X-ray analysis device

Abstract

An X-ray analysis apparatus (100) comprises an X-ray tube (10), a fan (20), and a control device (80) that controls the X-ray tube and the fan. The X-ray tube emits X-rays. The fan cools the X-ray tube. The X-ray analysis apparatus has a sleep mode for entering a sleep state in which energization at least to the X-ray tube is cut off while energization to the control device is maintained. The control device performs transition control for causing the X-ray analysis apparatus to transition to the sleep state in accordance with a trigger signal. In the transition control, when the X-ray tube is energized, the control device cuts off the energization to the X-ray tube, and cuts off the energization to the fan after a predetermined time has elapsed after the energization to the X-ray tube is cut off.

Description

X-ray analyzer

[0001] The present disclosure relates to an X-ray analysis device, and more particularly to a technique for preventing deterioration of the X-ray analysis device.

[0002] In an X-ray analysis apparatus, if each component of the X-ray analysis apparatus is energized even when a sample is not being measured, just as when a sample is being measured, power is consumed unnecessarily.

[0003] As a measure to suppress such wasteful consumption of power, for example, Japanese Patent Laid-Open Publication No. 2000-65766 (Patent Document 1) discloses an X-ray analysis apparatus that goes into a sleep state when no sample measurement is being performed.

[0004] Japanese Patent Application Laid-Open No. 2000-65766

[0005] In X-ray analysis equipment, the filament inside the X-ray tube, which has been heated to a high temperature during sample measurement, gradually evaporates due to the heat. Therefore, if the X-ray tube is left at a high temperature, the heat will cause deterioration, and the filament will gradually thin and eventually break.

[0006] In conventional X-ray analysis devices that have a sleep mode, the user must manage the time and keep the fan running for a predetermined period of time to cool the X-ray tube, then turn the fan off and put the X-ray analysis device into a sleep mode.

[0007] Therefore, if a user mismanages the time and puts the X-ray analysis device into sleep mode before the X-ray tube has been sufficiently cooled, this could lead to deterioration of the X-ray tube. Also, the user may be burdened with having to manage the time and manually turn off the fan after a predetermined time has elapsed.

[0008] The present disclosure has been made to solve the above-mentioned problems, and its purpose is to prevent deterioration of the X-ray tube in an X-ray analysis apparatus while reducing the burden on the user.

[0009] An X-ray analysis apparatus according to one aspect of the present disclosure includes an X-ray tube, a fan, and a control device that controls the X-ray tube and the fan. The X-ray tube emits X-rays. The fan cools the X-ray tube. The X-ray analysis apparatus has a sleep mode in which the X-ray analysis apparatus enters a sleep state in which power is cut off to at least the X-ray tube while power is maintained to the control device. The control device performs transition control to transition the X-ray analysis apparatus to the sleep state in response to a trigger signal. In the transition control, if the X-ray tube is powered on, the control device cuts off power to the X-ray tube and cuts off power to the fan after a predetermined time has elapsed since power to the X-ray tube was cut off.

[0010] In the X-ray analysis apparatus disclosed herein, when a user performs an operation input to transition the X-ray analysis apparatus to a sleep state, the fan for cooling the X-ray tube continues to operate for a predetermined time, and then the fan is automatically turned off, and the X-ray analysis apparatus is put into a sleep state. Therefore, since the X-ray analysis apparatus can be put into a sleep state after the X-ray tube has been sufficiently cooled automatically, deterioration of the X-ray tube can be prevented while reducing the burden on the user.

[0011] It is a diagram showing the overall configuration of an X-ray analysis apparatus according to an embodiment. It is a diagram showing the detailed configuration of a measurement device in the X-ray analysis apparatus. It is a diagram showing the configuration of a control device in the X-ray analysis apparatus. It is a diagram showing a control circuit in the X-ray analysis apparatus. It is a flowchart showing the procedure of transition control of the X-ray analysis apparatus of the embodiment.

[0012] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The same or corresponding parts in the drawings are designated by the same reference numerals, and the description thereof will not be repeated. In the following, an X-ray fluorescence analyzer will be described as an example of an X-ray analyzer.

[0013] <Overall Configuration of X-ray Fluorescence Spectrometer> Fig. 1 is a diagram showing the overall configuration of an X-ray analysis device according to an embodiment. The X-ray analysis device 100 irradiates a sample to be analyzed with X-rays and measures fluorescent X-rays emitted from the sample to determine the types and amounts of elements contained in the sample. The X-ray analysis device 100 is, for example, an energy dispersive X-ray fluorescence spectrometer (EDX) or a wavelength-dispersive X-ray spectrometry (WDX).

[0014] 1 , the X-ray analysis apparatus 100 includes a base 5, a measurement device 30, a transport device 40, a locking device 50, a sample tray 51, a rack 52, and an evacuation tray 53. The measurement device 30 is provided on the base 5 and measures the types and amounts of elements contained in a sample. The measurement device 30 includes a sample chamber 106 and a measurement chamber 114. A sample to be measured is placed in the sample chamber 106. During sample measurement, primary X-rays before colliding with the sample and fluorescent X-rays emitted from the sample as a result of the collision of the primary X-rays are generated in the measurement chamber 114.

