Test connector

Abstract

Provided is a test connector that includes a first conductive sheet and a second conductive sheet stacked on the first conductive sheet. The first conductive sheet comprises: a first elastic conductive part; a first elastic insulating part; an insulating guide part that has a through-hole above the upper end of the first elastic conductive part and is coupled to the upper surface of the first elastic insulating part; and a conductive layer coupled to the upper end of the first elastic conductive part inside the through-hole. The second conductive sheet includes a second elastic conductive part having a protruding end and a second elastic insulating part. The protruding end protrudes downward from the lower surface of the second elastic insulating part and is guided by the through-hole and brought into conductive contact with the conductive layer.

Description

Test connector

[0001] The present disclosure relates to a test connector disposed between a test device and a device to be tested and used for testing the device to be tested.

[0002] When testing a device under test, such as a semiconductor device, a test connector is used to electrically connect the test device and the device under test. The test connector is placed between the test device and the device under test. Examples of test connectors include pogo pin connectors or conductive rubber connectors.

[0003] A pogo pin connector has upper and lower plungers that are pressed by the terminals of the device under test, and a barrel for receiving and holding the plungers. Pogo pin connectors are difficult to have a thin thickness and are difficult to apply to the fine pitch of the terminals of the device under test.

[0004] A conductive rubber connector is pressed by the terminal of a device under test and has a conductive portion made of conductive particles. The conductive rubber connector is advantageous in that it does not damage the terminal of the device under test and has a very thin thickness. Therefore, attempts are being made to replace pogo pin connectors with conductive rubber connectors in the field of device inspection.

[0005] Since the thickness of a pogo pin connector is greater than that of a conductive rubber connector, a single conductive rubber connector may not be able to replace a single pogo pin connector. Conductive rubber connectors with a thick thickness may be difficult to manufacture with high dimensional precision. For example, a conductive rubber connector can be manufactured by mixing liquid silicone rubber with magnetic conductive particles and aligning the conductive particles by applying a magnetic field to the mixed material. However, in the case of a conductive rubber connector with a thick thickness, it may be difficult to align the conductive particles precisely. Additionally, conductive rubber connectors with a thick thickness may have increased electrical resistance and reduced conductivity performance.

[0006] As mentioned above, since it is difficult to manufacture conductive rubber connectors to a thickness greater than a certain level, a method of laminating thin conductive rubber connectors has been proposed. However, when laminating thin conductive rubber connectors, problems such as the offset of the upper and lower conductive parts, unreliable contact between the upper and lower conductive parts, and reduced conductivity must be resolved.

[0007] Embodiments of the present disclosure provide a test connector that solves the problems of the prior art described above. At least one embodiment of the present disclosure provides a stacked test connector having increased thickness and increased compression amount. At least one embodiment of the present disclosure provides a stacked test connector that guides an upper conductive portion to the top of a lower conductive portion to prevent an offset between the upper and lower conductive portions. At least one embodiment of the present disclosure provides a stacked test connector that enables a stable electrical connection between the conductive particles of the upper conductive portion and the conductive particles of the lower conductive portion.

[0008] A test connector according to an embodiment of the present disclosure may be disposed between a test device and a device to be tested and used for testing the device to be tested. A test connector according to one embodiment includes a first conductive sheet and a second conductive sheet stacked in an up-and-down direction.

[0009] In one embodiment, the first conductive sheet comprises a first elastic conductive portion, a first elastic insulating portion, an insulating guide portion, and a conductive layer. The first elastic conductive portion is conductive in the vertical direction. The first elastic insulating portion maintains and insulates the first elastic conductive portion in the vertical direction. The insulating guide portion has a through hole positioned above the top of the first elastic conductive portion and is coupled to the upper surface of the first elastic insulating portion. The conductive layer is positioned above the top of the first elastic conductive portion within the through hole and is coupled to the top. The second conductive sheet comprises a second elastic conductive portion and a second elastic insulating portion. The second elastic conductive portion corresponds to the first elastic conductive portion and is conductive in the vertical direction. The second elastic insulating portion maintains and insulates the second elastic conductive portion in the vertical direction. The second elastic conductive portion has a protruding end, which protrudes downward from the lower surface of the second elastic insulating portion and is guided by the through hole to make conductive contact with the conductive layer. The second conductive sheet is laminated on top of the first conductive sheet with the protruding end inserted into the through hole and in contact with the conductive layer.

[0010] In one embodiment, the conductive layer has a thickness thinner than the thickness of the insulating guide portion, and the protruding end has a protruding thickness greater than the thickness of the insulating guide portion.

[0011] In one embodiment, the through hole has an inner surface that is inclined outward with respect to the central axis of the first elastic conductive part. The conductive layer includes a bottom portion that covers the top of the first elastic conductive part and is coupled to the top of the first elastic conductive part, and a side wall portion that covers the inner surface, is coupled to the inner surface, and is formed integrally with the bottom portion. The side wall portion may be inclined outward with respect to the central axis to guide the protruding end to the bottom portion.

[0012] In one embodiment, the first elastic conductive part and the second elastic conductive part may have the same thickness, and the first elastic insulating part and the second elastic insulating part may have the same thickness.

[0013] In one embodiment, the second conductive sheet may include a terminal guide portion that is coupled to the upper surface of the second elastic insulating portion and has a thickness equal to the thickness of the insulating guide portion. The terminal guide portion may have a through hole having an inner diameter equal to the inner diameter of the through hole of the insulating guide portion. The through hole of the terminal guide portion may be positioned above the upper end of the second elastic conductive portion and guide a terminal of the device under test to the upper end of the second elastic conductive portion.

[0014] In one embodiment, the second conductive sheet is removablely laminated to the first conductive sheet, and one of the first conductive sheet and the second conductive sheet may be replaceable from the other of the first conductive sheet and the second conductive sheet.

[0015] In one embodiment, the first elastic conductive portion comprises a plurality of first conductive particles assembled to be conductive in the vertical direction, and the second elastic conductive portion comprises a plurality of second conductive particles assembled to be conductive in the vertical direction. The conductive layer may be formed integrally with a plurality of first conductive particles forming the upper portion of the first elastic conductive portion among the plurality of first conductive particles.

[0016] In one embodiment, a second conductive particle protruding downward from the lower end of the protruding end contacts the upper surface of the conductive layer, so that the protruding end can make conductive contact with the conductive layer.

[0017] In one embodiment, the conductive layer may be formed integrally with all of the plurality of first conductive particles forming the upper end of the first elastic conductive portion, and the first conductive particles protruding upward from the upper end of the first elastic conductive portion may be covered by the conductive layer. The conductive layer may include a convex portion that partially covers the first conductive particles protruding upward from the upper end of the first elastic conductive portion. The convex portion may come into contact with some of the plurality of second conductive particles forming the lower end of the protruding end among the plurality of second conductive particles.

[0018] In one embodiment, the conductive layer may be made of a metal material having a hardness lower than that of the second conductive particle.

