Optical waveguide modulation device and optical phase modulator

Abstract

An optical waveguide modulation device (10) and an optical phase modulator comprising the optical waveguide modulation device (10). The optical waveguide modulation device (10) comprises: a substrate (20); an isolation layer (30) arranged on the substrate (20); a ridge waveguide structure (40) arranged on the side of the isolation layer (30) facing away from the substrate (20); and a first metal layer (50) arranged on the side of the isolation layer (30) facing away from the substrate (20) and located on two sides of the ridge waveguide structure (40). The ridge waveguide structure (40) comprises: a first slab layer (41) arranged on the side of the isolation layer (30) facing away from the substrate (20); and a ridge layer (42) arranged on the side of the first slab layer (41) facing away from the isolation layer (30). The first metal layer (50) extends towards the ridge waveguide structure (40) to the side of the first slab layer (41) facing away from the isolation layer (30), so as to cover the edges of two sides of the first slab layer (41), thereby reducing the electromagnetic field leakage on the two sides of the first slab layer (41) of the ridge waveguide structure (40), making an electric field entering the ridge waveguide structure (40) more concentrated, and thus improving the modulation efficiency of the optical waveguide modulation device (10).

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