Fluid control device

Abstract

A fluid control device according to the present technology comprises: a housing that includes a first member including a first elastic part made of an elastic body, and a second member including a second elastic part made of an elastic body and forming a first space for allowing a first fluid to flow therethrough between the first member and the second member, and that is configured to be capable of sucking in and out the first fluid; and a drive unit that is provided to the first elastic part and / or the second elastic part, and that elastically deforms the first elastic part and / or the second elastic part. The housing further has an accommodation part that forms an accommodation space for accommodating the drive unit and that is configured to be capable of sucking a second fluid different from the first fluid into and out of the accommodation space.

Description

Fluid Control Device

[0001] The present technology relates to technologies such as diaphragm pumps.

[0002] Diaphragm pumps using a diaphragm have been put to practical use as compact, thin pumps (see, for example, Patent Document 1 below). In a diaphragm pump, the volume of a pump chamber increases due to bending deformation of the diaphragm, thereby drawing fluid into the pump chamber, and the volume of the pump chamber decreases, thereby discharging fluid from the pump chamber.

[0003] JP 2010-121539 A

[0004] There is a demand for technology that can improve the output of fluid control devices that use diaphragms.

[0005] In view of the above circumstances, an object of the present technology is to provide a technology that can improve the output of a fluid control device.

[0006] A diaphragm pump according to the present technology includes a housing and a drive unit. The housing includes a first member including a first elastic portion that is an elastic body, and a second member including a second elastic portion that is an elastic body and that forms a first space through which a first fluid flows between the first member and the second member, and is configured to be able to draw in and discharge the first fluid. The drive unit is provided on at least one of the first elastic portion or the second elastic portion and elastically deforms at least one of the first elastic portion or the second elastic portion. The housing further includes a housing portion that forms an accommodation space to accommodate the drive unit and is configured to be able to draw in and discharge a second fluid different from the first fluid into the accommodation space.

[0007] In this way, in the present technology, not only is the first fluid drawn in and out by the expansion and contraction of the first space, but the second fluid is also drawn in and out by the housing that houses the drive unit, thereby improving the output of the fluid control device.

[0008] The first member may have a first discharge hole through which the first fluid is discharged from the first space when at least one of the first elastic portion or the second elastic portion is elastically deformed by the driving portion, and a first discharge check valve provided in the first discharge hole and allowing the first fluid discharged from the first discharge hole to pass through.

[0009] The storage section may have a second discharge hole through which the second fluid is discharged from the storage space when at least one of the first elastic section or the second elastic section is elastically deformed by the drive section, and a second discharge check valve provided in the second discharge hole to allow the second fluid discharged from the second discharge hole to pass through.

[0010] The second member may have a first suction hole that draws the first fluid into the first space when at least one of the first elastic portion or the second elastic portion is elastically deformed by the driving portion, and a first suction check valve that is provided in the first suction hole and allows the first fluid drawn in from the first suction hole to pass through.

[0011] The storage section may have a second suction hole through which the second fluid is sucked into the storage space when at least one of the first elastic section or the second elastic section is elastically deformed by the drive section, and a second suction check valve provided in the second suction hole and allowing the second fluid sucked through the second suction hole to pass through.

[0012] The drive portion may include a first drive portion provided on the opposite side of the first elastic portion to the first space.

[0013] The drive section may further include a second drive section provided on the opposite side of the second elastic section from the first space.

[0014] The accommodating section may have a first accommodating section that forms a first accommodating space that accommodates the first drive section, and a second accommodating section that forms a second accommodating space that accommodates the second drive section.

[0015] The driving section may be a piezoelectric element.

[0016] The housing may further have an outflow chamber that forms a second space that contains a fluid including the first fluid and the second fluid that is discharged by the driving portion.

[0017] The housing may further have a holding space portion provided in the first member or the second member to form a holding space for holding the first fluid drawn into the first space, and the outflow chamber may have an exhaust valve provided in the outflow chamber to allow the fluid drawn into the second space to pass through to the holding space.

[0018] The housing may further include a space connecting portion that forms a third space that connects the holding space portion and the outflow chamber via the exhaust valve.

[0019] The spatial connection portion may be provided inside the housing.

[0020] The fluid storage device may further include a fluid storage section connected to the second space, capable of retaining the fluid and being elastically deformable.

[0021] The exhaust valve may be a reed valve.

[0022] To achieve the above object, a fluid control device according to one aspect of the present technology includes a housing and a drive unit. The housing includes a first member including a first elastic portion that is an elastic body, and a second member including a second elastic portion that is an elastic body and that forms a first space through which a first fluid flows between the first member and the second member, and is configured to be able to draw in and out the first fluid. The drive unit is provided on at least one of the first elastic portion or the second elastic portion and elastically deforms at least one of the first elastic portion or the second elastic portion. The housing further includes an outflow chamber that forms a second space that accommodates the first fluid discharged by the drive unit, and a holding space portion that is provided on the first member or the second member and forms a holding space that holds the first fluid drawn into the first space. The outflow chamber has an exhaust valve that is provided in the outflow chamber and allows the first fluid drawn into the second space to pass to the holding space.

[0023] The housing may further include a space connecting portion that forms a third space that connects the holding space portion and the outflow chamber via the exhaust valve.

[0024] The spatial connection portion may be provided inside the housing.

[0025] The fluid storage device may further include an elastically deformable fluid holding portion connected to the second space and holding the first fluid.

[0026] The exhaust valve may be a reed valve.

[0027] FIG. 1 is a cross-sectional view of a fluid control device according to a first embodiment of the present technology. FIG. 2 is a cross-sectional view of a portion of the fluid control device according to the first embodiment of the present technology, where (A) is a view discharging a first fluid, and (B) is a view discharging a second fluid. FIG. 3 is an exploded perspective view of the fluid control device excluding a housing. FIG. 4 is a view showing a first discharge check valve of the fluid control device, where (A) is a perspective view of the first discharge check valve, and (B) is a cross-sectional view of the first discharge check valve. FIG. 5 is a cross-sectional view of a first modified example of the fluid control device. FIG. 6 is a cross-sectional view of a fluid control device according to a second embodiment of the present technology. FIG. 7 is a view showing the fluid control device, where (A) is a top view, (B) is a top view including an outflow chamber, and (C) is a cross-sectional view of the fluid control device including the outflow chamber. FIG. 8 is a cross-sectional view of a fluid control device according to a third embodiment of the present technology, where (A) is a view showing a state in which an exhaust valve is closed, and (B) is a view showing a state in which the exhaust valve is open. FIG. 9 is an exploded perspective view of the fluid control device. FIG. 10 is a view showing a fluid control device of a conventional example of the present technology, where (A) is a view showing a state in which the exhaust valve is closed, and (B) is a view showing a state in which the exhaust valve is open. 10A and 10B are cross-sectional views of a modified example of the third embodiment of the present technology, where (A) is a cross-sectional view of a fluid control device of a first modified example, and (B) is a cross-sectional view of a fluid control device of a second modified example. 10B are cross-sectional views of a fluid control device according to a fourth embodiment of the present technology. 10C are exploded perspective views of a fluid control device according to a fifth embodiment of the present technology. 10D are views of the fluid control device, where (A) is a view in which a part of the fluid control device is exploded, and (B) is a cross-sectional view. 10E are views of a manufacturing apparatus for the fluid control device. 10F are views showing the displacement amount of a fluid control device, where (A) is a view showing the displacement amount of a fluid control device not provided with an adjustment unit, and (B) is a view showing the displacement amount of a fluid control device provided with an adjustment unit. 10G are views showing the impedance and phase angle of a fluid control device, where (A) is a view showing the impedance and phase angle of a fluid control device not provided with an adjustment unit, and (B) is a view showing the impedance and phase angle of a fluid control device provided with an adjustment unit. 10G are views showing a modified example of the present technology, where (A) is a view in which a part of the fluid control device is exploded, and (B) is a cross-sectional view. 10G are exploded perspective views of a fluid control device according to a sixth embodiment of the present technology. 19A and 19B are diagrams showing a fluid control device, in which (A) is a cross-sectional view of the fluid control device and (B) is a perspective view of an intermediate member. Fig. 19 is a cross-sectional view of a fluid control device according to a modified example of the sixth embodiment of the present technology.10A and 10B are diagrams showing a first modified example of the first check valve, in which (A) is a diagram showing an open state, (B) is a diagram showing a closed state, and (C) is a cross-sectional view. 11A and 11B are diagrams showing a second modified example of the first check valve. 12A and 12B are diagrams showing an example of use of the fluid control device, in which (A) is a diagram showing a tactile presentation device in which a cuff is attached to the fluid control device, (B) is a diagram showing the tactile presentation device being used as a switch, (C) is a diagram showing the tactile presentation device being worn by a user, (D) is a diagram showing the tactile presentation device being provided on a controller, (E) is a diagram showing the tactile presentation device being attached to a doll, and (F) is a diagram showing a scent being presented to a user by the fluid control device.

[0028] Hereinafter, embodiments of the present technology will be described with reference to the drawings.

[0029] <First Embodiment> Fig. 1 is a cross-sectional view of a fluid control device 1 according to a first embodiment of the present technology, Fig. 2 is a cross-sectional view of a portion of the fluid control device 1, where (A) is a view showing the discharge of a first fluid R1 and (B) is a view showing the discharge of a second fluid R2. Fig. 3 is an exploded perspective view of the fluid control device 1 excluding the accommodation section 60, and Fig. 4 is a view showing a first discharge check valve 10C of the fluid control device 1, where (A) is a perspective view of the first discharge check valve 10C and (B) is a cross-sectional view of the first discharge check valve 10C. In each figure, the X-axis, Y-axis, and Z-axis indicate three axial directions that are orthogonal to one another.

[0030] In this embodiment, the fluid control device 1 is a diaphragm pump used when haptic presentation is performed to provide a user with an operational sensation (e.g., an operation of gripping or grasping an object) in, for example, virtual reality (VR) content. An example of VR content is baseball. In the case of baseball, the user is presented with the sensation of gripping a bat or throwing a ball. The content referred to here may be, but is not limited to, VR as described above, augmented reality (AR), movies, games, television, and other videos, images, comics, magazines, picture books, and other books (including paper media and e-books), and music.

[0031] [Fluid Control Device] As shown in FIGS. 1 to 3 , the fluid control device 1 includes a housing 100 and a drive unit 40. The fluid control device 1 is configured to be able to draw in and discharge fluids (first fluid R1 and second fluid R2) by driving the drive unit 40. In this embodiment, the fluid used in the fluid control device 1 is air, but of course, this is not limited to this and may be other gases or liquids such as water. Furthermore, in this embodiment, the first fluid R1 and the second fluid R2 are the same, air, but of course, this is not limited to this and may be different gases. Furthermore, hereinafter, although the second fluid R2 is said to be different from the first fluid R1, this does not mean that the fluids have different components, but rather that the second fluid R2 is not a fluid drawn into the first space W1.

[0032] [Housing] The fluid control device 1 has a housing 100 configured to have therein a first space W1 capable of holding a first fluid R1 and a storage space SW capable of holding a second fluid R2, and to be able to draw in and discharge the first fluid R1 and the second fluid R2. The housing 100 has a first member 10 as a first diaphragm, a second member 20 as a second diaphragm, an intermediate member 30, and a storage section 60. The first space W1 described above is a space formed (enclosed) by the first member 10 (first elastic portion 10A), the second member 20 (second elastic portion 20A), and the intermediate member 30, which will be described later. The storage space SW will be described later.

[0033] (First member) The first member 10 has a flat first elastic portion 10A, a first support member 10B provided on the side of the first elastic portion 10A opposite the first space W1, and a first discharge check valve 10C.

[0034] In this embodiment, the first elastic portion 10A is provided opposite to a second elastic portion 20A (described later) in the Z-axis direction, is elastically deformable, and can be bent and deformed in the up-down direction (Z-axis direction) by a drive unit 40 (first drive unit 401) (described later). In this embodiment, the first elastic portion 10A is made of metal, but of course, the material is not limited to this and may be resin, etc.

[0035] In this embodiment, the first elastic portion 10A is rectangular in plan view (as viewed from the Z-axis direction), but of course this is not limited to this and may be polygonal or circular, and the shape is not particularly limited.

[0036] The first elastic member 10A has a first elastic deformation member 101A that faces the first drive member 401 in the Z-axis direction, and a first opposing member 102A that is provided around the first elastic deformation member 101A and faces a first support member 10B (described later) in the Z-axis direction. In this embodiment, the first elastic deformation member 101A and the first opposing member 102A are integrally formed, but this is not limiting.

[0037] The first elastic deformation portion 101A is provided with a first drive portion 401 on the opposite side to the first space W1, and is configured to bend and deform when driven by the first drive portion 401. The first elastic deformation portion 101A has a circular shape when viewed in the Z-axis direction, but is of course not limited to this.

[0038] The first elastic deformation portion 101A also has a first groove portion (not shown) that is provided on the first space W1 side and is recessed along a circular shape when viewed from the second member 20 side. The first groove portion is formed at a position facing the periphery of the first drive portion 401 in the Z-axis direction. That is, in this embodiment, the circular shape of the first groove portion when viewed from the Z-axis direction is approximately the same shape as the peripheral portion (outer periphery portion) of the first drive portion 401, which is formed in an approximately circular shape.

[0039] The first opposing portion 102A is provided around the first elastic deformation portion 101A and has a ring shape that is sandwiched between the first support member 10B and the intermediate member 30. In other words, the first opposing portion 102A is configured so as not to bend and deform in the Z-axis direction by the first support member 10B and the intermediate member 30. In this embodiment, the first opposing portion 102A surrounds the first elastic deformation portion 101A (around the Z-axis) 360 degrees (the entire circumference), but of course, this is not limited to this and there may be some portions that are not surrounded.

[0040] The first opposing portion 102A also has a first outlet hole 1021A through which the first fluid R1 is discharged from the first space W1. In this embodiment, the first outlet hole 1021A is provided to penetrate in the Z-axis direction. Furthermore, when at least one of the first elastic deformation portion 101A or the second elastic deformation portion 201A is deformed by the first driving unit 401 to contract the first space W1, the first fluid R1 in the first space W1 is discharged from the first outlet hole 1021A to the outside of the first space W1. In this embodiment, two first outlet holes 1021A are provided, but this is not necessarily limited to this. In this embodiment, the shape of the first outlet hole 1021A is rectangular when viewed in the Z-axis direction, but this is not necessarily limited to this. Furthermore, in this embodiment, the first outlet hole 1021A is provided near a corner of the rectangular first elastic portion 10A, but this is not necessarily limited to this.

