Cracking furnace for coating apparatus and coating apparatus

Abstract

Provided in the present disclosure are a cracking furnace for a coating apparatus and a coating apparatus. The cracking furnace comprises: a furnace body having a cracking cavity extending in a vertical direction; and heating devices arranged on an outer wall of the furnace body, wherein a gas raw material is conveyed from bottom to top in the cracking cavity of the furnace body in the vertical direction for a cracking reaction. The coating apparatus comprises: a coating cavity having a coating chamber for placement of a workpiece to be coated, and the cracking furnace which is in communication with the coating chamber and configured to perform the cracking reaction on the gas raw material. The cracking furnace according to the present disclosure uses a vertical cracking method, such that uncracked gas molecules settle due to a large density or specific gravity, thereby prolonging the gas cracking time, improving the gas cracking efficiency, and making gas cracking more complete.

Description

Pyrolysis furnace for coating equipment and coating equipment

[0001] This application claims priority to Chinese Patent Application No. 202422610491.3, filed on October 28, 2024, entitled "Pyrolysis Furnace for Coating Equipment and Coating Equipment", the entire contents of which are incorporated herein by reference. Technical Field

[0002] This disclosure relates to the field of coating technology, and in particular to a pyrolysis furnace for coating equipment and coating equipment. Background Technology

[0003] Parylene coating uses powdered Parylene raw material. Under vacuum and high temperature conditions, the solid raw material is sublimated into a gaseous raw material. Then, under high-temperature pyrolysis conditions (550-750℃), the gaseous raw material is pyrolyzed into reactive gaseous monomers. These gaseous monomers are transported into the coating chamber and deposited and polymerized on the surface of the workpiece to form a film layer. Currently, Parylene coating mainly uses horizontal pyrolysis furnaces, which easily leads to insufficient pyrolysis of the powder before coating. Moreover, in the horizontal pyrolysis chamber, there is no height difference between the gas molecules before and after pyrolysis, which easily mixes together and enters the coating chamber, resulting in impure film layers and weak film adhesion. Summary of the Invention

[0004] To address the aforementioned technical problems, embodiments of this disclosure provide a pyrolysis furnace and a coating equipment for use in coating equipment. By employing a vertical pyrolysis method, the powder is completely pyrolyzed before coating, thereby improving the quality of the coating layer.

[0005] According to one aspect of this disclosure, a pyrolysis furnace for a coating apparatus is provided. The pyrolysis furnace includes: a furnace body having a pyrolysis chamber extending in a vertical direction; and a heating device disposed on the outer wall of the furnace body; wherein a gaseous feedstock is conveyed from bottom to top in the pyrolysis chamber of the furnace body along the vertical direction to undergo a pyrolysis reaction.

[0006] According to some embodiments, the pyrolysis furnace includes a plurality of heating devices, which are spaced apart along the vertical direction.

[0007] According to some embodiments, the heating device includes a plurality of heating elements distributed along the outer wall of the furnace body.

[0008] According to some embodiments, the heating device further includes multiple temperature measuring components for measuring the temperature of the corresponding heating components.

[0009] According to some embodiments, the pyrolysis chamber is provided with profiles or fins to increase the heat exchange area.

[0010] According to some embodiments, the furnace body is wrapped with thermal insulation material.

[0011] According to some embodiments, the insulation material is ceramic fiber.

[0012] According to some embodiments, the pyrolysis furnace further includes a housing for housing the furnace body, the housing having a plurality of heat dissipation holes.

[0013] According to some embodiments, the housing is a two-part opening / closing type.

[0014] According to some embodiments, an exhaust pipe is provided above the furnace body, and the exhaust pipe has at least two exhaust ports spaced apart along the vertical direction.

[0015] According to another aspect of this disclosure, a coating apparatus is provided. The coating apparatus includes: a coating chamber having a coating cavity for placing a workpiece to be coated; and a pyrolysis furnace according to any of the preceding embodiments, connected to the coating chamber for performing a pyrolysis reaction on gaseous raw materials.

[0016] According to some embodiments, the coating equipment further includes a sublimation chamber for heating and sublimating solid raw materials, and conveying the sublimated gaseous raw materials to the pyrolysis furnace.

[0017] In the pyrolysis furnace according to an embodiment of the present disclosure, the furnace body has a pyrolysis chamber extending in a vertical direction, within which gaseous feedstock is conveyed from bottom to top along the vertical direction for pyrolysis reaction. By employing a vertical pyrolysis method, unpyrolyzed gas molecules settle due to their density or specific gravity, thereby increasing the gas pyrolysis time, improving the gas pyrolysis efficiency, and making the gas pyrolysis more complete.

