Support assembly and removal method therefor, and coating apparatus

Abstract

The present application relates to a support assembly (100) and a removal method therefor, and a coating apparatus. The support assembly (100) is applied in a furnace tube of the coating apparatus. The support assembly (100) comprises support rods (10) and support sleeve rods (30). The support sleeve rods (30) are detachably sleeved on the support rods (10) and are configured to connect an electrode assembly of the coating apparatus. The support assembly (100) is connected to the electrode assembly by means of the support sleeve rods (30), and the support sleeve rods (30) can be separately detached relative to the support rods (10). Therefore, when the electrode assembly needs to be disassembled and assembled, it is only necessary to separately remove the support sleeve rods (30), disassemble and assemble the electrode assembly relative to the support sleeve rods (30) accordingly, and then sleeve the support sleeve rods (30) back to the support rods (10).

Description

Support assembly and its dismounting method, coating equipment

[0001] Related applications

[0002] The present application claims priority to the Chinese patent application No. 202411376597.X, filed on September 29, 2024, and entitled “Support assembly and its dismounting method, coating equipment”, the contents of which are hereby incorporated by reference in its entirety. TECHNICAL FIELD

[0003] The present application relates to the technical field of photovoltaic production equipment, in particular to a support assembly and its dismounting method, coating equipment. BACKGROUND

[0004] In related technologies, the support rod used in the furnace tube of the coating equipment is a ceramic rod, which is fixed in the furnace tube by a fixed end mode. The electrode assembly needs to be installed on the support rod in advance, and then installed into the furnace tube through the support rod.

[0005] Therefore, each time the electrode assembly is installed and dismounted, the sealing plate at the rear furnace tail of the furnace tube needs to be opened, and many related components need to be dismounted and reassembled, so that the electrode assembly can be dismounted from the furnace tube by being dismounted together with the support rod. In this way, the operation is complicated, time-consuming and labor-intensive, and the fragile components such as quartz and ceramic in the furnace tube are easily damaged during dismounting. SUMMARY

[0006] Therefore, it is necessary to provide a support assembly and its dismounting method, coating equipment for facilitating the installation and dismounting of the electrode assembly.

[0007] A support assembly is used in a furnace tube of a coating equipment, and the support assembly comprises:

[0008] a support rod; and

[0009] a support sleeve rod, which is detachably sleeved on the support rod and used for connecting an electrode assembly of the coating equipment.

[0010] In one of the embodiments, the support assembly further comprises a support block, which is used for bearing the support rod in the furnace tube.

[0011] In one of the embodiments, the support block is fixed relative to the furnace tube, and the support assembly further comprises a fixing mechanism, which is arranged on the support block and used for fixing the support sleeve rod in the direction around the axis of the support rod. In one of the embodiments, the support assembly further comprises a boat bearing block, which is arranged on the support sleeve rod and rotationally stops with the support sleeve rod in the direction around the axis of the support rod.

[0012] In one of the embodiments, the fixing mechanism comprises an adjusting positioning structure, which is connected to the support block and is capable of fixing the support sleeve rod in the direction around the axis of the support rod, and the fixing angle is adjustable.

[0013] In one of the embodiments, the fixing mechanism further comprises an adjusting part, which is in a stop rotation cooperation with the support sleeve rod in the direction around the axis of the support rod.

[0014] The support block is provided with an adjusting groove for accommodating the adjusting part; the groove bottom of the adjusting groove is a circular arc surface and is coaxially arranged with the support rod, and the adjusting part is slidably arranged along the groove bottom of the adjusting groove; the adjusting positioning structure is configured to fix the adjusting part in the direction around the axis of the support rod and is operable to drive the adjusting part to slide along the groove bottom of the adjusting groove.

[0015] In one of the embodiments, the adjusting positioning structure comprises a fixing member and an adjusting member; the fixing member is connected to the support block; the adjusting member is movably connected to the fixing member, abuts against one end of the adjusting part in the direction around the axis of the support rod, and is configured to be movable relative to the fixing member to drive the adjusting part when moving.

[0016] In one of the embodiments, the fixing mechanism comprises two sets of adjusting positioning structures, and the adjusting members of the two sets of adjusting positioning structures respectively abut against two ends of the adjusting part in the direction around the axis of the support rod.

[0017] In one of the embodiments, the adjusting member is a threaded member, the fixing member is provided with a threaded hole matched with the threaded member, and the threaded member abuts against the adjusting part through the threaded hole.

[0018] In one of the embodiments, the support assembly further comprises a connecting seat, which is sleeved on the support sleeve rod and is in a stop rotation cooperation with the support sleeve rod in the direction around the axis of the support rod, and the adjusting part is connected to the connecting seat.

[0019] In one of the embodiments, the support sleeve rod is provided with a stop rotation protrusion protruding in the radial direction of the support sleeve rod, the connecting seat is provided with a first stop rotation groove matched with the stop rotation protrusion, and the support block is provided with a second stop rotation groove matched with the stop rotation protrusion.

[0020] In one of the embodiments, the stop rotation protrusion is arranged in extension along the axial direction of the support sleeve rod.

[0021] In one of the embodiments, the support block is configured with a support surface for bearing the support rod, the support surface is a cylindrical surface facing the center, and the curvature of the support surface is not greater than π.

[0022] In one of the embodiments, the support assembly comprises four support blocks, and all the support blocks are arranged at intervals.

[0023] In one embodiment, the four support blocks include two first support blocks and two second support blocks, the first support blocks and the second support blocks are configured to support two ends of the support rod in the axial direction, respectively.

[0024] In one embodiment, the first support blocks and the second support blocks are configured to have a limiting structure, the limiting structure of the first support blocks and the second support blocks are configured to limit the two ends of the support rod in the axial direction, respectively.

[0025] In one embodiment, the first support blocks include a first support part and a second support part connected to each other, the first support part is configured to support the support rod, and the second support part is configured to support the support sleeve rod.

[0026] In one embodiment, the second support blocks are detachably connected to the back door of the furnace tube.

