Optical calibration device and method for calibrating a coordinate system in which an optical table is located

Abstract

The application discloses an optical calibration device and a method for calibrating a coordinate system in which an optical platform is located. The optical calibration device can calibrate the positions of the optical platform and an analyzer in the optical path of the optical platform, so as to ensure the accuracy and stability of optical testing. Compared with the level and high-precision mechanical processing used in the prior art, the optical calibration device can effectively improve the optical measurement accuracy. In addition, the optical calibration device can calibrate the X-axis, Y-axis and Z-axis of the optical platform, and has the characteristics of simplicity and convenience.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical detection, in particular to an optical calibration device and a method for calibrating a coordinate system of an optical platform. BACKGROUND

[0002] In optical measurement, ensuring the accuracy and traceability of the test results of optical measurement equipment is very important for objectively evaluating the optical characteristics of the measured object. Therefore, the value calibration needs to be performed before the optical measurement equipment is put into market use and after a period of use. Generally, the calibration of the optical measurement equipment needs to be performed in a specific environment, and the requirements for the use environment and maintenance of the equipment are relatively high. In addition, in the subsequent use process, the test results may be offset or even large errors may occur due to changes in external environment, vibration, improper operation, etc. Once the measurement is inaccurate, the optical platform needs to be recalibrated. Therefore, the calibration of the optical platform is particularly important for the test results.

[0003] Therefore, how to calibrate the optical platform to ensure the test accuracy is a problem to be solved by the relevant researchers and developers. SUMMARY

[0004] The embodiments of the present application provide an optical calibration device and a method for calibrating a coordinate system of an optical platform, which aims to provide a simple and fast solution for the optical platform and ensure the test accuracy.

[0005] According to an aspect of the present application, the present application provides an optical calibration device, which comprises: a collimator configured to emit a light beam; an analyzer configured to receive and analyze the light beam emitted from the collimator; and a calibrator configured to calibrate the light beam emitted from the collimator; wherein the calibrator is further configured to adjust a second optical result obtained from the analyzer until the second optical result is the same as a first optical result obtained from the analyzer according to the first optical result, so as to calibrate the optical path position of the optical platform and the analyzer, wherein the first optical result is obtained by directly irradiating the light beam emitted by the collimator on the analyzer, and the second optical result is obtained by irradiating the light beam emitted by the collimator on the analyzer after processing by the calibrator.

[0006] In some embodiments, the optical calibration device further comprises a first rack, and the collimator is installed on the first rack; the first rack has three directional axes, and the three directional axes are respectively configured to move or rotate the collimator along or around the corresponding X-axis, Y-axis and Z-axis.

[0007] In some embodiments, the collimator is configured to generate a light beam and perpendicularly irradiate on the receiving plane of the analyzer.

[0008] In some embodiments, the analyzer is configured to move in a direction close to or away from the collimator.

[0009] In some embodiments, the optical calibration device further comprises a second rack, wherein an optical platform is arranged on the second rack, and the optical platform is used to carry and position the collimator; the second rack has three directional axes, and the three directional axes are respectively used to move or rotate the optical platform along or around a corresponding X-axis, Y-axis, Z-axis.

[0010] In some embodiments, the optical platform has a first limiting surface and a second limiting surface, wherein the first limiting surface and the second limiting surface are perpendicular to each other; the first limiting surface and the second limiting surface are used to define the position of the collimator on the optical platform.

[0011] In some embodiments, the collimator is an optical assembly, and the optical assembly comprises a base and a mirror structure arranged on the base.

[0012] In some embodiments, the base has two mutually parallel planes, and the two mutually parallel planes of the base are perpendicular to the plane of the optical platform and are used to transmit light.

[0013] In some embodiments, the mirror structure has two mutually parallel planes, and the two mutually parallel planes of the mirror structure are perpendicular to the plane of the optical platform and are used to reflect light.

[0014] In some embodiments, the collimator is further used to adjust a third optical result obtained from the analyzer until a preset relationship between the third optical result and the first optical result is satisfied, wherein the third optical result is obtained by allowing the light beam emitted by the collimator to pass through the mirror structure and then be incident on the analyzer.

[0015] According to another aspect of this application, this application provides a method for calibrating the coordinate system of an optical platform. The method includes: emitting a light beam to an analyzer through a collimator; adjusting the position of the collimator relative to the analyzer so that the coordinate system of the collimator coincides with the coordinate system of the analyzer; placing a calibrator on the optical platform and passing the light beam through the calibrator; adjusting the optical platform according to the optical result of the analyzer so that the coordinate system of the optical platform coincides with the coordinate system of the analyzer; emitting a light beam from the collimator and directly incident on the analyzer to obtain a first optical result; emitting a light beam from the collimator and, after processing by the calibrator, incident on the analyzer to obtain a second optical result; comparing the first optical result and the second optical result; when it is determined that the first optical result and the second optical result are different, adjusting the second optical result based on the first optical result until the second optical result is the same as the first optical result.