[0018] Furthermore, multiple heating devices are spaced apart along the vertical direction on the outer wall of the furnace body. Each heating device can be controlled individually. By adopting a segmented heating method, the temperature of the gaseous raw material at different locations can be adjusted, thereby avoiding insufficient or excessive gas cracking. Attached Figure Description

[0019] Other features and advantages of this disclosure will be better understood through the following detailed description of alternative embodiments in conjunction with the accompanying drawings, in which the same reference numerals denote the same or similar parts, wherein:

[0020] Figure 1 shows a schematic diagram of the structure of a pyrolysis furnace according to an embodiment of the present disclosure;

[0021] Figure 2 shows a schematic diagram of the heating device of the pyrolysis furnace in Figure 1;

[0022] Figure 3 shows a schematic diagram of the structure of a pyrolysis furnace according to another embodiment of the present disclosure;

[0023] Figure 4 shows a schematic diagram of the structure of a pyrolysis furnace according to another embodiment of the present disclosure;

[0024] Figure 5 shows a schematic diagram of a coating apparatus according to an embodiment of the present disclosure. Detailed Implementation

[0025] The implementation and use of the embodiments are discussed in detail below. However, it should be understood that the specific embodiments discussed are merely illustrative of particular ways of implementing and using this disclosure, and are not intended to limit the scope of this disclosure. The descriptions of the structural positions of various components, such as upper, lower, top, bottom, etc., are not absolute but relative. These directional descriptions are appropriate when the various components are arranged as shown in the figures, but they change accordingly when the positions of the various components in the figures change.

[0026] Embodiments of this disclosure provide a pyrolysis furnace for a coating apparatus. The pyrolysis furnace includes: a furnace body having a pyrolysis chamber extending in a vertical direction; and a heating device disposed on the outer wall of the furnace body; wherein a gaseous raw material is conveyed from bottom to top in the pyrolysis chamber of the furnace body along the vertical direction for a pyrolysis reaction. By employing a vertical pyrolysis method, the powder is completely pyrolyzed before coating, improving the quality of the film layer.

[0027] The specific structure and function of the pyrolysis furnace according to embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0028] Figure 1 shows a schematic diagram of the structure of a pyrolysis furnace 10 according to an embodiment of the present disclosure, and Figure 2 shows a schematic diagram of the structure of the heating device of the pyrolysis furnace 10 in Figure 1.

[0029] As shown in Figures 1 and 2, the pyrolysis furnace 10 includes a furnace body 11 and a heating device 12. The furnace body 11 has a pyrolysis chamber 111 extending vertically. The heating device 12 is disposed on the outer wall of the furnace body 11. The gaseous feedstock is conveyed vertically from bottom to top within the pyrolysis chamber 111 of the furnace body 11 for pyrolysis reaction.

[0030] By employing a vertical pyrolysis method, unpyrolyzed gas molecules settle due to their density or specific gravity, thereby increasing the gas pyrolysis time, improving the gas pyrolysis efficiency, and making the gas pyrolysis more complete.

[0031] In some embodiments, the pyrolysis furnace 10 includes a plurality of heating devices 12, which are spaced apart along a vertical direction.

[0032] In some embodiments, adjacent heating devices 12 are spaced the same in the vertical direction. In other embodiments, adjacent heating devices 12 may be spaced differently in the vertical direction.

[0033] In some embodiments, multiple heating devices 12 can be controlled individually. By adopting a segmented heating method, the temperature of the gaseous raw material at different locations can be adjusted, thereby avoiding insufficient or excessive gas cracking.

[0034] In some embodiments, each heating device 12 includes a plurality of heating elements 121, which are distributed circumferentially along the outer wall of the furnace body 11. These elements may be evenly or unevenly distributed. In some embodiments, the spacing between adjacent heating elements 121 is the same; in other embodiments, the spacing between adjacent heating elements 121 may be different. The heating elements 121 may be heating plates or heating wires, or heating wires may be arranged on heating plates to heat the temperature within the pyrolysis chamber 111 to the required temperature for the pyrolysis reaction.

[0035] In the illustrated embodiment, the pyrolysis furnace 10 includes three heating devices 12, which are arranged at equal intervals in the vertical direction. Each heating device 12 includes two heating elements 121, which are arranged symmetrically along the outer wall of the furnace body 11. In other embodiments, the pyrolysis furnace 10 may include one, two, or four heating devices 12, and each heating device 12 may include one, three, or four heating elements.