[0027] In one embodiment, the length of the support sleeve rod is not greater than two-thirds of the length of the support rod, and the support sleeve rod is sleeved on one end of the support rod.

[0028] In one embodiment, the support assembly further includes a front boat supporting block, the front boat supporting block is arranged on the support sleeve rod and configured to be connected to the electrode assembly.

[0029] A coating equipment including the above-mentioned support assembly.

[0030] A method for disassembling a support assembly, the support assembly is the above-mentioned support assembly, the method includes:

[0031] Lifting one end of the support rod located at the furnace mouth of the furnace tube to disengage the support block;

[0032] Driving the support sleeve rod to slide along the support rod, so that the support sleeve rod and the electrode assembly connected thereto are extracted from the furnace mouth.

[0033] In one embodiment, after driving the support sleeve rod to slide along the support rod, so that the support sleeve rod and the electrode assembly connected thereto are extracted from the furnace mouth, the method further includes:

[0034] Disassembling the second support blocks;

[0035] Extracting the support rod from the back door of the furnace tube.

[0036] The details of one or more embodiments of the present application are presented in the following drawings and description. Other features, objects, and advantages of the present application will become apparent from the specification, drawings, and claims. BRIEF DESCRIPTION OF DRAWINGS

[0037] In order to make the technical solutions in the embodiments of the present application or the prior art clearer, the accompanying drawings needed in the embodiments or the prior art description will be briefly introduced. Obviously, the accompanying drawings in the following description only need to explain the present application, and for those skilled in the art, other drawings can be obtained based on the disclosed drawings without creative effort.

[0038] Fig. 1 is a structural schematic diagram of a support assembly cooperating with a furnace mouth flange and a rear furnace door of a coating equipment in an embodiment of the present application.

[0039] Fig. 2 is a partially enlarged schematic diagram of the support assembly shown in Fig. 1.

[0040] Fig. 3 is a structural schematic diagram of the support assembly cooperating with the furnace mouth flange in Fig. 1.

[0041] Fig. 4 is a structural schematic diagram of the support assembly cooperating with the rear furnace door in Fig. 1.

[0042] Fig. 5 is a structural schematic diagram of a support assembly cooperating with a furnace mouth flange and a rear furnace door of a coating equipment in another embodiment of the present application.

[0043] Fig. 6 is an enlarged schematic diagram of the support assembly shown in Fig. 5 at A.

[0044] Fig. 7 is a structural schematic diagram of a support block and an adjusting structure in the support assembly shown in Fig. 5.

[0045] Fig. 8 is another angle structural schematic diagram of the support assembly cooperating with the furnace mouth flange and the rear furnace door of the coating equipment in Fig. 5.

[0046] Fig. 9 is a sectional schematic diagram of the support assembly shown in Fig. 5 at B-B.

[0047] Fig. 10 is a sectional schematic diagram of the support assembly shown in Fig. 5 at C-C.

[0048] Fig. 11 is a sectional schematic diagram of the support assembly shown in Fig. 5 at D-D.

[0049] Fig. 12 is a flow schematic diagram of a dismounting method of the support assembly in an embodiment of the present application.

[0050] The reference signs in the detailed description are as follows: 100, support assembly; 10, support rod; 30, support sleeve rod; 31, anti-rotation convex block; 50, boat supporting block; 51, front boat supporting block; 53, rear boat supporting block; 70, clamp; 90, support block; 91, first support block; 911, first support part; 913, second support part; 93, second support block; 95, limiting structure; 110, fixing mechanism; 111, adjusting structure; 1111, adjusting part; 1113, connecting part; 130, adjusting positioning structure; 131, fixing piece; 133, adjusting piece; 150, connecting seat; 201, furnace mouth flange; 203, rear furnace door; 205, front electrode group; S, support surface; S1, adjusting groove. DETAILED DESCRIPTION

[0051] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0052] In the description of the present application, it should be understood that if these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like appear, these terms indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0053] In addition, the term "and / or" is only a description of the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B, which can represent the three cases of A alone, A and B together, and B alone. In addition, the character " / " in this paper generally represents that the front and rear associated objects are a "or" relationship. The terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "multiple" is at least two, for example, two, three, etc., unless otherwise explicitly and specifically limited.

[0054] In the present application, unless specifically defined otherwise, the terms "mount", "connected", "connecting", "fixed", and the like, should be construed broadly and can be either fixed or detachable connections, or integrally formed; can be either mechanical or electrical connections; can be direct or indirect connections, or internal or mutual interaction between two elements, unless specifically defined otherwise. The specific meanings of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.

[0055] In the present application, unless specifically defined otherwise, the first feature is "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "above", "over" and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the first feature is higher in horizontal height than the second feature. The first feature "below", "under" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the first feature is lower in horizontal height than the second feature.

[0056] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there can be an intermediate element. When an element is referred to as "connected to" another element, it can be directly connected to the other element or there can be an intermediate element. The terms "vertical", "horizontal", "up", "down", "left", "right", and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation.

[0057] Referring to FIG. 1, an embodiment of the present application provides a support assembly 100 for use in a furnace tube of a coating device. The support assembly 100 includes a support rod 10 and a support sleeve rod 30. The support sleeve rod 30 is detachably sleeved on the support rod 10 and is used to connect an electrode assembly (the electrode assembly includes a front electrode assembly 205 described below) of the coating device.

[0058] In an embodiment, the coating device can be a tube type PECVD (Plasma Enhanced Chemical Vapor Deposition) coating device.

[0059] To realize its normal function, the coating equipment further comprises a conventional furnace tube, an electrode assembly, etc., which are not described herein. The support assembly 100 is used to support the graphite boat in the furnace tube and to realize electrode feeding of the graphite boat through the electrode assembly. The two ends of the furnace tube in the length direction are a furnace port provided with a furnace port flange 201 and a rear furnace door 203. The electrode assembly specifically comprises a front electrode group 205 and a rear electrode group (not shown in the figure). The front electrode group 205 is arranged close to the furnace port, and the rear electrode group is arranged close to the rear furnace door 203. The electrode assembly needs to be connected with the support assembly 100 to realize electrode feeding of the graphite boat on the support assembly 100 through the support assembly 100.

