Planar motor with core structure

Abstract

This invention relates to the field of motor technology, providing a planar motor with an iron core structure, including a stator component, a mover component, and an air-bearing component. The stator component includes a permanent magnet array and a fixed plate, with the fixed plate disposed on one side of the permanent magnet array. The surface of the fixed plate away from the permanent magnet array forms an air-bearing surface. The mover component is movably disposed on one side of the fixed plate along the air-bearing surface, and includes a coil and an iron core, with the coil sleeved outside the iron core. The air-bearing component is fixed relative to the mover component, providing air-bearing support for the mover component. This configuration provides a magnetic path through the iron core, increases the magnetic flux between the permanent magnets and the coil, enhances the electromagnetic coupling strength, improves the thrust performance of the planar motor, and helps reduce the number of permanent magnets, thus lowering costs. Furthermore, the magnetic attraction between the iron core and the permanent magnet array provides preload force for the air-bearing component, avoiding the need for a separate preload component for the air-bearing component and improving the compactness of the planar motor.

Description

Technical Field

[0001] This invention relates to the field of motor technology, and more particularly to a planar motor with an iron core structure. Background Technology

[0002] Planar motors, also known as two-dimensional linear motors or XY platforms, are electric motor systems capable of providing precise motion control on a plane. Thrust performance and compactness are two crucial characteristics of planar motors, directly impacting their application range and efficiency. Thrust performance refers to the linear force a planar motor can generate, while compactness refers to the overall size of the motor relative to its output capacity.

[0003] In related technologies, planar motors include permanent magnet units and coil units. When improving the thrust performance and compactness of planar motors, the main improvement is achieved by modifying the structure of the permanent magnet unit, such as increasing the number of permanent magnets and arranging them in a clever way. Although this can improve the magnetic field strength of the permanent magnet unit to a certain extent and improve the performance of the planar motor to a certain extent, increasing the number of permanent magnets will inevitably increase the cost of the planar motor, and the degree of improvement in the performance of the planar motor is limited.

[0004] Therefore, how to solve the problem of high cost in improving the thrust performance and compactness of planar motors in related technologies has become an important technical problem to be solved by those skilled in the art. Summary of the Invention

[0005] This invention provides a planar motor with an iron core structure to solve the problem of high cost in related technologies when improving the thrust performance and compactness of planar motors.

[0006] This invention provides a planar motor with an iron core structure, comprising:

[0007] The stator component includes a fixed permanent magnet array and a fixing plate. The fixing plate is disposed on one side of the plane where the permanent magnet array is located, and the surface of the fixing plate away from the permanent magnet array forms an air levitation surface.

[0008] A moving part is movably disposed along the air buoyancy surface on the side of the fixed plate away from the permanent magnet array. The moving part includes a coil and an iron core, with the coil sleeved on the outside of the iron core.

[0009] An air-floating component is fixed relative to the moving part, and the air-floating component is adapted to cooperate with the air-floating surface to provide air-floating support for the moving part.

[0010] According to the present invention, a planar motor with an iron core structure is provided, wherein the air flotation component includes a plurality of air flotation blocks, and the plurality of air flotation blocks are arranged around the periphery of the moving part along the circumference of the moving part.

[0011] According to the present invention, a planar motor with an iron core structure is provided, wherein the outer contour shape of the cross-section of the moving part is rectangular, and the cross-section of the moving part is parallel to the air buoyancy surface;

[0012] The moving parts are provided in four parts, which enclose a square and are distributed in a rotationally symmetrical manner about the center of the square.

[0013] According to the present invention, a planar motor with an iron core structure is provided, each of the moving parts comprising:

[0014] At least two iron cores are provided, each iron core being spaced apart along the length of the coil, and each coil being sleeved on the outside of each iron core.

[0015] According to the present invention, a planar motor with an iron core structure is provided, wherein the moving part further includes:

[0016] The separator is made of a non-magnetic material. A separator is provided between any two adjacent iron cores, and the separator is fixedly connected to the iron core.

[0017] And / or, a first cooling mechanism, wherein one first cooling mechanism is provided between any two adjacent iron cores, and the first cooling mechanism is adapted to exchange heat with the iron core.

