Substrate transport system

Abstract

This substrate transport system (1) comprises: a horizontal articulated robot (2) that has a hand (3) for holding a substrate (9) and that transports the substrate; a camera (5) that images the substrate; and controllers (18, 20) that receive the imaging data from the camera and detect the color, temperature, or wetness of the surface of the substrate.

Description

Substrate Transfer System

[0001] The technology disclosed herein relates to a substrate transfer system.

[0002] Patent Document 1 describes a conventional substrate transfer system. The substrate transfer system includes a horizontal articulated robot. A hand of the robot holds a substrate. The robot transfers the substrate held by the hand.

[0003] The substrate transport system includes a camera. The camera is fixed to the hand. The camera photographs the hand when the hand is not holding a substrate. A diagnostic device including a computer determines whether deformation has occurred in the hand based on the image photographed by the camera.

[0004] Patent No. 6718352

[0005] Information about the substrate can be used by a substrate transport system, including a robot, but conventional systems are unable to obtain information about the substrate.

[0006] The technology disclosed herein relates to a substrate transfer system that includes a horizontal articulated robot having a hand for holding a substrate and for transferring the substrate, a camera for photographing the substrate, and a controller for receiving photographic data from the camera and detecting the color of the substrate.

[0007] The substrate transport system described above can obtain information about the substrate because the camera takes an image of the substrate.

[0008] FIG. 1 shows a substrate transport system. FIG. 2 is a block diagram of the substrate transport system. FIG. 3 shows a robot hand. FIG. 4 is an image of a substrate taken by a camera. FIG. 5 shows a table representing the relationship between substrate color and sensor threshold value. FIG. 6 is a flowchart showing a procedure for changing the sensor threshold value. FIG. 7 is an image of a substrate taken by a camera. FIG. 8 is a flowchart showing a procedure for transporting a substrate after a cleaning process. FIG. 9 is a flowchart showing a procedure for transporting a substrate after heat treatment. FIG. 10 shows a substrate transport system according to a modified example. FIG. 11 is a block diagram of a substrate transport system according to a modified example.

[0009] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The substrate transfer system described herein is an example, and will be described below with reference to the accompanying drawings.

[0010] (Substrate Transfer System) Fig. 1 is a plan view of the substrate transfer system 1. Fig. 2 is a block diagram of the substrate transfer system 1. The substrate transfer system 1 includes a robot system 6. The substrate transfer system 1 transfers a substrate 9 using the robot system 6. The substrate 9 is a semiconductor wafer or a glass substrate. The substrate transfer system 1 is, for example, an Equipment Front End Module (EFEM). The substrate transfer system 1 is, for example, a sorter. The substrate transfer system 1 is, for example, a stocker.

[0011] The substrate transfer system 1 includes a housing 10. The housing 10 has a first wall 11, a second wall 12, a third wall 13, and a fourth wall 14. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 are each perpendicular to the floor. The first wall 11 and the third wall 13 face each other in a first direction. The second wall 12 and the fourth wall 14 face each other in a second direction. The second direction is perpendicular to the first direction. The first wall 11 and the second wall 12, and the first wall 11 and the fourth wall 14 are connected to each other, and the third wall 13 and the second wall 12, and the third wall 13 and the fourth wall 14 are connected to each other. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 form a closed transfer space 15.

[0012] The housing 10 also has a ceiling wall. The ceiling wall is connected to the first wall 11, the second wall 12, the third wall 13, and the fourth wall 14, and closes the upper end of the transfer space 15. An aligner 42 is located in the transfer space 15. The aligner 42 aligns the substrate 9. The aligner 42 is not an essential element of the substrate transfer system 1 or the robot system 6.

[0013] The substrate transfer system 1 has a load port 19. Note that the load port 19 is not an essential element of the substrate transfer system 1. The substrate transfer system 1 has a plurality of load ports 19. The plurality of load ports 19 are lined up along the first wall 11.

[0014] A FOUP (Front Opening Unified Pod) 41 is attached to the load port 19. The FOUP 41 houses the substrate 9. A FOUP opener of the load port 19 opens and closes the lid of the FOUP 41. When the FOUP opener opens the lid, the transfer space 15 and the FOUP 41 communicate with each other through the opening 17.

[0015] The illustrated substrate transfer system 1 transfers substrates 9 from the FOUP 41 to the substrate processing equipment 4, and also transfers substrates 9 from the substrate processing equipment 4 to the FOUP 41. Note that the substrate processing equipment 4 is not an essential element of the substrate transfer system 1 or the robot system 6.

[0016] The substrate processing equipment 4 performs, for example, heat treatment, impurity introduction treatment, thin film formation treatment, lithography treatment, cleaning treatment, and planarization treatment on the substrate 9. Alternatively, the substrate processing equipment 4 inspects the appearance or dimensions of the substrate 9. Alternatively, the processing performed by the substrate processing equipment 4 may be temporary accommodation of the substrate 9 for delivery. Here, accommodation of the substrate 9 by the substrate processing equipment 4 is also included in the processing of the substrate 9. The third wall 13 separates the transfer space 15 from the substrate processing equipment 4. The third wall 13 has an opening 16. The opening 16 is openable and closable. When the opening 16 is open, the transfer space 15 and the substrate processing equipment 4 communicate with each other, and when the opening 16 is closed, communication between the transfer space 15 and the substrate processing equipment 4 is blocked.

[0017] The substrate transfer system 1 includes a robot 2. The robot 2 transfers substrates 9 between a hoop 41, an aligner 42, and the substrate processing equipment 4 (see the solid lines and the two-dot chain lines in FIG. 1 ). The robot 2 is located within a transfer space 15. The robot 2 is a horizontal articulated robot. The robot 2 may be movable within the transfer space 15 along rails laid in the transfer space 15. The structure of the robot 2 will be described later.

[0018] The substrate transfer system 1 has a system controller 18. Note that the system controller 18 is not an essential element of the substrate transfer system 1 or the robot system 6. The system controller 18 performs overall control of the substrate transfer system 1. The system controller 18 has a processor 181 and a memory 182. The processor 201 includes one or more central processing units (CPUs). The processor 181 is configured with one or more chips. The memory 182 is configured with a random access memory (RAM) or a read only memory (ROM). The memory 182 is, for example, a non-volatile memory. The processor 181 controls the substrate transfer system 1 in accordance with software stored in the memory 182.

[0019] The robot controller 20 is electrically connected to the system controller 18. The electrical connection may be wired or wireless. The robot controller 20 is also electrically connected to the robot 2. The robot controller 20 and the robot 2 constitute a robot system 6.

[0020] The robot controller 20 controls the robot 2. The robot controller 20 has a processor 201 and a memory 202. The processor 201 includes one or more CPUs. The processor 201 is configured with one or more chips. The memory 202 is configured with RAM or ROM. The memory 202 is, for example, a non-volatile memory. The processor 201 calculates control command values ​​for the robot 2 in accordance with software stored in the memory 202.

[0021] The robot controller 20 receives a control signal from the system controller 18 and outputs a control signal to the robot 2. The robot 2 receives the control signal from the robot controller 20 and transports the substrate 9. Note that the robot controller 20 is not an essential element of the substrate transport system 1 or the robot system 6.

