A new method for preparing trisilylphosphine and analogous polysilyl derivatives of phosphorus compounds

A novel synthesis method for trisilylphosphine and polysilyl derivatives using phosphorus and monohalosilane catalyzed by alkali metals addresses the need for new precursors in semiconductor production, enabling efficient synthesis of high-quality semiconductor materials.

WO2026122309A1PCT designated stage Publication Date: 2026-06-11LAIR LIQUIDE SA POUR LETUDE & LEXPLOITATION DES PROCEDES GEORGES CLAUDE +1
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Patent Information

Application Number
PCT/US2025/056143
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-03
Filing Date
2025-11-19
Publication Date
2026-06-11
Patent Text Reader

Abstract

The disclosure describes a method for chemically synthesizing a phosphorous modified silane chemical Px(SiaH2a+i-x). The method has the steps of combining a) a source of phosphorous, preferably red or white phosphorous; b) a halogenated silane SiaH2a+2-cXc wherein a = 1-6, b + c = 2a + 2, and c is at least 1; and c) an alkali metal catalyst, preferably sodium, potassium, or a sodium / potassium alloy, optionally on a support material such as activated carbon.
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Citation Information

Patent Citations

  • New inorganic silyl and polysilyl derivatives of group v elements and methods of synthesizing the same and methods of using the same for deposition

    WO2023121973A1

  • Inorganic silyl and polysilyl derivatives of group v elements and methods of synthesizing the same and methods of using the same for deposition

    WO2023121976A1