Lissajous scanner

Abstract

A Lissajous scanner, comprising a base (400), a piezoelectric actuation portion (100), a sheet-shaped support plate (200) or a piezoelectric element (103), and an optical fiber (300). The piezoelectric actuation portion (100) is a two-dimensional scanning piezoelectric actuator. A rear end of the support plate (200) is fixedly connected to a free end of the piezoelectric actuation portion (100). The support plate (200) and the piezoelectric actuation portion (100) have an overlapping portion (500) in the front-rear direction. The optical fiber (300) is fixedly cantilevered to and supported at a front end of the support plate (200). The piezoelectric actuation portion (100), the support plate (200), and the optical fiber (300) form a scanner cantilever. The support plate (200) and the overlapping portion (500) enable a difference between a certain natural frequency of the scanner cantilever in the vertical direction, which is closest to a Vth-order natural frequency thereof in the horizontal direction, and the Vth-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1. By means of adjustment of the shape, structure and / or dimensional parameters of the support plate (200) and the overlapping portion (500), the natural frequencies of the scanner cantilever used in the two directions can be made sufficiently close to each other while also having a sufficient difference, so that vibration of the scanner cantilever in the two directions does not result in coupling.

Description

A Lissajous scanner Technical Field

[0001] This application relates to the field of fiber optic scanner structure technology, and more particularly to a Lissajous scanner. Background Technology

[0002] A fiber optic scanner is a display technology that uses a scanning driver to control the oscillation of an optical fiber while simultaneously emitting light. It is primarily used in fiber optic scanning display technology, fiber optic scanning endoscopy technology, and fiber optic scanning radar. When applied to image display, fiber optic scanners produce images with sharp, saturated colors, high contrast, high brightness, and a very small structural size.

[0003] Fiber optic scanners utilize the principle of mechanical resonance to enable a large scanning range for the fiber optic cantilever. Scanning methods of the scanning driver can be categorized into helical scanning, grid scanning, and Lissajous scanning. Lissajous scanning micro-piezoelectric scanning devices typically have driving sections in two directions, driving the scanning device to vibrate simultaneously in both directions. In Lissajous scanning, the closer the driving frequencies in the two directions, the closer the uniformity (density) of the scanning grid in both directions. Theoretically, the closer the driving frequencies in these two directions, the better. However, the closer the natural frequencies used by the scanner in the two directions, the more pronounced the vibration coupling effect becomes, which degrades the scanning trajectory, causing uncontrolled components in the scanning trajectory and resulting in image distortion that is difficult to completely eliminate through post-processing. Therefore, the natural frequencies used by the Lissajous scanner in the two directions should ideally have a precise difference range, avoiding both excessively small differences that cause coupling effects and excessively large differences that lead to unsatisfactory uniformity.

[0004] The manufacturing of Lissajous scanners, which utilize the inherent frequencies in both directions with precise differences, requires extremely high processing accuracy, making it difficult to guarantee both the cost of processing equipment and the yield rate. Technical issues

[0005] Existing fiber optic scanners are difficult to manufacture and have a low yield rate. Technical solutions

[0006] To achieve the above objectives, this application provides a Lissajous scanner, including a base, a piezoelectric actuator, a support plate, and an optical fiber. The piezoelectric actuator is a two-dimensional scanning piezoelectric actuator. The fixed end of the piezoelectric actuator is fixedly connected to the base, and the free end of the piezoelectric actuator vibrates simultaneously along a first direction and a second direction, which are perpendicular to each other. The free end of the piezoelectric actuator is the front end, the fixed end is the rear end, the first direction is the left-right direction, and the second direction is the vertical direction. The rear end of the support plate is fixedly connected to the free end of the piezoelectric actuator. The support plate is arranged parallel to the horizontal plane. The support plate and the piezoelectric actuator have an overlapping part in the front-to-back direction. The optical fiber is fixedly arranged at the front end of the support plate in a cantilever support manner. The piezoelectric actuator, the support plate and the optical fiber constitute the scanner cantilever. The support plate and the overlapping part make the natural frequency of the scanner cantilever in the horizontal direction greater than its natural frequency of the same order in the vertical direction. It also makes a difference between the natural frequency of the scanner cantilever in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0007] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a base, a first piezoelectric actuator, a sheet-like piezoelectric actuator, and an optical fiber. The first piezoelectric actuator is a one-dimensional scanning piezoelectric actuator. The fixed end of the first piezoelectric actuator is fixedly connected to the base, and the free end of the first piezoelectric actuator vibrates along a first direction. The free end of the first piezoelectric actuator is the front end, and the fixed end of the first piezoelectric actuator is the rear end. The first direction is the left-right direction. The rear end of the sheet-like piezoelectric actuator is fixedly connected to the free end of the first piezoelectric actuator. The sheet-like piezoelectric actuator is arranged parallel to the horizontal plane. The actuator and the first piezoelectric actuator have an overlapping portion in the front-to-back direction. The front end of the sheet piezoelectric actuator vibrates in the vertical direction. The optical fiber is fixedly installed at the front end of the sheet piezoelectric actuator in a cantilever support manner. The first piezoelectric actuator, the sheet piezoelectric actuator, and the optical fiber constitute the scanner cantilever. The sheet piezoelectric actuator and the overlapping portion make the natural frequency of the scanner cantilever in the horizontal direction greater than its natural frequency of the same order in the vertical direction. It also makes a difference between a certain natural frequency of the scanner cantilever in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0008] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical body, a support plate fixedly connected to the cylindrical body, and an optical fiber fixedly mounted on the support plate in a cantilevered manner. With the axial extension direction of the cylindrical body as the front-to-back direction, the rear end of the cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the cylindrical body is provided with a first piezoelectric plate, the extension and retraction of which drives the front end of the cylindrical body to vibrate horizontally. At least one of the upper and lower sides of the cylindrical body is provided with a second piezoelectric plate, the extension and retraction of which drives the cylindrical body to vibrate horizontally. The front end vibrates vertically, and the support plate is set in a direction parallel to the horizontal plane. It is located on the front side of the cylindrical body, and its rear end is fixedly connected to the cylindrical body. The support plate and the cylindrical body have overlapping parts in the front-rear direction. The support plate and the overlapping parts make the natural frequency of the combination part composed of the cylindrical body, the first piezoelectric sheet, the second piezoelectric sheet, the support plate and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes the natural frequency of the combination part in the vertical direction that is closest to its V-order natural frequency in the horizontal direction have a difference between the V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0009] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical body, a support plate, and an optical fiber. With the axial extension direction of the cylindrical body as the front-to-back direction, the rear end of the cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the cylindrical body is provided with a first piezoelectric plate, whose extension and retraction drive the front end of the cylindrical body to vibrate horizontally. At least one of the upper and lower sides of the cylindrical body is provided with a second piezoelectric plate, whose extension and retraction drive the front end of the cylindrical body to vibrate vertically. The support plate is arranged parallel to the horizontal plane, and both the left and right walls of the cylindrical body are provided with... The mounting groove is used to connect the support plate. The rear end of the support plate is fixedly inserted into the mounting groove. The optical fiber is fixedly provided with the front end of the support plate in a cantilever support manner. The part of the support plate installed in the mounting groove and the cylindrical body part that overlaps with this part of the support plate in the front-back direction form an overlapping part. The support plate and the overlapping part make the natural frequency of the combination part composed of the cylindrical body, the first piezoelectric sheet, the second piezoelectric sheet, the support plate and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction of the combination part. It also makes the U-order natural frequency of the combination part in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, have a difference with the V-order natural frequency in the horizontal direction.

[0010] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical body, a support plate fixedly connected to the cylindrical body, and an optical fiber fixedly mounted on the support plate in a cantilevered manner. With the axial extension direction of the cylindrical body as the front-rear direction, the rear end of the cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the cylindrical body is provided with a first piezoelectric plate, the extension and retraction of which drives the front end of the cylindrical body to vibrate horizontally. At least one of the upper and lower sides of the cylindrical body is provided with a second piezoelectric plate, the extension and retraction of which drives the front end of the cylindrical body to vibrate vertically. The support plate is arranged parallel to the horizontal plane, located on the front side of the cylindrical body, and its rear end is attached to... The support plate is applied to the upper or lower surface of the cylindrical body and fixedly connected to the cylindrical body. The surface of the cylindrical body used to cover the support plate is flat. The front end of the support plate is fixedly installed in a cantilever support manner. The part of the support plate that covers the cylindrical body and the part of the cylindrical body that overlaps with this part of the support plate in the front-back direction form an overlapping part. The support plate and the overlapping part make the natural frequency of the combination of the cylindrical body, the first piezoelectric sheet, the second piezoelectric sheet, the support plate and the optical fiber in the horizontal direction greater than the same natural frequency of the combination in the vertical direction. It also makes the U-order natural frequency of the combination in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, have a difference with the V-order natural frequency in the horizontal direction, where V is an integer greater than 1 and U is an integer greater than V.

[0011] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a piezoelectric cylindrical body, a support plate fixedly connected to the piezoelectric cylindrical body, and an optical fiber fixedly mounted on the support plate in a cantilevered manner. With the axial extension direction of the piezoelectric cylindrical body as the front-rear direction, the rear end of the piezoelectric cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the piezoelectric cylindrical body has a first inner electrode and a first outer electrode respectively disposed on their inner and outer surfaces. The portion of the piezoelectric cylindrical body between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction. The first inner electrode and the corresponding first outer electrode drive the piezoelectric material located between them to extend and retract in the front-rear direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction. At least one of the upper and lower sides of the piezoelectric cylindrical body has a second inner electrode and a second outer electrode respectively disposed on their inner and outer surfaces. The second outer electrode, the portion of the piezoelectric material cylindrical body located between the second inner electrode and the second outer electrode, is polarized along the thickness direction. The piezoelectric material located between the second inner electrode and the second outer electrode is driven to extend and retract in the front-back direction, driving the front end of the piezoelectric material cylindrical body to vibrate in the vertical direction. The support plate is arranged parallel to the horizontal plane, located on the front side of the piezoelectric material cylindrical body, and its rear end is fixedly connected to the piezoelectric material cylindrical body. The optical fiber is fixedly arranged with the front end of the support plate in a cantilever support manner. The support plate and the piezoelectric material cylindrical body have an overlapping part in the front-back direction. The support plate and the overlapping part make the natural frequency of the combination part formed by the piezoelectric material cylindrical body, the support plate and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction of the combination part, and make a difference between the natural frequency of the combination part in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0012] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a piezoelectric cylindrical body, a support plate fixedly connected to the piezoelectric cylindrical body, and an optical fiber fixedly mounted on the support plate in a cantilevered manner. With the axial extension direction of the piezoelectric cylindrical body as the front-to-back direction, the rear end of the piezoelectric cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the piezoelectric cylindrical body has a first inner electrode and a first outer electrode respectively disposed on their inner and outer surfaces. The portion of the piezoelectric cylindrical body located between the corresponding first inner and first outer electrodes is polarized along the thickness direction. The piezoelectric material located between the first inner and first outer electrodes is driven to extend and retract along the front-to-back direction, driving the front end of the piezoelectric cylindrical body to vibrate horizontally. At least one of the upper and lower sides of the piezoelectric cylindrical body has a second inner electrode and a second outer electrode respectively disposed on their inner and outer surfaces. The portion of the piezoelectric cylindrical body located between the corresponding second inner and second outer electrodes is polarized along the thickness direction. The piezoelectric material located between the two poles extends and retracts in the front-to-back direction, driving the front end of the piezoelectric material cylindrical body to vibrate vertically. A support plate is positioned parallel to the horizontal plane, located on the front side of the piezoelectric material cylindrical body, with its rear end fixedly connected to the piezoelectric material cylindrical body. The left and right walls of the piezoelectric material cylindrical body are provided with mounting grooves for connecting the support plate. A portion of the rear end of the support plate is inserted into the mounting grooves and fixedly connected to the piezoelectric material cylindrical body. An optical fiber is fixedly mounted on the front end of the support plate in a cantilevered support manner. The support plate and the piezoelectric material cylindrical body... The piezoelectric cylindrical body has an overlapping portion in the front-to-back direction. The portion of the support plate installed in the mounting groove and the portion of the piezoelectric cylindrical body that overlaps with this portion of the support plate in the front-to-back direction constitute an overlapping portion. The support plate and the overlapping portion make the natural frequency of the combination of the piezoelectric cylindrical body, the support plate and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes the natural frequency of the combination in the vertical direction that is closest to its V-order natural frequency in the horizontal direction have a difference from the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0013] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a piezoelectric cylindrical body, a support plate, and an optical fiber. With the axial extension direction of the piezoelectric cylindrical body as the front-rear direction, the rear end of the piezoelectric cylindrical body is fixedly connected to a base. At least one of the left and right sides of the piezoelectric cylindrical body has a first inner electrode and a first outer electrode respectively disposed on their inner and outer surfaces. The first inner electrode and the corresponding first outer electrode drive the front end of the piezoelectric cylindrical body to vibrate horizontally. At least one of the upper and lower sides of the piezoelectric cylindrical body has a second inner electrode and a third outer electrode respectively disposed on their inner and outer surfaces. Two external electrodes drive the front end of the piezoelectric material cylindrical body to vibrate vertically. A support plate is arranged parallel to the horizontal plane, with its rear end attached to the upper or lower surface of the piezoelectric material cylindrical body and fixedly connected to it. An optical fiber is fixedly mounted on the front end of the support plate in a cantilevered manner. The portion of the support plate attached to the piezoelectric material cylindrical body and the portion of the piezoelectric material cylindrical body that overlaps with this portion of the support plate in the front-to-back direction form an overlapping part. The support plate and the overlapping part cause the natural frequency of the combination of the piezoelectric material cylindrical body, the support plate and the optical fiber in the horizontal direction to be greater than the natural frequency of the same order in the vertical direction.

[0014] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical body and an optical fiber. With the axial extension direction of the cylindrical body as the front-rear direction, the rear end of the cylindrical body is fixedly connected to a base for support. The cylindrical body consists of an open-top base and a support plate that partially or completely covers the open-top portion of the base. The front end of the support plate extends beyond the front end of the base, and the portion of the support plate connected to the base forms a cylindrical overlapping portion. The optical fiber is cantilevered and fixed to the front end of the support plate. At least one of the left and right sides of the cylindrical overlapping portion is provided with a first piezoelectric element. The telescopic drive of the piezoelectric sheet causes the front end of the cylindrical body to vibrate horizontally. At least one side of the overlapping part of the cylindrical body is provided with a second piezoelectric sheet. The telescopic drive of the second piezoelectric sheet causes the front end of the cylindrical body to vibrate vertically. The support plate makes the natural frequency of the combination of the cylindrical body, the first piezoelectric sheet, the second piezoelectric sheet and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes the natural frequency of the combination in the vertical direction that is closest to its natural frequency of V in the horizontal direction have a difference with the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0015] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical body and an optical fiber. The cylindrical body extends along its axial direction, and its rear end is fixedly connected to a base for support. The cylindrical body consists of an open-top base and a support plate that partially or completely covers the open-top portion of the base. The front end of the support plate extends beyond the front end of the base, and the portion of the support plate connected to the base forms a cylindrical overlapping portion. The optical fiber is cantilevered and fixed to the front end of the support plate. At least one of the inner and outer surfaces of the left and right sides of the cylindrical overlapping portion is respectively provided with a first inner electrode and a first outer electrode. The portion of the cylindrical overlapping portion between the first inner electrode and the corresponding first outer electrode is a piezoelectric material portion polarized along the thickness direction, driven by the first inner electrode and the corresponding first outer electrode. The piezoelectric material portion extends and retracts in the front-to-back direction, driving the front end of the cylindrical body to vibrate horizontally. At least one inner and outer surface of the upper and lower sides of the overlapping cylindrical portion is respectively provided with correspondingly matched second inner and second outer electrodes. The part of the overlapping cylindrical portion between the second inner and second outer electrodes is a piezoelectric material portion polarized in the thickness direction. The piezoelectric material portion between the two is driven by the second inner and second outer electrodes to extend and retract in the front-to-back direction, driving the front end of the cylindrical body to vibrate vertically. The support plate makes the natural frequency of the combination of the cylindrical body and the optical fiber in the horizontal direction greater than the same natural frequency of the combination in the vertical direction, and makes a difference between the natural frequency of the combination in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0016] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical body and an optical fiber. The cylindrical body's axial extension direction is taken as the front-to-back direction. The rear end of the cylindrical body is fixedly connected to a base for support. The cylindrical body includes support columns located at four corners and four side plates connecting any two adjacent support columns. The upper side plate, located on the upper side, is longer in the front-to-back direction than the other three side plates. The rear half of the upper side plate, the four support columns, and the other three side plates form a cylindrical overlapping portion. The optical fiber is cantilevered and fixed to the front end of the upper side plate. At least one side of the cylindrical overlapping portion has a fixed connection on either the left or right side. A first piezoelectric element is provided, and the extension and retraction of the first piezoelectric element drives the front end of the cylindrical body to vibrate left and right in the horizontal direction. At least one side of the upper and lower overlapping parts of the cylindrical body is provided with a second piezoelectric element, and the extension and retraction of the second piezoelectric element drives the front end of the cylindrical body to vibrate in the vertical direction. The upper side plate makes the natural frequency of the combination part composed of the cylindrical body, the first piezoelectric element, the second piezoelectric element and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction of the combination part, and makes a difference between the natural frequency of the combination part in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0017] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical body and an optical fiber. The cylindrical body's axial extension direction is taken as the front-to-back direction. The rear end of the cylindrical body is fixedly connected to a base for support. The cylindrical body includes support columns at four corners and four side plates connecting any two adjacent support columns. The upper side plate is longer in the front-to-back direction than the other three side plates. The rear half of the upper side plate, the four support columns, and the other three side plates form a cylindrical overlapping portion. The optical fiber is cantilevered and fixed to the front end of the upper side plate. At least one of the left and right sides of the cylindrical overlapping portion has a first inner electrode and a first outer electrode respectively disposed on the inner and outer surfaces. The portion of the cylindrical overlapping portion between the first inner electrode and the corresponding first outer electrode is a piezoelectric material portion polarized along the thickness direction. The external electrode drives the piezoelectric material part located between the two to extend and retract in the front-to-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction. At least one of the inner and outer surfaces of the upper and lower sides of the cylindrical overlapping part is respectively provided with a correspondingly matched second inner electrode and a second outer electrode. The part of the cylindrical overlapping part located between the second inner electrode and the second outer electrode is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part located between the two is driven by the second inner electrode and the second outer electrode to extend and retract in the front-to-back direction, driving the front end of the cylindrical body to vibrate in the vertical direction. The upper side plate makes the natural frequency of the combination part composed of the cylindrical body and the optical fiber in the horizontal direction greater than the same natural frequency of the combination part in the vertical direction, and makes a difference between the natural frequency of the combination part in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0018] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber fixedly mounted on the sheet-like piezoelectric actuator in a cantilevered manner. The cylindrical piezoelectric actuator includes a cylindrical body, with the axial extension direction of the cylindrical body as the front-rear direction. The rear end of the cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the cylindrical body is provided with a first piezoelectric sheet. The extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate horizontally. The sheet-like piezoelectric actuator is positioned parallel to the horizontal plane and located on the cylindrical body. The front side of the body is fixedly connected to the rear end of the cylindrical body. The front end of the sheet piezoelectric actuator vibrates in the vertical direction. The optical fiber is fixedly installed at the front end of the sheet piezoelectric actuator in a cantilever support manner. The sheet piezoelectric actuator and the cylindrical body have an overlapping part in the front-rear direction. The sheet piezoelectric actuator and the overlapping part make the natural frequency of the combination part composed of the cylindrical piezoelectric actuator, the sheet piezoelectric actuator and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction of the combination part. It also makes a difference between the natural frequency of the combination part in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0019] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber fixedly mounted on the sheet-like piezoelectric actuator in a cantilevered manner. The cylindrical piezoelectric actuator includes a piezoelectric material cylindrical body, with the axial extension direction of the piezoelectric material cylindrical body as the front-rear direction. The rear end of the piezoelectric material cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the piezoelectric material cylindrical body has a first inner electrode and a first outer electrode respectively disposed on the inner and outer surfaces. The portion of the piezoelectric material cylindrical body located between the corresponding first inner electrode and the first outer electrode is polarized along the thickness direction. The first inner electrode and the corresponding first outer electrode drive the piezoelectric material located between them to extend and retract in the front-rear direction, driving the front end of the piezoelectric material cylindrical body to vibrate left and right in the horizontal direction. The sheet-like piezoelectric actuator is arranged parallel to the horizontal plane, located in front of the piezoelectric material cylindrical body, and its rear end is fixedly connected to the piezoelectric material cylindrical body. The main body is fixedly connected, and the front end of the sheet-shaped piezoelectric actuator vibrates vertically. The optical fiber is fixedly mounted on the front end of the sheet-shaped piezoelectric actuator in a cantilevered manner. The sheet-shaped piezoelectric actuator and the piezoelectric material cylindrical body have overlapping portions in the front-rear direction. The left and right sides of the piezoelectric material cylindrical body are provided with mounting grooves for connecting the sheet-shaped piezoelectric actuator. The rear end portion of the sheet-shaped piezoelectric actuator is inserted into the mounting groove and fixedly connected to the piezoelectric material cylindrical body. The portion of the sheet-shaped piezoelectric actuator installed in the mounting groove and the front-rear portion are connected in the front-rear direction. The piezoelectric material cylindrical body portion that overlaps with the sheet-like piezoelectric actuator portion forms an overlapping portion. The sheet-like piezoelectric actuator portion and the overlapping portion cause the natural frequency of the combined portion consisting of the piezoelectric material cylindrical body portion, the sheet-like piezoelectric actuator portion and the optical fiber to be greater than the natural frequency of the same order in the vertical direction. Furthermore, the U-order natural frequency of the combined portion in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, has a difference from the V-order natural frequency in the horizontal direction, where V is an integer ≥1 and U is an integer greater than V.

[0020] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber fixedly mounted on the sheet-like piezoelectric actuator in a cantilevered manner. The cylindrical piezoelectric actuator includes a cylindrical body, with the axial extension direction of the cylindrical body as the front-rear direction. The rear end of the cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the cylindrical body is provided with a first piezoelectric sheet, and the extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate left and right in the horizontal direction. The sheet-like piezoelectric actuator is arranged parallel to the horizontal plane, located on the front side of the cylindrical body, and its rear end is attached to the upper or lower surface of the cylindrical body and fixedly connected to the cylindrical body. Next, the surface of the cylindrical body used to cover the sheet-like piezoelectric actuator is flat. The front end of the sheet-like piezoelectric actuator vibrates in the vertical direction. The optical fiber is fixedly installed at the front end of the sheet-like piezoelectric actuator in a cantilever support manner. The part of the sheet-like piezoelectric actuator that covers the cylindrical body and the part of the cylindrical body that overlaps with this part of the sheet-like piezoelectric actuator in the front-back direction form an overlapping part. The sheet-like piezoelectric actuator and the overlapping part make the natural frequency of the combination of the cylindrical body, the first piezoelectric sheet, the second piezoelectric sheet, the sheet-like piezoelectric actuator and the optical fiber in the horizontal direction greater than the natural frequency of the combination in the vertical direction. It also makes the natural frequency of the combination in the vertical direction that is closest to its V-order natural frequency in the horizontal direction have a difference between the V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0021] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber fixedly mounted on the sheet-like piezoelectric actuator in a cantilevered manner. The cylindrical piezoelectric actuator includes a piezoelectric material cylindrical body, with the axial extension direction of the piezoelectric material cylindrical body as the front-rear direction. The rear end of the piezoelectric material cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the piezoelectric material cylindrical body has a first inner electrode and a first outer electrode respectively disposed on the inner and outer surfaces. The portion of the piezoelectric material cylindrical body located between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction. The piezoelectric material located between the first inner electrode and the corresponding first outer electrode is driven to extend and retract in the front-rear direction. The front end of the drive cylindrical body vibrates horizontally left and right. The sheet-shaped piezoelectric actuator is arranged parallel to the horizontal plane, located on the front side of the piezoelectric cylindrical body, and its rear end is fixedly connected to the piezoelectric cylindrical body. The front end of the sheet-shaped piezoelectric actuator vibrates vertically. The optical fiber is fixedly arranged at the front end of the sheet-shaped piezoelectric actuator in a cantilever support manner. The sheet-shaped piezoelectric actuator and the piezoelectric cylindrical body have an overlapping part in the front-back direction. The sheet-shaped piezoelectric actuator and the overlapping part make the natural frequency of the combination of the piezoelectric cylindrical body, the sheet-shaped piezoelectric actuator and the optical fiber in the horizontal direction greater than the same order natural frequency of the combination in the vertical direction. It also makes a difference between the natural frequency of the combination in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0022] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber fixedly mounted on the sheet-like piezoelectric actuator in a cantilevered manner. The cylindrical piezoelectric actuator includes a cylindrical body, with the axial extension direction of the cylindrical body as the front-rear direction. The rear end of the cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the cylindrical body is provided with a first piezoelectric sheet, and the extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate horizontally. The sheet-like piezoelectric actuator is arranged parallel to the horizontal plane, located on the front side of the cylindrical body, and its rear end is fixedly connected to the cylindrical body. The left and right walls of the cylindrical body are each provided with mounting grooves for connecting the sheet-like piezoelectric actuator. The rear end of the sheet piezoelectric actuator is inserted into the mounting groove and fixedly connected to the cylindrical body. The front end of the sheet piezoelectric actuator vibrates in the vertical direction. The optical fiber is fixedly mounted on the front end of the sheet piezoelectric actuator in a cantilever support manner. The sheet piezoelectric actuator and the cylindrical body have overlapping portions in the front-rear direction. The portion of the sheet piezoelectric actuator installed in the mounting groove and the portion of the cylindrical body that overlaps with this portion of the sheet piezoelectric actuator in the front-rear direction form an overlapping portion. The sheet piezoelectric actuator and the overlapping portion make the natural frequency of the combination of the cylindrical piezoelectric actuator, the sheet piezoelectric actuator and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes the U-order natural frequency of the combination in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, have a difference with the V-order natural frequency in the horizontal direction.

[0023] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber fixedly mounted on the sheet-like piezoelectric actuator in a cantilever support manner. The cylindrical piezoelectric actuator includes a piezoelectric material cylindrical body, with the axial extension direction of the piezoelectric material cylindrical body as the front-rear direction. The rear end of the piezoelectric material cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the piezoelectric material cylindrical body has a first inner electrode and a first outer electrode respectively disposed on their inner and outer surfaces. The portion of the piezoelectric material cylindrical body located between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction. The first inner electrode and the corresponding first outer electrode drive the piezoelectric material located between them to extend and retract in the front-rear direction, driving the front end of the piezoelectric material cylindrical body to vibrate left and right in the horizontal direction. The sheet-like piezoelectric actuator moves parallel to the horizontal direction... The piezoelectric actuator is positioned in the front of the piezoelectric cylindrical body, with its rear end attached to the upper or lower surface of the piezoelectric cylindrical body and fixedly connected to it. The surface of the piezoelectric cylindrical body used to attach the sheet-like piezoelectric actuator is planar. The front end of the sheet-like piezoelectric actuator vibrates in the vertical direction. The optical fiber is fixedly mounted on the front end of the sheet-like piezoelectric actuator in a cantilever support manner. The portion of the sheet-like piezoelectric actuator attached to the piezoelectric cylindrical body and the portion of the piezoelectric cylindrical body that overlaps with this portion of the sheet-like piezoelectric actuator in the front-rear direction form an overlapping portion. The sheet-like piezoelectric actuator and the overlapping portion cause the natural frequency of the combined portion consisting of the piezoelectric cylindrical body, the sheet-like piezoelectric actuator, and the optical fiber in the horizontal direction to be greater than the same order natural frequency of the combined portion in the vertical direction. Furthermore, there is a difference between the U-order natural frequency of the combined portion in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, and the V-order natural frequency in the horizontal direction.