[0018] According to the present invention, a planar motor with an iron core structure is provided, wherein the iron core comprises:

[0019] basal part;

[0020] At least two iron core portions are provided, each of which is spaced apart along the width direction of the coil and extends along the length direction of the coil. Each of the iron core portions is fixedly connected to the base portion, and the coil is sleeved on the outside of each of the iron core portions.

[0021] According to the present invention, a planar motor with an iron core structure is provided, wherein at least two coils are sleeved on the outside of each iron core portion, and the coils on two adjacent iron core portions are arranged side by side or partially overlapped;

[0022] The moving part also includes:

[0023] A second cooling mechanism is provided between any two adjacent coils on each of the iron core sections, and the second cooling mechanism is adapted to exchange heat with the coils.

[0024] According to the present invention, a planar motor with an iron core structure is provided, wherein the permanent magnet array comprises:

[0025] The first permanent magnet is provided in multiple groups, each group of the first permanent magnet is spaced apart along a first direction, and the multiple groups of the first permanent magnet are spaced apart along a second direction. The first direction and the second direction are perpendicular, and both the first direction and the second direction are parallel to the air buoyancy surface. The length direction of the moving part is parallel to the first direction or the second direction.

[0026] The second permanent magnet is provided between two adjacent groups of the first permanent magnets. Each group of the second permanent magnets is spaced apart along the first direction. Any adjacent group of the first permanent magnets and group of the second permanent magnets are arranged alternately. The magnetization direction of the second permanent magnet is opposite to that of the first permanent magnet. Both the magnetization direction of the first permanent magnet and the magnetization direction of the second permanent magnet are perpendicular to the air buoyancy surface.

[0027] According to the present invention, a planar motor with an iron core structure is provided, wherein the permanent magnet array further includes:

[0028] A third permanent magnet is disposed between any two adjacent first and second permanent magnets. The magnetization direction of the third permanent magnet is parallel to the air buoyancy surface, the magnetization direction of the first permanent magnet points to the air buoyancy surface, and the magnetization direction of the third permanent magnet points to the first permanent magnet adjacent to it.

[0029] According to the present invention, a planar motor with an iron core structure is provided, wherein the cross-sectional shape of the first permanent magnet is the same as that of the second permanent magnet, and the cross-sections of the first permanent magnet and the second permanent magnet are both parallel to the air buoyancy surface, and the cross-sectional shape of the first permanent magnet is circular or square.

[0030] According to the present invention, a planar motor with an iron core structure is provided, along the width direction of the moving part, the sum of the number of the first permanent magnet and the second permanent magnet corresponding to each iron core is a first value, the number of the iron core parts provided on each iron core is a second value, the second value is a multiple of 3, and the absolute value of the difference between the first value and the second value is 1 or 2.

[0031] The planar motor with an iron core structure provided by this invention includes a stator component, a mover component, and an air-bearing component. The stator component includes a permanent magnet array and a fixed plate. The permanent magnet array and the fixed plate are fixed in position, and the fixed plate is disposed on one side of the plane where the permanent magnet array is located. The surface of the fixed plate away from the permanent magnet array forms an air-bearing surface. The mover component is disposed on the side of the fixed plate away from the permanent magnet array, and the mover component can move along the air-bearing surface. The air-bearing component is fixed relative to the mover component and can cooperate with the air-bearing surface to provide air-bearing support for the mover component. The mover component includes a coil and an iron core, with the coil sleeved outside the iron core. With this configuration, when the coil is energized, an Ampere force parallel to the air-bearing surface is generated in the magnetic field generated by the permanent magnet array. The Ampere force can cause the mover component to move relative to the stator component along the air-bearing surface, thereby realizing the output of the planar motor. The iron core provides a magnetic path, increases the magnetic flux between the permanent magnet array and the coil, enhances the electromagnetic coupling strength, and improves the thrust performance of the planar motor. This also helps reduce the number of permanent magnets used in the permanent magnet array, lowering costs. Furthermore, the magnetic attraction between the iron core and the permanent magnet array provides preload force for the air levitation component, eliminating the need for a separate preload component, thus reducing costs and saving space. This improves the compactness of the planar motor and solves the high cost problem associated with improving the thrust performance and compactness of planar motors in related technologies. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of the planar motor with an iron core structure provided by the present invention (only part of the stator housing is shown, the fixing plate and the mover housing are not shown).

