Fixing structure for piping or wiring

Abstract

A fixing structure 10 is used for fixing piping 20 or wiring extending from the inside of a gas box 30 to the outside, and comprises: a plate-shaped member 12 that is disposed to cover an opening 30H of the gas box and is fixed to the gas box, and has a through-hole 12H through which the piping 20 or the wiring passes; a block member 14 that is fixed to the plate-shaped member 12 and has a through-hole 14H through which the piping 20 or the wiring passes; and an annular seal member 18 that is disposed in the through-hole 14H of the block member and is in contact with an outer peripheral surface of the wiring 20 or the piping.

Description

Fixing structure for piping or wiring

[0001] The present invention relates to a fixing structure for piping or wiring, and more particularly to a fixing structure for fixing piping or wiring extending from the inside to the outside of a gas box to the gas box with high sealing performance.

[0002] Conventionally, gas supply systems have been used to supply process gas to chambers in semiconductor manufacturing equipment, etc. Patent Document 1 discloses an embodiment in which flow rate controllers and valves provided on multiple gas supply lines are housed together in a gas box, and the process gas is supplied to the chamber via devices in the gas box.

[0003] Gas boxes are used to ensure safety by preventing gas from leaking into the surrounding area in the event of a gas leak from a flow controller or valve housed inside. Gas boxes may be filled with an inert gas such as nitrogen gas to prevent the leaking gas from reacting with air. In addition, gas boxes may be connected to an exhaust path to prevent leaking gas from leaking into the surrounding area.

[0004] A gas box used as a countermeasure against gas leaks is required to have a certain level of airtightness. The gas box is formed into a box body by, for example, welding metal sheets to a metal frame material.

[0005] JP 2003-257870 A JP 2003-257542 A International Publication No. 2022 / 091713

[0006] When components of a gas supply system are housed in a gas box, the gas box is provided with holes for passing wires and pipes to connect the components to external devices. However, as described above, the gas box is required to have a certain level of airtightness, so leakage from the periphery of the through holes through which the wires and pipes pass must also be suppressed.

[0007] Standards stipulate that explosion-proof measures are required for wiring and electrical equipment placed in an environment where flammable gas may be present. Patent Document 2 describes an explosion-proof connector for drawing wiring to the outside while ensuring that the wiring is not in contact with gas. However, while the use of such an explosion-proof connector is suitable for ensuring a seal within the box, it results in a significant increase in manufacturing costs.

[0008] Therefore, there has been a demand for a fixing structure in a gas supply system that is relatively simple in structure, ensures sufficient sealing performance, and allows wiring and piping to be pulled out from the gas box to the outside.

[0009] The present invention has been made to solve the above-mentioned problems, and its main object is to provide a fixing structure for piping or wiring that provides sufficient airtightness to the gas box while allowing the piping or wiring to be properly pulled out to the outside.

[0010] A fixing structure for piping or wiring according to an embodiment of the present invention is used to fix piping or wiring extending from the inside to the outside of a gas box, and comprises: a plate-like member that is arranged to cover an opening provided in the gas box and fixed to the gas box, the plate-like member having a through hole through which the wiring or piping passes; a block member that is fixed to the plate-like member and has a through hole through which the wiring or piping passes; and an annular sealing member that is arranged in the through hole of the block member and contacts the outer peripheral surface of the piping or wiring.

[0011] In one embodiment, the plate-like member has a plurality of through holes formed therein, and the block members are disposed corresponding to the respective through holes.

[0012] In one embodiment, the plate-shaped member has a size larger than the opening of the gas box, and the outer periphery of the plate-shaped member is detachably attached to the gas box by a plurality of bolts.

[0013] In one embodiment, the fixing structure further includes a sealing material provided between the plate-like member and the block member.

[0014] In one embodiment, the block member is disposed inside the gas box.

[0015] In one embodiment, the piping that penetrates the plate-like member and the block member is configured as a piping portion to be connected to another piping portion, and a joint is provided as a connecting portion inside the gas box.

