Apparatus for automatically connecting and opening / closing gas cylinder

Abstract

According to one embodiment of the present invention, disclosed is an apparatus for automatically connecting and opening / closing a gas cylinder, the apparatus comprising: a fastening module that moves forward toward a connector of a gas cylinder valve, so as to be fastened to the connector; and an opening / closing module that is positioned above the fastening module, secures a handle of the gas cylinder valve, and rotates the handle in one direction.

Description

Automatic gas cylinder connection and opening / closing device

[0001] The present invention relates to an automatic gas cylinder connection and opening / closing device for connecting to and opening / closing a gas cylinder valve.

[0002] Generally, in the manufacturing process of semiconductor devices, it is required that a type of gas suitable for the purpose of each process be supplied at a constant concentration and pressure.

[0003] Gas is stored under high pressure in designated gas containers, and gas containers containing gas harmful to the human body are stored under strict control.

[0004] For example, a CGA (compressed gas association) cylinder filled with high pressure is installed and used in a special gas supply device (gas cabinet).

[0005] Currently, users directly connect gas cylinders to special gas supply devices and open valves, and as a result, workers may be exposed to risks of injury during the transportation and installation of gas cylinders.

[0006] In addition, since gas cylinders contain flammable materials, accidents resulting in fire and explosion may occur if an electrically operated device is used to open or close them.

[0007] The problem to be solved according to one embodiment of the present invention includes connecting the gas supply line of a gas cylinder located in a gas cabinet of a gas line used in a process and enabling the automatic opening and closing of a main valve.

[0008] In addition, it includes ensuring that the operation of the device for connecting to and opening / closing the gas cylinder valve does not cause injury to workers, fire, or explosion.

[0009] The technical problems that the present invention aims to solve are not limited to those mentioned above, and other unmentioned technical problems will be clearly understood by those skilled in the art to which the present invention belongs from the description below.

[0010] To solve the above problem, a gas cylinder automatic connection and opening / closing device according to one aspect of the present invention may include a connection module that moves forward toward the connector side of a gas cylinder valve and is connected to the connector, and an opening / closing module located above the connection module, which fixes the handle of the gas cylinder valve and rotates it in one direction.

[0011] Here, the fastening module may include a first motor including an input port and an output port for injecting air, a power transmission means installed at the bottom of the first motor and including a connecting member to transmit rotational power of the first motor so as to rotate through the shaft of the first motor, and a spline assembly provided on one side of the power transmission means and rotating by the rotational power.

[0012] Here, it may further include a spline shaft that penetrates the center of the power transmission means and the spline assembly and extends toward the connector side, and a bearing member located between the power transmission means and the spline assembly and supporting the rotation of the spline shaft.

[0013] Here, the fastening module may further include a spline connecting bolt that rotates integrally with the spline assembly on the outside of the spline assembly and includes a toothed portion on its outer surface, and a fastening nut that is spaced apart from the spline connecting bolt, rotates integrally with the spline assembly, and includes a spring member on its inner side.

[0014] Here, the spline connecting bolt further includes a pressing member located on one side of the spline connecting bolt and configured to press a spring member of the fastening nut, and the pressing member can accommodate changes in the position of the fastening nut according to the thread pitch of the connector.

[0015] Here, the fastening module further includes a fixing member provided on the outer side of the spline connecting bolt and the fastening nut, and the fixing member may include a guide surface provided on its inner surface to be mutually coupled with the toothed portion.

[0016] Here, the spline assembly rotates while fixed at one point with one end fixed by a parallel key, and the spline connecting bolt can move forward along the guide surface.

[0017] Here, the fastening nut can move forward along the guide surface after being coupled with the spline connecting bolt.

[0018] Here, the opening and closing module may include a second motor spaced apart from the first motor and including an inlet port and an outlet port for injecting air, a worm gear mounted on the rotational shaft of the second motor, a worm wheel gear meshing with the worm gear and having a drive shaft perpendicular to the rotational shaft of the second motor, and a rotating assembly connected to the lower end of the drive shaft of the worm wheel gear to rotate the handle of the gas cylinder valve in a forward direction or rotate it in a reverse direction while keeping it fixed.