[0022] The robot controller 20 controls the robot 2 as well as the peripheral devices of the robot 2. The peripheral devices of the robot 2 also include a sensor 36 of the hand 3, which will be described later.

[0023] The aligner 42 is electrically connected to the robot controller 20. The electrical connection may be a wired or wireless connection. The aligner 42 is one of the peripheral devices and is controlled by the robot controller 20.

[0024] (Structure of Robot) As described above, the robot 2 is a horizontal articulated robot. As shown in Fig. 1 , the robot 2 has a base 21. The base 21 is installed in the transfer space 15. The robot 2 has a manipulator 200. The manipulator 200 includes an arm 22 and a hand 3.

[0025] The base 21 supports the arm 22. The arm 22 is movable up and down relative to the base 21. The arm 22 has links 221 and 222. The arm 22 has a plurality of links 221 and 222. The arm 22 of the illustrated robot 2 has two links, link 221 and link 222. Note that the number of links forming the arm 22 is not limited to two.

[0026] A first end of link 221 is supported by base 21. Base 21 supports the first end of link 221. Link 221 is rotatable about a first axis X1 extending in the vertical direction relative to base 21. A second end of link 221 is connected to a first end of link 222. Link 222 is rotatable about a second axis X2 extending in the vertical direction relative to link 221.

[0027] The hand 3 is connected to a second end of the link 222. The hand 3 is rotatable relative to the link 222 about a third axis X3 extending in the vertical direction.

[0028] 3 shows the hand 3. The hand 3 is an end effector that holds the substrate 9. The hand 3 has a main body 31 and a holding portion 32. The main body 31 supports the holding portion 32. The main body 31 is rotatably connected to the second end of the link 222.

[0029] As shown in the upper diagram of FIG. 3, the holding portion 32 is substantially Y-shaped in plan view, and as shown in the lower diagram of FIG. 3, it is in the form of a thin plate.

[0030] The hand 3 generally holds the substrate 9 in various ways, such as gripping, suction, placement, or engagement. The hand 3 in the illustrated example is an edge grip hand. The hand 3 has an edge guide 33, a second guide 34, and an actuator 35. The edge guide 33, the second guide 34, and the actuator 35 constitute the grip 30 of the hand 3. The edge guide 33 is located at the tip of the holding portion 32 and engages with the outer edge of the substrate 9. The second guide 34 is located at the base end of the holding portion 32. The second guide 34 is located on the opposite side of the substrate 9 from the edge guide 33. The actuator 35 is, for example, an expandable air cylinder. The actuator 35 displaces the second guide 34 so as to move closer to and away from the substrate 9 (see the arrows in the upper diagram of Figure 3 ). As the second guide 34 approaches the substrate 9, the edge guide 33 and the second guide 34 sandwich the substrate 9. The hand 3 grips the substrate 9. As the second guide 34 moves away from the substrate 9, the substrate 9 is released from being held by the edge guide 33 and the second guide 34. The hand 3 releases its grip on the substrate 9.

[0031] The robot 2 has a sensor 36. The sensor 36 detects the substrate 9 held by the hand 3. The sensor 36 is attached to the hand 3 as shown in an enlarged view in the lower diagram of FIG. 3. The sensor 36 is, for example, an optical sensor. The sensor 36 detects the substrate 9 held by the hand 3.

[0032] 2, the sensor 36 has an emitter 361 and a receiver 362. The emitter 361 emits light onto the substrate 9, and the receiver 362 receives the light reflected by the surface of the substrate 9.

[0033] The sensor 36 has a comparator 363. The comparator 363 compares the amount of light received by the receiver 362 with a threshold value. When the amount of light received by the receiver 362 exceeds the threshold value, the sensor 36 outputs a detection signal for the substrate 9 to the robot controller 20. The robot controller 20 can detect that the substrate 9 is being held by the hand 3. When the hand 3 is not holding the substrate 9, the receiver 362 does not receive reflected light, and therefore the sensor 36 does not output a detection signal for the substrate 9. The robot controller 20 can detect that the substrate 9 is not being held by the hand 3.

[0034] The threshold value of the sensor 36 is changed by the robot controller 20. The change of the threshold value will be described in detail later.

[0035] (Camera for Photographing Board) The robot system 6 includes a camera 5. The camera 5 photographs the board 9. As shown in FIG. 3 , the camera 5 is fixed to the hand 3 of the robot 2. More specifically, the camera 5 is fixed to the upper surface of the main body 31 of the hand 3. The camera 5 photographs the board 9 held by the hand 3. The camera 5 photographs the board 9, for example, while the robot 2 is transporting the board 9. The camera 5 can also photograph the board 9, for example, while the robot 2 is stopped and not transporting the board 9. The camera 5 can also photograph the board 9 when the board 9 is located on the hand 3 but the grip 30 is not gripping the board 9.

[0036] The camera 5 includes, for example, an image sensor 51 and a lens. The lens focuses light onto the image sensor 51. The image sensor 51 outputs a signal corresponding to the amount of light received. The image sensor is a charge coupled device (CCD) sensor or a complementary metal oxide semiconductor (CMOS) sensor.

[0037] 4 is an example of an image 50 captured by the camera 5. The camera 5 is fixed to the hand 3 so as to capture an image of the entire or almost entire surface of the substrate 9 held by the hand 3. As shown in FIG. 3, the optical axis of the camera 5 is set horizontally or downwardly relative to the horizontal, and when the surface of the substrate 9 is viewed from above, the optical axis of the camera 5 passes through the center of the substrate 9.

[0038] The lens has an angle of view that allows the entire surface of the substrate 9 held by the hand 3 to be captured. The distance between the camera 5 and the substrate 9 held by the hand 3 is short. If the angle of view of the lens is wide, the entire surface of the substrate 9 will fit within the image 50 even if the distance between the camera 5 and the substrate 9 is short.

[0039] The image sensor 51 is a color sensor and has light-receiving elements that determine the intensity of received light for each of the red (R), green (G), and blue (B) components. The image 50 captured by the camera 5 is a color image. However, it is not excluded that the image captured by the camera 5 may be a black-and-white image.

[0040] The robot controller 20 or the system controller 18 receives data of the images 50 taken by the camera 5. The robot controller 20 may receive the data of the images 50 taken by the camera 5, or the system controller 18 may receive the data of the images 50 taken by the camera 5. Both the robot controller 20 and the system controller 18 may receive the data of the images 50 taken by the camera 5.

[0041] In the following description, it is assumed that the robot controller 20 receives data captured by the camera 5 and performs control based on the data from the camera 5 .

[0042] The system controller 18 may receive data of the image 50 taken by the camera 5, and the system controller 18 may perform control based on the data from the camera 5. The robot controller 20 may receive data of the image 50 taken by the camera 5, and the system controller 18 may perform control based on the data from the camera 5. The system controller 18 may receive data of the image 50 taken by the camera 5, and the robot controller 20 may perform control based on the data from the camera 5.