[0024] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical body and an optical fiber. The cylindrical body extends along its axial direction, and its rear end is fixedly connected to a base for support. The cylindrical body consists of an open-topped base and a sheet-like piezoelectric actuator with an open top covering the base. The front end of the sheet-like piezoelectric actuator extends beyond the front end of the base. The portion of the sheet-like piezoelectric actuator connected to the base forms a cylindrical overlap portion with the base. The front end of the sheet-like piezoelectric actuator vibrates vertically. The optical fiber is fixedly mounted using a cantilever support. At the front end of the sheet-like piezoelectric actuator, at least one of the left and right sides of the cylindrical overlapping part is provided with a first piezoelectric sheet. The extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate left and right in the horizontal direction. The sheet-like piezoelectric actuator makes the natural frequency of the combination of the cylindrical body, the first piezoelectric sheet and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes a difference between the natural frequency of the combination in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0025] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical body and an optical fiber. With the axial extension direction of the cylindrical body as the front-rear direction, the rear end of the cylindrical body is fixedly connected to a base for support. The cylindrical body consists of an open-topped base and a sheet-like piezoelectric actuator with an open top covering the base. The front end of the sheet-like piezoelectric actuator extends beyond the front end of the base. The portion of the sheet-like piezoelectric actuator connected to the base forms a cylindrical overlapping portion with the base. The front end of the sheet-like piezoelectric actuator vibrates vertically. The optical fiber is fixedly mounted on the front end of the sheet-like piezoelectric actuator in a cantilevered support manner. At least one of the inner and outer surfaces of the left and right sides of the cylindrical overlapping portion is respectively provided with... The first inner electrode and the first outer electrode are configured to cooperate with each other. The part of the cylindrical overlapping part located between the first inner electrode and the corresponding first outer electrode is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part located between the first inner electrode and the corresponding first outer electrode is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction. The sheet-like piezoelectric actuator makes the natural frequency of the combination part composed of the cylindrical body and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction of the combination part, and makes a difference between the natural frequency of the combination part in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0026] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical body and an optical fiber. With the axial extension direction of the cylindrical body as the front-rear direction, the rear end of the cylindrical body is fixedly connected to a base for support. The cylindrical body includes support columns located at four corners and four side plates connecting any two adjacent support columns. The upper side plate is a sheet-like piezoelectric actuator, the length of which in the front-rear direction is longer than the length of the other three side plates. The rear half of the sheet-like piezoelectric actuator, together with the four support columns and the other three side plates, forms a cylindrical overlapping portion. The front end of the sheet-like piezoelectric actuator extends along... The vertical vibration occurs when the optical fiber is fixedly mounted on the front end of the sheet-like piezoelectric actuator in a cantilevered manner. At least one of the left and right sides of the cylindrical overlapping part is provided with a first piezoelectric plate. The extension and retraction of the first piezoelectric plate drives the front end of the cylindrical body to vibrate left and right in the horizontal direction. The sheet-like piezoelectric actuator makes the natural frequency of the combination of the cylindrical body, the first piezoelectric plate and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes a difference between the natural frequency of the combination in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0027] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical body and an optical fiber. The cylindrical body's axial extension direction is taken as the front-to-back direction. The rear end of the cylindrical body is fixedly connected to a base for support. The cylindrical body includes support columns at four corners and four side plates connecting any two adjacent support columns. The upper side plate is a sheet-like piezoelectric actuator, with its length in the front-to-back direction longer than the other three side plates. The rear half of the sheet-like piezoelectric actuator, along with the four support columns and the other three side plates, forms a cylindrical overlapping section. The front end of the sheet-like piezoelectric actuator vibrates vertically. The optical fiber is fixedly mounted on the front end of the sheet-like piezoelectric actuator in a cantilevered support manner. The left and right sides of the cylindrical overlapping section... At least one of the two sides has a first inner electrode and a first outer electrode respectively provided on the inner and outer surfaces. The part of the cylindrical overlapping part between the first inner electrode and the corresponding first outer electrode is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part between the two is driven by the first inner electrode and the corresponding first outer electrode to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction. The support plate makes the natural frequency of the combination part composed of the cylindrical body and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction, and makes the natural frequency of the combination part in the vertical direction that is closest to its natural frequency of V in the horizontal direction have a difference with the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0028] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a cylindrical piezoelectric actuator, a support plate, and an optical fiber. The cylindrical piezoelectric actuator is a two-dimensional scanning piezoelectric actuator. The fixed end of the cylindrical piezoelectric actuator is fixedly connected to a base for support. The cylindrical piezoelectric actuator has a first through hole extending axially through itself, and the base has a second through hole communicating with the first through hole. The free end of the cylindrical piezoelectric actuator vibrates simultaneously along a first direction and a second direction, which are perpendicular to each other. The free end of the cylindrical piezoelectric actuator is the rear end, and the fixed end is the front end. The first direction is the left-right direction, and the second direction is the vertical direction. The support plate is disposed in the first through hole and is arranged parallel to the horizontal plane. Its rear end is connected to the cylindrical piezoelectric actuator. The free end of the actuator is fixedly connected, and the front end of the support plate is located in the first through hole or the second through hole. The optical fiber is fixedly installed at the front end of the support plate in a cantilever support manner. The part of the support plate with the fixed connection of the cylindrical piezoelectric actuator is driven by the cylindrical piezoelectric actuator to perform two-dimensional vibration in the first through hole or the first through hole and the second through hole. The aperture of the first through hole and the second through hole is set to be not less than the swing range of the support plate and the optical fiber. The cylindrical piezoelectric actuator, the support plate and the optical fiber constitute the scanner cantilever. The support plate makes the natural frequency of the scanner cantilever in the horizontal direction greater than its natural frequency of the same order in the vertical direction, and makes a difference between a certain natural frequency of the scanner cantilever in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0029] To achieve the above objectives, this application also provides a Lissajous scanner with another structure, including a base, a cylindrical piezoelectric actuator, a sheet piezoelectric actuator, and an optical fiber. The cylindrical piezoelectric actuator is a one-dimensional scanning piezoelectric actuator. The fixed end of the cylindrical piezoelectric actuator is fixedly connected to the base for support. The cylindrical piezoelectric actuator has a first through hole extending axially through itself, and the base has a second through hole communicating with the first through hole. The free end of the cylindrical piezoelectric actuator vibrates along a first direction. With the free end of the cylindrical piezoelectric actuator as the rear end and the fixed end of the cylindrical piezoelectric actuator as the front end, and the first direction as the left-right direction, the sheet piezoelectric actuator is disposed in the first through hole. The sheet piezoelectric actuator is disposed in a direction parallel to the horizontal plane, and its rear end is connected to the cylindrical piezoelectric actuator. The free end of the moving part is fixedly connected, and the front end of the sheet piezoelectric actuator is located in the first through hole or the second through hole. The front end of the sheet piezoelectric actuator vibrates in the vertical direction. The optical fiber is fixedly installed at the front end of the sheet piezoelectric actuator in a cantilever support manner. The aperture of the first through hole and the second through hole is set to be not less than the swing range of the sheet piezoelectric actuator and the optical fiber. The cylindrical piezoelectric actuator, the sheet piezoelectric actuator and the optical fiber constitute the scanner cantilever. The sheet piezoelectric actuator makes the natural frequency of the scanner cantilever in the horizontal direction greater than its natural frequency of the same order in the vertical direction, and makes a difference between a certain natural frequency of the scanner cantilever in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0030] Optionally, in the various configurations of the Lissajous scanner described above, the difference range is 10Hz to 12kHz. More preferably, the difference range is 1kHz to 10kHz. Beneficial effects

[0031] This application utilizes the adjustment of the shape and / or size parameters of the support plate or sheet-like piezoelectric actuator and the overlapping part to ensure that the natural frequencies of the scanner cantilever used in both directions are sufficiently close to guarantee good scanning effect and have a uniform and dense scanning grid, while also having sufficient difference so that the vibration of the scanner cantilever in both directions will not couple.

[0032] This application enables the piezoelectric actuator of a Lissajous scanner to have the same or similar natural frequencies in a first direction and in a second direction. The piezoelectric actuator described herein refers to the piezoelectric actuator itself, excluding support plates or sheet-like piezoelectric actuators, and excluding other components such as optical fibers. A piezoelectric actuator meeting these requirements is a regularly shaped, rotationally symmetrical piezoelectric actuator, which is easy to manufacture, has easily controllable manufacturing errors, and a high yield rate. Attached Figure Description

[0033] Figure 1 is a schematic diagram of the structure of this application;

[0034] Figure 2 is a schematic diagram of the overlapping part structure;

[0035] Figure 3 is a schematic diagram of the structure of a cylindrical piezoelectric actuator;

[0036] Figure 4 is a schematic diagram of the square-tube piezoelectric actuator.

[0037] Figure 5 is a schematic diagram of the square bar piezoelectric actuator;

[0038] Figure 6 is a schematic diagram of the structure of a cylindrical piezoelectric actuator;

[0039] Figure 7 is a structural schematic diagram of one embodiment of this application;

[0040] Figure 8 is a structural schematic diagram of another embodiment of this application;

[0041] Figure 9 is a structural schematic diagram of another embodiment of this application;

[0042] Figure 10 is a structural schematic diagram of another embodiment of this application;

[0043] Figure 11 is a structural schematic diagram of another embodiment of this application;

[0044] Figure 12 is a structural schematic diagram of another embodiment of this application;

[0045] Figure 13 is a structural schematic diagram of another embodiment of this application;

[0046] Figure 14 is a structural schematic diagram of another embodiment of this application;

[0047] Figure 15 is a structural schematic diagram of another embodiment of this application;

[0048] Figure 16 is a front view structural schematic diagram of the cylindrical body of the embodiment shown in Figure 15;

[0049] Figure 17 is a structural schematic diagram of another embodiment of this application;

[0050] Figure 18 is a front view structural schematic diagram of the cylindrical body of the embodiment shown in Figure 17;

[0051] Figure 19 is a structural schematic diagram of another embodiment of this application;

[0052] Figure 20 is a structural schematic diagram of another embodiment of this application;

[0053] Figure 21 is a structural schematic diagram of another embodiment of this application;

[0054] Figure 22 is a structural schematic diagram of another embodiment of this application;

[0055] Figure 23 is a structural schematic diagram of another embodiment of this application;

[0056] Figure 24 is a structural schematic diagram of another embodiment of this application;

[0057] Figure 25 is a structural schematic diagram of another embodiment of this application;

[0058] Figure 26 is a structural schematic diagram of another embodiment of this application;

[0059] Figure 27 is a structural schematic diagram of another embodiment of this application;

[0060] Figure 28 is a front view structural schematic diagram of the cylindrical body of the embodiment shown in Figure 27;

[0061] Figure 29 is a structural schematic diagram of another embodiment of this application;

[0062] Figure 30 is a front view structural schematic diagram of the cylindrical body of the embodiment shown in Figure 29;

[0063] Figure 31 is a structural schematic diagram of another embodiment of this application;

[0064] Figure 32 is a schematic diagram of the structure after removing the base from Figure 31;

[0065] Figure 33 is a schematic diagram of the structure of the support plate in Example 27 or the sheet-like piezoelectric actuator in Example 28. Embodiments of the present invention

[0066] Example 1:

[0067] As shown in Figure 1, a Lissajous scanner includes a base 400, a piezoelectric actuator 100, a support plate 200, and an optical fiber 300. The piezoelectric actuator 100 is a two-dimensional scanning piezoelectric actuator. The fixed end of the piezoelectric actuator 100 is fixedly connected to the base 400, and the free end of the piezoelectric actuator 100 vibrates simultaneously along a first direction and a second direction, which are perpendicular to each other. The free end of the piezoelectric actuator 100 is the front end, the fixed end of the piezoelectric actuator 100 is the rear end, the first direction is the left-right direction, and the second direction is the vertical direction. The rear end of the support plate 200 is fixedly connected to the free end of the piezoelectric actuator 100. As shown in Figure 2, the support plate 200 and the piezoelectric actuator 100 are arranged parallel to the horizontal plane and have an overlapping portion 500 in the front-to-back direction. The optical fiber 300 is fixedly mounted on the front end of the support plate 200 in a cantilever support manner. The piezoelectric actuator 100, the support plate 200, and the optical fiber 300 constitute the scanner cantilever. The support plate 200 and the overlapping portion 500 make the natural frequency of the scanner cantilever in the horizontal direction greater than its natural frequency of the same order in the vertical direction, and make a difference between the natural frequency of the scanner cantilever in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0068] The scanner cantilever has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction, among which a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the scanner cantilever in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the scanner cantilever in the two directions are, the more obvious the coupling effect will be. Therefore, this application utilizes the shape and / or size parameters of the support plate 200 and the overlapping part 500 to adjust the natural frequencies of the scanner cantilever used in the two directions so that they are both close enough to ensure good scanning effect and a uniform and dense scanning grid, and have sufficient difference so that the vibration of the scanner cantilever in the two directions will not cause coupling. Therefore, the difference satisfies that when the piezoelectric actuator 100 performs a Lissajous scan under the drive signal, the scanner cantilever has sufficient amplitude, and the vibration of the scanner cantilever in the horizontal direction and in the vertical direction will not be coupled.

[0069] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner cantilever in the horizontal direction. The difference is sufficient to ensure that the scanner cantilever has sufficient amplitude when the piezoelectric actuator 100 performs Lissajous scanning under drive, and that the vibrations of the scanner cantilever in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0070] Preferably, the natural frequency of the piezoelectric actuator 100 in the first direction and its natural frequency of the same order in the second direction are the same or similar. Here, the piezoelectric actuator 100 refers to the piezoelectric actuator 100 itself, excluding the support plate 200 and other components such as optical fibers. A piezoelectric actuator 100 that meets these requirements is a regularly shaped, rotationally symmetrical piezoelectric actuator, which is easy to manufacture, has easily controllable manufacturing errors, and a high yield rate. Examples include cylindrical piezoelectric actuators, square cylindrical piezoelectric actuators, round bar piezoelectric actuators, and square bar piezoelectric actuators.

[0071] The optical fiber is fixedly mounted on the upper or lower surface of the support plate 200, or disposed inside the support plate 200, using a cantilever support method. The cantilever support refers to the portion of the optical fiber extending beyond the front end of the support plate 200 forming an optical fiber cantilever, with the portion of the optical fiber located behind the cantilever fixedly connected to the support plate 200. As an embodiment where the optical fiber is disposed inside the support plate 200, the support plate 200 itself has mounting holes for accommodating the optical fiber, and the optical fiber is fixedly mounted within these mounting holes using a cantilever support method.

[0072] As an example of the piezoelectric actuator 100:

[0073] As shown in Figure 3, the cylindrical piezoelectric actuator has a cylindrical body with its axis set along the front-to-back direction. The rear end of the body is fixedly connected to the base 400, and the front part of the body is connected to the rear end of the support plate 200.

[0074] The driving method for the cylindrical body can be either by attaching a piezoelectric sheet or by having the body itself made of piezoelectric material, with driving electrodes arranged at corresponding positions on its inner and outer surfaces. The structure of the cylindrical piezoelectric actuator, as well as the aforementioned arrangement of piezoelectric sheets or driving electrodes, are all conventional techniques in this field.

[0075] As shown in Figure 4, the cylindrical piezoelectric actuator has a cylindrical body, which can be either square or rectangular in cross-section. The axis of the body is set along the front-to-back direction. The rear end of the cylindrical body is fixedly connected to the base 400, and the front end of the cylindrical body is connected to the rear end of the support plate 200. Preferably, when the cross-section of the cylindrical body is rectangular, the long side of the body is set parallel to the support plate 200, so that the direction in which the support plate 200 raises the natural frequency is the same as the natural frequency of the body itself, i.e., a higher direction.

[0076] The cylindrical piezoelectric actuator, with a similar driving method to a cylindrical body, can be driven by attaching a piezoelectric sheet, or by using a piezoelectric material as the cylindrical body itself, with driving electrodes arranged at corresponding positions on its inner and outer surfaces. The structure of the cylindrical piezoelectric actuator, as well as the aforementioned arrangement of piezoelectric sheets or driving electrodes, are all conventional techniques in this field.

[0077] As shown in Figure 5, the square bar piezoelectric actuator has a square bar-shaped body. The square bar shape can be either a square or a rectangular cross-section. The axis of the body is set along the front-to-back direction. The rear end of the body is fixedly connected to the base 400, and the front part of the body is connected to the rear end of the support plate 200. Preferably, when the square bar has a rectangular cross-section, the long side of the body is set parallel to the support plate 200, so that the direction in which the support plate 200 raises its natural frequency is at a higher natural frequency than the body itself.

[0078] The driving method for a square rod-type piezoelectric actuator can be achieved by attaching a piezoelectric element. The structure of the square rod-type piezoelectric actuator, as well as its driving method and structure, are all conventional techniques in this field.

[0079] As shown in Figure 6, the cylindrical piezoelectric actuator has a cylindrical body with its axis set along the front-to-back direction. The rear end of the body is fixedly connected to the base 400, and the front part of the body is connected to the rear end of the support plate 200.

[0080] The driving method for a cylindrical piezoelectric actuator can be achieved by attaching a piezoelectric element. The structure of the cylindrical piezoelectric actuator, as well as its driving method and structure, are all conventional techniques in this field.

[0081] Example 2:

[0082] As shown in Figure 1, a Lissajous scanner includes a base 400, a first piezoelectric actuator 100, a sheet-like piezoelectric actuator 200, and an optical fiber 300. The first piezoelectric actuator 100 is a one-dimensional scanning piezoelectric actuator. The fixed end of the first piezoelectric actuator 100 is fixedly connected to the base 400, and the free end of the first piezoelectric actuator 100 vibrates along a first direction. With the free end of the first piezoelectric actuator 100 as the front end and the fixed end of the first piezoelectric actuator 100 as the rear end, and with the first direction as the left-right direction, the rear end of the sheet-like piezoelectric actuator 200 is fixedly connected to the free end of the first piezoelectric actuator 100. The sheet-like piezoelectric actuator 200 is arranged in a direction parallel to the horizontal plane. The sheet-like piezoelectric actuator 200 and the first piezoelectric actuator 100 are connected in a one-dimensional scanning piezoelectric actuator 300. A piezoelectric actuator 100 has an overlapping portion 500 in the front-to-back direction, as shown in Figure 2. The front end of the sheet-like piezoelectric actuator 200 vibrates in the vertical direction. The optical fiber 300 is fixedly disposed at the front end of the sheet-like piezoelectric actuator 200 in a cantilever support manner. The first piezoelectric actuator 100, the sheet-like piezoelectric actuator 200 and the optical fiber 300 constitute a scanner cantilever. The sheet-like piezoelectric actuator 200 and the overlapping portion 500 make the natural frequency of the scanner cantilever in the horizontal direction greater than its natural frequency of the same order in the vertical direction, and make a difference between a certain natural frequency of the scanner cantilever in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0083] The scanner cantilever has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, there is a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) that is closest to the V-order natural frequency of the scanner cantilever in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be, and the more points can be taken. Theoretically, the closer the driving frequencies in the two directions are, the better. However, the closer the natural frequencies used by the scanner cantilever in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the shape structure and / or size parameters of the sheet piezoelectric actuator 200 and the overlapping part 500 to make the natural frequencies of the scanner cantilever used in the two directions both close enough to ensure good scanning effect and have a uniform and dense scanning grid, and have enough difference so that the vibration of the scanner cantilever in the two directions will not produce coupling.

[0084] Preferably, the natural frequency of the first piezoelectric actuator 100 in the left-right direction is the same as or similar to its natural frequency in the vertical direction. Here, the first piezoelectric actuator 100 refers to the first piezoelectric actuator 100 itself, excluding the sheet-shaped piezoelectric actuator 200 and other components such as optical fibers. The first piezoelectric actuator 100 meeting these requirements is a regularly shaped, rotationally symmetrical piezoelectric actuator, which is easy to manufacture, has easily controllable manufacturing errors, and a high yield rate. Examples include cylindrical piezoelectric actuators, square cylindrical piezoelectric actuators, round bar piezoelectric actuators, and square bar piezoelectric actuators. The sheet-shaped piezoelectric actuator 200 is also a conventional actuator, with low manufacturing difficulty. This application, by combining two easily manufactured components, obtains a scanner suitable for Lissajous scanning and with guaranteed anti-coupling effect, which is less difficult to manufacture and has a higher yield rate compared to existing Lissajous scanners.

[0085] Therefore, the difference satisfies that when the first piezoelectric actuator 100 performs Lissajous scanning under the drive signal, the scanner cantilever has sufficient amplitude so that the vibration of the scanner cantilever in the horizontal direction and in the vertical direction will not couple.

[0086] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0087] The optical fiber is fixedly mounted on the upper or lower surface of the sheet-like piezoelectric actuator 200, or disposed inside the sheet-like piezoelectric actuator 200, using a cantilever support method. The cantilever support refers to the portion of the optical fiber extending beyond the front end of the sheet-like piezoelectric actuator 200 forming an optical fiber cantilever, with the portion of the optical fiber located behind the cantilever fixedly connected to the sheet-like piezoelectric actuator 200. In one embodiment where the optical fiber is disposed inside the sheet-like piezoelectric actuator 200, the sheet-like piezoelectric actuator 200 body has a mounting hole for accommodating the optical fiber, and the optical fiber is fixedly mounted within the mounting hole using a cantilever support method.

[0088] As an example of the first piezoelectric actuator 100:

[0089] As shown in Figure 3, the cylindrical actuator has a cylindrical body with its axis set along the front-to-back direction. The rear end of the body is fixedly connected to the base 400, and the front part of the body is connected to the rear end of the sheet-like piezoelectric actuator 200.

[0090] The driving method for the cylindrical body can be either by attaching a piezoelectric sheet or by having the body itself made of piezoelectric material, with driving electrodes arranged at corresponding positions on its inner and outer surfaces. The structure of the cylindrical actuator, as well as the aforementioned arrangement of piezoelectric sheets or driving electrodes, are all conventional techniques in this field.

[0091] As shown in Figure 4, the cylindrical actuator has a cylindrical body, which can be either square or rectangular in cross-section. The axis of the body is set along the front-to-back direction. The rear end of the cylindrical body is fixedly connected to the base 400, and the front end of the cylindrical body is connected to the rear end of the sheet-like piezoelectric actuator 200. Preferably, when the cross-section of the cylindrical body is rectangular, the long side of the body is set parallel to the sheet-like piezoelectric actuator 200, so that the direction in which the sheet-like piezoelectric actuator 200 raises its natural frequency is at a higher natural frequency than the body itself.

[0092] The cylindrical actuator, with a similar driving method to a cylindrical body, can be driven by attaching a piezoelectric sheet, or by using a piezoelectric material as the cylindrical body itself, with driving electrodes arranged at corresponding positions on its inner and outer surfaces. The cylindrical actuator structure, as well as the aforementioned arrangement of piezoelectric sheets or driving electrodes, are all conventional techniques in this field.

[0093] As shown in Figure 5, the square rod actuator has a square rod-shaped body. The square rod can have a square or rectangular cross-section. The axis of the body is set along the front-to-back direction. The rear end of the body is fixedly connected to the base 400, and the front part of the body is connected to the rear end of the sheet-like piezoelectric actuator 200. Preferably, when the square rod has a rectangular cross-section, the long side of the body is set parallel to the sheet-like piezoelectric actuator 200, so that the direction in which the sheet-like piezoelectric actuator 200 raises its natural frequency is at a higher natural frequency than the body itself.

[0094] The driving method for a square rod actuator can be achieved by attaching a piezoelectric element. The structure of the square rod actuator, as well as its driving method and structure, are all conventional techniques in this field.

[0095] As shown in Figure 6, the cylindrical actuator has a cylindrical body with its axis set along the front-to-back direction. The rear end of the body is fixedly connected to the base 400, and the front part of the body is connected to the rear end of the sheet-like piezoelectric actuator 200.

[0096] The driving method for a cylindrical rod actuator can be achieved by attaching a piezoelectric element. The structure of the cylindrical rod actuator, as well as its driving method and structure, are all conventional techniques in this field.

[0097] Optionally, the sheet-shaped piezoelectric actuator 200 is a single piezoelectric actuator or a dual piezoelectric actuator.

[0098] This application utilizes the adjustment of the shape and / or size parameters of the sheet piezoelectric actuator and the overlapping part to ensure that the natural frequencies of the scanner cantilever used in both directions are sufficiently close to guarantee good scanning effect and have a uniform and dense scanning grid, while also having sufficient difference so that the vibration of the scanner cantilever in both directions will not couple.

[0099] Since the natural frequencies of the first piezoelectric actuator in the left-right direction and in the vertical direction are the same or similar, the first piezoelectric actuator mentioned here refers to the first piezoelectric actuator itself, excluding sheet-like piezoelectric actuators and other components such as optical fibers. A first piezoelectric actuator that meets these requirements is a regularly shaped, rotationally symmetrical piezoelectric actuator, which is easy to manufacture, has easily controllable manufacturing errors, and a high yield rate.

[0100] Example 3:

[0101] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0102] As shown in Figures 7 and 2, a Lissajous scanner includes a cylindrical body 100, a support plate 103 fixedly connected to the cylindrical body 100, and an optical fiber 104 fixedly mounted on the support plate 103 in a cantilevered manner.

[0103] With the axial extension direction of the cylindrical body 100 as the front-rear direction, the rear end of the cylindrical body 100 is fixedly connected to the base 200 for support. At least one of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101. The extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction.

[0104] At least one of the upper and lower sides of the cylindrical body 100 is provided with a second piezoelectric sheet 102, and the extension and retraction of the second piezoelectric sheet 102 drives the front end of the cylindrical body 100 to vibrate in the vertical direction.

[0105] The support plate 103 is arranged parallel to the horizontal plane and is located on the front side of the cylindrical body 100. Its rear end is fixedly connected to the cylindrical body 100. The optical fiber 104 is fixedly arranged with the front end of the support plate 103 in a cantilever support manner. The support plate 103 and the cylindrical body 100 have an overlapping part 105 in the front-rear direction. The support plate 103 and the overlapping part 105 make the natural frequency of the combination of the cylindrical body 100, the first piezoelectric sheet 101, the second piezoelectric sheet 102, the support plate 103 and the optical fiber 104 in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes the natural frequency of the combination in the vertical direction that is closest to its natural frequency of V in the horizontal direction have a difference with the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0106] The difference ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibration of the assembly in the horizontal direction and the vibration in the vertical direction will not be coupled.

[0107] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0108] Preferably, the natural frequency of the cylindrical body 100 in the horizontal direction is the same or similar to the natural frequency of the same order in the vertical direction. The cylindrical body 100 that meets this requirement has a regular shape and a rotationally symmetrical structure, which makes the cylindrical body 100 easy to process, easy to control the processing error, and has a high yield rate, such as a cylindrical body or a square cylindrical body.

[0109] Optionally, a first piezoelectric sheet 101 is provided on either the left or right side of the cylindrical body 100, and the extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction. The number of first piezoelectric sheets 101 can be one, two, or more. When there are two or more first piezoelectric sheets 101, each first piezoelectric sheet 101 extends and retracts synchronously and at the same length.

[0110] Optionally, a first piezoelectric sheet 101 is provided on both the left and right sides of the cylindrical body 100. The first piezoelectric sheet 101 on the left side and the first piezoelectric sheet 101 on the right side extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical body 100 to vibrate horizontally. The number of first piezoelectric sheets 101 on the same side can be one, two, or more. When there are two or more first piezoelectric sheets 101 on the same side, the first piezoelectric sheets 101 on the same side extend and retract synchronously with equal length.

[0111] Optionally, a second piezoelectric sheet 102 is provided on either the upper or lower side of the cylindrical body 100, and the extension and retraction of the second piezoelectric sheet 102 drives the front end of the cylindrical body 100 to vibrate vertically. The number of second piezoelectric sheets 102 can be one, two, or more. When there are two or more second piezoelectric sheets 102, the second piezoelectric sheets 102 extend and retract synchronously and at the same length.

[0112] Alternatively, a second piezoelectric sheet 102 may be provided on both the upper and lower sides of the cylindrical body 100. The second piezoelectric sheet 102 on the upper side and the second piezoelectric sheet 102 on the lower side extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical body 100 to vibrate vertically up and down. The number of second piezoelectric sheets 102 on the same side can be one, two, or more. When there are two or more second piezoelectric sheets 102 on the same side, the second piezoelectric sheets 102 on the same side extend and retract synchronously with equal length.

[0113] Preferably, the surface of the cylindrical body 100 where the first piezoelectric sheet 101 or the second piezoelectric sheet 102 is disposed is flat to facilitate the placement of the piezoelectric sheet. Further optionally, the surface of the cylindrical body 100 where the first piezoelectric sheet 101 or the second piezoelectric sheet 102 is disposed can be either the inner surface or the outer surface of the cylindrical body 100.

[0114] More preferably, when the first piezoelectric sheet 101 is provided on both the left and right sides of the cylindrical body 100, the first piezoelectric sheet 101 on the left and right sides of the cylindrical body 100 is symmetrically arranged so as to drive the cylindrical body 100 to vibrate accurately in the horizontal direction without generating a displacement component in the vertical direction; when the second piezoelectric sheet 102 is provided on both the upper and lower sides of the cylindrical body 100, the second piezoelectric sheet 102 on the upper and lower sides of the cylindrical body 100 is symmetrically arranged so as to drive the cylindrical body 100 to vibrate accurately in the vertical direction without generating a displacement component in the horizontal direction.

