Sidewall mounted transport apparatus

Abstract

A substrate transport apparatus includes a sealed chamber and a robot installed in the sealed chamber. The robot has a multi-link arm having an end rotary joint, that is fixed in the sealed chamber and about which the multi-link arm rotates as a unit. The end rotary joint is based on a roller cart seated in a predetermined position in the sealed chamber and fixed in the predetermined position to the sealed chamber with a kinematic coupling so that the end rotary joint is fixed in the sealed chamber. With the kinematic coupling released, the roller cart, and the robot as a unit with the roller cart, rolls freely inside the sealed chamber to and from the predetermined position through a robot removal port disposed for insertion and removal of the roller cart and robot as a unit, via a coupling to a tug outside the sealed chamber.

Description

Aty. Docket No. 390P017504-WO (PCT) / Br3339SIDEWALL MOUNTED TRANSPORT APPARATUSCROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application is a non-provisional of and claims the benefit of United States provisional patent application number 63 / 879,423 filed on September 10, 2025, the disclosure of which is incorporated by reference herein in its entirety. This application also claims the benefit of United States provisional patent application number 63 / 705,755 filed on October 10, 2024, United States provisional patent application number 63 / 706,315 filed on October 11, 2024, United States provisional patent application number 63 / 729,007 filed on December 6, 2024, and United States provisional patent application number 63 / 778,855 filed on March 27, 2025, the disclosures of which are incorporated herein by reference in their entireties.BACKGROUND1. Field

[0002] The present disclosure generally relates to substrate processing, and more particularly, to substrate transport apparatus.2. Brief Description of Related Developments

[0003] Generally, transport apparatus included within a chamber of a substrate processing apparatus, such as a semiconductor processing apparatus, are periodically maintained. Most of the transport apparatus mentioned above include extended drives that house motors and actuators of the transport apparatus. The transport apparatus’ size, combined with its position in the chamber (such as adjacent to process modules) results in lengthy and complex service procedures. ForAty. Docket No. 390P017504-WO (PCT) / Br3339 example, access to the transport apparatus includes disassembling a portion of the chamber, such as a lid of the chamber, so as to open a passage in the chamber that is large enough for the transport apparatus to pass through. A crane or lift is typically employed to remove the transport apparatus from the chamber through the passage in the top of the chamber. Additionally, the transport apparatus tend to be heavy which poses handling problems during removal and installation of the transport apparatus from and to the chamber.

[0004] Accordingly, the present disclosure addresses a number of those issues.BRIEF DESCRIPTION OF THE DRAWINGS

[0005] The foregoing aspects and other features of the present disclosure are explained in the following description, taken in connection with the accompanying drawings, wherein:

[0006] Figs. 1A and IB are exemplary schematic perspective view illustrations of a substrate processing apparatus (noting the transport chamber lid is not shown for clarity), in accordance with the present disclosure;

[0007] Fig. 2 is an exemplary schematic perspective view illustration of a transport apparatus of the substrate processing apparatus of Figs. 1A and IB, in accordance with the present disclosure;

[0008] Fig. 3 is an exemplary schematic perspective view illustration of the transport apparatus of Fig. 2 mounted or otherwise seated on an autonomous or semi-autonomous robot or service cart, in accordance with the present disclosure;

[0009] Fig. 4A illustrates a schematic perspective and top view of a transport chamber of the substrate processing apparatus of Figs. 1A and IB, in accordance with the present disclosure;Aty. Docket No. 390P017504-WO (PCT) / Br3339

[0010] Fig. 4B illustrates a selection process of transport apparatus components for installation to transport chamber of Fig. 4A, in accordance with the present disclosure;

[0011] Fig. 5A illustrates a schematic perspective and top view of a transport chamber of the substrate processing apparatus of Figs. 1A and IB, in accordance with the present disclosure;

[0012] Fig. 5B illustrates a selection process of transport apparatus components for installation to transport chamber of Fig. 5 A, in accordance with the present disclosure;

[0013] Fig. 6A illustrates a schematic perspective and top view of a transport chamber of the substrate processing apparatus of Figs. 1A and IB, in accordance with the present disclosure;

[0014] Fig. 6B illustrates a selection process of transport apparatus components for installation to transport chamber of Fig. 6A, in accordance with the present disclosure;

[0015] Figs. 7A-7C illustrate an exemplary transport apparatus installation, utilizing the autonomous or semi -autonomous robot of Fig. 3, in accordance with the present disclosure;

[0016] Fig. 8 is a schematic illustration of automatic teaching components of the substrate processing apparatus of Figs. 1A and IB for effecting an automatic teaching of the transport apparatus, in accordance with the present disclosure; and

[0017] Figs. 9-11 are exemplary flow diagrams of exemplary methods in accordance with the present disclosure.DETAILED DESCRIPTION

[0018] The following detailed description is meant to assist the understanding of one skilled in the art, and is not intended in any way to unduly limit claims connected or related to the present disclosure.Aty. Docket No. 390P017504-WO (PCT) / Br3339

[0019] The following detailed description references various figures, where like reference numbers refer to like components and features across various figures, whether specific figures are referenced, or not.

[0020] The word “each” as used herein refers to a single object (i.e., the object) in the case of a single object or each object in the case of multiple objects. The words “a,” “an,” and “the” as used herein are inclusive of “at least one” and “one or more” so as not to limit the object being referred to as being in its “singular” form.

[0021] Spatial terms such as “left,” “right,” “top,” “bottom,” “upper,” “lower,” “front,” “back,” “vertical,” and “horizontal” as may be used herein are by way of example and illustration only are not meant to limit the description and may be exchanged in position and orientation.

[0022] The terms “substantially” and “about” as may be used herein refer to a feature that may be varied within an acceptable manufacturing tolerance for a given application.

[0023] Figs. 1 A and IB illustrate schematic perspective views of an exemplary substrate processing apparatus in accordance with the present disclosure. Although the present disclosure will be described with reference to the drawings, it should be understood that the present disclosure could be embodied in many forms. In addition, any suitable size, shape or type of elements or materials could be used.

[0024] The present disclosure provide for a transport apparatus 188, 188R (also referred to herein as a robot or transfer apparatus) that is horizontally mounted to a transport chamber 125 (also referred to herein as a sealed chamber - the sealed chamber and transport apparatus 188, 188R may collectively be referred to as a transport apparatus TA) with an integrated quick connect / disconnect system.

[0025] The transport apparatus 188, 188R of the present disclosure may provide for one or more of the following: top and bottom sections of the transport chamber 125 being accessible forAty. Docket No. 390P017504-WO (PCT) / Br3339 facilities, pumps, gauges, sensors, process gas management, etc.; a platform architecture that may facilitate stacked transport chamber configurations; compatibility with autonomous cobot or service carts eliminating a need for a hoist when installing / removing the transport apparatus 188, 188R; optimization of cables, utility lines, and associated components for cobot operation; a mean time to repair in about 20 minutes or less; the transport apparatus 188, 188R being capable of handling payloads of about 6 kg or less (although the payload may weigh more than 6 kg); the transport apparatus 188, 188R having direct drive motors 201-204, 243M with a positioning repeatability of less than about 25 pm (3G); a high density system architecture accommodating 4 to 12 process modules (although there may be more than 12 or fewer than 4 process modules); high substrate throughput and operation at elevated operating temperatures (such as those of the processes section described herein); compatibility with ultra-high vacuum (such as of those processes described herein) while exhibiting ultra-low outgassing and ultra-low particle contamination; resistance to corrosion and hydrogen exposure; active thermal management, distributed control systems, sensors, and cameras to facilitate real-time data analysis, automatic teaching / calibration, and onboard diagnostics; low power consumption; and a selectably configurable transport arm 188TA structure (also referred to herein as a multi -link arm).

[0026] The substrate processing apparatus 100 includes a front end 101 and a process section 120.

[0027] The front end 101 generally includes a load port module 105 and a mini-environment 106 such as for example an equipment front-end module (EFEM). T

[0028] he load port module 105 may be box opener / loader to tool standard (BOLTS) interfaces that conform to SEMI standards E15.1, E47.1, E62, E19.5 or El.9 for 300 mm load ports, front opening or bottom opening boxes / pods and cassettes. The load port modules may be configured as 200 mm wafer / substrate interfaces, 450 mm wafer / substrate interfaces or any other suitable substrate interfaces such as for example larger or smaller semiconductor wafers / substrates, flat panels for flat panel displays, solar panels, reticles or any other suitable object. Any suitable number of load ports modules 105 may be provided.Aty. Docket No. 390P017504-WO (PCT) / Br3339

[0029] The load port module 105 may be configured to receive the containers or carriers from an overhead transport system, automatic guided vehicles, person guided vehicles, rail guided vehicles or from any other suitable transport method.

[0030] The load port module 105 may interface with the mini-environment 106 through one or more load ports 107 of the load port module(s) 105. The load ports 107 may allow the passage of substrates between the containers and the mini-environment 106.

[0031] The mini-environment 106 generally includes any suitable transport apparatus 108, such as any suitable automated transport robot for transporting substrates to and from the containers through respective load ports 107.

[0032] The transport apparatus 108 may be a track mounted robot such as that described in, for example, United States Patents 6,002,840 issued on December 14, 1999; 8,419,341 issued April 16, 2013; and 7,648,327 issued on January 19, 2010, the disclosures of which are incorporated by reference herein in their entireties, although the transport apparatus 108 may not be track mounted.

[0033] The transport apparatus 108 may be configured in the manner described herein with respect to transport apparatus 188, 188R so as to be installed and removed from the mini-environment 106 from a side of the mini-environment in a manner substantially similar to or the same as described herein with respect to the transport apparatus 188, 188R. The mini-environment 106 may provide a controlled, clean zone for substrate transfer between multiple load port modules.

[0034] The process section 120 may operate on the substrates through various deposition, etching, or other types of high vacuum processes to form electrical circuitry or other desired structure on the substrates S. Typical processes include but are not limited to thin film processes that use a vacuum such as plasma etch or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation such as ion implantation, metrology, rapid thermal processing (RTP), dry strip atomic layer deposition (ALD), oxidation / diffusion, forming ofAty. Docket No. 390P017504-WO (PCT) / Br3339 nitrides, vacuum lithography, epitaxy (EPI), wire bonder and evaporation or other thin film processes that use vacuum pressures.

[0035] The process section 120 may include suitable transport apparatus 188, 188R and / or other automation for transporting and processing the substrates.

[0036] The process section 120 includes one or more load locks 150 and a substrate transport chamber 125.

