Area array detector, detection device, laser radar, and terminal

Abstract

An area array detector (12), a detection device (10), a laser radar, and a terminal, applied to the technical field of detection. The area array detector (12) comprises a first receiving region (*1) and second receiving regions (#1), wherein the first receiving region (*1) is adjacent to the second receiving regions (#1). The first receiving region (*1) comprises a plurality of first detection elements which are two-dimensionally arranged adjacent to each other, and each second receiving region (#1) comprises a plurality of second detection elements which are two-dimensionally arranged adjacent to each other. The first detection elements and the second detection elements are all used for receiving light beams, and the PDE of the first detection elements is higher than that of the second detection elements. The detection device can improve the dynamic range thereof without remarkably increasing the cost and the volume of the whole device, and can reduce the impact of stray light on the detection performance while improving the distance measurement capability.

Description

A planar array detector, a detection device, a laser radar and a terminal

[0001] The present application claims priority to the Chinese patent application No. 202410464812.5, filed on April 15, 2024, entitled “A planar array detector, a detection device, a laser radar and a terminal”, the whole content of which is incorporated herein by reference. TECHNICAL FIELD

[0002] The present application relates to the technical field of detection, in particular to a planar array detector, a detection device, a laser radar and a terminal. BACKGROUND

[0003] With the technical update of information technology and computer vision technology, the detection technology has developed rapidly, and various detection devices have brought great convenience to people's production and life. Detection devices are the “eyes” of equipment to perceive the environment, including visual system sensors such as cameras and radar system sensors such as laser radars, millimeter wave radars and ultrasonic radars. Among them, the laser radar (light detection and ranging, LiDAR) has obvious advantages in detection range, ranging accuracy and reliability, and has the characteristics of nearly all-weather working, and is a key sensor in the perception field, playing an important role in intelligent driving, intelligent transportation, surveying and mapping, intelligent manufacturing and other fields.

[0004] The detection principle of the laser radar is to emit a light beam and receive the echo reflected by the target to obtain the related information of the target in the object space. Since the energy of light will continuously attenuate with the distance of propagation in the object space, and the degree of attenuation is affected by the environment, when using the laser radar to measure targets in different distances and different environments, the energy intensity of the echo formed by the target reflection has a large difference. However, the application scenarios of the laser radar often require the laser radar to maintain high detection accuracy in a large distance range, that is, the laser radar needs to achieve a large dynamic range. This makes the receiving end of the laser radar not only ensure that the echo at a long distance can be detected, but also ensure that the energy of the echo at a short distance is not submerged, so as to balance the long-distance and short-distance measurement performance. In order to achieve a large dynamic range, some devices are equipped with multiple groups of radars, which respectively complete short-distance detection and long-distance detection. This scheme has a high implementation cost, and the space occupied by multiple laser radars is large, which is not conducive to the miniaturization development of the equipment.

[0005] How to improve the dynamic range of the detection device without significantly increasing the cost and the size of the whole machine has become a problem to be solved. SUMMARY

[0006] The application provides a surface array detector, a detection device, a laser radar and a terminal, which can improve the dynamic range of the detection device without significantly increasing the cost and the overall volume of the device, and can improve the long-distance detection capability of the detection device while reducing the influence of stray light on the detection performance.

[0007] In a first aspect, the application provides a surface array detector, comprising a first receiving area and a second receiving area, the first receiving area and the second receiving area being adjacent. The first receiving area comprises a plurality of first detection elements arranged in two dimensions in an adjacent manner, and the second receiving area comprises a plurality of second detection elements arranged in two dimensions in an adjacent manner. The first detection elements and the second detection elements are both used for receiving a light beam, and the photon detection efficiency (PDE) of the first detection elements is higher than the PDE of the second detection elements.

[0008] The PDE refers to the efficiency of the detection element in detecting photons, and is usually expressed in percentage. The two-dimensional adjacent arrangement means that the detection elements are arranged in multiple rows and multiple columns, and the detection elements are adjacent when arranged, for example, in the first receiving area, the first detection elements around the first detection elements are still arranged as first detection elements, and no other detection elements are arranged.

[0009] When the detector detects, the light intensity distribution of the light beam from the object space has a large difference, and the light intensity is higher in some areas and lower in some areas. For example, the light intensity of the light beam emitted by the emission end of the detection device is higher in the middle area of the light beam, and the light intensity of the light beam is lower in the edge area. For another example, the light intensity of the echo formed by the target in the far area is relatively low, and the light intensity of the echo formed by the incoming and outgoing target is relatively high.

[0010] In the application, at least two areas with different PDEs are formed on the surface array detector. The PDE of the detection elements in the first receiving area is higher, which can more accurately detect the weak light area, thereby improving the long-distance detection capability of the detection device, and the PDE of the detection elements in the second receiving area is lower, which can ensure that the surface array detector can still detect in a strong stray light environment, thereby reducing the influence of stray light on the detection performance. In summary, the surface array detector provided in the embodiments of the application can improve the dynamic range of the detection device, improve the long-distance detection capability of the detection device while reducing the influence of stray light on the detection performance. Further, the above improvement can be realized on the surface array detector without adding additional components, so that the cost is not significantly increased, and the influence on the overall volume of the device using the surface array detector is small.

[0011] When the face array detector is used to detect the target in the detection space, the echo light intensity of the target far away is weak, so the second detection element in the second receiving area can not accurately detect the signal, but the first detection element in the first receiving area can respond. For the target close to the detection device, the echo light intensity of the target is high, but the target is easily affected by the near-end stray light, and the signal detected by the first detection element can be submerged by the near-end stray light, but the PDE of the second detection element in the second receiving area is low, so the echo of the near-end target can be detected. In the application of the face array detector, the detection device can detect the detection target far away, and when the near-end target is detected, the influence of the near-end stray light on the echo of the near-end target can be weakened.

[0012] In a possible implementation of the first aspect, the first detection element and the second detection element are of the same type. In some possible solutions, the first detection element and the second detection element are of one of a single-photon avalanche diode (SPAD), a silicon photomultiplier (SiPM), an avalanche photo detector (APD), a multi-pixel photon counter (MPPC), or an electron multiplying charge-coupled device (EMCCD). For example, the first detection element and the second detection element are both SPADs.

[0013] In another possible implementation of the first aspect, the first detection element and the second detection element are of different types. For example, the first detection element is a SiPM, and the second detection element is a SPAD.

[0014] In another possible implementation of the first aspect, the center of the light spot of the light beam falls in the first receiving area, and the edge of the light spot of the light beam falls in the second receiving area. Because the light intensity of the center of the light spot is high, and the light intensity of the edge of the light spot is low, the detection capability for weak light can be improved, the influence of stray light in a strong light condition can be reduced, the detection distance of the detection device can be increased, and the influence of stray light on the detection performance can be reduced.