[0016] In some embodiments, emitting a light beam from the collimator and directly incident on the analyzer to obtain a first optical result includes: controlling the collimator to move or rotate about corresponding X-axis, Y-axis, and Z-axis by adjusting three directional axes of a first frame, wherein the collimator is mounted on the first frame, the first frame having three directional axes, the three directional axes being respectively used to move or rotate the collimator about corresponding X-axis, Y-axis, and Z-axis; and generating a light beam and incident it perpendicularly on the analyzer to obtain the first optical result.

[0017] In some embodiments, the step of emitting a light beam from the collimator and, after processing by the calibrator, incident on the analyzer to obtain a second optical result includes: transmitting the light beam emitted from the collimator through the base to the analyzer to obtain the second optical result, wherein the calibrator is an optical component; the optical component includes a base and a mirror structure disposed on the base; the base has two mutually parallel planes perpendicular to the optical platform plane and used for transmitting light; the mirror structure has two mutually parallel planes perpendicular to the optical platform plane and used for reflecting light.

[0018] In some embodiments, transmitting the light beam emitted from the collimator to the analyzer through the base includes: controlling the optical platform to move or rotate about the corresponding X-axis and Y-axis by adjusting three directional axes of the second frame, wherein the optical platform is provided on the second frame for supporting and positioning the calibrator; the second frame has three directional axes, which are respectively used to move or rotate the optical platform about the corresponding X-axis, Y-axis, and Z-axis.

[0019] In some embodiments, the step of emitting a beam from the collimator and, after processing by the calibrator, incident on the analyzer to obtain a second optical result further includes: measuring the shortest distances from the collimator to a first limiting surface and a second limiting surface of the optical platform, respectively, to obtain distance information from the collimator to the first limiting surface and from the collimator to the second limiting surface, thereby serving as reference data for the optical component under test, wherein the optical platform has a first limiting surface and a second limiting surface, wherein the first limiting surface and the second limiting surface are perpendicular to each other.

[0020] In some embodiments, the step of transmitting a light beam to an analyzer via a collimator and adjusting the position of the collimator relative to the analyzer so that the coordinate system of the collimator coincides with the coordinate system of the analyzer includes: moving the analyzer back and forth along the direction of the light beam to obtain the coordinate information of two corresponding light spots; and adjusting the collimator until the two corresponding light spots coincide.

[0021] This application provides an optical calibration device and a method for calibrating the coordinate system of an optical platform. By utilizing a collimator and a calibrator in combination, the positions of the optical platform and analyzer in their optical paths can be quickly calibrated to ensure the accuracy and stability of optical testing. Furthermore, compared to the levels and high-precision machining used in existing technologies, this method effectively improves the accuracy of optical measurements. In addition, the optical calibration device described in this application can calibrate the X, Y, and Z axes of the optical platform, offering simplicity and convenience. Moreover, the optical calibration device can use a motor drive to adjust the three axes of the optical platform, replacing manual adjustment of the axis knobs, thereby achieving rapid calibration. Attached Figure Description

[0022] The technical solution and other beneficial effects of this application will become apparent from the following detailed description of specific embodiments in conjunction with the accompanying drawings.

[0023] Figure 1 This is a schematic diagram of an optical calibration device provided in an embodiment of this application from a certain angle.

[0024] Figure 2 This is a schematic diagram of the optical calibration device provided in the embodiments of this application from another perspective.

[0025] Figure 3 for Figure 1 A magnified view of a portion of the optical component shown.

[0026] Figure 4 The diagram shows the optical path of the collimator beam provided in the embodiments of this application, which is incident perpendicularly on the CCD camera and incident obliquely on the CCD camera.

[0027] Figure 5 This is a schematic diagram of the optical path of the collimator provided in the embodiment of this application, where the light beam is incident perpendicularly on the base of the optical component and incident obliquely on the base of the optical component.

[0028] Figure 6 This is a schematic diagram of the optical path of the collimator beam in the periscope provided in the embodiments of this application.

[0029] Figure 7 This is a schematic diagram showing the position of the light spot on the target surface of the CCD camera provided in the embodiments of this application.

[0030] Figure 8 This is a flowchart illustrating the steps of a method for calibrating the coordinate system of an optical platform, as provided in an embodiment of this application.

[0031] Figure 9 for Figure 8 The flowchart of the sub-step of step S810 is shown.

[0032] Figure 10 for Figure 8 The flowchart of the sub-steps of step S820 is shown. Detailed Implementation

[0033] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0034] The terms "first" and "second" used herein are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0035] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0036] The following disclosure provides many different implementations or examples for carrying out different structures of this application. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this application. Furthermore, reference numerals and / or reference letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed.

