Component comprising electrical contact sections, and method for producing same

Abstract

The invention relates to a component (10) comprising: an electrically non-conductive hollow body (14) extending along a guide axis (16), and at least one electrical contact section (36), wherein the at least one contact section (36) comprises: an electrically conductive contact surface (38) arranged on an outer side (34) of the hollow body (14), an electrically conductive active surface (40) arranged on an inner side (32) of the hollow body (14), and an electrically conductive connecting section (44) which electrically connects the contact surface (38) and the active surface (40), wherein the component (10) is closed in and / or at the contact section (36).

Description

[0001] Component with electrical contact sections and method for manufacturing

[0002] The invention relates to a component, in particular a cavity waveguide, with electrical contact sections and to a method for manufacturing such a component, in particular a cavity waveguide.

[0003] A waveguide is a structure that guides electromagnetic waves from one or more points to one or more other points by directing them in a specific direction. Waveguides are primarily used in high-frequency and microwave technology, as well as in optics. Cavity waveguides, dielectric waveguides, and optical waveguides can all be used. In cavity waveguides, a hollow body guides microwaves or other high-frequency signals along a guiding axis.

[0004] US Patent 11,031,669 B2 discloses a method for manufacturing a hollow waveguide in which at least one hole is provided in a cladding wall. A layer of a conductive metal, in particular copper, is applied to the inner surface of the cladding wall. This layer reflects the electromagnetic waves in the waveguide. The hollow waveguide is immersed in a reagent liquid, which deposits the metal onto the inner surface of the cladding wall in a chemical or electroplating process. The reagent liquid can be supplied through the hole in the cladding wall during the coating process. Air bubbles can also escape through the hole during coating. A prerequisite for coating a component using electroplating processes is a conductive component or at least a conductive component surface.

[0005] In galvanic processes, also known as electrochemical processes, the component, particularly the hollow waveguide, forms the cathode. A reflective layer preferably forms at the electrode contact itself or at the point closest to where the electrode is connected (terminal effect). This is due to the fact that the electrically conductive component is a poor conductor. Furthermore, the finite electrical conductivity of the electrolyte used in the galvanic process and any local changes in the electrolyte's composition that may occur during the process must be taken into account. This hinders the homogeneous deposition of a reflective layer and complicates process control and planning.A filter for a microwave conductor is known from US Patent 3,982,215 A, wherein screws and plates are inserted into a cladding side of the microwave conductor to adjust its properties. An electromagnetic waveguide is known from GB Patent 681,897. Electroplating processes are known from JP Patents S61087895 A and H04341589 A. The invention is based on the objective of providing a component, in particular a hollow waveguide, which eliminates the disadvantages of the prior art.

[0006] The problem underlying the invention is solved by a component, in particular a hollow waveguide, with the features of claim 1. The invention relates to a component, in particular a hollow waveguide, with a non-electrically conductive hollow body extending along a guiding axis and at least one electrical contact section. The at least one contact section comprises an electrically conductive contact surface arranged on an outer surface of the hollow body, an electrically conductive active surface arranged on an inner surface of the hollow body, and an electrically conductive connecting section electrically connecting the contact surface and the active surface. The component, in particular the at least one cladding wall of the component and / or the reflective layer, is formed in and / or on the contact section, preferably mechanically, electrically, and / or optically.The connecting section is preferably designed for supplying material, such as fluid, and / or for conducting, in particular for supplying and / or discharging, current.

[0007] In a preferred embodiment, the component, in particular the hollow waveguide, comprises an electrically non-conductive hollow body extending along a guiding axis, and at least one electrical contact section, wherein the at least one contact section comprises: an electrically conductive contact surface arranged on an outside of the hollow body, an electrically conductive active surface arranged on an inside of the hollow body, and an electrically conductive connecting section electrically connecting the contact surface and the active surface, wherein the component is formed as a closed structure in and / or at the contact section.Preferably, the connecting section is designed as a conductive layer applied and / or deposited on or onto the hollow body and / or provided by local conductive treatment, and / or preferably the hollow body has at least one recess on a shell wall comprising a substructure, in particular a grid structure, to improve the application and bonding of a potting compound, in particular non-conductive or conductive.

[0008] The component is preferably an electrical conductor, in particular a signal conductor, and / or a thermal conductor, in particular a heat exchanger, and / or an optical conductor. Depending on the component requirements, the reflective layer can also fulfill other functions, in particular increasing the thermal conductivity of the component. In this case, the reflective layer functions as a thermally conductive layer.

[0009] For the purposes of the invention, a "reflective layer" is to be understood as a metallic or at least highly conductive layer of sufficient thickness.

[0010] The at least one contact section provides a through-hole connection, enabling control of the electrical conditions during the electrochemical deposition of a reflective layer from the radial outside, particularly by means of the contact section, preferably by means of the contact surface. Due to the at least one contact section, at least one additional contact point can be provided along the conducting axis for connecting an electrode at a negative or positive electrical potential, which allows for the targeted homogeneous or targeted heterogeneous deposition of a reflective layer on the inside of the hollow body along the conducting axis. An electrical potential on the inside of the hollow body can be selectively adjusted by means of the at least one contact section. The effective surface provides a suitable starting layer for the application of the reflective layer.Accordingly, a homogeneously or heterogeneously distributed reflective layer can be applied using simple means. The object according to claim 1 represents a particularly suitable semi-finished product, intermediate product, and final product for this purpose. Due to the at least one closed contact section, particularly low-loss conduction of substances, fields, and / or waves in the component channel, especially of electromagnetic waves in the waveguide channel, is ensured. Alternatively, the at least one contact section is designed such that the reflective layer forming on the at least one contact section is closed, thus ensuring low-loss conduction.

[0011] Furthermore, the component channel, and in particular the waveguide channel, is hermetically encapsulated, enabling its use even in harsh environments, especially those containing aggressive chemicals. This also results in increased resistance to high temperatures, mechanical stress, and abrasion. The electrically non-conductive hollow body allows for the production of lightweight components, particularly lightweight hollow waveguides.

