Cold plate

Abstract

A cold plate 100 comprises a first heat exchange unit 11 and a second heat exchange unit 21 that are stacked in an internal space S through which a refrigerant flows. The first heat exchange unit includes a plurality of first parallel flow paths 30 and a plurality of second parallel flow paths 35 arranged adjacent to the first parallel flow paths. The second heat exchange unit includes a first cross flow path 40 communicating with a pair of the first parallel flow paths, and a second cross flow path 45 communicating with a pair of the second parallel flow paths. A cross-sectional area A2 of the second parallel flow paths 35 is larger than a cross-sectional area A1 of the first parallel flow paths 30, and a cross-sectional area A4 of the second cross flow path 45 is larger than a cross-sectional area A3 of the first cross flow path 40.

Description

Cold Plate

[0001] The present invention relates to a cold plate that comes into contact with a heat source and performs heat exchange between a refrigerant flowing in its internal space and the heat source. For designated countries where incorporation by reference is permitted, the contents described in Japanese Patent Application No. 2024-194494, filed in Japan on November 6, 2024, are incorporated herein by reference and constitute part of this specification.

[0002] A laminate is known that is formed by stacking multiple flexible heat sink sheets, each having multiple pin portions arranged at intervals and multiple links connecting adjacent pin portions (see, for example, Patent Document 1). By circulating a fluid inside this laminate and exchanging heat between the fluid and the heat source via the pin portions and links, the laminate can cool the heat source.

[0003] The laminate has high-performance active regions with high heat removal performance and low-performance active regions with low heat removal performance (Patent Document 1 (Column 7, line 54 to Column 8, line 4, and Figure 8)). In these active regions, the fluid flow is adjusted by adjusting the arrangement of pins and links, thereby controlling the heat removal performance of each active region.

[0004] U.S. Patent No. 11515230

[0005] As with the laminate described in Patent Document 1, when fluid flow is adjusted using pins and links, the fluid flow becomes irregular around the pins and links. Furthermore, because the links are flexible and used in a curved state, the fluid flow becomes disordered near the links. Therefore, when different cooling performance is set for each region, it becomes difficult to accurately distribute the flow rate to each region using pins and links. Consequently, the laminate described in Patent Document 1 has the problem that the cooling performance of each region may deviate from the desired cooling performance.

[0006] The problem that this invention aims to solve is to provide a cold plate that can accurately distribute refrigerant and precisely control the cooling performance for each region.

[0007] [1] One aspect of the present invention comprises an internal space through which a refrigerant flows, a first heat exchange section disposed in the internal space, and a second heat exchange section disposed in the internal space and stacked on the first heat exchange section, wherein the first heat exchange section extends in a first direction, through which the refrigerant flows, and comprises a plurality of first parallel flow channels that are arranged at mutually different positions in a second direction intersecting the first direction, and extends in a first direction, through which the refrigerant flows, and is arranged adjacent to the first parallel flow channels, and in the second direction The cold plate includes a plurality of second parallel flow channels arranged at mutually different positions, wherein the second heat exchange section includes a first intersecting flow channel extending in the second direction, through which the refrigerant flows and which communicates with a pair of the first parallel flow channels, and a second intersecting flow channel extending in the second direction, through which the refrigerant flows and which communicates with a pair of the second parallel flow channels, wherein the cross-sectional area of ​​the second parallel flow channels is larger than the cross-sectional area of ​​the first parallel flow channels, and the cross-sectional area of ​​the second intersecting flow channels is larger than the cross-sectional area of ​​the first intersecting flow channels.

[0008] [2] Embodiment 2 of the present invention is a cold plate of Embodiment 1 in which the width of the second parallel flow path is wider than the width of the first parallel flow path, and the width of the second intersecting flow path is wider than the width of the first intersecting flow path.

[0009] [3] Embodiment 3 of the present invention is a cold plate according to Embodiment 1 or 2 in which the height of the second parallel flow path is higher than the height of the first parallel flow path, and the height of the second crossing flow path is higher than the height of the first crossing flow path.

[0010] [4] A fourth aspect of the present invention is a cold plate according to the third aspect, wherein the first heat exchange section includes a first layer and a second layer laminated on the first layer, the first layer includes a first slit extending in the first direction, the second layer overlaps with the first slit, communicates with the first slit and includes a second slit extending in the first direction, and the second parallel flow path may be a cold plate composed of the first slit and the second slit.

[0011] [5] Embodiment 5 of the present invention is a cold plate according to any of embodiments 1 to 4, wherein the first heat exchange section is in communication with the first parallel flow path and the second parallel flow path, and the cold plate includes a connecting flow path through which the refrigerant flows between the first parallel flow path and the second parallel flow path.

[0012] [6] Embodiment 6 of the present invention is a cold plate of Embodiment 5 in which the number of first parallel channels communicating with the connecting channel is greater than the number of second parallel channels communicating with the connecting channel.

[0013] [7] Embodiment 7 of the present invention is a cold plate according to any of embodiments 1 to 6, wherein the first parallel flow path includes a first flow path extending in a first direction through which the refrigerant flows in the first direction, and a second flow path extending in a first direction through which the refrigerant flows, and which is positioned at a different location from the first flow path in a second direction, wherein the first flow path includes a first intermediate occlusion portion positioned between both ends of the first flow path in the first direction and restricting the flow of the refrigerant in the first direction, and the second flow path includes a second intermediate occlusion portion positioned between both ends of the second flow path in the first direction and restricting the flow of the refrigerant in the first direction.

[0014] [8] Embodiment 8 of the present invention is a cold plate according to Embodiment 7 in which the second parallel flow path does not include an intermediate occlusion that restricts the flow of the refrigerant in the first direction between the ends of the second parallel flow path in the first direction.

[0015] [9] Embodiment 9 of the present invention is a cold plate of embodiment 7 or 8 in which the number of first crossing channels arranged between the first intermediate closure portion and the second intermediate closure portion is less than the number of second crossing channels communicating with the pair of second parallel channels.

[0016]

[10] Embodiment 10 of the present invention is a cold plate according to any of embodiments 7 to 9, wherein the first heat exchange section is in communication with the second flow path and the second parallel flow path and includes a connecting flow path through which the refrigerant flows between the second flow path and the second parallel flow path, and the first flow path is located at the end of the first flow path so as to be adjacent to the connecting flow path and includes an end closing portion that restricts the flow of the refrigerant in the first direction.

[0017]

[11] Embodiment 11 of the present invention is a cold plate of embodiment 10 in which the number of the first crossing channels arranged between the end closing portion and the second intermediate closing portion is less than the number of the second crossing channels communicating with the pair of second parallel channels.

[0018]

[12] Embodiment 12 of the present invention is a cold plate according to any of embodiments 1 to 11, wherein the cold plate is a cold plate comprising a case portion having the internal space.

[0019]

[13] Embodiment 12 of the present invention is a cold plate according to any of embodiments 1 to 12, wherein the cold plate comprises an inlet for the refrigerant to flow in and an outlet for the refrigerant to flow out, the internal space is in communication with the inlet and the outlet, the refrigerant flows from the inlet to the outlet, and the first and second heat exchange units are arranged between the inlet and the outlet.

[0020] In this invention, in a stacked first heat exchange section and a second heat exchange section, a first parallel flow path and a second parallel flow path having a larger cross-sectional area than the first parallel flow path allow the refrigerant to flow in a first direction, while a first intersecting flow path and a second intersecting flow path having a larger cross-sectional area than the first intersecting flow path allow the refrigerant to flow in a second direction. As a result, the refrigerant can be flowed regularly along either the first or second direction, allowing for accurate distribution of the flow rate and precise control of the cooling performance in each region.