[0043] The image 50 data transmitted by the camera 5 includes information on the received light intensity of each RGB component at each pixel position. The robot controller 20 determines the color of each pixel position from the ratio of the received light intensity of each RGB component at each pixel position.

[0044] Since the camera 5 is fixed to the hand 3, the pixel positions occupied by the surface of the substrate 9 in the image 50 captured by the camera 5 are determined in advance. Information on the pixel positions corresponding to the surface of the substrate 9 may be stored in the memory 202 of the robot controller 20. The robot controller 20 identifies the substrate 9 in the image 50 based on the information in the memory 202.

[0045] The robot controller 20 may identify the substrate 9 in the image 50 captured by the camera 5 by extracting edges based on brightness differences in the image 50 .

[0046] Based on the position of the substrate 9 identified in the image 50, the robot controller 20 detects the color of the substrate 9, detects the wetness of the surface of the substrate 9, or detects the temperature of the substrate 9, as will be described later.

[0047] The interior of the transport space 15 is bright enough to illuminate the substrate 9 so that the image sensor 51 can receive light reflected from the substrate 9. The substrate transport system 1 may have a light source for photography, for example, in the transport space 15. The light intensity of the light source is set according to the light receiving sensitivity of the image sensor 51. The light source may be white light containing all RGB components so that the color of the substrate 9 can be determined based on the intensity ratio of each RGB component received by the image sensor 51.

[0048] (Detection of substrate color using camera image data) As described above, the robot controller 20 receives data captured by the camera 5. Based on the image 50 of the substrate 9 captured by the camera 5, the robot controller 20 identifies the substrate 9 in the image 50, and detects the color of the substrate 9 from the intensity ratio of each RGB component of the pixel corresponding to the substrate 9 (see FIG. 4 ).

[0049] The color of the substrate 9 varies depending on the type or thickness of the film formed on the surface of the substrate 9. The robot controller 20 determines the type of substrate 9 held by the hand 3 based on the color of the substrate 9. The memory 202 of the robot controller 20 pre-stores correspondence information between the color of the substrate 9 and the type of the substrate 9. FIG. 5 illustrates an example of the correspondence information stored in the memory 202. The correspondence information is a table 203. The table 203 includes correspondence information between the substrate color and the substrate type. In the example of FIG. 5, the robot controller 20 determines at least "black," "blue," "purple," "yellow," and "green" as the color of the substrate 9. Based on the determined color of the substrate 9, the robot controller 20 determines the type of film formed on the surface of the substrate 9, i.e., "no film formed," "oxide film," or "other film formed." Other film types include Ti / Al film, SiN film, and TEOS film.

[0050] As described above, the sensor 36 of the hand 3 switches between outputting and not outputting a detection signal for the substrate 9 based on the amount of light reflected by the surface of the substrate 9. In other words, if the amount of reflected light received by the sensor 36 exceeds a threshold value, the sensor 36 outputs a detection signal for the substrate 9. The robot controller 20 determines that the hand 3 is holding the substrate 9. If the amount of reflected light received by the sensor 36 is equal to or less than the threshold value, the sensor 36 does not output a detection signal for the substrate 9. The robot controller 20 determines that the hand 3 is not holding the substrate 9.

[0051] The intensity of light reflected from the surface of the substrate 9 varies depending on the color of the substrate 9. When the color of the substrate 9 is, for example, black or gray, light reflection from the surface of the substrate 9 is suppressed, thereby reducing the intensity of the reflected light. The threshold value of the sensor 36 is generally preset to a constant value corresponding to the color of the surface of the substrate 9 held by the hand 3. However, when the color of the substrate 9 held by the hand 3 changes, if the threshold value is constant, there is a risk that the hand 3 may erroneously determine that it is not holding the substrate 9, even though it is actually holding the substrate 9, due to the relatively low intensity of the reflected light. Stopping the robot system 6 or the substrate transfer system 1 due to an erroneous determination by the sensor 36 reduces the efficiency of the robot system 6 or the substrate transfer system 1.

[0052] Therefore, the robot controller 20 adjusts the threshold value of the sensor 36 in accordance with the color of the substrate 9 determined based on the image 50 captured by the camera 5. Since the threshold value of the sensor 36 matches the color of the substrate 9, erroneous determination by the sensor 36 is suppressed. A decrease in the efficiency of the robot system 6 or the substrate transport system 1 due to erroneous determination by the sensor 36 is suppressed.

[0053] 5 associates the color of the board 9 with setting information for the threshold of the sensor 36. The robot controller 20 changes the threshold of the sensor 36 depending on the determined color of the board 9. If the color of the board 9 is black, the intensity of the reflected light decreases, so the threshold of the sensor 36 is set to 50%. If the color of the board 9 is blue, purple, yellow, or green, the intensity of the reflected light does not decrease, so the threshold of the sensor 36 is set to 100%.

[0054] 6 is a flowchart showing a procedure for changing the threshold value of the sensor 36 by the robot controller 20. The flow of FIG. 6 relates to the control of the robot 2 transporting the substrate 9 unloaded from the FOUP 41 to the substrate processing equipment 4.

[0055] It should be noted that the flowchart of FIG. 6 may be modified by rearranging the order of steps, omitting some steps, or adding other steps.

[0056] In step S61, the robot controller 20 sets the threshold value of the sensor 36 to an initial value. The initial value may be 100%. In step S62, the robot controller 20 determines that the hand 3 of the robot 2 has reached the substrate unloading position. The unloading position is in front of the opening 17 of the FOUP 41. The process of FIG. 6 repeats step S62 until the hand 3 reaches the unloading position.

[0057] When the hand 3 reaches the unloading position, the robot controller 20 instructs the robot 2 to unload the substrate 9 from the FOUP 41 in step S63. After unloading the substrate 9, the robot 2 temporarily stops.

[0058] In step S64, the sensor 36 detects the substrate 9. The robot controller 20 determines whether a detection signal has been received from the sensor 36. If a detection signal has been received from the sensor 36, the robot controller 20 detects that the substrate 9 is being held by the hand 3. The determination in step S64 is Yes, and the robot controller 20 causes the robot 2 to transport the substrate 9 in the following step S65. The robot 2, which had been stopped, starts transporting the substrate 9 in step S65 and transports it to the substrate processing equipment 4.

[0059] If the determination in step S64 is No, in step S67, the robot controller 20 causes the camera 5 to photograph the board 9. Note that the robot 2 may continue to be stopped from step S63 when the camera 5 photographs the board 9. The image 50 photographed by the camera 5 is sent to the robot controller 20.

[0060] In step S68, the robot controller 20 identifies the substrate 9 in the image 50 based on the image 50, and detects the color of the substrate 9 from the intensity ratio of each RGB component of the pixel corresponding to the substrate 9.

[0061] In step S69, the robot controller 20 determines a threshold value corresponding to the color of the substrate 9 held by the robot 2 by referring to the table 203 stored in the memory 202. The robot controller 20 sets the threshold value in the comparator 363 of the sensor 36 to the determined threshold value.

