Top-irradiating x-ray fluorescence analyzer and top-irradiating x-ray fluorescence analysis system

Abstract

The present invention provides a top-irradiating X-ray fluorescence analyzer in which a holder conveyor can directly lift a sample holder loaded with a sample in a loading machine. This top-irradiating X-ray fluorescence analyzer comprises: a holder conveyor that lifts up and conveys a sample holder to a preparation position, the sample holder having a receiving tray, a frame body, and a biasing member that biases the receiving tray upward; a holder receptacle installed within the conveyance range of the holder conveyor; a sample transfer mechanism that transfers a sample conveyed by a sample conveyor extending between the outer and inner sides of the conveyance range of the holder conveyor onto the receiving tray of the sample holder placed in the holder receptacle; and a pushdown mechanism having an arm pivotally supported to allow the arm to rotate between a pushdown position where the arm pushes the receiving tray downward and a retracted position where the arms avoids interfering with the holder conveyor. When the arm is at the pushdown position, the sample transfer mechanism moves the sample over the receiving tray, and when the arm is at the retracted position, the holder conveyor lifts up the sample holder.

Description

Top-illumination type X-ray fluorescence analysis device and top-illumination type X-ray fluorescence analysis system

[0001] The present invention relates to a top-illumination X-ray fluorescence analyzer and a top-illumination X-ray fluorescence analysis system.

[0002] X-ray fluorescence analyzers are known as devices for analyzing elements contained in samples. Some X-ray fluorescence analyzers are equipped with a holder transporter that transports sample holders arranged on a tray to a preparation position. The holder transporter typically descends from directly above the sample holder toward the sample holder and grasps the sample holder by clamping or suctioning the sample holder. Some X-ray fluorescence analyzers are also used with a sample transporter that transports the sample close to the tray.

[0003] By providing both a holder transporter and a sample transporter, it becomes possible to transport a sample located far from the X-ray fluorescence analyzer to the X-ray fluorescence analyzer and analyze it without user intervention. In this case, a loader is provided to load the sample transported by the sample transporter into the sample holder.

[0004] A known sample holder that can be loaded with a sample by a loader includes a cylindrical frame, a tray on which the sample is placed, and a biasing member. The biasing member biases the tray from the bottom to the top of the frame, positioning the sample so that its surface is at the position where X-rays are irradiated by a top-illumination X-ray fluorescence analyzer.

[0005] A conventional loading machine is equipped with a push-down mechanism that pushes down a tray from directly above the sample holder toward the bottom of the frame when loading a sample, and a push-out mechanism that pushes the sample from the sample transporter onto the tray while the tray is pressed down. This allows the sample to be loaded into the sample holder at the loading position within the loading machine.

[0006] The holder transporter is a device that transports sample holders arranged on a tray to a preparation position, and therefore its operation is limited to a certain transport range that includes the preparation position and the area where the tray is arranged. Therefore, when a sample is loaded into a sample holder in the loading device, the sample holder is transported from the loading position in the loading device to the transport range of the holder transporter. The holder transporter then picks up the sample holder and transports it to the preparation position.

[0007] In the conventional X-ray fluorescence analyzer described above, samples are loaded into sample holders outside the transfer range of the holder transporter. However, to simplify and compact the configuration of the analyzer, it is conceivable to load samples into sample holders within the transfer range of the holder transporter, and have the holder transporter directly pick up the sample holder at the loaded position. In other words, it is conceivable to make the sample loading position by the loader and the sample holder pick-up position of the holder transporter the same. However, with the conventional loader, when the holder transporter tries to pick up the sample holder at the loading position within the loader, there is a problem in that the holder transporter and the above-mentioned pressing mechanism interfere with each other.

[0008] The present disclosure has been made in consideration of the above-mentioned problems, and its purpose is to provide a top-illuminated fluorescent X-ray analyzer with a simple and compact configuration in which a sample holder loaded with a sample can be directly picked up by a holder transport device within the loading device.

[0009] (1) A top-illumination X-ray fluorescence analyzer according to one aspect of the present disclosure includes a holder transporter that picks up a sample holder having a tray on which a sample is placed, a frame within which the tray is placed, and a biasing member that biases the tray upward inside the frame, and transports the sample holder to a preparation position; a holder receiver that is provided within a transport range of the holder transporter and on which the sample holder is placed; and a sample transporter that extends between the outside and inside of the transport range of the holder transporter and transports the sample from the outside to the inside of the transport range of the holder transporter to a sample transport position. a sample moving mechanism for moving the sample holder onto the tray of the sample holder placed in the holder receiver; and a pressing mechanism having an arm rotatably supported between a pressing position for pressing the tray of the sample holder placed in the holder receiver downward inside the frame body and a retracted position for avoiding interference with the holder transporter, wherein the sample moving mechanism moves the sample onto the tray when the arm is in the pressing position, and the holder transporter picks up the sample holder when the arm is in the retracted position.

[0010] (2) In another aspect of the top-illuminated X-ray fluorescence analyzer of the present disclosure, the holder transporter transports the sample holder from the preparation position to the holder receptacle when the arm is in the retracted position, and the sample moving mechanism moves the sample from the tray onto the sample transporter when the arm is in the depressed position.

[0011] (3) In another aspect of the top-illuminated X-ray fluorescence analyzer according to the present disclosure, the arm has a contact portion that contacts the tray when the arm is in the pressed-down position, and the contact portion has a curved shape that bulges out toward the side that contacts the tray.

[0012] (4) In another aspect of the top-illuminated X-ray fluorescence analyzer of the present disclosure, the arm further has one end rotatably supported by an actuator and the other end having a base on which the abutment portion is rotatably supported.