[0060] The detachable sleeving of the support sleeve rod 30 on the support rod 10 means that the support sleeve rod 30 can be sleeved on the support rod 10 by sliding relative to the support rod 10 from one end of the support rod 10, and can also be taken out from one end of the support rod 10 by sliding relative to the support rod 10.

[0061] To meet the requirement that the support sleeve rod 30 can be sleeved on the support rod 10, the inner diameter of the support sleeve rod 30 is greater than the outer diameter of the support rod 10, and the difference between the inner diameter of the support sleeve rod 30 and the outer diameter of the support rod 10 can be but is not limited to 1 millimeter (mm)-2 mm.

[0062] The above support assembly 100 is connected with the electrode assembly through the support sleeve rod 30, and the support sleeve rod 30 can be individually detached relative to the support rod 10. Therefore, when the electrode assembly needs to be disassembled, only the support sleeve rod 30 needs to be individually detached, and the electrode assembly is correspondingly disassembled relative to the support sleeve rod 30, and then the support sleeve rod 30 is sleeved on the support rod 10. In this way, during the disassembly and assembly of the electrode assembly, the user only needs to individually take out the support sleeve rod 30 from the furnace port end of the furnace tube, and does not need to disassemble the support rod 10 from the furnace tube, thereby reducing the operation difficulty of the user and facilitating the disassembly and assembly of the electrode assembly. At the same time, since the disassembly and assembly range is smaller and the support rod 10 does not need to be detached from the furnace tube, the damage probability of the fragile quartz and ceramic in the furnace tube is also reduced.

[0063] Further, the length of the support sleeve rod 30 is not greater than two-thirds of the length of the support rod 10, and the support sleeve rod 30 is sleeved on one end of the support rod 10. Specifically, the length of the support sleeve rod 30 is half of the length of the support rod 10 ± 100 mm.

[0064] The front electrode group 205 in the electrode assembly needs to be connected with the support assembly 100, and the rear electrode group does not need to be connected with the electrode assembly. Therefore, the support sleeve rod 30 does not need to completely cover the entire support rod 10, but only needs to be sleeved on the support rod 10 close to the furnace port, so as to facilitate the disassembly and assembly of the front electrode group 205.

[0065] Please refer to Fig. 2, further, the support assembly 100 further comprises a front boat receiving block 51, which is arranged on the support sleeve rod 30 and used to connect with the electrode assembly.

[0066] The front boat receiving block 51 needs to be connected with the electrode assembly, and is specifically used to connect the front electrode assembly 205. The front electrode assembly 205 is conducted to the boat feet of the graphite boat via the front boat receiving block 51 and fed into the graphite boat.

[0067] The front boat receiving block 51 is arranged on the support sleeve rod 30, so that the front boat receiving block 51 can be removed together with the support sleeve rod 30 to be separated from the furnace port of the furnace tube together with the support sleeve rod 30. In this way, it is more convenient to perform grinding and other maintenance or replacement operations on the front boat receiving block 51.

[0068] Specifically, the support assembly 100 further comprises a rear boat receiving block 53, and the support assembly 100 comprises four front boat receiving blocks 51 and four rear boat receiving blocks 53 in total. The four front boat receiving blocks 51 can carry one group of graphite boats, and the four rear boat receiving blocks 53 can carry another group of graphite boats. In this way, the support assembly 100 can be used to carry two groups of graphite boats, and the two groups of graphite boats are arranged along the length direction of the support rod 10.

[0069] Among them, the front boat receiving block 51 is arranged on the support sleeve rod 30 outside the support rod 10, and the rear boat receiving block 53 is arranged on the part of the support rod 10 which is not sleeved with the support sleeve rod 30. Accordingly, the front boat receiving block 51 needs to be made of conductive material (such as metal), and the rear boat receiving block 53 can be made of conductive material or insulating material such as ceramic.

[0070] During the conductive working process of the front boat receiving block 51, abnormality such as discharge sparking may occur, which can cause the surface conductive performance of the front boat receiving block 51 to change. Therefore, the front boat receiving block 51 needs to be ground to maintain its good conductivity. In other words, the front boat receiving block 51 needs to be frequently maintained or regularly replaced, and the rear boat receiving block 53 does not need or rarely needs to be maintained or regularly replaced.

[0071] Further, the front boat receiving block 51 and the rear boat receiving block 53 can both be tubular structures and are respectively sleeved on the support sleeve rod 30 and the support rod 10. The support assembly 100 further comprises a plurality of clamps 70, all of which are sleeved on the support sleeve rod 30 and are respectively located at both ends of the front boat receiving block 51 and the rear boat receiving block 53.

[0072] The clamps 70 are used to position the front boat receiving block 51 and the rear boat receiving block 53 to fix the front boat receiving block 51 and the rear boat receiving block 53 at specified positions on the support rod 10 and the support sleeve rod 30 respectively, and can reduce the probability of movement of the front boat receiving block 51 and the rear boat receiving block 53 during use.

[0073] Please refer to FIG. 3 and FIG. 4, in some embodiments, the support assembly 100 further comprises a support block 90, which is used to support the support rod 10 in the furnace tube.

[0074] The support block 90 supports the support rod 10 from below, so that the support rod 10 can be stably placed in the furnace tube. The support block 90 is shaped to adapt to the support rod 10 and produces a semi-open fixation on the support rod 10. The semi-open fixation of the support block 90 on the support rod 10 is manifested in that, on the one hand, the support block 90 can produce a certain limiting effect on the support rod 10 in addition to supporting the support rod 10. On the other hand, the upper part of the support block 90 is in an open state, and the support rod 10 can move upward to disengage from the support block 90.

[0075] When it is necessary to remove the support sleeve rod 30, it is only necessary to lift the support rod 10, so that the support sleeve rod 30 can be conveniently extracted, and then the electrode assembly can be disassembled.

[0076] Further, the support block 90 is configured with a support surface S for supporting the support rod 10, the support surface S is a cylindrical surface towards the center, and the curvature of the support surface S is not greater than π.

