Robot link mechanism, end effector, mapping device, load port, and end effector control method

Abstract

A link mechanism (7) comprises: a link member (71) that has a chain shape in which individual units (U) are rotatably connected to each other, and that extends in a first direction; a guide (73) that converts the stroke of an actuator (8) in the first direction into displacement of an operation unit (6) in a second direction; and a regulating unit (72) that regulates the angle of the link member (71) between the first direction and the second direction and that supports the operation unit (6) together with the link member (71).

Description

Robot link mechanism, end effector, mapping device, load port, and end effector control method

[0001] The technology disclosed herein relates to a link mechanism of a robot, an end effector, a mapping device, a load port, and a method for controlling an end effector.

[0002] Patent Document 1 describes a conventional substrate transport robot. The robot's hand has a pitch conversion mechanism that converts the vertical pitch of multiple substrates. The pitch conversion mechanism lifts four linear moving bodies to different heights. Each linear moving body is a vertically long plate member and has a receiving portion that supports the underside of the peripheral edge of the substrate. The pitch conversion mechanism has a link mechanism connected to the linear moving bodies. The link mechanism converts the forward and backward movement of a slider that slides within the main body into vertical movement. The ends of the link mechanism are connected to each other so that they can rotate upward. In response to the forward and backward movement of the slider, the connecting portions of the link mechanism each rotate upward by a predetermined amount, lifting the linear moving body. This causes the four linear moving bodies to rise to different predetermined height positions.

[0003] Patent No. 6314089

[0004] The conventional substrate transport robot requires a storage space height that corresponds to the lift distance of the four linear moving bodies. This means that the thickness of the main body increases depending on, for example, the number of substrates to be held simultaneously and the height to which the top substrate is lifted, leaving room for improvement in terms of miniaturizing the hand.

[0005] The technology disclosed herein relates to a link mechanism for a robot, comprising: a link member formed in a chain shape with units rotatably connected to one another and extending in a first direction, the link member having a first end connected to the actuator, a guide that guides a second end of the link member connected to the operating unit in a second direction and converts a stroke of the actuator in the first direction into a displacement of the operating unit in the second direction, and a defining unit that defines an angle between the first and second directions of the link member and supports the operating unit together with the link member.

[0006] The link member is made chain-like, and the stroke of the actuator in the first direction is converted into a displacement of the operating part in the second direction via the link member, so that a robot equipped with the link mechanism can be made smaller.

[0007] FIG. 1 shows a horizontal articulated robot. FIG. 2 is a plan view showing the positional relationship between the main body, link mechanism, operating unit, and actuator. FIG. 3 is a plan view of range III in FIG. 2. FIG. 4 is a plan view of range IV in FIG. 2. FIG. 5 is a side view showing the fixed state of the operating unit. FIG. 6 is a side view taken along line VI-VI in FIGS. 3 and 4. FIG. 7 is a side view taken along line VII-VII in FIGS. 3 and 4. FIG. 8 is a side view taken along line VIII-VIII in FIGS. 3 and 4. FIG. 9 is a side view taken along line IX-IX in FIGS. 3 and 4. FIG. 10 is a perspective view of the link mechanism, operating unit, and actuator. FIG. 11 is a sequence diagram showing a portion of the substrate transport operation. FIG. 12 is a perspective view of a link mechanism, operating unit, and actuator according to a modified example. FIG. 13 is a perspective view of a mapping device according to a modified example. FIG. 14 is a perspective view showing another example of a mapping device according to a modified example. FIG. 15 is a view showing a load port according to a modified example.

[0008] Hereinafter, an embodiment of a robot end effector and a link mechanism will be described with reference to the drawings. The robot described here is an example.

[0009] (Substrate Transfer Robot) FIG. 1 is a perspective view showing a substrate transfer robot 2 to which the end effector and link mechanism disclosed herein are applied.

[0010] The robot 2 is disposed within the substrate processing equipment. The substrate processing equipment has one or more FOUPs (Front Opening Unified Pods) 92. The FOUP 92 accommodates a substrate 91. The FOUP 92 can accommodate a plurality of substrates 91 arranged in the Z direction. The substrate 91 is a semiconductor wafer or a glass substrate. The robot 2 removes the substrate 91 from the FOUP 92 and transports it to another location where a predetermined process is performed. The robot 2 may transport the substrate 91 after the predetermined process to another FOUP 92 or to another location where another process is performed.

[0011] (Structure of the Robot) The robot 2 is a horizontal articulated robot. As shown in FIG. 1 , the robot 2 has a base 21. The base 21 is installed in a transfer space within the substrate processing equipment. The robot 2 has a manipulator 200. The manipulator 200 includes an arm 22, a base 26, and an end effector 1. The end effector 1 has a hand 3 that holds a substrate 91. Hereinafter, the direction in which the hand 3 moves forward and backward relative to the hoop 92 will be referred to as the first direction or Y direction. Within the Y direction, the direction in which the hand 3 moves toward the hoop 92 will be referred to as the front, and the direction in which the hand 3 moves away from the hoop 92 will be referred to as the rear. The X direction is perpendicular to the Y direction. Both the X direction and the Y direction are horizontal directions. Furthermore, the vertical direction perpendicular to the X direction and the Y direction will be referred to as the Z direction. Within the Z direction, the upward direction is an example of the second direction, and the downward direction is an example of the third direction. The X direction, Y direction (front-back direction), and Z direction (up-down direction) are used for explaining the embodiment and are not used to limit the structure of the robot 2, link mechanism 7, and end effector 1.

[0012] The base 21 supports the arm 22 via the actuator 23. The arm 22 is movable up and down in the Z direction relative to the base 21. The actuator 23 moves the arm 22 up and down. The arm 22 has a link 221. The arm 22 of the illustrated robot 2 has one link 221. Note that the number of links forming the arm 22 is not limited to one, and may be two or more.

[0013] A first end of the link 221 is supported by the base 21 via the actuator 23. The link 221 is rotatable about a first axis Z1 extending in the Z direction relative to the base 21. The actuator 24 rotates the link 221. A second end of the link 221 is connected to a first end of the base 26. The base 26 is rotatable about a second axis Z2 extending in the Z direction relative to the link 221. The actuator 25 rotates the base 26 about the second axis Z2. The base 26 supports the end effector 1.

[0014] (Structure of End Effector) FIG. 2 is a plan view showing the positional relationship between the main body 4, the link mechanism 7, the operating unit 6, and the actuator 8. As shown in FIG.

[0015] As described above, the robot 2 includes the end effector 1. The end effector 1 has a hand 3 that holds a substrate 91. The hand 3 has a main body 4, an actuator 8, an operating unit 6, and a link mechanism 7. The hand 3 is fixed to and supported on a base 26. The hand 3 generally holds the substrate 91 in various ways, such as gripping, suction, placing, or fitting, and releases the held substrate 91.

[0016] The main body 4 has a first main body 41, a second main body 42, and a drive unit 44. The first main body 41 is generally Y-shaped in a plan view, with an open front end. The first main body 41 has two front end portions 410. The two front end portions 410 are positioned symmetrically about a center line CL. The center line CL extends in the Y direction from the center of the main body 4 in the X direction. In other words, the two front end portions 410 have the same structure at symmetrical positions in a plan view.