[0062] In step S610, the sensor 36 re-executes detection of the substrate 9 based on the reset threshold value. The robot controller 20 determines whether a detection signal has been received from the sensor 36. If a detection signal has been received from the sensor 36, the robot controller 20 can detect that the substrate 9 is being held by the hand 3. The determination in step S610 is Yes, and the process in FIG. 6 returns to step S65. The robot controller 20 causes the robot 2 to transport the substrate 9.

[0063] Furthermore, if the robot controller 20 does not receive a detection signal from the sensor 36 in step S610, the robot controller 20 determines that the robot 2 is not holding the substrate 9, and performs error processing in step S611, thereby ending the process of Fig. 6. As error processing, the substrate transfer system 1 may be stopped. Alternatively, as error processing, the system controller 18 may issue a warning to the operator.

[0064] When the robot 2 completes the transfer of the substrate 9 in step S65, the robot controller 20 determines in the following step S66 whether there is a next substrate 9 to be transferred. If there is a next substrate 9, the process of FIG. 6 returns to step S62. In steps S62 and S63, the robot 2 transfers the next substrate 9 out of the hoop 41. If the color of the substrate 9 does not change, the sensor 36 can detect the substrate 9, and the robot 2 can continue to perform the transfer operation of the substrate 9 in steps S64 and S65.

[0065] If the color of the substrate 9 changes, the threshold value of the sensor 36 is changed in step S69 according to the color of the substrate 9. By changing the threshold value, false detection by the sensor 36 is suppressed.

[0066] False detection by the sensor 36 increases the frequency with which the error processing occurs in step S611. Suppressing false detection by the sensor 36 reduces the frequency with which the error processing occurs. The substrate transport system 1 can continue to transport the substrates 9, thereby improving transport efficiency.

[0067] 6, if the sensor 36 cannot detect the substrate, the robot controller 20 determines the color of the substrate 9 based on the image 50 captured by the camera 5. The camera 5 may capture an image of the substrate 9 every time the robot 2 carries the substrate 9 out of the FOUP 41, and the robot controller 20 may determine the color of the substrate 9 based on the image 50 captured by the camera 5.

[0068] The robot controller 20 determines the type of the substrate 9 based on the determined color of the substrate 9 by referring to the table 203, but it is also possible to omit determining the type of the substrate 9. The table 203 may include information on the color of the substrate 9 and the threshold value of the sensor 36 corresponding to the color.

[0069] Furthermore, instead of using the table 203, the robot controller 20 may set the threshold value of the sensor 36 in accordance with a relational expression that expresses the relationship between the color of the substrate 9 and the threshold value of the sensor 36 corresponding to the color. The relational expression may be an expression that expresses the relationship between the ratio of each RGB component that corresponds to the color of the substrate 9 and the threshold value of the sensor 36.

[0070] Instead of adjusting the threshold value of the sensor 36, the amount of light emitted by the emitter 361 of the sensor 36 onto the substrate 9 may be adjusted according to the color of the substrate 9. When the color of the substrate 9 is black, the amount of light emitted by the emitter 361 may be higher than when the color of the substrate 9 is other colors.

[0071] It should be noted that the color information obtained based on the image 50 captured by the camera 5 is not limited to the use of adjustment of the sensor 36 .

[0072] (Detection of wetting of the surface of the substrate using camera image data) The robot controller 20 detects wetting of the surface of the substrate 9 due to liquid adhering to the surface of the substrate 9 based on the image 50 of the substrate 9 captured by the camera 5 (see the upper diagram of Figure 7).

[0073] Due to the difference between the refractive index of the substrate 9 and the refractive index of the liquid, the reflectance of the surface of the substrate 9 differs from the reflectance of the liquid adhering to the surface. Based on the image 50 of the substrate 9 taken by the camera 5, the robot controller 20 can detect wetting of the surface of the substrate 9. The robot controller 20 may perform machine learning to improve the accuracy of wetting detection.

[0074] In addition, the robot controller 20 may detect wetness of the surface of the substrate 9 by comparing the difference between an image 50 of the substrate 9 taken by the camera 5 as shown in the upper diagram of Figure 7 and an image 50 of the substrate 9 when there is no liquid on the surface of the substrate 9 as shown in Figure 4.

[0075] The detection of wetness on the surface of the substrate 9 can be used, for example, before or after the development process. The detection and determination of wetness and the error processing after the determination differ depending on whether the substrate 9 is transported by the substrate transport system 1 before or after the development process. The processing content of the substrate transport system 1 is set by the robot controller 20.

[0076] 8 is a flowchart showing a procedure for controlling the transport of the substrate 9 after the development process. Note that the flowchart of FIG. 8 may be modified by rearranging the order of the steps, omitting some steps, or adding other steps.

[0077] The robot controller 20 determines whether the cleaning liquid remains on the surface of the substrate 9 after the development process and the cleaning process, based on the image 50 of the substrate 9 taken by the camera 5. The robot controller 20 may also determine the amount of the cleaning liquid remaining on the surface of the substrate 9, for example, whether droplets remain on the surface of the substrate 9 or whether the cleaning liquid has spread over the entire surface of the substrate 9.

[0078] In step S81, the robot controller 20 determines whether the hand 3 of the robot 2 has reached a position where it holds the substrate 9 after the cleaning process. This position is, for example, in front of the opening 16 of the substrate processing equipment 4. The process of FIG. 8 repeats step S81 until the hand 3 reaches this position.

[0079] When the hand 3 reaches this position, the robot controller 20, in step S82, inserts the hand 3 under the substrate 9 and stops the robot 2. In step S82, the hand 3 does not hold the substrate 9.

[0080] In the next step S83, the robot controller 20 causes the camera 5 to photograph the substrate 9 while the robot 2 is stopped, and in step S84 the robot controller 20 analyzes the image 50 from the camera 5. Specifically, a difference comparison is made between the image 50 of the substrate 9 in a state where there is no liquid on the surface of the substrate 9, which is stored in advance in the memory 202, and the image 50 photographed by the camera 5.

[0081] In step S85, the robot controller 20 determines whether the surface of the substrate 9 is wet based on the analysis result of step S84, and if the surface is not wet, in step S86, the robot controller 20 causes the hand 3 to hold the substrate 9. That is, the edge guide 33 of the hand 3 is engaged with the outer periphery of the substrate 9, and the second guide 34 is brought close to the substrate 9, so that the edge guide 33 and the second guide 34 sandwich the substrate 9.

[0082] Then, in step S86, the robot controller 20 causes the robot 2 to transport the substrate 9.

[0083] If the robot controller 20 determines in step S85 that the surface of the substrate 9 is wet, the robot controller 20 does not allow the hand 3 to hold the substrate 9 in step S88. In other words, the second guide 34 is prohibited from approaching the substrate 9.

[0084] Then, in step S89, the robot controller 20 performs error processing. As part of the error processing, the substrate transport system 1 may stop. Alternatively, as part of the error processing, the system controller 18 may issue a warning to the operator.

[0085] Before the development step, the robot controller 20 determines that the developer has been applied to the surface of the substrate 9 based on the image 50 of the substrate 9 taken by the camera 5. When the robot controller 20 or the system controller 18 determines that the developer has not been applied to the surface of the substrate 9, the robot controller 20 or the system controller 18 may perform error processing in the substrate transfer system 1. The error processing may be, as described above, stopping the substrate transfer system 1 or issuing a warning to the operator.

