Method for manufacturing probe

Abstract

This method for manufacturing a probe involves: preparing a first metal plate (111) in which first diagonal beams (1211) extending in a first intersecting direction are arranged, a second metal plate (112) in which parallel beams (1212) are arranged in two rows at the intervals of the first diagonal beams (1211), and a third metal plate (113) in which second diagonal beams (1213) extending in a second intersecting direction symmetrical to the first intersecting direction are arranged; and layering the first metal plate (111), the second metal plate (112), and the third metal plate (113) sequentially. An end portion of the first diagonal beam (1211) and an end portion of the second diagonal beam (1213) are connected via the parallel beam (1212) to configure a spring portion (12) that includes a coil spring portion (121) in which the first diagonal beam (1211), the parallel beam (1212), and the second diagonal beam (1213) are connected sequentially.

Description

Probe manufacturing method

[0001] The present invention relates to a method for manufacturing a probe used for inspecting electrical characteristics of an object to be inspected.

[0002] An electrical connection device including a probe is used to test the electrical characteristics of a test object such as a semiconductor integrated circuit in a wafer state. In a test using a probe, one end of the probe contacts an electrode of the test object, and the other end of the probe contacts a terminal (hereinafter also referred to as a "land") arranged on a substrate included in the electrical connection device. The land is electrically connected to a tester or other test device.

[0003] In order to accurately test the electrical characteristics of a test object, it is necessary to establish a stable electrical connection between the test object and the land via a probe. For this reason, when the probe itself does not have axial elasticity, a method is adopted in which the probe is held in a curved state by the probe head of an electrical connection device. By pressing the curved probe against the test object and further bending the probe using overdrive, the elasticity of the probe can be used to stably contact the test object and the land.

[0004] JP 2018-4260 A

[0005] However, in an electrical connection device that holds probes in a curved state, when it becomes necessary to replace a probe, the probe held by the probe head must be returned from the curved state to a straight state and then removed from the probe head, which makes probe replacement time-consuming.

[0006] In contrast, if the probe is axially expandable, it is not necessary to hold the probe in a curved state in the electrical connecting device. An object of the present invention is to provide a method for manufacturing a probe that is axially expandable.

[0007] A method for manufacturing a probe according to one aspect of the present invention includes stacking a first metal plate, a second metal plate, and a third metal plate. The first metal plate has first diagonal beams arranged in a first intersecting direction. The second metal plate has parallel beams arranged in two rows at intervals equal to the length of the first diagonal beams. The third metal plate has second diagonal beams arranged in a second intersecting direction symmetrical to the first intersecting direction. By stacking the first metal plate, the second metal plate, and the third metal plate in this order, ends of the first diagonal beams and ends of the second diagonal beams are connected via the parallel beams, thereby forming a spring portion including a coil spring portion in which the first diagonal beams, the parallel beams, and the second diagonal beams are sequentially connected.

[0008] According to the present invention, a method for manufacturing a probe that expands and contracts in the axial direction can be provided.