[0034] Figure 2 This is a schematic diagram showing the relative positions of the four moving parts provided by the present invention.

[0035] Figure 3 This is a schematic diagram of the planar motor with an iron core structure when the moving part of the present invention has two iron cores.

[0036] Figure 4 This is a schematic diagram of the cross-sectional position of the planar motor with an iron core structure provided by the present invention.

[0037] Figure 5 The permanent magnet array provided by this invention is in Figure 4The diagram shows the relative positions of the first and second permanent magnets with respect to the iron core at the cross-sectional location shown.

[0038] Figure 6 This is a schematic diagram of the structure provided by the present invention, showing coils arranged side by side on two adjacent iron core sections.

[0039] Figure 7 This is a schematic diagram of the structure provided by the present invention, showing the overlapping arrangement of coil portions on two adjacent iron core sections.

[0040] Figure 8 This is a schematic diagram showing the relative angle between the permanent magnet array and the moving part provided by the present invention.

[0041] Figure 9 This is a schematic diagram of the permanent magnet array provided by the present invention. Figure 1 .

[0042] Figure 10 This is a schematic diagram of the permanent magnet array provided by the present invention. Figure 2 .

[0043] Figure 11 This is a schematic diagram of the permanent magnet array provided by the present invention. Figure 3 .

[0044] Figure label:

[0045] 1. Permanent magnet array; 2. Mover component; 3. Coil; 4. Iron core; 5. Air buoy component; 6. Air buoy block; 7. Base part; 8. Iron core part; 9. First permanent magnet; 10. Second permanent magnet; 11. Third permanent magnet; 12. Stator housing; 13. First mover component; 14. Second mover component; 15. Third mover component; 16. Fourth mover component. Detailed Implementation

[0046] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0047] The following is combined with Figures 1 to 11 The present invention describes a planar motor with an iron core structure.

[0048] like Figures 1 to 11 As shown, the planar motor with an iron core structure provided in this embodiment of the invention includes a stator component, a mover component 2, and an air-bearing component 5.

[0049] Specifically, the stator component includes a permanent magnet array 1 and a fixing plate. The permanent magnet array 1 and the fixing plate are fixed in position. The fixing plate is located on one side of the plane where the permanent magnet array 1 is located, and the surface of the fixing plate away from the permanent magnet array 1 forms an air levitation surface. The flatness requirement for the surface of the fixing plate away from the permanent magnet array 1 is high. Specifically, a thin stainless steel plate with high flatness can be selected as the fixing plate.

[0050] The moving part 2 is located on the side of the fixed plate away from the permanent magnet array 1, and the moving part 2 can move along the air buoyancy surface. The air buoyancy part 5 is fixed relative to the moving part 2, and the air buoyancy part 5 can cooperate with the air buoyancy surface to provide air buoyancy support for the moving part 2.

[0051] The moving part 2 includes a coil 3 and an iron core 4, with the coil 3 sleeved on the outside of the iron core 4. The iron core 4 is made of soft magnetic material and is easily magnetized by the magnetic field generated by the coil 3, thereby generating a magnetic attraction between the iron core 4 and the permanent magnet array 1.

[0052] The stator component serves as the excitation source for the planar motor. The coil 3 of the mover component 2 forms an electromagnetic coupling with the stator excitation source, constituting the core electromagnetic structure of the planar motor. The thrust of the planar motor is mainly generated by the electromagnetic coupling between the coil 3 of the mover component 2 and the permanent magnet array 1 of the stator component.

