Method for assisting in designing supply system for supply resource of production facility

Abstract

A method for assisting in designing a supply system for a supply resource of a production facility is provided. The method comprises the steps of: receiving design information for each of multiple pieces of element equipment constituting a target production facility to be designed; receiving two-dimensional layout information for the target production facility; on the basis of information on arrangement of the multiple pieces of element equipment of the target production facility according to the two-dimensional layout information and size information of the multiple pieces of element equipment according to the design information, generating three-dimensional space design information for the target production facility, the three-dimensional space design information including a three-dimensional model for each of the multiple pieces of element equipment; and displaying the three-dimensional space design information through display equipment and displaying a three-dimensional model of a supply system in response to receiving, from a user, an input for a supply system design for the multiple pieces of element equipment included in a three-dimensional space design.

Description

Supply system design assistance method for supply resources of production facilities

[0001] The present invention relates to the design of production facilities, and more specifically, to a method for assisting in the design of a supply system for supply resources of production facilities.

[0002] For example, as technology advances, production facilities for products such as semiconductor process equipment, display process equipment, and secondary battery process equipment become more complex and include a variety of equipment. To build facilities for the production of such advanced products, a very large number of individual pieces of equipment are required, and the design for the placement of such equipment must be carried out from a spatial perspective.

[0003] Furthermore, it is required to accurately meet the specifications of each piece of equipment, and in particular, to satisfy the required supply rates for each resource type, such as electricity, gas, and water. In complex production facilities, multiple pieces of equipment are arranged in groups, requiring the design of supply paths formed for each group. Additionally, the main path overseeing the multiple groups must be designed to meet the demands of all individual pieces of equipment.

[0004] However, conventionally, the design of the spatial arrangement of production facilities was simply provided through 2D CAD design, and such layout drawings contained no information regarding the detailed design specifications or supply rates of each piece of equipment included in the production facilities. Therefore, in order to design the supply system for supply resources, there was a difficulty in having to obtain separate engineering data, namely design information, regarding the equipment of the production facilities and perform the design while directly calculating the supply rates of individual pieces of equipment according to the supply system facilities.

[0005] The objective of the present invention to solve the aforementioned problems is to provide a method that supports the design of a supply system for a production facility more quickly and easily by constructing 3D design data in the BIM (Building Information Management) format, in which design information of a 3D model and individual models is linked based on engineering data and planar layout information of the production facility, thereby automatically calculating and providing the sum of supply rates of facilities linked to the design piping when designing the supply system of the production facility, and generating a piping model according to the necessary piping design standards.

[0006] However, the problem to be solved by the present invention is not limited thereto and may be expanded in various ways without departing from the spirit and scope of the present invention.

[0007] A method for assisting in the design of a supply system for a supply resource of a production facility according to an embodiment of the present invention for achieving the aforementioned purpose may include: receiving design information for each of a plurality of element equipment constituting a target production facility to be designed; receiving two-dimensional layout information for the target production facility; generating three-dimensional spatial design information for the target production facility including a three-dimensional model for each of the plurality of element equipment based on information regarding the arrangement of the plurality of element equipment of the target production facility according to the two-dimensional layout information and size information of the plurality of element equipment according to the design information; and displaying the three-dimensional spatial design information through a display device and displaying a three-dimensional model of the supply system in response to receiving input from a user regarding the design of a supply system for the plurality of element equipment included in the three-dimensional spatial design.

[0008] According to one aspect, design information for each of the plurality of element equipment may include size information for the element equipment; process step information of the element equipment; supply resource consumption information of the element equipment; and supply resource nozzle information of the element equipment.

[0009] According to one aspect, the supply resource consumption information includes detailed condition information for each type of supply resource of the element equipment; and consumption rate information; and the supply resource nozzle information may include nozzle count information for each type of supply resource of the element equipment.

[0010] According to one aspect, the three-dimensional model for each of the plurality of element equipment may be a process equipment group three-dimensional model generated for each equipment group grouped based on process step information of the element equipment.

[0011] According to one aspect, the step of generating the three-dimensional spatial design information can generate three-dimensional spatial design information in a BIM (Building Information Management) format by storing the design information of each of the plurality of element equipment in conjunction with a three-dimensional model corresponding to each of the plurality of element equipment.

[0012] According to one aspect, the process equipment group 3D model can be stored in conjunction with sum design information for the process equipment group 3D model generated based on design information of a plurality of element equipment included in the process equipment group 3D model.

[0013] According to one aspect, the step of displaying a three-dimensional model of the supply system comprises: a step of displaying a three-dimensional model of a main pipe for a first type of supply resource according to user input; and a step of displaying a three-dimensional model of a first sub-pipe for a first type of supply resource branched from the three-dimensional model of a main pipe for a first type of supply resource according to user input; wherein the three-dimensional model of a main pipe for a first type of supply resource is determined to have a pipe capacity that satisfies the summed consumption rate information of the first type of supply resource, which is summed based on design information for each of all element equipment associated with the main pipe for the first type of supply resource, and the three-dimensional model of a sub-pipe for a first type of supply resource is determined to have a pipe capacity that satisfies the summed consumption rate information of the first type of supply resource, which is summed based on design information for each of the element equipment associated with the sub-pipe for the first type of supply resource.

[0014] According to one aspect, the production facility includes at least one of a semiconductor production facility, a display production facility, and a secondary battery production facility, and the design information for each of the plurality of elemental equipment may include a data sheet in SEMI E6 format and a data sheet in SEMI E51 format.

[0015] According to one aspect, the process equipment group 3D model may include a visualization of the number of nozzles corresponding to each supply resource type of the process equipment group 3D model, determined based on design information for each of the plurality of element equipment included in the process equipment group 3D model.

[0016] According to one aspect, the visualization display includes nozzle modeling displayed on the upper surface of the three-dimensional model as many times as the number of nozzles, and the nozzle modeling may be configured to have different colors depending on the type of supply resource to be supplied.

