Actuator device

WO2026130854A1PCT designated stage Publication Date: 2026-06-25PHYSIK INSTRUMENTE (PI) GMBH & CO KG

Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
PHYSIK INSTRUMENTE (PI) GMBH & CO KG
Filing Date
2025-11-06
Publication Date
2026-06-25

AI Technical Summary

Technical Problem

Existing actuator devices are limited to a few degrees of freedom and require significant manufacturing effort and cost, complicating their control and making them unsuitable for vacuum or cryogenic environments.

Method used

An actuator device comprising a base, an elastic platform, and four electromechanical linear actuators arranged in a symmetrical matrix, with transmission elements to transmit elastic deformation, allowing movements in multiple degrees of freedom while minimizing manufacturing effort and complexity.

Benefits of technology

Enables movements in at least three degrees of freedom with reduced manufacturing costs and complexity, facilitating hermetic sealing and integration in vacuum or cryogenic conditions.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure EP2025082107_25062026_PF_FP_ABST
    Figure EP2025082107_25062026_PF_FP_ABST
Patent Text Reader

Abstract

The present invention relates to an actuator device (1a, 1b, 1c, 1d), comprising: a base (2a, 2b, 2c, 2d), an elastic platform (3a, 3b, 3c, 3d) which is connected to the base (2a, 2b, 2c, 2d), at least one actuator unit (4a, 4b, 4c, 4d) which has four electromechanical linear actuators (5a, 5b, 5c, 5d) and is arranged between the base (2a, 2b, 2c, 2d) and the elastic platform (3a, 3b, 3c, 3d) such that the elastic platform (3a, 3b, 3c, 3d) can be elastically deformed by actuating one or more linear actuators (5a, 5b, 5c, 5d) of the actuator unit (4a, 4b, 4c, 4d), and at least one transmission element (6a, 6b, 6c, 6d) which is arranged on the elastic platform (3a, 3b, 3c, 3d) and is designed to transmit an elastic deformation of the elastic platform (3a, 3b, 3c, 3d) to an element (7a, 7d) to be moved, wherein the transmission element (6a, 6b, 6c, 6d) is arranged on the elastic platform (3a, 3b, 3c, 3d) such that it is intersected by a plane (E1, E2, E3, E4, E7, E8) which runs between two adjacent linear actuators (5a, 5b, 5c, 5d).
Need to check novelty before this filing date? Find Prior Art

Description

[0001] Actuator device

[0002] The present invention relates to an actuator device, in particular for positioning or driving an element to be moved in several degrees of freedom.

[0003] German patent application DE 10 2022 119 245 A1 proposes the coupling of two multilayer linear actuators to generate a tilting motion of a platform. Multilayer linear actuators are easy to manufacture, assemble, and control. Such a configuration eliminates the need for shear actuators, for example. However, with this configuration, the platform's movement is limited to a few degrees of freedom, specifically two.

[0004] The object of the present invention is to provide an actuator device which is improved in terms of its functionality and application possibilities and in particular enables movements of an element to be moved in several degrees of freedom without significantly increasing the effort and cost of manufacturing the actuator device.

[0005] This problem is solved by an actuator device according to claim 1, comprising: a base, an elastic platform connected to the base, at least one actuator unit with four electromechanical linear actuators arranged between the base and the elastic platform such that the elastic platform can be elastically deformed by controlling one or more linear actuators of the actuator unit, and at least one transmission element arranged on the elastic platform and configured to transmit an elastic deformation of the elastic platform to a moving element, wherein the transmission element is arranged on the elastic platform such that it is intersected by a plane passing between two adjacent linear actuators.

[0006] The actuator device according to the invention enables the generation of movements of a moving element in at least three degrees of freedom, while simultaneously minimizing the effort and cost of manufacturing the actuator device and the complexity of controlling the actuators. By providing an actuator unit comprising four electromechanical linear actuators, the number of individual parts is reduced and assembly can be simplified, in particular automated. Furthermore, actuator units can be hermetically sealed together, enabling the use of the actuator device in a vacuum or at cryogenic temperatures. Finally, the wiring of individual linear actuators can be integrated into the actuator unit, thus avoiding the need for numerous individual wires or cables. Advantageous embodiments are the subject of the dependent claims. Further embodiments result from combinations of the subject matter of the dependent claims.