[0021] Figure 1 is a cross-sectional view of a cold plate in an embodiment of the present invention. Figures 2(a) to 2(d) are cross-sectional views showing the layer structure of the cold plate in an embodiment of the present invention, where Figure 2(a) is a cross-sectional view along line IIA-IIA in Figure 1, Figure 2(b) is a cross-sectional view along line IIB-IIB in Figure 1, Figure 2(c) is a cross-sectional view along line IIC-IIC in Figure 1, and Figure 2(d) is a cross-sectional view along line IID-IID in Figure 1. Figure 3 is a plan view showing the first heat exchange section in an embodiment of the present invention, and is an enlarged view corresponding to part III in Figure 2(c). Figure 4 is a plan view showing the second heat exchange section in an embodiment of the present invention, and is an enlarged view corresponding to part IV in Figure 2(d). Figure 5 is a plan view showing the first and second heat exchange sections superimposed on each other in an embodiment of the present invention, and is an enlarged view corresponding to part III in Figure 2(c) and part IV in Figure 2(d). Figure 6 is a diagram illustrating the flow of refrigerant in an embodiment of the present invention and is an enlarged view corresponding to part VI in Figure 5. Figures 7(a) and 7(b) are partial cross-sectional views of a cold plate in an embodiment of the present invention; Figure 7(a) shows the cold plate cut along the line VIIA-VIIA in Figure 5, and Figure 7(b) shows the cold plate cut along the line VIIB-VIIB in Figure 5. Figure 8 is a partial cross-sectional view of a cold plate in an embodiment of the present invention and shows the cold plate cut along the line VIII-VIII in Figure 5. Figure 9 is a cross-sectional view showing a cold plate in yet another embodiment of the present invention and is a partial cross-sectional view corresponding to the cold plate cut along the line VIII-VIII in Figure 5. Figure 10 is a cross-sectional view showing a cold plate in yet another embodiment of the present invention and is a partial cross-sectional view corresponding to the cold plate cut along the line VIII-VIII in Figure 5.

[0022] Embodiments of the present invention will be described below with reference to the drawings.

[0023] Figure 1 is a cross-sectional view of the cold plate 100 in this embodiment. The cold plate 100 in this embodiment is a heat exchanger (cooler) that cools the heat exchange target object 500 by exchanging heat between the refrigerant and the heat exchange target object 500 by flowing the refrigerant through the internal space S. Examples of refrigerants include water, glycol-based aqueous solutions (ethylene glycol aqueous solution, propylene glycol aqueous solution, etc.), and fluorine-based inert liquids. A gas may also be used as the refrigerant.

[0024] The heat exchange target object 500 is not particularly limited, but semiconductor devices and the like can be given as examples. The cold plate 100 is used to cool the semiconductor chip, which is a heat source in the semiconductor device, and is specifically mounted on a heat spreader or the like placed on the outermost surface of the package. Examples of such semiconductor devices include chiplets and SoCs (System on a Chip), and examples of semiconductor chips included in the semiconductor device include CPUs (Central Processing Units) and GPUs (Graphics Processing Units).

[0025] In the semiconductor device described above, multiple semiconductor chips are mounted on a substrate, and these multiple semiconductor chips are sealed in a single package. As a result, a heat distribution occurs on the surface of the heat spreader. To address this heat distribution, the cold plate 100 in this embodiment is equipped with multiple regions having different cooling performance in the heat exchange section. Note that the object to be heat exchanged 500 is not limited to the semiconductor device described above, as long as it generates a heat distribution.

[0026] As will be described in detail later, as shown in Figure 1, the cold plate 100 in this embodiment has a first region R having a first cooling performance. １ , a second region R having a second cooling performance ２ , and a third region R having a third cooling performance ３ It is equipped with the following features. The number and arrangement of these regions can be changed depending on the configuration of the semiconductor device to be cooled.

[0027] As shown in FIG. 1, the cold plate 100 includes a main body portion 1, an inlet connection portion 2, and an outlet connection portion 3. The main body portion 1 has an internal space S through which a refrigerant flows. The internal space S in the present embodiment is a distribution flow path S １ and a heat exchange flow path S ２ and a confluence flow path S ３ and is composed of. The specific structures of the main body portion 1 and its internal space S will be described later.

[0028] The inlet connection portion 2 is connected to the main body portion 1. The inlet connection portion 2 is a cylindrical member having a supply hole 2a communicating with the distribution flow path S １ . An inlet pipe (not shown) for supplying a refrigerant, for example, is connected to the inlet connection portion 2. The outlet connection portion 3 is connected to the main body portion 1 away from the inlet connection portion 2. This inlet connection portion 2 is a cylindrical member having a discharge hole 3a communicating with the confluence flow path S ３ . An outlet pipe (not shown) for discharging a refrigerant, for example, is connected to the outlet connection portion 3.

[0029] In this cold plate 100, the refrigerant supplied from the supply hole 2a flows into the distribution flow path S １ of the main body portion 1 through the inlet connection portion 2. Next, the refrigerant flowing into the distribution flow path S １ flows from the distribution flow path S １ into the heat exchange flow path S ２ . Next, the refrigerant flowing into the heat exchange flow path S ２ flows from the heat exchange flow path S ２ into the confluence flow path S ３ . Finally, the refrigerant flowing into the confluence flow path S ３ is discharged to the outside of the cold plate 100 from the discharge hole 3a through the outlet connection portion 3.

[0030] The main body portion 1 is formed by stacking and joining a plurality of layers in the thickness direction (Z direction in the figure). The main body portion 1 is a portion that contacts the heat exchange object 500 and exchanges heat with the heat exchange object 500. The plurality of layers constituting the main body portion 1 include a bottom plate layer 1a, a top plate layer 1b, and a flow path forming layer 1c. The bottom plate layer 1a, the top plate layer 1b, and the flow path forming layer 1c in the present embodiment are layer members having substantially the same outer shape as each other in plan view.

[0031] Figures 2(a) to 2(d) are cross-sectional views showing the layer structure of the cold plate 100 in this embodiment. Figure 2(a) is a cross-sectional view along line IIA-IIA in Figure 1 and is a plan view showing the bottom plate layer 1a. As shown in Figure 2(a), the bottom plate layer 1a is a rectangular plate-shaped member. The lower surface of this bottom plate layer 1a is a contact surface that contacts the heat exchange object 500, and although not particularly limited, it contacts the heat spreader of a semiconductor chip. As shown in Figure 1, the bottom plate layer 1a constitutes the lowest layer among the multiple layers that make up the main body 1. Note that this bottom plate layer 1a does not have the first and second heat exchange sections 11, 21, distribution holes 12, 22, and merging holes 13, 23 which will be described later.

[0032] Figure 2(b) is a cross-sectional view along the line IIB-IIB in Figure 1, and is a plan view showing the top plate layer 1b. As shown in Figure 2(b), the top plate layer 1b is a rectangular plate-like member. As shown in Figure 1, the top plate layer 1b constitutes the uppermost layer among the multiple layers that make up the main body 1.

[0033] As shown in Figure 2(b), the top plate layer 1b in this embodiment has an inlet hole H １ And, outflow hole H ２ It includes, and. Inlet hole H １ and outflow hole H ２ It penetrates the top plate layer 1b in the thickness direction. As shown in Figure 1, the inlet connection part 2 has a supply hole 2a and an inlet hole H １ It is connected to the main body 1 so that it is in communication with the discharge hole 3a and the outflow hole H. ２ It is connected to the main body 1 so that it is in communication with the other. Note that this top plate layer 1b does not have the first and second heat exchange sections 11, 21, distribution holes 12, 22, and merging holes 13, 23 which will be described later.

[0034] As shown in Figure 1, a channel-forming layer 1c is interposed between the bottom plate layer 1a and the top plate layer 1b. The channel-forming layer 1c has a configuration similar to the laminated portion described in Japanese Patent Application Publication No. 2024-115132.

[0035] This channel-forming layer 1c includes a plurality of (five in this example) first plates 10 and a plurality of (five in this example) second plates 20. The plurality of first plates 10 and the plurality of second plates 20 are stacked alternately along the Z direction. Although not particularly limited, the first plates 10 and the second plates 20 each have a thickness of, for example, about 0.2 mm. The number of first plates 10 and second plates 20 is not limited to the above.

