Air filter for vehicle

Abstract

The invention discloses an air filter for a vehicle, and relates to the field of automobile accessories, the air filter comprises a filter main body, the outer side wall of the filter main body is fixedly connected with a mounting lug, and the inner hexagon bolt penetrates through the mounting lug and is in threaded connection with the vehicle; the filter element is rotationally arranged in the lower shell and used for filtering air entering the engine; the dust removal mechanism comprises a wind speed detector fixedly connected to the interior of the connecting pipe, a clamping spring fixedly connected to the inner side wall of the lower shell and a movable plate movably arranged in the lower shell and used for knocking the filter element, and the outer side wall of the movable plate is fixedly connected with the outer side wall of the clamping spring. According to the air filter for the vehicle, periodic collision is formed between the movable plate and the edges of the filter element in the rotating state, the vibration frequency of the movable plate is in positive correlation with the rotating speed of the filter element, and dust attached to the inner surface of the movable plate can be separated through vibration generated by collision.

Description

Technical Field

[0001] The invention relates to the field of automobile accessories, and in particular to an air filter for a vehicle. Background Art

[0002] The air filter is an important part of the engine. During the operation of the engine, a large amount of air will be inhaled. If the air is not filtered, the suspended dust particles in the air will be inhaled into the cylinder, which will accelerate the wear of the piston group and the cylinder. If larger particles enter between the piston and the cylinder, it will cause serious cylinder pulling. This requires an air filter to filter the air entering the engine. The air filter is installed in front of the engine's intake pipe to filter out suspended dust particles (dust) in the air, ensuring that the air entering the cylinder is clean and free of foreign matter.

[0003] After searching in the public (announcement) number: CN114922752A, a kind of anti-clogging, long-life maintenance-free air filter is disclosed, which includes an air intake hood, a cyclone tube pre-filter, a dust pump, a secondary filter housing, an air filter element, a back-blowing valve, a compressed air tank, a pulse controller, a safety filter element, an exhaust pipe, and a compressed air processor.

[0004] Although the above scheme can remove dust from the air filter, the use of a timed trigger cleaning mechanism to clean the air filter element may result in excessive cleaning of the air filter, causing the filter element to need to be replaced frequently, thereby wasting a large amount of filter paper resources. Summary of the invention

[0005] The main purpose of the present invention is to provide an air filter for a vehicle, which solves the problem of frequent replacement of the filter element by means of a driving mechanism and an adjusting mechanism, and solves the problem of excessive cleaning of the air filter, thereby causing a large amount of waste of filter paper resources, by means of a dust removal mechanism.

[0006] To achieve the above object, the technical solution adopted by the present invention is: An air filter for a vehicle, comprising: A filter body, an outer wall of the filter body being fixedly connected with a mounting ear, and a hexagon socket bolt penetrating through the mounting ear and being threadedly connected to the vehicle; The filter body includes a lower shell, an upper shell plugged on the top of the lower shell, a fixing bolt penetrating the upper shell and threadedly connected to the lower shell, an intake pipe fixedly connected to the upper shell, and a connecting pipe fixedly connected to the outer side wall of the lower shell and connected to the air intake of the automobile engine; A filter element is rotatably disposed inside the lower housing and is used to filter the air entering the engine; The driving mechanism includes a driving motor fixedly connected to the inner bottom wall of the lower shell, a main gear fixedly connected to the output end of the driving motor, and a transmission ring movably arranged on the outer side wall of the main gear for driving the filter element; An adjusting mechanism, the adjusting mechanism comprising a rotating shaft rotatably connected to the inner side wall of the lower shell, a cam fixedly connected to the outer side wall of the rotating shaft, and a connecting rod movably arranged above the cam for driving the intake pipe to move; The dust removal mechanism includes a wind speed detector fixedly connected to the inside of the connecting pipe, a clamp spring fixedly connected to the inner wall of the lower shell, and a movable plate movably arranged inside the lower shell for knocking the filter element, and the outer side wall of the movable plate is fixedly connected to the outer side wall of the clamp spring; The dust collecting mechanism comprises an electrostatic adsorption plate movably arranged inside the filter body for adsorbing dust.

[0007] Preferably, the driving mechanism also includes a dust collecting chamber fixedly connected to the inside of the lower shell, and a driven gear fixedly connected to the outer wall of the transmission ring, the outer wall of the transmission ring is rotatably connected to the top wall of the dust collecting chamber, and the driven gear is located at the top of the dust collecting chamber.

[0008] Preferably, the driving mechanism further comprises a plurality of rubber columns distributed in a ring array and fixedly connected to the top of the transmission ring, and a plurality of plug-in slots provided at the bottom of the filter element.

[0009] Preferably, the adjustment mechanism further comprises a first bevel gear fixedly connected to the outer side wall of the output end of the driving motor, and a second bevel gear fixedly connected to the outer side wall of the rotating shaft, and the first bevel gear is meshed with the second bevel gear.

