A diaphragm device for electron beam trajectory detection and its installation method

Abstract

The present invention discloses a diaphragm device for electron beam trajectory detection and an installation method thereof. The diaphragm device includes a diaphragm bracket, a diaphragm fixing strip, a diaphragm box, and a diaphragm plate, wherein: an installation groove for fixing the diaphragm fixing strip is provided on the diaphragm bracket, the diaphragm fixing strip is detachably fixed in the installation groove through a calibration positioning mechanism, and a first folding edge is formed at the top of the diaphragm bracket; a plurality of the diaphragm boxes are detachably fixed on the diaphragm fixing strip one by one through a positioning mechanism and a connecting mechanism, a slot for inserting the diaphragm plate is provided on each diaphragm box, a second folding edge is formed at the top of each diaphragm box, and the first folding edge and the second folding edge are arranged oppositely. The diaphragm device of the present invention is convenient for disassembly and assembly, convenient for maintenance, and has high positioning accuracy.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum melting, and particularly to a diaphragm device for electron beam trajectory detection and an installation method thereof. Background Art

[0002] Electron beam melting refers to a method of metal melting by converting the kinetic energy of a high-speed electron beam into heat energy as an energy source in a vacuum environment. Vacuum electron beam evaporation coating is achieved by the deflection of an electron beam acting on a crucible molten pool. The metal in the molten pool is heated and melted to form atomic vapor, which leaves the liquid surface of the metal molten pool and acts on a substrate to form a coating. The above two vacuum technologies rely on the electron beam emitted by an electron gun to achieve subsequent processes. According to the inconsistency of the melted metal or the type and thickness of the coating, during the entire operation process, the running time of the electron beam may be relatively long. During this period, factors such as the vacuum degree, the state of the anode and cathode of the electron gun, and the deflection magnetic field will all affect the spatial running trajectory of the electron beam. Due to the huge energy carried by the electron beam, abnormal deflection will damage the vacuum equipment, and in severe cases, it will cause leakage of vacuum cooling water, resulting in huge economic losses.

[0003] After the electron beam is emitted from the electron gun, it acts on the crucible molten pool after passing through the rectangular hole in the middle of the diaphragm. The currently used electron beam trajectory detection diaphragm device mainly consists of a diaphragm support, a diaphragm box, a diaphragm fixing strip, a diaphragm plate, etc. The currently used diaphragm device mainly has the following problems: 1. The diaphragm plate is fixedly connected to the diaphragm box. If the diaphragm plate is damaged, the entire device needs to be replaced; 2. The diaphragm box directly affects the positioning of the diaphragm plate, and the positioning of the diaphragm box is inaccurate; 3. The side of the diaphragm close to the crucible molten pool will cause material accumulation over a long time, affecting the insulation performance of the ceramic material; 4. The entire disassembly and assembly process of the diaphragm assembly is not simple enough, and the entire disassembly and rotation process of the device is relatively cumbersome. Summary of the Invention

[0004] The purpose of the present invention is to provide a diaphragm device for electron beam trajectory detection in view of the problem that the existing diaphragm device is inconvenient to maintain.

[0005] Another aspect of the present invention is to provide an installation method for the above diaphragm device.

[0006] The technical solution adopted to achieve the purpose of the present invention is as follows:

[0007] A diaphragm device for electron beam trajectory detection, comprising a diaphragm support, a diaphragm fixing strip, a diaphragm box, and a diaphragm plate, wherein:

[0008] The diaphragm bracket is provided with an installation groove for fixing the diaphragm fixing strip. The diaphragm fixing strip is detachably fixed in the installation groove through a calibration positioning mechanism. A first folding edge is formed at the top of the diaphragm bracket;

[0009] A plurality of the diaphragm boxes are each detachably fixed to the diaphragm fixing strip through a positioning mechanism and a connecting mechanism. Each diaphragm box is provided with a slot for inserting the diaphragm plate. A second folding edge is formed at the top of each diaphragm box;

[0010] The first folding edge and the second folding edge are arranged oppositely. The edge of the first folding edge faces the diaphragm plate and there is a gap therebetween. The bottom surface of the second folding edge faces the upper surface of the slot and there is a gap therebetween.