[0086] Furthermore, for example, after the development step, the robot controller 20 may determine whether the development has been properly completed based on the image 50 of the substrate 9 captured by the camera 5. If the robot controller 20 or the system controller 18 determines that the development has not been properly completed, the robot controller 20 or the system controller 18 may perform error processing in the substrate transport system 1. As error processing, the substrate transport system 1 may be stopped. As error processing, the system controller 18 may issue a warning to the operator.

[0087] The information about wetness obtained based on the image 50 captured by the camera 5 can also be used for purposes other than those mentioned above.

[0088] For example, after the robot 2 removes the substrate 9 that has been immersed in the solution to prevent oxidation of the substrate 9 from the solution, the robot controller 20 may determine that no excess liquid remains on the surface of the substrate 9 based on the image 50 of the substrate 9 taken by the camera 5.

[0089] If liquid remains on the surface of the substrate 9 , the robot controller 20 causes the robot 2 to remove the liquid from the surface of the substrate 9 .

[0090] For example, if the robot 2 is structured to be able to tilt the hand 3 holding the substrate 9, the robot 2 tilts the hand 3 so that the liquid adhering to the surface of the substrate 9 flows down from the surface due to its own weight.

[0091] Furthermore, if the substrate transfer system 1 has an air blowing system, the liquid adhering to the surface of the substrate 9 may be blown off from the surface of the substrate 9 by the air blowing system.

[0092] (Detection of substrate temperature using camera image data) The camera 5 may be a thermography camera. The camera 5 may have both an image sensor 51 and a thermography camera. Furthermore, when detecting the temperature of the substrate 9 described below, the camera 5 may have a thermography camera without having an image sensor 51.

[0093] In the following description, it is assumed that the camera 5 includes both an image sensor 51 and a thermography camera. Based on the data of the image 50 acquired by the image sensor 51, the substrate 9 in the image 50 is identified as described above.

[0094] The thermographic camera detects infrared rays emitted by an object and visualizes the temperature distribution. The robot controller 20 detects the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 by overlaying the temperature distribution information acquired by the thermographic camera on the image 50 (see the lower diagram in Figure 7). The image data captured by the camera 5 includes the image 50 as well as temperature information.

[0095] 9 is a flowchart showing a procedure for controlling the transport of substrates 9 from the substrate processing equipment 4 to the FOUP 41 after the substrate processing equipment 4 has subjected the substrates 9 to heat treatment. Note that the flowchart of FIG. 9 may be modified by changing the order of the steps, omitting some steps, or adding other steps.

[0096] In step S91, the robot controller 20 determines whether the hand 3 of the robot 2 has reached the unloading position for the substrate 9 from the substrate processing equipment 4. The process of Fig. 9 repeats step S91 until the hand 3 reaches the unloading position.

[0097] When the hand 3 reaches the unloading position, the robot controller 20 unloads the substrate 9 from the substrate processing equipment 4 in step S92. After unloading the substrate 9, the robot 2 pauses in step S93.

[0098] In step S94 while the robot 2 is temporarily stopped, the robot controller 20 causes the camera 5 to photograph the substrate 9, and in step S95 the robot controller 20 detects the temperature of the substrate 9 based on the information from the camera 5.

[0099] In step S96, the robot controller 20 compares the temperature of the substrate 9 with a predetermined temperature based on the temperature detection result of step S95. The predetermined temperature may be, for example, a temperature at which the mapping sensor attached to the hand 3 will not melt due to the heat of the substrate 9, or a temperature at which the resin portion of the FOUP 41 to which the substrate 9 is to be transported will not melt when the substrate 9 is placed in the FOUP 41. The predetermined temperature is a temperature at which the transportation of the substrate 9 is permissible, and specifically, may be a temperature of about 100°C.

[0100] If the temperature of the substrate 9 is below the predetermined temperature, the transfer of the substrate 9 is permitted. In step S97, the robot controller 20 causes the robot 2 to transfer the substrate 9. Once the robot 2 has placed the substrate 9 in the FOUP 41, the process of FIG. 9 returns to step S91, and the hand 3 of the robot 2 moves to the position for unloading the substrate 9 from the substrate processing equipment 4 in order to transfer the next substrate 9.

[0101] If the temperature of the substrate 9 is equal to or higher than the predetermined temperature, the robot controller 20 causes the robot 2 to wait for a predetermined time period in step S98 to allow the temperature of the substrate 9 to decrease. The predetermined time period may be, for example, 30 seconds. After the robot 2 has waited for the predetermined time period, the robot controller 20 returns to step S94 and causes the camera 5 to photograph the substrate 9 again. Thereafter, according to the flow of FIG. 9 , the robot controller 20 detects the temperature of the substrate 9 in step S95 and compares the temperature of the substrate 9 with the predetermined temperature in step S96.

[0102] After step S98, the robot controller 20 may cause the robot 2 to transport the substrate 9 in step S97.

[0103] The information about the temperature or temperature distribution of the substrate 9 acquired based on the image 50 can be used for various purposes.

[0104] (Effects) The substrate transfer system 1 or the robot system 6 includes a camera 5 that captures an image of the substrate 9 held by the hand 3. Based on the image 50 captured by the camera 5, the substrate transfer system 1 or the robot system 6 can acquire information about the substrate 9.

[0105] Because the camera 5 is fixed to the hand 3, it can photograph the substrate 9 while the robot 2 is transporting the substrate 9. Because the robot 2 does not stop operating to photograph with the camera 5, the transport efficiency of the substrate transport system 1 or the robot system 6 is improved. Another advantage is that because the camera 5 is fixed to the hand 3, the camera 5 can photograph the substrate 9 for a longer period of time. Attaching the camera 5 to the hand 3 is advantageous for photographing the substrate 9.

[0106] The camera 5 may capture an image of the substrate 9 while the robot 2 is stopping the transport of the substrate 9 .

[0107] 6, immediately after the robot 2 removes the substrate 9 through the opening 17 of the FOUP 41 or the opening 16 of the substrate processing equipment 4, the robot 2 may stop its operation to temporarily stop the transport of the substrate 9, and the camera 5 may photograph the substrate 9 while the robot 2 is stopped. In steps S82 and S83 of FIG. 8 or steps S93 and S94 of FIG. 9, the camera 5 also photographs the substrate 9 while the robot 2 temporarily stops the transport of the substrate 9.

[0108] Alternatively, when the hand 3 reaches the vicinity of the aligner 42 immediately before the robot 2 sets the substrate 9 on the aligner 42, the robot 2 may stop its operation, thereby temporarily halting the transport of the substrate 9, and the camera 5 may photograph the substrate 9. Alternatively, while the robot 2 is setting the substrate 9 on the aligner 42, the robot 2 may temporarily stop its operation in a state where the substrate 9 and the spindle of the aligner 42 are vertically overlapping, and the camera 5 may photograph the substrate 9 while the robot 2 is stopped. Alternatively, the robot 2 may temporarily stop its operation in a state where the hand 3 and the substrate 9 are vertically overlapping immediately after the substrate 9 is transferred from the hand 3 to the aligner 42 and set on the aligner 42, and the camera 5 may photograph the substrate 9 while the robot 2 is stopped.