[0015] In another possible implementation of the first aspect, the first receiving area and the second receiving area are staggered in the first direction. By staggering, the requirement of the partitioned receiving of the light beam can be met.

[0016] In a further possible implementation form of the first aspect, the area array detector comprises one first receiving area and two second receiving areas, and the second receiving areas are arranged on both sides of the first receiving area along the first direction.

[0017] In some embodiments, the detection device uses a line beam for detection, and the line beam has a higher light intensity in the middle region and a lower light intensity in the two side edges. The arrangement of the first receiving area and the second receiving areas in the above-mentioned embodiments can adapt to the regional distribution of the light intensity of the line beam. When a linear light beam is used for detection, the use of the present implementation form can further improve the far measurement capability of the detection device while reducing the influence of stray light on the detection performance.

[0018] In a further possible implementation form of the first aspect, the area array detector comprises a plurality of first receiving areas and a plurality of second receiving areas, and each first receiving area is arranged with second receiving areas on both sides along the first direction.

[0019] As a possible application example, the light beam comprises a plurality of channels, each channel forms a line spot (or a spot of other shapes), and a first receiving area and its two adjacent second receiving areas can receive the light beam of one channel. The first receiving area is used to receive the spot center of the light beam of one channel, and the two side edges of the light beam of the channel fall into the second receiving areas on both sides of the first receiving area.

[0020] As a further possible application example, the light beam comprises a plurality of channels, each channel forms a line spot (or a spot of other shapes), and the first receiving area is used to receive the light beam of part of the channels, and the second receiving areas are used to receive the light beam of the other part of the channels.

[0021] In some embodiments, the light beam received by the area array detector can comprise a return echo of the emitted light beam, and the light beam received by the area array detector can be referred to as a return light beam.

[0022] In a further possible implementation form of the first aspect, the second receiving areas are arranged around the first receiving area. In this case, the first receiving area is used to receive the spot center of the light beam, and the light on the four side edges of the light beam falls into the second receiving areas.

[0023] In a further possible implementation form of the first aspect, the area array detector is applied to a scanning detection device. The first receiving area is located in the middle region of a region of interest (ROI) of the area array detector, and the second receiving areas are located in the edge region of the ROI.

[0024] For the scanning type detection device, the position of the light spot of the return light beam falls into the ROI of the area array detector. The first receiving area is located in the middle region of the ROI, so that the first receiving area can be used to receive the center of the light spot of the return light beam, and the second receiving area is located in the edge region of the ROI of the area array detector, so that the first receiving area can be used to receive the edge of the light spot of the return light beam.

[0025] In a further possible implementation form of the first aspect, the PDE of the first detection element is adjustable. In this way, the PDE of the first detection element can be adjusted according to actual needs, so that the area array detector can be applied to various application scenarios, improving its use flexibility and service quality.

[0026] In a further possible implementation form of the first aspect, the PDE of the second detection element is adjustable. In this way, the PDE of the second detection element can be adjusted according to actual needs, so that the area array detector can be applied to various application scenarios, improving its use flexibility and service quality.

[0027] In the detection element, photons are absorbed in the depletion layer to generate electron-hole pairs, and the thickness, doping concentration, etc. of the depletion layer affect the probability of photon absorption. Therefore, in some schemes, the PDE of the detection element can be changed by designing different thicknesses and doping concentrations of the depletion layer.

[0028] In a further possible implementation form of the first aspect, the doping concentration of the depletion layer of the first detection element is lower than the doping concentration of the depletion layer of the second detection element. In this way, photons are more likely to be absorbed when passing through the depletion layer of the first detection element to generate electron-hole pairs, so that the PDE of the first detection element is higher.

[0029] In a further possible implementation form of the first aspect, the thickness of the depletion layer of the first detection element is greater than the thickness of the depletion layer of the second detection element. In this way, photons are more likely to be absorbed when passing through the depletion layer of the first detection element to generate electron-hole pairs, so that the PDE of the first detection element is higher.

[0030] The detection element is usually also provided with a reflection plate, which is designed on the side of the detection element away from the photosensitive surface, for example, the reflection plate is a metal plate at the bottom of the detection element. When the photons enter the depletion layer of the detection element from the photosensitive surface, part of the photons are absorbed by the depletion layer, and part of the photons can not be absorbed. The reflection plate can reflect the unabsorbed photons back to the depletion layer for secondary absorption. The larger the area of the reflection surface and the higher the reflectivity, the higher the probability of reflected photons, and the higher the PDE of the detection element. In some schemes, the PDE of the detection element is changed by changing the area or reflectivity of the reflection plate.

[0031] In a further possible implementation form of the first aspect, the first detecting element comprises a first reflecting plate located at a side of the first detecting element away from a light receiving surface of the first detecting element. The second detecting element comprises a second reflecting plate located at a side of the second detecting element away from a light receiving surface of the second detecting element. The first reflecting plate has a larger area than the second reflecting plate and / or the first reflecting plate has a larger reflectivity than the second reflecting plate, so that the PDE of the first detecting element is higher than the PDE of the second detecting element.

[0032] In some embodiments, an optical element can be arranged above the light receiving surface of the detecting element. The property of the optical element can also affect the PDE of the detecting element. By controlling whether there is a lens in front of the light receiving surface of the detecting element, or designing the curvature of the lens and other parameters, the light beams falling on the first detecting element and the light beams falling on the second detecting element are different, so that the PDE of the detecting element is different. For example, the lens comprises a microlens.

[0033] In a further possible implementation form of the first aspect, the area array detector further comprises a first optical element arranged in front of the light receiving surface of the first detecting element. The first optical element is configured to converge light entering the first detecting element. By the converging effect of the first optical element, more light enters the first detecting element, so that the PDE of the first detecting element is higher than the PDE of the second detecting element.

[0034] In a further possible implementation form of the first aspect, the area array detector further comprises a second optical element arranged in front of the light receiving surface of the second detecting element. The second optical element is configured to diverge or block light entering the second detecting element. By the diverging or blocking of the second optical element, less light enters the second detecting element, so that the PDE of the first detecting element is higher than the PDE of the second detecting element.

[0035] In a further possible implementation form of the first aspect, the area array detector further comprises a third optical element and a fourth optical element. The third optical element is arranged in front of the light receiving surface of the first detecting element, and the fourth optical element is arranged in front of the light receiving surface of the second detecting element. The third optical element and the fourth optical element have different properties, and can achieve that the PDE of the first detecting element is higher than the PDE of the second detecting element.

[0036] The detecting element needs to be biased negatively when working. In some embodiments, the PDE of the detecting element can be changed by designing the negative bias supplied to the detecting element. For example, in the same area array detector, different detecting elements are supplied with power by different power trees, so that the PDE of the first detecting element is higher than the PDE of the second detecting element.

