in the X direction) and a comparatively small distance between the locations 22 and the respective substrate suspensions 21.

[0036] In Figures 2a to c, e and f, the beam elements 23 forming the meandering are connected to one another or interconnected by two consecutive beam elements 23 in such a way that the respective two beam elements 23 form a 90° angle to one another or are connected to one another in such a way that the beam course changes by 90° at the connection point.

[0037] Figure 2d shows an arrangement in which a single substrate suspension 21 and a single point 22 are shown. In contrast to the other figures, Figure 2d shows a meandering, which is formed by two consecutive beam elements 23 in such a way that the two beam elements 23 in question form an angle greater than 90° or that the two beam elements 23 in question are connected to one another in such a way that the beam course changes by more than 90°, in particular by approximately 135°, at the connection point. Alternatively, a meandering (not shown) is also conceivable, which is formed by two consecutive beam elements 23 in such a way that the two beam elements 23 in question form an angle of less than 90° or that the two beam elements 23 in question are connected to one another in such a way that the beam course changes by less than 90° at the connection point.

Claims

Claims 1. A yaw rate sensor comprising a substrate and a double rotor, the substrate having a main extension plane with an X direction and a Y direction perpendicular thereto, the double rotor comprising a first rotor (1) and a second rotor (2) arranged at a distance from the first rotor (1) in the X direction, each of which is elastically connected to the substrate via a respective suspension (13) and which is elastically connected to one another via a first coupling element (8) such that the two rotors (1, 2) can be excited to antiphase torsional oscillations, the rotation axes of the rotors (1, 2) extending parallel to a Z direction perpendicular to the main extension plane of the substrate, the first rotor (1) being connected to a first seismic mass (3) and a second seismic mass (4) such that these are each mounted so as to be deflectable in the radial direction relative to the first rotor (1) and substantially parallel to the Y direction.wherein the second rotor (2) is connected to a third seismic mass (5) and a fourth seismic mass (6) in such a way that these are each mounted so as to be deflectable in the radial direction relative to the second rotor (2) and substantially parallel to the Y-direction, wherein the first seismic mass (3) is connected to the third seismic mass (5) via a first rocker element (9) extending substantially in the X-direction in such a way that the third seismic mass (5) is deflected in a direction opposite to the radial deflection of the first seismic mass (3) upon a radial deflection of the first seismic mass (3), wherein the second seismic mass (4) is connected to the fourth seismic mass (6) via a second rocker element (9') extending substantially in the X-direction in such a way that the fourth seismic mass (6) is deflected in a direction opposite to the radial deflection of the first seismic mass (3) upon a radial deflection of the second seismic mass (4),the radial deflection of the second seismic mass (4) is deflected in the opposite direction, characterized in that the first and second rocker elements (9, 9') are elastically connected to one another via first coupling frame elements (10) and via second coupling frame elements (10') in such a way that the radial deflections of the first and second, seismic mass (3, 4) take place antiparallel and the radial deflections of the third and fourth seismic masses (5, 6) also take place antiparallel and that the first and second coupling frame elements (10, 10') together with the rocker elements (9, 9') at least approximately enclose the rotors (1, 2) in a plane parallel to the main extension plane.

2. Rotation rate sensor according to claim 1, characterized in that one of the first coupling frame elements (10) and one of the second coupling frame elements (10') are connected to one another or are interconnected via a first spring element (20), so that the first rotor (1) is at least partially enclosed, and that a further one of the first coupling frame elements (10) and a further one of the second coupling frame elements (10') are connected to one another or are interconnected via a second spring element (20'), so that the second rotor (2) is at least partially enclosed.

3. Rotation rate sensor according to one of the preceding claims, characterized in that the first spring element (20) and / or the second spring element (20') each comprise at least one substrate suspension (21), wherein the first spring element (20) and / or the second spring element (20') are connected to the substrate by means of said at least one substrate suspension (21).

4. Rotation rate sensor according to one of the preceding claims, characterized in that the first spring element (20) and / or the second spring element (20') have or consist of beam elements (23) which extend substantially straight in sections between their connection to the substrate suspension (21) and their connection to one of the first and second coupling frame elements (10, 10').

5. Rotation rate sensor according to one of the preceding claims, characterized in that per substrate suspension (21) three of the essentially beam elements (23) which run straight in sections are connected or joined to one another at at least one point (22).

6. Rotation rate sensor according to one of the preceding claims, characterized in that the partially straight beam elements (23) of the first and / or second spring element (20') are arranged such that -- the first and / or second spring element (20, 20') forms or has a meander extending generally in the X-direction and / or -- the first and / or second spring element (20, 20') forms or has a meander extending generally in the Y-direction and / or -- the first and / or second spring element (20, 20') forms or has an overlay of the meandering in the X direction and the meandering in the Y direction.

7. A method for operating a rotation rate sensor with a substrate and a double rotor, wherein the substrate has a main extension plane with an X direction and a Y direction running perpendicular thereto, wherein the double rotor has a first rotor (1) and a second rotor (2) arranged at a distance from the first rotor (1) in the X direction, which are each elastically connected to the substrate via a respective suspension (13) and which are elastically connected to one another via a first coupling element (8), wherein the two rotors (1, 2) are excited to antiphase torsional oscillations, wherein the axes of rotation of the rotors (1, 2) run parallel to a Z direction perpendicular to the main extension plane of the substrate, wherein the first rotor (1) is connected to a first seismic mass (3) and a second seismic mass (4), which are each mounted so as to be deflectable in the radial direction relative to the first rotor (1) and substantially parallel to the Y direction,wherein the second rotor (2) is connected to a third seismic mass (5) and a fourth seismic mass (6) in such a way that these are each mounted so as to be deflectable in the radial direction relative to the second rotor (2) and substantially parallel to the Y-direction, wherein the first seismic mass (3) is connected to the third seismic mass (5) via a first rocker element (9) extending substantially in the X-direction, wherein the third seismic mass (5) in the event of a radial deflection of the first, seismic mass (3) is deflected in a direction opposite to the radial deflection of the first seismic mass (3), wherein the second seismic mass (4) is connected to the fourth seismic mass (6) via a second rocker element (9') extending substantially in the X-direction, wherein the fourth seismic mass (6) is deflected in a direction opposite to the radial deflection of the second seismic mass (4) upon a radial deflection of the second seismic mass (4), characterized in that the first and second rocker elements (9, 9') are elastically connected to one another via first coupling frame elements (10) and via second coupling frame elements (10'), wherein the radial deflections of the first and second seismic masses (3, 4) occur antiparallel and the radial deflections of the third and fourth seismic masses (5, 6) also occur antiparallel, and wherein the first and second coupling frame elements (10,10') together with the rocker elements (9, 9') at least approximately enclose the rotors (1, 2) in a plane parallel to the main extension plane.,

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