[0037] See Figure 1 and Figure 2 As shown, this application provides an optical calibration device 1000, which includes: a collimator 11 for emitting a light beam; an analyzer 31 for receiving and analyzing the light beam emitted from the collimator 11; and a calibrator 21 for calibrating the light beam emitted from the collimator 11; wherein the calibrator 21 is further used to adjust a second optical result obtained from the analyzer 31 according to a first optical result obtained from the analyzer 31 until the second optical result is the same as the first optical result, thereby calibrating the optical path position of the optical platform (or stage, hereinafter the same) 41 and the analyzer 31, wherein the first optical result is obtained by the light beam emitted by the collimator 11 being directly incident on the analyzer 31, and the second optical result is obtained by the light beam emitted by the collimator 11 being processed by the calibrator 21 and then incident on the analyzer 31.

[0038] Furthermore, the calibrator 21 is also used to obtain a third optical result while obtaining a second optical result, and to adjust the third optical result according to the first optical result until the third optical result and the first optical result satisfy a preset relationship.

[0039] The optical calibration device 1000 described in this application aims to provide a simple and quick solution for determining the position of an optical platform in its optical path, and can ensure the accuracy and stability of optical testing.

[0040] The optical calibration device 1000 will be further described below with reference to the accompanying drawings.

[0041] like Figure 1 and Figure 2 As shown, the collimator 11 serves as an optical element for input and output in an optical fiber communication device. The collimator 11 is capable of emitting a beam of light (or ray), i.e., a collimated ray. The collimator 11 is mounted within the first frame 10 of the optical calibration device 1000. The first frame 10 may include three directional axes in different directions, which are mutually perpendicular. For example, these directional axes may be the X-axis, Y-axis, and Z-axis, as detailed in the documentation. Figure 1 As shown. Optionally, these directional axes are configured to be driven and controlled by a motor. That is, the movement of the directional axes can be driven and controlled separately by a motor, so that the collimator 11 can move along the corresponding X-axis, Y-axis, and Z-axis or rotate around the corresponding X-axis, Y-axis, and Z-axis respectively. This design can achieve precise adjustment and has a fast and accurate effect, thus providing a good guarantee for subsequent automatic calibration operations. Of course, in other embodiments, the knobs of the three directional axes can also be adjusted manually (e.g., Figure 2 The knobs shown are 13 for the X-axis, 14 for the Y-axis, and 15 for the Z-axis, so that the collimator 11 can move along the corresponding X-axis, Y-axis, and Z-axis or rotate around the corresponding X-axis, Y-axis, and Z-axis respectively.

[0042] In this embodiment, the collimator 11 completes the vertical calibration operation between the collimator 11 and the analyzer 31 by adjusting its tilt angle (i.e., the incident angle of the beam) and directional axis, and by aligning the analyzer 31 with the near and far ends of the collimator 11, so that the optical results obtained by the analyzer 31 (i.e., the coordinate information of the light spot below) are identical. Thus, the collimator 11 can be configured to generate a beam that is perpendicularly incident on the receiving plane of the analyzer 31. It should be noted that the vertical calibration operation between the collimator 11 and the analyzer 31 helps to adjust the displacement of the first frame 10 according to the coordinate system of the CCD camera. (See also...) Figure 4 As shown, based on the coordinate information of the light spot obtained by the receiver plane at different positions of the analyzer 31, it is determined whether the beam emitted by the collimator 11 is perpendicular. Figure 4 As shown, beam 1 is the case of vertical incidence, and beam 2 is the case of oblique incidence.

[0043] In this embodiment, the analyzer 31 is a CCD camera, and the following description will use a CCD camera as an example. Of course, in other embodiments, the analyzer 31 can also be a beam quality analyzer, a beam spotter, etc. Further, as... Figure 1 and Figure 2As shown, in this embodiment, the CCD camera has a linear guide rail. When the CCD camera moves along the light-emitting direction of the collimator 11 (i.e., the direction closer to or farther from the collimator 11), it coordinates with the optical path position adjustment of the collimator 11, so that the optical results (i.e., the coordinate information of the light spot) obtained from the receiving plane (or target surface) of the CCD camera are the same when the CCD camera is located at the near end and far end of the collimator 11. For example, when the CCD camera moves along the light-emitting direction of the collimator 11 and is located at the near end and far end of the collimator 11, the coordinate information of the light spot is obtained twice from the receiving plane of the CCD camera. The coordinate information is (X1, Y1) at the first position (i.e., at the near end of the collimator 11) and (X2, Y2) at the second position (i.e., at the far end of the collimator 11), ultimately achieving X1 = X2 and Y1 = Y2. Thus, the collimator calibration can be completed. Furthermore, during the vertical calibration process between the collimator 11 and the CCD camera, the collimator 11 can be moved a fixed distance along the X-axis or Y-axis, and the CCD camera can be rotated around the Z-axis to complete the calibration of the coordinate system where the collimator is located.

