Ultrasonic inspection device and method for adjusting lens position

Abstract

An ultrasonic inspection device comprises: a probe (1) that performs transceiving, which involves transmitting and / or receiving ultrasonic waves to / from an inspection subject that is the target of an inspection that uses said ultrasonic waves; a scanning measurement device that scans the probe (1) in the xy plane; and a control device that controls driving of the probe (1). The probe (1) comprises: a probe body (10) that is provided with a lens (11) through which the ultrasonic waves pass, the lens (11) being provided on the inspection subject side; and an attachment (20) that is attached to the probe body (10) so as to surround the lens (11), and is provided with a plurality of protrusions (22) extending further toward the inspection subject side than the lens (11).

Description

Ultrasonic inspection device and method for adjusting lens position

[0001] The present disclosure relates to an ultrasonic inspection device and a method for adjusting the lens position.

[0002] Patent Document 1 describes "a probe holding member that holds an ultrasonic probe so as to form a gap between the surface of the subject to be inspected and the ultrasonic probe during measurement, an annular elastic material that surrounds the lower end of the probe held by the holding member and adheres to the surface of the subject to be inspected to seal the gap, a cylindrical housing arranged to open into the gap from inside the waterproof pad, and a water supply passage for introducing water from the outside of the probe holding member into the waterproof pad. A waterproof probe holding device characterized by comprising the above."

[0003] Japanese Patent Application Laid-Open No. 2012-177682

[0004] Before ultrasonic inspection, the distance between the lens through which the ultrasonic wave passes and the inspection object may be adjusted using a shim. The shim is placed on a member such as a pedestal used during adjustment and is, for example, a flat jig for adjusting the distance. However, in the technique described in Patent Document 1, the waterproof pad is arranged over the entire periphery of the lens. Therefore, the space between the shim placed on the pedestal and the lens cannot be visually confirmed, and it is impossible to check what the distance is. For this reason, distance adjustment is difficult. Also, because it cannot be visually confirmed, the lens may collide with a member such as a pedestal during distance adjustment. The problem to be solved by the present disclosure is to provide an ultrasonic inspection device and a method for adjusting the lens position that can achieve both lens protection of the probe and ease of distance adjustment using a shim.

[0005] The ultrasonic inspection apparatus of this disclosure comprises a probe that transmits or receives at least one of the ultrasonic waves to an object to be inspected using ultrasound, a scanning measuring device that scans the probe in the xy plane, and a control device that controls the driving of the probe, wherein the probe comprises a probe body having a lens through which the ultrasonic waves pass, on the side facing the object to be inspected, and an attachment that surrounds the lens and is attached to the probe body, and has a convex portion that extends further toward the object to be inspected than the lens. Other solutions will be described later in the embodiments for carrying out the invention.

[0006] This disclosure provides an ultrasonic inspection apparatus and a method for adjusting the lens position that can achieve both lens protection for the probe and ease of distance adjustment using shims.

[0007] This is a schematic diagram of the ultrasonic inspection apparatus of the present disclosure. This is a block diagram showing the specific hardware configuration of the control device. This is a cross-sectional view of the probe of the present disclosure. This is a view of part A in Figure 3 from an oblique upward direction. This is a diagram illustrating the scanning direction of the probe during ultrasonic inspection. This is a diagram illustrating the positional relationship between the scanning direction of the probe during ultrasonic inspection and the position of the protrusion of the probe. This is a diagram illustrating a method for adjusting the distance between the lens and the shim using a spacer. This is a diagram illustrating a method for adjusting the distance between the lens and the shim using a spacer in another embodiment. This is a diagram illustrating a method for adjusting the distance between the lens and the shim using a spacer in another embodiment. This is a flowchart illustrating a method for adjusting the lens position of the present disclosure in another embodiment. This is a flowchart illustrating a method for adjusting the lens position of the present disclosure in another embodiment.