[0115] This application eliminates the need for the piezoelectric actuator of the Lissajous scanner to have a specific difference in its natural frequency in the two driving directions, thus avoiding coupling of vibrations in the two driving directions and reducing the processing difficulty and accuracy requirements. More preferably, this application allows the cylindrical body 100 to have the same or similar natural frequencies in the two driving directions, and allows the cylindrical body 100 itself to be a rotationally symmetric structure. This further reduces the processing difficulty of the piezoelectric actuator of the Lissajous scanner, resulting in a significant improvement in processing efficiency and yield.

[0116] Example 4:

[0117] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0118] As shown in Figures 7 and 2, a Lissajous scanner includes a cylindrical body 100, a support plate 103 fixedly connected to the cylindrical body 100, and an optical fiber 104 fixedly mounted on the support plate 103 in a cantilevered manner.

[0119] With the axial extension direction of the cylindrical body 100 as the front-rear direction, the rear end of the cylindrical body 100 is fixedly connected to the base 200 for support. At least one of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101. The extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction.

[0120] At least one of the upper and lower sides of the cylindrical body 100 is provided with a second piezoelectric sheet 102, and the extension and retraction of the second piezoelectric sheet 102 drives the front end of the cylindrical body 100 to vibrate in the vertical direction.

[0121] The support plate 103 is arranged parallel to the horizontal plane, located on the front side of the cylindrical body 100, and its rear end is fixedly connected to the cylindrical body 100.

[0122] The left and right sides of the cylindrical body 100 are provided with mounting grooves 106 for connecting the support plate 103. The rear end portion of the support plate 103 is inserted into the mounting grooves 106 and fixedly connected to the cylindrical body 100.

[0123] The front end of the optical fiber 104 is fixedly mounted on the support plate 103 in a cantilever support manner. The support plate 103 and the cylindrical body 100 have an overlapping part 105 in the front-rear direction. The support plate 103 and the overlapping part 105 make the natural frequency of the combination part composed of the cylindrical body 100, the first piezoelectric sheet 101, the second piezoelectric sheet 102, the support plate 103 and the optical fiber 104 in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes the natural frequency of the combination part in the vertical direction that is closest to its natural frequency of V in the horizontal direction have a difference with the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0124] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to 2) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than the first-order natural frequency U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the shape structure and / or size parameters of the support plate 103 and the overlapping part 105 to make the natural frequencies of the assembly used in the two directions both close enough to ensure good scanning effect and a uniform and dense scanning grid, and have enough difference so that the vibration of the assembly in the two directions will not couple.

[0125] The difference ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibration of the assembly in the horizontal direction and the vibration in the vertical direction will not be coupled.

[0126] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0127] Preferably, the natural frequency of the cylindrical body 100 in the horizontal direction is the same or similar to the natural frequency of the same order in the vertical direction. The cylindrical body 100 that meets this requirement has a regular shape and a rotationally symmetrical structure, which makes the cylindrical body 100 easy to process, easy to control the processing error, and has a high yield rate, such as a cylindrical body or a square cylindrical body.

[0128] Optionally, the mounting groove 106 may be located in the middle, upper or lower part of the left and right side walls of the cylindrical body 100 in the vertical direction, without limitation.

[0129] Optionally, as shown in Figure 12, the cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

[0130] Alternatively, as shown in Figure 8, the cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is circular, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

[0131] In this embodiment, the piezoelectric sheet attached to the outer or inner surface of the cylindrical body 100 is a flat piezoelectric sheet or an arc-shaped piezoelectric sheet whose shape matches the outer or inner surface of the cylindrical body 100, and is selected adaptively according to specific working conditions. Based on this, the arrangement of the first piezoelectric sheet 101 and the second piezoelectric sheet 102 in this embodiment is the same as in embodiment 3.

[0132] Example 5:

[0133] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0134] As shown in Figures 7 and 2, a Lissajous scanner includes a cylindrical body 100, a support plate 103 fixedly connected to the cylindrical body 100, and an optical fiber 104 fixedly mounted on the support plate 103 in a cantilevered manner.

[0135] With the axial extension direction of the cylindrical body 100 as the front-rear direction, the rear end of the cylindrical body 100 is fixedly connected to the base 200 for support. At least one of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101. The extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction.

[0136] At least one of the upper and lower sides of the cylindrical body 100 is provided with a second piezoelectric sheet 102, and the extension and retraction of the second piezoelectric sheet 102 drives the front end of the cylindrical body 100 to vibrate in the vertical direction.

[0137] The cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

[0138] A support plate 103 is arranged parallel to the horizontal plane, located at the front of the cylindrical body 100, and its rear end is fixedly connected to the cylindrical body 100. The support plate 103 and the cylindrical body 100 have an overlapping portion 105 in the front-rear direction. The left and right sides of the cylindrical body 100 are provided with mounting grooves 106 for connecting the support plate 103. The rear end portion of the support plate 103 is inserted into the mounting groove 106 and fixedly connected to the cylindrical body 100. The optical fiber 104 is fixedly mounted on the front end of the support plate 103 in a cantilever support manner. The support plate 103 is installed on the mounting... The portion within the groove 106 and the portion of the cylindrical body 100 that overlaps with the supporting plate 103 in the front-rear direction form an overlapping portion 105. The supporting plate 103 and the overlapping portion 105 ensure that the natural frequency of the assembly consisting of the cylindrical body 100, the first piezoelectric sheet 101, the second piezoelectric sheet 102, the supporting plate 103, and the optical fiber 104 is greater in the horizontal direction than the same-order natural frequency in the vertical direction. Furthermore, the U-order natural frequency, which is closest to the V-order natural frequency in the vertical direction, has a difference from the V-order natural frequency in the horizontal direction. In this embodiment, V is first-order and U is second-order. Of course, this is only the parameter selection for this embodiment; in other embodiments with similar structures, V can also be an integer greater than 1, and U can be an integer greater than V.

[0139] Specifically, by adjusting the shape and / or size parameters of the support plate 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0140] The difference value ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal and vertical directions do not couple. Generally, the difference value ranges from 10Hz to 12kHz. More preferably, the difference value ranges from 1kHz to 10kHz. Specifically, it is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference value is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0141] Optionally, the mounting groove 106 may be located in the middle, upper or lower part of the left and right side walls of the cylindrical body 100 in the vertical direction, without limitation.

[0142] In this embodiment, the first piezoelectric element 101 and the second piezoelectric element 102 are configured in the same way as in embodiment 3.

[0143] Example 6:

[0144] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0145] As shown in Figures 8 and 2, a Lissajous scanner includes a cylindrical body 100, a support plate 103 fixedly connected to the cylindrical body 100, and an optical fiber 104 fixedly mounted on the support plate 103 in a cantilevered manner.

[0146] With the axial extension direction of the cylindrical body 100 as the front-rear direction, the rear end of the cylindrical body 100 is fixedly connected to the base 200 for support. At least one of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101. The extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction.

[0147] At least one of the upper and lower sides of the cylindrical body 100 is provided with a second piezoelectric sheet 102, and the extension and retraction of the second piezoelectric sheet 102 drives the front end of the cylindrical body 100 to vibrate in the vertical direction.

[0148] The cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is circular, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

[0149] A support plate 103 is arranged parallel to the horizontal plane, located at the front of the cylindrical body 100, and its rear end is fixedly connected to the cylindrical body 100. An optical fiber 104 is fixedly mounted on the front end of the support plate 103 using a cantilever support method. The support plate 103 and the cylindrical body 100 have an overlapping portion 105 in the front-rear direction. Both the left and right sides of the cylindrical body 100 are provided with mounting grooves 106 for connecting the support plate 103. The rear end portion of the support plate 103 is inserted into the mounting groove 106 and fixedly connected to the cylindrical body 100. The support plate 103 is installed on the mounting... The portion within the groove 106 and the portion of the cylindrical body 100 that overlaps with the supporting plate 103 in the front-rear direction form an overlapping portion 105. The supporting plate 103 and the overlapping portion 105 ensure that the natural frequency of the assembly consisting of the cylindrical body 100, the first piezoelectric sheet 101, the second piezoelectric sheet 102, the supporting plate 103, and the optical fiber 104 is greater in the horizontal direction than the same-order natural frequency in the vertical direction. Furthermore, the U-order natural frequency, which is closest to the V-order natural frequency in the vertical direction, has a difference from the V-order natural frequency in the horizontal direction. In this embodiment, V is first-order and U is second-order. Of course, this is only the parameter selection for this embodiment; in other embodiments with similar structures, V can also be an integer greater than 1, and U can be an integer greater than V.

[0150] Specifically, by adjusting the shape and / or size parameters of the support plate 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0151] The difference value ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal and vertical directions do not couple. Generally, the difference value ranges from 10Hz to 12kHz. More preferably, the difference value ranges from 1kHz to 10kHz. Specifically, it is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference value is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0152] Optionally, the mounting groove 106 may be located in the middle, upper or lower part of the left and right side walls of the cylindrical body 100 in the vertical direction, without limitation.

[0153] In this embodiment, the piezoelectric sheet attached to the outer or inner surface of the cylindrical body 100 is a flat piezoelectric sheet or an arc-shaped piezoelectric sheet whose shape matches the outer or inner surface of the cylindrical body 100, and is selected adaptively according to specific working conditions. Based on this, the arrangement of the first piezoelectric sheet 101 and the second piezoelectric sheet 102 in this embodiment is the same as in embodiment 3.

[0154] Example 7:

[0155] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0156] As shown in Figures 9 and 2, a Lissajous scanner includes a cylindrical body 100, a support plate 103 fixedly connected to the cylindrical body 100, and an optical fiber 104 fixedly mounted on the support plate 103 in a cantilevered manner.

[0157] With the axial extension direction of the cylindrical body 100 as the front-rear direction, the rear end of the cylindrical body 100 is fixedly connected to the base 200 for support. At least one of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101. The extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction.

[0158] At least one of the upper and lower sides of the cylindrical body 100 is provided with a second piezoelectric sheet 102, and the extension and retraction of the second piezoelectric sheet 102 drives the front end of the cylindrical body 100 to vibrate in the vertical direction.

[0159] The support plate 103 is arranged parallel to the horizontal plane and is located on the front side of the cylindrical body 100. The rear end of the support plate 103 is attached to the upper or lower surface of the cylindrical body 100 and is fixedly connected to the cylindrical body 100. The surface of the cylindrical body 100 for attaching the support plate is flat. The optical fiber 104 is fixedly provided with the front end of the support plate 103 in a cantilever support manner. The part of the support plate 103 that is attached to the cylindrical body 100 and the part of the cylindrical body 100 that overlaps with this part of the support plate 103 in the front-back direction form an overlapping part 105. The support plate 103 and the overlapping part 105 make the natural frequency of the combination of the cylindrical body 100, the first piezoelectric sheet 101, the second piezoelectric sheet 102, the support plate 103 and the optical fiber 104 in the horizontal direction greater than the natural frequency of the combination in the vertical direction. It also makes the U-order natural frequency of the combination in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, have a difference with the V-order natural frequency in the horizontal direction. In this embodiment, order V is first order and order U is second order.

[0160] Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structure types to this embodiment, V can also be an integer greater than 1, and U can be an integer greater than V.

[0161] Specifically, by adjusting the shape and / or size parameters of the support plate 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0162] Preferably, the natural frequency of the cylindrical body 100 in the horizontal direction is the same as its natural frequency of the same order in the vertical direction. Optionally, its outer contour is square, and its interior is provided with a central hole of square or circular shape coaxial with the outer contour. Of course, there is no limitation on this; for example, its outer surface is roughly cylindrical and has several planes arranged rotationally symmetrically, one of which is used to mount the support plate.

[0163] The difference value ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal and vertical directions do not couple. Generally, the difference value ranges from 10Hz to 12kHz. More preferably, the difference value ranges from 1kHz to 10kHz. Specifically, it is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference value is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0164] In this embodiment, the piezoelectric sheet attached to the outer or inner surface of the cylindrical body 100 is a flat piezoelectric sheet or an arc-shaped piezoelectric sheet whose shape matches the outer or inner surface of the cylindrical body 100, and is selected adaptively according to specific working conditions. Based on this, the arrangement of the first piezoelectric sheet 101 and the second piezoelectric sheet 102 in this embodiment is the same as in embodiment 3.

[0165] Example 8:

[0166] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0167] Referring to Figures 10 and 2, a Lissajous scanner includes a piezoelectric cylindrical body 100, a support plate 103 fixedly connected to the piezoelectric cylindrical body 100, and an optical fiber 104 fixedly mounted on the support plate 103 in a cantilevered manner.

[0168] With the axial extension direction of the piezoelectric material cylindrical body 100 as the front-to-back direction, the rear end of the piezoelectric material cylindrical body 100 is fixedly connected to the base 200 and supported by the base 200.

[0169] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a first inner electrode 1011 and a first outer electrode 1012 respectively. The portion of the piezoelectric material cylindrical body 100 located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, and the front end of the cylindrical body 100 is driven to vibrate left and right in the horizontal direction.

[0170] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a second inner electrode 1021 and a second outer electrode 1022 respectively. The portion of the piezoelectric material cylindrical body 100 located between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction. The piezoelectric material located between the second inner electrode 1021 and the second outer electrode 1022 is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate in the vertical direction.

[0171] The support plate 103 is arranged parallel to the horizontal plane and is located on the front side of the piezoelectric material cylindrical body 100. Its rear end is fixedly connected to the piezoelectric material cylindrical body 100. The optical fiber 104 is fixedly arranged with the front end of the support plate 103 in a cantilever support manner. The support plate 103 and the piezoelectric material cylindrical body 100 have an overlapping part 105 in the front-rear direction. The support plate 103 and the overlapping part 105 make the natural frequency of the combination of the piezoelectric material cylindrical body 100, the support plate 103 and the optical fiber 104 in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes the natural frequency of the combination in the vertical direction that is closest to its natural frequency of V in the horizontal direction have a difference with the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0172] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than the first-order natural frequency U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the shape structure and / or size parameters of the support plate 103 and the overlapping part 105 to make the natural frequencies of the assembly used in the two directions both close enough to ensure good scanning effect and a uniform and dense scanning grid, and have enough difference so that the vibration of the assembly in the two directions will not couple.

[0173] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0174] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0175] Preferably, the piezoelectric material cylindrical body 100 has the same or similar natural frequency in the horizontal direction and the same natural frequency in the vertical direction. The piezoelectric material cylindrical body 100 that meets this requirement has a regular shape and a rotationally symmetrical structure, which makes the piezoelectric material cylindrical body 100 easy to process, easy to control the processing error, and has a high yield rate, such as a cylindrical body or a square body.

[0176] Optionally, a first inner electrode 1011 and a first outer electrode 1012 are respectively provided on the inner and outer surfaces of either the left or right sides of the piezoelectric material cylindrical body 100. The portion of the piezoelectric material cylindrical body 100 located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two, or more.

[0177] Alternatively, the inner and outer surfaces of the left and right sides of the piezoelectric material cylindrical body 100 are respectively provided with correspondingly matched first inner electrodes 1011 and first outer electrodes 1012. The portion of the piezoelectric material cylindrical body 100 located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, and the piezoelectric materials on the left and right sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two, or more.

[0178] Optionally, a second inner electrode 1021 and a second outer electrode 1022 are respectively provided on the inner and outer surfaces of either the upper or lower sides of the piezoelectric material cylindrical body 100. The portion of the piezoelectric material cylindrical body 100 located between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction. The piezoelectric material located between the two electrodes is driven to extend and retract in the front-rear direction by the second inner electrode 1021 and the second outer electrode 1022, driving the front end of the piezoelectric material cylindrical body 100 to vibrate in the vertical direction. The number of second inner electrodes 1021 or second outer electrodes 1022 located on the same side can be one, two, or more.

[0179] Alternatively, the inner and outer surfaces of the upper and lower sides of the piezoelectric material cylindrical body 100 are respectively provided with correspondingly matched second inner electrodes 1021 and second outer electrodes 1022. The portion of the piezoelectric material cylindrical body 100 located between the second inner electrodes 1021 and the second outer electrodes 1022 is polarized along the thickness direction. The piezoelectric material located between the second inner electrodes 1021 and the second outer electrodes 1022 is driven to extend and retract in the front-back direction, and the piezoelectric materials on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the piezoelectric material cylindrical body 100 to vibrate in the vertical direction. The number of second inner electrodes 1021 or second outer electrodes 1022 located on the same side can be one, two, or more.

[0180] More preferably, when the inner and outer surfaces of the piezoelectric material cylindrical body 100 on both the left and right sides are respectively provided with a first inner electrode 1011 and a corresponding first outer electrode 1012, the first inner electrodes 1011 on the left and right sides of the piezoelectric material cylindrical body 100 are symmetrically arranged to drive the piezoelectric material cylindrical body 100 to vibrate accurately in the horizontal direction without generating a vertical displacement component; when the inner and outer surfaces of the upper and lower sides of the piezoelectric material cylindrical body 100 are respectively provided with a second inner electrode 1021 and a corresponding second outer electrode 1022, the second inner electrodes 1021 on the upper and lower sides of the piezoelectric material cylindrical body 100 are symmetrically arranged to drive the piezoelectric material cylindrical body 100 to vibrate accurately in the vertical direction without generating a horizontal displacement component.

[0181] This application eliminates the need for the piezoelectric actuator of the Lissajous scanner to have a specific difference in its natural frequency in the two driving directions, thus avoiding coupling of vibrations in the two driving directions and reducing the processing difficulty and accuracy requirements. More preferably, this application allows the piezoelectric material cylindrical body 100 to have the same or similar natural frequencies in the two driving directions, and allows the piezoelectric material cylindrical body 100 itself to be a rotationally symmetric structure. This further reduces the processing difficulty of the piezoelectric actuator of the Lissajous scanner, resulting in a significant improvement in processing efficiency and yield.

[0182] Example 9:

[0183] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0184] Referring to Figures 10 and 2, a Lissajous scanner includes a piezoelectric cylindrical body 100, a support plate 103 fixedly connected to the piezoelectric cylindrical body 100, and an optical fiber 104 fixedly mounted on the support plate 103 in a cantilevered manner.

[0185] With the axial extension direction of the piezoelectric material cylindrical body 100 as the front-to-back direction, the rear end of the piezoelectric material cylindrical body 100 is fixedly connected to the base 200 and supported by the base 200.

[0186] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a first inner electrode 1011 and a first outer electrode 1012 respectively. The portion of the piezoelectric material cylindrical body 100 located between the corresponding first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate left and right in the horizontal direction.

[0187] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a second inner electrode 1021 and a second outer electrode 1022 respectively. The portion of the piezoelectric material cylindrical body 100 located between the corresponding second inner electrode 1021 and second outer electrode 1022 is polarized along the thickness direction. The piezoelectric material located between the second inner electrode 1021 and the second outer electrode 1022 is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate in the vertical direction.

[0188] The support plate 103 is arranged parallel to the horizontal plane and is located at the front of the piezoelectric material cylindrical body 100. Its rear end is fixedly connected to the piezoelectric material cylindrical body 100. The left and right sides of the piezoelectric material cylindrical body 100 are provided with mounting grooves 106 for connecting the support plate 103. The rear end of the support plate 103 is inserted into the mounting grooves 106 and fixedly connected to the piezoelectric material cylindrical body 100. The optical fiber 104 is fixedly mounted on the front end of the support plate 103 in a cantilever support manner. The support plate 103 and the piezoelectric material cylindrical body 100 have overlapping portions in the front-rear direction. 105. The portion of the support plate 103 installed in the mounting groove 106 and the portion of the piezoelectric material cylindrical body 100 that overlaps with this portion of the support plate 103 in the front-rear direction constitute an overlapping portion 105. The support plate 103 and the overlapping portion 105 cause the natural frequency of the assembly consisting of the piezoelectric material cylindrical body 100, the support plate 103, and the optical fiber 104 in the horizontal direction to be greater than the same order natural frequency of the assembly in the vertical direction. Furthermore, the U-order natural frequency of the assembly in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, has a difference from the V-order natural frequency in the horizontal direction. In this embodiment, the V-order is first order, and the U-order is second order.

[0189] Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structure types to this embodiment, V can also be an integer greater than 1, and U can be an integer greater than V.

[0190] Specifically, by adjusting the shape and / or size parameters of the support plate 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0191] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0192] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0193] Optionally, the mounting groove 106 may be located in the middle, upper or lower part of the left and right side walls of the piezoelectric material cylindrical body 100 in the vertical direction, without limitation.

[0194] Optionally, as shown in Figure 10, the piezoelectric material cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

[0195] Alternatively, as shown in Figure 11, the piezoelectric material cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is circular, and its interior is provided with a central hole that is coaxial with the outer contour and has a circular or square contour.

[0196] In this embodiment, the arrangement of the first inner electrode 1011 and the first outer electrode 1012, as well as the second inner electrode 1021 and the second outer electrode 1022, is the same as in embodiment 8. The polarization method, driving method, and driving principle of the corresponding part of the piezoelectric material cylindrical body 100 are also the same as in embodiment 8.

[0197] Example 10:

[0198] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0199] Referring to Figures 10 and 2, a Lissajous scanner includes a piezoelectric cylindrical body 100, a support plate 103 fixedly connected to the piezoelectric cylindrical body 100, and an optical fiber 104 fixedly mounted on the support plate 103 in a cantilevered manner.

[0200] With the axial extension direction of the piezoelectric material cylindrical body 100 as the front-to-back direction, the rear end of the piezoelectric material cylindrical body 100 is fixedly connected to the base 200 and supported by the base 200.

[0201] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a first inner electrode 1011 and a first outer electrode 1012 respectively. The portion of the piezoelectric material cylindrical body 100 located between the corresponding first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate left and right in the horizontal direction.

[0202] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a second inner electrode 1021 and a second outer electrode 1022 respectively. The portion of the piezoelectric material cylindrical body 100 located between the corresponding second inner electrode 1021 and second outer electrode 1022 is polarized along the thickness direction. The piezoelectric material located between the second inner electrode 1021 and the second outer electrode 1022 is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate in the vertical direction.

[0203] The piezoelectric material cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

[0204] A support plate 103 is arranged parallel to the horizontal plane and is located at the front of the piezoelectric material cylindrical body 100. Its rear end is fixedly connected to the piezoelectric material cylindrical body 100. The optical fiber 104 is fixedly mounted on the front end of the support plate 103 in a cantilever support manner. The support plate 103 and the piezoelectric material cylindrical body 100 have an overlapping portion 105 in the front-rear direction. The left and right sides of the piezoelectric material cylindrical body 100 are provided with mounting grooves 106 for connecting the support plate 103. The rear end portion of the support plate 103 is inserted into the mounting grooves 106 and fixedly connected to the piezoelectric material cylindrical body 100. A fixed connection is established, with the portion of the support plate 103 installed within the mounting groove 106 forming an overlapping portion 105 with the portion of the piezoelectric material cylindrical body 100 that overlaps with this portion of the support plate 103 in the front-rear direction. The support plate 103 and the overlapping portion 105 ensure that the natural frequency of the assembly consisting of the piezoelectric material cylindrical body 100, the support plate 103, and the optical fiber 104 in the horizontal direction is greater than the same-order natural frequency in the vertical direction. Furthermore, a difference exists between the U-order natural frequency in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, and the V-order natural frequency in the horizontal direction. In this embodiment, V-order is first-order, and U-order is second-order.

[0205] Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structure types to this embodiment, V can also be an integer greater than 1, and U can be an integer greater than V.

[0206] Specifically, by adjusting the shape and / or size parameters of the support plate 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0207] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0208] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0209] Optionally, the mounting groove 106 may be located in the middle, upper or lower part of the left and right side walls of the piezoelectric material cylindrical body 100 in the vertical direction, without limitation.

[0210] In this embodiment, the arrangement of the first inner electrode 1011 and the first outer electrode 1012, as well as the second inner electrode 1021 and the second outer electrode 1022, is the same as in embodiment 8. The polarization method, driving method, and driving principle of the corresponding part of the piezoelectric material cylindrical body 100 are also the same as in embodiment 8.

[0211] Example 11:

[0212] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0213] Referring to Figures 11 and 2, a Lissajous scanner includes a piezoelectric cylindrical body 100, a support plate 103 fixedly connected to the piezoelectric cylindrical body 100, and an optical fiber 104 fixedly mounted on the support plate 103 in a cantilevered manner.

[0214] With the axial extension direction of the piezoelectric material cylindrical body 100 as the front-to-back direction, the rear end of the piezoelectric material cylindrical body 100 is fixedly connected to the base 200 for support. At least one of the left and right sides of the piezoelectric material cylindrical body 100 has a first inner electrode 1011 and a first outer electrode 1012 respectively provided on the inner and outer surfaces. The portion of the piezoelectric material cylindrical body 100 located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-to-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate left and right in the horizontal direction.

[0215] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a second inner electrode 1021 and a second outer electrode 1022 respectively. The portion of the piezoelectric material cylindrical body 100 located between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction. The piezoelectric material located between the second inner electrode 1021 and the second outer electrode 1022 is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate in the vertical direction.

[0216] The piezoelectric material cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is circular, and its interior is provided with a central hole that is coaxial with the outer contour and has a circular or square contour.

[0217] A support plate 103 is arranged parallel to the horizontal plane and is located at the front of the piezoelectric material cylindrical body 100. Its rear end is fixedly connected to the piezoelectric material cylindrical body 100. The optical fiber 104 is fixedly mounted on the front end of the support plate 103 in a cantilever support manner. The support plate 103 and the piezoelectric material cylindrical body 100 have an overlapping portion 105 in the front-rear direction. The left and right sides of the piezoelectric material cylindrical body 100 are provided with mounting grooves 106 for connecting the support plate 103. The rear end portion of the support plate 103 is inserted into the mounting grooves 106 and fixedly connected to the piezoelectric material cylindrical body 100. A fixed connection is established, with the portion of the support plate 103 installed within the mounting groove 106 forming an overlapping portion 105 with the portion of the piezoelectric material cylindrical body 100 that overlaps with this portion of the support plate 103 in the front-rear direction. The support plate 103 and the overlapping portion 105 ensure that the natural frequency of the assembly consisting of the piezoelectric material cylindrical body 100, the support plate 103, and the optical fiber 104 in the horizontal direction is greater than the same-order natural frequency in the vertical direction. Furthermore, a difference exists between the U-order natural frequency in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, and the V-order natural frequency in the horizontal direction. In this embodiment, V-order is first-order, and U-order is second-order.

[0218] Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structure types to this embodiment, V can also be an integer greater than 1, and U can be an integer greater than V.

[0219] Specifically, by adjusting the shape and / or size parameters of the support plate 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0220] The difference value ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibrations of the actuator in the horizontal direction and the vibrations in the vertical direction do not couple. Generally, the difference value ranges from 10Hz to 12kHz. More preferably, the difference value ranges from 1kHz to 10kHz. Specifically, it is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference value is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0221] Optionally, the mounting groove 106 may be located in the middle, upper or lower part of the left and right side walls of the piezoelectric material cylindrical body 100 in the vertical direction, without limitation.

[0222] In this embodiment, the arrangement of the first inner electrode 1011 and the first outer electrode 1012, as well as the second inner electrode 1021 and the second outer electrode 1022, is the same as in embodiment 8. The polarization method, driving method, and driving principle of the corresponding part of the piezoelectric material cylindrical body 100 are also the same as in embodiment 8.

[0223] Example 12:

[0224] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0225] Referring to Figures 12 and 2, a Lissajous scanner includes a piezoelectric cylindrical body 100, a support plate 103 fixedly connected to the piezoelectric cylindrical body 100, and an optical fiber 104 fixedly mounted on the support plate 103 in a cantilevered manner.

[0226] With the axial extension direction of the piezoelectric material cylindrical body 100 as the front-to-back direction, the rear end of the piezoelectric material cylindrical body 100 is fixedly connected to the base 200 for support. At least one of the left and right sides of the piezoelectric material cylindrical body 100 has a first inner electrode 1011 and a first outer electrode 1012 respectively provided on the inner and outer surfaces. The portion of the piezoelectric material cylindrical body 100 located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-to-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate left and right in the horizontal direction.

[0227] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a second inner electrode 1021 and a second outer electrode 1022 respectively. The portion of the piezoelectric material cylindrical body 100 located between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction. The piezoelectric material located between the second inner electrode 1021 and the second outer electrode 1022 is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate in the vertical direction.

[0228] The support plate 103 is arranged parallel to the horizontal plane and is located on the front side of the piezoelectric material cylindrical body 100. The rear end of the support plate 103 is attached to the upper or lower surface of the piezoelectric material cylindrical body 100 and is fixedly connected to the piezoelectric material cylindrical body 100. The surface of the piezoelectric material cylindrical body 100 used to attach the support plate is flat. The optical fiber 104 is fixedly provided with the front end of the support plate 103 in a cantilever support manner. The part of the support plate 103 that is attached to the piezoelectric material cylindrical body 100 and the part of the piezoelectric material cylindrical body 100 that overlaps with this part of the support plate 103 in the front-rear direction constitutes an overlapping part 105. The support plate 103 and the overlapping part 105 make the natural frequency of the combination of the piezoelectric material cylindrical body 100, the support plate 103 and the optical fiber 104 in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes the U-order natural frequency of the combination in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, have a difference with the V-order natural frequency in the horizontal direction. In this embodiment, order V is first order and order U is second order.