[0019] Here, a lifting module may be further included, which is driven to adjust the position between the opening / closing module and the gas cylinder, including a lifting member that moves in the up and down direction.

[0020] As described above, according to embodiments and various aspects of the present invention, a gas cylinder valve can be automatically connected to a gas cabinet and the gas cylinder valve can be opened and closed.

[0021] In addition, by using an air motor, the probability of fire and explosion occurring during the operation of the device for connecting to and opening / closing the gas cylinder valve can be reduced.

[0022] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the composition of the invention described in the description or claims of the present invention.

[0023] FIG. 1 is a drawing showing an automatic gas cylinder connection and opening / closing device and a gas cabinet according to one embodiment of the present invention.

[0024] FIG. 2 is a drawing showing an automatic gas cylinder connection and opening / closing device according to one embodiment of the present invention.

[0025] FIGS. 3 and 4 are drawings showing the internal configuration of a fastening module of an automatic gas cylinder connection and opening / closing device according to one embodiment of the present invention.

[0026] FIG. 5 is a drawing showing a connector of a valve to which a fastening module of a gas cylinder automatic connection and opening / closing device according to one embodiment of the present invention is connected.

[0027] FIG. 6 is a drawing showing an opening / closing module of a gas cylinder automatic connection and opening / closing device according to one embodiment of the present invention.

[0028] The present invention will be described below with reference to the attached drawings. However, the present invention may be implemented in various different forms and is therefore not limited to the embodiments described herein. Furthermore, in order to clearly explain the present invention in the drawings, parts unrelated to the explanation have been omitted, and similar parts throughout the specification have been given similar reference numerals.

[0029] Throughout the specification, when it is stated that a part is "connected (connected, in contact, combined)" with another part, this includes not only cases where they are "directly connected," but also cases where they are "indirectly connected" with other members interposed between them. Furthermore, when it is stated that a part "includes" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but rather allows for the inclusion of additional components.

[0030] The terms used herein are merely for describing specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, terms such as “comprising” or “having” are intended to indicate the presence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0031] Embodiments of the present invention will be described in detail below with reference to the attached drawings.

[0032] One embodiment of the present invention relates to an automatic connection and opening / closing device for a gas cylinder.

[0033] FIG. 1 is a drawing showing an automatic gas cylinder connection and opening / closing device and a gas cabinet according to one embodiment of the present invention.

[0034] Referring to FIG. 1, a gas cylinder automatic connection and opening / closing device (10) according to one embodiment of the present invention includes a connecting module (100) and an opening / closing module (200).

[0035] A gas cylinder automatic connection and opening / closing device (10) according to one embodiment of the present invention can be mounted on the upper inner side of a gas cabinet (C).

[0036] Inside the gas cabinet (C), a CGA (compressed gas association) cylinder (20) filled with high pressure is installed and used.

[0037] The gas cylinder valve may include a connector (V1) and a handle (V2).

[0038] The fastening module (100) can be connected to the connector (V1) of the gas cylinder (20) valve by moving forward or backward in the D2 direction.

[0039] The opening / closing module (200) is located on the upper side of the fastening module (100), fixes the handle (V2) of the gas cylinder valve, and can rotate in one direction (R1).

[0040] The opening / closing module (200) can be raised or lowered in the D1 direction for connection with the handle (V2) of the gas cylinder valve.

[0041] Accordingly, the gas cylinder valve can be automatically connected to the gas cabinet and the gas cylinder valve can be opened and closed without the operator having to manually connect the gas cylinder valve.

[0042] FIG. 2 is a drawing showing an automatic gas cylinder connection and opening / closing device according to one embodiment of the present invention.

[0043] Referring to FIG. 2, a gas cylinder automatic connection and opening / closing device (10) according to one embodiment of the present invention includes a fastening module (100) and an opening / closing module (200), and may include a housing (H) surrounding the fastening module (100) and the opening / closing module (200).

[0044] The fastening module (100) can be connected to the connector (V1) of the gas cylinder (20) valve by moving forward or backward in the D2 direction.