[0037] In a further possible implementation form of the first aspect, the first and second detection elements are driven by the driving circuit to apply a negative bias voltage, and the absolute value of the negative bias voltage of the first detection element is greater than the absolute value of the negative bias voltage of the second detection element.

[0038] In a further possible implementation form of the first aspect, the driving circuit of the first detection element has a first voltage and a second voltage across the driving circuit, the first voltage is greater than the second voltage, and the driving circuit of the second detection element has a third voltage and a fourth voltage across the driving circuit, the third voltage is greater than the fourth voltage. The second voltage is less than the fourth voltage, and / or the first voltage is greater than the third voltage. In this way, by designing the voltage of the driving circuit, the absolute value of the negative bias voltage of the first detection element can be made higher, so that the PDE of the first detection element is higher than the PDE of the second detection element.

[0039] For example, the first voltage is the same as the third voltage, the second voltage is less than the fourth voltage, and / or the second voltage is the same as the fourth voltage, and the first voltage is greater than the third voltage.

[0040] The area of the light sensing surface of the detection element also affects the PDE of the detection element. In some embodiments, the areas of the light sensing surfaces of the detection elements can be designed to be different, so that the amount of light entering the detection elements is changed, and the PDEs of the detection elements are different.

[0041] In a further possible implementation form of the first aspect, the area of the light sensing surface of the first detection element is greater than the area of the light sensing surface of the second detection element. The greater the area of the light sensing surface, the more light enters, and the higher the probability of absorbing photons. The greater the area of the light sensing surface of the first detection element, the higher the PDE of the first detection element is than the PDE of the second detection element.

[0042] In a further possible implementation form of the first aspect, the first receiving area includes a plurality of first pixels, each of which includes at least one first detection element, and the second receiving area includes a plurality of second pixels, each of which includes at least one second detection element. In the embodiments of the present application, the receiving area is related to the spot distribution of the light beam, and has a regional feature, which makes a region include a plurality of pixels, and the PDEs of the detection elements in the plurality of pixels are the same or similar. The plurality of pixels with high PDE can be used to receive light at the center of the spot of the light beam, and the plurality of pixels with low PDE can be used to receive light at the edge of the spot of the light beam, so as to improve the dynamic range of the area array detector and the far distance detection capability of the detection device while reducing the influence of stray light on the detection performance.

[0043] In a second aspect, the present application provides a detection device, which comprises a transmitting module and a face array detector. The face array detector is the face array detector described in the first aspect or any possible implementation manner of the first aspect. The transmitting module is configured to transmit a detection light beam, and the face array detector is configured to receive a return light beam, which comprises a return wave of the detection light beam.

[0044] In a possible implementation manner of the second aspect, the detection light beam is configured to detect an object space, and the return light beam is from the object space. Further, the face array detector can output detection data, which is configured to obtain relevant information of a target in the object space, such as one or more of distance, position, angle, speed, reflectivity, reflection intensity, color or material of the target.

[0045] In another possible implementation manner of the second aspect, the detection device further comprises a scanning module, which is configured to scan the detection light beam to the object space and provide the return light beam from the object space to the face array detector.

[0046] In another possible implementation manner of the second aspect, the transmitting module is a face array transmitter, the detection light beam comprises a plurality of channel light beams, and the return light beam comprises a plurality of channel light beams. The face array transmitter comprises a plurality of lasers arranged in two-dimensional adjacent manner, and the plurality of lasers emit light respectively to form the plurality of channel light beams, such as one column or two columns of lasers for one channel (or referred to as a transmitting channel).

[0047] In a third aspect, the present application provides a laser radar, which comprises the face array detector described in the first aspect or any possible implementation manner of the first aspect, or comprises the detection device described in the second aspect or any possible implementation manner of the second aspect. Further, the laser radar comprises a housing, which is configured to provide a receiving space to accommodate other modules in the laser radar.

[0048] In a fourth aspect, the present application provides a terminal, which comprises the face array detector described in the first aspect or any possible implementation manner of the first aspect, or comprises the detection device described in the second aspect or any possible implementation manner of the second aspect, or comprises the laser radar described in the third aspect.

[0049] Optionally, the terminal is an intelligent terminal or a transportation tool, such as a vehicle, a drone or a robot.

[0050] The beneficial effects of the second aspect to the fourth aspect of the present application can be referred to the beneficial effects of the first aspect, which will not be described one by one. BRIEF DESCRIPTION OF DRAWINGS

[0051] The drawings needed in the following embodiment description will be briefly introduced.

[0052] Fig. 1 is a structural schematic diagram of a detection device according to an embodiment of the present application;

[0053] Fig. 2 is a schematic diagram of a detection process of a scanning detection device according to an embodiment of the present application;

[0054] Fig. 3 is a schematic diagram of a receiving mode of a face array detector according to an embodiment of the present application;

[0055] Fig. 4 is a schematic diagram of a detection process of a scanning detection device and a receiving mode of a face array detector according to an embodiment of the present application;

[0056] Fig. 5 is a structural schematic diagram of a face array detector according to an embodiment of the present application;

[0057] Fig. 6 is a schematic diagram of an energy distribution of a light beam according to an embodiment of the present application;

[0058] Fig. 7 is a structural schematic diagram of a first detection element and a second detection element according to an embodiment of the present application;

[0059] Fig. 8 is a structural schematic diagram of another first detection element and a second detection element according to an embodiment of the present application;

[0060] Fig. 9 is a light path schematic diagram of a first detection element and a second detection element according to an embodiment of the present application;

[0061] Fig. 10 is a light path schematic diagram of another first detection element and a second detection element according to an embodiment of the present application;

[0062] Fig. 11 is a light path schematic diagram of another first detection element and a second detection element according to an embodiment of the present application;

[0063] Fig. 12 is a structural schematic diagram of a driving circuit of a first detection element and a second detection element according to an embodiment of the present application;

[0064] Fig. 13 is a schematic diagram of a photosensitive surface of a first detection element and a second detection element according to an embodiment of the present application;

[0065] Fig. 14 is a structural schematic diagram of another face array detector according to an embodiment of the present application;

[0066] Fig. 15 is a structural schematic diagram of another face array detector according to an embodiment of the present application;

[0067] Fig. 16 is a structural schematic diagram of another face array detector according to an embodiment of the present application;

[0068] Fig. 17 is a schematic diagram of a scene of receiving a returned light beam of a face array detector according to an embodiment of the present application;

[0069] FIG. 18 is a structural schematic diagram of another kind of face array detector provided in an embodiment of the present application;

[0070] FIG. 19 is a structural schematic diagram of another kind of face array detector provided in an embodiment of the present application;

[0071] FIG. 20 is a structural schematic diagram of a vehicle including a laser radar provided in an embodiment of the present application. DETAILED DESCRIPTION

[0072] The detection device is a device for detecting targets in an object space, which works in the following way: a detection signal is emitted to the object space, a return signal from the object space is received, and relevant information of the target in the object space is obtained according to the return signal, such as one or more of the distance, position, angle, speed, reflectivity, reflection intensity, color, or material of the target. The detection signal is usually an electromagnetic wave or a sound wave, and the electromagnetic wave includes light, millimeter wave, or centimeter wave. The detection device provided in an embodiment of the present application takes light as the detection signal.