[0010] Preferably, the adjustment mechanism also includes a limit groove opened on the outer wall of the cam, a roller fitted to the bottom of the limit groove, and a limit sleeve fixedly connected to the inner wall of the lower shell body, the top of the roller is threadedly connected to the bottom of the connecting rod, and the connecting rod passes through the limit sleeve.

[0011] Preferably, the adjustment mechanism further comprises an annular magnet fixedly connected to the end surface of the connecting rod, and a magnetic sleeve fixedly connected to the outer side wall of the intake pipe.

[0012] Preferably, the dust removal mechanism further comprises an electromagnet embedded in the inner wall of the lower shell, and the movable plate is made of ferromagnetic material.

[0013] Preferably, the dust collecting mechanism further comprises an electric lifting rod fixedly connected to the inner bottom wall of the lower shell, a groove provided at the output end of the electric lifting rod, and a connecting ring fixedly connected to the outer side wall of the output end of the electric lifting rod; The inner side wall of the electrostatic adsorption plate is fixedly connected to the outer side wall of the connecting ring. The electrostatic adsorption plate is an annular structure, and the height of the electrostatic adsorption plate is higher than the height of the connecting ring.

[0014] Compared with the prior art, the present invention has the following beneficial effects: 1. In the present invention, by starting the driving motor, the main gear and the first bevel gear are driven to rotate, so that the main gear drives the driven gear meshing therewith to rotate, and then drives the transmission ring and the filter element to rotate, thereby increasing the contact area between the filter element and the air and reducing the amount of dust attached to the unit area of ​​the filter element.

[0015] 2. In the present invention, the first bevel gear drives the second bevel gear meshing therewith to rotate, thereby driving the rotating shaft and the cam to rotate. During the rotation of the cam, its roller will roll inside the limiting groove. When the cam rotates to the area with increased contour radius, under the action of the limiting sleeve, the roller will roll upward, thereby driving the connecting rod, the annular magnet and the magnetic sleeve, thereby compressing the air inlet pipe and moving its air outlet upward. When the cam rotates to the area with decreased contour radius, the air outlet is driven to move downward, thereby further increasing the contact area between the filter element and the air and reducing the number of times that need to be cleaned.

[0016] 3. In the present invention, when there is a lot of dust on the outer surface of the filter element, the wind speed detector will detect that the air flow rate in the connecting pipe decreases until it reaches the set value. At this time, the wind speed detector will cut off the power of the electromagnet, and move the electrostatic adsorption plate to the inside of the filter element through the electric lifting rod, and power the electrostatic adsorption plate, so that the electromagnet loses its magnetic force. At this time, the movable plate will move to the movable range of the filter element under the action of the clamp spring. Because its filter element is always in a rotating state, when one of the edges of the filter element contacts the movable plate, it compresses the clamp spring until the movable plate is separated from the edge of the filter element, so that the movable plate produces radial displacement under the action of the elastic restoring force of the clamp spring, and forms a periodic collision with the edge of the filter element in the rotating state. Its vibration frequency is positively correlated with the rotation speed of the filter element, and the vibration generated by the collision will cause the dust attached to its inner surface to fall off.

[0017] 4. In the present invention, the electrostatic adsorption plate is reset and powered off after dust removal is completed through the electric lifting rod. At this time, the dust will fall into the dust collecting chamber under the action of gravity. Finally, the dust inside the dust collecting chamber can be removed by external dust suction equipment. When the filter element is damaged and needs to be replaced, first loosen the fixing bolts and remove the upper shell, thereby driving the air intake pipe to move upward, and releasing the magnetic attraction between the annular magnet and the magnetic sleeve, and then rotate the connecting rod to keep it away from the axial direction of the filter element. Finally, the plug-in slot of the new filter element is aligned and crimped with the rubber column of the transmission ring to achieve the installation of the new filter element. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the split structure of the upper shell and the lower shell of the present invention; Figure 3 When the upper shell is removed for the present invention Figure 2 Structural diagram; Figure 4 The structure of the present invention Figure 3 Schematic diagram of the lower shell analysis; Figure 5 For the present invention Figure 4 A schematic diagram of the enlarged structure in the middle; Figure 6 It is a schematic diagram of the internal structure of the filter element of the present invention; Figure 7 For the present invention Figure 6 Middle B is an enlarged schematic diagram of the structure; Figure 8 This is a schematic diagram of the internal structure of the filter body of the present invention; Fig. 9 It is a schematic diagram of the distribution structure of the dust removal mechanism of the present invention.