[0017] Fig. 3 is a plan view of the area III enclosed by the dashed line in Fig. 2. Fig. 4 is a plan view of the area IV enclosed by the dashed line in Fig. 2. Fig. 5 is a side view showing the fixed state of the actuating unit 6s, which will be described later. Fig. 6 is a side view taken along line VI-VI in Figs. 3 and 4. Fig. 7 is a side view taken along line VII-VII in Figs. 3 and 4. Fig. 8 is a side view taken along line VIII-VIII in Figs. 3 and 4. Fig. 9 is a side view taken along line IX-IX in Figs. 3 and 4.

[0018] As shown in FIG. 3 or 5 , the front end portion 410 includes a first wall 411, a second wall 412, a third wall 413, and an upper wall 414. The first wall 411, the second wall 412, and the third wall 413 are each perpendicular to the upper surface 261 of the base 26. The first wall 411 and the third wall 413 face each other in the X direction. The second wall 412 connects the first wall 411 and the third wall 413. The upper wall 414 connects the upper ends of the first wall 411, the second wall 412, and the third wall 413 to each other. The first wall 411, the second wall 412, the third wall 413, and the upper wall 414 form a closed storage space R1 (see FIG. 5 ). The second wall 412 has an opening Q1 (see FIG. 5 ) that communicates with the storage space R1. In other words, each front end 410 has an accommodation space R1 and an opening Q1 that communicates with the accommodation space R1. The opening Q1 has a size that allows the five link members 71, which are arranged in the X direction on the upper surface 261 of the base 26 and extend in the Y direction, to pass through.

[0019] As shown in Fig. 2, the first body 41 has, at a midpoint in the Y direction, recesses 43 that are recessed inward in a generally rectangular shape from both sides in the X direction. The second body 42 is located on both sides of the first body 41 in the X direction. The second body 42 has a generally rectangular shape that conforms to the inner shape of the recesses 43 in a plan view. The second body 42 is located symmetrically with respect to the center line CL. In other words, the second body 42 has the same structure at symmetrical positions in a plan view.

[0020] As shown in FIGS. 4 and 5 , the second main body 42 includes a first wall 421, a second wall 422, a third wall 423, and a top wall 424. The first wall 421, the second wall 422, and the third wall 423 are each perpendicular to the top surface 261 of the base 26. The first wall 421 and the third wall 423 face each other in the X direction. The second wall 422 connects the first wall 421 and the third wall 423. The top wall 424 connects the top ends of the first wall 421, the second wall 422, and the third wall 423 to each other. The first wall 421, the second wall 422, the third wall 423, and the top wall 424 form a closed storage space R2. The second wall 422 has an opening Q2 that communicates with the storage space R2. In other words, each second body 42 has a storage space R2 and an opening Q2 that communicates with the storage space R2. The opening Q2 is wide enough to allow the five link members 71, which are arranged in the X direction on the upper surface 261 of the base 26 and extend in the Y direction, to pass through. Hereinafter, the storage spaces R1 and R2 will be collectively referred to as storage spaces R. The openings Q1 and Q2 will be collectively referred to as openings Q.

[0021] 1 , the drive unit 44 displaces the second body 42 in the Y direction. When the second body 42 displaces in the Y direction, the actuator 8, link mechanism 7, and operating unit 6 housed in the second body 42 also displace in the Y direction by the same amount. Specifically, under the action of the drive unit 44, the second body 42 displaces in the Y direction between a holding position where the substrate 91 is held and a release position where the substrate 91 is released. In the illustrated example, the drive unit 44 is supported on the upper surfaces of the two second bodies 42 and the upper surface of the first body 41.

[0022] As described above, the hand 3 has an operating unit 6, a link mechanism 7, and an actuator 8. The link mechanism 7 has a link member 71, a defining unit 72, and a guide 73. The hand 3 holds the substrate 91 by the multiple operating units 6 gripping the edge of the substrate 91. The hand 3 releases its hold on the substrate 91 by the operating units 6 moving away from the edge of the substrate 91. Note that the hand 3 in the illustration is an edge grip hand. The edge grip hand has a size corresponding to the diameter of the substrate 91.

[0023] The actuating units 6 hold the substrate 91. As shown in FIG. 2 , the actuating units 6 are located at four locations in a plan view: the front ends of the two front end portions 410 and the front ends of the two second main bodies 42. The actuating units 6 are located at intervals from one another so that the center of the substrate 91 is included in a rectangle formed by connecting the actuating units 6. Note that the locations of the actuating units 6 are not limited to four. Each actuating unit 6 has a plurality of holding units 61 arranged adjacent to one another in the circumferential direction of the substrate at each location. In the illustrated example, the actuating unit 6 has actuating units 6s, 6a, 6b, 6c, and 6d. The actuating unit 6s has a holding unit 61s. The actuating unit 6a has a holding unit 61a. The actuating unit 6b has a holding unit 61b. The actuating unit 6c has a holding unit 61c. The actuating unit 6d has a holding unit 61d. The retaining portions 61s, 61a, 61b, 61c, and 61d have the same structure. When referring to the actuating portions 6s, 6a, 6b, 6c, and 6d collectively, they are referred to as actuating portions 6. When referring to the retaining portions 61s, 61a, 61b, 61c, and 61d collectively, they are referred to as retaining portions 61. In the front end portion 410, the actuating portions 6 are arranged in the order of 6s, 6a, 6b, 6c, and 6d from the outside in the X direction toward the center line CL. In the second main body 42, the actuating portions 6 are arranged in the order of 6d, 6c, 6b, 6a, and 6s from the outside in the X direction toward the center line CL.

[0024] The holder 61 has a receiving portion 62, a connecting portion 63, and a linking portion 64. The receiving portion 62 has a support surface that abuts against the outer peripheral edge of the lower surface of the substrate 91 and supports the substrate 91 from below. The receiving portion 62 includes a receiving portion 62s of the holder 61s (see FIG. 5), a receiving portion 62a of the holder 61a (see FIG. 6), a receiving portion 62b of the holder 61b (see FIG. 7), a receiving portion 62c of the holder 61c (see FIG. 8), and a receiving portion 62d of the holder 61d (see FIG. 9). The receiving portion 62s is fixed at a height position H0 from the upper surface of the upper wall 414 or the upper surface of the upper wall 424. For ease of explanation, the height position of the receiving portion 62s will be referred to as the height position H0 below. The receiving portions 62a, 62b, 62c, and 62d move up and down between a state where they are aligned at the same height as the receiving portion 62s (see FIG. 11(a)) and a height position corresponding to the Z-direction spacing HF of the hoop 92 (see FIG. 11(b)).

[0025] As shown in FIG. 6 , the receiving portion 62a rises and falls between a height position H0 and a height position H1 (H1 > H0). For example, H1 - H0 = HF. As shown in FIG. 7 , the receiving portion 62b rises and falls between a height position H0 and a height position H2 (H2 > H1). For example, H2 - H0 = 2 × HF (2HF). As shown in FIG. 8 , the receiving portion 62c rises and falls between a height position H0 and a height position H3 (H3 > H2). For example, H3 - H0 = 3 × HF (3HF). As shown in FIG. 9 , the receiving portion 62d rises and falls between a height position H0 and a height position H4 (H4 > H3). For example, H4 - H0 = 4 × HF (4HF). In the following description, the receiving portions 62s, 62a, 62b, 62c, and 62d will be collectively referred to as receiving portions 62.