[0037] The transport chamber 125 has an isolated environment therein and the load locks 150 are cycled between the isolated environment of the transport chamber 125 and the environment of the mini-environment 106 for transferring substrates to and from the transport chamber 125; although the load locks 150 may be coupled directly to the interior of the contained s), where an interior environment of the container(s) is the same as the isolated environment to substantially reduce or eliminate cycling of the load lock 150 during substrate processing.

[0038] The transport chamber 125 may have an elongated substantially hexahedron shape with processing modules PM arrayed along one or more sides of the transport chamber 125. Any suitable number of process modules PM may be coupled to the transport chamber 125 through a corresponding number of sealable ports 125PRT (see Fig. IB).

[0039] Any suitable substrate transport apparatus 188, 188R may be provided, at least partially, within the isolated environment of the transport chamber 125 for transporting substrates between the process modules PM and the load locks 150 (or directly to the containers).

[0040] A controller 199 may be coupled to the substrate processing apparatus 100 for effecting processing of substrates through the operation (e.g., under control of the controller 199) of at least the process modules PM and workpiece transport apparatus 108, 188, 188R.Aty. Docket No. 390P017504-WO (PCT) / Br3339

[0041] Still referring to Figs. 1A and IB, the substrate transport chamber 125 is configured as a sealed chamber and may also be referred to herein as a transport chamber or vacuum chamber or sealed chamber.

[0042] The transport chamber 125 has an external body or frame 125F (see Fig. IB) that defines an internal volume that is sealable and can be placed into vacuum (e.g., the internal volume can be pumped down to vacuum pressure). The external body 125F of the transport chamber 125 has a top (not shown for clarity), a bottom 125B, and a four or more substantially vertical side walls or sides 125S (four sides are illustrated for exemplary purposes). The substantially vertical side walls or sides 125S substantially connect between the bottom 125B and the top to thereby together define the internal volume of the transport chamber 125.

[0043] The external body 125F includes the sealable ports 125PRT that are adapted to connect to process chambers of modules PM by way of slot valves SV (see Fig. IB).

[0044] At least one of the sides 125 SL (which may be one or more of two longitudinal end of the transport chamber 125) has one or two sealable ports 125PRT, for loading and unloading substrates to and from the transport chamber 125 (such as from a respective load lock 150) via the at least one of the sides 125SL.

[0045] At least three other sealable ports 125PRT are arrayed along two or more other sides 125SS (which may be referred to as lateral sides), of the four or more sides, where each of the at least three other sealable ports 125PRT being arranged for communication with processing modules PM (see, e.g., Fig. 1A).

[0046] The process modules PM are configured to perform any suitable processes on the substrates, such as the substrates noted above.

[0047] A substrate transport apparatus 188, 188R (may also be referred to herein as a robot or transfer apparatus) is installed inside the transport chamber 125. The substrate transport apparatusAty. Docket No. 390P017504-WO (PCT) / Br3339188R may be referred to herein as a replacement transport apparatus however, the substrate transport apparatus and replacement transport apparatus will generally be referred to as transport apparatus 188, 188R for ease of description.

[0048] The substrate transport apparatus 188, 188R is configured to mount and dismount the transport chamber 125 in a quick connect / disconnect manner (i.e., quick connect / disconnect meaning the rapid and easy connection / disconnection of devices with no or minimal tools).

[0049] As a non-limiting example, the sidewall of the transport chamber 125 may be configured with a first part of a quick connect mechanism or coupling QD and a flange 188FL of the substrate transport apparatus 188, 188R may be configured with a second / mating part of the coupling QD (see also Fig. 2) so as to easily and quickly connect / couple or disconnect / decouple the substrate transport apparatus 188, 188R to or from the sidewall 125S. The coupling QD may be configured to locate the substrate transport apparatus 188, 188R in a known pose (position and orientation) relative to any suitable reference datum (such as a substrate transfer plane TP - see Fig. IB) of the transport chamber 125 / substrate processing apparatus 100. A suitable example of a quick connect mechanism or coupling QD is, but is not limited to, the ONE-TOUCH FLEX clamping locators manufactured by IMAO Corporation, Japan. Mounting the transport apparatus 188, 188R to the sidewall 125S of the transport chamber 125 makes, or otherwise provides for, the top and / or bottom 125B of the sealed chamber 125 obstruction free (i.e., unobstructed by transport apparatus structure) for the connection / coupling of facilities, pumps, gauges, sensors, process gas management, and / or any other suitable instrumentation / substrate processing equipment.

[0050] Referring to Figs. IB and 4A-6B, the sidewall 125S includes a transport apparatus opening or arm access port 125SP (may also be referred to as a robot opening or robot removal port). The arm access port 125SP in the substantially vertical side wall 125S (either in an end wall or in a wall extending between the end walls, or both) accommodates placement of a transfer arm 188TA (may also be referred to as a robot arm, the transfer arm 188TA for moving the semiconductorAty. Docket No. 390P017504-WO (PCT) / Br3339 substrates) from the outside of the internal volume (formed by the external body 125F) through the arm access port 125SP into an inside of the internal volume.

[0051] The substrate transfer arm 188TA is located inside the internal volume by way of the arm access port 125SP, and is secured to the external body 125F proximate to the arm access port 125SP, such as by the quick connect mechanism or coupling QD.

[0052] The substrate transport apparatus 188, 188R is a linked robot arm (as described herein) that is adapted to move the substrates W between process chambers or modules PM, wherein the transfer arm 188TA reaches substantially perpendicularly (and / or parallel) from the substantially vertical side wall 125S to which it is secured.

[0053] The arm access port 125SP is shaped and sized so that the transfer arm 188TA may be inserted through and removed from the arm access port 125SP in an insertion / removal direction 189 by a manual or automated operation. For example, referring also to Fig. 3, the transport apparatus 188, 188R may be autonomous or semi-autonomous robot 300A or manual service cart 300B compatible, where a hoist is not needed for connection or removal of the transport apparatus 188, 188R to and from the sealed chamber 125. In the case the robot 300A is an autonomous, or semi-autonomous robot, the robot 300A may be collaborative (e.g., cobot conforming with suitable standards outlining human-robot collaboration including, but not limited to, the ISO / TS 15066 and ISO 10218 standards).

[0054] The transport apparatus 188, 188R may include any suitable coupling features 250 that couple with mating / corresponding features of the autonomous robot 300A or manual service cart 300B so that the transport apparatus 188, 188R may be carried by and transported by the autonomous robot 300A or manual service cart 300B to and from the sealed chamber 125 for installation or removal.

[0055] The base 288B (e.g., roller cart CRT) may be seated on rollers, balls or wheels 250R (generally referred to as guide rollers or rollers that form the coupling features 250) contacting atAty. Docket No. 390P017504-WO (PCT) / Br3339 least a roll-on surface (e.g., such as of tracks 333 of the autonomous robot 300A or service cart 300B or such as of surfaces 466GS of installation guide 466 of the transport chamber 125) on which the guide rollers 250R roll with the roller cart CRT and transport apparatus 188, 188R rolling freely as a unit. The roll-on surface supports the roller cart CRT and transport apparatus 188, 188Rfree standing in the transport chamber 125 with the roller cart CRT in the predetermined position PP fixed to the transport chamber 125 by the kinematic coupling.

[0056] The coupling features 250 may include any suitable guides, such as guide rollers 250R (e g., the roller, balls, wheels, etc.) and / or guide surfaces 250S, that engage with the track(s) or reciprocal guide(s) 333 of the autonomous robot 300A or manual service cart 300B, where engagement of the coupling features with the track 333 constrain movement of the transport apparatus 188, 188R relative to the autonomous robot 300A or manual service cart 300B in at least two degrees of freedom (such as in the vertical direction and horizontal direction) for effecting a transfer of the transport apparatus 188, 188R through the arm access port 125SP between the interior of the transport chamber 125 and autonomous robot 300A or manual service cart 300B.

[0057] The tracks 333 support the roller cart CRT and transport apparatus 188, 188R free standing on the autonomous robot 300A or manual service cart 300B with the roller cart CRT in a predetermined position on the autonomous robot 300A or manual service cart 300B.

[0058] The coupling features 250 may be disposed on the base 288B (e g., roller cart CRT) of the transport apparatus 188, 188R in any suitable manner for engaging the track 333 of the autonomous robot 300A or manual service cart 300B.

[0059] Referring to Fig. 2, the transfer arm 188TA may be any suitable transfer arm and is illustrated as a multi-link arm (also referred to as an articulated link transfer arm) for exemplary purposes.

[0060] The transfer arm 188TA has an end rotary joint ERJ that is fixed in the transport chamber 125 defining a fixed axis of rotation (referred to as a shoulder axis SX of rotation) about which theAty. Docket No. 390P017504-WO (PCT) / Br3339 transfer arm 188TA rotates as a unit. The transfer arm 188TA has an upper arm link 211, rotatably joined to the transfer chamber 125 at the end rotary joint ERJ and at least one end effector 213A, 213B having a substrate holding station SHS dependent from the upper arm link 211 (two end effectors are shown for illustrative purposes although there may be one end effector or more than two end effectors, each having a respective substrate holding station).

[0061] As described herein, the end rotary joint ERJ is based on a roller cart CRT that is seated in a predetermined position PP in the transport chamber 125 (see, e.g. Figs. IB, 4A-6A, and 7B), and fixed in the predetermined position PP to the transport chamber 125 with a kinematic coupling (e g., a kinematic coupling fixing six degrees of freedom or a quasi-kinematic coupling fixing less than six degrees of freedom) so that the end rotary joint ERJ is fixed in the transport chamber 125.

[0062] The roller cart CRT is configured so that, with the kinematic coupling released, the roller cart CRT, and the transport apparatus 188, 188R as a unit with the roller cart CRT, rolls freely inside the transport chamber 125 to and from the predetermined position PP through an arm access port 125SP disposed for insertion and removal of the roller cart CRT and transport apparatus 188, 188R as a unit, via a coupling to a tug (e.g., autonomous or semi -autonomous robot 300A or service cart 300B) outside the transport chamber 125 coupled to the roller cart CRT through the arm access port so as to push or pull the transport apparatus 188, 188R inside the transport chamber 125 through the arm access port 125SP.

[0063] As described herein, the transport chamber 125 is sized and shaped so that the roller cart CRT (e.g., base 288B) and transport apparatus 188, 188R roll freely inside the transport chamber 125 passing through the arm access port 125SP and effecting removal and installation of the transport apparatus 188, 188R inside the transport chamber 125 through the arm access port 125SP.