[0045] The fastening module (100) may include a first motor (110), a power transmission means (120), and a spline assembly (130).

[0046] The first motor (110) may include an inlet port and an outlet port into which air is injected.

[0047] The first motor (110) can be implemented as an air motor, and accordingly, the operation of the device for connecting to and opening / closing the gas cylinder valve can reduce the probability of fire and explosion.

[0048] The power transmission means (120) is installed at the bottom of the first motor (110) and includes a connecting member (121) to rotate through the shaft (111) of the first motor, thereby transmitting rotational power of the first motor (110).

[0049] Here, the shaft (111) of the first motor and the power transmission means (120) may include a pulley, and the connecting member (121) may be a belt connected in a loop shape between the shaft (111) of the first motor and the pulley of the power transmission means (120).

[0050] The spline assembly (130) to be described later is provided on one side of the power transmission means (120) and can rotate by the rotational power of the power transmission means (120).

[0051] In FIG. 3 below, a fastening module (100) of a gas cylinder automatic connection and opening / closing device according to one embodiment of the present invention is described in detail.

[0052] FIGS. 3 and 4 are drawings showing the internal configuration of a fastening module of an automatic gas cylinder connection and opening / closing device according to one embodiment of the present invention.

[0053] Referring to FIG. 3, a fastening module (100) of an automatic gas cylinder connection and opening / closing device according to one embodiment of the present invention may include a power transmission means (120), a spline assembly (130), a spline shaft (141), a bearing member (142), a spline connecting bolt (150), a fastening nut (160), and a fixing member (170).

[0054] The spline assembly (130) is provided on one side of the power transmission means (120) and can rotate by the rotational power of the power transmission means (120).

[0055] The spline assembly (130) may include a first spline assembly (131) and a second spline assembly (132).

[0056] Referring to FIG. 4, the spline connecting bolt (150) is fixed to the spline assembly (130) with a parallel key and can move back and forth along with rotation.

[0057] At this time, the spring member (162) provides elasticity to push or pull the fastening nut (160), and can control the operation when the fastening nut (160) is fastened or separated.

[0058] Referring again to FIG. 3, the first spline assembly (131) and the second spline assembly (132) are connected in parallel and may include a connecting member (133) on the inside.

[0059] The spline shaft (141) passes through the center of the power transmission means (120) and the spline assembly (130) and can be extended toward the connector.

[0060] The spline shaft (141) includes a hole on the inside, and a separate gas line (143) can be positioned in the hole.

[0061] Accordingly, after being connected to the valve connector, the gas inside the gas cylinder can be discharged to the outside.

[0062] The bearing member (142) is located between the power transmission means (120) and the spline assembly (130) and can support the rotation of the spline shaft.

[0063] The spline connecting bolt (150) rotates integrally with the spline assembly on the outside of the spline assembly and may include a toothed portion (151) on its outer surface.

[0064] Specifically, the spline connecting bolt (150) is provided in a shape that surrounds the outer side of the first spline assembly (131) so as to rotate integrally with the first spline assembly (131).

[0065] When the power transmission means (120) rotates in the R3 direction, the toothed portion (151) of the spline connecting bolt (150) rotates and moves along the groove of the guide surface (171) of the fixing member (170) to be described later.

[0066] Accordingly, the spline connecting bolt (150) advances in the D2 direction.

[0067] Meanwhile, the fastening nut (160) is positioned spaced apart from the spline connecting bolt (150), rotates integrally with the spline assembly, and may include a spring member (162) on the inside.

[0068] Specifically, the fastening nut (160) is provided in a shape that surrounds the outer side of the second spline assembly (132) so as to rotate integrally with the second spline assembly (132).

[0069] Here, the spline assembly rotates while fixed at one point with one end fixed by a parallel key, and the spline connecting bolt (150) moves forward along the guide surface.

[0070] Additionally, the spline connecting bolt (150) may include a pressing member (153) located on one side of the spline connecting bolt and configured to press the spring member (162) of the fastening nut.

[0071] The pressure member (153) can accommodate changes in the position of the fastening nut according to the thread pitch of the connector.

