Impedance matching network and radio frequency power supply system
By designing an impedance matching network including the first cable, gate module, sampling module and control module, the traditional network's shortcomings in speed and accuracy are solved, and the rapid, convenient and accurate RF power supply and load are achieved. Impedance matching.
Patent Information
- Application Number
- CN202411529160.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-30
- Publication Date
- 2025-02-11
AI Technical Summary
The traditional impedance matching network has insufficient speed and accuracy in regulating speed and accuracy, and cannot meet the current impedance matching requirements of RF power supplies and loads.
An impedance matching network including a first cable, a gate module, a sampling module and a control module is designed. The control module adjusts the duty cycle of the gate module according to the load reactance parameters, and achieves fast, convenient and accurate impedance matching between the RF power supply and the load.
It realizes fast, convenient and accurate impedance matching between RF power supply and load, improves matching speed and accuracy, and meets the current impedance matching requirements.
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Figure CN119420310A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of radio frequency technology, and in particular to an impedance matching network and a radio frequency power supply system. Background Art
[0002] At present, with the development of RF power in practical applications, higher requirements are put forward for impedance matching networks. Traditional impedance matching networks generally use electronic components such as inductors and capacitors, but the adjustment speed of electronic components such as inductors and capacitors is slow, and the adjustment may be inaccurate due to problems of electronic components such as inductors and capacitors themselves, which cannot meet the current impedance matching requirements. Therefore, in the process of RF power supply providing RF energy to the load, how to achieve fast, convenient and accurate impedance matching has become a problem that needs to be considered. Summary of the invention
[0003] The present application provides an impedance matching network and a radio frequency power supply system, which can quickly, conveniently and accurately perform impedance matching between a radio frequency power supply and a load.
[0004] In a first aspect, an impedance matching network is provided, wherein the impedance matching network is used to perform impedance matching between a radio frequency power supply and a load, and the radio frequency power supply is used to be connected to the input end of the load to provide radio frequency energy to the load. The impedance matching network includes a first cable, a gating module, a sampling module, and a control module. The first cable has a first end and a second end opposite to each other, and the first end is used to be connected to the input end of the load. The gating module is connected between the second end and the ground, and the gating module is used to alternately turn on and off the connection between the second end and the ground at a certain duty cycle, and control the second end to be alternately grounded and open. The sampling module is used to sample and obtain the reactance parameters of the load. The control module is connected to both the gating module and the sampling module, and the control module is used to receive the reactance parameters of the load, and control and adjust the duty cycle of the gating module at least according to the reactance parameters of the load.
[0005] In a possible implementation, the control module is also used to obtain a first relationship between the reactance parameters of the load and the duty cycle of the gating module, and based on the first relationship, determine a target duty cycle of the gating module at least according to the reactance parameters of the load, and control and adjust the duty cycle of the gating module to the target duty cycle.
[0006] In a possible implementation manner, the wavelength of the radio frequency energy provided by the radio frequency power supply to the load and transmitted in the first cable is a first wavelength, wherein the length of the first cable is less than 1 / 4 of the first wavelength.
[0007] In a possible implementation manner, the length of the first cable is equal to 1 / 8 of the first wavelength.
[0008] In a possible implementation manner, when the duty cycle of the gating module increases, the reactance value of the first cable increases.
[0009] In a possible implementation, when the gating module is turned on, the second end is connected to the ground, so that the second end is grounded; when the gating module is turned off, the second end is disconnected from the ground, so that the second end is open.
[0010] In a possible implementation, the gating module includes a first switch, the first switch is connected between the second end and ground, wherein the first switch is alternately turned on and off at a certain on-duty ratio, so that the gating module controls the second end to be alternately grounded and open at a certain duty ratio. The control module is used to control and adjust the on-duty ratio of the first switch according to the reactance parameter of the load.
[0011] In a possible implementation manner, a switching frequency of the first switch is greater than a frequency of radio frequency energy provided by the radio frequency power supply to the load.
[0012] In a possible implementation manner, the frequency of the radio frequency energy provided by the radio frequency power supply to the load is between 300 MHz and 300 GHz.
