Notification device, notification method, and program

Abstract

Provided are a notification device, a notification method, and a notification program that facilitate replacement management of a component of an X-ray generation unit included in an X-ray analysis device. This notification device 200 for notifying component replacement recommendation information comprises: an information storage unit 230 that stores information on a measurement value with respect to a target component included in an X-ray analysis device; a state determination unit 240 that determines, from information on the measurement value, whether the current state of the target component requires notification of replacement recommendation information for recommending replacement of the component; and a notification unit 250 that notifies the replacement recommendation information when it is determined that the current state of the target component requires notification of the replacement recommendation information. Examples of the target component are a filament, a target, and a shutter.

Description

Notification device, notification method, and notification program

[0001] The present invention relates to a notification device, a notification method, and a notification program for notifying part replacement recommendation information.

[0002] X-ray analysis equipment generates X-rays by heating a filament and causing thermions to collide with a target, and then irradiates the sample with the X-rays extracted by opening and closing a shutter. In particular, the parts of the X-ray generating unit deteriorate when used under harsh conditions, so they need to be replaced when they approach the end of their life.

[0003] Conventionally, the usage time and number of times that parts are replaced periodically are calculated and displayed on an application screen for the user of the X-ray analysis device. Then, when a maintenance worker from the device manufacturer visits for regular maintenance, he or she checks the usage time and number of times that parts are replaced and identifies the parts that need to be replaced during the next visit.

[0004] However, since the maintenance worker only becomes aware of the condition of the parts after visiting or inquiring about the customer, it is not possible to replace parts in accordance with fluctuations in the timing of part replacement due to changes in the frequency of use by the user.

[0005] To address this issue, a technique is known in which a warning number is set for each part, and a warning is issued to prompt replacement when the number of days of use exceeds the warning number (see Patent Document 1).

[0006] International Publication No. 2020 / 179111

[0007] In the above-mentioned Patent Document 1, the number of days for warning is a number that the user can set arbitrarily depending on the actual usage of the device, and therefore, it does not determine whether the current part is in a condition that recommends replacement or not, and does not prompt the user to replace the part.

[0008] The present invention has been made in view of the above circumstances, and has an object to provide a notification device, a notification method, and a notification program that facilitate replacement management of parts of an X-ray analysis device.

[0009] (1) In order to achieve the above object, the notification device of the present invention is a notification device that notifies information on recommended replacement of a part, and is characterized by comprising: an information storage unit that stores information on measurement values ​​for a target part held by an X-ray analysis device; a state determination unit that determines, from the information on the measurement values, whether the current state of the target part is in a state where replacement recommendation information recommending replacement of the target part should be notified; and a notification unit that notifies the replacement recommendation information when it is determined that the current state of the target part is in a state where the replacement recommendation information should be notified.

[0010] (2) Furthermore, in the notification device described in (1) above, the information storage unit further stores a plurality of different judgment conditions for notifying the replacement recommendation information, the notification device further has a selection unit that selects one judgment condition from the plurality of judgment conditions stored in the information storage unit for the target part, and the status judgment unit is characterized in that it determines whether the measurement value matches the selected judgment condition.

[0011] (3) In the notification device described in (1) or (2) above, the target component is a component of an irradiation unit constituting the X-ray analysis device, the irradiation unit includes an electron gun and a grounded anticathode, the electron gun includes an electron emitter and a Wehnelt electrode for electron collection, the Wehnelt electrode has a structure for applying a negative voltage that is larger than the negative voltage applied to the electron emitter, and the target component is any one of the electron emitter, the Wehnelt electrode, or the anticathode.

[0012] (4) Also, in the notification device described in (1) or (2) above, the target component is a filament, the measurement value is a current value of a filament current, and the state determination unit determines whether the current state of the target component is such that the replacement recommendation information should be notified based on whether the increase in the current value of the filament current exceeds a threshold value relative to the usage time of the filament.

