Water treatment management system, operation system, control device, and water treatment management method

Abstract

The present invention has: a management water treatment device (110) that is supplied with multiple types of water to be treated suppliable to a water treatment system (200) and that performs a prescribed treatment on the supplied water to be treated; a water quality measurement instrument (120) that measures a first water quality which is the water quality of treated water treated by the management water treatment device (110), and a second water quality which is the water quality of treated water treated by the water treatment system (200); and a control device (130) that, on the basis of a measurement value of the second water quality and a measurement value of the first water quality measured by the water quality measurement instrument (120), calculates a predicted water quality value of the second water quality according to the mixture fraction of each of the plurality of types of water to be treated supplied to the water treatment system (200).

Description

Water treatment management system, operation system, control device and water treatment management method

[0001] The present invention relates to a water treatment management system, an operation system, a control device, and a water treatment management method.

[0002] In recent years, the depletion of raw water (external water) used in ultrapure water production facilities has become a problem. To address this issue, a technology has been devised in which water produced in an ultrapure water production system and used at a point-of-use is recovered and treated, and the recovered and treated reclaimed water (internal water) is supplied to the ultrapure water production system (see, for example, Patent Document 1).

[0003] JP 2013-202587 A

[0004] The above-mentioned techniques have a problem in that if there is a difference in the quality of the external water and the internal water, it is not possible to obtain pure water of the desired quality.

[0005] An object of the present invention is to provide a water treatment management system, an operation system, a control device, and a water treatment management method that can obtain pure water of the desired water quality even when there is a change in the water quality between the external water and the internal water.

[0006] The water treatment management system of the present invention comprises: a management water treatment device that receives a plurality of treated waters that can be supplied to the water treatment system and performs a predetermined treatment on the supplied treated waters; a water quality measuring device that measures a first water quality, which is the water quality of the treated water treated by the management water treatment device, and a second water quality, which is the water quality of the treated water treated by the water treatment system; and a control device that calculates a predicted water quality value of the second water quality according to the mixing ratio of each of the plurality of treated waters supplied to the water treatment system based on the measured values ​​of the first water quality and the second water quality measured by the water quality measuring device.

[0007] The operation system of the present invention also includes: a water treatment system that treats water to be treated; a water treatment management system that receives a plurality of waters to be treated that can be supplied to the water treatment system, and calculates a predicted water quality value of the second water quality according to the mixing ratio of each of the plurality of waters to be treated that are supplied to the water treatment system, based on a first water quality, which is the water quality of treated water treated by a management water treatment device that performs a predetermined processing on the supplied water to be treated, and a second water quality, which is the water quality of treated water treated by the water treatment system; and an on-off valve that controls the supply of the plurality of waters to be treated to the water treatment system, and the water treatment management system controls the supply of the plurality of waters to be treated from the on-off valve to the water treatment system based on the mixing ratio, among the mixing ratios, that is the mixing ratio when the predicted water quality value satisfies a predetermined condition.

[0008] The control device of the present invention also has an acquisition unit that acquires a first water quality value, which is the water quality of treated water treated by a management water treatment device that performs a predetermined process on multiple treated waters that can be supplied to a water treatment system, and a second water quality value, which is the water quality of treated water treated by the water treatment system, and a calculation unit that calculates a predicted water quality value of the second water quality according to the mixing ratio of each of the multiple treated waters supplied to the water treatment system based on the first water quality value and the second water quality value acquired by the acquisition unit.

[0009] In addition, the water treatment management method of the present invention includes the steps of: measuring a first water quality, which is the water quality of treated water treated by a management water treatment device that performs a predetermined process on multiple treated waters that can be supplied to a water treatment system; measuring a second water quality, which is the water quality of treated water treated by the water treatment system; and calculating a predicted water quality value of the second water quality according to the mixing ratio of each of the multiple treated waters supplied to the water treatment system based on the measured values ​​of the first water quality and the second water quality.

[0010] In the present invention, even if there is a difference in the quality of the external water and the internal water, pure water of the desired quality can be obtained.

