Multi-degree-of-freedom bearing and multi-degree-of-freedom positioning stage using same

Abstract

This multi-degree-of-freedom bearing is provided with a large spherical part, a pair of rods protruding from either side of the large spherical part, a housing having a spherical concave inner surface and disposed around the large spherical part, a retainer disposed between the housing and the large spherical part, and a plurality of balls rotatably accommodated in holes in the retainer so as to be in rotational contact with the spherical concave inner surface of the housing and a spherical convex outer surface of the large spherical part. The housing three-dimensionally turns with respect to the rods.

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