[0008] The following describes embodiments for implementing this disclosure, with reference to the drawings. The following is merely an example of how to implement the invention related to this disclosure, and this disclosure is not limited to the following example. Within the description of one embodiment below, other embodiments applicable to that embodiment will also be described as appropriate. This disclosure is not limited to the following embodiment, and different embodiments can be combined or modified as appropriate without significantly impairing the effects of this disclosure. In addition, the same reference numerals will be used for the same components, and redundant explanations will be omitted. Furthermore, components having the same function will be given the same name. The illustrations are schematic, and for illustrative purposes, the actual configuration may be changed or some components may be omitted or modified between drawings without significantly impairing the effects of this disclosure. Also, the same embodiment does not necessarily need to have all the components.

[0009] Figure 1 is a schematic diagram of the ultrasonic inspection apparatus 100 of this disclosure. The ultrasonic inspection apparatus 100 is a device that performs ultrasonic inspection on an object to be inspected 103 (for example, a semiconductor wafer, etc.), which is the object of inspection using ultrasound U. By ultrasonic inspection, defects, for example, inside the object to be inspected 103 can be detected.

[0010] The ultrasonic inspection device 100 uses ultrasound U to inspect objects 1 and 103 in water W, with the probe 1 submerged in the water. Performing ultrasonic inspection in water W improves the accuracy of detecting defects inside the object 103.

[0011] The ultrasound examination apparatus 100 comprises a probe 1 equipped with a lens 11, a scanning and measuring device 101, and a control device 102. For convenience, the scanning and measuring device 101 and the control device 102 will be described first.

[0012] The scanning measurement device 101 is a device that scans the probe 1 in the xy plane. The scanning measurement device 101 includes, for example, an actuator. The control device 102 is a device that controls the driving of the probe 1. The control device 102 controls, for example, at least one of the following: the transmission of ultrasonic waves U from the probe 1, or the reception of ultrasonic waves at the probe 1. The control device 102 also controls the driving of the scanning measurement device 101.

[0013] Figure 2 is a block diagram showing the specific hardware configuration of the control device 102. The control device 102 is configured to include, for example, a CPU (Central Processing Unit) 1001, a RAM (Random Access Memory) 1002, a ROM (Read Only Memory) 1003, an I / F (Interface) 1004, a bus 1005, etc. The CPU 1001, RAM 1002, ROM 1003, and I / F 1004 are connected, for example, via the bus 1005. The control device 102 is realized when a predetermined control program (for example, the ultrasonic inspection method of this disclosure) stored in the ROM 1003 is loaded into the RAM 1002 and executed by the CPU 1001. Signals and information are exchanged between the control device 102 and various devices (servers, etc.) and external networks, etc., through the I / F 1004 in hardware terms.

[0014] Returning to Figure 1, probe 1 is a structure that transmits or receives ultrasonic waves U to the object under inspection 103, which is at least one of the two. If probe 1 is a probe that only transmits or receives ultrasonic waves U, another probe (not shown) that only transmits or receives ultrasonic waves U is positioned on the opposite side of probe 1 via the object under inspection 103.

[0015] Figure 3 is a cross-sectional view of the probe 1 of this disclosure. In this example, the distance d (Figure 6A) between the lens 11 through which the ultrasonic waves U pass and the object to be inspected 103 (Figure 1) is adjusted using a shim 40. The shim 40, also called a shim plate, is a thin metal plate, for example, used to adjust the position, height, etc., by being placed between predetermined parts. The shim 40 has a predetermined thickness. The thickness of the shim 40 can be determined, for example, by the focal length of the lens 11. As will be described in detail later, the adjustment of the distance d is performed by adjusting the vertical position (height position; distance between the end 21 and the lower end 111) of the lower end 111 of the lens 11 relative to the end 21 of the protrusion 22 constituting the attachment 20. The adjustment of the distance d is performed using a shim 40 placed on a base or other member 30 before the ultrasonic inspection. Therefore, Figure 3 illustrates the process of adjusting the distance d.

[0016] Adjusting the distance d is equivalent to adjusting the position of the lens 11. Since the method of adjusting the distance d will be mainly explained below, the following drawings will show the component 30 instead of the object to be inspected 103. However, the arrangement of each component relative to the probe 1 is the same whether it is the object to be inspected 103 or the component 30. That is, both the object to be inspected 103 and the component 30 are arranged to face, for example, the protrusion 22 of the attachment 20. Therefore, in the following explanation, the explanation of the component 30 may be replaced with that of the object to be inspected 103.