[0044] Continue reading Figure 1 and Figure 2 As shown, the calibrator 21 is an optical component, and the calibrator 21 is mounted on an optical platform 41. The optical platform 41 is used to support and position the calibrator 21. Further, as... Figure 3 As shown, the optical platform 41 has a first limiting surface 42 and a second limiting surface 43, wherein the first limiting surface 42 and the second limiting surface 43 are perpendicular to each other. The first limiting surface 42 and the second limiting surface 43 are used to define the position of the optical component on the optical platform 41. This design not only defines the position of the optical component and prevents it from shifting during calibration, but also facilitates the determination of the position of the optical component, thereby obtaining the shortest distance between the limiting surfaces (42, 43) of the optical platform 41 and the collimator 11, which is convenient for subsequent data processing and thereby for adjusting the position of the optical platform 41 and the CCD camera in the optical path.

[0045] In this embodiment, the optical platform 41 is mounted within the second frame 20 of the optical calibration device 1000. The second frame 20 has three directional axes in different directions, which are mutually perpendicular. For example, these directional axes can be the X-axis, Y-axis, and Z-axis; see the attached document for details. Figure 1 and Figure 2As shown. Optionally, these orientation axes are configured to be driven and controlled by motors. That is, the movement of the orientation axes can be driven and controlled separately by motors, so that the optical platform 41 can move along the corresponding X-axis, Y-axis, and Z-axis or rotate around the corresponding X-axis, Y-axis, and Z-axis respectively. This design can achieve precise adjustment and has a fast and accurate effect, thus providing a good guarantee for subsequent automatic calibration operations. Of course, in other embodiments, the three orientation axes can also be manually adjusted by adjusting the knobs (such as...) Figure 2 The knobs shown are 44 for the X-axis, 45 for the Y-axis, and 46 for the Z-axis, so that the optical platform 41 can move along the corresponding X-axis, Y-axis, and Z-axis or rotate around the corresponding X-axis, Y-axis, and Z-axis, respectively.

[0046] In this embodiment, the optical component serves as a calibration element, used to calibrate the optical path position between the optical platform 41 and the CCD camera. In other embodiments, the optical device under test or the optical coupling device under test can be used on the optical platform to replace the calibration element to achieve the testing purpose.

[0047] Furthermore, the optical component may include a base 23 and a mirror structure disposed on the base 23. In this embodiment, the base 23 is a lens structure, and the mirror structure is a periscope 24 (hereinafter the same), for details please refer to Figure 3 As shown, but not limited to, it can also be other optical devices capable of causing lateral displacement of the light beam. The base 23 is a cuboid-shaped lens. It has two pairs of mutually parallel planes, two of which are perpendicular to the optical platform plane and are used for transmitting light. Figure 3 As shown, the base 23 has a light-incident surface 231 and a light-exit surface 232, which are parallel to each other. The light beam emitted by the collimator 11 enters through the light-incident surface 231 and exits through the light-exit surface 232. The base 23 also includes a contact surface 233 and a support surface 234, wherein the contact surface 233 is in contact with the first limiting surface 42 of the optical platform 41, and the support surface 234 is in contact with the second limiting surface 43 of the optical platform 41. Further, the base 23 is configured to transmit the light beam emitted from the collimator 11 to the analyzer 31, that is, the light beam passes through the two parallel planes of the base 23 and reaches the analyzer 31. The periscope 24 has two parallel planes. Figure 3As shown, the periscope 24 has a periscope entrance surface 241 and a periscope exit surface 242, which are parallel to each other. The light beam emitted by the collimator 11 enters through the periscope entrance surface 241 and exits through the periscope exit surface 242. The two parallel planes of the periscope 24 are perpendicular to the optical platform and are used to reflect light. Further, the periscope 24 is configured to reflect the light beam emitted from the collimator 11 to the analyzer 31, that is, the light beam passes through the two parallel planes of the periscope 24 and reaches the analyzer 31.

[0048] Specifically, the light beam emitted by the collimator 11 is first transmitted through the base 23 and then emitted to the CCD camera to obtain a second optical result. Next, the tilt angle (i.e., the incident angle of the light beam) and the directional axis of the optical components can be adjusted, that is, the tilt angle and directional axis of the optical platform 41 can be adjusted, so that the optical result (i.e., the coordinate information of the light spot) obtained by the light beam on the CCD camera is the same. Figure 5 As shown, beam 1 is incident perpendicularly on the base. The position of beam 1 relative to the CCD camera remains unchanged after passing through and not passing through the base. At this time, the light output direction of collimator 11 is perpendicular to the base. Beam 2 is incident obliquely on the base. The position of beam 2 relative to the CCD camera shifts after passing through and not passing through the base. At this time, the light output direction of collimator 11 is not perpendicular to the base. This allows for vertical alignment (in two dimensions) between the optical platform 41 and the CCD camera.