[0007] It can be advantageous if all linear actuators are identical and each linear actuator is deflectable along a straight line of action, i.e., can extend and contract along this line of action. It is further advantageous if the lines of action of all linear actuators are arranged parallel to each other. The plane intersecting the transmission element preferably runs parallel to the line of action of one, several, or all of the linear actuators.

[0008] It can be advantageous if the plane is a plane of symmetry with respect to the adjacent linear actuators and preferably intersects the transmission element symmetrically. The plane intersecting the transmission element preferably forms a plane of symmetry with respect to several or all linear actuators that form a mirror-symmetric arrangement.

[0009] It can be advantageous to arrange the four electromechanical linear actuators of an actuator unit in a 2x2 matrix, so that the actuator unit is formed in the shape of a square, with the transmission element located at the intersection of the two diagonal planes of the square. This allows for an actuator device that enables movement of the element to be moved in six degrees of freedom.

[0010] It can prove practical if each electromechanical linear actuator and / or the base and / or the elastic platform has / have a square footprint. This allows for a compact and symmetrical configuration of the actuator device.

[0011] It can be advantageous if the actuator device comprises four actuator units, each associated with a transmission element, and the four actuator units are arranged in a 2x2 matrix, forming a square. This allows for easy expansion of the actuator device and further improvement of its functionality. In particular, it enables the provision of an actuator device that allows movement of the element to be moved in six degrees of freedom.

[0012] It can be advantageous to arrange the four electromechanical linear actuators of an actuator unit in a 1x4 matrix, such that the actuator unit is rectangular in shape. Two transmission elements are positioned on the elastic platform such that one transmission element is intersected by a plane running between two adjacent linear actuators, and the other transmission element is intersected by a parallel plane running between two adjacent linear actuators. This configuration allows for movements in different degrees of freedom than those achievable with an actuator unit using linear actuators in a 2x2 matrix.

[0013] It can be practical if each electromechanical linear actuator and / or the base and / or the elastic platform has a rectangular footprint. This favors a compact and symmetrical configuration of the actuator device.

[0014] It can be advantageous if the transmission element is column-shaped and extends along a longitudinal axis, preferably having a square or rectangular cross-section. This gives the transmission element sufficient stiffness to precisely transfer the deformation of the elastic platform to the element to be moved.

[0015] It can be advantageous if the actuator device comprises at least two transmission elements, and each transmission element is oriented such that its longitudinal axis forms an orientation angle α between -45° and 45° with the plane that intersects it. This allows the movements of the element to be moved to be influenced or adjusted.

[0016] It can be advantageous if the alignment angles of the transmission elements have the same magnitude but different signs in pairs.

[0017] It can prove useful if one end of the transmission element is connected to the elastic platform and one end of the transmission element facing away from the elastic platform is connected or connectable to the element to be moved.

[0018] It can be advantageous if the actuator includes a motion platform that forms the element to be moved and is rigidly connected to the elastic platform via the transmission element. Positioning applications can be implemented using the motion platform.

[0019] It can prove practical if the transmission element is a friction element, preferably with a curved surface, configured to drive the element to be moved, preferably a runner, by means of frictional contact. This allows for the implementation of advanced positioning applications based on a stick-slip drive. It can be advantageous if the actuator device includes a housing section that connects the base to the elastic platform and at least partially surrounds the actuator unit, wherein the housing section is preferably integrally connected to the base and particularly preferably comprises several separate sections. This facilitates a compact design of the actuator device. Furthermore, the surrounding housing section protects the actuator unit from external mechanical influences.

[0020] It can be advantageous if the elastic platform is firmly connected to the housing section, preferably via several connection sections provided on the elastic platform, and particularly preferably integrally formed with the elastic platform.

[0021] Brief description of the drawings

[0022] Fig. 1 shows a perspective view of an actuator device 1a according to a first embodiment.

[0023] Fig. 2 shows a perspective exploded view of the actuator device 1a according to the first embodiment.

[0024] Fig. 3 shows a perspective view of the elastic platform 3a and the motion platform 7a, which are connected to each other via four transmission elements 6a, according to the first embodiment of the actuator device 1a.