[0229] Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structure types to this embodiment, V can also be an integer greater than 1, and U can be an integer greater than V.

[0230] Specifically, by adjusting the shape and / or size parameters of the support plate 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0231] Preferably, the piezoelectric material cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Optionally, its outer contour is square, and its interior has a central hole with a square or circular contour coaxial with the outer contour. Of course, there is no limitation on this; for example, its outer surface is roughly cylindrical and has several planes arranged rotationally symmetrically, one of which is used to mount a support plate.

[0232] The difference value ensures that when the combined unit performs a Lissajous scan under the drive signal, the vibrations of the combined unit in the horizontal direction and the vibrations in the vertical direction do not couple. Generally, the difference value ranges from 10Hz to 12kHz. More preferably, the difference value ranges from 1kHz to 10kHz. Specifically, it is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference value is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0233] In this embodiment, the arrangement of the first inner electrode 1011 and the first outer electrode 1012, as well as the second inner electrode 1021 and the second outer electrode 1022, is the same as in embodiment 8. The polarization method, driving method, and driving principle of the corresponding part of the piezoelectric material cylindrical body 100 are also the same as in embodiment 8.

[0234] Example 13:

[0235] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0236] Referring to Figure 13, a Lissajous scanner includes a cylindrical body and an optical fiber 104.

[0237] With the axial extension direction of the cylindrical body as the front-to-back direction, the rear end of the cylindrical body is fixedly connected to the base 200 and supported by the base 200.

[0238] The cylindrical body consists of a base 100 with an upper opening and a support plate 103 that covers part or all of the upper opening of the base 100. The front end of the support plate 103 extends beyond the front end of the base 100. The part of the support plate 103 that connects to the base 100 forms a cylindrical overlapping part with the base 100. The optical fiber 104 is fixedly mounted on the front end of the support plate 103 in a cantilever support manner.

[0239] At least one of the left and right sides of the overlapping cylindrical part is provided with a first piezoelectric sheet 101. The extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical body to vibrate left and right in the horizontal direction.

[0240] At least one of the upper and lower sides of the cylindrical overlapping part is provided with a second piezoelectric sheet 102, and the extension and retraction of the second piezoelectric sheet 102 drives the front end of the cylindrical body to vibrate in the vertical direction.

[0241] The support plate 103 makes the natural frequency of the combination of the cylindrical body, the first piezoelectric sheet 101, the second piezoelectric sheet 102 and the optical fiber 104 in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes a difference between the natural frequency of the combination in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0242] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the adjustment of the shape and / or size parameters of the support plate 103 to ensure that the natural frequencies of the assembly used in the two directions are both close enough to ensure good scanning effect and a uniform and dense scanning grid, and have sufficient difference so that the vibration of the assembly in the two directions will not couple. In this embodiment, V-order is first-order and U-order is second-order. Of course, this is only the parameter selection of this embodiment. In other embodiments with similar structures, V can also be an integer greater than 1, and U can be an integer greater than V.

[0243] Therefore, by adjusting the shape and / or dimensional parameters of the support plate 103, this application enables the vibration frequency of the assembly in both directions to meet the requirements of Lissajous scanning, thereby reducing the processing size and precision requirements of the cylindrical body, making the processing of the cylindrical body easier, the processing error easier to control, and the yield rate higher.

[0244] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0245] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0246] Optionally, a first piezoelectric sheet 101 is provided on either the left or right side of the cylindrical overlapping portion, and the extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first piezoelectric sheets 101 can be one, two, or more. When there are two or more first piezoelectric sheets 101, each first piezoelectric sheet 101 extends and retracts synchronously and at the same length.

[0247] Optionally, a first piezoelectric sheet 101 is provided on both the left and right sides of the cylindrical overlapping portion. The first piezoelectric sheet 101 on the left side and the first piezoelectric sheet 101 on the right side extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping portion to vibrate horizontally. The number of first piezoelectric sheets 101 on the same side can be one, two, or more. When there are two or more first piezoelectric sheets 101 on the same side, the first piezoelectric sheets 101 on the same side extend and retract synchronously with equal length.

[0248] Optionally, a second piezoelectric sheet 102 is provided on either the upper or lower side of the cylindrical overlapping portion, and the extension and retraction of the second piezoelectric sheet 102 drives the front end of the cylindrical overlapping portion to vibrate vertically. The number of second piezoelectric sheets 102 can be one, two, or more. When there are two or more second piezoelectric sheets 102, the second piezoelectric sheets 102 extend and retract synchronously and at the same length.

[0249] Alternatively, second piezoelectric plates 102 are provided on both the upper and lower sides of the cylindrical overlapping portion. The second piezoelectric plate 102 on the upper side and the second piezoelectric plate 102 on the lower side synchronously extend and retract in opposite directions with equal length, driving the front end of the cylindrical overlapping portion to vibrate vertically up and down. The number of second piezoelectric plates 102 on the same side can be one, two, or more. When there are two or more second piezoelectric plates 102 on the same side, the second piezoelectric plates 102 on the same side synchronously extend and retract with equal length.

[0250] Preferably, the surface on which the first piezoelectric sheet 101 or the second piezoelectric sheet 102 is disposed in the cylindrical overlapping portion is a plane to facilitate the placement of the piezoelectric sheet. Further optionally, the surface on which the first piezoelectric sheet 101 or the second piezoelectric sheet 102 is disposed in the cylindrical overlapping portion can be either the inner surface or the outer surface of the cylindrical overlapping portion.

[0251] More preferably, when the first piezoelectric sheet 101 is provided on both the left and right sides of the cylindrical overlapping portion, the first piezoelectric sheet 101 on the left and right sides of the cylindrical overlapping portion is symmetrically arranged so as to drive the cylindrical overlapping portion to vibrate accurately in the horizontal direction without generating a displacement component in the vertical direction; when the second piezoelectric sheet 102 is provided on both the upper and lower sides of the cylindrical overlapping portion, the second piezoelectric sheet 102 on the upper and lower sides of the cylindrical overlapping portion is symmetrically arranged so as to drive the cylindrical overlapping portion to vibrate accurately in the vertical direction without generating a displacement component in the horizontal direction.

[0252] This application eliminates the need for a specific difference in the natural frequencies of the piezoelectric actuator in the two driving directions of the Lissajous scanner, thus avoiding coupling of vibrations in both directions and reducing the requirements for manufacturing difficulty and precision. By adjusting the shape and / or dimensional parameters of the support plate 103, this application ensures that the vibration frequencies of the assembly in both directions meet the requirements of Lissajous scanning, reducing the size and precision requirements of the cylindrical body. This results in lower manufacturing difficulty, easier control of manufacturing errors, and higher yield, significantly improving both manufacturing efficiency and yield.

[0253] Example 14:

[0254] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0255] Referring to Figure 14, a Lissajous scanner includes a cylindrical body and an optical fiber 104.

[0256] With the axial extension direction of the cylindrical body as the front-to-back direction, the rear end of the cylindrical body is fixedly connected to the base 200 and supported by the base 200.

[0257] The cylindrical body consists of a base 100 with an upper opening and a support plate 103 that covers part or all of the upper opening of the base 100. The front end of the support plate 103 extends beyond the front end of the base 100. The part of the support plate 103 that connects to the base 100 forms a cylindrical overlapping part with the base 100. The optical fiber 104 is fixedly mounted on the front end of the support plate 103 in a cantilever support manner.

[0258] At least one of the inner and outer surfaces of the cylindrical overlapping portion has a first inner electrode 1011 and a first outer electrode 1012 respectively, which are correspondingly fitted. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.

[0259] At least one of the inner and outer surfaces of the upper and lower sides of the cylindrical overlapping portion is provided with a correspondingly mating second inner electrode 1021 and a second outer electrode 1022. The portion of the cylindrical overlapping portion located between the second inner electrode 1021 and the second outer electrode 1022 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the second inner electrode 1021 and the second outer electrode 1022 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate in the vertical direction.

[0260] The support plate 103 makes the natural frequency of the combination of the cylindrical body and the optical fiber 104 in the horizontal direction greater than the natural frequency of the same order in the vertical direction, and makes the natural frequency of the combination in the vertical direction that is closest to its V-order natural frequency in the horizontal direction have a difference with the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0261] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the adjustment of the shape structure and / or size parameters of the support plate 103 to ensure that the natural frequencies of the assembly used in the two directions are both close enough to ensure good scanning effect and a uniform and dense scanning grid, and have sufficient difference so that the vibration of the assembly in the two directions will not couple.

[0262] Therefore, by adjusting the shape and / or dimensional parameters of the support plate 103, this application enables the vibration frequency of the assembly in both directions to meet the requirements of Lissajous scanning, thereby reducing the processing size and precision requirements of the cylindrical body, making the processing of the cylindrical body easier, the processing error easier to control, and the yield rate higher.

[0263] In this embodiment, V is of order one and U is of order two. Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structures, V can also be an integer greater than 1, and U can be an integer greater than V.

[0264] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0265] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0266] Optionally, a first inner electrode 1011 and a first outer electrode 1012 are respectively provided on the inner and outer surfaces of either side of the cylindrical overlapping portion. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two, or more.

[0267] Alternatively, the inner and outer surfaces of both sides of the cylindrical overlapping portion are respectively provided with correspondingly fitted first inner electrodes 1011 and first outer electrodes 1012. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, while the piezoelectric material portions on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 located on the same side can be one, two, or more.

[0268] Optionally, a second inner electrode 1021 and a second outer electrode 1022 are respectively provided on the inner and outer surfaces of either the upper or lower sides of the cylindrical overlapping portion. The portion of the piezoelectric material cylindrical body located between the second inner electrode 1021 and the second outer electrode 1022 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the two is driven by the second inner electrode 1021 and the second outer electrode 1022 to extend and retract in the front-rear direction, driving the front end of the cylindrical overlapping portion to vibrate up and down in the vertical direction. The number of the second inner electrode 1021 or the second outer electrode 1022 can be one, two, or more.

[0269] Alternatively, the inner and outer surfaces of the upper and lower overlapping cylindrical portions are respectively provided with correspondingly fitted second inner electrodes 1021 and second outer electrodes 1022. The portion of the piezoelectric cylindrical body located between the second inner electrodes 1021 and the second outer electrodes 1022 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the second inner electrodes 1021 and the second outer electrodes 1022 is driven to extend and retract in the front-back direction, while the piezoelectric material portions on the upper and lower sides extend and retract synchronously in opposite directions at the same length, driving the front end of the overlapping cylindrical portion to vibrate up and down in the vertical direction. The number of second inner electrodes 1021 or second outer electrodes 1022 located on the same side can be one, two, or more.

[0270] More preferably, when the inner and outer surfaces of the left and right sides of the cylindrical overlapping portion are respectively provided with a first inner electrode 1011 and a corresponding first outer electrode 1012, the first inner electrodes 1011 on the left and right sides of the cylindrical overlapping portion are symmetrically arranged to drive the cylindrical overlapping portion to vibrate accurately in the horizontal direction without generating a displacement component in the vertical direction; when the inner and outer surfaces of the upper and lower sides of the cylindrical overlapping portion are respectively provided with a second inner electrode 1021 and a corresponding second outer electrode 1022, the second inner electrodes 1021 on the upper and lower sides of the cylindrical overlapping portion are symmetrically arranged to drive the cylindrical overlapping portion to vibrate accurately in the vertical direction without generating a displacement component in the horizontal direction.

[0271] This application eliminates the need for a specific difference in the natural frequencies of the piezoelectric actuator in the two driving directions of the Lissajous scanner, thus avoiding coupling of vibrations in both directions and reducing the requirements for manufacturing difficulty and precision. By adjusting the shape and / or dimensional parameters of the support plate 103, this application ensures that the vibration frequencies of the assembly in both directions meet the requirements of Lissajous scanning, reducing the size and precision requirements of the cylindrical body. This results in lower manufacturing difficulty, easier control of manufacturing errors, and higher yield, significantly improving both manufacturing efficiency and yield.

[0272] Example 15:

[0273] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0274] Referring to Figures 15 and 16, a Lissajous scanner includes a cylindrical body and an optical fiber 104.

[0275] With the axial extension direction of the cylindrical body as the front-to-back direction, the rear end of the cylindrical body is fixedly connected to the base 200 and supported by the base 200.

[0276] The cylindrical body includes support columns 105 located at the four corners and four side plates 106 connecting any two adjacent support columns 105. The upper side plate 107 located on the upper side is longer than the length of the other three side plates 106 in the front-to-back direction.

[0277] The rear half of the upper side plate 107, together with the four support columns 105 and the other three side plates 106, forms a cylindrical overlapping section. The optical fiber 104 is fixedly mounted on the front end of the upper side plate 107 in a cantilever support manner.

[0278] At least one of the left and right sides of the overlapping cylindrical part is provided with a first piezoelectric sheet 101. The extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical body to vibrate left and right in the horizontal direction.

[0279] At least one of the upper and lower sides of the cylindrical overlapping part is provided with a second piezoelectric sheet 102, and the extension and retraction of the second piezoelectric sheet 102 drives the front end of the cylindrical body to vibrate in the vertical direction.

[0280] The upper side plate 107 makes the natural frequency of the combination of the cylindrical body, the first piezoelectric sheet 101, the second piezoelectric sheet 102 and the optical fiber 104 in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes a difference between the natural frequency of the combination in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0281] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the adjustment of the shape structure and / or size parameters of the upper side plate 107 to ensure that the natural frequencies of the assembly used in the two directions are both close enough to ensure good scanning effect and a uniform and dense scanning grid, and have sufficient difference so that the vibration of the assembly in the two directions will not couple. Therefore, by adjusting the shape and / or dimensional parameters of the upper side plate 107, this application enables the vibration frequency of the assembly in both directions to meet the requirements of Lissajous scanning, thereby reducing the processing size and precision requirements of the cylindrical body, making the processing of the cylindrical body easier, the processing error easier to control, and the yield rate higher.

[0282] Meanwhile, the rigidity of the support column 105 is greater than that of the side plate 106. Its arrangement can isolate the mutual deformation interference between the side plate 106 vibrating in the horizontal direction and the side plate 106 vibrating in the vertical direction, thereby improving the scanning accuracy.

[0283] In this embodiment, V is of order one and U is of order two. Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structures, V can also be an integer greater than 1, and U can be an integer greater than V.

[0284] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0285] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0286] Optionally, a first piezoelectric sheet 101 is provided on either the left or right side of the cylindrical overlapping portion, and the extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first piezoelectric sheets 101 can be one, two, or more. When there are two or more first piezoelectric sheets 101, each first piezoelectric sheet 101 extends and retracts synchronously and at the same length.

[0287] Optionally, a first piezoelectric sheet 101 is provided on both the left and right sides of the cylindrical overlapping portion. The first piezoelectric sheet 101 on the left side and the first piezoelectric sheet 101 on the right side extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping portion to vibrate horizontally. The number of first piezoelectric sheets 101 on the same side can be one, two, or more. When there are two or more first piezoelectric sheets 101 on the same side, the first piezoelectric sheets 101 on the same side extend and retract synchronously with equal length.

[0288] Optionally, a second piezoelectric sheet 102 is provided on either the upper or lower side of the cylindrical overlapping portion, and the extension and retraction of the second piezoelectric sheet 102 drives the front end of the cylindrical overlapping portion to vibrate vertically. The number of second piezoelectric sheets 102 can be one, two, or more. When there are two or more second piezoelectric sheets 102, the second piezoelectric sheets 102 extend and retract synchronously and at the same length.

[0289] Alternatively, second piezoelectric plates 102 are provided on both the upper and lower sides of the cylindrical overlapping portion. The second piezoelectric plate 102 on the upper side and the second piezoelectric plate 102 on the lower side synchronously extend and retract in opposite directions with equal length, driving the front end of the cylindrical overlapping portion to vibrate vertically up and down. The number of second piezoelectric plates 102 on the same side can be one, two, or more. When there are two or more second piezoelectric plates 102 on the same side, the second piezoelectric plates 102 on the same side synchronously extend and retract with equal length.

[0290] Preferably, the surface on which the first piezoelectric sheet 101 or the second piezoelectric sheet 102 is disposed in the cylindrical overlapping portion is a plane to facilitate the placement of the piezoelectric sheet. Further optionally, the surface on which the first piezoelectric sheet 101 or the second piezoelectric sheet 102 is disposed in the cylindrical overlapping portion can be either the inner surface or the outer surface of the cylindrical overlapping portion.

[0291] More preferably, when the first piezoelectric sheet 101 is provided on both the left and right sides of the cylindrical overlapping portion, the first piezoelectric sheet 101 on the left and right sides of the cylindrical overlapping portion is symmetrically arranged so as to drive the cylindrical overlapping portion to vibrate accurately in the horizontal direction without generating a displacement component in the vertical direction; when the second piezoelectric sheet 102 is provided on both the upper and lower sides of the cylindrical overlapping portion, the second piezoelectric sheet 102 on the upper and lower sides of the cylindrical overlapping portion is symmetrically arranged so as to drive the cylindrical overlapping portion to vibrate accurately in the vertical direction without generating a displacement component in the horizontal direction.

[0292] This application eliminates the need for a specific difference in the natural frequencies of the piezoelectric actuator in the two driving directions of the Lissajous scanner, thus avoiding vibration coupling in both directions and reducing the requirements for manufacturing difficulty and precision. By adjusting the shape and / or dimensional parameters of the upper side plate 107, this application ensures that the vibration frequencies of the assembly in both directions meet the requirements of Lissajous scanning, reducing the size and precision requirements of the cylindrical body. This results in lower manufacturing difficulty, easier control of manufacturing errors, and higher yield, significantly improving manufacturing efficiency and yield.

[0293] Example 16:

[0294] The embodiments of this example include some specific implementations of the piezoelectric actuator 100 in Example 1.

[0295] Referring to Figures 17 and 18, a Lissajous scanner includes a cylindrical body and an optical fiber 104.

[0296] With the axial extension direction of the cylindrical body as the front-to-back direction, the rear end of the cylindrical body is fixedly connected to the base 200 and supported by the base 200.

[0297] The cylindrical body includes support columns 105 located at the four corners and four side plates 106 connecting any two adjacent support columns 105. The upper side plate 107 located on the upper side is longer than the length of the other three side plates 106 in the front-to-back direction.

[0298] The rear half of the upper side plate 107, together with the four support columns 105 and the other three side plates 106, forms a cylindrical overlapping section. The optical fiber 104 is fixedly mounted on the front end of the upper side plate 107 in a cantilever support manner.

[0299] At least one of the inner and outer surfaces of the cylindrical overlapping portion has a first inner electrode 1011 and a first outer electrode 1012 respectively, which are correspondingly fitted. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.

[0300] At least one of the inner and outer surfaces of the upper and lower sides of the cylindrical overlapping portion is provided with a correspondingly mating second inner electrode 1021 and a second outer electrode 1022. The portion of the cylindrical overlapping portion located between the second inner electrode 1021 and the second outer electrode 1022 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the second inner electrode 1021 and the second outer electrode 1022 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate in the vertical direction.

[0301] The upper side plate 107 makes the natural frequency of the combination of the cylindrical body and the optical fiber 104 in the horizontal direction greater than the natural frequency of the same order in the vertical direction, and makes the natural frequency of the combination in the vertical direction that is closest to its natural frequency of V in the horizontal direction have a difference with the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0302] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the adjustment of the shape structure and / or size parameters of the upper side plate 107 to ensure that the natural frequencies of the assembly used in the two directions are both close enough to ensure good scanning effect and a uniform and dense scanning grid, and have sufficient difference so that the vibration of the assembly in the two directions will not couple.

[0303] Therefore, by adjusting the shape and / or dimensional parameters of the upper side plate 107, this application enables the vibration frequency of the assembly in both directions to meet the requirements of Lissajous scanning, thereby reducing the processing size and precision requirements of the cylindrical body, making the processing of the cylindrical body easier, the processing error easier to control, and the yield rate higher.

[0304] In this embodiment, V is of order one and U is of order two. Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structures, V can also be an integer greater than 1, and U can be an integer greater than V.

[0305] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0306] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0307] Optionally, a first inner electrode 1011 and a first outer electrode 1012 are respectively provided on the inner and outer surfaces of either side of the cylindrical overlapping portion. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two, or more.

[0308] Alternatively, the inner and outer surfaces of both sides of the cylindrical overlapping portion are respectively provided with correspondingly fitted first inner electrodes 1011 and first outer electrodes 1012. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, while the piezoelectric material portions on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 located on the same side can be one, two, or more.

[0309] Optionally, a second inner electrode 1021 and a second outer electrode 1022 are respectively provided on the inner and outer surfaces of either the upper or lower sides of the cylindrical overlapping portion. The portion of the piezoelectric material cylindrical body located between the second inner electrode 1021 and the second outer electrode 1022 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the two is driven by the second inner electrode 1021 and the second outer electrode 1022 to extend and retract in the front-rear direction, driving the front end of the cylindrical overlapping portion to vibrate up and down in the vertical direction. The number of the second inner electrode 1021 or the second outer electrode 1022 can be one, two, or more.

[0310] Alternatively, the inner and outer surfaces of the upper and lower overlapping cylindrical portions are respectively provided with correspondingly fitted second inner electrodes 1021 and second outer electrodes 1022. The portion of the piezoelectric cylindrical body located between the second inner electrodes 1021 and the second outer electrodes 1022 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the second inner electrodes 1021 and the second outer electrodes 1022 is driven to extend and retract in the front-back direction, while the piezoelectric material portions on the upper and lower sides extend and retract synchronously in opposite directions at the same length, driving the front end of the overlapping cylindrical portion to vibrate up and down in the vertical direction. The number of second inner electrodes 1021 or second outer electrodes 1022 located on the same side can be one, two, or more.

[0311] More preferably, when the inner and outer surfaces of the left and right sides of the cylindrical overlapping portion are respectively provided with a first inner electrode 1011 and a corresponding first outer electrode 1012, the first inner electrodes 1011 on the left and right sides of the cylindrical overlapping portion are symmetrically arranged to drive the cylindrical overlapping portion to vibrate accurately in the horizontal direction without generating a displacement component in the vertical direction; when the inner and outer surfaces of the upper and lower sides of the cylindrical overlapping portion are respectively provided with a second inner electrode 1021 and a corresponding second outer electrode 1022, the second inner electrodes 1021 on the upper and lower sides of the cylindrical overlapping portion are symmetrically arranged to drive the cylindrical overlapping portion to vibrate accurately in the vertical direction without generating a displacement component in the horizontal direction.

[0312] This application eliminates the need for a specific difference in the natural frequencies of the piezoelectric actuator in the two driving directions of the Lissajous scanner, thus avoiding vibration coupling in both directions and reducing the requirements for manufacturing difficulty and precision. By adjusting the shape and / or dimensional parameters of the upper side plate 107, this application ensures that the vibration frequencies of the assembly in both directions meet the requirements of Lissajous scanning, reducing the size and precision requirements of the cylindrical body. This results in lower manufacturing difficulty, easier control of manufacturing errors, and higher yield, significantly improving manufacturing efficiency and yield.

[0313] Example 17:

[0314] The embodiments of this example include some specific implementations of the first piezoelectric actuator 100 in Example 2.

[0315] As shown in Figures 19 and 2, a Lissajous scanner includes a cylindrical piezoelectric actuator, a sheet-shaped piezoelectric actuator 103 fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber 104 fixedly mounted on the sheet-shaped piezoelectric actuator 103 in a cantilevered manner.

[0316] The cylindrical piezoelectric actuator includes a cylindrical body 100, with the axial extension direction of the cylindrical body 100 as the front-rear direction. The rear end of the cylindrical body 100 is fixedly connected to the base 200 and supported by the base 200.

[0317] At least one of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101, and the extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction.

[0318] A sheet-shaped piezoelectric actuator 103 is arranged parallel to the horizontal plane and is located on the front side of the cylindrical body 100. Its rear end is fixedly connected to the cylindrical body 100. The front end of the sheet-shaped piezoelectric actuator 103 vibrates in the vertical direction. The optical fiber 104 is fixedly arranged on the front end of the sheet-shaped piezoelectric actuator 103 in a cantilever support manner. The sheet-shaped piezoelectric actuator 103 and the cylindrical body 100 have an overlapping part 105 in the front-rear direction. The sheet-shaped piezoelectric actuator 103 and the overlapping part 105 make the natural frequency of the combination composed of the cylindrical piezoelectric actuator, the sheet-shaped piezoelectric actuator 103 and the optical fiber 104 in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes a difference between the natural frequency of the combination in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0319] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the shape structure and / or size parameters of the sheet piezoelectric actuator 103 and the overlapping part 105 to make the natural frequencies of the assembly used in the two directions both close enough to ensure good scanning effect and a uniform and dense scanning grid, and have enough difference so that the vibration of the assembly in the two directions will not couple.

[0320] The difference value ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal and vertical directions do not couple. Generally, the difference value ranges from 10Hz to 12kHz. More preferably, the difference value ranges from 1kHz to 10kHz. Specifically, it is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference value is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0321] Preferably, the natural frequency of the cylindrical body 100 in the horizontal direction is the same or similar to the natural frequency of the same order in the vertical direction. The cylindrical body 100 that meets this requirement has a regular shape and a rotationally symmetrical structure, which makes the cylindrical body 100 easy to process, easy to control the processing error, and has a high yield rate, such as a cylindrical body or a square cylindrical body.

[0322] Optionally, a first piezoelectric sheet 101 is provided on either the left or right side of the cylindrical body 100, and the extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction. The number of first piezoelectric sheets 101 can be one, two, or more. When there are two or more first piezoelectric sheets 101, each first piezoelectric sheet 101 extends and retracts synchronously and at the same length.

[0323] Optionally, a first piezoelectric sheet 101 is provided on both the left and right sides of the cylindrical body 100. The first piezoelectric sheet 101 on the left side and the first piezoelectric sheet 101 on the right side extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical body 100 to vibrate horizontally. The number of first piezoelectric sheets 101 on the same side can be one, two, or more. When there are two or more first piezoelectric sheets 101 on the same side, the first piezoelectric sheets 101 on the same side extend and retract synchronously with equal length.

[0324] Preferably, the surface of the cylindrical body 100 on which the first piezoelectric sheet 101 is disposed is flat to facilitate the placement of the piezoelectric sheet. Further optionally, the surface of the cylindrical body 100 on which the first piezoelectric sheet 101 is disposed can be either the inner surface or the outer surface of the cylindrical body 100.

[0325] More preferably, when the first piezoelectric sheet 101 is provided on both the left and right sides of the cylindrical body 100, the first piezoelectric sheet 101 on the left and right sides of the cylindrical body 100 is symmetrically arranged so as to drive the cylindrical body 100 to vibrate accurately in the horizontal direction without generating a vertical displacement component.

[0326] Optionally, the sheet-shaped piezoelectric actuator 103 is a single piezoelectric actuator or a dual piezoelectric actuator.

[0327] This application eliminates the need for the piezoelectric actuator of the Lissajous scanner to have a specific difference in its natural frequency in the two driving directions, thus avoiding coupling of vibrations in the two driving directions and reducing the processing difficulty and accuracy requirements. More preferably, this application allows the cylindrical body 100 to have the same or similar natural frequencies in the two driving directions, and allows the cylindrical body 100 itself to be a rotationally symmetric structure. This further reduces the processing difficulty of the piezoelectric actuator of the Lissajous scanner, resulting in a significant improvement in processing efficiency and yield.

[0328] Example 18:

[0329] The embodiments of this example include some specific implementations of the first piezoelectric actuator 100 in Example 2.

[0330] As shown in Figures 19 and 2, a Lissajous scanner includes a cylindrical piezoelectric actuator, a sheet-shaped piezoelectric actuator 103 fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber 104 fixedly mounted on the sheet-shaped piezoelectric actuator 103 in a cantilevered manner.

[0331] The cylindrical piezoelectric actuator includes a cylindrical body 100, with the axial extension direction of the cylindrical body 100 as the front-rear direction. The rear end of the cylindrical body 100 is fixedly connected to the base 200 and supported by the base 200.

[0332] At least one of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101, and the extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction.