[0036] In some embodiments, the pyrolysis chamber 111 is provided with profiles or fins to increase the heat exchange area. For example, the pyrolysis chamber 111 is provided with star-shaped or spiral fins, which can increase the gas contact area and improve the gas pyrolysis efficiency.

[0037] In some embodiments, each heating device 12 further includes a plurality of temperature measuring components (not shown), such as temperature sensors, for measuring the temperature around the corresponding heating component 121.

[0038] In some embodiments, the pyrolysis furnace 10 further includes a controller (not shown) connected to the heating device 12, wherein a first set temperature and a second set temperature are input into the controller, and the second set temperature is lower than the first set temperature.

[0039] When the temperature measuring component of the heating device 12 detects that the actual temperature around the heating component 121 has reached the first set temperature, the controller controls the corresponding heating component 121 of the heating device 12 to stop heating, thereby avoiding excessive gas decomposition; when the temperature measuring component of the heating device 12 detects that the actual temperature around the heating component 121 is lower than the second set temperature, the controller controls the corresponding heating component 121 of the heating device 12 to start heating, thereby avoiding insufficient gas decomposition.

[0040] As shown in Figure 3, the furnace body 11 of the pyrolysis furnace 10 is wrapped with thermal insulation material 13, which is made of ceramic fiber. The thermal insulation material 13 is used to reduce heat loss, ensure the pyrolysis temperature of the pyrolysis chamber 111, and improve the pyrolysis efficiency.

[0041] As shown in Figure 4, the pyrolysis furnace 10 also includes a shell 14, which is located outside the insulation material 13 and surrounds the furnace body 11 and the insulation material 13. The shell 14 is provided with a plurality of heat dissipation holes 141.

[0042] In some embodiments, the housing 14 is a two-part opening type. In some embodiments, the pyrolysis furnace 10 also includes a support 15 for fixing the pyrolysis furnace 10.

[0043] In some embodiments, a gas outlet pipe 16 is provided above the furnace body 11, and the gas outlet pipe 16 has two gas outlets 161 spaced apart along the vertical direction for conveying the pyrolysis gas in the pyrolysis chamber 111 of the pyrolysis furnace 10 to the coating chamber of the coating equipment. The two gas outlets 161 help to improve the uniformity of feeding. In other embodiments, the gas outlet pipe 16 has three or more gas outlets 161 spaced apart along the vertical direction.

[0044] In some embodiments, an air inlet pipe 17 is provided below the furnace body 11, and the air inlet pipe 17 is provided with an air inlet 171 for conveying gaseous raw materials into the pyrolysis chamber 111 of the pyrolysis furnace 10.

[0045] Figure 5 shows a schematic diagram of a coating apparatus 100 according to an embodiment of the present disclosure. The coating apparatus 100 includes a coating chamber 40 and a pyrolysis furnace 10 as described in any of the preceding embodiments. The coating chamber 40 has a coating chamber 41 for placing a workpiece to be coated, and the pyrolysis furnace 10 is used to perform a pyrolysis reaction on the gaseous raw material.

[0046] In some embodiments, the coating equipment 100 further includes a continuous feeding device 20 for conveying solid raw materials, such as solid phenelzine granules, pellet phenelzine, sheet phenelzine, etc.

[0047] In some embodiments, the coating apparatus 100 further includes a sublimation chamber 30 for heating and sublimating solid raw materials and conveying the sublimated gas to the pyrolysis chamber 111 of the pyrolysis furnace 10.

[0048] As shown in Figure 5, the inlet pipe 17 of the pyrolysis furnace 10 is connected to the sublimation chamber 30, and the outlet pipe 16 of the pyrolysis furnace 10 is connected to the coating chamber 41. The sublimated gas in the sublimation chamber 30 enters the pyrolysis chamber 111 of the pyrolysis furnace 10 through the inlet 171 of the inlet pipe 17. In the pyrolysis chamber 111, a pyrolysis reaction occurs, breaking down the gas into reactive gaseous monomers. Then, the gaseous monomers enter the coating chamber 41 through the two outlets 161 of the outlet pipe 16. The gaseous monomers are deposited and polymerized on the workpiece to form a film.

[0049] In some embodiments, the coating apparatus 100 further includes a vacuum system 50 for evacuating the coating chamber 41. The vacuum system 50 includes a pump assembly 51 for extracting air from the coating chamber 41. A cold trap 52 is provided between the pump assembly 51 and the coating chamber 41 for trapping condensable gases in the extracted air.

[0050] In some embodiments, the vacuum system 50 further includes a valve 53 that can control the opening degree for adjusting the pumping speed of the pump group 51 to control the stability of the vacuum pressure in the coating chamber 41.