[0041] The first opposing portion 102A has a first opposing recess 1022A, which is a portion of the periphery of the first opposing portion 102A recessed inward (toward the first space W1). In this embodiment, the first opposing recess 1022A is provided on each of two opposing sides of the rectangular first elastic portion 10A, but the present invention is not limited to this.

[0042] The first support member 10B sandwiches the first elastic portion 10A between the first support member 10B and the intermediate member 30. As shown in FIGS. 1 and 2 , the first support member 10B is disposed opposite the first opposing portion 102A in the Z-axis direction. The first support member 10B is also ring-shaped, with a hollowed-out portion so that a first drive unit 401 (described later) can be disposed on the first elastic portion 10A. In this embodiment, the first support member 10B is formed to have higher rigidity than the first elastic portion 10A. While the first support member 10B is made of metal in this embodiment, it is not limited to this and may be made of resin or the like. In this embodiment, the first support member 10B is made of the same material as the first elastic portion 10A, but it is not limited to this and may be made of a different material.

[0043] The first support member 10B also has a first check valve accommodating portion 101B, which forms a space capable of accommodating the first discharge check valve 10C, at a position opposite the first discharge hole 1021A in the Z-axis direction. The first check valve accommodating portion 101B is formed so that the first discharge check valve 10C can be opened and closed. In this embodiment, the first check valve accommodating portion 101B has a roughly triangular shape, but this is not of course not limited to this. The number of first check valve accommodating portions 101B can be changed as appropriate depending on the number of first discharge check valves 10C.

[0044] The first support member 10B further has a first support recess 102B, which is a portion of the periphery of the first support member 10B recessed toward the space W in the Z-axis direction. In this embodiment, the first support recess 102B is provided on each of two opposing sides of the rectangular first support member 10B, but this is of course not limited to this. In this embodiment, the first support recess 102B is provided so as to face the first opposing recess 1022A described above when viewed from the Z-axis direction, but this is of course not limited to this.

[0045] As shown in Figures 4A and 4B, the first discharge check valve 10C is provided at a position corresponding to the first discharge hole 1021A, allowing the first discharge hole 1021A to open and close, thereby allowing the first fluid R1 discharged from the first discharge hole 1021A to pass through. The first discharge check valve 10C is provided on the side of the first elastic portion 10A opposite the first space W1 (the side of the first support member 10B). In this embodiment, the first discharge check valve 10C is a swing type, but this is not limited thereto and may be a lift type or a ball type. In this embodiment, the number of first discharge check valves 10C is two, but this can be changed as appropriate depending on the number of first discharge holes 1021A.

[0046] The first discharge check valve 10C has a reed valve 101C provided on the side of the first discharge hole 1021A opposite the first space W1, and a valve holding portion 102C provided in the first elastic portion 10A to limit the reed valve 101C to a predetermined opening degree.

[0047] The reed valve 101C includes a first reed valve portion 1011C that covers the first discharge hole 1021A as viewed in the Z-axis direction and prevents backflow of fluid from the outside into the first space W1, and a second reed valve portion 1012C that is connected to the first reed valve portion 1011C and is held by the first elastic portion 10A and the valve holding portion 102C as viewed in the Z-axis direction. In this embodiment, the first reed valve portion 101C and the second reed valve portion 102C are integrally formed, but this is not necessarily limited to this. The reed valve 101C is an elastic body, and expansion of the first space W1 closes the first discharge hole 1021A, and contraction of the first space W1 pushes up the reed valve 101C, opening the first discharge hole 1021A.

[0048] The valve holding portion 102C is configured to hold (sandwich) the reed valve 101C in the Z-axis direction between the valve holding portion 102C and the first elastic portion 10A. The valve holding portion 102C is configured to hold the second reed valve portion 1012C described above and has multiple through-hole holding portions 1021C penetrating in the Z-axis direction. The multiple through-hole holding portions 1021C in the valve holding portion 102C allow adhesive to be poured into the multiple through-hole holding portions 1021C. This allows for stronger bonding between the reed valve 101C and the valve holding portion 102C and for the reed valve 101C to be securely sandwiched between the first elastic portion 10A and the valve holding portion 102C. The shape and number of the through-hole holding portions 1021C may be changed taking into account the manufacturing process. The valve holding portion 102C is made of, for example, metal, but is not limited to this and may also be made of resin or other materials.

[0049] (Second member) The second member 20 has a flat second elastic portion 20A and a second support member 20B provided on the side of the second elastic portion 20A opposite the first space W1, and forms a first space W1 between the second member 20 and the first member 10 through which the first fluid R1 flows.

[0050] In this embodiment, the second elastic portion 20A is provided opposite the first elastic portion 10A in the Z-axis direction, is elastically deformable, and can be bent and deformed in the up-down direction by a second drive portion 402 (described later). In this embodiment, the second elastic portion 20A is made of metal, but of course, the material is not limited to metal and may be resin or the like.

[0051] In this embodiment, the second elastic portion 20A is rectangular in plan view (as viewed from the Z-axis direction), but of course this is not limited to this and may be polygonal or circular, and the shape is not particularly limited.

[0052] The second elastic portion 20A has a second elastic deformation portion 201A that faces the second drive portion 402 in the Z-axis direction, and a second opposing portion 202A that is provided around the second elastic deformation portion 201A and faces a second support member 20B (described later) in the Z-axis direction. In this embodiment, the second elastic deformation portion 201A and the second opposing portion 202A are integrally formed, but this is not limiting.

[0053] The second elastic deformation portion 201A is provided with a second drive portion 402 on the opposite side to the first space W1, and is configured so that the first elastic portion 10 is bent and deformed in the up-down direction by the second drive portion 402. The second elastic deformation portion 201A has a circular shape when viewed in the Z-axis direction, but is of course not limited to this.

[0054] The second elastic deformation portion 201A has a second groove portion 2011A that is provided on the first space W1 side and is recessed along a circular shape when viewed from the first member 10 side. The second groove portion 2011A is formed at a position facing the periphery of the second drive portion 402 in the Z-axis direction. That is, in this embodiment, the circular shape of the second groove portion 2011A when viewed from the Z-axis direction is approximately the same shape as the peripheral portion (outer periphery) of the second drive portion 402, which is formed in an approximately circular shape.

[0055] In this embodiment, the area of ​​the first elastic deformation portion 101A perpendicular to the Z-axis direction is approximately the same as the area of ​​the first elastic deformation portion 101A perpendicular to the Z-axis direction, but of course this is not limited to this and they may be different. Also, in this embodiment, the shape of the first elastic deformation portion 101A perpendicular to the Z-axis direction is approximately the same as the shape of the first elastic deformation portion 101A perpendicular to the Z-axis direction, but of course this is not limited to this and they may be different.

[0056] The second facing portion 202A is provided around the second elastic deformation portion 201A and has a ring shape that is sandwiched between the second support member 20B and the intermediate member 30. In other words, the second facing portion 202A is configured so as not to bend and deform in the Z-axis direction by the second support member 20B and the intermediate member 30. In this embodiment, the second facing portion 202A surrounds the second elastic deformation portion 201A (around the Z-axis) 360 degrees (the entire circumference), but of course, this is not limited to this and there may be some portions that are not surrounded.

[0057] The second opposing portion 202A also has a first suction hole 2021A that draws the first fluid R1 from the outside into the first space W1. In this embodiment, the first suction hole 2021A is provided so as to penetrate in the Z-axis direction. The first fluid R1 outside the first space W1 is drawn into the first space W1 through the first suction hole 2021A when at least one of the first elastic deformation portion 101A and the second elastic deformation portion 201A is deformed by the second driving portion 402 so as to expand the first space W1. In this embodiment, two first suction holes 2021A are provided, but this is not necessarily limited to this. In this embodiment, the shape of the first suction hole 2021A is rectangular when viewed in the Z-axis direction, but this is certainly not necessarily limited to this. Furthermore, in this embodiment, the first suction holes 2021A are provided near the corners of the rectangular second elastic portion 20A, but of course, the present invention is not limited to this.

[0058] The second facing portion 202A has a second facing recess 2022A, which is a portion of the periphery of the second facing portion 202A recessed inward (toward the first space W1). The second facing recess 2022A is provided to face the second facing recess 2022A in the Z-axis direction. In the present embodiment, the second facing recess 2022A is provided on each of two opposing sides of the rectangular second elastic portion 20A, but the present invention is not limited to this.

[0059] The second support member 20B sandwiches the second elastic portion 20A with the intermediate member 30. As shown in FIGS. 1 and 2 , the second support member 20B is disposed opposite the second opposing portion 202A in the Z-axis direction. The second support member 20B is also ring-shaped, with a hollowed-out portion so that a second drive unit 402 (described later) can be mounted on the second elastic portion 20A. In this embodiment, the second support member 20B is formed to have higher rigidity than the second elastic portion 20A. While the second support member 20B is made of metal in this embodiment, it is not limited to this and may be made of resin or the like. In this embodiment, the second support member 20B is made of the same material as the second elastic portion 20A, but it is not limited to this and may be made of a different material.

[0060] The second support member 20B also has an intake side accommodating portion 201B (retention space portion) that forms a retention space HW capable of retaining at least a portion of the first fluid R1 outside the first space W1, located opposite the first intake hole 2021A in the Z-axis direction. The intake side accommodating portion 201B is formed so as to surround the first intake hole 2021A when viewed in the Z-axis direction. In this embodiment, the intake side accommodating portion 201B has a roughly triangular shape, but this is not necessarily limited to this. The number of intake side accommodating portions 201B can be changed as appropriate depending on the number of first intake holes 2021A.

[0061] The second support member 20B further includes a second support recess 202B, which is a portion of the periphery of the second support member 20B recessed toward the first space W1 in the Z-axis direction. In this embodiment, the second support recess 202B is provided on each of two opposing sides of the rectangular second support member 20B, but this is of course not limited to this. In this embodiment, the second support recess 202B is provided so as to face the second opposing recess 2022A described above when viewed from the Z-axis direction, but this is of course not limited to this.

[0062] In this embodiment, the first suction hole 2021A of the second member 20 is not provided with a check valve, but this is not necessarily limited to this. For example, the first suction check valve is provided at a position corresponding to the first suction hole 2021A described above, making the first suction hole 2021A openable and closable, and allowing the first fluid R1 drawn in through the first suction hole 1021A to pass through. The first suction check valve is provided on the first space W1 side (the intermediate member 30 side) of the second elastic portion 20A. In this embodiment, the first suction check valve is a swing type, but is not limited to this and may be a lift type or a ball type. In this embodiment, the number of first suction check valves is two, but this can be changed as appropriate depending on the number of first suction holes 2021A.

[0063] In this embodiment, the first suction check valve has the same configuration as the first discharge check valve 10C described above, and therefore a description thereof will be omitted.

[0064] (Intermediate member) The intermediate member 30 is provided between the first member 10 (first elastic portion 10A) and the second member 20 (second elastic portion 20A) in the Z-axis direction as described above, and forms a first space W1 through which the first fluid R1 flows.

[0065] The intermediate member 30 has a space forming portion 301 that forms the first space W1, and a protruding portion 302 that is provided in the space forming portion 301 and protrudes from the space forming portion 301 to the outside of the first space W1.

[0066] The space forming portion 301 is provided between the first member 10 and the second member 20, is formed around the Z axis, and is formed so as to be able to hold the first fluid R1 in the first space W1. The space forming portion 301 is formed in a ring shape so as to face the first support member 10B and the second support member 20B described above in the Z axis direction.

[0067] The space forming portion 301 has a first recess 301A that connects the first discharge hole 1021A side and the first space W1 at a position opposite the first discharge hole 1021A in the Z-axis direction, and a second recess 301B that connects the first suction hole 2021A side and the first space W1 at a position opposite the first suction hole 2021A in the Z-axis direction.

[0068] The first recess 301A is formed in a rectangular shape so as to recess from the inside to the outside of the space forming portion 301. The first fluid R1 is discharged from the first discharge hole 1021A through the first recess 301A to the outside of the first space W1.

[0069] The second recess 301B is formed in a rectangular shape so as to be recessed from the inside to the outside of the space forming portion 301. The first fluid R1 is sucked into the first space W1 from the first suction hole 2021A via the second recess 301B.

[0070] The protruding portion 302 is provided on a part of the outer periphery of the space forming portion 301 and is provided so as to protrude toward the opposite side from the first space W1 (outside the first space W1). The protruding portion 302 has a through hole 302A at a position that does not face the first member 10 or the second member 20 in the Z-axis direction. In this embodiment, there are two through holes 302A, but this is not limiting. Furthermore, the shape of the through hole 302A is circular or elliptical, but this is not limiting.

[0071] The protrusion 302 is provided so as to face at least a part of the first opposing recess 1022A and the second opposing recess 2022A in the Z-axis direction.

[0072] In this embodiment, the intermediate member 30 is made of metal, but of course, this is not limited to this and it may be made of resin, etc. Furthermore, in this embodiment, the intermediate member 30 is made of the same material as the first member 10 and the second member 20, but of course, this is not limited to this and it may be made of a different material.

[0073] (Drive Unit) The drive unit 40 includes a first drive unit 401 provided on the first elastic portion 10A to elastically deform the first elastic portion 10A, and a second drive unit 402 provided on the second elastic portion 20A to elastically deform the second elastic portion 20A. In this embodiment, the first drive unit 401 is arranged so as to be housed inside the first support member 10B (inside the ring shape). Also, in this embodiment, the second drive unit 402 is arranged so as to be housed inside the second support member 20B (inside the ring shape). Here, "arranged so as to be housed" does not necessarily mean that the first drive unit 401 is arranged lower than the first support member 10B or the second support member 20B in the Z-axis direction, but may also mean that the second drive unit 402 is arranged higher than the first support member 10B or the second support member 20B.

[0074] In this embodiment, the driving unit 40 is a piezoelectric element made of a piezoelectric material such as PZT, but is not limited to this. The first driving unit 401 is provided on the side of the first elastic unit 10A opposite the first space W1 and near the center of the first elastic unit 10A when viewed from the Z-axis direction. The second driving unit 402 is provided on the side of the second elastic unit 20A opposite the first space W1 and near the center of the second elastic unit 20A when viewed from the Z-axis direction. The piezoelectric element may have a laminated structure of two or more layers.

[0075] In this embodiment, the drive unit 40 has a circular shape when viewed from the Z-axis direction, but of course this is not limited to this and it may be configured in an elliptical or polygonal shape, or may be configured in a ring shape.