[0009] FIG. 1 is a schematic side view showing the configuration of a probe according to the first embodiment. FIG. 2 is a schematic plan view showing the configuration of the probe according to the first embodiment. FIG. 3 is a schematic view showing a first metal plate constituting the probe shown in FIG. 1. FIG. 4 is a schematic view showing a second metal plate constituting the probe shown in FIG. 1. FIG. 5 is a schematic view showing a third metal plate constituting the probe shown in FIG. 1. FIG. 6 is a schematic view showing the configuration of a coil spring portion of the probe according to the first embodiment. FIG. 7 is a schematic perspective view showing the coil spring portion of the probe according to the first embodiment. FIG. 8 is a schematic view showing a fourth metal plate constituting the probe shown in FIG. 1. FIG. 9 is a schematic view showing the connection between the tip end of the probe shown in FIG. 1 and a columnar member. FIG. 10 is a schematic view showing the connection between the coupling portion of the probe shown in FIG. 1 and a columnar member. FIG. 11 is a schematic view showing the shape of each line of the coil spring portion of the probe according to the first embodiment. FIG. 12 is a schematic view showing the configuration of a substrate used in manufacturing the probe according to the first embodiment. FIG. 13 is a schematic view showing the configuration of a probe according to a second embodiment. FIG. 14 is a schematic diagram showing a first metal plate constituting the probe shown in FIG. 13 . FIG. 15 is a schematic diagram showing a second metal plate constituting the probe shown in FIG. 13 . FIG. 16 is a schematic diagram showing a third metal plate constituting the probe shown in FIG. 13 . FIG. 17 is a schematic diagram showing a fourth metal plate constituting the probe shown in FIG. 13 . FIG. 18 is a schematic diagram showing a method of connecting columnar members of the probe shown in FIG. 13 . FIG. 19 is a schematic diagram showing a first metal plate constituting a probe according to a modified example of the second embodiment. FIG. 20A is a schematic side view of the first metal plate shown in FIG. 19 . FIG. 20B is a schematic perspective view of the first metal plate shown in FIG. 19 . FIG. 21 is a schematic diagram showing a second metal plate constituting a probe according to a modified example of the second embodiment. FIG. 22A is a schematic side view of the second metal plate shown in FIG. 21 . FIG. 22B is a schematic perspective view of the second metal plate shown in FIG. 21 . Fig. 23 is a schematic diagram showing a third metal plate constituting a probe according to a modified example of the second embodiment. Fig. 24A is a schematic side view of the third metal plate shown in Fig. 23. Fig. 24B is a schematic perspective view of the third metal plate shown in Fig. 23. Fig. 25 is a schematic perspective view of a fourth metal plate constituting a probe according to a modified example of the second embodiment.Fig. 26 is a schematic diagram showing a pattern of a metal plate formed on a substrate. Fig. 27 is a schematic cross-sectional view showing an example of an opening shape of a coupling portion of a probe according to another embodiment. Fig. 28 is a schematic cross-sectional view showing another example of an opening shape of a coupling portion of a probe according to another embodiment.

[0010] Next, embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, identical or similar parts are designated by identical or similar reference numerals. However, it should be noted that the drawings are schematic, and the thickness ratios of the various parts may differ from those in reality. Furthermore, it goes without saying that the dimensional relationships and ratios of parts included in the drawings may differ from one another. The embodiments shown below exemplify devices and methods for embodying the technical ideas of the present invention, and the materials, shapes, structures, and arrangements of the components of the embodiments of the present invention are not limited to those described below.

[0011] (First Embodiment) A probe 10 according to a first embodiment shown in Fig. 1 is used to test the electrical characteristics of a test object. A tip portion 11 that contacts the test object is disposed at one axial end of the probe 10, and a base portion 13 that contacts a land is disposed at the other axial end. In the probe 10, a plurality of elastic coil spring portions 121 are connected along the axial direction between the tip portion 11 and the base portion 13 via inelastic connecting portions 122. Hereinafter, the portion located between the tip portion 11 and the base portion 13 and including the coil spring portions 121 and the connecting portions 122 will be referred to as the spring portion 12.

[0012] The probe 10 has a columnar shape with a tip end 11 and a base end 13 at both ends. The left-right direction in FIG. 1 is the first direction (X direction), the up-down direction in FIG. 1 is the second direction (Z direction), and the depth direction in FIG. 1 is the third direction (Y direction). The axial direction of the probe 10 is the Z direction. The Y direction is perpendicular to both the X and Z directions. The plane defined by the X and Z directions perpendicular to the X direction is also referred to as the "XZ plane." The direction in which the tip end 11 is located as viewed from the base end 13 along the Z direction is referred to as the upper side, and the direction in which the base end 13 is located as viewed from the tip end 11 is referred to as the lower side. The upward-facing surface of each part of the probe 10 is referred to as the top surface, the downward-facing surface is referred to as the bottom surface, and the surface connecting the top and bottom surfaces is referred to as the side surface.

[0013] 1 has four coil spring portions 121 connected via connecting portions 122 from the distal end portion 11 toward the proximal end portion 13. Although FIG. 1 exemplifies a case in which the number of coil spring portions 121 included in the probe 10 is four, the number of coil spring portions 121 included in the probe 10 can be set arbitrarily.

