A new method for preparing trisilylphosphine and analogous polysilyl derivatives of phosphorus compounds
A novel synthesis method for trisilylphosphine and polysilyl derivatives using phosphorus and monohalosilane catalyzed by alkali metals addresses the need for new precursors in semiconductor production, enabling efficient synthesis of high-quality semiconductor materials.
WO2026122309A1PCT designated stage Publication Date: 2026-06-11LAIR LIQUIDE SA POUR LETUDE & LEXPLOITATION DES PROCEDES GEORGES CLAUDE +1
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- LAIR LIQUIDE SA POUR LETUDE & LEXPLOITATION DES PROCEDES GEORGES CLAUDE
- Filing Date
- 2025-11-19
- Publication Date
- 2026-06-11
Abstract
The disclosure describes a method for chemically synthesizing a phosphorous modified silane chemical Px(SiaH2a+i-x). The method has the steps of combining a) a source of phosphorous, preferably red or white phosphorous; b) a halogenated silane SiaH2a+2-cXc wherein a = 1-6, b + c = 2a + 2, and c is at least 1; and c) an alkali metal catalyst, preferably sodium, potassium, or a sodium / potassium alloy, optionally on a support material such as activated carbon.
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