[0026] The connecting portion 64 is connected to the second end of the link member 71. As shown in FIG. 10 , in this embodiment, the connecting portion 64 is U-shaped in a plan view and has an open rear end. The connecting portion 64 surrounds the outside of the unit U at the second end of the link member 71 and is connected to the unit U. The method for connecting the connecting portion 64 to the unit U is not particularly limited. For example, the connecting portion 64 may be connected using bolts. For example, the connecting portion 64 may be fixed by fitting or adhesive. The connecting portion 64 includes a connecting portion 64s of the holding portion 61s (see FIG. 5 ), a connecting portion 64a of the holding portion 61a (see FIG. 6 ), a connecting portion 64b of the holding portion 61b (see FIG. 7 ), a connecting portion 64c of the holding portion 61c (see FIG. 8 ), and a connecting portion 64d of the holding portion 61d (see FIG. 9 ). The connecting portions 64s, 64a, 64b, 64c, and 64d are collectively referred to as the connecting portion 64.

[0027] The connecting portion 63 connects the front lower end of the receiving portion 62 and the front upper end of the coupling portion 64. The connecting portion 63 is a plate-like body having a predetermined rigidity. The connecting portion 63 includes a connecting portion 63s of the holding portion 61s (see FIG. 5), a connecting portion 63a of the holding portion 61a (see FIG. 6), a connecting portion 63b of the holding portion 61b (see FIG. 7), a connecting portion 63c of the holding portion 61c (see FIG. 8), and a connecting portion 63d of the holding portion 61d (see FIG. 9). The connecting portions 63s, 63a, 63b, 63c, and 63d are collectively referred to as the connecting portion 63.

[0028] The link member 71 is located between the actuator 8 and the operating unit 6. The link member 71 includes link members 71a, 71b, 71c, and 71d. The actuator 8 includes actuators 8a, 8b, 8c, and 8d. As shown in FIG. 6 , the link member 71a is located between the actuator 8a and the holding unit 61a. A first end of the link member 71a is connected to the actuator 8a. A second end of the link member 71a is connected to the connecting unit 64a. As shown in FIG. 7 , the link member 71b is located between the actuator 8b and the holding unit 61b. A first end of the link member 71b is connected to the actuator 8b. A second end of the link member 71b is connected to the connecting unit 64b. As shown in FIG. 8 , the link member 71c is located between the actuator 8c and the holding unit 61c. A first end of the link member 71c is connected to the actuator 8c. A second end of the link member 71c is connected to the connecting portion 64c. As shown in FIG. 9 , the link member 71d is located between the actuator 8d and the holding portion 61d. A first end of the link member 71d is connected to the actuator 8d. A second end of the link member 71d is connected to the connecting portion 64d. The link members 71a, 71b, 71c, and 71d are collectively referred to as the link members 71. The actuators 8a, 8b, 8c, and 8d are collectively referred to as the actuators 8.

[0029] The link member 71 is a chain-like structure in which the units U are rotatably connected to one another. The units U have relatively high rigidity and are made of, for example, metal. The units U allow the link member 71 to be displaced upward from the front direction. The units U are connected to one another so that the link member 71 does not displace downward from the front direction. In the example of FIG. 10 , the unit U has two side plates facing each other in the X direction and a connecting plate connecting the side plates. The connecting plate connects the upper ends and lower ends of the two side plates at a midpoint in the Y direction. Each side plate has a hole penetrating in the X direction at one end. Each side plate has a pin at the other end protruding from the outer surface in the X direction and having a diameter slightly smaller than the aforementioned hole. The pin of each side plate is fitted into the hole of the adjacent unit U, thereby rotatably connecting the multiple units U to one another.

[0030] As shown in FIG. 10 , a Cableveyor (registered trademark) 77 may be used as the link member 71. The Cableveyor 77 is a chain-like structure in which the individual units U are rotatably connected to one another. In the case of the Cableveyor 77, the individual units U are made of, for example, resin. The specific structure of the individual units U is as described above. The Cableveyor 77 has a storage space that runs along the length of the Cableveyor 77. Wiring and piping can be passed through the storage space of the Cableveyor 77. In the example of FIG. 10 , the storage space of the Cableveyor 77 extends in the Z direction via the Y direction. Note that, although FIG. 10 shows an example in which the individual units U are hollow, hollowness is not essential. Furthermore, a structure different from that shown in FIG. 10 may achieve the same function as the individual units U.

[0031] 3 or 4, the link members 71a, 71b, 71c, and 71d are arranged side by side in the X direction. Each of the link members 71 contacts the upper surface 261 of the base 26 and extends in the Y direction along the upper surface 261. The link member 71 extends in the Y direction from the storage space R1 of the first main body 41 to the outside of the first main body 41 via the opening Q1. Alternatively, the link member 71 extends in the Y direction from the storage space R2 of the second main body 42 to the outside of the second main body 42 via the opening Q2.

[0032] The guide 73 guides the second end of the link member 71 in the second direction (Z direction in the illustrated example). The guide 73 converts the stroke of the actuator 8 in the first direction (Y direction in the illustrated example) into displacement of the operating part 6 in the second direction (Z direction in the illustrated example). In the illustrated example, the guide 73 has a guide 731 located in front of the opening Q1 of the first body 41 and a guide 732 located in front of the opening Q2 of the second body 42.

[0033] The guide 731 is a wall perpendicular to the upper surface 261 of the base 26. Between the second wall 412 and the guide 731, there is a gap that allows the link member 71 guided upward by the guide 731 to pass through. The structure of the guide 731 is not limited to a wall. For example, it may be a cylindrical body that is approximately L-shaped in a side view. Furthermore, the guide 731 may be a structure that is separate from the first main body 41. The guide 732 is a wall perpendicular to the upper surface 261 of the base 26. Between the second wall 422 and the guide 732, there is a gap that allows the link member 71 guided upward by the guide 732 to pass through. The structure of the guide 732 is not limited to a wall. For example, it may be a cylindrical body that is approximately L-shaped in a side view. Furthermore, the guide 732 may be a structure that is separate from the main body 41. In the following description, the guides 731 and 732 will be collectively referred to as the guide 73.

[0034] The defining portion 72 defines the angle θ between the Y direction and the upward direction of the link member 71. The defining portion 72 is located on the surface opposite to the direction in which the link member 71 is guided. A first end of the defining portion 72 is fixed to a first end of the link member 71. For example, the first end of the defining portion 72 is fixed to a lower surface of the unit U located at the rear end of the link member 71. A second end of the defining portion 72 is fixed to a second end of the link member 71. For example, the second end of the defining portion 72 is fixed to a front surface of the unit U located at the upper end of the link member 71.

