Substrate support unit and substrate processing apparatus

Abstract

A substrate support unit according to the present invention comprises a substrate support including at least one electrical element therein, a shaft coupled to the substrate support, and at least one connecting rod coupled to at least one portion of the at least one electrical element and comprising at least one first connecting rod, wherein the at least one first connecting rod may comprise: a first conductive rod electrically connected to the at least one electrical element; a first insulation tube covering the outer surface of the first conductive rod so as to provide electrical insulation; and a first magnetic shielding part arranged to surround portions of the first insulation tube so as to provide magnetic shielding and disposed on the first insulation tube to allow same to be repeatedly exposed along the longitudinal direction of the first conductive rod.

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