[0019] In one embodiment, when the protruding end presses the conductive layer downward by a pressure applied through the device under test, the conductive layer may be pressed in by some of the plurality of second conductive particles forming the lower end of the protruding end. The conductive layer may include a concave portion that partially surrounds the second conductive particles that pressed the conductive layer.

[0020] According to at least one embodiment of the present disclosure, a test connector comprising a first conductive sheet and a second conductive sheet laminated on top of the first conductive sheet may have an increased thickness and an increased compression amount.

[0021] According to at least one embodiment of the present disclosure, since first and second conductive sheets having the same structure and configuration except for the conductive layer are stacked in the vertical direction, a stacked test socket can be realized with a simple structure. In addition, the second conductive sheet, which frequently comes into contact with the terminal of the device under test, can be easily separated from and replaced from the first conductive sheet, and accordingly, the test connector can have an increased service life.

[0022] According to at least one embodiment of the present disclosure, the protruding end of the second elastic conductive part can be smoothly guided to the top of the first elastic conductive part by means of a through hole of the insulating guide part or by a conductive layer coupled to the through hole. Accordingly, when the second conductive sheet is laminated on top of the first conductive sheet, an offset between the first elastic conductive part and the second elastic conductive part can be prevented.

[0023] According to at least one embodiment of the present disclosure, the lower end of the second elastic conductive portion is conductively contacted with a conductive layer coupled to the upper end of the first elastic conductive portion. Accordingly, in the laminated first and second conductive sheets, the first elastic conductive portion and the second elastic conductive portion can maintain complete contact through the conductive layer, and a stable current flow can be induced through the first and second elastic conductive portions.

[0024] According to at least one embodiment of the present disclosure, a first conductive particle forming the upper end of a first elastic conductive part and a second conductive particle forming the lower end of a second elastic conductive part are electrically connected via a conductive layer, so that an electrical connection can be made between the first and second elastic conductive parts without being affected by the non-uniform arrangement of the conductive particles.

[0025] FIG. 1 schematically illustrates an example in which a test connector according to embodiments of the present disclosure is used.

[0026] FIG. 2 is a cross-sectional view illustrating a test connector according to one embodiment of the present disclosure.

[0027] FIG. 3 is a cross-sectional view showing that the first conductive sheet and the second conductive sheet of the test connector shown in FIG. 2 are separated from each other.

[0028] FIG. 4 is a partially exploded cross-sectional view illustrating the first conductive sheet, the second conductive sheet, and the conductive layer of the first conductive sheet of the test connector shown in FIG. 2.

[0029] FIG. 5 is a cross-sectional perspective view showing a part of the test connector shown in FIG. 3.

[0030] FIG. 6 is a cross-sectional view schematically illustrating a first elastic conductive part, a conductive layer, and a second elastic conductive part in a state where the first conductive sheet and the second conductive sheet of a connector according to one embodiment are separated.

[0031] FIG. 7 is a cross-sectional view schematically illustrating a first elastic conductive part, a conductive layer, and a second elastic conductive part in a state where a first conductive sheet and a second conductive sheet of a connector according to one embodiment are laminated.

[0032] FIG. 8 is a cross-sectional view schematically illustrating a first elastic conductive part, a conductive layer, and a second elastic conductive part in a state where a first conductive sheet and a second conductive sheet of a connector according to one embodiment are laminated and a pressing force is applied to a second elastic conductive part of the second conductive sheet.

[0033] FIG. 9 is a cross-sectional view illustrating a conductive sheet of a connector according to one embodiment that does not include a conductive layer.

[0034] FIG. 10 is a cross-sectional view illustrating an example in which a mask is placed over a conductive sheet as shown in FIG. 9.

[0035] FIG. 11 is a cross-sectional view illustrating an example in which a conductive film is formed on a mask and a conductive sheet as shown in FIG. 10.

[0036] FIG. 12 is a cross-sectional view illustrating an example in which a mask is removed from a conductive sheet and a conductive layer is formed on top of an elastic conductive part.

[0037] The embodiments of the present disclosure are illustrative for the purpose of explaining the technical concept of the present disclosure. The scope of rights according to the present disclosure is not limited to the embodiments presented below or the specific description thereof.

[0038] All technical and scientific terms used in this disclosure, unless otherwise defined, have the meaning generally understood by those skilled in the art to which this disclosure pertains. All terms used in this disclosure are selected for the purpose of further clarifying this disclosure and are not selected to limit the scope of the rights under this disclosure.

[0039] Expressions such as 'comprising', 'having', 'having', etc. used in this disclosure should be understood as open-ended terms implying the possibility of including other embodiments, unless otherwise stated in the phrase or sentence containing such expressions.

[0040] Unless otherwise stated, singular expressions described in this disclosure may include a plural meaning, and this applies likewise to singular expressions described in the claims.

[0041] Expressions such as 'first', 'second', etc. used in this disclosure are used to distinguish multiple components from one another and do not limit the order or importance of said components.

[0042] In the present disclosure, where it is stated that a component is 'connected' or 'combined' to another component, it should be understood that the component may be directly connected or combined to the other component, or connected or combined through a new component.

[0043] As used in this disclosure, the direction indicator 'upward' is based on the direction in which the test connector is positioned relative to the test device, and the direction indicator 'downward' means the opposite direction of upward. It should be understood that the direction indicator 'upward and downward direction' used in this disclosure includes both upward and downward directions, but does not mean a specific direction between the upward and downward directions. As used in this disclosure, the horizontal direction is a direction orthogonal to the upward and downward direction. If the upward and downward direction is assumed to be the Y-axis, the horizontal direction may be a direction located in the X-axis plane.

[0044] Embodiments are described with reference to the examples illustrated in the attached drawings. In the attached drawings, identical or corresponding components are given the same reference numerals. Additionally, in the description of the following embodiments, the description of identical or corresponding components may be omitted. However, even if a description of a component is omitted, it is not intended that such component is not included in any embodiment.

[0045] The embodiments described below and the examples illustrated in the attached drawings relate to a test connector (hereinafter simply referred to as a connector) used for testing a device under test. The connector may be positioned between a test device and a device under test during testing of the device under test and may be used for testing the device under test. As an example, the connector may be used for final testing of a semiconductor device in a post-process during the manufacturing process of a semiconductor device. However, examples of tests to which the connector is applied are not limited to the aforementioned tests.

[0046] Refer to FIG. 1, which illustrates an example in which a connector according to embodiments of the present disclosure is used. FIG. 1 schematically illustrates the shapes of a connector, a component to which the connector is attached, an inspection device, and a device to be inspected. The shapes shown in FIG. 1 are one example selected for understanding the embodiments.