[0013] In a second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system comprising a radio frequency power supply and an impedance matching network. The impedance matching network is used to perform impedance matching between the radio frequency power supply and the load, and the radio frequency power supply is used to connect to the input end of the load to provide radio frequency energy to the load. Wherein, the impedance matching network comprises a first cable, a gating module, a sampling module and a control module. The first cable has a first end and a second end opposite to each other, and the first end is used to connect to the input end of the load. The gating module is connected between the second end and the ground, and the gating module is used to alternately conduct and disconnect the connection between the second end and the ground at a certain duty cycle, and control the second end to alternately connect to the ground and open the circuit. The sampling module is used to sample and obtain the reactance parameters of the load. The control module is connected to both the gating module and the sampling module, and the control module is used to receive the reactance parameters of the load, and at least control and adjust the duty cycle of the gating module according to the reactance parameters of the load.
[0014] The impedance matching network and RF power supply system of the present application perform impedance matching between the RF power supply and the load by setting a first cable, have a simple structure, and control and adjust the duty cycle of the gating module at least according to the reactance parameters of the load. The operation is convenient and the impedance matching speed is also faster. In addition, due to the different reactance parameters of the first cable when the second end is grounded and open, the duty cycle of the gating module can correspond to the current reactance parameters of the load, and the required reactance parameters can be accurately provided, so that the RF power supply and the load can be impedance matched quickly, conveniently and accurately. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.
[0016] Figure 1 is a schematic diagram of an impedance matching network in an embodiment of the present application.
[0017] Figure 2 Schematic diagram of reactance distribution of a first cable in an embodiment of the present application.
[0018] Figure 3 FIG. 4 is a schematic diagram of an impedance matching network in another embodiment of the present application.
[0019] Figure 4 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application.
[0020] Explanation of the accompanying drawings: 1000, RF power supply system, 10, impedance matching network, CC1, first cable, E1, first end, E2, second end, GND, ground, 100, enabling module, S1, first switch, 200, sampling module, 300, control module, RF, RF power supply, RFP, RF energy, RL, load, In, input end. DETAILED DESCRIPTION
[0021] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0022] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0023] In the following, the terms "first", "second", etc. are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "plurality" means two or more.
[0024] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.
[0025] See also Figure 1 , Figure 1 FIG. 1 is a schematic diagram of an impedance matching network in an embodiment of the present application. Figure 1 As shown, the present application provides an impedance matching network 10, which is used to perform impedance matching between a radio frequency power supply RF and a load RL, and the radio frequency power supply RF is used to be connected to the input terminal In of the load RL to provide radio frequency energy RFP to the load RL. Among them, the impedance matching network 10 includes a first cable CC1, a gating module 100, a sampling module 200 and a control module 300. The first cable CC1 has a first end E1 and a second end E2 relative to each other, and the first end E1 is used to be connected to the input terminal In of the load RL. The gating module 100 is connected between the second end E2 and the ground GND, and the gating module 100 is used to alternately turn on and off the connection between the second end E2 and the ground GND at a certain duty cycle, and control the second end E2 to be alternately grounded and open. The sampling module 200 is used to sample and obtain the reactance parameters of the load RL. The control module 300 is connected to both the gating module 100 and the sampling module 200 . The control module 300 is used to receive the reactance parameter of the load RL and control and adjust the duty cycle of the gating module 100 at least according to the reactance parameter of the load RL.
[0026] Therefore, the impedance matching network 10 in the present application performs impedance matching between the RF power supply RF and the load RL by setting the first cable CC1. The structure is simple, and the duty cycle of the selection module 100 is controlled and adjusted at least according to the reactance parameters of the load RL. The operation is convenient and the impedance matching speed is also faster. Since the first cable CC1 has different reactance parameters when the second end E2 is grounded and open, the duty cycle of the selection module 100 can correspond to the current reactance parameters of the load RL, and can accurately provide the required reactance parameters, so that the RF power supply RF and the load RL can be impedance matched quickly, conveniently and accurately.
[0027] In one or more embodiments, the load RL may include an input terminal In and a ground terminal, wherein the input terminal In of the load RL is used to input radio frequency energy RFP, and the ground terminal of the load RL is used for grounding. The sampling module 200 may be connected between the input terminal In of the load RL and the ground terminal of the load RL to sample and obtain the reactance parameters of the load RL.
[0028] Furthermore, the sampling module 200 can obtain parameters such as voltage and current at both ends of the load RL by sampling to obtain the reactance parameters of the load RL.
[0029] like Figure 1 As shown, the control module 300 is also used to obtain a first relationship between the reactance parameters of the load RL and the duty cycle of the gating module 100, and based on the first relationship, determine the target duty cycle of the gating module 100 at least according to the reactance parameters of the load RL, and control and adjust the duty cycle of the gating module 100 to the target duty cycle.