[0017] The disclosed technology may have the following effects. However, this does not mean that a specific embodiment must include all of the following effects or only the following effects; therefore, the scope of the rights of the disclosed technology should not be understood as being limited by this.

[0018] According to the method for assisting in the design of a supply system for supply resources of a production facility according to one embodiment of the present invention described above, by constructing 3D design data in the form of BIM (Building Information Management) in which design information of a 3D model and individual models is linked based on engineering data and planar layout information of the production facility, the sum of supply rates of facilities linked to the design piping are automatically calculated and provided when designing the supply system of the production facility, and a piping model is created according to the necessary piping design standards, thereby supporting the design of the supply system of the production facility more quickly and easily.

[0019] Therefore, it is possible to establish an evaluation system that can resolve the discrepancy between actual production facility utility consumption and expected utility consumption, and guarantee the design validity of estimated utilities calculated from tool utility specifications and load factors.

[0020] In addition, through the optimized design of production facilities, such as fab facilities, it is possible to simultaneously achieve production efficiency, facility scale, and flexible response to market conditions. That is, a step-by-step optimal design system can be established to respond to timely construction of fab facilities, rapid design of fab facilities, and frequent design changes.

[0021] Furthermore, by fundamentally eliminating the possibility of data omissions resulting from manual supply system design, the integrity of information required for infrastructure line design can be ensured, and the history of design changes can be managed. Additionally, by spatially linking the specification information of equipment included in the production facility with the initial layout drawings of the production line, it is possible to visually and easily provide information on the specifications of individual and integrated equipment.

[0022] Figure 1 shows exemplary two-dimensional layout information of a production facility.

[0023] Figure 2 illustrates the classification of the E6 data sheet for semiconductor production equipment.

[0024] Figure 3 illustrates design information of the E6 data sheet of a semiconductor manufacturing facility.

[0025] Figure 4 illustrates the category classification of the E51 data sheet for semiconductor production equipment.

[0026] Figure 5 illustrates the equipment requirement information of the E51 data sheet for semiconductor production equipment.

[0027] Figure 6 illustrates design information for a secondary battery production facility.

[0028] FIG. 7 illustrates a framework for a supply system smart design tool for supply resources of a production facility according to one aspect of the present invention.

[0029] FIG. 8 illustrates a supply system design procedure for supply resources of a production facility according to one aspect of the present invention.

[0030] FIG. 9 is a schematic flowchart of a method to assist in the design of a supply system for supply resources of a production facility according to one embodiment of the present invention.

[0031] Figure 10 is a detailed flowchart of the three-dimensional space design information generation step of Figure 9.

[0032] Figure 11 is an example diagram of equipment group hierarchy classification according to one aspect.

[0033] FIG. 12 is a first exemplary diagram of a supply system design according to one aspect of the present invention.

[0034] FIG. 13 is a second exemplary diagram of a supply system design according to one aspect of the present invention.

[0035] Figure 14 is a conceptual diagram of dummy nozzle modeling according to one aspect.

[0036] Figure 15 is an example of a dummy nozzle addition to the upper surface of a three-dimensional model.

[0037] The present invention is capable of various modifications and may have various embodiments, and specific embodiments are illustrated in the drawings and described in detail.

[0038] However, this is not intended to limit the invention to specific embodiments, and it should be understood that it includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the invention.

[0039] Terms such as "first," "second," etc., may be used to describe various components, but said components should not be limited by said terms. Such terms are used solely for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be named the second component, and similarly, the second component may be named the first component. The term "and / or" includes a combination of a plurality of related described items or any of a plurality of related described items.

[0040] When it is stated that one component is "connected" or "connected" to another component, it should be understood that while it may be directly connected or connected to that other component, there may also be other components in between. On the other hand, when it is stated that one component is "directly connected" or "directly connected" to another component, it should be understood that there are no other components in between.

[0041] The terms used in this application are used merely to describe specific embodiments and are not intended to limit the invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this application, terms such as "comprising" or "having" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0042] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application.

[0043] Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the attached drawings. In order to facilitate an overall understanding of the present invention, the same reference numerals are used for identical components in the drawings, and redundant descriptions of identical components are omitted.

[0044]

[0045] As previously discussed, product manufacturing facilities, such as semiconductor process equipment, display process equipment, and secondary battery process equipment, become more complex and include a wider variety of equipment as technology advances. To establish facilities for the production of such advanced products, a very large number of individual pieces of equipment are required, and the layout of these pieces of equipment must be designed from a spatial perspective.

[0046] Figure 1 shows exemplary two-dimensional layout information of a production facility. That is, as shown in Figure 1, the production facility includes a very large number of pieces of equipment, and at least some of the multiple pieces of equipment can be arranged to function by grouping them according to production process stages. To design the production facility, the layout design of the overall production facility can be completed by dividing the area by process stage, for example, as shown in Figure 1, and arranging the equipment required for the corresponding process stage.

[0047]

[0048] In addition to the two-dimensional layout design exemplified in Fig. 1, it is required to accurately meet the requirements of each piece of equipment provided in the production facility, and in particular, for supply resources such as electricity, gas, and water, it is required that the required supply rates for each type of resource be met. In complex production facilities, multiple pieces of equipment are arranged in groups, and a design for the supply path formed for each group is required, and a design that can meet the demands of all individual pieces of equipment is also required for the main path that oversees the multiple groups.

[0049] As illustrated in FIG. 1, when various equipment is provided, the main piping, which is the supply path for the supply resources supplied to all such equipment, must have a capacity limit capable of meeting the demand of all of them. In addition, sub-paths branching into each individual zone are required to have a capacity limit capable of meeting the demand for supply resources for multiple pieces of equipment included in the branch path.