[0013] (5) Also, in the notification device described in (1) or (2) above, the target part is a target, the measurement value is a current value of a motor current of the target, and the state determination unit determines whether the current state of the target part is such that the replacement recommendation information should be notified based on whether the time until the current value of the motor current is expected to exceed a threshold value is shorter than a predetermined time.

[0014] (6) Also, in the notification device described in (1) or (2) above, the target part is a target, the measurement value is a parameter related to the intensity of a diffraction peak obtained from the measurement results of a standard sample, and the state determination unit is characterized in that it determines whether the current state of the target part is such that the replacement recommendation information should be notified based on whether the value of the parameter related to the intensity of the diffraction peak exceeds a threshold value.

[0015] (7) Also, in the notification device described in (1) or (2) above, the target part is a shutter, the measurement value is the open time or closed time of the shutter, and the state determination unit determines whether the current state of the target part is such that the replacement recommendation information should be notified based on whether the time until the open time or closed time of the shutter is expected to exceed a threshold is shorter than a predetermined time.

[0016] (8) Furthermore, in the notification device described in (2) above, the stored judgment condition is whether or not the measurement value exceeds a threshold value, the measurement value is the usage time of the target part or an amount equivalent thereto, and the threshold value can be set to any one of a value obtained by multiplying a recommended value determined for each target part by a predetermined rate, a value obtained by multiplying the average value of the actual usage time of the target part by a predetermined value, or an arbitrary value.

[0017] (9) Furthermore, in the notification device described in any of (1) to (7) above, the replacement recommendation information is transmitted to the user via the user terminal by a pop-up display on the terminal or by email, or is transmitted to the maintenance worker via the worker terminal by email.

[0018] (10) Furthermore, in the notification device described in (8) above, the information storage unit stores the date and time when the replacement recommendation information is displayed, displays a re-notification period setting operation unit on the pop-up display screen, and after the replacement recommendation information is displayed, accepts input to the re-notification period setting operation unit, and if the re-notification conditions set by the re-notification period setting operation unit are met, the notification unit re-displays the replacement recommendation information.

[0019] (11) Furthermore, the notification method of the present invention is a notification method for notifying recommended replacement information for a part, and is characterized by including the steps of: storing measurement value information for a target part held by an X-ray analysis device; determining, from the measurement value information, whether the current state of the target part is in a state where replacement recommendation information recommending replacement of the target part should be notified; and notifying the recommended replacement information when it is determined that the current state of the target part is in a state where the replacement recommendation information should be notified.

[0020] (12) Furthermore, the notification program of the present invention is a notification program for notifying recommended replacement information for a part, and is characterized in that it causes a computer to execute the following processes: a process of storing measurement value information for a target part held by an X-ray analysis apparatus; a process of determining, from the measurement value information, whether the current state of the target part is in a state where replacement recommendation information recommending replacement of the target part should be notified; and a process of notifying the recommended replacement information when it is determined that the current state of the target part is in a state where the replacement recommendation information should be notified.

[0021] FIG. 1 is a schematic diagram showing the configuration of a notification system of a first embodiment; FIG. 2 is a block diagram showing the functional configuration of the notification system; FIG. 3 is a flowchart showing a notification method; FIG. 4 is a graph showing the relationship between a filament current value and usage time; FIG. 5 is a graph showing the relationship between a target motor current value and usage time; FIG. 6 is a graph showing the relationship between the number of shutter opening and closing times and the open time; FIG. 7 is a trend chart showing the relationship between usage time and diffraction peak information; FIG. 8 is a pop-up display showing a replacement recommendation notification; and FIG. 9 is a table showing a list of information to be notified to notification destinations. FIG. 10 is a schematic diagram showing the configuration of a notification system of a second embodiment.

[0022] Next, an embodiment of the present invention will be described with reference to the drawings. To facilitate understanding of the description, the same reference numerals are used to designate the same components in the drawings, and duplicated descriptions will be omitted.