[0036] Figure 2(c) is a cross-sectional view along the IIC-IIC line in Figure 1 and is a plan view showing the first plate 10. As shown in Figure 2(c), the first plate 10 includes a first heat exchange section 11, a distribution hole 12, a confluence hole 13, and a frame section 14. The first heat exchange section 11 is the part in which a flow path for the refrigerant is formed, and the refrigerant flows into this first heat exchange section 11 from the distribution hole 12. In this embodiment, the first heat exchange section 11 includes a first parallel flow path 30, a connecting flow path 33, and a second parallel flow path 35, which will be described later.

[0037] As shown in Figures 1 and 2(c), the flow path and inlet hole H of the first heat exchange section 11 １ A distribution hole 12 is connected to the first plate 10. The distribution hole 12 penetrates the first plate 10 along its thickness direction. On the other hand, the confluence hole 13 is connected to the flow path of the first heat exchange section 11 and the outflow hole H on the opposite side of the distribution hole 12. ２ It is in communication with the first plate 10. The confluence hole 13, like the distribution hole 12, penetrates the first plate 10 along its thickness direction. The frame portion 14 surrounds the first heat exchange portion 11, the distribution hole 12, and the confluence hole 13. The shape of this frame portion 14 is a rectangular ring.

[0038] Figure 2(d) is a cross-sectional view along the IID-IID line in Figure 1, and is a plan view showing the second plate 20. As shown in Figure 2(d), the first plate 10 includes a second heat exchange section 21, a distribution hole 22, a confluence hole 23, and a frame section 24. The second heat exchange section 21 is the part in which a flow path for the refrigerant is formed, and is laminated on the first heat exchange section 11. In this embodiment, the second heat exchange section 21 includes a first crossing flow path 40 and a second crossing flow path 45, which will be described later.

[0039] As shown in Figures 1 and 2(d), the distribution hole 22 is in communication with the flow path of the second heat exchange section 21. The distribution hole 12 penetrates the second plate 20 along its thickness direction and overlaps with the distribution hole 12 of the first plate 10. On the other hand, the confluence hole 23 is in communication with the flow path of the second heat exchange section 21 on the opposite side of the distribution hole 22. The confluence hole 23 penetrates the second plate 20 along its thickness direction and overlaps with the confluence hole 13 of the first plate 10. The frame portion 24 surrounds the second heat exchange section 21, the distribution hole 22, and the confluence hole 23. The shape of this frame portion 24 is rectangular and annular. This frame portion 24 also overlaps with the frame portion 14.

[0040] As shown in Figure 1, the external shape of the internal space S is defined by the upper surface of the bottom plate layer 1a, the lower surface of the top plate layer 1b, and the inner circumferential surfaces of the frame portions 14 and 24, and the bottom plate layer 1a, the top plate layer 1b, and the frame portions 14 and 24 constitute the case portion 1d.

[0041] Furthermore, in this embodiment, the distribution channel S １ It is composed of multiple distribution holes 12, 22 stacked on top of each other, and a confluence channel S ３ It is composed of multiple confluence holes 13, 23 stacked on top of each other. Heat exchange channel S ２ This is composed of the flow paths 30, 33, 35, 40, and 45 in the multiple first and second heat exchange sections 11 and 21.

[0042] The bottom plate layer 1a, top plate layer 1b, first plate 10, and second plate 20 described above are joined to each other, for example, by diffusion bonding. However, the joining method is not particularly limited to the diffusion bonding described above.

[0043] Before joining, the bottom plate layer 1a, top plate layer 1b, first plate 10, and second plate 20 are plate-shaped members made of a metallic material having good thermal conductivity. While not particularly limited, specific examples of the metallic materials constituting the bottom plate layer 1a, top plate layer 1b, first plate 10, and second plate 20 include, for example, copper, aluminum, and alloys thereof. The channels 30, 33, 35, distribution holes 12, and confluence holes 13 of the first plate 10 are formed by etching the plate-shaped member. Similarly, the channels 40, 45, distribution holes 22, and confluence holes 23 of the second plate 20 are also formed by etching the plate-shaped member.

[0044] Figure 3 is a plan view showing the first heat exchange section 11 in this embodiment, and is an enlarged view corresponding to section III in Figure 2(c). Figure 4 is a plan view showing the second heat exchange section 21 in this embodiment, and is an enlarged view corresponding to section IV in Figure 2(d). Figure 5 is a plan view showing the first and second heat exchange sections 11 and 21 superimposed on each other in this embodiment, and is an enlarged view corresponding to section III in Figure 2(c) and section IV in Figure 2(d). Figure 6 is a diagram for explaining the flow of refrigerant in this embodiment, and is an enlarged view corresponding to section VI in Figure 5. Figures 7(a) and 7(b) are partial cross-sectional views of the cold plate 100 in this embodiment, where Figure 7(a) is a view of the cold plate 100 cut along the line VIIA-VIIA in Figure 5, and Figure 7(b) is a view of the cold plate 100 cut along the line VIIB-VIIB in Figure 5. Figure 8 is a partial cross-sectional view of the cold plate 100 in this embodiment, showing the cold plate 100 cut along the line VIII-VIII in Figure 5.

[0045] As shown in Figure 3, the first heat exchange section 11 includes a plurality of first parallel flow channels 30, a plurality of connecting flow channels 33, and a plurality of second parallel flow channels 35. The first parallel flow channels 30 have a linear shape extending along the X direction, and the second parallel flow channels 35 also have a linear shape extending along the X direction. This X direction corresponds to an example of the "first direction" in the embodiment of the present invention.

[0046] The first heat exchange unit 11 in this embodiment includes a pair of first parts 15a and 15c in which a first parallel flow path 30 is formed, and a second part 15b in which a connecting flow path 33 and a second parallel flow path 35 are formed. The second part 15b is positioned between the pair of first parts 15a and 15c in the X direction. Since the refrigerant flows toward the +X side in the respective flow paths 30, 33, and 35, the refrigerant flows in the first heat exchange unit 11 in the order of the first part 15a, the second part 15b, and the first part 15c.

[0047] In this embodiment, the second parallel channel 35 is arranged adjacent to the first parallel channel 30 in the X direction, but is not limited to this. For example, the second parallel channel 35 may be arranged adjacent to the first parallel channel 30 in the Y direction.

[0048] Hereinafter, the inlet holes H at both ends of the first and second parallel flow channels 30 and 35. １ The ends closest to the (distribution hole 12) are referred to as "inlet ends 30a, 35a", and the outlet holes H at both ends of the parallel flow path 30 ２ The ends closest to the confluence hole 13 are referred to as "outlet ends 30b and 35b". In other words, the inlet end 30a is the inlet side (-X side) of the first parallel flow path 30, and the outlet end 30b is the outlet side (+X side) of the first parallel flow path 30. Similarly, the inlet end 35a is the inlet side (-X side) of the second parallel flow path 35, and the outlet end 35b is the outlet side (+X side) of the second parallel flow path 35.

[0049] In the first portion 15a, each first parallel flow path 30 includes two flow holes 31 and two occluding portions 32. The flow holes 31 are holes extending in the X direction in the figure, allowing the refrigerant to flow in the X direction in the figure. Each flow hole 31 penetrates the first plate 10 in the thickness direction. The occluding portions 32 are portions that block the flow holes 31, restricting the flow of the refrigerant in the X direction in the figure.

[0050] In the first portion 15a, the first parallel flow path 30 includes a plurality of first main flow paths 30A and a plurality of second main flow paths 30B. The second main flow paths 30B are located at different positions from the first main flow paths 30A in the Y direction in the figure. Although not particularly limited, in this embodiment, the plurality of first main flow paths 30A and the plurality of second main flow paths 30B are arranged alternately in the Y direction in the figure. This Y direction corresponds to an example of the "second direction" in the embodiments of the present invention. Furthermore, the first main flow path 30A corresponds to an example of the "first flow path" in the embodiments of the present invention, and the second main flow path 30B corresponds to an example of the "second flow path" in the embodiments of the present invention.

[0051] The positions where the occluding portion 32 is provided in the first main flow path 30A are different from the positions where the occluding portion 32 is provided in the second main flow path 30B. Specifically, in the first main flow path 30A, the occluding portion 32 is provided at the outlet end 30b and in the portion other than both ends in the X direction in the figure (the midpoint in the X direction in the figure). On the other hand, in the second main flow path 30B, the occluding portion 32 is provided at the inlet end 30a and in the portion other than both ends in the X direction in the figure (the midpoint in the X direction in the figure).