[0012] According to the invention, complex, three-dimensional geometries can be coated with a reflective layer. The reflective layer is particularly advantageous as an electrically conductive layer on an electrically non-conductive substrate. It is advantageous if the length of the at least one contact section and / or the at least one recess and / or the at least one substructure running parallel to the conduction axis is preferably smaller than the operating wavelength of the waveguide, preferably by more than a factor of 3, in particular by a factor of 10, and preferably by a factor of 100.The description further relates to the use of a described component, in particular a cavity waveguide, for guiding electromagnetic waves with a wavelength that is greater, in particular at least by a factor of 3, preferably at least by a factor of 10, or preferably at least by a factor of 100, than the length parallel to the guiding axis of the at least one contact section and / or the at least one recess and / or the at least one substructure. A waveguide can certainly guide several wavelengths of different sizes. Advantageously, the above conditions then apply to all guided wavelengths.The same applies to guided materials in a component channel, wherein the average diameter of the parts is larger than the at least one contact section and / or the at least one recess and / or the at least one substructure, preferably in the ratio mentioned above. The terms recess and substructure, mentioned for the first time above, are described in more detail below.

[0013] An advantageous aspect of the invention provides that the hollow body has a reflective layer on its inner surface. The reflective layer covers at least part of the effective surface of the at least one contact section. Accordingly, after the reflective layer has been applied, the effective surface is located between the reflective layer and a wall of the hollow body.

[0014] An advantageous aspect of the invention provides that the reflective layer is designed as an electroplated layer. An electroplated layer is produced by electrochemical deposition. The reflective layer is preferably made of at least one metal, in particular copper, gold, or silver. An electroplated layer produced in this way exhibits particularly high conductivity. Alternatively, it is conceivable that the reflective layer is made of other metals or is non-metallic and highly conductive.

[0015] The inner surface of the hollow body, in particular the inner surface of the reflective layer, defines and / or delimits a component channel, specifically a waveguide channel of the hollow waveguide, through which waves, particularly electromagnetic waves, can subsequently be guided. The metallic, preferably closed, reflective layer improves the guidance of the waves, particularly electromagnetic waves, in the waveguide channel. The hollow body is preferably designed as a cylindrical tube, rectangular tube, square tube, pot-shaped element, or resonator. The hollow body preferably extends along a straight line, in which case the guiding axis is also a straight line. Alternatively, the hollow body extends along an arc, in which case the guiding axis is also an arc. It is also conceivable that the hollow body has several sections, each composed of several straight lines and / or several arcs.In this case, a complex structure results, with the guide axis also having several sections. Furthermore, it is conceivable that the hollow body has at least one branch, in which case the guide axis also has at least one branch. This is the case, for example, with a T-shaped hollow body. The at least one contact section is preferably arranged in a closed outer wall of the hollow body.

[0016] An advantageous aspect of the invention provides that the hollow body has a first end face, in particular with a first opening, and a second end face opposite the first end face along the guiding axis, in particular with a second opening. The at least one contact section is preferably arranged along the guiding axis between the first end face, in particular the first opening, and the second end face, in particular the second opening. Preferably, the reagent liquid, in particular the electrolyte, can be supplied to the inside of the hollow body for the deposition of the reflective layer via the first opening and / or the second opening.

[0017] The deposition of the reflective layer occurs, according to natural laws, preferentially at the point, or at the point closest to it, where the electrode is connected to the component. Because at least one contact section is provided, the location of the deposition can be specifically influenced.

[0018] An advantageous aspect of the invention provides that the connecting section of the at least one contact section runs transversely, and in particular perpendicularly, to the guide axis or the associated guide axis section. The connecting section preferably extends between the inside and the outside of the hollow body. This allows for a connection, particularly close to, an electrode to the inside of the hollow body.

[0019] An advantageous aspect of the invention provides that the hollow body has at least one recess, in particular at least one opening, on a shell wall, in which the at least one contact section is arranged. The opening preferably extends between the inner and outer sides. Due to the recess, in particular the opening, the connecting section is particularly easy to manufacture. The blank and / or the hollow body are preferably made of an electrically non-conductive material, in particular plastic, ceramic, and / or glass. The blank and / or the hollow body can be manufactured using an additive manufacturing process. Two-photon polymerization, selective laser sintering, material jet fusion, fused deposition modeling, digital light projection, and / or stereolithography are conceivable additive manufacturing processes.Alternatively, the blank and / or hollow body can be manufactured using laser etching, dry etching, injection molding, extrusion, majolica casting, or (slurry) casting, or milling. The recess can be incorporated during the manufacturing process of the blank and / or hollow body, such as additive manufacturing. Alternatively, the recess can be subsequently created in the blank and / or hollow body, for example, by machining, laser drilling, or micromelting.

[0020] An advantageous aspect of the invention provides that an electrically conductive layer, in particular made of zinc oxide, is arranged on a recess surface of the hollow body that defines the at least one recess. The conductive layer is preferably applied by atomic layer deposition, chemical vapor deposition, and / or wet chemical processes. The recess provides a recess surface that extends between the outer and inner surfaces of the hollow body. Thus, a conductive layer forming the connection section can be applied simply and reliably, providing an electrical connection between the outer surface, in particular the contact surface, and the inner surface, in particular the functional surface.The contact section provides an easily accessible connection point for an electrode, which is directly electrically connected to the area where the reflective layer is to be deposited via the connecting section.

[0021] An advantageous aspect of the invention provides that the recess is at least partially or substantially closed by means of a conductive or non-conductive material, in particular a potting compound and / or a plug. Accordingly, a reflective layer applied as described below can also be closed at the location of the recess. The at least partially or substantially closed design of the component channel, in particular the waveguide channel, with respect to the casing wall significantly improves the efficiency of transmitting electromagnetic waves. A potting compound offers simple manufacturing, as it conforms to the shape of the recess. A plug, in particular a pin, is particularly easy to handle. The potting compound can preferably be drawn into the recess, in particular channels, by means of capillary action.It is conceivable that the recess is temporarily sealed on one side, e.g., by taping, to allow for the filling of the potting compound. The at least one plug can preferably be glued and / or pressed into the recess. The potting compound and / or the plug and the hollow body can preferably be made of the same material. Therefore, the same production equipment can be effectively used to manufacture the hollow body and the potting compound or the plug.