[0109] Taking an image while the transport of the substrate 9 is stopped improves the quality of the captured image 50. For example, a light source for photography may be installed at a location where the transport of the substrate 9 is stopped for the camera 5 to take an image.

[0110] Because the camera 5 is fixed to the hand 3, the substrate transfer system 1 or the robot system 6 can use one camera 5 to capture an image of the substrate 9 held by the hand 3. In other words, the substrate transfer system 1 does not require multiple cameras 5 to be installed in various locations in the transfer space 15. The substrate transfer system 1 is simple.

[0111] The camera 5 has an angle of view that captures the entire surface of the substrate 9. The image 50 captured by the camera 5 includes the entire surface of the substrate 9. The robot controller 20 can accurately acquire information about the substrate 9.

[0112] The robot controller 20 receives the photographic data from the camera 5 and detects the color of the board 9. Based on the color of the board 9, the robot controller 20 can determine the type of board 9 held by the hand 3.

[0113] Furthermore, the robot controller 20 sets a threshold value for the amount of light received by the sensor 36 based on the detected color of the board 9. This prevents the sensor 36 from making an erroneous determination.

[0114] The robot controller 20 receives the photographic data from the camera 5 and detects wetness on the surface of the substrate 9. The robot controller 20 can accurately determine the state of the substrate 9 before or after processing the substrate 9. The robot controller 20 can quickly execute error processing in the robot system 6 or the substrate transport system 1 as necessary.

[0115] The robot controller 20 receives the photographic data from the camera 5 and detects the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9. The robot controller 20 can quickly detect any temperature abnormality in the substrate 9.

[0116] As described above, the substrate transfer system 1 or the robot system 6 can acquire information about the substrate 9, and the acquired information about the substrate 9 can be used for various purposes.

[0117] (Modifications for Photographing Substrates) The camera 5 fixed to the hand 3 may photograph the substrate 9 inside the substrate processing equipment 4 while the hand 3 is inserted into the substrate processing equipment 4 through the opening 16 .

[0118] Furthermore, the robot controller 20 can detect the color of the substrate 9 after it is removed from the substrate processing equipment 4 based on the photographic data of the camera 5 .

[0119] 6 can also be applied to the control of robot 2 transporting substrate 9, which has been removed from substrate processing equipment 4, to FOUP 41. The substrate removal position in step S62 in Fig. 6 may be in front of opening 16 of substrate processing equipment 4. If sensor 36 cannot detect substrate 9 after robot 2 removes substrate 9 from substrate processing equipment 4 in step S63, robot controller 20 can detect the color of substrate 9 in step S68 based on image 50 captured by camera 5 in step S67.

[0120] Furthermore, the robot controller 20 can detect wetness of the surface of the substrate 9 before or after the substrate 9 is removed from the substrate processing equipment 4 based on the photographic data of the camera 5 .

[0121] Here, if the surface of the substrate 9 is wet, there is a risk that the grip 30 of the hand 3 will slip when gripping the substrate 9. When the robot controller 20 detects that the surface of the substrate 9 is wet, the robot controller 20 may slow down the operation of the actuator 35 when gripping the substrate 9. Slowing down the operation of the actuator 35 increases the stability of holding the substrate 9 by the hand 3. Because the robot 2 can stably hold the substrate 9, it is possible to prevent the robot system 6 or the substrate transfer system 1 from stopping because the robot 2 is unable to hold the substrate 9, for example.

[0122] Furthermore, the robot controller 20 can detect the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 before or after the substrate 9 is removed from the substrate processing equipment 4 based on the photographic data of the camera 5 .

[0123] The robot controller 20 may determine whether the temperature of the portion of the substrate 9 that is in contact with the edge guide 33 or the second guide 34 is equal to or lower than a permissible temperature based on the temperature distribution on the surface of the substrate 9. The permissible temperature is the temperature at which the edge guide 33 or the second guide 34 is permissible to hold the substrate 9. The permissible temperature is set, for example, according to the heat resistance temperature of the edge guide 33 or the second guide 34. If the temperature of the specific portion of the substrate 9 is equal to or lower than the permissible temperature, the robot controller 20 allows the hand 3 to hold the substrate 9, and if the temperature of the specific portion of the substrate 9 exceeds the permissible temperature, the robot controller 20 prohibits the hand 3 from holding the substrate 9 and waits for the temperature of the substrate 9 to drop.

[0124] Based on the detected temperature distribution on the surface of the substrate 9, the robot controller 20 causes the hand 3 of the robot 2 to grasp the substrate 9 when a specific location on the substrate 9 drops below an allowable temperature. The robot 2 can quickly begin transporting the substrate 2. For example, the waiting time of the robot 2 is shorter than when starting to transport the substrate 2 after waiting for a predetermined set time to elapse, taking into account a drop in the temperature of the substrate 9. Detecting the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 improves the transport efficiency of the substrate transport system 1 or the robot system 6 by reducing unnecessary waiting time.

[0125] The camera 5 fixed to the hand 3 enables detection of the color, temperature, or surface wetness of the substrate 9. Using the information on the substrate 9 acquired based on the image 50, it is possible to prevent the substrate transfer system 1 or the robot system 6 from stopping due to an erroneous determination or the occurrence of an abnormality in the substrate transfer system 1. Furthermore, the use of the information on the substrate 9 improves the transfer efficiency of the substrate transfer system 1 or the robot system 6 by reducing unnecessary waiting time.

[0126] (Modification of Substrate Transfer System) Fig. 10 shows a substrate transfer system 100 according to a modification. Fig. 11 is a block diagram of the substrate transfer system 100. In the substrate transfer system 100, the camera 5 is not fixed to the robot 2. The camera 5 is fixed to, for example, the ceiling wall of the housing 10. More specifically, as shown in Fig. 10, the camera 5 is located near the aligner 42 in the transfer space 15. The camera 5 photographs the substrate 9 set on the aligner 42.

[0127] The camera 5 is electrically connected to a system controller 18. The system controller 18 detects the color of the substrate 9 based on the image data captured by the camera 5. The system controller 18 also detects wetness on the surface of the substrate 9 based on the image data captured by the camera 5. The system controller 18 also detects the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 based on the image data captured by the camera 5.

[0128] In addition to being positioned near the aligner 42, the camera 5 may also be positioned near the opening 16, for example, as shown by the dashed line in FIG. 10 , to capture images of the substrate 9 in the substrate processing equipment 4. Based on the image data captured by the camera 5, the system controller 18 can detect the color of the substrate 9 before removing the substrate 9 from the substrate processing equipment 4. Based on the image data captured by the camera 5, the system controller 18 can also detect wetness on the surface of the substrate 9 before removing the substrate 9 from the substrate processing equipment 4. Based on the image data captured by the camera 5, the system controller 18 can also detect the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 before removing the substrate 9 from the substrate processing equipment 4.

[0129] The position of the camera 5 is not limited to a specific position, and can be set at various positions in the transfer space 15.