[0047] The connector (10) is a sheet-shaped structure and is positioned between the inspection device (20) and the device to be inspected (30). The connector (10) may be a component of a test socket. For example, the connector (10) may be attached to a socket housing (40) and positioned on the inspection device (20) by the socket housing (40). The socket housing (40) may have a socket guide (41), and a receiving hole (42) may be formed in the socket guide (41) in the vertical direction (VD). The socket housing (40) may be removablely mounted to the inspection device (20) at the socket guide (41), and the connector (10) may be removablely coupled to the socket guide (41). The device to be inspected (30), which is transported to the inspection device (20) by hand or by a transport device, is received in the receiving hole (42) of the socket housing, and the socket housing (40) aligns the device to be inspected (30) with respect to the connector (10). When inspecting the device to be inspected (30), the connector (10) contacts the inspection device (20) and the device to be inspected (30) in the vertical direction (VD), and electrically connects the inspection device (20) and the device to be inspected (30) to each other.

[0048] The device to be tested (30) may be a semiconductor device manufactured by packaging a semiconductor IC chip and a plurality of terminals in a cuboid shape using a resin material. The device to be tested (30) may include a flat substrate (31) and a plurality of terminals (32) protruding from the lower surface of the substrate (31). The terminals (32) shown in FIG. 1 are of the ball type. The terminals (32) are not limited to the ball type and may be, for example, of the land type or pin type.

[0049] The inspection device (20) can inspect the electrical characteristics and operational characteristics of the device under inspection (30). The inspection device (20) may have a board on which the inspection is performed, and the board may be equipped with an inspection circuit (21) for inspecting the device under inspection. The inspection circuit (21) has a plurality of pads (22) that are electrically connected to the terminals of the device under inspection through a connector (10). The pads (22) can transmit an electrical test signal and receive a response signal from the device under inspection.

[0050] A connector (10) according to one embodiment includes a first conductive sheet (100) and a second conductive sheet (200) stacked in the vertical direction (VD). The first and second conductive sheets (100, 200) can be attached to a socket guide (41) of a socket housing (40) and positioned in the horizontal direction (HD).

[0051] The first conductive sheet (100) and the second conductive sheet (200) have similar configurations. The first conductive sheet (100) includes a first elastic conductive portion (110) and a first elastic insulating portion (120) that insulates the first elastic conductive portion (110). The second conductive sheet (200) includes a second elastic conductive portion (210) positioned to correspond to the first elastic conductive portion (110) and a second elastic insulating portion (220) that insulates the second elastic conductive portion (210). Each conductive sheet may include a plurality of elastic conductive portions. Each elastic conductive portion is supported by an elastic insulating portion and positioned in the vertical direction (VD), and is conductive in the vertical direction (VD). In the stacked first and second conductive sheets (100, 200), the first and second elastic conductive portions (110, 210) are aligned in the vertical direction (VD) and are conductively connected.

[0052] In the example illustrated in FIG. 1, the first elastic conductive part (110) is in contact with the pad (22) of the inspection device (20) at its lower end and is conductively connected to the lower end of the second elastic conductive part (210) at its upper end. The second elastic conductive part (210) is in contact with the terminal (32) of the device to be inspected (30) at its upper end and is conductively connected to the upper end of the first elastic conductive part (110) at its lower end. Accordingly, in the connector (10), the first and second elastic conductive parts (110, 210), which are aligned in the vertical direction (VD) and conductively connected, form a vertical conductive path between the corresponding terminal (32) and the pad (22). The first and second elastic conductive parts (110, 210) transmit test signals and response signals between the inspection device (20) and the device to be inspected (30).

[0053] When inspecting the device under test, a pressure (PF) is applied downward to the device under test (30) by a mechanical device or manually. A terminal (32) of the device under test receiving the pressure (PF) presses the second elastic conductive part (210) downward, and the second elastic conductive part (210) presses the first elastic conductive part (110) downward by the pressure (PF). Due to the pressure (PF), the second elastic conductive part (210) and the first elastic conductive part (110) located below it can be elastically deformed.

[0054] The planar arrangement of the elastic conductive parts may vary depending on the arrangement of the terminals of the device under test (30). For example, the elastic conductive parts may be arranged within the elastic insulating part in a single matrix form, a pair or more matrix forms, or a zigzag form.

[0055] Reference is made to FIGS. 2 through 8 for the description of embodiments of the connector. FIGS. 2 through 8 schematically illustrate the shape and number of components of the connector, which are examples selected for understanding the embodiments of the connector.

[0056] FIG. 2 is a cross-sectional view illustrating a connector according to one embodiment of the present disclosure, and FIG. 3 is a cross-sectional view illustrating a first conductive sheet and a second conductive sheet of the connector illustrated in FIG. 2 separated from each other. FIG. 4 is a partially exploded cross-sectional view illustrating a first conductive sheet, a second conductive sheet, and a conductive layer of the first conductive sheet of the test connector illustrated in FIG. 2. FIG. 5 is a cross-sectional perspective view illustrating a part of the connector illustrated in FIG. 3. In the following description, reference will be made to FIG. 2 to FIG. 5.

[0057] The connector (10) includes a first conductive sheet (100) and a second conductive sheet (200) stacked in the vertical direction (VD). The first conductive sheet (100) is placed on top of an inspection device (e.g., an inspection device (20) shown in FIG. 1), and the second conductive sheet (200) is placed on top of the first conductive sheet and below a device to be inspected (e.g., a device to be inspected (30) shown in FIG. 1). The second conductive sheet (200) is removablely stacked and mounted on top of the first conductive sheet.

[0058] A connector (10) according to one embodiment includes a first conductive sheet (100) and a second conductive sheet (200) that are stacked in the upper and lower directions and have similar or identical materials and configurations, and accordingly, may have increased thickness and increased compression amount. If either the first conductive sheet (100) or the second conductive sheet (200) is damaged after a number of inspections of the device under inspection have been performed, only the damaged conductive sheet may be removed from the undamaged conductive sheet and replaced. A new conductive sheet may be mounted on the undamaged conductive sheet in place of the damaged conductive sheet, and accordingly, the connector may have an increased service life.

[0059] The first and second elastic conductive parts (110, 210) may be formed in a cylindrical shape. The shape of the elastic conductive part is not limited to a cylindrical shape. When the elastic conductive part is cylindrical, the diameter at the middle part of the cylindrical shape may be smaller than the diameter at the top and bottom of the cylindrical shape. Each elastic conductive part includes a plurality of conductive particles and an elastic insulating material, and has elasticity.

[0060] A plurality of conductive particles constituting the elastic conductive section are arranged from the bottom to the top of each elastic conductive section. The first elastic conductive section (110) includes a plurality of first conductive particles (114) assembled in a cylindrical shape to enable conductivity in the vertical direction (VD), and adjacent first conductive particles (114) are in contact to enable conductivity in any direction. The second elastic conductive section (210) includes a plurality of second conductive particles (214) assembled in a cylindrical shape to enable conductivity in the vertical direction (VD), and adjacent second conductive particles (214) are in contact to enable conductivity in any direction.

