Container transport robot and powder coating system using same

Abstract

The present invention relates to a container transport robot and a powder coating system using same, which are advantageous for automation of processes using cylindrical containers and capable of improving work efficiency by enabling gripping of a cylindrical container, such as a reactor, used in an ultra-fine powder atomic layer deposition process or the like, by selecting either the longitudinal direction or the diameter direction, and transporting the cylindrical container to a predetermined process position. The container transport robot according to the present invention may comprise: a head unit coupled to a robot driving apparatus that generates a linear motion and a rotational motion for transport and handling of a container; an X-axis gripping module that is installed on the head unit to open and close in the diameter direction (X-axis direction) of the container and grips both sides of the container in the diameter direction; and a Y-axis gripping module that is installed on the head unit to open and close in the longitudinal direction (Y-axis direction) of the container and grips both ends of the container in the longitudinal direction.

Description

Container transfer robot and powder coating system using the same

[0001] The present invention relates to a robot for transporting cylindrical containers, and more specifically, to a container transport robot capable of selectively performing the operation of gripping a cylindrical container, such as a powder-coating reactor, in either the longitudinal or radial direction and transporting it to a predetermined process position, and the operation of opening and closing the lid of the container, and a powder coating system using the same.

[0002] Unless otherwise indicated in this specification, the contents described in this section are not prior art for the claims of this application, and are not to be recognized as prior art simply because they are included in this section.

[0003] With the expansion of the market for ultrafine nanoscale powders, various methods are being researched and developed to form high-quality thin films on large volumes of powder.

[0004] For example, thin-film coated powder can improve the electrochemical and mechanical properties of batteries, and is therefore receiving attention as a technology that can lead the advanced semiconductor / battery market, such as active materials for cathode / anode materials and slurries for CMP (Chemical Mechanical Polishing).

[0005] To coat such nanoscale thin films, processes such as CVD (chemical vapor deposition) and ALD (atomic layer deposition) can be applied. Among these, the P-ALD (Powder-Atomic Layer Deposition) method includes a reactor optimized for powder coating and is a technology that enables atomic layer deposition on the particle surface by maximizing the dispersion of the loaded powder.

[0006] However, conventional rotary thin film deposition processes have several drawbacks. Due to the small internal volume of conventional reactors, the amount of powder that can be loaded per process is relatively small, resulting in a lower yield required for actual mass production. Additionally, manual connection between the reactor and chamber is required for each process, which limits the reduction of production time. To address these issues, mass production coating technologies and equipment structures that do not require manual connection of the reactor are being proposed.

[0007] However, while this conventional technology allows for a certain degree of automation in the connection between the reactor and the chamber, the problem of requiring human labor and manual operation during the powder recovery process still persists.

[0008] In particular, while existing ultrafine nano-level powder coating technologies have faced difficulties in commercial production, efficient automated mass production technologies capable of continuous mass production, considering the specific nature of the coating target being powder, have not yet been proposed.

[0009] The present invention is intended to solve the above-mentioned problems, and the objective of the present invention is to provide a container transfer robot and a powder coating system using the same, which can be advantageous for the automation of processes using cylindrical containers and improve work efficiency by selecting either the longitudinal direction or the radial direction to grip and transfer a cylindrical container, such as a reactor used in ultrafine powder atomic layer deposition processes, to a predetermined process position.

[0010] In addition, another objective of the present invention is to provide a container transfer robot and a powder coating system using the same, which can selectively perform container transfer and lid opening / closing operations with a single transfer robot by enabling the operation of opening and closing the lid of the container to be performed in parallel before and after transferring the cylindrical container to a predetermined process position.

[0011] The problems that the present invention aims to solve are not limited to the technical problems described above, and it is obvious that other technical problems may be derived from the following description.

[0012] A container transfer robot according to the present invention for achieving the above-mentioned purpose may include: a head portion coupled to a robot drive unit that generates linear and rotational motions for transferring and handling a container; an X-axis gripping module installed in the head portion to open and close in the radial direction (X-axis direction) of the container and gripping both radial sides of the container; and a Y-axis gripping module installed in the head portion to open and close in the longitudinal direction (Y-axis direction) of the container and gripping both longitudinal ends of the container.

[0013] The X-axis gripping module may include an X-axis actuator having a pair of X-axis extension rods that extend in the X-axis direction in the head portion; and a pair of X-axis grippers coupled to each of the X-axis extension rods to grip both sides in the radial direction of the reactor.

