Tracking and scanning measurement system and platform

Abstract

Disclosed in the present invention are a tracking and scanning measurement system and platform. The tracking and scanning measurement system comprises a two-dimensional angle measurement driving apparatus, a contact laser tracker, a non-contact laser scanner and a control apparatus, wherein the control apparatus is connected to each of the contact laser tracker, the non-contact laser scanner and the two-dimensional angle measurement driving apparatus, and is used for: in a tracking coordinate measurement mode, controlling the two-dimensional angle measurement driving apparatus to drive the laser tracker to track a set tracking cooperative target in real time, and combining two-dimensional angle measurement data and laser interferometric ranging data, so as to acquire coordinate data of a contact point between the tracking cooperative target and a surface to be measured; and in a scanning measurement mode, controlling the two-dimensional angle measurement driving apparatus to drive the non-contact laser scanner to scan said surface, and combining two-dimensional angle measurement data and absolute ranging data, so as to acquire scanned point cloud data of said surface. By means of the present invention, high-precision tracking coordinate measurement and high-efficiency scanning measurement can be realized by means of one instrument, thereby significantly improving detection efficiency.

Description

A tracking scanning measurement system and platform Technical Field

[0001] This invention belongs to the field of metrology and testing technology in the manufacturing industry, and specifically relates to a tracking scanning measurement system and platform. Background Technology

[0002] The assembly precision and overall shape accuracy of equipment are key factors in ensuring the quality of high-end equipment such as aircraft, missiles, and ships, as well as ensuring stealth, aerodynamic, and hydrodynamic performance. Precise measurement systems are one of the key means to guarantee the assembly precision and overall shape accuracy of equipment. For example, advanced measurement methods are required to measure spatial position and attitude during manufacturing, inspection, and space positioning processes such as the assembly and docking of large components, the assembly of space probe payloads, high-precision positioning of UAVs, and robot calibration.

[0003] Currently, for the measurement of components of large equipment, to achieve high-precision and high-efficiency measurements, it is necessary to combine the characteristics of each measuring device and use targeted measuring equipment for each measurement area. For example, a high-precision, large-size laser tracker can perform precise contact measurements of the area to be measured, but it requires hand-held operation of the target ball, resulting in slow measurement speed. A laser scanner can perform large-area, efficient scanning of the measurement area, but its non-contact measurement accuracy is lower during station transitions. Furthermore, because it lacks tracking coordinate measurement capabilities, it is not suitable for attitude measurement in docking situations. To simultaneously achieve high-precision tracking coordinate measurement and high-efficiency scanning measurement, different measuring devices are usually required to perform on-site measurements of the same large equipment. Since each measuring device uses its own measurement coordinate system, the measured coordinate points need to be converted to a common point to obtain coordinate point data under the same coordinate system. It is evident that existing measuring equipment cannot meet the requirements for high-precision tracking measurement of component assembly feature points and high-precision, rapid on-site measurement of the overall outline of large equipment. Summary of the Invention

[0004] The purpose of this invention is to provide a tracking scanning measurement system and platform that can achieve high-precision tracking coordinate measurement and efficient non-contact scanning measurement to meet the needs of high-precision and rapid on-site measurement of component assembly feature points and overall machine outline of large equipment.

[0005] To achieve the above objectives, one aspect of the present invention provides a tracking scanning measurement system, comprising:

[0006] A contact laser tracker includes a tracking cooperative target and a tracking scanning device. The tracking cooperative target is used to move on the surface to be measured in a manner that makes contact with the surface to be measured according to a set movement strategy. The tracking scanning device is used to acquire, in real time, the coordinate data of the contact point between the tracking cooperative target and the surface to be measured in the target coordinate system by tracking the tracking cooperative target.

[0007] A non-contact laser scanner is used to scan the surface to be measured according to a set scanning strategy and acquire the scanned point cloud data of the surface to be measured in the target coordinate system in real time.

[0008] A two-dimensional angle measurement drive device is used to drive the contact laser tracker and the non-contact laser scanner;

[0009] The control device is connected to the contact laser tracker, the non-contact laser scanner, and the two-dimensional angle measurement drive device. In the tracking coordinate measurement mode, it controls the two-dimensional angle measurement drive device to drive the tracking scanning device to track the tracking cooperative target in real time to obtain the coordinate data. In the scanning measurement mode, it controls the two-dimensional angle measurement drive device to drive the non-contact laser scanner to scan the surface to be measured to obtain the scanned point cloud data.

[0010] Another aspect of the present invention provides a tracking scan measurement platform, including the above-described tracking scan measurement system and a computing processing device, wherein the computing processing device is connected to the tracking scan measurement system to acquire coordinate data and scan point cloud data of the surface to be measured from the tracking scan measurement system.

[0011] According to the tracking scanning measurement system and platform of the present invention described above, a contact laser tracker and a non-contact laser scanner can be integrated into the same device, and point cloud data under the same coordinates can be acquired. The point cloud data can be directly processed for three-dimensional modeling without the need for coordinate transformation as in the prior art. Thus, a single instrument can be used to achieve fast, complete, and high-precision scanning and tracking measurement, significantly improving detection efficiency. Attached Figure Description

[0012] To more clearly illustrate the technical solutions of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort:

[0013] Figure 1 is a schematic diagram of the tracking scanning measurement system according to an embodiment of the present invention;

[0014] Figure 2 is a schematic diagram of the principle of the contact laser tracker and the non-contact laser scanner according to an embodiment of the present invention;

[0015] Figure 3 is a schematic diagram of the coordinate measurement principle according to an embodiment of the present invention;

[0016] Figure 4 is a schematic diagram of the structure of the constant temperature chamber according to an embodiment of the present invention;

[0017] Figure 5 is a schematic diagram of the structure of the visual tracking module according to an embodiment of the present invention;

[0018] Figure 6 is a schematic diagram of the structure of the contact laser tracker and the non-contact laser scanner according to an embodiment of the present invention;

[0019] Figure 7 is an exploded view of the pitch rotation drive mechanism according to an embodiment of the present invention;

[0020] Figure 8 is an exploded view of the horizontal rotary drive mechanism according to an embodiment of the present invention;

[0021] Figure 9 is a schematic diagram of the structure of a tracking scanning measurement platform according to an embodiment of the present invention. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0023] Referring to Figure 1, which is a schematic diagram of the structure of the tracking scanning measurement system 100 according to an embodiment of the present invention, the tracking scanning measurement system 100 includes: a support frame 1, a mounting housing 2, a two-dimensional angle measurement drive device 3, a contact laser tracker 4, a non-contact laser scanner 5, and a control device 6.

[0024] The mounting housing 2 is mounted on the support frame 1. The two-dimensional angle measuring drive device 3 is mounted inside the mounting housing 2. The contact laser tracker 4 includes at least a tracking cooperative target 41 and a tracking scanning device 42. The tracking scanning device 42 is mounted on the mounting housing 2. During measurement, the tracking cooperative target 41 moves on the surface to be measured 200 according to a set movement strategy by contacting the surface to be measured 200. The tracking scanning device 42 acquires the coordinate data of the surface to be measured 200 in the target coordinate system in real time by tracking the tracking cooperative target 41. The non-contact laser scanner 5 is mounted inside the mounting housing 2. During measurement, it scans the surface to be measured 200 according to a specified scanning method and acquires the scanned point cloud data of the surface to be measured 200 in the target coordinate system in real time. The two-dimensional angle measuring drive device 3 drives the contact laser tracker 4 and the non-contact laser scanner 5. The control device 6 is connected to the two-dimensional angle measuring drive device 3, the contact laser tracker 4, and the non-contact laser scanner 5. In the tracking coordinate measurement mode, the contact laser tracker 4 is turned on, and the two-dimensional angle measuring drive device 3 is controlled to drive the tracking scanning device 42 to track the cooperative target 41 in real time to obtain the coordinate data. In the scanning measurement mode, the non-contact laser scanner 5 is turned on, and the two-dimensional angle measuring drive device 3 is controlled to drive the non-contact laser scanner 5 to scan the surface to be measured 200 to obtain the scanning point cloud data.

[0025] In this embodiment, the support frame 1 can be a tripod, and the mounting housing 2 is mounted on the support frame 1.

[0026] In some embodiments, the tracking target 41 can be a pyramidal target sphere, which can be a target sphere or a target mirror. However, it is not limited to this; as long as it can receive and reflect laser light and cooperate with the tracking scanning device 42 to acquire the coordinate data of the measured surface 200 in the target coordinate system in real time, the tracking target 41 can have any structure. For ease of understanding, the tracking target 41 in the following embodiments is described as a pyramidal target sphere.

[0027] During measurement, the contact laser tracker 4 moves the pyramidal target ball on the surface 200 to be measured in a manner that contacts the surface 200, according to a set movement strategy. The tracking and scanning device 42 tracks the pyramidal target ball to acquire the coordinate data of the surface 200 in the target coordinate system in real time. The set movement strategy can be determined based on the shape of the surface 200 to be measured.

[0028] In this embodiment, the movement strategy can be set to allow the cone target ball to move automatically according to the movement strategy, or it can be set to allow the cone target ball to move manually according to the movement strategy. This embodiment is not limited to this.