[0049] Then, the direction axis of the optical platform 41 (the direction axis here is the Y-axis) can be adjusted so that the optical platform 41 moves along the Y-axis, so that the light beam emitted by the collimator 11 is reflected by the periscope 24 and emitted to the CCD camera, thereby obtaining the third optical result on the CCD camera. Figure 6 This is a schematic diagram of the optical path of the beam from collimator 11 in periscope 24. (See diagram for example.) Figure 6 As shown, the light beam from the collimator 11 is incident on the periscope 24, and after reflection and refraction by the periscope 24, it exits to the CCD camera. The light exit direction of the collimator 11 is parallel to the light incident direction of the collimator 11.

[0050] According to the principle of optical reflection, when the collimator beam is incident perpendicularly on the base 23, the angle and position of the beam remain unchanged. However, when the collimator beam is incident perpendicularly on the periscope 24, only the X-coordinate of the beam changes, while the Y-coordinate remains unchanged. Therefore, the optical calibration device 1000 described in this application uses the beam from the collimator 11 passing through the base 23 to adjust the pitch (i.e., rotation about the X-axis) and rotation (i.e., rotation about the Y-axis) of the optical platform 41, and uses the beam from the collimator 11 passing through the periscope 24 to adjust the rotation along the beam propagation direction (i.e., rotation about the Z-axis), thereby achieving adjustment of different directional axes (i.e., three-dimensional directions) of the optical platform 41.Figure 7 As shown, point A represents the first optical result, point B represents the initial second optical result, point C represents the adjusted second optical result, and point D represents the adjusted third optical result.

[0051] In other words, by rotating the optical platform 41 around the corresponding X and Y axes, the second optical result can be adjusted until it matches the first optical result. This achieves vertical calibration between the optical platform 41 and the CCD camera by using a light beam passing through the base 23. Furthermore, by rotating the optical platform 41 around the Z axis, the third optical result can be adjusted until it satisfies a preset relationship with the first optical result. This design allows for calibration of the optical platform 41 along three different axes, offering a simple and quick solution.

[0052] See Figure 8 This application also provides a method for calibrating the coordinate system of an optical platform. This method employs the optical calibration apparatus 1000 described in any of the above embodiments.

[0053] The method includes the following steps:

[0054] Step S801: A beam is emitted to the analyzer through a collimator, and the position of the collimator relative to the analyzer is adjusted so that the coordinate system of the collimator coincides with the coordinate system of the analyzer.

[0055] Step S802: Place the calibrator on the optical platform and allow the beam to pass through the calibrator;

[0056] Step S803: Adjust the optical platform according to the optical results of the analyzer so that the coordinate system of the optical platform coincides with the coordinate system of the analyzer;

[0057] Step S810: A beam is emitted from the collimator and directly incident on the analyzer to obtain a first optical result;

[0058] Step S820: A beam is emitted from the collimator and, after being processed by the calibrator, is incident on the analyzer to obtain a second optical result;

[0059] Step S830: Compare the first optical result and the second optical result;

[0060] Step S840: When it is determined that the first optical result and the second optical result are different, the second optical result is adjusted based on the first optical result until the second optical result is the same as the first optical result.

[0061] Furthermore, step S820 may also include obtaining a third optical result.

[0062] The method may further include, after step S840: step S850, when it is determined that the second optical result is the same as the first optical result, determining whether the third optical result satisfies a preset relationship with the first optical result;

[0063] Step S860: When it is determined that the third optical result does not satisfy the preset relationship with the first optical result, the third optical result is adjusted until the preset relationship is satisfied between the third optical result and the first optical result.

[0064] The following will combine Figures 1 to 8 As shown, the method for calibrating the coordinate system of the optical platform is further described.

[0065] In this embodiment, the optical calibration device 1000, in addition to the collimator 11, analyzer 31, and calibrator 21, may also include a first frame 10 and a second frame 20. The collimator 11 is mounted on the first frame 10. The calibrator 21 is mounted on an optical platform 41 within the second frame 20. The first frame 10 has three directional axes, which are respectively used to move the collimator 11 along or around the corresponding X-axis, Y-axis, and Z-axis. The second frame 20 has three directional axes, which are respectively used to move or rotate the optical platform 41 along or around the corresponding X-axis, Y-axis, and Z-axis. Both the three directional axes of the first frame 10 and the three directional axes of the second frame 20 can be configured to be controlled by a motor drive. In other words, the movement (e.g., movement or rotation) of the directional axes can be driven and controlled separately by a motor, allowing the collimator to move along or rotate around the corresponding X, Y, and Z axes. This design achieves precise adjustment with fast and accurate results, thus providing a good guarantee for subsequent automatic calibration operations. In this embodiment, the calibrator 21 is an optical component, which is mounted on an optical platform 41. The optical platform 41 is used to support and position the calibrator 21. Further, the calibrator 21 (i.e., the optical component) includes a base 23 and a periscope 24 mounted on the base.