[0023] [First embodiment] [Notification system] Fig. 1 is a schematic diagram showing the configuration of a notification system 10. Fig. 2 is a block diagram showing the functional configuration of the notification system 10. The notification system 10 includes an X-ray analysis apparatus 100 and a notification apparatus 200.

[0024] [X-ray analysis apparatus] The X-ray analysis apparatus 100 includes an irradiation unit 110 and a detection unit 120, and enables analysis of the sample S using X-rays by irradiating the sample S with X-rays and detecting the scattered X-rays. The irradiation unit 110 includes a filament 112, a target 115, and a shutter 117 as components. These components are target components, i.e., components for which replacement recommendation information is notified. Note that the target components are not limited to the components exemplified here.

[0025] The filament 112 is a cathode and is heated by passing an electric current through it. The target 115 is an anode. When a tube voltage is applied between the filament 112 and the target 115, negative thermoelectrons emitted from the filament 112 collide with the target 115 at high speed, generating X-rays. The target 115 is grounded and is a rotary type that changes the collision position of the thermoelectrons by rotating it, for example, with a motor, and is cooled by a refrigerant such as water. The shutter 117 opens and closes according to instructions to control the irradiation of the generated X-rays.

[0026] [Notification Device] The notification device 200 is configured by a computer having a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), and memory connected to a bus. The notification device 200 is connected to the X-ray analysis device 100, and functions as a control device or processing device that controls the X-ray analysis device 100 and processes measurement data. The notification device 200 receives from the X-ray analysis device 100 not only measurement results obtained by detecting scattered X-rays, but also information on measurement values ​​for components.

[0027] The notification device 200 may be a PC terminal or a server on the cloud. Furthermore, not only the entire device, but also some of the devices or some of the functions within the device may be provided on the cloud. For example, a control device attached to the X-ray analysis device 100 at the measurement site may have the function of determining whether or not to notify, and a PC terminal or mobile terminal in a room may have the function of notifying the user of the replacement recommendation information. In this case, the set of devices having the function can be called the notification device 200.

[0028] The notification device 200 includes a control unit 210, a measurement data storage unit 220, an information storage unit 230, a selection unit 235, a state determination unit 240, and a notification unit 250, and notifies a user or a maintenance worker of part replacement recommendation information. Notification of the replacement recommendation information facilitates replacement management of parts of the X-ray analysis device 100. It also saves the maintenance worker the trouble of calculating the next part to be replaced based on the current usage time. It also prevents the waste of replacing parts that are still usable once the time or number of times reaches a predetermined value, allowing parts to be used to the end of their lifespan. It also prevents device downtime due to unexpected part failure.

[0029] Each unit can send and receive information via a control bus L. The input device 310 and output device 320 are connected to the CPU via an appropriate interface. The input device 310 is, for example, a keyboard or a mouse, and receives selections and specifications from the user, and inputs them to the notification device 200. The output device 320 is, for example, a display, and can display replacement recommendation information and a setting UI.

[0030] The control unit 210 controls the operation of the X-ray analysis apparatus 100. The control unit 210 also acquires measurement values ​​of each component from the X-ray analysis apparatus 100 and stores them in the information storage unit 230. The measurement data storage unit 220 stores the measurement data acquired from the X-ray analysis apparatus 100. Information required for analyzing the measurement data may be included together with the measurement data.

[0031] The information storage unit 230 stores information on measurement values ​​for components of the irradiation unit 110 of the X-ray analysis apparatus 100. The measurement values ​​include a filament current value relative to the usage time of the filament, a target motor current value relative to the usage time of the target, and a shutter open time or shutter close time relative to the number of shutter opening and closing times. The information storage unit 230 may store a plurality of different determination conditions for notifying replacement recommendation information.

[0032] The selection unit 235 selects one judgment condition for the part from among a plurality of judgment conditions stored in the information storage unit 230. The selection of the judgment condition can be performed based on a user instruction. The judgment condition may be presented to the user or determined automatically according to the measurement value information.