[0064] The transfer arm 188TA may include base or frame 288B that forms the roller cart CRT, where the upper arm I l l is rotatably coupled to the base 288B at the shoulder axis SX of rotation (i.e., end rotary joint ERJ). A forearm 212 is rotatably coupled to the upper arm 111 at an elbowAty. Docket No. 390P017504-WO (PCT) / Br3339 axis EX of rotation, and the at least one end effector 113A, 113B rotatably coupled to the forearm 112 at a wrist axis WX of rotation. The shoulder axis SX of rotation and wrist axis WX of rotation are illustrated as being coaxial although they need not be coaxial. The transfer arm 188TA may have more or fewer articulated arm links.

[0065] The substrate transport apparatus 188, 188R may be selectively configurable where the transfer arm 188TA is selected from a number of transfer arms AL1, AL2, AL3 (see Figs. 4B, 5B, 6B - each having a different combination of arm link lengths different from another combination of arm link lengths of another articulated arm) and the end effectors 213 A, 213B are selected from a number of different end effectors EE1, EE2, EE3 (see Figs. 4B, 5B, 6B, - e.g., the end effectors are shown in pairs my may be provided singularly, where each end effector pair has a different length than the end effectors of other the other pairs of end effectors) to configure the transfer arm 188TA for operation is transport chambers 125 having different configurations, as described herein. The upper arm link 211, the forearm 212, and at least one end effectors 213 A, 213B may collectively be referred to as arm links.

[0066] The transport apparatus 188, 188R includes a mounting assembly 270.

[0067] The mounting assembly includes the base 288B one or more spacers 270T. The one or more spacers may form part of the kinematic coupling where the one or more spacers form a substantially tension or compression coupling member to the roller cart CRT (e.g., base 288B) or transport apparatus 188, 188R.

[0068] The transfer arm 188TA is mounted or otherwise coupled to the base 288B (e.g., roller cart CRT) so as to rotate about the shoulder axis SX of rotation (the position of which is determined or otherwise set by positioning the base 288B within the transport chamber 125 as described herein).

[0069] The base 288B includes or otherwise is coupled to the one or more spacers 270T that couple the base 288B to the flange 188FL.Aty. Docket No. 390P017504-WO (PCT) / Br3339

[0070] The spacers 270T are illustrated as a pair of tubes but may be any suitable number of connecting / spacer members having any suitable configuration, shape, and size to adapt installation / mounting of the transport apparatus 188, 188R to transport chambers 125 having different configuration, as described herein.

[0071] The mounting assemblies 270 may be selected from a number of different mounting assemblies SAI, SA2, SA3 (see Figs. 4B, 5B, 6B - each having different lengths than another of the mounting assemblies) depending on and to configure the transport apparatus 188, 188R for operation in transport chambers 125 having different configurations, as described herein.

[0072] The flange 188FL may form a closure of the arm access port 125SP that closes the arm access port 125SP, and the roller cart CRT or transport arm 188TA are connected to the closure via at least part of the kinematic coupling (e.g., spacers 270T), arranged to form a substantially tension or compression coupling member to the roller cart CRT (e.g., base 288B) or transport apparatus 188, 188R.

[0073] The flange 188FL is coupled to an end of the one or more spacers 270T that is opposite the base 288B, where the spacers 270T have a length LL1, LL2, LL3 that, at least in part, positions the shoulder axis SX of rotation at a predetermined location within the transport chamber 125 with the flange 188FL coupled to the substantially vertical side wall 125S.

[0074] The base 288B may include kinematic alignment pins 250P, that with the coupling QD of the flange 188FL (e.g., the kinematic alignment pins 250P and / or the coupling QD may each form a quasi-kinematic coupling each fixing less than six degrees of freedom, where together with the spacers 270T, the kinematic alignment pins 250P and coupling QD fix six degrees of freedom forming the kinematic coupling described herein), fix the end rotary joint ERJ in the transport chamber 125.

[0075] As described herein, the transport chamber may include guiding features (e.g., tracks, guides, etc.) that interface with the coupling features 250 of the base 288B so that withAty. Docket No. 390P017504-WO (PCT) / Br3339 insertion / installation of the transport apparatus 188, 188R to the transport chamber 125, the guiding features guide coupling of the kinematic alignment pins 250P with corresponding kinematic recesses of the transport chamber 125.

[0076] The mounting assembly 270, the transfer arm 188TA, end effector(s) 213A, 213B, and substrate holding station SHS thereof depend, as a unit, from the side 125S of the chamber 125 via the coupling QD and from an interior wall of the transport chamber 125 via the kinematic alignment pins 250P.

[0077] The arm access port 125SP is disposed for and provides for insertion and removal of the transport apparatus 188, 188R as a unit through the side 125S.

[0078] The kinematic alignment pins 250P and coupling QD may be referred to as registration features that register the transfer arm 188TA and corresponding motion in at least one degree of freedom relative to a frame of reference (such as the substrate transfer plane TP) of the transport chamber 125, so that the transport apparatus is insertable and removable as a unit with the autonomous robot 300 A or manual service cart 300B.

[0079] Still referring to Fig. 2, the transfer arm 188TA includes a drive section 288DS with drive motors 201-204, 243M. Each of the drive motors 201-204M, 243 of the drive section 288DS describe each degree of freedom of kinematic motion of each link (i.e., each of the upper arm 211, forearm 212) and the at least one end effector 213A, 213B of the transfer arm 188TA moving the substrate holding station SHS through each sealable port 125PRT in at least one of the sides 125S of the transport chamber 125 (the at least one of the sides being an end side and each other side of the transport chamber 125 with a sealable port 125PRT).

[0080] At least one of the drive motors 243M of the drive section 188DS may describe a degree of freedom of the kinematic motion of the transfer arm 188TA along a Z-axis (see, e g., Fig.2), where the drive motor 243M may be disposed within the base 288B although, the transfer arm 188TA need not be provided with the Z-axis drive motor 243M.Aty. Docket No. 390P017504-WO (PCT) / Br3339

[0081] The drive section 288DS may be a distributed drive section with drive motors 201-204 distributed along the transfer arm 188TA.

[0082] Each drive motor 201-204 is included inside the transport chamber 125 so that the distributed drive section is wholly included inside a sealed environment of the transport chamber 125 between the top and bottom 125B of the transport chamber 125.

[0083] The drive section 188DS of the transfer arm 188TA may include compact, high torque direct drive motors 201-204 at each of the robot joints (i.e., corresponding to the shoulder axis SX, the elbow axis EX, and wrist axis WX) for rotationally driving a respective one of the upper arm 211, forearm 212, and end effector 213A, 213B.

[0084] The drive section 188DS may include any suitable transmission that includes pulleys and drive bands (e.g., so as to be band driven) and / or a hybrid combination of direct drive motors and drive bands.

[0085] The transfer arm 188TA, mounting assembly 270, and at least the portion of the flange 188FL interfaced with the interior of the transport chamber 125 may be corrosion and hydrogen resistant.

[0086] The transport apparatus 188 may be one or more of: sealed for ultra-high vacuum applications with low outgassing rates and low particulate contamination; be configured for high- throughput and high-temperature employment (e.g., at temperatures of about 750°C or higher); provide a pick / place accuracy of less than about 25 pm with about 3G repeatability; be configured to carry payloads / substrates of about 6kg or greater; and have a low power consumption.

[0087] A distributed controls network 260 (which may include one or more of any suitable sensors SNS and machine vision MV for on-the-fly data analysis, automatic teaching (auto-teach), automatic calibration, on-board diagnostics, and integrated thermal management for hot payload applications) may be provide for the transport apparatus 188, 188R.Aty. Docket No. 390P017504-WO (PCT) / Br3339

[0088] Portions of the distributed controls network 260 may be disposed on one or more of the transport chamber 125 and transport apparatus 188, 188R and coupled to any suitable controller 199 of the substrate processing apparatus 199.

[0089] Referring to Figs. 4A-6B, as described herein, the transport apparatus 188, 188R may be selectively configured for transport chambers 125 having different configurations.

[0090] The transport chamber is configured with a transport installation guide or feature 466 (e.g., a roll-on surface illustrated in the form of a recess in the bottom 125B of the transport chamber 125 although, the transport installation guide may have any suitable configuration (e.g., rails, tracks, etc.) for facilitating installation and removal of the transport arm 188TA to and from the transport chamber 125). The installation guide 466 is configured to receive and interface with at least a portion of the base 288B so that the base may reciprocate along the installation guide 466. For example, one or more of the rollers 250R or guide surfaces 250S may movably engage corresponding surfaces 466GS (at least one of which is a roll-on surface - see, e.g., Fig. 6B) of the installation guide 466.

[0091] One end of the transport installation guide 466 extends through or is adjacent the arm access port 125SP to provide for insertion and removal of the transport apparatus 188, 188R to and from the transport chamber 125. Another (opposite) end (e.g., end surface 466E) of the installation guide 466 is disposed within transport chamber 125 so as to locate one or more kinematic recesses KR at a predetermined location that, at least in part, effects registration of the transfer arm 188TA and corresponding motion in at least one degree of freedom relative to a frame of reference (such as the substrate transfer plane TP) of the transport chamber 125.

[0092] Referring to Figs. 4A and 4B, the side wall 125S of the transport chamber 125-3 (which is substantially similar to / the same as transfer chamber 125) has two lateral sides 125SS and two longitudinal ends 125SL although, the transport chamber may have any suitable number of facets forming the side wall 125S.Aty. Docket No. 390P017504-WO (PCT) / Br3339

[0093] The transport chamber 125-3 is configured as a six-process module chamber (although a seventh process module may be provided opposite the load locks 150 and adjacent the arm access port 125SP).

[0094] Each of the lateral sides 125SS includes three sealable ports 125PRT that are adapted to connect to process chambers of modules PM by way of slot valves SV (see Fig. IB). One of the longitudinal ends 125SL includes one or two sealable ports 125PRT, for loading and unloading substrates from the transport chamber 125 (such as from a respective load lock 150) via the longitudinal end 125SL (see Fig. 4A). Another of the longitudinal ends 125SL includes the arm access port 125SP for installing and removing the transport arm 188TA to and from the transport chamber 125-3.

[0095] To configure the transport apparatus 188, 188R for installation in the transport chamber 125-3 of Figs. 4A and 4B, the mounting assembly SAI may be chosen based on a predetermined position of the shoulder axis SX of rotation (or end rotary joint ERJ) within the transport chamber, where a length GL of the installation guide 466 may be substantially commensurate with a length LL of a selected mounting assemblies SAI so as to provide engagement / mating between the kinematic alignment pins 250P and the kinematic recesses KR, but not allow contact between an end surface 466E (in which the kinematic recesses KR are located) and a side of the base 288B (from which the kinematic alignment pins 250P extend) so that the flange 188FL may be coupled to the side 125S of the transport chamber 125 with the coupling QD without over-constraining of the coupling of the transport apparatus 188, 188R to the transport chamber 125.