[0016] According to the piping or wiring fixing structure of the embodiment of the present invention, the drawn-out piping or wiring can be properly fixed to the gas box while maintaining the airtightness of the gas box.

[0017] Fig. 1 is a schematic cross-sectional view showing a state in which two pipes are fixed to a gas box by a fixing structure according to an embodiment of the present invention; Fig. 2 is a perspective view showing a fixing structure according to an embodiment of the present invention; Fig. 3 is a cross-sectional view showing a detailed configuration of a fixing structure according to an embodiment of the present invention; Fig. 4 is an exploded perspective view of a fixing structure according to an embodiment of the present invention; Fig. 5 is a side view showing a fixing structure according to another embodiment of the present invention, with (a) and (b) each showing another aspect.

[0018] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings, but the present invention is not limited to the embodiments described below. Also, although a fixing structure for piping will be described below, this fixing structure can also be used as a fixing structure for wiring.

[0019] The present applicant also describes a fixing structure for wiring or piping extending from a gas box in International Publication No. 2025 / 062961. Similar to the fixing structure disclosed in the above patent application, the fixing structure according to the embodiment of the present invention described below is also suitable for pulling multiple pipes or wiring together from a gas box with high sealing performance. For reference, the entire disclosure of International Publication No. 2025 / 062961 is incorporated herein by reference.

[0020] 1 shows a state in which a pipe 20 is fixed to a gas box 30 by a fixing structure 10 according to an embodiment of the present invention. The gas box 30 accommodates a gas processing device 40 that is incorporated into a gas supply system.

[0021] In this embodiment, two pipes 20 are connected to the gas treatment device 40, and both of these are drawn out to the outside of the gas box 30. One of the two pipes 20 is, for example, a gas supply pipe for supplying gas to the gas treatment device 40, and the other is a gas exhaust pipe for exhausting gas from the gas treatment device 40. However, the number of pipes 20 is not limited to two and may be any number.

[0022] The gas processing device 40 housed inside the gas box 30 may have various configurations, including, for example, a flow controller or a vaporizer, or may be any gas supply line component that may leak gas, such as a pipe, a flow path block, or a fluidic element (e.g., a valve).

[0023] An inert gas (here, nitrogen gas) may be typically supplied to the inside of the gas box 30 using a filler gas supply pipe (not shown). This prevents the leaked gas from reacting with the outside air inside the gas box 30, even in the event of a gas leak. The pressure inside the gas box 30 is preferably maintained at a value equal to or greater than the external pressure (typically atmospheric pressure).

[0024] In this embodiment, the fixing structure 10 is composed of a plate-like member 12 fixed to the gas box 30, and a block member 14 fixed to the plate-like member 12. The plate-like member 12 is arranged to close an opening 30H provided in the gas box 30. In this embodiment, the opening 30H is provided on the top surface of the gas box 30, but the opening 30H may be provided on another surface.

[0025] The plate member 12 is made of, for example, stainless steel, and the block member 14 is made of, for example, aluminum. However, the plate member 12 and the block member 14 are not limited to these materials and may be made of various metal materials. The block member 14 may be made of rubber or resin. The gas box 30 is made of a highly corrosion-resistant metal, for example, stainless steel.

[0026] The plate-like member 12 is provided with the same number of through holes 12H (or piping holes 12H) as the number of pipes 20 to be fixed. Here, two through holes 12H are provided to fix two pipes, and each pipe 20 passes through each of the through holes 12H in the plate-like member 12.

[0027] Meanwhile, a block member 14 is provided for each through hole 12H of the plate-like member 12 (i.e., for each pipe 20). In this embodiment, each block member 14 is fixed to the back surface (the surface facing the inside of the gas box) of the plate-like member 12. Each block member 14 also has a through hole 14H (or a pipe hole 14H), and the pipes 20 pass through the through hole 14H of the block member 14 and the through hole 12H of the plate-like member 12 and are drawn out to the outside.