[0061] A plurality of conductive particles assembled in the vertical direction within a single elastic conductive part function as conductors that perform signal transmission between the pad of the inspection device and the terminal of the device to be inspected. The first conductive particle (114) and the second conductive particle (214) may be formed from a highly conductive metal material. Alternatively, the first conductive particle and the second conductive particle may have a form in which the highly conductive metal material is coated on a core formed from a resin material or a metal material. For example, the conductive particles may be made of metal materials such as iron, nickel, cobalt, rhodium, platinum, and chromium, but are not limited thereto. The first conductive particle (114) of the first elastic conductive part and the second conductive particle (214) of the second elastic conductive part may be the same or may be different conductive particles.

[0062] Each elastic conductive part includes an elastic insulating material disposed together with conductive particles from the bottom to the top of each elastic conductive part. The first elastic conductive part (110) includes a first elastic insulating material (115), and the second elastic conductive part (210) includes a second elastic insulating material (215). The elastic insulating material may be filled between the conductive particles, and the conductive particles and the elastic insulating material may be integrally formed to constitute the elastic conductive part. As an example, the elastic insulating material may be silicone rubber cured from a liquid state, but is not limited thereto. The first elastic insulating material (115) of the first elastic conductive part and the second elastic insulating material (215) of the second elastic conductive part may be the same or may be different elastic insulating materials.

[0063] An elastic conductive part comprising a plurality of conductive particles and an elastic insulating material is elastically deformable in the vertical direction (VD) and the horizontal direction (HD). By means of a pressure applied to the device under test (e.g., the pressure (PF) shown in FIG. 1), the terminal of the device under test presses the second elastic conductive part (210) downward, and the second elastic conductive part (210) presses the first elastic conductive part (110) downward. In this pressured state of the elastic conductive part, the first and second elastic conductive parts (110, 210) can be elastically deformed so as to be compressed downward while slightly expanding in the horizontal direction (HD). When the application of the pressure is stopped and the device under test is removed from the connector, the first and second elastic conductive parts (110, 210) can be restored from the pressured state to their original shape (non-pressured state). The first and second elastic conductive parts (110, 210) can be elastically deformed in a non-pressured state and a pressured state.

[0064] The first and second conductive sheets (100, 200) include an elastic insulating part that maintains and insulates the elastic conductive part. The elastic insulating part may constitute the main body of the conductive sheet and may form a rectangular elastic region of the conductive sheet. The elastic insulating part may have a thin flat plate shape. The first conductive sheet (100) includes a first elastic insulating part (120), and the first elastic insulating part (120) maintains a plurality of first elastic conductive parts (110) in the vertical direction (VD) and separates and insulates them in the horizontal direction (HD). The second conductive sheet (200) includes a second elastic insulating part (220), and the second elastic insulating part (220) maintains a plurality of second elastic conductive parts (210) in the vertical direction (VD) and separates and insulates them in the horizontal direction (HD).

[0065] The first elastic insulating part (120) is formed integrally with the first elastic conductive part (110) and maintains the first elastic conductive part in the vertical direction (VD). The second elastic insulating part (220) is formed integrally with the second elastic conductive part (210) and maintains the second elastic conductive part in the vertical direction (VD). The elastic conductive part disposed within the elastic insulating part is supported in the vertical direction (VD) by the elastic insulating part. Since the first and second elastic insulating parts (120, 220) take the shape of a sheet, the first elastic insulating part (120) has an upper surface (121) and a lower surface (122) spaced apart in the vertical direction, and the second elastic insulating part (220) has an upper surface (221) and a lower surface (222) spaced apart in the vertical direction.

[0066] Each elastic insulating member may be made of the same material as the elastic insulating material contained in each elastic conductive member. For example, each elastic insulating member may be cured silicone rubber. Thus, each elastic insulating member is elastically deformable in the vertical direction (VD) and the horizontal direction (HD). Each elastic insulating member allows for the expansion of the elastic conductive member when the elastic conductive member expands in the horizontal direction due to the applied pressure.

[0067] For example, liquid silicone rubber in which the aforementioned conductive particles are dispersed is injected into a mold for forming a first conductive sheet (100) or a second conductive sheet (200), and the conductive particles are gathered in the up-and-down direction by a magnetic field applied at each location of the elastic conductive part to form the aforementioned elastic conductive part. Additionally, after the aforementioned elastic conductive part is formed in the mold, the liquid silicone rubber is cured. Accordingly, a conductive sheet can be formed having an elastic conductive part and an elastic insulating part positioning the elastic conductive part in the up-and-down direction.

[0068] The lower end (112) of the first elastic conductive part (110) is located below the lower surface (122) of the first elastic insulating part. Accordingly, the first elastic conductive part (110) has a lower end (113) that protrudes downward from the lower surface (122). The lower end (212) of the second elastic conductive part (210) is located below the lower surface (222) of the second elastic insulating part. Accordingly, the second elastic conductive part (210) has a lower end that protrudes downward from the lower surface (222). Hereinafter, the lower end of the second elastic conductive part protruding from the lower surface (222) of the second elastic insulating part is referred to as a protruding end. As another embodiment of the connector, the first conductive sheet (100) may include a first elastic conductive part (110) that does not have a protruding lower end (113), and the lower end of the first elastic conductive part may be located at the same level as the lower surface (122) of the first elastic insulating part.

[0069] The first and second conductive sheets (100, 200) may include an elastic conductive part of the same size and an elastic insulating part of the same size. The first and second conductive sheets (100, 200) having similar configurations may be stacked in the vertical direction to form a connector (10). Accordingly, the first elastic conductive part (110) and the second elastic conductive part (210) may have the same thickness (e.g., the distance between the top and bottom of the elastic conductive part measured in the vertical direction) and the same width (e.g., the distance between the two sides of the elastic conductive part measured in the horizontal direction). Additionally, the first elastic insulating part (120) and the second elastic insulating part (220) may have the same thickness (e.g., the distance between the top and bottom surfaces of the elastic insulating part measured in the vertical direction).

[0070] The first conductive sheet (100) includes an insulating guide portion (130) that is coupled to the upper surface (121) of the first elastic insulating portion. The insulating guide portion (130) guides the protruding end (213) of the second elastic conductive portion to the upper end (111) of the first elastic conductive portion (110). The insulating guide portion (130) may be composed of an insulating film, and as an example, the insulating guide portion (130) may be made of polyimide, but is not limited thereto. The insulating guide portion (130) may be bonded to the upper surface (121) of the first elastic insulating portion, or may be formed together with the first elastic insulating portion during the molding of the first conductive sheet described above. The insulating guide portion (130) has a thickness in the vertical direction that does not come into contact with the lower surface (222) of the second elastic insulating portion (for example, the distance between the upper and lower surfaces of the insulating guide portion measured in the vertical direction). The protruding end (213) of the second elastic conductive part has a protruding thickness greater than the thickness of the insulating guide part (130) (for example, the distance in the vertical direction between the lower surface (222) of the second elastic insulating part and the lower surface (212) of the second elastic conductive part).