[0014] As shown in FIG. 2 , the probe 10 has a rectangular shape having four side faces when viewed in the axial direction. A side face viewed in the Y direction is referred to as a first side face 101, and a side face facing opposite the first side face 101 is referred to as a second side face 102. A side face viewed in the X direction is referred to as a third side face 103, and a side face facing opposite the third side face 103 is referred to as a fourth side face 104. As will be described later, the probe 10 is configured by stacking a first metal plate 111, a second metal plate 112, and a third metal plate 113. As shown in FIG. 2 , the first side face 101 is the surface of the first metal plate 111, the second side face 102 is the surface of the third metal plate 113, and the third side face 103 and the fourth side face 104 are the surfaces of the second metal plate 112.

[0015] A method for manufacturing the probe 10 using the first metal plate 111 shown in Fig. 3, the second metal plate 112 shown in Fig. 4, and the third metal plate 113 shown in Fig. 5 will be described below. In the following, the first metal plate 111, the second metal plate 112, and the third metal plate 113 will be referred to as metal plates unless otherwise specified.

[0016] 3 , the first metal plate 111 includes a first extensible portion 1201 in which a plurality of first diagonal beams 1211 extending in a first intersecting direction that obliquely intersects both the X direction and the Z direction in the XZ plane are arranged along the Z direction. The first metal plate 111 may include a plurality of first extensible portions 1201.

[0017] The first metal plate 111 has a plate-shaped first tip portion 1101 arranged at one end in the Z direction and a plate-shaped first base portion 1301 arranged at the other end in the Z direction. Furthermore, the first metal plate 111 includes plate-shaped first connecting portions 1221 arranged between the first expandable portions 1201. The first metal plate 111 shown in FIG. 3 includes four first expandable portions 1201 with the first connecting portions 1221 sandwiched between them.

[0018] 4 , the second metal plate 112 includes a second expandable portion 1202 in which a plurality of parallel beams 1212 extending in the Y direction are arranged along the Z direction. The parallel beams 1212 are arranged in two rows at intervals equal to the length of the first diagonal beams 1211 along the X direction. The second metal plate 112 may include a plurality of second expandable portions 1202.

[0019] The second metal plate 112 has a plate-shaped second tip portion 1102 arranged at one end in the Z direction and a plate-shaped second base portion 1302 arranged at the other end in the Z direction. Furthermore, the second metal plate 112 includes plate-shaped second connecting portions 1222 arranged between the second expandable portions 1202. The second metal plate 112 shown in FIG. 4 includes four second expandable portions 1202 with second connecting portions 1222 sandwiched between them.

[0020] 5 , the third metal plate 113 includes a third expandable portion 1203 in which a plurality of second diagonal beams 1213 are arranged along the Z direction in the XZ plane. The second diagonal beams 1213 extend in a second intersecting direction symmetrical to the first intersecting direction with the Z direction as the axis of symmetry. The length of the second diagonal beams 1213 along the X direction is the same as that of the first diagonal beams 1211. In other words, the third metal plate 113 has a mirror image of the first metal plate 111. The third metal plate 113 may include a plurality of third expandable portions 1203.

[0021] The third metal plate 113 has a plate-shaped third tip portion 1103 arranged at one end in the Z direction and a plate-shaped third base portion 1303 arranged at the other end in the Z direction. Furthermore, the third metal plate 113 includes plate-shaped third connecting portions 1223 arranged between the third expandable portions 1203. The third metal plate 113 shown in Fig. 5 includes four third expandable portions 1203 with the third connecting portions 1223 sandwiched between them.

[0022] In manufacturing the probe 10, a first metal plate 111, a second metal plate 112, and a third metal plate 113 are prepared. Next, the third metal plate 113, the second metal plate 112, and the first metal plate 111 are stacked in order in the Y direction (third direction). At this time, an end of the first diagonal beam 1211 and an end of the second diagonal beam 1213 are connected via the parallel beam 1212, thereby forming a spring portion 12 including a coil spring portion 121 in which the first diagonal beam 1211, the parallel beam 1212, and the second diagonal beam 1213 are sequentially connected. In other words, the first telescopic portion 1201, the second telescopic portion 1202, and the third telescopic portion 1203 are connected to form one coil spring portion 121. Hereinafter, when the first telescopic portion 1201, the second telescopic portion 1202, and the third telescopic portion 1203 are not limited, they will be referred to as telescopic portions.

