Fully-automated ultrasonic inspection system using robot arm

Abstract

The present invention provides an ultrasonic scanning system comprising: an unloader magazine on which at least one specimen is loaded in a preset arrangement; an ultrasonic scanning module for performing ultrasonic scanning on the specimen moved from the unloader magazine in a preset manner; a first immersion tank line, which provides a space in which ultrasonic scanning on the specimen is performed, has an ultrasonic transmission medium retained therein, is formed such that the specimen is immersed in the ultrasonic transmission medium, and is formed such that the specimen is movable in a preset direction; and a first robot arm for transferring the specimen to the ultrasonic scanning module, wherein, with respect to the specimen positioned in the first immersion tank line, ultrasonic scanning of the entire area of the specimen is performed by movement of the ultrasonic scanning module or the specimen.

Description

Fully automated ultrasonic inspection system using a robotic arm

[0001] The present invention relates to a fully automated ultrasound inspection system utilizing a robotic arm. More specifically, it relates to a system that performs efficient, high-speed, comprehensive inspection of a subject using two robotic arms on either side.

[0002] The technology of acquiring internal images of an object to be inspected by utilizing signals with frequencies in the ultrasonic wave range is being used in various fields, such as in the medical field targeting internal organs of the body or fetuses during pregnancy, and in the field of non-destructive testing (NDT) that detects internal defects without modifying manufacturing results.

[0003] Ultrasonic inspection can also be used to detect defects in semiconductor devices forming complex circuit patterns. Previously, ultrasonic inspections were limited to a small number of finished semiconductor devices, allowing for purposes such as determining defect rates. However, with the recent advancements in autonomous driving technology, defect inspection standards for semiconductors used in autonomous vehicles are gradually being strengthened to prevent vehicle accidents caused by component defects.

[0004] As a prior art, Korean Patent Publication No. 10-2014-0001138, "Ultrasonic Inspection Device and Ultrasonic Inspection Method," is disclosed. The prior art discloses a structure capable of obtaining a stable inspection image by forming an adjustable distance between a lens and the surface of a workpiece (meaning "subject") through a holder and a height adjustment means.

[0005] However, the above-mentioned prior art does not disclose a structure for simultaneously examining a plurality of subjects, and therefore, in fields where a full examination is required, the problem arises that the examination speed is bound to be significantly slow.

[0006] Therefore, in fields such as autonomous driving that require a very high level of manufacturing quality, there may be a need for the development of improved ultrasonic inspection devices that can reduce inspection time by performing comprehensive inspections of semiconductor devices rather than selective inspections while having high inspection precision to detect potential defects in semiconductor devices in advance.

[0007] (Patent Document 1) Korean Patent Publication No. 10-2014-0001138

[0008] The technical challenge to be addressed by the present invention is to propose an ultrasound scanning system utilizing a robotic arm that simultaneously achieves high inspection precision and high inspection speed, and a method utilizing the system. In particular, the present invention proposes a structure optimized for simultaneously inspecting and drying multiple specimens.

[0009] In order to solve the above-described problem, one embodiment of the present invention provides an ultrasound scanning system, comprising: an unloader magazine in which at least one subject is loaded in a preset arrangement; an ultrasound scanning module for performing ultrasound scanning on a subject moved from the unloader magazine in a preset manner; a first immersion line providing a space in which ultrasound scanning of the subject is performed, the first immersion line storing an ultrasound transmission medium and being formed such that the subject is immersed in the ultrasound transmission medium and is formed such that the subject can move in a preset direction; and a first robot arm for transferring the subject to the ultrasound scanning module; wherein the system provides a system in which ultrasound scanning of the entire area of ​​the subject positioned in the first immersion line is performed by movement of the ultrasound scanning module or the subject.

[0010] Preferably, the ultrasound scanning module may include an ultrasound probe array formed to correspond to the arrangement of the subject; and an ultrasound scanning driving unit that moves the ultrasound probe array in a first direction or a direction opposite to the first direction based on a plane.