[0071] The insulating guide portion (130) has a through hole (133) that guides the protruding end (213) of the second elastic conductive portion to the top (111) of the first elastic conductive portion. The through hole (133) penetrates the insulating guide portion (130) in the vertical direction. The through hole (133) is positioned above the top (111) of the first elastic conductive portion and may have its center on the central axis (CA) of the first elastic conductive portion (e.g., a virtual axis passing through the center of the cross-sectional shape of the first elastic conductive portion in the vertical direction). The through hole (133) may have an inner diameter (e.g., the maximum distance between two points at the bottom of the through hole facing in the horizontal direction (HD)) that is larger or smaller than the diameter at the top of the first elastic conductive portion (110) (e.g., the maximum distance between two points at the top of the first elastic conductive portion facing in the horizontal direction (HD)). Alternatively, the through hole (133) may have an inner diameter at its lower end equal to the diameter at the upper end of the first elastic conductive part (110).

[0072] When the second conductive sheet (200) is laminated on top of the first conductive sheet (100), the through hole (133) of the insulating guide part (130) guides the protruding end (213) to the top (111) of the first elastic conductive part. Thus, when the second conductive sheet is laminated on top of the first conductive sheet, an offset between the first elastic conductive part (110) and the second elastic conductive part (210) can be prevented.

[0073] According to one embodiment, the through hole (133) has the shape of an inverted frustum of a cone. Accordingly, the through hole (133) has an inner surface (1331) formed in the circumferential direction (CD) of the central axis (CA) of the first elastic conductive part. In the inner surface (1331) defining the through hole (133), the inner diameter at the bottom of the through hole is smaller than the inner diameter at the top of the through hole. Therefore, the inner surface (1331) of the through hole (133) is inclined outward with respect to the central axis (CA) of the first elastic conductive part (e.g., the outer radial direction (RD) of the central axis (CA)). As another example, the inner surface (1331) of the through hole may have a cylindrical shape centered on the central axis (CA).

[0074] The second conductive sheet (200) includes a terminal guide portion (230) coupled to the upper surface (221) of the second elastic insulating portion, and the terminal guide portion (230) guides a terminal of the device under test (e.g., a terminal (32) shown in FIG. 1) to the upper surface (211) of the second elastic conductive portion. The terminal guide portion (230) may be composed of an insulating film and may be bonded to the upper surface (221) of the second elastic insulating portion. The terminal guide portion (230) may be formed with the same configuration as the aforementioned insulating guide portion (130). Accordingly, the terminal guide portion (230) may have a thickness equal to the thickness of the insulating guide portion (e.g., the distance between the upper and lower surfaces of the insulating guide portion measured in the vertical direction).

[0075] The terminal guide portion (230) has a through hole (233) that guides the terminal of the device under test to the upper end (211) of the second elastic conductive portion. The through hole (233) penetrates the terminal guide portion (230) in the vertical direction and is positioned above the upper end (211) of the second elastic conductive portion. The through hole (233) may have the same configuration as the through hole (133) described above. That is, the through hole (233) may have the same inner diameter as the through hole (133) of the insulating guide portion.

[0076] Since the insulation guide portion (130) and the terminal guide portion (230) may have the same configuration, the insulation guide portion (130) of the first conductive sheet may be adopted as the terminal guide portion (230) of the second conductive sheet. As another embodiment of the connector, a second conductive sheet that does not include a terminal guide portion (230) may be laminated on top of the first conductive sheet.

[0077] A connector according to an embodiment of the present disclosure reliably secures an electrical connection between the elastic conductive portion of a first conductive sheet (100) and the elastic conductive portion of a second conductive sheet (200), thereby preventing incomplete electrical contact between the first elastic conductive portion and the second elastic conductive portion and enabling stable current flow through the first and second elastic conductive portions. In this regard, the first conductive sheet (100) includes a conductive layer (140) provided on the upper end (111) of the first elastic conductive portion to electrically connect the first elastic conductive portion and the second elastic conductive portion.

[0078] The conductive layer (140) is located within the through hole (133) of the insulating guide and is positioned on the top (111) of the first elastic conductive part. Additionally, the conductive layer (140) is coupled to the top (111) of the first elastic conductive part and provided to the first conductive sheet (100). When the second conductive sheet (200) is laminated on the first conductive sheet (100), the protruding end (213) of the second elastic conductive part is guided to the top (111) of the first elastic conductive part by the through hole (133). When the second conductive sheet (200) is completely laminated on the first conductive sheet (100), the bottom of the protruding end (213) (i.e., the bottom (212) of the second elastic conductive part) is in conductive contact with the upper surface (141) of the conductive layer (140). Accordingly, in the laminated first and second conductive sheets, a single conductor is formed consisting of a first elastic conductive part (110), a conductive layer (140), and a second elastic conductive part (210), thereby enabling signal transmission between the pad of the inspection device and the terminal of the device to be inspected.

[0079] In a connector comprising a first and second conductive sheet, as shown in FIG. 2, the second conductive sheet (200) is laminated on top of the first conductive sheet (100) with the protruding end (213) of the second elastic conductive part inserted into the through hole (133) and in contact with the upper surface (141) of the conductive layer (140). Additionally, in the first and second conductive sheets, a gap is formed in the vertical and horizontal directions between the upper surface (131) of the insulating guide part (130) and the lower surface (222) of the second elastic insulating part.

[0080] The conductive layer (140) is formed to have a thickness thinner than the thickness in the vertical direction of the insulating guide portion (130), so that the protruding end (213) is smoothly guided by the through hole (133). According to one embodiment, the conductive layer (140) may have a cup shape corresponding to the shape of the through hole (133) by including a bottom portion (143) and a side wall portion (144). The bottom portion (143) may have the same shape as the cross-sectional shape of the first elastic conductive portion. The bottom portion (143) covers the top (111) of the first elastic conductive portion and is coupled to the top (111). The side wall portion (144) has an annular shape and covers the inner surface (1331) of the through hole and is coupled to the inner surface (1331). The bottom portion (143) and the side wall portion (144) are formed integrally to form a single conductive layer (140) disposed in the through hole (133). Additionally, the conductive layer (140) is integrally connected to the through hole (133) of the insulating guide portion at the side wall portion (144).

[0081] Since the side wall portion (144) covers the inner surface (1331) of the through hole, the side wall portion (144) is formed in the circumferential direction (CD) of the central axis (CA) of the first elastic conductive portion and is inclined outward with respect to the central axis (CA) of the first elastic conductive portion (outer radial direction (RD) of the central axis). Therefore, when the second conductive sheet is laminated on top of the first conductive sheet, the side wall portion (144) can guide the protruding end (213) of the second elastic conductive portion toward the bottom portion (143). Additionally, there may be an example in which the second conductive sheet is laminated on the first conductive sheet in a state where the protruding end (213) does not contact the bottom portion (143) in the vertical direction and is offset obliquely toward the inner surface (1331) of the through hole with respect to the central axis (CA). Since the side wall portion (144) on the inner surface (1331) of the through hole can come into contact with the protruding end portion (213) offset from the central axis (CA), the second elastic conductive portion offset from the central axis can be stably connected to the first elastic conductive portion so as to be conductive.