[0029] In this embodiment, the coordinate data can be understood as contact point cloud data obtained by tracking cooperative target 41.

[0030] During measurement, the non-contact laser scanner 5 scans the surface 200 to be measured according to a specified scanning strategy, and acquires the scanned point cloud data of the surface 200 in the target coordinate system in real time. The specified scanning strategy may be determined by the control device 6 based on the shape of the surface 200 to be measured and the measurement distance.

[0031] In practical use, in the tracking coordinate measurement mode, the control device 6 activates the contact laser tracker 4 and the two-dimensional angle measuring drive device 3. The cone target ball can be moved on the surface to be measured 200 by contact with the target surface 200 through a robotic arm or handheld means, according to a set movement strategy. The control device 6 controls the two-dimensional angle measuring drive device 3 to drive the tracking scanning device 42 to track the cone target ball in real time to obtain coordinate data in the target coordinate system, and determines the contact point cloud data of the surface to be measured 200 based on the coordinate data. In the scanning measurement mode, the control device 6 activates the non-contact laser scanner 5, and controls the two-dimensional angle measuring drive device 3 to drive the non-contact laser scanner 5 to scan the surface to be measured 200 to obtain scan point cloud data in the target coordinate system, so as to accurately construct and assemble a three-dimensional model using the coordinate data and scan point cloud data.

[0032] In some embodiments, the control device 6 can be connected to an external host to receive control commands sent by the external host and send measured contact point cloud data and scanned point cloud data to the host, so that the host can perform three-dimensional modeling based on the scanned point cloud data and contact point cloud data to achieve high-precision assembly.

[0033] In this embodiment, the contact laser tracker 4 and the non-contact laser scanner 5 can scan the surface 200 to be measured under the same coordinate system to obtain point cloud data. This enables high-precision assembly and high-efficiency assembly of the point cloud data measured under the same coordinate system. In addition, the contact laser tracker 4 can realize large-size high-precision contact coordinate measurement on site, and the non-contact laser scanner 5 can realize high-precision rapid complete scanning measurement. In this way, both high-precision complete scanning can be completed quickly, and large-size high-precision scanning can be achieved. This solves the contradiction that the laser tracker cannot perform rapid non-contact scanning measurement and the laser scanner cannot perform high-precision tracking coordinate measurement. It enables rapid, complete, high-precision scanning and tracking measurement with a single instrument, significantly improving inspection efficiency and meeting the requirements for high-precision rapid on-site measurement of component assembly feature points and overall shape contours of equipment such as aircraft, missiles, and ships.

[0034] In some embodiments, whether to use the tracking coordinate measurement mode or the scanning measurement mode to measure the surface 200 can be selected by manual confirmation, or the control device 6 can obtain the measurement mode requirements sent by other electronic devices, or the control device 6 can have a pre-trained measurement mode determination model that outputs the measurement mode corresponding to the area to be measured based on the captured image of the area to be measured. This embodiment does not limit this.

[0035] In some embodiments, as shown in FIG1, the mounting housing 2 includes a scanner housing 21 and an adjustment housing 22. The control device 6, the contact laser tracker 4, and the non-contact laser scanner 5 are all mounted in the scanner housing 21, and the two-dimensional angle measuring drive device 3 is mounted in the adjustment housing 22. The scanner housing 21 and the adjustment housing 22 are mounted on the support frame 1. In this embodiment, the support frame 1 can be a tripod, with the scanner housing 21 placed on top of the tripod and the adjustment housing 22 placed in the middle of the tripod.

[0036] In some embodiments, as shown in FIG2, the tracking scanning device 42 includes: an interferometric ranging module 421, a target tracking module 422, and a visual tracking module 423; wherein, the interferometric ranging module 421, the target tracking module 422, and the visual tracking module 423 are all installed inside the scanner housing 21 and electrically connected to the control device 6.

[0037] The control device 6 is used to activate the interferometric ranging module 421, the target tracking module 422, and the visual tracking module 423 in the tracking coordinate measurement mode. Based on the captured image fed back by the visual tracking module 423, the control device 6 determines the position information of the pyramidal target ball and sends the position information of the pyramidal target ball to the two-dimensional angle measuring drive device 3. Based on the position information of the pyramidal target ball, the control device 6 controls the two-dimensional angle measuring drive device 3 to move the interferometric ranging module 421, so that the ranging laser emitted by the interferometric ranging module 421 enters the pyramidal target ball through the target tracking module 422. During the movement of the pyramidal target ball, the incoming ranging laser is reflected back to the target tracking module 422 after passing through the pyramidal target ball.

[0038] The target tracking module 422 is used to measure the relative distance between the cone target ball and the target tracking module 422 at the current moment and the position offset value relative to the previous moment in the target coordinate system according to the received ranging laser, and send the relative distance value and the position offset value at the current moment to the control device 6.

[0039] The control device 6 is also used to control the two-dimensional angle measuring drive device 3 to drive the target tracking module 422 to adaptively adjust the horizontal angle and pitch angle according to the position offset value, so as to realize the tracking and measurement of the cone target ball by adjusting the position offset value, and determine the coordinate data of the surface to be measured 200 in the target coordinate system based on the absolute distance values ​​obtained at different times.

[0040] In this embodiment, as shown in Figure 3, let the center point of the cone target be P(x, y, z), and the coordinate system center of the contact laser tracker 4 be the dual-axis rotation center O. When the system tracks the cone target, if the horizontal angle from O to P is... Let the pitch angle be θ and the distance between OPs be R. According to the transformation from spherical coordinates to rectangular coordinates, we have:

[0041] Where x is the horizontal coordinate of the coordinate system, y is the vertical coordinate of the coordinate system, and z is the vertical coordinate of the coordinate system.

[0042] In this embodiment, to achieve high-precision scanning and tracking measurement, the interferometric ranging module 421 uses laser interferometric ranging combined with the target tracking module 422 to achieve high-precision tracking coordinate measurement, thereby realizing tracking coordinate measurement, and tracking ranging is performed through feedback from the target tracking module 422. Experimental testing shows that the accuracy of the target tracking module 422 can reach ±18gm + 8.5gm / m.

[0043] In this embodiment, the target tracking module 422 provides position feedback for the cone target ball, and the interferometric ranging module 421 measures the absolute distance to the cooperative target. Based on the position deviation and distance feedback measured by the target tracking module 422, the two-dimensional angle measuring drive device 3 drives the target tracking module 422 to adaptively adjust the horizontal and pitch angles to achieve the tracking and measurement of the cone target ball. Finally, the measurement results are transmitted to the host for data processing.

[0044] As an example, as shown in FIG2, the target tracking module 422 includes a lens assembly 4221 and a position sensor tracker 4222. The lens assembly 4221 is disposed on the light-incident side of the position sensor tracker 4222. The lens assembly 4221 performs optical signal processing on the ranging laser emitted from the interferometric ranging module 421, so that a portion of the processed ranging laser enters the pyramidal target ball and is reflected back to the lens assembly 4221, forming an interference signal with another portion of the ranging laser after passing through the lens assembly 4221 and entering the position sensor tracker 4222.

[0045] The position sensor tracker 4222 is used to measure the position of the light spot formed by the incident interference signal and determine the position offset value between the cone target ball and the lens assembly 4221 in the target coordinate system at the current time relative to the previous time.

[0046] The control device 6 is electrically connected to the position sensor tracker 4222 and is used to control the adaptive adjustment of the horizontal angle and the pitch angle according to the relative distance value and the position offset value, so as to achieve the tracking and measurement of the cone target ball by adjusting the position offset value; the control device 6 is also used to determine the coordinate data of the surface to be measured 200 in the target coordinate system according to the relative distance values ​​at different times.

[0047] In this embodiment, the position sensor tracker 4222 can measure the position of the light spot formed by the interference signal and determine the position offset value between the cone target ball and the lens assembly 4221 in the target coordinate system at the current time relative to the previous time. This allows the control device 6 to control the two-dimensional angle measurement drive device 3 to adaptively adjust the horizontal and pitch angles of the target tracking module 422 based on the relative distance value sent by the target tracking module 422 and the position offset value. By adjusting the position offset value, the tracking and measurement of the cone target ball can be achieved. Based on the relative distance values ​​obtained at different times, the coordinate data of the surface to be measured 200 in the target coordinate system can be determined.

[0048] In some embodiments, as shown in FIG2, the target tracking module 422 further includes a filter 4223, which is disposed between the lens assembly 4221 and the position sensing tracker 4222. In this embodiment, the filter 4223 can filter out some unwanted light signals to improve measurement accuracy.

[0049] In some embodiments, as shown in FIG2, the lens assembly 4221 includes a first fiber collimating lens 42211 and a beam splitter 42212. The ranging laser emitted by the interferometric ranging module 421 is focused into a parallel light signal by the first fiber collimating lens 42211 and then enters the beam splitter 42212. A portion of the ranging laser of the parallel light signal passes through the beam splitter 42212 and enters the cornerstone target sphere, and is reflected back into the beam splitter 42212. It forms an interference light signal with another portion of the ranging laser that passes through the beam splitter 42212 and enters the position sensing tracker 4222.