[0011] Preferably, the first immersion tank line includes: a subject support module on which the subject is placed; and a first immersion tank drive module that moves the subject support module in a second direction perpendicular to the first direction or in a direction opposite to the second direction, based on a plane; and the first immersion tank drive module can be moved in the second direction or in a direction opposite to the second direction in a state in which the subject is placed.

[0012] Preferably, the first immersion tank driving module moves the subject support module in the second direction or in the opposite direction to the second direction, and the ultrasonic scanning module is positioned above the subject, but maintains a stationary state at a predetermined time at a position n based on the plane, so that ultrasonic scanning can be performed on the subject.

[0013] Preferably, the ultrasound scanning module can move from the n-th position to the n+1-th position, which is a preset distance in the first direction, and then maintain the stationary state after the subject support module performs a reciprocating movement based on the second direction.

[0014] Preferably, the second immersion line is arranged in parallel with the first immersion line; and the ultrasound scanning module is configured such that when ultrasound scanning targeting a subject located in one of the first and second immersion lines is completed, ultrasound scanning can be performed targeting a subject located in the other one.

[0015] Preferably, the marking chamber further comprises a marking chamber for performing marking on the subject in a preset manner; and the first robot arm can perform a transport for introducing the subject from the unloader magazine into the marking chamber; and a transport for moving the subject taken out from the marking chamber to the first immersion tank line.

[0016] Preferably, the marking chamber comprises first and second marking chambers arranged in parallel, and the subject can be introduced and withdrawn from the first and second marking chambers through a rail module and a tray means sliding along the rail module.

[0017] Preferably, the unloader magazine, the marking chamber, the first submersible line, and the rail module are arranged around the first robot arm on a plane, and the unloader magazine and the marking chamber are arranged in one area on the first robot arm, and the unloader magazine and the marking chamber are arranged in different diagonal directions on the first robot arm, and the rail module and the first submersible line are arranged in the other area opposite the one area, and the rail module and the first submersible line can be arranged in different diagonal directions on the first robot arm.

[0018] Preferably, the first robot arm is configured to be capable of rotational movement and vertical movement after fixing the subject in an adsorption manner, and can perform movements from the unloader magazine to an inlet rail tray provided on the marking chamber inlet rail; and from the first and second trays provided on the first and second rail modules, respectively, to the first immersion tank line.

[0019] Preferably, based on the second direction, the rear end of the first immersion tank line further includes a flipping module for flipping the upper and lower surfaces of the subject; the flipping module includes a flipping space for flipping the upper and lower surfaces of the subject, and when ultrasound scanning of one surface of the subject is completed, the completed subject can be introduced into the flipping space, flipped in a preset manner, and then re-entered into the first immersion tank line.

[0020] Preferably, the method further includes an air knife module for drying a subject whose upper and lower surfaces have been subjected to ultrasonic scanning within the first immersion tank line, and the air knife module may include at least one blowing unit for blowing air onto the subject in an air knife manner.

[0021] Preferably, the apparatus may further include a hot chamber module for secondarily drying the subject primarily dried in the air knife module; and a second robot arm for transferring the subject positioned in the air knife module to the hot chamber module.

[0022] Preferably, the hot chamber module includes first and second hot chamber modules, which can be operated alternately.

[0023] Preferably, the second robot arm takes out the dried specimen from the hot chamber module and moves it to a loading plate provided in a loading module, and the loading module stacks the specimen in a loader magazine located below, and moves the specimen placed on the loading plate to the loader magazine by turning the loading plate up and down.

[0024] Preferably, the loader magazine, the hot chamber module, and the first submersion line are arranged around the second robot arm on a plane, and the loader magazine and the first submersion line are arranged in one area on the second robot arm, and the loader magazine and the first submersion line are arranged in different diagonal directions on the first robot arm, and the hot chamber module can be arranged in the other area.

[0025] The effects of the present invention are as follows.

