Insulating layer thickness replaces top electrode variation for BAW filter frequency tuning, easing fabrication while preserving resonator characteristics.
Planar substrate electrodes replace chip capacitors to suppress second harmonics while reducing multiplexer size and capacitance variation.
Using PZT for transmit and AlN for receive, this PMUT structure improves ultrasound sensitivity in both modes without relying on one material.
Electrochemical lithiation and delithiation tune lithium niobate SAW resonance after manufacture, expanding use while lowering insertion loss.
Reducing carrier lifetime in the silicon surface blocks parasitic conductance, preserving SAW filter quality factor with thin piezoelectric layers.
Compressive AlN piezoelectric layers balance residual stress, suppress abnormal growths, and improve FBAR coupling and frequency response.
A recessed support layer reduces contact with the support substrate, enabling faster and more complete sacrificial layer removal.
A thicker wiring layer bridges electrode level differences in piezoelectric resonators to prevent disconnection, lower resistance, and improve harmonic stability.
Series-connected interdigital transducers with a larger transition finger period cut static capacitance for steeper, lower-loss reactance filters.
Multiple seed layers improve piezoelectric crystallinity in an FBAR, raising kt2 and bandwidth while preserving quality factor.
An oxide interface and angled piezoelectric C-axis suppress inversion channels, cutting spurious RF currents and distortion in SAW resonators.
V-shaped Si grooves confine shear-mode waves to raise coupling, widen bandwidth, and reduce center-frequency variability in 5G filters.
Quasi-nodal anchoring and ring comb drives cut mechanical loss and nonlinearity in low-frequency MEMS resonators, improving SNR and stability.
Non-periodic interface features in a SAW resonator shift spurious-wave phase to prevent standing modes, reducing filter rattles and stabilizing Q.
Protrusion portions with multiple crystal planes ease substrate thickness transitions, improving energy trapping and electrode connectivity.
By keeping piezoelectric and electrode layers off the resonator body, this suspended MEMS resonator cuts anchor loss and raises quality factor.
A transformer raises MEMS resonator impedance so the oscillator can cut current draw, preserve stability, and generate multi-GHz clocks at low power.
Specific anchor placement and mode coupling flatten frequency drift with temperature in a piezoelectric micromechanical resonator.
A tuned SiNx and silicon oxide layer stack confines elastic wave energy, reducing high-order modes and resonant frequency drift.
Varying dielectric film thickness across SAW filter regions suppresses Lamb-wave spurious emissions while preserving temperature compensation.
A built-in capacitor formed within the piezoelectric filter stack improves impedance matching, saves area, and supports better frequency response.
A controller-driven second current path supplements IC power during demand spikes, reducing parasitic noise and voltage dips in critical paths.
An insertion film and acoustic reflection layer curb acoustic wave leakage, raising Q-value and sharpening filter skirt characteristics.
A polymer acoustic obstacle between adjacent feedback IDTs scatters or absorbs acoustic energy, improving multi-band rejection and layout flexibility.
A recycled SAW feedback loop maintains holographic pixel persistence without constant rewriting, cutting display-driving complexity and power use.
Localized high- and low-acoustic-velocity regions in LiTaO3 IDT electrodes suppress transverse ripples while preserving Q and lowering insertion loss.
By pairing a LiNbO3 Rayleigh-wave first filter with LiTaO3 second filters, this case cuts insertion loss and avoids full-device cost growth.
Specific susceptance tuning across adjacent band-pass filters improves common-terminal matching and cuts bandpass and return loss.
Controlled oxygen addition in AlN sputtering flips layer polarity within one monolithic film, enabling BAW resonators to exceed 3 GHz.
An azimuth-divided, elevation-continuous matching layer helps miniaturized 1.5D ultrasonic arrays preserve vibrator strength and manufacturing reliability.
LCR resonator models with Bragg band and bulk mode branches improve simulation-measurement correlation in narrowband acoustic microwave filters.
Varying thickness across an AT-cut quartz crystal blank suppresses sub-vibration and leakage, lowering CI and series resistance.
Ion implantation or diffusion creates buried modulus and density zones in piezoelectric layers, enabling faster high-frequency acoustic waves with low loss.
Set-point calibration lets an oven-controlled MEMS oscillator correct process variation, improving frequency stability with low power and fast start-up.
Cutting the second busbar electrode layer helps elastic wave filters pack IDT electrodes closer while reducing defect-driven short circuits.
A parallel phase shift circuit with slanted-finger IDTs cancels stopband signals to improve duplexer isolation without harming passband response.
A sapphire case-substrate and through-via conductor shrink SAW packaging while preserving electrical connection, strength, and heat dissipation.
Mixed-crystal AlN RF filters use single-crystal piezoelectric films to raise Q, cut energy loss, and support higher-frequency operation.
A frame covering the second electrode edge reflects lateral acoustic waves and uses etch-stop fabrication to raise Q factor with precise dimensions.
Laser-formed surface adjustment regions tune resonant frequency after packaging while limiting thermal and stress-induced drift.
SPnT and DPnT switching routes multiple SAW filter outputs through shared RF paths, reducing hardware space while preserving attenuation and isolation.
A concave groove with curved corners confines vibration in compact piezoelectric elements, reducing leakage and ripple through the support joint.
Reducing carrier lifetime at the silicon surface suppresses parasitic conductance, allowing thinner piezoelectric SAW layers with stable Q.
Corner-coupled piezoelectric resonators lower motional impedance at high frequencies while avoiding beam-induced spurious resonances.
A grounded planar shield inside a BAW filter interrupts parasitic electric fields, improving rejection in high-frequency filtering.
Magnetic coupling on the high-voltage supply cable detects and separates column and supply arcs for faster suppression and reliable inspection.
Co-integrating SAW and monocrystalline BAW filters on one piezoelectric substrate improves Q factor, bandwidth tuning, and temperature stability.
Passive elements placed on the housing surface shrink bulk acoustic wave filters, lower cost, and preserve high-frequency filtering efficiency.
Controlled nanoscale roughness on a polycrystalline ceramic substrate enables strong Van der Waals bonding for lower-cost SAW devices.
Independent upper and lower electrodes let guided bulk wave transducers keep strong acoustic coupling without midpoint transformers at high temperature.