[0011] In the above technical solution, the diaphragm plate includes an outer diaphragm plate, a left diaphragm plate, a right diaphragm plate and a middle diaphragm plate. The number of the diaphragm boxes is five. The left diaphragm plate, the middle diaphragm plate and the right diaphragm plate are sequentially inserted into the middle three diaphragm boxes. The outer diaphragm plate is of a door-shaped structure, and the two vertical parts of the door-shaped structure are respectively inserted into the two diaphragm boxes located on both sides.

[0012] In the above technical solution, the calibration positioning mechanism includes a first threaded hole formed on the back plate of the installation groove and second threaded holes formed on the left and right side plates of the installation groove. The second threaded holes are arranged in pairs opposite to each other, and the first threaded hole is symmetrically arranged at the four corners;

[0013] The calibration positioning mechanism further includes third threaded holes provided at both ends of the diaphragm fixing strip and positioning grooves provided on the two end faces of the diaphragm fixing strip. The third threaded holes are arranged in one-to-one correspondence with the first threaded holes, and the positioning grooves are arranged in one-to-one correspondence with the second threaded holes;

[0014] When the diaphragm fixing strip is fixed in the installation groove, a first diaphragm fixing strip fixing screw is inserted into the second threaded hole and the positioning groove in cooperation, and a second diaphragm fixing strip fixing screw is inserted into the first threaded hole and the third threaded hole in cooperation to form a calibration positioning mechanism.

[0015] In the above technical solution, there are two diaphragm fixing strips arranged oppositely up and down. The two diaphragm fixing strips are parallel and closely adjacent. The positioning mechanism includes protruding raised cross strips provided on the length edges of each diaphragm fixing strip and raised parts provided on the diaphragm boxes. The raised parts can be inserted into the clamping space between the two raised cross strips of the diaphragm boxes to form clamping positioning.

[0016] In the above technical solution, each diaphragm fixing strip has a total of countersunk screw holes. The five directions in the center are opposite to the two on the left and right edges. The five in the center are diaphragm box fixing screw holes for installing the diaphragm box fixing screws, and the two on the edges are the third threaded holes for installing the fixing screws of the second diaphragm fixing strip. Positioning grooves are provided on both sides of each diaphragm fixing strip for positioning the fixing screws of the first diaphragm fixing strip.

[0017] In the above technical solution, the connecting mechanism includes a diaphragm box fixing screw hole provided in the engaging space, a screw hole provided on the diaphragm box, and a diaphragm box fixing screw. The diaphragm box fixing screw passes through the diaphragm box fixing screw hole and the screw hole to fix the diaphragm box in the engaging space.

[0018] In the above technical solution, the diaphragm support includes a bottom fixing plate, an upper groove fixed to the bottom fixing plate through two symmetrically arranged side support plates, and a back plate fixed to the back of the upper groove. The upper groove and the back plate cooperate to form the installation groove, and the top of the back plate is bent to form the first folding edge.

[0019] In the above technical solution, four first threaded holes are formed on the back plate, and four second threaded holes are arranged in pairs on two opposite side wall plates of the upper groove. A screw through hole is provided on the bottom fixing plate to fix the diaphragm device on the vacuum device; the inner side of the upper groove is used to install the diaphragm fixing strip, and second threaded holes are provided on the two short sides of the upper groove for installing the fixing screws of the first diaphragm fixing strip; the back plate and the upper groove cooperate to form the installation groove of the diaphragm fixing strip, and the back plate has first threaded holes for fastening in the short side direction of the diaphragm fixing strip.