[0026] The present invention comprises a plurality of robot arms and an immersion line, and optimally controls the operation of the ultrasound scanning module and the robot arm, thereby performing ultrasound scanning on a large number of subjects in a short period of time, thereby maximizing the speed of subject examination.

[0027] Figure 1 is a schematic plan view showing the configuration of a system according to one embodiment of the present invention.

[0028] Figure 2 is a block diagram showing the overall configuration of a system according to one embodiment of the present invention.

[0029] Figure 3 is a schematic diagram showing the process of a subject being immersed and moved in a first immersion tank line of a system according to one embodiment of the present invention.

[0030] FIG. 4 is a schematic diagram showing the operation of the first immersion tank drive module in the first immersion tank line of the system according to one embodiment of the present invention.

[0031] FIG. 5 is a schematic diagram showing the operation of the ultrasonic scanning module in the first immersion tank line and the operation of the second immersion tank drive module in the second immersion tank line of the system according to one embodiment of the present invention.

[0032] Figure 6 is a schematic diagram showing the operation of a flipping module of a system according to one embodiment of the present invention.

[0033] Figure 7 is a schematic diagram showing the process in which a specimen, for which ultrasonic scanning of the second immersion tank line of Figure 6 has been completed, enters the flipping module and is flipped.

[0034] FIG. 8 is a schematic diagram showing the operation of the first and second hot chamber modules and the second robot arm of the system according to one embodiment of the present invention.

[0035] Fig. 9 is a schematic diagram showing the process of stacking a subject whose drying is completed in the first hot chamber module of Fig. 8 into a loader magazine by a second robot arm.

[0036] Figure 10 is a flowchart of the operation of a system according to one embodiment of the present invention.

[0037] The following drawings attached to this specification illustrate preferred embodiments of the present invention, and together with the detailed description of the invention described below, serve to further understand the technical idea of ​​the present invention, and therefore, the present invention should not be interpreted as being limited to matters described in such drawings.

[0038] The terms used in this invention are described as general terms widely used in the technical fields related to the invention. However, the meaning of the terms used in this invention may vary depending on the intentions of engineers working in the relevant field, the emergence of new technologies, examination standards, or precedents. Some terms may be arbitrarily selected by the applicant, in which case the meanings of such arbitrarily selected terms will be explained in detail. The terms used in this invention should be interpreted not simply based on their dictionary meanings, but rather based on their meanings reflecting the overall context of the specification.

[0039] Terms such as “comprises” or “comprising” used in the present invention should not be construed to necessarily include all of the components or steps described in the specification, and should also be construed to include cases where some components or steps are not included, and cases where additional components or steps are further included.

[0040] The terms described below are defined based on their functions within the present invention, and may vary depending on the intent or custom of the user, operator, or designer. Therefore, their definitions should be based on the contents of this specification.

[0041] The term "subject" as used herein includes semiconductor devices that are the subject of examination, as well as any object that can be examined using ultrasound scanning. It is also referred to as a "workpiece." While the present invention assumes that the subject is a square plate, its shape is not limited to this.

[0042] Additionally, the "first direction" used herein may be defined based on the direction of movement of the ultrasound scanning module (300). Based on the planar layout of the entire system illustrated in FIG. 1, the first direction may be understood as the direction in which the objects are arranged. Although the present invention is described based on a state in which a pair of objects are arranged, it is not limited thereto.

[0043] The 'second direction' of the present invention can be defined based on the direction of movement of the subject support module (231, 241) that supports the subject. The second direction can be understood as a direction perpendicular to the first direction based on the plane.

[0044] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Details widely known to those skilled in the art relating to the present invention will be omitted for brevity.

[0045] Fig. 1 is a schematic plan view showing the configuration of a system according to one embodiment of the present invention, and Fig. 2 is a block diagram showing the entire configuration of the system according to one embodiment of the present invention. The description will be made with reference to Figs. 1 and 2 together.