[0013] (5) In another aspect of the present disclosure, in a top-illuminated X-ray fluorescence analyzer, the contact portion includes a first contact portion and a second contact portion, and the first contact portion and the second contact portion are positioned to sandwich the sample holder when the arm is in the pressed position.

[0014] (6) In another aspect of the present disclosure, in a top-illuminated X-ray fluorescence analyzer, the sample moving mechanism includes a first pushing unit that pushes out the sample when moving the sample from the sample transport device onto the tray, and a second pushing unit that pushes out the sample when moving the sample from the tray to the sample transport device.

[0015] (7) A top-illuminated X-ray fluorescence analyzer according to another aspect of the present disclosure is characterized by further including: a second holder transporter that transports the sample holder placed in the preparation position to a measurement chamber; an X-ray source that irradiates the sample placed on the sample holder in the measurement chamber with primary X-rays from above; and a detector that measures the intensity of the fluorescent X-rays emitted from the sample.

[0016] (8) A top-illumination X-ray fluorescence analysis system according to one aspect of the present disclosure includes any one of the top-illumination X-ray fluorescence analysis devices described above.

[0017] (9) A top-illumination X-ray fluorescence analysis system according to an aspect of the present disclosure is the above-described top-illumination X-ray fluorescence analysis system, further including the sample transport device.

[0018] 1 is a diagram illustrating a top-illumination X-ray fluorescence analysis system; FIG. 2 is a diagram illustrating the inside of a top-illumination X-ray fluorescence analysis device; FIG. 3 is a diagram illustrating a sample transporter, a sample loader, and a holder transporter; FIG. 4 is a diagram illustrating each part of the sample loader; FIG. 5 is a diagram illustrating an example of a sample holder; FIG. 6 is a diagram illustrating the operation of an arm; FIG. 7 is a schematic diagram illustrating the inside of a measurement chamber; FIG. 8 is a diagram illustrating the operation of a top-illumination X-ray fluorescence analysis system; FIG. 9 is a diagram illustrating the operation of a top-illumination X-ray fluorescence analysis system; FIG. 10 is a diagram illustrating the operation of a top-illumination X-ray fluorescence analysis system; FIG. 11 is a diagram illustrating the operation of a top-illumination X-ray fluorescence analysis system; FIG. 12 is a diagram illustrating the operation of a top-illumination X-ray fluorescence analysis system; FIG. 13 is a diagram illustrating the operation of a top-illumination X-ray fluorescence analysis system; FIG. 14 is a diagram illustrating the operation of a top-illumination X-ray fluorescence analysis system; FIG. 15 is a diagram illustrating the operation of a top-illumination X-ray fluorescence analysis system; Fig. 1 is a diagram for explaining the operation of a top-illumination type X-ray fluorescence analysis system; Fig. 2 is a diagram for explaining the operation of a top-illumination type X-ray fluorescence analysis system; Fig. 3 is a diagram for explaining the operation of a top-illumination type X-ray fluorescence analysis system; Fig. 4 is a diagram for explaining a modified example of an arm;

[0019] A preferred embodiment of the present invention (hereinafter referred to as an embodiment) will be described below with reference to the drawings. Fig. 1 is a bird's-eye view of a top-illumination X-ray fluorescence analysis system 100. As shown in Fig. 1, the top-illumination X-ray fluorescence analysis system 100 includes a top-illumination X-ray fluorescence analyzer 102 including a sample loader 106, and a sample transporter 104.

[0020] The top-illumination X-ray fluorescence analyzer 102 irradiates a sample with X-rays from above and analyzes elements contained in the sample based on the fluorescent X-rays emitted from the sample. Details of the top-illumination X-ray fluorescence analyzer 102 will be described later. In the following, the top-illumination X-ray fluorescence analyzer 102 will also be simply referred to as the X-ray fluorescence analyzer 102.

[0021] The sample transport device 104 extends between the outside and inside of the transport range of the holder transport device 302 (described later) and transports samples. Specifically, for example, the sample transport device 104 is a belt conveyor that transports samples with the sample placed on top. The sample transport device 104 transports samples between a position away from the X-ray fluorescence analyzer 102 and the vicinity of a sample loader 106 attached inside the housing of the X-ray fluorescence analyzer 102. For example, if the X-ray fluorescence analyzer 102 is installed in a silicon substrate manufacturing factory, the sample transport device 104 transports silicon substrates between a silicon substrate mass production line and the vicinity of the sample loader 106 attached to the X-ray fluorescence analyzer 102. Note that the sample transport device 104 is not limited to a belt conveyor and may be, for example, a roller conveyor, as long as it has the function of transporting samples.

[0022] The sample loader 106 loads the sample, which has been transported by the sample transporter 104 to the transport range of the holder transporter 302, into the sample holder 502. The sample loader 106 also places the sample loaded into the sample holder 502 on the sample transporter 104. Details of the sample loader 106 will be described later.

[0023] FIG. 2 is a diagram showing the interior of the top-illumination X-ray fluorescence analysis system 100. FIG. 2 is a diagram showing a horizontal cross section of the housing of the top-illumination X-ray fluorescence analyzer 102, seen from above, at a height that allows the entire sample loader 106 to be seen. The sample loader 106, the holder tray 108, the holder transporter 302, and part of the sample transporter 104 are arranged inside the housing of the X-ray fluorescence analyzer 102. The holder transporter 302 is located above the sample loader 106 and is not shown in FIG. 2 (see FIG. 3). The holder tray 108 is a tray on which multiple sample holders 502 are arranged. The holder tray 108 is used to temporarily arrange the sample holders 502 when multiple samples are analyzed consecutively.