[0011] FIG. 1 is a diagram showing a first embodiment of a water treatment management system of the present invention. FIG. 2 is a diagram showing an example of components provided in the control device shown in FIG. 1. FIG. 3 is a flowchart for explaining an example of a water treatment management method in the water treatment management system shown in FIG. 1. FIG. 4 is a diagram showing a second embodiment of a water treatment management system of the present invention. FIG. 5 is a diagram showing an example of components provided in the control device shown in FIG. 4. FIG. 6 is a flowchart for explaining an example of a water treatment management method in the water treatment management system shown in FIG. 4. FIG. 7 is a diagram showing a third embodiment of a water treatment management system of the present invention. FIG. 8 is a diagram showing an example of components provided in the control device shown in FIG. 7. FIG. 8 is a flowchart for explaining an example of a water treatment management method in the water treatment management system shown in FIG. 7. FIG. 9 is a diagram showing a fourth embodiment of a water treatment management system of the present invention. FIG. 10 is a diagram showing an example of the configuration of a water treatment system controlled by the water treatment management system of the present invention.

[0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the accompanying drawings.

[0013] 1 is a diagram showing a first embodiment of a water treatment control system of the present invention. As shown in FIG. 1, the water treatment control system 100 of this embodiment has a control water treatment device 110, a water quality measuring device 120, and a control device 130.

[0014] The water treatment system 200, which is the object of control by the water treatment management system 100, includes multiple water treatment devices 210-1 to 210-4 connected in series. The water treatment system 200 receives a first water source (external water, such as municipal water, industrial water, well water, or river water; for example, raw water such as tap water supplied from an external source) and a second water source (internal water, such as reclaimed water or recovered water from a factory, e.g., water reclaimed after use in semiconductor manufacturing or water reclaimed after use for purposes other than semiconductor manufacturing, including reclaimed water or recovered water discharged from a manufacturing factory or a non-manufacturing facility) via on-off valves 300 and 310, respectively. Each of the water treatment devices 210-1 to 210-4 is a unit operation means for performing a predetermined process on the supplied water to be treated. Each of the water treatment devices 210-1 to 210-4 is, for example, an MMF (microfiltration device), an ACF (activated carbon adsorption device), a resin tower constituting a 2B3T, a RO (reverse osmosis membrane separator), a UV (ultraviolet oxidation device), an MDG (membrane degassing device), a CP (ion exchange resin filling device), or a UF (ultrafiltration device). Each of the water treatment devices 210-1 to 210-4 may be provided with a tank for storing the water to be treated supplied from the previous stage or the treated water that it has treated. While FIG. 1 illustrates an example in which the water treatment system 200 is equipped with four water treatment devices, the number is not limited. Note that the "water quality" described below may be, for example, TOC (total organic carbon), urea concentration, or conductivity. The operation system 1 is composed of the water treatment management system 100, the water treatment system 200, and the on-off valves 300 and 310.

[0015] The control-use water treatment device 110 receives water from a first water source and a second water source, which are supplied to the water treatment system 200. The control-use water treatment device 110 performs a predetermined treatment on the water to be treated. The control-use water treatment device 110 is a device that integrates the components of the water treatment system 200, which is made up of multiple water treatment devices 210-1 to 210-4, in order to perform pseudo-treatment to shorten the time required to obtain treated water in the water treatment system 200 (for example, Japanese Patent No. 6978353).

[0016] The water quality measuring instrument 120 measures a first water quality, which is the water quality of treated water treated by the management water treatment device 110. The water quality measuring instrument 120 also measures a second water quality, which is the water quality of treated water treated by the multiple water treatment devices 210-1 to 210-4 and supplied to points of use from the water treatment system 200. The water quality measuring instrument 120 outputs a value indicating the measured first water quality and a value indicating the measured second water quality to the control device 130.

[0017] The control device 130 acquires a first water quality value measured by the water quality measuring device 120 when only the first water source is supplied to the control-use water treatment device 110. The control device 130 also acquires a first water quality value measured by the water quality measuring device 120 when only the second water source is supplied to the control-use water treatment device 110. The control device 130 also acquires a second water quality value measured by the water quality measuring device 120 when only the first water source is supplied to the water treatment system 200. Next, based on the acquired first water quality values ​​(the value when only the first water source is supplied to the control-use water treatment device 110 and the value when only the second water source is supplied to the control-use water treatment device 110) and the second water quality value, the control device 130 calculates a predicted water quality value, which is a predicted value of the water quality of treated water corresponding to the mixing ratio when the first water source and the second water source are mixed and supplied to the water treatment system 200. The control device 130 may determine the mixing ratio when the calculated predicted water quality value does not exceed a predetermined threshold (satisfies the condition) as the water volume ratio.

[0018] Fig. 2 is a diagram showing an example of components included in the control device 130 shown in Fig. 1. As shown in Fig. 2, the control device 130 shown in Fig. 1 has an acquisition unit 1301, a calculation unit 1302, and an output unit 1303. Note that Fig. 2 shows only the main components related to this embodiment among the components included in the control device 130 shown in Fig. 1.