[0333] A sheet-shaped piezoelectric actuator 103 is arranged parallel to the horizontal plane, located at the front of the cylindrical body 100, and its rear end is fixedly connected to the cylindrical body 100. The left and right sides of the cylindrical body 100 are provided with mounting grooves 106 for connecting the sheet-shaped piezoelectric actuator 103. The rear end portion of the sheet-shaped piezoelectric actuator 103 is inserted into the mounting grooves 106 and fixedly connected to the cylindrical body 100. The front end of the sheet-shaped piezoelectric actuator 103 vibrates vertically. An optical fiber 104 is fixedly mounted on the front end of the sheet-shaped piezoelectric actuator 103 in a cantilevered manner. The sheet-shaped piezoelectric actuator 103 and the cylindrical body 100 are aligned in the front-rear direction. The assembly has an overlapping portion 105. The portion of the sheet-like piezoelectric actuator 103 installed in the mounting groove 106 and the portion of the cylindrical body 100 that overlaps with this portion of the sheet-like piezoelectric actuator 103 in the front-rear direction constitute the overlapping portion 105. The sheet-like piezoelectric actuator 103 and the overlapping portion 105 ensure that the natural frequency of the assembly in the horizontal direction is greater than the same-order natural frequency in the vertical direction, and that there is a difference between the U-order natural frequency in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, and the V-order natural frequency in the horizontal direction. In this embodiment, V-order is first-order, and U-order is second-order.

[0334] Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structure types to this embodiment, V can also be an integer greater than 1, and U can be an integer greater than V.

[0335] Specifically, by adjusting the shape and / or size parameters of the sheet-like piezoelectric actuator 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0336] The difference value ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal and vertical directions do not couple. Generally, the difference value ranges from 10Hz to 12kHz. More preferably, the difference value ranges from 1kHz to 10kHz. Specifically, it is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference value is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0337] Optionally, the mounting groove 106 may be located in the middle, upper or lower part of the left and right side walls of the cylindrical body 100 in the vertical direction, without limitation.

[0338] Optionally, the sheet-shaped piezoelectric actuator 103 is a single piezoelectric actuator or a dual piezoelectric actuator.

[0339] Optionally, as shown in Figure 19, the cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

[0340] Alternatively, as shown in Figure 20, the cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is circular, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

[0341] In this embodiment, the piezoelectric sheet attached to the outer or inner surface of the cylindrical body 100 is a flat piezoelectric sheet or an arc-shaped piezoelectric sheet whose shape matches the outer or inner surface of the cylindrical body 100, and is selected adaptively according to the specific working conditions. Based on this, the arrangement of the first piezoelectric sheet 101 in this embodiment is the same as in embodiment 17.

[0342] Example 19:

[0343] The embodiments of this example include some specific implementations of the first piezoelectric actuator 100 in Example 2.

[0344] As shown in Figures 21 and 2, a Lissajous scanner includes a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator 103 fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber 104 fixedly mounted on the sheet-like piezoelectric actuator 103 in a cantilevered manner.

[0345] The cylindrical piezoelectric actuator includes a cylindrical body 100, with the axial extension direction of the cylindrical body 100 as the front-rear direction. The rear end of the cylindrical body 100 is fixedly connected to the base 200 and supported by the base 200.

[0346] At least one of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101, and the front end of the cylindrical body 100 vibrates left and right in the horizontal direction by the extension and retraction of the first piezoelectric sheet 101.

[0347] A sheet-shaped piezoelectric actuator 103 is arranged parallel to the horizontal plane, located at the front of the cylindrical body 100, with its rear end attached to the upper or lower surface of the cylindrical body 100 and fixedly connected to it. The surface of the cylindrical body 100 for attaching the sheet-shaped piezoelectric actuator 103 is planar. The front end of the sheet-shaped piezoelectric actuator 103 vibrates in the vertical direction. The optical fiber 104 is fixedly mounted on the front end of the sheet-shaped piezoelectric actuator 103 in a cantilever support manner. The portion of the sheet-shaped piezoelectric actuator 103 attached to the cylindrical body 100 is parallel to the front end of the cylindrical body 100 in the front-to-back direction. The cylindrical body 100 portion overlapping with the sheet-like piezoelectric actuator 103 forms an overlapping portion 105. The sheet-like piezoelectric actuator 103 and the overlapping portion 105 cause the combined portion consisting of the cylindrical body 100, the first piezoelectric sheet 101, the second piezoelectric sheet, the sheet-like piezoelectric actuator 103, and the optical fiber 104 to have a natural frequency in the horizontal direction that is greater than the same natural frequency in the vertical direction. Furthermore, the U-order natural frequency, which is closest to the V-order natural frequency in the vertical direction, has a difference from the V-order natural frequency in the horizontal direction. In this embodiment, the V-order is first-order, and the U-order is second-order.

[0348] Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structures, V can also be an integer greater than 1, and U can be an integer greater than V.

[0349] Specifically, by adjusting the shape and / or size parameters of the sheet-like piezoelectric actuator 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0350] Preferably, the natural frequency of the cylindrical body 100 in the horizontal direction is the same as its natural frequency of the same order in the vertical direction. Optionally, its outer contour is square, and its interior is provided with a central hole of square or circular shape coaxial with the outer contour. Of course, there is no limitation on this; for example, its outer surface is roughly cylindrical and has several planes arranged rotationally symmetrically, one of which is used to mount the support plate.

[0351] The difference value ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal and vertical directions do not couple. Generally, the difference value ranges from 10Hz to 12kHz. More preferably, the difference value ranges from 1kHz to 10kHz. Specifically, it is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference value is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0352] Optionally, the sheet-shaped piezoelectric actuator 103 is a single piezoelectric actuator or a dual piezoelectric actuator.

[0353] In this embodiment, the piezoelectric sheet attached to the outer or inner surface of the cylindrical body 100 is a flat piezoelectric sheet or an arc-shaped piezoelectric sheet whose shape matches the outer or inner surface of the cylindrical body 100, and is selected adaptively according to the specific working conditions. Based on this, the arrangement of the first piezoelectric sheet 101 in this embodiment is the same as in embodiment 17.

[0354] Example 20:

[0355] The embodiments of this example include some specific implementations of the first piezoelectric actuator 100 in Example 2.

[0356] Referring to Figures 22 and 2, a Lissajous scanner includes a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator 103 fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber 104 fixedly mounted on the sheet-like piezoelectric actuator 103 in a cantilevered manner.

[0357] The cylindrical piezoelectric actuator includes a piezoelectric material cylindrical body 100. With the axial extension direction of the piezoelectric material cylindrical body 100 as the front-to-back direction, the rear end of the piezoelectric material cylindrical body 100 is fixedly connected to a base 200 for support.

[0358] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a first inner electrode 1011 and a first outer electrode 1012 respectively. The portion of the piezoelectric material cylindrical body 100 located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, and the front end of the cylindrical body 100 is driven to vibrate left and right in the horizontal direction.

[0359] A sheet-shaped piezoelectric actuator 103 is arranged parallel to the horizontal plane and is located on the front side of the piezoelectric material cylindrical body 100. Its rear end is fixedly connected to the piezoelectric material cylindrical body 100. The front end of the sheet-shaped piezoelectric actuator 103 vibrates in the vertical direction. The optical fiber 104 is fixedly arranged on the front end of the sheet-shaped piezoelectric actuator 103 in a cantilever support manner. The sheet-shaped piezoelectric actuator 103 and the piezoelectric material cylindrical body 100 have an overlapping part 105 in the front-rear direction. The sheet-shaped piezoelectric actuator 103 and the overlapping part 105 make the natural frequency of the combination of the piezoelectric material cylindrical body 100, the sheet-shaped piezoelectric actuator 103 and the optical fiber 104 in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes a difference between the natural frequency of the combination in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0360] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the shape structure and / or size parameters of the sheet piezoelectric actuator 103 and the overlapping part 105 to make the natural frequencies of the assembly used in the two directions both close enough to ensure good scanning effect and a uniform and dense scanning grid, and have enough difference so that the vibration of the assembly in the two directions will not couple.

[0361] The difference value ensures that when the combined unit performs a Lissajous scan under the drive signal, the vibrations of the combined unit in the horizontal direction and the vibrations in the vertical direction do not couple. Generally, the difference value ranges from 10Hz to 12kHz. More preferably, the difference value ranges from 1kHz to 10kHz. Specifically, it is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference value is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0362] Preferably, the piezoelectric material cylindrical body 100 has the same or similar natural frequency in the horizontal direction and the same natural frequency in the vertical direction. The piezoelectric material cylindrical body 100 that meets this requirement has a regular shape and a rotationally symmetrical structure, which makes the piezoelectric material cylindrical body 100 easy to process, easy to control the processing error, and has a high yield rate, such as a cylindrical body or a square body.

[0363] Optionally, a first inner electrode 1011 and a first outer electrode 1012 are respectively provided on the inner and outer surfaces of either the left or right sides of the piezoelectric material cylindrical body 100. The portion of the piezoelectric material cylindrical body 100 located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two, or more.

[0364] Alternatively, the inner and outer surfaces of the left and right sides of the piezoelectric material cylindrical body 100 are respectively provided with correspondingly matched first inner electrodes 1011 and first outer electrodes 1012. The portion of the piezoelectric material cylindrical body 100 located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, and the piezoelectric materials on the left and right sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical body 100 to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two, or more.

[0365] More preferably, when the inner and outer surfaces of the piezoelectric material cylindrical body 100 on both sides are respectively provided with a first inner electrode 1011 and a corresponding first outer electrode 1012, the first inner electrodes 1011 on both sides of the piezoelectric material cylindrical body 100 are symmetrically arranged so as to drive the piezoelectric material cylindrical body 100 to vibrate accurately in the horizontal direction without generating a vertical displacement component.

[0366] This application eliminates the need for the piezoelectric actuator of the Lissajous scanner to have a specific difference in its natural frequency in the two driving directions, thus avoiding coupling of vibrations in the two driving directions and reducing the processing difficulty and accuracy requirements. More preferably, this application allows the piezoelectric material cylindrical body 100 to have the same or similar natural frequencies in the two driving directions, and allows the piezoelectric material cylindrical body 100 itself to be a rotationally symmetric structure. This further reduces the processing difficulty of the piezoelectric actuator of the Lissajous scanner, resulting in a significant improvement in processing efficiency and yield.

[0367] Example 21:

[0368] The embodiments of this example include some specific implementations of the first piezoelectric actuator 100 in Example 2.

[0369] Referring to Figures 22 and 2, a Lissajous scanner includes a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator 103 fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber 104 fixedly mounted on the sheet-like piezoelectric actuator 103 in a cantilevered manner.

[0370] The cylindrical piezoelectric actuator includes a piezoelectric material cylindrical body 100. With the axial extension direction of the piezoelectric material cylindrical body 100 as the front-to-back direction, the rear end of the piezoelectric material cylindrical body 100 is fixedly connected to a base 200 for support.

[0371] At least one of the inner and outer surfaces of the piezoelectric material cylindrical body 100 is provided with a first inner electrode 1011 and a first outer electrode 1012 respectively. The portion of the piezoelectric material cylindrical body 100 located between the corresponding first inner electrode 1011 and the first outer electrode 1012 is polarized along the thickness direction. The piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, and the front end of the piezoelectric material cylindrical body 100 is driven to vibrate left and right in the horizontal direction.

[0372] A sheet-shaped piezoelectric actuator 103 is arranged parallel to the horizontal plane, located at the front of the piezoelectric material cylindrical body 100, and its rear end is fixedly connected to the piezoelectric material cylindrical body 100. The front end of the sheet-shaped piezoelectric actuator 103 vibrates in the vertical direction. An optical fiber 104 is fixedly arranged at the front end of the sheet-shaped piezoelectric actuator 103 in a cantilever support manner. The sheet-shaped piezoelectric actuator 103 and the piezoelectric material cylindrical body 100 have an overlapping portion 105 in the front-rear direction. The left and right sides of the piezoelectric material cylindrical body 100 are provided with mounting grooves 106 for connecting the sheet-shaped piezoelectric actuator 103. The rear end portion of the sheet-shaped piezoelectric actuator 103 is inserted into the mounting groove 106. A portion of the piezoelectric cylindrical body 100 fixedly connected to the piezoelectric material cylindrical body 100 and installed in the mounting groove 106, together with a portion of the piezoelectric material cylindrical body 100 overlapping with this portion of the piezoelectric actuating part 103 in the front-back direction, forms an overlapping portion 105. The piezoelectric actuating part 103 and the overlapping portion 105 ensure that the natural frequency of the assembly consisting of the piezoelectric material cylindrical body 100, the piezoelectric actuating part 103, and the optical fiber 104 is greater in the horizontal direction than the same-order natural frequency in the vertical direction. Furthermore, the U-order natural frequency, which is closest to its V-order natural frequency in the vertical direction, has a difference from the V-order natural frequency in the horizontal direction. In this embodiment, V-order is first-order, and U-order is second-order.

[0373] Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structure types to this embodiment, V can also be an integer greater than 1, and U can be an integer greater than V.

[0374] Specifically, by adjusting the shape and / or size parameters of the sheet-like piezoelectric actuator 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0375] Optionally, as shown in Figure 22, the piezoelectric material cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

[0376] Alternatively, as shown in Figure 23, the piezoelectric cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

[0377] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0378] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0379] Optionally, the mounting groove 106 may be located in the middle, upper or lower part of the left and right side walls of the piezoelectric material cylindrical body 100 in the vertical direction, without limitation.

[0380] Optionally, the sheet-shaped piezoelectric actuator 103 is a single piezoelectric actuator or a dual piezoelectric actuator.

[0381] In this embodiment, the arrangement of the first inner electrode 1011 and the first outer electrode 1012, as well as the second inner electrode and the second outer electrode, is the same as in Embodiments 20 and 176. The polarization method, driving method, and driving principle of the corresponding part of the piezoelectric material cylindrical body 100 are also the same as in Embodiments 20 and 176.

[0382] Example 22:

[0383] The embodiments of this example include some specific implementations of the first piezoelectric actuator 100 in Example 2.

[0384] Referring to Figures 24 and 2, a Lissajous scanner includes a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator 103 fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber 104 fixedly mounted on the sheet-like piezoelectric actuator 103 in a cantilevered manner.

[0385] The cylindrical piezoelectric actuator includes a piezoelectric material cylindrical body 100. With the axial extension direction of the piezoelectric material cylindrical body 100 as the front-to-back direction, the rear end of the piezoelectric material cylindrical body 100 is fixedly connected to a base 200 for support. At least one of the left and right sides of the piezoelectric material cylindrical body 100 has a first inner electrode 1011 and a first outer electrode 1012 respectively disposed on their inner and outer surfaces. The portion of the piezoelectric material cylindrical body 100 located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along its thickness direction. The first inner electrode 1011 and the corresponding first outer electrode 1012 drive the piezoelectric material located between them to extend and retract in the front-to-back direction, and drive the front end of the piezoelectric material cylindrical body 100 to vibrate left and right in the horizontal direction.

[0386] A sheet-shaped piezoelectric actuator 103 is arranged parallel to the horizontal plane, located on the front side of the piezoelectric material cylindrical body 100. Its rear end is attached to the upper or lower surface of the piezoelectric material cylindrical body 100 and fixedly connected to it. The surface of the piezoelectric material cylindrical body 100 used to attach the sheet-shaped piezoelectric actuator 103 is planar. The front end of the sheet-shaped piezoelectric actuator 103 vibrates vertically. An optical fiber 104 is fixedly mounted to the front end of the sheet-shaped piezoelectric actuator 103 in a cantilevered support manner. The sheet-shaped piezoelectric actuator 103 is attached to the piezoelectric material cylindrical body. A portion of the body 100 overlaps with a portion of the piezoelectric material cylindrical body 100 that coincides with the sheet-like piezoelectric actuator 103 in the front-rear direction, forming an overlapping portion 105. The sheet-like piezoelectric actuator 103 and the overlapping portion 105 cause the natural frequency in the horizontal direction of the assembly consisting of the piezoelectric material cylindrical body 100, the sheet-like piezoelectric actuator 103, and the optical fiber 104 to be greater than the same-order natural frequency in the vertical direction. Furthermore, the U-order natural frequency, which is closest to its V-order natural frequency in the vertical direction, has a difference from the V-order natural frequency in the horizontal direction. In this embodiment, V-order is first-order, and U-order is second-order.

[0387] Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structure types to this embodiment, V can also be an integer greater than 1, and U can be an integer greater than V.

[0388] Specifically, by adjusting the shape and / or size parameters of the sheet-like piezoelectric actuator 103 and the overlapping part 105, the natural frequencies of the combined part used in both directions are simultaneously close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the combined part in both directions will not couple.

[0389] Preferably, the piezoelectric cylindrical body 100 has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior has a central hole with a square or circular contour that is coaxial with the outer contour. Of course, there are no restrictions on this. For example, its outer surface is roughly cylindrical, and several planes are arranged rotationally symmetrically, one of which is used to mount the sheet-like piezoelectric actuator 103.

[0390] The difference value ensures that when the combined unit performs a Lissajous scan under the drive signal, the vibrations of the combined unit in the horizontal direction and the vibrations in the vertical direction do not couple. Generally, the difference value ranges from 10Hz to 12kHz. More preferably, the difference value ranges from 1kHz to 10kHz. Specifically, it is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference value is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0391] Optionally, the sheet-shaped piezoelectric actuator 103 is a single piezoelectric actuator or a dual piezoelectric actuator.

[0392] In this embodiment, the arrangement of the first inner electrode 1011 and the first outer electrode 1012, as well as the second inner electrode and the second outer electrode, is the same as in Embodiments 20 and 176. The polarization method, driving method, and driving principle of the corresponding part of the piezoelectric material cylindrical body 100 are also the same as in Embodiments 20 and 176.

[0393] Example 23:

[0394] The embodiments of this example include some specific implementations of the first piezoelectric actuator 100 in Example 2.

[0395] Referring to Figure 25, a Lissajous scanner includes a cylindrical body and an optical fiber 104.

[0396] With the axial extension direction of the cylindrical body as the front-to-back direction, the rear end of the cylindrical body is fixedly connected to the base 200 and supported by the base 200.

[0397] The cylindrical body comprises an open-top base 100 and a sheet-like piezoelectric actuator 103 with an open top on the cover base 100. The front end of the sheet-like piezoelectric actuator 103 extends beyond the front end of the base 100. The portion of the sheet-like piezoelectric actuator 103 connected to the base 100 forms a cylindrical overlapping portion with the base 100. The front end of the sheet-like piezoelectric actuator 103 vibrates in the vertical direction. The optical fiber 104 is fixedly mounted on the front end of the sheet-like piezoelectric actuator 103 in a cantilever support manner.

[0398] At least one of the left and right sides of the overlapping cylindrical part is provided with a first piezoelectric sheet 101. The extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical body to vibrate left and right in the horizontal direction.

[0399] The sheet-shaped piezoelectric actuator 103 causes the natural frequency of the combination of the cylindrical body, the first piezoelectric sheet 101 and the optical fiber 104 in the horizontal direction to be greater than the natural frequency of the same order in the vertical direction, and causes a difference between a certain natural frequency of the combination in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0400] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be, and the more sampling points are taken. Theoretically, the closer the driving frequencies in the two directions are, the better. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the adjustment of the shape structure and / or size parameters of the sheet piezoelectric actuator 103 to ensure that the natural frequencies of the assembly used in the two directions are both close enough to ensure good scanning effect and a uniform and dense scanning grid, and have sufficient difference so that the vibration of the assembly in the two directions will not couple. In this embodiment, the V-order is first-order and the U-order is second-order. Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structures to this embodiment, V can also be an integer greater than 1, and U can be an integer greater than V.

[0401] Therefore, by adjusting the shape and / or dimensional parameters of the sheet piezoelectric actuator 103, this application enables the vibration frequency of the assembly in two directions to meet the requirements of Lissajous scanning, thereby reducing the processing size and precision requirements of the cylindrical body, making the processing of the cylindrical body easier, the processing error easier to control, and the yield rate higher.

[0402] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0403] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0404] Optionally, a first piezoelectric sheet 101 is provided on either the left or right side of the cylindrical overlapping portion, and the extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first piezoelectric sheets 101 can be one, two, or more. When there are two or more first piezoelectric sheets 101, each first piezoelectric sheet 101 extends and retracts synchronously and at the same length.

[0405] Optionally, a first piezoelectric sheet 101 is provided on both the left and right sides of the cylindrical overlapping portion. The first piezoelectric sheet 101 on the left side and the first piezoelectric sheet 101 on the right side extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping portion to vibrate horizontally. The number of first piezoelectric sheets 101 on the same side can be one, two, or more. When there are two or more first piezoelectric sheets 101 on the same side, the first piezoelectric sheets 101 on the same side extend and retract synchronously with equal length.

[0406] Preferably, the surface on which the first piezoelectric sheet 101 is disposed in the cylindrical overlapping portion is a plane to facilitate the placement of the piezoelectric sheet. Further optionally, the surface on which the first piezoelectric sheet 101 is disposed in the cylindrical overlapping portion can be either the inner surface or the outer surface of the cylindrical overlapping portion.

[0407] More preferably, when the first piezoelectric sheet 101 is provided on both the left and right sides of the cylindrical overlapping part, the first piezoelectric sheet 101 on the left and right sides of the cylindrical overlapping part is symmetrically arranged so as to drive the cylindrical overlapping part to vibrate accurately in the horizontal direction without generating a vertical displacement component.

[0408] This application eliminates the need for a specific difference in the natural frequencies of the piezoelectric actuator in the two driving directions of the Lissajous scanner, thus avoiding coupling of vibrations in both directions and reducing the requirements for manufacturing difficulty and precision. By adjusting the shape and / or dimensional parameters of the sheet-like piezoelectric actuator 103, this application ensures that the vibration frequencies of the assembly in both directions meet the requirements of Lissajous scanning, reducing the size and precision requirements of the cylindrical body. This results in lower manufacturing difficulty, easier control of manufacturing errors, and higher yield, significantly improving manufacturing efficiency and yield.

[0409] Example 24:

[0410] The embodiments of this example include some specific implementations of the first piezoelectric actuator 100 in Example 2.

[0411] Referring to Figure 26, a Lissajous scanner includes a cylindrical body and an optical fiber 104.

[0412] With the axial extension direction of the cylindrical body as the front-to-back direction, the rear end of the cylindrical body is fixedly connected to the base 200 and supported by the base 200.

[0413] The cylindrical body comprises an open-top base 100 and a sheet-like piezoelectric actuator 103 with an open top on the cover base 100. The front end of the sheet-like piezoelectric actuator 103 extends beyond the front end of the base 100. The portion of the sheet-like piezoelectric actuator 103 connected to the base 100 forms a cylindrical overlapping portion with the base 100. The front end of the sheet-like piezoelectric actuator 103 vibrates in the vertical direction. The optical fiber 104 is fixedly mounted on the front end of the sheet-like piezoelectric actuator 103 in a cantilever support manner.

[0414] At least one of the inner and outer surfaces of the cylindrical overlapping portion has a first inner electrode 1011 and a first outer electrode 1012 respectively, which are correspondingly fitted. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.

[0415] The sheet-shaped piezoelectric actuator 103 causes the natural frequency of the combination of the cylindrical body and the optical fiber 104 in the horizontal direction to be greater than the natural frequency of the same order in the vertical direction, and causes a difference between the natural frequency of the combination in the vertical direction that is closest to its natural frequency of order V in the horizontal direction and the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0416] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the adjustment of the shape structure and / or size parameters of the sheet piezoelectric actuator 103 to ensure that the natural frequencies of the assembly used in the two directions are both close enough to ensure good scanning effect and a uniform and dense scanning grid, and have sufficient difference so that the vibration of the assembly in the two directions will not couple. Therefore, by adjusting the shape and / or dimensional parameters of the sheet piezoelectric actuator 103, this application enables the vibration frequency of the assembly in two directions to meet the requirements of Lissajous scanning, thereby reducing the processing size and precision requirements of the cylindrical body, making the processing of the cylindrical body easier, the processing error easier to control, and the yield rate higher.

[0417] In this embodiment, V is of order one and U is of order two. Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structures, V can also be an integer greater than 1, and U can be an integer greater than V.

[0418] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0419] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0420] Optionally, a first inner electrode 1011 and a first outer electrode 1012 are respectively provided on the inner and outer surfaces of either side of the cylindrical overlapping portion. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two, or more.

[0421] Alternatively, the inner and outer surfaces of both sides of the cylindrical overlapping portion are respectively provided with correspondingly fitted first inner electrodes 1011 and first outer electrodes 1012. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, while the piezoelectric material portions on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 located on the same side can be one, two, or more.

[0422] More preferably, when the inner and outer surfaces of the left and right sides of the cylindrical overlapping portion are respectively provided with a first inner electrode 1011 and a corresponding first outer electrode 1012, the first inner electrodes 1011 on the left and right sides of the cylindrical overlapping portion are symmetrically arranged so as to drive the cylindrical overlapping portion to vibrate accurately in the horizontal direction without generating a displacement component in the vertical direction.

[0423] This embodiment also has the same beneficial effects as Embodiment 23.

[0424] Example 25:

[0425] The embodiments of this example include some specific implementations of the first piezoelectric actuator 100 in Example 2.

[0426] Referring to Figures 27 and 28, a Lissajous scanner includes a cylindrical body and an optical fiber 104.

[0427] With the axial extension direction of the cylindrical body as the front-to-back direction, the rear end of the cylindrical body is fixedly connected to the base 200 and supported by the base 200.

[0428] The cylindrical body includes support columns 105 located at the four corners and four side plates 106 connecting any two adjacent support columns 105. The upper side plate 106 is a sheet-like piezoelectric actuator 103, and the length of the sheet-like piezoelectric actuator 103 in the front-back direction is longer than the length of the other three side plates 106.

[0429] The rear half of the sheet piezoelectric actuator 103, together with four support columns 105 and the remaining three side plates 106, forms a cylindrical overlapping section. The front end of the sheet piezoelectric actuator 103 vibrates in the vertical direction. The optical fiber 104 is fixedly mounted on the front end of the sheet piezoelectric actuator 103 in a cantilever support manner.

[0430] At least one of the left and right sides of the overlapping cylindrical part is provided with a first piezoelectric sheet 101. The extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical body to vibrate left and right in the horizontal direction.

[0431] The sheet-shaped piezoelectric actuator 103 causes the natural frequency of the combination of the cylindrical body, the first piezoelectric sheet 101 and the optical fiber 104 in the horizontal direction to be greater than the natural frequency of the same order in the vertical direction, and causes a difference between the natural frequency of the combination in the vertical direction that is closest to its natural frequency of order V in the horizontal direction and the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0432] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the adjustment of the shape structure and / or size parameters of the sheet piezoelectric actuator 103 to ensure that the natural frequencies of the assembly used in the two directions are both close enough to ensure good scanning effect and a uniform and dense scanning grid, and have sufficient difference so that the vibration of the assembly in the two directions will not couple. Therefore, by adjusting the shape and / or dimensional parameters of the sheet piezoelectric actuator 103, this application enables the vibration frequency of the assembly in two directions to meet the requirements of Lissajous scanning, thereby reducing the processing size and precision requirements of the cylindrical body, making the processing of the cylindrical body easier, the processing error easier to control, and the yield rate higher.

[0433] Meanwhile, the rigidity of the support column 105 is greater than that of the side plate 106. Its arrangement can isolate the mutual deformation interference between the side plate 106 vibrating in the horizontal direction and the side plate 106 vibrating in the vertical direction, thereby improving the scanning accuracy.

[0434] In this embodiment, V is of order one and U is of order two. Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structures, V can also be an integer greater than 1, and U can be an integer greater than V.

[0435] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0436] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0437] Optionally, a first piezoelectric sheet 101 is provided on either the left or right side of the cylindrical overlapping portion, and the extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first piezoelectric sheets 101 can be one, two, or more. When there are two or more first piezoelectric sheets 101, each first piezoelectric sheet 101 extends and retracts synchronously and at the same length.

[0438] Optionally, a first piezoelectric sheet 101 is provided on both the left and right sides of the cylindrical overlapping portion. The first piezoelectric sheet 101 on the left side and the first piezoelectric sheet 101 on the right side extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping portion to vibrate horizontally. The number of first piezoelectric sheets 101 on the same side can be one, two, or more. When there are two or more first piezoelectric sheets 101 on the same side, the first piezoelectric sheets 101 on the same side extend and retract synchronously with equal length.

[0439] Preferably, the surface on which the first piezoelectric sheet 101 is disposed in the cylindrical overlapping portion is a plane to facilitate the placement of the piezoelectric sheet. Further optionally, the surface on which the first piezoelectric sheet 101 is disposed in the cylindrical overlapping portion can be either the inner surface or the outer surface of the cylindrical overlapping portion.

[0440] More preferably, when the first piezoelectric sheet 101 is provided on both the left and right sides of the cylindrical overlapping part, the first piezoelectric sheet 101 on the left and right sides of the cylindrical overlapping part is symmetrically arranged so as to drive the cylindrical overlapping part to vibrate accurately in the horizontal direction without generating a vertical displacement component.

[0441] This embodiment also has the same beneficial effects as Embodiment 23.

[0442] Example 26:

[0443] The embodiments of this example include some specific implementations of the first piezoelectric actuator 100 in Example 2.

