Passive pressure sensor based on piezoelectric potential enhanced triboelectric effect and preparation method thereof

By setting the layered structure of the ZnO fold layer and the ZnO nanowire layer in the passive pressure sensor, the piezoelectric effect is used to improve the sensitivity of the sensor, and the problem of low sensitivity of the existing passive pressure sensor is solved, thereby achieving higher pressure detection sensitivity and wider application prospects.

CN115560886BActive Publication Date: 2025-04-08XIDIAN UNIV
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Patent Information

Application Number
CN202211138227.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-09-19
Publication Date
2025-04-08
Estimated Expiration
2042-09-19

AI Technical Summary

Technical Problem

The low sensitivity of existing passive pressure sensors limits their wide application in human-machine interface systems, artificial skin and prosthetics.

Method used

By setting a layered fold structure formed by the ZnO fold layer + ZnO nanowire layer in the pressure sensor, the piezoelectric effect is used to generate a macroscopic piezoelectric potential under the action of external pressure, adjust the barrier height of the interface, promote friction charge separation, and improve the surface friction charge density.

Benefits of technology

It significantly improves the pressure detection sensitivity of passive pressure sensors, allowing them to be widely used in fields such as human-machine interface systems, artificial skin and prosthetics.

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Abstract

The present invention discloses a passive pressure sensor based on piezoelectric potential enhanced triboelectric effect, comprising: an electrode layer, a flexible polymer material layer, a ZnO wrinkle layer, a ZnO nanowire layer and a negative polarity friction layer; wherein the thickness of ZnO deposited when making the ZnO wrinkle layer is 10nm-1μm, the thermal expansion coefficients of the flexible polymer material and ZnO used to make the flexible polymer material layer are not matched, and the top crystal plane of ZnO in the ZnO nanowire layer is a (0001) crystal plane. The pressure sensor provided by the present invention has higher sensitivity.
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