[0015] The sample container S is, for example, a container with a film on its analysis surface (bottom) where X-rays are irradiated, and contains a sample to be analyzed. The film is made of a resin composed of carbon atoms and hydrogen atoms, such as polypropylene or polypropylene terephthalate, or a resin composed of carbon atoms, hydrogen atoms, and oxygen atoms. The film is sufficiently thin, and the fluorescent X-rays emitted from these elements are weak, so the film has little effect on the X-ray analysis in the X-ray analysis device 100.

[0016] The sample container S can accommodate a variety of samples, such as solid samples, powder samples, and liquid samples. The top of the sample container S is open, and the inside of the sample container S may be an unsealed space.

[0017] The rack 52 is provided on the base 5 and has the sample tray 51 placed thereon. The sample tray 51 is provided on the rack 52 and stores sample containers S. The sample tray 51 mainly contains sample containers S to be analyzed or that have already been analyzed. The sample tray 51 is configured so that the user can pull it out from above the rack 52.

[0018] The locking device 50 is provided on the rack 52 and locks the sample tray 51 so that it cannot be pulled out from the rack 52. The locking device 50 fixes the sample tray 51 to the rack 52, for example, by inserting a pin (not shown) or engaging a stopper.

[0019] The locking device 50 is controlled by the control device 80. Therefore, the locking device 50 is controlled by the control device 80 and locks the sample tray 51 so that it cannot be pulled out from the rack 52.

[0020] The transport device 40 is provided movably above the sample tray 51 and the measuring device 30, and transports the sample container S from the sample tray 51 to the measuring device 30. The transport device 40 includes arms 41, 43 and a gripper 42. Hereinafter, as shown in FIG. 1 , the contact surface of the base 5 is defined as an XY plane consisting of the X-axis direction and the Y-axis direction, and the vertical direction is defined as the Z-axis direction. The transport device 40 is controlled by a control device 80.

[0021] The arm 41 is provided on the base 5 and configured to be movable in the X-axis direction. The arm 41 is moved in the X-axis direction by, for example, a motor (not shown) arranged inside the arm 41. The arm 41 moves in the X-axis direction in accordance with the control of the control device 80.

[0022] The arm 43 is provided on the arm 41 and is controlled by the control device 80, and is configured to be movable in the Y-axis direction and movable up and down in the Z-axis direction. The arm 43 is moved in the Y-axis direction by a motor (not shown), and in the Z-axis direction by an air cylinder (not shown), for example.

[0023] The gripper 42 is, for example, a robot hand, and is provided at the end of the arm 43. The gripper 42 has a plurality of fingers, and grips the sample container S by opening and closing the fingers. The number of fingers may be any number sufficient to grip the sample container. The gripper 42 grips the sample container S under the control of the control device 80.

[0024] The evacuation tray 53 is provided on the base 5 near the measuring device 30. The evacuation tray 53 is provided at a position different from that of the measuring device 30 and the sample tray 51. The sample container S being measured is temporarily placed on the evacuation tray 53 when, for example, the X-ray analysis device 100 is put into a sleep state.

[0025] The transport device 40 grips the sample container S accommodated in the sample tray 51 with the gripping part 42 and transports it to the measurement device 30. When the measurement of the sample in the sample container S is completed or when the measurement is interrupted, the transport device 40 transports the sample container S from the measurement device 30 to the sample tray 51 or the evacuation tray 53.

[0026] Specifically, when the measurement of the sample container S is completed or when the sample container S can be returned to its original position on the original sample tray 51, the transport device 40 may return the sample container S to its original position on the original sample tray 51. On the other hand, when the measurement of the sample container S is interrupted or when the sample container S cannot be returned to its original position on the original sample tray 51, the transport device 40 may transport the sample container S to the evacuation tray 53.

[0027] Fig. 2 is a diagram showing a detailed configuration of the measurement device 30 in the X-ray analysis device 100. As shown in Fig. 2, the X-ray analysis device 100 includes an X-ray tube 10, a fan 20, an input device 60, a display device 70, and a control device 80 in addition to the configuration shown in Fig. 1.

[0028] The measuring device 30 includes housings 102 and 112, a sample stage 104, an open / close lid 34, and a spinner 36. The housing 102 is placed on the upper surface of the sample stage 104 and forms a sample chamber 106 together with the sample stage 104. The housing 112 is placed on the lower surface of the sample stage 104 and forms a measurement chamber 114 together with the sample stage 104.

[0029] The space consisting of the sample chamber 106 and the measurement chamber 114 is airtightly enclosed by the housings 102, 112 and the open / close lid 34, and the sample chamber 106 and the measurement chamber 114 communicate with each other via a communication passage 110 provided in the sample stage 104. An opening 108 is formed in the sample stage 104.