[0050] In this embodiment, the first fiber collimator 42211 is named only to distinguish it from the fiber collimators mentioned later, and is not intended to limit a specific fiber collimator.

[0051] The first fiber collimator 42211 can collimate light to the required diameter or spot size while reducing the divergence angle of the beam and ensuring that the light propagates in a parallel state.

[0052] Beam splitter 42212 can split the ranging laser emitted from the first fiber collimator 42211 into ranging lasers in different directions. One beam passes through beam splitter 42212 and enters the pyramidal target sphere, and is reflected back into beam splitter 42212. The other beam, as a reference beam, passes through beam splitter 42212 and interferes with the ranging laser reflected back into beam splitter 42212.

[0053] In some embodiments, as shown in FIG2, the lens assembly 4221 further includes a collimating lens group 42213, which is disposed between the first fiber collimating lens 42211 and the beam splitter 42212. The collimating lens group 42213 is used to expand the parallel light signal emitted from the first fiber collimating lens 42211 and then send it into the beam splitter 42212.

[0054] In this embodiment, the collimating lens group 42213 focuses the parallel light emitted from the first fiber collimating lens 42211 onto the beam splitter 42212 to further improve the measurement accuracy.

[0055] In some embodiments, the filter 4223 is a bandpass filter to selectively filter out light of non-target wavelengths, improving the monochromaticity and stability of the laser output and ensuring the normal operation of the laser within a specific wavelength range. In other embodiments, the bandpass filter is a narrowband filter to selectively transmit fiber wavelengths within a set wavelength range, thereby improving the purity and stability of the laser.

[0056] In some embodiments, as shown in FIG2, the interferometric ranging module 421 includes a helium-neon laser assembly 4211, a second fiber collimating lens 4212, a beam splitter 4213, a fiber reflector 4214, and a detector 4215; wherein, the second fiber collimating lens 4212 is disposed on the light-emitting side of the helium-neon laser assembly 4211, the beam splitter 4213 is disposed on the light-emitting side of the second fiber collimating lens 4212, and the fiber reflector 4214 and the detector 4215 are respectively disposed on the light-emitting side of the beam splitter 4213; the laser signal emitted by the helium-neon laser assembly 4211 is focused into a parallel light signal by the second fiber collimating lens 4212 and injected into the beam splitter 4215. After 213, a portion of the ranging laser beam enters the fiber optic reflector 4214, while another portion passes through the beam splitter 4213 and forms an interference signal with the ranging laser beam emitted into the beam splitter 4213 by the fiber optic reflector 4214. A portion of this ranging laser beam then enters the first fiber optic collimator 42211, and the other portion enters the detector 4215. The helium-neon laser assembly 4211 and the detector 4215 are electrically connected to the control device 6. The control device 6 controls the helium-neon laser assembly 4211 to turn on or off, and controls the helium-neon laser assembly 4211 to emit laser signals based on the electrical signal fed back after the detector 4215 detects the ranging laser beam.

[0057] In this embodiment, the name 4212 for the second fiber collimator is merely for the purpose of distinguishing it from the fiber collimators mentioned earlier and later, and is not intended to limit a specific fiber collimator.

[0058] The helium-neon laser assembly 4211 features high power output, narrow spectral linewidth, and long wavelength. The laser emitted from the helium-neon laser assembly 4211 is output as a parallel ranging laser beam through the second fiber collimating lens 4212. The ranging laser beam is split into two ranging laser beams by the beam splitter 4213. One ranging laser beam is reflected by the fiber reflector 4214 and then enters the beam splitter 4213. The other ranging laser beam passes through the beam splitter 4213 and interferes with the reflected ranging laser beam, and then enters the first fiber collimating lens 42211. The detector 4215 detects the ranging laser beam and feeds back the electrical signal corresponding to the intensity of the ranging laser beam entering the first fiber collimating lens 42211 in real time to the control device 6. The control device 6 then further adjusts the laser signal emitted by the helium-neon laser assembly 4211 based on the feedback electrical signal.

[0059] In this embodiment, the interferometric ranging module 421 can be combined with the target tracking module 422 to measure the relative distance value at the current moment.

[0060] In some embodiments, as shown in FIG2, the interferometric ranging module 421 further includes a first isolator 4216, which is disposed between the second fiber collimating lens 4212 and the beam splitter 4213, so that all the ranging laser emitted from the second fiber collimating lens 4212 enters the beam splitter 4213.

[0061] The name 4216 for the first isolator is merely for the purpose of distinguishing it from isolators mentioned in the preceding and following text, and is not intended to limit any particular isolator.

[0062] The first isolator 4216 can further restrict the direction of the ranging laser, so that the emitted ranging laser can only be transmitted in one direction to the beam splitter 4213 to reduce the energy loss of the ranging laser, and at the same time improve the light wave transmission efficiency by isolating reflected light.

[0063] In some embodiments, the helium-neon laser assembly 4211 includes a helium-neon laser, a switching circuit, a heating wire, and a temperature sensor.

[0064] The helium-neon laser, the switching circuit, and the temperature sensor are all electrically connected to the control device 6. The heating wire is wound around the outer side of the helium-neon laser and electrically connected to the switching circuit. The temperature sensor is attached to the outer side of the helium-neon laser to measure the temperature of the helium-neon laser in real time and send the temperature measurement result to the control device 6 as a temperature electrical signal.

[0065] The control device 6 is used to control the helium-neon laser to emit laser signals. During the laser signal emission process, it determines whether to use the heating wire to heat the helium-neon laser by controlling the switching circuit based on the electrical signal fed back by the detector 4215 and the temperature signal sent by the temperature sensor, so as to maintain the temperature of the helium-neon laser within a set range.

[0066] In this embodiment, the heating wire is used to heat the helium-neon laser. The control device 6 can determine whether to turn on the heating wire to heat the helium-neon laser based on the electrical signal fed back by the detector 4215, so that the temperature of the helium-neon laser is kept constant, thereby ensuring the performance of the helium-neon laser and the output of a stable laser signal.

[0067] In some embodiments, as shown in FIG2, the non-contact laser scanner 5 includes a scanning vision module 51 and a frequency-scanning absolute non-contact ranging module 52. Both the scanning vision module 51 and the frequency-scanning absolute non-contact ranging module 52 are electrically connected to the control device 6.

[0068] The scanning vision module 51 is used to capture the area to be measured in a panoramic manner and send the captured area to be measured to the control device 6.

[0069] The control device 6 is used to activate the scanning vision module 51 and the scanning frequency absolute non-contact ranging module 52 in the scanning measurement mode, so as to perform scanning path planning on the area to be measured to obtain a scanning path planning strategy, and send the scanning path planning strategy to the scanning vision module 51.

[0070] The frequency sweeping absolute non-contact ranging module 52 is used to measure the absolute distance between the surface to be measured 200 and the frequency sweeping absolute non-contact ranging module 52 during the scanning process, and send the absolute distance value to the control device 6.

[0071] The control device 6 is also used to control the two-dimensional angle measuring drive device 3 to drive the scanning vision module 51 to scan the area to be measured according to the scanning path planning strategy based on the absolute distance value, so as to adapt to scanning at different distances through the zoom lens.

[0072] In this embodiment, the zoom lens can adapt to scanning at different distances, automatically achieving precise laser scanning and obtaining more accurate point cloud data.

[0073] The scanning vision module 51 captures images of the area to be measured, enabling the control device 6 to determine the scanning path and plan the measurement based on the area. This allows the frequency-scanning absolute non-contact ranging module 52 to determine the absolute distance between the surface 200 to be measured and the module itself during the scanning process. Based on this absolute distance, the control device 3 controls the two-dimensional angle measurement drive 3 to drive the scanning vision module 51 to scan the area to be measured according to the scanning path planning strategy. By using a zoom lens to adapt to scanning at different distances, large-area non-contact scanning can be achieved quickly and accurately.

[0074] In some embodiments, as shown in FIG2, the sweep frequency absolute non-contact ranging module 52 includes an external cavity resonant laser 521, a measurement interferometer 522, a first coupler 523, an auxiliary interferometer 524, a third fiber collimating lens 525, and a ranging signal processing unit 526.

[0075] The first coupler 523 is placed on the light-emitting side of the external cavity resonant laser 521. The measurement interferometer 522 is provided on one light-emitting side of the first coupler 523, and the auxiliary interferometer 524 is provided on the other light-emitting side. The measurement interferometer 522 is electrically connected to the ranging signal processing unit 526. The third fiber collimator 525 is provided on the light-emitting side of the measurement interferometer 522, and the scanning vision module 51 is provided on the light-emitting side of the third fiber collimator 525. The ranging signal processing unit 526 is electrically connected to the control device 6.

