Compact, high temporal resolution microchannel plate assembly and method of making same
By employing a tapered anode terminal and a voltage divider circuit board design in the microchannel plate assembly, combined with a high-δ oxide film layer and high-pressure resistant materials, the problems of insufficient time resolution and excessively large structure of the microchannel plate assembly in the field of mass spectrometry analysis are solved, realizing a microchannel plate assembly with high time resolution and miniaturization.
Patent Information
- Application Number
- CN202211128121.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-09-16
- Publication Date
- 2026-03-20
- Estimated Expiration
- 2042-09-16
AI Technical Summary
Existing microchannel plate assemblies lack sufficient time resolution in the field of mass spectrometry analysis, and their large size makes them difficult to meet the needs of space-constrained environments such as artificial satellites. In addition, the planar anode terminals lead to inaccurate detection results.
A compact microchannel plate assembly is designed, employing tapered anode terminals and a voltage divider circuit board. The insulating substrate, anode cover plate, anode plate, output electrode plate, microchannel plate, and metal shielding base are fixed together by fixing screws. The assembly structure is optimized to improve time resolution by combining a high-δ oxide film layer and high-voltage resistant materials.
It significantly improves the time resolution of microchannel plate assemblies, reduces the size of the assemblies, and suppresses signal waveform distortion and oscillation, meeting the needs of mass spectrometers and artificial satellites for high time resolution and miniaturization.
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Figure CN115602521B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to a microchannel plate assembly, in particular to a compact structure and high time resolution microchannel plate assembly. BACKGROUND
[0002] The microchannel plate (MCP) is an electron multiplier device, which has the characteristics of high gain, low noise and fast response speed, and can be used for detecting various particles and radiation signals such as electrons, ions, ultraviolet rays and X-rays. Most of the microchannel plate assemblies have large structure size, and can only convert particle signals into electrical signals, and do not have high time resolution. In the field of artificial satellite particle detection, the microchannel plate assembly is often limited by the volume space of the overall device, and the structure of the microchannel plate assembly should not be too large, so that the compact microchannel plate assembly can be applied. In addition, in the field of mass spectrometry, the particle detection has higher requirements for the time resolution performance of the microchannel plate assembly.
[0003] At present, the anode terminal of the microchannel plate assembly is mostly flat, and when it is applied in the field of mass spectrometry, its time resolution ability is weak, and the detection result is easy to be inaccurate.
[0004] With the wide application of the microchannel plate assembly in the field of mass spectrometry in recent years, it is required to have a compact structure to realize the miniaturization of the device and seek high reliability. In addition, it is expected to have high time resolution in the microchannel plate assembly. SUMMARY
[0005] In view of the defects or deficiencies of the prior art, according to the first aspect of the purpose of the present application, a compact structure and high time resolution microchannel plate assembly is provided, which has an output electrode column, a fixing screw, an insulating substrate, an anode cover plate, an anode plate, an output electrode plate, a microchannel plate, a metal shielding base and a positioning sleeve. The insulating substrate, the anode cover plate, the anode plate, the output electrode plate, the microchannel plate and the metal shielding base are fixed by the fixing screw to form an integrated form.
[0006] As an optional embodiment, in the microchannel plate assembly, the surfaces of the insulating substrate, the anode plate and the output electrode plate are plated with an electrical wiring pattern for electrical connection. The surface of the insulating substrate is plated with an electrical wiring pattern for the voltage division circuit of the microchannel plate assembly; the surface of the planar anode plate in the anode plate is plated with an electrical wiring pattern electrically connected with the tapered receiving terminal; and the surface of the output electrode plate is plated with an electrical wiring pattern electrically connected with the output side of the microchannel plate.
[0007] As an optional embodiment, in the micro-channel plate assembly, the input side of the micro-channel plate is electrically connected to the metal shielding base, and the micro-channel plate is used as the input electrode of the micro-channel plate through the metal screw; the output side of the micro-channel plate is electrically connected to the output electrode plate, and the output electrode of the micro-channel plate is led out through the output electrode.
[0008] As an optional embodiment, in the micro-channel plate assembly, the anode plate is connected to the planar anode plate and the tapered receiving terminal through the electric wiring pattern, and the connection mode can be connected through welding or screw.
[0009] As an optional embodiment, in the micro-channel plate assembly, the micro-channel plate is in a double-piece stacked form, wherein the input surface of the first piece of micro-channel plate is plated with a high-delta oxide film layer to realize high detection efficiency of the micro-channel plate assembly, and the high-delta oxide film layer can be an alkali metal film such as Al2O3 film and MgF2 film.