[0014] The above X-axis gripper may include a plurality of X-axis gripper frames extending in the vertical direction and having a fork shape, a plurality of X-axis gripping members formed on the inner surface of each of the plurality of X-axis gripper frames, and an upper gripping projection and a lower gripping projection formed to protrude from the upper and lower ends of each of the plurality of X-axis gripping members, each having a gripping surface formed by a curved surface corresponding to the side of the container.

[0015] It may further include a cap clamping module installed between the lower portions of the plurality of X-axis gripper frames, which is coupled while in close contact with the outer surface of the cap of the container when performing a process of separating the cap that opens and closes one end of the container from one end of the container or coupling it to one end of the container.

[0016] The above cap clamping module may include a clamping frame horizontally installed between the lower portions of the plurality of X-axis gripper frames, and a clamping projection formed to protrude from the inner surface of the clamping frame and inserted into a clamping groove formed concavely on the outer circumference of the cap.

[0017] The inner surface of the clamping frame may be formed as a curved surface that is in close contact with the outer circumference of the cap.

[0018] A cap support surface may be formed on one side of the gripping surface of the lower gripping projection, having a curved surface with a curvature that matches the curvature of the outer surface of the cap, and adhering to the outer surface of the cap.

[0019] The above Y-axis gripping module may include: a Y-axis actuator having a pair of Y-axis reciprocating rods in the head portion that reciprocate in the Y-axis direction orthogonal to the movement direction of the X-axis actuator; and a Y-axis gripper coupled to each of the pair of Y-axis reciprocating rods to grip one side of the edge of both ends in the longitudinal direction of the container.

[0020] The above Y-axis gripper may include a bar-shaped Y-axis gripper frame coupled to each of the pair of Y-axis retractable rods, and a Y-axis gripper member installed at the end of the Y-axis gripper frame to grip one side of the edge of a cap that opens and closes one end of a container.

[0021] A circular groove may be formed concavely along the edge portion of one side of the cap, and a first grip projection having a curve corresponding to the groove so as to be fitted into the groove of the cap on the Y-axis grip member, and a second grip projection may be formed protrudingly, positioned at a certain distance from the first grip projection and in close contact with the outer surface of the cap.

[0022] The above container may be a reactor that accommodates powder in a powder coating system that coats the outer surface of powder by supplying a reaction gas to the powder.

[0023] The robot drive unit to which the above head part is coupled may be a manipulator constituting a multi-joint robot with 4 to 6 degrees of freedom.

[0024] A container transfer robot according to another embodiment of the present invention is a transfer robot for transferring a reactor, comprising a cylindrical body portion for receiving powder and a reactor cap for opening and closing one end of the body portion, to a chamber module for a powder coating process and to another process location outside the chamber module, comprising: a head portion coupled to a robot drive device that generates linear and rotational motion for transferring and handling the reactor; an X-axis gripping module comprising a pair of X-axis grippers installed to perform linear reciprocating motion in the X-axis direction on one side of the head portion and gripping both radial sides of the reactor, and an X-axis actuator that moves the two X-axis grippers in opposite directions in the X-axis direction; and may include a Y-axis gripping module comprising: a pair of Y-axis grippers installed to move in a linear reciprocating motion in the Y-axis direction on the other side of the head portion and gripping one side of the edge of both ends in the longitudinal direction of the reactor; and a Y-axis actuator that moves the two Y-axis grippers in opposite directions in the Y-axis direction.

[0025] A powder coating system according to one embodiment of the present invention may comprise: a reactor having a cylindrical container for receiving powder; a chamber module having a process chamber for receiving the reactor; a heating module installed inside the process chamber; a rotation module for rotating the reactor received inside the process chamber; a gas supply module for supplying reaction gas into the reactor received inside the process chamber; a gas discharge module for sucking in the reaction gas discharged through the reactor and discharging it outside the process chamber; and a transfer robot having the above configuration for transferring the reactor to another process location inside the process chamber and outside the process chamber.

[0026] According to the present invention, an X-axis gripping module capable of stably gripping both sides in the radial direction of a cylindrical container, such as a reactor used in a powder coating process, and a Y-axis gripping module capable of stably gripping one side of the edge of both ends in the longitudinal direction of the container are configured in a single robot drive unit (e.g., a manipulator constituting a multi-joint robot). Therefore, when performing container transfer and handling operations, the X-axis gripping module and the Y-axis gripping module can be selectively used as needed to perform efficient container transfer and handling.

[0027] In addition, since a single container transfer robot is configured with an X-axis gripping module that grips both radial sides of the container and a Y-axis gripping module that grips both longitudinal ends of the container, there is an advantage in that the configuration and operation of the entire system for handling containers such as reactors can be simplified.