[0024] Further, inside the housing of the fluorescent X-ray analyzer 102, there are provided a holder insertion space 202, a measurement chamber 204, and a preliminary exhaust chamber 206. The holder insertion space 202 is a space located inside the transfer range of the holder transfer device 302.

[0025] The holder transporter 302 transports the sample holder 502 between the holder receiver 208 of the sample loader 106 and the holder insertion space 202. Specifically, the holder transporter 302 includes, for example, a moving mechanism (not shown) and a gripping mechanism 304. The moving mechanism moves within a predetermined transport range in a horizontal plane. The predetermined range includes the position where the holder receiver 208 is located and the preparation position. The moving mechanism also moves vertically from a position directly above the sample holder 502. The gripping mechanism 304 is composed of, for example, two openable and closable claw-shaped members (see FIG. 8(b)), and grips the sample holder 502. The holder transporter 302 transports the sample holder 502 by moving the moving mechanism within the horizontal plane while the gripping mechanism 304 grips the sample holder 502. The horizontal plane refers to a plane parallel to a bottom plate 510 (described later) of the sample holder 502 when the sample holder 502 is placed in the holder receiver 208 or the like. The vertical direction refers to a direction perpendicular to the horizontal plane. The gripping mechanism 304 may be configured with a member that adsorbs the sample holder 502, rather than a claw-shaped member that clamps and grips the sample holder 502.

[0026] The holder receiver 208 is provided within the transport range of the holder transporter 302 and is a portion on which the sample holder 502 is placed. The holder receiver 208 is, for example, a portion on which the sample holder 502 of a holder rotation mechanism 404 (described later) is placed. The holder receiver 208 is also a position where the sample is loaded. Note that, if the holder rotation mechanism 404 is omitted, the holder receiver 208 may be a portion on the base plate 402 (described later) on which the holder rotation mechanism 404 is attached.

[0027] The measurement chamber 204 is a space where the sample is irradiated with X-rays. The following description will be given on the assumption that the inside of the measurement chamber 204 is a vacuum, but the inside of the measurement chamber 204 may be atmospheric pressure. Details of the measurement chamber 204 will be described later.

[0028] The pre-exhaust chamber 206 is a space in which the sample holder 502 is temporarily placed and which is equipped with a vacuum pump and a leak valve (not shown). Specifically, for example, the pre-exhaust chamber 206 is a chamber for loading and unloading a sample, and is also called a load lock. The pre-exhaust chamber 206 is disposed adjacent to the holder loading space 202, and a vacuum shutter is disposed between the pre-exhaust chamber 206 and the holder loading space 202. The vacuum shutter is normally closed and is opened when the sample holder 502 is transported between the pre-exhaust chamber 206 and the holder loading space 202. The pre-exhaust chamber 206 is disposed adjacent to the measurement chamber 204, and a vacuum shutter is disposed between the pre-exhaust chamber 206 and the measurement chamber 204. The vacuum shutter is normally closed and is opened when the sample is transported between the pre-exhaust chamber 206 and the measurement chamber 204. The leak valve is a valve that introduces air into the pre-exhaust chamber 206. The sample holder 502 is transported between the holder insertion space 202 and the measurement chamber 204 via the pre-exhaust chamber 206. When the sample holder 502 is transported between the holder insertion space 202 and the pre-exhaust chamber 206, the interior of the pre-exhaust chamber 206 is at atmospheric pressure, separating the pre-exhaust chamber 206 from the measurement chamber 204. When the sample holder 502 is transported between the measurement chamber 204 and the pre-exhaust chamber 206, the interior of the pre-exhaust chamber 206 is at vacuum, separating the pre-exhaust chamber 206 from the holder insertion space 202.

[0029] FIG. 3 is a diagram showing the sample transporter 104, the sample loader 106, and the holder transporter 302. As shown in FIG. 3, the sample transporter 104 is arranged so that its end is adjacent to the holder receiver 208 provided on the sample loader 106. The arrow on the sample transporter 104 indicates the direction of movement of the sample when the sample is loaded. Note that in FIGS. 1 to 3, the sample loader 106 is arranged along the end face of the housing (hereinafter referred to as housing end face A), which is on the opposite side of the holder tray 108 from the measurement chamber 204 (the lower side in FIG. 2), and the sample transporter 104 is arranged to transport the sample to the sample loader 106 inside the housing through an opening provided in housing end face A. However, the path along which the sample transporter 104 transports the sample is not limited to this. That is, the sample loader 106 may be arranged along the end face of the housing where the holder insertion space 202 is provided (the left end face of the housing shown in FIG. 2 , hereinafter referred to as housing end face B) or the opposite end face (the right end face of the housing shown in FIG. 2 , hereinafter referred to as housing end face C). In this case, the sample transporter 104 is arranged so as to transport the sample to the sample loader 106 inside the housing through an opening provided in housing end face B or housing end face C of the housing where the sample loader 106 is arranged. By changing the arrangement position of the sample transporter 104, it becomes possible to transport the sample into the housing from different directions.

[0030] The sample loader 106 loads the sample, which has been transported to the end of the sample loader 106, into the sample holder 502 arranged in the holder receiver 208. Here, the sample loader 106 is arranged so that the end of the sample loader 106 is located near the holder receiver 208. After the analysis is completed, the sample loader 106 moves the sample from the sample holder 502 arranged in the holder receiver 208 to the sample transporter 104.

[0031] The holder transporter 302 picks up the sample holder 502 and transports it to the preparation position. Note that the preparation position may be any of the holder storage positions provided in the holder tray 108, the holder insertion space 202, and the preliminary exhaust chamber 206, but in the following description it will be described as the holder storage position provided in the holder insertion space 202. After the analysis is completed, the holder transporter 302 picks up the sample holder 502 from the preparation position and transports it to the holder receiver 208 of the sample loader 106.