[0076] In this embodiment, the first drive unit 401 and the first elastic unit 10A are bonded with an epoxy-based thermosetting resin, but of course the resin is not limited to a thermosetting resin, and even if the resin is a thermosetting resin, it is not limited to an epoxy-based resin. Also, in this embodiment, the second drive unit 402 and the second elastic unit 20A are bonded with an epoxy-based thermosetting resin, but of course the resin is not limited to a thermosetting resin, and even if the resin is a thermosetting resin, it is not limited to an epoxy-based resin.

[0077] In this embodiment, the drive unit 40 is provided on the first elastic portion 10A and the second elastic portion 20A, but of course, this is not limited thereto and the drive unit 40 may be provided only on the first elastic portion 10A or the second elastic portion 20A. The first drive unit 401 is provided on the side of the first elastic portion 10A opposite the first space W1 (the first support member 10B side), but of course, this is not limited thereto and the drive unit 401 may be provided on the first space W1 side (the intermediate member 30 side). The second drive unit 402 is provided on the side of the second elastic portion 20A opposite the first space W1 (the second support member 20B side), but of course, this is not limited thereto and the drive unit 402 may be provided on the first space W1 side (the intermediate member 30 side).

[0078] 1 and 2, in this embodiment, the storage section (first storage section) 60 forms a storage space (first storage space) SW that stores the drive section 40 (first drive section 401), and is configured to be able to draw in and discharge a second fluid R2 different from the first fluid R1 into the storage space SW. The storage section 60 is made of the same material as the first elastic section 10A, but of course, is not limited to this and may be made of a different material.

[0079] The accommodating section 60 has a first accommodating space forming section 60A that accommodates the first drive section 401, a second suction hole 60B that is provided in the first accommodating space forming section 60A and through which a second fluid R2 is sucked into the accommodating space SW when the first elastic section 10A is elastically deformed by the first drive section 401, a second discharge hole 60C that discharges the second fluid R2 from the accommodating space SW when the first elastic section 10A is elastically deformed by the first drive section 401, and a second discharge check valve 60D that is provided in the second discharge hole 60C and allows the second fluid R2 discharged from the second discharge hole 60C to pass through.

[0080] In this embodiment, the first storage space forming portion 60A is provided on the first support member 10B and is formed in an approximately cylindrical shape along the periphery of the first drive portion 401, but of course this is not limited to this and may be, for example, a triangular prism.

[0081] The second suction hole 60B is configured to be able to connect the accommodation space SW to a space outside the accommodation space SW, and in this embodiment, is provided to penetrate in the Z-axis direction. Furthermore, when the first elastic deformation part 101A is deformed by the first driving part 401 so as to contract the first space W1, the second fluid R2 outside the accommodation space SW is sucked into the accommodation space SW through the second suction hole 60B.

[0082] The second discharge hole 60C is configured to be able to connect the accommodation space SW to a space outside the accommodation space SW, and in this embodiment, is provided to penetrate in the Z-axis direction. Furthermore, when the first driving unit 401 deforms the first elastic deformation unit 101A so as to expand the first space W1, the second fluid R2 in the accommodation space SW is discharged from the second discharge hole 60C to outside the accommodation space SW.

[0083] The second discharge check valve 60D is provided at a position corresponding to the second discharge hole 60D described above, and enables the second discharge hole 60C to be opened and closed, thereby allowing the second fluid R2 discharged from the second discharge hole 60C to pass through. The second discharge check valve 60D is provided on the side of the first storage space forming portion 60A opposite the storage space SW. In this embodiment, the second discharge check valve 60C is of a swing type, but is not limited to this and may be of a lift type or a ball type.

[0084] Furthermore, in this embodiment, the second suction hole 60B is not provided with a check valve, but of course, this is not limited to this. For example, the second suction check valve is provided at a position corresponding to the above-mentioned second suction hole 60B, making the second suction hole 60B open and closeable, and allowing the second fluid R2 drawn in through the second suction hole 60B to pass through. The second suction check valve is provided on the accommodating space SW side of the first accommodating space forming portion 60A. In this embodiment, the second suction check valve is of a swing type, but of course, this is not limited to this and may be of a lift type or a ball type.

[0085] In this embodiment, the second suction check valve and the second discharge check valve 60D have the same configuration as the first discharge check valve 10C described above, and therefore a description thereof will be omitted.

[0086] <Explanation of Operation> Next, a typical operation of the fluid control device 1 will be described.

[0087] When an input voltage (such as a sine wave, triangular wave, rectangular wave, or sawtooth wave, hereinafter collectively referred to as a sine wave, etc.) is applied to the drive unit 40, the first elastic portion 10A and the second elastic portion 20A are bent and deformed upward or downward. When the first elastic portion 10A is bent and deformed upward, the second elastic portion 20A is bent and deformed downward, and when the first elastic portion 10A is bent and deformed downward, the second elastic portion 20A is bent and deformed upward.

[0088] 2A, when the first elastic member 10A bends downward and the second elastic member 20A bends upward, the first space W1 inside the housing 100 contracts, and the pressure inside the first space W1 becomes greater than the pressure outside. As a result, the first fluid R1 is discharged from the first space W1 to the outside through the first discharge hole 1021A. At this time, the first discharge check valve 10C provided in the first discharge hole 1021A is opened due to the pressure difference between the outside and the inside of the first space W1.

[0089] 2A, when the first elastic member 10A is bent downward, the storage space SW inside the housing 100 expands, and the pressure inside the storage space SW becomes lower than the pressure outside. As a result, the second fluid R2 flows from the outside into the storage space SW through the second suction hole 60B. At this time, the second discharge check valve 60D provided in the second discharge hole 60C is closed due to the pressure difference between the outside and the inside of the storage space SW.

[0090] 2B , when the first elastic member 10A bends upward and the second elastic member 20A bends downward, the first space W1 inside the housing 100 expands, and the pressure in the first space W1 becomes lower than the pressure outside. As a result, the first fluid R1 flows from the outside into the first space W1 through the first suction hole 2021A. At this time, the first discharge check valve 10C provided in the first discharge hole 1021A is closed due to the pressure difference between the outside and the inside of the first space W1.

[0091] 2B, when the first elastic member 10A is bent upward, the storage space SW inside the housing 100 contracts, and the pressure inside the storage space SW becomes greater than the pressure outside. As a result, the second fluid R2 is discharged from the storage space SW to the outside through the second discharge hole 60C. At this time, the second discharge check valve 60D provided in the second discharge hole 60C is opened due to the pressure difference between the outside and the storage space SW.

[0092] As described above, in this embodiment, the housing 100 includes a first member 10 including a first elastic portion 10A that is an elastic body, and a second member 20 including a second elastic portion 20A that is an elastic body that forms a first space W1 through which the first fluid R1 flows between the first member 10 and the second member 20, and is configured to be able to suck in and discharge the first fluid R1, and a drive unit 40 that is provided on at least one of the first elastic portion 10A or the second elastic portion 20A and elastically deforms at least one of the first elastic portion 10A or the second elastic portion 20A, and the housing 100 further includes a storage portion 60 that forms a storage space SW to accommodate the drive unit 40 and is configured to be able to suck in and discharge a second fluid R2 that is different from the first fluid R1 into the storage space SW.

[0093] That is, not only can the first fluid R1 be drawn in and out by the expansion and contraction of the first space W1 caused by the first elastic member 10A and the second elastic member 20A, but the second fluid R2 can also be drawn in and out by the expansion and contraction of the accommodation space SW in the accommodation unit 60 that accommodates the drive unit 40. This makes it possible to use the expansion and contraction of the space in which the drive unit 40 is accommodated by the drive unit 40 to draw in and out the fluid, thereby improving the output of the fluid control device 1.

[0094] Furthermore, it is possible to improve the driving efficiency of the fluid control device 1, thereby making it possible to reduce the size and thickness of the driving unit 40. Therefore, when the fluid control device 1 is worn by a user, it is possible to reduce the discomfort felt by the user when wearing the fluid control device 1.

[0095] In addition, in this embodiment, the first member 10 has a first discharge hole 1021A through which the first fluid R1 is discharged from the first space W1 when at least one of the first elastic portion 10A or the second elastic portion 20A is elastically deformed by the drive portion 40, and a first discharge check valve 10C provided in the first discharge hole 1021A and allowing the first fluid R1 discharged from the first discharge hole 1021A to pass through.

[0096] As a result, since the first discharge check valve 10C is provided, it is possible to prevent fluid from being sucked in from the first discharge hole 1021A side even if the first space W1 expands, making it easier to maintain the pressure of the fluid in the space that holds the fluid to be discharged (making it less likely that the discharged fluid will flow back), thereby further improving the driving efficiency and output of the fluid control device 1.

[0097] In addition, in this embodiment, the storage section 60 has a second discharge hole 60C through which the second fluid R2 is discharged from the storage space SW when at least one of the first elastic section 10A or the second elastic section 20A is elastically deformed by the drive section 40, and a second discharge check valve 60D provided in the second discharge hole 60C and allowing the second fluid R2 discharged from the second discharge hole 60C to pass through.

[0098] As a result, since the second discharge check valve 60D is provided, it is possible to prevent fluid from being sucked in from the second discharge hole 60C side even if the storage space SW expands, making it easier to maintain the pressure of the fluid in the space that holds the destination fluid (making it less likely that the discharged fluid will flow back), further improving the driving efficiency and output of the fluid control device 1.

[0099] The storage section 60 may also have a second suction hole 60B through which the second fluid R2 is sucked into the storage space SW when at least one of the first elastic section 10A or the second elastic section 20A is elastically deformed by the drive section 40, and a second suction check valve provided in the second suction hole 60B to allow the second fluid R2 sucked through the second suction hole 60B to pass through.

[0100] As a result, since a second suction check valve is provided, it is possible to prevent fluid from being discharged from the second suction hole 60B side even if the storage space SW contracts, making it easier to discharge fluid to the discharge side, thereby further improving the driving efficiency and output of the fluid control device 1.

[0101] The drive unit 40 further includes a first drive unit 401 provided on the side opposite the first space W1 of the first elastic member 10A, and a second drive unit 402 provided on the side opposite the first space W1 of the second elastic member 20A. This allows the drive output of the fluid control device 1 to be improved compared to when only the first elastic member 10A or the second elastic member 20A is provided.

[0102] In this embodiment, the drive section 40 and the first elastic section 10A are bonded together with a thermosetting resin, which provides strength against external stimuli such as impacts.

[0103] In this embodiment, the first support member 10B is formed to have higher rigidity than the first elastic portion 10A, and the second support member 20B is formed to have higher rigidity than the second elastic portion 20A. In other words, even if the first elastic portion 10A and the second elastic portion 20A are elastically deformed, the first opposing portion 102A and the second opposing portion 202A can be fixed by the intermediate member 30 so as to prevent elastic deformation.

[0104] This makes it possible to increase the amount of deformation of the first elastic deformation portion 101A and the second elastic deformation portion 201A.

[0105] In this embodiment, the first elastic deformation portion 101A has a first groove portion, and the second elastic deformation portion 201A has a second groove portion 2011A. This makes it easier for the first elastic deformation portion 101A and the second elastic deformation portion 201A to be elastically deformed by the driving portion 40, and the amount of change in volume of the space W can be increased.

[0106] Furthermore, in this embodiment, the first support member 10B has a first support recess 102B in which wiring for a drive signal (voltage) to the drive unit 40 is arranged. This makes it possible to make the first support member 10B more compact and to prevent the wiring from protruding from the outermost surface of the first support member 10B. Note that the wiring is not particularly limited, and may be, for example, an FPC (Flexible Printed Circuits) or a general wire cable.

[0107] Furthermore, in this embodiment, the intermediate member 30 has a protrusion 302 that is provided at a position facing the first opposing recess 1022A and the second opposing recess 2022A in the Z-axis direction, protrudes toward the opposite side of the space W, and serves as a terminal for inputting a signal corresponding to GND. The protrusion 302 also has a through-hole 302A at a position that does not face the first member 10 and the second member 20 in the Z-axis direction.

[0108] This allows the entire fluid control device 1 to be made thinner in the Z-axis direction. Of course, the function of the terminal for inputting a signal corresponding to GND is not limited to being provided on the protrusion 302, but may be provided on the first support member 10B, the second support member 20B, etc.

[0109] <Modification 1> Next, Modification 1 of the present technology will be described. In this embodiment, the fluid control device 1 sucks and discharges the second fluid R2 into the space accommodating the first drive unit 401, but this is not limited to this, and the second drive unit 402 side may also be used. Figure 5 is a cross-sectional view of Modification 1 of the fluid control device 1. Descriptions of configurations similar to those of the above-described embodiment will be omitted or simplified.

[0110] As shown in Figure 5, the storage section of the housing 100Q of the fluid control device 1Q has, in addition to the first storage section 60 that forms the first storage space SW1 that stores the first drive section 401, a second storage section 70 that forms the second storage space SW2 that stores the second drive section 402.

[0111] The second housing portion 70 has a configuration similar to the housing portion (first housing portion 60) described above, forms a second housing space SW2 that houses the drive portion 40 (second drive portion 402), and is configured to be able to draw in and discharge a third fluid different from the first fluid R1 and the second fluid R2 into the second housing space SW2. The second housing portion 70 is made of the same material as the second elastic portion 20A, but of course, is not limited to this and may be made of a different material.

[0112] The second accommodating section 70 has a second accommodating space forming section 70A that accommodates the second drive section 402, a third suction hole 70B that is provided in the second accommodating space forming section 70A and through which a third fluid is sucked into the second accommodating space SW2 when the second elastic section 20A is elastically deformed by the second drive section 402, a third discharge hole 70C that discharges the third fluid from the second accommodating space SW2 when the second elastic section 20A is elastically deformed by the second drive section 402, and a third discharge check valve 70D that is provided in the third discharge hole 70C and allows the third fluid discharged from the third discharge hole 70C to pass through.

[0113] In this embodiment, the second storage space forming portion 70A is provided on the second support member 20B and is formed in an approximately cylindrical shape along the periphery of the second drive portion 402, but of course it is not limited to this and may be, for example, a triangular prism.

[0114] The third suction hole 70B is configured to be able to connect the second accommodation space SW2 with a space outside the second accommodation space SW2, and in this embodiment, is provided to penetrate in the Z-axis direction. Furthermore, when the second elastic deformation part 201A is deformed by the second drive part 402 so as to contract the first space W1, the third fluid outside the second accommodation space SW2 is sucked into the second accommodation space SW2 through the third suction hole 70B.