[0028] In addition, since the X-axis gripping module for transporting and handling the container and the cap clamping module for separating or attaching the container cap (lid) to the container are configured together, there is an advantage in further simplifying the configuration and operation of the entire system.

[0029] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the configuration of the invention described in the detailed description of the invention or the claims.

[0030] FIG. 1 is a schematic diagram showing the configuration of a powder coating system to which a container transfer robot according to one embodiment of the present invention is applied.

[0031] FIG. 2 is a cross-sectional view showing one embodiment of a chamber module of a powder coating system according to the present invention.

[0032] FIG. 3 is a perspective view showing one embodiment of a reactor applied to a powder coating system according to the present invention.

[0033] Figure 4 is an exploded perspective view of the reactor illustrated in Figure 3.

[0034] Figure 5 is a cross-sectional view showing a part of the reactor illustrated in Figure 3.

[0035] FIG. 6 is a perspective view showing a container transfer robot according to one embodiment of the present invention.

[0036] FIG. 7 is a perspective view of the container transfer robot illustrated in FIG. 6 seen from a different position.

[0037] Fig. 8 is a side view of the container transfer robot illustrated in Fig. 6.

[0038] FIG. 9 is a perspective view showing an X-axis gripper constituting the container transfer robot illustrated in FIG. 6.

[0039] FIGS. 10a and FIGS. 10b are drawings showing an example of operation of an X-axis gripper constituting the container transfer robot illustrated in FIG. 6.

[0040] FIG. 11 is a drawing showing a part of the Y-axis gripper constituting the container transfer robot illustrated in FIG. 6.

[0041] FIGS. 12a and FIGS. 12b are cross-sectional views showing an example of operation of a cap clamping module constituting the container transfer robot illustrated in FIG. 6.

[0042] Hereinafter, a container transfer robot according to a preferred embodiment and a powder coating system using the same will be examined in detail with reference to the attached drawings.

[0043] For reference, in the drawings below, each component is omitted or schematically depicted for convenience and clarity, and the size of each component does not reflect its actual size. Throughout the specification, the same reference numerals refer to the same component, and reference numerals for the same configuration in individual drawings are omitted. Furthermore, detailed descriptions of known functions and configurations that are deemed to unnecessarily obscure the essence of the invention are omitted.

[0044] FIG. 1 shows an embodiment of a powder coating system as a device to which a container transfer robot (1000) according to an embodiment of the present invention is applied.

[0045] Referring to FIGS. 1 and 2, a powder coating system comprises: a reactor (100), which is a cylindrical container for receiving powder; a chamber module (200) having a process chamber (210) that receives the reactor (100); a semi-cylindrical heating module (300) with an open top surface installed inside the process chamber (210); a rotation module (400) for rotating the reactor (100) received inside the process chamber (210); a gas supply module (500) for supplying reaction gas into the reactor (100) received inside the process chamber (210); a gas discharge module (600) for sucking in the reaction gas discharged through the reactor (100) and discharging it outside the process chamber (210); and a transfer module for transferring the reactor (100) to another designated process location inside the process chamber (210) and outside the process chamber (210). It may include robots (1000), etc.

[0046] Referring to FIGS. 3 to 5, the reactor (100) may consist of a cylindrical body part (110) with an open front end and a rear end, and a reactor cap (120) coupled to the front end and / or rear end of the reactor (100).

[0047] The reactor cap (120) may be configured on both the front and rear ends of the body part (110), or on only one of the front and rear ends.

[0048] The reactor cap (120) may include a circular ring-shaped rim (121) having an inner diameter corresponding to the front and rear ends of the body part (110), and a mesh sheet (122) installed in an opening in the center of the rim (121) having a mesh size such that powder contained within the body part (110) is not discharged to the outside, but reaction gas can pass through smoothly. Here, the term 'mesh' of the mesh sheet (122) refers to the size of individual holes in the mesh.

[0049] These reactor caps (120) function to prevent powder from leaking through the front and rear ends of the body part (110), and either or both of the front and rear ends of the body part (110) can function as lids that can be attached and detached while rotating with respect to the body part (110) by the transfer robot (1000). In this embodiment, the reactor cap (120) placed at the rear end of the body part (110) is fixed to the body part (110) by a fastening means such as a bolt, and the reactor cap (120) placed at the front end functions as a lid that can be attached and detached with respect to the body part (110) while being handled by the transfer robot (1000).