[0020] In the above technical solution, each diaphragm box includes an end plate, a bottom groove plate, a boss plate, and a screw rod. The end plate, the bottom groove plate, and the boss plate are welded and enclosed to form the slot. The protruding part on the boss plate can be fitted between the protruding cross bars on the two diaphragm fixing strips. A screw hole is provided on the boss plate, and the screw hole is arranged in one-to-one correspondence with the diaphragm box fixing screw hole. The second folding edge is formed on the top of the boss plate. The screw rod is threadedly connected to the middle screw hole of the bottom groove plate.

[0021] In the above technical solution, a replacement grasping hole is formed at the top of each diaphragm plate.

[0022] In the above technical solution, an installation chamfer is formed at the bottom of each diaphragm plate.

[0023] In the above technical solution, a plurality of anti-droplet grooves are evenly distributed on the plate surfaces of the left diaphragm plate, the middle diaphragm plate, and the right diaphragm plate, which can prevent the material from sliding directly.

[0024] On the other hand, the installation method of the diaphragm device of the present invention includes the following steps:

[0025] Step 1: Install multiple diaphragm boxes on the diaphragm fixing bar in sequence;

[0026] Step 2: Install the fixed diaphragm box and the diaphragm fixing bar into the installation groove of the diaphragm support;

[0027] Step 3: Install each diaphragm plate into the matching diaphragm box.

[0028] In the above technical solution, in Step 1, when installing multiple diaphragm boxes on the diaphragm fixing bar in sequence, first insert the convex part of the diaphragm box into the engaging space between the convex cross bars of two diaphragm boxes for engaging and positioning; then the diaphragm box fixing screw passes through the diaphragm box fixing screw hole and the screw hole to fix the diaphragm box in the engaging space;

[0029] In Step 2, when installing the fixed diaphragm box and the diaphragm fixing bar into the installation groove of the diaphragm support, the first diaphragm fixing bar fixing screw is inserted into the second threaded hole and the positioning groove in cooperation, and the second diaphragm fixing bar fixing screw is inserted into the first threaded hole and the third threaded hole to fasten the diaphragm fixing bar in the installation groove.

[0030] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0031] 1. After the diaphragm device of the present invention is installed, it is an integral whole, which can be moved according to different use positions, and can adjust the range restricted by the four diaphragm plates according to the change of electron beam parameters to meet the use requirements.

[0032] 2. The vulnerable part of the diaphragm device, the diaphragm plate, meets the requirements of detachable replacement. The disassembly and assembly are simple, and the related operations can be realized by a manipulator. The applicable range of the diaphragm assembly is expanded, and the operation time of the whole device is prolonged.

[0033] 3. The diaphragm device is fixed and positioned multiple times to ensure the spatial positions of the diaphragm fixing bar and the diaphragm box, avoiding the occurrence of situations such as the deflection and downward tilt of the diaphragm box, and preventing the situation where the diaphragm plate cannot be inserted or removed.

[0034] 4. The diaphragm device has been structurally optimized for the situation where short circuits are caused by liquid droplets formed during material evaporation. By adding anti-liquid-drop grooves 30 and folding plates, the adhesion short circuit situation caused by liquid droplet dripping is avoided as much as possible.

[0035] 5. The structural dimensions of the diaphragm device can be changed according to the actual use conditions to achieve the matching use of different vacuum devices. Description of the Drawings

[0036] Figure 1 It is the front view of the diaphragm device;

[0037] Figure 2 It is a side view of the diaphragm device;

[0038] Figure 3 It is a schematic exploded view of the diaphragm device;

[0039] Figure 4 It is a schematic view of the diaphragm support;

[0040] Figure 5 It is a schematic view of the diaphragm box;

[0041] Figure 6 It is a schematic view of the diaphragm fixing strip;

[0042] Figure 7 It is a schematic view of the outer diaphragm plate;

[0043] Figure 8 It is a schematic view of the right diaphragm plate;

[0044] Figure 9 It is a schematic view of the left diaphragm plate;

[0045] Figure 10 It is a schematic view of the middle diaphragm plate;

[0046] Figure 11 It is a schematic view of the installation of the diaphragm box and the diaphragm fixing strip;

[0047] Figure 12 It is a schematic view of the installation of the diaphragm base;

[0048] Figure 13 It is a schematic view of the installation of the diaphragm plate.