[0082] As another embodiment of the connector, the conductive layer (140) may be formed to include only a circular bottom portion (143) and may include almost no side wall portion (144) depending on the shape of the through hole (133). In the conductive layer (140) including the side wall portion (144), since the side wall portion (144) is inclined with respect to the bottom portion (143) at an angle of inclination similar to the angle of inclination of the inner circumference (1331) of the through hole, the vertical thickness of the side wall portion (144) is greater than the vertical thickness of the bottom portion (143).

[0083] The conductive layer (140) may be formed as a thin film bonded to the top of the first elastic conductive part and is made of a metal material. According to one embodiment, the conductive layer (140) is made of a metal material having a hardness lower than the hardness of the second conductive particle (214) constituting the second elastic conductive part. Alternatively, the conductive layer (140) is made of a metal material having a hardness lower than the hardness of the first conductive particle (114) constituting the first elastic conductive part and the hardness of the second conductive particle (214) constituting the second elastic conductive part. For example, the conductive layer (140) may have a thickness of 0.1 μm to 10 μm, but is not limited thereto. In addition, the conductive layer (140) is made of aluminum (Al), copper (Cu), silver (Ag), gold (Au), or an alloy of at least two of these, and has high conductivity. In another embodiment, the conductive layer (140) may be made of the same material as the conductive particles constituting each elastic conductive part, and the hardness of the conductive layer (140) may be the same as the hardness of the conductive particles.

[0084] Since the first elastic conductive part includes a plurality of first conductive particles (114) arranged from the bottom (112) to the top (111), a plurality of first conductive particles (114) among the plurality of first conductive particles form the top (111) of the first elastic conductive part. Additionally, since the second elastic conductive part includes a plurality of second conductive particles (214) arranged from the bottom (212) to the top (211), a plurality of second conductive particles (214) among the plurality of second conductive particles form the bottom (212) of the second elastic conductive part (specifically, the bottom of the protruding end (213)).

[0085] Since conductive particles are aggregated in the vertical direction by the application of a magnetic field to form an elastic conductive part, the conductive particles attracted to the elastic conductive part by the magnetic field are not uniformly distributed at the top and bottom of the elastic conductive part. That is, at the top or bottom of the elastic conductive part, the conductive particles are not arranged in a horizontal line along a single imaginary straight line (e.g., a horizontal imaginary straight line defining the top or bottom), but may be arranged with a height difference in the vertical direction.

[0086] A plurality of first conductive particles forming the upper end (111) of the first elastic conductive part may have a first conductive particle protruding upward from the upper end (111) and a first conductive particle located lower than the first conductive particle protruding upward and not protruding from the upper end (111). A plurality of second conductive particles forming the lower end (212) of the second elastic conductive part (specifically, the lower end of the protruding end (213)) may have a second conductive particle protruding downward from the lower end (212) and a second conductive particle located higher than the second conductive particle protruding downward and not protruding from the lower end (212).

[0087] The conductive layer (140) or the bottom portion (143) of the conductive layer is formed integrally with all of the plurality of first conductive particles forming the top portion (111) of the first elastic conductive portion and is coupled to the top portion (111) of the first elastic conductive portion. The conductive layer (140) or the bottom portion (143) of the conductive layer is coupled to the top portion (111) so as to completely cover the top portion (111) of the first elastic conductive portion. Accordingly, the conductive layer (140) is formed integrally with all of the first conductive particles protruding upward from the top portion (111) and all of the first conductive particles that do not protrude from the top portion (111).

[0088] When the second conductive sheet is laminated on top of the first conductive sheet and the second elastic conductive part contacts the conductive layer (140) through the through hole (133), the second conductive particle protruding downward from the bottom (212) of the protruding end (213) contacts the upper surface (141) of the conductive layer (140). Accordingly, the protruding end (213) can be electrically contacted with the conductive layer (140). The number of contact points between the upper surface (141) of the conductive layer (140) and the second conductive particle protruding downward from the bottom (212) may be equal to the number of the second conductive particles protruding downward from the bottom. However, since the conductive layer (140) is formed integrally with a plurality of first conductive particles forming the upper surface (111) of the first elastic conductive part, a plurality of contact points are formed between the conductive layer (140) and the plurality of first conductive particles forming the upper surface (111). Accordingly, in the laminated first and second conductive sheets, the first elastic conductive portion (110) and the second elastic conductive portion (210) can effectively transmit test signals and response signals through a plurality of contact points created by the conductive layer (140). Without the influence of uneven arrangement of conductive particles at the top of the first elastic conductive portion and the bottom of the second elastic conductive portion, the first elastic conductive portion and the second elastic conductive portion can exhibit improved contact resistance characteristics due to the conductive layer (140) and can perform a stable electrical connection.

[0089] FIG. 6 is a cross-sectional view schematically illustrating a first elastic conductive part, a conductive layer, and a second elastic conductive part in a state where the first conductive sheet and the second conductive sheet of a connector according to one embodiment are separated. Refer to FIG. 6.

[0090] The conductive layer (140) is formed integrally with a plurality of first conductive particles that form the upper end (111) of the first elastic conductive part. The plurality of first conductive particles forming the upper end (111) are not arranged in a line along a virtual straight line in the horizontal direction, but are arranged with a height difference in the vertical direction. For example, the plurality of first conductive particles forming the upper end (111) can be divided into first conductive particles that protrude upward from the upper end (111) and first conductive particles that do not protrude from the upper end (111). Hereinafter, the first conductive particles that protrude upward from the upper end are referred to as protruding upper particles (1141), and the first conductive particles that do not protrude from the upper end are referred to as non-protruding upper particles (1142).

[0091] The conductive layer (140) is formed integrally with all of the plurality of first conductive particles forming the top (111) of the first elastic conductive part. With the conductive layer (140) bonded to the top (111), the first conductive particle (protruding top particle (1141)) protruding upward from the top is partially covered by the conductive layer (140). Since the protruding top particle (1141) is covered by the conductive layer (140), the conductive layer (140) can prevent the protruding top particle (1141) and the non-protruding top particle (1142) from being separated from the top (111) of the first elastic conductive part.

[0092] Since the conductive layer (140) covers the protruding top particle (1141), the conductive layer (140) includes a convex portion (145) formed on the protruding top particle (1141). The convex portion (145) partially covers the first conductive particle (protruding top particle (1141)) that protrudes upward from the top (111) of the first elastic conductive portion. Since the conductive layer (140) includes the convex portion (145), the upper surface (141) of the conductive layer may not be a flat surface, but a partially convex surface. FIG. 6 merely illustrates the degree to which the protruding top particle (1141) protrudes relative to the non-protruding top particle (1142), and the degree of protrusion of the protruding top particle (1141) is not limited to the degree of protrusion shown in FIG. 6.

