Vertically stacked CMOS and high-fill-factor PMUT arrays improve fingerprint resolution and accuracy despite skin condition and contamination.
Transverse-excited resonators on Z-cut lithium niobate enable RF filters above 3 GHz with wider bandwidth, stronger power handling, and better heat removal.
Homogeneous n-type doping in a silicon micromechanical resonator cuts temperature drift without active compensation, extra circuitry, or pn-junctions.
Specific silicon Euler angles keep wave velocity below 5,400 m/s, suppressing spurious modes and improving SAW filter quality factor.
Using a single-crystal GaN acoustic resonator, this case cuts RF transmit filter loss and improves signal quality in multi-band phones.
A connector-supported cover layer increases WLP joining strength while preserving the vibration space above the IDT electrode.
Sc-doped AlN lets TX and RX BAW resonators share one chip while tuning passbands and simplifying MEMS filter manufacturing.
Localized thicker tip sections near finger and dummy-electrode gaps suppress bulk wave leakage, reducing loss without harming resonance.
Shared passbands across adjacent bands cut duplicate filtering and calibration effort in carrier aggregation filter circuits.
Transverse bulk-wave excitation in a diaphragm cavity helps RF filters above 3 GHz improve insertion loss, rejection, and size.
Atomically bonded compensation layers keep acoustic stack TCF near zero, limiting passband drift, insertion loss, and runaway heating.
Interdigital thin-film resonators widen BAW filter bandwidth and sharpen passband edges while improving stop-band attenuation in GHz operation.
Groove-embedded acoustic velocity layers lower wave speed in low-velocity regions while avoiding finger short-circuits and alignment drift.
Angled depressed portions and tuned thick-thin spacing confine flexure vibration, lowering crystal impedance and stabilizing frequency-temperature behavior.
A bonded thin piezoelectric substrate and low-expansion support substrate reduce frequency drift and electrode peeling in acoustic wave resonators.
An insulator placed only over the SAW capacitance element suppresses resonance, cutting insertion loss and spurious emission without extra layers.
Exothermic fluid melts plugging material downhole so it fills channels and solidifies into a permanent gas-tight well abandonment barrier.
Thin Group-III nitride epitaxial layers in a bulk acoustic structure improve high-frequency operation, power handling, and contamination resistance.
Self-aligned cavity vias use the electrode as the reference to cut overlay error and stabilize Lamb wave filter frequency response above 2 GHz.
A wine-glass mode MEMS resonator combines piezoelectric actuation with electrostatic tuning to lower motional resistance and simplify fabrication.
Series band-elimination filters and separate signal paths cut insertion loss while preserving multiband RF front-end filter characteristics.
Reduced end-region electrode mass and tuned acoustic-velocity regions suppress unwanted waves and improve return loss in elastic wave devices.
Ion-modified regions in the piezoelectric layer suppress lateral resonance in BAW resonators, reducing noise and improving frequency selectivity.
Using piezoelectric layers with different coupling coefficients, this case tunes BAW filter passbands and frequency response without relying on one material.
Switching electrode connections separates proximity from displacement sensing, reducing false capacitance readings and improving touch reliability.
Cavity electrodes formed in the support wafer enable precise MEMS frequency tuning while avoiding bulky combs and extra metal-electrode processing.
A tuned gap-to-width ratio lets opposite-phase vibration arms suppress etch-driven frequency drift without weakening arm strength.
An asymmetric SAW transducer separates transduction and reflection centers by one-eighth wavelength to cut insertion loss and support higher frequencies.
Recessed cover vias increase bonding area vertically, shrinking elastic wave packages while preserving thermal shock and chemical resistance.
Epitaxial AlN and III-N piezoelectric films replace sputtered layers in FBARs to raise Q-factor and enable RF filtering above 3 GHz.
Metal patterns and multiple via paths spread heat from stacked acoustic wave elements, lowering dummy bump temperature while preserving isolation.
A trained neural network corrects crystal resonator frequency drift across temperature changes, improving real-time clock accuracy beyond quadratic models.
Two parallel DMS filters with different center frequencies create a broad passband with low insertion loss and steep band edges.
A segmented protective and temperature-adjusting film layout stabilizes resonant frequency temperature behavior during energy-beam trimming.