[0022] The material, in particular the potting compound and / or the plug, is preferably flush with the outside and / or inside of the hollow body or the conductive layer when inserted into the recess. This allows for the provision of a particularly efficient component, especially a waveguide.

[0023] An advantageous aspect of the invention provides that the at least one recess has a substructure, in particular a lattice structure, and / or at least one channel, in particular extending perpendicular to the guide axis, and / or several channels, in particular extending perpendicular to the guide axis. The channels can each have a diameter between 50 pm and 200 pm, in particular approximately 100 pm. The substructure serves to improve the application and bonding of the potting compound. The channels provide an enlarged recess area onto which the conductive layer can be applied. It is also conceivable that the at least one recess or the at least one channel has a diameter that varies along its axis, i.e., perpendicular to the guide axis. The at least one recess and / or the at least one channel can taper radially outwards or radially inwards with respect to the guide axis.The grid structure can be composed of one or more meshes in one or more layers. The meshes can have sizes between 0.5 pm and 100 pm, particularly between 2 pm and 100 pm, and preferably between 10 pm and 50 pm. The grid structure, and in particular its layers, can be arranged in an upper region (upper 30% of the height), a middle region (middle 40% of the height), and / or a lower region (lower 30% of the height) of the at least one recess 30, and in particular of the at least one channel 60. Different mesh sizes can be provided in the upper region, the middle region, and / or the lower region. A different number of layers of the grid structure can also be provided in the upper region, the middle region, and / or the lower region. Accordingly, a grid structure gradient can be provided within the recess 30 and / or the channel 60.

[0024] The at least one recess and / or the at least one channel and / or the at least one substructure is designed such that the capillary effect for receiving the potting compound is promoted and / or the potting compound has a smooth finish on its inner side facing the component channel, in particular the waveguide channel. An advantageous aspect of the invention provides that the at least one contact section is provided by local conductivity, in particular by local carbonization or local material variation. Pyrolysis resulting from heating can be used for conductivity. In this case, no recess in the outer wall of the hollow body is required. By means of local conductivity, electrical conductivity and thus an electrical connection between the inner and outer sides of the hollow body can be selectively established locally through the outer wall of the hollow body.Local material variation can be achieved, for example, through local material changes in additive manufacturing processes. This is possible, for instance, in multi-material processes.

[0025] An advantageous aspect of the invention provides that the reflective layer has a thickness that increases or decreases, at least section by section, relative to the contact section, and in particular parallel or transverse to the conducting axis. The layer thickness can change continuously or increase or decrease in steps. Alternatively, the layer thickness can be constant. The layer thickness is preferably in a range between 0.5 pm and 20 pm, in particular between 0.5 pm and 10 pm, preferably between 1.5 pm and 5 pm, and preferably equal to or less than 4 pm.

[0026] It is advantageous to provide multiple contact sections. These multiple contact sections, and in particular their contact surfaces, can be spaced apart from one another. In this case, the contact surfaces do not directly adjoin each other and / or are not directly electrically connected and / or are not formed as a single, common surface. This can preferably be achieved by applying the contact surfaces only locally and at a distance from one another. This can be achieved, for example, by masking at least one intermediate area between at least two contact sections. Alternatively, the contact surfaces can also be applied across the entire outer surface. Subsequently, the electrically conductive area in an intermediate area between the contact surfaces can be removed, in particular by grinding, milling, or diluted acid.The multiple effective surfaces can also be designed in an island-like manner, analogous to the contact surfaces.

[0027] Alternatively, it is conceivable that the multiple effective surfaces are designed as a single common surface.

[0028] An advantageous aspect of the invention provides that the at least one contact section is arranged as a point on the outer wall of the hollow body. It is conceivable that several contact sections, in particular three, four, five, or six contact sections, are provided. The contact sections preferably have the same distance from each other. The contact sections can be arranged along an imaginary line. Alternatively, they can be arranged alternately on different outer walls of the hollow body.

[0029] An advantageous aspect of the invention provides that the component, in particular the hollow waveguide, has several component channels, in particular waveguide channels, extending parallel to the guide axis. Each component channel, in particular waveguide channel, preferably has at least one contact section.

[0030] An advantageous aspect of the invention provides that the at least one contact section has a round, circular, elliptical, rectangular, square, polygonal, or triangular cross-section extending transversely, and in particular perpendicularly, to the guide axis. The at least one contact section can be point-shaped or slot-shaped. Preferably, the at least one contact section has a rectangular, square, triangular, or conical cross-section extending parallel to the guide axis. The at least one contact section can be tapered or widened towards the guide axis.

[0031] The hollow body preferably has a round, in particular circular or elliptical, or rectangular, in particular square, cross-section running parallel to the guide axis. The hollow body preferably has a width and a height perpendicular to both the guide axis and the width, with the ratio between the width and height preferably being in the range of 1:4 to 4:1, in particular between 1:3 and 3:1, preferably 2:1. The hollow body may also have other cross-sections known from cavity waveguides, for example H- or U-shaped cross-sections. The hollow body may have a constant or variable, in particular conical, cross-section along the guide axis. The wall thickness of the cladding perpendicular to the guide axis is preferably small compared to the length of the hollow body along the guide axis.The wall thickness of at least one cladding wall is preferably, at least in sections, in a range between 0.1 mm and 10 mm, particularly between 0.5 mm and 5 mm, and more preferably between 1 mm and 2 mm. Preferably, the hollow body has protruding elements and / or pockets and / or undercuts on its inner surface, extending into the component channel, particularly the waveguide channel, which influence wave guidance. Therefore, the inner surface need not necessarily be flat. The described component, in particular the hollow waveguide, and the described method are particularly suitable for such configurations. The component, in particular the hollow waveguide, can be configured, for example, as an antenna, in particular a horn antenna, preferably a horn antenna with grooves, a frequency filter, an absorber, a coupler, a power splitter, or a polarizer.