[0030] The sample container S is transferred by the transfer device 40 from the sample tray 51 onto the spinner 36 on the sample stage 104. The spinner 36 is provided on the sample stage 104 and rotates the sample container S around the Z axis at the position of an opening 108 on the XY plane in order to change the position of the X-rays irradiating the sample or to agitate the sample in the sample container S. The spinner 36 is configured to be rotatable around a rotation axis in the Z-axis direction. An opening is formed in the spinner 36 to allow primary X-rays and fluorescent X-rays to pass through.

[0031] The spinner 36 has an opening in its center that is larger than the opening 108. The spinner 36 is driven by a motor (not shown) under the control of the control device 80. The spinner 36 rotates the sample container S around the Z-axis direction on the sample stage 104, with the sample container S positioned at the position of the opening 108. This makes it possible to change the measurement location within the same sample or to stir the sample in the sample container S.

[0032] The sample stage 104 may be provided with a turret in addition to the spinner 36. The turret is capable of mounting a plurality of sample containers S, and by rotating around the Z axis, the sample containers S can be sequentially supplied to the measurement position, that is, the opening 108. In this way, by switching the sample to be measured, it is possible to perform X-ray fluorescence analysis on a plurality of samples consecutively.

[0033] An opening 32 is formed in the housing 102 above the opening 108, and an opening / closing lid 34 is provided at the opening 32. The opening / closing lid 34 is in an open state when the sample container S is carried into or out of the sample chamber 106, and is in a closed state during measurement. The opening / closing lid 34 is configured to maintain airtightness within the sample chamber 106 and the measurement chamber 114 when in the closed state.

[0034] The X-ray tube 10 is provided outside the measurement chamber 114 so that a portion of it is exposed inside the measurement chamber 114 from an opening in the housing 112. The X-ray tube 10 generates X-rays and irradiates the analysis surface of the sample container S with primary X-rays. The X-ray tube 10 has a filament (not shown) and a target (not shown), and generates X-rays from the target by accelerating thermoelectrons generated from the filament with high voltage and causing them to collide with the target.

[0035] The X-ray tube 10 is controlled by the control device 80, and irradiates the sample container S with X-rays from the X-ray tube 10. The X-ray tube 10 also changes the amount of X-rays it emits according to the control of the control device 80.

[0036] The primary X-rays emitted by the X-ray tube 10 are irradiated through the opening 108 onto a measurement position of the sample in the sample container S. When the X-rays from the X-ray tube 10 are irradiated onto the sample in the sample container S, fluorescent X-rays are generated from the sample due to the photoelectric effect.

[0037] The detector 126 in the measuring device 30 is provided outside the measurement chamber 114 so that a portion of it is exposed to the measurement chamber 114 through an opening in the housing 112. The detector 126 is disposed on a wall surface of the housing 112 different from the X-ray tube 10, facing the sample container S, so that it can detect fluorescent X-rays emitted from the sample.

[0038] The detector 126 is controlled by the control device 80 and detects fluorescent X-rays emitted from the sample. For example, if the measurement device 30 is an EDX, the detector 126 may be, for example, a Si semiconductor detector, which converts incident X-rays into current pulses whose magnitude is proportional to the X-ray energy, thereby enabling simultaneous measurement of spectra over a wide energy range. Each element has its own specific energy. Therefore, the detector 126 can perform qualitative and quantitative analysis of the elements contained in the sample by detecting the energy and amount of the fluorescent X-rays.

[0039] More specifically, the energy of the fluorescent X-rays is generally expressed in terms of their wavelength. The amount of the fluorescent X-rays is generally expressed in terms of the number of fluorescent X-ray photons per unit time, and is also called the intensity of the fluorescent X-rays. The detection result from the detector 126 is typically expressed as an X-ray fluorescence spectrum, which shows the relationship between the energy and amount of the detected fluorescent X-rays.

[0040] The fan 20 is provided near the X-ray tube 10. The fan 20 is controlled by the control device 80 and configured to blow air toward the X-ray tube 10. Since the X-ray tube 10 becomes hot while a high voltage is being applied to the X-ray tube 10, including during sample measurement, the X-ray tube 10 is cooled by the air blown by the fan 20.

[0041] The shutter 118, primary X-ray filter 120, and collimator 122 are flat plates and are provided in the measurement chamber 114 so as to be parallel to the wall surface of the housing 112 on which the X-ray tube 10 is provided. X-rays emitted from the X-ray tube 10 pass through the shutter 118, primary X-ray filter 120, and collimator 122 in that order. The shutter 118, primary X-ray filter 120, and collimator 122 are configured to be slidable in a direction parallel to the wall surface of the housing 112 on which the X-ray tube 10 is provided, by a drive mechanism 124 such as a motor or solenoid.

[0042] The shutter 118 is basically inserted into the optical path of the primary X-rays when X-rays are not being emitted, blocking the primary X-rays. This prevents X-rays from leaking outside the measurement device 30. The shutter 118 is made of an X-ray absorbing material such as lead. The primary X-ray filter 120 attenuates background components of the primary X-rays emitted from the X-ray tube 10, improving the S / N ratio of X-rays with required characteristics. The primary X-ray filter 120 is made of a metal foil selected according to the type of X-rays used in the analysis.