[0050]

[0051] As a non-limiting but more specific example, the production equipment may relate to, for instance, a semiconductor Fab process. In this regard, FIG. 2 illustrates the classification of an E6 data sheet for semiconductor production equipment, and FIG. 3 illustrates the design information of an E6 data sheet for semiconductor production equipment. FIG. 4 illustrates the classification of an E51 data sheet for semiconductor production equipment, and FIG. 5 illustrates the equipment requirement information of an E51 data sheet for semiconductor production equipment. As illustrated exemplarily in FIG. 2 to 4, for example, equipment for a semiconductor production process, there exists a documentation format for standardized equipment elements, such as, for instance, a SEMI E6 or E51 data sheet.

[0052] Here, SEMI E6 is a standard applicable to facility interfaces for semiconductor manufacturing equipment and support equipment provided by suppliers, and aims to provide documentation guidelines for equipment installation. This standard covers all requirements from the receipt of equipment to the completion of installation and ensures that information necessary for efficient facility design and equipment installation is conveyed in a standardized manner. This enables seamless communication between equipment suppliers and semiconductor manufacturers.

[0053]

[0054] SEMI E6 encompasses all requirements necessary for equipment installation and supports the entire process from equipment receipt to installation completion. By providing information required for facility design in a consistent format through equipment installation data sheets, it enables equipment suppliers and buyers to effectively create and interpret installation data. This enhances the efficiency of facility design and equipment installation and promotes cooperation between both parties.

[0055] Equipment installation documentation in accordance with SEMI E6 includes key information necessary to clearly and systematically support the entire equipment installation process. In addition to general information such as equipment name, model name, serial number, manufacturer information, installation location, and schedule, it includes specification information such as equipment functions, technical specifications, dimensions, and weight. Furthermore, it specifies electrical and electronic requirements, including voltage and current requirements, details of electrical connections, and grounding and electrical safety conditions.

[0056] To ensure the stable operation of equipment within the facility, utility supply requirements, such as compressed air, cooling water, and vacuum, are described in detail. Information regarding the connection locations, pressure, flow rate conditions, and outlets and exhaust ports of the utilities is included. Mechanical connection conditions specify equipment fixation, vibration management, leveling, and precautions during movement, while the cleanroom class of the installation space and radiation and noise management are also considered.

[0057] The equipment installation process is described in detail, including step-by-step guidelines, a list of tools required for installation, safety procedures, and emergency measures. Additionally, commissioning and initial testing procedures, normal operating conditions, and the equipment and conditions required for verification are specified. Post-installation maintenance schedules, inspection items, and a list of spare parts are also included to ensure stable operation.

[0058] For the design of production facilities, information regarding facility layout, utility placement, and environmental conditions is critically required during equipment installation documentation. Equipment size and weight serve as basic data for securing space and placement within the facility, while the installation location, fixing method, and spacing from surrounding equipment are reflected in the design. Equipment vibration absorption and floor load requirements are essential for structural design, and equipment movement paths are also designed considering efficiency during delivery and installation.

[0059] Power requirements are applied to electrical wiring and panel design, while compressed air and vacuum lines form the basis for utility line layout design. Cooling water supply and discharge, as well as the location and size of exhaust ports, are related to HVAC design, and environmental conditions such as temperature and humidity, and noise management, are reflected in the design. In terms of safety design, protective and emergency devices are installed in the facility, and electrical safety regulations and fire prevention systems are incorporated into the design.

[0060] The facility design includes utility connection drawings and internal layout configurations, as well as securing access routes and service spaces for equipment maintenance. The environment for initial testing and commissioning after installation is also considered to ensure that the facility operates normally. This design support method minimizes the possibility of problems during the installation process and enables stable operation and efficient management of the equipment.

[0061]

[0062] Meanwhile, SEMI E51 is a standard designed to ensure efficient and seamless interoperability among equipment used in semiconductor manufacturing processes, providing an integrated documentation format that defines data exchange and communication between devices. In semiconductor manufacturing environments, various devices exchange data through complex processes, requiring real-time status monitoring and data analysis to maintain or optimize process performance. To address these requirements, the SEMI E51 standard aims to enhance the efficiency of process design and facility operation by systematically defining equipment status, events, control signals, and other related information. In particular, this standard plays a crucial role in preventing productivity degradation caused by data format inconsistencies or communication failures between devices, and in ensuring consistency in process control.

[0063] E51 format documents contain various information to support semiconductor process design. Equipment status and event information represent the real-time status of equipment and are necessary during process design to minimize interference between facilities and enhance efficiency. Recording of events occurring during the process is used to prevent interface conflicts or data transmission errors between equipment in advance. Process parameter and control signal information are used as data to support the operation of each piece of equipment under optimal conditions. Process parameters refer to setting values ​​required to perform specific tasks of the equipment, while control signals are necessary to adjust equipment operation according to process conditions. This information is utilized to optimize control flow between equipment during facility design.

[0064] Data logging and diagnostic information play a crucial role in detecting process abnormalities or predicting maintenance timing. By recording and analyzing process data in real time, the causes of unexpected equipment failures or process defects can be rapidly identified, maximizing equipment uptime and enabling the efficient establishment of maintenance plans. Specifications regarding equipment interaction and communication protocols are essential to ensure smooth data exchange between devices. To prevent communication protocol inconsistencies or data transmission errors, the data exchange formats and protocols between devices must be clearly defined. Equipment configuration and functional requirements may also be included in the E51 document. This includes not only the physical characteristics of the equipment but also software components, data processing methods, and software version information.

[0065] This information enables equipment designers to clearly understand the functional scope that each piece of equipment can provide and serves as important data for evaluating compatibility between equipment. The information contained in E51 format documents is useful for optimizing equipment interactions, maximizing productivity, and preventing process errors. This enables the standardization of process control and ensures the stability and operational efficiency of semiconductor manufacturing facilities.