[0028] FIG. 2 is a perspective view of the plate-shaped member 12 of the fixing structure 10 as seen from the outside, and FIG. 3 is a cross-sectional view showing how the piping 20 is fixed to the gas box 30 by the plate-shaped member 12 and the block member 14.

[0029] 2, in this embodiment, the plate-like member 12 has a circular planar shape. The plate-like member 12 typically has a shape corresponding to the shape of the opening 30H provided in the gas box 30, and is designed to be slightly larger than the opening 30H. Note that the planar shapes of the opening 30H and the plate-like member 12 are not limited to circular, and may be any shape, such as an ellipse, a polygon, or a slit.

[0030] A plurality of fixing holes 12a are provided near the outer periphery of plate-shaped member 12. In the embodiment shown in Fig. 2, eight fixing holes 12a are provided at equal intervals along the circumferential direction near the outer periphery of plate-shaped member 12. When plate-shaped member 12 is disposed so as to cover opening 30H of gas box 30, fixing holes 12a are provided so as to face fixing holes on the gas box 30 side (fixing holes provided around opening 30H).

[0031] The plate-shaped member 12 is fixed to the gas box 30 firmly and with a high degree of sealing performance using a plurality of fixing holes 12a and a corresponding plurality of bolts 12b (see FIG. 3). It is preferable that the plate-shaped member 12 is fixed to the gas box 30 in a detachable manner.

[0032] The outer periphery of the back surface of the plate-like member 12 and the top surface around the opening 30H of the gas box 30 are in surface contact with each other. This maintains a high level of airtightness inside the gas box 30. Here, the top surface refers to the surface facing the outside of the gas box 30, and the back surface refers to the surface facing the inside of the gas box 30.

[0033] To improve the sealing performance in this area, a film-like sealing material made of resin or rubber may be disposed on at least one of the outer periphery of the rear surface of the plate-shaped member 12 or the upper surface around the opening 30H of the gas box 30. To improve the sealing performance, the size of the plate-shaped member 12 may be set larger than the size of the opening 30H. The size of the plate-shaped member 12 and the number of bolts 12b are selected appropriately according to the needs.

[0034] In the illustrated embodiment, one opening 30H is provided in the gas box 30, and one plate-like member 12 is used to lead out the piping therefrom, but this is not limiting. Multiple openings 30H may be provided in the gas box 30, and each opening 30H may be sealed by a corresponding multiple of plate-like members 12. The multiple openings 30H may be provided on the same surface of the gas box 30, or on different surfaces.

[0035] 3, in the fixing structure 10, the plate-shaped member 12 is fixed airtightly to the gas box 30 by bolts 12b, and a block member 14 is disposed at the lead-out portion of the piping 20. The block member 14 is typically formed to be thicker than the plate-shaped member 12, and when the thickness of the plate-shaped member 12 is, for example, about 1 to 3 mm, the thickness of the block member 14 is designed to be, for example, about 5 to 20 mm.

[0036] The block member 14 is designed to be, for example, 2 to 20 times, and preferably 3 to 10 times, thicker than the plate-like member 12. If the block member 14 is too thin, the pipe 20 will be prone to moving about its axis even after it has been passed through, and it will be difficult to hold the annular seal member 18 (described below) on the inner circumferential surface of the through-hole of the block member 14. On the other hand, if the block member 14 is too thick, it will be difficult to pass the pipe 20 through during manufacturing, and there is also a risk of damaging the annular seal member 18 held inside. The thickness of the block member 14 is selected appropriately taking into consideration the thickness of the plate-like member 12, the diameter of the pipe 20, etc.

[0037] In this embodiment, the block member 14 is firmly fixed to the plate-like member 12 by a plurality of bolts 14b (four bolts 14b in this example, as shown in FIG. 2). The number of bolts 14b may be any number, but in order to ensure reliable gap-free fixation while also facilitating processing and assembly, it is preferable to use approximately two to six bolts, for example.