[0052] In the following, the closure portion 32 provided at the inlet end 30a of the first parallel flow path 30 will be referred to as the "inlet closure portion 32a," and the closure portion 32 provided at the outlet end 30b of the first parallel flow path 30 will be referred to as the "outlet closure portion 32b." Furthermore, the closure portions 32 provided in parts of the first parallel flow path 30 other than both ends (inlet end 30a and outlet end 30b) will be referred to as the "intermediate closure portion 32c." In addition, the intermediate closure portion 32c provided in the first main flow path 30A will be referred to as the "first intermediate closure portion 32d," and the intermediate closure portion 32c provided in the second main flow path 30B will be referred to as the "second intermediate closure portion 32e."

[0053] In this embodiment, the first main flow path 30A is provided with an outlet closure 32b and a first intermediate closure 32d, but does not have an inlet closure 32a. Therefore, refrigerant flows into the first section 15a via this first main flow path 30A. On the other hand, the second main flow path 30B is provided with an inlet closure 32a and a second intermediate closure 32e, but does not have an outlet closure 32b. Therefore, refrigerant flows into the connecting flow path 33A via this second main flow path 30B.

[0054] Multiple connecting channels 33 are formed at both ends of the second portion 15b in the X direction in the figure. The multiple connecting channels 33 include multiple first connecting channels 33A and multiple second connecting channels 33B. The second connecting channels 33B are positioned differently from the first connecting channels 33A in the Y direction in the figure. The first connecting channels 33A are formed at the -X direction end of the second portion 15b, and the second connecting channels 33B are formed at the +X direction end of the second portion 15b.

[0055] In this embodiment, the first connecting passage 33A is in communication with the outlet end 30b of the second main passage 30B and also with the third main passage 35A (described later) of the second parallel passage 35. In other words, the first connecting passage 33A connects the second main passage 30B and the third main passage 35A. Therefore, refrigerant flows from the second main passage 30B to the third main passage 35A via this first connecting passage 33A.

[0056] On the other hand, the second connecting passage 33B is in communication with the fourth main passage 35B (described later) of the second parallel passage 35, and is also in communication with the inlet end 30a of the first main passage 30C. In other words, the second connecting passage 33B connects the fourth main passage 35B and the first main passage 30C (described later) of the first section 15c. Therefore, refrigerant flows from the fourth main passage 35B to the first main passage 30C via this first connecting passage 33A.

[0057] The connecting channel 33 includes a rectangular section 34a and a tapered section 34b. The rectangular section 34a is the part that communicates with the plurality of first parallel channels 30 and has a rectangular shape with a constant width in plan view. On the other hand, the tapered section 34b is interposed between the rectangular section 34a and one second parallel channel 35 and is the part that communicates with the rectangular section 34a and the one second parallel channel 35. In plan view, the pair of inner wall surfaces of this tapered section 34b are inclined to approach each other as they move from the first parallel channel 30 towards the second parallel channel 35. In other words, the width of the tapered section 34b (length in the Y direction in the figure) narrows as it moves from the first parallel channel 30 towards the second parallel channel 35.

[0058] The width of the rectangular section 34a is wider than that of the tapered section 34b, and multiple (two in this example) first parallel flow paths 30 are connected to this rectangular section 34a. On the other hand, only one second parallel flow path 35 is connected to the tapered section 34b. In other words, the first connecting flow path 33A is configured so that the refrigerant flowing through multiple first parallel flow paths 30 merges in one second parallel flow path 35. On the other hand, the second connecting flow path 33B is configured so that the refrigerant flowing through one second parallel flow path 35 is distributed to multiple first parallel flow paths 30.

[0059] In this embodiment, two first parallel channels 30 and one second parallel channel 35 are connected to the connecting channel 33, but the number of first and second parallel channels 30 and 35 connected to the connecting channel 33 is not limited to these. It is sufficient that the number of first parallel channels 30 connected to the connecting channel 33 is greater than the number of second parallel channels 35 connected to the connecting channel 33.

[0060] Multiple second parallel channels 35 are formed in the second portion 15b between multiple connecting channels 33A and multiple connecting channels 33B. As shown in Figures 3, 7(a), and 7(b), the width W of the second parallel channels 35 is ２ (See Figures 7(a) and 7(b)) The width W of the first parallel flow path 30 is shown. １ (See Figures 7(a) and 7(b)) which is larger than (W １ <W ２). For this reason, the cross-sectional area A of the second parallel channel 35 ２ Also, the cross-sectional area A of the first parallel flow channel 30 １ It is larger than (A １ <A ２ ).

[0061] Note that the width W in this embodiment １ This is the length of the first parallel channel 30 along the Y direction in the figure, and the cross-sectional area A １ This is the area of ​​the cross-section when the first parallel flow path 30 is cut along the Y direction in the figure. In other words, width W １ This is the length of the first parallel flow path 30 in a direction perpendicular to the extension direction of the first parallel flow path 30 (hereinafter referred to as the first orthogonal direction) when the first parallel flow path 30 is viewed from the stacking direction of the first and second heat exchange sections 11 and 21, and the cross-sectional area A １ This is the area of ​​the cross-section when the first parallel flow path 30 is cut along the first orthogonal direction. Similarly, the width W in this embodiment ２ This is the length of the second parallel channel 35 along the Y direction in the figure, and the cross-sectional area A ２ This is the area of ​​the cross-section when the second parallel flow path 35 is cut along the Y direction in the figure. In other words, width W ２ This is the length of the second parallel flow channel 35 in a direction perpendicular to the extension direction of the second parallel flow channel 35 (in this example, the first perpendicular direction) when the second parallel flow channel 35 is viewed from the stacking direction of the first and second heat exchange sections 11 and 21, and the cross-sectional area A ２ This is the area of ​​the cross-section when the second parallel flow path 35 is cut along the first orthogonal direction.

[0062] As shown in Figure 3, each second parallel flow path 35 includes one flow hole 36 and one occlusion 37. The flow hole 36 is a hole extending in the X direction in the figure, allowing the refrigerant to flow in the X direction in the figure. Each flow hole 36 penetrates the first plate 10 in the thickness direction. The occlusion 37 is a portion that closes one end of the flow hole 36, connecting only one end of the flow hole 36 to the first parallel flow path 30.

[0063] The second parallel flow path 35 includes a plurality of third main flow paths 35A and a plurality of fourth main flow paths 35B. The fourth main flow paths 35B are located at different positions from the third main flow paths 35A in the Y direction in the figure. Although not particularly limited, in this embodiment the plurality of third main flow paths 35A and the plurality of fourth main flow paths 35B are arranged alternately in the Y direction in the figure.

[0064] The location where the occlusion section 37 is provided in the third main flow path 35A is different from the location where the occlusion section 37 is provided in the fourth main flow path 35B. Specifically, in the third main flow path 35A, the occlusion section 37 is provided only at the outlet end 35b. On the other hand, in the fourth main flow path 35B, the occlusion section 37 is provided only at the inlet end 35a.

[0065] In the following, the closure portion 37 provided at the inlet end 35a of the second parallel flow path 35 will be referred to as the "inlet closure portion 37a," and the closure portion 37 provided at the outlet end 35b of the second parallel flow path 35 will be referred to as the "outlet closure portion 37b."

[0066] In this embodiment, the third main flow path 35A is provided only with an outlet closure 37b and no inlet closure 37a. Therefore, refrigerant flows into the third main flow path 35A via the first connecting flow path 33A, and the flowing refrigerant is restricted from flowing in the +X direction only by the outlet closure 37b.

[0067] On the other hand, the fourth main flow path 35B is provided only with an inlet closure 37a and no outlet closure 37b. Therefore, refrigerant flows into the connecting flow path 33B via this fourth main flow path 35B, and the inlet closure 37a restricts the flow of the incoming refrigerant from flowing in the -X direction.