[0017] The probe 1 comprises a probe body 10, an attachment 20, a spacer 50, and a support member 60. Hereafter, the z-direction refers to the height direction of the probe 1, and the x and y-directions refer to the scanning direction of the probe 1. Furthermore, the vertical direction is conceived in accordance with the description in Figure 3, etc. Therefore, in the illustrated example, the shim 40 is placed below the probe body 10, but although not shown, the shim 40 may also be placed above the probe body 10. In the latter configuration, the "vertical direction" is reversed from what is described below.

[0018] The probe body 10 is a device that transmits or receives ultrasonic waves U to or from the object to be inspected 103 (Figure 1; in Figure 3, the member 30 is shown as described above). The probe body 10 is a probe used in a general ultrasonic inspection apparatus. The probe body 10 has a substantially cylindrical shape. The probe body 10 is connected to the scanning measurement device 101 and the control device 102 above the probe body 10 (on the opposite side from the object to be inspected 103). On the other hand, the probe body 10 is equipped with a lens 11 through which ultrasonic waves U pass, for example, at the lower end of the probe body 10 (on the side of the member 30 and the object to be inspected 103). The lens 11 faces the shim 40 and the object to be inspected 103. The probe body 10 transmits ultrasonic waves U that have passed through the lens 11 to the object to be inspected 103, or receives ultrasonic waves U reflected by the object to be inspected 103 via the lens 11.

[0019] The housing that forms the outer casing of the probe body 10 is made of metal, such as stainless steel. The probe body 10 is fixed to the support member 60 by a screw or other fastener 61.

[0020] The lens 11 has a shape that tapers toward the object to be inspected 103 (Figure 1) and the member 30. The lower end 111 of the lens 11 faces the upper surface 41 (top surface) of the shim 40. If the shim 40 is not provided, the lower end 111 faces the surface 31 of the member 30.

[0021] The attachment 20 is a component that protects the lens 11. The attachment 20 has a cylindrical shape, for example, with an inner diameter slightly smaller than the outer diameter of the probe body 10. The attachment 20 surrounds the lens 11 and is attached to the probe body 10. Attachment can be performed, for example, by fitting (screwing) the probe body 10 into the attachment 20.

[0022] The attachment 20 is positioned facing the object to be inspected 103 (Figure 1) and the member 30. Specifically, the end portion 21 of the attachment 20 directly faces, for example, the surface of the object to be inspected 103. However, there is a gap of, for example, several millimeters between the surface and the end portion 21. In addition, the attachment 20 is made of a hard material. Being made of a hard material prevents the transmission of impact to the lens 11, which is positioned inside the protrusion 22, even if the protrusion 22, which is part of the attachment 20, collides with a foreign object. The attachment 20 is made of a resin (for example, a hard resin) such as polyetheretherketone.

[0023] The attachment 20 is detachable. This allows for changing the height (vertical length) of the spacer 50 between the attachment 20 and the support member 60 by removing the attachment 20 once it has been installed and then installing a new spacer 50.

[0024] Figure 4 is a view of part A in Figure 3 from an oblique upward direction. As shown in Figures 3 and 4, the attachment 20 is provided with a protrusion 22 that extends further toward the object to be inspected 103 (Figure 1; in the example of Figure 4, the member 30 is shown as described above) than the lens 11. This prevents the lens 11, which is located further away from the object to be inspected 103 and the member 30 (lower position; recessed position) than the protrusion 22, from coming into contact with the object to be inspected 103 and the member 30. In addition, unintended protrusions, obstacles, etc. may exist on the scanning surface of the object to be inspected 103. However, by providing the protrusion 22, as described above, the protrusion 22 can be made to collide with such protrusions, etc. when scanning with the probe body 10, thereby preventing damage to the lens 11 which is positioned inside the protrusion 22.