[0032] Preferably, the contact surface and / or the effective surface of the at least one contact section protrudes parallel to the outside of the hollow body opposite the connecting section, the potting compound and / or the recess.

[0033] The component, in particular the cavity waveguide, preferably has a length extending along the guide axis, which lies in a range between 1 cm and 20 cm, particularly between 2 cm and 10 cm, and preferably between 3 cm and 6 cm. This length preferably extends between the first end face and the second end face. If the component, in particular the cavity waveguide, has several sections, the section length or total length lies within the aforementioned range.

[0034] The problem underlying the invention is also solved by a method with the features of claim 13. The invention is directed to a method for manufacturing a component, preferably one described above, in particular a hollow waveguide, comprising the following steps: providing an electrically non-conductive blank with a hollow body extending along a conducting axis, forming at least one contact section with an electrically conductive contact surface arranged on an outside of the hollow body, with an electrically conductive active surface arranged on an inside of the hollow body, and with an electrically conductive connecting section electrically connecting the contact surface and the active surface, producing a reflective layer on the inside of the hollow body using the at least one contact section as an electrical contact means.The contact section allows current to be supplied or a voltage to be applied in order to control the electrochemical process locally, particularly at the contact section, and furthermore especially at the effective surface and / or at the reflective layer forming thereon. The terminal effect can be selectively used at the contact section. The contact section enables advantageous control of the voltage and / or current distribution at and / or near the contact section, particularly at or near the effective surface, and of the reflective layer forming thereon. This offers the advantage that electrical contact can be provided in difficult-to-access locations, such as the inside of pipe conductors, without the need to physically insert anything along the conductor axis, such as a cable or other contact element.The component, in particular the hollow waveguide, is designed to be closed at and / or on the contact section for the production of the reflective layer and / or after the production of the reflective layer. This ensures particularly low-loss wave transmission. Firstly, the hollow body itself can be closed at the at least one contact section. Alternatively, the hollow body has a recess in or on the contact section, which is closed again during the process. Another alternative is that the at least one contact section, in particular the recess, is designed, especially in a small form, such that the hollow body is closed at the at least one contact section, in particular the contact section itself, by applying the reflective layer. In this case, a recess and / or a channel remains in the outer wall of the component, but is closed on the inside of the hollow body by means of the reflective layer.It is also conceivable that the channel is sealed using the reflective layer. In both cases, a potting compound can be omitted. A substructure is also not strictly necessary in these cases.

[0035] Preferably, the connecting section is used for supplying material, such as fluid, and / or for conducting, in particular for supplying and / or discharging, current.

[0036] An advantageous aspect of the invention provides that at least one recess, in particular at least one opening, is provided in a shell wall of the hollow body, in which the at least one contact section is arranged. Preferably, one recess is provided for each contact section. It is particularly advantageous if the connecting section of the at least one contact section is provided or arranged in the at least one recess, in particular the opening. The connecting section is preferably arranged on a recess surface of the recess. The recess can preferably have the same geometric shape as the at least one contact section, in particular the connecting section of the at least one contact section. The at least one recess can preferably already be provided during the manufacture of the hollow body, in particular in an additive manufacturing process.Alternatively, the hollow body can be designed as a closed contour along its circumference, and the at least one recess can be introduced into the hollow body in a further manufacturing step, e.g., by means of a machining process. The at least one recess preferably delimits the at least one contact section, in particular the connecting section of the at least one contact section.

[0037] An advantageous aspect of the invention provides that the method further comprises the step of applying an electrically conductive layer, particularly on a recess surface of the recess, to form the connecting section of the at least one contact section, wherein the conductive layer is applied by atomic layer deposition, by chemical vapor deposition, and / or by wet chemical means. The conductive layer can be made of zinc oxide, tin oxide, titanium nitride, nickel, palladium, ruthenium, ruthenium oxide, silver, copper, or chromium. The oxides and nitrides can contain dopants. The conductive layer preferably covers the entire hollow body, at least in an intermediate step.

[0038] An advantageous aspect of the invention provides that the method further comprises the step of closing the at least one recess by means of an electrically conductive or electrically non-conductive material, in particular a potting compound and / or a plug.

[0039] An advantageous aspect of the invention provides that the method further comprises the step of applying an electrically conductive base layer to the inside and / or outside of the hollow body, in particular the potting compound and / or the plug, to form the contact surface and / or the effective surface of the at least one contact section. The base layer can be applied by atomic layer deposition, chemical vapor deposition, and / or wet chemical processes. The base layer can be made of zinc oxide, tin oxide, titanium nitride, nickel, palladium, ruthenium, ruthenium oxide, silver, copper, or chromium. The oxides and nitrides can contain dopants. The base layer preferably completely covers the hollow body, at least in one intermediate step. The base layer can be produced using the methods described for the conductive layer. It is conceivable that the recess is resealed before the base layer is produced.

[0040] The conductive layer and / or the base layer and / or the reflective layer can be single- or multi-layered. Preferably, the conductive layer is in direct contact with the hollow body. Preferably, the base layer is in direct contact with the conductive layer. Preferably, the reflective layer is in direct contact with the base layer on the inside of the hollow body. Preferably, in the contact area, the base layer is in direct contact with the conductive or non-conductive material, in particular the potting compound or the plug.

[0041] It is advantageous to provide multiple contact sections. As an alternative to masking intermediate areas, the contact surfaces can also be applied across the entire outer surface, and subsequently, the electrically conductive area (conductive and / or base layer) in the intermediate area between the contact surfaces can be removed, particularly by grinding, milling, or diluted acid. Accordingly, the multiple contact surfaces are island-like and oriented relative to each other.

[0042] A particularly simple embodiment provides, in particular, easily detachable webs which can be separated from the hollow body, for example, after the layer has been applied. Alternatively or additionally, at least one protruding element can be provided on the outside of the hollow body, the surface of which is easily workable, in particular allowing the conductive layer and / or the base layer to be removed. The at least one element can preferably be formed circumferentially around the conductive axis. In the case of a cylindrical tube as the hollow body, the at least one element can be formed as a ring. Thus, the intermediate region of the electrically non-conductive hollow body is accessible from the outside, and a contact surface is provided only in the area of ​​the contact sections.