[0010] As an optional embodiment, in the micro-channel plate assembly, the insulating substrate, the anode cover plate and the metal shielding base are provided with screw holes, and they are connected through screws.
[0011] As an optional embodiment, in the micro-channel plate assembly, the metal shielding base is provided with a threaded hole for connecting the compact structure and high time resolution micro-channel plate assembly with other components.
[0012] According to the present application, a compact structure and high time resolution micro-channel plate assembly can be realized, wherein the micro-channel plate assembly using the tapered anode terminal and the corresponding voltage dividing circuit board can effectively suppress the occurrence of distortion and oscillation of the output signal waveform, and the use of the tapered anode terminal can significantly improve the time resolution capability of the micro-channel plate assembly.
[0013] The micro-channel plate assembly of the present application adopts the tapered anode terminal, optimizes the structure of the micro-channel plate assembly, and designs a compact micro-channel plate assembly, which can meet the requirements of high time resolution detection, further reduces the overall size of the micro-channel plate assembly, and can meet the requirements of particle detection fields such as mass spectrometer and artificial satellite which have high requirements on size and space.
[0014] It should be understood that all combinations of the foregoing concepts and additional concepts described in greater detail below can be seen as being part of the inventive subject matter of the present disclosure unless otherwise stated. In addition, all combinations of claimed subject matter can be seen as being part of the inventive subject matter of the present disclosure.
[0015] The foregoing and other aspects, embodiments and features of the present teachings are more fully described below, in connection with the accompanying drawings. Other aspects, embodiments and features of the present teachings will become apparent to those skilled in the art upon examination of the following description, or can be learned by practice of the present teachings. Brief Description of the Drawings BRIEF DESCRIPTION OF DRAWINGS
[0016] The drawings are not intended to be to scale. In the drawings, each identical, or nearly identical, component that is illustrated in various figures is represented with a like numeral for clarity. For purposes of clarity, not every component is called out in every drawing. Embodiments of various aspects of the present teachings will now be described, by way of example only, with reference to the accompanying drawings in which:
[0017] Figure 1 Schematic diagram of the overall structure of a microchannel plate assembly according to an exemplary embodiment of the present teachings.
[0018] Figure 2 Is Figure 1 A-A sectional view of a microchannel plate assembly according to an exemplary embodiment of the present teachings.
[0019] Figure 3 Schematic diagram of the assembly of the parts of a microchannel plate assembly according to an exemplary embodiment of the present teachings.
[0020] Figure 4 Schematic diagram of an anode plate of a microchannel plate assembly according to an exemplary embodiment of the present teachings.
[0021] Figure 5 Equivalent circuit diagram of a microchannel plate assembly according to an exemplary embodiment of the present teachings.
[0022] Figure 6 Time response characteristic diagram of a microchannel plate assembly according to an exemplary embodiment of the present teachings. DETAILED DESCRIPTION
[0023] In order to more fully understand the present teachings, specific embodiments thereof will be described herein with reference to the following drawings. For the purposes of clarity, not every component of the embodiments described herein is necessary for fully understanding the present teachings.
[0024] Aspects of the present teachings are described in the disclosure by reference to the drawings, in which a number of illustrative embodiments are shown. The embodiments of the disclosure described above are not meant as limitations of the present teachings. It is contemplated that these concepts and embodiments described above and further described below can be employed in a variety of ways within the scope of the present teachings. Additionally, some aspects of the present teachings can be employed independently of other aspects of the present teachings. The disclosure is thus to be considered as in all aspects illustrated in the specification, figures and claims.
[0025] The present teachings relate to a compact, high time resolution microchannel plate assembly, such as Figure 1As shown, it can be adapted to the field of analytical instruments such as mass spectrometry and the like. The microchannel plate assembly is a detection device with microchannel plate as the core element.
[0026] In combination Figure 1 , 2 , 3, 4, the compact structure, high time resolution microchannel plate assembly includes: output electrode column 1, fixed screw 2, insulating substrate 3, anode cover plate 4, anode plate 5, output electrode plate 6, microchannel plate 7, metal shielding base 8, positioning sleeve 9.
[0027] Wherein, the microchannel plate 7 input surface is plated with high delta oxide film layer.
[0028] As an optional embodiment, in the microchannel plate assembly, the microchannel plate is in double piece superimposed form to realize high detection efficiency of the microchannel plate assembly. The input surface of the first piece of microchannel plate is plated with high delta oxide film layer to realize high detection efficiency of the microchannel plate assembly, and the high delta oxide film layer can be selected from alkali metal film such as Al2O3 film and MgF2 film.
[0029] Wherein, the insulating substrate 3, the anode cover plate 4 and the metal shielding base 8 are provided with screw holes, and they are connected through screws.