[0115] The third discharge hole 70C is configured to be able to connect the second accommodation space SW2 to a space outside the second accommodation space SW2, and in this embodiment, is provided to penetrate in the Z-axis direction. Furthermore, when the second driving unit 402 deforms the second elastic deformation unit 201A so as to expand the first space W1, the third fluid in the second accommodation space SW2 is discharged from the third discharge hole 70C to outside the second accommodation space SW2.

[0116] The third discharge check valve 70D is provided at a position corresponding to the third discharge hole 70D described above, and enables the third discharge hole 70C to be opened and closed, thereby allowing the third fluid discharged from the third discharge hole 70C to pass through. The third discharge check valve 70D is provided on the side of the second housing space forming portion 70A opposite the second housing space SW2. In this embodiment, the third discharge check valve 70C is of a swing type, but is not limited to this and may be of a lift type or a ball type.

[0117] Furthermore, in this embodiment, the third suction hole 70B is not provided with a check valve, but this is of course not limited to this. For example, a third suction check valve may be provided at a position corresponding to the above-described third suction hole 70B to open and close the third suction hole 70B and allow the third fluid drawn in through the third suction hole 70B to pass through. The third suction check valve is provided on the second housing space SW1 side of the second housing space forming portion 70A. In this embodiment, the third suction check valve is a swing type, but this is not of course limited to this and may be a lift type or a ball type.

[0118] In this embodiment, the third suction check valve and the third discharge check valve 70D have the same configuration as the first discharge check valve 10C described above, and therefore a description thereof will be omitted.

[0119] As shown in FIG. 5, the second member 20Q of the housing 100Q further has a first suction check valve 20C provided in the first suction hole 2021A to allow the first fluid R1 sucked in from the first suction hole 2021A to pass through.

[0120] The first suction check valve 20C is provided at a position corresponding to the first suction hole 2021A described above, enabling the first suction hole 2021A to be opened and closed, thereby allowing the first fluid R1 drawn in through the first suction hole 2021A to pass through. The first suction check valve 20C is provided on the side of the second elastic portion 20A opposite the first space W1. In this embodiment, the first suction check valve 20C is of a swing type, but is not limited to this and may be of a lift type or a ball type. In this embodiment, the number of first suction check valves 20C is two, but this can be changed as appropriate depending on the number of first suction holes 2021A.

[0121] <Explanation of Operation> Next, a typical operation of the fluid control device 1Q will be described.

[0122] When an input voltage (such as a sine wave, triangular wave, rectangular wave, or sawtooth wave, hereinafter collectively referred to as a sine wave, etc.) is applied to the drive unit 40, the first elastic portion 10A and the second elastic portion 20A are bent and deformed upward or downward. When the first elastic portion 10A is bent and deformed upward, the second elastic portion 20A is bent and deformed downward, and when the first elastic portion 10A is bent and deformed downward, the second elastic portion 20A is bent and deformed upward.

[0123] First, when the first elastic member 10A bends downward and the second elastic member 20A bends upward, the first space W1 inside the housing 100 contracts, and the pressure inside the first space W1 becomes greater than the pressure outside. As a result, the first fluid R1 is discharged from the first space W1 to the outside through the first discharge hole 1021A. At this time, the first discharge check valve 10C provided in the first discharge hole 1021A is opened due to the pressure difference between the outside and the inside of the first space W1, and the first suction check valve 20C is closed due to the pressure difference between the outside and the inside of the first space W1.

[0124] On the other hand, when the first elastic member 10A is bent downward, the first accommodation space SW1 and the second accommodation space SW2 inside the housing 100 expand, and the pressure in the first accommodation space SW1 and the second accommodation space SW2 becomes lower than the pressure outside. As a result, the second fluid R2 flows from the outside into the first accommodation space SW1 through the second suction hole 60B, and the third fluid flows from the outside into the second accommodation space SW2 through the third suction hole 70B.

[0125] At this time, the second discharge check valve 60D provided in the second discharge hole 60C is closed due to the pressure difference between the outside and the inside of the first storage space SW1, and the third discharge check valve 70D provided in the third discharge hole 70C is closed due to the pressure difference between the outside and the inside of the second storage space SW2.

[0126] Next, when the first elastic member 10A bends upward and the second elastic member 20A bends downward, the first space W1 inside the housing 100 expands, and the pressure in the first space W1 becomes lower than the pressure outside. As a result, the first fluid R1 flows into the first space W1 from the outside through the first suction hole 2021A.

[0127] At this time, the first discharge check valve 10C provided in the first discharge hole 1021A is closed due to the pressure difference between the outside and the inside of the first space W1, and the first suction check valve 20C provided in the first suction hole 2021A is open due to the pressure difference between the outside and the inside of the first space W1.

[0128] On the other hand, when the first elastic member 10A is bent upward, the first accommodation space SW1 and the second accommodation space SW2 inside the housing 100 contract, and the pressure in the first accommodation space SW1 and the second accommodation space SW2 becomes higher than the external pressure. As a result, the second fluid R2 is discharged from the first accommodation space SW1 to the outside through the second discharge hole 60C, and the third fluid is discharged from the second accommodation space SW2 to the outside through the third discharge hole 70C.

[0129] At this time, the second discharge check valve 60D provided in the second discharge hole 60C is opened due to the pressure difference between the outside and the inside of the storage space SW, and the third discharge check valve 70D provided in the third discharge hole 70C is opened due to the pressure difference between the outside and the inside of the second storage space SW2.

[0130] As described above, the accommodation section of the housing 100Q of the fluid control device 1Q includes the first accommodation section 60 that forms the first accommodation space SW1 that accommodates the first drive unit 401, as well as the second accommodation section 70 that forms the second accommodation space SW2 that accommodates the second drive unit 402. The second accommodation section 70 also forms the second accommodation space SW2 that accommodates the drive unit 40 (second drive unit 402), and is configured to be able to draw in and discharge a third fluid different from the first fluid R1 and the second fluid R2 into the second accommodation space SW2.

[0131] This makes it possible to draw in and discharge the third fluid not only by the first drive unit 401 but also by the expansion and contraction of the second housing space SW2 in the second housing unit 70 that houses the drive unit 402. This makes it possible to use the expansion and contraction of the space in which the drive unit 40 is housed by the drive unit 40 for drawing in and discharging the fluid, thereby improving the output of the fluid control device 1Q.

[0132] The second member 20Q of the housing 100Q further includes a first suction check valve 20C that is provided in the first suction hole 2021A and allows the first fluid R1 that is suctioned through the first suction hole 2021A to pass through.

[0133] As a result, since the first suction check valve 20C is provided, it is possible to prevent fluid from being discharged from the first suction hole 2021A side even if the first space W1 contracts, making it easier to discharge fluid to the discharge side, thereby further improving the driving efficiency and output of the fluid control device 1.

[0134] Second Embodiment Next, a second embodiment of the present technology will be described. Fig. 6 is a cross-sectional view of a fluid control device 1R according to the second embodiment of the present technology, and Fig. 7 is a diagram showing the fluid control device 1R, where (A) is a top view of the fluid control device 1R, (B) is a top view of an outflow chamber 80 of the fluid control device 1R, and (C) is a side view of the fluid control device 1R. Below, configurations different from the first embodiment will be mainly described, and configurations similar to those in the first embodiment will be assigned the same reference numerals, and descriptions thereof will be omitted or simplified.

[0135] The housing 100R of the fluid control device 1R has an outflow chamber 80 that forms a second space W2 that contains fluids including the first fluid R1 and the second fluid R2 discharged by the drive unit 40.

[0136] 6, the outflow chamber 80 is provided so that the discharged first fluid R1 and the discharged second fluid R2 join together in the same space, thereby improving the driving efficiency and output of the fluid control device 1 compared to when only the first fluid R1 and the second fluid R2 are discharged separately.

[0137] In addition, in this embodiment, only the first fluid R1 and the second fluid R2 are discharged, but of course, this is not limitative, and the above-mentioned third fluid may also be discharged into the outflow chamber 80.

[0138] In this embodiment, the outflow chamber 80 is made of the same material as the housing 100R (the first member 10 and the second member 20), but of course, this is not limited to this. In this embodiment, the outflow chamber 80 is formed by stacking plates such as metal, but of course, this is not limited to this and the outflow chamber 80 may be made of piping, tubes, or the like.

[0139] <Third Embodiment> Next, a third embodiment of the present technology will be described. Fig. 8 is a cross-sectional view of a fluid control device 1S according to a third embodiment of the present technology, where (A) is a diagram showing a state in which an exhaust valve 80B is closed, and (B) is a diagram showing a state in which the exhaust valve 80B is open, and Fig. 9 is an exploded perspective view of the fluid control device 1S. Below, configurations different from the first embodiment will be mainly described, and configurations similar to those in the first embodiment will be assigned similar reference numerals, and descriptions thereof will be omitted or simplified.

[0140] The fluid control device 1S comprises a housing 100S having a first member 10, a second member 20, an outflow chamber 80 forming a second space W2 that accommodates a first fluid R1 discharged by a drive unit 40, a holding space portion 201B provided in the second member 20 and forming a holding space HW that holds the first fluid R1 that is sucked into the first space W1, and a space connection portion 90 forming a third space W3 that connects the holding space portion 201B and the outflow chamber 80 via an exhaust valve 80B, the drive unit 40, and a fluid holding portion K that is connected to the second space W2, holds the first fluid R1, and is elastically deformable.

[0141] As shown in FIG. 8, the outflow chamber 80 forms a second space W2 that accommodates the first fluid R1 discharged by the driving unit 40.

[0142] As shown in FIG. 9 , the outflow chamber 80 has a first outflow chamber 801 and a second outflow chamber 802 .

[0143] The first outflow chamber 801 has a spatial recess 801A provided on the discharge side of the first member 10 (first support member 10B) and forming a second space W2 (a flow path for the first fluid R1) that accommodates the discharged first fluid R1, a first spatial through-hole 801B that connects the spatial recess 801A and the first space W1 via the first discharge check valve 10C, a second spatial through-hole 801C that is provided in the spatial recess 801A and connects the holding space portion 201B having a holding space HW, and an exhaust valve 80B that is provided in the second spatial through-hole 801C and allows the first fluid R1 sucked into the second space W2 to pass through to the holding space HW.

[0144] The second outflow chamber 802 is provided on the side of the first outflow chamber 801 opposite the first member 10 (first support member 10B), and forms a second space W2 that accommodates the discharged first fluid R1 together with the first outflow chamber 801, and a flow path for the first fluid R1. The second outflow chamber 802 also has an inflow / outflow through-hole 802A that allows the first fluid R1 in the second space W2 to flow into and out of the fluid holding portion K.

[0145] In this embodiment, the spatial recess 801A has a straight portion 8011A formed to linearly connect the two first spatial through-holes 801B, and an extending portion 8012A formed from the straight portion 8011A to a position facing the holding space HW in the Z-axis direction. In this embodiment, there are two first spatial through-holes 801B, but this is of course not limited to this. Furthermore, the shape of the spatial recess 801A is not limited to the shape described above.

[0146] The second spatial through-hole 801C is provided so as to penetrate the spatial recess 801A in the Z-axis direction, and is provided at a position facing the holding space HW in the Z-axis direction.

[0147] The exhaust valve 80B is provided at a position corresponding to the second spatial through-hole 801C, allowing the second spatial through-hole 801C to open and close, thereby allowing the first fluid R1 drawn into the second space W2 to pass toward the holding space HW. The exhaust valve 80B is provided on the second space W2 side of the spatial recess 801A (extension portion 8012A). When the pressure in the second space W2 decreases, the valve opens and exhausts the fluid. Here, the reason for the decrease in pressure in the second space W2 will be explained. For example, by using a structure in which the exhaust valve 80B is raised from the second spatial through-hole 801C by, for example, several tens of micrometers, like the first check valve 10C' shown in FIG. 22 described below, the first fluid R1 leaks from between the first check valve 10C' and the second spatial through-hole 801C when the drive unit 40 is not driven. (That is, when the drive unit 40 is ON, the amount of leakage is small, and when the drive unit 40 is turned OFF, fluid gradually leaks out, and as the pressure in the second space W2 drops, the exhaust valve 80B opens widely, functioning as a valve to adjust the amount of fluid leakage.) The exhaust valve 80B has the same structure and material (reed valve structure) as, for example, the first suction check valve and the first discharge check valve 10C, but of course is not limited to this and may be a solenoid valve.

[0148] The inlet / outlet through-hole 802A is provided at a position facing the first spatial through-hole 801B in the Z-axis direction, but of course, this is not limited thereto and the inlet / outlet through-hole 802A may be provided at a different position. In this embodiment, the diameter of the inlet / outlet through-hole 802A is approximately the same as that of the first spatial through-hole 801A, but of course, this is not limited thereto.

[0149] In this embodiment, the outflow chamber 80 is made of the same material as the housing 100R (the first member 10 and the second member 20), but of course, this is not limited to this. In this embodiment, the outflow chamber 80 is formed by stacking plates such as metal, but of course, this is not limited to this and the outflow chamber 80 may be made of piping, tubes, or the like.

[0150] The fluid holding portion K is an elastic body and has a fluid holding space KW that can hold the first fluid R1 flowing in from the inlet / outlet through-hole 802 A. The fluid holding portion K is, for example, a cuff, and expands or contracts depending on the amount and pressure of the first fluid R1 flowing in from the inlet / outlet through-hole 802 A.

[0151] The spatial connection portion 90 is a through-hole that is provided in the second member 20 and connects the second space W2 and the holding space HW. The spatial connection portion 90 is provided on the radially outer side of the second member 20 and is provided inside the housing 100S. Of course, this is not limiting, and the spatial connection portion 90 may be a pipe, a tube, or the like, and may be provided outside the housing 100S.

[0152] The holding space portion 201B is connected to the second space W2 via the spatial connection portion 90 and the flow path forming portion 2000 described later, and is configured to be able to hold the first fluid R1 exhausted from the second space W2. As described above, in this embodiment, the holding space portion 201B is provided in the second support member 20B, and forms a holding space HW that is able to hold at least a portion of the first fluid R1 that flows in from outside the first space W1, at a position opposite the first suction hole 2021A in the Z axis direction. The holding space portion 201B is formed to surround the first suction hole 2021A when viewed in the Z axis direction.

[0153] The housing 100S further has a flow path forming portion 2000 that is provided on the opposite side of the second member 20 from the first space W1 and forms an inflow path 2000R that draws the first fluid R1 into the first space W1.