[0046] An ultrasonic scanning system according to one embodiment of the present invention includes an unloader magazine (101), a marking chamber (120, 140), a first robot arm (110), a first immersion tank line (210), a second immersion tank line (220), an ultrasonic scanning module (300), a flipping module (310), an air knife module (320), a hot chamber module (340, 350), a second robot arm (120), an alignment confirmation module (360), a loading module (370), and a loader magazine (102). The components for the operation of each component will be described separately.

[0047] Referring to Fig. 1, the layout of the entire system can be divided into left and right sides based on the first and second immersion tank lines (210, 220). Based on the illustration in Fig. 1, the first robot arm (110) is positioned on the left side, and the second robot arm (120) is positioned on the right side. Here, the area where the first robot arm (110) is positioned can be defined as the 'first area', and the area where the second robot arm (120) is positioned can be defined as the 'second area'. The present invention arranges the core processes in the first and second areas so that they operate organically, thereby efficiently utilizing space and minimizing the movement paths of the first and second robot arms (110, 120). In addition, there is an effect in that the first robot arm (110) can be utilized for various processes in the first area, and the second robot arm (120) can be utilized for various processes in the second area.

[0048] The first robot arm (110) moves the subject for ultrasound scanning, and the second robot arm (120) moves the subject for which ultrasound scanning has been completed.

[0049] At least one specimen can be loaded into the unloader magazine (101) in a magazine state with a preset arrangement. In the present invention, a specimen in the form of a square plate is described as an example. The unloader magazine (101) can be formed into a box structure in which a receiving space is formed so that such square plate shapes can be stacked.

[0050] The marking chamber (120, 140) includes a first marking chamber (120) and a second marking chamber (140). As described above, the system according to one embodiment of the present invention is a system in which ultrasound scanning is performed simultaneously on a pair of test subjects, and includes the first and second marking chambers (120, 140) to perform marking (engraving) on ​​each of them. In the first and second marking chambers (120, 140), for example, DMC (Data Matrix Code) marking is performed on the test subjects, thereby identifying each test subject. In other words, this means assigning a unique identification code to each test subject.

[0051] The first and second marking chambers (120, 140) are connected to a marking chamber inlet rail (160). The marking chamber inlet rail (160) extends parallel to the arrangement direction of the first and second marking chambers (120, 140), and is configured so that an inlet tray (161) slides on the marking chamber inlet rail (160). The first marking chamber (120) is provided with a first inlet rail (121), and the second marking chamber (140) is provided with a second inlet rail (141).

[0052] The subject (S) located in the unloader magazine (101) can be moved to the marking chamber (120, 140) in various ways. As an example, the marking chamber inlet rail (160) itself can be moved and alternatively connected to the first inlet rail (121) or the second inlet rail (141).

[0053] A first rail module (130) is provided at the rear end of the first marking chamber (120), and a second rail module (150) is provided at the rear end of the second marking chamber (120).

[0054] The first rail module (130) includes a first withdrawal portion (131), a first rail (133), and a first tray (132), and correspondingly, the second rail module (150) also includes a second withdrawal portion (151), a second rail (153), and a second tray (152). The first and second rail modules (130, 150) have similar overall shapes, but differ in some aspects, such as the extension length, for effective arrangement.

[0055] Here, the first and second trays (132, 152) can be moved to the rear ends of the first and second rails (133, 153), respectively, in order to minimize the movement distance of the first robot arm (110) while the subject (S) is seated thereon. In addition, it is necessary to prevent the subject (S) from being displaced from its original position when the first and second trays (132, 152) are moved by stably seating the subject (S) using a known method.

[0056] The movement of the first robot arm (110) can be broadly divided into two types.

[0057] The ‘first movement’ is the movement of moving the subject (S) from the unloader magazine (101) to the input tray (161).

[0058] The 'second movement' is an operation of moving the subject (S) to the entry part (201) of the first immersion tank line (210). In this case, the second movement means moving to a different location.