[0076] The ranging signal processing unit 526 controls the external cavity resonant laser 521 to emit laser signals, so that the laser signals are split into two paths after being processed by the first coupler 523. One optical signal is injected into the measurement interferometer 522, processed by the measurement interferometer 522, and then emitted to the third fiber collimating lens 525 for focusing before being injected into the scanning vision module 51. The received optical signal from the scanning vision module 51 is subjected to measurement optical interference processing, and the processed measurement optical interference signal is sent to the ranging signal processing unit 526. The other optical signal enters the auxiliary interferometer 524 for clock interference processing, and the processed clock optical interference signal is injected into the ranging signal processing unit 526.

[0077] The ranging signal processing unit 526 is further configured to determine the absolute distance value based on the measurement light interference signal and the clock light interference signal, so as to adjust the frequency of the laser signal emitted by the external cavity resonant laser 521 according to the absolute distance value.

[0078] In this embodiment, the first coupler 523 is named only for the purpose of distinguishing it from the couplers mentioned later, and is not intended to limit a specific coupler.

[0079] The first coupler 523 can effectively isolate the laser signal input to the external cavity resonant laser 521 from the electrical signal output by the first coupler 523.

[0080] In this embodiment, the absolute distance between the surface to be measured 200 and the frequency sweep absolute non-contact ranging module 52 is measured by combining the measuring interferometer 522 and the auxiliary interferometer 524.

[0081] In some embodiments, as shown in FIG2, the sweep frequency absolute non-contact ranging module 52 further includes a second isolator 527, which is disposed between the external cavity resonant laser 521 and the first coupler 523.

[0082] In this embodiment, the name 527 is used only to distinguish it from the isolators mentioned in the preceding and following text, and is not intended to limit a specific isolator.

[0083] The second isolator 527 can transmit the ranging laser from the first coupler 523 bidirectionally.

[0084] In other embodiments, the scanning vision module 51 includes a fourth fiber collimating lens 511, a zoom lens group 512, and a zoom lens 513; the zoom lens 513, the zoom lens group 512, and the fourth fiber collimating lens 511 are arranged sequentially according to the light signal input and output, the fourth fiber collimating lens 511 is close to the side of the first fiber collimating lens 42211, and the zoom lens group 512 is mounted on the two-dimensional angle measuring drive device 3 so that the two-dimensional angle measuring drive device 3 drives the zoom lens group 512 to achieve focal length.

[0085] In this embodiment, the fourth fiber collimator 511 is named only to distinguish it from the fiber collimators mentioned in the preceding and following text, and is not intended to limit a specific fiber collimator.

[0086] In practical applications, the laser signal from the first fiber collimating lens 42211 is processed by the fourth fiber collimating lens 511 and then emitted as a parallel ranging laser. The ranging laser is emitted into the zoom lens group 512. Under the drive of the two-dimensional angle measuring drive device 3, the distance between the zoom lens group 512 and the zoom lens 513 is changed. Thus, the optimal focal length can be adjusted according to the distance between the surface to be measured 200 and the zoom lens 513, thereby improving the ranging accuracy.

[0087] In some embodiments, as shown in FIG2, the measurement interferometer 522 includes a first balance detector 5221, a second coupler 5222, a first 3dB coupler 5223, and a circulator 5224. The input port of the second coupler 5222 is located at the output port of the first coupler 523. The first output port of the second coupler 5222 is located at the first input port of the first 3dB coupler 5223. The second output port of the second coupler 5222 is located at the first input port of the circulator 5224. The first output port of the circulator 5224 is aligned with the third fiber collimating lens 525. The second input port of the circulator 5224 receives the laser signal emitted by the third fiber collimating lens 525. The second output port of the circulator 5224 is located at the second input port of the first 3dB coupler 5223. The output port of the first 3dB coupler 5223 is located at the first balanced detector 5221. The first balanced detector 5221 is electrically connected to the ranging signal processing unit 526 to send a measurement light interference signal to the ranging signal processing unit 526.

[0088] In this embodiment, the name "second coupler 5222" is merely for ease of differentiation from couplers mentioned earlier and later, and is not intended to define a specific coupler. Similarly, the name "first output port" is merely for ease of differentiation from output ports mentioned later, and is not intended to define a specific output port. Likewise, the name "second output port" is merely for ease of differentiation from output ports mentioned later, and is not intended to define a specific output port. The name "first 3dB coupler 5223" is merely for ease of differentiation from 3dB couplers mentioned later, and is not intended to define a specific 3dB coupler.

[0089] The circulator 5224 amplifies the ranging laser emitted from the second coupler 5222 and then directs it through another fiber port into the third fiber collimator 525. Simultaneously, it combines the ranging laser emitted from the third fiber collimator 525 with the ranging laser emitted from the second coupler 5222 within the circulator 5224, forming an interference signal that is input to the first 3dB coupler 5223. Furthermore, the circulator 5224 can also increase the isolation between disconnected ports before inputting the signal to the first 3dB coupler 5223.

[0090] In some embodiments, the auxiliary interferometer 524 includes a third coupler 5241, a second 3dB coupler 5242, a second balanced detector 5243, and an optical interferometer 5244. The input port of the third coupler 5241 is located at the first output port of the first coupler 523. The output port of the third coupler 5241 is connected to the input port of the second 3dB coupler 5242 via the optical interferometer 5244. The output port of the second 3dB coupler 5242 is located at the input port of the second balanced detector 5243. The second balanced detector 5243 is electrically connected to the ranging signal processing unit 526 to send a clock light interference signal to the ranging signal processing unit 526.

[0091] In this embodiment, the third coupler 5241 is named simply to distinguish it from the couplers mentioned earlier, and is not intended to limit any particular coupler. The second 3dB coupler 5242 is named simply to distinguish it from the 3dB coupler mentioned earlier, and is not intended to limit any particular 3dB coupler. The second balanced detector 5243 is named simply to distinguish it from the balanced detector mentioned earlier, and is not intended to limit any particular balanced detector.

[0092] The second balanced detector 5243 can perform noise reduction processing on the ranging laser output by the second 3dB coupler 5242, thereby improving the sensitivity of the ranging laser.

[0093] In some embodiments, the optical interferometer 5244 can be an MZ (Mach-Zenhder) interferometer to improve measurement accuracy.

[0094] In some embodiments, as shown in FIG2, the tracking scanning measurement system further includes an optical fiber switch. The optical fiber switch connects the sweep frequency absolute non-contact ranging module 52 and the interferometric ranging module 421, and is electrically connected to the control device 6. The control device 6 is used to control the optical fiber switch to connect the sweep frequency absolute non-contact ranging module 52 and the target tracking module 422 after the ranging laser emitted by the interferometric ranging module 421 to the tracking cooperative target 41 is blocked and the light is cut off in the tracking coordinate measurement mode. The control device 6 measures the initial absolute distance from the tracking cooperative target 41 to the sweep frequency absolute non-contact ranging module 52 after the light is cut off and resumed. The control device 6 uses the initial absolute distance to correct the relative distance between the tracking cooperative target and the lens assembly of the target tracking module 422 in the target coordinate system after the light is cut off and resumed.

[0095] In some embodiments, the scanner housing 21 includes a control box and a scanner integrated housing. The control box houses an auxiliary interferometer 524, a temperature sensor, and a control device 6. The remaining components of the contact laser tracker 4, excluding the temperature sensor, and the remaining components of the non-contact scanner 5, excluding the auxiliary interferometer 524, are all installed in the scanner integrated housing. The scanner integrated housing is mounted on the support frame 1.

[0096] In some embodiments, as shown in Figures 2 and 6, the tracking scanning measurement system further includes a constant temperature chamber 7; the constant temperature chamber 7 houses the auxiliary interferometer 524 for maintaining its temperature. Since the auxiliary interferometer 524 requires temperature control and insulation, and its installation is limited by the size of the scanner integrated housing, the auxiliary interferometer 524 and its constant temperature chamber 7 in the sweep frequency absolute non-contact ranging module 52 are installed inside a control box.

[0097] In some embodiments, as shown in FIG4, the constant temperature chamber 7 includes an internal fiber optic mounting box 71, a fiber optic connector 72, an internal insulation box 73, an internal temperature control board 74, an external metal box 75, an external temperature control board 76, an outer insulation cover 77, and a bottom heat dissipation connector 78; the internal fiber optic mounting box 71 is provided with a fiber optic connector 72 for connecting fiber optics and a fiber optic winding member for winding fiber optics; the bottom of the internal insulation box 73 is provided with a mounting hole for placing the internal temperature control board 74; the bottom of the external metal box 75 is provided with a mounting hole for placing the external temperature control board 76. An auxiliary interferometer 524 is placed inside the internal fiber optic mounting box 71, which is located within an internal insulating box 73. An internal temperature control plate 74 is installed in the mounting hole at the bottom of the internal insulating box 73 and is housed within an external metal box 75. The external metal box 75 is installed within an outer insulation cover 77, and an external temperature control plate 76 is installed in the mounting hole at the bottom of the outer insulation box. A bottom heat dissipation connector 78 is installed at the bottom of the outer insulation cover 77 and contacts the external temperature control plate 76. This allows the heat from the internal fiber optic mounting box 71 to be directed to the bottom heat dissipation connector 78 via the external metal box 75, using the internal temperature control plate 74 and the external temperature control plate 76. The outer insulation cover 77 closes to the internal fiber optic mounting box 71, and the bottom heat dissipation connector 78 is adhered to the outer end face of the outer insulation cover 77, sealing it together with the outer insulation cover 77 within the internal fiber optic mounting box 71. In this embodiment, an auxiliary interferometer 524 is mounted in an internal fiber optic mounting box 71. An internal insulating box 73 provides initial temperature control for the auxiliary interferometer 524, and a fine temperature control is achieved through an internal temperature control plate 74 installed at the bottom of the internal insulating box 73. Preliminary temperature control is achieved through an external metal box 75 combined with an external temperature control plate 76, and insulation control is achieved through the internal insulating box 73. The internal temperature control plate 74 can be a TEC (Thermo Electric Cooler) semiconductor cooler, the external temperature control plate 76 can be a TEC semiconductor cooler, and the external metal box 75 can be made of brass.