[0035] In the illustrated example, the defining portion 72 extends along the outer surface of the link member 71. The defining portion 72 includes defining portions 72a, 72b, 72c, and 72d. The defining portion 72a defines the angle θ between the Y direction and the upward direction of the link member 71a. The defining portion 72b defines the angle θ between the Y direction and the upward direction of the link member 71b. The defining portion 72c defines the angle θ between the Y direction and the upward direction of the link member 71c. The defining portion 72d defines the angle θ between the Y direction and the upward direction of the link member 71d. The defining portions 72a, 72b, 72c, and 72d are collectively referred to as defining portions 72. In this embodiment, the defining portion 72 defines the angle θ between the Y direction and the upward direction of the link member 71 to 90 degrees. The defining portion 72 has relatively high tensile rigidity and relatively low bending rigidity. The defining portion 72 is a strip-shaped or linear body. The defining portion 72 is, for example, a strip-shaped body made of an iron or steel thin plate. The defining portion 72 is, for example, a strip-shaped body made of stainless steel, iron, or aluminum. The defining portion 72 is a linear body made of piano wire or stainless steel wire. With the above configuration, the defining portion 72 defines the angle θ between the Y direction and the upward direction of the link member 71, and supports the operating unit 6 together with the link member 71. Note that the defining portion 72 only needs to be able to apply a predetermined tension to the link member 71, and the specific structure is not limited to the above.

[0036] The actuator 8 drives the first end of the link member 71 in the Y direction (front-rear direction). The drive source of the actuator 8 is, for example, a motor. The drive source of the actuator 8 is, for example, an air cylinder. The actuator 8 includes actuators 8a, 8b, 8c, and 8d. As shown in FIG. 6, the actuator 8a drives the first end of the link member 71a in the Y direction. The drive amount is, for example, HF. The Y-direction stroke of the actuator 8a is converted into an upward displacement of the operating portion 6a via the guide 73. As shown in FIG. 7, the actuator 8b drives the first end of the link member 71b in the Y direction. The drive amount is, for example, 2HF. The Y-direction stroke of the actuator 8b is converted into an upward displacement of the operating portion 6b via the guide 73. As shown in FIG. 8, the actuator 8c drives the first end of the link member 71c in the Y direction. The drive amount is, for example, 3HF. The Y-direction stroke of actuator 8c is converted by guide 73 into an upward displacement of operating unit 6c. As shown in Figure 9, actuator 8d drives the first end of link member 71d in the Y direction. The drive amount is, for example, 4 HF. The Y-direction stroke of actuator 8d is converted by guide 73 into an upward displacement of operating unit 6d.

[0037] (Substrate Transport Operation) Next, with reference to FIG. 11 , the substrate transport operation by the robot 2 will be described. FIG. 11 is a sequence diagram showing a portion of the substrate transport operation. For convenience, the FOUP 92 is not shown in FIGS. 11( b) and 11(c). Here, the basic operation of the robot 2 according to this embodiment is to remove five unprocessed substrates 91 from the FOUP 92 at once, change the pitch of the substrates 91 in the height direction, and transport them to another location where a predetermined process will be performed. The robot 2 may transport the five substrates that have completed the predetermined process to another FOUP 92 or to a location where another process will be performed. The robot 2 repeats the transport of the substrates 91 between the FOUP 92 and the location where another process will be performed until processing of all the substrates 91 is complete.

[0038] The robot 2 moves the hand 3 to a front position facing the hoop 92 with the height positions of the holders 61s, 61a, 61b, 61c, and 61d aligned at H0 (see FIG. 1). The robot 2 lowers the actuator 23 from the state shown in FIG. 1. The robot 2 drives the actuators 24 and 25 to rotate the arm 22 and the base 26 in a horizontal plane. The robot 2 advances the hand 3. Specifically, the hand 3 passes below the hoop 92 and advances to the position shown in FIG. 11( a). As shown in FIG. 11( a), the actuator 6 located at the front end of the front end 410 of the first body 41 is located at the front peripheral edge of the substrate 91. The actuator 6 located at the front end of the second body 42 is located at the rear peripheral edge of the substrate 91.

[0039] 11(a), the actuator 8 displaces the link member 71 a predetermined amount in the Y direction. The operating unit 6 rises to a predetermined height position (e.g., a position slightly lower than the underside of the substrate 91) corresponding to the substrate holding position of the hoop 92. Specifically, the holder 61a rises to height position H1, the holder 61b rises to height position H2, the holder 61c rises to height position H3, and the holder 61d rises to height position H4. The robot 2 rotates the arm 22 and the base 26 in the horizontal plane and slightly retracts the hand 3 (see FIG. 11(b)).

[0040] 11(b), the drive unit 44 displaces the second main body 42 forward. In response to the displacement of the second main body 42, the actuating unit 6 displaces forward, and the holding units 61s, 61a, 61b, 61c, and 61d move to the peripheral edges of the corresponding substrates 91. After the movement, all of the actuating units 6 rise slightly, causing the substrates 91 to be slightly lifted from the hoop 92. The robot 2 rotates the arm 22 and base 26 in the horizontal plane, and moves backward with the hand 3 holding five substrates 91. In other words, the five substrates 91 have been removed from the hoop 92.

[0041] After five substrates 91 are removed from the hoop 92, the actuator 8 further displaces the link member 71 forward. For example, as shown in FIG. 11( c), the actuator 8 displaces the link member 71 so that the strokes of the actuators 8a, 8b, 8c, and 8d increase at a predetermined ratio. Specifically, the actuator 8a further displaces the link member 71 forward by a displacement amount HA. The height position of the holding portion 61a becomes H1+HA. The actuator 8b further displaces the link member 71b forward by a displacement amount 2×HA (2HA). The height position of the holding portion 61b becomes H2+2HA. The actuator 8c further displaces the link member 71c forward by a displacement amount 3×HA (3HA). The height position of the holding portion 61c becomes H1+3HA. The actuator 8d further displaces the link member 71c forward by a displacement amount 4×HA (4HA). The height position of holder 61d becomes H1+4HA. The height position of holder 61s remains at H0. Robot 2 transports substrate 91, whose pitch has been changed, to another location where predetermined processing will be performed. After the transport is complete, robot 2 performs an operation to transition to the state shown in FIG. 1. Then, the operation of transitioning from the state shown in FIG. 1 to the state shown in FIG. 11(a), to the state shown in FIG. 11(b), and to the state shown in FIG. 11(c) is repeated.

[0042] (Effects) In the end effector 1 of this embodiment, the link member 71 is chain-shaped, and a stroke of the actuator 8 in a first direction is converted into a displacement of the operating unit 6 in a second direction via the link member 71. For example, as in the above embodiment, when the end effector 1 is applied to the hand 3 of a robot 2 for transporting substrates, the hand 3 can be made thinner than in the prior art. The thinner hand 3 allows the robot 2 to be made smaller.

[0043] The link mechanism 7 includes link members 71a, 71b, 71c, and 71d, which are driven by corresponding actuators 8a, 8b, 8c, and 8d, respectively. Because the actuators 8a, 8b, 8c, and 8d individually drive the link members 71a, 71b, 71c, and 71d, the height position of the actuating unit 6 can be changed with a high degree of freedom. For example, in the link mechanism of Patent Document 1, the change in the height pitch of multiple substrates is uniquely determined according to the shape of the link. In this embodiment, the displacement amounts of the actuators 8a, 8b, 8c, and 8d can be individually set and changed, allowing the pitch between substrates 91 to be individually and freely set.