[0053] With this configuration, when coil 3 is energized, an Ampere force parallel to the air-float is generated within the magnetic field produced by the permanent magnet array 1. This Ampere force allows the rotor component 2 to move relative to the stator component along the air-float, thereby achieving the output of the planar motor. The iron core 4 provides a magnetic path, increases the magnetic flux between the permanent magnet array 1 and coil 3, enhances the electromagnetic coupling strength, improves the thrust performance of the planar motor, and helps reduce the number of permanent magnets used in the permanent magnet array 1, thus lowering costs. Moreover, since the air-float component 5 requires preload force to maintain stable air-float, existing technologies typically require an additional preload component between the air-float component 5 and the air-float surface. In this embodiment, the iron core 4 and the permanent magnet array 1 have magnetic attraction, which can provide preload force for the air-float component 5, avoiding the need for a separate preload component, reducing costs, and avoiding the space required by the preload component. This helps improve the compactness of the planar motor and solves the problem of high cost in improving the thrust performance and compactness of planar motors in related technologies.

[0054] It should be noted that both the stator component and the mover component 2 have outer shells. The outer shell of the stator component is the stator outer shell 12, which can be formed by enclosing the stator outer shell 12 with the fixed plate to create a cavity structure. The permanent magnet array 1 is placed inside the cavity, and the bottom wall of the stator outer shell 12 provides fixed support for the permanent magnet array 1. The stator outer shell 12 can be made of soft magnetic materials such as low-carbon steel, which can ensure the strength of the stator outer shell 12 and improve the magnetic performance of the stator component. The outer shell of the mover component 2 is the mover outer shell. The coil 3, iron core 4, and air levitation component 5 are all disposed inside the mover outer shell. A clearance hole is provided on the mover outer shell to allow the air levitation component 5 to interact with the air levitation surface. To illustrate the structure of the permanent magnet array 1 and the cooperation between the stator component and the mover component 2, the complete structure of the mover outer shell and the stator outer shell 12 is not shown in any of the accompanying drawings of this invention.

[0055] It should be noted that in this embodiment of the invention, the position of the stator component is fixed, and the mover component 2 can be positioned above the stator component. Since there is a magnetic attraction between the iron core 4 of the mover component 2 and the permanent magnet array 1 of the stator component, this magnetic attraction can balance the gravity of the mover component 2; therefore, the mover component 2 can also be positioned below the stator component. The planar motor provided in this embodiment of the invention is applicable to different application scenarios and has strong adaptability.

[0056] In this embodiment of the invention, the permanent magnet array 1 includes a first permanent magnet 9 and a second permanent magnet 10.

[0057] Multiple sets of first permanent magnets 9 are provided, each set of first permanent magnets 9 is spaced apart along a first direction, and multiple sets of first permanent magnets 9 are spaced apart along a second direction. The first direction is as follows: Figures 8 to 11 The direction indicated by X in the middle, the second direction is as follows Figures 8 to 11 The directions indicated by Y are perpendicular to the first and second directions, and both the first and second directions are parallel to the air buoyancy surface.

[0058] Multiple sets of second permanent magnets 10 are also provided, with each set of second permanent magnets 10 spaced apart along the first direction, and multiple sets of second permanent magnets 10 spaced apart along the second direction. A set of second permanent magnets 10 is provided between each pair of adjacent sets of first permanent magnets 9, and any adjacent set of first permanent magnets 9 and set of second permanent magnets 10 are arranged alternately, as shown in the reference. Figure 9 and Figure 10 .

[0059] In other words, the first permanent magnet 9 and the second permanent magnet 10 are both arranged in rows and columns, with the row direction being the first direction and the column direction being the second direction. The distribution axis of each row of the second permanent magnet 10 is located between the distribution axes of the two adjacent rows of the first permanent magnet 9, and the distribution axis of each column of the second permanent magnet 10 is located between the distribution axes of the two adjacent rows of the first permanent magnet 9.

[0060] When setting up the first permanent magnet 9 and the second permanent magnet 10, it is necessary to ensure that the magnetization direction of the first permanent magnet 9 and the magnetization direction of the second permanent magnet 10 are both perpendicular to the air buoyancy surface, and to ensure that the magnetization direction of the second permanent magnet 10 is opposite to the magnetization direction of the first permanent magnet 9.

[0061] Specifically, the magnetization direction of the first permanent magnet 9 can be directed towards the air-floating surface, and the magnetization direction of the second permanent magnet 10 can be directed away from the air-floating surface. That is, the end of the first permanent magnet 9 closest to the fixed plate can be the N pole, and the end of the second permanent magnet 10 closest to the fixed plate can be the S pole. (Refer to...) Figure 9 and Figure 10 .