[0077] The support rod 10 is in a column shape, and the support surface S specifically supports the peripheral side surface of the support rod 10, therefore, the support surface S being a cylindrical surface can better cooperate with the support rod 10. At the same time, in order to achieve a good support and fit relationship, the radius of the support surface S is generally consistent with the outer diameter of the support rod 10 it supports. The curvature of the support surface S is not greater than π, that is, the cross section of the support surface S is an arc line with a curvature less than a semicircle, and specifically can be a semicircular arc line, a quarter circular arc line, etc. The support surface S of such structure has an opening, rather than being completely closed, and the support rod 10 can freely enter and exit from the opening of the support surface S.

[0078] Specifically, the curvature of the support surface S is π, the cross section thereof is a semicircular arc line, and the opening of the semicircular arc line faces upward.

[0079] In other embodiments, the support surface S can also be other continuous or discontinuous curved surfaces, combinations of multiple planes or combinations of planes and curved surfaces, etc., as long as it can support the support rod 10 and produce positioning in other directions upward of the outer diameter of the support rod 10, which is not specifically limited here.

[0080] In some embodiments, the support assembly 100 comprises at least four support blocks 90, and all the support blocks 90 are arranged at intervals.

[0081] All the support blocks 90 for supporting the same support rod 10 are arranged along the length direction of the furnace tube, and at the same time arranged along the axial direction of the support rod 10 when it is located in the furnace tube, and the support surfaces S of all the support blocks 90 support different positions of the support rod 10 in an intermittent manner.

[0082] The plurality of support blocks 90 can provide more balanced support to the support rod 10, making the support rod 10 more stable and reducing the possibility of damage due to stress concentration.

[0083] Further, the four support blocks 90 include two first support blocks 91 and two second support blocks 93, which are respectively used to support the two ends of the support rod 10 in the axial direction.

[0084] In other words, the first support blocks 91 and the second support blocks 93 are installed near the furnace opening and the rear furnace door 203 when in use. On the one hand, supporting the two ends of the support rod 10 can stably form support for the entire support rod 10, so that it does not tilt to one end. On the other hand, the first support blocks 91 and the second support blocks 93 are close to the furnace opening and the rear furnace door 203, which facilitates alignment with the support rod 10 and facilitates disassembly of the first support blocks 91 and the second support blocks 93.

[0085] After the support rod 10 is placed on the first support blocks 91 and the second support blocks 93, in order to disassemble the support sleeve rod 30, only the end of the support rod 10 supported by the first support blocks 91 needs to be lifted to disengage from the first support blocks 91. At this time, the support sleeve rod 30 can be pulled out of the furnace opening, and the disassembly process is simpler and more convenient.

[0086] Further, the first support blocks 91 and the second support blocks 93 each have a limiting structure 95, and the limiting structures 95 of the first support blocks 91 and the second support blocks 93 are configured to limit the two ends of the support rod 10 in the axial direction.

[0087] The limiting structures 95 of the first support blocks 91 and the second support blocks 93 limit the support rod 10 in the axial direction when the support rod 10 is supported by them.

[0088] The limiting structures 95 are protruded relative to the support surface S and can abut the end faces of the two ends of the support rod 10 in the axial direction. In some embodiments, the height of the limiting structures 95 protruded relative to the support surface S is not greater than the radius of the support rod 10, so as to facilitate disengagement of the support rod 10 from the limiting structures 95.

[0089] In this way, the limiting structures 95 can prevent the support rod 10 from moving along its own axial direction, thereby enhancing the stability of the support rod 10 when in use. When disassembling the support sleeve rod 30 or the support rod 10, only the height of the support rod 10 needs to be lifted to exceed the limiting structures 95.

[0090] In some embodiments, the first support blocks 91 include a first support portion 911 and a second support portion 913 connected thereto, the first support portion 911 is used to support the support rod 10, and the second support portion 913 is used to support the support sleeve rod 30.

[0091] The support sleeve rod 30 is sleeved on the support rod 10 at the end close to the furnace port of the furnace tube, and the end face of the support sleeve rod 30 is spaced from the end face of the support rod 10, so that the end of the support rod 10 can be directly supported on the first support block 91. Specifically, the end of the support rod 10 is directly supported on the first support portion 911 of the first support block 91.

[0092] The first support portion 911 of the first support block 91 is used to form a support surface S, and the radius thereof matches the support rod 10. The second support portion 913 is used to form a cylindrical surface for supporting the support sleeve rod 30, and the cylindrical surface radius thereof is substantially consistent with the outer diameter of the support sleeve rod 30.

[0093] The first support block 91 directly supports the support rod 10 and the support sleeve rod 30 through the first support portion 911 and the second support portion 913 respectively, and can stably support both at the same time.

[0094] In some embodiments, the second support block 93 is detachably connected to the rear furnace door 203 of the furnace tube.

[0095] The rear furnace door 203 is provided with a mounting opening for mounting the second support block 93, and the second support block 93 can be connected to the rear furnace door 203 of the furnace tube through a connecting member, which can be but is not limited to a screw and the like. The connecting member can pass through the support surface S to connect the rear furnace door 203, and a part of the connecting member is exposed on the support surface S to serve as a limiting structure 95.

[0096] When it is necessary to separate the support rod 10 from the furnace tube, the support sleeve rod 30 and other accessories can be pulled out from the furnace port first, and then the second support block 93 is removed. Since the caliber of the mounting opening of the rear furnace door 203 for mounting the second support block 93 is obviously larger than that of the support rod 10, the support rod 10 can be pulled out together with the rear boat supporting block 53 thereon from the rear furnace door 203.

[0097] In the related art, graphite boats are generally discharged in a diagonal manner, so in the present embodiment, a diagonal structure is selected for the conductive feeding. The electrode assembly has an electrode rod and an outer insulating ceramic sleeve on the electrode rod, and the boat supporting block 50 for electrically connecting with the electrode assembly for feeding can be mounted on the support sleeve rod 30. Specifically, the boat supporting block 50 can be a front boat supporting block 51, and the electrode assembly can be a front electrode assembly 205. Accordingly, in order to meet the requirement of diagonal mounting of the boat supporting block 50, the support sleeve rod 30 can also be divided into long and short types according to the length. The length of each support sleeve rod 30 can meet the requirement of extending from the position close to the furnace port to a certain distance beyond the mounting position of the boat supporting block 50.