[0032] Fig. 4 is a diagram showing each part of the sample loader 106. As shown in Fig. 4, the sample loader 106 has a base plate 402, a holder rotation mechanism 404, a sample movement mechanism 406, and a pressing mechanism 408. The base plate 402, the holder rotation mechanism 404, the sample movement mechanism 406, and the pressing mechanism 408 are combined in the directions of the arrows shown in Fig. 4 to form the sample loader 106 shown in Fig. 3.

[0033] The base plate 402 is a member that serves as a base for fixing the positions of the holder rotation mechanism 404, the pressing mechanism 408, and the sample moving mechanism 406. When the holder rotation mechanism 404 is omitted, the part of the base plate 402 to which the holder rotation mechanism 404 is attached functions as the holder receiver 208.

[0034] The holder rotation mechanism 404 has a sample holder 502 disposed thereon and rotates the sample holder 502 in a horizontal plane. Specifically, the holder rotation mechanism 404 includes, for example, a pedestal 410, a frame member 412, and a pedestal actuator 414. The pedestal 410 is a member attached to the base plate 402, and, for example, the sample holder 502 shown in FIG. 5 is disposed thereon. The frame member 412 is a flat plate-like member having a hole corresponding to the shape of the sample holder 502. By disposing the sample holder 502 in the hole, the frame member 412 functions to prevent movement of the sample holder 502 in a horizontal plane. The pedestal actuator 414 rotates the sample holder 502 disposed in the hole of the frame member 412 in a horizontal plane by moving a belt (not shown). In a configuration in which the holder rotation mechanism 404 is not omitted, the pedestal 410 functions as the holder receiver 208.

[0035] Here, an example of the sample holder 502 used in this embodiment will be described. Figures 5(a) and 5(b) are diagrams showing an example of the sample holder 502 used in this embodiment. Figure 5(a) shows the sample holder 502 in a state where no sample is loaded, and Figure 5(b) shows the sample holder 502 in a state where a sample is loaded. As shown in Figures 5(a) and 5(b), the sample holder 502 has a frame 504, a tray 506, and a biasing member 508.

[0036] The frame 504 has a tray 506 disposed inside. Specifically, the frame 504 has a bottom plate 510, a mask 512, and a guide 514. The bottom plate 510 is a substantially circular plate-shaped member, but may have any other shape as long as it can be stably disposed in the holder receiver 208. The mask 512 is a circular plate-shaped member having approximately the same diameter as the bottom plate 510 and having a hole for irradiating X-rays from above. The guide 514 is a member that fixes the bottom plate 510 and the mask 512 while maintaining a predetermined distance between them. Two sets of guides 514 are provided along the outer edge of the bottom plate 510, sandwiching the center of the bottom plate 510 between them. Each set of guides 514 is composed of two columnar members extending substantially perpendicularly from the surface of the bottom plate 510. The two sets of guide portions 514 have the function of maintaining a predetermined distance between the bottom plate portion 510 and the mask portion 512, and also of guiding the tray 506 to prevent it from rotating within a horizontal plane.

[0037] The tray 506 is a member on which a sample is placed. Specifically, for example, the tray 506 is substantially disk-shaped, and the sample is placed on top of it. The tray 506 is also disposed between guide portions 514 provided on the frame 504, and has protruding portions 516 that protrude outward from the mask plate of the frame 504 in a plan view. In this embodiment, the trays 506 are provided at two locations on either side of the center of the disk-shaped tray 506. The tray 506 is disposed between the bottom plate portion 510 and the mask portion 512 so that the protruding portions 516 are sandwiched between the columnar members that form the guide portions 514.

[0038] The biasing member 508 biases the tray 506 upward inside the frame 504. Specifically, for example, the biasing member 508 is a spiral spring and is disposed between the bottom plate portion 510 and the tray 506. The biasing member 508 biases the tray 506 from the bottom plate portion 510 toward the mask portion 512. As shown in FIG. 5( a), when no sample is placed, the surface of the tray 506 contacts the back surface of the mask portion 512. As shown in FIG. 5( b), when a sample is placed, part of the surface of the sample contacts the back surface of the mask portion 512, and part of the surface of the sample is exposed through the hole in the mask portion 512.

[0039] The pressing mechanism 408 includes an arm 416 and an actuator 418. The arm 416 is pivotally supported to be rotatable between a pressing position and a retracted position. Specifically, the arm 416 is pivotally supported to be rotatable between a pressing position where the arm 416 presses the tray 506 of the sample holder 502 placed in the holder receptacle 208 downward inside the frame 504, and a retracted position where the arm 416 does not interfere with the holder transporter 302. For example, the arm 416 has an L-shape when viewed from the side. One end of the arm 416 is pivotally supported by the actuator 418, and the actuator 418 rotates the arm 416, thereby rotating the arm 416 between the pressing position and the retracted position. The arm 416 has a contact portion 420 (the other end) that contacts the tray 506 when the arm 416 is in the depressed position, and the contact portion 420 has a curved shape that bulges out toward the side that contacts the tray 506. The curved shape is, for example, an arc. The contact portion 420 includes a first contact portion 420A and a second contact portion 420B. The first contact portion 420A and the second contact portion 420B are positioned to sandwich the sample holder 502 when the arm 416 is in the depressed position. The actuator 418 is, for example, a DC motor.

[0040] 6(a), 6(b), and 6(c) are diagrams for explaining the operation of the arm 416. Figures 6(a) and 6(b) show the arm 416 in the middle of rotating from the retracted position to the depressed position, and Figure 6(c) shows the arm 416 in the depressed position. The state in which the arm 416 is in the retracted position is the state shown in Figure 3, in which the entire arm 416 is not in the area directly above the holder receiver 208.