[0066] Based on the aforementioned optical calibration device, in some embodiments, step S801 may further include: the analyzer 31 moving back and forth along the beam direction to obtain the coordinate information of the corresponding light spots; adjusting the collimator 11 until the two corresponding light spots coincide, so that the coordinate system of the collimator coincides with the coordinate system of the analyzer. Here, moving the analyzer back and forth along the collimating beam direction means moving the analyzer towards or away from the collimator.

[0067] SeeFigure 9 As shown, in some embodiments, step S810 may further include:

[0068] Step S811: By adjusting the three directional axes of the first frame, the collimator is controlled to move along or rotate around the corresponding X-axis, Y-axis, and Z-axis.

[0069] In step S813, a beam is generated and incident perpendicularly onto the analyzer to obtain a first optical result.

[0070] Specifically, in step S811, the direction axis of the first frame is controlled by the motor drive to control the collimator to move along or rotate around the corresponding X-axis, Y-axis, and Z-axis.

[0071] Of course, in other embodiments, the collimator can also be moved along the corresponding X-axis, Y-axis, and Z-axis or rotated around the X-axis, Y-axis, and Z-axis by manually adjusting the knobs of the three directional axes.

[0072] The collimator adjusts its tilt angle (i.e., the incident angle of the beam) and directional axis, and coordinates with the analyzer located near and far of the collimator, to ensure that the optical results (i.e., the coordinate information of the light spot) obtained on the analyzer are the same, thereby completing the vertical calibration operation between the collimator and the analyzer. Thus, the collimator can be configured to generate a beam that is perpendicularly incident on the analyzer. It should be noted that in this embodiment, the analyzer is a CCD camera with a linear guide rail. When the CCD camera moves along the light output direction of the collimator 11 (i.e., the direction closer to or farther from the collimator 11), it coordinates with the optical path position adjustment of the collimator, ensuring that the optical results (i.e., the coordinate information of the light spot) obtained from the receiving plane (or target surface) of the CCD camera are the same when the CCD camera is located near and far of the collimator. During the vertical calibration process between the collimator and the CCD camera, the collimator can be moved a fixed distance along the X-axis or Y-axis, and the CCD camera can be rotated around the Z-axis to complete the calibration of the coordinate system in which the collimator is located.

[0073] Continue reading Figure 8 and combined Figure 10 As shown, in some embodiments, step S820 may further include:

[0074] Step S821: The beam emitted from the collimator is transmitted through the base to the analyzer to obtain a second optical result; and

[0075] Step S823: The beam emitted from the collimator is reflected by the periscope to the analyzer to obtain a third optical result.

[0076] It should be noted that the base has two parallel planes, which are perpendicular to the optical platform plane and are used for transmitting light. The reflector structure (here, a periscope) has two parallel planes, which are perpendicular to the optical platform plane and are used for reflecting light.

[0077] Continue reading Figure 8 As shown, step S830 involves comparing the first optical result and the second optical result.

[0078] The first optical result includes the coordinate information of the first light spot. The second optical result includes the coordinate information of the second light spot. If a third optical result is obtained in step S820, the third optical result includes the coordinate information of the third light spot. The CCD camera can process the coordinate information of these light spots to obtain the corresponding displacement.

[0079] In step S840, the optical platform can be controlled to move along or rotate around the corresponding X-axis or Y-axis by adjusting the orientation axis of the second frame.

[0080] Specifically, the tilt angle (i.e. the incident angle of the beam) and the direction axis of the calibrator can be adjusted, that is, the tilt angle and direction axis of the optical platform can be adjusted so that the optical results (i.e. the coordinate information of the light spot) obtained by the beam on the CCD camera are the same, so as to achieve vertical calibration (two-dimensional direction) between the optical platform and the CCD camera.

[0081] Continue reading Figure 8 In step S850, when it is determined that the second optical result is the same as the first optical result, it is determined whether the third optical result satisfies the preset relationship with the first optical result.

[0082] Step S860: When it is determined that the third optical result does not satisfy the preset relationship with the first optical result, the third optical result is adjusted until the preset relationship is satisfied between the third optical result and the first optical result.