[0098] Please refer to FIG. 5 to FIG. 7, in some embodiments, the support block 90 is fixed relative to the furnace tube, and the support assembly 100 further comprises a fixing mechanism 110 arranged on the support block 90 and used for fixing the support sleeve rod 30 in the direction around the axis of the support rod 10. The support block 90 can be fixedly connected with the furnace mouth flange 201.

[0099] After the support assembly 100 is installed, the fixing mechanism 110 can generate a fixing effect on the support sleeve rod 30 to prevent it from rotating randomly on the support rod 10. When the support sleeve rod 30 is removed, the fixing mechanism 110 can be at least partially removed from the support block 90 to release the fixing of the support sleeve rod 30. The material of the support sleeve rod 30 is selected from high-temperature-resistant insulating materials, and can be but is not limited to ceramics.

[0100] In this way, after the support assembly 100 is installed, the support sleeve rod 30 can be more stable under the fixing of the fixing mechanism 110.

[0101] Further, the support assembly 100 further comprises a boat supporting block 50 arranged on the support sleeve rod 30 and rotationally matched with the support sleeve rod 30 in the direction around the axis of the support rod 10.

[0102] The boat supporting block 50 is used for carrying the graphite boat and connecting with the electrode assembly, and can be sleeved on the support sleeve rod 30. In the direction around the axis of the support rod 10, the angle of the boat supporting block 50 relative to the support sleeve rod 30 is fixed. When the support sleeve rod 30 is fixed by the fixing mechanism 110, the boat supporting block 50 is also fixed in the direction around the axis of the support rod 10, and accordingly, the carrying surface angle of the boat supporting block 50 for carrying the graphite boat is fixed.

[0103] In this way, under the fixing of the fixing mechanism 110, the installation angle of the boat supporting block 50 is more stable, which helps to improve the stability of the graphite boat carried thereby.

[0104] In some embodiments, the fixing mechanism 110 comprises an adjusting and positioning structure 130 connected with the support block 90 and capable of fixing the support sleeve rod 30 in the direction around the axis of the support rod 10, and the fixing angle is adjustable.

[0105] In other words, the fixing mechanism 110 fixes the support sleeve rod 30 in the direction around the axis of the support rod 10 through the adjusting and positioning structure 130, and the fixing of the support sleeve rod 30 by the fixing mechanism 110 is adjustable, and the angle of fixing the support sleeve rod 30 changes with the adjustment. During the operation of the adjustment, the fixing angle of the support sleeve rod 30 by the adjusting and positioning structure 130 changes, and after the adjustment is completed, the fixing angle is determined to fix the support sleeve rod 30.

[0106] Thus, during the installation of the support sleeve rod 30, the installation angle of the support sleeve rod 30 can be adjusted by adjusting the positioning structure 130, i.e. the angle of the boat supporting block 50 on the support sleeve rod 30 to the support surface thereof is adjusted to be appropriate. Specifically, the user can adjust the support surface of the boat supporting block 50 to be horizontal by adjusting the positioning structure 130, and then stop adjusting, so that the support surface of the boat supporting block 50 is stably horizontal to achieve the best contact with the graphite boat.

[0107] Further, the fixing mechanism 110 further comprises an adjusting part 1111 which is rotationally fixed with the support sleeve rod 30 in the direction around the axis of the support rod 10. The support block 90 has an adjusting groove S1 for accommodating the adjusting part 1111. The groove bottom of the adjusting groove S1 is a circular arc surface and is coaxially arranged with the support rod 10, and the adjusting part 1111 is slidably arranged along the groove bottom of the adjusting groove S1, so as to be able to rotate around the axis of the support rod 10 by sliding along the groove bottom of the adjusting groove S1. The adjusting positioning structure 130 is configured to fix the adjusting part 1111 in the direction around the axis of the support rod 10 and to drive the adjusting part 1111 to slide along the groove bottom of the adjusting groove S1, i.e. to drive the adjusting part 1111 to rotate around the axis of the support rod 10.

[0108] The adjusting positioning structure 130 fixes the support sleeve rod 30 rotationally fixed with the adjusting part 1111 in the direction around the axis of the support rod 10, and drives the adjusting part 1111 to adjust the fixing angle of the support sleeve rod 30 rotationally fixed with the adjusting part 1111 in the direction around the axis of the support rod 10, thereby adjusting the angle of the boat supporting block 50 rotationally fixed with the support sleeve rod 30.

[0109] The adjusting groove S1 can be constructed on the support surface S. The adjusting part 1111 can be a circular arc shape matched with the groove bottom of the adjusting groove S1, and the adjusting part 1111 is arranged between the support block 90 and the support rod 10. Specifically, the outer surface of the adjusting part 1111 faces the groove bottom of the adjusting groove S1, and the inner surface is flush with other areas of the support surface S and supports the support rod 10. Correspondingly, the outer diameter of the adjusting part 1111 is substantially the same as the diameter of the groove bottom of the adjusting groove S1, and the inner diameter of the adjusting part 1111 is substantially the same as the diameter of the support rod 10.

[0110] The way in which the adjusting part 1111 is rotationally fixed with the support sleeve rod 30 can be, but is not limited to, fixed connection, transmission connection, etc., as long as the adjusting part 1111 can drive the boat supporting block 50 to rotate around the axis of the support rod 10 through the support sleeve rod 30, and is not specifically limited here.

[0111] Thus, the adjusting part 1111 is arranged on the support block 90 with stable position, and is slidable along the groove bottom of the adjusting groove S1, that is, rotates around the axis of the support rod 10. When the installation angle of the boat supporting block 50 is adjusted, the adjusting part 1111 is driven to slide by the adjusting and positioning structure 130, and drives the boat supporting block 50 to rotate around the axis of the support rod 10 through the support sleeve rod 30 with which the adjusting part 1111 is rotationally matched. In other words, the adjusting and positioning structure 130 can transmit the fixed torque and the adjusting torque to the support sleeve rod 30 through the adjusting part 1111.