[0041] When the arm 416, which is in the retracted position, rotates to the depressed position, as shown in FIG. 6( a), first, a portion of the abutment portion 420 (the left end of the curved abutment portion 420 in the drawing) comes into contact with the tray 506. This causes the tray 506 to abut against the protrusion 516 on the lower side 506. Next, when the actuator 418 rotates the arm 416 clockwise in the drawing, as shown in FIG. 6( b), the abutment portion 420 presses down on the protrusion 516 of the tray 506, causing the protrusion 516 to move downward (to the vicinity of the center of the frame 504 in FIG. 6( b)). At this time, a portion of the abutment portion 420 (the central portion of the curved abutment portion 420 in the drawing) comes into contact with the protrusion 516 of the tray 506. Furthermore, when the actuator 418 rotates the arm 416 clockwise in the drawing, the abutting portion 420 presses down on the protruding portion 516 of the tray 506, causing the protruding portion 516 to move downward, as shown in FIG. 6(c). This causes the tray 506 to move downward (to the lower portion of the frame 504 in FIG. 6(c)). At this time, a part of the abutting portion 420 (the right end of the curved abutting portion 420) abuts against the protruding portion 516 of the tray 506. As the tray 506 is pressed down close to the bottom plate portion 510, a gap is created between the tray 506 and the mask portion 512. The sample is placed on the tray 506 through this gap.

[0042] As shown in Figures 6(a), 6(b), and 6(c), the position of the contact portion 420 that contacts the protrusion 516 varies depending on the height of the tray 506. The contact portion 420 may be linear when viewed from the side; however, it is preferable that the contact portion 420 have a curved shape that bulges toward the side where it contacts the tray 506. If the contact portion 420 is linear when viewed from the side, the angle between the end face of the linear contact portion 420 and the surface of the bottom plate 510 changes depending on the height of the tray 506. In this case, tilting of the tray 506 along the end face of the contact portion 420 may result in misalignment of the sample placed on the tray 506. This problem becomes particularly pronounced when the sample loader 106 is made smaller to miniaturize the X-ray fluorescence analyzer 102, since the length of the arm 416 must be shortened. However, since the contact portion 420 has a curved shape that bulges out on the side that contacts the tray 506, the tray 506 can be made horizontal regardless of its height.

[0043] The sample moving mechanism 406 moves a sample, which is transported from the outside to the inside of the transport range of the holder transporter 302 by the sample transporter 104, which extends between the outside and inside of the transport range, onto the tray 506 of the sample holder 502 arranged in the holder receiver 208. Specifically, for example, the sample moving mechanism 406 has a first pushing unit 422 and a second pushing unit 424. The first pushing unit 422 pushes out the sample when moving the sample from the sample transporter 104 onto the tray 506. The second pushing unit 424 pushes out the sample when moving the sample from the tray 506 to the sample transporter 104. The first pushing unit 422 and the second pushing unit 424 have recesses formed in the portions that come into contact with the sample so that the sample can be pushed out. Furthermore, the first pushing unit 422 and the second pushing unit 424 are positioned to match the height of the surface of the pan 506 when the pan 506 is positioned closest to the bottom plate 510 and the surface of the belt of the sample transporter 104 so that they can push out the sample. The sample moving mechanism 406 moves the sample from above the sample transporter 104 onto the pan 506 when the arm 416 is in the pressed position. The sample moving mechanism 406 also moves the sample from above the pan 506 onto the sample transporter 104 when the arm 416 is in the pressed position. Note that although the first pushing unit 422 and the second pushing unit 424 are integrally formed in FIGS. 3 and 4 , the first pushing unit 422 and the second pushing unit 424 may be separate units. If separate, the first pushing unit 422 and the second pushing unit 424 may operate independently.

[0044] 7 is a schematic diagram showing the interior of the measurement chamber 204. The measurement chamber 204 is a chamber in which sample analysis is performed. Specifically, as shown in FIG. 7, the measurement chamber 204 includes a sample stage 702, an X-ray source 704, a spectroscopic element 706, and a detector 708.

[0045] The sample stage 702 is a stage on which the sample holder 502 is placed. The X-ray source 704 irradiates the sample placed on the sample holder 502 in the measurement chamber 204 with primary X-rays from above. The primary X-rays generated by the X-ray source 704 are irradiated onto the surface of the sample exposed through the holes in the mask unit 512. The spectroscopic element 706 disperses fluorescent X-rays of a predetermined wavelength emitted from the sample. The detector 708 is disposed at a position where the fluorescent X-rays dispersed by the spectroscopic element 706 are incident. The detector 708 measures the intensity of the fluorescent X-rays emitted from the sample. The detector 708 is, for example, a proportional counter. A counter (not shown) counts the pulse signals output from the detector 708 to obtain the intensity of the fluorescent X-rays. A spectroscopic element 706 and a detector 708 may be provided for each element to be analyzed, or a single pair of spectroscopic element 706 and detector 708 may be rotated for measurement. When the pair of spectroscopic element 706 and detector 708 is to be rotated, a mechanism (goniometer) for rotating the spectroscopic element 706 and detector 708 is disposed in the measurement chamber 204 .

[0046] Next, the operation of the top-illumination X-ray fluorescence analysis system 100 will be described with reference to the drawings. Figures 8 to 15 are diagrams showing the steps up to the transfer of the sample on the sample transfer device 104 to the measurement chamber 204. Note that Figures 8 to 15 show an example in which the sample loader 106 is arranged along the housing end face C of the housing, and the sample is transferred from the housing end face C to the inside of the housing.