[0025] The protrusion 22 is a portion of the lower end surface of the attachment 20 that extends (projects) locally toward the object to be inspected 103. Therefore, the lower end surface of the attachment 20 is not composed solely of surfaces of the same height, but is composed of multiple surfaces of different heights. By providing such a protrusion 22, when adjusting the position of the lens 11, for example in the z direction, the lens 11 and the shim 40 can be visually inspected, and collision between the lens 11 and the member 30 can be suppressed. This protects the lens 11. Furthermore, because these can be visually inspected, the distance d can be easily measured and adjusted.

[0026] Figure 5A illustrates the scanning direction of the probe 1 during ultrasound examination. As shown in Figure 5A, the probe 1 scans the object to be examined 103 from one end to the other, for example in the y-direction, while irradiating the object to be examined 103 with ultrasound U (Figure 1). When the probe 1 reaches the other end of the object to be examined 103, it shifts slightly in a direction perpendicular to the scanning direction (for example in the x-direction) and scans the object to be examined 103 from the other end to the first end, again for example in the y-direction. By repeating these steps, the object to be examined 103 is inspected.

[0027] Figure 5B is a diagram illustrating the positional relationship between the scanning direction of the probe 1 during ultrasound examination and the position of the protrusions 22 on the probe 1. Figure 5B is also a view of the probe 1 from above in Figure 5A. The protrusions 22 (projections) provided on the attachment 20 are arranged in multiples, for example, at equal intervals along the outer circumference of a columnar attachment 20. In the illustrated example, there are two protrusions 22. However, there may be only one protrusion 22, and they do not have to be arranged at equal intervals.

[0028] The protrusions 22 are formed in the scanning direction of the probe 1. This prevents the lens 11 from coming into contact with foreign objects, such as foreign matter, present on the object to be inspected 103. In the illustrated example, the protrusions 22 have a width (length in the x direction) in the x direction, including the y direction, which is the scanning direction of the probe 1. The larger the width, the more effectively collisions with the lens 11 can be suppressed. On the other hand, the smaller the width, the more effectively the generation and entrapment of air bubbles near the protrusions 22 can be suppressed during scanning. Therefore, it is preferable to determine the size of the width taking these factors into consideration. In addition, multiple protrusions 22 may be provided parallel to the scanning direction (for example, in the y direction). In this case, by providing multiple protrusions so as to sandwich the lens 11, it is possible to suppress foreign objects, such as foreign matter, that are larger than the distance between adjacent (including opposing) protrusions 22 (circumferential distance of the attachment 20) from colliding with the lens 11.

[0029] The shape of the protrusion 22 is not limited; for example, it may be a flat plate as shown in Figure 5B, or it may be a curved plate (bent plate), a projection, a rod, or any other shape.

[0030] Returning to Figures 3 and 4, the attachment 20 further includes a gap 23 (air gap). The gap 23 is provided between adjacent protrusions 22. The gap 23 is also formed between the lower end surface of the part of the attachment 20 other than the protrusions 22 (the part other than the end 21) and the member 30. Note that there is no gap between the end 21, which is the lower end surface of the protrusion 22, and the member 30. By providing the gap 23, the lens 11 and shim 40 can be seen through the gap 23, making it easier to measure the distance d. This makes it easy to adjust the distance d.

[0031] Preferably, the gap 23 is large enough to allow at least the lens 11 and the shim 40 to be visible from outside the attachment 20. The shim 40 is a structure (e.g., a flat plate) that is positioned opposite the lens 11 and has a predetermined thickness as described above. Having such a size makes it easier to measure the distance d (Figure 6A) between the lens 11 and the shim 40 from outside the attachment 20, and makes it easier to determine what height spacer 50 should be changed to. It is not necessary to be able to see the entire lens 11 and the entire shim 40 through the gap 23; the size of the gap 23 should be such that at least a part of the lens 11 and at least a part of the shim 40 can be seen to the extent that the distance d can be measured (understood).

[0032] The shim 40 is placed on the surface 31 of the member 30. The surface 41 of the shim 40 (the side opposite to the object to be inspected 103) and the lower end 111 of the lens 11 (the end on the side of the object to be inspected 103) face each other. When adjusting the height position of the lens 11 using the shim 40, the height position of the lens 11 is adjusted so that the lower end 111 does not come into contact with the surface 41, and the lower end 111 comes as close to the surface 41 as possible.