[0154] 9 , the flow path forming portion 2000 is plate-shaped and formed to be recessed on the opposite side to the first space W1 in the Z-axis direction. An inflow path 2000R formed in the flow path forming portion 2000 includes an inlet 2001R through which the first fluid R1 flows, a first inflow path 2002R formed so that the first fluid R1 flowing in from the inlet 2001R faces the first suction hole 2021A in the Z-axis direction, and a second inflow path 2003R facing the spatial connection portion 90 in the Z-axis direction and connected to the first inflow path 2002R.

[0155] In this embodiment, the first inflow path 2002R is formed in a roughly L-shape when viewed from the Z-axis direction because there are two first suction holes 2021A, but of course this is not limited to this. Furthermore, the second inflow path 2003R is connected obliquely to the first inflow path 2002R so as to follow the flow of the first fluid R1 flowing through the first inflow path 2002R.

[0156] <Explanation of Operation> Next, a typical operation of the fluid control device 1S will be described.

[0157] When an input voltage (such as a sine wave, triangular wave, rectangular wave, or sawtooth wave, hereinafter collectively referred to as a sine wave) is applied to the drive unit 40, the first elastic portion 10A and the second elastic portion 20A are bent upward or downward. When the first elastic portion 10A bends upward, the second elastic portion 20A is bent downward, and when the first elastic portion 10A bends downward, the second elastic portion 20A is bent upward. Hereinafter, the ON state (first state) of the fluid control device 1S refers to a state in which a voltage is applied to the drive unit 40, the pressure in the second space W2 increases, and the exhaust valve 80B is closed. The OFF state (second state) of the fluid control device 1S refers to a state in which no voltage is applied to the drive unit 40, the pressure in the second space W2 decreases, and the exhaust valve 80B is open.

[0158] First, as shown in Fig. 8A, the case where the fluid control device 1S is ON will be described. In this case, the exhaust valve 80B is closed. As a result, the first fluid R1 is held in the fluid holding portion K.

[0159] Next, as shown in FIG. 8B, when the fluid control device 1S is turned off, the exhaust 80B opens, and the first fluid R1 in the fluid holding portion K and the second space W2 flows into the holding space HW.

[0160] As described above, in the present embodiment, the housing 100S further includes the outflow chamber 80 that forms the second space W2 that accommodates the first fluid R1 discharged by the drive unit 40, and the holding space portion 201B that is provided in the second member 20 and forms the holding space HW that holds the first fluid R1 that is drawn into the first space W1, and the outflow chamber 80 includes an exhaust valve 80B that is provided in the outflow chamber 80 and allows the first fluid R1 drawn into the second space W2 to pass into the holding space HW. This allows the exhausted first fluid R1 to be connected to the holding space HW, making it possible to draw in the compressed first fluid R1, thereby further improving the driving efficiency and output of the fluid control device 1S.

[0161] 10A and 10B are diagrams showing a fluid control device 1T according to a conventional example of the present technology, in which (A) shows a state in which an exhaust valve 80B is closed, and (B) shows a state in which the exhaust valve 80B is open.

[0162] 10, when the fluid control device 1T is turned off, the outflow chamber 80T of the conventional fluid control device 1T opens the exhaust valve 80B, and the first fluid R1 in the second space W2 is released to the outside (atmosphere) of the housing 100T. However, in this case, not only is it impossible to utilize the compressed first fluid R1, but opening the exhaust valve 80B also connects the atmosphere to the second space W2, which could result in the intrusion of external dust particles and the like.

[0163] In contrast, in the present embodiment, the compressed first fluid R1 can be further sucked in. That is, in a fluid control device that sucks in / compresses / discharges a fluid, it is known that when multiple fluid control devices are connected in series, the suction pressure is higher than when a single fluid control device is connected in series, and therefore the discharge pressure is higher. Therefore, the configuration of this embodiment, which further compresses the compressed first fluid R1 described above, can improve the driving efficiency and output of the fluid control device 1S. Furthermore, because the exhaust valve 80B is connected to the holding space HW even when it is open, the risk of dust and other foreign matter entering from the outside can be reduced.

[0164] In this embodiment, the spatial connection part 90 is provided inside the housing 100S. This allows the fluid control device 1S to be miniaturized. Furthermore, by providing the spatial connection part 90 inside the housing 100S, the strength of the spatial connection part 90 can be improved.

[0165] <Modification 3> Next, a modification of the third embodiment of the present technology will be described. Figure 11 is a cross-sectional view of a modification of the third embodiment of the present technology, where (A) is a cross-sectional view of a fluid control device 1U of a first modification, and (B) is a cross-sectional view of a fluid control device 1V of a second modification. Below, configurations different from the third embodiment will be mainly described, and configurations similar to those of the third embodiment will be assigned the same reference numerals and descriptions thereof will be omitted or simplified.

[0166] 11A , the outflow chamber 80U of the housing 100U of the fluid control device 1U has a first exhaust valve 80B1 and a second exhaust valve 80B2. The second space W2 of the outflow chamber 80U has a space W21 that houses the first exhaust valve 80B1 and a space W22 that houses the second exhaust valve 80B2. The spaces W21 and W22 may be separated from each other or may be connected to each other.

[0167] The first exhaust valve 80B1 is opened and closed to allow a portion of the first fluid R1 to be exhausted to the holding space HW, and the second exhaust valve 80B2 is opened and closed to allow a portion of the first fluid R1 to be exhausted to the outside (atmosphere).

[0168] This makes it possible to adjust the amount of compressed first fluid R1 that is sucked back in.

[0169] 11B, the drive unit 40 of the fluid control device 1V may be provided only on the first member 10 side. In the present embodiment, the drive unit 40 is provided only on the first member 10 side, but this is not limitative and the drive unit 40 may be provided only on the second member 20V side. This reduces the cost of installing the drive unit 40 compared to when the drive unit 40 is also provided on the second elastic member 20A side.

[0170] As shown in FIG. 11(B), the second member 20V of the fluid control device 1V further has a first intake check valve 20C provided in the first intake hole 2021A and allowing the first fluid R1 to pass through the first intake hole 2021A.

[0171] The first suction check valve 20C is provided at a position corresponding to the first suction hole 2021A, and enables the first suction hole 2021A to be opened and closed, thereby allowing the first fluid R1 to pass through the first suction hole 2021A. The first suction check valve 20C is provided on the side of the second elastic portion 20A opposite to the first space W1.

[0172] As a result, since the first suction check valve 20C is provided, it is possible to prevent fluid from being discharged from the first suction hole 2021A side even if the first space W1 contracts, making it easier to discharge fluid to the discharge side, thereby further improving the driving efficiency and output of the fluid control device 1V.

[0173] 11(B), the housing 100V of the fluid control device 1V further includes a dust filter F provided on the second member 20V on the side opposite the first space W1 to prevent dust and the like from entering the first suction hole 2021A. In this embodiment, the dust filter F is provided in front of the holding space HW, but the present invention is not limited to this. The dust filter F may be provided within the holding space HW on the side of the first suction hole 2021A opposite the first space W1.

[0174] This makes it possible to prevent dust and the like from entering the first space W1, the second space W2, and the fluid holding portion K.

[0175] <Fourth embodiment> Next, a modified example of the fourth embodiment of the present technology will be described. Fig. 12 is a cross-sectional view of the modified example of the fourth embodiment of the present technology. Hereinafter, configurations different from the third embodiment will be mainly described, and configurations similar to those of the third embodiment will be assigned the same reference numerals, and descriptions thereof will be omitted or simplified.

[0176] 12 , the fluid control device 1W may have the configuration of the third embodiment plus the configuration of the above-described modified example 1. That is, the housing 100W of the fluid control device 1W includes a first member 10, a second member 20, an outflow chamber 80W that forms a second space W2 that accommodates a fluid including a first fluid R1 and a second fluid R2 discharged by the drive unit 40, a holding space portion 201B that is provided in the second member 20 and forms a holding space HW that holds the first fluid R1 that is drawn into the first space W1, a space connection portion 90 that forms a third space W3 that connects the holding space portion 201B and the outflow chamber 80W via an exhaust valve 80B, and a first accommodation portion 60 that forms a first accommodation space SW1 that accommodates the first drive unit 401.

[0177] The first housing portion 60 forms a housing space (first housing space) SW that houses the drive portion 40 (first drive portion 401), and is configured to be able to draw in and discharge a second fluid R2 different from the first fluid R1 into the housing space SW. The first housing portion 60 is made of the same material as the first elastic portion 10A, but of course, is not limited to this and may be made of a different material.

[0178] The first storage section 60 has a first storage space forming section 60A that accommodates the first drive section 401, a second suction hole 60B that is provided in the first storage space forming section 60A and through which a second fluid R2 is sucked into the storage space SW when the first elastic section 10A is elastically deformed by the first drive section 401, a second discharge hole 60C that discharges the second fluid R2 from the storage space SW when the first elastic section 10A is elastically deformed by the first drive section 401, and a second discharge check valve 60D that is provided in the second discharge hole 60C and allows the second fluid R2 discharged from the second discharge hole 60C to pass through.

[0179] In this embodiment, the first storage space forming portion 60A is provided on the first support member 10B and is formed in an approximately cylindrical shape along the periphery of the first drive portion 401, but of course this is not limited to this and may be, for example, a triangular prism.

[0180] The second suction hole 60B is configured to be able to connect the accommodation space SW to a space outside the accommodation space SW, and in this embodiment, is provided to penetrate in the Z-axis direction. Furthermore, when the first elastic deformation part 101A is deformed by the first driving part 401 so as to contract the first space W1, the second fluid R2 outside the accommodation space SW is sucked into the accommodation space SW through the second suction hole 60B.

[0181] The second discharge hole 60C is configured to be able to connect the accommodation space SW and a second space W2 outside the accommodation space SW, and in this embodiment, is provided to penetrate in the Z-axis direction. Furthermore, when the first driving unit 401 deforms the first elastic deformation unit 101A so as to expand the first space W1, the second fluid R2 in the accommodation space SW is discharged from the second discharge hole 60C into the second space W2.

[0182] The second discharge check valve 60D is provided at a position corresponding to the second discharge hole 60D described above, and enables the second discharge hole 60C to be opened and closed, thereby allowing the second fluid R2 discharged from the second discharge hole 60C to pass through. The second discharge check valve 60D is provided on the side of the first storage space forming portion 60A opposite the storage space SW. In this embodiment, the second discharge check valve 60C is of a swing type, but is not limited to this and may be of a lift type or a ball type.

[0183] Furthermore, in this embodiment, the second suction hole 60B is not provided with a check valve, but of course, this is not limited to this. For example, the second suction check valve is provided at a position corresponding to the above-mentioned second suction hole 60B, making the second suction hole 60B open and closeable, and allowing the second fluid R2 drawn in through the second suction hole 60B to pass through. The second suction check valve is provided on the accommodating space SW side of the first accommodating space forming portion 60A. In this embodiment, the second suction check valve is of a swing type, but of course, this is not limited to this and may be of a lift type or a ball type.

[0184] In this embodiment, the second suction check valve and the second discharge check valve 60D have the same configuration as the first discharge check valve 10C described above, and therefore a description thereof will be omitted.

[0185] This can further improve the drive efficiency and output of the fluid control device 1W. In other words, not only can the first fluid R1 be drawn in and out by the expansion and contraction of the first space W1 caused by the first elastic member 10A and the second elastic member 20A, but the second fluid R2 can also be drawn in and out by the expansion and contraction of the storage space SW in the storage unit 60 that houses the drive unit 40. This makes it possible to use the expansion and contraction of the space in which the drive unit 40 is housed by the drive unit 40 to draw in and out the fluid, thereby improving the output of the fluid control device 1W.

[0186] Furthermore, by connecting the exhausted first fluid R1 and second fluid R2 to the holding space HW, it becomes possible to inhale the compressed first fluid R1 and second fluid R2, thereby further improving the driving efficiency and output of the fluid control device 1W.

[0187] 13 is an exploded perspective view showing a fluid control device 1Z according to a fifth embodiment of the present technology, and FIG. 2 is a diagram showing the fluid control device 1Z, where (A) is a partially exploded view of the fluid control device 1Z and (B) is a cross-sectional view. Hereinafter, configurations different from the first embodiment will be mainly described, and configurations similar to those in the first embodiment will be denoted by the same reference numerals, and descriptions thereof will be omitted or simplified.

[0188] 13 and 14, the fluid control device 1Z further includes an adjustment unit 50. The fluid control device 1Z is configured to be able to draw in and discharge a fluid (corresponding to a first fluid) by driving a drive unit 40.

[0189] (Driver) The driver 40 is provided on the first elastic portion 10A and elastically deforms the first elastic portion 10A. In this embodiment, the driver 40 is arranged so as to be housed inside the first support member 10B (inside the ring shape). Here, being housed does not necessarily mean being lower than the first support member 10B in the Z-axis direction, but may also mean being higher.

[0190] In this embodiment, the drive unit 40 is provided on the first elastic portion 10A, but of course, this is not limited thereto. The drive unit 40 may be provided on the second elastic portion 20A and elastically deform the second elastic portion 20A. The drive unit 40 may also be provided on both the first elastic portion 10A and the second elastic portion 20A. Furthermore, the drive unit 40 is provided on the side of the first elastic portion 10A opposite the space WZ (corresponding to the first space W1) (the first support member 10B side). However, this is not limited thereto. The drive unit 40 may also be provided on the space WZ side (the intermediate member 30 side). The drive unit 40 may also be provided on the space WZ side (the intermediate member 30 side) of the second elastic portion 20A.

[0191] 13 and 14 , in the present embodiment, the adjustment unit 50 is ring-shaped, is provided on the second elastic portion 20A, and adjusts the resonance frequency of the second elastic portion 20A. In the present embodiment, the adjustment unit 50 is arranged so as to be housed inside the second support member 20B (inside the ring shape). Here, being housed does not necessarily mean being arranged lower than the second support member 20B in the Z-axis direction, but may also be arranged higher.

[0192] In this embodiment, the adjustment unit 50 makes the resonance frequencies of the first member 10 and the second member 20 as equal as possible, thereby improving the driving efficiency of the fluid control device 1.

[0193] In this embodiment, the adjustment unit 50 is a ring-shaped plate made of metal, but of course, this is not limited to this and it may be circular or rectangular, or it may be made of resin. Also, in this embodiment, the adjustment unit 50 is configured to be elastically deformable, but of course, this is not limited to this and it may be a rigid body.