[0019] The acquisition unit 1301 acquires the first water quality value and the second water quality value output from the water quality measuring instrument 120. The acquisition unit 1301 outputs the acquired first water quality value and second water quality value to the calculation unit 1302.

[0020] The calculation unit 1302 calculates, as a predicted water quality value, a predicted value of the water quality of treated water corresponding to the mixing ratio when the first water source and the second water source are mixed and supplied to the water treatment system 200, based on the first water quality value acquired by the acquisition unit 1301 from the water quality measuring device 120 when only the first water source is supplied to the control water treatment device 110, the first water quality value acquired by the acquisition unit 1301 from the water quality measuring device 120 when only the second water source is supplied to the control water treatment device 110, and the second water quality value acquired by the acquisition unit 1301 from the water quality measuring device 120 when only the first water source is supplied to the water treatment system 200. The calculation unit 1302 may determine, as the water volume ratio, the mixing ratio when the calculated predicted water quality value does not exceed a predetermined threshold (satisfies the condition).

[0021] The calculation method of the predicted water quality value in the calculation unit 1302 will be described in detail below. The first water quality value acquired by the acquisition unit 1301 from the water quality measuring device 120 when only the first water source is supplied to the control water treatment device 110 is assumed to be "A." The first water quality value acquired by the acquisition unit 1301 from the water quality measuring device 120 when only the second water source is supplied to the control water treatment device 110 is assumed to be "B." The second water quality value acquired by the acquisition unit 1301 from the water quality measuring device 120 when only the first water source is supplied to the water treatment system 200 is assumed to be "C." The mixing ratio of the first water source to the second water source is assumed to be R1:R2 (where R1 + R2 = 1). In this case, (((A × R1 + B × R2) / A) × C) is calculated as the predicted water quality value when the first water source and the second water source are mixed at this mixing ratio. The calculation unit 1302 performs this calculation while changing the mixing ratio, thereby obtaining a predicted water quality value for each mixing ratio. Note that if the acquisition unit 1301 acquires values ​​measured by the water quality measuring device 120 when the first water source and the second water source are mixed while changing the mixing ratio between the first water source and the second water source and supplied to the management water treatment device 110, the calculation unit 1302 can calculate a predicted water quality value by using the acquired values ​​without using the above-mentioned mixing ratio.

[0022] The output unit 1303 outputs the predicted water quality value calculated by the calculation unit 1302. At this time, the output unit 1303 also outputs the mixing ratio between the first water source and the second water source when the calculated predicted water quality value was obtained, along with the predicted water quality value. The output unit 1303 may output only the calculated predicted water quality value (and the mixing ratio at that time) that satisfies an externally requested condition. For example, in a case where TOC is measured as the water quality, if the "C" value is "0.4 ppb" and the external request is "the water quality of the treated water supplied from the water treatment system 200 is (0.4 ppb + 10% or less)," the output unit 1303 may output only the predicted water quality value (and the mixing ratio at that time) that is "0.44 ppb or less." Alternatively, the output unit 1303 may output only the determined mixing ratio. The output unit 1303 may output the predicted water quality value by displaying the predicted water quality value (and the resulting mixing ratio) or by transmitting it to another device. The output unit 1303 may also output the predicted water quality value by displaying a prompt to mix the first water source and the second water source at the mixing ratio and supply it to the water treatment system 200.

[0023] A description will now be given of a water treatment management method in the water treatment management system 100 shown in Fig. 1. Fig. 3 is a flowchart for explaining an example of a water treatment management method in the water treatment management system 100 shown in Fig. 1.

[0024] First, only the first water source is supplied to the water treatment system 200 as the water to be treated, and the water quality measuring instrument 120 measures the water quality of the treated water from the water treatment system 200 (step S1). The acquisition unit 1301 of the control device 130 acquires a value indicating the second water quality measured by the water quality measuring instrument 120 in step S1. Furthermore, only the first water source is supplied to the management water treatment device 110 as the water to be treated, and the water quality measuring instrument 120 measures the water quality of the treated water from the management water treatment device 110 (step S2). The acquisition unit 1301 of the control device 130 acquires a value indicating the first water quality measured by the water quality measuring instrument 120 in step S2. Furthermore, only the second water source is supplied to the management water treatment device 110 as the water to be treated, and the water quality measuring instrument 120 measures the water quality of the treated water from the management water treatment device 110 (step S3). The acquisition unit 1301 of the control device 130 acquires a value indicating the first water quality measured by the water quality measuring instrument 120 in step S3. The order in which the processing of steps S1, S2, and S3 are performed is not particularly specified. For example, the processing may be performed in the order of step S3, step S1, and step S2.