[0098] In some embodiments, as shown in FIG4, the outer heat-insulating cover 77 includes: an optical fiber metal box cover 771, heat insulation cotton 772, a metal plate 773, and an outer top insulating cover 774; wherein, the optical fiber metal box cover 771, the heat insulation cotton 772, the metal plate 773, and the outer top insulating cover 774 are sequentially bonded to form an integral cover structure, and the optical fiber metal box cover 771 is placed inside the inner insulating box 73 with the optical fiber mounting box 71 close to the inner optical fiber mounting box 71. The technical solution provided in this embodiment further provides heat insulation for the auxiliary interferometer 524. As an example, the metal box is made of brass.

[0099] In some embodiments, as shown in FIG5, the visual tracking module 423 includes: a telephoto objective lens 4231, a telephoto objective lens retaining ring 4232, a telephoto lens group 4233, an inner lens barrel 4234, a relay lens 4235, an imaging lens group 4236, an outer lens barrel 4237, and an imaging CCD (Charge-coupled Device) lens group 4238; wherein, the inner lens barrel 4234 has protrusions arranged at specified intervals for mounting the telephoto lens group 4233, the relay lens 4235, and the imaging lens group 4236; the outer side of the outer lens barrel 4237 has a groove for securely mounting in the scanner integrated housing; the telephoto objective lens 4231 is disposed within the telephoto objective lens retaining ring 4232, and the telephoto objective lens retaining ring 4232 is sleeved on the inner lens barrel. The assembly comprises a telescope group 4233, a relay lens 4235, and an imaging lens group 4236 sequentially mounted on each protrusion of the inner endoscope tube 4234. The telescope group 4233 is located close to the telephoto objective lens retaining ring 4232. An outer endoscope tube 4237 is sleeved on the outside of the inner endoscope tube 4234. An imaging CCD lens group 4238 is mounted on the end of the outer endoscope tube 4237 away from the telephoto objective lens 4231 and is installed in the scanner integrated housing through the groove. In this embodiment, the relay lens 4235 amplifies and relays the light signal from the telescope group 4233 to expand the coverage area, enhance signal quality, and reduce transmission delay.

[0100] In some other embodiments, as shown in FIG6, the two-dimensional angle measuring drive device 3 includes a horizontal rotation drive mechanism 31, a horizontal rotation shaft 32, a pitch rotation drive mechanism 33, a pitch rotation shaft 34, and a pitch rotation support frame 35.

[0101] The horizontal rotation drive mechanism 31 is installed inside the control housing 22. The output end of the horizontal rotation drive mechanism 31 is connected to the horizontal rotation shaft 32. The actuating end of the horizontal rotation shaft 32 is equipped with the pitch rotation support frame 35. The scanner housing 21 is installed on the pitch rotation support frame 35 so as to drive the scanner housing 21 to achieve the horizontal rotation movement. The input end of the horizontal rotation drive mechanism 31 is electrically connected to the control device 6 so as to drive the horizontal rotation shaft 32 to rotate under the control of the control device 6.

[0102] The output end of the pitch rotation drive mechanism 33 is equipped with the pitch rotation shaft 34 and is mounted on the pitch rotation support frame 35. The scanner housing 21 is mounted on the pitch rotation support frame 35. The input end of the pitch rotation drive mechanism 33 is connected to the control device 6 so that, under the control of the control device 6, the pitch rotation shaft 34 is driven to rotate, thereby driving the scanner housing 21 to achieve the pitch rotation movement.

[0103] In this embodiment, the control device 6 drives the horizontal rotation shaft 32 to rotate through the horizontal rotation drive mechanism 31. The horizontal rotation shaft 32 drives the scanner housing 21 on the pitch rotation support frame 35 to achieve horizontal rotation, thereby driving the contact laser tracker 4 and the non-contact laser scanner 5 inside the scanner housing 21 to achieve horizontal rotation.

[0104] The control device 6 drives the pitch rotation shaft 34 to rotate through the pitch rotation drive mechanism 33, thereby enabling the contact laser tracker 4 and the non-contact laser scanner 5 installed in the scanner housing 21 on the pitch rotation support frame 35 to achieve pitch rotation movement.

[0105] As can be seen, the technical solution provided in this embodiment can achieve high-precision rotation of the pitch axis and horizontal axis, and ensure that the measurement optical center is concentric with the measurement components installed at the intersection of the horizontal rotation axis 32 and the pitch rotation axis 34, thus achieving high-precision measurement results.

[0106] In some embodiments, as shown in Figures 6 and 7, the pitch rotation drive mechanism 33 includes a pitch motor rotor 331, a pitch motor stator 332, a pitch circular grating assembly 333, a first angular contact bearing 334, a second angular contact bearing 335, a motor mounting base, a clamping adjustment ring 336, a pressure cover 337, a limiting mounting plate 338, a bearing preload ring, and a mounting cover 339.

[0107] The first angular contact bearing 334 is mounted on one side of the pitch rotation shaft 34. The pitch circular grating assembly 333 is mounted on the first angular contact bearing 334 and the pitch rotation shaft 34 to measure the pitch rotation angle of the pitch rotation shaft. A bearing preload ring is fitted onto the other side of the pitch rotation shaft, which is then connected to a second angular contact bearing 335. The second angular contact bearing 335 is mounted on a motor mounting base. The motor mounting base is mounted on the pitch motor rotor. The pitch motor rotor is mounted on the pitch motor stator 332 and fitted onto the end of the pitch rotation shaft. The pressure cap 337 is mounted on the motor mounting base to press the pitch motor stator 332 against it. The motor mounting base is installed on the pitch rotation support frame 35. The bearing preload ring is sleeved on the pitch rotation shaft 34 and presses against the second angular contact bearing 335. The clamping adjustment ring 336 is sleeved on the pitch rotation shaft 34 and clamped inside the pitch motor rotor. The limiting mounting plate 338 is limited and set at the end of the pitch rotation shaft 34. The two mounting covers 339 cover the pitch motor rotor, the pitch motor stator 332, the pitch circular grating assembly 333, the first angular contact bearing 334, the second angular contact bearing 335, the motor mounting base, the clamping adjustment ring 336, and the limiting mounting plate 338, and then install them on the pitch rotation support frame 35.

[0108] In this embodiment, the first angular contact bearing 334 is named for ease of distinction from the angular contact bearings mentioned earlier and later, and is not intended to limit any particular angular contact bearing. Similarly, the second angular contact bearing 335 is named for ease of distinction from the angular contact bearings mentioned earlier and later, and is not intended to limit any particular angular contact bearing.

[0109] As one embodiment, the pitch circular grating assembly 333 includes a pitch circular grating mounting base 3331, a pitch circular grating reading head 3332, and a pitch circular grating. The pitch circular grating mounting base 3331 is mounted on the pitch rotation axis 34, and the pitch circular grating is mounted on the pitch circular grating mounting base 3331. The pitch circular grating reading head 3332 is mounted on the first angular contact bearing 334 to read the rotation angle of the pitch rotation axis 34.

[0110] To achieve high-precision rotation, a dual high-precision dual-contact bearing system is adopted, namely a first angular contact bearing 334 and a second angular contact bearing 335, which are mounted on the pitch axis mounting base. The pitch rotation axis needs to be designed with a bearing diameter at one end larger than the mounting diameter at the other end to facilitate through-type installation. At the same time, a small preload is used to improve accuracy. Both the first angular contact bearing 334 and the second angular contact bearing 335 must be high-precision bearings, and the radial and axial runout of the inner circle must be controlled within the set accuracy range, such as 2.5μm. A pitch circular grating mounting base 3331 is installed on one side of the pitch rotation axis 34 to support and fix the pitch circular grating. The pitch circular grating is mounted on the circular grating mounting base 3152. The coaxiality of the mounting is ensured by precision machining of the circular grating mounting base 3152. The pitch circular grating reading head 3332 on this side is installed at the end of the pitch rotation axis 34 to realize the measurement of angle. A bearing preload ring is installed on the other side of the pitch rotation axis 34. The bearing preload ring can be adjusted by adjusting the outer clamping adjustment ring 336. The first angular contact bearing 334 enables clearance adjustment. The pitch motor rotor is mounted on the pitch rotation shaft 34, and the pitch motor stator 332 is mounted on the motor mounting base and fixed by the pressure cover 337. The two work together to achieve the motor drive function. The limit mounting plate 338 is mounted on one end of the pitch rotation shaft 34 to achieve the function of limiting the rotation angle. In addition, the space requirements for wiring, direct drive torque motor installation, and circular grating installation must also be considered. After installation, the mounting cover is used for protection.