[0194] The adjustment unit 50 may also be formed, for example, from a potting material formed by potting processing. Potting materials include, but are not limited to, various resins such as urethane resin, epoxy resin, and silicone resin, and various metals such as solder. The adjustment unit 50 may also be formed by other methods such as coating, screen printing, and sputtering. In this case, the adjustment unit 50 is similarly formed from various resins, various metals, and the like.

[0195] In this embodiment, the adjustment unit 50 and the second elastic unit 20A are bonded (adhered) with a pressure-sensitive adhesive or adhesive, but this is not limited to this and laser welding or the like may also be used. Examples of adhesives include, but are not limited to, ultraviolet-curing and solvent-based adhesives. Examples of adhesives include, but are not limited to, rubber-based, acrylic-based, and silicone-based adhesives.

[0196] In the present embodiment, the thickness of the adjustment unit 50 in the Z-axis direction is different from the thickness of the drive unit 40 in the Z-axis direction, but of course, this is not limited to this and they may be the same. In the present embodiment, the thickness of the adjustment unit 50 in the Z-axis direction is different from the thickness of the second elastic unit 20A in the Z-axis direction, but of course, this is not limited to this and they may be the same.

[0197] Furthermore, in this embodiment, one adjustment unit 50 is provided in the second elastic portion 20A, but of course, this is not limited thereto and two or more adjustment units may be provided. Also, in this embodiment, the adjustment unit 50 is provided in the second elastic portion 20A, but of course, this is not limited thereto and the adjustment unit 50 may be provided in the first elastic portion 10A. It may also be provided in both the first elastic portion 10A and the second elastic portion 20A. Furthermore, the adjustment unit 50 is provided on the side of the second elastic portion 20A opposite the space WZ (the second support member 20B side), but of course, this is not limited thereto and the adjustment unit 50 may be provided on the space WZ side (the intermediate member 30 side). Furthermore, the adjustment unit 50 may be provided on the space WZ side (the intermediate member 30 side) of the first elastic portion 10A. Details will be described later. Also, while the adjustment unit 50 is provided separately from the second elastic portion 20A, of course, this is not limited thereto and the adjustment unit 50 may be provided integrally therewith.

[0198] <Explanation of Operation> Next, a typical operation of the fluid control device 1Z will be described.

[0199] When an input voltage (such as a sine wave, triangular wave, rectangular wave, sawtooth wave, etc., hereinafter collectively referred to as a sine wave, etc.) is applied to the drive unit 40, the first elastic part 10A bends and deforms upward or downward, and the second elastic part 20A resonates as the first elastic part 10A vibrates, and when the first elastic part 10A bends and deforms upward, the second elastic part 20A bends and deforms downward, and when the first elastic part 10A bends and deforms downward, the second elastic part 20A bends and deforms upward.

[0200] When the first elastic member 10A bends upward and the second elastic member 20A bends downward, the space WZ inside the housing 100 expands, and the pressure in the space WZ becomes lower than the pressure outside. This causes fluid to flow from the outside into the space WZ through the suction hole 2021A. At this time, the first check valve 10C provided in the discharge hole 1021A is closed due to the pressure difference between the outside and the inside of the space WZ.

[0201] When the first elastic member 10A bends downward and the second elastic member 20A bends upward, the space WZ inside the housing 100 contracts, and the pressure inside the space WZ becomes greater than the pressure outside. This causes the fluid to be discharged from the space WZ to the outside through the discharge hole 1021A. At this time, the first check valve 10C provided in the discharge hole 1021A opens due to the pressure difference between the outside and the inside of the space WZ.

[0202] <Manufacturing Apparatus and Manufacturing Method of Fluid Control Device 1Z> Next, a manufacturing apparatus 90Z and a manufacturing method of the fluid control device 1Z will be described.

[0203] FIG. 15 is a diagram showing a manufacturing apparatus 90Z for manufacturing a fluid control device 1Z according to the fifth embodiment.

[0204] As shown in FIG. 15, a manufacturing apparatus 90Z includes a diaphragm producing section 91Z, a first measuring section 92Z, an assembling section 93Z, a second measuring section 94Z, and a control device 95Z.

[0205] First, the diaphragm generating unit 91Z prepares the first member 10, the second member 20, the intermediate member 30, and the drive unit 40, forms the drive unit 40 at a predetermined position on the first elastic member 10A (for example, adhesively fixes the drive unit 40 to the first elastic member 10A), and assembles them to generate a pre-diaphragm. Here, the pre-diaphragm refers to the configuration of the fluid control device 1Z excluding the adjustment unit 50. Then, the diaphragm generating unit 91Z sequentially passes the generated pre-diaphragms to the first measuring unit 92Z.

[0206] Next, the first measuring unit 92Z applies an input voltage (such as a sine wave) to the pre-diaphragm driver 40 received from the diaphragm generator 91Z to vibrate the pre-diaphragm. The first measuring unit 92Z then measures the frequency characteristics (resonance frequency) and amplitude characteristics of the pre-diaphragm.

[0207] The first measuring unit 92Z also outputs information on the measured frequency characteristics and amplitude characteristics to the control device 95Z. The first measuring unit 92Z then sequentially passes the pre-diaphragms for which measurement has been completed to the assembling unit 93Z.

[0208] In this embodiment, the first measuring unit 92Z is ​​composed of, for example, a Doppler displacement meter, but of course it is not limited to this and may be composed of any device that can measure the frequency characteristics and amplitude characteristics of the pre-diaphragm.

[0209] Next, in this embodiment, the assembly unit 93Z fixes the adjustment unit 50 to the second elastic portion 20A side of the pre-diaphragm handed over from the first measuring unit 92Z, thereby assembling the fluid control device 1. Then, the assembly unit 93Z hands over the assembled fluid control device 1Z to the second measuring unit 94Z.

[0210] Next, the second measuring unit 94Z applies an input voltage (such as a sine wave) to the driving unit 40 of the fluid control device 1Z handed over from the assembly unit 93Z to vibrate the first elastic member 10A and the second elastic member 20A. Then, the second measuring unit 94 measures the frequency characteristics (resonance frequency) and amplitude characteristics of the first elastic member 10A.

[0211] Moreover, the second measuring unit 94Z outputs information on the measured frequency characteristics and amplitude characteristics to the control device 95Z.

[0212] The control device 95Z comprehensively controls the entire manufacturing apparatus 90Z. The control device 95Z has a control unit and a storage unit. The control unit is configured, for example, by a CPU (Central Processing Unit) or the like. The storage unit includes a volatile memory used as a work area for the control unit and a non-volatile memory for storing various data, programs, etc. The control device 95Z may be configured by a general-purpose device such as a PC, or may be configured by a device dedicated to this manufacturing apparatus 90Z.

[0213] The control device 95Z determines whether the desired frequency characteristics (resonance frequency) and amplitude characteristics have been obtained based on the frequency characteristics (resonance frequency) and amplitude characteristics of the fluid control device 1Z acquired from the second measuring unit 94Z. If the desired frequency characteristics (resonance frequency) and amplitude characteristics have not been obtained, the control unit again issues a command to the assembling unit 93Z to have the assembling unit 93Z again form the adjustment unit 50 on the second elastic portion 20A.

[0214] <How much of an adjustment section should be formed in the second elastic section?> Next, how much of an adjustment section 50 should be formed in the second elastic section will be described. Fig. 16 shows the displacement amount of the fluid control device 1Z, where (A) is a diagram showing the displacement amount of the fluid control device 1Z not provided with the adjustment section 50, and (B) is a diagram showing the displacement amount of the fluid control device 1Z provided with the adjustment section 50. Fig. 17 also shows the impedance and phase angle of the fluid control device 1Z, where (A) is a diagram showing the impedance and phase angle of the fluid control device 1Z not provided with the adjustment section 50, and (B) is a diagram showing the impedance and phase angle of the fluid control device 1Z provided with the adjustment section 50.

[0215] As shown in Fig. 16A, when the adjustment unit 50 is not provided, the amount of displacement of the second elastic portion 20A, which is on the opposing side, is smaller than the amount of displacement of the first elastic portion 10A, which is on the driving unit 40 side. In contrast, as shown in Fig. 16B, when the adjustment unit 50 is provided, the amount of displacement of the second elastic portion 20A, which is on the opposing side, becomes larger than the amount of displacement of the first elastic portion 10A, which is on the driving unit 40 side. Furthermore, the amount of displacement of the first elastic portion 10A also becomes larger.

[0216] That is, the total displacement of the first elastic member 10A and the second elastic member 20A is the displacement of the space WZ. By providing the adjustment member 50, the displacement of the first elastic member 10A and the second elastic member 20A can be increased, thereby making it possible to increase the displacement of the space WZ compared to when the adjustment member 50 is not provided.

[0217] Furthermore, as shown in FIG. 17(A), when the adjustment unit 50 is not provided, there are two peaks where the impedance is low (there are two peaks in the phase angle). The reason for this is that a resonance point on the drive unit 40 side and a resonance point on the opposite side appear. As a result, they interfere with each other and the desired characteristics cannot be obtained. On the other hand, as shown in FIG. 17(B), when the adjustment unit 50 is provided, there is only one peak in the phase angle. This allows the drive unit 40 side and the opposite side to undergo large displacement at the same frequency, thereby increasing the amount of displacement in the space WZ.

[0218] Here, the amount (thickness) of the adjustment portion 50 will be described. First, the amount of the adjustment portion 50 is changed in advance, and the extent to which the resonant frequency of the fluid control device 1Z changes when that amount of adjustment portion 50 is formed is measured. As a result, the relationship between the amount of the adjustment portion 50 and the rate of change in the resonant frequency of the fluid control device 1Z is statistically calculated.

[0219] Then, the difference between the resonance frequency of the first elastic portion 10A and the resonance frequency of the second elastic portion 20A is calculated, and the amount and shape of the adjustment portion 50 for filling this difference are determined based on the above relationship (for example, the amount and shape of the adjustment portion 50 are determined so as to change FIG. 16(A) to FIG. 16(B) and FIG. 17(A) to FIG. 17(B)). Note that the amount (thickness) of the adjustment portion 50 is increased as the difference between the resonance frequency of the first elastic portion 10A and the resonance frequency of the second elastic portion 20A increases.

[0220] The processing of the control device 95Z will be specifically described using an example. The control device 95Z pre-stores the relationship between the amount (thickness) of the adjustment unit 50 and the rate of change of the resonant frequency of the fluid control device 1Z. The control device 95Z acquires the resonant frequency (frequency characteristics) of the first elastic member 10A and the resonant frequency (frequency characteristics) of the second elastic member 20A from the first measurement unit 92Z (see FIGS. 16 and 17).

[0221] Next, the control device 95Z calculates the difference between the resonance frequency of the first elastic portion 10A and the resonance frequency of the second elastic portion 20A (see FIGS. 16 and 17). The control device 95Z then determines the amount (thickness) and shape of the adjustment portion 50 based on the relationship between the amount (thickness) and shape of the adjustment portion 50 and the rate of change of the resonance frequency, as well as the difference in the resonance frequencies. The control device 95Z then notifies the assembly unit 93Z of information regarding the amount and shape of the adjustment portion 50 to be formed in the second elastic portion 20A, and causes the assembly unit 93Z to form the adjustment portion 50.

[0222] In this embodiment, the case where the second elastic portion 20A is formed has been described, but of course the present invention is not limited to this, and the first elastic portion 10A may also be formed.

[0223] As described above, this embodiment includes a housing 100 including a first member 10 including a first elastic portion 10A that is an elastic body, and a second member 20 including a second elastic portion 20A that is an elastic body and that forms a space WZ through which a fluid flows between the first member 10 and the second member 20; a drive unit 40 provided in at least one of the first elastic portion 10A or the second elastic portion 20A and elastically deforming at least one of the first elastic portion 10A or the second elastic portion 20A; and an adjustment unit 50 provided in at least one of the first elastic portion 10A or the second elastic portion 20A and adjusting the resonance frequency of at least one of the first elastic portion 10A or the second elastic portion 20A. In other words, since the adjustment unit 50 is provided in at least one of the first elastic portion 10A or the second elastic portion 20A, it is possible to make the resonance frequencies of the first member 10 and the second member 20 as equal as possible. This improves the drive efficiency of the fluid control device 1Z.

[0224] Furthermore, it is possible to improve the driving efficiency of the fluid control device 1Z, thereby making it possible to reduce the size and thickness of the driving unit 40. Therefore, when the fluid control device 1Z is worn by a user, it is possible to reduce the discomfort felt by the user when wearing the fluid control device 1Z.

[0225] In this embodiment, the drive unit 40 is provided on the first elastic member 10A side, and the adjustment unit 50 is provided on the second elastic member 20A side. In other words, by providing the drive unit 40 and the adjustment unit 50 on different members, the degree of freedom (shape, etc.) when providing the adjustment unit 50 increases, making it possible to provide the adjustment unit 50 with a more appropriate shape, etc. This can further improve the drive efficiency of the fluid control device 1Z.

[0226] Furthermore, by providing the drive unit 40 on the first elastic member 10A side and the adjustment unit 50 on the second elastic member 20A side, the fluid control device 1Z can be made smaller and thinner. In other words, if the adjustment unit 50 were provided on the first elastic member 10A side, it would be necessary to secure a space for the adjustment unit 50 in advance, which would increase the size of the fluid control device in the width direction (X-axis or Y-axis direction) and height direction (Z-axis direction). However, in this embodiment, the adjustment unit 50 is arranged to be housed within the second support member 20B, so the fluid control device 1Z can be made smaller and thinner than the fluid control device 1Z.

[0227] In this embodiment, the drive unit 40 is provided only on the first elastic portion 10A side, which reduces the cost of installing the drive unit 40 compared to when the drive unit 40 is provided on the second elastic portion 20A side.

[0228] In this embodiment, the drive section 40 and the first elastic section 10A are bonded together with a thermosetting resin, which provides strength against external stimuli such as impacts.

[0229] In this embodiment, the adjustment unit 50 and the second elastic unit 20A are separate members. This makes it possible to attach various adjustment units 50 to the second elastic unit 20A based on the measured resonance frequency, thereby improving workability when manufacturing the fluid control device 1Z. Furthermore, the adjustment unit 50 and the second elastic unit 20A (on the space WZ side or the opposite side to the space W) may be integrally formed. This makes it possible to omit the work step of attaching the adjustment unit 50 to the second elastic unit 20A, thereby improving workability when manufacturing the fluid control device 1Z.

[0230] In this embodiment, the first support member 10B is formed to have higher rigidity than the first elastic portion 10A, and the second support member 20B is formed to have higher rigidity than the second elastic portion 20A. In other words, even if the first elastic portion 10A and the second elastic portion 20A are elastically deformed, the first opposing portion 102A and the second opposing portion 202A can be fixed by the intermediate member 30 so as to prevent elastic deformation. This increases the amount of deformation of the first elastic deformation portion 101A and the second elastic deformation portion 201A.