[0043] It is advantageous if, for the purpose of creating the connecting section and / or the conductive layer, the conductive layer is applied to the entire surface of the hollow body. Alternatively, it is advantageous if the conductive layer is applied to the entire inside surface of the hollow body as well as to at least one recessed surface.

[0044] The conductive layer is preferably deposited by atomic layer deposition. Doped zinc oxide can be used for this purpose. The layer thickness of the conductive layer and / or base layer is in the range between 100 nm and 300 nm, in particular between 120 nm and 200 nm, preferably between 140 nm and 180 nm, and preferably at 160 nm.

[0045] Preferably, atomic layer deposition (ALD) or chemical vapor deposition (CVD) is used to produce the conductive layer. Alternatively, the hollow body can be immersed in a solution or suspension of conductive, especially metallic, (nano)particles. Electroless deposition is also conceivable. Nickel, palladium, copper, and / or silver can be used for this purpose. It is also conceivable that a non-conductive layer, e.g., organic material, is first applied and then activated, particularly by pyrolysis or sintering, thereby becoming conductive.

[0046] An advantageous aspect of the invention provides that the connecting section is provided by a local conductivity enhancement, in particular a carbonization and / or a material variation, of the hollow body.

[0047] An advantageous aspect of the invention provides that several contact sections are provided. To produce the reflective layer, in particular the electroplated layer, at least one contact section is positively energized and at least one further contact section is negatively energized.

[0048] Alternatively, at least one contact section can be de-energized. This allows for targeted control over the area and, in particular, the thickness of the reflective layer that forms on the inside of the hollow body.

[0049] Preferably, the conductive layer, the base layer, and the reflective layer are applied sequentially to the hollow body. Further steps are conceivable between the application of the layers; in particular, the potting compound is preferably introduced into the recess after the application of the conductive layer and before the application of the base layer. Substructures can be provided in the recess to improve the fixation of the potting compound.

[0050] An advantageous aspect of the invention provides that after the application of the reflective layer, a passivation layer is applied, in particular in an immersion bath.

[0051] Further advantages, features, and details will become apparent from the following description, in which various embodiments of the invention are illustrated with reference to the drawing. The features mentioned in the claims and the description can each be essential to the invention individually or in any combination.

[0052] They show:

[0053] Fig. 1 shows a schematic view of a blank with recesses for a component, in particular a cavity waveguide;

[0054] Fig. 2 shows a schematic view of a component, in particular a

[0055] cavity waveguide, with contact sections and electroplated layer;

[0056] Fig. 3 shows a schematic sectional view of a contact section of the component, in particular the cavity waveguide, according to Fig. 1;

[0057] Fig. 4 shows a perspective view of the contact section according to Fig. 3;

[0058] Fig. 5 shows a schematic sectional view of the contact section of the component, in particular the cavity waveguide, after the application of a conductive layer;

[0059] Fig. 6 shows a perspective view of the contact section according to Fig. 5;

[0060] Fig. 7 shows a schematic sectional view of the contact section of the component, in particular the cavity waveguide, after the application of a potting compound;

[0061] Fig. 8 shows a perspective view of the contact section according to Fig. 7;

[0062] Fig. 9 shows a schematic sectional view of the contact section of the component, in particular the cavity waveguide, after application of the base layer;

[0063] Fig. 10 a perspective view of the contact section according to Fig. 9; Fig. 11 a schematic sectional view of the contact section of the component, in particular the cavity waveguide, after application of the reflective layer and after separation of the contact surfaces of the contact sections;

[0064] Fig. 12 shows a schematic sectional view through the hollow body of the component, in particular the cavity waveguide, according to Fig. 2;

[0065] Fig. 13 shows a schematic sectional view of the hollow body with several

[0066] contact sections and variable thickness of the reflective layer;

[0067] Figs. 14-16 each show a schematic sequence of three methods according to the invention;

[0068] Fig. 17 shows a perspective view of a component, in particular a

[0069] cavity waveguide, with a bridge and a receiving pocket as an intermediate area;

[0070] Fig. 17A a perspective view of a recess with channels;

[0071] Fig. 17B shows a sectional view of a hollow body comprising channels with a constant and a variable cross-section; and

[0072] Fig. 18 shows a sectional view of a component, in particular a cavity waveguide, with pockets on the inside.

[0073] Figure 1 shows a blank 12 for a component, in particular for a hollow waveguide 10. The blank 12 has an electrically non-conductive, hollow body 14 in the form of a tube with a rectangular cross-section. The hollow body 14 is preferably manufactured from a photopolymer or ceramic by means of 3D printing, e.g., Digital Light Processing (DLP), stereolithography, or other methods. The hollow body 14 extends along a guide axis 16 and, by means of at least one outer wall 18, in particular four outer walls 18, internally delimits a component channel, in particular a waveguide channel 20. The hollow body 14 extends between a first end face 22 and a second end face 24. A first opening 26 is provided at the first end face 22. A second opening 28 is provided at the second end face 24.

[0074] The hollow body 14 has at least one recess 30, and in particular three recesses 30, in its outer wall 18. The recess 30 is designed as a through-hole and therefore extends between an inner surface 32 of the hollow body 14 and an outer surface 34 of the hollow body 14. The recess 30 has a rectangular cross-section perpendicular and / or tangential to the guide axis 16. Preferably, the inner surface 32 and / or the outer surface 34 run substantially parallel to the guide axis 16 and / or parallel to each other. In the state shown in Fig. 1, the hollow body 14 is open only at the first opening 26 and the second opening 28, as well as at the at least one recess 30. Otherwise, the hollow body 14 is closed. Accordingly, the component, in particular the hollow waveguide 10, is accessible from the outside only through the first opening 26, the second opening 28, and the at least one recess 30.