[0049] In the figure: 1 - diaphragm support, 2 - diaphragm fixing strip, 3 - diaphragm box, 4 - installation groove, 5 - first folding edge, 6 - slot, 7 - second folding edge, 8 - outer diaphragm plate, 9 - left diaphragm plate, 10 - right diaphragm plate, 11 - middle diaphragm plate, 12 - first threaded hole, 13 - second threaded hole, 14 - third threaded hole, 15 - positioning groove, 16 - raised cross bar, 17 - raised portion, 18 - diaphragm box fixing screw hole, 19 - diaphragm box fixing screw, 20 - bottom fixing plate, 21 - side support plate, 22 - upper groove, 23 - back plate, 24 - end plate, 25 - bottom groove plate, 26 - boss plate, 27 - screw rod, 28 - replacement grasping hole, 29 - installation chamfer, 30 - anti-droplet groove, 31 - first diaphragm fixing strip fixing screw, 32 - second diaphragm fixing strip fixing screw, 33 - screw through hole, 34 - screw hole. Specific embodiments

[0050] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0051] Example 1

[0052] A diaphragm device for electron beam trajectory detection, comprising a diaphragm bracket 1, a diaphragm fixing strip 2, a diaphragm box 3 and a diaphragm plate, wherein:

[0053] The diaphragm bracket 1 is provided with an installation groove 4 for fixing the diaphragm fixing strip 2. The diaphragm fixing strip 2 is detachably fixed in the installation groove 4 through a calibration positioning mechanism. A first folding edge 5 is formed at the top of the diaphragm bracket 1;

[0054] A plurality of the diaphragm boxes 3 are detachably fixed to the diaphragm fixing strip 2 one by one through a positioning mechanism and a connecting mechanism. Each diaphragm box 3 is provided with a slot 6 for inserting the diaphragm plate. A second folding edge 7 is formed at the top of each diaphragm box 3. The first folding edge 5 and the second folding edge 7 are arranged oppositely. The first folding edge 5 and the second folding edge 7 are arranged oppositely. The edge of the first folding edge 5 faces the diaphragm plate and there is a gap therebetween. The bottom surface of the second folding edge 7 faces the upper surface of the slot and there is a gap therebetween.

[0055] The calibration positioning mechanism can ensure the accuracy of the positioning of the diaphragm fixing strip 2 on the diaphragm bracket 1. The positioning mechanism can ensure the accuracy of the positioning of the diaphragm box 3 on the diaphragm bracket 1. Thus, the accuracy of the positioning of the diaphragm plate on the diaphragm bracket 1 can be ensured, and the effect of the diaphragm can be optimized.

[0056] Preferably, the diaphragm plate includes an outer diaphragm plate 8, a left diaphragm plate 9, a right diaphragm plate 10 and a middle diaphragm plate 11. The number of the diaphragm boxes 3 is five. The left diaphragm plate 9, the middle diaphragm plate 11 and the right diaphragm plate 10 are sequentially inserted into the middle three diaphragm boxes 3. The outer diaphragm plate 8 is of a door-shaped structure, and the two vertical parts of the door-shaped structure are respectively inserted into the two diaphragm boxes 3 located on both sides.

[0057] Preferably, the materials of the diaphragm bracket 1 and the diaphragm box 3 are 304L stainless steel, and the material of the diaphragm fixing strip is 99 porcelain. The materials of the outer diaphragm plate 8, the left diaphragm plate 9, the right diaphragm plate 10 and the middle diaphragm plate 11 are Mo1.