[0062] In a further embodiment, the permanent magnet array 1 further includes a third permanent magnet 11. A third permanent magnet 11 is disposed between any two adjacent first permanent magnets 9 and second permanent magnets 10. The magnetization direction of the third permanent magnet 11 is parallel to the air-floating surface, and the magnetization direction of the third permanent magnet 11 points towards the adjacent first permanent magnet 9. Figure 11 , Figure 11 The arrow located on the third permanent magnet 11 indicates the magnetization direction of the third permanent magnet 11.

[0063] This configuration can significantly increase the thrust of the planar motor, reduce thrust fluctuations, and improve the performance of the planar motor.

[0064] In this embodiment, the cross-sectional shape of the first permanent magnet 9 is the same as that of the second permanent magnet 10, and both the cross-sections of the first permanent magnet 9 and the second permanent magnet 10 are parallel to the air buoyancy surface. The cross-sectional shapes of the first permanent magnet 9 and the second permanent magnet 10 are not limited. The cross-sectional shape of the first permanent magnet 9 can be, but is not limited to, a circle or a square; that is, the first permanent magnet 9 can be, but is not limited to, a cylinder or a cuboid.

[0065] When the cross-sectional shape of the first permanent magnet 9 and the cross-sectional shape of the second permanent magnet 10 are set to a square, one diagonal of the square is set along the first direction, and the other diagonal of the square is set along the second direction.

[0066] In this embodiment of the invention, the outer contour shape of the cross-section of the moving part 2 is set to rectangular, and the cross-section of the moving part 2 is parallel to the air buoyancy surface. The length direction of the moving part 2 is parallel to either a first direction or a second direction, as shown in the reference. Figure 8 The dashed box represents the moving part 2, whose length direction is parallel to the second direction.

[0067] Accordingly, the cross-sectional shape of coil 3 is set to rectangular, the cross-section of coil 3 is parallel to the air buoyancy surface, and the length direction of coil 3 is the length direction of moving part 2.

[0068] In this embodiment, four moving parts 2 are provided on the stator component, and the four moving parts 2 are relatively fixed. (Refer to...) Figure 2 Two of the moving parts 2 are parallel to each other and perpendicular to the length directions of the other two moving parts 2. The four moving parts 2 enclose a square and are rotationally symmetrical about the center of the square.

[0069] By controlling the energization of coil 3, a force can be generated to drive the four moving parts 2 to translate as a whole in the first direction, or to drive the four moving parts 2 to translate as a whole in the second direction, or to drive the four moving parts 2 to rotate as a whole, thereby driving the four moving parts 2 to move arbitrarily along the air-floating surface.

[0070] Specifically, the four moving parts 2 are the first moving part 13, the second moving part 14, the third moving part 15, and the fourth moving part 16, and their positions are referenced to... Figure 2 .

[0071] To generate an upward force in the second direction, a positive current needs to be supplied to the coil 3 of the first moving part 13 and the coil 3 of the third moving part 15, while the coil 3 of the second moving part 14 and the coil 3 of the fourth moving part 16 are not energized.

[0072] To generate a downward force in the second direction, a reverse current needs to be supplied to the coil 3 of the first moving part 13 and the coil 3 of the third moving part 15, while the coil 3 of the second moving part 14 and the coil 3 of the fourth moving part 16 are not energized.

[0073] To generate a force to the left in the first direction, a positive current needs to be supplied to the coil 3 of the second moving part 14 and the coil 3 of the fourth moving part 16, while the coil 3 of the first moving part 13 and the coil 3 of the third moving part 15 are not energized.

[0074] To generate a force to the right in the first direction, a reverse current needs to be supplied to the coil 3 of the second moving part 14 and the coil 3 of the fourth moving part 16, while the coil 3 of the first moving part 13 and the coil 3 of the third moving part 15 are not energized.