[0025] The calculation unit 1302 then calculates a predicted water quality value for the treated water from the water treatment system 200 for each mixing ratio (step S4). The calculation method for the predicted water quality value in the calculation unit 1302 is as described above. Next, the output unit 1303 determines which of the predicted water quality values ​​for each mixing ratio calculated by the calculation unit 1302 satisfy externally requested conditions (step S5). The output unit 1303 displays the determined predicted water quality value (step S6). At this time, the output unit 1303 may also display the value of the mixing ratio between the first water source and the second water source at the time the determined predicted water quality value was calculated.

[0026] In this manner, in this embodiment, the water treatment management system 100 calculates a predicted water quality value of treated water when a mixture of the first and second water sources is supplied to the water treatment system 200 based on the water quality of treated water when only the first water source is supplied to the target water treatment system 200 and the water quality of treated water when only the first water source is supplied and when only the second water source is supplied to the control water treatment device 110 that performs a predetermined water treatment. In this case, the water treatment management system 100 calculates a predicted water quality value for each mixing ratio of the first and second water sources supplied. The water treatment management system 100 outputs the calculated predicted water quality value. Furthermore, the water treatment management system 100 outputs a predicted water quality value and mixing ratio that satisfy the conditions among the calculated predicted water quality values. This makes it possible to identify the mixing ratio that will produce pure water of the desired water quality, even if there is a change in the water quality of the first and second water sources. (Second Embodiment)

[0027] Figure 4 is a diagram showing a second embodiment of a water treatment management system of the present invention. As shown in Figure 4, a water treatment management system 101 in this embodiment has a control water treatment device 110, a water quality measuring device 120, and a control device 131. The control water treatment device 110 and the water quality measuring device 120 are the same as those in the first embodiment. An operation system 2 is composed of the water treatment management system 101, a water treatment system 200, and on-off valves 300 and 310.

[0028] The control device 131 calculates, as a predicted water quality value, a predicted value of the water quality of treated water corresponding to the mixing ratio when the first water source and the second water source are mixed and supplied to the water treatment system 200, based on the first water quality measured by the water quality measuring device 120 when only the first water source is supplied to the control water treatment device 110, the first water quality measured by the water quality measuring device 120 when only the second water source is supplied to the control water treatment device 110, and the second water quality measured by the water quality measuring device 120 when only the first water source is supplied to the water treatment system 200. The control device 131 controls the supply of the first water source and the second water source to the water treatment system 200 based on the calculated mixing ratio of the predicted water quality value.

[0029] Fig. 5 is a diagram showing an example of components included in the control device 131 shown in Fig. 4. As shown in Fig. 5, the control device 131 shown in Fig. 4 has an acquisition unit 1301, a calculation unit 1302, and a valve control unit 1314. The acquisition unit 1301 and the calculation unit 1302 are the same as those in the first embodiment. Note that Fig. 5 shows only the main components related to this embodiment among the components included in the control device 131 shown in Fig. 4.

[0030] Valve control unit 1314 controls on-off valves 300, 310 so that the first water source and the second water source are supplied to water treatment system 200 at a mixing ratio of predicted water quality values ​​that satisfy externally required conditions from among the predicted water quality values ​​calculated by calculation unit 1302. In other words, valve control unit 1314 controls on-off valves 300, 310 so that the first water source and the second water source are supplied to water treatment system 200 at flow rates that correspond to the mixing ratio of predicted water quality values ​​that satisfy externally required conditions from among the predicted water quality values ​​calculated by calculation unit 1302.

[0031] A description will now be given of a water treatment management method in the water treatment management system 101 shown in Fig. 4. Fig. 6 is a flowchart for explaining an example of a water treatment management method in the water treatment management system 101 shown in Fig. 4.