[0033] The state determination unit 240 determines whether the current state of a component should be notified of replacement recommendation information based on, for example, measurement value information as a determination condition. For example, for a component such as a filament, the state determination unit 240 determines that the component is in a normal state if the measurement value is within a normal range and follows a normal trend, and determines that the component is showing signs of abnormality if the measurement value is not in a normal trend. The state determination unit 240 can determine whether the measurement value matches the determination condition selected by the selection unit 235.

[0034] In this case, it may also be determined whether the duration of the abnormal symptom exceeds a threshold value. Based on the result, the state determination unit 240 can determine whether the current state of the part is such that replacement recommendation information should be notified. Note that even if a part is in a state where an abnormal symptom is being displayed, it may soon return to a normal state. Therefore, it is preferable to set the threshold value to a time period after which it is safe to assume that the part will not return to a normal state.

[0035] The state determination unit 240 may determine whether the current state of a component warrants notification of replacement recommendation information based on whether the time until the measurement value is expected to exceed the alarm threshold is shorter than a predetermined time, as a determination condition. For specific components such as targets and shutters, the relationship between time or the number of uses and the measurement value can be approximated by a curve called a life curve. The state determination unit 240 may calculate the life curve and extrapolate the life curve to calculate the time when the measurement value will exceed the threshold. If the time until that time is shorter than a predetermined time, the state determination unit 240 determines that the current state of the component warrants notification of replacement recommendation information.

[0036] The state determination unit 240 may determine whether a measurement value exceeds a threshold value as a determination condition. In this case, for example, the measurement value is the usage time of the part or an amount equivalent thereto, and the threshold value can be set to any one of a value obtained by multiplying a recommended value determined for each part by a predetermined rate, a value obtained by multiplying the average value of the actual usage time of the part by a predetermined value, or an arbitrary value.

[0037] Furthermore, if the current measurement value of a part exceeds the alarm threshold and is not within a normal range, the state determination unit 240 determines that the part is in an alarm state, meaning that it could break down at any time. Alternatively, AI may determine that it is time to recommend replacement based on the current state of the part.

[0038] The notification unit 250 notifies the user of replacement recommendation information recommending part replacement when it is determined that predetermined conditions are met. Specifically, the notification is made by displaying the replacement recommendation information on the output device 320. The notification unit 250 can send the replacement recommendation information to the user terminal by email or a pop-up display on the terminal, or can send it to the maintenance worker by email. Furthermore, if a re-notification period is set, the replacement recommendation information can be re-displayed on the display unit when the re-notification conditions are met.

[0039] [Notification Method] Next, a notification method using the notification system 10 configured as described above will be described. Fig. 3 is a flowchart showing the notification method. First, information on the measurement values ​​of the component is stored (step S1). Based on the obtained information, the current state of the component is determined (step S2).

[0040] Then, it is determined whether the current state of the determined part requires notification of replacement recommendation information (step S3). If it is determined that notification is not required, the process returns to step S1. If it is determined that notification is required, the part replacement recommendation information is notified to the user (step S4). This facilitates replacement management of parts of the irradiation unit 110 of the X-ray analysis apparatus 100. Specific examples of each part are described below.

[0041] [Replacing the Filament] If the component for which a replacement recommendation is to be sent is a filament, the current value of the filament current can be used as a measurement value to determine the current state of the component. Figure 4 is a graph showing the relationship between the filament current value and the usage time.

[0042] As shown in Figure 4, under normal conditions with no abnormal signs, the filament current gradually decreases as the X-ray analysis device 100 continues to be used. When the filament is heated in a vacuum, its material (tungsten) evaporates and it gradually becomes thinner. This means that less filament current is required to generate the necessary tube current from thermions. As a result, the filament current decreases.