[0030] Wherein, the insulating substrate 3, the anode cover plate 4, the anode plate 5, the output electrode plate 6, the microchannel plate 7 and the metal shielding base 8 are fixed into an integrated form through the fixed screw 2.
[0031] Wherein, the metal shielding base 8 is provided with a threaded hole for connecting the compact structure, high time resolution microchannel plate assembly with other components.
[0032] Wherein, the material of the insulating substrate 3 is high-voltage-resistant material-epoxy glass cloth plate.
[0033] Wherein, the material of the output electrode plate 6 is high-voltage-resistant material-epoxy glass cloth plate, and the material of the output electrode column 1 is stainless steel.
[0034] Wherein, the anode plate 5 is connected by electrical wiring pattern between the planar anode plate 5-1 and the tapered receiving terminal 5-2, and the connection mode is welding or screw connection; wherein, the material of the planar anode plate 5-1 is high-voltage-resistant material-epoxy glass cloth plate, and the surface is plated with electrical wiring pattern, and the material of the tapered receiving terminal 5-2 is copper, which is connected with the surface electrical wiring pattern of the planar anode plate 5-1 for signal reading.
[0035] In combination Figure 1 , Figure 2 and Figure 3 As shown, the assembly process of the compact structure, high time resolution microchannel plate assembly of the present application is as follows:
[0036] First, the output electrode column 1 is welded to the output electrode plate 6 using solder, forming a whole;
[0037] Then, the positioning sleeve 9 is placed in the corresponding position of the metal shielding base 8, and then the microchannel plate 7, the output electrode plate 6, the anode plate 5, the anode cover plate 4, the insulating base plate 3, and the output electrode column 1 are placed in turn. The output electrode column 1 should pass through the small hole on the insulating base plate 3, and then all the parts are fixed together by the fixing screw 2.
[0038] Finally, the output electrode column 1 and the electrical wiring on the insulating base plate 3 are welded together using solder.
[0039] The fixing screw 2 includes a metal screw, a first insulating screw, and a second insulating screw. The metal screw is made of stainless steel and is connected to the metal shielding base 8 to form the input electrode of the microchannel plate 7. The first and second insulating screws are made of PI material and are insulated from the metal shielding base 8.
[0040] In combination with Figure 2 , 3 , the anode cover plate 4 has two functions. First, it supports the entire microchannel plate assembly to prevent relative displacement of the components and affect the performance of the microchannel plate assembly. Second, it is made of PI material to reduce the overall weight of the assembly. Third, it is designed with a hollow structure, allowing the anode plate 5 to pass through the middle, making the entire microchannel plate assembly more compact.
[0041] As shown in Figure 4 , the anode plate 5 is composed of a planar anode plate 5-1 and a tapered receiving terminal 5-2. The planar anode plate 5-1 is made of a high-voltage-resistant material, epoxy glass cloth plate, with an electrical wiring pattern on the surface. The tapered receiving terminal 5-2 is made of copper and is connected to the planar anode plate 5-1 through the electrical wiring pattern for signal readout. The connection method can be welding or screwing.
[0042] As a result, the anode plate 5 has a new design of the tapered receiving terminal 5-2 based on the planar anode plate 5-1, which can effectively suppress the distortion and oscillation of the output signal waveform, thereby significantly improving the time resolution capability of the microchannel plate assembly.
[0043] The insulating base plate 3 is made of a high-voltage-resistant material, epoxy glass cloth plate, with an electrical wiring pattern on the surface for the voltage division circuit of the microchannel plate assembly.
[0044] As shown in Figure 5The equivalent circuit of the compact structure high time resolution micro-channel plate assembly of the embodiment of the application is shown, wherein the maximum working voltage of the double micro-channel plate 7 is 2kV, and an acceleration electric field exists between the output surface of the second micro-channel plate and the anode plate 5, which aims to accelerate the energy of the electron emitted from the second micro-channel plate and inhibit the secondary electron returning to the micro-channel plate due to the electron incident to the anode plate, C1 and C2 are high-voltage-resistant capacitors, which are used as coupling capacitors and aim to eliminate common-mode interference, and C3 and C4 are parallel capacitors arranged to ensure the stability of the voltage dividing circuit.
[0045] The working principle of the compact structure high time resolution micro-channel plate assembly of the application is as follows: the ion or electron is incident to the channel of the micro-channel plate 7 to which high voltage is applied, the secondary electron is multiplied by repeatedly colliding with the side wall in the channel, and the multiplied electron is detected on the anode plate 5, and the signal is read out to achieve the purpose of detecting the weak signal, the signal readout interface can be an SMA interface or other interfaces that can be used for signal readout.
