Laser ablation of electrostatic chucks
Laser ablation of electrostatic chucks addresses the inefficiencies of chemical refurbishment by providing a faster, safer, and cost-effective method to remove MCA pads and deposited metals, enhancing substrate integrity and environmental safety.
WO2026147571A1 Publication Date: 2026-07-09APPLIED MATERIALS INC
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Patent Information
- Application Number
- PCT/US2025/048983
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-01-06
- Filing Date
- 2025-10-01
- Publication Date
- 2026-07-09
AI Technical Summary
Technical Problem
Conventional chemical refurbishment processes for electrostatic chucks are time-consuming, costly, hazardous, and cause significant damage to the substrate, making them inefficient and environmentally unfriendly.
Method used
A laser ablation system is employed to remove MCA pads and deposited metals from electrostatic chucks, utilizing controlled laser beams with specific parameters to minimize substrate damage and expedite the refurbishment process.
Benefits of technology
Laser ablation allows for faster, less expensive, and safer refurbishment of electrostatic chucks with minimal substrate damage, enabling more efficient reuse and reducing environmental impact.
✦ Generated by Eureka AI based on patent content.
Abstract
A method to refurbish electrostatic chucks includes identifying one or more layers on a minimal contact area (MCA) pad affixed to an electrostatic chuck, configuring a laser ablation system to remove the identified layers, ablating the identified layers with a controlled laser beam from the laser ablation system, identifying one or more deposited metals on the electrostatic chuck, and ablating the identified deposited metals with the laser beam. In another aspect, the MCA pad may include a diamond like carbon layer and a Ti-TiN layer. The laser ablation process removes the layers and deposited metals on an electrostatic chuck in a manner that is performed faster, with a lower cost, and without the use of a multistep chemical process compared to conventional chemical stripping methods.
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