[0051] In some embodiments, the vacuum system 50 further includes a pressure sensor 54 for detecting pressure in the pump assembly 51.

[0052] In some embodiments, the coating equipment 100 further includes a tail gas treatment device 60, which is connected to the pump group 51 of the vacuum system 50 and is used to treat and discharge the gas extracted by the pump group 51 of the vacuum system 50. The tail gas treatment device 60 includes, but is not limited to, the recovery or pollution-free treatment of reaction raw materials, process gases, or auxiliary gases of doping elements such as nitrogen, inert gases, hydrogen, and hydrocarbon gases, before discharging them to the outside world to prevent environmental pollution and to enable recycling.

[0053] In some embodiments, the coating equipment 100 further includes a liquid feeding device 70, which is connected to the coating chamber 41 and is used to transport the gaseous raw material after the liquid raw material is vaporized to the coating chamber 41.

[0054] In some embodiments, the coating equipment 100 further includes a gas feeding device 80, which is connected to the coating chamber 41 and is used to transport gaseous raw materials into the coating chamber 41.

[0055] In some embodiments, the coating equipment 100 further includes a real-time film thickness monitoring system, which monitors the thickness of the film layer on the workpiece and shuts down the feeding device when the film layer reaches a predetermined thickness.

[0056] According to embodiments of this disclosure, the feeding system of the coating equipment can simultaneously achieve gas feeding, liquid feeding, and solid feeding. This multi-functional feeding method provides conditions for the coating equipment to deposit different film layers. By combining different types and methods of raw materials, the coating equipment can deposit multi-functional composite film layers sequentially or simultaneously, integrating ordinary CVD, PECVD, and ICVD technologies. This solves the problem that existing coating equipment can only achieve a single CVD deposition technology, i.e., only a single type of raw material can be introduced, and only one type of film layer can be deposited at a time. This requires multiple start-ups and shutdowns and feeding cycles to complete the composite film layer, resulting in poor film quality and long coating cycles.

[0057] The technical content and features of this disclosure have been disclosed above. However, it is understood that those skilled in the art can make various changes and improvements to the above-disclosed concept under the inventive concept of this disclosure, but all such changes and improvements fall within the protection scope of this disclosure. The description of the above embodiments is illustrative rather than restrictive, and the protection scope of this disclosure is determined by the claims.

Claims

1. A pyrolysis furnace for coating equipment, characterized in that, include: The furnace body has a pyrolysis chamber extending along the vertical direction; as well as A heating device is installed on the outer wall of the furnace body; In this process, the gaseous raw material is transported from bottom to top along the vertical direction within the pyrolysis chamber of the furnace body to carry out the pyrolysis reaction.

2. The pyrolysis furnace for coating equipment according to claim 1, characterized in that, The pyrolysis furnace includes a plurality of heating devices, which are spaced apart along the vertical direction.

3. The pyrolysis furnace for coating equipment according to claim 2, characterized in that, The heating device includes multiple heating components, which are distributed along the outer wall of the furnace body.

4. The pyrolysis furnace for coating equipment according to claim 3, characterized in that, The heating device also includes multiple temperature measuring components for measuring the temperature of the corresponding heating components.

5. The pyrolysis furnace for coating equipment according to any one of claims 1 to 4, characterized in that, The pyrolysis chamber is equipped with profiles or fins to increase the heat exchange area.

6. The pyrolysis furnace for coating equipment according to any one of claims 1 to 4, characterized in that, The furnace body is covered with insulation material.

7. The pyrolysis furnace for coating equipment according to claim 6, characterized in that, The insulation material is ceramic fiber.

8. The pyrolysis furnace for coating equipment according to any one of claims 1 to 4, characterized in that, The pyrolysis furnace also includes a housing for placing the furnace body, and the housing is provided with a plurality of heat dissipation holes.

9. The pyrolysis furnace for coating equipment according to claim 8, characterized in that, The shell is a two-part opening and closing type.

10. The pyrolysis furnace for coating equipment according to any one of claims 1 to 4, characterized in that, The furnace body is provided with an exhaust pipe above it, and the exhaust pipe has at least two exhaust ports spaced apart along the vertical direction.

11. A coating apparatus, characterized in that, include: A coating cavity having a coating chamber for placing a workpiece to be coated; and The pyrolysis furnace for coating equipment according to any one of claims 1 to 10 is connected to the coating chamber and is used to carry out a pyrolysis reaction on gaseous raw materials.

12. The coating equipment according to claim 11, characterized in that, The coating equipment also includes: The sublimation chamber is used to heat and sublimate solid raw materials and then transport the sublimated gaseous raw materials to the pyrolysis furnace.

Images