[0047] First, a sample holder 502 without a sample placed thereon is transported to the holder receptacle 208 ( FIG. 8( a) ). Specifically, for example, in the initial state, the sample holder 502 without a sample placed thereon is placed at a predetermined position on the holder tray 108. The holder transporter 302 first moves to a position directly above the sample holder 502. Then, the holder transporter 302 descends (moves vertically downward) toward the sample holder 502 and grasps it ( FIG. 8( b) ). The holder transporter 302 then picks up the sample holder 502 while grasping it, and moves to a position directly above the holder receptacle 208. The holder transporter 302 then descends to a height where the sample holder 502 contacts the holder receptacle 208, releases the sample holder 502, and then ascends. Thus, the sample holder 502 without a sample placed thereon is placed in the holder receptacle 208. In addition, if the sample holder 502 without a sample placed thereon is initially placed on the holder receiver 208, this step may be omitted.

[0048] Next, the holder rotation mechanism 404 rotates the sample holder 502 ( FIG. 9 ). Specifically, for example, the holder rotation mechanism 404 rotates the sample holder 502 by rotating the pedestal actuator 414 so that the guide members 514 and the sample do not interfere with each other. As shown in FIG. 9 , if the belt of the sample transport device 104 extends vertically in the drawing and the holder receiver 208 is located on the right side of the belt, the sample moves from left to right. In this case, the holder rotation mechanism 404 rotates the sample holder 502 so that the two sets of guide members 514 are located at the upper and lower sides in the drawing. A known technique may be used to control the rotation angle.

[0049] Next, the arm 416 rotates from the retracted position to the depressed position (FIGS. 10(a) to 10(c)). Specifically, for example, as shown in FIG. 10(a), when the arm 416 is in the retracted position, the arm 416 is not in contact with the tray 506 of the sample holder 502. At this time, the tray 506 is biased toward the mask portion 512, so the surface of the tray 506 and the back surface of the mask portion 512 are in contact. Then, as shown in FIG. 10(b), when the arm 416 rotates from the retracted position to the depressed position, the abutment portion 420 abuts against the protrusion 516 of the tray 506, and the tray 506 is pressed downward, as shown in FIG. 10(c). Note that FIGS. 10(a) and 10(c) are views of FIG. 10(b) viewed from the right side.

[0050] Next, the sample moving mechanism 406 moves the first push-out section 422 and the second push-out section 424 so that the space between them is located above the sample transport device 104 (FIGS. 11(a) and 11(b)). FIG. 11(a) is a diagram schematically showing the positional relationship between the sample transport device 104 and the first and second push-out sections 422 and 424. FIG. 11(b) is a bird's-eye view of the sample transport device 104 and the sample loader 106. When the sample holder 502 is transported (FIG. 8(a)), the space between the first push-out section 422 and the second push-out section 424 is located above the holder receiver 208. As the first extrusion section 422 and the second extrusion section 424 move in the direction of the arrows in Figures 11(a) and 11(b), the space between the first extrusion section 422 and the second extrusion section 424 is positioned above the sample transport device 104.

[0051] Next, the sample transporter 104 transports the sample to the end of the sample loader 106 (near the holder receiver 208) (FIG. 12). Specifically, for example, as shown in FIG. 12, the sample transporter 104 moves the sample in the direction of the arrow, thereby transporting the sample so that the sample is positioned between the first push-out section 422 and the second push-out section 424.

[0052] Next, the sample moving mechanism 406 moves the sample onto the tray 506 of the sample holder 502 (FIGS. 13(a) and 13(b)). Specifically, for example, as shown in FIGS. 13(a) and 13(b), the sample moving mechanism 406 moves the first pushing unit 422 and the second pushing unit 424 so that the space between them is positioned above the tray 506. At this time, the first pushing unit 422 pushes the sample from above the sample transporter 104 onto the tray 506, so that the sample is placed on the tray 506.

[0053] Next, the arm 416 rotates from the depressed position to the retracted position (FIGS. 14(a) and 14(b)). Specifically, for example, when the arm 416 rotates from the depressed position to the retracted position as shown in FIG. 14(a), the tray 506 is urged toward the mask portion 512 by the urging member 508 as shown in FIG. 14(b). This causes the surface of the sample to abut against the back surface of the mask portion 512.

[0054] Next, when the arm 416 is in the retracted position, the holder transporter 302 picks up the sample holder 502 and transports it to the preparation position (FIGS. 15(a) and 15(b)). Specifically, the arm 416 has been rotated to the retracted position by the steps shown in FIG. 14(a). Therefore, the holder transporter 302 does not interfere with the arm 416 even when it descends (moves vertically downward) toward the sample holder 502. The holder transporter 302 grasps the sample holder 502 and picks it up, as in FIG. 8(b). Furthermore, the holder transporter 302 moves in the horizontal plane while grasping the sample holder 502, and descends in the area directly above the holder insertion space 202. As a result, the sample holder 502 with the sample placed therein is placed in the preparation position of the holder insertion space 202.

[0055] Furthermore, a second holder transporter (not shown) transports the sample holder 502 arranged at the preparation position to the measurement chamber 204. Specifically, for example, the second holder transporter is a robot arm. The second holder transporter transports the sample holder 502 arranged at the preparation position to the measurement chamber 204 via the pre-evacuation chamber 206. Note that the second holder transporter that transports the sample holder 502 from the preparation position to the pre-evacuation chamber 206 and the second holder transporter that transports the sample holder 502 from the pre-evacuation chamber 206 to the measurement chamber 204 may each have an independent configuration. A sample is placed in the sample holder 502 transported to the measurement chamber 204. The sample is analyzed by the respective configurations described in FIG. 7 .