[0023] Furthermore, by stacking the third metal plate 113, the second metal plate 112, and the first metal plate 111 in this order in the Y direction, the tip portion 11 of the probe 10 is formed in which the third tip portion 1103, the second tip portion 1102, and the first tip portion 1101 are stacked. At the same time, the base portion 13 of the probe 10 is formed in which the third base portion 1303, the second base portion 1302, and the first base portion 1301 are stacked.

[0024] Furthermore, by stacking the third metal plate 113, the second metal plate 112, and the first metal plate 111 in this order in the Y direction, the connecting portion 122 of the probe 10 is formed, in which the third connecting portion 1223, the second connecting portion 1222, and the first connecting portion 1221 are stacked. This forms the spring portion 12 in which a plurality of elastic coil spring portions 121 are connected along the axial direction via the inelastic connecting portions 122.

[0025] The first metal plate 111, the second metal plate 112, and the third metal plate 113 may be bonded to each other using a diffusion bonding method or a bonding material. When using the diffusion bonding method, since bonding dissimilar metals poses many technical challenges, a metal that is easy to diffusion bond, such as gold (Au), may be vapor-deposited on the front and back of each metal plate. Because diffusion bonding between Au is relatively easy, bonding is possible even if the metal plates are dissimilar metals.

[0026] FIG. 6 shows the configuration of the coil spring portion 121. The first metal plate 111 appearing on the first side surface 101 includes a first diagonal beam 1211 extending from the upper left to the lower right of the drawing when viewed in the normal direction of the first side surface 101. The third metal plate 113 appearing on the second side surface 102 includes a second diagonal beam 1213 extending from the upper right to the lower left of the drawing when viewed in the normal direction of the first side surface 101. In other words, the first diagonal beam 1211 of the first metal plate 111 and the second diagonal beam 1213 of the third metal plate 113 are arranged symmetrically with respect to the central axis of the probe 10. As shown in FIG. 6, the coil spring portion 121 has a double helix structure. FIG. 7 shows a perspective view of the coil spring portion 121.

[0027] 1 further includes a plurality of pillar members 114A arranged inside the coil spring portion 121. The pillar members 114A bridge between the tip end portion 11 and the connecting portion 122, between the two connecting portions 122, and between the base end portion 13 and the connecting portion 122. The pillar members 114A are conductive, and the tip end portion 11 and the base end portion 13 are electrically connected via the pillar members 114A and the connecting portions 122.

[0028] For example, the columnar member 114A bridges the tip portion 11 with a connecting portion 122 that connects to one end of a coil spring portion 121 that has the other end connected to the tip portion 11. This electrically connects the tip portion 11 with the connecting portion 122 that is closest to the tip portion 11.

[0029] Furthermore, the columnar member 114A bridges the base end portion 13 with a connecting portion 122 that connects to one end of the coil spring portion 121, the other end of which is connected to the base end portion 13. This electrically connects the base end portion 13 with the connecting portion 122 that is closest to the base end portion 13.

[0030] Furthermore, the columnar member 114A bridges two connecting portions 122 that are respectively connected to both ends of one coil spring portion, thereby electrically connecting the two connecting portions 122 together.

[0031] In manufacturing the probe 10 including the columnar members 114A, the columnar members 114A are disposed inside the spring portions 12 before the first metal plate 111 is laminated on the second metal plate 112. Specifically, before the first metal plate 111 is laminated on the second metal plate 112, the fourth metal plate 114 shown in FIG. 8 is disposed on the second metal plate 112. The fourth metal plate 114 has a configuration in which a plurality of columnar members 114A extending in the Z direction are arranged along the Z direction. In this way, the probe 10 in which the columnar members 114A are disposed inside the spring portions 12 is manufactured.

[0032] For example, one end of each of the columnar members 114A is fixed to any one of the second tip portion 1102, the second connecting portion 1222, and the second base end portion 1302. Then, a recess into which the other end of each of the columnar members 114A is inserted when the spring portion 12 contracts in the axial direction is formed in any one of the second tip portion 1102, the second connecting portion 1222, and the second base end portion 1302.

