Sensor module

Abstract

This article is a sensor module; this sensor module has a sensor body with a circular flange formed thereon and a cylindrical portion; the amount of deposit that enters the cylindrical part through the opening of the cylindrical part and adheres to the sensor element inside is detected; this sensor module is used, for example, by being attached to a film forming chamber of a semiconductor manufacturing apparatus; the periphery of the opening is formed into a concave shape; a part of the sensor body is provided with a connection section for outputting a signal; the left side view is omitted because it is the mirror view of the right-side view; Fig. 1.8 is a cross-sectional view taken along the A-A’ line shown in Fig. 1.3.

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