[0032] First, only the first water source is supplied to the water treatment system 200 as the water to be treated, and the water quality measuring instrument 120 measures the water quality of the treated water from the water treatment system 200 (step S11). The acquisition unit 1301 of the control device 131 acquires a value indicating the second water quality measured by the water quality measuring instrument 120 in step S11. Furthermore, only the first water source is supplied to the management water treatment device 110 as the water to be treated, and the water quality measuring instrument 120 measures the water quality of the treated water from the management water treatment device 110 (step S12). The acquisition unit 1301 of the control device 131 acquires a value indicating the first water quality measured by the water quality measuring instrument 120 in step S12. Furthermore, only the second water source is supplied to the management water treatment device 110 as the water to be treated, and the water quality measuring instrument 120 measures the water quality of the treated water from the management water treatment device 110 (step S13). The acquisition unit 1301 of the control device 131 acquires a value indicating the first water quality measured by the water quality measuring instrument 120 in step S13. The order in which the processing of steps S11, S12, and S13 are performed is not particularly specified. For example, the processing may be performed in the order of step S13, step S11, and step S12.

[0033] The calculation unit 1302 then calculates a predicted water quality value of the treated water from the water treatment system 200 for each mixing ratio (step S14). The calculation method for the predicted water quality value by the calculation unit 1302 is as described above. Next, the valve control unit 1314 determines which of the predicted water quality values ​​for each mixing ratio calculated by the calculation unit 1302 satisfy externally requested conditions (step S15). The valve control unit 1314 controls the on-off valves 300, 310 so that the first water source and the second water source are supplied to the water treatment system 200 at the mixing ratio corresponding to the determined predicted water quality value (step S16).

[0034] Thus, in this embodiment, the water treatment management system 101 calculates a predicted water quality value for treated water when a mixture of the first and second water sources is supplied to the water treatment system 200 based on the water quality of treated water when only the first water source is supplied to the target water treatment system 200 and the water qualities of treated water when only the first water source is supplied and when only the second water source is supplied to the control water treatment device 110 that performs a predetermined water treatment. The water treatment management system 101 calculates a predicted water quality value for each mixing ratio of the first and second water sources supplied. The water treatment management system 101 controls the opening and closing of the on-off valves 300 and 310 so that the first and second water sources are supplied to the water treatment system 200 at a mixing ratio of the calculated predicted water quality values ​​that satisfies externally required conditions. This allows pure water of the desired water quality to be obtained even when the water quality of the first and second water sources varies. (Third Embodiment)

[0035] Figure 7 is a diagram showing a third embodiment of a water treatment management system of the present invention. As shown in Figure 7, a water treatment management system 102 in this embodiment has a control water treatment device 110, a water quality measuring device 120, and a control device 132. The control water treatment device 110 and the water quality measuring device 120 are the same as those in the first embodiment. An operation system 3 is composed of the water treatment management system 102, a water treatment system 200, and on-off valves 300 and 310.

[0036] The control device 132 calculates, as a predicted water quality value, a predicted value of the water quality of treated water corresponding to the mixing ratio when the first water source and the second water source are mixed and supplied to the water treatment system 200, based on the first water quality measured by the water quality measuring device 120 when only the first water source is supplied to the control water treatment device 110, the first water quality measured by the water quality measuring device 120 when only the second water source is supplied to the control water treatment device 110, and the second water quality measured by the water quality measuring device 120 when only the first water source is supplied to the water treatment system 200. The control device 132 determines the operating details of the water treatment devices 210-1 to 210-4 based on the predicted water quality value for each calculated mixing ratio.

[0037] Fig. 8 is a diagram showing an example of components included in the control device 132 shown in Fig. 7. As shown in Fig. 8, the control device 132 shown in Fig. 7 has an acquisition unit 1301, a calculation unit 1302, and an operation control unit 1325. The acquisition unit 1301 and the calculation unit 1302 are the same as those in the first embodiment. Note that Fig. 8 shows only the main components related to this embodiment among the components included in the control device 132 shown in Fig. 7.

[0038] The operation control unit 1325 determines the operation details of the water treatment devices 210-1 to 210-4 based on the predicted water quality values ​​for each mixing ratio calculated by the calculation unit 1302. For example, if the water treatment device is a UV (ultraviolet oxidation device), the operation control unit 1325 may determine the operation details to increase the amount of ultraviolet radiation in the UV (ultraviolet oxidation device) if the predicted water quality values ​​calculated by the calculation unit 1302 do not satisfy externally required conditions. Also, if the water treatment device is an MDG (membrane degassing device), the operation control unit 1325 may determine the operation details to increase the output of the vacuum pump in the MDG (membrane degassing device) if the predicted water quality values ​​calculated by the calculation unit 1302 do not satisfy externally required conditions. In addition, if the water treatment device is an RO (reverse osmosis membrane separation device), the operation control unit 1325 may determine an operation content to increase the RO removal rate in the RO (reverse osmosis membrane separation device) if the predicted water quality value calculated by the calculation unit 1302 is a value that does not satisfy the conditions required from the outside.