[0050] At one end of the reactor (100), a cap locking unit is provided to secure the reactor cap (120) to the body part (110). As shown in FIGS. 4 and 5, the cap locking unit may include at least one groove (112) formed in an L-shape on the outside of the part that is coupled with the reactor cap (120), and a spring (113) and a plunger (114) received inside the groove (112). The spring (113) and the plunger (114) are located at one end of the groove (112), and the plunger (114) has one end in the shape of a convex curved surface and is elastically supported by the spring (113) and elastically coupled to the locking groove (124) of the locking projection (123) which is formed protruding radially inwardly on the inner circumference of the rim (121) of the reactor cap (120). The above locking projection (123) is inserted into the groove (112) when the reactor cap (120) is coupled to one end of the reactor (100), and then rotated to be fixed by being elastically coupled by the plunger (114).

[0051] When an external force is applied to cause the reactor cap (120) to rotate in the opposite direction to the coupling direction in order to separate the reactor cap (120) from the body part (110), the plunger (114) is pushed within the locking groove (421) formed by the curved surface of the locking projection (123), thereby releasing the coupling between the locking projection (123) and the plunger (114), and the reactor cap (120) becomes free and can be separated from the body part (110).

[0052] A circular groove (126) may be formed concavely on the edge of one side of the rim (121) of the reactor cap (120) to allow the Y-axis gripping module (1400) of the transfer robot (1000) to stably grip the reactor cap (120). Additionally, an inverted 'U' shaped clamping groove (125) is formed concavely in the radial direction on the side of the rim (121) to which a clamping projection (1512) (see FIG. 9 and FIG. 12a) provided on the X-axis gripping module (1300) of the transfer robot (1000) is inserted and coupled. Accordingly, when the X-axis gripping module (1300) is closed and the clamping projection (1512) is inserted into the clamping groove (125), the rim (121) of the reactor cap (120) is clamped to the X-axis gripping module (1300), and when the X-axis gripping module (1300) rotates, rotational force is transmitted to the reactor cap (120), so that the reactor cap (120) rotates relative to the body part (110) and can be separated from the reactor (100).

[0053] The reactor (100) is transported into the process chamber (210) by a transport robot (1000) and loaded, or is removed from the process chamber (210) and transported to a designated process location.

[0054] FIGS. 6 to 12 illustrate an embodiment of a transfer robot (1000), wherein the transfer robot (1000) comprises a manipulator (1100) (see FIG. 1) which is a multi-joint robot capable of 4 to 6 degrees of freedom of movement to enable rotational movement in three-dimensional space, and an X-axis gripping module (1300) and a Y-axis gripping module (1400) which respectively grip the radial sides and longitudinal ends of a reactor (100) while moving in mutually orthogonal directions to a head portion (1200) provided at the tip of the manipulator (1100).

[0055] The head portion (1200) may be installed to be rotatable by means of a rotary actuator (not shown) at the tip of the manipulator (1100), or may be coupled to a rotating portion (1150) (see FIG. 1) that rotates at the tip of the manipulator (1100) to rotate and / or move linearly. The head portion (1200) may be a support structure that supports the X-axis gripping module (1300) and the Y-axis gripping module (1400), and may be constructed by connecting support members such as a frame, plate, or block to each other.

[0056] In this embodiment, the head part (1200) is mounted on a manipulator (1100) that constitutes a multi-joint robot, but otherwise, it may be fixed or rotated on a robot drive device that applies a linear motion device installed to move linearly in the XYZ direction or a rotary device that moves rotaryly, or a composite motion device composed of a linear motion device and a rotary device, in a space where the chamber module (200) is installed.

[0057] The X-axis gripping module (1300) is installed on one side of the head portion (1200) and is configured to grip both sides in the radial direction of the reactor (100), which is the container to be transported, and to transport it. For example, the X-axis gripping module (1300) includes an X-axis actuator (1320) having a pair of X-axis extension rods (1321) that extend in the X-axis direction on the head portion (1200), and a pair of X-axis grippers (1310) coupled to the X-axis extension rods (1321) to grip both sides in the radial direction of the reactor (100).

[0058] The above X-axis actuator (1320) causes a pair of X-axis extension rods (1321) provided on both sides to move in a straight line in opposite directions by pneumatic or hydraulic pressure, thereby causing a pair of X-axis grippers (1310) to open or close. Of course, unlike this embodiment, the X-axis actuator (1320) may be configured by applying a known linear motion device, such as a linear motion device having one or two screw shafts rotated by a motor and a nut part that moves along the screw shaft by the rotation of the screw shaft.

[0059] The above pair of X-axis grippers (1310) are installed facing each other and can grip both sides of the reactor (100) in the radial direction while moving in a straight line in opposite directions by means of an X-axis actuator (1320).