[0096] In Figs. 4A and 4B the shoulder axis SX of rotation (end rotary joint ERJ) is located offset from both a lateral and longitudinal center of the transport chamber 125 although, the shoulder axis SX of rotation (end rotary joint ERJ) may be disposed along one or more of the lateral and longitudinal center. The transfer arm AL1 and end effector(s) EE1 may be selected based on a desired reach of the transfer arm 188TA for effecting transport of substrates W through each sealable port 125PRT of the transport chamber 125-3.Aty. Docket No. 390P017504-WO (PCT) / Br3339

[0097] As described herein, the kinematic alignment pins 250P of the base 288B interface (or are otherwise received by) the kinematic recesses KR to, at least in part, register the transfer arm 188TA and corresponding motion in at least one degree of freedom relative to a frame of reference (such as the substrate transfer plane TP) of the transport chamber 125.

[0098] The coupling of the flange 188FL to the side 125S of the transport chamber with the coupling QD and the engagement of the kinematic alignment pins 250P with the kinematic recesses KR kinematically locates / fixes the location of the transfer arm 188TA (e.g., a location of the shoulder axis SX of rotation / end rotary joint ERJ) at a predetermined location within the transport chamber 125 in six degrees of freedom.

[0099] As a non-limiting example, engagement of the kinematic alignment pins 250P with the kinematic recesses KR may fix the location of the transfer arm 188TA in the X, Z, Ry, Rx directions and the coupling of the flange 188FL to the side 125S may fix the location of the transfer arm 188TA in the Y and Rz directions.

[0100] As another non-limiting example, the coupling of the tubes 270T to the flange 188FL may be a released coupling that provides for limited movement of the flange 188FL relative to the tubes 270T in a direction substantially perpendicular to the longitudinal axis of the tubes 270T such that coupling of the flange 188FL to the side 125S only constrains the transfer arm in the Y direction and the engagement of the kinematic alignment pins 250P with the kinematic recesses KR constrains the location of the transfer arm 188TA in the X, Z, Ry, Rx, Rz directions.

[0101] It should be understood that the coupling between the flange 188FL and the side 125S and the coupling between the base 288B and bottom 125B may have any suitable configuration for kinematically locating (in six degrees of freedom) the transfer arm within the interior of the transfer chamber without over-constraint.

[0102] Referring to Figs. 5A and 5B, the side wall 125S of the transport chamber 125-5A (which is substantially similar to / the same as transport chamber 125 however, the chamber 125-5A isAty. Docket No. 390P017504-WO (PCT) / Br3339 configured as a 9 process module chamber although, two additional process modules may be provided opposite the load locks 150) has two lateral sides 125SS and two longitudinal ends 125SL although the transport chamber may have any suitable number of facets forming the side wall 125S.

[0103] One of the lateral sides 125SS includes five sealable ports 125PRT and the other lateral side 125SS includes four sealable ports 125PRT, the sealable ports 125PRT being adapted to connect to process chambers of modules PM by way of slot valves SV (see Fig. IB).

[0104] The lateral side 125SS with the four sealable ports 125PRT includes the arm access port 125SP at a location where the shoulder axis SX of rotation (end rotary joint ERJ) is disposed substantially along the longitudinal center of the transport chamber 125-5A although, the arm access port 125SP may be disposed (in place of any one of the sealable ports 125PRT on the lateral sides 125SS) so that the shoulder axis SX of rotation (end rotary joint ERJ) is disposed offset from the longitudinal center of the transport chamber 125-5A.

[0105] One of the longitudinal ends 125SL includes one or two sealable ports 125PRT, for loading and unloading substrates from the transport chamber 125 (such as from a respective load lock 150) via the longitudinal end 125SL (see Fig. 4A).

[0106] Another of the longitudinal ends 125SL may include one or two the sealable ports 125PRT being adapted to connect to process chambers of modules PM by way of slot valves SV.

[0107] To configure the transport apparatus 188, 188R for installation in the transport chamber 125-5A of Figs. 5A and 5B, the mounting assembly SA2 may be chosen based on a predetermined position of the shoulder axis SX of rotation (or end rotary joint ERJ) within the transport chamber, where a length GL of the installation guide 466 may be substantially commensurate with a length LL1 of a selected one of the mounting assemblies SA2 so as to provide engagement / mating between the kinematic alignment pins 250P and the kinematic recesses KR, but not allow contact between an end surface 466E (in which the kinematic recesses KR are located) and a side of theAty. Docket No. 390P017504-WO (PCT) / Br3339 base 288B (from which the kinematic alignment pins 250P extend) so that the flange 188FL may be coupled to the side 125S of the transport chamber 125 with the coupling QD without overconstraining of the coupling of the transport apparatus 188, 188R to the transport chamber 125.

[0108] In Figs. 5A and 5B the shoulder axis SX of rotation (end rotary joint ERJ) is located offset from the lateral center of the transport chamber 125 although, the shoulder axis SX of rotation (end rotary joint ERJ) may be disposed along the lateral center.

[0109] The transfer arm AL2 and end effector(s) EE2 may be selected based on a desired reach of the transfer arm 188TA for effecting transport of substrates W through each sealable port 125PRT of the transport chamber 125-5A.

[0110] As described herein, the kinematic alignment pins 250P of the base 288B interface (or are otherwise received by) the kinematic recesses KR to, at least in part, register the transfer arm 188TA and corresponding motion in at least one degree of freedom relative to a frame of reference (such as the substrate transfer plane TP) of the transport chamber 125.

[0111] The coupling of the flange 188FL to the side 125S of the transport chamber with the coupling QD and the engagement of the kinematic alignment pins 250P with the kinematic recesses KR kinematically locates / fixes the location of the transfer arm 188TA (e.g., a location of the shoulder axis SX of rotation / end rotary joint ERJ) at a predetermined location within the transport chamber 125 in six degrees of freedom.

[0112] As a non-limiting example, engagement of the kinematic alignment pins 250P with the kinematic recesses KR may fix the location of the transfer arm 188TA in the Y, Z, Ry, Rx directions and the coupling of the flange 188FL to the side 125S may fix the location of the transfer arm 188TA in the Z and Rz directions.

[0113] As another non-limiting example, the coupling of the tubes 270T to the flange 188FL may be a released coupling that provides for limited movement of the flange 188FL relative to the tubesAty. Docket No. 390P017504-WO (PCT) / Br3339270T in a direction substantially perpendicular to the longitudinal axis of the tubes 270T such that coupling of the flange 188FL to the side 125 S only constrains the transfer arm in the X direction and the engagement of the kinematic alignment pins 25 OP with the kinematic recesses KR constrains the location of the transfer arm 188TA in the Y, Z, Ry, Rx, Rz directions.

[0114] It should be understood that the coupling between the flange 188FL and the side 125S and the coupling between the base 288B and bottom 125B may have any suitable configuration for kinematically locating (in six degrees of freedom) the transfer arm within the interior of the transfer chamber without over-constraint.

[0115] Referring to Figs. 6A and 6B, the side wall 125S of the transport chamber 125-5B (which is substantially similar to / the same as transport chamber 125 however, the chamber 125-5A is configured as a 10 process module chamber although, one additional process module may be provided opposite the load locks 150 and adjacent the arm access port 125SP) has two lateral sides 125SS and two longitudinal ends 125SL although the transport chamber may have any suitable number of facets forming the side wall 125S.

[0116] Each of the lateral sides 125SS includes five sealable ports 125PRT adapted to connect to process chambers of modules PM by way of slot valves SV (see Fig. IB). One of the longitudinal ends 125SL includes one or two sealable ports 125PRT, for loading and unloading substrates from the transport chamber 125 (such as from a respective load lock 150) via the longitudinal end 125SL (see Fig. 4A).

[0117] Another of the longitudinal ends 125SL includes the arm access port 125SP for installing and removing the transport arm 188TA (and transport apparatus 188, 188R) to and from the transport chamber 125-5B.

[0118] To configure the transport apparatus 188, 188R for installation in the transport chamber 125-5B of Figs. 6A and 6B, the mounting assembly SA3 may be chosen based on a predetermined position of the shoulder axis SX of rotation (or end rotary joint ERJ) within the transport chamber,Aty. Docket No. 390P017504-WO (PCT) / Br3339 where a length GL of the installation guide 466 may be substantially commensurate with a length LL2 of a selected one of the mounting assemblies SA3 so as to provide engagement / mating between the kinematic alignment pins 250P and the kinematic recesses KR, but not allow contact between an end surface 466E (in which the kinematic recesses KR are located) and a side of the base 288B (from which the kinematic alignment pins 250P extend) so that the flange 188FL may be coupled to the side 125S of the transport chamber 125 with the coupling QD without overconstraining of the coupling of the transport apparatus 188, 188R to the transport chamber 125.

[0119] In Figs. 6A and 6B the shoulder axis SX of rotation (end rotary joint ERJ) is located offset from the lateral center of the transport chamber 125-5B (although, the shoulder axis SX of rotation (end rotary joint ERJ) may be disposed along the lateral center) and along the longitudinal center of the transport chamber 125-5B (although, the shoulder axis SX of rotation (end rotary joint ERJ) may be disposed offset from the longitudinal center).

[0120] The transfer arm AL2 and end effector(s) EE2 may be selected based on a desired reach of the transfer arm 188TA for effecting transport of substrates W through each sealable port 125PRT of the transport chamber 125-5B.

[0121] As described herein, the kinematic alignment pins 250P of the base 288B interface (or are otherwise received by) the kinematic recesses KR to, at least in part, register the transfer arm 188TA and corresponding motion in at least one degree of freedom relative to a frame of reference (such as the substrate transfer plane TP) of the transport chamber 125. The coupling of the flange 188FL to the side 125S of the transport chamber with the coupling QD and the engagement of the kinematic alignment pins 250P with the kinematic recesses KR kinematically locates / fixes the location of the transfer arm 188TA (e.g., a location of the shoulder axis SX of rotation / end rotary joint ERJ) at a predetermined location within the transport chamber 125 in six degrees of freedom.

[0122] As a non-limiting example, engagement of the kinematic alignment pins 250P with the kinematic recesses KR may fix the location of the transfer arm 188TA in the X, Z, Ry, RxAty. Docket No. 390P017504-WO (PCT) / Br3339 directions and the coupling of the flange 188FL to the side 125S may fix the location of the transfer arm 188TA in the Y and Rz directions.