[0033] 9 , for example, a columnar member 114A disposed inside the coil spring portion 121 has a first end portion facing a first opening 110 formed in the lower surface of the tip portion 11, and a second end portion connected to the upper surface of the connecting portion 122. When the coil spring portion 121 expands or contracts, the first end portion of the columnar member 114A slides inside the first opening 110.

[0034] 10 , the columnar member 114A disposed inside the coil spring portion 121 has a first end facing a second opening 120 formed in the lower surface of one of the connecting portions 122, and a second end connected to the upper surface of the other connecting portion 122. When the coil spring portion 121 expands or contracts, the first end of the columnar member 114A slides inside the second opening 120.

[0035] As described above, when the coil spring portion 121 expands and contracts, the end of the columnar member 114A slides inside the first opening 110 and the second opening 120. Therefore, even if the probe 10 expands and contracts in the axial direction, the columnar member 114A does not bend and become exposed outside the coil spring portion 121.

[0036] The thickness of the parallel beams 1212 in the Y direction, in other words, the thickness of the second metal plate 112 in the Y direction, is set to be thicker than the thickness of the columnar member 114A in the Y direction. The thicker the second metal plate 112, the thicker the columnar member 114A can be. By making the columnar member 114A thicker, the allowable value of the current that can flow through the probe 10 can be increased. Note that the thickness of the third metal plate 113 is set appropriately depending on the arrangement pitch of the probes 10, etc. Furthermore, it is preferable that the thicknesses of the first metal plate 111 and the third metal plate 113 in the Y direction are equal. This makes it possible to prevent the spring portion 12 from bending when expanding and contracting.

[0037] The first metal plate 111, the second metal plate 112, the third metal plate 113, and the fourth metal plate 114 are formed by processing plates of a conductive material such as a metal material. The probe 10 is manufactured by stacking the components in the following order: the third metal plate 113, the second metal plate 112, the fourth metal plate 114, and the first metal plate 111. The diagonal beams of the first metal plate 111 and the third metal plate 113 function as springs, and the beams of the first metal plate 111 and the third metal plate 113 are connected to each other by the parallel beams 1212 of the second metal plate 112. In other words, the beams of the first metal plate 111, the second metal plate 112, and the third metal plate 113 are connected to each other to form the wires of the coil spring portion 121.

[0038] The probe 10 is expandable and contractible in the axial direction by a coil spring portion 121 formed by a first metal plate 111, a second metal plate 112, and a third metal plate 113. Because the probe 10 itself has elasticity in the axial direction, there is no need to hold the probe 10 in a curved state on the probe head, for example.

[0039] Furthermore, in the probe 10, the columnar member 114A disposed inside the coil spring portion 121 functions as a current path between the tip end portion 11 and the base end portion 13. Therefore, even if the electrical resistance of the current flowing through the coil spring portion 121 is high due to a long path, the current path of the probe 10 can be shortened. In other words, the columnar member 114A can reduce the electrical resistance of the current path of the probe 10. In this way, the columnar member 114A functions as a component that shortens the current path. Note that the probe 10 does not need to include the columnar member 114A if the electrical resistance of the coil spring portion 121 is at a level that does not affect the inspection of the test object.

[0040] 8, the columnar member 114A may be arranged inside the coil spring portion 121 in a curved state. In this case, the curved directions of the multiple columnar members 114A arranged along the axial direction may be different from each other. For example, the curved directions of the columnar members 114A may be staggered along the axial direction.

[0041] The probe 10 may be made of, for example, nickel (Ni), a nickel alloy, gold (Au), silver (Ag), copper (Cu), palladium (Pd), a palladium alloy, rhodium (Rh), a rhodium alloy, or other precious metals. The fourth metal plate 114 may be made of a material that has lower mechanical strength but higher conductivity than the first metal plate 111, the second metal plate 112, and the third metal plate 113. For example, the first metal plate 111 and the third metal plate 113 may be made of a Ni alloy, and the fourth metal plate 114 may be made of gold or copper.