[0083] It should be noted that in step S840, by controlling the optical platform to rotate around the corresponding X and Y axes respectively, the second optical result can be adjusted until it is the same as the first optical result, that is, the vertical alignment between the optical platform and the CCD camera is achieved by using the light beam through the base. Therefore, after executing step S840, in step S850, the direction axis of the optical platform (here, the direction axis is the Y axis) can be adjusted so that the optical platform moves along the Y axis direction, thereby causing the light beam emitted by the collimator to be reflected by the periscope and emitted to the CCD camera, thus obtaining the third optical result on the CCD camera.

[0084] Next, step S860 is executed, that is, when it is determined that the third optical result and the first optical result do not satisfy the preset relationship, the third optical result is adjusted to the second target optical result so that the second target optical result and the first optical result satisfy the preset relationship.

[0085] Specifically, the third optical result is adjusted by rotating the optical platform around the Z-axis until it satisfies a preset relationship with the first optical result. It should be noted that the third optical result includes the coordinate information of the third spot. Assuming the coordinate information of the third spot is (X2, Y2, Z2) and the coordinate information of the first spot is (X0, Y0, Z0), then the coordinates of the third spot and the first spot on the Y and Z axes are the same, i.e., Y2 = Y0, Z2 = Z0. The final difference in coordinates between the third spot and the first spot on the X-axis is equal to the periscope length d, i.e., X2 - X0 = d.

[0086] Thus, by executing steps S801 to S860, the calibration of the three different directional axes of the optical platform can be achieved, which is simple and quick.

[0087] In some embodiments, step S820 may further include: measuring the shortest distances from the collimator to the first limiting surface and the second limiting surface of the optical platform, respectively, to obtain distance information from the collimator to the first limiting surface and from the collimator to the second limiting surface, thereby serving as reference data for the optical component to be tested.

[0088] It should be noted that after performing the optical calibration method, the optical positions of the optical platform and CCD camera are calibrated. Subsequently, during the actual testing of the optical component under test, the component can be placed on the optical platform, and its position is defined by the first and second limiting surfaces of the platform to ensure that the position of the component under test is the same as that of the calibrator. This allows the use of the aforementioned reference data during optical testing, facilitating subsequent data analysis and processing, thereby improving testing efficiency.

[0089] In some embodiments, the method further includes the following steps:

[0090] Calibrate the coordinate system of the collimator so that its coordinate system coincides with that of the analyzer; and / or

[0091] The coordinate system of the calibrator is calibrated so that it coincides with the coordinate system of the analyzer.

[0092] It should be noted that during optical calibration testing, if the collimator is being calibrated, the coordinate system of the collimator needs to be calibrated; if the optical platform is being calibrated, the coordinate system of the optical platform needs to be calibrated.

[0093] When calibrating the coordinate system of the collimator (i.e., X-axis and Y-axis calibration), the adjustment coefficient for the X-axis is calculated as the quotient of the difference in the beam's movement along the X-axis and the collimator's movement distance along the X-axis. Similarly, the adjustment coefficient for the Y-axis is calculated as the quotient of the difference in the beam's movement along the Y-axis and the collimator's movement distance along the Y-axis. The beam's spot is obtained by the beam emitted through the collimator incident on the analyzer.

[0094] Similarly, when calibrating the coordinate system of the optical platform (i.e., X-axis and Y-axis calibration), the adjustment coefficient for the X-axis is calculated as the quotient of the difference in the beam's movement along the X-axis and the distance the optical platform moves along the X-axis. Similarly, the adjustment coefficient for the Y-axis is calculated as the quotient of the difference in the beam's movement along the Y-axis and the distance the optical platform moves along the Y-axis. The beam is obtained by processing the light beam emitted through the collimator and then incident on the analyzer.

[0095] By performing the above steps, the coordinate system can be calibrated.

[0096] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0097] The foregoing has provided a detailed description of an optical calibration device and a method for calibrating the coordinate system of an optical platform, as provided in the embodiments of this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The descriptions of the embodiments above are only for the purpose of helping to understand the technical solutions and core ideas of this application. Those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. An optical calibration device, characterized in that, include: A collimator is used to emit a light beam; An analyzer for receiving and analyzing the light beam emitted from the collimator; as well as A calibrator for calibrating the beam emitted from the collimator; The calibrator is further configured to adjust a second optical result obtained from the analyzer based on a first optical result obtained from the analyzer until the second optical result is the same as the first optical result, thereby calibrating the optical path position of the optical platform and the analyzer. The first optical result is obtained by directly incidenting the beam emitted by the collimator onto the analyzer, and the second optical result is obtained by incidenting the beam emitted by the collimator onto the analyzer after processing by the calibrator. The calibrator is an optical component; the optical component includes a base and a mirror structure disposed on the base; the base has two mutually parallel planes, which are perpendicular to the optical platform plane and are used to transmit light; the mirror structure has two mutually parallel planes, which are perpendicular to the optical platform plane and are used to reflect light. The optical calibration device further includes a first frame on which the collimator is mounted; the optical calibration device further includes a second frame on which an optical platform is provided, the optical platform being used to support and position the calibrator.