[0068] Furthermore, unlike the first and second main passages 30A and 30B described above, the third and fourth main passages 35A and 35B do not have an intermediate closure section between the ends of the second parallel passage 35 in the X direction that restricts the flow of refrigerant in the X direction. In other words, the third main passage 35A does not have an intermediate closure section between the inlet end 35a and the outlet closure section 37b. Similarly, the fourth main passage 35B does not have an intermediate closure section between the inlet closure section 37a and the outlet end 35b.

[0069] In the first portion 15c, the first parallel flow path 30 includes a plurality of first main flow paths 30C and a plurality of second main flow paths 30D. The first main flow paths 30C are provided between a pair of first main flow paths 30A in the Y direction in the figure and are provided so as to overlap with the second main flow paths 30B in the same Y direction. On the other hand, the second main flow paths 30D are provided between a pair of second main flow paths 30B in the Y direction in the figure and are provided so as to overlap with the first main flow paths 30A in the same Y direction.

[0070] Furthermore, the second main channel 30D is located at a different position from the first main channel 30C in the Y direction in the figure. Although not particularly limited, in the first portion 15c, a plurality of first main channels 30C and a plurality of second main channels 30D are arranged alternately in the Y direction in the figure. The first main channel 30C corresponds to an example of the "second channel" in the embodiment of the present invention, and the second main channel 30D corresponds to an example of the "first channel" in the embodiment of the present invention.

[0071] The first main flow path 30C is provided with an outlet closure 32b and a first intermediate closure 32d, but it does not have an inlet closure 32a. Therefore, refrigerant flows into the first main flow path 30C via the connecting flow path 33B. On the other hand, the second main flow path 30D is provided with an inlet closure 32a and a second intermediate closure 32e, but it does not have an outlet closure 32b. Therefore, refrigerant flows into the confluence hole 13 via this second main flow path 30D.

[0072] As shown in Figure 4, the second heat exchange section 21 includes a plurality of first intersecting channels 40 and a plurality of second intersecting channels 45. The first intersecting channels 40 have a linear shape extending along the Y direction, and the second intersecting channels 45 also have a linear shape extending along the Y direction.

[0073] The second heat exchange section 21 in this embodiment includes a pair of third sections 25a and 25c in which a first intersecting channel 40 is formed, and a fourth section 25b in which a second intersecting channel 45 is formed. The fourth section 25b is positioned between the pair of third sections 25a and 25c in the X direction.

[0074] The multiple first intersecting channels 40 include multiple first intersecting channels 40A in the third section 25a. Each first intersecting channel 40A includes multiple connection holes 41A and multiple disconnection parts 42. These connection holes 41A and disconnection parts 42 are arranged alternately in the Y direction in the figure. The connection holes 41A are holes that extend in the Y direction in the figure and allow the refrigerant to flow in the Y direction in the figure. The connection holes 41A penetrate the second heat exchange section 21 in its thickness direction (Z direction in the figure). The disconnection parts 42 are parts that close the connection holes 41A and restrict the flow of the refrigerant in the Y direction in the figure.

[0075] The multiple first intersecting channels 40 include multiple first intersecting channels 40B in the third portion 25c. Each first intersecting channel 40B includes multiple connection holes 41B and multiple non-connection portions 42. The connection holes 41B have the same configuration as the connection holes 41A described above.

[0076] In the fourth section 25b, each second intersecting flow path 45 includes a plurality of connection holes 46 and a plurality of disconnection portions 47. These connection holes 46 and disconnection portions 47 are arranged alternately in the Y direction in the figure. The connection holes 46 are holes that extend in the Y direction in the figure and allow the refrigerant to flow in the Y direction in the figure. The connection holes 46 penetrate the second heat exchange section 21 in its thickness direction (Z direction in the figure). The disconnection portions 47 are portions that close the connection holes 46 and restrict the flow of the refrigerant in the Y direction in the figure.

[0077] As shown in Figures 4 and 8, the width W of the second cross channel 45 ４ (See Figure 8) The width W of the first crossing channel 40 is shown. ３ (See Figure 8) It is larger than (W ３ <W ４ ). For this reason, the cross-sectional area A of the second intersecting channel 45 ４ (See Figure 8) The cross-sectional area A of the first intersecting channel 40. ３ It is larger than (A ３ <A ４ ).

[0078] Note that the width W in this embodiment ３ This is the length of the first intersecting channel 40 along the X direction in the figure, and the cross-sectional area A ３ This is the area of ​​the cross-section when the first intersecting channel 40 is cut along the X direction in the figure. In other words, width W ３ This is the length of the first intersecting channel 40 in a direction perpendicular to the extension direction of the first intersecting channel 40 (hereinafter referred to as the second perpendicular direction) when the first intersecting channel 40 is viewed from the stacking direction of the first and second heat exchange sections 11 and 21, and the cross-sectional area A ３ This is the area of ​​the cross-section when the first intersecting channel 40 is cut along the second orthogonal direction. Similarly, the width W in this embodiment ４ This is the length of the second intersecting channel 45 along the X direction in the figure, and the cross-sectional area A ４ This is the area of ​​the cross-section when the second intersecting channel 45 is cut along the X direction in the figure. Furthermore, although not particularly limited, the length of the second intersecting channel 45 along the Y direction is also greater than the length of the first intersecting channel 40 along the Y direction. In other words, width W ４ This is the length of the second intersecting channel 45 in a direction perpendicular to the extension direction of the second intersecting channel 45 (in this example, the second orthogonal direction) when the second intersecting channel 45 is viewed from the stacking direction of the first and second heat exchange sections 11 and 21, and the cross-sectional area A ４ This is the area of ​​the cross-section when the second intersecting channel 45 is cut along the second orthogonal direction.

[0079] As shown in Figure 5, the third portion 25a is stacked on the first portion 15a described above, and the first region R １The fourth portion 25b is stacked on the second portion 15b described above, and the second region R ２ This constitutes the third portion 25c, which is stacked on the first portion 15c described above, and the third region R ３ It constitutes [something].

[0080] First region R １ Each connection hole 41A is positioned so as to overlap with both the first main flow path 30A and the second main flow path 30B in a plan view. More specifically, one end of the connection hole 41A (the +Y side end in the figure) overlaps with the first main flow path 30A, and the other end of the connection hole 41A (the -Y side end in the figure) overlaps with the second main flow path 30B. As a result, each connection hole 41A (the first intersecting flow path 40A) is in communication with both the first main flow path 30A and the second main flow path 30B.

[0081] Therefore, the refrigerant can move through the connection hole 41A between one first main flow path 30A and one second main flow path 30B that are adjacent in the Y direction in the figure. Also, as shown in Figure 7(a), in a plan view, in the portion where the first and second main flow paths 30A, 30B and the connection hole 41A overlap (the portion where the first and second main flow paths 30A, 30B and the connection hole 41A intersect), the refrigerant can move between all the first and second heat exchange sections 11, 21 provided in the flow path forming layer 1c in the thickness direction of the flow path forming layer 1c (the Z direction in the figure).

[0082] As shown in Figure 5, the third region R ３ Each connection hole 41B is positioned so as to overlap with both the first main channel 30C and the second main channel 30D in a plan view. As a result, each connection hole 41B (first intersecting channel 40B) is in communication with both the first main channel 30C and the second main channel 30D. Also, although not specifically shown, there is a third region R ３ In the first region R １Similarly, in a plan view, at the point where the first and second main flow paths 30C, 30D and the connection hole 41B overlap, the refrigerant can move in the thickness direction of the flow path forming layer 1c between all the first and second heat exchange sections 11, 21 provided in the flow path forming layer 1c.

[0083] As shown in Figure 5, the second region R ２ Each connection hole 46 is positioned so as to overlap with both the third main flow path 35A and the fourth main flow path 35B in a plan view. More specifically, one end of the connection hole 46 (the +Y side end in the figure) overlaps with the fourth main flow path 35B, and the other end of the connection hole 46 (the -Y side end in the figure) overlaps with the third main flow path 35A. As a result, each connection hole 46 (the second intersecting flow path 45) is in communication with both the third main flow path 35A and the fourth main flow path 35B.