[0444] Referring to Figures 29 and 30, a Lissajous scanner includes a cylindrical body and an optical fiber 104.

[0445] With the axial extension direction of the cylindrical body as the front-to-back direction, the rear end of the cylindrical body is fixedly connected to the base 200 and supported by the base 200.

[0446] The cylindrical body includes support columns 105 located at the four corners and four side plates 106 connecting any two adjacent support columns 105. The upper side plate 106 is a sheet-like piezoelectric actuator 103, and the length of the sheet-like piezoelectric actuator 103 in the front-back direction is longer than the length of the other three side plates 106.

[0447] The rear half of the sheet piezoelectric actuator 103, together with four support columns 105 and the remaining three side plates 106, forms a cylindrical overlapping section. The front end of the sheet piezoelectric actuator 103 vibrates in the vertical direction. The optical fiber 104 is fixedly mounted on the front end of the sheet piezoelectric actuator 103 in a cantilever support manner.

[0448] At least one of the inner and outer surfaces of the cylindrical overlapping portion has a first inner electrode 1011 and a first outer electrode 1012 respectively, which are correspondingly fitted. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.

[0449] The support plate makes the natural frequency of the combination of the cylindrical body and the optical fiber 104 in the horizontal direction greater than the natural frequency of the same order in the vertical direction, and makes the natural frequency of the combination in the vertical direction that is closest to its natural frequency of order V in the horizontal direction have a difference with the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

[0450] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the adjustment of the support plate shape structure and / or size parameters to make the natural frequencies of the assembly used in the two directions simultaneously satisfy the following: they are close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the assembly in the two directions will not produce coupling. Therefore, this application utilizes the adjustment of the support plate's shape and / or dimensional parameters to ensure that the vibration frequency of the assembly in both directions meets the requirements of Lissajous scanning, thereby reducing the processing size and precision requirements of the cylindrical body, making the processing of the cylindrical body easier, the processing error easier to control, and the yield rate higher.

[0451] Meanwhile, the rigidity of the support column 105 is greater than that of the side plate 106. Its arrangement can isolate the mutual deformation interference between the side plate 106 vibrating in the horizontal direction and the side plate 106 vibrating in the vertical direction, thereby improving the scanning accuracy.

[0452] In this embodiment, V is of order one and U is of order two. Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structures, V can also be an integer greater than 1, and U can be an integer greater than V.

[0453] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

[0454] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0455] Optionally, a first inner electrode 1011 and a first outer electrode 1012 are respectively provided on the inner and outer surfaces of either side of the cylindrical overlapping portion. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two, or more.

[0456] Alternatively, the inner and outer surfaces of both sides of the cylindrical overlapping portion are respectively provided with correspondingly fitted first inner electrodes 1011 and first outer electrodes 1012. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, while the piezoelectric material portions on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 located on the same side can be one, two, or more.

[0457] More preferably, when the inner and outer surfaces of the left and right sides of the cylindrical overlapping portion are respectively provided with a first inner electrode 1011 and a corresponding first outer electrode 1012, the first inner electrodes 1011 on the left and right sides of the cylindrical overlapping portion are symmetrically arranged so as to drive the cylindrical overlapping portion to vibrate accurately in the horizontal direction without generating a displacement component in the vertical direction.

[0458] This embodiment also has the same beneficial effects as Embodiment 23.

[0459] Example 27:

[0460] As shown in Figures 31, 32, and 33, a Lissajous scanner includes a cylindrical piezoelectric actuator 100, a support plate 200, and an optical fiber 300. The cylindrical piezoelectric actuator 100 is a two-dimensional scanning piezoelectric actuator.

[0461] The fixed end of the cylindrical piezoelectric actuator 100 is fixedly connected to the base 400 and is supported by the base 400. The cylindrical piezoelectric actuator 100 has a first through hole 101 that extends through itself along the axial direction. The base 400 has a second through hole 401 that communicates with the first through hole 101.

[0462] The free end of the cylindrical piezoelectric actuator 100 vibrates simultaneously along a first direction and a second direction, with the first direction perpendicular to the second direction. The free end of the cylindrical piezoelectric actuator 100 is considered the rear end, and the fixed end of the cylindrical piezoelectric actuator 100 is considered the front end. The first direction is defined as the left-right direction, and the second direction as the vertical direction.

[0463] The support plate 200 is disposed in the first through hole 101. The support plate 200 is disposed in a direction parallel to the horizontal plane. Its rear end is fixedly connected to the free end of the cylindrical piezoelectric actuator 100. The front end of the support plate 200 is located in the first through hole 101 or in the second through hole 401. Its length can be set according to the actual working conditions and is not limited. The optical fiber 300 is fixedly disposed at the front end of the support plate 200 in a cantilever support manner.

[0464] The part of the front end of the support plate 200 that is fixedly connected to the cylindrical piezoelectric actuator 100 is driven by the cylindrical piezoelectric actuator 100 to perform two-dimensional vibration in the first through hole 101 or the first through hole 101 and the second through hole 401. The diameter of the first through hole 101 and the second through hole 401 is set to be not less than the swing range of the support plate 200 and the optical fiber 300, that is, the support plate 200 and the optical fiber 300 will not contact the hole wall of the first through hole 101 or the hole wall of the second through hole 401 of the cylindrical piezoelectric actuator 100 during the scanning process.

[0465] The cylindrical piezoelectric actuator, the support plate 200, and the optical fiber 300 constitute the scanner cantilever. The support plate 200 makes the natural frequency of the scanner cantilever in the horizontal direction greater than its natural frequency of the same order in the vertical direction, and makes a difference between a certain natural frequency of the scanner cantilever in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0466] The scanner cantilever has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, there is a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) that is closest to the V-order natural frequency of the scanner cantilever in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more points are taken, the better, in theory. However, the closer the natural frequencies used by the scanner cantilever in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the shape structure and / or size parameters of the support plate 200 to make the natural frequencies of the scanner cantilever used in the two directions both close enough to ensure good scanning effect and have a uniform and dense scanning grid, and have enough difference so that the vibration of the scanner cantilever in the two directions will not produce coupling.

[0467] Therefore, the difference satisfies the requirement that when the cylindrical piezoelectric actuator 100 performs a Lissajous scan under the drive signal, the vibrations of the scanner cantilever in the horizontal and vertical directions will not be coupled.

[0468] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0469] The support plate 200 and the cylindrical piezoelectric actuator 100 have overlapping portions in the front-to-back direction. The support plate 200 and the fiber cantilever can be almost completely hidden in the through holes of the cylindrical piezoelectric actuator 100 and the base 400, which greatly reduces the length of the fiber scanner in the front-to-back direction and reduces the size of the scanner.

[0470] Preferably, the natural frequency of the cylindrical piezoelectric actuator 100 in the first direction and its natural frequency of the same order in the second direction are the same or similar. The cylindrical piezoelectric actuator 100 referred to here means the cylindrical piezoelectric actuator 100 itself, excluding the support plate 200 and other components such as the optical fiber 300. A cylindrical piezoelectric actuator 100 that meets these requirements is a regularly shaped, rotationally symmetrical piezoelectric actuator, which is easy to manufacture, has easily controllable manufacturing errors, and a high yield rate. Examples include round tube piezoelectric actuators and square tube piezoelectric actuators.

[0471] The optical fiber 300 is fixedly mounted on the upper or lower surface of the support plate 200, or disposed inside the support plate 200, using a cantilever support method. The cantilever support refers to the portion of the optical fiber 300 extending beyond the front end of the support plate 200 forming an optical fiber cantilever, with the portion of the optical fiber 300 located behind the cantilever fixedly connected to the support plate 200. In one embodiment where the optical fiber 300 is disposed inside the support plate 200, the support plate 200 itself has mounting holes for accommodating the optical fiber 300, and the optical fiber 300 is fixedly mounted within these mounting holes using a cantilever support method.

[0472] As an example of the cylindrical piezoelectric actuator 100:

[0473] As shown in Figure 3, the cylindrical piezoelectric actuator has a cylindrical body with its axis set along the front-to-back direction. The front end of the body is fixedly connected to the base 400, and the rear end of the body is connected to the rear end of the support plate 200.

[0474] The driving method for the cylindrical body can be either by attaching a piezoelectric sheet or by having the body itself made of piezoelectric material, with driving electrodes arranged at corresponding positions on its inner and outer surfaces. The structure of the cylindrical piezoelectric actuator, as well as the aforementioned arrangement of piezoelectric sheets or driving electrodes, are all conventional techniques in this field.

[0475] As shown in Figure 4, the cylindrical piezoelectric actuator has a cylindrical body. The cylindrical shape can be either a square or a rectangular cross-section. The axis of the main body is set along the front-to-back direction. The rear end of the cylindrical body is fixedly connected to the base 400, and the front part of the cylindrical body is connected to the rear end of the support plate 200.

[0476] The cylindrical piezoelectric actuator, with a similar driving method to a cylindrical body, can be driven by attaching a piezoelectric sheet, or by using a piezoelectric material as the cylindrical body itself, with driving electrodes arranged at corresponding positions on its inner and outer surfaces. The structure of the cylindrical piezoelectric actuator, as well as the aforementioned arrangement of piezoelectric sheets or driving electrodes, are all conventional techniques in this field.

[0477] Example 28:

[0478] As shown in Figures 31, 32, and 33, a Lissajous scanner includes a base 400, a cylindrical piezoelectric actuator 100, a sheet-like piezoelectric actuator 200, and an optical fiber 300. The cylindrical piezoelectric actuator 100 is a one-dimensional scanning piezoelectric actuator.

[0479] The fixed end of the cylindrical piezoelectric actuator 100 is fixedly connected to the base 400 and is supported by the base 400. The cylindrical piezoelectric actuator 100 has a first through hole 101 that extends through itself along the axial direction. The base 400 has a second through hole 401 that communicates with the first through hole 101.

[0480] The free end of the cylindrical piezoelectric actuator 100 vibrates along a first direction. Taking the free end of the cylindrical piezoelectric actuator 100 as the rear end and the fixed end of the cylindrical piezoelectric actuator 100 as the front end, with the first direction as the left-right direction, the natural frequency of the cylindrical piezoelectric actuator 100 in the left-right direction is the same as or similar to its natural frequency in the vertical direction.

[0481] A sheet-shaped piezoelectric actuator 200 is disposed in the first through hole 101. The sheet-shaped piezoelectric actuator 200 is disposed in a direction parallel to the horizontal plane. Its rear end is fixedly connected to the free end of the cylindrical piezoelectric actuator 100. The front end of the sheet-shaped piezoelectric actuator 200 is located in the first through hole 101 or in the second through hole 401. Its length can be set according to the actual working conditions and is not limited. The front end of the sheet-shaped piezoelectric actuator 200 vibrates in the vertical direction. The optical fiber 300 is fixedly disposed at the front end of the sheet-shaped piezoelectric actuator 200 in a cantilever support manner.

[0482] The portion of the front end of the sheet piezoelectric actuator 200 that is fixedly connected to the cylindrical piezoelectric actuator 100 vibrates in two dimensions under the combined drive of the cylindrical piezoelectric actuator 100 and itself within the first through hole 101 or the first through hole 101 and the second through hole 401. The diameters of the first through hole 101 and the second through hole 401 are set to be no less than the swing range of the sheet piezoelectric actuator 200 and the optical fiber 300, that is, the sheet piezoelectric actuator 200 and the optical fiber 300 will not contact the wall of the first through hole 101 or the wall of the second through hole 401 of the cylindrical piezoelectric actuator 100 during the scanning process.

[0483] The cylindrical piezoelectric actuator 100, the sheet piezoelectric actuator 200, and the optical fiber 300 constitute a scanner cantilever. The sheet piezoelectric actuator 200 makes the natural frequency of the scanner cantilever in the horizontal direction greater than its natural frequency of the same order in the vertical direction, and makes a difference between a certain natural frequency of the scanner cantilever in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

[0484] The scanner cantilever has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, there is a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) that is closest to the V-order natural frequency of the scanner cantilever in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be, and the more points can be taken. Theoretically, the closer the driving frequencies in the two directions are, the better. However, the closer the natural frequencies used by the scanner cantilever in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the shape structure and / or size parameters of the sheet piezoelectric actuator 200 to make the natural frequencies of the scanner cantilever used in the two directions both close enough to ensure good scanning effect and have a uniform and dense scanning grid, and have enough difference so that the vibration of the scanner cantilever in the two directions will not produce coupling.

[0485] Therefore, the difference satisfies the requirement that when the cylindrical piezoelectric actuator 100 performs Lissajous scanning under the drive signal, the vibration of the scanner cantilever in the horizontal direction and in the vertical direction will not be coupled.

[0486] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0487] The sheet-shaped piezoelectric actuator 200 and the cylindrical piezoelectric actuator 100 have overlapping portions in the front-to-back direction. The sheet-shaped piezoelectric actuator 200 and the fiber cantilever can be almost completely hidden in the through holes of the cylindrical piezoelectric actuator 100 and the base 400, which greatly reduces the length of the fiber scanner in the front-to-back direction and reduces the size of the scanner.

[0488] Preferably, the natural frequency of the cylindrical piezoelectric actuator 100 in the lateral direction is the same as or close to the natural frequency of the same order in the vertical direction. The cylindrical piezoelectric actuator 100 referred to here means the cylindrical piezoelectric actuator 100 itself, excluding the sheet-like piezoelectric actuator 200 and other components such as the optical fiber 300. A cylindrical piezoelectric actuator 100 that meets these requirements is a regularly shaped, rotationally symmetrical piezoelectric actuator, with low processing difficulty, easy control of processing errors, and high yield. Examples include round tube piezoelectric actuators and square tube piezoelectric actuators.

[0489] Optionally, the sheet piezoelectric actuator 200 is a single-piezoelectric actuator or a dual-piezoelectric actuator. The sheet piezoelectric actuator 200 is also a conventional actuator, with low manufacturing difficulty. This application, by combining two easily manufactured components, obtains a scanner suitable for Lissajous scanning and with guaranteed anti-coupling effect, which is less difficult to manufacture and has a higher yield rate compared to existing Lissajous scanners.

[0490] The optical fiber 300 is fixedly disposed on the upper or lower surface of the sheet-like piezoelectric actuator 200 or inside the sheet-like piezoelectric actuator 200 in a cantilever support manner. The cantilever support refers to the portion of the front end of the optical fiber 300 extending beyond the front end of the sheet-like piezoelectric actuator 200 forming an optical fiber cantilever, with the portion of the optical fiber 300 located behind the optical fiber cantilever fixedly connected to the sheet-like piezoelectric actuator 200. In one embodiment where the optical fiber 300 is disposed inside the sheet-like piezoelectric actuator 200, the sheet-like piezoelectric actuator 200 body has a mounting hole for accommodating the optical fiber 300, and the optical fiber 300 is fixedly disposed within the mounting hole in a cantilever support manner.

[0491] As an example of the cylindrical piezoelectric actuator 100:

[0492] As shown in Figure 3, the cylindrical actuator has a cylindrical body, with the axis of the body set along the front-to-back direction.

[0493] The driving method for the cylindrical body can be either by attaching a piezoelectric sheet or by having the body itself made of piezoelectric material, with driving electrodes arranged at corresponding positions on its inner and outer surfaces. The structure of the cylindrical actuator, as well as the aforementioned arrangement of piezoelectric sheets or driving electrodes, are all conventional techniques in this field.

[0494] As shown in Figure 4, the cylindrical actuator has a cylindrical body, which can be either a square or a rectangular cross-section. The axis of the body is set along the front-to-back direction.

[0495] The cylindrical actuator, with a similar driving method to a cylindrical body, can be driven by attaching a piezoelectric sheet, or by using a piezoelectric material as the cylindrical body itself, with driving electrodes arranged at corresponding positions on its inner and outer surfaces. The cylindrical actuator structure, as well as the aforementioned arrangement of piezoelectric sheets or driving electrodes, are all conventional techniques in this field.

[0496] It should be noted that the above embodiments are illustrative of this application and not limiting of it, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The words “comprising” or “including” do not exclude the presence of elements or steps not listed in the claims. The words “a” or “an” preceding an element do not exclude the presence of a plurality of such elements. The use of the words first, second, and third, etc., does not indicate any order and these words can be interpreted as names.

[0497] All features disclosed in this specification, except for mutually exclusive features, can be combined in any way.

[0498] Any feature disclosed in this specification (including any appended claims, abstract, and drawings) may be replaced by other equivalent or similar features, unless specifically stated otherwise. That is, unless specifically stated otherwise, each feature is merely one example of a series of equivalent or similar features.

[0499] This application is not limited to the specific embodiments described above. This application extends to any new features or combinations disclosed in this specification, as well as any new steps or combinations of any new methods or processes disclosed.

Claims

1. A Lissajous scanner, characterized in that, The device includes a base, a piezoelectric actuator, a support plate, and an optical fiber. The piezoelectric actuator is a two-dimensional scanning piezoelectric actuator. The fixed end of the piezoelectric actuator is fixedly connected to the base. The free end of the piezoelectric actuator vibrates simultaneously along a first direction and a second direction, which are perpendicular to each other. The free end of the piezoelectric actuator is the front end, the fixed end is the rear end, the first direction is the left-right direction, and the second direction is the vertical direction. The rear end of the support plate is fixedly connected to the free end of the piezoelectric actuator. The support plate is parallel to the horizontal plane. The support plate and the piezoelectric actuator have overlapping portions in the front-to-back direction. The optical fiber is fixedly mounted on the front end of the support plate in a cantilever support manner. The piezoelectric actuator, the support plate, and the optical fiber constitute the scanner cantilever. The support plate and the overlapping portion make the natural frequency of the scanner cantilever in the horizontal direction greater than its natural frequency of the same order in the vertical direction. Furthermore, the scanner cantilever has a difference between a certain natural frequency in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

2. A Lissajous scanner as described in claim 1, characterized in that, The difference satisfies that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under the drive signal, and that the vibration of the scanner arm in the horizontal and vertical directions will not couple.

3. A Lissajous scanner as described in claim 1 or 2, characterized in that, The piezoelectric actuator has the same or similar natural frequency in the first direction and the same natural frequency in the second direction.

4. A Lissajous scanner as described in claim 1 or 2, characterized in that, The optical fiber is fixedly installed on the upper or lower surface of the support plate or inside the support plate in a cantilever support manner.

5. A Lissajous scanner as described in claim 1 or 2, characterized in that, The piezoelectric actuator includes a cylindrical piezoelectric actuator, a square tube piezoelectric actuator, a square bar piezoelectric actuator, or a round bar piezoelectric actuator.

6. A Lissajous scanner, characterized in that, The system includes a base, a first piezoelectric actuator, a sheet-like piezoelectric actuator, and an optical fiber. The first piezoelectric actuator is a one-dimensional scanning piezoelectric actuator. The fixed end of the first piezoelectric actuator is fixedly connected to the base, and the free end of the first piezoelectric actuator vibrates along a first direction. With the free end of the first piezoelectric actuator as the front end and the fixed end as the rear end, and the first direction as the left-right direction, the rear end of the sheet-like piezoelectric actuator is fixedly connected to the free end of the first piezoelectric actuator. The sheet-like piezoelectric actuator is arranged parallel to the horizontal plane, and the sheet-like piezoelectric actuator and the first piezoelectric actuator are positioned in the front-back direction... The scanner has an overlapping portion, and the front end of the sheet piezoelectric actuator vibrates in the vertical direction. The optical fiber is fixedly mounted on the front end of the sheet piezoelectric actuator in a cantilever support manner. The first piezoelectric actuator, the sheet piezoelectric actuator, and the optical fiber constitute the scanner cantilever. The sheet piezoelectric actuator and the overlapping portion make the natural frequency of the scanner cantilever in the horizontal direction greater than its natural frequency of the same order in the vertical direction, and make a difference between a certain natural frequency of the scanner cantilever in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

7. A Lissajous scanner as described in claim 6, characterized in that, The difference satisfies the requirement that when the first piezoelectric actuator performs a Lissajous scan under the drive signal, the scanner cantilever has a sufficient amplitude, and that the vibrations of the scanner cantilever in the horizontal and vertical directions do not couple.

8. A Lissajous scanner as described in claim 6 or 7, characterized in that, The natural frequency of the first piezoelectric actuator in the left-right direction is the same as or similar to its natural frequency in the vertical direction.

9. A Lissajous scanner as described in claim 6 or 7, characterized in that, The optical fiber is fixedly mounted on the upper or lower surface of the sheet-like piezoelectric actuator or inside the support plate in a cantilever support manner.

10. A Lissajous scanner as described in claim 6 or 7, characterized in that, The first piezoelectric actuator includes a cylindrical piezoelectric actuator, a square tube piezoelectric actuator, a square bar piezoelectric actuator, or a round bar piezoelectric actuator.

11. A Lissajous scanner as described in claim 6 or 7, characterized in that, The aforementioned sheet-shaped piezoelectric actuator is a single piezoelectric actuator or a dual piezoelectric actuator.

12. A Lissajous scanner, characterized in that, The device includes a cylindrical body, a support plate fixedly connected to the cylindrical body, and an optical fiber fixedly mounted on the support plate in a cantilevered manner. The cylindrical body extends along its axial direction, with the rear end fixedly connected to a base for support. At least one of the left and right sides of the cylindrical body has a first piezoelectric plate, whose extension and retraction drive the front end of the cylindrical body to vibrate horizontally. At least one of the upper and lower sides of the cylindrical body has a second piezoelectric plate, whose extension and retraction drive the front end of the cylindrical body to vibrate vertically. The support plate extends horizontally... It is positioned in the horizontal direction, located at the front of the cylindrical body, and its rear end is fixedly connected to the cylindrical body. The support plate and the cylindrical body have overlapping parts in the front-rear direction. The support plate and the overlapping parts make the natural frequency of the combination part composed of the cylindrical body, the first piezoelectric sheet, the second piezoelectric sheet, the support plate and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction of the combination part. It also makes a difference between the natural frequency of the combination part in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

13. A Lissajous scanner as described in claim 12, characterized in that, The difference ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibration of the assembly in the horizontal direction and the vibration in the vertical direction will not be coupled.

14. A Lissajous scanner as described in claim 12 or 13, characterized in that, The natural frequency of the cylindrical body in the horizontal direction is the same as or similar to the natural frequency of the same order in the vertical direction.

15. A Lissajous scanner as described in claim 12 or 13, characterized in that, A first piezoelectric sheet is provided on either the left or right side of the cylindrical body, and the extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate left and right in the horizontal direction.

16. A Lissajous scanner as described in claim 12 or 13, characterized in that, The cylindrical body has a first piezoelectric plate on both the left and right sides. The first piezoelectric plate on the left side and the first piezoelectric plate on the right side extend and retract synchronously in opposite directions and of equal length, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.

17. A Lissajous scanner as described in claim 12 or 13, characterized in that, A second piezoelectric sheet is provided on either the upper or lower side of the cylindrical body. The extension and retraction of the second piezoelectric sheet drives the front end of the cylindrical body to vibrate up and down in the vertical direction.

18. A Lissajous scanner as described in claim 12 or 13, characterized in that, A second piezoelectric sheet is provided on both the upper and lower sides of the cylindrical body. The second piezoelectric sheet on the upper side and the second piezoelectric sheet on the lower side extend and retract synchronously in opposite directions and at the same length, driving the front end of the cylindrical body to vibrate up and down in the vertical direction.

19. A Lissajous scanner as described in claim 12 or 13, characterized in that, When the first piezoelectric sheet is provided on both the left and right sides of the cylindrical body, the first piezoelectric sheet on the left and right sides of the cylindrical body is symmetrically arranged; when the second piezoelectric sheet is provided on both the upper and lower sides of the cylindrical body, the second piezoelectric sheet on the upper and lower sides of the cylindrical body is symmetrically arranged.

20. A Lissajous scanner, characterized in that, The device includes a cylindrical body, a support plate, and optical fibers. The cylindrical body extends along its axial direction, with its rear end fixedly connected to a base for support. At least one of the left or right sides of the cylindrical body has a first piezoelectric plate, whose extension and retraction drive the front end of the cylindrical body to vibrate horizontally. At least one of the upper or lower sides of the cylindrical body has a second piezoelectric plate, whose extension and retraction drive the front end of the cylindrical body to vibrate vertically. The support plate is positioned parallel to the horizontal plane. Both the left and right sides of the cylindrical body have mounting grooves for connecting the support plate. The support plate is positioned behind... The end portion is fixedly inserted into the mounting groove. The optical fiber is fixedly provided with the front end of the support plate in a cantilever support manner. The part of the support plate installed in the mounting groove and the cylindrical body portion that overlaps with this part of the support plate in the front-back direction form an overlapping part. The support plate and the overlapping part make the natural frequency of the combination part composed of the cylindrical body, the first piezoelectric sheet, the second piezoelectric sheet, the support plate and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction of the combination part. It also makes the U-order natural frequency of the combination part in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, have a difference with the V-order natural frequency in the horizontal direction.

21. A Lissajous scanner as described in claim 20, characterized in that, The support plate and the overlapping part make the U-order natural frequency of the combined part, which is closest to its V-order natural frequency in the vertical direction, have a difference with the V-order natural frequency in the horizontal direction, where V is an integer greater than 1 and U is an integer greater than V.

22. A Lissajous scanner as described in claim 20 or 21, characterized in that, The difference ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibration of the assembly in the horizontal direction and the vibration in the vertical direction will not be coupled.

23. A Lissajous scanner as described in claim 20 or 21, characterized in that, The natural frequency of the cylindrical body in the horizontal direction is the same as or similar to the natural frequency of the same order in the vertical direction.

24. A Lissajous scanner as described in claim 20 or 21, characterized in that, A first piezoelectric element is provided on either the left or right side of the cylindrical body, or a first piezoelectric element is provided on both the left and right sides of the cylindrical body.

25. A Lissajous scanner as described in claim 20 or 21, characterized in that, A second piezoelectric element is provided on either the upper or lower side of the cylindrical body, or on both the upper and lower sides of the cylindrical body.

26. A Lissajous scanner as described in claim 20 or 21, characterized in that, The surface on which the first or second piezoelectric sheet is disposed of in the cylindrical body can be either the inner surface or the outer surface of the cylindrical body.

27. A Lissajous scanner as described in claim 20 or 21, characterized in that, When the first piezoelectric sheet is provided on both the left and right sides of the cylindrical body, the first piezoelectric sheet on the left and right sides of the cylindrical body is symmetrically arranged; when the second piezoelectric sheet is provided on both the upper and lower sides of the cylindrical body, the second piezoelectric sheet on the upper and lower sides of the cylindrical body is symmetrically arranged.

28. A Lissajous scanner, characterized in that, The device includes a cylindrical body, a support plate fixedly connected to the cylindrical body, and an optical fiber fixedly mounted on the support plate in a cantilevered manner. The cylindrical body extends along its axial direction, with the rear end fixedly connected to a base for support. At least one of the left and right sides of the cylindrical body has a first piezoelectric plate, whose extension and retraction drive the front end of the cylindrical body to vibrate horizontally. At least one of the upper and lower sides of the cylindrical body has a second piezoelectric plate, whose extension and retraction drive the front end of the cylindrical body to vibrate vertically. The support plate is positioned parallel to the horizontal plane, located at the front of the cylindrical body, with its rear end attached to either the upper or lower surface of the cylindrical body. It is fixedly connected to the cylindrical body. The surface of the cylindrical body used to cover the support plate is flat. The optical fiber is fixedly installed at the front end of the support plate in a cantilever support manner. The part of the support plate covering the cylindrical body and the part of the cylindrical body that overlaps with this part of the support plate in the front-back direction form an overlapping part. The support plate and the overlapping part make the natural frequency of the combination part composed of the cylindrical body, the first piezoelectric sheet, the second piezoelectric sheet, the support plate and the optical fiber in the horizontal direction greater than the same natural frequency of the combination part in the vertical direction. It also makes the U-order natural frequency of the combination part in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, have a difference between it and the V-order natural frequency in the horizontal direction, where V is an integer greater than 1 and U is an integer greater than V.

29. A Lissajous scanner as described in claim 28, characterized in that, The difference ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibration of the assembly in the horizontal direction and the vibration in the vertical direction will not be coupled.

30. A Lissajous scanner as described in claim 28 or 29, characterized in that, The natural frequency of the cylindrical body in the horizontal direction is the same as or similar to the natural frequency of the same order in the vertical direction.

31. A Lissajous scanner as described in claim 30, characterized in that, The outer contour of the cylindrical body is square, and its interior has a central hole with a square or circular contour that is coaxial with the outer contour.

32. A Lissajous scanner as described in claim 28 or 29, characterized in that, The piezoelectric sheet attached to the outer or inner surface of the cylindrical body is a flat piezoelectric sheet or an arc-shaped piezoelectric sheet whose shape matches the outer or inner surface of the cylindrical body.