[0043] The decrease in the filament current value with increasing usage time is generally uniform and can be approximated by a curve. However, at a certain point just before the filament breaks, the current value increases significantly. If a small portion of the filament suddenly thins just before it breaks, the balance between the filament current and thermions is lost and a reversal occurs. In other words, as the filament thins, its surface area decreases, making it necessary to increase the filament temperature, which causes an increase in the filament current. By detecting these abnormal signs, it is possible to notify the user of a replacement recommendation before the part fails.

[0044] For example, if the time period during which the filament current value increases relative to the filament usage time exceeds a threshold, the user can be notified of recommended filament replacement. The threshold for determining abnormality signs relative to a predetermined time period can be set to, for example, between 30 minutes and 5 hours. This makes it possible to reliably detect an increase in the current value immediately before the filament breaks. In this way, the user can be notified of recommended filament replacement before the filament breaks, allowing them to replace the filament with ample time to spare.

[0045] The sampling period for the filament current can be about one minute. Filament current data can be acquired at one-minute intervals, and if the trend of the moving average starts to rise and continues for a predetermined period of time, it can be determined to be an abnormality. It is also possible to approximate the relationship between usage time and filament current value with a curve, estimate the time when an abnormality will occur, and notify the user before that time.

[0046] [Target Replacement] When the component for which a replacement recommendation is issued is a target, the current value of the target's motor current can be measured to determine the component's current condition. Figure 5 is a graph showing the relationship between the target's motor current value and usage time. Due to copper deposition on the target cup water-cooled surface and wear on the bearings and mechanical seals, the motor current value over usage time generally shows an upward trend.

[0047] An approximation curve is calculated for the relationship between usage time and the motor current value from the increase in the target motor current over a certain period of time. Then, the life curve is extrapolated to calculate the point in time at which the current value will exceed the alarm threshold. If the time until that point is less than a predetermined time, the current condition of the part is determined to be such that a replacement recommendation notification should be issued. In this case, the replacement recommendation notification can be sent to the user.

[0048] The threshold value can be set to, for example, a current value between 10 A and 20 A. This makes it possible to detect the motor current value just before a failure occurs due to copper deposition or friction. The user can be notified of recommended replacement before the target fails.

[0049] [Shutter Replacement] When the part for which the replacement recommendation notification is sent is a shutter, the current state of the part can be determined using the open or closed time of the shutter as a measured value. Fig. 6 is a graph showing the relationship between the number of times the shutter is opened and closed and the open or closed time.

[0050] An approximation curve is calculated for the relationship between the number of times the shutter is opened and closed and the open or closed time of the shutter from the time transition from the closed state to the open state per fixed time, or from the time transition from the open state to the closed state per fixed time.Then, the life curve is extrapolated to calculate the time when the current value will exceed the alarm threshold.If the time until that time is less than a predetermined time, the current state of the part is determined to be such that a replacement recommendation notification should be issued.In that case, the replacement recommendation information can be notified to the user.

[0051] The alarm threshold can be set to, for example, a time between 30 ms and 1000 ms. This allows for the detection of signs of shutter failure, such as the tendency for the shutter's open or closed time to become longer due to deterioration or wear of the moving parts. As a result, the user can be notified of the shutter's recommended replacement before it fails.

[0052] Note that the increase in shutter opening and closing time due to typical deterioration, such as deterioration of the rotary solenoid bearings and springs, is very gradual. Therefore, simply opening and closing one million times does not significantly increase the opening and closing time, and does not exceed the alarm threshold. Rather, the major factors are oxidation of oil, etc. over time, and corrosion of metals due to X-rays and the ozone or nitric acid generated by them. If these products enter and clog the rotating or sliding parts, the shutter's movement gradually slows. Therefore, the shutter's opening and closing time increases very slowly with the number of openings and closings, and then suddenly increases at a certain point. The life curve can be estimated from the trend of this sudden increase.