[0019] In the figure: 101, lower shell; 102, upper shell; 103, fixing bolt; 104, air inlet pipe; 105, connecting pipe; 201, mounting ear; 202, hexagon socket bolt; 3, filter element; 401, driving motor; 402, main gear; 403, dust collecting chamber; 404, transmission ring; 405, driven gear; 406, rubber column; 501, first bevel gear; 502, rotating shaft; 503, second bevel gear; 504, cam; 505, roller; 506, connecting rod; 507, annular magnet; 508, magnetic sleeve; 509, limiting sleeve; 601, electric lifting rod; 602, groove; 603, connecting ring; 604, electrostatic adsorption plate; 701, wind speed detector; 702, clamp spring; 703, movable plate; 704, electromagnet. DETAILED DESCRIPTION

[0020] Example 1: Please refer to Figure 1 As shown, the present invention is an air filter for a vehicle, comprising: The filter body has an outer wall fixedly connected with a mounting ear 201 and a hexagon socket bolt 202 penetrating the mounting ear 201 and connected to the vehicle thread.

[0021] The filter body is fixed inside the vehicle by the hexagon socket head bolts 202 .

[0022] Example 2: Please refer to Figure 1-5 As shown, the present invention is an air filter for a vehicle, comprising: The filter body includes a lower shell 101, an upper shell 102 inserted on the top of the lower shell 101, a fixing bolt 103 penetrating the upper shell 102 and threadedly connected to the lower shell 101, an intake pipe 104 fixedly connected to the upper shell 102, and a connecting pipe 105 fixedly connected to the outer wall of the lower shell 101 and connected to the air inlet of the automobile engine, wherein the air outlet of the intake pipe 104 is opened on the outer wall, wherein the intake pipe 104 is a telescopic pipe; The filter element 3 is rotatably disposed inside the lower housing 101 and is used to filter the air entering the engine; The driving mechanism includes a driving motor 401 fixedly connected to the inner bottom wall of the lower housing 101, a main gear 402 fixedly connected to the output end of the driving motor 401, and a transmission ring 404 movably arranged on the outer side wall of the main gear 402 for driving the filter element 3; The adjusting mechanism includes a rotating shaft 502 rotatably connected to the inner wall of the lower housing 101, a cam 504 fixedly connected to the outer wall of the rotating shaft 502, and a connecting rod 506 movably arranged above the cam 504 for driving the intake pipe 104 to move; The dust removal mechanism includes a wind speed detector 701 fixedly connected to the inside of the connecting pipe 105, a clamp spring 702 fixedly connected to the inner wall of the lower housing 101, and a movable plate 703 movably arranged inside the lower housing 101 for knocking the filter element 3, and the outer wall of the movable plate 703 is fixedly connected to the outer wall of the clamp spring 702; The dust collecting mechanism includes an electrostatic adsorption plate 604 movably arranged inside the filter body for adsorbing dust.

[0023] The driving mechanism also includes a dust collecting chamber 403 fixedly connected to the inside of the lower shell 101, and a driven gear 405 fixedly connected to the outer wall of the transmission ring 404, the outer wall of the transmission ring 404 is rotatably connected to the inner top wall of the dust collecting chamber 403, and the driven gear 405 is located at the top of the dust collecting chamber 403, wherein the driven gear 405 is meshed with the main gear 402, and the main gear 402 is driven to rotate by the driving motor 401, thereby driving the driven gear 405 meshed with it to rotate, and then driving the transmission ring 404 to rotate.

[0024] Preferably, an external dust suction device can be connected to remove dust inside the dust collecting chamber 403 .

[0025] The driving mechanism also includes a plurality of rubber columns 406 distributed in a ring array and fixedly connected to the top of the transmission ring 404, and a plurality of plug-in slots opened at the bottom of the filter element 3, wherein the outer diameter of the rubber columns 406 is slightly larger than the inner diameter of the plug-in slots, and the number and position distribution of the plug-in slots match those of the rubber columns 406. The filter element 3 is installed on the top of the transmission ring 404 through the cooperation of the plug-in slots and the rubber columns 406, so that it can move with the movement of the transmission ring 404.

[0026] The adjustment mechanism also includes a first bevel gear 501 fixedly connected to the outer wall of the output end of the driving motor 401, and a second bevel gear 503 fixedly connected to the outer wall of the rotating shaft 502. The first bevel gear 501 is meshed with the second bevel gear 503. The driving motor 401 drives the first bevel gear 501 to rotate, thereby driving the second bevel gear 503 meshed therewith to rotate, thereby driving the rotating shaft 502 and the cam 504 to rotate.

[0027] The adjustment mechanism also includes a limiting groove opened on the outer wall of the cam 504, a roller 505 fitted on the bottom of the limiting groove, and a limiting sleeve 509 fixedly connected to the inner wall of the lower shell 101. The top of the roller 505 is threadedly connected to the bottom of the connecting rod 506, and the connecting rod 506 passes through the limiting sleeve 509. Through the cooperation between the limiting sleeve 509 and the connecting rod 506, the connecting rod 506 can only perform reciprocating linear motion in the vertical direction. When the cam 504 rotates, its roller 505 will roll inside the limiting groove, thereby reducing the wear on the cam 504 while ensuring the stable movement of the connecting rod 506.