[0046] As shown in Figure 6 The evaluation results of the high time resolution response characteristics of the compact structure high time resolution micro-channel plate assembly of the application are shown, and the test condition is in an environment not susceptible to external electromagnetic interference sources, and the signal waveform of the anode output is obtained as shown in Figure 6 From Figure 6 It can be seen that the response time resolution of the micro-channel plate assembly is 1.2ns, and the response time resolution of the micro-channel plate assembly with a planar anode plate in the prior art is generally tens to hundreds of ns, and the time resolution capability of the micro-channel plate assembly with the conical anode terminal proposed in the application is obviously better than that of the micro-channel plate assembly with the planar anode plate. Moreover, in combination with the conical anode terminal, the signal waveform of the anode output of the micro-channel plate assembly proposed in the application is relatively smooth, and there is no oscillation phenomenon.
[0047] The number of micro-channel plate pieces in the compact structure high time resolution micro-channel plate assembly of the application is two, and the number of micro-channel plate pieces is not limited in actual application, and can be adjusted to one or three pieces as needed.
[0048] The application has been disclosed as above with preferred embodiments, but is not used to limit the application. Those skilled in the art without departing from the spirit and scope of the application can make various modifications and decorations. Therefore, the protection scope of the application shall be subject to the definition of the claims.
Claims
1. A compact, high-time-resolution microchannel plate assembly, characterized in that, Includes output electrode post (1), fixing screw (2), insulating substrate (3), anode cover plate (4), anode plate (5), output electrode plate (6), microchannel plate (7), metal shielding base (8), and positioning sleeve (9); The output electrode plate (6) and the output electrode post (1) are connected to each other to form the output electrode of the microchannel plate (7); The anode plate (5) is composed of a planar anode plate (5-1) and a tapered receiving terminal (5-2) connected to each other; The insulating substrate (3), the anode cover plate (4) and the metal shielding base (8) are provided with screw holes and are connected to each other by screws; The insulating substrate (3), anode cover plate (4), anode plate (5), output electrode plate (6), microchannel plate (7) and metal shielding base (8) are fixed together as a whole by fixing screws (2); The metal shielding base (8) has a pre-set threaded hole for connecting the compact, high-time-resolution microchannel plate assembly with other components. The fixing screw (2) includes a metal screw, a first insulating screw, and a second insulating screw, wherein: The metal screws are made of stainless steel and are connected to the metal shielding base (8) to form the input electrode of the microchannel plate (7); The first and second insulating screws are made of PI material and are insulated from each other by the metal shielding base (8). The insulating substrate (3) is made of high voltage resistant material - epoxy glass cloth board; The output electrode plate (6) is made of high voltage resistant material - epoxy glass cloth plate, and the output electrode post (1) is made of stainless steel. The anode plate (5) is formed by connecting a planar anode plate (5-1) and a tapered receiving terminal (5-2) to each other through an electrical wiring pattern. The connection method is welding or screw connection. The planar anode plate (5-1) is made of high voltage resistant material - epoxy glass cloth board, and the surface is plated with an electrical wiring pattern. The tapered receiving terminal (5-2) is made of copper and is connected to the electrical wiring pattern on the surface of the planar anode plate (5-1) for signal reading.
2. The compact, high time-resolution microchannel plate assembly as described in claim 1, characterized in that, The input surface of the microchannel plate (7) is coated with a high-δ oxide film layer.
3. The compact, high time-resolution microchannel plate assembly as described in claim 2, characterized in that, The high-δ oxide film is an alkali metal film, including an Al2O3 film or a MgF2 film.
4. A method for fabricating a compact, high-time-resolution microchannel plate assembly as described in claim 1, characterized in that, The assembly process of the microchannel plate assembly includes the following steps: First, the output electrode post (1) is soldered to the output electrode plate (6) to form a whole; Then, the positioning sleeve (9) is placed in the corresponding position of the metal shielding base (8), and then the microchannel plate (7), output electrode plate (6), anode plate (5), anode cover plate (4), and insulating substrate (3) are placed in sequence. The output electrode post (1) passes through the small hole on the insulating substrate (3), and then the insulating substrate (3), anode cover plate (4), anode plate (5), output electrode plate (6), microchannel plate (7) and metal shielding base (8) are fixed together as a whole by fixing screws (2). Finally, the output electrode post (1) and the electrical wiring on the insulating substrate (3) are soldered together as a whole.
Citation Information
Patent Citations
Method for inhibiting ultraviolet response of micro-channel plate and micro-channel plate
CN114975067A
Compact light annular micro-channel plate assembly for space exploration
CN115020184A
Ion detector
US20040173742A1