[0066]

[0067] Meanwhile, FIG. 6 illustrates design information for a secondary battery production facility. As shown in FIG. 6, the design information for the production facility may include engineering data for each of the multiple elemental equipment for constructing the production facility. As illustrated in FIG. 6, for example, for each individual elemental equipment for constructing a secondary battery production facility, location information such as the building name or building code where the equipment is to be installed, and process stage information such as the production process name and unit number where the equipment is used, may be included in the design information along with the name of the equipment.

[0068] In addition, design information may include design information regarding resource supply systems and consumption information by resource type for specific resources, such as the nozzle number, quantity of nozzles, and fluid name of the equipment. For example, regarding electric nozzles, design information related to the nozzle for supplying electricity to the equipment, such as power type, voltage, phase information, circuit breaker rated current, facility rated capacity, and facility rated capacity unit, may be included, along with information regarding the characteristics of the electricity to be supplied and consumption rate information. Meanwhile, regarding duct nozzles, design information and consumption rate information such as the pressure, size, capacity, and airflow unit of the duct may be included. Furthermore, regarding piping nozzles, design information and consumption rate information such as pressure, size, piping capacity, and piping flow rate information may be included.

[0069] In other words, design information for each of a plurality of element equipment according to one aspect of the present invention may include at least one of size information for the element equipment, process stage information for the element equipment, supply resource consumption information for the element equipment, and supply resource nozzle information for the element equipment. That is, information regarding which process a specific piece of equipment is included in, what shape it has, and what size it has, as well as design information regarding the resources used by the equipment and information regarding usage, may be provided. More specifically, but not limitingly, the supply resource consumption information may include detailed condition information and consumption rate information for each type of supply resource of the element equipment, and the supply resource nozzle information may include information on the number of nozzles for each type of supply resource of the element equipment. That is, information regarding how many nozzles of what type a specific piece of equipment is equipped to use a certain resource may be included in the design information.

[0070]

[0071] As seen above, design information for each piece of equipment for constructing production facilities, such as E6 documents or E51 documents in semiconductor processes, or equipment information for constructing production facilities for secondary batteries, can be collected in the form of data sheets or files having a specific format.

[0072] However, conventionally, the design of the spatial arrangement of production facilities was simply provided through 2D CAD design, and such layout drawings contained no information regarding the detailed design specifications or supply rates of each piece of equipment included in the production facilities. Therefore, in order to design the supply system for supply resources, there was a difficulty in having to obtain separate engineering data, namely design information, regarding the equipment of the production facilities and perform the design while directly calculating the supply rates of individual pieces of equipment according to the supply system facilities.

[0073] On the other hand, the importance of design, construction, and maintenance technologies for production facilities is emerging in order to continuously secure the competitiveness of the semiconductor industry. Furthermore, semiconductor manufacturing facilities are inherently large-scale, highly complex, and capital-intensive facilities. The construction of such facilities involves market uncertainty, massive investment in production equipment, bold production schedules, and rapid fast-track construction.

[0074] The semiconductor industry must design and construct facilities more quickly to respond immediately to market conditions and rapidly produce reliable products. In this regard, there is an urgent need in the field for technological development to drastically reduce the design and construction period of fabrication plant (fab) production facilities.

[0075] At various stages of the lifecycle of such facilities, diverse disciplines must come together to generate and utilize massive amounts of building and process information, requiring various decisions to successfully design, construct, and maintain state-of-the-art manufacturing facilities. In the highly fragmented semiconductor manufacturing construction industry, most of the information and processes generated throughout the lifecycle must be integrated or interoperable.

[0076] In other words, there was a problem in that it was fundamentally impossible to design production facilities immediately in response to changing industrial environments and to manage the history of accumulated design changes, depending on the conventional method of securing a 2D layout by the designer, directly securing equipment design information linked thereto, and designing supply systems based on manual calculations.

[0077]

[0078] The present invention is intended to solve such problems. According to a method for assisting in the design of a supply system for supply resources of a production facility according to one embodiment of the present invention, by constructing 3D design data in the form of BIM (Building Information Management) in which design information of a 3D model and individual models is linked based on engineering data and planar layout information of the production facility, the sum of supply rates of facilities linked to the design piping are automatically calculated and provided when designing the supply system of the production facility, and a piping model is created according to the necessary piping design standards, thereby supporting the design of the supply system of the production facility more quickly and easily.

[0079] Therefore, it is possible to establish an evaluation system that can resolve the discrepancy between actual production facility utility consumption and expected utility consumption, and guarantee the design validity of estimated utilities calculated from tool utility specifications and load factors.

[0080] In addition, through the optimized design of production facilities, such as fab facilities, it is possible to simultaneously achieve production efficiency, facility scale, and flexible response to market conditions. That is, a step-by-step optimal design system can be established to respond to timely construction of fab facilities, rapid design of fab facilities, and frequent design changes.

[0081] Furthermore, by fundamentally eliminating the possibility of data omissions resulting from manual supply system design, the integrity of information required for infrastructure line design can be ensured, and the history of design changes can be managed. Additionally, by spatially linking the specification information of equipment included in the production facility with the initial layout drawings of the production line, it is possible to visually and easily provide information on the specifications of individual and integrated equipment.

[0082]

[0083] In this regard, FIG. 7 illustrates a framework for a smart design tool for a supply system for a supply resource of a production facility according to one aspect of the present invention. Hereinafter, with reference to FIG. 7, the framework for a smart design tool for a supply system for a supply resource of a production facility according to one aspect of the present invention will be described in more detail, though not limitingly.

[0084] Each of the blocks as illustrated in FIG. 7 can be understood as a block functionally implemented on a computing device for implementing a method according to one aspect of the present invention. The computing device may include, for example, a computationally capable processor and memory. Each block of the framework of FIG. 7 may be implemented by a separate processor, or may be implemented sequentially or concurrently as a functional block on a single processor. Furthermore, for convenience of explanation, the smart design tool for a supply system for production facility supply resources according to one aspect of the present invention may be described based on a semiconductor Fab design; however, it should be noted that this is merely for convenience of explanation and the technical concept of the present invention is not limited thereto.