[0056] 16 to 21 are diagrams showing the steps until the sample in the measurement chamber 204 is transported onto the sample transporter 104. First, after the measurement is completed, the second holder transporter transports the sample holder 502 arranged in the measurement chamber 204 to the preparation position. Then, with the arm 416 in the retracted position, the holder transporter 302 picks up the sample holder 502 in the preparation position and transports it to the holder receiver 208 (FIG. 16).

[0057] Next, the holder rotation mechanism 404 rotates the sample holder 502 (FIG. 17). The steps in FIG. 17 are the same as those in FIG. 9. The holder rotation mechanism 404 rotates the sample holder 502 so that the two sets of guide parts 514 are located at the upper and lower sides in the drawing.

[0058] Next, the arm 416 rotates from the retracted position to the depressed position (FIGS. 18(a) to 18(c)). The steps in FIG. 18(a) to 18(c) are the same as those in FIG. 10(a) to 10(c), except that the sample is placed in the tray 506.

[0059] Next, the sample moving mechanism 406 moves the sample from the tray 506 of the sample holder 502 onto the sample transporter 104 (FIGS. 19(a) and 19(b)). Specifically, for example, as shown in FIGS. 19(a) and 19(b), the sample moving mechanism 406 moves the first pushing unit 422 and the second pushing unit 424 so that the space between them is positioned above the sample transporter 104. At this time, the second pushing unit 424 pushes the sample from the tray 506 onto the sample transporter 104, so that the sample is placed on the sample transporter 104.

[0060] Finally, the sample transporter 104 transports the sample from the end of the sample loader 106 to its original position (FIG. 20). Specifically, for example, as shown in FIG. 20, the sample transporter 104 transports the sample to its original position by moving the sample in the direction of the arrow.

[0061] As described above, according to the present invention, the sample loading position by the sample loader 106 can be made the same as the position where the sample holder 502 is picked up by the holder transporter 302. Furthermore, by configuring the arm 416 to be rotatable between the retracted position and the pushed-down position, interference between the holder transporter 302 and the arm 416 can be avoided when the holder transporter 302 picks up the sample holder 502 upward.

[0062] The present invention is not limited to the above embodiment, and various modifications are possible. For example, Figures 22(a) to 22(c) show an arm 416 according to a modification. The arm 416 according to this modification has a base portion 2204, a second biasing member 2206, and an abutment portion 420.

[0063] Specifically, the arm 416 has a base 2204, one end of which is rotatably supported by the actuator 418, and the other end of which is rotatably supported by the abutment portion 2202. The base 2204 is an L-shaped, plate-like member, and one end of which is rotatably supported by the actuator 418 or the like (this axis will be referred to as axis A). The other end of which is rotatably supported by the abutment portion 2202 (this axis will be referred to as axis B).

[0064] The arm 416 has an abutment portion 2202. The abutment portion 2202 is a generally rectangular plate-like member with a wider width on the side closer to the axis B, and is pivotally supported on the end of the base portion 2204. As in the above embodiment, the abutment portion 2202 desirably has a curved shape that bulges out toward the side that abuts the tray 506. However, in this modification, the portion that abuts the tray 506 may be linear. The abutment portion 2202 is pivotally supported on the end of the base portion 2204. As in the above embodiment, the abutment portion 2202 may include a first abutment portion 2202A and a second abutment portion 2202B. In this case, it is desirable that the first abutment portion 2202A and the second abutment portion 2202B have the same shape and that the first abutment portion 2202A and the second abutment portion 2202B are fixed.

[0065] The second biasing member 2206 biases the abutting portion 2202 around the axis B in a direction in which the portion of the abutting portion 2202 that abuts against the tray 506 approaches the axis A (clockwise direction around the axis B in FIGS. 22( a) to 22(c)). Specifically, for example, the second biasing member 2206 is a spring that applies a pulling force to reduce the distance between both ends. One end of the second biasing member 2206 is engaged with the end of the base 2204, and the other end is engaged with the end of the abutting portion 2202. The position at which the second biasing member 2206 of the base 2204 is engaged is the end of the wider portion on the axis A side (the lower left portion of the axis B in the drawings). The position at which the second biasing member 2206 of the abutting portion 2202 is engaged is the end portion farther from the axis A (the lower right portion of the axis B in the drawing) on ​​the opposite side (upper side) from the portion that abuts the tray 506. The second biasing member 2206 applies a pulling force to reduce the distance between the engaged portion of the base 2204 and the engaged portion of the abutting portion 2202. In this modification, the axis A is rotated by the actuator 418, while the axis B is rotated by the second biasing member 2206.

[0066] Furthermore, it is desirable to design the length between axes A and B so that axis B is located directly above the center of sample holder 502 when abutting portion 2202 abuts against protrusion 516 of tray 506 at the highest position. Furthermore, it is desirable that the arc-shaped portion of abutting portion 2202 is an arc with axis B as its center.

[0067] When the arm 416, which is in the retracted position, rotates to the depressed position, as shown in FIG. 22( a), first, a part of the abutment portion 2202 (the lower end of the center of the curved abutment portion 2202 in the drawing) abuts against the protrusion 516 of the tray 506. Then, when the actuator 418 rotates the arm 416 clockwise in the drawing, as shown in FIG. 22( b), the abutment portion 2202 presses down on the protrusion 516 of the tray 506, causing the protrusion 516 to move downward. This causes the tray 506 to move downward (near the center of the frame 504 in FIG. 22( b)). At this time, a part of the abutment portion 2202 (the lower end of the center of the curved abutment portion 2202 in the drawing) abuts against the protrusion 516 of the tray 506. Furthermore, when the actuator 418 rotates the arm 416 clockwise in the drawing, the abutting portion 2202 presses down on the protruding portion 516 of the tray 506, causing the protruding portion 516 to move downward, as shown in FIG. 22( c). This causes the tray 506 to move downward (near the center of the frame 504 in FIG. 22( c). At this time, a part of the abutting portion 2202 (the lower end of the center of the curved abutting portion 2202 in the drawing) comes into contact with the protruding portion 516 of the tray 506.