[0060] Each X-axis gripper (1310) includes a plurality (two in this embodiment) of X-axis gripper frames (1311) that are extended in the vertical direction and have a fork shape, a plurality of X-axis gripper members (1312) formed on the inner surface of each of the plurality of X-axis gripper frames (1311), and upper grip protrusions (1313) and lower grip protrusions (1314) formed to protrude from the upper and lower ends of each of the plurality of X-axis gripper members (1312) and have gripping surfaces (1313a, 1314a) formed as curved surfaces corresponding to both sides of the reactor (100).

[0061] The above X-axis gripper frame (1311) and X-axis gripper member (1312) may be manufactured as separate entities and then integrated by means of fastening such as a bolt, but alternatively, the X-axis gripper frame (1311) and X-axis gripper member (1312) may be molded as a single unit.

[0062] A cap clamping module (1500) for separating or connecting the reactor cap (120) of the front end of the reactor (100) from or to the reactor body part (110) may be configured between the lower ends of the X-axis gripper frame (1311).

[0063] The above cap clamping module (1500) may include a clamping frame (1511) installed horizontally between the lower portions of a plurality of X-axis gripper frames (1311), and a clamping projection (1512) formed to protrude from the inner surface of the clamping frame (1511) and inserted into the clamping groove (125) of the reactor cap (120).

[0064] It is preferable that the inner surface of the clamping frame (1511) be formed as a curved surface so that it can be in close contact with the outer surface of the reactor cap (120). Additionally, it is preferable that a cap support surface (1314b) be formed on one side of the gripping surface (1314a) of the lower gripping projection (1314) so ​​that when the clamping frame (1511) is in close contact with the outer surface of the reactor cap (120), the inner part of the lower gripping projection (1314) can also be in close contact with the outer surface of the reactor cap (120) to provide support, and that the cap support surface (1314b) is formed as a curved surface with a curvature that generally matches the curvature of the outer surface of the reactor cap (120).

[0065] When the clamping projection (1512) is inserted into the clamping groove (125) formed on the edge portion of the reactor cap (120), an upper support projection (1513) that supports the upper portion of the outer surface of the reactor cap (120) can be installed to protrude from the upper side of the clamping frame (1511). The upper support projection (1513) functions to ensure that the reactor cap (120) is more stably supported when the outer surface of the reactor cap (120) is clamped by the cap clamping module (1500) and undergoes rotational and linear motion.

[0066] In the X-axis gripping module (1300) configured in this way, a pair of X-axis grippers (1310) are closed in the radial direction (X-axis direction) of the reactor (100) by the X-axis actuator (1320) to grip both radial sides of the reactor (100). At this time, the curved gripping surfaces (1314a) of the upper gripping projection (1313) and lower gripping projection (1314) protruding from the upper and lower ends of the X-axis gripping member (1312) of the X-axis gripper (1310) are in close contact with and supported by the upper and lower ends of the curved sides of the reactor (100), so that the reactor (100) can maintain a stable fixed state on the X-axis gripper (1310) when transporting the reactor (100).

[0067] With the X-axis gripper (1310) supporting both sides of the reactor (100) in the radial direction, the manipulator (1100) can operate to transfer the reactor (100) to a designated process position.

[0068] Additionally, when separating the reactor cap (120) of the reactor (100) from the reactor body (110) without performing the operation of transporting a container such as the reactor (100), the body (110) of the reactor (100) is supported in an upright state on a floor surface or a separate support structure, and the cap clamping module (1500) placed at the bottom of the X-axis gripper (1310) is aligned to a position corresponding to the reactor cap (120) coupled to the upper part (front part) of the reactor (100), and the X-axis actuator (1320) is operated to move the X-axis gripper (1310) toward the reactor cap (120).

[0069] At this time, the clamping projection (1512) of the cap clamping module (1500) positioned at the bottom of the X-axis gripper (1310) is inserted into the clamping groove (125) formed on the outer surface of the reactor cap (120), and when the head part (1200) is rotated at a certain angle and moved upward, the locking projection (123) on the inner surface of the reactor cap (120) is disengaged from the 'L'-shaped locking groove (421) of the upper part (front part) of the reactor (100), thereby allowing the reactor cap (120) to be separated from the reactor body part (110).

[0070] In this way, since the X-axis gripping module (1300) for transporting the reactor (100) and the cap clamping module (1500) for separating the reactor cap (120) from the reactor (100) are configured together, the advantage of simplifying the configuration and operation of the entire system for handling a container such as the reactor (100) can be obtained.