[0123] As another non-limiting example, the coupling of the tubes 270T to the flange 188FL may be a released coupling that provides for limited movement of the flange 188FL relative to the tubes 270T in a direction substantially perpendicular to the longitudinal axis of the tubes 270T such that coupling of the flange 188FL to the side 125S only constrains the transfer arm in the Y direction and the engagement of the kinematic alignment pins 250P with the kinematic recesses KR constrains the location of the transfer arm 188TA in the X, Z, Ry, Rx, Rz directions.

[0124] It should be understood that the coupling between the flange 188FL and the side 125S and the coupling between the base 288B and bottom 125B may have any suitable configuration for kinematically locating (in six degrees of freedom) the transfer arm within the interior of the transfer chamber without over-constraint.

[0125] Referring again to Fig. 2, the transport apparatus 188, 188R includes a controls interface 290 that is configured to communi cably couple the transport apparatus 188, 188R to one or more of the distributed controls network 260, the controller 199, the autonomous or semi-autonomous robot 300A, and the service cart 300B.

[0126] The controls interface 290 provides for operation of the transfer arm 188TA through the controller 199, where the controller 199 communicates with the drive section 288DS (and other suitable electronics of the transfer arm 188TA) through the controls interface 290 for controlling the transfer arm 188TA and effecting substrate transport with the transfer arm 188TA.

[0127] The controls interface 290 provides for a direct connection between the transfer arm 188TA and the autonomous or semi-autonomous robot 300A and the service cart 300B for effecting servicing and / or installation / removal of the transport apparatus 188, 188R.Aty. Docket No. 390P017504-WO (PCT) / Br3339

[0128] Homing of the transfer arm 188TA, operation of coupling pins (such as of the coupling QD or any other pins that may be spring loaded or otherwise electronically movable), etc. may be effected manually or automatically through the autonomous or semi-autonomous robot 300A and the service cart 300B via the controls interface 290.

[0129] A home position of the transfer arm 188TA may align the arm links of the transfer arm 188TA with the mounting assembly 270 so that the transfer arm 188TA is disposed to pass through the arm access port 125SP although, the home position of the arm may be any suitable position the arm from which arm motions are measured or otherwise determined.

[0130] Still referring to Fig. 2, the flange 188FL may include a view port or window 223 that provides for viewing of the transfer arm 188TA with the transport apparatus 188, 188R installed to a transport chamber 125. The view port 223 may provide for any suitable machine vision CMV of the autonomous or semi-autonomous robot 300A and the service cart 300B to image the transfer arm 188TA to effect any suitable operation of the transfer arm 188TA including, but not limited to, the homing of the transfer arm 188TA, calibrating the transfer arm 188TA (where the machine vision CMV serves as “encoders” while servicing the transfer arm 188TA), and positioning of the transfer arm 188TA for maintenance tasks.

[0131] Referring to Figs. 1-7C and 9, an exemplary method for removing the transport apparatus 188, 188R from the transport chamber 125 will be described in accordance with the present disclosure. The method may include one or more of the following steps, which may be performed in any suitable order. An empty (e.g., without a transport apparatus 188, 188R disposed thereon) autonomous or semi-autonomous robot 300A or service cart 300B is positioned (Fig. 9, Block 900) adjacent the arm access port 125SP in any suitable manner. For example, the autonomous or semi- autonomous robot 300A may traverse autonomously to the arm access port 125SP and dock with the transport chamber 125 for transfer of the transport apparatus 188, 188R between the transport chamber 125 and the autonomous or semi-autonomous robot 300A. The service cart 300B may be positioned by an operator (human or robotic) to the arm access port 125SP and dock with theAty. Docket No. 390P017504-WO (PCT) / Br3339 transport chamber 125 for transfer of the transport apparatus 188, 188R between the transport chamber 125 and the service cart 300B. The transfer chamber 125 may include any suitable dock / docking features 777 (e.g., pins / recesses, clips, etc.) that locates the autonomous or semi- autonomous robot 300A and / or service cart 300B in a predetermined position suitable for transfer of the transport apparatus 188, 188R between the transport chamber 125 and the autonomous or semi-autonomous robot 300A and / or service cart 300B.

[0132] The transport apparatus 188, 188R is decoupled from the controller 199 (Fig. 9, Block 910) in any suitable manner, such as by unplugging / decoupling a controller communication cable 770 from the controls interface 290 of the transport apparatus 188, 188R. The unplugging / decoupling of the controller communication cable 770 may be automated or manual. The transport apparatus 188, 188R is coupled to the autonomous or semi -autonomous robot 300A and / or service cart 300B (Fig. 9, Block 920) so as to be controlled by any suitable controller / operator interface 399 of the autonomous or semi-autonomous robot 300A and / or service cart 300B. The controller / operator interface 399 may be configured to provide autonomous or manual operation of the transport apparatus 188, 188R for effecting any suitable service operations including, but not limited to, homing of the transfer arm 188TA, teaching (manual or automatically) substrate holding locations, etc. The transport apparatus 188, 188R may be coupled to the controller / operator interface 399 in any suitable manner, such as by plugging / coupling a cart communication cable 771 (having power and communications couplings) to the controls interface 290 of the transport apparatus 188, 188R. The cart communication cable 771 provides power to and direct communication between the motors 201-204, 243M of the transport apparatus 188, 188R drive section 288DS and the autonomous or semi-autonomous robot 300A and / or service cart 300B to facilitate fully automated (and / or semi-automated) service operations (including, but not limited to, homing of the transfer arm 188TA, auto-teach procedures, calibration procedures, and / or operation of the couplings QD for coupling / decoupling the transport apparatus 188, 188Rto / from the frame 125F) although, some service operations may be effected manually through the cart controller 399 and / or using any suitable tools (e.g., homing of the transfer arm 188TA may be effected with a manual crank thatAty. Docket No. 390P017504-WO (PCT) / Br3339 is inserted into / through one of the spacers 270T (such as through a sealable opening in the flange 188FL), where the crank engages any suitable transmission (e.g., gears, etc.) for moving the arm links and end effectors to the home position).

[0133] The transport apparatus 188, 188R may be controlled with the controller / operator interface 399 so that the transfer arm 188TA is moved to a home position, or otherwise a position that aligns the arm link(s) and end effector(s) for passage through the arm access port 125SP for removal of the transport apparatus 188, 188R from the transport chamber 125 (Fig. 9, Block 930). With the transfer arm 188TA positioned for removal, the coupling QD may be operated (manually or automated) so as to decouple the transport apparatus 188, 188R from the frame 125F (Fig. 9, Block 940). With the transfer arm 188TA decoupled from the frame 125F, the transport apparatus 188, 188R may be moved (manually or automated) in direction 750A out of the frame 125F / transport chamber 125 onto the autonomous or semi-autonomous robot 300A and / or service cart 300B (e.g., transferred the autonomous or semi-autonomous robot 300A and / or service cart 300B) (Fig. 9, Block 950). As described herein, the transport apparatus 188, 188R is coupled to the autonomous or semi-autonomous robot 300A and / or service cart 300B such as by engagement of one or more of the coupling features 250 (e.g., guide rollers 250R and / or guide surfaces 250S) with the track 333 of the guide rollers 250R and / or guide surfaces 250S. Any suitable lock or retention device (clips, pins, etc.) may be provided to prevent undesired egress of the transport apparatus 188, 188R from the autonomous or semi-autonomous robot 300A and / or service cart 300B during transport of the transport apparatus 188, 188R with the autonomous or semi-autonomous robot 300A and / or service cart 300B.

[0134] Still referring to Fig. 8, the autonomous or semi-autonomous robot 300A and / or service cart 300B may be coupled to the transport apparatus 188, 188R (Fig. 9, Block 920) as described herein, without removing the transport apparatus from the transport chamber 125, for auto- teaching / calibrating the transport apparatus 188, 188R (Fig. 9, Block 960) one or more substrate holding locations of the substrate processing apparatus 100 as will be described herein. With completion of the auto-teach / calibration procedure, the transport apparatus may be decoupled fromAty. Docket No. 390P017504-WO (PCT) / Br3339 the autonomous or semi -autonomous robot 300A and / or service cart 300B (Fig. 9, Block 970) and recoupled to the controller 199 (Fig. 9, Block 980) such as by unplugging the cart communication cable 771 from the controls interface 290 and coupling the controller communication cable 770 to the controls interface 290.

[0135] Still referring to Figs. 1-7C and also to Fig. 10, an exemplary method (which may include one or more of the following steps, performed in any suitable order) for installing the transport apparatus or robot 188, 188R to the transport chamber 125 or replacing one transport apparatus 188 with a replacement transport apparatus 188R will be described in accordance with the present disclosure. Installation of the transport apparatus 188 and replacement transport apparatus 188R to the transport chamber 125 to the transport chamber 125 may be performed in substantially the reverse manner to that of the removal of the transport apparatus 188 and replacement transport apparatus 188R from the transport chamber 125. As may be realized, with replacement of the transport apparatus 188 with the replacement transport apparatus 188R, the transport apparatus 188 is removed from transport chamber 125 as described herein, and the replacement transport apparatus 188R is installed to the transport chamber 125 in a manner substantially opposite to the removal of the transport apparatus 188.

[0136] As an example of transport apparatus 188, 188R installation, the autonomous or semi- autonomous robot 300A and / or service cart 300B, with the transport apparatus 188 or replacement transport apparatus 188R carried thereon, is positioned (e.g., automatically or manually) and docked with the transport chamber 125 adjacent the arm access port 125SP (Fig. 10, Block 1000 - see Fig. 7C). The transport apparatus 188 or replacement transport apparatus 188R is moved in direction 750B (see Fig. 7B) into the transport chamber 125 (Fig. 10, Block 1010) so as to be coupled to the frame 188F (as described herein) where the coupling QD is operated (automatically or manually) to effect the coupling of the transfer apparatus 188 or replacement transport apparatus 188R to the frame 125F (Fig. 10, Block 1020). The transport apparatus 188 or replacement transport apparatus 188R may be coupled to the cart controller 399 such as by plugging the cart communication cable 771 to the controls interface 290 (Fig. 10, Block 1030). The transport armAty. Docket No. 390P017504-WO (PCT) / Br3339188TA may be controlled (e.g., through the cart controller 399, such as automatically or manually with any suitable human interface coupled to the cart controller 399) to auto-teach the transport apparatus 188 or replacement transport apparatus 188R the location of one or more substrate holding stations / locations of the substrate processing apparatus 100 (Fig. 10, Block 1040), as described herein. With completion of the auto-teach procedure, the transport apparatus 188 or replacement transport apparatus 188R may be decoupled from the autonomous or semi- autonomous robot 300A and / or service cart 300B (Fig. 10, Block 1050) and recoupled to the controller 199 (Fig. 10, Block 1060) such as by unplugging the cart communication cable 771 from the controls interface 290 and coupling the controller communication cable 770 to the controls interface 290.