An impedance circuit and RF line detune an MRI RF coil without relying on high-power diodes, reducing breakdown risk and cost.
Dynamic switch reconfiguration lets one impedance element match single and multiple filter paths, cutting RF front-end size and loss.
Adjusting LiNbO3 substrate angles and IDT thickness moves SH wave response below the pass band, reducing spurious interference in filtering.
Optimizing the Wb/We base-width ratio cuts thermoelastic loss and vibration leakage, enabling smaller resonators with stable frequency.
A single-anchor cantilevered platform isolates a BAW MEMS resonator from substrate stress, improving frequency stability and Q factor.
Synchronized emitters and motive magnets create a counteracting wave field that blocks intrusive noise and RF signals without bulky barriers.
Narrow edge widths and a two-layer IDT electrode maintain small-pitch SAW performance while preventing shorts and weak wiring connections.
Mo-Ta alloy electrodes help bulk acoustic wave resonators resist oxidation, keep low resistivity, and preserve crystal orientation.
Different intermediary-layer thicknesses in cascaded LBAW stacks suppress parasitic sidebands and improve RF band-pass response.
A controlled nanometer-scale gap mechanically decouples SAW IDTs from the piezoelectric substrate, limiting strain transfer and delamination.
A parallel SAW delay element with IDT spacing of 12λ or less broadens opposite-phase cancellation and widens out-of-band attenuation.
An added parallel resonator creates an antiresonance pole that shifts SH mode interference out of the passband without hurting bandwidth.
Patterned Fresnel surface features confine acoustic energy toward the resonator center, reducing leakage and raising quality factor.
Hollow regions under wiring lines and the IDT cut parasitic capacitance while partition walls preserve strength in an elastic wave substrate.
Positioning patterns and recessed cover cavities align cover optics to the chip optical axis, improving light transmission with faster assembly.
Varying reflector thickness under shared BAW transducers enables compact multi-frequency filters with better frequency tuning in 3G, 4G, and 5G devices.
Integrating shunt resonators and low-capacity trimming inductors on one substrate shrinks FBAR filters and duplexers while improving attenuation.
A wavelength-tuned support region and wave-blocking adjacent region suppress low-frequency spurious responses and improve filter transmission.
Conductive shield electrodes terminate electric field lines in MEMS resonators, cutting feed-through and spurious currents to stabilize timing signals.
A suspended MEMS membrane with a 2D scatterer lattice blocks bulk acoustic waves, reducing substrate leakage across ultrasonic to UHF bands.
Series blocker inductors in a BAW bandpass filter widen bandwidth and strengthen out-of-band rejection without worsening return loss or passband ripple.
Opposing modulus-temperature materials are placed in isolated high-stress resonator regions to cut frequency drift while preserving Q.
Acoustically coupled parallel resonators sharpen filter transition bands and suppress high-power harmonics with less chip area.
A 50°-55° rotated LiNbO3 substrate with tuned IDT thickness and duty ratio cuts Rayleigh-wave spurs and lowers pass-band insertion loss.
Oxidizable electrode surfaces form insulating oxides that block shorts in small piezoelectric resonators without changing impedance or adding films.
Overlapping U-shaped line patterns raise self-inductance for 2 GHz duplexer phase matching while cutting package size and insertion loss.
Variable and fixed IDT pitch sections widen the pass band while reducing insertion loss and improving flatness in SAW filters.
A crystal oscillation device uses segmented conductive joining materials to create thermal gaps between the package and mounting boards.
A piezoelectric vibrator element uses a composite electrode structure with controlled thickness ratios to reduce residual stress.
A buried temperature compensation layer offsets frequency shifts while a seed interlayer maintains high piezoelectric coupling in the resonator.
Embedding a MEMS device in a mold compound with through-vias reduces package height and footprint while maintaining electrical connection reliability.
A 2N-port nonreciprocal network circuit framework uses time-domain multiplexing across parallel delay lines to route signals between ports.
Electrolysis creates a mesoporous silicon trapping layer with 20-60% porosity to resolve thermal stability and mechanical strength trade-offs.
An electrostatic acting device uses an insulating film between the electret and conductive layers to block charge leakage.