[0112] Further, the adjusting and positioning structure 130 comprises a fixing member 131 and an adjusting member 133. The fixing member 131 is connected to the support block 90. The adjusting member 133 is movably connected to the fixing member 131, abuts one end of the adjusting part 1111 in the direction around the axis of the support rod 10, and is configured to be movable relative to the fixing member 131, so as to drive the adjusting part 1111 to rotate around the axis of the support rod 10 when moved.

[0113] The fixing member 131 is fixedly connected to the support block 90 and keeps stable position. Specifically, the fixing member 131 is detachably fixedly connected to the support block 90 through a threaded member, so that the fixing member 131 can be detached when needed, so as to disassemble the support sleeve rod 30.

[0114] The adjusting member 133 abuts one end of the adjusting part 1111 and can push the adjusting part 1111 to slide along the groove bottom of the adjusting groove S1, that is, rotate around the axis of the support rod 10 when moved. Meanwhile, when the fixing member 131 is not operated, it stays at the current position and limits the adjusting part 1111 at one end, so as to fix the adjusting part 1111.

[0115] Thus, the user only needs to operate the adjusting member 133 to drive the adjusting part 1111 to move, so as to adjust the angle of the boat supporting block 50.

[0116] Further, the fixing mechanism 110 comprises two groups of adjusting and positioning structures 130. The adjusting members 133 of the two groups of adjusting and positioning structures 130 respectively abut two ends of the adjusting part 1111 in the direction around the axis of the support rod 10.

[0117] The adjusting members 133 of the two groups of adjusting and positioning structures 130 respectively abut two ends of the adjusting part 1111, that is, the adjusting members 133 of the two groups of adjusting and positioning structures 130 can respectively drive the adjusting part 1111 to rotate in two opposite directions when moved.

[0118] Thus, the user can realize bidirectional adjustment of the adjusting part 1111 through the two groups of adjusting and positioning structures 130, so as to ensure that the boat supporting block 50 can be adjusted to a suitable angle.

[0119] Further, the adjusting member 133 is a threaded member, the fixing member 131 has a threaded hole matched with the threaded member, and the threaded member passes through the threaded hole and abuts against the adjusting portion 1111.

[0120] The adjusting member 133 can be, but is not limited to, an adjusting bolt. When the adjusting member 133 rotates, the adjusting member 133 can move relative to the fixing member 131, and thus the adjusting portion 1111 is pushed correspondingly. When the adjusting member 133 does not rotate, the adjusting member 133 abuts against the adjusting portion 1111 at a fixed position, and thus the adjusting portion 1111 is positioned.

[0121] In this way, the user only needs to adjust the angle of the boat supporting block 50 by rotating the corresponding adjusting member 133. When the user stops rotating the adjusting member 133, the boat supporting block 50 stops at the adjusted angle.

[0122] In other embodiments, the adjusting and positioning structure 130 can also be a positioning clamping groove, and the adjusting portion 1111 has a positioning matching structure matched with the positioning clamping groove. Alternatively, the adjusting and positioning structure 130 can also be a positioning clamp or the like, as long as the adjusting and positioning structure 130 can position the adjusting portion 1111, and thus is not limited here.

[0123] Please refer to FIGS. 8 to 11. In some embodiments, the support assembly 100 further includes a connecting seat 150, the connecting seat 150 is sleeved on the support sleeve rod 30 and is rotationally matched with the support sleeve rod 30 in the direction around the axis of the support rod 10, and the adjusting portion 1111 is connected to the connecting seat 150.

[0124] The support assembly 100 further includes a connecting portion 1113 connected to the adjusting portion 1111, and the adjusting portion 1111 and the connecting portion 1113 jointly form an adjusting structure 111. The adjusting portion 1111 is connected to the connecting seat 150 through the connecting portion 1113, and the connecting portion 1113 is fixedly connected to the connecting seat 150.

[0125] In this way, the adjusting portion 1111 is rotationally matched with the support sleeve rod 30 through the connecting seat 150, so that the adjusting portion 1111 can stably fix the support sleeve rod 30 through the connecting seat 150. In addition, when adjusting, the rotation torque generated when the adjusting portion 1111 rotates is better transmitted to the support sleeve rod 30 through the connecting seat 150.

[0126] Further, the support sleeve rod 30 has a rotation-stopping protrusion 31 protruding in the radial direction of the support sleeve rod 30, the connecting seat 150 has a first rotation-stopping groove matched with the rotation-stopping protrusion 31, and the boat supporting block 50 has a second rotation-stopping groove matched with the rotation-stopping protrusion 31.

[0127] Thus, when the adjusting portion 1111 is driven to rotate by adjusting the positioning structure 130, the first rotation-stopping groove and the rotation-stopping protrusion 31 can be matched with each other to apply an external force to the support sleeve rod 30 to drive it to rotate. Further, the support sleeve rod 30 can apply an external force to the boat-supporting block 50 through the rotation-stopping protrusion 31 and the second rotation-stopping groove to drive it to rotate.

[0128] Further, the rotation-stopping protrusion 31 protrudes in the radial direction of the support sleeve rod 30 and can be arranged to extend in the axial direction of the support sleeve rod 30, and the first rotation-stopping groove and the second rotation-stopping groove are shaped to match the rotation-stopping protrusion 31.

[0129] Thus, the connecting seat 150 and the boat-supporting block 50 can be sleeved on the support sleeve rod 30 from one end of the support sleeve rod 30, and are embedded with the support sleeve rod 30 through the first rotation-stopping groove and the second rotation-stopping groove, respectively, and are moved to the set position in the axial direction of the support sleeve rod 30, so as to disassemble the connecting seat 150 and the boat-supporting block 50.