[0130] The aligner 42 may be connected to and controlled by the system controller 18 .

[0131] In the hand 3, an attachment member may be interposed between the main body 31 and the holder 32. The holder 32 is fixed to the main body 31 via the attachment member. When the camera 5 is fixed to the hand 3, the camera 5 may be fixed to the main body 31. The camera 5 may also be fixed to the attachment member.

[0132] The functions of elements such as the system controller 18 and the robot controller 20 disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, application-specific integrated circuits (ASICs), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuitry. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or processor.

[0133] (Aspects) The above-described embodiments are specific examples of the following aspects.

[0134] (Aspect 1) A substrate transport system (1, 100) comprising: a horizontal articulated robot (2) having a hand (3) for holding a substrate (9) and transporting the substrate (9); a camera (5) for photographing the substrate (9); and a controller (18, 20) for receiving photographic data from the camera (5) and detecting the color of the substrate (9).

[0135] Based on the photographic data of the substrate (9) taken by the camera (5), the controller (18, 20) can obtain color information of the substrate (9). The substrate transport system (1, 100) can use the color information of the substrate (9) for various purposes.

[0136] (Aspect 2) The horizontal articulated robot (2) has an optical substrate detection sensor (36) that receives reflected light of light irradiated onto the substrate (9) held by the hand (3), and the controller (18, 20) sets a threshold value for the amount of light received by the substrate detection sensor (36) based on the color of the substrate (9) detected based on the photographic data. This is a substrate transport system (1, 100) described in Aspect 1.

[0137] Changing the threshold value related to detection by the substrate detection sensor (36) based on the color of the substrate (9) reduces false detections by the substrate detection sensor (36), and the substrate transport system (1, 100) can reduce a decrease in transport efficiency caused by false detections by the substrate detection sensor (36).

[0138] (Aspect 3) A substrate transport system (1, 100) comprising: a horizontal articulated robot (2) having a hand (3) for holding a substrate (9) and transporting the substrate (9); a camera (5) for photographing the substrate (9); and a controller (18, 20) for receiving photographic data from the camera (5) and detecting the temperature of the substrate (9).

[0139] Based on the photographic data of the substrate (9) taken by the camera (5), the controller (18, 20) can obtain information on the temperature of the substrate (9). The substrate transfer system (1, 100) can use the information on the temperature of the substrate (9) for various purposes.

[0140] (Aspect 4) The substrate transfer system (1, 100) according to aspect 3, wherein the controller (18, 20) determines that an abnormality has occurred when the temperature of the substrate (9) is equal to or higher than a predetermined value.

[0141] The controller (18, 20) can quickly detect abnormalities in the temperature of the substrate (9) based on information about the temperature of the substrate (9) photographed by the camera (5).

[0142] (Aspect 5) The substrate transfer system (1, 100) according to Aspect 3 or 4, wherein the camera (5) is a thermography camera, and the controller (18, 20) receives photographic data from the camera (5) and detects a temperature distribution on the surface of the substrate (9).

[0143] The substrate transport system (1, 100) can use information about the temperature distribution on the surface of the substrate (9) for various purposes.

[0144] (Aspect 6) A substrate transport system (1, 100) according to aspect 5, wherein the hand (3) is an edge grip hand having an edge guide (33) that engages with the outer edge of the substrate (9), and the controller (18, 20) allows the horizontal articulated robot (2) to hold the substrate (9) when the temperature of the portion of the substrate (9) where the edge guide (33) engages is below an allowable temperature based on the detected temperature distribution on the surface of the substrate (9), and prohibits the horizontal articulated robot (2) from holding the substrate (9) when the temperature exceeds the allowable temperature.

[0145] If the temperature at the engagement point of the edge guide (33) falls below the allowable temperature based on the detected temperature distribution, the horizontal articulated robot (2) can hold the substrate (9). Since the unnecessary waiting time for the temperature of the substrate (9) to drop is reduced, the transfer efficiency of the substrate transfer system (1, 100) is improved.

[0146] (Aspect 7) A substrate transport system (1, 100) comprising: a horizontal articulated robot (2) having a hand (3) for holding a substrate (9) and transporting the substrate (9); a camera (5) for photographing the substrate (9); and a controller (18, 20) for receiving photographic data from the camera (5) and detecting wetness on the surface of the substrate (9).

[0147] Based on the photographic data of the substrate (9) taken by the camera (5), the controller (18, 20) can obtain information on the wetness of the surface of the substrate (9). The substrate transport system (1, 100) can use the information on the wetness of the surface of the substrate (9) for various purposes.

[0148] (Aspect 8) The substrate transfer system (1, 100) according to aspect 7, wherein the controller (18, 20) determines that an abnormality has occurred when the surface of the substrate (9) is wet.

[0149] The controller (18, 20) can quickly detect abnormalities in the substrate (9) based on information on the wetness of the surface of the substrate (9) photographed by the camera (5).

[0150] (Aspect 9) A substrate transport system (1, 100) according to aspect 7 or 8, wherein the hand (3) is an edge grip hand having an edge guide (33) that engages with the outer edge of the substrate (9) and a second guide (34) that moves toward and away from the substrate (9) on the opposite side of the edge guide (33) across the substrate (9), and the controller (18, 20) changes the approach operation of the second guide (34) toward the substrate (9) when it detects that the surface of the substrate (9) is wet.

[0151] When the surface of the substrate (9) is wet, if the approaching operation of the second guide (34) toward the substrate (9) is changed, the hand (3) can stably hold the substrate (9).

[0152] (Aspect 10) The substrate transfer system (1, 100) according to any one of aspects 1 to 9, wherein the camera (5) photographs the substrate (9) held by the hand (3).

[0153] (Aspect 11) The substrate transport system (1, 100) according to any one of Aspects 1 to 10, wherein the camera (5) photographs the substrate (9) set in an aligner (42) that adjusts the orientation of the substrate (9).

[0154] (Aspect 12) The substrate transport system (1, 100) according to any one of Aspects 1 to 11, wherein the camera (5) photographs the substrate (9) set in substrate processing equipment (4) that processes the substrate (9).

[0155] The camera (5) can take images of the substrate (9) at various times.

[0156] (Aspect 13) The substrate transfer system (1, 100) according to any one of Aspects 1 to 12, wherein the camera (5) is located on a ceiling of a space (15) in which a manipulator (200) of the horizontal articulated robot (2) moves.

[0157] The camera (5) located on the ceiling is suitable for photographing the substrate (9).

[0158] (Aspect 14) The substrate transport system (1, 100) according to any one of Aspects 1 to 12, wherein the camera (5) is fixed to the hand (3).

[0159] A camera (5) fixed to the hand (3) can photograph the substrate (9) in the vicinity of the substrate (9).

[0160] (Aspect 15) A substrate transport method, comprising: a horizontal articulated robot (2) transporting a substrate (9); a camera (5) photographing the substrate (9); and detecting the color of the substrate (9) based on the photographed data of the substrate (9).

[0161] (Aspect 16) A substrate transport method, comprising: a horizontal articulated robot (2) transporting a substrate (9); a camera (5) photographing the substrate (9); and detecting the temperature of the substrate (9) based on the photographed data of the substrate (9).