[0044] (Variation 1) The end effector 1 and link mechanism 7 of the present disclosure may be applied to robots other than the substrate transport robot 2. For example, they may be applied to a linear motion mechanism of a robot. An example of a variation will be described with reference to FIG. 12. For ease of explanation, components in FIG. 12 that correspond to those in FIG. 10 are assigned common reference numerals. However, there is no intention to limit the structures of components assigned common reference numerals between FIG. 12 and FIG. 10 to the same structure.

[0045] As shown in FIG. 12 , the end effector 1 according to the modified example includes a main body 4 , an operating unit 6 , a link mechanism 7 , and an actuator 8 .

[0046] The main body 4 is a columnar body extending in the Z direction. The main body 4 has a first wall 461, a second wall 462, a third wall 463, and a fourth wall 464. The first wall 461 and the third wall 463 face each other in the X direction. The second wall 462 and the fourth wall 464 face each other in the Y direction. The first wall 461 and the second wall 462, and the first wall 461 and the fourth wall 464 are connected to each other, and the third wall 463 and the second wall 462, and the third wall 463 and the fourth wall 464 are connected to each other. The upper end of the main body 4 is open. That is, the main body 4 has an opening Q3 at the upper end. The fourth wall 464 extends above the opening Q3.

[0047] The link mechanism 7 includes a link member 71, a defining portion 72, and a guide 73. The link member 71 and the defining portion 72 have the same configuration as in the above embodiment. In this modified example, there is only one link member 71. Specifically, the link member 71 is located between the actuator 8 and the operating portion 6. A first end 711 of the link member 71 is connected to the actuator. A second end 712 of the link member 71 is connected to the operating portion 6. The link member 71 is in the form of a chain in which the units U are rotatably connected to each other. The units U allow the link member 71 to be displaced from the Z direction to a second direction. The second direction is, for example, the horizontal direction (X direction or Y direction). The second direction is, for example, a direction having a predetermined angle θ2 with respect to the horizontal direction. The units U have the same structure as in the above embodiment. Specifically, the units U allow the link member 71 to be displaced from the Z direction to the second direction. The units U are connected to each other so that the link members 71 are not displaced from the Z direction to the third direction. The third direction is the opposite direction to the second direction.

[0048] The guide 73 guides the second end of the link member 71 in the second direction. The guide 73 converts the stroke of the actuator 8 in the Z direction into a displacement of the operating unit 6 in the second direction. In the illustrated example, the guide 73 is located above the opening Q3. The guide 73 is a wall that covers the opening Q3 in a plan view at the upper end of the fourth wall 464. There is a gap between the opening Q3 and the lower surface of the guide 73 that allows the link member 71 guided in the second direction to pass through. Note that the structure of the guide 731 is not limited to the wall structure shown in FIG. 12 . For example, the guide 731 may have a structure that is separate from the main body 4.

[0049] The defining portion 72 defines the angle θ2 between the upward direction of the link member 71 and the second direction. The defining portion 72 is located on the surface opposite to the direction in which the link member 71 is guided. In the illustrated example, the defining portion 72 extends along the outer surface of the link member 71. The structure and function of the defining portion 72 are the same as those in the above embodiment. In the example of FIG. 12 , the second end of the defining portion 72 is fixed to the unit U at the tip in the second direction using a fixing portion 76.

[0050] The actuator 8 drives the first end of the link member 71 in the Z direction. The drive source of the actuator 8 is, for example, a motor. The drive source of the actuator 8 is, for example, an air cylinder. The actuating unit 6 realizes the function of the end effector 1 of each robot 2. If the robot 2 is used for welding, the actuating unit 6 is, for example, a welding gun that welds to an object. If the robot 2 is used for picking, the actuating unit 6 is, for example, a gripping unit that grips an object. Then, the stroke of the actuator 8 in the Z direction is converted into a displacement of the actuating unit 6 in the second direction by the guide 73.

[0051] (Effects of variant 1) According to this variant, similar to the above embodiment, the stroke of the actuator 8 in the first direction is converted into a displacement of the actuating part 6 in the second direction, thereby making it possible to reduce the size of the robot 2.

[0052] Furthermore, when the robot 2 rotates the main body 4 to perform work, the following operations are possible: (1) rotate the main body 4 with the operating unit 6 close to the main body 4; (2) after rotating the main body 4, extend the operating unit 6 and perform work; (3) after completing work, rotate the main body 4 to another location with the operating unit 6 close to the main body 4; (4) after rotating the main body 4, extend the operating unit 6 and perform work. In other words, the arm can be extended far with a small rotation radius. By reducing the rotation angle, more space can be secured for arranging components, thereby realizing the miniaturization of the entire device, including the robot 2. When the device is miniaturized, less installation space is required in the factory, which allows for the miniaturization of the factory's air conditioning equipment and the reduction of the load on the air conditioning equipment.

[0053] 12 , the link mechanism 7 includes an adjustment unit 78 that is connected to a first end of the defining unit 72 and adjusts the tension of the defining unit 72. The adjustment unit 78 is, for example, a motor. The adjustment unit 78 adjusts the tension of the defining unit 72, for example, by retracting or extending the defining unit 72. Changing the tension of the defining unit 72 changes the angle θ2 between the upward direction and the second direction of the link member 71. In other words, adjusting the tension of the defining unit 72 makes it possible to adjust the second direction in which the operating unit 6 is displaced.

[0054] (Variation 2) In the above embodiment, an example has been described in which the end effector 1 has the actuator 8, but this is not limiting. The actuator 8 may be located outside the end effector 1. For example, the actuator 8 may be disposed in the link 221 or the base 26 of the robot 2. For example, the main body 4 may be separated at an intermediate position in the Y direction. For example, the main body 4 may be divided into a main body that houses the end effector, and an attachment located between the end effector 1 and the arm 22. The actuator 8 may then be located within the attachment between the end effector 1 and the arm 22.

[0055] (Variation 3) In the above embodiment, an example in which the actuator 8 includes multiple actuators 8a, 8b, 8c, and 8d has been described. However, this is not limiting. For example, a single actuator 8 may be configured to change the height positions of multiple substrates 91. For example, a structure may be adopted in which the stroke of a single actuator 8 in the Y direction is divided into multiple strokes in the Y direction and transmitted as different strokes to link members 71a, 71b, 71c, and 71d. Furthermore, for example, (1) a rod-shaped body actuator extending in the X direction is prepared. (2) One end of the rod-shaped body actuator is driven to rotate around the rotation axis. (3) Link members 71a, 71b, 71c, and 71d are moved in the Y direction at different radial positions of the rod-shaped body actuator. By the above (1) to (3), different displacements of link members 71a, 71b, 71c, and 71d in the Y direction may be realized by a single actuator 8.

[0056] (Modification 4) The end effector 1 and link mechanism 7 of the present disclosure may be applied to an end effector of a robot that maps a substrate. As shown in FIGS. 13 and 14 , the end effector 1 according to this modification includes a mapping sensor 51, a main body 4, a link mechanism 7, and an actuator 8. The end effector 1 shown in FIGS. 13 and 14 is provided separately from the hand 3, for example. The difference is that the mapping sensor 51 in FIG. 13 is a transmission sensor, while the mapping sensor 51 in FIG. 14 is a reflective sensor. Note that the type of mapping sensor 51 is not limited to a transmission sensor or a reflective sensor. For example, a retroreflective sensor may be used as the mapping sensor 51.