[0130] In some other embodiments, the support sleeve rod 30, the connecting seat 150 and the boat-supporting block 50 can also be matched through polygonal (such as triangular, quadrangular, hexagonal, etc.), non-circular arc (such as elliptical), irregular irregular shapes, etc. non-rotational shape of the matching section, as long as they can be embedded with each other and prevent the relative rotation between the support sleeve rod 30, the connecting seat 150 and the boat-supporting block 50 around the axis of the support rod 10, so as to realize the rotation of the support sleeve rod 30, the connecting seat 150 and the boat-supporting block 50 around the axis of the support rod 10, which is not limited here.

[0131] The support assembly 100, the first support block 91 and the second support block 93 are respectively arranged at positions close to the furnace mouth and the rear furnace door 203 in the furnace tube, and both are formed with a cylindrical support surface S. The support sleeve rod 30 is sleeved on the support rod 10, and the two ends in the axial direction of the support sleeve rod 30 are respectively borne on the first support block 91 and the second support block 93 and are limited between the two. The end of the support rod 10 close to the furnace mouth is directly borne on the first support portion 911 of the first support block 91, and the end of the support sleeve rod 30 close to the furnace mouth is directly borne on the second support portion 913 of the first support block 91. The support sleeve rod 30 can be disassembled relative to the support rod 10 and is used for connecting the electrode assembly. When the electrode assembly needs to be disassembled, only the end of the support rod 10 close to the furnace mouth needs to be lifted, and then the support sleeve rod 30 can be disassembled alone and used for disassembling the electrode assembly. When the support assembly 100 needs to be disassembled, the support sleeve rod 30 and other accessories can be pulled out of the furnace mouth, the connecting piece of the second support block 93 is removed, the second support block 93 is removed, and then the support rod 10 is pulled out of the rear furnace door 203 together with the rear support block 53. Correspondingly, when the support sleeve rod 30 or the support assembly 100 is installed alone, only the reverse steps need to be operated. In order to adapt to actual needs, the disassembly process of the support sleeve rod 30 and the support assembly 100 can be adjusted adaptively, which is not limited here.

[0132] Meanwhile, when the support assembly 100 is installed and used, the user can drive the adjusting part 1111 to slide in the adjusting groove S1 by rotating the adjusting part 133 as an adjusting bolt, and then drive the support sleeve rod 30 to rotate through the connecting seat 150 connected with the adjusting part 1111, that is, adjust the bearing surface of the support sleeve rod 30 to be horizontal and stop adjusting, realize fixation, and realize the best contact with the graphite boat. Similarly, when necessary, the fixing part 131 can be disassembled relative to the support block 90 before the support sleeve rod 30 is disassembled, the connecting seat 150 and the adjusting structure 111 can be disassembled alone or can be disassembled together with the support sleeve rod 30.

[0133] Since most of the parts that need to be maintained are installed on the support sleeve rod 30, the support sleeve rod 30 is disassembled from the furnace mouth, and the parts that need to be maintained can be pulled out for maintenance. The support rod 10 can not be pulled out, which reduces the operation difficulty of the user and facilitates the disassembly of the electrode assembly. At the same time, since the disassembly action range is smaller, the support rod 10 does not need to be disassembled from the furnace tube, and the damage probability of the fragile quartz and ceramic in the furnace tube is also reduced.

[0134] Please refer to FIG. 12, the application also provides a disassembly method of the support assembly 100, which is used for disassembling the above-mentioned support assembly 100. The disassembly method comprises:

[0135] S20, lifting one end of the support rod 10 to make it disengage from the support block 90.

[0136] Specifically, the lifting is that the support rod 10 is located at one end of the furnace port of the furnace tube, and the end close to the furnace port is detached from the first support block 91 and lifted to be higher than the limiting structure 95 of the first support block 91.

[0137] S40, drive the support sleeve rod 30 to slide along the support rod 10, so that the support sleeve rod 30 and the electrode assembly connected therewith are drawn out of the furnace port.

[0138] The front boat supporting block 51 provided on the support sleeve rod 30 is detached together with the support sleeve rod 30, at this time, the electrode can be disassembled or the front boat supporting block 51 can be maintained or replaced without the need to disassemble other components.

[0139] Further, the disassembly method further comprises, after the driving of the support sleeve rod 30 to slide along the support rod 10 so that the support sleeve rod 30 and the electrode assembly connected therewith are drawn out of the furnace port:

[0140] S60, disassemble the second support block 93.

[0141] Specifically, the second support block 93 can be removed only by disassembling the connecting member such as a screw connected to the second support block 93.

[0142] S80, draw the support rod 10 out of the rear furnace door 203 of the furnace tube.

[0143] After the second support block 93 is detached, the caliber of the mounting port on the rear furnace door 203 can allow the support rod 10 together with the rear boat supporting block 53 thereon to be drawn out of the rear furnace door 203.

[0144] In this way, the disassembly of the entire electrode assembly can be conveniently completed.

[0145] The application also provides an installation method of a support assembly 100, which is used for installing the above-mentioned support assembly 100, and the disassembly method comprises:

[0146] The support rod 10 is installed into the rear furnace door 203 of the furnace tube;

[0147] The second support block 93 is installed, so that the end of the support rod 10 close to the rear furnace door 203 is supported on the second support block 93;

[0148] The support sleeve rod 30 is sleeved on the support rod 10 from the end of the support rod 10 close to the furnace port, and the end of the support rod 10 close to the furnace port is supported on the first support block 91.

[0149] The application also provides a coating equipment comprising the above-mentioned support assembly 100.

[0150] The coating equipment should have all the beneficial effects of the above-mentioned support assembly 100, which will not be described here again.

[0151] Any combination of the technical features in the above-described embodiments can be made. For the sake of brevity, the foregoing description is not intended to be exhaustive or to limit the scope of the application to the precise form disclosed. Modifications and alterations can occur to others upon reading and understanding the disclosure. Accordingly, the scope of the application is intended to be limited only by the appended claims.