[0071] For example, when attaching or detaching the reactor cap (120) to one end of the body part (110) of the reactor (100) in an on-loader that loads powder into the reactor (100) or an off-loader that extracts powder after the coating process is completed in the reactor (100), the process of uprighting the reactor (100) by gripping both sides of the reactor (100) with an X-axis gripping module (1300), and then attaching the reactor cap (120) to the top of the reactor (100) or, conversely, detaching the reactor cap (120) from the top of the reactor (100) by gripping the reactor cap (120) with an X-axis gripping module (1300) and a cap clamping module (1500) can be carried out.

[0072] In addition, the transfer robot (1000) is configured with an X-axis gripping module (1300) that grips both sides in the radial direction of the reactor (100) and a Y-axis gripping module (1400) that grips both ends in the longitudinal direction of the reactor (100), thereby providing the advantage of further simplifying the configuration and operation of the entire system.

[0073] The above Y-axis gripping module (1400) comprises a Y-axis actuator (1420) having a pair of Y-axis reciprocating rods (1421) that reciprocate in the Y-axis direction orthogonal to the movement direction (X-axis direction) of the X-axis actuator (1320) on the other side orthogonal to one side of the head part (1200) on which the X-axis gripping module (1300) is installed, and a Y-axis gripper (1410) coupled to each Y-axis reciprocating rod (1421) and gripping one side of the edge of a reactor cap (120) coupled to both ends of a reactor (100).

[0074] The above Y-axis gripper (1410) includes a long bar-shaped Y-axis gripper frame (1411) coupled to each Y-axis extension rod (1421), and a Y-axis gripper member (1412) installed at the end of the Y-axis gripper frame (1411) to grip one side of the edge of the reactor cap (120).

[0075] As illustrated in FIG. 11, a first grip projection (1413) and a second grip projection (1414) are formed at a predetermined interval on the Y-axis grip member (1412) to allow one side of the edge of the reactor cap (120) to be fitted and supported. Here, the first grip projection (1413) is a part that is inserted into the inner side of a circular groove (126) that is concavely formed on the edge portion of the upper surface (front surface) of the reactor cap (120), and it is preferable that it be a curved shape with a curvature corresponding to that of the groove (126). That is, on one surface of the Y-axis grip member (1412), a first grip projection (1413) having a curve corresponding to the groove (126) so as to be fitted into the groove (126) of the reactor cap (120), and a second grip projection (1414) arranged at a certain distance from the first grip projection (1413) and in close contact with the outer surface of the reactor cap (120) are formed.

[0076] The second grip protrusion (1414) may also be formed in a curved shape, similar to the first grip protrusion (1413), but may be formed in a straight shape as shown in the drawing and support it while in contact with one outer edge of the reactor cap (120).

[0077] The Y-axis gripping module (1400) consists of two pairs of Y-axis grippers (1410) that are reciprocated in the longitudinal direction (Y-axis direction) of the reactor (100) by means of a Y-axis actuator (1420). At this time, the Y-axis gripping member (1412) of the Y-axis gripper (1410) grasps one side of the edge of the reactor cap (120) which is coupled to both ends in the longitudinal direction of the reactor (100) (which may be the front end and rear end, or the top end and rear end, depending on the viewing position of the reactor).

[0078] In this state, the manipulator (1100) can be operated to move the reactor (100) held by the Y-axis gripping module (1400) to a desired process position or change the direction of the reactor (100).

[0079] This Y-axis gripping module (1400) can be usefully utilized in cases where it is difficult to secure sufficient space on both sides of the process chamber (210) into which the reactor (100) is loaded. That is, since the X-axis gripping module (1300) grips the radial sides of the reactor (100), which is a cylindrical container, in order to load the reactor (100) through the open side of the process chamber (210), the X-axis gripping module (1300) must go deep into the process chamber (210), and if there is a structure such as a heater that transfers heat while in contact with the radial sides of the reactor (100) inside the process chamber (210), it becomes difficult to load the reactor (100).

[0080] However, the transfer robot (1000) of the present invention is configured so that the Y-axis gripping member (1412) can grip one side of the edge of the reactor cap (120) coupled to both ends in the longitudinal direction of the reactor (100) to facilitate transfer, thereby suspending the use of the X-axis gripping module (1300) and using the Y-axis gripping module (1400), thereby providing the advantage of easily loading a transfer object such as the reactor (100) into a process chamber (210) with limited space.

[0081] Additionally, when removing the reactor (100) from inside the process chamber (210) and separating the reactor cap (120) at a process location such as an off-loader to discharge the powder inside the reactor (100), it is advantageous for operational stability to grip both sides of the reactor (100) in the radial direction and stand on the off-loader, so the X-axis gripping module (1300) can be used to grip both sides of the reactor (100) in the radial direction and to transport and handle it.