[0111] In some embodiments, as shown in Figures 6 and 8, the horizontal rotary drive mechanism 31 includes a third angular contact bearing 311, a fourth angular contact bearing 312, an intermediate main support 313, a bearing pressure ring 314, a horizontal circular grating measuring assembly 315, a horizontal motor stator 316, and a horizontal motor rotor 317.

[0112] The horizontal rotating shaft is fitted with the horizontal motor rotor 317, which is installed inside the horizontal motor stator 316. A horizontal circular grating measuring component 315 for measuring the rotation angle of the horizontal rotating shaft is also installed at a set position on the horizontal rotating shaft. The horizontal circular grating measuring component 315 is close to the horizontal motor rotor 317 and connected to the horizontal motor stator 316. The third angular contact bearing 311 and the fourth angular contact bearing 312 are sequentially fitted onto the horizontal rotating shaft 32, separated by the intermediate main support 313. The horizontal circular grating measuring assembly 315, the horizontal motor stator 316, and the horizontal motor rotor 317 are installed in the intermediate main support 313. The bearing pressure ring 314 is sleeved on the horizontal rotary shaft in a manner close to the horizontal motor stator 316 and pressing against the third angular contact bearing 311. The horizontal motor stator 316 is electrically connected to the control device 6 so that, under the control of the control device 6, the horizontal rotary shaft is driven to rotate by the horizontal motor rotor 317. The pitch rotation support frame 35 is installed at the actuating end of the horizontal rotary shaft.

[0113] In this embodiment, the name 311 for the purpose of distinguishing it from the angular contact bearings mentioned earlier is not intended to limit any particular angular contact bearing. Similarly, the name 312 for the purpose of distinguishing it from the angular contact bearings mentioned earlier is not intended to limit any particular angular contact bearing.

[0114] The bearing pressure ring 314 is sleeved on the horizontal rotating shaft and installed in the third angular contact bearing 311. It can adjust the clamping force and play a positioning role for the horizontal motor stator 316, the horizontal motor rotor 317 and the horizontal circular grating measuring assembly 315.

[0115] As one embodiment, the horizontal circular grating measurement assembly 315 includes a horizontal circular grating reading head 3151, a horizontal circular grating, a reading head mounting base, and a circular grating mounting base 3152. The circular grating mounting base is sleeved and installed on the horizontal rotating shaft, the horizontal circular grating is installed on the circular grating mounting base, the reading head mounting base is installed on the fourth angular contact bearing 312, and the horizontal circular grating reading head 3151 is installed on the reading head mounting base. When the horizontal rotating shaft 32 rotates, it drives the horizontal circular grating to rotate. At this time, the angle of rotation of the horizontal rotating shaft can be read through the horizontal circular grating reading head 3151. In this embodiment, to ensure convenient assembly and disassembly of the motor circular grating assembly, the horizontal motor rotor 317 and the horizontal circular grating measuring assembly 315 are installed below the horizontal rotation shaft. The horizontal motor rotor 317 achieves horizontal drive function through cooperation with the horizontal motor stator 316. The circular grating is fixedly mounted on a circular grating mounting base at the bottom of the horizontal rotation shaft. Precision machining of the circular grating mounting base 3152 ensures the coaxial accuracy of the rotation. To achieve high-precision horizontal angle measurement, a circular grating is also required as an angle sensor, and eccentricity correction is performed using the horizontal circular grating reading head 3151. As an example, the selected horizontal circular grating meets the angle measurement requirement of ±0.8" and has a reference position signal trigger reading function to correct the influence of eccentricity.

[0116] In this embodiment, the horizontal rotary shaft is sleeved on the third angular contact bearing 311 and the fourth angular contact bearing 312, and can rotate independently relative to the third angular contact bearing 311 and the fourth angular contact bearing 312. The scanner housing 21 is installed on the pitch rotation support frame 35. While the horizontal rotary shaft rotates, it drives the scanner housing 21 to rotate through the pitch rotation support frame 35, thereby realizing horizontal rotary motion and pitch rotary motion.

[0117] In another embodiment, the horizontal rotary shaft has a hollow structure, and the horizontal rotary drive mechanism 31 also includes a wiring trough cover and a wiring cover. The wiring trough cover is disposed on the outside of the horizontal motor rotor 317 and fits against the end of the bearing support, and is away from the scanner housing 21. The wiring cover is fitted onto the end of the horizontal rotary shaft and is close to the scanner housing 21, so that the electronic component circuits can be routed through the wiring cover and the wiring trough cover.

[0118] In another embodiment, the horizontal rotary drive mechanism 31 further includes a horizontal guide 318. The horizontal guide 318 is a hollow shell structure. Multiple rolling elements are provided at the protrusions extending outward from the outer edge of the shell structure. The shell structure is sleeved on the horizontal rotary shaft, and the rolling elements press tightly against the outside of the intermediate main support 313, allowing it to rotate independently relative to the intermediate main support 313 under the drive of the horizontal rotary shaft. In this embodiment, the horizontal guide 318 can guide the horizontal rotary shaft to rotate independently relative to the intermediate main support 313.

[0119] In this embodiment, to reasonably reduce the weight of the components, the horizontal rotary shaft 32 adopts a hollow design; the horizontal circular grating reading head 3151, the horizontal motor stator 316, and the horizontal guide 318 are installed on the intermediate main support 313 to ensure that the rotary shaft rotates while the related components are fixed; to ensure the accuracy of the horizontal rotary shaft, a combination installation scheme of the top third angular contact bearing 311 and the fourth angular contact bearing 312 is adopted, and the bearing rigidity is increased by pre-tightening the bearing pressure ring 314 installed on the horizontal rotary shaft.

[0120] As an example, the horizontal rotation drive mechanism 31 also includes two protective covers 319, which are mounted on the pitch rotation support frame 35 to protect the horizontal rotation drive mechanism 31 and the cables.

[0121] As shown in Figure 8, the horizontal circular grating reading head 3151 is installed at the bottom of the intermediate main support 313 to realize the horizontal reading angle measurement function; the horizontal guide 318 is installed at the top of the horizontal rotary shaft 32, and realizes the guiding function by moving along the arc groove on the intermediate main support 313; in order to realize the wiring of this tracking scanning measurement system, facilitate the use of slip rings by winding the cable, and improve the communication quality, the top is designed with a cable winding space composed of two protective covers. The cable is connected to the relevant circuit at the bottom through the pitch axis mounting base and the reserved hole of the intermediate support base; a cable routing cover is installed at the bottom to protect the cables of the bottom motor, circular grating and other components; the pitch axis mounting base is installed at the top of the horizontal rotary shaft to install the pitch angle drive measurement component, and a cable routing cover is installed below it for disassembly and assembly of the cable. The pitch axis mounting base and the intermediate main support 313 are both made of hard aluminum material, which is tempered and then rough machined, and then precision machined after natural failure to ensure the stability of the structure; finally, the coaxial accuracy is ensured by the grinding process.

[0122] Therefore, the tracking scanning measurement system provided in this embodiment of the invention includes a support frame 1, a mounting housing 2, a two-dimensional angle measuring drive device 3, a contact laser tracker 4, a non-contact laser scanner 5, and a control device 6. The two-dimensional angle measuring drive device 3 is installed in the mounting housing 2 on the support frame 1, and the tracking scanning device 42 of the contact laser tracker 4 is disposed in the mounting housing 2. During measurement, the tracking cooperative target 41 moves on the surface to be measured 200 according to a set movement strategy in a measurement mode that contacts the surface to be measured 200. The tracking scanning device 42 of the contact laser tracker 4 tracks the cooperative target 41 and obtains the surface to be measured 200 in the target coordinate system in real time. Coordinate data; The non-contact laser scanner 5 is installed inside the mounting housing 2. During measurement, the laser is activated to scan the surface 200 to be measured according to a specified scanning strategy, and the scanned point cloud data of the surface 200 to be measured in the target coordinate system is acquired in real time. In the tracking coordinate measurement mode, the control device 6 activates the tracking cooperative target 41 to track the scanning device, and drives the tracking scanning device 42 to track the tracking cooperative target 41 in real time to acquire coordinate data by controlling the two-dimensional angle measuring drive device 3. In the scanning measurement mode, the non-contact laser scanner 5 is activated, and the non-contact laser scanner 5 scans the surface 200 to be measured to acquire scanned point cloud data by controlling the two-dimensional angle measuring drive device 3. It can be seen that this embodiment can integrate the contact laser tracker 4 and the non-contact laser scanner 5 into the same device and can acquire point cloud data in the same coordinate system. In the later stage, the point cloud data can be directly processed for three-dimensional modeling without the need for coordinate transformation as in the prior art. It can be seen that the technical solution provided by this embodiment can achieve fast, complete and high-precision scanning and tracking measurement with a single instrument, which significantly improves the detection efficiency.