[0075] To generate a clockwise rotational torque, the first moving part 13 needs to generate an upward force in the second direction, the second moving part 14 needs to generate a rightward force in the first direction, the third moving part 15 needs to generate a downward force in the second direction, and the fourth moving part 16 needs to generate a leftward force in the first direction. If the amplitude of each force is consistent, the total linear force will be zero, generating pure torque, which can drive the four moving parts 2 to rotate as a whole.

[0076] To generate a counterclockwise rotational torque, the energizing direction of the coil 3 of each moving part 2 is opposite to the energizing direction of the coil 3 of each moving part 2 when generating a clockwise rotational torque.

[0077] In this embodiment of the invention, each moving part 2 includes at least two iron cores 4, which are spaced apart along the length of the coil 3. Each coil 3 is sleeved on the outside of each iron core 4. Figure 3 . Figure 3 The dashed line in the diagram represents the path of the leakage magnetic field lines. The leakage magnetic field lines pass through the iron core 4 but not through the coil 3, generating only attraction but not the required driving force. Figure 3 The arrows in the diagram represent effective magnetic field lines. These effective magnetic field lines pass through both the iron core 4 and the coil 3, generating driving force. By separating the iron cores 4 corresponding to each coil 3, the magnetic path of the magnetic field lines (represented by the dashed lines) can be broken. Leakage magnetic field lines need to pass through the air to reach another iron core 4, reducing leakage magnetic field and improving the thrust performance of the planar motor.

[0078] In this embodiment, the moving part 2 further includes at least one of a separator and a first cooling mechanism.

[0079] The separator is made of non-magnetic material. A separator is provided between any two adjacent iron cores 4. The separator is fixedly connected to the iron core 4, which fixes the iron cores 4 that are distributed at intervals together, thereby improving the stability of the moving part 2.

[0080] A first cooling mechanism is provided between any two adjacent iron cores 4. The first cooling mechanism is in contact with the iron core 4 and is fixedly connected to the iron core 4. The first cooling mechanism can support the iron core 4, improve the stability of the moving part 2, and exchange heat with the iron core 4 to improve the heat dissipation performance of the planar motor.

[0081] The aforementioned first cooling mechanism may, but is not limited to, use a cooling plate.

[0082] A separator may be provided only between two adjacent iron cores 4, or a first cooling mechanism may be provided only between two adjacent iron cores 4, or both a separator and a first cooling mechanism may be provided between two adjacent iron cores 4, or a separator may be provided between some of the two adjacent iron cores 4 and a first cooling mechanism may be provided between other two adjacent iron cores 4. No specific limitation is made here.

[0083] In this embodiment, each core 4 includes a base portion 7 and at least two core portions 8.

[0084] Each iron core part 8 is spaced apart along the width direction of the coil 3 and extends along the length direction of the coil 3. Each iron core part 8 is fixedly connected to the base part 7. A coil 3 is sleeved on the outside of each iron core part 8. Each iron core 4 can correspond to multiple coils 3. Different coils 3 are sleeved on the outside of different iron core parts 8 of each iron core 4.

[0085] Each core 4 of each moving part 2 has the same structure, and each core part 8 of each core 4 corresponds one-to-one, so that each coil 3 of the moving part 2 can be simultaneously fitted onto the core part 8 of different cores 4.

[0086] This configuration increases the number of coils 3 in each moving part 2, thereby increasing the Ampere force generated by each moving part 2 and improving the thrust performance of the planar motor.

[0087] In this embodiment, along the width direction of the moving part 2, the sum of the number of the first permanent magnet 9 and the second permanent magnet 10 corresponding to each iron core 4 is a first value. The number of iron core portions 8 provided on each iron core 4 is a second value. The second value is a multiple of 3, and the absolute value of the difference between the first value and the second value is 1 or 2.

[0088] This configuration makes the planar motor a three-phase motor, which has the advantages of high efficiency, stable operation, high reliability, wide applicability, and strong adaptability.

[0089] Furthermore, based on the aforementioned limitations on the first and second values, the coils 3 can be arranged freely and arbitrarily, with no special requirements regarding the series-parallel connection relationship between the coils 3, the number of coils 3, or the position of the coils 3.