[0058] Preferably, the calibration positioning mechanism includes a first threaded hole 12 formed on the back plate 23 of the installation groove 4 and second threaded holes 13 formed on the left and right side plates of the installation groove 4. The second threaded holes 13 are arranged in pairs oppositely. The first threaded hole 12 is symmetrically arranged at the four corners;

[0059] The calibration and positioning mechanism further includes third threaded holes 14 provided at both ends of the diaphragm fixing strip and positioning grooves 15 provided on two end faces of the diaphragm fixing strip. The third threaded holes 14 are arranged opposite to the first threaded holes 12 one by one, and the positioning grooves 15 are arranged opposite to the second threaded holes 13 one by one;

[0060] When the diaphragm fixing strip is fixed in the installation groove 4, the first diaphragm fixing strip fixing screw 31 is inserted into the second threaded hole 13 and the positioning groove 15 in cooperation, and the second diaphragm fixing strip fixing screw 32 is inserted into the first threaded hole 12 and the third threaded hole 14 in cooperation to form the calibration and positioning mechanism. The diaphragm fixing strip is a ceramic part, and its sintering and processing error is relatively large, and subsequent processing is required. The positioning groove 15 is a through rectangular groove for easy processing. After sintering and forming, only surface grinding is required, and the use requirements can be met.

[0061] Preferably, there are two diaphragm fixing strips arranged opposite to each other up and down. The two diaphragm fixing strips are parallel and closely adjacent. The positioning mechanism includes protruding raised cross strips 16 provided on the length edges of each diaphragm fixing strip 2 and a raised part 17 provided on the diaphragm box 3. The raised part 17 can be inserted into the engaging space between the two raised cross strips 16 of the diaphragm box to form an engaging and positioning.

[0062] Each diaphragm fixing strip has a total of 7 countersunk screw holes. The five in the center are in opposite directions to the two on the left and right edges. The five in the center are diaphragm box fixing screw holes 18 for the installation of the diaphragm box fixing screw 19, and the two on the edges are the third threaded holes 14 for the installation of the fixing screw (the second diaphragm fixing strip fixing screw 32) of the diaphragm fixing strip and the diaphragm support. The positioning grooves 15 on both side faces of each diaphragm fixing strip facilitate screw positioning and prevent the diaphragm fixing strip from shifting. The raised cross strip 16 is used to limit the deflection of the diaphragm box.

[0063] Furthermore, the connecting mechanism includes diaphragm box fixing screw holes 18 provided in the engaging space, screw holes 34 provided on the diaphragm box 3, and a diaphragm box fixing screw 19. The diaphragm box fixing screw 19 passes through the diaphragm box fixing screw holes 18 and the screw holes 34 to fix the diaphragm box in the engaging space.

[0064] Embodiment 2

[0065] Preferably, the diaphragm support 1 includes a bottom fixing plate 20, an upper groove 22 fixed to the bottom fixing plate 20 through two symmetrically arranged side support plates 21, and a back plate 23 fixed to the back of the upper groove 22. The upper groove 22 and the back plate 23 cooperate to form the installation groove 4, and the top of the back plate 23 is bent to form the first folding edge 5;

[0066] Four of the first threaded holes 12 are formed on the back plate 23, and the second threaded holes 13 are oppositely arranged on two opposite side wall plates of the upper groove 22. The bottom fixing plate 20 is provided with screw through holes 33 to fix the diaphragm device on the vacuum device. The side support plate 21 ensures the overall height of the device and the wiring of the subsequent diaphragm box; the inner side of the upper groove 22 is used to install the diaphragm fixing strip, and the second threaded holes 13 are left on two short sides of the upper groove 22 for installing the fastening screws (the first diaphragm fixing strip fixing screws 31) in the long side direction of the diaphragm fixing strip; the back plate 23 cooperates with the upper groove 22 to form the installation groove 4 for the diaphragm fixing strip, and the back plate 23 is provided with the first threaded holes 12 for fastening in the short side direction of the diaphragm fixing strip. The flanging (the first folding edge 5) above the back plate 23 is used to prevent the material from dripping and causing adhesion. Specifically, in the case of high temperature in the actual use environment, the material will accumulate on the diaphragm plate. The setting of the first folding edge 5 is to prevent the material adhered to the diaphragm plate from dripping down along the diaphragm plate from top to bottom. The first folding edge 5 can play a blocking role to prevent the dripping material from causing adhesion between the diaphragm boxes. Adhesion means that the diaphragm boxes are conducted with each other, and the original function of detecting in each independent direction is lost.

