Actuator for a lithographic apparatus

The actuator with magnetic assemblies enhances the x-direction displacement of the short stroke module in lithographic apparatuses, addressing motion limitations and increasing productivity by enabling faster successive exposures.

WO2026114585A1PCT designated stage Publication Date: 2026-06-04ASML NETHERLANDS BV
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Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
ASML NETHERLANDS BV
Filing Date
2025-10-27
Publication Date
2026-06-04

AI Technical Summary

Technical Problem

Existing lithographic apparatuses face challenges in increasing productivity by reducing the time between successive exposures due to limitations in the range of motion and support of the short stroke module and long stroke module, particularly in the x-direction.

Method used

An actuator with first and second magnetic assemblies, where the first assembly is attached to a long or short stroke module and comprises at least two permanent magnets, and the second assembly is attached to the other module with at least one permanent magnet, configured to magnetically cooperate and provide a homogeneous parallel magnetic field, allowing increased relative displacement and support in the x-direction.

Benefits of technology

This actuator enables enhanced relative displacement of the short stroke module in the x-direction, facilitating a new exposure motion pattern that increases acceleration and reduces time between successive exposures, thereby improving productivity.

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Abstract

An actuator (26) comprising a first magnetic assembly attached to a long stroke module (22) and comprising at least two first permanent magnets (36), a second magnetic assembly attached to a short stroke module and comprising at least one second permanent magnet (38). The first and second magnetic assemblies are configured to support the short stroke module with respect to the long stroke module (22) in a first direction (z). The second magnetic assembly is located between the first permanent magnets (36). The actuator includes an electrically conductive element (40) connectable to a power supply. The first magnetic assembly is longer than the second magnetic assembly in a second direction (x) to enable relative displacement of the short stroke module and the long stroke module (22) and the first magnetic assembly is geometrically configured such that a substantially homogeneous parallel magnetic field is provided.
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