[0042] Note that, when viewed from the first side surface 101 and the second side surface 102, each line of the coil spring portion 121 may not be straight but may include a curved portion. For example, as shown in FIG. 11 , the direction of each line may change midway along the side surface. Each line of the coil spring portion 121 shown in FIG. 11 includes a structure in which a first portion 121A extending at a first angle relative to the axial direction is connected to a second portion 121B extending at a second angle different from the first angle relative to the axial direction. In the example shown in FIG. 11 , the second portion 121B is disposed between the first portion 121A and the first portion 121A. By including a curved portion rather than a simple straight line, the load applied to the probe 10 is more easily transmitted in the axial direction, and the probe 10 is prevented from bending and buckling from the central axis when a pressing force in the axial direction is applied to the probe 10.

[0043] The elastic forces of the multiple expandable sections included in the probe 10 do not have to be the same. For example, the number of coil turns between the expandable sections may be different. Also, the number of coil turns may be different for all the expandable sections. The number of coil turns of the expandable sections included in the probe 10 can be selected arbitrarily for each expandable section.

[0044] In manufacturing the probes 10, a plurality of probes 10 may be manufactured simultaneously using a large substrate as shown in FIG. 12. A first substrate 111M shown in FIG. 12 has a plurality of patterns of the first metal plate 111 shown in FIG. 3 arranged thereon. A second substrate 112M has a plurality of patterns of the second metal plate 112 shown in FIG. 4 arranged thereon. A third substrate 113M has a plurality of patterns of the third metal plate 113 shown in FIG. 5 arranged thereon. A fourth substrate 114M has a plurality of patterns of the fourth metal plate 114 shown in FIG. 8 arranged thereon. A plurality of probes 10 are manufactured simultaneously by stacking the third substrate 113M, the second substrate 112M, the fourth substrate 114M, and the first substrate 111M and then singulating them.

[0045] As described above, in the manufacturing method of the probe 10 according to the embodiment, the probe 10 is manufactured by sequentially stacking a plurality of metal plates. Therefore, compared to a method of manufacturing the probe 10 by repeating a chemical film formation process such as a plating process, the occurrence of defects inside the metal material can be suppressed. Furthermore, the manufacturing method of stacking a plurality of metal plates provides the probe 10 as a dense metal material, and the electrical resistance and strength of the probe 10 are stable.

[0046] Furthermore, in the manufacturing method according to the embodiment, in which multiple metal plates are stacked in sequence, each metal plate can be processed in parallel, thereby shortening the manufacturing process. Furthermore, in manufacturing methods that involve repeated chemical deposition processes, if a defect occurs during the manufacturing process, it is not possible to correct it and the manufacturing process must be restarted from the beginning. In contrast, in the manufacturing method according to the embodiment, each metal plate is independent until all the metal plates are stacked in the final process, making it less likely that the process will need to be restarted. Furthermore, while a plating process imposes limitations on the selection of metal materials, the manufacturing method according to the embodiment simplifies the selection of metal materials because only metal plates can be procured. For example, it is easy to select suitable materials for the first metal plate 111 and third metal plate 113, which function as springs; the second metal plate 112, which connects the first diagonal beam 1211 and the second diagonal beam 1213; and the fourth metal plate 114, which serves as a current path, based on the required functions of each.

[0047] Second Embodiment As shown in Fig. 13 , a probe 10 according to a second embodiment has a single pillar 114B that reaches the distal end 11 and the proximal end 13 and is disposed inside a coil spring portion 121. The probe 10 shown in Fig. 13 differs from the probe 10 shown in Fig. 1 in that the distal end 11 and the proximal end 13 are electrically connected by a single pillar 114B, whereas the probe 10 shown in Fig. 1 is electrically connected to the proximal end 13 via a plurality of pillars 114A. In other respects, the probe 10 according to the second embodiment is similar to the probe 10 according to the first embodiment shown in Fig. 1 .

[0048] Fig. 14 shows the structure of the first metal plate 111 of the probe 10 shown in Fig. 13. Fig. 15 shows the structure of the second metal plate 112 of the probe 10 shown in Fig. 13. Fig. 16 shows the structure of the third metal plate 113 of the probe 10 shown in Fig. 13. Fig. 17 shows the fourth metal plate 114 of the probe 10 shown in Fig. 13.