[0067] Preferably, each diaphragm box 3 includes an end plate 24, a bottom groove plate 25, a boss plate 26 and a screw rod 27. The end plate 24, the bottom groove plate 25 and the boss plate 26 are welded and enclosed to form the slot 6. The protruding portion 17 on the boss plate 26 can be fitted between the protruding cross bars 16 on two diaphragm fixing strips. The boss plate 26 is provided with screw holes 34, and the screw holes are arranged in one-to-one correspondence with the diaphragm box fixing screw holes 18. The second folding edge 7 is formed on the top of the boss plate 26. The screw rod 27 is threadedly connected to the middle screw hole of the bottom groove plate 25. The screw rod 27 mainly plays a connecting role and is used to install nuts to fix the copper nose wire joint. The electrical signal transmission between the diaphragm device of the present invention and other devices is realized by installing wires. The second folding edge 7 on the upper part of the boss plate 26 is used to prevent the material from dripping. If the material drips below the second folding edge 7, it will cause conduction between the diaphragm support 1 and the diaphragm box, resulting in the insulation failure of the diaphragm fixing strip. When installed, the protruding portion 17 is fitted between the protruding cross bars 16 on two diaphragm fixing strips, ensuring that the diaphragm box is vertical and does not deflect. The screw holes 34 on the boss plate 26 are used for fixing between the diaphragm fixing strip and the diaphragm box.

[0068] Preferably, a replacement grasping hole 28 is formed at the top of each diaphragm plate, and the replacement of the diaphragm plate can be realized by the cooperation of the master-slave hand and the gripper. An installation chamfer 29 is formed at the bottom of each diaphragm plate to facilitate the long-distance operation of the master-slave hand. A plurality of anti-liquid-drop grooves 30 are evenly distributed on the plate surfaces of the left diaphragm plate 9, the middle diaphragm plate 11 and the right diaphragm plate 10, which can prevent the material from directly sliding off.

[0069] Embodiment 3

[0070] The installation methods of the diaphragm devices in Embodiment 1 and Embodiment 2 include the following steps:

[0071] Step 1, successively install a plurality of diaphragm boxes on the diaphragm fixing bar: the convex part 17 of the diaphragm box is inserted into the engaging space between the two convex cross bars 16 of the diaphragm boxes to form an engaging position; the diaphragm box fixing screw 19 passes through the diaphragm box fixing screw hole 18 and the screw hole 34 to fix the diaphragm box in the engaging space;

[0072] Step 2, install the fixed diaphragm box and the diaphragm fixing bar in the installation groove of the diaphragm support: the first diaphragm fixing bar fixing screw 31 is inserted into the second threaded hole 13 and the positioning groove 15 in cooperation, and the second diaphragm fixing bar fixing screw 32 is inserted into the first threaded hole 12 and the third threaded hole 14 in cooperation to fasten the diaphragm fixing bar in the installation groove;

[0073] Step 3, install each diaphragm plate into the supporting diaphragm box;

[0074] Step 4, install the diaphragm device on the vacuum device through the screw through hole at the bottom of the diaphragm support and complete the wiring.

[0075] The square area surrounded by four diaphragm plates serves as the electron beam detection channel. Before the electron beam current acts on the crucible molten pool after being emitted from the electron gun, it passes through the monitoring area of the diaphragm plate. If there is deflection, an electric signal will be generated on the diaphragm plate in the corresponding direction. Specifically, if the electron beam running trajectory has deflection in a certain direction, the diaphragm plate at the corresponding position will receive the bombardment of the electron beam current. According to the degree of deflection, a current value will be displayed on the corresponding electron gun control cabinet to reflect the deflection situation of the electron beam current.