[0231] In this embodiment, the first elastic deformation portion 101A has a first groove portion, and the second elastic deformation portion 201A has a second groove portion 2011A. This makes it easier for the first elastic deformation portion 101A and the second elastic deformation portion 201A to be elastically deformed by the driving portion 40, and the amount of change in volume of the space W can be increased.

[0232] Furthermore, in this embodiment, the first support member 10B has a first support recess 102B in which wiring for a drive signal (voltage) to the drive unit 40 is arranged. This makes it possible to make the first support member 10B more compact and to prevent the wiring from protruding from the outermost surface of the first support member 10B. Note that the wiring is not particularly limited, and may be, for example, an FPC (Flexible Printed Circuits) or a general wire cable.

[0233] Furthermore, in this embodiment, the intermediate member 30 has a protrusion 302 that is provided at a position facing the first opposing recess 1022A and the second opposing recess 2022A in the Z-axis direction, protrudes toward the opposite side of the space W, and serves as a terminal for inputting a signal equivalent to GND. The protrusion 302 also has a through-hole 302A at a position that does not face the first member 10 and the second member 20 in the Z-axis direction. This allows the entire fluid control device 1 to be made thinner in the Z-axis direction. Of course, the function of the terminal for inputting a signal equivalent to GND does not have to be provided on the protrusion 302, but may be on the first support member 10B, the second support member 20B, or the like.

[0234] <Modification 5> Next, Modification 5 of the present technology will be described. In the present embodiment, the adjustment unit 50 of the fluid control device 1Z has a ring shape, but of course, this is not limited to this and may have a circular shape. FIG. 18 is a diagram showing a modification of the present technology, in which (A) is a partially exploded view of the fluid control device 1A, (B) is a partially exploded view of the fluid control device 1B, (C) is a partially exploded view of the fluid control device 1C, (D) is a partially exploded view of the fluid control device 1D, (E) is a partially exploded view of the fluid control device 1E, and (F) is a partially exploded view of the fluid control device 1F. Descriptions of configurations similar to those of the above-described embodiments will be omitted or simplified.

[0235] 18A, the adjustment unit 50A of the fluid control device 1A has a circular shape when viewed from the Z-axis direction. In this embodiment, the thickness of the adjustment unit 50A in the Z-axis direction is constant, but this is not limited thereto, and the adjustment unit 50A may be provided so that some portions are thicker or thinner.

[0236] In addition, in this embodiment, the thickness of the adjustment unit 50A in the Z-axis direction is set to be thicker than the thickness of the drive unit 40 in the Z-axis direction, but of course this is not limited to this, and the thickness may be the same, or it may be formed to be thinner than the thickness of the drive unit 40.

[0237] 18(B), the adjustment unit 50B of the fluid control device 1B has a double circle shape when viewed from the Z-axis direction. That is, the adjustment unit 50B has two ring-shaped portions with different diameters, with the smaller-diameter ring-shaped adjustment unit being provided inside the larger-diameter ring-shaped adjustment unit. While the adjustment unit 50B has a double circle shape in this embodiment, this is not necessarily limited thereto, and the adjustment unit 50B may have a triple circle shape. In this embodiment, the thickness of the adjustment unit 50B in the Z-axis direction is constant, but this is not necessarily limited thereto, and the adjustment unit 50B may have a thicker or thinner portion.

[0238] In addition, in this embodiment, the thickness of the adjustment unit 50B in the Z-axis direction is set to be thicker than the thickness of the drive unit 40 in the Z-axis direction, but of course this is not limited to this, and the thickness may be the same, or it may be formed to be thinner than the thickness of the drive unit 40.

[0239] 18(C), the adjustment unit 50C of the fluid control device 1C has a hexagonal shape when viewed from the Z-axis direction. In this embodiment, the adjustment unit 50C has a hexagonal shape, but of course, this is not limited thereto and the adjustment unit 50C may have a triangular or pentagonal shape. In this embodiment, the thickness of the adjustment unit 50C in the Z-axis direction is constant, but of course, this is not limited thereto and the adjustment unit 50C may be provided so that some portions are thicker or thinner.

[0240] In addition, in this embodiment, the thickness of the adjustment unit 50C in the Z-axis direction is set to be thicker than the thickness of the drive unit 40 in the Z-axis direction, but of course this is not limited to this, and the thickness may be the same, or it may be formed to be thinner than the thickness of the drive unit 40.

[0241] 18(D), the adjustment unit 50D of the fluid control device 1D is roughly X-shaped when viewed from the Z-axis direction. That is, the adjustment unit 50D has a shape in which an adjustment unit extending in one direction of the XY plane intersects with an adjustment unit extending in the other direction. In this embodiment, the angle of intersection is approximately 90 degrees, but of course, this is not limited to this and may be 45 degrees, for example. In this embodiment, the thickness of the adjustment unit 50D in the Z-axis direction is constant, but of course, this is not limited to this and the adjustment unit 50D may be provided so that some portions are thicker or thinner.

[0242] In addition, in this embodiment, the thickness of the adjustment unit 50D in the Z-axis direction is set to be thicker than the thickness of the drive unit 40 in the Z-axis direction, but of course this is not limited to this, and the thickness may be the same, or it may be formed to be thinner than the thickness of the drive unit 40.

[0243] 18(E), the adjustment unit 50E of the fluid control device 1E has a circular shape with recesses that radiate from the center when viewed in the Z-axis direction. That is, the adjustment unit 50E is formed in a circular shape as a whole, with a recess provided on the second elastic member 20A side. The recess is recessed from the second elastic member 20A side toward the opposite side of the space W, and is formed radially from the center when viewed in the Z-axis direction. In this embodiment, the thickness of the adjustment unit 50E in the Z-axis direction is constant, but this is not limited thereto, and the adjustment unit 50E may be formed so that some portions are thicker or thinner.

[0244] In addition, in this embodiment, the thickness of the adjustment unit 50E in the Z-axis direction is set to be thicker than the thickness of the drive unit 40 in the Z-axis direction, but of course this is not limited to this, and the thickness may be the same, or it may be formed to be thinner than the thickness of the drive unit 40.

[0245] As shown in FIG. 18(F), the adjustment unit 50F of the fluid control device 1F has a circular shape with multiple holes formed therein when viewed from the Z-axis direction. In this embodiment, the adjustment unit 50F has multiple holes formed therein that penetrate the circle in the Z-axis direction and are point-symmetrical within the circle. While the adjustment unit 50F has a circular shape in this embodiment, the shape is not limited to this and may be rectangular. While the number of holes in this embodiment is five, the number is not limited to this and may be one, six, or more. While the shape of the holes in this embodiment is circular, the shape is not limited to this and may be rectangular. In this embodiment, the thickness of the adjustment unit 50F in the Z-axis direction is constant, but the thickness is not limited to this and may be thicker or thinner in some areas.

[0246] In addition, in this embodiment, the thickness of the adjustment unit 50F in the Z-axis direction is set to be thicker than the thickness of the drive unit 40 in the Z-axis direction, but of course this is not limited to this, and the thickness may be the same, or it may be formed to be thinner than the thickness of the drive unit 40.

[0247] As described above, since the adjustment portion can be formed in various shapes, the variations for making the volume change of the space W larger can be increased.

[0248] <Sixth Embodiment> Next, a sixth embodiment of the present technology will be described. Fig. 19 is an exploded perspective view showing a fluid control device 1' according to the sixth embodiment of the present technology, and Fig. 20 is a diagram showing the fluid control device 1', where (A) is a cross-sectional view of the fluid control device 1' and (B) is a perspective view of an intermediate member 30'. Below, configurations different from the fifth embodiment will be mainly described, and configurations similar to those in the fifth embodiment will be assigned the same reference numerals, and descriptions thereof will be omitted or simplified.

[0249] The fluid control device 1 ′ includes a first member 10 ′, a second member 20 ′, an intermediate member 30 ′, and a drive unit 40 .

[0250] The first member 10′ has a first elastic portion 10A′ and a first support member 10B. The first elastic portion 10A′ has a first elastic deformation portion 101A′, a first opposing portion 102A, and a protruding portion 1022A.

[0251] The protruding portion 1022A is provided on a part of the outer periphery of the first opposing portion 102A so as to protrude toward the opposite side of the space W (outside the space W). The protruding portion 1022A has a through hole 10221A at a position that does not face the first support member 10B, the intermediate member 30′, or the second member 20′ in the Z-axis direction. In this embodiment, there are two through holes 10221A, but this is not limiting. Furthermore, the shape of the through hole 10221A is circular or elliptical, but this is not limiting.

[0252] The protrusion 1022A is provided so as to face at least a part of the first support recess 102B in the Z-axis direction.

[0253] That is, the first member 10' differs in that it is provided with a protrusion 1022A and does not have the above-described first groove.

[0254] The second member 20' has a second elastic portion 20A' and a second support member 20B'. The second support member 20B' is ring-shaped and sandwiches the second elastic portion 20A' between the second support member 20B' and the intermediate member 30'. The second support member 20B' has a step portion 202B formed along the circumferential direction of the inner periphery of the ring shape.

[0255] The cross section of the step portion 202B when viewed from the X-axis direction or the Y-axis direction is approximately L-shaped. In this embodiment, the step portion 202B is provided at a position facing the second elastic deformation portion 201A and the outer periphery of the drive portion 40 when viewed from the Z-axis direction.

[0256] That is, the second member 20' differs in that a step portion 202B is provided and that the second elastic deformation portion 201A' does not have the second groove portion described above.

[0257] The intermediate member 30' has a space forming portion 301' and an adjustment portion 50' formed on the inner circumferential side (space W side) of the space forming portion 301'.

[0258] The space forming portion 301' has a first recess 301A' that connects the discharge hole 1021A side and the space W at a position opposite the discharge hole 1021A in the Z-axis direction, and a second recess 301B' that connects the suction hole 2021A side and the space W at a position opposite the suction hole 2021A in the Z-axis direction.

[0259] The first recess 301A' is formed in a rectangular shape so as to recess from the inside to the outside of the space forming portion 301'. The fluid is discharged from the discharge hole 1021A through the first recess 301A' to the outside of the space W. In this embodiment, the first recess 301A' is formed in a rectangular shape, but of course, the shape is not limited to this and may be V-shaped.

[0260] The second recess 301B' is formed in a roughly V-shape so as to recess from the inside to the outside of the space forming portion 301'. The fluid is drawn into the space W from the suction hole 2021A via the second recess 301B'. In this embodiment, the second recess 301B' is formed in a V-shape, but of course, the shape is not limited to this and may be rectangular.

[0261] The adjustment portion 50' is formed on the inner circumferential side of the space forming portion 301' and is provided so as to come into contact with the second elastic portion 20A (see FIG. 9A). In this embodiment, the adjustment portion 50' is formed integrally with the space forming portion 301', but of course, this is not limited to this. Furthermore, the thickness of the adjustment portion 50' in the Z-axis direction is provided to be thinner than the thickness of the space forming portion 301'. This prevents the space W from being sealed by the adjustment portion 50'. Furthermore, the adjustment portion 50' has a roughly elliptical shape when viewed in the Z-axis direction, but of course, this is not limited to this. Furthermore, in this embodiment, one adjustment portion 50' is provided at each position facing one side of the intermediate member 30' (a total of four adjustment portions), but of course, this is not limited to this and the number of adjustment portions may be two.

[0262] That is, the intermediate member 30' differs in that it is provided with an adjustment portion 50' and that it does not have the above-mentioned protrusion.

[0263] As described above, in this embodiment, the intermediate member 30' is provided with the adjustment portion 50'. This allows the thickness of the fluid control device 1' in the Z-axis direction to be further reduced. Furthermore, in this embodiment, the first member 10' has a protrusion 1022A. The material of the protrusion 2022A is not particularly limited, and may be, for example, an elastic body.

[0264] In this embodiment, the first elastic portion 10A' (first elastic deformation portion 101A') and the second elastic portion 20A' (second elastic deformation portion 201A') are not provided with grooves, and have surfaces parallel to the XY plane. However, this is not a limitation, and grooves may be provided. This reduces the stress applied to the drive portion 40. Furthermore, by providing grooves, the resonance frequency of the fluid control device 1' itself shifts to a lower frequency. Based on this, it is possible to determine whether or not to provide grooves.

[0265] Furthermore, in this embodiment, the second member 20' has the above-described step portion 202B. This allows for additional frequency adjustment in addition to the adjustment portion 50'. In other words, without the step portion 202B, the second facing portion 202A and the second support member 20B' would be stacked together like flat plates, resulting in a structure in which the second facing portion 202A is difficult to bend. However, by providing the step portion 202B, the second facing portion 202A becomes easier to bend, allowing for frequency adjustment.

[0266] <Variation 6> Next, a variation of the sixth embodiment of the present technology will be described. Fig. 21 is a cross-sectional view of a fluid control device 1'' according to a variation of the sixth embodiment of the present technology. Hereinafter, configurations different from the sixth embodiment will be mainly described, and configurations similar to those in the sixth embodiment will be denoted by the same reference numerals, and description thereof will be omitted or simplified.

[0267] As shown in FIG. 21, the fluid control device 1'' differs in that the adjustment section 50'' of the intermediate member 30'' is arranged so as to come into contact with the first elastic section 10A side on which the drive section 40 is provided.

[0268] As described above, in this embodiment, the adjustment portion 50'' is provided on the intermediate member 30''. This allows the thickness of the fluid control device 1'' in the Z-axis direction to be further reduced.

[0269] <Other Modifications> In the above-described embodiment, the adjustment unit 50 is provided on the space WZ side of the second elastic member 20A or on the side opposite to the space WZ, on the space WZ side of the first elastic member 10A, but of course this is not limited to this, and the adjustment unit 50 may be provided on the first elastic member 10A side either integrally with or separately from the first elastic member 10A.

[0270] In other words, the adjustment unit 50 may be, for example, arranged in a ring shape around the drive unit 40 of the first elastic unit 10A on which the drive unit 40 is provided, or may be arranged between the drive unit 40 and the first elastic unit 10A in the Z-axis direction, or may be provided on the opposite side of the drive unit 40 from the first elastic unit 10A in the Z-axis direction (on the top surface side of the drive unit 40).

[0271] Furthermore, in this embodiment, only one drive unit 40 is provided in the first elastic unit 10A, but of course, this is not limited to this, and an additional drive unit 40 may be provided in the second elastic unit 20A, which can further increase the amount of change in the volume of the space WZ.