[0049] The probe 10 shown in Fig. 13 is manufactured by stacking a first metal plate 111, a second metal plate 112, a third metal plate 113, and a fourth metal plate 114, which are respectively shown in Figs. 14 to 17. For example, a through-hole penetrating in the axial direction is formed in the connecting portion 122. Then, the columnar member 114B is passed through the through-hole of the connecting portion 122 so as to reach the distal end portion 11 and the proximal end portion 13. A recess is formed in at least one of the distal end portion 11 and the proximal end portion 13, into which the end of the columnar member 114B is inserted when the spring portion 12 contracts in the axial direction.

[0050] In the probe 10 shown in Fig. 13 , as shown in Fig. 15 , a second through-hole 152 penetrating in the axial direction is formed in the second connecting portion 1222. The columnar member 114B is disposed inside the second through-hole 152 of the coil spring portion 121 and the connecting portion 122, and bridges the distal end portion 11 and the proximal end portion 13. For example, a first end of the columnar member 114B is inserted into a first through-hole 151 formed in the second distal end portion 1102 shown in Fig. 15 , and a second end is inserted into a third through-hole 153 formed in the second proximal end portion 1302. When the coil spring portion 121 expands and contracts, the ends of the columnar member 114B slide within the first through-hole 151 and the third through-hole 153.

[0051] 18 , the columnar member 114B may be connected to the coupling portion 122 between the first metal plate 111 and the third metal plate 113 by a connecting part 115. The connecting part 115 is disposed between the columnar member 114B and the support plate 116 disposed inside the second through-hole 152, and joins the support plate 116 and the columnar member 114B. On the other hand, the columnar member 114B is not fixed to the second metal plate 112.

[0052] 13, the electrical resistance of the current path can be reduced compared to the probe 10 shown in FIG. 1, which uses multiple columnar members 114A. This increases the allowable value of the current flowing through the probe 10. The rest is substantially the same as the first embodiment, and therefore, repeated description will be omitted.

[0053] 13 includes two coil spring portions 121, but the probe 10 in the second embodiment may have any number of coil spring portions 121. An example of a probe 10 including four coil spring portions 121 will be described below.

[0054] Figure 19 shows an example of the first metal plate 111 of the probe 10 including four coil spring portions 121. Figures 20A and 20B show a side view and a perspective view, respectively, of the first metal plate 111 shown in Figure 19.

[0055] Fig. 21 shows an example of the second metal plate 112 of the probe 10 including four coil spring portions 121. Fig. 22A and Fig. 22B show a side view and a perspective view, respectively, of the second metal plate 112 shown in Fig. 21.

[0056] Fig. 23 shows an example of the third metal plate 113 of the probe 10 including four coil spring portions 121. Fig. 24A and Fig. 24B show a side view and a perspective view, respectively, of the third metal plate 113 shown in Fig. 23.

[0057] 25 shows a perspective view of the fourth metal plate 114. The outer shape of the fourth metal plate 114 is set to be narrower than the inner diameter of the second through hole 152 formed in the second connecting portion 1222 of the second metal plate 112.

[0058] In manufacturing the probe 10 according to the second embodiment, a plurality of probes 10 may also be manufactured simultaneously using a large substrate as shown in Fig. 12. The third substrate 113M, the second substrate 112M, the fourth substrate 114M, and the first substrate 111M are stacked and then singulated, thereby manufacturing a plurality of probes 10 simultaneously.

[0059] Until the probes 10 are separated into individual pieces, each of the first substrate 111M to the fourth substrate 114M holds each metal plate component by connecting members and the surrounding area. As shown in FIG. 26 , the columnar members 114B placed on the third metal plate 113 are connected to each other and to the surrounding area by connecting members 150. Note that adjacent columnar members 114B are omitted from FIG. 26 . The manufacturing process for the probe 10 proceeds in this state. After all the metal plates are stacked, the surrounding area of ​​the pattern and the connecting members 150 are removed. For example, the probes 10 are obtained by cutting them off from the surrounding area by laser cutting or the like.

[0060] Although the present invention has been described above by way of the embodiments, the descriptions and drawings that form part of this disclosure should not be understood to limit the present invention. Various alternative embodiments, examples, and operating techniques will become apparent to those skilled in the art from this disclosure.