[0090] In a specific embodiment, the second value can be set to 3 and the first value can be set to 4. That is, each iron core 4 is provided with 3 iron core parts 8, and along the width direction of the moving part 2, the sum of the number of the first permanent magnet 9 and the second permanent magnet 10 corresponding to each iron core 4 is 4.

[0091] In this embodiment, at least two coils 3 can be fitted around the outside of each iron core part 8 to increase the number of coils 3 in each moving part 2.

[0092] The coils 3 on two adjacent iron core sections 8 can be arranged side by side, such as Figure 6 As shown, the coils 3 corresponding to different iron core sections 8 do not interfere with each other.

[0093] Alternatively, the coils 3 on two adjacent iron core sections 8 can be arranged in an overlapping manner, such as... Figure 7 As shown, this helps to reduce the spacing between two adjacent iron core sections 8, making the structure more compact.

[0094] The energizing direction of each coil 3 fitted into the same iron core 8 must be consistent. Each coil 3 fitted into the same iron core 8 can be connected in series or in parallel.

[0095] In a further embodiment, the moving part 2 also includes a second cooling mechanism. A second cooling mechanism is provided between any two adjacent coils 3 on each iron core part 8. The second cooling mechanism is in contact with the coil 3 and can exchange heat with the coil 3 to improve the heat dissipation performance of the planar motor.

[0096] The aforementioned second cooling mechanism may, but is not limited to, use a cooling plate.

[0097] In this embodiment, the air flotation component 5 includes a plurality of air flotation blocks 6, which are arranged around the periphery of the moving part 2 along the circumference of the moving part 2, as shown in the figure. Figure 2 The air float 6 has a throttling orifice or a micro-nozzle on the side facing the air float surface. Compressed air is introduced into the air float 6, allowing it to enter the gap between the air float 6 and the air float surface at an appropriate pressure and flow rate. This forms an air film between the air float 6 and the air float surface, which allows the air float 6 to drive the entire moving part 2 to suspend on the air float surface. This reduces the friction between the moving part 2 and the air float surface, improving the output accuracy, speed, and stability of the planar motor.

[0098] In this embodiment, corresponding air flotation blocks 6 are provided on each surface around the moving part 2, which can make the moving part 2 more uniformly stressed and improve the levitation effect of the moving part 2.

[0099] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A planar motor with an iron core structure, characterized in that, include: The stator component includes a fixed stator housing (12), a permanent magnet array (1), and a fixing plate. The fixing plate is disposed on one side of the plane where the permanent magnet array (1) is located. The stator housing (12) and the fixing plate enclose each other to form a cavity structure. The permanent magnet array (1) is disposed in the cavity. The bottom wall of the stator housing (12) provides fixed support for the permanent magnet array (1). The surface of the fixing plate away from the permanent magnet array (1) forms an air buoyancy surface. The moving part (2) is movably disposed on the side of the fixed plate away from the permanent magnet array (1) along the air buoyancy surface. The moving part (2) includes a moving part housing, a coil (3) and an iron core (4). The coil (3) and the iron core (4) are both disposed inside the moving part housing, and the coil (3) is sleeved on the outside of the iron core (4). An air-floating component (5) is fixed relative to the moving part (2). The air-floating component (5) is disposed inside the moving part's outer shell. The moving part's outer shell is provided with a clearance hole for the air-floating component (5) to interact with the air-floating surface. The air-floating component (5) is adapted to cooperate with the air-floating surface to provide air-floating support for the moving part (2). The iron core (4) and the permanent magnet array (1) have magnetic attraction to provide preload force for the air-floating component (5). The air-floating component (5) includes multiple air-floating blocks (6). The side of the air-floating block (6) facing the air-floating surface is provided with a throttling hole or a micro-nozzle. Compressed air is introduced into the air-floating block (6) so that the compressed air enters the gap between the air-floating block (6) and the air-floating surface with appropriate pressure and flow rate, forming an air film between the air-floating block (6) and the air-floating surface, so that the air-floating block (6) drives the moving part to suspend on the air-floating surface. The iron core (4) includes: Basal part (7); The iron core (8) is distributed at intervals along the width direction of the coil (3). The iron core (8) extends along the length direction of the coil (3). The iron core (8) is fixedly connected to the base part (7). The coil (3) is sleeved on the outside of each iron core (8). The permanent magnet array (1) includes a first permanent magnet (9) and a second permanent magnet (10). The first permanent magnet (9) and the second permanent magnet (10) are arranged in rows and columns. The distribution axis of each row of the second permanent magnet (10) is located between the distribution axes of the two adjacent rows of the first permanent magnet (9). The distribution axis of each column of the second permanent magnet (10) is located between the distribution axes of the two adjacent rows of the first permanent magnet (9). The number of core portions (8) provided on each core (4) is a second value. Along the width direction of the moving part (2), the sum of the number of the first permanent magnet (9) and the second permanent magnet (10) corresponding to each core (4) is a first value. The second value is a multiple of 3, and the absolute value of the difference between the first value and the second value is 1 or 2.