[0033] The shim 40 is preferably made of a material that does not easily expand with heat, and more specifically, it is made of a metal such as stainless steel. The thickness of the shim 40 is determined mainly from two perspectives, for example, the focal length of the probe body 10 and safety to avoid collision between the lower end 111 of the lens 11 and the object to be inspected 103.

[0034] The size of the gap 23 is preferably determined by the size (dimensions) of the shim 40. That is, it is preferable that the gap 23 be large enough to allow the shim 40 to be inserted. This makes it easier to position the shim 40 through the gap 23 from outside the attachment 20. Also, the larger the gap 23, the smaller the protrusion 22 becomes. Therefore, it is preferable to form the gap 23 so that it is not excessively large.

[0035] In the example of this disclosure, for example, the gap 23 and the protrusion 22 can be formed by cutting out a portion corresponding to the gap 23 at one end of a resin cylinder.

[0036] As described above, the probe 1 further comprises a support member 60 and a spacer 50. The support member 60 is a member that supports the probe body 10 on the side opposite to the object to be inspected 103 (Figure 1; a member 30 is shown in Figure 3) when viewed from the attachment 20. The support member 60 is also called a probe adapter. As the scanning measuring device 101 moves the support member 60, the probe 1 moves together with the support member 60.

[0037] As described above, the probe body 10 is fixed to the support member 60 by a screw or other fastener 61. The support member 60 is hollow, and the probe body 10 is inserted into the hollow part of the support member 60. As a result, the inner diameter of the hollow part is slightly shorter than the outer diameter of the probe body 10, and this insertion supports (fixes) the probe body 10 to the support member 60.

[0038] The spacer 50 is provided between the attachment 20 and the support member 60 in the vertical direction. The spacer 50 has a predetermined height. By changing the height of the spacer 50, the distance between the end 21 of the protrusion 22 and the lower end 111 of the lens 11 can be adjusted. This also allows the distance d between the lower end 111 of the lens 11 and the surface 41 of the shim 40 to be adjusted, thereby adjusting the height position of the lens 11.

[0039] The upper end of the spacer 50 contacts the lower end of the support member 60, and the lower end of the spacer 50 contacts the upper end of the attachment 20. The spacer 50 is, for example, ring-shaped and made of metal such as SUS. The outer diameter of the attachment 20 and the outer diameter of the spacer 50 are, for example, the same, and the outer surface of the attachment 20 and the outer surface of the spacer 50 are, for example, flush.

[0040] The spacer 50 is replaceable with another spacer 50 having a different predetermined height. For example, three spacers 50 having heights H1, H2, and H3 (where H1 > H2 > H3) are prepared in advance. If the spacer 50 currently fitted to the probe body 10 is at height H1, and it is desired to bring the lens 11 closer to the member 30, then by replacing it with a spacer 50 of height H2, for example, the distance between the end 21 of the protrusion 22 and the lower end 111 of the lens 11 can be shortened, bringing the lens 11 closer to the member 30.

[0041] One method for replacing the spacer 50 is to first remove the attachment 20 from the probe body 10, and then remove the spacer 50 from the probe body 10. Then, another spacer 50 of the desired height is fitted onto the probe body 10, and then the attachment 20 is fitted back on, thereby replacing the spacer 50.

[0042] Figures 6A and 6B illustrate a method for adjusting the distance d between the lens 11 and the shim 40 using a spacer 50. Figure 6A shows the distance d before adjustment, and Figure 6B shows the distance d after adjustment. In Figure 6B, the adjusted distance d is approximately 0, and the height positions of the lens 11 and the shim 40 are approximately the same. However, the lens 11 and the shim 40 are not in contact.