[0076] For ease of explanation, in the embodiments, spatial relative terms such as "upper", "lower", "left", "right", etc. are used to describe the relationship of one element or feature shown in the figure relative to another element or feature. It should be understood that in addition to the orientation shown in the figure, the spatial terms are intended to include different orientations during the use or operation of the device. For example, if the device in the figure is inverted, the element described as being "below" other elements or features will be positioned "above" other elements or features. Therefore, the exemplary term "lower" can include both the upper and lower orientations. The device can be positioned in other ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used here can be interpreted accordingly.

[0077] Moreover, relative relationship terms such as "first" and "second" are only used to distinguish one component with the same name from another, and do not necessarily require or imply any such actual relationship or order between these components.

[0078] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, several improvements can be made without departing from the principle of the present invention, and these improvements should also be regarded as the protection scope of the present invention.

Claims

1. A diaphragm device for electron beam trajectory detection, characterized in that, It includes a diaphragm bracket, a diaphragm fixing strip, a diaphragm box and a diaphragm plate, wherein: The diaphragm bracket is provided with an installation groove for fixing the diaphragm fixing strip. The diaphragm fixing strip is detachably fixed in the installation groove through a calibration positioning mechanism. A first folding edge is formed at the top of the diaphragm bracket; A plurality of the diaphragm boxes are detachably fixed to the diaphragm fixing strip one by one through a positioning mechanism and a connecting mechanism. Each diaphragm box is provided with a slot for inserting the diaphragm plate. A second folding edge is formed at the top of each diaphragm box; The first folding edge and the second folding edge are arranged oppositely. The edge of the first folding edge faces the diaphragm plate and there is a gap therebetween. The bottom surface of the second folding edge faces the upper surface of the diaphragm bracket and there is a gap therebetween.

2. The aperture device for electron beam trajectory detection according to claim 1, wherein, The diaphragm plate includes an outer diaphragm plate, a left diaphragm plate, a right diaphragm plate and a middle diaphragm plate. The number of the diaphragm boxes is five. The left diaphragm plate, the middle diaphragm plate and the right diaphragm plate are sequentially inserted into the middle three diaphragm boxes. The outer diaphragm plate is of a door-shaped structure, and the two vertical parts of the door-shaped structure are respectively inserted into the two diaphragm boxes located on both sides.

3. The diaphragm device for electron beam trajectory detection according to claim 1, characterized in that, The calibration positioning mechanism includes a first threaded hole formed on the back plate of the installation groove and second threaded holes formed on the left and right side plates of the installation groove. The second threaded holes are arranged in pairs oppositely. The first threaded holes are symmetrically arranged at the four corners; The calibration positioning mechanism further includes third threaded holes arranged at both ends of the diaphragm fixing strip and positioning grooves arranged on the two end faces of the diaphragm fixing strip. The third threaded holes are arranged in one-to-one correspondence with the first threaded holes. The positioning grooves are arranged in one-to-one correspondence with the second threaded holes; When the diaphragm fixing strip is fixed in the installation groove, a first diaphragm fixing strip fixing screw is inserted into the second threaded hole and the positioning groove in cooperation, and a second diaphragm fixing strip fixing screw is inserted into the first threaded hole and the third threaded hole in cooperation to form a calibration positioning mechanism.

4. The diaphragm device for electron beam trajectory detection according to claim 1, characterized in that, There are two diaphragm fixing strips arranged oppositely up and down. The two diaphragm fixing strips are adjacent closely and parallelly. The positioning mechanism includes protruding raised cross strips arranged on the length edges of each diaphragm fixing strip and raised parts arranged on the diaphragm boxes. The raised parts can be inserted into the engaging space between the two raised cross strips of the diaphragm boxes to form an engaging positioning.

5. The diaphragm device for electron beam trajectory detection according to claim 4, characterized in that, Each diaphragm fixing strip has a total of [[9]] countersunk screw holes. The five directions in the center are opposite to the two on the left and right edges. The five in the center are diaphragm box fixing screw holes for the installation of diaphragm box fixing screws. The two on the edges are third threaded holes for installing the second diaphragm fixing strip fixing screws. Positioning grooves are arranged on both side surfaces of each diaphragm fixing strip for positioning the first diaphragm fixing strip fixing screws.