[0272] <Variation 1 of the first check valve> In the present embodiment, the reed valve 101C and the first elastic portion 10A are in direct contact with each other, but of course this is not limited to this, and a spacer 103C may be further provided between the reed valve 101C and the first elastic portion 10A.

[0273] 22A and 22B are diagrams showing a first modified example of the first check valve 10C', where (A) is a diagram showing the open state, (B) is a diagram showing the closed state, and (C) is a cross-sectional view. The following mainly describes the configurations that differ from the fifth embodiment, and the same reference numerals are used for the same configurations as the fifth embodiment, and the description thereof will be omitted or simplified.

[0274] The first check valve 10C' includes a reed valve 101C, a valve holding portion 102C, and a spacer 103C having a predetermined height in the Z-axis direction. The spacer 103C faces the reed valve 101C (second reed valve portion 1012C) in the Z-axis direction and is provided between the first elastic portion 10A and the reed valve 101C.

[0275] As shown in Figure 22 (C), when the fluid control device 1 is not operating (when the space WZ is neither expanding nor contracting), a gap G is formed between the reed valve 101C (first reed valve portion 1011C) and the first elastic portion 10A (discharge hole 1021A).

[0276] 22(B), when the space WZ expands and the first check valve 10C' closes, the reed valve 101C and the first elastic portion 10A come into contact at an angle, which makes it possible to avoid direct collision between the surfaces of the first elastic portion 10A and the reed valve 101C, thereby reducing the contact noise between the first elastic portion 10A and the reed valve 101C.

[0277] In other words, the first check valve 10C' opens and closes in synchronization with the expansion and contraction of the space WZ, and there was a risk that the first check valve 10C' would be damaged by being struck at high speed against the first elastic portion 10A in which the discharge hole 1021A is formed. However, by providing a spacer 103C between the reed valve 101C and the first elastic portion 10A, it is possible to soften the impact of the collision and improve durability.

[0278] Furthermore, as shown in Figure 22 (A), when the space WZ contracts and the first check valve 10C' opens, the first check valve 10C' is in oblique contact with the first elastic portion 10A, so that the first check valve 10C' can be easily opened.

[0279] In this embodiment, the spacer 103C is made of an elastic material such as rubber, but of course it is not limited to this and may be made of resin or the like. The spacer 103C and the reed valve 101C may be bonded together with an adhesive or the like. The height of the spacer 103C in the Z-axis direction is approximately 5 to 20 μm, but of course it is not limited to this.

[0280] <Modification 2 of the First Check Valve> In the above embodiment, the first check valve 10C' has the spacer 103C, but of course, this is not limited to this. Fig. 23 is a cross-sectional view of Modification 2 of the first check valve 10C.

[0281] The first elastic portion 10A''' of the fluid control device 1''' has an elastic step portion 10Aa that is recessed in the Z-axis direction. The elastic step portion 10Aa is provided so as to face the reed valve 101C (first reed valve portion 1011C) in the Z-axis direction. In other words, as shown in FIG. 23 , when the fluid control device 1 is not driven (when the space W is neither expanded nor contracted), the elastic step portion 10Aa forms a gap G' between the reed valve 101C (first reed valve portion 1011C) and the first elastic portion 10A (discharge hole 1021A).

[0282] This also makes it possible to cushion the impact of a collision by providing a gap G' between the reed valve 101C and the first elastic portion 10A''', due to the elastic step portion 10Aa, and thereby improve durability. Furthermore, when the space W contracts and the first check valve 10C opens, the first check valve 10C' can be easily opened because it is in oblique contact with the first elastic portion 10A'".

[0283] <Example of use> Figure 24 is a diagram showing an example of use of the fluid control device 1, where (A) is a diagram showing a tactile presentation device 1000 with a cuff K attached to the fluid control device 1Z, (B) is a diagram showing the tactile presentation device 1000 being used as a switch, (C) is a diagram showing the tactile presentation device 1000 being worn by a user Y, (D) is a diagram showing the tactile presentation device 1000 being provided on a controller C, (E) is a diagram showing the tactile presentation device 1000 being attached to a doll N, and (F) is a diagram showing a scent being presented to a user Y by the fluid control device 1.

[0284] 24A, a fluid holding unit such as a cuff K may be further provided on the first check valve 10C side on the discharge side of the fluid control device 1Z. In this way, when the tactile presentation device 1000 is attached to the user Y, by driving the fluid control device 1Z, a desired tactile stimulus can be presented by contracting and inflating the cuff K.

[0285] As shown in FIG. 24B, the tactile presentation device 1000 may function as a button or a switch.

[0286] Furthermore, as shown in FIG. 24C, the above-described tactile presentation device 1000 may be attached to a finger F of a user Y to present a tactile stimulus to the user Y.

[0287] Furthermore, as shown in FIG. 24(D), the above-described tactile presentation device 1000 may be built into, for example, a game controller C or an information terminal device, and vibrations or tactile stimuli may be presented to the user.

[0288] Furthermore, as shown in FIG. 24(E), the above-described tactile presentation device 1000 may be built into a doll N or a robot, and the user may be presented with, for example, a feeling of heartbeat or breathing.

[0289] 24(F), a fragrance KR may be provided on the discharge side of the fluid control device 1Z to provide a predetermined fragrance to the user Y. In other words, when the fluid control device 1Z is contracted, air is discharged from the discharge side. The fragrance may be provided to the user by this discharged air.

[0290] The effects described in the present embodiment are merely examples and are not limiting, and other effects may also be achieved. Furthermore, it is possible to combine the respective characteristic features of each embodiment and each modified example.

[0291] The present technology may also be configured as follows: (1) A fluid control device including: a housing configured to be able to draw in and discharge the first fluid, the housing including a first member including a first elastic portion that is an elastic body, and a second member including a second elastic portion that is an elastic body and that forms a first space through which a first fluid flows between the first member and the second member; and a drive unit provided on at least one of the first elastic portion or the second elastic portion and elastically deforming at least one of the first elastic portion or the second elastic portion, the housing forming an accommodation space to accommodate the drive unit, and further including a storage unit configured to be able to draw in and discharge a second fluid different from the first fluid into the accommodation space. (2) The fluid control device according to (1) above, wherein the first member has a first discharge hole through which the first fluid is discharged from the first space when at least one of the first elastic portion or the second elastic portion is elastically deformed by the drive unit, and a first discharge check valve provided in the first discharge hole and allowing the first fluid discharged from the first discharge hole to pass. (3) The fluid control device according to (1) or (2) above, wherein the storage portion has a second discharge hole through which the second fluid is discharged from the storage space when at least one of the first elastic portion or the second elastic portion is elastically deformed by the drive unit, and a second discharge check valve provided in the second discharge hole and allowing the second fluid discharged from the second discharge hole to pass. (4) The fluid control device according to any one of (1) to (3) above, wherein the second member has a first suction hole that draws the first fluid into the first space when at least one of the first elastic portion or the second elastic portion is elastically deformed by the drive portion, and a first suction check valve that is provided in the first suction hole and allows the first fluid to pass through. (5) The fluid control device according to any one of (1) to (4) above, wherein the storage portion has a second suction hole that draws the second fluid into the storage space when at least one of the first elastic portion or the second elastic portion is elastically deformed by the drive portion, and a second suction check valve that is provided in the second suction hole and allows the second fluid to pass through.(6) The fluid control device according to any one of (1) to (5) above, wherein the drive unit has a first drive unit provided on the side of the first elastic portion opposite to the first space. (7) The fluid control device according to (6) above, wherein the drive unit further has a second drive unit provided on the side of the second elastic portion opposite to the first space. (8) The fluid control device according to (7) above, wherein the accommodating unit has a first accommodating portion that forms a first accommodating space that accommodates the first drive unit, and a second accommodating portion that forms a second accommodating space that accommodates the second drive unit. (9) The fluid control device according to any one of (1) to (8) above, wherein the drive unit is a piezoelectric element. (10) The fluid control device according to any one of (1) to (9), wherein the housing further has an outflow chamber forming a second space for accommodating a fluid containing the first fluid and the second fluid discharged by the drive unit. (11) The fluid control device according to (10), wherein the housing further has a holding space portion provided in the first member or the second member and forming a holding space for holding the first fluid drawn into the first space, and an exhaust valve provided in the outflow chamber for allowing the fluid drawn into the second space to pass to the holding space. (12) The fluid control device according to (11), wherein the housing further has a spatial connection portion forming a third space connecting the holding space portion and the outflow chamber via the exhaust valve. (13) The fluid control device according to (12), wherein the spatial connection portion is provided inside the housing. (14) The fluid control device according to (10), further comprising a fluid holding portion connected to the second space, holding the fluid, and elastically deforming. (15) The fluid control device according to (11), wherein the exhaust valve is a reed valve.(16) A fluid control device comprising: a housing configured to be able to suck in and expel the first fluid, the housing including a first member including a first elastic portion that is an elastic body; and a second member including a second elastic portion that is an elastic body and that forms a first space through which a first fluid flows between the first member and the second member; and a drive unit provided on at least one of the first elastic portion or the second elastic portion and elastically deforming at least one of the first elastic portion or the second elastic portion, the housing further having an outflow chamber that forms a second space to accommodate the first fluid ejected by the drive unit, and a holding space portion provided on the first member or the second member that forms a holding space to hold the first fluid sucked into the first space, the outflow chamber having an exhaust valve provided in the outflow chamber that allows the first fluid sucked into the second space to pass through the holding space. (17) The fluid control device according to (16) above, wherein the housing further has a spatial connection part that forms a third space that connects the holding space part and the outflow chamber via the exhaust valve. (18) The fluid control device according to (17) above, wherein the spatial connection part is provided inside the housing. (19) The fluid control device according to any one of (16) to (18) above, further comprising a fluid holding part that is connected to the second space, holds the first fluid, and is elastically deformable. (20) The fluid control device according to any one of (16) to (19) above, wherein the exhaust valve is a reed valve.

[0292] REFERENCE SIGNS LIST 1... fluid control device 10... first member 10A... first elastic portion 20... second member 20A... second elastic portion 30... intermediate member 40... drive portion 50... adjustment portion 60... accommodation portion W1... first space SW... accommodation space

Claims

1. A fluid control device comprising: a housing configured to be able to draw in and discharge the first fluid, including a first member including a first elastic portion that is an elastic body; and a second member including a second elastic portion that is an elastic body and that forms a first space through which a first fluid flows between the first member and the second member; and a drive unit provided on at least one of the first elastic portion or the second elastic portion and that elastically deforms at least one of the first elastic portion or the second elastic portion, wherein the housing forms an accommodation space to accommodate the drive unit, and further has a storage unit configured to be able to draw in and discharge a second fluid different from the first fluid into the accommodation space.

2. A fluid control device as described in claim 1, wherein the first member has a first discharge hole through which the first fluid is discharged from the first space when at least one of the first elastic portion or the second elastic portion is elastically deformed by the drive portion, and a first discharge check valve provided in the first discharge hole to allow the first fluid discharged from the first discharge hole to pass through.

3. A fluid control device as described in claim 1, wherein the storage section has a second discharge hole through which the second fluid is discharged from the storage space when at least one of the first elastic section or the second elastic section is elastically deformed by the drive section, and a second discharge check valve provided in the second discharge hole to allow the second fluid discharged from the second discharge hole to pass through.

4. A fluid control device as described in claim 1, wherein the second member has a first suction hole that draws the first fluid into the first space when at least one of the first elastic part or the second elastic part is elastically deformed by the driving part, and a first suction check valve that is provided in the first suction hole and allows the first fluid drawn in from the first suction hole to pass through.

5. A fluid control device as described in claim 1, wherein the storage section has a second suction hole through which the second fluid is drawn into the storage space when at least one of the first elastic section or the second elastic section is elastically deformed by the drive section, and a second suction check valve provided in the second suction hole to allow the second fluid drawn through the second suction hole to pass through.

6. A fluid control device according to claim 1, wherein the drive section has a first drive section provided on the opposite side of the first elastic section from the first space.

7. A fluid control device according to claim 6, wherein the drive section further comprises a second drive section provided on the opposite side of the second elastic section from the first space.

8. A fluid control device according to claim 7, wherein the accommodation section has a first accommodation section that forms a first accommodation space that accommodates the first drive section, and a second accommodation section that forms a second accommodation space that accommodates the second drive section.

9. A fluid control device according to claim 1, wherein the driving unit is a piezoelectric element.

10. A fluid control device according to claim 1, wherein the housing further has an outflow chamber that forms a second space for accommodating fluid containing the first fluid and the second fluid discharged by the driving unit.

11. A fluid control device as set forth in claim 10, wherein the housing further has a space holding part provided in the first member or the second member to form a holding space for holding the first fluid drawn into the first space, and the outflow chamber has an exhaust valve provided in the outflow chamber to allow the fluid drawn into the second space to pass through to the holding space.

12. A fluid control device according to claim 11, wherein the housing further has a space connection portion that forms a third space that connects the holding space portion and the outflow chamber via the exhaust valve.

13. A fluid control device according to claim 12, wherein the spatial connection portion is provided inside the housing.

14. A fluid control device according to claim 10, further comprising a fluid holding section connected to said second space, holding said fluid, and capable of elastic deformation.

15. A fluid control device according to claim 11, wherein the exhaust valve is a reed valve.

16. A fluid control device comprising: a housing configured to be able to suck in and expel the first fluid, the housing including a first member including a first elastic portion that is an elastic body, and a second member including a second elastic portion that is an elastic body and that forms a first space through which a first fluid flows between the first member and the second member; and a drive unit provided on at least one of the first elastic portion or the second elastic portion and elastically deforming at least one of the first elastic portion or the second elastic portion, the housing further comprising: an outflow chamber that forms a second space for accommodating the first fluid ejected by the drive unit; and a holding space portion provided on the first member or the second member that forms a holding space for holding the first fluid sucked into the first space, the outflow chamber having an exhaust valve provided in the outflow chamber that allows the first fluid sucked into the second space to pass through the holding space.

17. A fluid control device according to claim 16, wherein the housing further has a space connection portion that forms a third space that connects the holding space portion and the outflow chamber via the exhaust valve.

18. A fluid control device according to claim 17, wherein the spatial connection portion is provided inside the housing.

19. A fluid control device according to claim 16, further comprising an elastically deformable fluid holding portion connected to the second space and holding the first fluid.

20. A fluid control device according to claim 16, wherein the exhaust valve is a reed valve.

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