[0085] First, the Flow Matrix Organizer refers to a module designed to read various Fab-related Matrix data and perform output and secondary data processing through data alignment and classification among stakeholders. In other words, the computing device can receive design information for each of the multiple component equipment constituting the target production facility from data files, such as SEMI E6 data or E51 data. For example, design information for each of the component equipment of the production facility can be extracted from the data file.

[0086] A Flow Matrix Parser refers to a module that reads data sheets such as SEMI E6 and E51, structures detailed engineering data from Fab-related process tools into a tree structure, and stores it in a DB so that it can be utilized by an automatic BIM modeling module. In one aspect, it is also possible to allow the user to change the settings for the form of data to be parsed or extracted depending on the data format.

[0087] Referring again to FIG. 7, the Flow Matrix Validation Module is a module that performs the function of pre-checking for errors regarding the integrity and consistency of attribute data of the Flow matrix Output and the layout plan. That is, it can be examined whether there is missing data or a mismatch between the design information for each of the element equipment received by the computing device and the data of the 2D layout information.

[0088] Fab Mapping Planner is a module that imports an initial production facility layout drawing, performs BIM modeling of the Process Shape, retrieves all equipment and nozzle information such as the Process Name ID from the Fab Utility Process Engineering DB, groups them, and links the defined Process Name Shape model. For example, a computing device can first receive 2D layout information for a target production facility. The 2D layout information may be referred to as, for example, a Fab Layout Plan, and as a non-limiting example, it may be a 2D equipment layout design drawing created using CAD. For example, it may have a form as illustrated in Fig. 1, but is not limited thereto. Subsequently, the computing device can generate a 3D model for each element equipment based on information regarding the arrangement of multiple element equipment of the target production facility according to the 2D layout information and size information of the multiple element equipment according to the design information. Therefore, the computing device can generate 3D spatial design information for the target production facility that includes a 3D model for each of the multiple element equipment.

[0089] The Fab BIM Build Manager is a module that performs the function of modifying and updating a mapped production facility layout BIM model. The 3D spatial design information generated by a computing device may be 3D spatial design information in accordance with a BIM (Building Information Management) format, in which the design information of each of a plurality of element equipment is linked with a 3D model corresponding to each of the plurality of element equipment and stored. Accordingly, each 3D object included in the 3D spatial design information according to one aspect of the present invention may be configured to not only display spatial information of the corresponding element equipment but also possess design information of the corresponding element equipment, and when a 3D model for the corresponding element equipment is created or moved in space, the corresponding facility information may also be created or moved in conjunction. Meanwhile, the computing device can modify the generated 3D BIM model in response to user input. Modification of the 3D model may include changing it to a model that includes details regarding the shape. For example, such modification and updating may be performed by the Fab BIM Build Manager.

[0090] Main Fab Engineering DX can perform detailed modeling of unit equipment included in Process Name Shape, register them in the production process unit equipment family, or link existing family models in the Main Fab or Sub Fab family DB. According to one aspect, a 3D model for each of multiple element equipment may be a process equipment group 3D model created for each equipment group grouped based on process stage information of the element equipment. For example, in a production facility, multiple element equipment may be grouped based on classification information such as process stage or installation location. The grouped equipment may be represented as a single 3D model; for example, a newly created process equipment group 3D model may be generated through Main Fab Engineering DX and stored in a database, and it is also possible to load and use an existing process equipment group 3D model from the database. Here, the database may be provided on a server separate from the computing device where the supply system design assistance method for supply resources of a production facility according to one aspect of the present invention is performed. Therefore, security issues can be resolved and protection of generated intellectual property rights can be achieved by storing only related information on the user's computer where design support is running, while the actual design information and generated 3D models are stored on a separate server.

[0091] The Fab Engineering DB Manager displays DB information linked to Process Name Shape BIM Model information according to user requirements and has Search, Edit, and Connector (Nozzle Info) functions to locate linked Process Name Shape information. It also performs the function of defining the Process Name Utility Line hierarchy level.

[0092] The Fab Engineering Rule Set Editor functions to sum flow rate, pressure, and pipe diameter information for each fluid and nozzle of equipment connected to the Process Name, or to create and edit rules for engineering information that requires user customization.

[0093] The Main Fab Route Design Manager functions to automate the determination of appropriate supply pipe diameters through BIM modeling by summing flow rates for hierarchical groups based on the branching of Main Utility Main, Sub, and Lateral Lines for each process, using hierarchical Utility Line design functions, hierarchical Line Zoning design functions, and editing functions for production process layout BIM models mapped by version. Accordingly, the computing device can display 3D spatial design information through a display device and, in response to receiving input from a user regarding the design of a supply system for multiple element equipment included in the 3D spatial design, display a 3D model of the said supply system. More specifically, the computing device can display 3D spatial design information (e.g., a BIM model) generated using 2D layout information and design information for each piece of equipment through a display device. By referring to the BIM model displayed in this way, the user can design a supply system to supply resources (water, gas, electricity, fluid, etc.) to multiple element equipment.

[0094] For example, the supply system may include a main pipe for supplying supply resources to all element equipment included in the production facility, and a first sub-pipe branched from such main pipe to supply supply resources to element equipment in a specific area or process among a plurality of element equipment. According to one aspect, a plurality of second sub-pipes branched again from the first sub-pipe may be provided to supply supply resources to some of the element equipment. According to one aspect of the present invention, it is possible for a user to design such main pipe and / or first sub-pipe, etc. A user can perform the design of the main pipe and / or first sub-pipe through an input unit. Accordingly, a computing device may be configured to display a three-dimensional model of the main pipe for a first type of supply resource on a display device according to the user's input, and subsequently, to display a three-dimensional model of the first sub-pipe for a first type of supply resource branched from the three-dimensional model of the main pipe for the first type of supply resource on the display device according to the user's input.