[0043] In addition, the primary X-ray filter 120 may be selected according to the purpose from among a plurality of primary X-ray filters 120 formed from different types of metals, and inserted into the optical path of the primary X-rays by the drive mechanism 124.

[0044] The collimator 122 has a circular opening in the center and determines the size of the primary X-ray beam irradiated onto the sample. The collimator 122 is formed of an X-ray absorbing material such as lead or brass. Note that multiple collimators 122 with different opening diameters may be inserted into the optical path of the primary X-rays by the drive mechanism 124.

[0045] The drive mechanism 124 is controlled by the control device 80 and inserts the shutter 118, the primary X-ray filter 120, and the collimator 122 into or retracts them from the optical path of the primary X-rays.

[0046] The pump 38 is provided outside the sample chamber 106 and the measurement chamber 114 so as to communicate with the vent 128, and controls the atmosphere within the sample chamber 106 and the measurement chamber 114. The pump 38 includes an exhaust device 130, an air supply device 132, and a switching valve 134. The exhaust device 130 is a device for exhausting gas from the sample chamber 106 and the measurement chamber 114. The exhaust device 130 can create a vacuum atmosphere (e.g., 30 Pa or less) within the chamber by exhausting air from the chamber through the vent 128 and the switching valve 134. The exhaust device 130 is configured to include, for example, an exhaust pump, an on-off valve, a pressure control valve, and a pressure gauge.

[0047] The gas supply device 132 is a device for supplying air and gas such as helium gas into the sample chamber 106 and the measurement chamber 114. If the chamber is in a vacuum atmosphere when the air atmosphere is set as a measurement condition, the gas supply device 132 supplies air into the chamber through the switching valve 134 and the vent port 128.

[0048] When a helium atmosphere is set as a measurement condition, the gas supply device 132 supplies helium gas stored in a tank (not shown) into the room through the switching valve 134 and the vent 128. The gas supply device 132 includes, for example, an air supply pump, an on-off valve, a pressure gauge, and the like.

[0049] The switching valve 134 is connected to the vent port 128, the exhaust device 130, and the air supply device 132. When the exhaust device 130 is exhausting, the switching valve 134 connects the exhaust device 130 with the vent port 128 and blocks the inflow of gas from the air supply device 132.

[0050] Furthermore, when air is being supplied by the air supply device 132, the switching valve 134 connects the air supply device 132 to the vent 128 and blocks the discharge of gas to the exhaust device 130. In this example, the vent 128 is provided around the detector 126, but the configuration of the vent 128 is not limited to this.

[0051] The switching valve 134 is controlled by the control device 80 to switch between communication and non-communication between the vent port 128 and the exhaust device 130 .

[0052] The exhaust device 130 is controlled by the control device 80, and when connected to the vent port 128, exhausts gas or atmospheric air from the sample chamber 106 and the measurement chamber 114. The gas supply device 132 is controlled by the control device 80, and when connected to the vent port 128, supplies gas or atmospheric air into the sample chamber 106 and the measurement chamber 114.

[0053] The control device 80 comprehensively controls the entire X-ray analysis device 100. Specifically, the control device 80 controls the X-ray tube 10, the fan 20, the measurement device 30, the transport device 40, the locking device 50, and the display device 70. The control device 80 may control each component of the X-ray analysis device 100 based on input from the input device 60.

[0054] The input device 60 is, for example, a keyboard, a mouse, and a touch panel that is integrated with the display screen of the display device 70 (described later), and receives input from the user to the control device 80. The input device 60 transmits the received input to the control device 80.

[0055] When the input device 60 receives an input of an analysis parameter, it transmits the received input to the control device 80. Furthermore, when the input device 60 receives an input from the user indicating that the response has been completed, it notifies the control device 80 that the response has been completed.

[0056] The display device 70 is, for example, a liquid crystal monitor, and displays various screens. The display device 70 displays, for example, a screen showing the fluorescent X-ray detection results, a screen for inputting measurement conditions (analysis parameters), a screen notifying the user that the sample container S has been evacuated to the evacuation tray 53, and a screen instructing the user to take action. The display device 70 is controlled by the control device 80, and displays a screen specified by the control device 80.

[0057] Fig. 3 is a diagram showing the configuration of the control device 80 in the X-ray analysis apparatus 100. As shown in Fig. 3, the control device 80 includes a CPU (Central Processing Unit) 81, a ROM (Read Only Memory) 82, a RAM (Random Access Memory) 83, a communication interface 84, an HDD (Hard Disk Drive) 85, and an I / O (Input / Output) interface 86. The components are connected to each other via a common data bus.

[0058] The CPU 81 executes control over the X-ray analysis apparatus 100. The CPU 81 loads a program stored in the ROM 82 into the RAM 83 and executes the program. The ROM 82 stores a program in which the processing procedures of the X-ray analysis apparatus 100 executed by the CPU 81 are written.

[0059] The RAM 83 serves as a work area when the CPU 81 executes a program, and temporarily stores the program, data used when the program is executed, etc. The communication interface 84 is an interface for communicating with external devices.