[0073] The detection device provided in the present application will be introduced first. It should be noted that the architecture and application scenarios of the device described in the present application are for more clearly explaining the technical solutions of the present application, and do not constitute a limitation on the technical solutions provided in the present application. Those skilled in the art can know that, with the evolution of the architecture and the appearance of new business scenarios, the technical solutions provided in the present application are also applicable to similar technical problems.

[0074] Please refer to FIG. 1, which is a structural schematic diagram of a detection device provided in an embodiment of the present application. The detection device 10 includes a transmitting module 11 and a face array detector 12. Wherein:

[0075] The emission module 11 is configured to emit a probe light beam. Exemplarily, the emission module 11 can include one or more of the following lasers: a vertical cavity surface emitting laser (VCSEL), a photonic crystal surface emitting semiconductor laser (PCSEL), an edge emitting laser (EEL), a laser diode (LD), a distributed feedback LD (DFB-LD), a grating coupled sampling reflection LD (GCSR-LD), or a micro opto electro mechanical system LD (MOEMS-LD), etc.

[0076] The area array detector 12 is configured to receive a return light beam returning an echo including the probe light beam. The area array detector includes a plurality of detection elements 13 arranged in rows and columns, and the detection elements 13 include one or more of, but are not limited to, a SPAD, a SiPM, an APD, an MPPC, or an EMCCD, etc. For example, the detection elements 13 can be SPADs, and the area array detector can be a SPAD array detector. It should be understood that the shapes, arrangements, and numbers of the detection elements shown in the present application are only examples.

[0077] When the detection device shown in FIG. 1 is used for detection, the emission module 11 emits a probe light beam to the object space, the probe light beam is reflected by a target in the object space to form a return light beam, and the spot of the return light beam falls on the area array detector 12 and is received by the detection elements 13 of the area array detector 12 to obtain detection data. During the detection process, the system architecture of the detection device 10 can affect the receiving mode of the area array detector 12. Two possible architectures and the receiving mode of the area array detector are exemplarily introduced below.

[0078] Architecture 1: The detection device 10 is a scanning detection device, and further includes a scanning module 14 inside. The scanning module 14 is configured to emit the probe light beam from the emission module 11 to the field of view at multiple angles. Please refer to FIG. 2, for example, the scanning module 14 includes a rotating mirror, and the scanning module 14 rotates along the active axis. The probe light beam from the emission module 11 is reflected by the scanning module 14 to the field of view at multiple angles, and the field of view is scanned. The scanning direction is related to the movement direction of the scanning module 14. Further, the return signal can pass through the scanning module 14 to reach the area array detector 12.

[0079] For the scanning type detection device, the return light beams can fall into the ROI of the area array detector 12, as shown in FIG. 3. In some schemes, the ROI of the area array detector 12 can acquire the detected photons, while the area outside the ROI cannot detect the photons. For example, the detection elements in the ROI are in an active state (e.g., powered on), while the detection elements outside the ROI are in an inactive state (e.g., powered off). For another example, the area array detector can output the detection data of the ROI, while the detection data of the area outside the ROI is discarded.

[0080] It should be understood that the structure of the scanning module 14 shown in FIG. 2 is only an example. In specific implementations, the scanning module 14 can include one or more of a swing mirror, a polygon, a micro-electro-mechanical system (MEMS) mirror, or a metal mirror. As a possible implementation example, the scanning module 14 includes one or more reflecting surfaces, which are mounted on the body of the scanning module 14 in the form of a patch, or the reflecting surfaces of the scanning module 14 and the body of the scanning module 14 are integrated. Further, the scanning mode of the scanning module 14 can be one-dimensional scanning, two-dimensional scanning, etc., and the embodiments of the present application do not strictly limit the type of scanning module, the number of reflecting surfaces, the scanning mode, etc.

[0081] Architecture 2: The detection device 10 is a solid-state detection device, and no scanning module is arranged inside. As a possible implementation example, referring to FIG. 4, the emission module 11 in the detection device 10 includes an area array emitter 111, which includes a plurality of lasers arranged in an array, and the plurality of lasers are divided into a plurality of light-emitting areas, and each light-emitting area can include a plurality of lasers. When emitting a detection light beam, each light-emitting area forms an independent emission channel. For example, as shown in FIG. 4, the area array emitter can form N emission channels. For each emission channel, the light beam emitted thereby can irradiate a sub-region of the field of view, and correspondingly, the spot (referred to as return spot) of the return light beam corresponding to this emission channel can fall into a region of the area array detector 12. In combination with FIG. 4, for the solid-state detection device, the spots of the return light beams corresponding to different emission channels can fall into different regions of the area array detector 12.

[0082] It should be understood that the above two architectures are only examples, and other architectures of the detection device 10 can also exist in specific implementation processes. In addition, the detection device 10 can also include optical elements such as a lens, a shaping module, or a collimation module, etc., which are not shown here.

[0083] When the aforementioned detection device 10 is used to measure targets at different distances and in different environments, the energy intensity of the echoes formed by the reflections of the targets often differs, which requires the detection device 10 to have a large dynamic range. For the detection device, the area array detector needs to enable the echo signals at a long distance to be detected, and at the same time, the energy of the echo signals at a short distance should not be too high, so as to balance the long-distance and short-distance measurement performance.

[0084] To meet the above requirements, the embodiments of the present application provide an area array detector, which can improve the dynamic range of the area array detector without significantly increasing the volume, improve the long-distance measurement capability of the detection device, and reduce the influence of stray light on the detection performance. Further, the area array detector can be applied to the detection device 10, the laser radar, and the terminal provided by the present application, and can improve the performance of various devices.

[0085] The area array detector provided by the embodiments of the present application is described below.

[0086] The embodiments of the present application provide an area array detector. In combination with FIG. 5, the area array detector 12 includes a first receiving area and a second receiving area. The number of the first receiving areas can be one or more (distinguished by “*+number” in the figure), and the number of the second receiving areas can be one or more (distinguished by “#+number” in the figure). The first receiving area includes a plurality of first detection elements arranged in two dimensions. The two-dimensional adjacent arrangement means that the detection elements are arranged in a plurality of rows and a plurality of columns (the sum of the number of rows and the number of columns of the detection elements is greater than 2), and the detection elements are adjacent when arranged. As shown in FIG. 5, the plurality of first detection elements can be arranged in 15 rows and 4 columns, thereby forming a region in two dimensions of the row direction and the column direction. In the first receiving area, the first detection elements are still arranged around the first detection elements, and no other different detection elements are arranged. Similarly, the second receiving area includes a plurality of second detection elements arranged in two dimensions.