[0084] Therefore, the refrigerant can move through the connection hole 46 between one third main flow path 35A and one fourth main flow path 35B that are adjacent in the Y direction in the figure. Also, as shown in Figure 7(b), in a plan view, in the portion where the third and fourth main flow paths 35A, 35B and the connection hole 46 overlap (the portion where the third and fourth main flow paths 35A, 35B and the connection hole 46 intersect), the refrigerant can move between all the first and second heat exchange sections 11, 21 provided in the flow path forming layer 1c in the thickness direction of the flow path forming layer 1c.

[0085] As shown in Figures 7(a) and 7(b), such a second region R ２ Cross-sectional area A of the second parallel channel 35 formed therein ２ These are the first and third regions R １ , R ２ Cross-sectional area A of the first parallel channel 30 formed therein １ It is larger than that. Similarly, as shown in Figure 8, the second region R ２ Cross-sectional area A of the second intersecting channel 45 formed therein ４ These are the first and third regions R １ , R ２ Cross-sectional area A of the first intersecting channel 40 formed therein ３ It is larger than that. Also, the first region R１ The number of the first parallel flow paths 30 formed in the first region R ２ is larger than the number of the second parallel flow paths 35 formed in the second region R, and the number of the first cross flow paths 40A formed in the first region R １ is larger than the number of the second cross flow paths 45 formed in the second region R. Therefore, the contact area between the refrigerant and the first and second heat exchange portions 11 and 21 in the first region R ２ is larger than the contact area between the refrigerant and the first and second heat exchange portions 11 and 21 in the second region R. Thus, the first cooling performance of the first region R １ is higher than the second cooling performance of the second region R. For the same reason, the third cooling performance of the third region R ２ is higher than the second cooling performance of the second region R. １ In such a cold plate 100, the first and third regions R ２ are arranged at the high-temperature and high-heat portions in the heat spreader of the semiconductor chip, and the second region R ３ is arranged at the low-temperature and low-heat portion compared with the high-heat portion, whereby the cooling performance can be optimized with respect to the heat distribution. ２

[0086] In such a cold plate 100, the first and third regions R １ , R ３ are arranged at the high-temperature and high-heat portions in the heat spreader of the semiconductor chip, and the second region R ２ is arranged at the low-temperature and low-heat portion compared with the high-heat portion, whereby the cooling performance can be optimized with respect to the heat distribution.

[0087] Also, as described above, in the second region R where the required cooling performance is low ２ , the cross-sectional areas A ２ , A ４ of the flow paths are increased, and since the flow velocity of the refrigerant decreases due to the increase in the cross-sectional area, the pressure loss can be reduced. Therefore, in the cold plate 100 according to the present embodiment, the pressure loss can also be optimized.

[0088] Hereinafter, the flow of the refrigerant in the heat exchange flow path S ２ in the present embodiment will be described with reference to FIGS. 6 to 8.

[0089] ​As shown in Figure 6, first, the refrigerant flows from the inlet end 30a into each of the first main flow paths 30A (flow F1 in Figure 6). This refrigerant then flows in the direction X in the figure through the flow hole 31 of the first main flow path 30A, but is blocked by the first intermediate blockage section 32d.

[0090] The refrigerant blocked by the first intermediate blockage 32d moves in the thickness direction (Z direction in the figure), as shown in Figure 7(a), and reaches the first intersecting flow path 40A (connection hole 41A) formed in one of the plurality of second heat exchange sections 21 (flow F2 in Figure 7(a)). Then, as shown in Figure 6, the refrigerant flows in the Y direction in the figure through the connection hole 41A of the first intersecting flow path 40A (flow F3 in Figure 6). The refrigerant then reaches the second main flow path 30B formed in one of the plurality of first heat exchange sections 11. Specifically, the refrigerant moves to the second main flow path 30B through a plurality of connection holes 41A located between the inlet end 30a and the first intermediate blockage 32d in the X direction in the figure. The refrigerant that has moved to the second main flow path 30B flows in the X direction in the figure through the flow hole 31 of the second main flow path 30B and is blocked by the second intermediate blockage 32e (flow F4 in Figure 6).

[0091] The refrigerant blocked by the second intermediate blockage 32e moves to the first main flow path 30A via the connection holes 41A of the first crossing flow path 40A, as in the case described above (flow F5 in Figure 6). Specifically, the refrigerant moves to the first main flow path 30A via a plurality of connection holes 41A located between the first intermediate blockage 32d and the second intermediate blockage 32e in the Y direction in the figure. The refrigerant that has moved to the first main flow path 30A flows through the flow holes 31 of the first main flow path 30A in the X direction in the figure and is blocked by the outlet blockage 32b (flow F6 in Figure 6).

[0092] The refrigerant blocked by the outlet blockage 32b moves to the second main flow path 30B through the connection holes 41A of the first crossing flow path 40A (flow F7 in Figure 6). Specifically, the refrigerant moves to the second main flow path 30B through a plurality of connection holes 41A located between the second intermediate blockage 32e and the outlet blockage 32b in the X direction in the figure. The refrigerant that has moved to the second main flow path 30B flows through the flow holes 31 of the second main flow path 30B in the X direction in the figure and flows into the connection flow path 33A from the outlet end 30b (flow F8 in Figure 6).

[0093] The refrigerants flowing in from the two second main channels 30B merge in the connecting channel 33A (flow F9 in Figure 6). The refrigerants that merge in the connecting channel 33A flow in the X direction in the connecting channel 33A and flow into the flow hole 31 of the third main channel 35A (flow F10 in Figure 6). The refrigerants that flow into the flow hole 31 of the third main channel 35A flow in the X direction in the figure through the flow hole 36 of the third main channel 35A, but are blocked by the outlet blockage section 37b (see Figure 3) (flow F11 in Figure 6).

[0094] The refrigerant blocked by the outlet blockage 37b moves in the thickness direction (Z direction in the figure), as shown in Figure 7(b), and reaches the second crossing channel 45 (connection hole 46) formed in one of the multiple second heat exchange sections 21 (flow F12 in Figure 7(b)). Then, as shown in Figure 6, the refrigerant flows in the Y direction in the figure through the connection hole 46 of the second crossing channel 45 (flow F13 in Figure 6). The refrigerant then reaches the fourth main channel 35B formed in one of the multiple first heat exchange sections 11. The refrigerant that has moved to the fourth main channel 35B flows in the X direction in the figure through the flow hole 36 of the fourth main channel 35B and moves to the second connection channel 33B (see Figure 3) (flow F14 in Figure 6).

[0095] Since the refrigerant flows in essentially the same way as in the first main flow path 30A, the first crossing flow path 40A, the second main flow path 30B, and the first connecting flow path 33A described above, we will explain it simply using Figure 5 without illustrating the flow.

[0096] The refrigerant that has moved to the second connecting channel 33B shown in Figure 5 flows into the first main channel 30C from the inlet end 30a of the first main channel 30C. This refrigerant then flows in the direction X in the figure through the flow hole 31 of the first main channel 30C, but is blocked by the first intermediate blockage section 32d.

[0097] The refrigerant blocked by the first intermediate blockage 32d moves in the thickness direction (Z direction in the figure) and reaches the first intersecting flow path 40B (connection hole 41B) formed in one of the multiple second heat exchange sections 21. The refrigerant then flows in the Y direction in the figure through the connection hole 41B of the first intersecting flow path 40B. The refrigerant then reaches the second main flow path 30D formed in one of the multiple first heat exchange sections 11. The refrigerant that has moved to the second main flow path 30D flows in the X direction in the figure through the flow hole 31 of the second main flow path 30D and is blocked by the second intermediate blockage 32e.

[0098] The refrigerant blocked by the second intermediate blockage 32e moves to the first main flow path 30C via the connection hole 41B of the first crossing flow path 40B, as in the case described above. The refrigerant that has moved to the first main flow path 30C flows through the flow hole 31 of the first main flow path 30C in the direction X in the figure and is blocked by the outlet blockage 32b. The refrigerant that has been blocked by the outlet blockage 32b moves to the second main flow path 30D via the connection hole 41B of the first crossing flow path 40B. The refrigerant that has moved to the second main flow path 30D flows through the flow hole 31 of the second main flow path 30D in the direction X in the figure and flows out from the outlet end 30b to the confluence hole 13.