[0057] For ease of explanation, components in Figures 13 and 14 that correspond to those in Figure 12 are assigned the same reference numerals. However, there is no intention to limit the components assigned the same reference numerals in Figures 12, 13, and 14 to having the same structure. In Figures 13 and 14, the Z direction is, for example, the vertical direction. The X and Y directions are both horizontal directions. The X direction is perpendicular to the Y direction. Within the Y direction, the direction in which a mapping sensor 51 (described later) faces the hoop 92 is referred to as "front," and the direction in which the mapping sensor 51 moves away from the hoop 92 is referred to as "rear."

[0058] 13 , the mapping sensor 51 includes a sensor body 52. ​​The sensor body 52 is generally Y-shaped in a plan view and has an open front end. The sensor body 52 has two divided tip portions 521. A light-emitting unit 53 that emits light is located on one of the inner surfaces 522, which face each other. The light emitted by the light-emitting unit 53 is not particularly limited and may be, for example, visible light, infrared light, or laser. The mapping sensor 51 may also be a fiber sensor in which an optical fiber is connected to the light source of the light-emitting unit 53. The light-receiving unit 54 is located on the inner surface 523 of the tip portion 521 facing the light-emitting unit 53 and receives the light emitted from the light-emitting unit 53. The mapping sensor 51 detects whether the light emitted from the light-emitting unit 53 toward the light-receiving unit 54 is blocked, thereby confirming the presence or absence of the circuit board 91 and the storage state of the circuit board 91.

[0059] 14 , the mapping sensor 51 has a sensor body 52. ​​The shape of the sensor body 52 is not particularly limited, but may be, for example, a substantially Y-shape in a plan view. The light-projecting unit 53 is located on a front end surface 524 of the sensor body 52. ​​The light-projecting unit 53 irradiates light onto, for example, the substrate 91 housed in the hoop 92. The light irradiated by the light-projecting unit 53 is not particularly limited, but may be, for example, visible light, infrared light, or laser. The mapping sensor 51 may be a fiber sensor in which an optical fiber is connected to the light source of the light-projecting unit 53. The light-receiving unit 54 is located on the front end surface 524 of the sensor body 52. ​​The light-projecting unit 53 and the light-receiving unit 54 are, for example, disposed close to each other. The light-receiving unit 54 receives light irradiated from the light-projecting unit 53 and reflected by the substrate 91. The mapping sensor 51 emits light from the light-projecting unit 53, and checks the presence or absence of the substrate 91 and the storage state of the substrate 91 based on the intensity of the light received by the light-receiving unit 54. Note that while Fig. 14 shows an example in which the light-projecting unit 53 and the light-receiving unit 54 are located on both sides of the open end of the sensor main body 52, the light-projecting unit 53 and the light-receiving unit 54 may be located on only one of the open ends of the sensor main body 52.

[0060] 13 and 14, the configurations of the main body 4, link mechanism 7, and actuator 8 are the same as those in Fig. 12. These common configurations will be described with reference to Fig. 13.

[0061] The main body 4 has a storage space R and an opening Q that communicates with the storage space R. In the example of FIG. 13 , the main body 4 is a columnar body that extends in a first direction. The first direction is, for example, vertical (Z direction). Note that the first direction is not limited to the vertical direction. For example, in the application example of FIG. 15 , the first direction is a direction that has a predetermined angle θ3 with respect to the vertical direction.

[0062] The main body 4 has a first wall 461, a second wall 462, a third wall 463, and a fourth wall 464 that surround the periphery of the storage space R. The first wall 461 and the third wall 463 face each other, and the second wall 462 and the fourth wall 464 face each other. The main body 4 has an opening Q at its upper end that communicates with the storage space R. The position of the opening Q is not limited to the position shown in FIG. 13 . For example, the opening Q may be located in the first wall 461, the second wall 462, the third wall 463, or the fourth wall 464.

[0063] The link mechanism 7 has a link member 71, a regulating portion 72, and a guide 73. The link member 71 is located between the actuator 8 and the mapping sensor 51. The link member 71 is in the form of a chain in which the units U are rotatably connected to one another. The units U allow the link member 71 to be displaced from a first direction to a second direction. The second direction is, for example, the horizontal direction (X direction or Y direction). The units U have the same structure as in the above embodiment. The units U are connected to one another so that the link member 71 is not displaced from the Z direction to a third direction. The third direction is the opposite direction to the second direction.

[0064] The guide 73 is located outside the opening Q of the main body 4. In the example of FIG. 13 , the guide 73 is located above the opening Q of the main body 4. The guide 73 guides the second end 712 of the link member 71 in the second direction. The guide 73 converts the stroke of the first end 711 of the link member 71 moving in the first direction by the actuator 8 into a displacement of the second end 712 of the link member 71 in the second direction. The mapping sensor 51 is connected to the second end 712 of the link member 71. That is, the guide 73 converts the stroke of the first end 711 of the link member 71 moving in the first direction by the actuator 8 into a displacement of the mapping sensor 51 in the second direction. The guide 73 is a wall that covers the opening Q in a plan view at the upper end of the fourth wall 464. There is a gap between the opening Q and the lower surface of the guide 73 that allows the link member 71 guided in the second direction to pass through.

[0065] The defining portion 72 defines the angle θ2 between the first direction and the second direction, and supports the mapping sensor 51 together with the link member 71. In the illustrated example, the defining portion 72 extends along the outer surface of the link member 71. The structure and function of the defining portion 72 are the same as those in the above embodiment. In the example of FIG. 12 , the second end of the defining portion 72 is fixed to the unit U at the tip in the second direction using a fixing portion 76.

[0066] 13 or 14 may be applied to a mapping device 50 supported by a load port 5. FIG. 15 shows an example in which the link mechanism 7 shown in FIG. 13 or 14 is applied to a mapping device 50. In this modification, the mapping device 50 has a mapping sensor 51, a main body 4, a link mechanism 7, and an actuator 8. Note that the configurations of the mapping sensor 51, main body 4, link mechanism 7, and actuator 8 according to this modification are the same as those in the above-described modification 4.

[0067] As shown in FIG. 15 , the load port 5 includes a mounting table 55 on which a FOUP 92 is placed, and a mapping device 50. The mapping device 50 maps the substrate 91 housed in the FOUP 92 placed on the mounting table 55. The mapping device 50 is supported, for example, on a wall surface 56 of the load port 5 on the opening 93 side of the FOUP 92. The mapping device 50 is supported so that the mapping sensor 51 is located in front of the opening 93 of the FOUP 92. The support structure of the mapping device 50 is not particularly limited. In the example of FIG. 15 , the lower end of the main body 4 is supported on the wall surface 56 at a position below the FOUP 92 using a support member 57. The main body 4 is supported so that it is inclined at a predetermined angle θ3 with respect to the vertical direction, for example. When the actuator 8 is displaced in the first direction, the stroke of the actuator 8 is converted into a displacement of the mapping sensor 51 in the front-to-rear direction (Y direction). This allows mapping to be performed by bringing the mapping sensor 51 close to the substrate to be sensed.