[0087] In the area array detector 12 shown in FIG. 2, the first detection elements and the second detection elements are both used to receive light beams, and the PDE of the first detection elements is higher than the PDE of the second detection elements. The PDE refers to the efficiency of the detection elements in detecting photons, which is usually expressed by percentage. For example, the PDE of the first detection elements is 25%, and the PDE of the second detection elements is 10%.

[0088] The light intensity distribution of the light beam from the object space has a large difference when the detector is detecting. As shown in FIG. 6 is a light beam energy distribution diagram provided by an embodiment of the present application, in the light beam shown in FIG. 6, the light intensity of the middle region is relatively high, and the light intensity of the edge region is relatively low. Therefore, when the detection device uses the light beam as shown in FIG. 6 to detect, the light spot formed by the target reflected light beam in the object space also has a relatively high light intensity region and a low light intensity region. In addition, the distance of the target also affects the light intensity, the light intensity of the echo reflected by the target at a long distance is relatively low, and the light intensity of the echo reflected by the target at a short distance is relatively high.

[0089] The face array detector 12 provided by the embodiment of the present application includes two regions with different PDEs, the PDE of the detection element in the first receiving region is higher, when it corresponds to the high light intensity region of the light beam, the detection precision for the light beam reflected by the target at a long distance can also be higher, so that the weak light region can be detected more accurately, and the long distance detection capability of the detection device is improved. The PDE of the detection element in the second receiving region is lower, when it corresponds to the low light intensity region of the light beam, the face array detector can still detect in a strong stray light environment, and the influence of stray light on the detection performance is reduced.

[0090] As a possible example, the face array detector 12 is applied to the detection device 10. When the detection device 10 is used to detect, if the target in the object space is far away, the light intensity of the echo formed by the target is relatively weak, the PDE of the second receiving region is lower, so the echo formed by the target at a long distance can not reach the detection threshold of the second detection element, so that it is difficult to accurately detect the signal, but the PDE of the first detection element of the first receiving region is higher, so the weak echo of the target at a long distance can be detected. For the target at a short distance, the light intensity of the echo formed by the target is relatively strong, but it is also easily affected by the near-end stray light, at this time, the signal detected by the first detection element of the first receiving region can be submerged by the near-end stray light, but the second detection element in the second receiving region can detect the echo of the near-end target. It is equivalent to that the upper limit of the light intensity of the response when the detection device detects is improved, and the lower limit of the light intensity of the response is reduced, so that the dynamic range of the face array detector is improved. Therefore, by applying the face array detector of the present application, the detection device can detect a target at a farther distance, and when detecting at a short distance, the influence of the near-end stray light on the echo of the near-end target can also be weakened.

[0091] First, the first detection element and the second detection element will be introduced. In some possible embodiments, the first detection element and the second detection element are different kinds of detection elements. In some other possible embodiments, the first detection element and the second detection element are the same kind of detection element. For example, the first detection element and the second detection element are both SPADs.

[0092] Further, by designing the structure, material, driving mode, or the properties of the combined optical elements of the detection element, the PDEs of the first and second detection elements can be made different. The ways to achieve different PDEs of the first and second detection elements are described below.

[0093] In an implementation, the PDE of the first detection element is higher than that of the second detection element by designing the thickness, doping concentration, etc. of the depletion layer. Please refer to FIG. 7. The first and second detection elements include a depletion layer (or depletion region). Photons are absorbed in the depletion layer to generate electron-hole pairs, so that the detection element can detect the photons. The thickness, doping concentration, etc. of the depletion layer affect the PDE of the detection element.

[0094] In some possible implementations, the thickness of the depletion layer of the first detection element is greater than that of the second detection element. As shown in FIG. 7(a), the thickness of the depletion layer of the first detection element is w1, and the thickness of the depletion layer of the second detection element is w2, w1 > w2. When the photons pass through the depletion layer of the first detection element, they are more likely to be absorbed to generate electron-hole pairs, so that the PDE of the first detection element is higher.

[0095] Further, the detection element includes a P-type region (denoted as P in FIG. 7), an N-type region (denoted as N in FIG. 7), and an avalanche region, etc. in addition to the depletion layer. In order to make the thickness consistent in the area array detector and improve the surface flatness of the area array detector, in the case where the thickness of the depletion layer of the first detection element is greater than that of the second detection element, the thickness of the part of the second detection element can be adjusted to be greater than that of the same level of the first detection element. As shown in FIG. 7(a) and (b), the thickness of the N-type region of the second detection element is greater than that of the first detection element.

[0096] Further, the doping concentration of the depletion layer of the first detection element is lower than that of the second detection element. When the doping concentration of the depletion layer of the first detection element is lower, the width of the depletion layer of the first detection element is increased accordingly. Therefore, the photons passing through the depletion layer of the first detection element are more likely to be absorbed to generate electron-hole pairs, so that the PDE of the first detection element is higher.

[0097] In a second implementation, the PDE of the first detection element is higher than that of the second detection element by designing the area, size or reflectivity of the reflection plate at the bottom of the detection element. Specifically, a reflection plate is usually arranged in the detection element and located on the side of the detection element away from the photosensitive surface. Referring to FIG. 8, the reflection plate is a metal plate (or a metal baffle) at the bottom of the detection element. When photons enter the depletion layer of the detection element from the photosensitive surface, part of the photons are absorbed by the depletion layer, and part of the photons can not be absorbed. The metal plate can reflect the unabsorbed photons back to the depletion layer for secondary absorption. The larger the area of the surface of the metal plate reflecting the photons, the higher the reflectivity, the higher the probability of reflecting the photons, and the higher the PDE of the detection element.

[0098] For example, as shown in FIG. 8(a) and (b), the area of the reflection plate (or the first emission plate) of the first detection element is larger than the area of the reflection plate (or the second emission plate) of the second detection element. Here, the area refers to the area of one side of the reflection plate for reflecting the light passing through the depletion layer. Alternatively, under the viewing angle shown in FIG. 8, the length of the first reflection plate is l1, and the length of the second reflection plate is l2, l1> l2.

[0099] Of course, only the size of the area and the size are described here. In specific implementation, the PDE of the first detection element can be higher than that of the second detection element by changing other properties of the first reflection plate, for example, the reflectivity of the first reflection plate is higher than that of the second reflection plate.