[0152] The above-described embodiments only express several implementation manners of the application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the patent scope of the application. It should be pointed out that, for ordinary skilled persons in the art, several modifications and improvements can be made without departing from the concept of the application, and these all belong to the protection scope of the application. Therefore, the patent protection scope of the application should be subject to the appended claims.

Claims

1. A support assembly for use in a furnace tube of a coating equipment, the support assembly comprising: a support rod (10); and a support sleeve rod (30) detachably sleeved on the support rod (10) and used for connecting an electrode assembly of the coating equipment. The support assembly further comprises a support block (90) used for bearing the support rod (10) in the furnace tube.

2. The support assembly of claim 1, wherein, The support block (90) is configured with a support surface (S) for bearing the support rod (10), the support surface (S) is a cylindrical surface towards a center, and an arc of the support surface (S) is not greater than π.

3. The support assembly of claim 2, wherein, The support assembly comprises four support blocks (90), all of which are arranged at intervals.

4. The support assembly of claim 2 or 3, wherein, The four support blocks (90) comprise two first support blocks (91) and two second support blocks (93), the first support blocks (91) and the second support blocks (93) are respectively used for bearing two ends of the support rod (10) in an axial direction.

5. The support assembly of claim 4, wherein, The first support blocks (91) and the second support blocks (93) are each configured with a limiting structure (95), the limiting structures (95) of the first support blocks (91) and the second support blocks (93) are respectively limited to two ends of the support rod (10) in the axial direction.

6. The support assembly of claim 5, wherein, The first support block (91) comprises a first support part (911) and a second support part (913) connected to each other, the first support part (911) is used for bearing the support rod (10), and the second support part (913) is used for bearing the support sleeve rod (30).

7. The support assembly of claim 5 or 6, wherein, The second support block (93) is detachably connected to a rear furnace door (203) of the furnace tube.

8. The support assembly of any of claims 5-7, wherein, The support block (90) is fixed relative to the furnace tube, and the support assembly further comprises a fixing mechanism (110) arranged on the support block (90) and used for fixing the support sleeve rod (30) in a direction around an axis of the support rod (10).

9. The support assembly of any of claims 2-8, wherein, The support assembly further comprises a boat bearing block (50) arranged on the support sleeve rod (30) and in a stop rotation fit with the support sleeve rod (30) in the direction around the axis of the support rod (10).

10. The support assembly of claim 9, wherein, The fixing mechanism (110) comprises an adjusting positioning structure (130) connected to the support block (90) and capable of fixing the support sleeve rod (30) in the direction around the axis of the support rod (10) with an adjustable fixing angle.

11. The support assembly of claim 10, wherein, The fixing mechanism (110) further comprises an adjusting part (1111) in a stop rotation fit with the support sleeve rod (30) in the direction around the axis of the support rod (10).

12. The support assembly of claim 11, wherein, ​ The support block (90) has an adjusting groove (S1) for accommodating the adjusting part (1111); the groove bottom of the adjusting groove (S1) is a circular arc surface and is coaxially arranged with the support rod (10), and the adjusting part (1111) is slidably arranged along the groove bottom of the adjusting groove (S1); the adjusting positioning structure (130) is configured to fix the adjusting part (1111) in the direction around the axis of the support rod (10) and to operatively drive the adjusting part (1111) to slide along the groove bottom of the adjusting groove (S1).

13. The support assembly of claim 12, wherein, The adjusting positioning structure (130) comprises a fixing member (131) and an adjusting member (133), the fixing member (131) is connected to the support block (90); the adjusting member (133) is movably connected to the fixing member (131), and the adjusting member (133) is in abutment with one end of the adjusting part (1111) in the direction around the axis of the support rod (10) and is configured to be movable relative to the fixing member (131) to drive the adjusting part (1111) when moved.

14. The support assembly of claim 13, wherein, The fixing mechanism (110) comprises two groups of the adjusting positioning structure (130), and the adjusting members (133) of the two groups of the adjusting positioning structure (130) are in abutment with two ends of the adjusting part (1111) in the direction around the axis of the support rod (10), respectively.

15. The support assembly of claim 13 or 14, wherein, The adjusting member (133) is a threaded member, the fixing member (131) has a threaded hole matched with the threaded member, and the threaded member is in abutment with the adjusting part (1111) through the threaded hole.

16. The support assembly of any of claims 12-15, wherein, The support assembly further comprises a connecting seat (150) sleeved on the support sleeve rod (30) and in stop rotation cooperation with the support sleeve rod (30) in the direction around the axis of the support rod (10), and the adjusting part (1111) is connected to the connecting seat (150).

17. The support assembly of claim 16, wherein, The support sleeve rod (30) has a stop rotation protrusion (31) protruding in the radial direction of the support sleeve rod (30), the connecting seat (150) has a first stop rotation groove matched with the stop rotation protrusion (31), and the boat supporting block (50) has a second stop rotation groove matched with the stop rotation protrusion (31).

18. The support assembly of claim 17, wherein, The stop rotation protrusion (31) is arranged in extension along the axial direction of the support sleeve rod (30).

19. The support assembly of any of claims 1-18, wherein, The length of the support sleeve rod (30) is not greater than two-thirds of the length of the support rod (10) and is sleeved on one end of the support rod (10).

20. The support assembly of any of claims 1-19, wherein, The support assembly further comprises a front boat supporting block (51) arranged on the support sleeve rod (30) and used for being connected with the electrode assembly.

21. A coating equipment comprising the support assembly according to any one of claims 1-20.

22. A method for disassembling a support assembly, the support assembly being the support assembly according to any one of claims 1-20, the method comprising: lifting one end of the support rod (10) located at the furnace opening of the furnace tube to disengage the support block (90); driving the support sleeve rod (30) to slide along the support rod (10) so that the support sleeve rod (30) and the electrode assembly connected therewith are drawn out of the furnace mouth.

23. The method of demolition according to claim 22, wherein, After the driving of the support sleeve rod (30) to slide along the support rod (10) so that the support sleeve rod (30) and the electrode assembly connected therewith are drawn out of the furnace mouth, the method further comprises: removing the second support block (93); drawing the support rod (10) out of the rear furnace door (203) of the furnace tube.

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