[0053] The current condition of a component can be determined by measuring diffraction peak information obtained from the results of measuring a standard sample using an X-ray analyzer. The diffraction peak information includes, for example, the position, intensity, and half-width values ​​obtained from a peak at a specific diffraction position. It is preferable to use a sample such as silicon powder or alumina powder, whose measurement results do not change over time, as the standard sample. Figure 7 is a trend chart showing the relationship between usage time and diffraction peak information. The diffraction peak information is obtained from the measurement results using silicon powder as the standard sample. In the example display of Figure 7, the changes in the diffraction intensity of Si(220), Si(511 / 333), and Si(620) are plotted against the measurement date.

[0054] The notification device 200 stores diffraction peak information obtained from measurements of the standard sample under the same conditions as on the measurement date. The diffraction peak information may be, for example, the position, intensity, or half-width value for each specific diffraction position. The notification device 200 then pre-sets a threshold value for each parameter, and when the stored value exceeds the threshold, it determines that the current state of the part is such that a replacement recommendation notification should be issued. Alternatively, the notification device 200 may calculate the average and variance of peak information from multiple measurement dates as values ​​used for the determination, and determine whether the average and variance fall within the range of upper and lower threshold values.

[0055] For example, if the part for which a replacement recommendation is issued is a target, diffraction measurements can be performed using alumina powder as a standard sample, and the current condition of the part can be determined using the integrated peak intensity as a measurement value. The intensity of the diffraction peaks tends to decrease as the target deteriorates, making it possible to detect signs of target deterioration. As a result, the user can be notified of the recommended replacement before a decrease in intensity occurs that would affect the accuracy of the analysis.

[0056] [Transmission of Information to User] The replacement recommendation information is preferably transmitted to the user via the user terminal by a pop-up display on the terminal or by email, or to the maintenance worker via the worker terminal by email.

[0057] FIG. 8 shows a pop-up display 400 displaying a replacement recommendation notification. In the example display of FIG. 8, the recommended replacement time for the filament is 2000 hours, but the usage time has reached 1600, indicating that the time for replacement is approaching. As shown in the example display, the replacement recommendation information may be notified for an ion gauge, which is a pressure gauge. In the lower part of the pop-up display, re-notification time options and an OK button are displayed as a re-notification period setting operation unit 410. In the example display of FIG. 8, "1 day later" is displayed as an option for the re-notification time, and pressing the OK button in this state will result in a re-notification being made one day later.

[0058] 9 is a table showing a list of information to be notified to the notification destination. In the list in FIG. 9, the notification type is part replacement, additional information 1 is the device serial number, additional information 2 is the date and time of the notification information, additional information 3 is the name of the maintenance part, and additional information 4 is the part usage time. For example, this information is written in an email document. The subject of the email can be set separately to any subject, and the information is notified together as follows:

[0059] Notification type: Parts Replacement Device serial number: BD74999999-01 Date and time of occurrence: 2023 / 02 / 21 18:13:03 Maintenance part name: Target Part usage time: 8000h

[0060] When communicating information to the user through such a display, the replacement recommendation information may be displayed again on the display unit when the re-notification condition is met, thereby preventing equipment downtime caused by a sudden part failure due to missing the replacement period.

[0061] The notification device 200 stores the date and time when the replacement recommendation information was displayed in the information storage unit 230. When re-displaying the information, a re-notification period setting button is displayed on the pop-up display screen. After the replacement recommendation information is displayed, the notification unit 250 accepts input to the re-notification period setting button, and when the re-notification conditions set by the re-notification period setting button are met, the notification unit 250 can re-display the replacement recommendation information on the display unit of the output device 320.

[0062] To re-display the information, the time elapsed until the current time is calculated based on the date and time when the replacement recommendation information was displayed.Then, the period set using the re-notification period setting button (for example, one day, one week, or one month later) is used as the threshold.For example, the re-notification condition can be set to re-display when the elapsed time exceeds the threshold.

[0063] [Adjustment of Notification Timing] The timing of notification of the replacement recommendation information for each of the above components can be adjusted by the user. For example, the notification may be made a predetermined time after the abnormality symptom of the filament is confirmed. In addition, for the target and shutter, the notification timing can be adjusted by adjusting the predetermined time until the alarm threshold is reached.