[0095] According to one aspect, a three-dimensional model of the main piping for a first-type supply resource can be determined to have a piping capacity that satisfies the summed consumption rate information of the first-type supply resource, which is summed based on design information for each of the element equipment associated with the main piping for the first-type supply resource. That is, a form that satisfies the piping type required for the corresponding piping is automatically determined by a computing device and can also be displayed on a display device.

[0096] In addition, the 3D model of the sub-pipe for the first type of supply resource can be determined to have a piping capacity that satisfies the summed consumption rate information of the first type of supply resource, which is calculated based on design information for each of the element equipment associated with the sub-pipe for the first type of supply resource. That is, a form that satisfies the necessary piping type conditions associated with the corresponding sub-pipe is automatically determined by a computing device and can also be displayed on a display device. Therefore, the user can perform the necessary piping design very simply without having to calculate by directly considering design information.

[0097] This may be made possible, according to one aspect of the present invention, by storing a process equipment group 3D model in conjunction with sum design information for the process equipment group 3D model generated based on design information of a plurality of element equipment included in the process equipment group 3D model.

[0098] The Utility Process Design Analysis Toolkit provides the ability to comprehensively analyze optimal Utility Line design alternatives through detailed rules and feasibility evaluations.

[0099] The Integrate Main Fab Utility Line Design Monitoring System is a system that manages Fab layout plans and Utility Fab process matrix information by version, and enables comparative analysis of line design information by alternative design and version. In other words, the computing device can store the history of design changes for recurring production facilities as a record and manage them by version, and can provide design information of the supply system for comparative analysis while design changes are being made at the user's request.

[0100] The Smart Print Module is a module that provides output and unit equipment specification aggregation functions according to a user-defined format based on Fab Layout plan information and Equipment information of Process Name.

[0101] The Collab Interface Module is an interface module that can be linked with Sub Fab and Infra Fab design tools, and it functions to interface with the Hook Up process design module, which is the nozzle design of unit equipment in detailed Main Fab design.

[0102] The Design History Management Module is a module that can manage the Fab Process design history.

[0103] Through such a framework, according to one aspect of the present invention, a user can very simply design a supply system corresponding to the layout of element equipment without directly extracting and calculating design information regarding the requirements of numerous process element equipment. Accordingly, rapid process design and design changes are possible in immediate response to the rapidly changing demands of the industry, change history can be managed, and, in some cases, rapid rollback can be implemented.

[0104]

[0105] FIG. 8 illustrates a supply system design procedure for supply resources of a production facility according to one aspect of the present invention, and FIG. 9 is a schematic flowchart of a method to assist in the design of a supply system for supply resources of a production facility according to one embodiment of the present invention. Additionally, FIG. 10 is a detailed flowchart of the step of generating three-dimensional spatial design information of FIG. 9. Hereinafter, with reference to FIG. 8 to FIG. 10, a method to assist in the design of a supply system for supply resources of a production facility according to one aspect of the present invention will be described more specifically, though not restrictively. A method according to one aspect of the present invention may be performed by a computing device including a processor and a memory as described above. The configuration of the computing device is not limited to a specific design and should be understood to refer to any one of any device capable of transmitting and receiving data via wired or wireless communication, which includes a processor capable of computation and a memory capable of storing data.

[0106]

[0107] As illustrated in FIG. 9, the computing device may first receive design information for each of the multiple elemental equipment constituting the target production facility to be designed (step 100), and receive two-dimensional layout information for the target production facility (step 200). As illustrated in FIG. 7 and FIG. 8, according to one aspect, the design information may be received using a Flow Matrix Organizer and two-dimensional layout information may be received through a Fab Mapping Planner, but is not limited thereto. Additionally, the computing device may perform Engineering Data / Fab Layout Plan Validation based, for example, a Flow Matrix Validation Module. Subsequently, the computing device may perform preprocessing of the design information and layout information by performing Flow Matrix Data Parsing and Fab BIM Build Design.

[0108] According to one aspect, design information for each of a plurality of element equipment may include, but is not limited to, at least one of size information for the element equipment, process step information for the element equipment, supply resource consumption information for the element equipment, and supply resource nozzle information for the element equipment. More specifically, but not limitedly, the supply resource consumption information may include detailed condition information and consumption rate information for each supply resource type of the element equipment, and the supply resource nozzle information may include nozzle count information for each supply resource type of the element equipment.

[0109]

[0110] Referring again to FIG. 9, the computing device can generate three-dimensional spatial design information for the target production facility, including a three-dimensional model for each of the plurality of element equipment, based on information regarding the arrangement of the plurality of element equipment of the target production facility according to two-dimensional layout information and size information of the plurality of element equipment according to design information (step 300). For example, such a procedure can be performed through a Fab Engineering DB Manager, but is not limited thereto.

[0111] Meanwhile, according to one aspect, a three-dimensional model for each of the plurality of element equipment may be a process equipment group three-dimensional model generated for each equipment group grouped based on process step information of the element equipment. As described above, such grouping of equipment may be performed, for example, based on process step information of the equipment, but may also be determined based on other information such as the installation location or building of the element equipment.

[0112] Meanwhile, the process equipment group 3D model generated in this manner may be stored in conjunction with aggregated design information for the process equipment group 3D model generated based on design information of multiple element equipment included in the process equipment group 3D model. For example, a computing device may perform this through Fab Engineering DB Management, but is not limited thereto.

[0113] In addition, the computing device can generate three-dimensional spatial design information in a BIM (Building Information Management) format by storing design information for each of a plurality of element equipment in conjunction with a three-dimensional model corresponding to each of the plurality of element equipment. Accordingly, the generated three-dimensional models may include not only the external appearance or spatial information of the element equipment but also various design information such as design requirements for the supply system.