[0099] Note that, as shown in FIG. 6, the refrigerant flows in a reciprocating and meandering manner between the first main flow path 30A and the second main flow path 30B because the second intermediate blocking portion 32e is located on the outlet side of the first intermediate blocking portion 32d. In other words, in the X direction in the figure, the second intermediate blocking portion 32e is located between the first intermediate blocking portion 32d and the outlet blocking portion 32b. As a result, the blocking portions 32 are alternately arranged in the first main flow path 30A and the second main flow path 30B from the inlet side to the outlet side, such as the inlet blocking portion 32a of the second main flow path 30B, the first intermediate blocking portion 32d of the first main flow path 30A, the second intermediate blocking portion 32e of the second main flow path 30B, and the outlet blocking portion 32b of the first main flow path 30A. In other words, a flow path set consisting of one first main flow path 30A and one second main flow path 30B has a plurality of blocking portions 32, and in this flow path set, the plurality of blocking portions 32 are alternately arranged in the first main flow path 30A and the second main flow path 30B when viewed in the X direction in the figure. As a result, the meandering of the refrigerant as described above is realized. This is the same for the flow of the refrigerant between the first main flow path 30C and the second main flow path 30D.

[0100] In contrast, since the second parallel flow path 35 in the present embodiment does not have an intermediate blocking portion, the refrigerant does not return to the third main flow path 35A after flowing from the third main flow path 35A into the fourth main flow path 35B. That is, the refrigerant does not flow in a reciprocating manner between the third main flow path 35A and the fourth main flow path 35B. For this reason, the second cooling performance of the second region R ２ can be set lower than the first and third cooling performances of the first and third regions R １ , R ３ , and the pressure loss in the second region R ２ can be set smaller than the pressure losses in the first and third regions R １ , R ３ .

[0101] Also, as shown in FIG. 6, in the first region R １ , the number of the first cross flow paths 40A (two in this example) arranged between the inlet blocking portion 32a and the first intermediate blocking portion 32d is in the second region R ２In this case, the number of second intersecting channels 45 that communicate with the pair of second parallel channels 35 (the third main channel 35A and the fourth main channel 35B) is less than the number of second intersecting channels 45 (five in this example). Therefore, the flow velocity of the refrigerant flowing through the connection hole 41A of the first intersecting channel 40A after being blocked by the first intermediate blockage section 32d is faster than the flow velocity of the refrigerant flowing through the connection hole 46 of the second intersecting channel 45. As a result, the second region R ２ Compared to the second cooling performance, the first region R １ The first cooling performance can be improved. For the same reason, the second region R ２ Compared to the second cooling performance, the third region R ３ This allows for a third level of improved cooling performance. The inlet closure portion 32a corresponds to an example of an "end closure portion" in an embodiment of the present invention.

[0102] Similarly, the first region R １ In this configuration, the number of first crossing channels 40A (two in this example) located between the outlet blockage 32b and the second intermediate blockage 32e is such that the second region R ２ In this case, the number of second intersecting channels 45 that communicate with the pair of second parallel channels 35 is less than the number of second intersecting channels 45 (five in this example). As a result, the second region R ２ Compared to the second cooling performance, the first region R １ The first cooling performance can be improved. For the same reason, the second region R ２ Compared to the second cooling performance, the third region R ３ This allows for a third level of improved cooling performance. The outlet closure portion 32b also corresponds to an example of an "end closure portion" in the embodiment of the present invention.

[0103] Furthermore, the first region R １ In this configuration, the number of first intersecting channels 40A (3 in this example) located between the first intermediate closure section 32d and the second intermediate closure section 32e is less than the number of second intersecting channels 45 communicating with the pair of second parallel channels 35 (5 in this example). As a result, the second region R ２ Compared to the second cooling performance, the first region R １ The first cooling performance can be improved. For the same reason, the second region R ２Compared to the second cooling performance, the third region R ３ This allows for a third level of improved cooling performance.

[0104] Furthermore, each connection hole 41A (first crossing passage 40A) is positioned such that it opens near each of the respective occluded sections 32 (for example, the outlet occluded section 32b). More specifically, in the first main passage 30A, a connection hole 41A (first crossing passage 40A) opens in a portion adjacent to the occluded section 32 (outlet occluded section 32b, first intermediate occluded section 32d) in the X direction in the figure. Similarly, in the second main passage 30B, a connection hole 41A (first crossing passage 40A) opens in a portion adjacent to the occluded section 32 (second intermediate occluded section 32e, inlet occluded section 32a) in the X direction in the figure. This suppresses the accumulation of refrigerant near the occluded sections 32. This is also true for the refrigerant flow between the first main flow path 30C and the second main flow path 30D, and also for the refrigerant flow between the third main flow path 35A and the fourth main flow path 35B.

[0105] Furthermore, the first parallel flow path 30 does not necessarily need to have an intermediate blockage section 32c. In this case, the second heat exchange section 21 only needs to have at least one first crossing flow path 40A connecting the first main flow path 30A and the second main flow path 30B, and at least one first crossing flow path 40B connecting the first main flow path 30C and the second main flow path 30D. Even with such a configuration, the refrigerant can be moved between the first main flow paths 30A and 30C and the second main flow paths 30B and 30D via the first crossing flow paths 40A and 40B.

[0106] Furthermore, the outlet closure section 32b may not be provided in the first main passages 30A and 30C, and the inlet closure section 32a may not be provided in the second main passages 30B and 30D. Even in this case, at least some of the refrigerant will move between the first main passages 30A and 30C and the second main passages 30B and 30D via the first cross passages 40A and 40B. Similarly, the outlet closure section 37b may not be provided in the third main passage 35A, and the inlet closure section 37a may not be provided in the fourth main passage 35B. Even in this case, at least some of the refrigerant will move between the third main passage 35A and the fourth main passage 35B via the second cross passage 45.

[0107] With the cold plate 100 in this embodiment as described above, the refrigerant can be moved regularly along the X, Y, and Z directions, making it less likely for the refrigerant flow to become disordered. Therefore, the flow rate of the refrigerant can be accurately distributed, and the first to third regions R １ ~R ３ The first to third cooling performances in this system can be precisely controlled.

[0108] In particular, in this embodiment, the second main flow path 30B and the first main flow path 30C of the first parallel flow path 30 are arranged adjacent to the third and fourth main flow paths 35A and 35B of the second parallel flow path 35 in the X direction, and are in communication with the third and fourth main flow paths 35A and 35B of the second parallel flow path 35 via a connecting flow path 33. The flow direction (X direction) of the refrigerant in the second main flow path 30B and the first main flow path 30C coincides with the flow direction (X direction) of the refrigerant in the third and fourth main flow paths 35A and 35B. As a result, disordered flow is less likely to occur between the second main flow path 30B and the third main flow path 35A, and disordered flow is less likely to occur between the fourth main flow path 35B and the first main flow path 30C. Therefore, the flow rate of the refrigerant supplied from the multiple second main channels 30B to the third main channel 35A can be kept small from the design value, and similarly, the flow rate of the refrigerant distributed from the fourth main channel 35B to the multiple first main channels 30C can be kept small from the design value. Thus, the flow rate of the refrigerant can be accurately distributed, and the first to third regions R １ ~R ３ The first to third cooling performances in this system can be precisely controlled.

[0109] The embodiments described above are provided to facilitate understanding of the present invention and are not intended to limit it. Therefore, each element disclosed in the above embodiments is intended to include all design modifications and equivalents that fall within the technical scope of the present invention.

[0110] For example, in the above embodiment, the width W of the second parallel flow path 35. ２ The width W of the first parallel flow path 30 １By making it wider, the cross-sectional area A of the second parallel channel 35 ２ The cross-sectional area A of the first parallel flow path 30 １ While it is larger than this, it is not limited to this. As shown in Figure 9, the height T of the second parallel channel 35 ２ The width T of the first parallel flow path 30 １ By making it larger than the cross-sectional area A of the second parallel channel 35, ２ The cross-sectional area A of the first parallel flow path 30 １ It can be made larger than that.