[0025] Fig. 4 shows a top view and side views of the elastic platform 3a and motion platform 7a connected by the transmission elements 6a according to the first embodiment of the actuator device 1a.

[0026] Fig. 5 shows a perspective view of the base 2a and the linear actuators 5a arranged on it according to the first embodiment of the actuator device 1a.

[0027] Fig. 6 shows a top view of the base 2a and the linear actuators 5a arranged on it and grouped into actuator units 4a according to the first embodiment of the actuator device 1a.

[0028] Figures 1 to 3 of Fig. 7 show FEM simulations of the actuator device 1a according to the first embodiment in a side view. Figures 4 to 6 of Fig. 7 show FEM simulations of the actuator device 1a according to the first embodiment in a perspective view.

[0029] Fig. 8 shows a modification of the actuator device 1a according to the first embodiment with a rod 10a arranged on the motion platform 7a. Fig. 9 shows a perspective view of an actuator device 1b according to a second embodiment.

[0030] Fig. 10 shows a perspective exploded view of the actuator device 1 b according to the second embodiment.

[0031] Fig. 11 shows a perspective view of an actuator device 1c according to a third embodiment.

[0032] Fig. 12 shows a perspective exploded view of the actuator device 1c according to the third embodiment.

[0033] Fig. 13 shows a positioning device with a stator 11, a frame 12 and a platform 13, wherein the actuator device 1c is integrated into the positioning device according to the third embodiment.

[0034] Fig. 14 shows a perspective view of an actuator device 1d according to a fourth embodiment.

[0035] Fig. 15 shows a side view of the actuator device 1d according to the fourth embodiment.

[0036] Figures 1 to 3 of Fig. 16 show FEM simulations of the actuator device 1d according to the fourth embodiment in side view.

[0037] Terms and definitions

[0038] The descriptions 2x2 matrix, 4x4 matrix and 1x4 matrix refer to a plane that intersects the lines of action of the linear actuators perpendicularly.

[0039] Detailed description of preferred embodiments

[0040] Preferred embodiments of the actuator device according to the invention are described below with reference to the figures.

[0041] Figures 1 to 6 show the actuator device 1a according to the first embodiment or components thereof in various views. The actuator device 1a essentially comprises a base 2a, an elastic platform 3a connected to the base 2a, electromechanical linear actuators 5a arranged between the base 2a and the elastic platform, and transmission elements 6a that connect the elastic platform 3a to a motion platform 7a.

[0042] The base 2a is designed as a rigid base plate with a square base and is preferably made of a metallic material. A housing section 9a is arranged circumferentially on one side of the base 2a, extending in a direction perpendicular to the plane of the base 2a. The housing section 9a comprises several column-shaped individual sections with a square base, arranged at regular intervals around the circumference of the base 2a and preferably each integrally connected to the base 2a. At their end facing away from the base 2a, the individual sections each have a connecting section for connection to the elastic platform 3a, in particular in the form of a threaded bore. The housing section 9a is preferably made of the same material as the base 2a.

[0043] The elastic platform 3a is designed as an elastic plate with an approximately square base and is formed, in particular, by a spring sheet made of a metallic material. The elastic platform 3a has several individual connecting sections 8a around its circumference for connection to the housing section 9a. The connecting sections 8a are formed, in particular, by integrally molded projections with a square base and a central through-hole. The connecting sections 8a are congruent with the column-shaped individual sections of the housing section 9a. To firmly connect the elastic platform 3a to the base 2a, a screw is inserted through the through-hole of a connecting section and screwed into the threaded bore of an individual section of the housing section 9a, so that the screw head rests on the elastic platform 3a.

[0044] Linear actuators 5a are arranged between the base 2a and the elastic platform 3a, extending in a direction perpendicular to the plane of the base 2a and the elastic platform 3a. The direction of extension of the linear actuators 5a along their longitudinal axes is simultaneously their direction of action, along which they can move bidirectionally, i.e., extend and contract. The linear actuators 5a are arranged so that their directions of action are parallel. The linear actuators 5a are positioned on the base 2a such that they are enclosed by the housing section 9a. The height of the housing section 9a is dimensioned relative to the height of the linear actuators 5a such that the elastic platform 3a applies a defined preload to the linear actuators 5a.One end face of each linear actuator 5a is therefore in contact with the top of the base 2a, while the other end face of each linear actuator 5a is in contact with the bottom of the elastic platform 3a.