[0059] As illustrated in Fig. 1, a pair of test objects (S1, S2) are placed in predetermined positions in the entry section (201), which can be defined as the 'initial state'. That is, the entry section (201) has a first mounting position and a second mounting position, and since they are spaced apart, the first robot arm (110) distinguishes between them and moves the test objects (S1, S2). That is, the first robot arm (110) can be designed so as not to place the test objects in overlapping mounting positions.

[0060] The first robot arm (110) includes a joint part (111), and the joint part (111) is configured to be capable of rotational movement as well as vertical and left-right movement.

[0061] The immersion tank lines (210, 220) are divided into the first immersion tank line (210) and the second immersion tank line (220). Since the first immersion tank line (210) and the second immersion tank line (220) have the same basic structure, only the first immersion tank line (210) will be described.

[0062] The first immersion tank line (210) provides a space where ultrasound scanning of a subject is performed. An ultrasound transmission medium is stored therein, and the subject is configured to be immersed in the ultrasound transmission medium for ultrasound scanning. Although not depicted in the drawings herein, a pumping means and a flow path means may be provided to continuously circulate the ultrasound transmission medium.

[0063] The first immersion tank line (210) includes a subject support module (231) and a first immersion tank drive module (230). The subject support module (231) can be moved in a second direction while a pair of subjects (S1, S2) are placed thereon. With reference to Fig. 1, the second direction can be understood as a horizontal direction.

[0064] For a more detailed explanation, reference is made to FIGS. 3 and 4 together. FIG. 3 is a schematic diagram showing a process in which a subject is immersed and moved in a first immersion tank line of a system according to one embodiment of the present invention, and FIG. 4 is a schematic diagram showing the operation of a first immersion tank drive module in a first immersion tank line of a system according to one embodiment of the present invention.

[0065] The subject (S1) can be immersed in the ultrasonic transmission medium by moving downward while being seated on the subject support module (231). As illustrated in Fig. 4, the subject (S1) moves along the second direction while being seated on the subject support module (231). Here, the subject support module (231) can be understood as a reciprocating motion in which it moves not only in the second direction but also in the opposite direction to the second direction. For reference, the present invention defines the first direction and the second direction, and it is preferable to understand that both of these include a reciprocating motion.

[0066] The ultrasound scanning module (300) is positioned above the subject, but is positioned at a predetermined height from the surface of the ultrasound transmission medium, so as to irradiate ultrasound downward. The ultrasound scanning module (300) has an arrangement shape corresponding to the arrangement of the subject, but the shape of the subject can be designed in various ways, and thus the shape of the ultrasound probe array of the ultrasound scanning module (300) and the shape of the subject can be formed differently.

[0067] As an example, the ultrasound probe array is formed by dual ultrasound probes, and can perform ultrasound scanning of two subjects simultaneously.

[0068] In order to precisely examine the entire upper and lower surfaces of a subject, a system according to one embodiment of the present invention configures a subject support module (231) and an ultrasound scanning module (300) to be movable. That is, ultrasound scanning is performed using the relative motion between them. For more stable ultrasound scanning, the ultrasound scanning may be designed so that, rather than the ultrasound scanning module (300) moving, the subject support module (231) on which the subject is mounted moves at a low speed while performing ultrasound scanning.

[0069] In other words, in the 'scanning mode' by the ultrasonic scanning module (300), the ultrasonic scanning module (300) is maintained in a stationary state, and the subject support module (231) is configured to move in one direction or reciprocally in a low-speed movement state.

[0070] FIG. 5 is a schematic diagram showing the operation of the ultrasonic scanning module in the first immersion tank line and the operation of the second immersion tank drive module in the second immersion tank line of the system according to one embodiment of the present invention. Referring to FIG. 5, the operation of the ultrasonic scanning module (300) will be described in more detail.

[0071] The ultrasound scanning module (300) is moved in a first direction by a preset distance to perform ultrasound scanning on the front of the subject. That is, it is configured not to continuously move in the first direction, but to move by a preset distance and then stop.