[0111] Figure 9 is a cross-sectional view showing a cold plate 100 in another embodiment of the present invention, and is a partial cross-sectional view corresponding to the view when the cold plate 100 is cut along the line VIII-VIII in Figure 5. As shown in Figure 9, in this embodiment, the first parallel flow channel 30 does not penetrate the first plate 10 in the thickness direction, and the first plate 10 includes an upper closing portion 32f that closes the first parallel flow channel 30 from above. Therefore, the height T of the first parallel flow channel 30 １ The height T of the second parallel flow path 35, which does not have this upper closing portion. ２ It is lower than (T １ <T ２ ), the above cross-sectional area A ２ is the cross-sectional area A １ Larger than (A ２ > A １ ). The first heat exchange section 11 having such an upper closing portion 32f can be manufactured, for example, by performing a half-etching process on the portion that will become the flow hole 31 in a layered member.

[0112] Height T in this embodiment １ This is the length of the first parallel flow path 30 along the Z direction in the figure. In other words, height T １ This is the length of the first parallel flow path 30 in the stacking direction of the first and second heat exchange sections 11 and 21. Height T ２ This is the length of the second parallel flow channel 35 along the Z direction in the figure, and the length of the second parallel flow channel 35 in the stacking direction of the first and second heat exchange sections 11 and 21.

[0113] Figure 10 is a cross-sectional view showing a cold plate in yet another embodiment of the present invention, and is a partial cross-sectional view corresponding to a view when the cold plate is cut along the line VIII-VIII in Figure 5. As shown in Figure 10, in this embodiment, the first heat exchange section 11 is composed of a first plate 10A and a first plate 10B stacked on top of each other, and the second parallel flow path 35 is composed of a first slit 38 in the first plate 10A and a second slit 39 in the first plate 10B. This first plate 10A corresponds to an example of the "first layer" in an embodiment of the present invention, and the first plate 10B corresponds to an example of the "second layer" in an embodiment of the present invention.

[0114] The first slit 38 has a linear shape extending in the X direction and penetrates the first plate 10A in the thickness direction. Similarly, the second slit 39 has a linear shape extending in the X direction and penetrates the first plate 10B in the thickness direction. In this first heat exchange section 11, the second slit 39 overlaps with the first slit 38 and communicates with the first slit 38.

[0115] In this embodiment, the second parallel channel 35 is composed of two layers of slits 38 and 39, while the first parallel channel 30 is composed of a single layer of slits (through holes), similar to the above embodiment. Therefore, the height T of the second parallel channel 35 ４ The height T of the first parallel channel 30 is ３ It is higher than (T ４ >T ３ ), the above cross-sectional area A ２ is the cross-sectional area A １ Larger than (A ２ > A １ ).

[0116] 100...Cold plate 1...Main body R １ ~R ３ ...First to third regions S...Internal space S １ ...Distribution channel S ２ ...Heat exchange channel S ３…Confluence channel 1a…Bottom plate layer 1b…Top plate layer 1c…Channel forming layer 1d…Case section 10…First plate 11…First heat exchange section 30…First parallel channel 30A, 30C…First main channel 30B, 30D…Second main channel 31…Flow hole 32…Blocked section 32a…Inlet blocked section 32b…Outlet blocked section 32c…Intermediate blocked section 32d, 32e…First and second intermediate blocked sections 33…Connecting channel 33A, 33B…First and second connecting channels 34a…Rectangular section 34b…Tapered section 35…Second parallel channel 35A, 35B…Third and fourth main channels 36…Flow hole 37…Blocked section 37a…Inlet blocked section 37b…Outlet blocked section 12…Distribution hole 13…Confluence hole 14...Frame section 15a, 15c...First section 15b...Second section 20...Second plate 21...Second heat exchange section 40, 40A, 40B...First crossing channel 41A, 41B...Connection hole 42...Disconnection section 45...Second crossing channel 46...Connection hole 47...Disconnection section 22...Distribution hole 23...Merging hole 24...Frame section 25a, 25c...Third section 25b...Fourth section 2...Inlet connection section 2a...Supply hole 3...Outlet connection section 3a...Discharge hole 500...Material to be heat exchanged

Claims

1. A heat exchanger comprising: an internal space through which a refrigerant flows; a first heat exchanger disposed in the internal space; and a second heat exchanger disposed in the internal space and stacked on the first heat exchanger, wherein the first heat exchanger includes: a plurality of first parallel flow channels extending in a first direction, through which the refrigerant flows, and arranged at mutually different positions in a second direction intersecting the first direction; a plurality of second parallel flow channels extending in a first direction, through which the refrigerant flows, arranged adjacent to the first parallel flow channels, and arranged at mutually different positions in a second direction; the second heat exchanger includes: a first intersecting flow channel extending in a second direction, through which the refrigerant flows, and communicating with a pair of the first parallel flow channels; and a second intersecting flow channel extending in a second direction, through which the refrigerant flows, and communicating with a pair of the second parallel flow channels. A cold plate in which the cross-sectional area of ​​the second parallel channel is larger than the cross-sectional area of ​​the first parallel channel, and the cross-sectional area of ​​the second intersecting channel is larger than the cross-sectional area of ​​the first intersecting channel.

2. A cold plate according to claim 1, wherein the width of the second parallel channel is wider than the width of the first parallel channel, and the width of the second intersecting channel is wider than the width of the first intersecting channel.

3. A cold plate according to claim 1 or 2, wherein the height of the second parallel channel is greater than the height of the first parallel channel, and the height of the second cross channel is greater than the height of the first cross channel.

4. A cold plate according to claim 3, wherein the first heat exchange portion includes a first layer and a second layer laminated on the first layer, the first layer includes a first slit extending in a first direction, the second layer overlaps with the first slit, communicates with the first slit, and includes a second slit extending in a first direction, and the second parallel flow path is composed of the first slit and the second slit.

5. A cold plate according to any one of claims 1 to 4, wherein the first heat exchange section is in communication with the first parallel flow path and the second parallel flow path, and includes a connecting flow path through which the refrigerant flows between the first parallel flow path and the second parallel flow path.

6. A cold plate according to claim 5, wherein the number of first parallel channels communicating with the connecting channel is greater than the number of second parallel channels communicating with the connecting channel.

7. A cold plate according to any one of claims 1 to 6, wherein the first parallel flow path includes a first flow path extending in a first direction through which the refrigerant flows in the first direction, and a second flow path extending in a first direction through which the refrigerant flows, and which is positioned differently from the first flow path in a second direction, the first flow path includes a first intermediate occlusion portion positioned between both ends of the first flow path in the first direction and restricting the flow of the refrigerant in the first direction, and the second flow path includes a second intermediate occlusion portion positioned between both ends of the second flow path in the first direction and restricting the flow of the refrigerant in the first direction.

8. A cold plate according to claim 7, wherein the second parallel flow path does not include an intermediate occlusion portion between the ends of the second parallel flow path in the first direction that restricts the flow of the refrigerant in the first direction.

9. A cold plate according to claim 7 or 8, wherein the number of first crossing channels arranged between the first intermediate closure portion and the second intermediate closure portion is less than the number of second crossing channels communicating with the pair of second parallel channels.

10. A cold plate according to any one of claims 7 to 9, wherein the first heat exchange section communicates with the second flow path and the second parallel flow path and includes a connecting flow path through which the refrigerant flows between the second flow path and the second parallel flow path, and the first flow path is located at the end of the first flow path so as to be adjacent to the connecting flow path and includes an end closing portion that restricts the flow of the refrigerant in the first direction.

11. A cold plate according to claim 10, wherein the number of first crossing channels arranged between the end closing portion and the second intermediate closing portion is less than the number of second crossing channels communicating with the pair of second parallel channels.

12. A cold plate according to any one of claims 1 to 11, wherein the cold plate comprises a case portion having the internal space.

13. A cold plate according to any one of claims 1 to 12, wherein the cold plate comprises an inlet for the refrigerant to flow into and an outlet for the refrigerant to flow out, the internal space is in communication with the inlet and the outlet, the refrigerant flows from the inlet to the outlet, and the first and second heat exchange sections are arranged between the inlet and the outlet.

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