[0123] This invention also provides a tracking scan measurement platform, as shown in FIG9. The tracking scan measurement platform includes the tracking scan measurement system 100 described in any of the above embodiments and a computing processing device 300. The computing processing device 300 is connected to the tracking scan measurement system to acquire coordinate data and scanned point cloud data from the tracking scan measurement system. The computing processing device can build a 3D model based on the coordinate data and scanned point cloud data, which can significantly improve modeling efficiency.

[0124] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A tracking scanning measurement system, characterized by, include: A contact laser tracker includes a tracking cooperative target and a tracking scanning device. The tracking cooperative target is used to move on the surface to be measured in a manner that makes contact with the surface to be measured according to a set movement strategy. The tracking scanning device is used to acquire, in real time, the coordinate data of the contact point between the tracking cooperative target and the surface to be measured in the target coordinate system by tracking the tracking cooperative target. A non-contact laser scanner is used to scan the surface to be measured according to a set scanning strategy and acquire the scanned point cloud data of the surface to be measured in the target coordinate system in real time. A two-dimensional angle measurement drive device is used to drive the contact laser tracker and the non-contact laser scanner; The control device is connected to the contact laser tracker, the non-contact laser scanner, and the two-dimensional angle measurement drive device. In the tracking coordinate measurement mode, it controls the two-dimensional angle measurement drive device to drive the tracking scanning device to track the tracking cooperative target in real time to obtain the coordinate data. In the scanning measurement mode, it controls the two-dimensional angle measurement drive device to drive the non-contact laser scanner to scan the surface to be measured to obtain the scanned point cloud data.

2. The tracking scanning measurement system of claim 1, wherein, The tracking and scanning device includes: an interferometric ranging module, a target tracking module, and a visual tracking module; The control device is used to determine the position information of the tracking cooperative target based on the captured image fed back by the visual tracking module in the tracking coordinate measurement mode, and send the position information of the tracking cooperative target to the two-dimensional angle measuring drive device, so as to control the two-dimensional angle measuring drive device to drive the interferometric ranging module to move according to the position information of the tracking cooperative target, so that the ranging laser emitted by the interferometric ranging module enters the tracking cooperative target through the target tracking module, and during the movement of the tracking cooperative target, the incoming ranging laser is reflected back to the target tracking module after passing through the tracking cooperative target; The target tracking module is used to measure the relative distance between the tracking cooperative target and the target tracking module at the current moment and the position offset value relative to the previous moment in the target coordinate system according to the received ranging laser, and send the relative distance value and the position offset value at the current moment to the control device. The control device is also used to control the two-dimensional angle measuring drive device to drive the target tracking module to adaptively adjust the horizontal angle and pitch angle according to the position offset value, so as to realize the tracking measurement of the cooperative target by adjusting the position offset value, obtain the horizontal angle value and pitch angle value measured by the two-dimensional angle measuring drive device, and determine the coordinate data based on the relative distance value at different times, the horizontal angle value and the pitch angle value.

3. The tracking scanning measurement system according to claim 2, characterized in that, The target tracking module includes: a lens assembly and a position sensing tracker; The lens assembly is disposed on the light-incident side of the position sensor tracker. The lens assembly performs optical signal processing on the ranging laser emitted from the interferometric ranging module, so that a portion of the processed ranging laser enters the tracking cooperative target and is reflected to the lens assembly, forming an interference signal with another portion of the ranging laser after passing through the lens assembly and entering the position sensor tracker. The position sensor tracker is used to measure the position of the spot formed by the incident ranging laser, determine the position offset value between the tracking cooperative target and the lens assembly in the target coordinate system at the current time relative to the previous time, and send the position offset value to the control device. The control device is used to adaptively adjust the horizontal and pitch angles according to the relative distance value and the position offset value, so as to achieve tracking measurement of the tracking cooperative target by adjusting the position offset value, obtain the horizontal and pitch angle values ​​measured by the two-dimensional angle measurement drive device, and determine the coordinate data based on the relative distance value, the horizontal angle value and the pitch angle value at different times.

4. The tracking scanning measurement system according to claim 3, characterized in that, The lens assembly includes: a first fiber collimating lens, a beam splitter, and a collimating lens group; The ranging laser emitted by the interferometric ranging module is focused into a parallel light signal by the first fiber collimating lens and then enters the beam splitter. A portion of the ranging laser light signal passes through the beam splitter and enters the tracking cooperative target, and is reflected back into the beam splitter. It then forms an interferometric light signal with the other portion of the ranging laser light that passes through the beam splitter and enters the position sensing tracker. The collimating lens group is disposed between the first fiber collimating lens and the beam splitter. The collimating lens group is used to expand the parallel light signal emitted from the first fiber collimating lens and then send it into the beam splitter.

5. The tracking scanning measurement system according to claim 4, characterized in that, The interferometric ranging module includes a helium-neon laser assembly, a second fiber collimator, a beam splitter, a fiber reflector, and a detector; The second fiber collimating lens is disposed on the light-emitting side of the helium-neon laser assembly, the beam splitter is disposed on the light-emitting side of the second fiber collimating lens, and the fiber reflector and the detector are respectively disposed on the light-emitting side of the beam splitter. The laser signal emitted by the helium-neon laser assembly is focused into a parallel light signal by the second fiber collimating lens and then enters the beam splitter. A portion of the ranging laser then enters the fiber reflector, and the other portion passes through the beam splitter and forms an interference signal with the ranging laser emitted into the beam splitter by the fiber reflector. A portion of the ranging laser then enters the first fiber collimating lens, and the other portion enters the detector. The control device is used to control the helium-neon laser assembly to turn on or off, and to control the helium-neon laser assembly to emit laser signals by using the electrical signal fed back after the detector detects the ranging laser.

6. The tracking scanning measurement system according to claim 5, characterized in that, The helium-neon laser assembly includes: a helium-neon laser, a switching circuit, a heating wire, and a temperature sensor; The heating wire is wound around the outer side of the helium-neon laser and electrically connected to the switching circuit. The temperature sensor is attached to the outer side of the helium-neon laser to measure the temperature of the helium-neon laser in real time and send the temperature measurement result to the control device as a temperature electrical signal. The control device is used to control the helium-neon laser to emit laser signals. During the laser signal emission process, it determines whether to use the heating wire to heat the helium-neon laser by controlling the switching circuit based on the electrical signal fed back by the detector and the temperature electrical signal sent by the temperature sensor, so as to maintain the temperature of the helium-neon laser within a set range.

7. The tracking scanning measurement system according to any one of claims 4-6, characterized in that, The non-contact laser scanner includes: a scanning vision module and a scanning frequency absolute non-contact ranging module; The scanning vision module is used to capture the area to be measured in a panoramic manner and send the captured area to be measured to the control device; The control device is used to control the scanning vision module and the frequency sweeping absolute non-contact ranging module to perform scanning path planning on the area to be measured in the scanning measurement mode to obtain a scanning path planning strategy, and to send the scanning path planning strategy to the frequency sweeping absolute non-contact ranging module. The frequency sweeping absolute non-contact ranging module is used to measure the absolute distance between the surface to be measured and the frequency sweeping absolute non-contact ranging module during the scanning process, and send the absolute distance value to the control device. The control device is also used to control the two-dimensional angle measurement drive device to drive the scanning vision module to scan the area to be measured according to the scanning path planning strategy based on the absolute distance value, so as to concentrate light energy through zoom to adapt to scanning at different distances.

8. The tracking scanning measurement system according to claim 7, characterized in that, The sweep frequency absolute non-contact ranging module includes an external cavity resonant laser, a measurement interferometer, a first coupler, an auxiliary interferometer, a third fiber collimating lens, and a ranging signal processing unit. The first coupler is placed on the light-emitting side of the external cavity resonant laser. The first coupler has the measurement interferometer on one light-emitting side and the auxiliary interferometer on the other light-emitting side. The measurement interferometer is electrically connected to the ranging signal processing unit. The third fiber collimator is provided on the light-emitting side of the measurement interferometer. The sweep frequency absolute non-contact ranging module is provided on the light-emitting side of the third fiber collimator. The ranging signal processing unit controls the external cavity resonant laser to emit a laser signal, which is then split into two paths after being processed by the first coupler. One optical signal is injected into the measurement interferometer, processed by the measurement interferometer, and then emitted to the third fiber collimating lens for focusing before being injected into the sweep frequency absolute non-contact ranging module. The received optical signal from the sweep frequency absolute non-contact ranging module is subjected to measurement optical interference processing, and the processed measurement optical interference signal is sent to the ranging signal processing unit. The other optical signal enters the auxiliary interferometer for clock interference processing, and the processed clock optical interference signal is injected into the ranging signal processing unit. The ranging signal processing unit is further configured to determine the absolute distance value based on the measurement light interference signal and the clock light interference signal, so as to adjust the frequency of the laser signal emitted by the external cavity resonant laser according to the absolute distance value.