[0100] In a third implementation, the PDE of the detection element is controlled by controlling whether there is a lens in front of the photosensitive surface of the detection element or by designing the curvature of the lens and other parameters, so that the light beams falling into the first detection element and the light beams falling into the second detection element are different. The following describes several possible examples:

[0101] Example 1, referring to FIG. 9(a), the area array detector further includes a first optical element 15 arranged in front of the photosensitive surface of the first detection element for converging the light entering the first detection element. For example, the first optical element 15 can include a lens and / or a microlens. The first optical element 15 can increase the number of photons entering the first detection element, so that the PDE of the first detection element is higher.

[0102] Further, referring to FIG. 9(b), no first optical element 15 is arranged in front of the photosensitive surface of the second detection element, so that the PDE of the first detection element is higher than that of the second detection element.

[0103] Example 2, referring to (b) of FIG. 10, the area array detector further comprises a second optical element 16 disposed in front of the light-sensitive surface of the second detecting element, for diverging or blocking the light entering the second detecting element. Exemplarily, the second optical element 16 comprises a concave lens, a microlens, or a diaphragm, etc. The second optical element 16 can increase the number of photons entering the first detecting element, so that the PDE of the first detecting element is higher. Further, referring to (a) of FIG. 10, no optical element is disposed in front of the light-sensitive surface of the first detecting element for diverging or blocking the light entering the first detecting element.

[0104] Example 3, referring to (a) and (b) of FIG. 11, the area array detector further comprises a third optical element 17 and a fourth optical element 18. The third optical element 17 is disposed in front of the light-sensitive surface of the first detecting element, and the fourth optical element 18 is disposed in front of the light-sensitive surface of the second detecting element. The third optical element 17 and the fourth optical element 18 have different properties, so that the number of photons entering the first detecting element is greater than the number of photons entering the second detecting element, thereby realizing that the PDE of the first detecting element is higher than the PDE of the second detecting element. For example, the third optical element 17 is a lens (or a microlens) with converging effect, while the fourth optical element is a lens (or a microlens) with diverging effect. For another example, the third optical element 17 and the fourth optical element 18 are both lenses (or microlenses) with converging effect, but their curvatures are different, so that the number of photons entering the first detecting element is greater than the number of photons entering the second detecting element. For another example, the transmittance of the third optical element 17 is higher than the transmittance of the fourth optical element 18.

[0105] It should be understood that the cases shown in FIGS. 9-11 are for the convenience of illustrating the way of realizing different PDEs, and should not be understood as strict limitation on the structure of the optical element in the realization process.

[0106] Realization mode four, the detecting element is driven to work by applying a negative bias voltage through a driving circuit, and the PDE of the detecting element is changed by designing the negative bias voltage supplied to the detecting element. Generally speaking, the greater the absolute value of the negative bias voltage supplied to the detecting element, the higher the PDE of the detecting element. Exemplarily, the absolute value of the negative bias voltage of the first detecting element is greater than the absolute value of the negative bias voltage of the second detecting element. For example, the absolute value of the negative bias voltage of the first detecting element is 24.3V, while the absolute value of the negative bias voltage of the second detecting element is less than 24.3V. Further, the negative bias voltage supplied to the second detecting element can be regulated by some feedback circuit.

[0107] In some possible implementation manners, the voltage across the driving circuit of the first detection element is different from the voltage across the driving circuit of the first detection element, including the case that there is a difference in one end voltage. Referring to FIG. 12(a), the voltage across the driving circuit of the first detection element is a first voltage V1 and a second voltage V2, V1 > V2. As shown in FIG. 12(b), the voltage across the driving circuit of the second detection element is a third voltage V3 and a fourth voltage V4, V3 > V4. V2 is less than V4, and / or V1 is greater than V3. In this way, the absolute value of the negative bias voltage of the first detection element is higher, so that the PDE of the first detection element is higher than the PDE of the second detection element.

[0108] Further, the voltage across the driving circuit of the first detection element can be adjusted (including the case that both ends are adjusted), so that the PDE of the first detection element is adjustable. Similarly, the voltage across the driving circuit of the second detection element can be adjusted (including the case that both ends are adjusted), so that the PDE of the second detection element is adjustable.

[0109] In a fifth implementation manner, the area of the light sensing region of the first detection element is greater than the area of the light sensing surface of the second detection element. Referring to FIG. 13, the pixels in the first receiving area are large pixels, and the pixels in the second receiving area are small pixels. The first detection element has a greater light amount, and the probability of absorbing photons is higher, so that the PDE of the first detection element is higher than the PDE of the second detection element.

[0110] The above-mentioned several implementation manners can be combined without mutual exclusion. For example, the area of the light sensing surface of the first detection element is greater than the area of the light sensing surface of the second detection element, the absolute value of the negative bias voltage of the first detection element is increased, and the absolute value of the negative bias voltage of the first detection element is greater than the absolute value of the negative bias voltage of the second detection element.

[0111] In some scenarios, the number, shape, arrangement manner and the like of the first receiving area and the second receiving area have various possible designs. The possible designs of the arrangement of the first receiving area and the second receiving area in the planar array detector 12 are further introduced below.

[0112] In some possible designs, the first receiving areas and the second receiving areas are staggered along a first direction. The first direction refers to a certain direction, such as a row direction, a column direction, or a diagonal direction of the array detector, and the like. In some cases, the detection device uses a line beam for detection. The light intensity of the middle region of the line beam is high, and the light intensity of the two side edges is low. Therefore, the arrangement of the first receiving areas and the second receiving areas in the above embodiment can adapt to the regional distribution of the light intensity of the line beam. When a linear light beam is used for detection, the use of the embodiment can further improve the far detection capability of the detection device while reducing the influence of stray light on the detection performance.

[0113] In order to facilitate the understanding of the design of the staggered arrangement along the first direction, the following lists several possible cases:

[0114] Case 1: The surface array detector 12 includes one first receiving area and two second receiving areas. In combination with FIG. 5, along the row direction of the surface array detector, the second receiving areas are arranged on both sides of the first receiving area. It should be understood that the row and the column are relative and can be replaced with each other.

[0115] As a possible application example, the surface array detector 12 is applied to a scanning detection device. In combination with FIGS. 2, 3 and 14, the first receiving area is located in the middle region of the ROI, and the second receiving area is located in the edge region of the ROI. The center of the spot of the return light beam falls into the first receiving area (i.e., the middle region of the ROI), and the edge of the spot of the light beam falls into the second receiving area (i.e., the edge region of the ROI).

[0116] Case 2: The surface array detector includes a plurality of first receiving areas and a plurality of second receiving areas. Along the row direction of the surface array detector, the second receiving areas are arranged on both sides of each first receiving area.