[0039] The operation control unit 1325 may output information indicating the determined operation details of the water treatment devices 210-1 to 210-4. In this case, output may be a display, print, or audio output of the information indicating the operation details, or it may be transmitted to another device. In this embodiment, the operation control unit 1325 controls the operation of the water treatment devices 210-1 to 210-4 using the determined operation details of the water treatment devices 210-1 to 210-4. For example, if the water treatment device is a UV (ultraviolet oxidation device), the operation control unit 1325 may control the amount of ultraviolet irradiation using the determined operation details. Furthermore, if the water treatment device is an MDG (membrane degassing device), the operation control unit 1325 may control the output of the vacuum pump using the determined operation details. Furthermore, if the water treatment device is an RO (reverse osmosis membrane separation device), the operation control unit 1325 may control the RO removal rate using the determined operation details.

[0040] A description will now be given of a water treatment management method in the water treatment management system 102 shown in Fig. 7. Fig. 9 is a flowchart for explaining an example of a water treatment management method in the water treatment management system 102 shown in Fig. 7.

[0041] First, only the first water source is supplied to the water treatment system 200 as the water to be treated, and the water quality measuring instrument 120 measures the water quality of the treated water from the water treatment system 200 (step S21). The acquisition unit 1301 of the control device 132 acquires a value indicating the second water quality measured by the water quality measuring instrument 120 in step S21. Furthermore, only the first water source is supplied to the control-purpose water treatment device 110 as the water to be treated, and the water quality measuring instrument 120 measures the water quality of the treated water from the control-purpose water treatment device 110 (step S22). The acquisition unit 1301 of the control device 132 acquires a value indicating the first water quality measured by the water quality measuring instrument 120 in step S22. Furthermore, only the second water source is supplied to the control-purpose water treatment device 110 as the water to be treated, and the water quality measuring instrument 120 measures the water quality of the treated water from the control-purpose water treatment device 110 (step S23). The acquisition unit 1301 of the control device 132 acquires a value indicating the first water quality measured by the water quality measuring instrument 120 in step S23. The order in which the processing of steps S21, S22, and S23 are performed is not particularly specified. For example, the processing may be performed in the order of step S23, step S21, and step S22.

[0042] Thereafter, the mixed water of the first water source and the second water source is supplied to the control-use water treatment device 110 as the water to be treated while changing the mixing ratio of the first water source and the second water source, and the water quality measuring device 120 measures the water quality of the treated water of the control-use water treatment device 110 for each mixing ratio (step S23). The acquiring unit 1301 of the control device 132 acquires a value indicating the first water quality measured by the water quality measuring device 120 in step S23 for each mixing ratio.

[0043] The calculation unit 1302 then calculates a predicted water quality value of the treated water from the water treatment system 200 for each mixing ratio (step S24). The calculation method for the predicted water quality value in the calculation unit 1302 is as described above. Next, the operation control unit 1325 determines the operation details of the water treatment devices 210-1 to 210-4 based on the predicted water quality values ​​for each mixing ratio calculated by the calculation unit 1302 (step S25). The operation control unit 1325 controls the operation of the water treatment devices 210-1 to 210-4 using the determined operation details of the water treatment devices 210-1 to 210-4 (step S26).

[0044] Thus, in this embodiment, the water treatment management system 102 calculates a predicted water quality value of treated water when a mixture of the first and second water sources is supplied to the water treatment system 200, based on the water quality of treated water when only the first water source is supplied to the target water treatment system 200 and the water quality of treated water when only the first water source is supplied and when only the second water source is supplied to the control water treatment device 110 that performs a predetermined water treatment. In this case, the water treatment management system 102 calculates a predicted water quality value for each mixing ratio of the first and second water sources supplied. The water treatment management system 102 controls the operation of the water treatment devices 210-1 to 210-4 based on the predicted water quality value for each calculated mixing ratio. This allows pure water of the desired water quality to be obtained even when there is a change in the water quality between the first and second water sources. (Fourth Embodiment)

[0045] Figure 10 is a diagram showing a fourth embodiment of a water treatment control system of the present invention. As shown in Figure 10, a water treatment control system 103 in this embodiment has control water treatment devices 113, 114, water quality measuring devices 120, 123, and a control device 133. The water quality measuring device 120 is the same as that in the first embodiment. An operation system 4 is composed of the water treatment control system 103, a water treatment system 200, and on-off valves 300, 310.