[0162] (Aspect 17) A substrate transport method, comprising: a horizontal articulated robot (2) transporting a substrate (9); a camera (5) photographing the substrate (9); and detecting wetness of the surface of the substrate (9) based on the photographed data of the substrate (9).

[0163] (Aspect 18) A substrate transport system (1, 100) comprising: a horizontal articulated robot (2) having a hand (3) for holding a substrate (9) and transporting the substrate (9); and a camera (5) fixed to the hand (3) for photographing the substrate (9) held by the hand (3).

[0164] Because the camera (5) photographs the substrate (9), the substrate transport system (1, 100) can acquire information about the substrate (9). Furthermore, because the camera (5) moves to various positions together with the hand (3), a single camera (5) can photograph multiple substrates (9). Furthermore, because the camera (5) can photograph the substrate (9) while the horizontal articulated robot (2) is transporting the substrate (9), the transport efficiency of the horizontal articulated robot (2) is improved.

[0165] (Aspect 19) The substrate transfer system (1, 100) according to aspect 18, wherein the camera (5) photographs the surface of the substrate (9).

[0166] Based on the image of the surface of the substrate (9) taken by the camera (5), various processes can be performed.

[0167] (Aspect 20) The substrate transfer system (1, 100) according to aspect 19, wherein the camera (5) has a field of view that captures the entire surface of the substrate (9).

[0168] Since the entire surface of the substrate (9) is imaged, more information about the substrate (9) can be obtained.

[0169] (Aspect 21) The substrate transfer system (1, 100) according to any one of Aspects 18 to 20, wherein the camera (5) photographs the substrate (9) while the horizontal articulated robot (2) is transferring the substrate (9).

[0170] Since the transport of the substrate (9) is not stopped for the camera (5) to take a photograph, the transport efficiency of the substrate transport system (1, 100) is improved.

[0171] (Aspect 22) The substrate transfer system (1, 100) according to any one of Aspects 18 to 20, wherein the camera (5) photographs the substrate (9) while the horizontal articulated robot (2) stops transferring the substrate (9).

[0172] When the camera (5) photographs the surface of the substrate (9) while the transport of the substrate (9) is stopped, the substrate transport system (1, 100) can obtain a high quality image (50).

[0173] (Aspect 23) The substrate transfer system (1, 100) according to Aspect 22, wherein the camera (5) photographs the substrate (9) at the timing when the horizontal articulated robot (2) removes the substrate (9) from the FOUP (41).

[0174] The camera (5) can take a picture of the substrate (9) at the appropriate time.

[0175] (Aspect 24) The substrate transfer system (1, 100) according to Aspect 22, wherein the camera (5) photographs the substrate (9) at the timing when the horizontal articulated robot (2) sets the substrate (9) in an aligner (42).

[0176] The camera (5) can take a picture of the substrate (9) at the appropriate time.

[0177] (Aspect 25) The substrate transport system (1, 100) according to any one of Aspects 18 to 24, wherein a color of the substrate (9) is detected based on photographic data from the camera (5).

[0178] Once the color of the substrate (9) is detected, the substrate transport system (1, 100) can determine the type of film formed on the substrate (9).

[0179] (Aspect 26) The substrate transfer system (1, 100) according to any one of Aspects 18 to 24, wherein the temperature of the substrate (9) is detected based on photographic data of the camera (5).

[0180] If the temperature of the substrate (9) is detected, the substrate transfer system (1, 100) can determine whether there is an abnormality in the substrate (9).

[0181] (Aspect 27) The substrate transfer system (1, 100) according to aspect 26, wherein a temperature distribution on the surface of the substrate (9) is detected based on photographic data from the camera (5).

[0182] Once the temperature distribution on the surface of the substrate (9) is detected, the horizontal articulated robot (2) can quickly hold the substrate (9), thereby reducing the waiting time for the temperature of the substrate (9) to drop.

[0183] (Aspect 28) The substrate transfer system (1, 100) according to any one of Aspects 18 to 24, wherein wetness of the surface of the substrate (9) is detected based on photographic data from the camera (5).

[0184] If the wetness of the surface of the substrate (9) is detected, the substrate transport system (1, 100) can determine the condition of the surface of the substrate (9).

[0185] REFERENCE SIGNS LIST 1 Substrate transfer system 100 Substrate transfer system 2 Horizontal articulated robot 3 Hand 41 Hoop 42 Aligner 5 Camera 6 Robot system 9 Substrate

Claims

a horizontal articulated robot having a hand for holding a substrate and for transporting the substrate; a camera for photographing the substrate; a controller that receives photographic data from the camera and detects the color of the substrate; A substrate transfer system comprising:

2. The substrate transfer system according to claim 1, the horizontal articulated robot has an optical substrate detection sensor that receives reflected light of light irradiated onto the substrate held by the hand, The controller sets a threshold value relating to the amount of light received by the substrate detection sensor based on the color of the substrate detected based on the photographing data. 　 a horizontal articulated robot having a hand for holding a substrate and for transporting the substrate; a camera for photographing the substrate; a controller that receives photographic data from the camera and detects the temperature of the substrate; A substrate transfer system comprising:

4. The substrate transfer system according to claim 3, The controller determines that an abnormality has occurred when the temperature of the substrate is equal to or higher than a predetermined value.

4. The substrate transfer system according to claim 3, the camera is a thermographic camera; The controller receives the photographed data from the camera and detects the temperature distribution on the surface of the substrate.

6. The substrate transfer system according to claim 5, the hand is an edge grip hand having an edge guide that engages with the outer periphery of the substrate, The controller, based on the detected temperature distribution on the surface of the substrate, allows the horizontal articulated robot to hold the substrate when the temperature of the point on the substrate where the edge guide engages is below an allowable temperature, and prohibits the horizontal articulated robot from holding the substrate when the temperature exceeds the allowable temperature. 　 a horizontal articulated robot having a hand for holding a substrate and for transporting the substrate; a camera for photographing the substrate; a controller that receives photographic data from the camera and detects wetness of the surface of the substrate; A substrate transfer system comprising:

8. The substrate transfer system according to claim 7, The controller determines that an abnormality has occurred when the surface of the substrate is wet.

8. The substrate transfer system according to claim 7, the hand is an edge grip hand having an edge guide that engages with the outer periphery of the substrate and a second guide that moves toward and away from the substrate on the opposite side of the edge guide across the substrate, The controller changes an approach operation of the second guide toward the substrate when the controller detects that the surface of the substrate is wet.

10. The substrate transfer system according to claim 1, The camera photographs the substrate held by the hand.

10. The substrate transfer system according to claim 1, The camera photographs the substrate set in an aligner that adjusts the orientation of the substrate.

10. The substrate transfer system according to claim 1, The camera photographs the substrate set in substrate processing equipment that processes the substrate.

10. The substrate transfer system according to claim 1, A substrate transport system, wherein the camera is positioned on the ceiling of a space in which a manipulator of the horizontal articulated robot moves.

10. The substrate transfer system according to claim 1, The camera is fixed to the hand.

Images