[0117] As a possible application example, please refer to FIG. 4 and FIG. 15, the probe light beams emitted by the probe device include N channels, the N channels can emit light in time to form N time slots (i.e. Slot), and each Slot emits a channel of probe light beams. Therefore, one channel can form a line light spot (or other shaped light spot), and one first receiving area and its adjacent two second receiving areas can receive the return light beams of one channel (including the echo of one channel of probe light beams). For the return light beams of each channel, the first receiving area is used to receive the spot center of the return light beams, and the two side edges of the return light beams of the channel fall into the second receiving area. For example, the number of first receiving areas is N, and the number of second receiving areas is N+1, wherein the second receiving area #1, the first receiving area *1 and the second receiving area #2 are used to receive the return light beams of Slot1, the second receiving area #2, the first receiving area *2 and the second receiving area #3 are used to receive the return light beams of Slot2, and the rest of the Slots are the same, and the second receiving area #N, the first receiving area *N and the second receiving area #N+1 are used to receive the return light beams of SlotN. Further, the spot center of the return light beams of each Slot can fall into the first receiving area, and the two side edges can fall into the second receiving area.

[0118] As another possible application example, please refer to FIG. 4, FIG. 16 and FIG. 17, the probe light beams emitted by the probe device include multiple channels, the multiple channels can emit light in time to form multiple time slots (i.e. Slot), and each Slot emits a channel of probe light beams. When receiving, the first receiving area is used to receive the light beams of part of the channels, and the second receiving area is used to receive the light beams of the other part of the channels. For example, the first receiving channel and the second receiving channel alternately receive the Slot, as shown in FIG. 16, the first receiving area *1 is used to receive the return light beams of the first to m Slots, and the second receiving area #1 is used to receive the return light beams of the k Slots after the m Slots, and FIG. 16 describes an example with k=1. In the subsequent process, the first receiving area receives the return light beams of the m Slots again, and the second receiving area receives the light beams of the k Slots after that again, and the receiving is alternately received in this rule to realize the receiving of the return light beams of the entire field of view.

[0119] In the embodiments shown in FIG. 16 and FIG. 17, the high-PDE receiving areas (i.e., the first receiving areas) and the low-PDE receiving areas (i.e., the second receiving areas) are arranged alternately. In the detection, one receiving area can receive one or more groups of slots, and each receiving area can be opened in turn to realize the scanning of the field of view. In combination with FIG. 17, the detection elements of the high-PDE receiving areas are more sensitive and can detect distant targets, meeting the high-resolution requirement of the detection result. The low-PDE receiving areas can be used to detect close-range targets. By alternately arranging the high-PDE receiving areas and the low-PDE receiving areas, a high dynamic range can be realized, the high resolution of the detection of distant targets can be ensured, and the near-end stray light can be reduced.

[0120] Further, since the close-range detection process is inserted in the distant-range detection process, the resolution of the detection data corresponding to the close-range slots can be low. At this time, the distant-range target points can be filled by interpolation, and the resolution can be repaired to ensure the consistency of the resolution of the detection result.

[0121] The foregoing is an example in which the first receiving areas and the second receiving areas are staggered in a certain direction. In some other possible designs, the shapes of the first receiving areas and the second receiving areas are not fixed as rectangles, for example, can be rectangles, circles, annular rings, wavy shapes, lightning shapes, etc. Referring to FIG. 18 and FIG. 19, the second receiving areas are annularly arranged around the first receiving areas. Further, the first receiving areas are used to receive the spot centers of the light beams, and the light of the edges of the light beams falls into the second receiving areas.

[0122] The embodiments of the present application can be combined without being mutually exclusive. For example, the area array detector shown in FIG. 18 can be used in a scanning detection device, the first receiving areas are located at the center of the ROI of the area array detector, and the second receiving areas around the first receiving areas are located at the edges of the ROI. For another example, in combination with FIG. 19, for the case in which the second receiving areas are annularly arranged around the first receiving areas, one first receiving area and the second receiving areas around the first receiving area are used to receive the return light beams of one channel. As shown in FIG. 19, the first receiving area #1 and the second receiving areas around the first receiving area #1 are used to receive the return light beams of Slot1, the first receiving area #1 and the second receiving areas around the first receiving area #1 are used to receive the return light beams of Slot2, and the remaining cases are similar.

[0123] Some possible implementation manners of the present application will be further introduced below.

[0124] In some possible implementation manners, the first receiving area includes a plurality of first pixels, and each first pixel includes at least one first detection element. The second receiving area includes a plurality of second pixels, and each second pixel includes at least one second detection element. In other words, one or more first detection elements in the first receiving area can constitute one pixel, and one or more second detection elements in the second receiving area can constitute another pixel. Since the receiving area is related to the spot distribution of the light beam and has a regional feature, the plurality of pixels included in one area have the same or similar PDEs of the detection elements in the plurality of pixels, the plurality of pixels with high PDEs can be used to receive light at the center of the spot of the light beam, and the plurality of pixels with low PDEs can be used to receive light at the edge of the spot of the light beam, so that the ability of the light beam can be more accurately acquired, the long-distance detection capability of the detection device is improved, and the influence of stray light on the detection performance is reduced.

[0125] In some possible implementation manners, the PDE of the first detection element is adjustable. For example, the PDE of the first detection element can be adjusted by adjusting the power supply voltage of the first detection element. For another example, the PDE of the first detection element can be adjusted by mechanically controlling the detection element in front of the first detection element to change the amount of light entering the first detection element. In general, the PDE of the first detection element can be adjusted according to actual needs, so that the area array detector can be applied to various application scenarios, and the use flexibility and service quality of the area array detector are improved.

[0126] In some possible implementation manners, the PDE of the second detection element is adjustable. For example, the PDE of the second detection element can be adjusted by adjusting the power supply voltage of the second detection element. In this way, the PDE of the second detection element can be adjusted according to actual needs, so that the area array detector can be applied to various application scenarios, and the use flexibility and service quality of the area array detector are improved.

[0127] The embodiments of the present application also provide a laser radar including the area array detector 12 described above. Alternatively, the laser radar includes the detection device 10 described above.

[0128] Further, the laser radar includes a housing configured to provide a receiving space to accommodate other modules in the laser radar, for example, to accommodate the area array detector 12 or the detection device 10.

[0129] The embodiments of the present application also provide a terminal including the area array detector 12 described above, or the detection device 10 described above, or the laser radar described above. Optionally, the terminal can be a smart terminal or a vehicle, such as a vehicle, a drone, or a robot.

[0130] Please refer to FIG. 20, which is a structural schematic diagram of a vehicle including a laser radar according to an embodiment of the present application. The laser radar can perceive the surrounding environment of the vehicle and obtain relevant information of targets in the surrounding environment. The relevant information of the targets can be used to control the vehicle or assist the driver to drive.