[0072] Referring to (b) and (c) of FIG. 5, it can be confirmed that the ultrasound scanning module (300) moves in the first direction (meaning downward with respect to the drawing). When the ultrasound scanning module (300) moves, the subject support module (231) can be maintained in a stationary state, and when the movement of the ultrasound scanning module (300) is completed, the subject support module (231) can then move again.

[0073] Meanwhile, referring to Fig. 5, the operation of the subject support module (241) provided in the second immersion tank line (220) can be confirmed. The system according to one embodiment of the present invention can be understood as having a configuration in which the first and second immersion tank lines (210, 220) are provided, and an inspection is performed while moving using one ultrasound scanning module (300).

[0074] In order to improve the speed of ultrasound scanning inspection and to inspect more specimens in a short period of time, it is necessary for the first and second immersion tank lines (210, 220) to be connected in parallel rather than simply connected in parallel, and to operate in a linked manner.

[0075] That is, as shown in FIG. 5, when the ultrasonic scanning module (300) is positioned in the first immersion tank line (210) to perform an inspection, a process of preparing for the next ultrasonic scanning is performed in the second immersion tank line (220). When the operation of the ultrasonic scanning module (300) in the first immersion tank line (210) is completed, the ultrasonic scanning module (300) is immediately moved to the second immersion tank line (220). For a more detailed explanation, refer to FIG. 6.

[0076] FIG. 6 is a schematic diagram showing the operation of the flipping module of the system according to one embodiment of the present invention, and it can be seen that different operations are performed in the first and second submersible lines (210, 220).

[0077] In the first immersion tank line (210), the upper and lower surfaces of the test objects (S1, S2) are flipped by the flipping module (310). This is a method of inspecting the upper and lower surfaces of the test objects (S1, S2) respectively using the ultrasonic scanning module (300). In Fig. 6, the test objects (S1, S2) before flipping by the flipping module (310) and the test objects (S1', S2') after flipping are distinguished. Any known means for flipping the upper and lower surfaces of the test objects can be applied to the flipping module (310).

[0078] Meanwhile, ultrasonic scanning is performed in the second immersion tank line (220). The method performed in the second immersion tank line (220) can be understood in the same manner as in the first immersion tank line (210).

[0079] Figure 7 is a schematic diagram showing the process in which a subject whose ultrasound scanning of the second immersion tank line of Figure 6 has been completed enters the flipping module and is flipped.

[0080] Referring to FIG. 7, it can be confirmed that ultrasonic scanning is performed in the first immersion tank line (210), and the test object (S3, S4) located in the second immersion tank line (220) is moved toward the flipping module (310) and converted into a test object (S3', S4') in an inverted state.

[0081] Referring back to FIG. 1, the first robot arm (110) can move the subject to the entry section (201) on the side of the first immersion tank line (210) or to the entry section (201) on the side of the second immersion tank line (220). In addition, the flipping module (310) can have a flipping mounting section (311, 312, 313, 314) for flipping the subject to be positioned on the rear side of the first and second immersion tank lines (210, 220).

[0082] The air knife module (320) may be positioned at the rear end of the flipping module (310). It includes at least one blowing unit that sprays air onto the subject in the form of a pair of air knives. The air knives may be configured to reciprocate, and a guide rail may be provided to guide the movement of the air knives. In this way, the drying efficiency of the subject can be maximized by the movement of the air knives.

[0083] Here, the air knife module (320) may be connected to the extraction drive module (330). In the flipping module (310), a subject whose upper and lower surfaces have already undergone ultrasound scanning may be waiting, and at this time, the subject may be moved from the flipping module (310) to the air knife module (320) by the extraction drive module (330). Various known methods may be applied, but as an example, the subject may be moved using an absorption method.

[0084] FIG. 8 is a schematic diagram showing the operation of the first and second hot chamber modules and the second robot arm of the system according to one embodiment of the present invention, and FIG. 9 is a schematic diagram showing the process of stacking a subject whose drying is completed in the first hot chamber module of FIG. 8 by the second robot arm into a loader magazine.