[0068] As shown in FIGS. 22( a) to 22(c), when the abutting portion 2202 abuts against the protrusion 516, the abutting portion 2202 may rotate irregularly. However, in this modification, the second biasing member 2206 applies a pulling force to shorten the distance between the engaged portion of the base 2204 and the engaged portion of the abutting portion 2202. This allows the position of the abutting portion 2202 abutting against the protrusion 516 of the tray 506 to be approximately the same regardless of the position of the base 2204. In other words, because the abutting portion 2202 is rotatably supported on the base 2204, the abutting portion 2202 also rotates in accordance with the rotation of the base 2204, allowing the position of the abutting portion 2202 abutting against the protrusion 516 to be the same. This prevents wear of the abutting portion 2202 and noise caused by rubbing against each other.

[0069] In the above, the top-illumination X-ray fluorescence analyzer 102 includes the sample loader 106, the holder tray 108, the holder insertion space 202, the measurement chamber 204, the pre-evacuation chamber 206, and the holder transporter 302. The top-illumination X-ray fluorescence analysis system 100 includes the top-illumination X-ray fluorescence analyzer 102 and the sample transporter 104. However, the top-illumination X-ray fluorescence analysis system 100 does not have to include the sample transporter 104. In other words, the top-illumination X-ray fluorescence analysis system 100 may include the sample loader 106, the holder tray 108, the holder insertion space 202, the measurement chamber 204, the pre-evacuation chamber 206, and the holder transporter 302.

[0070] REFERENCE SIGNS LIST 100 Top-illumination X-ray fluorescence analysis system, 102 Top-illumination X-ray fluorescence analysis device, 104 Sample transport machine, 106 Sample loader, 108 Holder tray, 202 Holder insertion space, 204 Measurement chamber, 206 Pre-exhaust chamber, 208 Holder receiver, 302 Holder transport machine, 304 Grip mechanism, 402 Base plate, 404 Holder rotation mechanism, 406 Sample movement mechanism, 408 Press-down mechanism, 410 Pedestal, 412 Frame member, 414 Pedestal actuator, 416 Arm, 418 Actuator, 420, 2202 Contact portion, 420A, 2202A First contact portion, 420B, 2202B Second contact portion, 2204 Base portion, 422: First pushing portion, 424: Second pushing portion, 502: Sample holder, 504: Frame body, 506: Receptacle 508: Urging member, 510: Bottom plate portion, 512: Mask portion, 514: Guide portion, 516: Protrusion portion, 702: Sample stage, 704: X-ray source, 706: Spectroscopic element, 708: Detector, 2204: Base portion, 2206: Second urging member.

Claims

1. A holder transporter that picks up a sample holder having a tray on which a sample is placed, a frame within which the tray is placed, and a biasing member inside the frame that biases the tray upward and transports it to a preparation position; a holder receiver that is provided within the transport range of the holder transporter and on which the sample holder is placed; a sample moving mechanism that moves the sample, which is transported from the outside to the inside of the transport range of the holder transporter by the sample transporter that extends between the outside and inside of the transport range of the holder transporter, onto the tray of the sample holder placed on the holder receiver; and a pressing mechanism that has an arm that is pivotally supported between a pressing position where the tray of the sample holder placed on the holder receiver is pressed downward inside the frame, and a retracted position where it does not interfere with the holder transporter, wherein the sample moving mechanism moves the sample onto the tray when the arm is in the pressing position, a holder transport mechanism for transporting the sample holder upward when the arm is in the retracted position; 2. The top-illuminated fluorescent X-ray analysis apparatus of claim 1, characterized in that the holder transporter transports the sample holder from the preparation position to the holder receiver when the arm is in the retracted position, and the sample moving mechanism moves the sample from the tray onto the sample transporter when the arm is in the depressed position.

3. The top-illumination fluorescent X-ray analyzer according to claim 2, characterized in that the arm has a contact portion that contacts the tray when in the depressed position, and the contact portion has a curved shape that bulges out on the side that contacts the tray.

4. A top-illumination fluorescent X-ray analysis apparatus as described in claim 3, characterized in that the arm further has a base portion at one end of which the arm is rotatably supported by an actuator and at the other end of which the abutment portion is rotatably supported by an actuator.

5. The top-illuminated fluorescent X-ray analyzer according to claim 4, characterized in that the abutment portion includes a first abutment portion and a second abutment portion, and the first abutment portion and the second abutment portion are positioned to sandwich the sample holder when the arm is in the pressed-down position.

6. The top-illuminated fluorescent X-ray analyzer according to claim 2, characterized in that the sample moving mechanism has: a first pushing section that pushes out the sample when moving it from the sample transport device onto the tray; and a second pushing section that pushes out the sample when moving it from the tray to the sample transport device.

7. A top-illuminated fluorescent X-ray analysis apparatus according to any one of claims 1 to 6, further comprising: a second holder transporter that transports the sample holder placed in the preparation position to a measurement chamber; an X-ray source that irradiates primary X-rays from above onto the sample placed on the sample holder in the measurement chamber; and a detector that measures the intensity of fluorescent X-rays emitted from the sample.

8. A top-illumination type X-ray fluorescence analysis system comprising the top-illumination type X-ray fluorescence analysis device according to any one of claims 1 to 6.

9. The top-illuminated X-ray fluorescence analysis system according to claim 8, further comprising the sample transport device.

Images