[0131] It should be understood that the laser radar mounting position shown in FIG. 20 is only an example. In specific implementations, the detection device can be mounted at other positions, for example, on the top of the cabin, or can also be mounted on the head of the vehicle, the side of the vehicle, or the tail of the vehicle, etc.

[0132] In the embodiments of the present application, the words such as "exemplarily" or "for example" are used to represent as an example, illustration or description. Any embodiment or design scheme described as "exemplarily" or "for example" in the present application should not be interpreted as more preferred or more advantageous than other embodiments or design schemes. Rather, the words such as "exemplarily" or "for example" are intended to present the relevant concept in a specific manner.

[0133] In the embodiments of the present application, "at least one" means one or more, and "multiple" means two or more. "At least one of the following" or the like means any combination of the items, including any combination of single item or multiple items. For example, at least one of a, b, or c can represent a, b, c, (a and b), (a and c), (b and c), or (a and b and c), where a, b, and c can be single or multiple. "And / or" describes the association relationship of the associated objects, which means that there can be three kinds of relationships, for example, A and / or B can represent three cases of A alone, A and B together, and B alone, where A and B can be singular or plural. The character " / " generally represents an "or" relationship between the associated objects.

[0134] In addition, unless otherwise stated, the ordinal numbers "first", "second", etc. used in the embodiments of the present application are used to distinguish multiple objects, and are not used to limit the order, time sequence, priority or importance of the multiple objects.

Claims

1. A focal plane array detector, characterized by, The area array detector comprises: a first receiving area and a second receiving area, the first receiving area and the second receiving area being adjacent; the first receiving area comprises a plurality of first detection elements arranged in two dimensions adjacently, the second receiving area comprises a plurality of second detection elements arranged in two dimensions adjacently, the first detection elements and the second detection elements are used for receiving a light beam, a photon detection efficiency (PDE) of the first detection elements being higher than a PDE of the second detection elements.

2. The area array detector of claim 1, wherein a center of a light spot of the light beam falls into the first receiving area, and an edge of the light spot of the light beam falls into the second receiving area.

3. The area array detector according to claim 1 or 2, characterized by The first receiving area and the second receiving area are staggered in a first direction.

4. The area array detector according to any one of claims 1 to 3, wherein The PDE of the first detection elements is adjustable, and / or the PDE of the second detection elements is adjustable.

5. The area array detector according to any one of claims 1 to 4, wherein a doping concentration of a depletion layer of the first detection elements is lower than a doping concentration of a depletion layer of the second detection elements, and / or a thickness of the depletion layer of the first detection elements is greater than a thickness of the depletion layer of the second detection elements.

6. The area array detector according to any one of claims 1 to 5, wherein The first detection elements comprise a first reflective plate located on a side of the first detection elements away from a light-sensitive surface of the first detection elements, the second detection elements comprise a second reflective plate located on a side of the second detection elements away from a light-sensitive surface of the second detection elements, an area of the first reflective plate is greater than an area of the second reflective plate.

7. The area array detector according to any one of claims 1 to 6, wherein The area array detector further comprises a first optical element, the first optical element is arranged in front of the light-sensitive surface of the first detection elements, and the first optical element is used for converging light into the first detection elements.

8. The area array detector according to any one of claims 1 to 7, wherein The area array detector further comprises a second optical element; the second optical element is arranged in front of the light-sensitive surface of the second detection elements, and the second optical element is used for diverging or blocking light into the second detection elements.

9. The area array detector according to any one of claims 1 to 6, wherein The area array detector further comprises a third optical element and a fourth optical element, the third optical element is arranged in front of the light-sensitive surface of the first detection elements, and the fourth optical element is arranged in front of the light-sensitive surface of the second detection elements, and the third optical element and the fourth optical element are different in property.

10. The area array detector according to any one of claims 1 to 9, wherein The first detection elements and the second detection elements are driven to work by a driving circuit applying a negative bias voltage, an absolute value of the negative bias voltage of the first detection elements is greater than an absolute value of the negative bias voltage of the second detection elements.

11. The area array detector of claim 10, wherein, a voltage across the driving circuit of the first detection elements is a first voltage and a second voltage, the first voltage being greater than the second voltage, and a voltage across the driving circuit of the second detection elements is a third voltage and a fourth voltage, the third voltage being greater than the fourth voltage; the first voltage is the same as the third voltage, and the second voltage is less than the fourth voltage, or, the second voltage is the same as the fourth voltage, and the first voltage is greater than the third voltage.

12. The area array detector of any of claims 1-11, wherein, an area of the light-sensitive surface of the first detection elements is greater than an area of the light-sensitive surface of the second detection elements.

13. The area array detector of any of claims 1-12, wherein, the first receiving area comprises a plurality of first pixels, each first pixel comprising at least one first detection element, The second receiving area includes a plurality of second pixels, each of which includes at least one second detection element.

14. The area array detector of any of claims 1-13, wherein, The area array detector is applied to a scanning detection device, The first receiving area is located in a middle region of a region of interest (ROI) of the area array detector, and the second receiving area is located in an edge region of the ROI of the area array detector.

15. The area array detector of any of claims 1-13, wherein, The area array detector includes a plurality of first receiving areas and a plurality of second receiving areas, Each of the first receiving areas is provided with one second receiving area on each side.

16. The area array detector of claim 15, wherein, The area array detector is used to receive a plurality of channels of return light beams, each channel of return light beams corresponding to a detection angle, Each of the first receiving areas and its adjacent two second receiving areas are used to receive a channel of return light beams.

17. The array detector of any one of claims 1-4, wherein, The area array detector is used to receive a plurality of channels of return light beams, A plurality of first receiving areas are used to receive return light beams of a part of the plurality of channels, A plurality of second receiving areas are used to receive return light beams of another part of the plurality of channels.

18. A detection device, characterized in that The detection device includes a transmission module and the area array detector of any one of claims 1-17, The transmission module is used to transmit a detection light beam, The area array detector is used to receive a return light beam, and the return light beam includes an echo of the detection light beam.

19. The probe device of claim 18, wherein, The detection device further includes a scanning module, which is used to scan the detection light beam to an object space and provide a return light beam from the object space to the area array detector.

20. The probe device of claim 18 or 19, wherein, The transmission module is an area array transmitter, the detection light beam includes a plurality of channels of light beams, and the return light beam includes a plurality of channels of light beams.

21. A lidar, comprising: The laser radar includes the area array detector of any one of claims 1-17, or the laser radar includes the detection device of any one of claims 18-20.

22. A terminal, characterized by The terminal includes the area array detector of any one of claims 1-17, or the terminal includes the detection device of any one of claims 18-20, or the terminal includes the laser radar of claim 21.

23. The terminal according to claim 22, characterized by The terminal includes a vehicle, a robot, or a drone. The terminal includes a vehicle, a robot, or a drone.

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