[0137] Referring to Figs. 1-7C and 8, to effect auto-teaching and / or calibration of the transport apparatus 188 or replacement transport apparatus 188R, the autonomous or semi-autonomous robot 300 A and / or service cart 300B may include any suitable machine vision CMV system that may be employed individually or with the machine vision system MV of the substrate transport apparatus 100.

[0138] As described herein, the flange 188FL of the transport apparatus 188 and replacement transport apparatus 188R includes the window 223 that provides for viewing of the transfer arm 188TA with a respective one of the transport apparatus 188 and replacement transport apparatus 188R installed to a transport chamber 125. With replacement of a transport apparatus 188 with the replacement transport apparatus 188R to a same transport chamber 125 or maintenance of a transport apparatus 188, the locations of the substrate holding stations remain unchanged although, a coordinate system or reference frame TAREF of the transport apparatus 188 or replacement transport apparatus 188R may shift relative to the coordinate system or frame of reference of the transport chamber 125 (processing apparatus 100) TCREF. This shift in the transport apparatus coordinate TAREF may be addressed or otherwise remedied with a calibration of the transport apparatus 188 or replacement transport apparatus 188R.Aty. Docket No. 390P017504-WO (PCT) / Br3339

[0139] Calibration of the transport apparatus 188 or replacement transport apparatus 188R may be effected automatically or manually or a combination thereof, such as in the manner described herein.

[0140] After transferring all substrate holding station parameters and coordinates to the transport apparatus 188 or replacement transport apparatus 188R, the transport apparatus coordinate system TAREF may be calibrated / recalibrated in any suitable manner with data / images obtained with one or more of the machine vision system MV of the transport chamber 125 and the cart machine vision CMV. The cart machine vision system CMV being disposed at a predetermined known position of the autonomous or semi-autonomous robot 300A and / or service cart 300B (which position may be known relative to the substrate holding station locations via the docking features 777 which may kinematically locate the autonomous or semi -autonomous robot 300A and / or service cart 300B relative to the frame 125F). The position of the cart machine vision system CMV may be such that the cart machine vision system CMV “looks” through the window 223 for viewing the transfer arm 188TA within the transport chamber 125 for calibration / recalibration of the transport apparatus coordinate system TAREF.

[0141] At the initial setup or regular maintenance of the process modules PM, the substrate holding station coordinates of the process modules PM may be unknown or may have changed relative to the transfer chamber coordinate system TCREF and transport apparatus coordinate system TAREF. Here, any suitable auto-teach (or manual teach) procedure may be effected by determining the process module PM substrate holding station coordinates by integrating information from one or more of the machine vision system MV of the transport chamber 125 and the cart machine vision CMV along with data from sensors (e.g., an arm vision system AVS, proximity sensors PRX, laser sensors LAS, encoders, etc.) disposed on the transport apparatus 188.

[0142] With reference to Figs. 1A-8, the transport apparatus 188 and replacement transport apparatus 188R may have at least one robot camera AVSC (such as of the arm vision system AVS)Aty. Docket No. 390P017504-WO (PCT) / Br3339 mounted so that the robot camera AVSC has a field of view with a common reference frame CRF with the robot frame of reference TAREF (see Fig. 8), wherein the kinematic motion of each link (e.g., arm links 211, 212, 213A, 213B) is described in the robot frame of reference TAREF, and the robot camera AVSC is configured so as to image at least one of the substrate transport openings 125PRT (or any known transport chamber 125 features with a known predetermined deterministic relation to the location and pose of the at least one substrate transport opening 125PRT), where the image describes a pose of the at least one substrate transport opening 125PRT in the robot frame of reference TAREF.

[0143] The machine vision system (such as machine vision system MV and / or the machine cart vision system CMV) has at least another camera MVC, CMVC, different than the robot camera AVSC. The at least other camera MVC, CMVC is arranged to image at least one of the transport apparatus 188 or replacement transport apparatus 188R and the at least one substrate transport opening 125PRT and resolve therefrom the robot frame of reference TAREF with respect to a global or chamber frame of reference TCREF.

[0144] The controller 199 is connected to the transport apparatus 188 or replacement transport apparatus 188R and the machine vision system (such as machine vision system MV and / or the machine cart vision system CMV) to register (e.g., in any suitable memory thereof or accessible by the controller 199), from the robot camera AVSC, the pose of the at least one substrate transport opening 125PRT.

[0145] The controller 199 registers the image, from the machine vision system (such as machine vision system MV and / or the machine cart vision system CMV), of at least the transport apparatus 188 or replacement transport apparatus 188R and the at least one substrate transport opening 125PRT.

[0146] The controller 199 is configured to resolve, from the registered images, pose (e.g., robot pose) of the transport apparatus 188 or replacement transport apparatus 188R, and characterizeAty. Docket No. 390P017504-WO (PCT) / Br3339 each kinematic motion (of the transport apparatus 188 or replacement transport apparatus 188R), in the global frame of reference TCREF.

[0147] The controller 199 is configured to resolve the pose of the at least one substrate transport opening 125PRT in the global frame of reference TCREF, and automatically teach robot motion (of the transport apparatus 188 or replacement transport apparatus 188R) so as to transport a substrate with the transport apparatus 188 or replacement transport apparatus 188R to and through the at least one substrate transport opening 125PRT.

[0148] With respect to replacement of the transport apparatus 188 with the replacement transport apparatus 188R, the controller 199 is configured to register that the transport apparatus 188 has been replaced via the arm access or robot removal port 125SP with the replacement transport apparatus 188R (and a respective roller cart CRT - e.g., a replacement roller cart).

[0149] The controller 199 calibrates the replacement transport apparatus 188R based on the image from the image registered from the machine vision system (such as machine vision system MV and / or the machine cart vision system CMV).

[0150] The controller 199 effects calibration of the replacement transport apparatus 188R via resolving from the image registered from the machine vision system (such as machine vision system MV and / or the machine cart vision system CMV) that the replacement transport apparatus 188 and / or replacement roller cart CRT (i.e., of the replacement transport apparatus 188R) has a different predetermined characteristic compared to the transport apparatus 188 and / or roller cart CRT (i.e., of the transport apparatus), which different predetermined characteristic causes a difference between kinematic motion of the replacement transport apparatus 188R compared to the transport apparatus 188.

[0011] The controller 199 is configured to determine the difference in the kinematic motions so that kinematic motion of the replacement transport apparatus 188R effects transport of theAty. Docket No. 390P017504-WO (PCT) / Br3339 substrate W with the replacement transport apparatus 188R to and through the at least one substrate transport opening 125PRT.

[0152] Referring to Figs. 1-8 and 11, an exemplary method (which may include one or more of the following steps, performed in any suitable order) will be described. The method includes providing a substrate transport apparatus TA (Fig. 11, Block 1100). The substrate transport apparatus TA includes a sealed chamber 125 and a robot 188, 188R installed inside the sealed chamber 125. The sealed chamber 125 has a top (not shown for clarity) and bottom 125B and four or more sides 125S, at least one of the sides 125S has one or two substrate transport openings 125PRT, for loading and unloading substrates to and from the sealed chamber 125 via the at least one of the sides 125S, and at least three other substrate transport openings 125PRT are arrayed along two or more other sides 125S, of the four or more sides 125S, each of the at least three other substrate transport openings 125PRT being arranged for communication with processing modules PM. The robot 188, 188R has at least a multi-link arm 188TA having an end rotary joint ERJ, that is fixed in the sealed chamber 125 defining a fixed axis of rotation SX about which the multi-link arm 188TA rotates as a unit, the multi-link arm 188TA having an upper arm link 211, rotatably joined to the sealed chamber 125 at the end rotary joint ERJ, and at least one end effector 213A, 213B having a substrate holding station SHS dependent from the upper arm link 211, and a drive section 288DS with drive motors operably connected to the multi-link arm 188TA, wherein each of the drive motors of the drive section 288DS describe each degree of freedom of kinematic motion of each link and the at least one end effector 213A, 213B of the multi-link arm 188TA moving the substrate holding station SHS through each substrate transport opening 125PRT in the at least one of the sides 125S and each other side 125S of the sealed chamber 125 with a substrate transport opening 125PRT. The end rotary joint ERJ is based on a roller cart CRT seated in a predetermined position PP in the sealed chamber 125 and fixed in the predetermined position PP to the sealed chamber 125 with a kinematic coupling (as described herein) so that the end rotary joint ERJ is fixed in the sealed chamber 125. The method includes, with the kinematic coupling released, rolling the roller cart CRT, and the robot 188, 188R as a unit with the roller cart CRT,Aty. Docket No. 390P017504-WO (PCT) / Br3339 freely inside the sealed chamber 125 to and from the predetermined position PP through a robot removal port 125SP disposed for insertion and removal of the roller cart CRT and robot 188, 188R as a unit (Fig. 11, Block 1110), via a coupling to a tug (e.g., the autonomous or semi-autonomous robot 300A or manual service cart 300B) outside the sealed chamber 125 coupled to the roller cart CRT through the robot removal port 125SP so as to push or pull (see, e.g., Figs. 7A-7C) the robot 188, 188R inside the sealed chamber 125 through the robot removal port 125SP.