2. The planar motor with an iron core structure according to claim 1, characterized in that, Multiple air flotation blocks (6) are arranged around the periphery of the moving part (2) along the circumference of the moving part (2).

3. The planar motor with an iron core structure according to claim 1 or 2, characterized in that, The outer contour shape of the cross-section of the moving part (2) is rectangular, and the cross-section of the moving part (2) is parallel to the air buoyancy surface; The moving parts (2) are provided in four, and the four moving parts (2) are arranged to form a square, and the four moving parts (2) are distributed in a rotationally symmetrical manner about the center of the square.

4. The planar motor with an iron core structure according to claim 3, characterized in that, Each of the moving parts (2) includes: At least two iron cores (4) are distributed at intervals along the length direction of the coil (3), and each coil (3) is sleeved on the outside of each iron core (4).

5. The planar motor with an iron core structure according to claim 4, characterized in that, The moving part (2) also includes: The separator is made of non-magnetic material. The separator is provided between any two adjacent iron cores (4) and the separator is fixedly connected to the iron core (4). And / or, a first cooling mechanism, one of which is provided between any two adjacent iron cores (4), the first cooling mechanism being adapted to exchange heat with the iron cores (4).

6. The planar motor with an iron core structure according to claim 3, characterized in that, At least two coils (3) are sleeved on the outside of each core part (8), and the coils (3) on two adjacent core parts (8) are arranged side by side or partially overlapped; The moving part (2) also includes: A second cooling mechanism is provided between any two adjacent coils (3) on each of the iron core portions (8), and the second cooling mechanism is adapted to exchange heat with the coils (3).

7. The planar motor with an iron core structure according to claim 1, characterized in that, The first permanent magnet (9) is provided in multiple groups, and each group of the first permanent magnet (9) is distributed at intervals along the first direction. The multiple groups of the first permanent magnet (9) are distributed at intervals along the second direction. The first direction is perpendicular to the second direction, and both the first direction and the second direction are parallel to the air buoyancy surface. The length direction of the moving part (2) is parallel to the first direction or the second direction. A set of second permanent magnets (10) is set between two adjacent sets of first permanent magnets (9). Each set of second permanent magnets (10) is distributed at intervals along the first direction. Any adjacent set of first permanent magnets (9) and set of second permanent magnets (10) are arranged alternately. The magnetization direction of the second permanent magnets (10) is opposite to the magnetization direction of the first permanent magnets (9). The magnetization directions of the first permanent magnets (9) and the second permanent magnets (10) are both perpendicular to the air buoyancy surface.

8. The planar motor with an iron core structure according to claim 7, characterized in that, The permanent magnet array (1) also includes: A third permanent magnet (11) is provided between any two adjacent first permanent magnets (9) and second permanent magnets (10). The magnetization direction of the third permanent magnet (11) is parallel to the air buoyancy surface. The magnetization direction of the first permanent magnet (9) points to the air buoyancy surface. The magnetization direction of the third permanent magnet (11) points to the first permanent magnet (9) adjacent to it.

9. The planar motor with an iron core structure according to claim 7 or 8, characterized in that, The cross-sectional shape of the first permanent magnet (9) is the same as that of the second permanent magnet (10). The cross-sections of the first permanent magnet (9) and the second permanent magnet (10) are parallel to the air buoyancy surface. The cross-sectional shape of the first permanent magnet (9) is circular or square.

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