33. A Lissajous scanner as described in claim 28 or 29, characterized in that, A first piezoelectric sheet is provided on either the left or right side of the cylindrical body. The extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate left and right in the horizontal direction. Alternatively, a first piezoelectric sheet is provided on both the left and right sides of the cylindrical body. The first piezoelectric sheet on the left side and the first piezoelectric sheet on the right side extend and retract synchronously in opposite directions and of equal length, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.

34. A Lissajous scanner as described in claim 28 or 29, characterized in that, A second piezoelectric sheet is provided on either the upper or lower side of the cylindrical body. The extension and retraction of the second piezoelectric sheet drives the front end of the cylindrical body to vibrate up and down in the vertical direction. Alternatively, a second piezoelectric sheet is provided on both the upper and lower sides of the cylindrical body. The second piezoelectric sheet on the upper side and the second piezoelectric sheet on the lower side extend and retract synchronously in opposite directions and at the same length, driving the front end of the cylindrical body to vibrate up and down in the vertical direction.

35. A Lissajous scanner as described in claim 28 or 29, characterized in that, When the first piezoelectric sheet is provided on both the left and right sides of the cylindrical body, the first piezoelectric sheet on the left and right sides of the cylindrical body is symmetrically arranged; when the second piezoelectric sheet is provided on both the upper and lower sides of the cylindrical body, the second piezoelectric sheet on the upper and lower sides of the cylindrical body is symmetrically arranged.

36. A Lissajous scanner, characterized in that, The device includes a piezoelectric material cylindrical body, a support plate fixedly connected to the piezoelectric material cylindrical body, and an optical fiber fixedly mounted on the support plate in a cantilevered manner. With the axial extension direction of the piezoelectric material cylindrical body as the front-to-back direction, the rear end of the piezoelectric material cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the piezoelectric material cylindrical body has a first inner electrode and a first outer electrode respectively provided on their inner and outer surfaces. The portion of the piezoelectric material cylindrical body located between the first inner electrode and the corresponding first outer electrode is polarized along its thickness direction. The first inner electrode and the corresponding first outer electrode drive the piezoelectric material located between them to extend and retract in the front-to-back direction, driving the front end of the cylindrical body to vibrate horizontally. At least one of the upper and lower sides of the piezoelectric material cylindrical body has a second inner electrode and a second outer electrode respectively provided on their inner and outer surfaces. The portion between the second inner electrode and the second outer electrode is polarized along the thickness direction. The piezoelectric material located between the two electrodes is driven to expand and contract in the front-back direction by the second inner electrode and the second outer electrode, which drives the front end of the piezoelectric material cylindrical body to vibrate in the vertical direction. The support plate is arranged parallel to the horizontal plane and is located on the front side of the piezoelectric material cylindrical body. Its rear end is fixedly connected to the piezoelectric material cylindrical body. The optical fiber is fixedly arranged with the front end of the support plate in a cantilever support manner. The support plate and the piezoelectric material cylindrical body have an overlapping part in the front-back direction. The support plate and the overlapping part make the natural frequency of the combination part composed of the piezoelectric material cylindrical body, the support plate and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes the natural frequency of the combination part in the vertical direction that is closest to its V-order natural frequency in the horizontal direction have a difference between the V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

37. A Lissajous scanner as described in claim 36, characterized in that, The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

38. A Lissajous scanner as described in claim 36 or 37, characterized in that, The natural frequency of the piezoelectric cylindrical body in the horizontal direction is the same as or similar to the natural frequency of the same order in the vertical direction.

39. A Lissajous scanner as described in claim 36 or 37, characterized in that, When the inner and outer surfaces of the piezoelectric material cylindrical body on both sides are respectively provided with a first inner electrode and a corresponding first outer electrode, the first inner electrodes on the left and right sides of the piezoelectric material cylindrical body are symmetrically arranged.

40. A Lissajous scanner as described in claim 36 or 37, characterized in that, When the inner and outer surfaces of the upper and lower sides of the piezoelectric material cylindrical body are respectively provided with a second inner electrode and a corresponding second outer electrode, the second inner electrodes on the upper and lower sides of the piezoelectric material cylindrical body are symmetrically arranged.

41. A Lissajous scanner as described in claim 38, characterized in that, The piezoelectric cylindrical body has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior has a central hole with a square or circular contour that is coaxial with the outer contour.

42. A Lissajous scanner as described in claim 38, characterized in that, The piezoelectric cylindrical body has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is circular, and its interior has a central hole that is coaxial with the outer contour and has a circular or square shape.

43. A Lissajous scanner as described in claim 41 or 42, characterized in that, V-order is first order, and U-order is second order.

44. A Lissajous scanner, characterized in that, The device includes a piezoelectric material cylindrical body, a support plate fixedly connected to the piezoelectric material cylindrical body, and an optical fiber fixedly mounted on the support plate in a cantilever support manner. With the axial extension direction of the piezoelectric material cylindrical body as the front-to-back direction, the rear end of the piezoelectric material cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the piezoelectric material cylindrical body has a first inner electrode and a first outer electrode respectively disposed on their inner and outer surfaces. The portion of the piezoelectric material cylindrical body located between the corresponding first inner and first outer electrodes is polarized along the thickness direction. The first inner electrode and the corresponding first outer electrode drive the piezoelectric material located between them to extend and retract along the front-to-back direction, driving the front end of the piezoelectric material cylindrical body to vibrate horizontally. At least one of the upper and lower sides of the piezoelectric material cylindrical body has a second inner electrode and a second outer electrode respectively disposed on their inner and outer surfaces. The portion of the piezoelectric material cylindrical body located between the corresponding second inner and second outer electrodes is polarized along the thickness direction. The second inner and second outer electrodes drive the piezoelectric material located between them to extend and retract along the front-to-back direction. The piezoelectric cylindrical body extends and retracts in the rear direction, driving the front end of the piezoelectric material cylindrical body to vibrate in the vertical direction. The support plate is set in a direction parallel to the horizontal plane, located on the front side of the piezoelectric material cylindrical body, and its rear end is fixedly connected to the piezoelectric material cylindrical body. The left and right walls of the piezoelectric material cylindrical body are provided with mounting grooves for connecting the support plate. The rear part of the support plate is inserted into the mounting groove and fixedly connected to the piezoelectric material cylindrical body. The optical fiber is fixedly set with the front end of the support plate in a cantilever support manner. The support plate and the piezoelectric material cylindrical body have overlapping parts in the front-rear direction. The part of the support plate installed in the mounting groove and the part of the piezoelectric material cylindrical body that overlaps with this part of the support plate in the front-rear direction form an overlapping part. The support plate and the overlapping part make the natural frequency of the combination part formed by the piezoelectric material cylindrical body, the support plate and the optical fiber in the horizontal direction greater than the same order natural frequency of the combination part in the vertical direction, and make the natural frequency of the combination part in the vertical direction that is closest to its V order natural frequency in the horizontal direction have a difference between the V order natural frequency in the horizontal direction and the V order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

45. A Lissajous scanner as described in claim 44, characterized in that, The difference ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibration of the assembly in the horizontal direction and the vibration in the vertical direction will not be coupled.

46. ​​A Lissajous scanner as described in claim 44 or 45, characterized in that, The natural frequency of the cylindrical body in the horizontal direction is the same as or similar to the natural frequency of the same order in the vertical direction.

47. A Lissajous scanner as described in claim 46, characterized in that, The outer contour of the piezoelectric material cylindrical body is square, and its interior has a central hole with a square or circular contour that is coaxial with the outer contour.

48. A Lissajous scanner as described in claim 46, characterized in that, The outer contour of the piezoelectric material cylindrical body is circular, and its interior is provided with a central hole that is coaxial with the outer contour and has a circular or square shape.

49. A Lissajous scanner as described in claim 44 or 45, characterized in that, The inner and outer surfaces of either the left or right sides of the piezoelectric cylindrical body are respectively provided with corresponding matching first inner electrodes and first outer electrodes, or the inner and outer surfaces of both the left and right sides of the piezoelectric cylindrical body are respectively provided with corresponding matching first inner electrodes and first outer electrodes.

50. A Lissajous scanner as described in claim 44 or 45, characterized in that, The inner and outer surfaces of either the upper or lower sides of the piezoelectric cylindrical body are respectively provided with corresponding matching second inner electrodes and second outer electrodes, or the inner and outer surfaces of both the upper and lower sides of the piezoelectric cylindrical body are respectively provided with corresponding matching second inner electrodes and second outer electrodes.

51. A Lissajous scanner as described in claim 44 or 45, characterized in that, When the inner and outer surfaces of the left and right sides of the piezoelectric material cylindrical body are respectively provided with a first inner electrode and a corresponding first outer electrode, the first inner electrodes on the left and right sides of the piezoelectric material cylindrical body are symmetrically arranged; when the inner and outer surfaces of the upper and lower sides of the piezoelectric material cylindrical body are respectively provided with a second inner electrode and a corresponding second outer electrode, the second inner electrodes on the upper and lower sides of the piezoelectric material cylindrical body are symmetrically arranged.

52. A Lissajous scanner, characterized in that, The device includes a piezoelectric material cylindrical body, a support plate, and an optical fiber. With the axis of the piezoelectric material cylindrical body extending along its front-to-back direction, the rear end of the piezoelectric material cylindrical body is fixedly connected to a base. At least one of the left and right sides of the piezoelectric material cylindrical body has a first inner electrode and a first outer electrode respectively disposed on their inner and outer surfaces. The first inner electrode and the corresponding first outer electrode drive the front end of the piezoelectric material cylindrical body to vibrate horizontally. At least one of the upper and lower sides of the piezoelectric material cylindrical body has a second inner electrode and a second outer electrode respectively disposed on their inner and outer surfaces. The second inner electrode and the second outer electrode drive the front end of the piezoelectric material cylindrical body to vibrate horizontally. The front end of the piezoelectric cylindrical body is driven to vibrate in the vertical direction; the support plate is arranged in a direction parallel to the horizontal plane, and the rear end of the support plate is attached to the upper or lower surface of the piezoelectric cylindrical body and fixedly connected to the piezoelectric cylindrical body. The optical fiber is fixedly arranged with the front end of the support plate in a cantilever support manner. The part of the support plate attached to the piezoelectric cylindrical body and the part of the piezoelectric cylindrical body that overlaps with this part of the support plate in the front-back direction form an overlapping part. The support plate and the overlapping part make the natural frequency of the combination of the piezoelectric cylindrical body, the support plate and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction.

53. A Lissajous scanner as described in claim 52, characterized in that, The support plate and the overlapping part make the U-order natural frequency of the combined part, which is closest to its V-order natural frequency in the vertical direction, have a difference with the V-order natural frequency in the horizontal direction, where V is an integer greater than 1 and U is an integer greater than V.

54. A Lissajous scanner as described in claim 52 or 53, characterized in that, The natural frequency of the piezoelectric cylindrical body in the horizontal direction is the same or similar to its natural frequency in the vertical direction.

55. A Lissajous scanner as described in claim 54, characterized in that, The piezoelectric material cylindrical body has a square outer contour, and its interior has a central hole with a square or circular contour that is coaxial with the outer contour.

56. A Lissajous scanner as described in claim 52 or 53, characterized in that, The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

57. A Lissajous scanner as described in claim 52 or 53, characterized in that, The inner and outer surfaces of either the left or right sides of the piezoelectric cylindrical body are respectively provided with corresponding and matched first inner electrodes and first outer electrodes. The portion of the piezoelectric cylindrical body located between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction. The piezoelectric material located between the two is driven by the first inner electrode and the corresponding first outer electrode to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction. Alternatively, the inner and outer surfaces of both the left and right sides of the piezoelectric cylindrical body are respectively provided with corresponding and matched first inner electrodes and first outer electrodes. The portion of the piezoelectric cylindrical body located between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction. The piezoelectric material located between the two is driven by the first inner electrode and the corresponding first outer electrode to extend and retract in the front-back direction. The piezoelectric materials on the left and right sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.

58. A Lissajous scanner as described in claim 52 or 53, characterized in that, The inner and outer surfaces of either the upper or lower sides of the piezoelectric cylindrical body are respectively provided with corresponding and matched second inner and outer electrodes. The portion of the piezoelectric cylindrical body located between the second inner and outer electrodes is polarized along the thickness direction. The piezoelectric material located between the two electrodes is driven to extend and retract along the front-to-back direction by the second inner and outer electrodes, driving the front end of the piezoelectric cylindrical body to vibrate in the vertical direction. Alternatively, the inner and outer surfaces of both the upper and lower sides of the piezoelectric cylindrical body are respectively provided with corresponding and matched second inner and outer electrodes. The portion of the piezoelectric cylindrical body located between the second inner and outer electrodes is polarized along the thickness direction. The piezoelectric material located between the two electrodes is driven to extend and retract along the front-to-back direction by the second inner and outer electrodes. The piezoelectric materials on the upper and lower sides simultaneously extend and retract in opposite directions at the same length, driving the front end of the piezoelectric cylindrical body to vibrate in the vertical direction.

59. A Lissajous scanner as described in claim 52 or 53, characterized in that, When the inner and outer surfaces of the left and right sides of the piezoelectric material cylindrical body are respectively provided with a first inner electrode and a corresponding first outer electrode, the first inner electrodes on the left and right sides of the piezoelectric material cylindrical body are symmetrically arranged; when the inner and outer surfaces of the upper and lower sides of the piezoelectric material cylindrical body are respectively provided with a second inner electrode and a corresponding second outer electrode, the second inner electrodes on the upper and lower sides of the piezoelectric material cylindrical body are symmetrically arranged.

60. A Lissajous scanner, characterized in that, The device includes a cylindrical body and an optical fiber. With the axis of the cylindrical body extending in the front-to-back direction, the rear end of the cylindrical body is fixedly connected to a base for support. The cylindrical body consists of an open-top base and a support plate that partially or completely covers the open-top portion of the base. The front end of the support plate extends beyond the front end of the base, and the portion of the support plate connected to the base forms a cylindrical overlapping section. The optical fiber is cantilevered and fixed to the front end of the support plate. At least one of the left and right sides of the cylindrical overlapping section has a first piezoelectric plate, whose extension and retraction drive the front end of the cylindrical body. The cylindrical body vibrates horizontally, and at least one of the upper and lower sides of the overlapping cylindrical part is provided with a second piezoelectric sheet. The extension and retraction of the second piezoelectric sheet drives the front end of the cylindrical body to vibrate vertically. The support plate makes the natural frequency of the combination of the cylindrical body, the first piezoelectric sheet, the second piezoelectric sheet and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes a difference between the natural frequency of the combination in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

61. A Lissajous scanner as described in claim 60, characterized in that, The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

62. A Lissajous scanner as described in claim 60 or 61, characterized in that, A first piezoelectric sheet is provided on either the left or right side of the cylindrical overlapping part, and the front end of the cylindrical overlapping part vibrates left and right in the horizontal direction by the extension and retraction of the first piezoelectric sheet.

63. A Lissajous scanner as described in claim 60 or 61, characterized in that, The first piezoelectric sheet is provided on both the left and right sides of the cylindrical overlapping part. The first piezoelectric sheet on the left side and the first piezoelectric sheet on the right side extend and retract synchronously in opposite directions and of equal length, driving the front end of the cylindrical overlapping part to vibrate left and right in the horizontal direction.

64. A Lissajous scanner as described in claim 60 or 61, characterized in that, A second piezoelectric sheet is provided on either the upper or lower side of the cylindrical overlapping part, and the extension and retraction of the second piezoelectric sheet drives the front end of the cylindrical overlapping part to vibrate up and down in the vertical direction.

65. A Lissajous scanner as described in claim 60 or 61, characterized in that, A second piezoelectric sheet is provided on both the upper and lower sides of the cylindrical overlapping part. The second piezoelectric sheet on the upper side and the second piezoelectric sheet on the lower side extend and retract synchronously in opposite directions and of equal length, driving the front end of the cylindrical overlapping part to vibrate up and down in the vertical direction.

66. A Lissajous scanner as described in claim 63, characterized in that, The first piezoelectric plates on the left and right sides of the overlapping cylindrical part are symmetrically arranged.

67. A Lissajous scanner as described in claim 65, characterized in that, The second piezoelectric plates on the upper and lower sides of the overlapping cylindrical part are symmetrically arranged.

68. A Lissajous scanner, characterized in that, The device includes a cylindrical body and an optical fiber. With the axis of the cylindrical body extending in the front-to-back direction, the rear end of the cylindrical body is fixedly connected to a base for support. The cylindrical body consists of an open-top base and a support plate that partially or completely covers the open-top base. The front end of the support plate extends beyond the front end of the base. The portion of the support plate connected to the base forms a cylindrical overlapping section. The optical fiber is cantilevered and fixed to the front end of the support plate. At least one of the left and right sides of the cylindrical overlapping section has a first inner electrode and a first outer electrode respectively arranged on their inner and outer surfaces. The portion of the cylindrical overlapping section between the first inner electrode and the corresponding first outer electrode is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion between the first inner electrode and the corresponding first outer electrode is driven to extend and retract in the front-to-back direction. The front end of the driving cylindrical body vibrates left and right in the horizontal direction. At least one of the inner and outer surfaces of the upper and lower sides of the overlapping part of the cylindrical body is respectively provided with a second inner electrode and a second outer electrode. The part of the overlapping part of the cylindrical body located between the second inner electrode and the second outer electrode is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part located between the two is driven by the second inner electrode and the second outer electrode to extend and retract in the front and rear directions, driving the front end of the cylindrical body to vibrate in the vertical direction. The support plate makes the natural frequency of the combination part composed of the cylindrical body and the optical fiber in the horizontal direction greater than the same natural frequency of the combination part in the vertical direction, and makes a difference between the natural frequency of the combination part in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

69. A Lissajous scanner as described in claim 68, characterized in that, The difference satisfies that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the scanner arm does not couple with the vibration of the scanner arm in the horizontal and vertical directions.

70. A Lissajous scanner as described in claim 68 or 69, characterized in that, The inner and outer surfaces of either side of the cylindrical overlapping part are respectively provided with a first inner electrode and a first outer electrode that are correspondingly matched. The part of the cylindrical overlapping part between the first inner electrode and the corresponding first outer electrode is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part located between the two is driven by the first inner electrode and the corresponding first outer electrode to extend and retract in the front-back direction, and the front end of the cylindrical overlapping part is driven to vibrate left and right in the horizontal direction.

71. A Lissajous scanner as described in claim 68 or 69, characterized in that, The inner and outer surfaces of the left and right sides of the cylindrical overlapping part are respectively provided with corresponding first inner electrodes and first outer electrodes. The part of the cylindrical overlapping part between the first inner electrode and the corresponding first outer electrode is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part between the two is driven by the first inner electrode and the corresponding first outer electrode to extend and retract in the front-back direction. The piezoelectric material parts on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping part to vibrate left and right in the horizontal direction.

72. A Lissajous scanner as described in claim 68 or 69, characterized in that, The inner and outer surfaces of either the upper or lower sides of the cylindrical overlapping part are respectively provided with corresponding and matched second inner and second outer electrodes. The part of the piezoelectric material cylindrical body located between the second inner and second outer electrodes is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part located between the two is driven by the second inner and second outer electrodes to extend and retract in the front-back direction, driving the front end of the cylindrical overlapping part to vibrate up and down in the vertical direction.

73. A Lissajous scanner as described in claim 68 or 69, characterized in that, The inner and outer surfaces of the upper and lower sides of the cylindrical overlapping part are respectively provided with corresponding and matched second inner electrodes and second outer electrodes. The part of the piezoelectric material cylindrical body located between the second inner electrode and the second outer electrode is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part located between the two is driven by the second inner electrode and the second outer electrode to extend and retract in the front-back direction. The piezoelectric material parts on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping part to vibrate up and down in the vertical direction.

74. A Lissajous scanner as described in claim 71, characterized in that, The first inner electrodes on the left and right sides of the overlapping cylindrical part are symmetrically arranged.

75. A Lissajous scanner as described in claim 73, characterized in that, The second inner electrodes on the upper and lower sides of the overlapping cylindrical part are symmetrically arranged.

76. A Lissajous scanner, characterized in that, The device includes a cylindrical body and an optical fiber. With the axis of the cylindrical body extending in the front-to-back direction, the rear end of the cylindrical body is fixedly connected to a base for support. The cylindrical body includes support columns at four corners and four side plates connecting any two adjacent support columns. The upper side plate is longer in the front-to-back direction than the other three side plates. The rear half of the upper side plate, the four support columns, and the other three side plates form a cylindrical overlapping section. The optical fiber is fixedly mounted on the front end of the upper side plate using a cantilever support method. At least one of the left and right sides of the cylindrical overlapping section has a first piezoelectric element. The front end of the telescopically driven cylindrical body vibrates left and right in the horizontal direction. At least one of the upper and lower sides of the overlapping part of the cylindrical body is provided with a second piezoelectric sheet. The telescopic movement of the second piezoelectric sheet drives the front end of the cylindrical body to vibrate in the vertical direction. The upper side plate makes the natural frequency of the combination part composed of the cylindrical body, the first piezoelectric sheet, the second piezoelectric sheet and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes a difference between the natural frequency of the combination part in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

77. A Lissajous scanner as described in claim 76, characterized in that, The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

78. A Lissajous scanner as described in claim 76 or 77, characterized in that, The rigidity of the support column is greater than that of the side plate.

79. A Lissajous scanner as described in claim 76 or 77, characterized in that, A first piezoelectric sheet is provided on either the left or right side of the cylindrical overlapping part. The extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical overlapping part to vibrate left and right in the horizontal direction. Alternatively, a first piezoelectric sheet is provided on both the left and right sides of the cylindrical overlapping part. The first piezoelectric sheet on the left side and the first piezoelectric sheet on the right side extend and retract synchronously in opposite directions and of equal length, driving the front end of the cylindrical overlapping part to vibrate left and right in the horizontal direction.

80. A Lissajous scanner as described in claim 76 or 77, characterized in that, A second piezoelectric sheet is provided on either the upper or lower side of the cylindrical overlapping part. The extension and retraction of the second piezoelectric sheet drives the front end of the cylindrical overlapping part to vibrate up and down in the vertical direction. Alternatively, a second piezoelectric sheet is provided on both the upper and lower sides of the cylindrical overlapping part. The second piezoelectric sheet on the upper side and the second piezoelectric sheet on the lower side extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping part to vibrate up and down in the vertical direction.

81. A Lissajous scanner as described in claim 76 or 77, characterized in that, The surface of the first or second piezoelectric sheet in the cylindrical overlapping part is a plane.

82. A Lissajous scanner as described in claim 80, characterized in that, When the first piezoelectric sheet is provided on both the left and right sides of the cylindrical overlapping part, the first piezoelectric sheet on the left and right sides of the cylindrical overlapping part is symmetrically arranged; when the second piezoelectric sheet is provided on both the upper and lower sides of the cylindrical overlapping part, the second piezoelectric sheet on the upper and lower sides of the cylindrical overlapping part is symmetrically arranged.

83. A Lissajous scanner, characterized in that, The device includes a cylindrical body and an optical fiber. The cylindrical body extends along its axial direction, with its rear end fixedly connected to a base for support. The cylindrical body includes support columns at four corners and four side plates connecting any two adjacent support columns. The upper side plate is longer in the front-rear direction than the other three side plates. The rear half of the upper side plate, along with the four support columns and the other three side plates, forms a cylindrical overlapping section. The optical fiber is cantilevered and fixed to the front end of the upper side plate. At least one of the left and right sides of the cylindrical overlapping section has a first inner electrode and a first outer electrode respectively arranged on their inner and outer surfaces. The portion of the cylindrical overlapping section between the first inner electrode and the corresponding first outer electrode is a piezoelectric material portion polarized along its thickness direction. The piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven by the first inner electrode and the corresponding first outer electrode. The material section extends and retracts in the front-to-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction. At least one of the inner and outer surfaces of the upper and lower sides of the overlapping cylindrical part is respectively provided with a second inner electrode and a second outer electrode that are correspondingly matched. The part of the overlapping cylindrical part located between the second inner electrode and the second outer electrode is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part located between the two is driven by the second inner electrode and the second outer electrode to extend and retract in the front-to-back direction, driving the front end of the cylindrical body to vibrate in the vertical direction. The upper side plate makes the natural frequency of the combination part composed of the cylindrical body and the optical fiber in the horizontal direction greater than the same natural frequency of the combination part in the vertical direction, and makes a difference between the natural frequency of the combination part in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

84. A Lissajous scanner as described in claim 83, characterized in that, The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

85. A Lissajous scanner as described in claim 83 or 84, characterized in that, The inner and outer surfaces of either side of the cylindrical overlapping part are respectively provided with a first inner electrode and a first outer electrode that are correspondingly matched. The part of the cylindrical overlapping part between the first inner electrode and the corresponding first outer electrode is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part located between the two is driven by the first inner electrode and the corresponding first outer electrode to extend and retract in the front-back direction, and the front end of the cylindrical overlapping part is driven to vibrate left and right in the horizontal direction.

86. A Lissajous scanner as described in claim 83 or 84, characterized in that, The inner and outer surfaces of the left and right sides of the cylindrical overlapping part are respectively provided with corresponding first inner electrodes and first outer electrodes. The part of the cylindrical overlapping part between the first inner electrode and the corresponding first outer electrode is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part between the two is driven by the first inner electrode and the corresponding first outer electrode to extend and retract in the front-back direction. The piezoelectric material parts on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping part to vibrate left and right in the horizontal direction.

87. A Lissajous scanner as described in claim 83 or 84, characterized in that, The inner and outer surfaces of the left and right sides of the cylindrical overlapping part are respectively provided with corresponding first inner electrodes and first outer electrodes, or the inner and outer surfaces of the left and right sides of the cylindrical overlapping part are respectively provided with corresponding first inner electrodes and first outer electrodes.

88. A Lissajous scanner as described in claim 83 or 84, characterized in that, The inner and outer surfaces of either the upper or lower sides of the cylindrical overlapping part are respectively provided with corresponding matching second inner electrodes and second outer electrodes, or the inner and outer surfaces of both the upper and lower sides of the cylindrical overlapping part are respectively provided with corresponding matching second inner electrodes and second outer electrodes.

89. A Lissajous scanner as described in claim 87, characterized in that, When the inner and outer surfaces of the left and right sides of the cylindrical overlapping part are respectively provided with a first inner electrode and a corresponding first outer electrode, the first inner electrodes on the left and right sides of the cylindrical overlapping part are symmetrically arranged.

90. A Lissajous scanner as described in claim 88, characterized in that, When the inner and outer surfaces of the upper and lower sides of the cylindrical overlapping part are respectively provided with a second inner electrode and a corresponding second outer electrode, the second inner electrodes on the upper and lower sides of the cylindrical overlapping part are symmetrically arranged.

91. A Lissajous scanner, characterized in that, The device includes a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber fixedly mounted on the sheet-like piezoelectric actuator in a cantilevered manner. The cylindrical piezoelectric actuator includes a cylindrical body, with the axial extension direction of the cylindrical body as the front-rear direction. The rear end of the cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the cylindrical body is provided with a first piezoelectric sheet. The extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate horizontally. The sheet-like piezoelectric actuator is arranged parallel to the horizontal plane, located on the front side of the cylindrical body, and its rear end is fixed to the cylindrical body. The front end of the sheet piezoelectric actuator vibrates vertically, and the optical fiber is fixedly mounted on the front end of the sheet piezoelectric actuator in a cantilever support manner. The sheet piezoelectric actuator and the cylindrical body have an overlapping part in the front-rear direction. The sheet piezoelectric actuator and the overlapping part make the natural frequency of the combined part composed of the cylindrical piezoelectric actuator, the sheet piezoelectric actuator and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes the natural frequency of the combined part in the vertical direction that is closest to its natural frequency of V in the horizontal direction have a difference between it and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

92. A Lissajous scanner as described in claim 91, characterized in that, The aforementioned difference ensures that vibrations of the assembly in both directions do not couple.

93. A Lissajous scanner as described in claim 91 or 92, characterized in that, The natural frequency of the cylindrical body in the horizontal direction is the same as or similar to the natural frequency of the same order in the vertical direction.

94. A Lissajous scanner as described in claim 91 or 92, characterized in that, A first piezoelectric sheet is provided on either the left or right side of the cylindrical body, and the extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate left and right in the horizontal direction.

95. A Lissajous scanner as described in claim 91 or 92, characterized in that, The cylindrical body has a first piezoelectric plate on both the left and right sides. The first piezoelectric plate on the left side and the first piezoelectric plate on the right side extend and retract synchronously in opposite directions and of equal length, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.

96. A Lissajous scanner as described in claim 91 or 92, characterized in that, The aforementioned sheet-shaped piezoelectric actuator is a single piezoelectric actuator or a dual piezoelectric actuator.