[0075] The at least one recess 30 is provided for the formation of at least one electrical contact section 36. The contact section 36 has an electrically conductive contact surface 38 arranged on the outer surface 34 for contacting with a potential, an electrically conductive active surface 40 arranged on the inner surface 32 for forming a cathode for the deposition of a reflective layer 42, and an electrically conductive connecting section 44 that electrically connects the contact surface 38 and the active surface 40. The electrical contact section 36 in its finished state is shown in Figures 9 to 12. Figures 3 to 8 show intermediate states of the contact section 36. The connecting section 44 is preferably designed for supplying substances, such as a fluid, and for conducting current.Accordingly, material or current transport between the outer surface 34 and the inner surface 32 and vice versa can take place via the connecting section 44.

[0076] To manufacture the component shown in Fig. 2, in particular the cavity waveguide 10, the method shown in Fig. 14 is preferably used, wherein the individual states of this component, in particular the cavity waveguide 10, are shown in Figs. 1 to 12.

[0077] In a first step S10, a hollow body 14 is provided according to Fig. 1, wherein the hollow body 14 has recesses 30 with substructures 46. Alternatively, it is conceivable that a hollow body 14 is provided without recesses 30 and / or without substructures 46 and that recesses 30 and / or substructures 46 are subsequently provided in a further step.

[0078] Subsequently, according to step S12, the conductive layer 48 is applied to the hollow body 14, covering, in particular, the entire surface, especially the recess area 50 and optionally the inner surface 32 and optionally the outer surface 34, of the hollow body 14. The hollow body 14 with the conductive layer 48 is shown in Figures 5 and 6. The conductive layer 48 can be applied directly to the hollow body 14. Alternatively, it is conceivable that an intermediate layer (not shown) is applied between the hollow body 14 and the conductive layer 48 beforehand for better adhesion. The conductive layer 48, which is applied to at least one recess area 50 of the recess 30 and / or to the substructure 46, forms the connecting section 44, which connects the contact surface 38 and the active surface 40. In the case of a rectangular recess 30, the connecting section 44 is designed as a rectangular tube extending perpendicular to the guiding axis 16.In the case of a circular recess 30, the connecting section 44 is designed as a circular tube extending perpendicular to the guide axis 16.

[0079] In a further step S14, the recess 30 is closed again. For this purpose, a potting compound 52 can be poured into the recess 30. It is conceivable that the potting compound 52 and the hollow body 14 are made of the same material. According to Figures 7 and 8, the potting compound 52 is flush with the conductive layer 48 on the inner surface 32 and / or on the outer surface 34. The substructures 46 improve the adhesion of the potting compound 52 in the recess 30. The substructures 46 also improve the dimensional stability of the potting compound 52, so that an inner surface of the potting compound 52 and the inner surface of the hollow body 14, the conductive layer 48, or the base layer 54 lie in one plane. With a rectangular cross-section of the hollow body 14, the plane is planar. With a (circular) cross-section, the plane is curved.As an alternative to the potting compound 52, a plug can be inserted into the recess 30, in particular glued and / or pressed in. In this case, the substructures 46 can be omitted.

[0080] Accordingly, the component, in particular the cavity waveguide 10, is closed at the cladding wall 18 from this state onwards, especially at or within the contact sections 36. The component channel, in particular the waveguide channel 20, is therefore only accessible via the first opening 26 and the second opening 28. It is conceivable that the component, in particular the cavity waveguide 10, has only one opening or more than two openings, whereby the openings do not constitute contact sections, since these are not closed, particularly for the production of the reflective layer 42.

[0081] In step S16, a base layer 54 is then applied to the conductive layer 48 and the potting compound 52, as shown in Figures 9 and 10. The base layer 54 preferably covers the entire hollow body 14 and / or the potting compound 52. It is conceivable that an intermediate layer (not shown) is also provided between the base layer 54 and the conductive layer 48 or the potting compound 52.

[0082] It is optional that, according to step S18, the conductive layer 48 and / or the base layer 54 are subsequently removed in an intermediate region 56 between at least two contact sections 36. In Fig. 14, the remaining contact section 36 is shown as a dashed line, with the intermediate regions still showing the conductive and base layers. If these are removed in the intermediate region 56, then they are no longer present on the outer surface 34. Thus, islands of contact surfaces 38 are formed, which are spaced apart from each other. Therefore, the contact sections 36 are not electrically connected to each other on the outer surface 34 of the hollow body 14. Alternatively, it is conceivable that the conductive layer 48 and / or the base layer 54 are applied only in the area of ​​the recesses 30 and / or the contact sections 36, so that step S18 can be omitted. This is possible, for example, by means of a mask covering the intermediate region 56 (not shown).The masking can be applied to the hollow body 14 before the application of the conductive layer 48 and / or before the application of the base layer 54. For this purpose, the intermediate areas 56 can, for example, be masked off.

[0083] Steps S10 to S18 serve to prepare for the optimal creation of a reflective layer 42 on the inner surface 32 of the hollow body 14. The reflective layer 42 defines and limits the wave channel guide. The reflective layer 42 is shown in Figures 2, 11, 12 and 14.

[0084] The at least one contact section 36 provides a through-hole connection through the shell wall 18, thus enabling advantageous control over the electrical conditions at the active surface 40 during the electrochemical deposition of the reflective layer 42. Accordingly, the at least one contact section 36 serves as an electrical contact element. An electrode at a positive or negative potential can be connected to the contact surface 38, achieving a targeted homogeneous or heterogeneous deposition of the reflective layer 42 on the inner surface 32 of the hollow body 14. The electrical potential at the inner surface 32 of the hollow body 14, particularly at the active surface 40, can be selectively adjusted by means of the at least one contact section 36. The active surface 40 provides a suitable starting layer for the deposition of the reflective layer 42 in step S20.The reflective layer 42, in particular the electroplated layer, is applied using the at least one contact section 36. After a first reflective layer 42 has been applied using the method according to the invention, a second reflective layer 42, preferably made of the same material, can preferably be applied using a further method. This allows for a particularly precise and efficient production of the reflective layer 42. The reflective layer 42 is preferably an electroplated layer made of copper, silver, or gold.

[0085] Figure 12 shows a cross-sectional view of the hollow body 14 with the conductive layer 48, the base layer 54, the potting compound 52, and the reflective layer 42 through the contact section 36. The thicknesses of the individual layers are shown only schematically. Further layers are conceivable. In that case, at least one contact section 36 is arranged on each outer wall 18. In Figure 12, the intermediate areas 56 are also provided with the conductive and base layers, which can also be removed.