6. The diaphragm device for electron beam trajectory detection according to claim 4, characterized in that, The connecting mechanism includes diaphragm box fixing screw holes arranged in the engaging space, screw holes arranged on the diaphragm boxes and diaphragm box fixing screws. The diaphragm box fixing screws pass through the diaphragm box fixing screw holes and the screw holes to fix the diaphragm boxes in the engaging space.

7. The diaphragm device for electron beam trajectory detection according to claim 1, characterized in that, The diaphragm support includes a bottom fixing plate, an upper groove fixed to the bottom fixing plate through two symmetrically arranged side support plates, and a back plate fixed to the back of the upper groove. The upper groove and the back plate cooperate to form the installation groove, and the top of the back plate is bent to form the first folding edge.

8. The diaphragm device for electron beam trajectory detection according to claim 7, characterized in that, Four first threaded holes are formed in the back plate. Four second threaded holes are arranged in pairs on two opposite side wall plates of the upper groove. The bottom fixing plate is provided with screw through holes to fix the diaphragm device on the vacuum device. The inner side of the upper groove is used to install the diaphragm fixing strip, and second threaded holes are left on the two short sides of the upper groove for installing the fixing screws of the first diaphragm fixing strip. The back plate and the upper groove cooperate to form the installation groove of the diaphragm fixing strip, and the back plate is provided with first threaded holes for fastening in the short side direction of the diaphragm fixing strip.

9. The diaphragm device for electron beam trajectory detection according to claim 1 or 5, characterized in that, Each diaphragm box includes an end plate, a bottom groove plate, a boss plate, and a screw rod. The end plate, the bottom groove plate, and the boss plate are welded and enclosed to form the slot. The protruding part on the boss plate can be fitted between the protruding cross bars on two diaphragm fixing strips. The boss plate is provided with screw holes, and the screw holes are arranged in one-to-one correspondence with the diaphragm box fixing screw holes. The second folding edge is formed at the top of the boss plate. The screw rod is threadedly connected to the middle screw hole of the bottom groove plate.

10. The diaphragm device for electron beam trajectory detection according to claim 1, characterized in that, A replacement grasping hole is formed at the top of each diaphragm plate.

11. The diaphragm device for electron beam trajectory detection according to claim 1, characterized in that, An installation chamfer is formed at the bottom of each diaphragm plate.

12. The diaphragm device for electron beam trajectory detection according to claim 2, wherein, The surfaces of the left diaphragm plate, the middle diaphragm plate, and the right diaphragm plate are evenly distributed with a plurality of anti-droplet grooves to prevent the material from sliding directly.

13. The installation method of the diaphragm device according to any one of claims 1-12, characterized in that, It includes the following steps: Step 1, sequentially install a plurality of diaphragm boxes on the diaphragm fixing strip; Step 2, install the fixed diaphragm box and the diaphragm fixing strip into the installation groove of the diaphragm support; Step 3, install each diaphragm plate into the matching diaphragm box.

14. The installation method according to claim 13, characterized in that, In Step 1, when sequentially installing a plurality of diaphragm boxes on the diaphragm fixing strip, first insert the protruding part of the diaphragm box into the clamping space between two protruding cross bars of the diaphragm box to form a clamping position; then the diaphragm box fixing screw passes through the diaphragm box fixing screw hole and the screw hole to fix the diaphragm box in the clamping space. In Step 2, when installing the fixed diaphragm box and the diaphragm fixing strip into the installation groove of the diaphragm support, the first diaphragm fixing strip fixing screw is inserted into the second threaded hole and the positioning groove, and the second diaphragm fixing strip fixing screw is inserted into the first threaded hole and the third threaded hole to fasten the diaphragm fixing strip in the installation groove.

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