[0068] As described above, according to the fourth or fifth variant, even if there is no horizontal space when mapping the substrate 91, it is possible to extend the mapping sensor 51 horizontally as long as there is vertical space.

[0069] (Aspects) The above-described embodiments are specific examples of the following aspects.

[0070] (Mode 1) A link mechanism (7) located between an actuator (8) and an operating unit (6) of a robot (2), comprising: a link member (71) in the form of a chain of units (U) rotatably connected to one another, extending in a first direction, and having a first end connected to the actuator (8); a guide (73) that guides the second end of the link member (71) connected to the operating unit (6) in a second direction and converts a stroke of the actuator (8) in the first direction into a displacement of the operating unit (6) in the second direction; and a determining unit (72) that determines the angle between the first direction and the second direction of the link member (71) and supports the operating unit (6) together with the link member (71).

[0071] Since the stroke of the actuator (8) in the first direction is converted into a displacement of the operating part (6) in the second direction, the robot (2) can be made smaller than conventional techniques (for example, Patent Document 1).

[0072] (Aspect 2) The link mechanism according to Aspect 1, wherein the units (U) are connected to each other so as to allow the link member (71) to be displaced from the first direction to the second direction, but not to be displaced from the first direction to a third direction that is opposite to the second direction, and the regulating portion (72) is a band-shaped body located on a surface of the link member (71) that corresponds to the third direction.

[0073] (Aspect 3) The link mechanism according to aspect 2, further comprising an adjustment portion (78) connected to an end of the band and adjusting the tension of the band.

[0074] (Aspect 4) The link mechanism according to aspect 1 or aspect 2, wherein the defining portion (72) defines an angle between the first direction and the second direction of the link member (71) to 90 degrees.

[0075] (Aspect 5) An end effector (1) of a robot (2) that holds a substrate (91), comprising: a main body (4) having accommodation spaces (R1, R2) and openings (Q1, Q2) that communicate with the accommodation spaces (R1, R2); a chain-like link member (71) in which unit units (U) are rotatably connected to one another, the link member (71) extending in a first direction from within the accommodation spaces (R1, R2) to the outside of the main body (4) via the openings (Q1, Q2); a guide (73) that is located outside the openings (Q1, Q2) of the main body (4) and converts a stroke of a first end of the link member (71) moved in a first direction by an actuator (8) into a displacement of a second end of the link member (71) in a second direction; and an operating unit (6) that is connected to the second end of the link member (71) and holds the substrate. An end effector (1) comprising a defining portion (72) that defines the angle between the first direction and the second direction of the link member (71) and supports the operating portion (6) together with the link member (71).

[0076] The stroke of the actuator (8) in the first direction is converted into a displacement of the actuating part (6) in the second direction, thereby reducing the size of the main body (4), and ultimately reducing the size of the robot (2) compared to the prior art (e.g., Patent Document 1).

[0077] (Aspect 6) The end effector according to aspect 5, further comprising the actuator (8) that drives the first end of the link member (71) in the first direction.

[0078] (Aspect 7) The device further includes second link members (71a, 71b, 71c, 71d) extending in the first direction from within the accommodation spaces (R1, R2) to the outside of the main body (4) through the openings (Q1, Q2), and second operating units (6a, 6b, 6c, 6d) connected to second ends of the second link members (71a, 71b, 71c, 71d) and holding a second board (91), wherein the actuator (8) displaces the first ends of the link members (71a, 71b, 71c, 71d) a first distance in the first direction and displaces the first ends of the second link members (71a, 71b, 71c, 71d) a second distance in the first direction, and the operating units (6a, 6b, 6c, 6d) and the second operating units (6a, 6b, 6c, 6d) are positioned differently in the second direction. 7. The end effector of aspect 6.

[0079] (Aspect 8) The end effector according to Aspect 6, further comprising: second link members (71a, 71b, 71c, 71d) extending in the first direction from within the storage spaces (R1, R2) to the outside of the main body (4) via the openings (Q1, Q2); second operating units (6a, 6b, 6c, 6d) connected to second ends of the second link members and holding a second substrate; and second actuators (8a, 8b, 8c, 8d) displace first ends of the second link members (71a, 71b, 71c, 71d) a second distance in the first direction, wherein the operating units (6a, 6b, 6c, 6d) and the second operating units (6a, 6b, 6c, 6d) are at different positions in the second direction.

[0080] Aspect 9: The end effector of aspect 6, wherein the actuator (8) includes an air cylinder.

[0081] (Aspect 10) The end effector according to aspect 8, wherein the actuator (8a, 8b, 8c, 8d) and the second actuator (8a, 8b, 8c, 8d) include air cylinders.

[0082] (Aspect 11) A method for controlling an end effector, wherein an actuator (8) displaces in a first direction a first end of a link member (71) in a first direction, the link member (71) being a chain of units (U) rotatably connected to one another and extending in a first direction from within a storage space (R1, R2) of the main body to the outside of the main body (4) through openings (Q1, Q2), a guide (73) converts a stroke associated with the movement of the first end of the link member (71) in the first direction into a displacement of a second end of the link member (71) in a second direction, and the second end of the link member (71) is displaced in the second direction by a displacement amount corresponding to the stroke.

[0083] (Aspect 12) An end effector (1) of a robot that maps a substrate (91), comprising: a main body (4) having a storage space (R) and an opening (Q) that communicates with the storage space (R); a chain-like link member (71) in which units (U) are rotatably connected to one another, the link member (71) extending in a first direction from within the storage space (R) to the outside of the main body (4) via the opening (Q); a guide (73) located outside the opening (Q) of the main body (4) and converting a stroke of movement of a first end (711) of the link member (71) in a first direction by an actuator (8) into a displacement of a second end (712) of the link member (71) in a second direction; and a mapping sensor (51) located at the second end of the link member (71). An end effector comprising: a defining portion (72) that defines the angle between the first direction and the second direction of the link member (71) and supports the mapping sensor (51) together with the link member (71).

[0084] In the twelfth aspect, a stroke of the actuator (8) in a first direction is converted into a displacement of the mapping sensor (51) in a second direction. As a result, for example, if the first direction is a direction along the vertical direction and the second direction is a horizontal direction, even if there is no horizontal space for mapping, as long as there is vertical space, it is possible to extend the mapping sensor 51 in the horizontal direction.

[0085] (Aspect 13) The end effector according to Aspect 12, wherein the mapping sensor (51) is a transmission type sensor including a light-emitting unit (53) that emits light and a light-receiving unit (54) that is positioned opposite the light-emitting unit (53) and receives the light emitted from the light-emitting unit (53).

[0086] (Aspect 14) The end effector according to Aspect 12, wherein the mapping sensor (51) is a reflective sensor including a light projecting unit (53) that projects light onto the substrate (91) and a light receiving unit (54) that receives light reflected by the substrate (91).