[0064] [Use of AI] The recommended replacement time may be predicted using an AI function, such as a machine learning model. For example, a machine learning model configured with a neural network consisting of an input layer, an intermediate layer, and an output layer can be used. In this case, the machine learning model learns from accumulated measurement values, replacement history data, and failure data as training data. Data on the transition of filament current values ​​and the time at which a failure occurs can be used as training data.

[0065] For example, the weights of each neuron in the intermediate layer are tuned by repeatedly learning the input of the transition of the filament current value so that the output layer outputs the correct time of failure with a high probability. In this case, a convolutional neural network can be used to roughly recognize the target. This makes it possible to determine whether or not to notify a replacement recommendation by inputting data on the transition of the filament current value and the time of failure into the machine learning model without using any special parameters.

[0066] In this way, a machine learning model can be constructed that outputs the timing of failure and the recommended replacement time in response to the input of component measurement values, enabling more accurate notification of component replacement recommendations.

[0067] [Second embodiment] In the above embodiment, the X-ray analysis device 100 in which the irradiation unit 110 is composed of the filament 112, the target 115, and the shutter 117 is given as an example of a device that is subject to part replacement, but the irradiation unit may have a different configuration.

[0068] Fig. 10 is a schematic diagram showing the configuration of the notification system 510. Fig. 2 is a block diagram showing the functional configuration of the notification system 10. The notification system 510 includes an X-ray analysis device 600 and a notification device 200. The X-ray analysis device 600 includes an irradiation unit 610 and a detection unit 120, and enables analysis of the sample S using X-rays by irradiating X-rays onto the sample S and detecting the scattered X-rays.

[0069] The irradiation unit 610 includes an electron gun 612, an anode-grounded rotating anode unit 615, a rotor 616, and a shutter 117. The electron gun 612 includes an electron emitter 612a and a Wehnelt electrode 612b for electron collection. The electron gun 612 is configured such that a negative voltage (bias voltage) greater than the negative voltage applied to the electron emitter 612a is applied to the Wehnelt electrode 612b. The rotating anode unit 615 is connected to the rotor 616 and rotates as the rotor 616 rotates.

[0070] For the X-ray analysis apparatus 600 configured in this manner, the notification device 200 can also receive information on measurement values ​​for components of the X-ray analysis apparatus 600 and notify the user of component replacement recommendation information. In this case, the electron gun 612 and the rotating anode unit 615 correspond to the filament 112 and the target 115, respectively. The notification device 200 can also notify the user of component replacement recommendation information for the electron gun 612 and the rotating anode unit 615, in the same way as for the filament 112 and the target 115.

[0071] In addition, this application claims priority based on Japanese Patent Application No. 2024-59545 filed on April 2, 2024, and the entire contents of Japanese Patent Application No. 2024-59545 are incorporated by reference into this application.

[0072] REFERENCE SIGNS LIST 10 Notification system (first embodiment) 100 X-ray analysis apparatus (first embodiment) 110 Irradiation unit (first embodiment) 112 Filament 115 Target 117 Shutter 120 Detection unit 200 Notification device 210 Control unit 220 Measurement data storage unit 230 Information storage unit 235 Selection unit 240 Status determination unit 250 Notification unit 310 Input device 320 Output device 400 Pop-up display 410 Re-notification period setting operation unit 510 Notification system (second embodiment) 600 X-ray analysis apparatus (second embodiment) 610 Irradiation unit (second embodiment) 612 Electron gun 612a Electron emission unit 612b Wehnelt electrode 615 Rotating anode unit 616 Rotor L Control bus S Sample

Claims

1. A notification device that notifies recommended replacement information for a part, comprising: an information storage unit that stores measurement value information for a target part of an X-ray analysis device; a state determination unit that determines, from the measurement value information, whether the current state of the target part is in a state where replacement recommendation information recommending replacement of the target part should be notified; and a notification unit that notifies the replacement recommendation information when it is determined that the current state of the target part is in a state where replacement recommendation information should be notified.