[0072] The thread pitch of the connector is explained in detail in Fig. 5 below.

[0073] Accordingly, when the spline connecting bolt (150) advances in the D2 direction, the pressure member (153) protruding from one side presses the spring member (162), causing the spline connecting bolt (150) and the fastening nut (160) to engage.

[0074] Afterwards, the spline connecting bolt (150) and the fastening nut (160) advance together in the D2 direction, and the connector assembly (161) located at one end of the fastening nut (160) and the connector of the valve can be combined.

[0075] A fixing member (170) is provided on the outer side of a spline connecting bolt and a fastening nut, and the fixing member may include the aforementioned guide surface (171) provided on its inner surface to be mutually coupled with the toothed portion.

[0076] That is, according to one embodiment of the present invention, since the fastening nut (160) has a different pitch of threads from the spline connecting bolt (150), even if the spline shaft rotates, it does not advance by the same pitch.

[0077] The spline connecting bolt (150) can advance or retract by any pitch along the threads on the inside of the fixed member (170), and at this time, the fastening nut (160) rotates integrally with the second spline assembly (132) and can move forward along the guide surface after being coupled with the spline connecting bolt (150).

[0078] Accordingly, in addition to the fixing force of the connector assembly (161) located at one end of the fastening nut (160) and the connector of the valve being combined, an additional fixing force can be added by the spline connecting bolt (150) advancing and applying pressure.

[0079] FIG. 5 is a drawing showing a connector of a valve to which a fastening module of a gas cylinder automatic connection and opening / closing device according to one embodiment of the present invention is connected.

[0080] As shown in Fig. 5, the CGA shape of the O2 gas cylinder may have different thread shapes and pitches depending on the gas.

[0081] The thread (V11) of the valve connector is the part to which the fastening module is connected, and as described above in FIGS. 3 and 4, it is connected to the connector assembly (161) located at one end of the fastening nut (160).

[0082] At this time, the first spline assembly (131) and the second spline assembly (132) can move back and forth by means of the connecting member (133) so that the movement of the spline connecting bolt (150) rotating inside the fixed member (170) and the movement of the fastening nut (160) are connected according to the difference arising from the shape and pitch of the screw threads.

[0083] FIG. 6 is a drawing showing an opening / closing module of a gas cylinder automatic connection and opening / closing device according to one embodiment of the present invention.

[0084] Referring to FIG. 6, the opening / closing module (200) of the gas cylinder automatic connection and opening / closing device according to one embodiment of the present invention may include a second motor (210), a worm gear (220), a worm wheel gear (230), and a rotating assembly (240).

[0085] The second motor (210) is spaced apart from the first motor and may include an inlet port and an outlet port into which air is injected.

[0086] The second motor (210) can be implemented as an air motor, and accordingly, the operation of the device for connecting to and opening / closing the gas cylinder valve can reduce the probability of fire and explosion.

[0087] The worm gear (220) can be mounted on the rotating shaft (211) of the second motor.

[0088] The worm wheel gear (230) includes a coupling part (232) that meshes with the worm gear (220) and may include a drive shaft (231) perpendicular to the rotation axis (211) of the second motor.

[0089] By meshing the worm gear (220) and the worm wheel gear (230) with each other on a rotation axis perpendicular to one another, the direction of the rotational driving force provided from the second motor (210) can be changed and the rotational driving force can be increased at the same time.

[0090] The rotating assembly (240) is connected to the lower end of the drive shaft of the worm wheel gear, and can rotate the handle of the gas cylinder valve in one direction in the forward direction (R1) or rotate it in the opposite direction in the reverse direction (R2) while keeping it fixed.

[0091] The rotating assembly (240) can be designed to interlock with the shape of the valve handle.

[0092] Accordingly, when the valve handle is seated inside the rotating assembly (240), the valve handle can be opened and closed.

[0093] Additionally, referring to FIG. 6, the gas cylinder automatic connection and opening / closing device (10) according to one embodiment of the present invention may further include a lifting module (300).