[0060] The HDD 85 is a non-volatile storage device that stores the measurement results obtained by the X-ray analysis device 100. Note that the control device 80 may include a semiconductor storage device such as a flash memory instead of or in addition to the HDD 85.

[0061] The I / O interface 86 is an interface for connecting the control device 80 with each device. The I / O interface 86 is communicably connected to each of the X-ray tube 10, the fan 20, the measuring device 30, the transport device 40, the locking device 50, the input device 60, and the display device 70.

[0062] In the X-ray analysis apparatus 100, if power is supplied to each component of the X-ray analysis apparatus 100 when no sample is being measured in the same way as when a sample is being measured, power will be wasted. To prevent such wasteful power consumption, the X-ray analysis apparatus 100 transitions to a sleep mode when no sample is being measured. The sleep mode is a state in which power is supplied to at least the X-ray tube 10, while power is still supplied to the control device 80 (hereinafter referred to as the "sleep state").

[0063] The filament of the X-ray tube 10 gradually evaporates due to heat. Therefore, the longer the X-ray tube 10 remains in a high-temperature state, the more it deteriorates, causing the filament to thin and potentially break. Therefore, when transitioning the X-ray analysis apparatus 100 to a sleep state, the user must continue operating the fan 20 for a predetermined time until the X-ray tube 10 has sufficiently cooled down, while measuring the time since power to the X-ray tube 10 was cut off. The predetermined time is, for example, about 30 minutes. Then, after the predetermined time has elapsed and the X-ray tube 10 has sufficiently cooled down, the user must manually stop the fan 20 and transition the X-ray analysis apparatus 100 to a sleep state.

[0064] Therefore, if a user mismanages the time and puts the X-ray analysis device into sleep mode before the X-ray tube has been sufficiently cooled, this could lead to deterioration of the X-ray tube. Also, since the user must manage the time and stop the fan after a predetermined time has elapsed, this could be a burden on the user.

[0065] Therefore, in the embodiment of the X-ray analysis apparatus 100, the control device 80 automatically performs transition control to transition the X-ray analysis apparatus 100 to a sleep state in response to a trigger signal, which is an operational input by the user to transition the X-ray analysis apparatus 100 to a sleep state.

[0066] Specifically, in the transition control, the control device 80 is configured to continue operating the fan 20 for a predetermined time, then automatically turn off the fan 20, and then put the X-ray analysis device 100 into a sleep state. This allows the X-ray tube to be automatically cooled sufficiently before the X-ray analysis device is put into a sleep state, thereby reducing the burden on the user and preventing deterioration of the X-ray tube.

[0067] Furthermore, the transparent film on the analytical surface of the sample container S may deteriorate due to prolonged exposure to high-power X-rays during repeated sample measurements, which may cause holes in the film, allowing the sample inside to seep out or leak.

[0068] Therefore, in the transition control, the sample container S in the sample chamber 106 is evacuated to the outside of the measurement device 30, and the shutter 118 of the X-ray tube 10 is closed. By performing control in this manner, even if the sample leaks from a deteriorated sample container S, it is possible to prevent contamination of the measurement chamber 114 and the components within the measurement chamber 114.

[0069] Fig. 4 is a diagram showing a control circuit in the X-ray analysis apparatus 100. As shown in Fig. 4, a power switch 99 of the X-ray analysis apparatus 100 is connected to a commercial power supply 90. The power switch 99 is connected to the control device 80, the X-ray power supply 18, the fan 20, the measuring device 30, the transport device 40, the locking device 50, and the display device 70. When the power switch 99 is turned on, power is supplied to each device.

[0070] The control device 80 is directly connected to a power switch 99. The X-ray power supply 18, fan 20, measuring device 30, transport device 40, locking device 50, and display device 70 are each connected to the power switch 99 via relays 19, 29, 39, 49, 59, and 79. Each relay is controlled by the control device 80. When a relay is turned on, power is supplied to the corresponding device. When the control device 80 turns off at least relay 19, thereby cutting off power to at least the X-ray tube 10 while maintaining power to the control device 80, the X-ray analysis device 100 enters a sleep state.

[0071] In this way, in the X-ray analysis apparatus 100 of this embodiment, after measuring a sample, if the user performs an operation input to transition the X-ray analysis apparatus 100 to a sleep state, the fan 20 continues to operate for a predetermined time to sufficiently cool the X-ray tube 10, and then the fan 20 stops and the apparatus automatically transitions to the sleep state. Therefore, after the user performs an operation to transition to the sleep state, no operation or confirmation by the user is required, and deterioration of the X-ray tube 10 can be prevented while reducing the burden on the user.

[0072] In addition, when the transition to sleep mode is performed while the sample container S is in the sample chamber 106, the sample container S is automatically evacuated from the sample chamber 106 and the shutter 118 is closed, thereby preventing contamination of the measurement chamber 114 and the components within the measurement chamber 114 even if the sample leaks from a deteriorated sample container S.

[0073] 5 is a flowchart showing the procedure of transition control of the X-ray analysis apparatus 100 according to the embodiment. First, the control device 80 determines whether or not the user has turned on a sleep button, which switches the X-ray analysis apparatus 100 to a sleep state, via the input device 60 (step S1). The sleep button may be provided on the input device 60.