97. A Lissajous scanner as described in claim 91 or 92, characterized in that, The surface of the first piezoelectric element in the cylindrical body is flat.

98. A Lissajous scanner as described in claim 91 or 92, characterized in that, When the first piezoelectric element is provided on both the left and right sides of the cylindrical body, the first piezoelectric element on the left and right sides of the cylindrical body is symmetrically arranged.

99. A Lissajous scanner, characterized in that, The device includes a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber fixedly mounted on the sheet-like piezoelectric actuator in a cantilevered manner. The cylindrical piezoelectric actuator comprises a piezoelectric material cylindrical body, with the axial extension direction of the piezoelectric material cylindrical body as the front-rear direction. The rear end of the piezoelectric material cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the piezoelectric material cylindrical body has a first inner electrode and a first outer electrode respectively disposed on their inner and outer surfaces. The portion of the piezoelectric material cylindrical body located between the corresponding first inner electrode and the first outer electrode is polarized along the thickness direction. The first inner electrode and the corresponding first outer electrode drive the piezoelectric material located between them to extend and retract in the front-rear direction, driving the front end of the piezoelectric material cylindrical body to vibrate left and right in the horizontal direction. The sheet-like piezoelectric actuator is arranged parallel to the horizontal plane, located in front of the piezoelectric material cylindrical body, and its rear end is fixedly connected to the piezoelectric material cylindrical body. The front end of the sheet-like piezoelectric actuator... The end vibrates vertically. The optical fiber is fixedly mounted on the front end of the sheet piezoelectric actuator in a cantilevered manner. The sheet piezoelectric actuator and the piezoelectric cylindrical body have overlapping portions in the front-back direction. The left and right walls of the piezoelectric cylindrical body are provided with mounting grooves for connecting the sheet piezoelectric actuator. The rear end portion of the sheet piezoelectric actuator is inserted into the mounting groove and fixedly connected to the piezoelectric cylindrical body. The portion of the sheet piezoelectric actuator installed in the mounting groove and the portion of the piezoelectric cylindrical body that overlaps with this portion of the sheet piezoelectric actuator in the front-back direction form an overlapping portion. The sheet piezoelectric actuator and the overlapping portion make the natural frequency of the combination of the piezoelectric cylindrical body, the sheet piezoelectric actuator and the optical fiber in the horizontal direction greater than the same order natural frequency of the combination in the vertical direction. It also makes the U-order natural frequency of the combination in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, have a difference between the V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction. V is an integer ≥1 and U is an integer greater than V.

100. A Lissajous scanner as described in claim 99, characterized in that, The piezoelectric cylindrical body has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior has a central hole with a square or circular contour that is coaxial with the outer contour.

101. A Lissajous scanner as described in claim 99, characterized in that, The piezoelectric cylindrical body has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior has a central hole with a square or circular contour that is coaxial with the outer contour.

102. A Lissajous scanner as described in claim 101, characterized in that, The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

103. A Lissajous scanner as described in claim 99, characterized in that, The inner and outer surfaces of either the left or right sides of the piezoelectric cylindrical body are respectively provided with a first inner electrode and a first outer electrode that are correspondingly matched. The portion of the piezoelectric cylindrical body located between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction. The piezoelectric material located between the two is driven by the first inner electrode and the corresponding first outer electrode to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.

104. A Lissajous scanner as described in claim 99, characterized in that, The inner and outer surfaces of the left and right sides of the piezoelectric cylindrical body are respectively provided with corresponding first inner electrodes and first outer electrodes. The portion of the piezoelectric cylindrical body located between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction. The piezoelectric material located between the first inner electrode and the corresponding first outer electrode is driven to extend and retract in the front-back direction. The piezoelectric materials on the left and right sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.

105. A Lissajous scanner as described in claim 104, characterized in that, The first inner electrodes on the left and right sides of the piezoelectric cylindrical body are symmetrically arranged.

106. A Lissajous scanner, characterized in that, The device includes a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber fixedly mounted on the sheet-like piezoelectric actuator in a cantilevered manner. The cylindrical piezoelectric actuator includes a cylindrical body with its axial direction as the front-to-back direction. The rear end of the cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the cylindrical body is provided with a first piezoelectric sheet, and the extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate horizontally. The sheet-like piezoelectric actuator is arranged parallel to the horizontal plane, located on the front side of the cylindrical body, and its rear end is attached to the upper or lower surface of the cylindrical body and fixedly connected to it. The cylindrical body is used to attach the sheet-like piezoelectric actuator. The surface of the moving part is planar. The front end of the sheet piezoelectric actuator vibrates in the vertical direction. The optical fiber is fixedly installed at the front end of the sheet piezoelectric actuator in a cantilever support manner. The part of the sheet piezoelectric actuator that covers the cylindrical body and the part of the cylindrical body that overlaps with this part of the sheet piezoelectric actuator in the front-back direction form an overlapping part. The sheet piezoelectric actuator and the overlapping part make the natural frequency of the combination part composed of the cylindrical body, the first piezoelectric sheet, the second piezoelectric sheet, the sheet piezoelectric actuator and the optical fiber in the horizontal direction greater than the natural frequency of the combination part in the vertical direction. It also makes the natural frequency of the combination part in the vertical direction that is closest to its V-order natural frequency in the horizontal direction have a difference between the V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

107. A Lissajous scanner as described in claim 106, characterized in that, The aforementioned difference ensures that vibrations of the assembly in both directions do not couple.

108. A Lissajous scanner as described in claim 106 or 107, characterized in that, The natural frequency of the cylindrical body in the horizontal direction is the same as or similar to the natural frequency of the same order in the vertical direction.

109. A Lissajous scanner as described in claim 106 or 107, characterized in that, A first piezoelectric sheet is provided on either the left or right side of the cylindrical body, and the extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate left and right in the horizontal direction.

110. A Lissajous scanner as described in claim 106 or 107, characterized in that, The cylindrical body has a first piezoelectric plate on both the left and right sides. The first piezoelectric plate on the left side and the first piezoelectric plate on the right side extend and retract synchronously in opposite directions and of equal length, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.

111. A Lissajous scanner as described in claim 106 or 107, characterized in that, The aforementioned sheet-shaped piezoelectric actuator is a single piezoelectric actuator or a dual piezoelectric actuator.

112. A Lissajous scanner as described in claim 108, characterized in that, The cylindrical body has a square outer contour, and its interior has a central hole with a square or circular contour that is coaxial with the outer contour.

113. A Lissajous scanner, characterized in that, The device includes a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber fixedly mounted on the sheet-like piezoelectric actuator in a cantilevered support manner. The cylindrical piezoelectric actuator comprises a piezoelectric material cylindrical body. With the axial extension direction of the piezoelectric material cylindrical body as the front-to-back direction, the rear end of the piezoelectric material cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the piezoelectric material cylindrical body has a first inner electrode and a first outer electrode respectively disposed on their inner and outer surfaces. The portion of the piezoelectric material cylindrical body located between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction. The first inner electrode and the corresponding first outer electrode drive the piezoelectric material located between them to extend and retract in the front-to-back direction, and drive the front end of the cylindrical body to extend horizontally to the left. The piezoelectric actuator vibrates to the right. It is positioned parallel to the horizontal plane and located in front of the piezoelectric cylindrical body. Its rear end is fixedly connected to the piezoelectric cylindrical body. The front end of the piezoelectric actuator vibrates vertically. The optical fiber is fixedly mounted on the front end of the piezoelectric actuator in a cantilever support manner. The piezoelectric actuator and the piezoelectric cylindrical body have an overlapping portion in the front-rear direction. The piezoelectric actuator and the overlapping portion make the natural frequency of the combination of the piezoelectric cylindrical body, the piezoelectric actuator and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes a difference between the natural frequency of the combination in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

114. A Lissajous scanner as described in claim 113, characterized in that, The aforementioned difference ensures that vibrations of the assembly in both directions do not couple.

115. A Lissajous scanner as described in claim 113 or 114, characterized in that, The natural frequency of the piezoelectric cylindrical body in the horizontal direction is the same as or similar to the natural frequency of the same order in the vertical direction.

116. A Lissajous scanner as described in claim 113 or 114, characterized in that, The inner and outer surfaces of either the left or right sides of the piezoelectric cylindrical body are respectively provided with a first inner electrode and a first outer electrode that are correspondingly matched.

117. A Lissajous scanner as described in claim 113 or 114, characterized in that, The inner and outer surfaces of the left and right sides of the piezoelectric cylindrical body are respectively provided with corresponding first inner electrode and first outer electrode.

118. A Lissajous scanner as described in claim 117, characterized in that, The first inner electrodes on the left and right sides of the piezoelectric cylindrical body are symmetrically arranged.

119. A Lissajous scanner as described in claim 113 or 114, characterized in that, The aforementioned sheet-shaped piezoelectric actuator is a single piezoelectric actuator or a dual piezoelectric actuator.

120. A Lissajous scanner, characterized in that, The device includes a cylindrical piezoelectric actuator, a sheet piezoelectric actuator fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber fixedly mounted on the sheet piezoelectric actuator in a cantilevered manner. The cylindrical piezoelectric actuator includes a cylindrical body with its axial direction as the front-to-back direction. The rear end of the cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the cylindrical body has a first piezoelectric sheet. The extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate horizontally. The sheet piezoelectric actuator is positioned parallel to the horizontal plane, located in front of the cylindrical body, and its rear end is fixedly connected to the cylindrical body. The left and right sides of the cylindrical body have mounting grooves for connecting the sheet piezoelectric actuator. A portion of the rear end of the sheet piezoelectric actuator is inserted into the mounting groove. The plate piezoelectric actuator is installed in the mounting groove and fixedly connected to the cylindrical body. The front end of the plate piezoelectric actuator vibrates in the vertical direction. The optical fiber is fixedly installed at the front end of the plate piezoelectric actuator in a cantilever support manner. The plate piezoelectric actuator and the cylindrical body have an overlapping part in the front-back direction. The part of the plate piezoelectric actuator installed in the mounting groove and the part of the cylindrical body that overlaps with this part of the plate piezoelectric actuator in the front-back direction form an overlapping part. The plate piezoelectric actuator and the overlapping part make the natural frequency of the combination part composed of the cylindrical piezoelectric actuator, the plate piezoelectric actuator and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction of the combination part. It also makes the U-order natural frequency of the combination part in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, have a difference with the V-order natural frequency in the horizontal direction.

121. A Lissajous scanner as described in claim 120, characterized in that, V is an integer not less than 1, and U is an integer greater than V.

122. A Lissajous scanner as described in claim 120 or 121, characterized in that, The difference ensures that when the piezoelectric actuator performs a Lissajous scan under the drive signal, the vibration of the assembly in the horizontal direction and the vibration in the vertical direction will not be coupled.

123. A Lissajous scanner as described in claim 120 or 121, characterized in that, The aforementioned sheet-shaped piezoelectric actuator is a single piezoelectric actuator or a dual piezoelectric actuator.

124. A Lissajous scanner as described in claim 120 or 121, characterized in that, The cylindrical body has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is square, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour. Alternatively, the cylindrical body has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction. Its outer contour is circular, and its interior is provided with a central hole with a square or circular contour that is coaxial with the outer contour.

125. A Lissajous scanner as described in claim 120 or 121, characterized in that, A first piezoelectric sheet is provided on either the left or right side of the cylindrical body. The extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate left and right in the horizontal direction. Alternatively, a first piezoelectric sheet is provided on both the left and right sides of the cylindrical body. The first piezoelectric sheet on the left side and the first piezoelectric sheet on the right side extend and retract synchronously in opposite directions and of equal length, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.

126. A Lissajous scanner as described in claim 120 or 121, characterized in that, The surface on which the first piezoelectric sheet is disposed of in the cylindrical body is either the inner surface or the outer surface of the cylindrical body.

127. A Lissajous scanner, characterized in that, The device includes a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber fixedly mounted on the sheet-like piezoelectric actuator in a cantilevered manner. The cylindrical piezoelectric actuator comprises a piezoelectric material cylindrical body, with the axial extension direction of the piezoelectric material cylindrical body as the front-to-back direction. The rear end of the piezoelectric material cylindrical body is fixedly connected to a base for support. At least one of the left and right sides of the piezoelectric material cylindrical body has a first inner electrode and a first outer electrode respectively disposed on their inner and outer surfaces. The portion of the piezoelectric material cylindrical body located between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction. The first inner electrode and the corresponding first outer electrode drive the piezoelectric material located between them to extend and retract in the front-to-back direction, driving the front end of the piezoelectric material cylindrical body to vibrate left and right in the horizontal direction. The sheet-like piezoelectric actuator is disposed parallel to the horizontal plane and is located within the piezoelectric material cylindrical body. The front side and the rear end of the main body are attached to the upper or lower surface of the piezoelectric cylindrical body and fixedly connected to the piezoelectric cylindrical body. The surface of the piezoelectric cylindrical body used to attach the sheet-like piezoelectric actuator is flat. The front end of the sheet-like piezoelectric actuator vibrates in the vertical direction. The optical fiber is fixedly installed at the front end of the sheet-like piezoelectric actuator in a cantilever support manner. The part of the sheet-like piezoelectric actuator attached to the piezoelectric cylindrical body and the part of the piezoelectric cylindrical body that overlaps with this part of the sheet-like piezoelectric actuator in the front-rear direction form an overlapping part. The sheet-like piezoelectric actuator and the overlapping part make the natural frequency of the combination of the piezoelectric cylindrical body, the sheet-like piezoelectric actuator and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction of the combination. It also makes the U-order natural frequency of the combination in the vertical direction, which is closest to its V-order natural frequency in the horizontal direction, have a difference with the V-order natural frequency in the horizontal direction.

128. A Lissajous scanner as described in claim 127, characterized in that, V is an integer greater than or equal to 1, and U is an integer greater than V.

129. A Lissajous scanner as described in claim 127 or 128, characterized in that, The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

130. A Lissajous scanner as described in claim 127 or 128, characterized in that, The aforementioned sheet-shaped piezoelectric actuator is a single piezoelectric actuator or a dual piezoelectric actuator.

131. A Lissajous scanner as described in claim 127 or 128, characterized in that, The inner and outer surfaces of either the left or right sides of the piezoelectric cylindrical body are respectively provided with a first inner electrode and a first outer electrode that are correspondingly matched. The portion of the piezoelectric cylindrical body located between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction.

132. A Lissajous scanner as described in claim 127 or 128, characterized in that, The inner and outer surfaces of the left and right sides of the piezoelectric material cylindrical body are respectively provided with corresponding first inner electrodes and first outer electrodes. The portion of the piezoelectric material cylindrical body located between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction.

133. A Lissajous scanner as described in claim 132, characterized in that, The first inner electrodes on the left and right sides of the piezoelectric cylindrical body are symmetrically arranged.

134. A Lissajous scanner, characterized in that, The device includes a cylindrical body and an optical fiber. With the axis of the cylindrical body extending in the front-to-back direction, the rear end of the cylindrical body is fixedly connected to a base for support. The cylindrical body consists of an open-top base and a sheet-like piezoelectric actuator with an open top covering the base. The front end of the sheet-like piezoelectric actuator extends beyond the front end of the base. The portion of the sheet-like piezoelectric actuator connected to the base forms a cylindrical overlap portion with the base. The front end of the sheet-like piezoelectric actuator vibrates vertically. The optical fiber is fixedly mounted on the front end of the sheet-like piezoelectric actuator using a cantilever support. At least one of the left and right sides of the part is provided with a first piezoelectric sheet. The extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate left and right in the horizontal direction. The sheet-like piezoelectric actuation part makes the natural frequency of the combination part composed of the cylindrical body, the first piezoelectric sheet and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes a difference between the natural frequency of the combination part in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

135. A Lissajous scanner as described in claim 134, characterized in that, The aforementioned difference ensures that vibrations of the assembly in both directions do not couple.

136. A Lissajous scanner as described in claim 134 or 135, characterized in that, A first piezoelectric sheet is provided on either the left or right side of the cylindrical overlapping part, and the front end of the cylindrical overlapping part vibrates left and right in the horizontal direction by the extension and retraction of the first piezoelectric sheet.

137. A Lissajous scanner as described in claim 134 or 135, characterized in that, The first piezoelectric sheet is provided on both the left and right sides of the cylindrical overlapping part. The first piezoelectric sheet on the left side and the first piezoelectric sheet on the right side extend and retract synchronously in opposite directions and of equal length, driving the front end of the cylindrical overlapping part to vibrate left and right in the horizontal direction.

138. A Lissajous scanner as described in claim 137, characterized in that, The surface of the first piezoelectric sheet in the cylindrical overlapping part is flat.

139. A Lissajous scanner as described in claim 138, characterized in that, The first piezoelectric plates on the left and right sides of the overlapping cylindrical part are symmetrically arranged.

140. A Lissajous scanner, characterized in that, The device includes a cylindrical body and an optical fiber. With the axis of the cylindrical body extending in the front-to-back direction, the rear end of the cylindrical body is fixedly connected to a base for support. The cylindrical body consists of an open-top base and a sheet-like piezoelectric actuator with an open top covering the base. The front end of the sheet-like piezoelectric actuator extends beyond the front end of the base. The portion of the sheet-like piezoelectric actuator connected to the base forms a cylindrical overlapping portion. The front end of the sheet-like piezoelectric actuator vibrates vertically. The optical fiber is fixedly mounted on the front end of the sheet-like piezoelectric actuator using a cantilever support. At least one of the inner and outer surfaces of the left and right sides of the cylindrical overlapping portion is respectively provided with a correspondingly mating first inner electrode and a first outer electrode. The portion of the cylindrical overlapping part between the first inner electrode and the corresponding first outer electrode is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part between the first inner electrode and the corresponding first outer electrode is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction. The sheet-like piezoelectric actuator makes the natural frequency of the combination part composed of the cylindrical body and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction, and makes a difference between the natural frequency of the combination part in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

141. A Lissajous scanner as described in claim 140, characterized in that, The aforementioned difference ensures that vibrations of the assembly in both directions do not couple.

142. A Lissajous scanner as described in claim 140 or 141, characterized in that, The inner and outer surfaces of either side of the cylindrical overlapping part are respectively provided with a first inner electrode and a first outer electrode that are correspondingly matched.

143. A Lissajous scanner as described in claim 140 or 141, characterized in that, The inner and outer surfaces of the left and right sides of the cylindrical overlapping part are respectively provided with corresponding first inner electrode and first outer electrode.

144. A Lissajous scanner as described in claim 143, characterized in that, The first inner electrodes on the left and right sides of the overlapping cylindrical part are symmetrically arranged.

145. A Lissajous scanner as described in claim 140 or 141, characterized in that, The aforementioned sheet-shaped piezoelectric actuator is a single-piezoelectric actuator or a dual-piezoelectric actuator.

146. A Lissajous scanner, characterized in that, The device includes a cylindrical body and an optical fiber. The cylindrical body extends along its axial direction, with its rear end fixedly connected to a base for support. The cylindrical body includes support columns at four corners and four side plates connecting any two adjacent support columns. The upper side plate is a sheet-like piezoelectric actuator, longer than the other three side plates in the front-back direction. The rear half of the sheet-like piezoelectric actuator, along with the four support columns and the other three side plates, forms a cylindrical overlapping section. The front end of the sheet-like piezoelectric actuator vibrates vertically. The optical fiber is cantilevered. A first piezoelectric sheet is fixedly disposed at the front end of the sheet-shaped piezoelectric actuator. At least one side of the left and right sides of the cylindrical overlapping part is provided with a first piezoelectric sheet. The extension and retraction of the first piezoelectric sheet drives the front end of the cylindrical body to vibrate left and right in the horizontal direction. The sheet-shaped piezoelectric actuator makes the natural frequency of the combination of the cylindrical body, the first piezoelectric sheet and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes a difference between the natural frequency of the combination in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

147. A Lissajous scanner as described in claim 146, characterized in that, The aforementioned difference ensures that vibrations of the assembly in both directions do not couple.

148. A Lissajous scanner as described in claim 146 or 147, characterized in that, The rigidity of the support column is greater than that of the side plate.

149. A Lissajous scanner as described in claim 146 or 147, characterized in that, A first piezoelectric sheet is provided on either the left or right side of the cylindrical overlapping part, and the front end of the cylindrical overlapping part vibrates left and right in the horizontal direction by the extension and retraction of the first piezoelectric sheet.

150. A Lissajous scanner as described in claim 146 or 147, characterized in that, The first piezoelectric sheet is provided on both the left and right sides of the cylindrical overlapping part. The first piezoelectric sheet on the left side and the first piezoelectric sheet on the right side extend and retract synchronously in opposite directions and of equal length, driving the front end of the cylindrical overlapping part to vibrate left and right in the horizontal direction.

151. A Lissajous scanner as described in claim 146 or 147, characterized in that, The aforementioned sheet-shaped piezoelectric actuator is a single piezoelectric actuator or a dual piezoelectric actuator.

152. A Lissajous scanner as described in claim 150, characterized in that, The first piezoelectric plates on the left and right sides of the overlapping cylindrical part are symmetrically arranged.

153. A Lissajous scanner, characterized in that, The device includes a cylindrical body and an optical fiber. The cylindrical body extends along its axial direction, with its rear end fixedly connected to a base for support. The cylindrical body includes support columns at four corners and four side plates connecting any two adjacent support columns. The upper side plate is a sheet-like piezoelectric actuator, longer than the other three side plates in the front-back direction. The rear half of the sheet-like piezoelectric actuator, along with the four support columns and the other three side plates, forms a cylindrical overlapping section. The front end of the sheet-like piezoelectric actuator vibrates vertically. The optical fiber is cantilevered and fixed to the front end of the sheet-like piezoelectric actuator. At least one inner and outer surface of the left and right sides of the cylindrical overlapping section... The cylindrical body is provided with corresponding inner and outer electrodes. The part of the cylindrical body that overlaps between the inner and outer electrodes is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part between the inner and outer electrodes is driven to extend and retract in the front-back direction, which drives the front end of the cylindrical body to vibrate left and right in the horizontal direction. The support plate makes the natural frequency of the combination of the cylindrical body and the optical fiber in the horizontal direction greater than the natural frequency of the same order in the vertical direction. It also makes the natural frequency of the combination in the vertical direction that is closest to its V-order natural frequency in the horizontal direction have a difference from the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.

154. A Lissajous scanner as described in claim 153, characterized in that, The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.

155. A Lissajous scanner as described in claim 153 or 154, characterized in that, The inner and outer surfaces of either side of the cylindrical overlapping part are respectively provided with a first inner electrode and a first outer electrode that are correspondingly matched. The part of the cylindrical overlapping part between the first inner electrode and the corresponding first outer electrode is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part located between the two is driven by the first inner electrode and the corresponding first outer electrode to extend and retract in the front-back direction, and the front end of the cylindrical overlapping part is driven to vibrate left and right in the horizontal direction.

156. A Lissajous scanner as described in claim 153 or 154, characterized in that, The inner and outer surfaces of the left and right sides of the cylindrical overlapping part are respectively provided with corresponding first inner electrodes and first outer electrodes. The part of the cylindrical overlapping part between the first inner electrode and the corresponding first outer electrode is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part between the two is driven by the first inner electrode and the corresponding first outer electrode to extend and retract in the front-back direction. The piezoelectric material parts on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping part to vibrate left and right in the horizontal direction.

157. A Lissajous scanner as described in claim 156, characterized in that, The first inner electrodes on the left and right sides of the overlapping cylindrical part are symmetrically arranged.

158. A Lissajous scanner as described in claim 153, characterized in that, The rigidity of the support column is greater than that of the side plate.

159. A Lissajous scanner, characterized in that, The device includes a cylindrical piezoelectric actuator, a support plate, and an optical fiber. The cylindrical piezoelectric actuator is a two-dimensional scanning piezoelectric actuator. The fixed end of the cylindrical piezoelectric actuator is fixedly connected to a base for support. The cylindrical piezoelectric actuator has a first through-hole extending axially through itself, and the base has a second through-hole connecting to the first through-hole. The free end of the cylindrical piezoelectric actuator vibrates simultaneously along a first direction and a second direction, which are perpendicular to each other. The free end of the cylindrical piezoelectric actuator is the rear end, and the fixed end is the front end. The first direction is considered left-right, and the second direction is considered vertical. The support plate is disposed within the first through-hole and is arranged parallel to the horizontal plane. Its rear end is fixedly connected to the free end of the cylindrical piezoelectric actuator. The front end of the optical fiber is located in the first through hole or the second through hole, and the optical fiber is fixedly installed at the front end of the support plate in a cantilever support manner; the part of the front end of the support plate that is fixedly connected to the cylindrical piezoelectric actuator is driven by the cylindrical piezoelectric actuator to perform two-dimensional vibration in the first through hole or the first through hole and the second through hole. The aperture of the first through hole and the second through hole is set to be not less than the swing range of the support plate and the optical fiber; the cylindrical piezoelectric actuator, the support plate and the optical fiber constitute the scanner cantilever. The support plate makes the natural frequency of the scanner cantilever in the horizontal direction greater than its natural frequency of the same order in the vertical direction, and makes a difference between a certain natural frequency of the scanner cantilever in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

160. A Lissajous scanner as described in claim 159, characterized in that, The difference ensures that when the cylindrical piezoelectric actuator performs a Lissajous scan under the drive signal, the vibrations of the scanner cantilever in the horizontal and vertical directions will not couple.

161. A Lissajous scanner as described in claim 159 or 160, characterized in that, The difference ensures that when the cylindrical piezoelectric actuator performs a Lissajous scan under the drive signal, the vibrations of the scanner cantilever in the horizontal and vertical directions will not couple.

162. A Lissajous scanner as described in claim 159, characterized in that, The cylindrical piezoelectric actuator has the same or similar natural frequency in the first direction and the same natural frequency in the second direction.

163. A Lissajous scanner as described in claim 159, characterized in that, The optical fiber is fixedly installed on the upper or lower surface of the support plate or inside the support plate in a cantilever support manner.

164. A Lissajous scanner, characterized in that, The system includes a base, a cylindrical piezoelectric actuator, a sheet piezoelectric actuator, and an optical fiber. The cylindrical piezoelectric actuator is a one-dimensional scanning piezoelectric actuator. The fixed end of the cylindrical piezoelectric actuator is fixedly connected to the base for support. The cylindrical piezoelectric actuator has a first through-hole extending axially through itself, and the base has a second through-hole connecting to the first through-hole. The free end of the cylindrical piezoelectric actuator vibrates along a first direction. With the free end of the cylindrical piezoelectric actuator as the rear end and the fixed end of the cylindrical piezoelectric actuator as the front end, and the first direction as the left-right direction, the sheet piezoelectric actuator is disposed within the first through-hole. The sheet piezoelectric actuator is arranged parallel to the horizontal plane, and its rear end is fixedly connected to the free end of the cylindrical piezoelectric actuator. The front end of the actuator is located in the first through hole or the second through hole. The front end of the sheet piezoelectric actuator vibrates in the vertical direction. The optical fiber is fixedly installed at the front end of the sheet piezoelectric actuator in a cantilever support manner. The aperture of the first through hole and the second through hole is set to be not less than the swing range of the sheet piezoelectric actuator and the optical fiber. The cylindrical piezoelectric actuator, the sheet piezoelectric actuator and the optical fiber constitute the scanner cantilever. The sheet piezoelectric actuator makes the natural frequency of the scanner cantilever in the horizontal direction greater than its natural frequency of the same order in the vertical direction, and makes a difference between a certain natural frequency of the scanner cantilever in the vertical direction that is closest to its natural frequency of V in the horizontal direction and the natural frequency of V in the horizontal direction, where V is an integer greater than or equal to 1.

165. A Lissajous scanner as described in claim 164, characterized in that, The difference ensures that when the cylindrical piezoelectric actuator performs a Lissajous scan under the drive signal, the vibrations of the scanner cantilever in the horizontal and vertical directions will not couple.

166. A Lissajous scanner as described in claim 164 or 165, characterized in that, The natural frequency of the cylindrical piezoelectric actuator in the left-right direction is the same as or similar to the natural frequency of the same order in the vertical direction.

167. A Lissajous scanner as described in claim 164 or 165, characterized in that, The aforementioned sheet-shaped piezoelectric actuator is a single piezoelectric actuator or a dual piezoelectric actuator.

168. A Lissajous scanner as described in claim 164 or 165, characterized in that, The optical fiber is fixedly mounted on the upper or lower surface of the sheet piezoelectric actuator or inside the sheet piezoelectric actuator in a cantilever support manner.

169. A Lissajous scanner as described in any one of claims 1, 6, 12, 20, 28, 36, 44, 52, 60, 68, 76, 83, 91, 99, 106, 113, 120, 127, 134, 140, 146, 153, 159, and 164, characterized in that, The difference range is 10Hz to 12KHz.

170. A Lissajous scanner as described in claim 169, characterized in that, The difference range is 1kHz to 10kHz.

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