[0043] As shown in Figure 6A, before adjusting the distance d, the lens 11 and the shim 40 are separated by a certain distance. At this time, the height (length in the height direction) of the spacer 50 is H1. Therefore, in order to bring the lens 11 and the shim 40 as close as possible and make the distance d 0, the height of the spacer 50 should be changed to a length H2, which is H1 minus the distance d. Thus, as described above, after the attachment 20 and spacer 50 are removed, a spacer 50 with a height of H2 (= H1 - d) is attached as shown in Figure 6B, and finally the attachment 20 is attached. In this way, the lens 11 and the shim 40 can be brought as close as possible.

[0044] FIGS. 7A and 7B are diagrams for explaining a method of adjusting the distance d using the spacer 50 in another embodiment. In the embodiment shown in FIGS. 7A and 7B, the support member 60 has, for example, a hollow shape, a cylindrical shape, etc., and includes an inner surface 63 facing the outer surface 12 of the probe body 10. In the support member 60, irregularities 62 are provided on the inner surface 63. The irregularities 62 are at least one of protrusions or grooves formed in a spiral shape on the inner surface 63. The irregularities 62 are formed on the support member 60 so that the attachment 20 and the spacer 50 can be moved, for example, in the vertical direction along the extending direction of the central axis L of the probe body 10. Note that the central axis L usually coincides with the central axes (not shown in any case) of the spacer 50, the support member 60, and the attachment 20.

[0045] The spacer 50 has irregularities 52 engaging with the irregularities 62 on the surface 51. The surface 51 is the outer peripheral surface (outer surface) of the spacer 50. The irregularities 52 are also at least one of protrusions or grooves formed in a spiral shape on the surface 51 around the central axis L. And the spacer 50 is rotatably engaged with, for example, the spiral irregularities 62 of the support member 60 by, for example, the spiral irregularities 52. Thereby, the spacer 50 can be moved, for example, in the vertical direction along the central axis L of the probe body 10. Also, the support member 60 and the probe body 10 are fixed by the screwing tool 61 (such as a screw) as described above. For this reason, the relative positional relationship between the support member 60 and the probe body 10 does not change. Also, the spacer 50 fits into the probe body 10 together with the attachment 20.

[0046] If the spacer 50 is rotated about the central axis L in a state where the support member 60 is fixed, for example, so as not to rotate, the spacer 50 moves in the vertical direction, which is the extending direction of the central axis L, while rotating. Thereby, the probe body 10 fixed to the support member 60 moves (for example, slides inside) along the central axis L, for example, in the vertical direction inside the spacer 50 and the attachment 20. In other words, the attachment 20 in contact with the spacer 50 also moves in the vertical direction. Thereby, the height direction position of the lens 11 disposed at the lower end of the probe body 10 can be adjusted.

[0047] For example, similar to the examples shown in FIGS. 6A and 6B above, the lens 11 is moved closer to the shim 40 by the distance d before adjustment. Specifically, for example, by rotating the spacer 50 about the central axis L, the spacer 50 and the attachment 20 in contact with the spacer 50 move in the vertically upward direction (towards the support member 60). As a result, the end portion 21 of the convex portion 22 provided on the attachment 20 moves towards the side of the shim 40 (the side of the member 30). Then, as shown in FIG. 7B, by changing the degree of rotation, the distance d can be made closer to 0.

[0048] FIG. 8 is a flowchart showing a method for adjusting the position of the lens 11 of the present disclosure (hereinafter referred to as the adjustment method of the present disclosure). The flow shown in FIG. 8 can be executed using the probe 1 shown in FIGS. 6A and 6B above. The adjustment method of the present disclosure includes steps S1 to S8.

[0049] First, the shim 40 is placed on the member 30 (step S1). That is, step S1 is an arrangement step of arranging a shim 40 having a predetermined thickness between the lens 11 to be installed later and the surface 31 (a part of the member 30) facing the lens 11. Next, the probe body 10 is inserted into the support member 60, and the probe body 10 is screwed (an example of fixing using the screw fitting 61) to the support member 60 (step S2). Next, the spacer 50 is inserted into the probe body 10 (step S3), and further, the attachment 20 is inserted into the probe body 10 (step S4).