[0046] The control-use water treatment device 113 is supplied with a first water source that is supplied to the water treatment system 200. The control-use water treatment device 113 performs a predetermined treatment on the supplied water to be treated. The control-use water treatment device 114 is supplied with a second water source that is supplied to the water treatment system 200. The control-use water treatment device 114 performs a predetermined treatment on the supplied water to be treated. The control-use water treatment device 113 and the control-use water treatment device 114 are installed in separate locations. For example, the control-use water treatment device 113 is installed within a semiconductor manufacturing factory, and the control-use water treatment device 114 is installed outside the semiconductor manufacturing factory. The water quality measuring device 123 measures a first water quality, which is the water quality of the treated water treated by the control-use water treatment device 114. The water quality measuring device 123 is installed near the control-use water treatment device 114 so that it can measure the water quality of the treated water treated by the control-use water treatment device 114. The water quality measuring device 123 transmits a value indicating the measured first water quality to the control device 133.

[0047] The control device 133 calculates, as a predicted water quality value, a predicted value of the water quality of treated water corresponding to the mixing ratio when the first water source and the second water source are mixed and supplied to the water treatment system 200, based on the first water quality measured by the water quality measuring device 120, the value indicating the first water quality transmitted from the water quality measuring device 123, and the second water quality measured by the water quality measuring device 120 when only the first water source is supplied to the water treatment system 200. The method of using the calculated predicted water quality value is the same as in the first to third embodiments.

[0048] As described above, in this embodiment, the water treatment management system 103 calculates a predicted water quality value of treated water when a mixture of the first water source and the second water source is supplied to the water treatment system 200 based on the water quality of treated water when only the first water source is supplied to the target water treatment system 200, the water quality of treated water when the first water source is supplied to the control water treatment device 113 that performs a predetermined water treatment, and the water quality of treated water when the second water source is supplied to the control water treatment device 114 that performs a predetermined water treatment. In this case, the water treatment management system 103 calculates a predicted water quality value for each mixing ratio of the first water source and the second water source supplied to the water treatment system 200. This makes it possible to obtain pure water of the desired water quality even if the water quality of the first water source and the second water source fluctuates. Furthermore, the control water treatment device 113 that treats the first water source and the control water treatment device 114 that treats the second water source are installed in separate locations. As a result, even if it is difficult to install a route for supplying the second water source into a semiconductor manufacturing factory where the control water treatment device 113 is installed, if the control water treatment device 114 that treats the second water source is installed outside the semiconductor manufacturing factory, reclaimed water discharged outside the semiconductor manufacturing factory can be supplied to the control water treatment device 114 and the quality of the treated water can be measured. Note that in this embodiment, a configuration in which the control water treatment device 113 is not installed is also possible. In that case, the control device 133 uses a predetermined value (for example, a value calculated from past statistical data) as a value indicating the first water quality of the treated water obtained by treating the first water source. (Example of configuration of water treatment system)

[0049] Fig. 11 is a diagram showing an example of the configuration of a water treatment system controlled by the water treatment control system of the present invention. In the example shown in Fig. 11, a water tank 10-1, an MMF 10-2, an ACF 10-3, a 2B3T 10-4, a water tank 10-5, an RO 10-6, a water tank 10-7, a UV 10-8, an SB-P (non-regenerative ion exchange device) 10-9, an MDG 10-10, a water tank 10-11, a UV 10-12, a CP 10-13, an MDG 10-14, and a UF 10-15 are arranged in series with one another. MMF10-2, ACF10-3, 2B3T10-4, RO10-6, UV10-8, SB-P10-9, MDG10-10, UV10-12, CP10-13, MDG10-14, and UF10-15 each correspond to a water treatment device that constitutes water treatment system 200 shown in Figures 1, 4, and 7. These water treatment devices are arranged in series to constitute the water treatment system. In this water treatment system, a first water source and a second water source are passed through water tank 11-1 to UF10-15 to produce ultrapure water, and the produced ultrapure water is supplied to a POU (point of use).

[0050] Although the above description has been given by allocating each function (process) to each component, this allocation is not limited to the above. Furthermore, the configuration of the components is also not limited to the above-described embodiments, which are merely examples. Furthermore, each embodiment may be combined.

[0051] Although the present invention has been described above with reference to the embodiments, the present invention is not limited to the above-described embodiments. Various modifications that can be understood by those skilled in the art can be made to the configuration and details of the present invention within the scope of the present invention.