[0153] The method may include one or more of the following, individually, in any combination with each other, and / or in any combination with the features described herein: the sealed chamber 125 is sized and shaped so that the roller cart CRT and robot 188, 188R roll freely inside the sealed chamber 125 passing through the robot removal port 125SP and effecting removal and installation of the robot 188, 188R inside the sealed chamber 125 through the robot removal port 125SP; the robot removal port 125SP has a closure 188FL that closes the robot removal port 125SP, and the roller cart CRT or robot 188, 188R are connected to the closure 188FL via at least part of the kinematic coupling (e.g., such as the spacers 270T as described herein), arranged to form a substantially tension or compression coupling member to the roller cart CRT or robot 188, 188R; the roller cart CRT is seated on rollers, balls or wheels 250R contacting a roll-on surface on which the rollers, balls or wheels 250R roll with the roller cart CRT and robot 188, 188R rolling freely as a unit, which roll-on surface supports the roller cart CRT and robot 188, 188R free standing in the sealed chamber 125 with the roller cart CRT in the predetermined position PP fixed to the sealed chamber 125 by the kinematic coupling; providing the robot 188, 188R with at least one robot camera AVSC (such as of the arm vision system AVS) mounted so that the robot camera AVSC has a field of view with a common reference frame CRF with the robot frame of reference TAREF (see Fig. 8), wherein the kinematic motion of each link (e.g., arm links 211, 212, 213A, 213B) is described in the robot frame of reference TAREF, imaging, with the robot camera AVSC, at least one of the substrate transport openings 125PRT (or any known transport chamber 125 features with a known predetermined deterministic relation to the location and pose of the at least one substrate transport opening 125PRT), where the image describes a pose of the at least oneAty. Docket No. 390P017504-WO (PCT) / Br3339 substrate transport opening 125PRT in the robot frame of reference TAREF, providing a machine vision system (such as machine vision system MV and / or the machine cart vision system CMV) with at least another camera MVC, CMVC, different than the robot camera AVSC, and imaging with the at least other camera MVC, CMVC at least one of the robot 188, 188R and the at least one substrate transport opening 125PRT and resolve therefrom the robot frame of reference TAREF with respect to a global or chamber frame of reference TCREF; registering, with a controller 199 communi cably connected to the robot 188, 188R and the machine vision system (such as machine vision system MV and / or the machine cart vision system CMV) (e.g., registering in any suitable memory thereof or accessible by the controller 199), from the robot camera AVSC, the pose of the at least one substrate transport opening 125PRT, registering, with the controller 199, the image from the machine vision system (such as machine vision system MV and / or the machine cart vision system CMV) of at least the robot 188, 188R and the at least one substrate transport opening 125PRT, and resolving, with the controller 199, from the registered images, a robot 188, 188R pose, and characterize each kinematic motion, in the global frame of reference TCREF, the controller 199 is configured to resolve the pose of the at least one substrate transport opening 125PRT in the global frame of reference TCREF, and automatically teach robot motion (of the robot 188, 188R) so as to transport a substrate with the robot 188, 188R to and through the at least one substrate transport opening 125PRT; replacing the robot 188 with a replacement robot 188R, and replacement roller cart CRT (i.e., of the replacement robot 188R), through the robot removal port 125SP, wherein the controller 199 registers that the robot 188 has been replaced via the robot removal port 125 SP with the replacement robot 188R and roller cart CRT and calibrates the replacement robot 188R based on the image from the image registered from the machine vision system (such as machine vision system MV and / or the machine cart vision system CMV); and the controller 199 effects calibration of the replacement robot 188R via resolving from the image registered from the machine vision system (such as machine vision system MV and / or the machine cart vision system CMV) that the replacement robot 188R and / or replacement roller cart CRT (i.e., of the replacement robot 188R) has a different predetermined characteristic compared to the robot 188 and / or roller cart CRT (i.e., of the robot 188), which different predetermined characteristicAty. Docket No. 390P017504-WO (PCT) / Br3339 causes a difference between kinematic motion of the replacement robot 188R compared to the robot 188, and the controller 199 determines the difference (i.e., in the kinematic motions) so that kinematic motion of the replacement robot 188R effects transport of the substrate W with the replacement robot 188R to and through the at least one substrate transport opening 125PRT.

[0154] The following are provided in accordance with the present disclosure and may be employed individually, in any combination with each other, and / or in any combination with the features described above:

[0155] In accordance with the present disclosure, a substrate transport apparatus comprises a sealed chamber and a robot installed inside the sealed chamber. The sealed chamber having a top and bottom and four or more sides, at least one of the sides has one or two substrate transport openings, for loading and unloading substrates from the sealed chamber via the at least one of the sides, and at least three other substrate transport openings are arrayed along two or more other sides, of the four or more sides, each of the at least three other substrate transport openings being arranged for communication with processing modules. The robot has at least a multi-link arm having an end rotary joint, that is fixed in the sealed chamber defining a fixed axis of rotation about which the multi-link arm rotates as a unit, the multi-link arm having an upper arm link, rotatably joined to the sealed chamber at the end rotary joint, and at least one end effector having a substrate holding station dependent from the upper arm link; and a drive section with drive motors operably connected to the multi-link arm, wherein each of the drive motors of the drive section describe each degree of freedom of kinematic motion of each link and the at least one end effector of the multi-link arm moving the substrate holding station through each substrate transport opening in the at least one of the sides and each other side of the sealed chamber with a substrate transport opening. The end rotary joint is based on a roller cart seated in a predetermined position in the sealed chamber and fixed in the predetermined position to the sealed chamber with a kinematic coupling so that the end rotary joint is fixed in the sealed chamber, and the roller cart is configured so that, with the kinematic coupling released, the roller cart, and the robot as a unit with the roller cart, rolls freely inside the sealed chamber to and from the predetermined position through a robotAty. Docket No. 390P017504-WO (PCT) / Br3339 removal port disposed for insertion and removal of the roller cart and robot as a unit, via a coupling to a tug outside the sealed chamber coupled to the roller cart through the robot removal port so as to push or pull the robot inside the sealed chamber through the robot removal port.

[0156] The substrate transport apparatus may include one or more of the following, individually, in any combination thereof, and / or in any combination with the features described herein: the sealed chamber is sized and shaped so that the roller cart and robot roll freely inside the sealed chamber passing through the robot removal port and effecting removal and installation of the robot inside the sealed chamber through the robot removal port; the robot removal port has a closure that closes the robot removal port, and the roller cart or robot are connected to the closure via at least part of the kinematic coupling, arranged to form a substantially tension or compression coupling member to the roller cart or robot; the roller cart is seated on rollers, balls or wheels contacting a roll-on surface on which the rollers, balls or wheels roll with the roller cart and robot rolling freely as a unit, which roll-on surface supports the roller cart and robot free standing in the sealed chamber with the roller cart in the predetermined position fixed to the sealed chamber by the kinematic coupling; the robot has at least one robot camera mounted so that the robot camera has a field of view with a common reference frame with a robot frame of reference, wherein the kinematic motion of each link is described in the robot frame of reference, and the robot camera is configured so as to image at least one of the substrate transport openings, where the image describes a pose of the at least one substrate transport opening in the robot frame of reference; the substrate transport apparatus further comprising a machine vision system with at least another camera, different than the robot camera, the at least other camera is arranged to image at least one of the robot and the at least one substrate transport opening and resolve therefrom the robot frame of reference with respect to a global or chamber frame of reference; a controller communicably connected to the robot and machine vision system to register, from the robot camera, the pose of the at least one substrate transport opening and register the image, from the machine vision system, of at least the robot and the at least one substrate transport opening, and the controller is configured to resolve a robot pose, and characterize each kinematic motion, in the global frame of referenceAty. Docket No. 390P017504-WO (PCT) / Br3339 and resolve the pose of the at least one substrate transport opening in the global frame of reference, and automatically teach robot motion so as to transport a substrate with the robot to and through the at least one substrate transport opening; a replacement robot, and replacement roller cart disposed so as to replace the robot through the bot replacement port, wherein the controller is configured to register that the robot has been replaced via the robot removal port with the replacement robot and roller cart; the controller is configured to calibrate the replacement robot based on the image from the image registered from the machine vision system; and the controller effects calibration of the replacement robot via resolving from the image registered from the machine vision system that the replacement robot and / or replacement roller cart has a different predetermined characteristic compared to the robot and / or roller cart, which different predetermined characteristic causes a difference between kinematic motion of the replacement robot compared to the robot, and the controller determines the difference so that kinematic motion of the replacement robot effects transport of the substrate with the replacement robot to and through the at least one substrate transport opening.

[0157] In accordance with the present disclosure, a method is provided. The method includes providing a substrate transport apparatus. The substrate transport apparatus includes a sealed chamber and a robot installed inside the sealed chamber. The sealed chamber has a top and bottom and four or more sides, at least one of the sides has one or two substrate transport openings, for loading and unloading substrates to and from the sealed chamber via the at least one of the sides, and at least three other substrate transport openings are arrayed along two or more other sides, of the four or more sides, each of the at least three other substrate transport openings being arranged for communication with processing modules. The robot has at least a multi-link arm having an end rotary joint, that is fixed in the sealed chamber defining a fixed axis of rotation about which the multi-link arm rotates as a unit, the multi-link arm having an upper arm link, rotatably joined to the chamber at the end rotary joint, and at least one end effector having a substrate holding station dependent from the upper arm link, and a drive section with drive motors operably connected to the multi-link arm, wherein each of the drive motors of the drive section describeAty. Docket No. 390P017504-WO (PCT) / Br3339 each degree of freedom of kinematic motion of each link and the at least one end effector of the multi-link arm moving the substrate holding station through each substrate transport opening in the at least one of the sides and each other side of the sealed chamber with a substrate transport opening. The end rotary joint is based on a roller cart seated in a predetermined position in the sealed chamber and fixed in the predetermined position to the sealed chamber with a kinematic coupling so that the end rotary joint is fixed in the sealed chamber. The method includes, with the kinematic coupling released, rolling the roller cart, and the robot as a unit with the roller cart, freely inside the sealed chamber to and from the predetermined position through a robot removal port disposed for insertion and removal of the roller cart and robot as a unit, via a coupling to a tug outside the sealed chamber coupled to the roller cart through the robot removal port so as to push or pull the robot inside the sealed chamber through the robot removal port.

[0158] The method may include one or more of the following, individually, in any combination thereof, and / or in any combination with the features described herein: the sealed chamber is sized and shaped so that the roller cart and robot roll freely inside the sealed chamber passing through the robot removal port and effecting removal and installation of the robot inside the sealed chamber through the robot removal port; the robot removal port has a closure that closes the robot removal port, and the roller cart or robot are connected to the closure via at least part of the kinematic coupling, arranged to form a substantially tension or compression coupling member to the roller cart or robot; and the roller cart is seated on rollers, balls or wheels contacting a roll-on surface on which the rollers, balls or wheels roll with the roller cart and robot rolling freely as a unit, which roll-on surface supports the roller cart and robot free standing in the sealed chamber with the roller cart in the predetermined position fixed to the sealed chamber by the kinematic coupling; providing the robot with at least one robot camera mounted so that the robot camera has a field of view with a common reference frame with the robot frame of reference, wherein the kinematic motion of each link is described in the robot frame of reference, imaging, with the robot camera, at least one of the substrate transport openings, where the image describes a pose of the at least one substrate transport opening in the robot frame of reference; providing a machine vision system with at leastAty. Docket No. 390P017504-WO (PCT) / Br3339 another camera, different than the robot camera, and imaging with the at least other camera at least one of the robot and the at least one substrate transport opening and resolve therefrom the robot frame of reference with respect to a global or chamber frame of reference; registering, with a controller communicably connected to the robot and the machine vision system, from the robot camera, the pose of the at least one substrate transport opening, registering, with the controller, the image from the machine vision system of at least the robot and the at least one substrate transport opening, and resolving, with the controller, from the registered images, a robot pose, and characterize each kinematic motion, in the global frame of reference, the controller is configured to resolve the pose of the at least one substrate transport opening in the global frame of reference, and automatically teach robot motion so as to transport a substrate with the robot to and through the at least one substrate transport opening; replacing the robot with a replacement robot, and replacement roller cart, through the hot replacement port, wherein the controller registers that the robot has been replaced via the robot removal port with the replacement robot and roller cart; the controller calibrates the replacement robot based on the image from the image registered from the machine vision system; and the controller effects calibration of the replacement robot via resolving from the image registered from the machine vision system that the replacement robot and / or replacement roller cart has a different predetermined characteristic compared to the robot and / or roller cart, which different predetermined characteristic causes a difference between kinematic motion of the replacement robot compared to the robot, and the controller determines the difference so that kinematic motion of the replacement robot effects transport of the substrate with the replacement robot to and through the at least one substrate transport opening.