[0086] Due to the improved electrical accessibility from the outer surface 34 to the inner surface 32, also along the conduction axis 16, the thickness 58 of the reflective layer 42 can be precisely adjusted. In Fig. 13, the reflective layer 42 exhibits varying thicknesses 58, which can be achieved by varying the current intensities in conjunction with the deposition time (duration of current flow). It is also conceivable that no reflective layer 42 is deposited in certain areas if the corresponding contact section 36 is supplied with a positive voltage (polarity reversal), unlike the other contact sections 36. Thus, for example, non-conductive or weakly conductive areas can be created. Fig. 13 therefore shows three distinguishable areas by way of example: no reflective layer 42, layer thickness gradient, and constant layer thickness 58.

[0087] According to Figures 17, 17A, and 17B, the at least one recess 30 can also have at least one channel 60. Figures 17 to 17B show a plurality of channels 60 extending perpendicular to the guide axis 16, in particular circular channels, as recesses 30. The channels 60 provide a larger recess area 50, so that a larger conductive layer 48 is deposited as a connecting section 44. The potting compound 52 can be absorbed into the channels 60 due to capillary action. In Figure 17A, the channels 60 are arranged in a matrix. According to Figure 17B, the channels 60 can have a constant or a variable cross-section. The channels 60 on the left are constant, and the channels 60 on the right taper, for example, towards the inner surface 32 of the hollow body 14. The channels 60 can be round, in particular circular. Alternative shapes are also conceivable, such as oval, rectangular, square, hexagonal.

[0088] The inventive method is not limited to processing hollow bodies 14 with constant cross-sections. As shown in Fig. 18, the component, in particular the hollow waveguide 10, can have pockets 62, grooves, and / or undercuts on its inner surface 32. Due to the denser packing of the electrical contact points, even complex geometries as shown in Fig. 18 can be selectively, and in particular homogeneously, provided with a reflective layer 42. It is conceivable that a contact section 36 is provided for each pocket 62. The at least one contact section 36 can alternatively be slot-shaped and contact several pockets 62 of the hollow body together. In Fig. 17, to simplify the subsequent removal of the conductive layer 48 and / or the base layer 54 in the intermediate region 56 according to step S18, two webs 64 are provided on the outer surface 34 of the hollow body 14, with a contact section 36 provided between the webs 64.The web 64 preferably forms an intermediate region 56 on the contact section 36. The web 64 projects radially outwards relative to the guide axis 16 and the remaining outer surface 34, so that the electrically conductive layers can be easily removed locally by a mechanical machining process without interfering with the area of ​​the contact sections 36. It is also conceivable that one web 64 is arranged between each pair of adjacent contact sections 36, forming the intermediate region 56 between the adjacent contact sections 36. In Fig. 17, two receiving pockets 66 are additionally provided, into which, for example, an acid can be received for the etching of the conductive layer 48 and / or base layer 54. The at least one web 64 and the at least one receiving pocket 66 can be provided alternately or together on the hollow body 14.Preferably, the bridge 64 serves to fluidically separate the acid in the receiving pocket 66 and the contact surface 38. It is also conceivable that a receiving pocket 66 is arranged between two adjacent contact sections 36. The receiving pocket 66 can also form an intermediate region 56 between the two adjacent contact sections 36.

[0089] In addition to the component shown in Figs. 1 to 13, in particular the cavity waveguide 10, and the method shown in Fig. 14, further methods for manufacturing a component according to the invention, in particular the cavity waveguide 10, according to Figs. 15 and 16 are conceivable.

[0090] As shown in Fig. 15, in step S30 a hollow body 14 with recesses 30 and optional substructures 46 is provided, wherein in step S32 an electrically conductive material, in particular potting compound 52 or a plug, is inserted into the recesses 30. Subsequently, in step S34, the conductive layer 48 is applied to the surface of the hollow body 14 and / or to the surface of the electrically conductive material, in particular the potting compound 52 or the plug. It is conceivable that steps S32 and S34 are reversed in sequence, with the conductive layer 48 then being applied only to the surface of the hollow body 14. The reflective layer 42, in particular the electroplated layer, is then applied in step S36 using the contact section 36 formed. According to Fig. 15, the application of an additional base layer 54 to the conductive layer 48, as shown in step S16, can be omitted.It is conceivable that a process step according to step S18 is also carried out here after step S32 or S34. According to Fig. 16, a hollow body 14 with closed outer walls 18 is provided in step S50. Accordingly, no recesses 30 are provided. The hollow body 14 can then be provided with contact sections 36 by means of local electrical conductivity according to step S52. In this case, the contact sections 36 are formed integrally with the rest of the hollow body 14. This results in particular mechanical stability of the component, especially of the hollow waveguide 10. The local conductivity can be achieved, for example, by local carbonization of the hollow body 14, especially of the outer wall 18. Alternatively, the local conductivity can also be provided in an additive multi-material manufacturing process by means of material variation.In both cases, the contact section 36 is integrated into the hollow body 14, in particular into the outer wall 18. In the subsequent step S54, the conductive layer 48 is applied to the hollow body 14, in particular over its entire surface. In step S56, the reflective layer 42, in particular the electroplated layer, is then applied using the at least one contact section 36. According to Fig. 16, the application of an additional base layer 54 to the conductive layer 48, as in step S16, can be omitted. It is conceivable that a process step according to step S18 is also carried out here after step S32 or S34.

[0091] To establish and / or improve electrical conductivity between the outer surface 34 and the inner surface 32, particularly between the contact surface 38 and the active surface 40, the connecting section 44 can be designed as a conductive layer 48 applied and / or deposited on or onto the hollow body 14 and / or provided by local conductive treatment. Alternatively or additionally, the (simplified) establishment of conductivity is facilitated if the hollow body 14 has a substructure 46 on a shell wall 18 comprising at least one recess 30 to improve the application and bonding of a conductive potting compound 52. These measures can be applied individually or in any combination to the component, particularly to the hollow waveguide 10, or in the process.