[0074] If the user has not performed an operation input to transition the X-ray analysis apparatus 100 to the sleep state (NO in step S1), the process returns to step S1 and waits for the sleep button to be turned on by the user's operation.

[0075] On the other hand, if the user performs an operation input to transition the X-ray analysis apparatus 100 to the sleep state (YES in step S1), the control device 80 waits until the operation of the X-ray analysis apparatus 100 stops (step S2). Specifically, when a measurement is being performed, the control device 80 determines that the X-ray analysis apparatus 100 is in operation.

[0076] If the X-ray tube 10 is outputting X-rays, the control device 80 sets the current and voltage flowing through the X-ray tube 10 to 0 and turns off the output of the X-ray tube 10 (step S3). If the X-ray power supply 18 of the X-ray tube 10 is energized, the control device 80 opens the relay 19 and cuts off the power to the X-ray power supply 18 (step S4). If the shutter 118 of the X-ray tube 10 is open, the control device 80 drives the drive mechanism 124 to close the shutter 118 of the X-ray tube 10 (step S5). By doing so, even if the sample leaks from the sample container S in the subsequent steps, the X-ray tube 10 can be prevented from being contaminated by the sample.

[0077] If the spinner 36 is being driven, the control device 80 stops the spinner 36 (step S6). If gas is being supplied to the sample chamber 106 and the measurement chamber 114, the control device 80 controls the gas supply device 132 to stop the supply of gas to the sample chamber 106 and the measurement chamber 114 (step S7).

[0078] If the sample chamber 106 and the measurement chamber 114 are evacuated, the control device 80 controls the exhaust device 130 to stop evacuating the sample chamber 106 and the measurement chamber 114 (step S8). The control device 80 controls the switching valve 134 of the pump 38 to connect the vent 128 to the air supply device 132, thereby supplying air into the sample chamber 106 and the measurement chamber 114 and opening them to the atmosphere (step S9). The control device 80 controls the measurement device 30 to open the opening / closing lid 34, and then controls the transport device 40 to move the sample in the sample chamber 106 to the evacuation tray 53 or the sample tray 51. The control device 80 then closes the opening / closing lid 34 of the measurement device 30 (step S10).

[0079] In this way, by putting the X-ray analysis apparatus 100 into a sleep state with the sample container S placed outside the measurement apparatus 30, it is possible to prevent contamination of the measurement chamber 114, the X-ray tube 10, and the detector 126 even if the sample leaks from the sample container S. Thereafter, the control device 80 opens the relay 49 to energize the transport device 40, and opens the relay 39 to cut off the power to the measurement apparatus 30.

[0080] If the sample tray 51 is locked, the control device 80 controls the locking device 50 to unlock the sample tray 51 (step S11). This allows the user to pull out the sample tray 51 from the rack 52 and change the sample on the sample tray 51 even when the X-ray analysis apparatus 100 is in a sleep state. Thereafter, with the sample tray 51 unlocked, the control device 80 opens the relay 59 and cuts off power to the locking device 50.

[0081] After a predetermined time has elapsed since the control device 80 cuts off the power supply to the X-ray power supply 18 of the X-ray tube 10, the control device 80 opens the relay 29, cuts off the power supply to the fan 20, and stops the operation of the fan 20 (step S12). Thereafter, the control device 80 opens the relay 79, and cuts off the power supply to the display device 70.

[0082] By performing control according to the above-described processing, in the X-ray analysis apparatus 100 of this embodiment, when a user performs an operation input to transition the X-ray analysis apparatus 100 to a sleep state after measuring a sample, the fan 20 continues to operate until a predetermined time sufficient to cool the X-ray tube has elapsed, after which the fan 20 is stopped and the X-ray analysis apparatus 100 automatically transitions to a sleep state. This allows the X-ray analysis apparatus 100 to automatically transition to a sleep state after the X-ray tube 10 has been sufficiently cooled. Therefore, deterioration of the X-ray tube 10 can be prevented while reducing the burden on the user.

[0083] In addition, when the transition to sleep mode is performed while the sample container S is in the sample chamber 106, the sample container S is automatically evacuated from the sample chamber 106 and the shutter 118 is closed, thereby preventing contamination of the measurement chamber 114 and the components within the measurement chamber 114 even if the sample leaks from a deteriorated sample container S.

[0084] Aspects It will be understood by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0085] (Item 1) An X-ray analysis apparatus according to one aspect includes an X-ray tube, a fan, and a control device that controls the X-ray tube and the fan. The X-ray tube emits X-rays. The fan cools the X-ray tube. The X-ray analysis apparatus has a sleep mode in which the X-ray analysis apparatus enters a sleep state in which power is cut off to at least the X-ray tube while power is maintained to the control device. The control device performs transition control to transition the X-ray analysis apparatus to the sleep state in response to a trigger signal. In the transition control, if the X-ray tube is powered on, the control device cuts off power to the X-ray tube, and cuts off power to the fan after a predetermined time has elapsed since power was cut off to the X-ray tube.