[0045] The linear actuators 5a are each column-shaped with a square base. In particular, the linear actuators 5a are identical in design.

[0046] In the present embodiment of the actuator device 1a, a total of sixteen linear actuators 5a are used. The linear actuators 5a can be arranged in one actuator unit in a 4x4 matrix or in four actuator units 4a, each in a 2x2 matrix (see Fig. 6). The actuator unit with linear actuators 5a in the 4x4 matrix forms a square. Likewise, each actuator unit 4a with four linear actuators 5a in the 2x2 matrix forms a square. In this case, the four actuator units 4a are also arranged to form a square.

[0047] The base 2a and the elastic platform 3a, in conjunction with the housing section 9a, form a cage, with the actuator unit(s) being / being contained within this cage, so that the actuator unit(s) as a whole are fixed within this cage. The individual linear actuators 5a can expand and contract independently of one another and essentially unhindered and without frictional losses along their directions of action. The individual linear actuators 5a are only frictionally fixed in their direction of action between the base 3a and the elastic platform 3a and preferably do not touch each other or the housing section 9a. For this purpose, the linear actuators 5a are mounted on the base 2a at predetermined intervals from one another. It is also conceivable to arrange spacers between the linear actuators 5a and / or between the linear actuators 5a and the housing section 9a in order to minimize the contact area and friction between the linear actuators 5a.

[0048] Transmission elements 6a are arranged on the elastic platform 3a. In the present embodiment of the actuator device 1a, a total of four transmission elements 6a are provided on the elastic platform 3a. Each transmission element 6a is column-shaped with a square cross-section and extends along a longitudinal axis. One end of each transmission element 6a is connected to the elastic platform 3a, and the end of each transmission element 6a facing away from the elastic platform 3a is connected to a motion platform 7a, which represents a moving element.

[0049] The transmission elements 6 are therefore configured to transmit an elastic deformation of the elastic platform 3a, caused by actuating the linear actuators 5a, to the motion platform 7a. The motion platform 7a is a rigid plate with a preferably square base area, on which, for example, an object to be moved can be placed and / or mounted. The motion platform 7a corresponds to a moving element within the meaning of the claims.

[0050] Each transmission element 6a is arranged on the elastic platform 3a such that it is intersected by a plane E1, E2, E3, E4 which runs between two adjacent linear actuators 5a (see Fig. 6). Each of these planes E1, E2, E3, E4 is in particular a plane of symmetry with respect to two adjacent linear actuators 5a and preferably intersects the transmission element 6a symmetrically.

[0051] In an actuator unit 4a with four linear actuators 5a in a 2x2 matrix, the transmission element 6a assigned to the actuator unit 4a is located in particular at the intersection of the two diagonal planes D of the square which forms the actuator unit 4a.

[0052] In a configuration with four actuator units 4a, planes E5 and E6 are also planes of symmetry with respect to the actuator units 4a. In general, planes E5 and E6 represent planes of symmetry of the entire actuator device 1a.

[0053] Each transmission element 6a is also oriented such that its longitudinal axis forms an orientation angle α between -45° and 45° with the plane E1, E2 or E3, E4 with which it is intersected (see also Fig. 15). The orientation angles α of the transmission elements 6a can have the same magnitude but different signs in pairs. That is, in Fig. 6, the transmission elements 6a at the top left and bottom right are arranged along a diagonal plane and have orientation angles α of the same magnitude but different signs with respect to the other (intersecting) diagonal plane along which the transmission elements 6a at the bottom left and top right are arranged.

[0054] The actuator device 1a is configured as described above and thus enables movements of the motion platform 7a in six degrees of freedom by suitable control of the linear actuators 5a, i.e. movements in the x-direction, y-direction, z-direction, in the xy-plane, xz-plane and yz-plane, wherein the movements in the x-direction, y-direction, z-direction are linear movements and the movements in the xy-plane, xz-plane and yz-plane are tilting movements or a rotational movement of the motion platform 7a.