[0052] This application claims priority based on Japanese Patent Application No. 2024-109443, filed on July 8, 2024, the disclosure of which is incorporated herein in its entirety by reference.

[0053] 1 to 4 Operation system 10-1, 10-5, 10-7, 10-11 Water tank 10-2 MMF 10-3 ACF 10-4 2B3T 10-6 RO 10-8, 10-12 UV 10-9 SB-P 10-10, 10-14 MDG 10-13 CP 10-15 UF 100 to 103 Water treatment management system 110, 113, 114 Management water treatment device 120, 123 Water quality measuring device 130 to 133 Control device 1301 Acquisition unit 1302 Calculation unit 1303 Output unit 1314 Valve control unit 1325 Operation control unit 200 Water treatment system 210-1 to 210-4 Water treatment device 300, 310 Opening and closing valve

Claims

1. A water treatment management system comprising: a management water treatment device that receives a plurality of treated waters that can be supplied to the water treatment system and performs a predetermined treatment on the supplied treated waters; a water quality measuring device that measures a first water quality, which is the water quality of the treated water treated by the management water treatment device, and a second water quality, which is the water quality of the treated water treated by the water treatment system; and a control device that calculates a predicted water quality value of the second water quality based on the measurement values ​​of the first water quality and the second water quality measured by the water quality measuring device, according to the mixing ratio of each of the plurality of treated waters supplied to the water treatment system.

2. A water treatment management system as described in claim 1, wherein the control device calculates the predicted water quality value corresponding to the mixing ratio based on the first water quality measured by the water quality measuring device when only the first treated water of the plurality of treated waters is supplied to the management water treatment device and when only the second treated water of the plurality of treated waters is supplied to the management water treatment device, and the second water quality measured by the water quality measuring device when only the first treated water is supplied to the water treatment system.

3. A water treatment management system as described in claim 1 or claim 2, wherein the control device displays a message encouraging the supply of the plurality of treated waters to the water treatment system at the mixing ratio corresponding to the predicted water quality value that satisfies a predetermined condition among the predicted water quality values.

4. A water treatment management system according to claim 1 or 2, wherein the control device determines the operation details of the water treatment system based on the predicted water quality value.

5. A water treatment management system according to claim 4, wherein the control device controls the operation of the water treatment system using the determined operation details.

6. A water treatment management system according to claim 1 or 2, wherein the water quality measuring device measures the concentration or conductivity of TOC or urea contained in each of the treated waters as the water quality of the treated waters.

7. A water treatment management system according to claim 1 or 2, wherein the water treatment system includes at least one of a reverse osmosis membrane separation device, an ultraviolet oxidation device, and an ion exchange device.

8. The water treatment management system according to claim 2, wherein the first water to be treated is external water, and the second water to be treated is internal water.

9. A water treatment system that treats water to be treated; a water treatment management system that receives a plurality of waters to be treated that can be supplied to the water treatment system, and calculates a predicted water quality value of the second water quality according to the mixing ratio of each of the plurality of waters to be treated that are supplied to the water treatment system, based on a first water quality, which is the water quality of treated water treated by a management water treatment device that performs a predetermined treatment on the supplied water to be treated, and a second water quality, which is the water quality of treated water treated by the water treatment system; and an on-off valve that controls the supply of the plurality of waters to be treated to the water treatment system, wherein the water treatment management system is an operation system that controls the supply of the plurality of waters to be treated from the on-off valve to the water treatment system, based on the mixing ratio, among the mixing ratios, that is the mixing ratio when the predicted water quality value satisfies a predetermined condition.

10. A control device having an acquisition unit that acquires a first water quality value, which is the water quality of treated water treated by a management water treatment device that performs a specified process on multiple treated waters that can be supplied to a water treatment system, and a second water quality value, which is the water quality of treated water treated by the water treatment system, and a calculation unit that calculates a predicted water quality value of the second water quality according to the mixing ratio of each of the multiple treated waters supplied to the water treatment system based on the first water quality value and the second water quality value acquired by the acquisition unit.

11. A water treatment management method that performs the following processes: measuring a first water quality, which is the water quality of treated water treated by a management water treatment device that performs a specified process on multiple treated waters that can be supplied to a water treatment system; measuring a second water quality, which is the water quality of treated water treated by the water treatment system; and calculating a predicted water quality value of the second water quality according to the mixing ratio of each of the multiple treated waters supplied to the water treatment system based on the measured values ​​of the first water quality and the second water quality.

Images