[0038] The piping 20 is drawn from the inside to the outside of the gas box 30 through the through holes 12H, 14H (see FIG. 1) of the plate-like member 12 and the block member 14. Here, since the block member 14 is used in the fixing structure 10, leaks are less likely to occur than when a piping hole is provided in the gas box 30 and the piping 20 is drawn out.

[0039] Furthermore, the opening 30H of the gas box 30 is closed using the detachable plate-like member 12, and the block members 14 are used for each pipe 20 to improve airtightness, making it easy to accommodate drawing out the pipes 20 from any position. Even if the drawing out positions or the number of pipes 20 change due to a design change or the like, the fixing structure 10 of this embodiment can accommodate this change simply by replacing the plate-like member 12, without replacing the gas box 30 itself. Therefore, the fixing structure 10 for pipes 20 can be easily applied to various aspects and can be more flexibly adapted.

[0040] Furthermore, for example, when it is desired to add more pipes 20, it is only necessary to add more pipe holes to the removed relatively small plate-like member 12, which improves workability compared to drilling holes directly in the gas box 30. Conversely, when it is desired to reduce the number of pipe holes, it is not necessary to replace the gas box 30, and it is sufficient to replace only the detachable plate-like member 12, which makes the process easier.

[0041] 3, in this embodiment, a connection portion (joint) 20C of the pipe 20 is provided below the plate-like member in the figure, i.e., inside the gas box 30. The connection portion 20C of the pipe 20 is provided with a screw thread, and can be connected to a pipe extending from the gas processing device 40 by screwing.

[0042] In this way, by arranging the connection portion 20C of the pipe 20 inside the gas box 30, even if gas leaks from inside the pipe at the pipe connection portion, the gas is less likely to leak to the outside of the gas box 30. However, as will be described later, if there is no particular problem, the connection portion 20C of the pipe 20 may be provided outside the gas box 30, i.e., on the upper surface side of the plate-like member 12.

[0043] The pipe 20 may be connected by welding. However, in a mode in which the connection portion 20C of the pipe 20 is disposed inside the gas box 30 and connected by screwing, rather than by welding, the pipe can be easily connected while effectively suppressing gas leakage to the outside.

[0044] Fig. 4 shows a detailed configuration of the fixing structure 10 of this embodiment. As shown in Fig. 4, in the fixing structure 10, a film-like sealing material 16 is disposed between the plate-like member 12 and the block member 14. The sealing material 16 is made of, for example, resin or rubber, and serves to improve the adhesion between the plate-like member 12 and the block member 14.

[0045] For example, a conductive packing can be used as the sealing material 16. The use of a conductive packing also has the effect of preventing static electricity that is likely to occur when the housing is painted, etc. The sealing material 16 does not necessarily have to be conductive as long as it can provide sufficient sealing properties.

[0046] Furthermore, if the block member 14 is made of rubber or the like, it is not necessarily required to provide the sealant 16. In some cases, sufficient adhesion can be ensured by simply abutting the block member 14 directly against the plate-like member 12.

[0047] Furthermore, in the fixing structure 10 of this embodiment, a groove for disposing the annular seal member 18 is formed on the inner circumferential surface of the through hole of the block member 14. The annular seal member 18 is typically flexible and is configured, for example, by an O-ring. The annular seal member 18 is disposed in the groove of the block member 14 before the piping 20 is inserted into the block member 14. The annular seal member 18 may have a cut portion (a slit).

[0048] The inner diameter of the annular seal member 18 is set to be approximately the same as or slightly smaller than the outer diameter of the pipe passing through it. After the pipe 20 is inserted, the annular seal member 18 comes into contact with the outer surface of the pipe 20 and deforms when the pipe 20 is inserted, thereby preventing leakage from around the pipe 20 passing through the block member 14.

[0049] 5 is an exploded perspective view showing the assembly of the fixing structure 10. As shown in the figure, the block member 14 is fixed to the bottom surface of the plate-like member 12 by bolts 14b, with the sealing material 16 sandwiched therebetween. The annular sealing member 18 (see FIG. 4) has been inserted into the block member 14 in advance.