[0094] The lifting module (300) includes a lifting member that moves in the up and down direction (D1) and can be driven to adjust the position between the opening / closing module and the gas cylinder.

[0095] Meanwhile, the gas cylinder automatic connection and opening / closing device (10) according to one embodiment of the present invention may further include an input unit (not shown) for receiving a control signal from the outside.

[0096] If gas usage is completed or if it is necessary to lock the gas cylinder valve at will, the gas cylinder valve is locked by driving the second motor of the opening / closing module (200) by a control signal.

[0097] The foregoing description of the present invention is for illustrative purposes only, and those skilled in the art will understand that other specific forms can be easily modified without altering the technical spirit or essential features of the present invention. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. For example, each component described as a single unit may be implemented in a distributed manner, and components described as distributed may likewise be implemented in a combined form.

[0098] The scope of the present invention is defined by the claims set forth below, and all modifications or variations derived from the meaning and scope of the claims and equivalent concepts thereof should be interpreted as being included within the scope of the present invention.

Claims

1. A fastening module that moves forward toward the connector side of a gas cylinder valve and is fastened to the connector; and An automatic gas cylinder connection and opening / closing device comprising an opening / closing module located on the upper side of the above-mentioned connection module, which fixes the handle of the gas cylinder valve and rotates it in one direction.

2. In Paragraph 1, The above-mentioned fastening module is, A first motor including an input port and an output port for injecting air; A power transmission means installed at the bottom of the first motor and including a connecting member to rotate through the shaft of the first motor to transmit rotational power of the first motor; and An automatic gas cylinder connection and opening / closing device comprising a spline assembly that rotates by the rotational power, provided on one side of the above-mentioned power transmission means.

3. In Paragraph 2, A spline shaft penetrating the center of the power transmission means and the spline assembly and extending toward the connector; and A gas cylinder automatic connection and opening / closing device further comprising a bearing member positioned between the power transmission means and the spline assembly and supporting the rotation of the spline shaft.

4. In Paragraph 3, The above-mentioned fastening module is, A spline connecting bolt that rotates integrally with the spline assembly on the outside of the spline assembly and includes a toothed portion on its outer surface; and A gas cylinder automatic connection and opening / closing device further comprising a fastening nut positioned spaced apart from the spline connecting bolt, rotating integrally with the spline assembly, and including a spring member on the inside.

5. In Paragraph 4, The above spline connecting bolt is, It further includes a pressure member located on one side of the spline connecting bolt and arranged to press the spring member of the fastening nut, The above-mentioned pressurizing member is a gas cylinder automatic connection and opening / closing device that corresponds to positional variation of the fastening nut according to the thread pitch of the connector.

6. In Paragraph 4, The above-mentioned fastening module is, It further includes a fixing member provided on the outer side of the spline connecting bolt and the fastening nut, and The above fixed member is a gas cylinder automatic connection and opening / closing device comprising a guide surface provided on its inner surface to be mutually coupled with the above-mentioned gear portion.

7. In Paragraph 6, The above spline assembly rotates while fixed at one point with one end fixed by a parallel key, and The above spline connecting bolt is an automatic gas cylinder connecting and opening / closing device that moves forward along the guide surface.

8. In Paragraph 7, The above fastening nut is a gas cylinder automatic connection and opening / closing device that moves forward along the guide surface after being coupled with the above spline connecting bolt.

9. In Paragraph 2, The above-mentioned opening / closing module is, A second motor spaced apart from the first motor and including an input port and an output port for injecting air; A worm gear mounted on the rotating shaft of the second motor; A worm wheel gear that meshes with the worm gear and has a drive shaft perpendicular to the rotation axis of the second motor; and A gas cylinder automatic connection and opening / closing device comprising a rotating assembly connected to the lower end of the drive shaft of the above worm wheel gear, which rotates the handle of the above gas cylinder valve in a fixed state in a forward direction or rotates it in a reverse direction.

10. In Paragraph 1, A gas cylinder automatic connection and opening / closing device comprising a lifting member that moves in an up-and-down direction, and further comprising a lifting module driven to adjust the position between the opening / closing module and the gas cylinder.

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