[0082] And, when the reactor (100) is standing upright at a designated position on the off-roader, the reactor cap (120) on the top of the reactor (100) can be detached using the cap clamping module (1500) which is integrated into the X-axis gripping module (1300) as described above. Conversely, on the on-roader, after introducing powder into the reactor (100), the reactor cap (120) can be gripped with the cap clamping module (1500) and attached to the top of the reactor (100).

[0083] As described above, the container transfer robot (1000) of the present invention is configured with an X-axis gripping module (1300) capable of stably gripping both sides in the radial direction of a cylindrical reactor (100) and a Y-axis gripping module (1400) capable of stably gripping one side of the edge of both ends in the longitudinal direction of the reactor (100) on a single manipulator (1100). Therefore, when performing transfer and handling operations of the reactor (100), the X-axis gripping module (1300) and the Y-axis gripping module (1400) can be selectively used as needed to perform efficient transfer and handling of the reactor (100).

[0084] The container transfer robot (1000) of the present invention can be advantageously used for transferring and handling a reactor (100) in a system for coating powder by supplying a reaction gas inside a reactor (100) that receives powder, but it is obvious that it can also be used in the same or similar way for transferring and handling containers in a system for handling cylindrical containers in addition to a powder coating system.

[0085] Although preferred embodiments of the present invention have been described above with reference to the attached drawings, the embodiments described in this specification and the configurations illustrated in the drawings are merely the most preferred embodiments of the present invention and do not represent all technical concepts of the present invention. Therefore, it should be understood that various equivalents and modifications that can replace them may exist at the time of filing this application. Accordingly, the embodiments described above should be understood as illustrative in all respects and not restrictive, and the scope of the present invention is defined by the claims set forth below rather than by the detailed description. Furthermore, all modifications or variations derived from the meaning and scope of the claims and equivalent concepts should be interpreted as being included within the scope of the present invention.

[0086] The present invention can be applied to a powder coating system that accommodates powder in a cylindrical container, such as a reactor used in an ultrafine powder atomic layer deposition process, and injects process gas and reaction gas into the container to coat the powder, and to a container transfer robot that performs the operation of gripping the container (reactor) and transferring it to a predetermined process position and the operation of opening and closing the lid of the container, and to a powder coating system using the same.

Claims

1. A head part coupled to a robot drive unit that generates linear and rotational motion for transporting and handling containers; An X-axis gripping module installed in the head portion to open and close in the radial direction (X-axis direction) of the container and gripping both radial sides of the container; and, A Y-axis gripping module installed in the head portion to open and close in the longitudinal direction (Y-axis direction) of the container and gripping both ends of the container in the longitudinal direction; A container transfer robot including 2. In Paragraph 1, The X-axis gripping module is, An X-axis actuator having a pair of X-axis extension rods extending in the X-axis direction in the head portion; and, A pair of X-axis grippers coupled to each of the above X-axis telescopic rods and gripping both radial sides of the reactor; A container transfer robot including 3. In Paragraph 2, The above X-axis gripper is, A container transfer robot comprising a plurality of X-axis gripper frames extending in the vertical direction and having a fork shape, a plurality of X-axis gripper frames formed on the inner surface of each of the plurality of X-axis gripper frames, and an upper gripping projection and a lower gripping projection formed to protrude from the upper and lower ends of each of the plurality of X-axis gripping members and having a gripping surface formed as a curved surface corresponding to the side of the container.

4. In Paragraph 3, A container transfer robot further comprising a cap clamping module installed between the lower portions of the plurality of X-axis gripper frames, which is coupled while in close contact with the outer surface of the cap of the container when performing a process of separating the cap that opens and closes one end of the container from one end of the container or coupling it to one end of the container.

5. In Paragraph 4, The above cap clamping module is, A container transfer robot comprising a clamping frame horizontally installed between the lower portions of the plurality of X-axis gripper frames, and a clamping projection formed to protrude from the inner surface of the clamping frame and inserted into a clamping groove formed concavely on the outer surface of the cap.

6. In Paragraph 5, A container transfer robot in which the inner surface of the clamping frame is formed as a curved surface that is in close contact with the outer circumference of the cap.

7. In Paragraph 6, A container transfer robot having a cap support surface formed on one side of the gripping surface of the lower gripping projection, the cap support surface being in close contact with the outer surface of the cap and having a curved surface with a curvature that matches the curvature of the outer surface of the cap.