[0030] Thus, in the impedance matching network 10 in the present application, the control module 300 can determine the target duty cycle of the gating module 100 based on the first relationship, at least according to the reactance parameters of the load RL, by first obtaining the first relationship between the reactance parameters of the load RL and the duty cycle of the gating module 100, and control and adjust the duty cycle of the gating module 100 to the target duty cycle, thereby completing the impedance matching at the fastest speed.
[0031] The first relationship may be obtained in advance, for example, may be obtained in advance based on experiments, or may be obtained in advance based on relevant parameter calculations.
[0032] Specifically, the reactance value of the first cable CC1 and the duty cycle of the gating module 100 satisfy Xc=D×j×Z0×tan(β×d)+(1-D)×j×Z0 / tan(β×d), that is, Xc=j×Z0×tan(β×d)+D×j×Z0×[tan 2(β×d)-1] / tan(β×d), where Xc is the reactance value of the first cable CC1, D is the duty cycle of the gating module 100, j is an imaginary unit, Z0 is the characteristic impedance value of the RF power supply RF and the load RL, which can generally be set to a fixed 50Ω, 75Ω, etc., tan is a tangent function, β is the phase constant of the RF energy RFP in the first cable CC1, and β=2π / λ, where π is the pi, λ is the wavelength of the RF energy RFP provided by the RF power supply RF to the load RL transmitted in the first cable CC1, and d is the length of the first cable CC1. When impedance matching, the reactance value of the first cable CC1 is conjugate with the reactance parameter of the load RL, then the first relationship between the reactance parameter of the load RL and the duty cycle of the gating module 100 can be Xl=-j×Z0×tan(β×d)-D×j×Z0×[tan 2 (β×d)-1] / tan(β×d), where Xl is the reactance parameter of the load RL.
[0033] In some embodiments, the characteristic impedance value of the RF power supply RF and the load RL, the phase constant of the RF energy RFP in the first cable CC1 will not change, and parameters such as the imaginary unit and the length of the first cable CC1 can be regarded as constants. Then, the control module 300 can determine the target duty cycle of the selection module 100 based on the first relationship and the reactance parameters of the load RL.
[0034] In some embodiments, the phase constant of the RF energy RFP in the first cable CC1 may change due to the change of the wavelength of the RF energy RFP provided by the RF power supply RF to the load RL transmitted in the first cable CC1, and the wavelength of the RF energy RFP provided by the RF power supply RF to the load RL transmitted in the first cable CC1 depends on the frequency of the RF energy RFP. Therefore, when the frequency of the RF energy RFP changes, the control module 300 can determine the target duty cycle of the gating module 100 based on the first relationship according to the reactance parameters of the load RL and the phase constant of the RF energy RFP in the first cable CC1. Further, the control module 300 can be connected to the RF power supply RF to control the RF power supply RF to output or not output the RF energy RFP, and when controlling the RF power supply RF to output the RF energy RFP, control the phase constant of the RF energy RFP output by the RF power supply RF in the first cable CC1 to determine the target duty cycle of the gating module 100 according to the reactance parameters of the load RL and the phase constant of the RF energy RFP in the first cable CC1. In particular, the control module 300 may control the phase constant of the RF energy RFP output by the RF power source RF in the first cable CC1 by controlling the frequency of the RF energy RFP output by the RF power source RF.
[0035] In one or more embodiments, the reactance parameter of the load RL includes a reactance value of the load RL.
[0036] Please also read Figure 2 , Figure 2 FIG. 1 is a schematic diagram of the reactance distribution of the first cable in one embodiment of the present application. Figure 2 As shown, the horizontal axis d is the length of the first cable CC1, the vertical axis X is the reactance value of the first cable CC1, λ is the wavelength of the RF energy RFP provided by the RF power supply RF to the load RL transmitted in the first cable CC1, corresponding to the first cable CC1, that is, the first wavelength, and the solid line represents the waveform relationship between the length of the first cable CC1 and the reactance value of the first cable CC1 when the second end E2 is grounded, and the dotted line represents the waveform relationship between the length of the first cable CC1 and the reactance value of the first cable CC1 when the second end E2 is open. Then Figure 2 As shown, when the second end E2 is grounded, the length of the first cable CC1 is in the range of 0-λ / 4, and as the length of the first cable CC1 increases, the reactance value of the first cable CC1 continues to rise from zero to infinity, and the length of the first cable CC1 is in the range of λ / 4-λ / 2, and as the length of the first cable CC1 increases, the reactance value of the first cable CC1 continues to rise from infinitesimal to zero; when the second end E2 is open, the length of the first cable CC1 is in the range of 0-λ / 2, and as the length of the first cable CC1 increases, the reactance value of the first cable CC1 continues to rise from negative infinity to infinity.