[0055] To better understand the possible movements of the motion platform 7a, illustrations 1 to 3 in Fig. 7 show FEM simulations of the actuator device 1a in a side view. Illustrations 4 to 6 of Fig. 7 show FEM simulations of the actuator device 1a in a perspective view. It should be noted that the connection between the elastic platform 3a and the housing section 9a is not shown in the FEM simulations.

[0056] Figure 1 shows a deflection of the motion platform 7a in the x-direction. Figure 2 shows a deflection of the motion platform 7a in the y-direction. Figure 3 shows a deflection of the motion platform 7a in the z-direction. Figure 4 shows a tilting of the motion platform 7a in the xz-plane. Figure 5 shows a tilting of the motion platform 7a in the yz-plane. Figure 6 shows a rotation of the motion platform 7a in the xy-plane.

[0057] Fig. 8 shows a modification of the actuator device 1a according to the first embodiment. In this modification, a rod 10a is arranged centrally on the motion platform 7a and extends perpendicular to the plane of the motion platform 7a. The rod 10a serves as a boom, at the tip of which, for example, a holding device for holding an object to be positioned can be attached. The object can be, for example, a fiber optic cable, which can be aligned using the modified actuator device 1a. The actuator device 1a modified according to Fig. 8 is therefore particularly suitable for positioning applications.

[0058] Figures 9 and 10 show the actuator device 1b according to the second embodiment in different views.

[0059] The configuration principle described for actuator device 1a according to the first embodiment also applies in principle to actuator device 1b according to the second embodiment. Therefore, the following discussion focuses primarily on the special features of actuator device 1b according to the second embodiment.

[0060] The actuator device 1b comprises an actuator unit 4b with four linear actuators 5b in a 2x2 matrix. Such an actuator unit is already described in connection with the actuator device 1a according to the first embodiment. The base 2b, the housing section 9b, and the elastic platform 3b perform the same functions as the corresponding components in the actuator device 1a according to the first embodiment, but their dimensions are adapted to accommodate only one actuator unit 4b. The base 2b is also provided with through holes at its corners to allow it to be connected to a higher-level structure.

[0061] The transmission element 6b is arranged on the elastic platform 3b such that it lies at the intersection of the two diagonal planes of the square that forms the actuator unit 4b. The transmission element 6b is column-shaped and has a connecting section in the form of a threaded bore at its end facing away from the elastic platform 3b, to which an object to be positioned can be attached. Such an object to be positioned corresponds to an object to be moved within the meaning of the claims and can, in particular, be a fiber optic cable.

[0062] The present embodiment of the actuator device 1b is configured as described above and thus enables movements of the transmission element 6b in three degrees of freedom by suitable control of the linear actuators 5b, i.e. movements in the z-direction, in the xz-plane and in the yz-plane, wherein the movement in the z-direction is a linear movement and the movements in the xz-plane and in the yz-plane are tilting movements of the transmission element 6d.

[0063] Figures 11 and 12 show the actuator device 1c according to the third embodiment in different views.

[0064] The actuator device 1c according to the third embodiment is identical to the actuator device 1b according to the second embodiment, except for the transmission element 6c. The transmission element 6c of the actuator device 1c is a friction element with a curved surface. In particular, it can have a hemispherical shape. The transmission element 6c is configured to drive a moving element, for example, a runner, by means of friction contact. The actuator device 1c can thus be used for a so-called stick-slip drive.

[0065] Fig. 13 shows a positioning device comprising a stator 11, a frame 12, and a platform 13, wherein the actuator 1c according to the third embodiment is integrated into the positioning device. The actuator 1c is mounted on the stator 11 and configured to move the platform 13, which is mounted in the frame 12, by ensuring that the transmission element e of the actuator 1c is in frictional contact with the underside of the platform 13 and that the linear actuators 5c are appropriately controlled to effect a displacement of the transmission element 6. The frame 12 is equipped with first guide rails for guiding the frame 12 relative to the stator 11 along the y-direction and with second guide rails for guiding the platform 13 relative to the frame 12 in the x-direction. The positioning device is thus able to position the platform 13 in the xy-plane.