[0050] Step S4 is a mounting step of mounting the attachment 20 on the probe body 10. The probe body 10 is a structure that performs at least one of transmission or reception of ultrasonic waves U with respect to the inspection object 103, which is the object of inspection using ultrasonic waves U as described above, and includes a lens 11 through which the ultrasonic waves U pass on the side of the inspection object 103 (which is also the side of the member 30). The attachment 20 is a structure that surrounds the lens 11 and is attached to the probe body 10, and includes a convex portion 22 that extends towards the side of the inspection object 103 (which is also the side of the member 30) from the lens 11.

[0051] The attachment 20 is placed on the member 30 such that the attachment 20 covers the shim 40. This causes the protrusion 22 of the attachment 20 (especially the end portion 21) to contact the member 30 (step S5). As described above, a gap 23 is provided at the bottom of the attachment 20. Therefore, it is checked whether the distance d is the desired distance through the gap 23, which is positioned alongside the protrusion 22 (step S6). The desired distance here is, for example, a state where the distance d is approximately 0, but the lens 11 is not in contact with the shim 40. Step S6 is a confirmation step to check whether the distance d between the lens 11 and the shim 40 is the desired distance.

[0052] In step S6, if the distance d is the desired distance (Yes), the flow of the adjustment method of this disclosure ends. On the other hand, if the distance d is not the desired distance (No), step S7 is performed. In step S7, the attachment 20 and spacer 50 are removed from the probe body 10. Next, the spacer 50 is replaced with another spacer 50 having a different height (vertical length) (step S8). However, the height of the replacement spacer 50 is such that the lens 11 and the shim 40 do not come into contact. Therefore, steps S7 and S8 are adjustment steps to adjust the position of the lens 11 in the height direction of the probe body 10 when the distance d in step S6 is not the desired distance, within a range in which the lens 11 does not come into contact with the shim 40.

[0053] Steps S7 and S8 are performed by replacing a spacer 50 having a predetermined height, which is provided between the attachment 20 and the support member 60 that supports the probe body 10 on the opposite side from the object to be inspected 103 (which is also the component 30) as viewed from the attachment 20.

[0054] Thus, in steps S7 and S8 (adjustment steps), the position of the lens 11 in the height direction of the probe body 10 is adjusted by adjusting the distance between the end 21 of the attachment 20 on the side of the object to be inspected 103 and the lower end 111 (end) of the lens 11 on the side of the object to be inspected 103. However, since the attachment 20 is in contact with the member 30, the height position of the end 21 of the attachment 20 on the side of the object to be inspected 103 coincides with the height position of the surface 31 of the member 30. Therefore, by changing the height of the spacer 50, the distance between the end 21 and the lower end 111 can be changed, and thereby the distance d between the lower end 111 and the shim 40 can be changed.

[0055] After step S8, steps S3 and onward described above are performed.

[0056] Figure 9 is a flowchart showing a method for adjusting the position of the lens 11 of the present disclosure in another embodiment. The flow shown in Figure 9 can be performed using the probe 1 shown in Figures 7A and 7B.

[0057] The adjustment method of this disclosure shown in Figure 9 includes step S9 instead of steps S7 and S8 described above. Step S9 (adjustment step) corresponds to the adjustment steps S7 and S8 described above. However, in the example of Figure 9, step S9 is performed by changing the relative position of the spacer 50 and attachment 20 with respect to the support member 60, for example, in the vertical direction. The support member 60 is a structure that supports the probe body 10 on the side opposite to the object to be inspected 103 as viewed from the attachment 20. In step S9, with the support member 60 fixed, for example, the spacer 50 is rotated around its central axis L. As a result, the spacer 50 and the attachment 20 in contact with the spacer 50 move in the vertical direction, which is the direction in which the central axis L extends. In this way, the height position of the lens 11 located at the lower end of the probe body 10 can be adjusted. After step S9, step S6 is performed again.