[0114]

[0115] Referring again to FIG. 9, the computing device can display the three-dimensional spatial design information through a display device and, in response to receiving input from a user regarding a supply system design for a plurality of element equipment included in the three-dimensional spatial design, display a three-dimensional model of the supply system (step 400). That is, the computing device can support the user in designing a corresponding supply system by utilizing the generated three-dimensional spatial design information. The user may be provided to generate a model for the supply system design at a location to be designed by controlling an input unit by referring to the displayed three-dimensional spatial design information. The computing device can display a three-dimensional model of the corresponding supply system in response to the user's input. As illustrated in FIG. 7 and 8, such a design of the supply system may be performed through a Process Route Design Manager, but is not limited thereto.

[0116] More specifically, as illustrated in FIG. 10, the computing device can display a main piping three-dimensional model for a first type of supply resource according to user input (step 410), and display a first sub-piping three-dimensional model for the first type of supply resource branched from the main piping three-dimensional model for the first type of supply resource according to user input (step 420).

[0117] For example, a three-dimensional model of the main piping for a first-type supply resource may be determined to have a piping capacity that satisfies the summed consumption rate information of the first-type supply resource, which is summed based on design information for each of the element equipment associated with the main piping for the first-type supply resource, and a three-dimensional model of the sub-piping for the first-type supply resource may be determined to have a piping capacity that satisfies the summed consumption rate information of the first-type supply resource, which is summed based on design information for each of the element equipment associated with the sub-piping for the first-type supply resource. The design of such a supply system may be performed by a Process Route Design Manager as shown in FIG. 7, and may include, but is not limited to, Utility Line Route Grouping, Utility Main Line Route Design, Utility Sub Line Route Design, Utility Lateral Line Route Design, and Utility Line Hierarchy Zonning as shown in FIG. 8.

[0118] In this regard, FIG. 11 is an example diagram of an equipment group hierarchy classification according to one aspect, FIG. 12 is a first example diagram of a supply system design according to one aspect of the present invention, and FIG. 13 is a second example diagram of a supply system design according to one aspect of the present invention.

[0119] As illustrated in FIG. 11, a plurality of element equipment for a production facility according to one aspect of the present invention may be divided into a plurality of hierarchical groups in relation to the design of a supply system (e.g., a Line). That is, a Material Group comprising a plurality of element equipment may be formed. In this regard, based on a Main Line or a Sub Line branching therefrom, they may be divided into a Main Line Group and sequentially into a Sub Line Group. In addition, optionally, a Lateral Line may be added to have multiple hierarchical stages, and the element equipment may be grouped into a plurality of groups having additional layers, such as a 1st Lateral Line Group, a 2nd Lateral Line Group, and a 3rd Lateral Line Group. As described above, according to one aspect of the present invention, since a 3D model corresponding to each of the plurality of element equipment is configured in conjunction with design requirement information regarding the supply resources of each element equipment, when each group is newly created, the design requirement information regarding the supply resources of each group can be automatically calculated by a computing device. As illustrated in FIGS. 12 and 13, various different supply system designs are possible for a single two-dimensional layout arrangement. Additionally, group distribution according to the design of the supply system may also be set differently. For example, in a design such as FIG. 12, the Main Line group may include element equipment on both sides of the Main Line, and in a design such as FIG. 13, element equipment on one side of the Main Line may be included in the Main Line group. It should be noted that various hierarchical groupings can be implemented depending on the design or setting, and that the technical concept of the present invention is not limited to specific grouping rules.

[0120] Meanwhile, FIG. 14 is a conceptual diagram of dummy nozzle modeling according to one aspect, and FIG. 15 is an example diagram of dummy nozzle addition to the upper surface of a three-dimensional model. As illustrated in FIG. 14 and FIG. 15, a three-dimensional model of a process equipment group generated according to one aspect of the present invention may include a visualization of the number of nozzles corresponding to each supply resource type of the three-dimensional model of the process equipment group, which is determined based on design information for each of the plurality of element equipment included in the three-dimensional model of the process equipment group. More specifically, but not limited to, the visualization may include nozzle modeling displayed on the upper surface of the three-dimensional model in the number of nozzles, and the nozzle modeling may be configured to have different colors depending on the supply resource type to be supplied.

[0121] In an exemplary production facility, each component equipment may include multiple nozzles for various types of supply resources (e.g., Water, Bulk Chemical, Exhaust, Gas, Air as illustrated in FIG. 15). A 3D model of a process equipment group, including such component equipment, may also include a very large number of nozzles. Accordingly, a computing device can determine the total number of nozzles of each type provided in the 3D model of the process equipment group based on the design information of each of the multiple component equipment included therein, and display this on the 3D model. By using different colors according to the type of supply resource, a user performing the design can more intuitively understand the nozzle information of the 3D model of the process equipment group.

[0122]

[0123] The method according to the present invention described above can be implemented as computer-readable code on a computer-readable recording medium. Computer-readable recording media include all types of recording media in which data that can be decoded by a computer system is stored. Examples include ROM (Read Only Memory), RAM (Random Access Memory), magnetic tape, magnetic disk, flash memory, optical data storage devices, etc. Additionally, computer-readable recording media can be distributed to computer systems connected via a computer network and stored and executed as code that can be read in a distributed manner.

[0124] Although the invention has been described above with reference to the drawings and embodiments, this does not mean that the scope of protection of the present invention is limited by the drawings or embodiments, and those skilled in the art will understand that various modifications and changes can be made to the present invention without departing from the spirit and scope of the invention as described in the following claims.

[0125] Specifically, the described features may be executed in digital electronic circuits, or in computer hardware, firmware, or combinations thereof. The features may be executed, for example, in a computer program product implemented in a storage device within a machine-readable storage device for execution by a programmable processor. And the features may be executed by a programmable processor that executes a program of instructions for performing the functions of the described embodiments by operating on input data and generating output. The described features may be executed in one or more computer programs that can be executed on a programmable system comprising at least one programmable processor, at least one input device, and at least one output device coupled to receive data and instructions from a data storage system and to transmit data and instructions to a data storage system. A computer program includes a set of instructions that may be used directly or indirectly within a computer to perform a specific action for a predetermined result. A computer program may be written in any form of a programming language, including compiled or interpreted languages, and may be used in any form including as a module, component, subroutine, or other unit suitable for use in another computer environment, or as an independently operable program.