[0066] Figures 14 and 15 show the actuator device 1d according to the fourth embodiment in different views. The configuration principle described for the actuator devices 1a, 1b, and 1c also applies in principle to the actuator device 1d according to the fourth embodiment. Therefore, the following discussion focuses primarily on the special features of the actuator device 1d according to the fourth embodiment.

[0067] The actuator device 1d comprises an actuator unit 4d with four electromechanical linear actuators 5d arranged in a 1x4 matrix such that the actuator unit 4d is formed in the shape of a rectangle. Two transmission elements 6d are arranged on the elastic platform 3d such that one transmission element 6d is intersected by a plane E7 passing between two first adjacent linear actuators 5d, and the other transmission element 6d is intersected by a parallel plane E8 passing between two second adjacent linear actuators 5d.

[0068] The base 2d, the housing section 9d, the elastic platform 3d, and the motion platform 7d are dimensionally adapted to the arrangement of the linear actuators 5d in a 1x4 matrix. In particular, each linear actuator 5d, base 2d, elastic platform 3d, and motion platform 7d has a rectangular base.

[0069] Each transmission element 6d is also oriented such that its longitudinal axis forms an orientation angle α between -45° and 45° with the plane E7, E8 with which it is intersected. The orientation angles α of the transmission elements 6d can have the same magnitude but different signs (see Fig. 15).

[0070] The actuator device 1d is configured as described above and thus enables movements of the motion platform 7d in three degrees of freedom by suitable control of the linear actuators 5d, i.e. movements in the x-direction and in the z-direction as well as in the xz-plane, wherein the movements in the x-direction and z-direction are linear movements and the movement in the xz-plane is a tilting movement of the motion platform 7d.

[0071] To better understand the possible movements of the motion platform 7d, illustrations 1 to 3 in Fig. 16 show FEM simulations of the actuator device 1d in side view.

[0072] Figure 1 shows a tilting of the motion platform 7d in the xz-plane. Figure 2 shows a deflection of the motion platform 7d in the z-direction. Figure 3 shows a deflection of the motion platform 7d in the x-direction.

[0073] Reference numeral list 1a, 1b, 1c, 1d Actuator device

[0074] 2a, 2b, 2c, 2d Basis

[0075] 3a, 3b, 3c, 3d elastic platform

[0076] 4a, 4b, 4c, 4d Acronym

[0077] 5a, 5b, 5c, 5d electromechanical linear actuator

[0078] 6a, 6b, 6c, 6d Transmission element

[0079] 7a, 7d Movement platform (element to be moved)

[0080] 8a, 8b, 8c, 8d Connecting section

[0081] 9a, 9b, 9c, 9d Housing section

[0082] 10a Staff

[0083] 11 Stator

[0084] 12 frames

[0085] Platform (element to be moved)

[0086] E1, E2, E3, E4, E5, E6, E7, E8 (symmetry) plane

Claims

Claims 1. Actuator device (1a, 1b, 1c, 1d) comprising: a base (2a, 2b, 2c, 2d), an elastic platform (3a, 3b, 3c, 3d) connected to the base (2a, 2b, 2c, 2d), at least one actuator unit (4a, 4b, 4c, 4d) with four electromechanical linear actuators (5a, 5b, 5c, 5d) arranged between the base (2a, 2b, 2c, 2d) and the elastic platform (3a, 3b, 3c, 3d) such that the elastic platform (3a, 3b, 3c, 3d) can be elastically deformed by actuating one or more linear actuators (5a, 5b, 5c, 5d) of the actuator unit (4a, 4b, 4c, 4d), and at least one transmission element (6a, 6b, 6c, 6d) arranged on the elastic platform (3a, 3b, 3c, 3d) and configured to transmit an elastic deformation of the elastic platform (3a, 3b, 3c, 3d) to a moving element (7a, 7d), wherein the transmission element (6a, 6b, 6c, 6d) is arranged on the elastic platform (3a, 3b, 3c, 3d) such that it is supported by a plane (E1, E2, E3, E4, E7,E8) is cut, which runs between two adjacent linear actuators (5a, 5b, 5c, 5d).

2. Actuator device (1a, 1b, 1c, 1d) according to the preceding claim, wherein the plane (E1 , E2, E3, E4, E7, E8) is a plane of symmetry with respect to the adjacent linear actuators (5a, 5b, 5c, 5d) and preferably intersects the transmission element (6a, 6b, 6c, 6d) symmetrically.