[0085] The operation of the hot chamber module (340, 350) and the second robot arm (120) will be described with reference to FIGS. 8 and 9.

[0086] The hot chamber module (340, 350) provides an internal space for secondarily completely drying the subject that has been primarily dried in the air knife module (320). The hot chamber module (340, 350) may be composed of a first hot chamber module (340) and a second hot chamber module (350) arranged in parallel, and these may be operated alternately. Since the second robot arm (120) cannot simultaneously extract the subject located in the first and second hot chamber modules (340, 350), it is preferable that the covers of these modules be opened and closed alternately.

[0087] The hot chamber module (340, 350) is formed by a hot air circulation method and operates at a preset temperature and time. As an example, the maximum temperature can be set to 180 degrees and the operating time can be set to 125 seconds or less. The maximum temperature and operating time can be set differently depending on the characteristics of the subject. If the maximum temperature is exceeded, the operation of the heating means is automatically turned off, so it is preferable to have a temperature sensor (not shown) connected to the processor inside.

[0088] Referring to FIGS. 8 and 9, the device includes an alignment verification module (360), a loading module (370), and a loader magazine (102). The alignment verification module (360) is a means for verifying alignment before stacking in the loader magazine (102). Various known methods may be applied, but as an example, an optical scanning method may be used to verify alignment of the subject.

[0089] The second robot arm (120) removes the subject from the first and second hot chamber modules (340, 350) and then moves it to the alignment confirmation module (360) to confirm the alignment of the subject. Thereafter, the subject is moved again to the loading module (370).

[0090] The loading module (370) can be understood as a configuration for stably stacking a subject whose ultrasound scanning has been completed in the loader magazine (102). As an example, the loading module (370) may be equipped with a loading plate (371), and the second robot arm (120) may place the subject on the loading plate (371). Thereafter, the loading plate (371) may be configured to rotate downward and then insert the subject into the loader magazine (102). The loading plate (371) may be equipped with an adsorption means for stably rotating the subject.

[0091] Figure 10 is a flowchart of the operation of a system according to one embodiment of the present invention.

[0092] Referring to FIG. 10, it can be divided into a first region where the first robot arm (110) is positioned and a second region where the second robot arm (120) is positioned.

[0093] Unloading, marking, first and second immersion tank transfer, ultrasonic scanning (top and bottom), and flipping are performed in the first area, while subsequent operations such as air knife drying, hot chamber transfer, hot chamber drying, alignment, reversal, and loading are performed in the second area.

[0094] Here, unloading and submersion tank transport are performed by the first robot arm (110), and hot chamber transport and alignment are performed by the second robot arm (120).

[0095] As described above, although the present invention has been described by limited embodiments and drawings, the present invention is not limited thereto, and various modifications and variations are possible by a person having ordinary skill in the art to which the present invention pertains within the scope of the technical idea of ​​the present invention and the equivalent scope of the patent claims to be described below.

Claims

1. As an ultrasonic scanning system, An unloader magazine in which at least one subject is loaded in a preset arrangement; An ultrasound scanning module that performs ultrasound scanning on a subject moved in a preset manner from the above unloader magazine; A first immersion line that provides a space where ultrasound scanning is performed on the subject, wherein an ultrasound transmission medium is stored and the subject is formed so that it is immersed in the ultrasound transmission medium, and the subject is formed so that it can move in a preset direction; and A first robotic arm for transporting a subject to the ultrasound scanning module; The subject located in the first immersion tank line is, By the movement of the ultrasound scanning module or the subject, ultrasound scanning is performed on the entire area of ​​the subject. System.

2. In paragraph 1, The above ultrasound scanning module, An ultrasonic probe array formed to correspond to the arrangement of the above-mentioned subject; and An ultrasonic scanning driving unit that moves the ultrasonic probe array in a first direction or a direction opposite to the first direction based on a plane; System.