[0126] Suitable processors for the execution of programs of instructions include, for example, both general-purpose and special-purpose microprocessors, and one of a single processor or a multiprocessor of another type of computer. In addition, storage devices suitable for implementing computer program instructions and data that implement the described features include, for example, semiconductor memory devices such as EPROM, EEPROM, and flash memory devices; magnetic devices such as internal hard disks and removable disks; magneto-optical disks; and all forms of non-volatile memory including CD-ROM and DVD-ROM disks. Processors and memory may be integrated within application-specific integrated circuits (ASICs) or added by ASICs.

[0127] Although the present invention described above is explained based on a series of functional blocks, it is not limited by the aforementioned embodiments and attached drawings, and it will be obvious to those skilled in the art that various substitutions, modifications, and changes are possible within the scope of the technical concept of the present invention.

[0128] The combination of the aforementioned embodiments is not limited to the aforementioned embodiments, and various forms of combinations in addition to the aforementioned embodiments may be provided as needed for implementation and / or as required.

[0129] In the aforementioned embodiments, methods are described based on flowcharts as a series of steps or blocks; however, the present invention is not limited to the order of the steps, and some steps may occur in a different order or simultaneously with other steps as described above. Furthermore, those skilled in the art will understand that the steps shown in the flowcharts are not exclusive, that other steps may be included, or that one or more steps of the flowcharts may be omitted without affecting the scope of the present invention.

[0130] The foregoing embodiments include examples of various aspects. While it is not possible to describe all possible combinations for representing various aspects, those skilled in the art will recognize that other combinations are possible. Accordingly, the present invention shall be deemed to include all other substitutions, modifications, and changes falling within the scope of the following claims.

Claims

1. A method for assisting in the design of a supply system for a supply resource of a production facility, performed by a computing device, A step of receiving design information for each of the multiple element equipment constituting the target production facility to be designed; A step of receiving two-dimensional layout information for the above-mentioned target production facility; A step of generating three-dimensional spatial design information for a target production facility, including a three-dimensional model for each of the plurality of element equipment, based on information regarding the arrangement of the plurality of element equipment of the target production facility according to the two-dimensional layout information and size information of the plurality of element equipment according to the design information; and The step of displaying the three-dimensional spatial design information through a display device and displaying a three-dimensional model of the supply system in response to receiving input from a user regarding a supply system design for a plurality of element equipment included in the three-dimensional spatial design; comprising A method for assisting in the design of a supply system for supply resources of production facilities.

2. In Paragraph 1, Design information for each of the above plurality of element equipment is, Size information for the above element equipment; Process step information of the above element equipment; Information on the supply resource consumption of the above-mentioned element equipment; and supply resource nozzle information of the above-mentioned element equipment; including, A method for assisting in the design of a supply system for supply resources of production facilities.

3. In Paragraph 2, The above supply resource consumption information is, Detailed condition information for each of the supply resource types of the above-mentioned element equipment; and consumption rate information; are included, The above supply resource nozzle information is, Information on the number of nozzles for each of the supply resource types of the above-mentioned element equipment; including A method for assisting in the design of a supply system for supply resources of production facilities.

4. In Paragraph 3, The three-dimensional model for each of the above plurality of elemental devices is, A 3D model of process equipment groups generated for each equipment group grouped based on process step information of the above-mentioned element equipment, A method for assisting in the design of a supply system for supply resources of production facilities.

5. In Paragraph 4, The step of generating the above three-dimensional spatial design information is, The design information of each of the plurality of element equipment is linked and stored with a 3D model corresponding to each of the plurality of element equipment to generate 3D spatial design information according to the BIM (Building Information Management) format. A method for assisting in the design of a supply system for supply resources of production facilities.

6. In Paragraph 5, The above 3D model of the process equipment group is, Stored in conjunction with aggregated design information for the process equipment group 3D model generated based on design information of multiple element equipment included in the process equipment group 3D model, A method for assisting in the design of a supply system for supply resources of production facilities.

7. In Paragraph 6, The step of displaying a three-dimensional model of the above supply system is, A step of displaying a three-dimensional model of the main piping for a first-type supply resource according to user input; and The method includes the step of displaying a first sub-pipe 3D model for the first type of supply resource branched from a main piping 3D model for the first type of supply resource according to user input; The main piping 3D model for the above Type 1 supply resource is, It is determined to have a piping capacity that satisfies the aggregated consumption rate information of the first type of supply resource, which is calculated based on design information for each of the element equipment associated with the main piping of the first type of supply resource, and The three-dimensional sub-piping model for the above-mentioned Type 1 supply resource is, Determined to have a piping capacity that satisfies the aggregated consumption rate information of the first type of supply resource, calculated based on design information for each of the element equipment associated with the sub-piping of the first type of supply resource. A method for assisting in the design of a supply system for supply resources of production facilities.

8. In Paragraph 1, The above production facility is, It includes at least one of semiconductor production equipment, display production equipment, and secondary battery production equipment, and Design information for each of the above plurality of element equipment is, including data sheets in SEMI E6 format and data sheets in SEMI E51 format, A method for assisting in the design of a supply system for supply resources of production facilities.

9. In Paragraph 4, The above 3D model of the process equipment group is, A visualization display of the number of nozzles corresponding to each supply resource type of the process equipment group 3D model, determined based on design information for each of the plurality of element equipment included in the process equipment group 3D model, A method for assisting in the design of a supply system for supply resources of production facilities.

10. In Paragraph 9, The above visualization display is, Includes nozzle modeling marked on the upper surface of the above 3D model as many times as the number of nozzles, and The above nozzle modeling is, Having different colors depending on the type of supply resource to be supplied, A method for assisting in the design of a supply system for supply resources of production facilities.

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