[0061] For example, in the above example, the first opening 110, the second opening 120, the first through hole 151, the second through hole 152, and the third through hole 153 are formed perpendicular to the upper or lower surface of the distal end portion 11, the proximal end portion 13, or the connecting portion 122. However, the opening shapes of these openings and through holes may be tapered, with the area of ​​the opening gradually narrowing from the outside toward the center.

[0062] 27 and 28 show an example in which the opening shape of second opening 120 in the cross section along the axial direction is tapered. By making the opening shape tapered, the end of columnar member 114A can be easily inserted into first opening 110 and second opening 120, and the end of columnar member 114B can be easily inserted into first through hole 151 and third through hole 153.

[0063] Thus, it goes without saying that the present invention includes various embodiments not described above.

Claims

1. A method for manufacturing a probe used to inspect electrical characteristics of an object to be inspected, comprising: preparing a first metal plate including, in a plane defined by a first direction and a second direction perpendicular to the first direction, a first telescopic section in which a plurality of first diagonal beams extending in a first intersecting direction that intersects the first direction and the second direction obliquely are arranged along the second direction; a second metal plate including a second telescopic section in which a plurality of parallel beams extending in a third direction perpendicular to the first direction and the second direction are arranged along the second direction, the parallel beams being arranged in two rows at intervals equal to the length of the first diagonal beams along the first direction; and a third metal plate including a third telescopic section in which a plurality of second diagonal beams extending in a second intersecting direction symmetrical to the first intersecting direction with the second direction as an axis of symmetry in the plane, the second intersecting direction being the same length along the first direction as the first diagonal beams are arranged along the second direction, an end of the first diagonal beam and an end of the second diagonal beam are connected via the parallel beam, and the third metal plate, the second metal plate, and the first metal plate are stacked in the third direction to form a spring portion including a coil spring portion in which the first diagonal beam, the parallel beam, and the second diagonal beam are connected in that order.

2. The method for manufacturing a probe according to claim 1, wherein the first metal plate has a plate-shaped first tip portion arranged at one end in the second direction and a plate-shaped first base end arranged at the other end in the second direction; the second metal plate has a plate-shaped second tip portion arranged at one end in the second direction and a plate-shaped second base end arranged at the other end in the second direction; the third metal plate has a plate-shaped third tip portion arranged at one end in the second direction and a plate-shaped third base end arranged at the other end in the second direction; and the third metal plate, the second metal plate, and the first metal plate are stacked in order in the third direction to form a tip portion in which the third tip portion, the second tip portion, and the first tip portion are stacked, and a base portion in which the third base end, the second base end, and the first base end are stacked.

3. A method for manufacturing a probe as described in claim 2, wherein the first metal plate includes a plurality of first expandable sections and plate-shaped first connecting sections arranged between the first expandable sections; the second metal plate includes a plurality of second expandable sections and plate-shaped second connecting sections arranged between the second expandable sections; the third metal plate includes a plurality of third expandable sections and plate-shaped third connecting sections arranged between the third expandable sections; and the third metal plate, the second metal plate, and the first metal plate are stacked in order in the third direction, so that the plurality of elastic coil spring sections form the spring section connected along the second direction via inelastic connecting sections formed by stacking the third connecting sections, the second connecting sections, and the first connecting sections.

4. A method for manufacturing a probe as described in claim 3, wherein a columnar member electrically connecting the tip end and the base end is placed inside the spring portion before the second metal plate and the first metal plate are laminated.

5. A method for manufacturing a probe as described in claim 4, comprising a plurality of pillar members bridging the distance between the tip portion and the connecting portion, between two of the connecting portions, and between the connecting portion and the base end portion, one end of each of the pillar members being fixed to either the tip portion, the connecting portion or the base end portion, and a recess into which the other end of each of the pillar members is inserted when the spring portion contracts in the second direction being formed in either the tip portion, the connecting portion or the base end portion.

6. A method for manufacturing a probe as described in claim 4, wherein a through hole penetrating in the second direction is formed in the connecting portion, the single pillar-shaped member is passed through the through hole so as to reach the tip portion and the base end portion, and a recess into which the end of the pillar-shaped member is inserted when the spring portion contracts in the second direction is formed in at least one of the tip portion and the base end portion.

7. The method for manufacturing a probe according to claim 6, wherein the columnar member is joined to the first metal plate and the third metal plate by connecting parts.

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