[0093] A plurality of second conductive particles forming the lower end (212) (lower end of the second elastic conductive part) of the protruding end (213) are not arranged in a line along a virtual straight line in the horizontal direction, but are arranged with a height difference in the vertical direction. For example, the plurality of second conductive particles forming the lower end (212) can be divided into second conductive particles protruding downward from the lower end (212) and second conductive particles that do not protrude from the lower end (212). Hereinafter, the second conductive particles protruding downward from the lower end are referred to as protruding lower particles (2141), and the second conductive particles that do not protrude from the lower end are referred to as non-protruding lower particles (2142).

[0094] FIG. 7 is a cross-sectional view schematically illustrating a first elastic conductive portion, a conductive layer, and a second elastic conductive portion in a state where a first conductive sheet and a second conductive sheet of a connector according to one embodiment are laminated. Refer to FIG. 7.

[0095] When the second conductive sheet is laminated on top of the first conductive sheet, the bottom (212) (bottom of the second elastic conductive part) of the protruding end (213) comes into contact with the upper surface (141) of the conductive layer (140). The convex portion (145) of the conductive layer may come into contact with some of the plurality of second conductive particles forming the bottom (212). Specifically, among the plurality of second conductive particles forming the bottom (212), the protruding bottom particle (2141) may come into contact with the flat portion of the upper surface (141) of the conductive layer (140). Additionally, the convex portion (145) may come into contact with the non-protruding bottom particle (2142) among the plurality of second conductive particles forming the bottom (212). At the same time, the protruding lower particle (2141) contacts the upper surface (141) of the conductive layer (140), and the convex portion (145) covering the protruding upper particle (1141) contacts the non-protruding lower particle (2142). Accordingly, incomplete contact caused by the uneven arrangement of conductive particles between the upper portion (111) of the first elastic conductive part and the lower portion (212) of the second elastic conductive part (lower portion of the protruding end) can be eliminated, and a stable current flow can be induced between the upper portion (111) of the first elastic conductive part and the lower portion (212) of the second elastic conductive part.

[0096] FIG. 8 is a cross-sectional view schematically illustrating a first elastic conductive part, a conductive layer, and a second elastic conductive part in a state where a first conductive sheet and a second conductive sheet of a connector according to one embodiment are laminated and a pressing force is applied to a second elastic conductive part of the second conductive sheet. Refer to FIG. 8.

[0097] When a pressure (PF) is applied to the device under test during testing, the terminal of the device under test presses the second elastic conductive part downward, and the protruding end (213) of the second elastic conductive part presses the conductive layer (140) and the first elastic conductive part (110) located below the conductive layer downward. In this pressured state of the elastic conductive part, the first and second elastic conductive parts can be elastically deformed so as to be compressed downward while slightly expanding in the horizontal direction (HD).

[0098] In a connector according to one embodiment, the hardness of the conductive layer (140) is lower than the hardness of the second conductive particles of the second elastic conductive part. Therefore, the conductive layer (140) can be pressed in by the pressure (PD) from the upper surface (141) by the second conductive particles of the second elastic conductive part. Accordingly, when the protruding end (213) presses the conductive layer (140) downward by the pressure (PF) applied through the device under inspection, the conductive layer (140) can be pressed in by some of the plurality of second conductive particles forming the lower end (212) (lower end of the second elastic conductive part) of the protruding end (213). Specifically, among the plurality of second conductive particles forming the lower end of the protruding end (213), the protruding lower particle (2141) can press the conductive layer (140) from top to bottom by the pressure (PF).

[0099] As the protruding bottom particle (2141) presses the conductive layer (140) by a pressure (PF), the gap between the upper surface (141) of the conductive layer (140) and the lower surface (212) of the second elastic conductive part can be further reduced. Additionally, the protruding top particle (1141) can come into contact with a greater number of non-protruding bottom particles (2142), and the protruding bottom particle (2141) can come into contact with the conductive layer (140) over a wider area. As the protruding bottom particle (2141) presses the upper surface (141) of the conductive layer (140), the conductive layer (140) includes a concave portion (146) formed by the press. The concave portion (146) is located below the second conductive particle (protruding bottom particle (2141)) that presses the conductive layer and is formed to partially surround it. Accordingly, the protruding lower particle (2141) can come into contact with the conductive layer (140) over a wider area through the concave portion (146).

[0100] The connector according to the above-described embodiment has a structure in which a second conductive sheet is laminated on top of a first conductive sheet. The connector according to another embodiment may have a structure in which three or more conductive sheets are laminated. For example, an additional third conductive sheet may be laminated on top of the second conductive sheet to provide a connector having a thicker thickness and a larger vertical compression amount. In the connector according to this example, a first conductive sheet including a conductive layer may be employed as the second conductive sheet, and a second conductive sheet not including a conductive layer may be employed as the third conductive sheet. That is, in the connector according to this example, the second conductive sheet may include the aforementioned conductive layer coupled to the upper end of the second elastic conductive part, and the third elastic conductive part of the third conductive sheet may have a protruding end that is guided by a through hole of the insulating guide part of the second conductive sheet and makes conductive contact with the conductive layer of the second elastic conductive part.

[0101] FIGS. 9 to 12 are cross-sectional views illustrating an example in which a conductive layer is formed on the upper surface of a first elastic conductive portion in a connector according to one embodiment. Referring sequentially to FIGS. 9 to 12, an example of forming a conductive layer on the upper surface of a first elastic conductive portion in a connector according to one embodiment is described. FIGS. 9 to 12 schematically illustrate a conductive sheet of a connector and components of a conductive sheet.

[0102] Referring to FIG. 9, a first conductive sheet (100) is prepared, comprising a first elastic conductive part (110), a first elastic insulating part (120), and an insulating guide part (130). The first elastic conductive part (110) and the first elastic insulating part (120) can be manufactured by a molding method using the liquid molding material described above. An insulating guide part (130) having a through hole (133) can be bonded to the upper surface (121) of the first elastic insulating part (120). Alternatively, the insulating guide part (130) having a through hole (133) may be placed within a molding die during the molding of the first elastic conductive part and the first elastic insulating part, and formed together with the first elastic insulating part. The first conductive sheet shown in FIG. 9 may be employed in a connector as a second conductive sheet.

[0103] Referring to FIG. 10, a mask (310) having a through hole (311) is placed on the upper surface (131) of an insulating guide part (130). The through hole (311) of the mask may have an inner diameter corresponding to the inner diameter of the through hole (133) of the insulating guide part (inner diameter at the top of the through hole (133)). The mask (310) is placed on the upper surface (131) of the insulating guide part so that the through hole (311) is aligned with the through hole (133).