3. In paragraph 2, The above first submerged tank line is, A subject support module on which the subject is placed; and It includes a first immersion tank driving module that moves the subject support module in a second direction perpendicular to the first direction or in a direction opposite to the second direction, based on the plane; The above first submersible drive module, The subject is moved in the second direction or in the opposite direction to the second direction while the subject is seated. System.

4. In paragraph 3, The above first submersible drive module, The above-mentioned subject support module is moved in the second direction or in the opposite direction to the second direction, The above ultrasound scanning module, An ultrasound scan is performed on the subject while maintaining a stationary state for a preset time at a position n based on a plane, while being positioned above the subject. System.

5. In paragraph 4, The above ultrasound scanning module, After the above-mentioned subject support module performs a reciprocating movement based on the second direction, in a stopped state, Move from the above n-th position to the n+1-th position, which is a preset distance in the first direction, and maintains a stationary state. System.

6. In paragraph 1, Further comprising a second immersion tank line arranged parallel to the first immersion tank line; The above ultrasound scanning module, When the ultrasound scanning targeting the subject located in one of the first and second immersion tank lines is completed, the ultrasound scanning is performed targeting the subject located in the other one. System.

7. In paragraph 1, Further comprising a marking chamber for performing imprinting on a subject in a preset manner; The above first robot arm, Transport for introducing the subject from the unloader magazine into the marking chamber; and A transport device that moves the specimen withdrawn from the marking chamber to the first immersion tank line; System.

8. In paragraph 7, The above marking chamber is, comprising first and second marking chambers arranged in parallel, The above first and second marking chambers, The subject is introduced and withdrawn through a rail module and a tray means sliding along the rail module. System.

9. In paragraph 8, The above unloader magazine, marking chamber, first submersible line, and rail module are, Based on the plane, the first robot arm is arranged around the center, Based on the first robot arm, the unloader magazine and the marking chamber are arranged in one area, and the unloader magazine and the marking chamber are arranged in different diagonal directions with the first robot arm as the center. In the other area opposite to the one side, the rail module and the first submersible line are arranged, and the rail module and the first submersible line are arranged in different diagonal directions with the first robot arm as the center. System.

10. In paragraph 8, The above first robot arm, After fixing the above-mentioned subject by suction, it is configured to be capable of rotation and vertical movement. Move from the above unloader magazine to the inlet rail tray provided on the marking chamber inlet rail; and Moving from the first and second trays provided in the first and second rail modules, respectively, to the first submerged tank line; System.

11. In paragraph 3, Based on the above second direction, at the rear end of the first submerged line, Further comprising a flipping module for reversing the upper and lower surfaces of the subject; The above flipping module, It includes a flipping space that reverses the upper and lower surfaces of the subject, When the ultrasound scanning of one side of the above-mentioned subject is completed, the completed subject is introduced into the flipping space, flipped in a preset manner, and then re-entered into the first immersion tank line. System.

12. In paragraph 11, It further includes an air knife module for drying a specimen whose upper and lower surfaces have been subjected to ultrasound scanning within the first immersion tank line; The above air knife module, Comprising at least one blowing part that blows air to the subject in an air knife manner, System.

13. In paragraph 12, A hot chamber module that secondarily dries the specimen that has been primarily dried in the above air knife module; and A second robot arm that transfers the subject positioned in the air knife module to the hot chamber module; System.

14. In paragraph 13, The above hot chamber module, It includes first and second hot chamber modules, which are operated alternately. System.

15. In paragraph 13, The above second robot arm, After taking out the dried specimen from the hot chamber module, it is moved to the loading plate provided in the loading module. The above loading module, Stacking the subject in a loader magazine located at the bottom, and moving the subject settled on the loading plate to the loader magazine by turning the loading plate up and down. System.

16. In paragraph 15, The above loader magazine, hot chamber module and first submersible line are, Based on the plane, the second robot arm is arranged around the center, Based on the second robot arm, the loader magazine and the first submersible line are arranged in one area, and the loader magazine and the first submersible line are arranged in different diagonal directions with the first robot arm as the center. In the above-mentioned other side area, the hot chamber module is placed, System.

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