[0037] It should be noted that, when the second end E2 is grounded, the length of the first cable CC1 is in the range of 0-λ / 4, and the reactance value is positive, indicating that the reactance property of the reactance value of the first cable CC1 is inductive, and the length of the first cable CC1 is in the range of λ / 4-λ / 2, and the reactance value is negative, indicating that the reactance property of the reactance value of the first cable CC1 is capacitive; when the second end E2 is open, the length of the first cable CC1 is in the range of 0-λ / 4, and the reactance value is negative, indicating that the reactance property of the reactance value of the first cable CC1 is capacitive, and the length of the first cable CC1 is in the range of λ / 4-λ / 2, and the reactance value is positive, indicating that the reactance property of the reactance value of the first cable CC1 is inductive.
[0038] like Figure 1 , Figure 2 As shown, the wavelength of the radio frequency energy RFP provided by the radio frequency power source RF to the load RL transmitted in the first cable CC1 is the first wavelength. The length of the first cable CC1 is less than 1 / 4 of the first wavelength.
[0039] Therefore, in order for the impedance matching network 10 in the present application to adaptively provide a capacitive or inductive reactance value according to the reactance parameters of the load RL, the length of the first cable CC1 should be less than 1 / 4 of the first wavelength.
[0040] Specifically, if the first cable CC1 can adaptively provide a capacitive or inductive reactance value, then tan 2 (β×d)>D / (1-D), the duty cycle of the gating module 100 can vary between 0-1, then D / (1-D)<1, that is, tan 2 (β×d)<1, and then β×d<π / 4. Since β=2π / λ, d<4 / λ, that is, the length of the first cable CC1 is less than 1 / 4 of the first wavelength.
[0041] Further, the length of the first cable CC1 is equal to 1 / 8 of the first wavelength.
[0042] Therefore, in actual applications, the impedance matching network 10 in the present application has a small change in the reactance parameters of the load RL. By configuring the length of the first cable CC1 to be equal to 1 / 8 of the first wavelength, impedance matching can be achieved, and the negative impact of the rapid increase in the inductive or capacitive reactance value of the first cable CC1 on the impedance matching can be avoided. In addition, the total reflection of the radio frequency energy RFP caused by the extreme impedance mismatch in the impedance matching process can be avoided, which may cause damage to the radio frequency power supply RF.
[0043] In one or more embodiments, when the length of the first cable CC1 is equal to 1 / 8 of the first wavelength, the impedance matching network may further include a second cable and a third cable, both of which may be selectively connected to the input terminal In of the load RL, and when the second cable is connected to the input terminal In of the load RL, the third cable is disconnected from the input terminal In of the load RL, and when the third cable is connected to the input terminal In of the load RL, the second cable is disconnected from the input terminal In of the load RL. The length of the second cable is equal to 1 / 16 of the first wavelength, and the length of the third cable is equal to 1 / 4 of the first wavelength.
[0044] Therefore, when the required reactance value is relatively large, the second cable or the third cable can be used in combination to further speed up the impedance matching.
[0045] In one or more embodiments, when the second cable or the third cable is connected to the input terminal In of the load RL, the reactance value of the first cable CC1 may be adjusted to zero or may not be adjusted to zero, and the present application is not limited thereto.
[0046] like Figure 1 , Figure 2 As shown, when the duty cycle of the gating module 100 increases, the reactance value of the first cable CC1 increases.
[0047] Therefore, in the impedance matching network 10 of the present application, the reactance value of the first cable CC1 and the duty cycle of the gating module 100 satisfy Xc=j×Z0×tan(β×d)+D×j×Z0×[tan 2 (β×d)-1] / tan(β×d), when D increases, Xc increases, that is, when the duty cycle of the gating module 100 increases, the reactance value of the first cable CC1 can be increased.
[0048] In particular, the on-duty ratio of the gating module 100 can vary between 0-1, that is, the proportion of time that the gating module 100 conducts the connection between the second terminal E2 and the ground GND varies between 0-1.