[0086] According to the X-ray analysis apparatus of paragraph 1, the control device automatically performs transition control to transition the X-ray analysis apparatus to the sleep state in response to a trigger signal, which is an operation input by a user to transition the X-ray analysis apparatus to the sleep state. In the transition control, the control device is configured to cut off power to the X-ray tube after measurement, continue operating the fan for a predetermined time, then automatically turn off the fan, and then transition the X-ray analysis apparatus to the sleep state. This allows the X-ray tube to be automatically cooled sufficiently before transitioning the X-ray analysis apparatus to the sleep state, thereby reducing the burden on the user and preventing deterioration of the X-ray tube.

[0087] (2) In the X-ray analysis apparatus described in paragraph 1, when the output of the X-ray tube is on, the control device turns off the output of the X-ray tube and then cuts off power to the X-ray tube during transition control.

[0088] According to the X-ray analysis apparatus of paragraph 2, even if the user performs an operation input to transition the X-ray analysis apparatus to a sleep state while the output of the X-ray tube is on, transition control is performed to automatically turn off the output of the X-ray tube and then cut off power to the X-ray tube. Therefore, the user can perform an operation input to transition the X-ray analysis apparatus to a sleep state without timing, thereby reducing the burden on the user.

[0089] (Item 3) The X-ray analysis apparatus according to item 1 or 2 further includes a measurement device that measures a sample using X-rays. In the transition control, if the X-ray tube is energized, the control device cuts off power to the X-ray tube and then cuts off power to the measurement device.

[0090] According to the X-ray analysis apparatus of paragraph 3, even if a user performs an operation input to transition the X-ray analysis apparatus to a sleep state while the X-ray tube is still powered, transition control is performed to automatically cut off power to the X-ray tube. Therefore, the user can perform an operation input to transition the X-ray analysis apparatus to a sleep state without timing the operation, thereby reducing the burden on the user.

[0091] (4) In the X-ray analysis apparatus described in (3), the measurement device further includes a shutter that blocks X-rays emitted from the X-ray tube. If the shutter is open during transition control, the control device closes the shutter and then cuts off power to the measurement device.

[0092] According to the X-ray analysis apparatus of paragraph 4, even if a user performs an operation input to transition the X-ray analysis apparatus to a sleep state while the shutter is open, transition control is performed to automatically close the shutter and then cut off power to the measurement device. Therefore, the user can perform an operation input to transition the X-ray analysis apparatus to a sleep state without timing, thereby reducing the burden on the user. Furthermore, even if a sample leaks into the sample chamber, it is possible to prevent the X-ray analysis apparatus from entering a sleep state with the shutter open, thereby preventing contamination of the measurement chamber and each component within the measurement chamber.

[0093] (Item 5) The X-ray analysis apparatus according to item 3 or 4 further includes a transport device for transporting the sample. In the transition control, if the sample is inside the measurement device, the control device transports the sample outside the measurement device using the transport device, and then cuts off power to the measurement device.

[0094] According to the X-ray analysis apparatus of paragraph 5, even if a user performs an operation input to transition the X-ray analysis apparatus to a sleep state while a sample is still placed in the sample chamber, transition control is performed to automatically remove the sample from the measurement chamber and then cut off power to the measurement device. This allows the user to perform an operation input to transition the X-ray analysis apparatus to a sleep state without timing, thereby reducing the burden on the user. Furthermore, it is possible to prevent the X-ray analysis apparatus from entering a sleep state while a sample is still placed in the sample chamber, which could result in the sample leaking from a deteriorated sample container and contaminating the measurement chamber and various components within the measurement chamber.

[0095] (Item 6) In the X-ray analysis apparatus described in item 5, the measurement device further includes a lid that separates the inside of the measurement device from the outside of the measurement device. In the transition control, if the sample is inside the measurement device, the control device transports the sample to the outside of the measurement device using the transport device, and if the lid is open, closes the lid and then cuts off power to the measurement device.

[0096] According to the X-ray analysis apparatus of paragraph 6, even if a user performs an operation input to transition the X-ray analysis apparatus to a sleep state while the lid of the measurement chamber is open, transition control is performed to automatically close the lid and then cut off power to the measurement device. This allows the user to perform an operation input to transition the X-ray analysis apparatus to a sleep state without timing, thereby reducing the burden on the user. Furthermore, it is possible to prevent the X-ray analysis apparatus from entering a sleep state with the lid open, which could result in contamination of the sample chamber and each component within the sample chamber with dust or dirt in the air outside the measurement apparatus.

[0097] (7) The X-ray analysis apparatus according to claim 5 or claim 6 is configured to be able to attach a tray on which a sample is placed, and further includes a locking device for fixing the tray. In the transition control, when the sample is inside the measurement device, the control device moves the transport device to transport the sample outside the measurement device, and then releases the tray from the locking device.