[0058] 1 Probe 10 Probe body 100 Ultrasound inspection device 101 Scanning and measuring device 102 Control device 103 Object to be inspected 11 Lens 111 Lower end 12 Outer surface 20 Attachment 21 End 22 Protrusion 23 Gap 30 Component 31 Surface 40 Shim 41 Surface 50 Spacer 51 Surface 52 Irregularities 60 Support member 61 Screw fitting 62 Irregularities 63 Inner surface L Central axis U Ultrasound

Claims

1. An ultrasonic inspection apparatus comprising: a probe that transmits or receives ultrasonic waves to an object to be inspected, which is the object to be inspected using ultrasonic waves; a scanning measuring device that scans the probe in the xy plane; and a control device that controls the driving of the probe, wherein the probe comprises: a probe body having a lens through which the ultrasonic waves pass, on the side facing the object to be inspected; and an attachment that surrounds the lens and is attached to the probe body, and has a convex portion that extends further toward the object to be inspected than the lens.

2. An ultrasonic inspection apparatus according to claim 1, wherein the probe further comprises: a support member that supports the probe body on the side opposite to the object to be inspected when viewed from the attachment; and a spacer having a predetermined height provided between the attachment and the support member.

3. An ultrasonic inspection apparatus according to claim 2, characterized in that the spacer is replaceable with another spacer having a different predetermined height.

4. An ultrasonic inspection apparatus according to claim 1, further comprising: a support member that supports the probe body on the side opposite to the object to be inspected when viewed from the attachment, and has an inner surface facing the outer surface of the probe body, with irregularities on the inner surface; and a spacer provided between the attachment and the support member, having irregularities on its surface that interlock with the irregularities so as to be movable along the central axis of the probe body.

5. An ultrasonic inspection apparatus according to claim 1, wherein the convex portion is formed in the scanning direction of the probe.

6. An ultrasonic inspection apparatus according to claim 1, wherein the attachment is detachable.

7. An ultrasonic inspection apparatus according to claim 1, wherein the attachment is positioned opposite the object to be inspected and is made of a hard material.

8. An ultrasonic inspection apparatus according to claim 1, characterized in that the attachment has a cylindrical shape and the probe body is fitted into the attachment.

9. An ultrasonic inspection apparatus according to claim 1, wherein the protrusions are provided in a plurality, gaps are formed between adjacent protrusions, and the gaps are large enough to allow at least the lens and a shim having a predetermined thickness, which is positioned opposite the lens, to be visible from outside the attachment.

10. An ultrasonic inspection apparatus according to claim 9, characterized in that a plurality of protrusions are provided, gaps are formed between adjacent protrusions, and the gaps are of a size that allows the shim to be inserted.

11. An ultrasonic inspection apparatus according to claim 1, wherein the ultrasonic inspection apparatus is characterized in that it performs an inspection using ultrasound in water in which the probe and the object to be inspected are submerged.

12. A method for adjusting the position of a lens, comprising: a mounting step of attaching an attachment to a probe body that has a lens through which the ultrasonic waves pass, surrounding the lens and attached to the probe body, and having a protrusion that extends further toward the object to be inspected than the lens; a positioning step of placing a shim having a predetermined thickness between the lens and the surface facing the lens; and a confirmation step of confirming whether the distance between the lens and the shim is a desired distance.

13. A method for adjusting the position of a lens according to claim 12, further comprising an adjustment step of adjusting the position of the lens in the height direction of the probe body within a range in which the lens does not come into contact with the shim, wherein the adjustment step is performed by replacing a spacer having a predetermined height, which is provided between the attachment and a support member that supports the probe body on the opposite side from the object to be inspected as viewed from the attachment.

14. A method for adjusting the position of a lens according to claim 12, further comprising an adjustment step of adjusting the position of the lens in the height direction of the probe body within a range in which the lens does not contact the shim, if the distance in the confirmation step is not a desired distance, wherein the adjustment step is performed by changing the relative position of the attachment in the vertical direction with respect to a support member that supports the probe body on the opposite side from the object to be inspected, as viewed from the attachment.

15. A method for adjusting the position of a lens according to claim 12, further comprising an adjustment step of adjusting the position of the lens in the height direction of the probe body within a range in which the lens does not contact the shim if the distance in the confirmation step is not a desired distance, wherein in the adjustment step, the position of the lens in the height direction of the probe body is adjusted by adjusting the distance between the end of the attachment on the object to be inspected side and the end of the lens on the object to be inspected side.

Images