3. Actuator device (1a, 1b, 1c) according to one of the preceding claims, wherein the four electromechanical linear actuators (5a, 5b, 5c) of an actuator unit (4a, 4b, 4c) are arranged in a 2x2 matrix, such that the actuator unit (4a, 4b, 4c) is formed in the shape of a square, wherein the transmission element (6a, 6b, 6c) is arranged at the intersection of the two diagonal planes of the square.

4. Actuator device (1a, 1b, 1c) according to any of the preceding claims, wherein each electromechanical linear actuator (5a, 5b, 5c) and / or the base (2a, 2b, 2c) and / or the elastic platform (3a, 3b, 3c) has / have a square base area.

5. Actuator device (1a) according to one of the preceding claims, wherein the actuator device comprises four actuator units (4a), each of which is assigned a transmission element (6a), and the four actuator units (4a) are arranged in a 2x2 matrix such that the four actuator units (4a) form a square.

6. Actuator device (1d) according to claim 1 or 2, wherein the four electromechanical linear actuators (5d) of an actuator unit (4d) are arranged in a 1x4 matrix such that the actuator unit (4d) is formed in the shape of a rectangle, wherein two transmission elements (6d) are arranged on the elastic platform (3d) such that one transmission element (6d) is intersected by a plane (E7) passing between two first adjacent linear actuators (5d), and the other transmission element (6d) is intersected by a parallel plane (E8) passing between two second adjacent linear actuators (5d).

7. Actuator device (1d) according to the preceding claim, wherein each electromechanical linear actuator (5d) and / or the base (2d) and / or the elastic platform (3d) has / have a rectangular base area.

8. Actuator device (1a, 1b, 1d) according to one of the preceding claims, wherein the transmission element (6a, 6b, 6d) is column-shaped and extends along a longitudinal axis, wherein the transmission element preferably has a square or rectangular cross-section.

9. Actuator device (1a, 1d) according to the preceding claim, wherein the actuator device (1a, 1d) comprises at least two transmission elements (6a, 6d) and each transmission element (6a, 6d) is aligned such that its longitudinal axis with the plane by which it is intersected forms an orientation angle (a) between -45° and 45°.

10. Actuator device (1a, 1d) according to the preceding claim, wherein the alignment angles (a) of the transmission elements (6a, 6d) have the same magnitude and different signs in pairs.

11. Actuator device (1a, 1b, 1c, 1d) according to one of the preceding claims, wherein one end of the transmission element (6a, 6b, 6c, 6d) is connected to the elastic platform (3a, 3b, 3c, 3d) and one end of the transmission element (6a, 6b, 6c, 6d) facing away from the elastic platform (3a, 3b, 3c, 3d) is connected or connectable to the element to be moved (7a, 7d).

12. Actuator device (1a, 1d) according to one of the preceding claims, further comprising a motion platform (7a, 7d) which forms the element to be moved and over which The transmission element (6a, 6d) is firmly connected to the elastic platform (3a, 3d).

13. Actuator device (1c) according to one of claims 1 to 4, wherein the transmission element (6c) is a friction element, preferably with a curved surface, which is designed to drive the element to be moved, which is preferably designed as a runner (13), by means of friction contact.

14. Actuator device (1a, 1b, 1c, 1d) according to one of the preceding claims, further comprising: a housing section (9a, 9b, 9c, 9d) which connects the base (2a, 2b, 2c, 2d) with the elastic platform (3a, 3b, 3c, 3d) and surrounds the actuator unit (4a, 4b, 4c, 4d) at least sectionally, wherein the housing section (9a, 9b, 9c, 9d) is preferably integrally connected with the base (2a, 2b, 2c, 2d) and particularly preferably comprises several separate individual sections.

15. Actuator device (1a, 1b, 1c, 1d) according to the preceding claim, wherein the elastic platform (3a, 3b, 3c, 3d) is rigidly connected to the housing section (9a, 9b, 9c, 9d), preferably via several connecting sections (8a, 8b, 8c, 8d) provided on the elastic platform (3a, 3b, 3c, 3d), particularly preferably integrally formed with the elastic platform (3a, 3b, 3c, 3d).