[0098] According to the seventh X-ray analysis apparatus, even if a user performs an operation input to transition the X-ray analysis apparatus to a sleep state while the sample tray is still fixed to the rack, transition control is performed to unlock the sample tray after automatically transporting the samples to a sample tray or an evacuation tray outside the measurement apparatus. This allows the user to perform an operation input to transition the X-ray analysis apparatus to a sleep state without timing, thereby reducing the burden on the user. Furthermore, by fixing the sample tray to the rack when placing a sample container on the sample tray, the sample container can be safely placed on the sample tray. Furthermore, by unlocking the sample tray after transporting the sample container, the user can pull the sample tray out of the rack while the X-ray analysis apparatus is in sleep mode and replace the sample container on the sample tray for the next measurement.

[0099] (Item 8) In the X-ray analysis apparatus described in any one of items 1 to 7, the control device performs transition control in response to a trigger signal from the user that causes the X-ray analysis apparatus to transition to a sleep state.

[0100] According to the X-ray analysis apparatus of paragraph 8, regardless of the timing at which the user performs an operation input to transition the X-ray analysis apparatus to the sleep state, transition control is automatically performed to protect the X-ray analysis apparatus in the sleep state. Therefore, the user can perform an operation input to transition the X-ray analysis apparatus to the sleep state without timing, thereby reducing the burden on the user. Furthermore, the X-ray analysis apparatus in the sleep state can be protected.

[0101] (Item 9) The X-ray analyzer described in any one of Items 1 to 8 is an EDX (Energy Dispersive X-ray Fluorescence Spectrometer) or a WDX (Wavelength-dispersive X-ray Spectrometry).

[0102] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the description of the above embodiments, and is intended to include all modifications within the meaning and scope of the claims.

[0103] 5 Base, 10 X-ray tube, 18 X-ray power supply, 19, 29, 39, 49, 59, 79 Relay, 20 Fan, 30 Measuring device, 32, 108 Opening, 34 Opening / closing cover, 36 Spinner, 38 Pump, 40 Transport device, 41, 43 Arm, 42 Grip, 50 Locking device, 51 Sample tray, 52 Rack, 53 Evacuation tray, 60 Input device, 70 Display device, 80 Control device, 82 ROM, 83 RAM, 84 Communication interface, 86 Interface, 90 Commercial power supply, 99 Power switch, 100 X-ray analysis device, 102, 112 Housing, 104 Sample stage, 106 Sample chamber, 110 Connecting passage, 114 Measurement chamber, 118 Shutter, 120 Primary X-ray filter, 122 Collimator, 124 Driving mechanism, 126 detector, 128 vent, 130 exhaust device, 132 air supply device, 134 switching valve, S sample container.

Claims

1. An X-ray analysis apparatus comprising: an X-ray tube that emits X-rays; a fan that cools the X-ray tube; and a control device that controls the X-ray tube and the fan, wherein the X-ray analysis apparatus has a sleep mode in which it enters a sleep state in which power is cut off to at least the X-ray tube while power is maintained to the control device, and the control device performs transition control to transition the X-ray analysis apparatus to the sleep state in response to a trigger signal, and in the transition control, if power is supplied to the X-ray tube, the control device cuts off power to the X-ray tube, and cuts off power to the fan after a predetermined time has elapsed since power to the X-ray tube was cut off.

2. The X-ray analysis apparatus according to claim 1, wherein, in the transition control, when the output of the X-ray tube is on, the control device turns off the output of the X-ray tube and then cuts off power to the X-ray tube.

3. The X-ray analysis apparatus according to claim 2, further comprising a measuring device that measures a sample using X-rays, and wherein, in the transition control, if the X-ray tube is energized, the control device cuts off power to the X-ray tube and then cuts off power to the measuring device.

4. The X-ray analysis apparatus according to claim 3, wherein the measurement device further includes a shutter that blocks X-rays emitted from the X-ray tube, and wherein, during the transition control, if the shutter is open, the control device closes the shutter and then cuts off power to the measurement device.

5. The X-ray analysis apparatus according to claim 4, further comprising a transport device for transporting the sample, and wherein, in the transition control, if the sample is inside the measurement device, the control device transports the sample outside the measurement device using the transport device, and then cuts off power to the measurement device.

6. The X-ray analysis apparatus according to claim 5, wherein the measuring device further includes a lid that separates the inside of the measuring device from the outside of the measuring device, and wherein the control device, in the transition control, when the sample is inside the measuring device, transports the sample to the outside of the measuring device using the transport device, and when the lid is open, closes the lid and then cuts off power to the measuring device.

7. The X-ray analysis apparatus according to claim 6, wherein the X-ray analysis apparatus is configured to be able to attach a tray on which the sample is placed, and further comprises a locking device for fixing the tray, and wherein the control device, in the transition control, when the sample is inside the measurement apparatus, moves the transport device to transport the sample outside the measurement apparatus, and then releases the fixation of the tray using the locking device.

8. The X-ray analysis apparatus according to claim 7, wherein the control device performs the transition control in response to a trigger signal from a user that causes the X-ray analysis apparatus to transition to the sleep state.

9. The X-ray analysis device according to claim 1, wherein the X-ray analysis device is an EDX (Energy Dispersive X-ray Fluorescence Spectrometer) or a WDX (Wavelength-dispersive X-ray Spectrometry).

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