2. The notification device described in claim 1, characterized in that the information storage unit further stores a plurality of different judgment conditions for notifying the replacement recommendation information, the notification device further has a selection unit that selects one judgment condition from the plurality of judgment conditions stored in the information storage unit for the target part, and the status judgment unit determines whether the measurement value matches the selected judgment condition.

3. The notification device according to claim 1 or claim 2, characterized in that the target part is a part of an irradiation part constituting the X-ray analysis device, the irradiation part comprises an electron gun and a grounded anticathode part, the electron gun comprises an electron emitting part and a Wehnelt electrode for electron collection, the Wehnelt electrode has a structure for applying a negative voltage that is larger than the negative voltage applied to the electron emitting part, and the target part is any one of the electron emitting part, the Wehnelt electrode or the anticathode part.

4. The notification device according to claim 1 or claim 2, characterized in that the target component is a filament, the measurement value is the current value of the filament current, and the status determination unit determines whether the current status of the target component is such that the replacement recommendation information should be notified based on whether the increase in the current value of the filament current over the usage time of the filament exceeds a threshold value.

5. The notification device according to claim 1 or claim 2, characterized in that the target part is a target, the measurement value is the current value of the motor current of the target, and the state determination unit determines whether the current state of the target part is such that the replacement recommendation information should be notified based on whether the time until the current value of the motor current is expected to exceed a threshold value is shorter than a predetermined time.

6. The notification device according to claim 1 or claim 2, characterized in that the target part is a target, the measurement value is a parameter related to the intensity of a diffraction peak obtained from the measurement results of a standard sample, and the state determination unit determines whether the current state of the target part is such that the replacement recommendation information should be notified based on whether the value of the parameter related to the intensity of the diffraction peak exceeds a threshold value.

7. The notification device according to claim 1 or claim 2, characterized in that the target part is a shutter, the measurement value is the open time or closed time of the shutter, and the state determination unit determines whether the current state of the target part is such that the replacement recommendation information should be notified based on whether the time until the open time or closed time of the shutter is expected to exceed a threshold is shorter than a predetermined time.

8. The notification device according to claim 2, characterized in that the stored judgment condition is whether or not the measurement value exceeds a threshold value, the measurement value being the usage time of the target part or an amount equivalent thereto, and the threshold value can be set to one of a value obtained by multiplying a recommended value determined for each target part by a predetermined rate, a value obtained by multiplying the average value of the actual usage time of the target part by a predetermined value, or an arbitrary value.

9. A notification device as described in claim 1 or claim 2, characterized in that the replacement recommendation information is communicated to the user via a user terminal by a pop-up display on the terminal or by email, or to a maintenance worker via a worker terminal by email.

10. The notification device of claim 9, characterized in that the information storage unit stores the date and time when the replacement recommendation information was displayed, a re-notification period setting operation unit is displayed on the pop-up display screen, and the notification unit accepts input to the re-notification period setting operation unit after the replacement recommendation information is displayed, and if the re-notification conditions set by the re-notification period setting operation unit are met, the notification unit re-displays the replacement recommendation information.

11. A notification method for notifying recommended replacement information for a part, comprising: a step of storing measurement value information for a target part held by an X-ray analysis device; a step of determining from the measurement value information whether the current state of the target part is in a state where replacement recommendation information recommending replacement of the target part should be notified; and a step of notifying the recommended replacement information when it is determined that the current state of the target part is in a state where replacement recommendation information should be notified.

12. A notification program for notifying recommended replacement information for a part, characterized in that the notification program causes a computer to execute the following processes: a process for storing measurement value information for a target part held by an X-ray analysis device; a process for determining, from the measurement value information, whether the current state of the target part is such that replacement recommendation information recommending replacement of the target part should be notified; and a process for notifying the recommended replacement information when it is determined that the current state of the target part is such that replacement recommendation information should be notified.

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