[0104] Referring to FIG. 11, a conductive film (320) is formed on the upper surface of the mask (310). Additionally, since the through hole (133) of the insulating guide part is open upward through the through hole (311) of the mask, a conductive film (320) is also formed on the inner circumferential surface (1331) of the through hole (133) and on the upper surface (111) of the first elastic conductive part (110). The conductive film (320) is formed integrally to cover the upper surface of the mask (310), the inner circumferential surface (1331) of the through hole (133), and the upper surface (111) of the first elastic conductive part. The conductive film (320) is made of the aforementioned metal material forming the conductive layer.

[0105] As one example of forming a conductive film (320), the conductive film (320) may be formed by sputtering to cover the upper surface of the mask (310), the inner surface (1331) of the through hole (133), and the upper surface (111) of the first elastic conductive part. For example, the first conductive sheet to which the mask (310) is attached and the metal material are placed in the chamber of the sputter, and ionized gas atoms of an inert gas collide with the metal material within the chamber, and metal atoms of the metal material are deposited from the metal material onto the mask (310) and the first conductive sheet by the collision of the gas atoms, so that a conductive film (320) covering the upper surface of the mask (310), the inner surface (1331) of the through hole (133), and the upper surface (111) of the first elastic conductive part (110) may be formed.

[0106] As another example of forming a conductive film (320), the conductive film (320) may be formed by vacuum evaporation coating to cover the upper surface of the mask (310), the inner surface (1331) of the through hole (133), and the upper surface (111) of the first elastic conductive part. For example, the metal material may be placed as an evaporated metal in a vacuum atmosphere, and a first conductive sheet to which the mask (310) is attached may be placed in the vacuum atmosphere, and the evaporated molecules of the heated metal material may be attached to the first conductive sheet to which the mask (310) is attached, thereby forming a conductive film (320) that covers the upper surface of the mask (310), the inner surface (1331) of the through hole (133), and the upper surface (111) of the first elastic conductive part (110).

[0107] Referring to FIG. 12, after the conductive film (320) is formed to cover the upper surface of the mask (310), the inner surface (1331) of the through hole (133), and the upper end (111) of the first elastic conductive part (110), the mask (310) is removed from the first conductive sheet (100). Accordingly, the first conductive sheet (100) can be formed such that the conductive layer (140) is coupled to the inner surface (1331) of the through hole (133) and the upper end (111) of the first elastic conductive part (110). The conductive layer (140) can be formed to include a bottom part (143) coupled to the upper end (111) of the first elastic conductive part and a side wall part (144) coupled to the inner surface (1331) of the through hole, and the bottom part (143) and the side wall part (144) can be formed integrally.

[0108] Although the technical concept of the present disclosure has been described by some embodiments and examples illustrated in the accompanying drawings, it should be understood that various substitutions, modifications, and changes may be made without departing from the technical concept and scope of the present disclosure as understood by those skilled in the art to which the present disclosure pertains. Furthermore, such substitutions, modifications, and changes should be considered to fall within the scope of the appended claims.

Claims

1. It is a test connector placed between a test device and a device under test, and A first elastic conductive part capable of conducting in an up-and-down direction, a first elastic insulating part that maintains and insulates the first elastic conductive part in the up-and-down direction, an insulating guide part coupled to the upper surface of the first elastic insulating part having a through hole disposed above the upper end of the first elastic conductive part, and a first conductive sheet comprising a conductive layer disposed above the upper end within the through hole and coupled to the upper end, The apparatus comprises a second elastic conductive part corresponding to the first elastic conductive part and capable of conducting in the vertical direction, and a second elastic insulating part that maintains and insulates the second elastic conductive part in the vertical direction, wherein the second elastic conductive part comprises a second conductive sheet having a protruding end that protrudes downward from the lower surface of the second elastic insulating part and is guided by the through hole to make conductive contact with the conductive layer. The second conductive sheet is laminated on top of the first conductive sheet while the protruding end is inserted into the through hole and contacts the conductive layer. Test connector.

2. In Paragraph 1, The conductive layer has a thickness thinner than the thickness of the insulating guide portion, and the protruding end has a protruding thickness greater than the thickness of the insulating guide portion. Test connector.

3. In Paragraph 1, The above-mentioned through hole has an inner surface that is inclined outward with respect to the central axis of the first elastic conductive part, and The conductive layer comprises a bottom portion covering the top and coupled to the top, and a side wall portion covering the inner surface and coupled to the inner surface and formed integrally with the bottom portion. Test connector.

4. In Paragraph 3, The above side wall portion is inclined outward with respect to the central axis to guide the above protruding end portion to the bottom portion, Test connector.

5. In Paragraph 1, The first elastic conductive part and the second elastic conductive part have the same thickness, and the first elastic insulating part and the second elastic insulating part have the same thickness. Test connector.

6. In Paragraph 1, The second conductive sheet further includes a terminal guide portion that is coupled to the upper surface of the second elastic insulating portion and has a thickness equal to the thickness of the insulating guide portion. The terminal guide portion is positioned above the upper end of the second elastic conductive portion and guides the terminal of the device under test to the upper end, and has a through hole having an inner diameter equal to the inner diameter of the through hole of the insulation guide portion. Test connector.

7. In Paragraph 1, The second conductive sheet is removablely laminated to the first conductive sheet, and one of the first conductive sheet and the second conductive sheet is replaceable from the other of the first conductive sheet and the second conductive sheet. Test connector.

8. In Paragraph 1, The first elastic conductive part comprises a plurality of first conductive particles assembled to be conductive in the vertical direction, The second elastic conductive part comprises a plurality of second conductive particles assembled to be conductive in the vertical direction, The conductive layer is formed integrally with a plurality of first conductive particles forming the upper portion of the first elastic conductive part among a plurality of first conductive particles. Test connector.

9. In Paragraph 8, The second conductive particle protruding downward from the lower end of the above-mentioned protruding end contacts the upper surface of the conductive layer, so that the protruding end contacts the conductive layer in a conductive manner. Test connector.

10. In Paragraph 8, The conductive layer is formed integrally with all of the plurality of first conductive particles forming the upper portion, and the first conductive particles protruding upward from the upper portion are covered by the conductive layer. Test connector.

11. In Paragraph 10, The conductive layer includes a convex portion that partially covers the first conductive particle protruding upward from the top, and The above convex portion is in contact with some of the plurality of second conductive particles forming the lower end of the protruding end among the plurality of second conductive particles, Test connector.

12. In Paragraph 8, The above conductive layer is made of a metal material having a hardness lower than that of the second conductive particle, Test connector.

13. In Paragraph 12, When the protruding end presses the conductive layer downward by the pressure applied through the above-mentioned test device, the conductive layer is pressed by some of the plurality of second conductive particles forming the lower end of the protruding end. Test connector.

14. In Paragraph 13, The conductive layer includes a concave portion that partially surrounds the second conductive particle pressed into the conductive layer. Test connector.

Images