[0159] It should be understood that the foregoing description is only illustrative of the present disclosure. Various alternatives and modifications can be devised by those skilled in the art without departing from the present disclosure. Accordingly, the present disclosure is intended to embrace all such alternatives, modifications and variances that fall within the scope of any claims appended hereto. Further, the mere fact that different features are recited in mutually differentAty. Docket No. 390P017504-WO (PCT) / Br3339 dependent or independent claims does not indicate that a combination of these features cannot be advantageously used, such a combination remaining within the scope of the present disclosure.

[0160] What is claimed is:

Claims

Aty. Docket No. 390P017504-WO (PCT) / Br3339CLAIMS1. A substrate transport apparatus comprises: a sealed chamber having a top and bottom and four or more sides, at least one of the sides has one or two substrate transport openings, for loading and unloading substrates from the sealed chamber via the at least one of the sides, and at least three other substrate transport openings are arrayed along two or more other sides, of the four or more sides, each of the at least three other substrate transport openings being arranged for communication with processing modules; a robot installed in the sealed chamber and having: at least a multi-link arm having an end rotary joint, that is fixed in the sealed chamber defining a fixed axis of rotation about which the multi-link arm rotates as a unit, the multilink arm having an upper arm link, rotatably j oined to the sealed chamber at the end rotary joint, and at least one end effector having a substrate holding station dependent from the upper arm link, and a drive section with drive motors operably connected to the multi-link arm, wherein each of the drive motors of the drive section describe each degree of freedom of kinematic motion of each link and the at least one end effector of the multi-link arm moving the substrate holding station through each substrate transport opening in the at least one of the sides and each other side of the sealed chamber with a substrate transport opening; wherein the end rotary joint is based on a roller cart seated in a predetermined position in the sealed chamber and fixed in the predetermined position to the sealed chamber with a kinematic coupling so that the end rotary joint is fixed in the sealed chamber, and the roller cart is configured so that, with the kinematic coupling released, the roller cart, and the robot as a unit with the roller cart, rolls freely inside the sealed chamber to and from the predetermined position through a robot removal port disposed for insertion and removal of the roller cart and robot as a unit, via a couplingAty. Docket No. 390P017504-WO (PCT) / Br3339 to a tug outside the sealed chamber coupled to the roller cart through the robot removal port so as to push or pull the robot inside the sealed chamber through the robot removal port.

2. The substrate transport apparatus of claim 1, wherein the sealed chamber is sized and shaped so that the roller cart and robot roll freely inside the sealed chamber passing through the robot removal port and effecting removal and installation of the robot inside the sealed chamber through the robot removal port.

3. The substrate transport apparatus of claim 1, wherein the robot removal port has a closure that closes the robot removal port, and the roller cart or robot are connected to the closure via at least part of the kinematic coupling, arranged to form a substantially tension or compression coupling member to the roller cart or robot.

4. The substrate transport apparatus of claim 1, wherein the roller cart is seated on rollers, balls or wheels contacting a roll-on surface on which the rollers, balls or wheels roll with the roller cart and robot rolling freely as a unit, which roll-on surface supports the roller cart and robot free standing in the sealed chamber with the roller cart in the predetermined position fixed to the sealed chamber by the kinematic coupling.

5. The substrate transport apparatus of claim 1 , wherein the robot has at least one robot camera mounted so that the robot camera has a field of view with a common reference frame with a robot frame of reference, wherein the kinematic motion of each link is described in the robot frame of reference, and the robot camera is configured so as to image at least one of the substrate transport openings, where the image describes a pose of the at least one substrate transport opening in the robot frame of reference.

6. The substrate transport apparatus of claim 5, wherein the substrate transport apparatus further comprises a machine vision system with at least another camera, different than the robot camera, the at least other camera is arranged to image at least one of the robot and the at least oneAty. Docket No. 390P017504-WO (PCT) / Br3339 substrate transport opening and resolve therefrom the robot frame of reference with respect to a global or chamber frame of reference.

7. The substrate transport apparatus of claim 6, further comprising: a controller communicably connected to the robot and machine vision system to register, from the robot camera, the pose of the at least one substrate transport opening and register the image, from the machine vision system, of at least the robot and the at least one substrate transport opening; and the controller is configured to resolve a robot pose, and characterize each kinematic motion, in the global frame of reference and resolve the pose of the at least one substrate transport opening in the global frame of reference, and automatically teach robot motion so as to transport a substrate with the robot to and through the at least one substrate transport opening.

8. The substrate transport apparatus of claim 7, further comprising a replacement robot, and replacement roller cart disposed so as to replace the robot through the bot replacement port, wherein the controller is configured to register that the robot has been replaced via the robot removal port with the replacement robot and roller cart.

9. The substrate transport apparatus of claim 8, wherein the controller is configured to calibrate the replacement robot based on the image from the image registered from the machine vision system.

10. The substrate transport apparatus of claim 9, wherein the controller effects calibration of the replacement robot via resolving from the image registered from the machine vision system that the replacement robot and / or replacement roller cart has a different predetermined characteristic compared to the robot and / or roller cart, which different predetermined characteristic causes a difference between kinematic motion of the replacement robot compared to the robot, and the controller determines the difference so that kinematic motion of the replacement robot effectsAty. Docket No. 390P017504-WO (PCT) / Br3339 transport of the substrate with the replacement robot to and through the at least one substrate transport opening.

11. A method comprising: providing a substrate transport apparatus comprising: a sealed chamber having a top and bottom and four or more sides, at least one of the sides has one or two substrate transport openings, for loading and unloading substrates to and from the sealed chamber via the at least one of the sides, and at least three other substrate transport openings are arrayed along two or more other sides, of the four or more sides, each of the at least three other substrate transport openings being arranged for communication with processing modules, and a robot installed inside the sealed chamber and having: at least a multi-link arm having an end rotary joint, that is fixed in the sealed chamber defining a fixed axis of rotation about which the multi-link arm rotates as a unit, the multi-link arm having an upper arm link, rotatably joined to the chamber at the end rotary joint, and at least one end effector having a substrate holding station dependent from the upper arm link, and a drive section with drive motors operably connected to the multi-link arm, wherein each of the drive motors of the drive section describe each degree of freedom of kinematic motion of each link and the at least one end effector of the multi-link arm moving the substrate holding station through each substrate transport opening in the at least one of the sides and each other side of the sealed chamber with a substrate transport opening, wherein the end rotary joint is based on a roller cart seated in a predetermined position in the sealed chamber and fixed in the predetermined position to the sealedAty. Docket No. 390P017504-WO (PCT) / Br3339 chamber with a kinematic coupling so that the end rotary joint is fixed in the sealed chamber; and with the kinematic coupling released, rolling the roller cart, and the robot as a unit with the roller cart, freely inside the sealed chamber to and from the predetermined position through a robot removal port disposed for insertion and removal of the roller cart and robot as a unit, via a coupling to a tug outside the sealed chamber coupled to the roller cart through the robot removal port so as to push or pull the robot inside the sealed chamber through the robot removal port.

12. The method of claim 11, wherein the sealed chamber is sized and shaped so that the roller cart and robot roll freely inside the sealed chamber passing through the robot removal port and effecting removal and installation of the robot inside the sealed chamber through the robot removal port.

13. The method of claim 11, wherein the robot removal port has a closure that closes the robot removal port, and the roller cart or robot are connected to the closure via at least part of the kinematic coupling, arranged to form a substantially tension or compression coupling member to the roller cart or robot.

14. The method of claim 11, wherein the roller cart is seated on rollers, balls or wheels contacting a roll-on surface on which the rollers, balls or wheels roll with the roller cart and robot rolling freely as a unit, which roll-on surface supports the roller cart and robot free standing in the sealed chamber with the roller cart in the predetermined position fixed to the sealed chamber by the kinematic coupling.

15. The method of claim 11, further comprising: providing the robot with at least one robot camera mounted so that the robot camera has a field of view with a common reference frame with a robot frame of reference, wherein the kinematic motion of each link is described in the robot frame of reference; andAty. Docket No. 390P017504-WO (PCT) / Br3339 imaging, with the robot camera, at least one of the substrate transport openings, where the image describes a pose of the at least one substrate transport opening in the robot frame of reference,16. The method of claim 15, further comprising: providing a machine vision system with at least another camera, different than the robot camera; and imaging, with the at least other camera, at least one of the robot and the at least one substrate transport opening and resolving therefrom the robot frame of reference with respect to a global or chamber frame of reference.

17. The method of claim 16, further comprising: registering, with a controller communicably connected to the robot and machine vision system, from the robot camera, the pose of the at least one substrate transport opening; registering, with the controller, the image from the machine vision system of at least the robot and the at least one substrate transport opening; and resolving, with the controller a robot pose, and characterizing each kinematic motion, in the global frame of reference and resolving the pose of the at least one substrate transport opening in the global frame of reference, and automatically teaching robot motion so as to transport a substrate with the robot to and through the at least one substrate transport opening.

18. The method of claim 17, further comprising replacing the robot with a replacement robot, and replacement roller cart, through the robot removal port, wherein the controller registers that the robot has been replaced via the robot removal port with the replacement robot and roller cart.

19. The method of claim 18, wherein the controller calibrates the replacement robot based on the image from the image registered from the machine vision system.Aty. Docket No. 390P017504-WO (PCT) / Br333920. The method of claim 19, wherein the controller effects calibration of the replacement robot via resolving from the image registered from the machine vision system that the replacement robot and / or replacement roller cart has a different predetermined characteristic compared to the robot and / or roller cart, which different predetermined characteristic causes a difference between kinematic motion of the replacement robot compared to the robot, and the controller determines the difference so that kinematic motion of the replacement robot effects transport of the substrate with the replacement robot to and through the at least one substrate transport opening.

Images