[0049] It should be noted that the increase in the reactance value of the first cable CC1 is described from the perspective of a specific value. If described from the perspective of reactance properties, if the length of the first cable CC1 is equal to 1 / 4 of the first wavelength, when the duty cycle of the gating module 100 increases, that is, when the duty cycle of the gating module 100 changes from 0-1, the reactance value of the first cable CC1 is capacitive, and the capacitive reactance value continuously decreases from infinity to zero, and then the reactance value of the first cable CC1 is inductive, and the inductive reactance value increases from zero to infinity.
[0050] like Figure 1 , Figure 2 As shown, when the gating module 100 is turned on, the second end E2 is connected to the ground GND, so that the second end E2 is grounded; when the gating module 100 is turned off, the second end E2 is disconnected from the ground GND, so that the second end E2 is open.
[0051] Therefore, the impedance matching network 10 in the present application is configured to connect the second end E2 to the ground GND so that the second end E2 is grounded, and is configured to disconnect the second end E2 from the ground GND so that the second end E2 is open.
[0052] See also Figure 3 , Figure 3 FIG. 1 is a schematic diagram of an impedance matching network in another embodiment of the present application. Figure 3 As shown, the gating module 100 includes a first switch S1, which is connected between the second terminal E2 and the ground GND, wherein the first switch S1 is alternately turned on and off at a certain conduction duty cycle, so that the gating module 100 controls the second terminal E2 to be alternately grounded and open at a certain duty cycle. The control module 300 is used to control and adjust the conduction duty cycle of the first switch S1 according to the reactance parameter of the load RL.
[0053] Thus, the impedance matching network 10 in the present application sets the first switch S1 to be alternately turned on and off with a certain on-duty cycle, so that the selection module 100 controls the second end E2 to be alternately grounded and open with a certain duty cycle, so that the first cable CC1 alternately provides two reactance values, and the reactance value jointly represented by the two reactance values can perform impedance matching between the radio frequency power supply RF and the load RL, thereby greatly simplifying the structure of the impedance matching network 10 and saving the use of electronic components.
[0054] Furthermore, the switching frequency of the first switch S1 is greater than the frequency of the radio frequency energy RFP. For example, the switching frequency of the first switch S1 is twice the frequency of the radio frequency energy RFP.
[0055] Therefore, the impedance matching network 10 in the present application weakens the influence of reactance change caused by the first cable CC1 alternately providing two reactance values by setting the switching frequency of the first switch S1 to be greater than the frequency of the radio frequency energy RFP.
[0056] In one or more embodiments, the frequency of the radio frequency energy RFP provided by the radio frequency power source RF to the load RL is between 300 MHz and 300 GHz.
[0057] Thus, in the impedance matching network 10 of the present application, the wavelength of the RF energy RFP provided by the RF power supply RF to the load RL transmitted in the first cable CC1 is related to the frequency of the RF energy RFP. When the frequency of the RF energy RFP provided by the RF power supply RF to the load RL is between 300 MHz and 300 GHz, that is, when the RF energy RFP provided by the RF power supply RF to the load RL is microwave power energy, the first wavelength is shorter and the length of the first cable CC1 is also shorter, thereby saving space inside the RF power supply RF.
[0058] In one or more embodiments, the frequency of the radio frequency energy RFP provided by the radio frequency power source RF to the load RL is between 300 kHz and 300 MHz.
[0059] Therefore, in the impedance matching network 10 of the present application, when the frequency of the RF energy RFP provided by the RF power supply RF to the load RL is between 300kHz and 300MHz, although the first wavelength is longer and the length of the first cable CC1 is also longer, it is more suitable for a wider range of loads RL that require the frequency of the RF energy RFP to be between 300kHz and 300MHz.
[0060] In one or more embodiments, the first cable CC1 of the present application may be a coaxial cable.
[0061] In one or more embodiments, the control module 300 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).
[0062] The impedance matching network 10 of the present application, through the above structure, performs impedance matching between the radio frequency power supply RF and the load RL by setting cables such as the first cable CC1. The structure is simple, and the duty cycle of the selection module 100 is controlled and adjusted at least according to the reactance parameters of the load RL to achieve impedance matching. While the operation is convenient, the impedance matching speed is also faster. The duty cycle of the selection module 100 corresponds to the corresponding reactance value, and can accurately provide the required reactance value, so that the radio frequency power supply RF and the load RL can be impedance matched quickly, conveniently and accurately.
[0063] See also Figure 4 , Figure 4 FIG. 1 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application. Figure 4 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes a radio frequency power supply RF and an impedance matching network 10 in any of the aforementioned embodiments.