[0050] After the block member 14 is fixed, the pipe 20 can be inserted from the side of the block member 14 and passed through the through holes 14H and 12H, exposing the end of the pipe 20 to the outside. In this embodiment, the connection portion 20C provided on the side of the block member 14 (inside the gas box) is connected to the connection portion of the pipe extending from the gas processing device 40 in the gas box 30. On the other hand, the end of the pipe 20 on the side protruding from the plate-like member 12 is connected to another pipe by welding.

[0051] Although the fixing structure according to the embodiment of the present invention has been described above, various modifications are possible. For example, while the above-described embodiment is shown on the left side of Fig. 6(a), the piping connection portion 20C may be provided on the upper surface of the plate-shaped member 12 (outside the gas box), as shown on the right side of Fig. 6(a). Furthermore, as shown on the left side of Fig. 6(b), the block member 14 may be disposed on the upper surface of the plate-shaped member 12. Furthermore, as shown on the right side of Fig. 6(b), both the block member 14 and the piping connection portion 20C may be disposed on the upper surface of the plate-shaped member 12.

[0052] However, in consideration of safety, ease of construction, and airtightness, it is preferable to (1) place the block member 14 inside the gas box 30 and place the piping connection portion (joint) 20C inside the gas box (the piping on the outside is welded), as explained using Figures 1 to 5. Other preferable orders are (2) inside the block member and without joints (pipes welded to each other on both sides), (3) outside the block member and with joints on the inside, (4) outside the block member and without joints, (5) inside the block member and with joints on the outside, and (6) outside the block member and with joints on the outside.

[0053] Although the above description has been given of a configuration in which a single groove is provided in the through hole 14H of the block member 14 and the annular seal member 18 is disposed therein, the present invention is not limited to this. Multiple grooves may be provided in the through hole 14H of the block member 14, and multiple annular seal members 18 may be disposed therein. Alternatively, multiple annular seal members 18 may be disposed in a single groove provided in the through hole 14H of the block member 14.

[0054] Although the above description has been given of a mode in which the plate-shaped member 12 is fixed to the outer surface of the gas box 30, the present invention is not limited to this. The plate-shaped member 12 may be fixed to the inner surface of the gas box 30 as long as it can be positioned so as to close the opening 30H.

[0055] The piping or wiring fixing structure according to the embodiment of the present invention is suitably used to firmly fix piping or wiring extending from a gas processing device arranged inside a gas box to the gas box with high sealing performance.

[0056] REFERENCE SIGNS LIST 10 Fixing structure 12 Plate-shaped member 14 Block member 16 Sealing material 18 Annular sealing member 20 Piping 30 Gas box 40 Gas treatment device

Claims

1. A fixing structure for fixing piping or wiring extending from the inside to the outside of a gas box, comprising: a plate-shaped member fixed to the gas box so as to cover an opening provided in the gas box, the plate-shaped member having a through hole through which the piping or wiring passes; a block member fixed to the plate-shaped member, the block member having a through hole through which the piping or wiring passes; and an annular sealing member disposed in the through hole of the block member and in contact with the outer peripheral surface of the piping or wiring.

2. The piping or wiring fixing structure according to claim 1, wherein the plate-like member has a plurality of through holes, and the block members are disposed for the respective through holes.

3. A piping or wiring fixing structure as described in claim 1 or 2, wherein the plate-like member is larger than the opening of the gas box, and the outer periphery of the plate-like member is detachably attached to the gas box by a plurality of bolts.

4. The piping or wiring fixing structure according to claim 1 or 2, further comprising a sealing material provided between the plate-like member and the block member.

5. A piping or wiring fixing structure according to claim 1 or 2, wherein the block member is disposed inside the gas box.

6. A piping or wiring fixing structure as described in claim 1 or 2, wherein the piping that passes through the plate-like member and the block member is configured to be connected to other piping as a piping portion, and a fitting is provided as a connection portion inside the gas box.

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