8. In Paragraph 1, The above Y-axis gripping module is, A Y-axis actuator having a pair of Y-axis extension rods that reciprocate in a Y-axis direction orthogonal to the direction of movement of the X-axis actuator in the head portion; and, A Y-axis gripper coupled to each of the above pair of Y-axis extension rods and gripping one side of the edge of both longitudinal ends of the container; A container transfer robot including 9. In Paragraph 8, The container transfer robot comprises a Y-axis gripper, a bar-shaped Y-axis gripper frame coupled to each of the pair of Y-axis extension rods, and a Y-axis gripper member installed at the end of the Y-axis gripper frame to grip one side of the edge of a cap that opens and closes one end of the container.

10. In Paragraph 9, A circular groove is formed concavely along the edge portion of one side of the above cap, and A container transfer robot having a first grip projection formed with a curve corresponding to the groove so as to be fitted into the groove of the cap on the above Y-axis grip member, and a second grip projection formed protruding from the above Y-axis grip member at a certain distance from the first grip projection and in close contact with the outer surface of the cap.

11. In Paragraph 1, The above container is a container transfer robot that is a reactor for receiving powder in a powder coating system that supplies reaction gas to the powder to coat the outer surface of the powder.

12. A transfer robot for transferring a reactor comprising a cylindrical body portion for receiving powder and a reactor cap for opening and closing one end of the body portion to a chamber module for a powder coating process and another process location outside the chamber module, A head part coupled to a robot drive unit that generates linear and rotational motion for the transfer and handling of the above reactor; An X-axis gripping module comprising: a pair of X-axis grippers installed on one side of the head portion to move linearly back and forth in the X-axis direction and gripping both radial sides of the reactor; and an X-axis actuator that moves the two X-axis grippers in opposite directions in the X-axis direction; and, A Y-axis gripping module comprising: a pair of Y-axis grippers installed on the other side of the head portion to move linearly back and forth in the Y-axis direction and gripping one side of the edge of both longitudinal ends of the reactor; and a Y-axis actuator that moves the two Y-axis grippers in opposite directions in the Y-axis direction; A container transfer robot including 13. In Paragraph 12, The above X-axis gripper is, A container transfer robot comprising a plurality of X-axis gripper frames extending in the vertical direction and having a fork shape, a plurality of X-axis gripper frames formed on the inner surface of each of the plurality of X-axis gripper frames, and an upper gripping projection and a lower gripping projection formed to protrude from the upper and lower ends of each of the plurality of X-axis gripping members and having a gripping surface formed as a curved surface corresponding to the side of the container.

14. In Paragraph 13, A container transfer robot further comprising a cap clamping module installed between the lower portions of the plurality of X-axis gripper frames, which is coupled while closely adhering to the outer surface of the container cap when performing a process of separating the reactor cap from one end of the body portion of the reactor or coupling it to one end of the body portion.

15. In Paragraph 14, The above cap clamping module is, A container transfer robot comprising a clamping frame horizontally installed between the lower portions of the plurality of X-axis gripper frames, and a clamping projection formed to protrude from the inner surface of the clamping frame and inserted into a clamping groove formed concavely on the outer surface of the cap.

16. In Paragraph 15, A container transfer robot in which the inner surface of the clamping frame is formed as a curved surface that is in close contact with the outer circumference of the reactor cap.

17. In Paragraph 16, A container transfer robot having a cap support surface formed on one side of the gripping surface of the lower gripping projection, the cap support surface being in close contact with the outer surface of the reactor cap, with a curved surface having a curvature that matches the curvature of the outer surface of the reactor cap.

18. In Paragraph 12, A container transfer robot comprising a Y-axis gripper, a bar-shaped Y-axis gripper frame coupled to each of the pair of Y-axis telescopic rods, and a Y-axis gripper member installed at the end of the Y-axis gripper frame to grip one side of the edge of a reactor cap that opens and closes one end of a reactor.

19. In Paragraph 18, A circular groove is formed concavely along the edge portion of one side of the reactor cap, and A container transfer robot having a first grip projection formed with a curve corresponding to the groove so as to be fitted into the groove of the reactor cap on the above Y-axis grip member, and a second grip projection formed protruding from the above Y-axis grip member at a certain distance from the first grip projection and in close contact with the outer surface of the reactor cap.

20. A reactor in the form of a cylindrical container for holding powder; A chamber module having a process chamber for accommodating the above-mentioned reactor; A heating module installed inside the above process chamber; A rotation module for rotating a reactor housed inside the above process chamber; A gas supply module that supplies reaction gas into a reactor contained within the above-mentioned process chamber; A gas discharge module that sucks in reaction gas discharged through the reactor and discharges it to the outside of the process chamber; and, A transfer robot according to any one of claims 1 to 19 for transferring the reactor to another process location inside the process chamber and outside the process chamber; A powder coating system including

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