2. The optical calibration device according to claim 1, characterized in that, The first frame has three directional axes, which are respectively used to move the collimator along the corresponding X-axis, Y-axis, and Z-axis or rotate it around the corresponding X-axis, Y-axis, and Z-axis.

3. The optical calibration device according to claim 1, characterized in that, The collimator is configured to generate a light beam that is incident perpendicularly on the receiving plane of the analyzer.

4. The optical calibration device according to claim 1 or 3, characterized in that, The analyzer is configured to move in a direction that is close to or away from the collimator.

5. The optical calibration device according to claim 1, characterized in that, The second frame has three directional axes, which are used to move the optical platform along the corresponding X-axis, Y-axis, and Z-axis or rotate it around the corresponding X-axis, Y-axis, and Z-axis.

6. The optical calibration device according to claim 5, characterized in that, The optical platform has a first limiting surface and a second limiting surface, wherein the first limiting surface and the second limiting surface are perpendicular to each other; the first limiting surface and the second limiting surface are used to define the position of the calibrator on the optical platform.

7. The optical calibration device according to claim 1, characterized in that, The calibrator is also used to adjust the third optical result obtained from the analyzer until the third optical result and the first optical result satisfy a preset relationship, wherein the third optical result is obtained by the beam emitted by the collimator being processed by the mirror structure and then incident on the analyzer.

8. A method for calibrating the coordinate system of an optical platform, characterized in that, The method includes: A beam is emitted to the analyzer through a collimator, and the position of the collimator relative to the analyzer is adjusted so that the coordinate system of the collimator coincides with the coordinate system of the analyzer. Place the calibrator on the optical platform and allow the beam to pass through the calibrator; The optical platform is adjusted according to the optical results of the analyzer so that the coordinate system of the optical platform coincides with the coordinate system of the analyzer. A beam is emitted from the collimator and directly incident on the analyzer to obtain the first optical result; A beam is emitted from the collimator and, after being processed by the calibrator, is incident on the analyzer to obtain a second optical result; Compare the first optical result and the second optical result; When it is determined that the first optical result and the second optical result are different, the second optical result is adjusted based on the first optical result until the second optical result is the same as the first optical result; It also includes a first frame on which a collimator is mounted; and a second frame on which an optical platform is provided, the optical platform being used to support and position the calibrator. A light beam is emitted from a collimator and, after being processed by the calibrator, incident on an analyzer to obtain a second optical result. This includes: transmitting the light beam emitted from the collimator through a base to the analyzer to obtain the second optical result, wherein the calibrator is an optical component; the optical component includes a base and a mirror structure disposed on the base; the base has two mutually parallel planes, which are perpendicular to the optical platform plane and are used for transmitting light; the mirror structure has two mutually parallel planes, which are perpendicular to the optical platform plane and are used for reflecting light.

9. The method according to claim 8, characterized in that, The process of emitting a beam from the collimator and directly incident it on the analyzer to obtain a first optical result includes: By adjusting the three directional axes of the first frame, the collimator can be controlled to move along or rotate around the corresponding X, Y, and Z axes. The first frame has three directional axes, which are respectively used to move or rotate the collimator along or around the corresponding X, Y, and Z axes. A light beam is generated and incident perpendicularly on the analyzer to obtain a first optical result.

10. The method according to claim 9, characterized in that, The transmission of the light beam emitted from the collimator to the analyzer through the base includes: controlling the optical platform to move along or rotate around the corresponding X-axis and Y-axis by adjusting the three directional axes of the second frame; the second frame has three directional axes, which are respectively used to move or rotate the optical platform along or around the corresponding X-axis, Y-axis, and Z-axis.

11. The method according to claim 10, characterized in that, The beam emitted from the collimator After being processed by the calibrator, the light is incident on the analyzer to obtain a second optical result, which also includes: The shortest distances from the collimator to the first limiting surface and the second limiting surface of the optical platform are measured respectively to obtain the distance information from the collimator to the first limiting surface and from the collimator to the second limiting surface, which is used as reference data for the optical component under test. The optical platform has a first limiting surface and a second limiting surface, wherein the first limiting surface and the second limiting surface are perpendicular to each other.

12. The method according to claim 8, characterized in that, The step of transmitting a beam to an analyzer via a collimator and adjusting the position of the collimator relative to the analyzer so that the coordinate system of the collimator coincides with the coordinate system of the analyzer includes: moving the analyzer back and forth along the beam direction to obtain the coordinate information of two corresponding light spots; and adjusting the collimator until the two corresponding light spots coincide.

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