[0092] Reference symbol list

[0093] 10 cavity waveguides

[0094] 12 blanks 14 hollow bodies

[0095] 16 Guide axis

[0096] 18 Mantle wall

[0097] 20 Waveguide channel

[0098] 22 first front face 24 second front face

[0099] 26 first opening

[0100] 28 second opening

[0101] 30 Exclusion

[0102] 32 Inside 34 Outside

[0103] 36 Contact section

[0104] 38 contact area

[0105] 40 effective area

[0106] 42 Reflective layer 44 Connecting section

[0107] 46 Substructure

[0108] 48 Conductive layer

[0109] 50 Exclusion area

[0110] 52 Potting compound 54 Base layer

[0111] 56 Intermediate range

[0112] 58 layer thickness

[0113] 60 channels

[0114] 62 pockets, 64 bridges

[0115] 66 Recording bag

Claims

Patent claims 1. Component (10), in particular a hollow waveguide, comprising: an electrically non-conductive hollow body (14) extending along a guide axis (16), and at least one electrical contact section (36), wherein the at least one contact section (36) comprises: an electrically conductive contact surface (38) arranged on an outside (34) of the hollow body (14), an electrically conductive active surface (40) arranged on an inside (32) of the hollow body (14), and an electrically conductive connecting section (44) electrically connecting the contact surface (38) and the active surface (40), wherein the component (10) is formed in and / or on the contact section (36) in a closed form.

2. Component (10) according to claim 1, wherein the hollow body (14) has a reflective layer (42) on the inside (32), in particular covering the effective surface (40) of the at least one contact section (36).

3. Component (10) according to claim 2, wherein the reflective layer (42) is designed as an electroplated layer and / or is made of a metal, in particular copper, gold or silver.

4. Component (10) according to one of the preceding claims, wherein the hollow body (14) has a first front face (22), in particular with a first opening (26), and a second front face (24) opposite the first front face (22) along the guiding axis (16), in particular with a second opening (28), and in particular wherein the at least one contact section (36), in particular the connecting section (44) of the at least one contact section (36), is arranged between the first front face (22) and the second front face (24).

5. Component (10) according to one of the preceding claims, wherein the connecting section (44) of the at least one contact section (36) extends transversely, in particular perpendicularly, to the guide axis (16).

6. Component (10) according to one of the preceding claims, wherein the hollow body (14) is attached to a mantle wall (18) at least one recess (30), in particular at least one breakthrough, has, on or in which the at least one contact section (36) is arranged.

7. Component (10) according to claim 6, wherein an electrically conductive conductive layer (48), in particular made of zinc oxide, is arranged on a recess surface (50) of the hollow body (14) which limits the at least one recess (30), and in particular wherein the conductive layer (48) is applied by means of atomic layer deposition, by means of chemical vapor deposition and / or wet chemical deposition.

8. Component (10) according to claim 6 or 7, wherein the recess (30) is closed by means of a conductive or non-conductive material, in particular a potting compound (52) or a plug.

9. Component (10) according to one of claims 6 to 8, wherein the at least one recess (30) has a substructure (46), in particular a grid structure, and / or a plurality of channels (60), in particular perpendicular to the guide axis (16).

10. Component (10) according to one of the preceding claims, wherein the at least one The contact section (36) is provided by local conductivity enhancement, in particular local carbonization or local material variation.

11. Component (10) according to one of claims 2 to 10, wherein the reflective layer (42) has at least sectionally a layer thickness (58) that increases or decreases towards the contact section (36).

12. Component (10) according to one of the preceding claims, wherein several contact sections (36) are provided, wherein the contact surfaces (38) of at least two contact sections (36) are spaced apart from each other.

13. Method for manufacturing a component (10), in particular a cavity waveguide, comprising the following steps: Providing an electrically non-conductive blank (12) with a hollow body (14) extending along a conducting axis (16), Forming at least one contact section (36) with an electrically conductive contact surface (38) arranged on an outside (34) of the hollow body (14), with an electrically conductive active surface (40) arranged on an inside (32) of the hollow body (14), and with an electrically conductive connecting section (44) electrically connecting the contact surface (38) and the active surface (40), Producing a reflective layer (42), in particular an electroplated layer, on the inside (32) of the hollow body (14) using the at least one contact section (36) as an electrical contact means, wherein the component (10) is designed to be closed for producing the reflective layer (42) and / or after producing the reflective layer (42) in and / or on the contact section (36).

14. Method according to claim 13, wherein at least one recess (30), in particular at least one opening, is provided in a shell wall (18) of the hollow body (14), on or in which the at least one contact section (36) is arranged.

15. Method according to claim 13 or 14, wherein the method further comprises the step of: Applying an electrically conductive conductive layer (48), in particular on a recessed surface (50) of the recess (30), to form the connecting section (44) of the at least one contact section (36), in particular wherein the conductive layer (48) is applied by means of atomic layer deposition, by means of chemical vapor deposition and / or wet chemically and / or is made from zinc oxide.

16. Method according to claim 14 or 15, wherein the method further comprises the step of: Closing the at least one recess (30) by means of a conductive or non-conductive material, in particular a potting compound (52) or a plug.

17. Method according to any one of claims 13 to 16, wherein the method further comprises the step: Applying an electrically conductive base layer (54) to the inside (32) and / or the outside (34) of the hollow body (14), in particular on the potting compound (52) of the recess (30), to form the contact surface (38) and / or the active surface (40) of the at least one contact section (36), in particular wherein the base layer (54) is applied by means of atomic layer deposition, by means of chemical vapor deposition and / or wet chemically.

18. Method according to claim 13 or 17, wherein the hollow body (14) is attached to the at least one The contact section (36) is formed as a closed section, and the connecting section (44) is provided by a local conductivity enhancement, in particular a local carbonization or local material variation, of the hollow body (14).

19. Method according to claims 13 to 18, wherein several contact sections (36) are provided, wherein, for producing the reflective layer (42), at least one contact section (36) is positively energized and at least one further contact section (36) is negatively energized, or at least one contact section (36) is positively or negatively energized and at least one further contact section (36) is not energized.

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