Wireless charging for a robot end effector
A wireless charging system for robot end effectors addresses the inefficiencies of wired connections and battery limitations by providing continuous power to electrical loads, improving substrate handling and system throughput.
WO2026147572A1PCT designated stage Publication Date: 2026-07-09APPLIED MATERIALS INC
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- APPLIED MATERIALS INC
- Filing Date
- 2025-10-03
- Publication Date
- 2026-07-09
Smart Images
Figure US2025049514_09072026_PF_FP_ABST
Abstract
A substrate processing system includes a transfer chamber and at least one process chamber coupled with the transfer chamber. The substrate processing system further includes a substrate-handling robot disposed within the transfer chamber. The substrate-handling robot includes a power receiver located proximate an end effector of the substrate-handling robot for handling a substrate. The substrate processing system further includes at least one power transmitter disposed proximate a facet between the transfer chamber and the at least one process chamber. The power transmitter is configured to wirelessly transmit power to the power receiver when the power receiver is substantially aligned with the power transmitter.
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