[0087] (Aspect 15) A mapping device (50) for mapping a substrate (91), comprising: a main body (4) having a storage space (R) and an opening (Q) communicating with the storage space (R); a chain-like link member (71) in which units (U) are rotatably connected to one another, the link member (71) extending in a first direction from within the storage space (R) to the outside of the main body (4) via the opening (Q); a guide (73) located outside the opening (Q) of the main body (4) and converting a stroke of movement of a first end (711) of the link member (71) in a first direction by an actuator (8) into a displacement of a second end (712) of the link member (71) in a second direction; and a mapping sensor (51) located at the second end (712) of the link member (71). a defining portion that defines an angle between the first direction and the second direction of the link member (71) and supports the mapping sensor (51) together with the link member (71).

[0088] In the fifteenth aspect, a stroke of the actuator (8) in a first direction is converted into a displacement of the mapping sensor (51) in a second direction. As a result, for example, if the first direction is a direction along the vertical direction and the second direction is a horizontal direction, even if there is no horizontal space for mapping, as long as there is vertical space, it is possible to extend the mapping sensor 51 in the horizontal direction.

[0089] (Aspect 16) The mapping device according to Aspect 15, wherein the mapping sensor (51) is a transmission type sensor including a light-projecting unit (53) that projects light and a light-receiving unit (54) that faces the light-projecting unit (53) and receives the light projected from the light-projecting unit (53).

[0090] (Aspect 17) The mapping device according to Aspect 15, wherein the mapping sensor (51) is a reflective sensor including a light projecting unit (53) that projects light onto the substrate (91) and a light receiving unit (54) that receives light reflected by the substrate (91).

[0091] (Aspect 18) A load port (5) comprising: a mounting table (55) on which a FOUP (92) containing a plurality of substrates (91) is placed; and a mapping device (50) according to any one of claims 15 to 17 that performs mapping of the substrates (91) contained in the FOUP (92) placed on the mounting table (55).

[0092] REFERENCE SIGNS LIST 1 End effector 2 Robot 4 Main body 5 Load port 41 First main body (main body) 42 Second main body (main body) 51 Mapping sensor 53 Light projecting unit 54 Light receiving unit 55 Placement table 6, 6a, 6b, 6c, 6d Actuating unit 7 Link mechanism 8, 8a, 8b, 8c, 8d Actuator 71, 71a, 71b, 71c, 71d Link member 72, 72a, 72b, 72c, 72d Defining unit 73 Guide 78 Adjusting unit 91 Substrate 92 FOUP Q1, Q2 Opening R1, R2 Storage space U Unit unit

Claims

1. A link mechanism located between an actuator and an operating unit of a robot, comprising: a link member in the form of a chain of units rotatably connected to one another, extending in a first direction, and having a first end connected to the actuator; a guide that guides the second end of the link member connected to the operating unit in a second direction and converts a stroke of the actuator in the first direction into a displacement of the operating unit in the second direction; and a determining part that determines the angle between the first direction and the second direction of the link member and supports the operating unit together with the link member.

2. A link mechanism for a robot as described in claim 1, wherein the individual units are connected to each other so as to allow the link members to be displaced from the first direction to the second direction but not to be displaced from the first direction to a third direction which is the opposite direction to the second direction, and the regulating portion is a band-shaped body located on the surface of the link members corresponding to the third direction.

3. A link mechanism according to claim 2, further comprising an adjustment section connected to an end of the band for adjusting the tension of the band.

4. A link mechanism according to claim 1, wherein the regulating portion regulates the angle between the first direction and the second direction of the link member to 90 degrees.

5. An end effector for a robot that holds a substrate, comprising: a main body having a storage space and an opening that leads to the storage space; a chain-like link member in which individual units are rotatably connected to one another, the link member extending in a first direction from within the storage space to the outside of the main body via the opening; a guide located outside the opening of the main body that converts a stroke of movement of a first end of the link member in a first direction by an actuator into a displacement of a second end of the link member in a second direction; an operating part connected to the second end of the link member and holding the substrate; and a determining part that determines the angle between the first direction and the second direction of the link member and supports the operating part together with the link member.

6. An end effector according to claim 5, further comprising the actuator for driving the first end of the link member in the first direction.

7. An end effector as described in claim 6, further comprising a second link member extending in the first direction from within the storage space through the opening to the outside of the main body, and a second operating unit connected to a second end of the second link member and holding a second substrate, wherein the actuator displaces the first end of the link member a first distance in the first direction and displaces the first end of the second link member a second distance in the first direction, and the operating unit and the second operating unit are positioned differently in the second direction.

8. An end effector as described in claim 6, further comprising: a second link member extending in the first direction from within the storage space through the opening to the outside of the main body; a second operating part connected to a second end of the second link member and holding a second substrate; and a second actuator displaces the first end of the second link member a second distance in the first direction, wherein the operating part and the second operating part are at different positions in the second direction.

9. An end effector according to claim 6, wherein the actuator includes an air cylinder.

10. The end effector according to claim 8, wherein the actuator and the second actuator include air cylinders.

11. A method for controlling an end effector, in which an actuator displaces in a first direction a first end of a link member, which is a chain of units rotatably connected to one another and extends in a first direction from within the storage space of a main body through an opening to the outside of the main body, and a guide converts a stroke associated with the movement of the first end of the link member in the first direction into a displacement of the second end of the link member in a second direction, and the second end of the link member is displaced in the second direction by an amount corresponding to the stroke.

12. An end effector of a robot for mapping substrates, comprising: a main body having a storage space and an opening leading to the storage space; a chain-like link member in which individual units are rotatably connected to each other, the link member extending in a first direction from within the storage space to the outside of the main body via the opening; a guide located outside the opening of the main body and converting a stroke of movement of a first end of the link member in a first direction by an actuator into a displacement of a second end of the link member in a second direction; a mapping sensor located at the second end of the link member; and a determining part that determines the angle between the first direction and the second direction of the link member and supports the mapping sensor together with the link member.

13. An end effector according to claim 12, wherein the mapping sensor is a transmission type sensor having a light-emitting section that emits light and a light-receiving section that is positioned opposite the light-emitting section and receives the light emitted from the light-emitting section.

14. An end effector according to claim 12, wherein the mapping sensor is a reflective sensor having a light projecting section that projects light onto the substrate and a light receiving section that receives light reflected by the substrate.

15. A mapping device for mapping a substrate, comprising: a main body having a storage space and an opening communicating with the storage space; a chain-like link member having units rotatably connected to one another, the link member extending in a first direction from within the storage space to the outside of the main body via the opening; a guide located outside the opening of the main body and converting a stroke of movement of a first end of the link member in a first direction by an actuator into a displacement of a second end of the link member in a second direction; a mapping sensor located at the second end of the link member; and a determining part that determines the angle between the first direction and the second direction of the link member and supports the mapping sensor together with the link member.

16. A mapping device according to claim 15, wherein the mapping sensor is a transmission type sensor having an irradiating section that irradiates light and a light receiving section that is positioned opposite the irradiating section and receives the light irradiated from the irradiating section.

17. A mapping device according to claim 15, wherein the mapping sensor is a reflective sensor having an irradiation section that irradiates light onto the substrate and a light receiving section that receives light reflected by the substrate.

18. A load port comprising: a mounting table on which a FOUP, which accommodates a plurality of substrates, is placed; and a mapping device according to any one of claims 15 to 17, which maps the substrates accommodated in the FOUP placed on the mounting table.

Images