9. The tracking scanning measurement system according to claim 8, characterized in that, The measurement interferometer includes a first balanced detector, a second coupler, a first 3dB coupler, and a circulator; The input port of the second coupler is located at the output port of the first coupler, the first output port of the second coupler is located at the first input port of the first 3dB coupler, the second output port of the second coupler is located at the first input port of the circulator, the first output port of the circulator is aligned with the third fiber collimator, the second input port of the circulator receives the laser signal emitted by the third fiber collimator, the second output port of the circulator is located at the second input port of the 3dB coupler, the output port of the first 3dB coupler is located at the first balanced detector, and the first balanced detector is electrically connected to the ranging signal processing unit to send a measurement light interference signal to the ranging signal processing unit.

10. The tracking scanning measurement system according to claim 8, characterized in that, The auxiliary interferometer includes a third coupler, a second 3dB coupler, a second balanced detector, and an optical interferometer; The light input port of the third coupler is located at the first light output port of the first coupler. The light output port of the third coupler is located at the light input port of the second 3dB coupler via the optical interferometer. The light output port of the second 3dB coupler is located at the light input port of the second balanced detector. The second balanced detector is electrically connected to the ranging signal processing unit to send a clock light interference signal to the ranging signal processing unit.

11. The tracking scanning measurement system according to claim 8, characterized in that, The tracking and scanning measurement system also includes a constant temperature chamber, on which the auxiliary interferometer is installed to maintain the temperature of the auxiliary interferometer; The constant temperature chamber includes an internal fiber optic mounting box, a fiber optic connector, an internal insulation box, an internal temperature control board, an external metal box, an external temperature control board, an outer insulation cover, and a bottom heat dissipation connector. The internal fiber optic mounting box is equipped with a fiber optic connector for connecting optical fibers and a fiber optic winding component for winding optical fibers. The bottom of the internal insulation box has a through-hole for placing the internal temperature control board, and the bottom of the external metal box has a through-hole for placing the external temperature control board. The auxiliary interferometer is placed inside the internal fiber optic mounting box, which is located inside the internal insulating box. The internal temperature control plate is installed in the mounting hole at the bottom of the internal insulating box and is located inside the external metal box. The external metal box is installed inside the outer insulation cover. The external temperature control plate is installed in the mounting hole at the bottom of the outer insulation box. The bottom heat dissipation connector is installed at the bottom of the outer insulation cover and is used to contact the external temperature control plate. The heat inside the internal fiber optic mounting box is guided to the bottom heat dissipation connector for heat dissipation by means of the external metal box, the internal temperature control plate, and the external temperature control plate. The outer insulation cover is fitted inside the inner fiber optic mounting box, and the bottom heat dissipation connector is attached to the outer end face of the outer insulation cover and sealed together with the outer insulation cover inside the inner fiber optic mounting box.

12. The tracking scanning measurement system according to claim 7, characterized in that, The scanning vision module includes a fourth fiber collimating lens, a zoom lens group, and a zoom lens. The zoom lens, the zoom lens group, and the fourth fiber collimator are arranged in sequence according to the light signal input and output. The fourth fiber collimator is close to the side of the first fiber collimator. The zoom lens group is mounted on the two-dimensional angle measuring drive device so that the two-dimensional angle measuring drive device drives the zoom lens group to achieve zoom.

13. The tracking scanning measurement system according to claim 7, characterized in that, The tracking scanning measurement system further includes: an optical fiber switch, which connects the sweep frequency absolute non-contact ranging module and the interferometric ranging module. The control device is used to control the optical fiber switch to connect the sweep frequency absolute non-contact ranging module and the target tracking module after the ranging laser emitted by the interferometric ranging module to the tracking cooperative target is blocked and cut off in the tracking coordinate measurement mode. It measures the initial absolute distance from the tracking cooperative target to the sweep frequency absolute non-contact ranging module after the light cut-off and reconnection. Based on the initial absolute distance, it corrects the relative distance between the tracking cooperative target and the lens assembly of the target tracking module in the target coordinate system after the light cut-off and reconnection.

14. The tracking scanning measurement system according to any one of claims 2-4, characterized in that, The visual tracking module includes: a telephoto objective lens, a telephoto objective lens retaining ring, a telephoto lens group, an inner endoscope tube, a relay lens, an imaging lens group, an outer endoscope tube, and an imaging CCD lens group. The endoscope tube is provided with protrusions at specified intervals for mounting the telescope group, the relay mirror and the imaging mirror group. The telephoto objective is disposed within the telephoto objective retaining ring, which is fitted onto the inner endoscope assembly. Corresponding telescope groups, relay lenses, and imaging lenses are sequentially installed on each protrusion of the inner endoscope assembly, with the telescope groups close to the telephoto objective retaining ring. The outer endoscope assembly is fitted onto the outer side of the inner endoscope assembly, and an imaging CCD lens group is installed at the end of the outer endoscope assembly away from the telephoto objective.

15. The tracking scanning measurement system according to any one of claims 1-4, characterized in that, The two-dimensional angle measurement drive device includes a horizontal rotation drive mechanism, a horizontal rotation shaft, a pitch rotation drive mechanism, a pitch rotation shaft, and a pitch rotation support frame; The output end of the horizontal rotary drive mechanism is connected to the horizontal rotary shaft, the actuating end of the horizontal rotary shaft is equipped with the pitch rotation support frame, and the input end of the horizontal rotary drive mechanism drives the horizontal rotary shaft to rotate under the control of the control device. The output end of the pitch rotation drive mechanism is equipped with the pitch rotation shaft and is mounted on the pitch rotation support frame. The input end of the pitch rotation drive mechanism drives the pitch rotation shaft to rotate under the control of the control device.

16. The tracking scanning measurement system according to claim 15, characterized in that, The pitch rotation drive mechanism includes a pitch motor rotor, a pitch motor stator, a pitch circular grating assembly, a first angular contact bearing, a second angular contact bearing, a motor mounting base, a clamping adjustment ring, a pressure cover, a mounting cover, a limit mounting plate, and a bearing preload ring. The first angular contact bearing is mounted on one side of the pitch rotation axis. The pitch circular grating assembly is mounted on the first angular contact bearing and the pitch rotation axis to measure the pitch rotation angle of the pitch rotation axis. A bearing preload ring is fitted onto the other side of the pitch rotation axis, which is then connected to a second angular contact bearing. The second angular contact bearing is mounted on the motor mounting base. The motor mounting base is mounted on the pitch motor rotor. The pitch motor rotor is mounted on the pitch motor stator and fitted onto the end of the pitch rotation axis. The pressure cap is mounted on the motor mounting base to press the pitch motor stator against it. The motor mounting base is installed on the pitch rotation support frame. The bearing preload ring is sleeved on the pitch rotation shaft and presses against the second angular contact bearing. The clamping adjustment ring is sleeved on the pitch rotation shaft and clamped inside the pitch motor rotor. The limiting mounting plate is limited at the end of the pitch rotation shaft. After the two mounting covers cover the pitch motor rotor, the pitch motor stator, the pitch circular grating assembly, the first angular contact bearing, the second angular contact bearing, the motor mounting base, the clamping adjustment ring, and the limiting mounting plate, they are installed on the pitch rotation support frame.

17. The tracking scanning measurement system according to claim 15, characterized in that, The horizontal rotary drive mechanism includes a third angular contact bearing, a fourth angular contact bearing, an intermediate main support seat, a bearing pressure ring, a horizontal circular grating measurement assembly, a horizontal motor stator, and a horizontal motor rotor. The horizontal rotating shaft is fitted with the horizontal motor rotor, which is installed inside the horizontal motor stator. A horizontal circular grating measuring component for measuring the rotation angle of the horizontal rotating shaft is also installed at a set position on the horizontal rotating shaft. The horizontal circular grating measuring component is close to the horizontal motor rotor and connected to the horizontal motor stator. The third angular contact bearing and the fourth angular contact bearing are sequentially fitted on the horizontal rotating shaft, separated by the intermediate main support, and are installed inside the intermediate main support along with the horizontal circular grating measuring component, the horizontal motor stator, and the horizontal motor rotor. The bearing pressure ring is fitted on the horizontal rotating shaft close to the horizontal motor stator and pressing against the third angular contact bearing. Under the control of the control device, the horizontal motor stator drives the horizontal rotating shaft to rotate through the horizontal motor rotor. The pitch rotation support frame is installed at the actuating end of the horizontal rotating shaft.

18. The tracking scanning measurement system according to claim 15, characterized in that, Also includes: Support frame and mounting housing mounted on the support frame; The mounting housing includes a scanner housing and a control housing, and the control device, the contact laser tracker and the non-contact laser scanner are all installed inside the scanner housing; The horizontal rotation drive mechanism is installed inside the control housing, and the scanner housing is installed at the actuating end of the horizontal rotation shaft to drive the scanner housing to achieve the horizontal rotation movement.

19. The tracking scanning measurement system according to any one of claims 1-4, characterized in that, The target of the tracking cooperation is a cone-shaped target ball.

20. A tracking scanning measurement platform, characterized in that, The system includes a tracking scanning measurement system and a computing processing device as described in any one of claims 1-19, wherein the computing processing device is connected to the tracking scanning measurement system to acquire coordinate data and scanned point cloud data of the surface to be measured from the tracking scanning measurement system.

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