[0064] Please refer again Figure 1 .like Figure 1As shown, the impedance matching network 10 is used to perform impedance matching between the radio frequency power supply RF and the load RL, and the radio frequency power supply RF is used to be connected to the input terminal In of the load RL to provide radio frequency energy RFP to the load RL. Among them, the impedance matching network 10 includes a first cable CC1, a gating module 100, a sampling module 200 and a control module 300. The first cable CC1 has a first end E1 and a second end E2 opposite to each other, and the first end E1 is used to be connected to the input terminal In of the load RL. The gating module 100 is connected between the second end E2 and the ground GND, and the gating module 100 is used to alternately conduct and disconnect the connection between the second end E2 and the ground GND at a certain duty cycle, and control the second end E2 to be alternately grounded and open. The sampling module 200 is used to sample and obtain the reactance parameters of the load RL. The control module 300 is connected to both the gating module 100 and the sampling module 200, and the control module 300 is used to receive the reactance parameters of the load RL, and at least control and adjust the duty cycle of the gating module 100 according to the reactance parameters of the load RL.
[0065] The more specific structure of the impedance matching network 10 can refer to the relevant content of the impedance matching network 10 in any of the aforementioned embodiments, which will not be repeated here.
[0066] like Figure 4 As shown, the radio frequency power source RF can be used to connect with the load RL to provide radio frequency energy RFP to the load RL.
[0067] The impedance matching network 10 and the RF power supply system 1000 of the present application perform impedance matching between the RF power supply RF and the load RL by setting cables such as the first cable CC1. The structure is simple, and the duty cycle of the selection module 100 is controlled and adjusted according to the reactance parameters of the load RL to achieve impedance matching. The operation is convenient and the impedance matching speed is also faster. The duty cycle of the selection module 100 corresponds to the corresponding reactance value, and the required reactance value can be accurately provided, so that the RF power supply RF and the load RL can be impedance matched quickly, conveniently and accurately.
[0068] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.
Claims
1. An impedance matching network, characterized in that: Used to perform impedance matching between a radio frequency power source and a load, wherein the radio frequency power source is used to be connected to an input terminal of the load to provide radio frequency energy to the load; Wherein, the impedance matching network comprises: A first cable having a first end and a second end opposite to each other, wherein the first end is used to be connected to an input end of the load; A gating module connected between the second end and the ground, the gating module is used to alternately turn on and off the connection between the second end and the ground at a certain duty cycle, and control the second end to be alternately grounded and open; A sampling module, used for sampling to obtain the reactance parameters of the load; A control module is connected to both the gating module and the sampling module, and is used to receive the reactance parameter of the load and control and adjust the duty cycle of the gating module at least according to the reactance parameter of the load.
2. The impedance matching network according to claim 1, characterized in that: The control module is also used to obtain a first relationship between the reactance parameters of the load and the duty cycle of the gating module, and based on the first relationship, determine a target duty cycle of the gating module at least according to the reactance parameters of the load, and control and adjust the duty cycle of the gating module to the target duty cycle.
3. The impedance matching network according to claim 1, characterized in that: The wavelength of the radio frequency energy provided by the radio frequency power supply to the load and transmitted in the first cable is a first wavelength; Wherein, the length of the first cable is less than 1 / 4 of the first wavelength.
4. The impedance matching network according to claim 3, characterized in that: The length of the first cable is equal to 1 / 8 of the first wavelength.
5. The impedance matching network according to claim 3, characterized in that: When the duty cycle of the gating module increases, the reactance value of the first cable increases.
6. The impedance matching network according to claim 1, characterized in that: When the gating module is turned on, the second end is connected to the ground, so that the second end is grounded; when the gating module is turned off, the second end is disconnected from the ground, so that the second end is open.
7. The impedance matching network according to claim 6, characterized in that: The gating module comprises a first switch, wherein the first switch is connected between the second end and ground, wherein the first switch is alternately turned on and off at a certain conduction duty cycle, so that the gating module controls the second end to be alternately grounded and open at a certain duty cycle; The control module is used to control and adjust the on-duty cycle of the first switch according to the reactance parameter of the load.
8. The impedance matching network according to claim 7, characterized in that: A switching frequency of the first switch is greater than a frequency of radio frequency energy provided by the radio frequency power source to the load.
9. The impedance matching network according to claim 1, characterized in that: The frequency of the radio frequency energy provided by the radio frequency power supply to the load is between 300 MHz and 300 GHz.
10. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply and an impedance matching network as claimed in any one of claims 1 to 9.