[0028] The adjustment mechanism also includes an annular magnet 507 fixedly connected to the end face of the connecting rod 506, and a magnetic sleeve 508 fixedly connected to the outer wall of the intake pipe 104, wherein the adjacent parts of the annular magnet 507 and the magnetic sleeve 508 attract each other, and the inner diameter of the annular magnet 507 matches the outer diameter of the intake pipe 104.

[0029] After the filter body is installed, one end of the intake pipe 104 is connected to the outside environment to introduce unfiltered air, and the other end of the intake pipe 104 is plugged into the interior of the filter element 3. The connecting pipe 105 is connected to the throttle valve and the intake manifold of the engine to deliver the filtered clean air to the engine cylinder for combustion. Then, the drive motor 401 is started to drive the main gear 402 and the first bevel gear 501 to rotate, so that the main gear 402 drives the driven gear 405 meshing therewith to rotate, and then drives the transmission ring 404 and the filter element 3 to rotate, thereby increasing the contact area between the filter element 3 and the air and reducing the amount of dust attached to the unit area of ​​the filter element 3. The first bevel gear 5 01 drives the second bevel gear 503 meshing with it to rotate, thereby driving the rotating shaft 502 and the cam 504 to rotate. During the rotation of the cam 504, its roller 505 will roll inside the limiting groove. When the cam 504 rotates to the area where the contour radius increases, under the action of the limiting sleeve 509, the roller 505 will roll upward, thereby driving the connecting rod 506, the annular magnet 507 and the magnetic sleeve 508, thereby compressing the intake pipe 104 and moving its air outlet upward. When the cam 504 rotates to the area where the contour radius decreases, it drives the air outlet to move downward, thereby further increasing the contact area between the filter element 3 and the air and reducing the number of times the filter element 3 needs to be cleaned.

[0030] Example 3: Please refer to Figure 3 as well as Figure 6-9 As shown, the present invention is an air filter for a vehicle, comprising: The filter body includes a lower shell 101, an upper shell 102 inserted on the top of the lower shell 101, a fixing bolt 103 penetrating the upper shell 102 and threadedly connected to the lower shell 101, an intake pipe 104 fixedly connected to the upper shell 102, and a connecting pipe 105 fixedly connected to the outer wall of the lower shell 101 and connected to the air inlet of the automobile engine, wherein the air outlet of the intake pipe 104 is opened on the outer wall, wherein the intake pipe 104 is a telescopic pipe; The filter element 3 is rotatably disposed inside the lower housing 101 and is used to filter the air entering the engine; The driving mechanism includes a driving motor 401 fixedly connected to the inner bottom wall of the lower housing 101, a main gear 402 fixedly connected to the output end of the driving motor 401, and a transmission ring 404 movably arranged on the outer side wall of the main gear 402 for driving the filter element 3; The adjusting mechanism includes a rotating shaft 502 rotatably connected to the inner wall of the lower housing 101, a cam 504 fixedly connected to the outer wall of the rotating shaft 502, and a connecting rod 506 movably arranged above the cam 504 for driving the intake pipe 104 to move; The dust removal mechanism includes a wind speed detector 701 fixedly connected to the inside of the connecting pipe 105, a clamp spring 702 fixedly connected to the inner wall of the lower housing 101, and a movable plate 703 movably arranged inside the lower housing 101 for knocking the filter element 3, and the outer wall of the movable plate 703 is fixedly connected to the outer wall of the clamp spring 702; The dust collecting mechanism includes an electrostatic adsorption plate 604 movably arranged inside the filter body for adsorbing dust The dust removal mechanism also includes an electromagnet 704 embedded in the inner wall of the lower shell 101. The movable plate 703 is made of ferromagnetic material. The power supply of the electromagnet 704 is controlled by the wind speed detector 701. When the electromagnet 704 is powered, it has magnetic force, so that it adsorbs the movable plate 703. At this time, the clamp spring 702 is in a compressed state, and the movable plate 703 is away from the filter element 3.

[0031] The dust collecting mechanism also includes an electric lifting rod 601 fixedly connected to the inner bottom wall of the lower housing 101, a groove 602 provided at the output end of the electric lifting rod 601, and a connecting ring 603 fixedly connected to the outer side wall of the output end of the electric lifting rod 601; The inner wall of the electrostatic adsorption plate 604 is fixedly connected to the outer wall of the connecting ring 603. The electrostatic adsorption plate 604 is a ring structure, and the height of the electrostatic adsorption plate 604 is higher than the height of the connecting ring 603. The inner diameter of the groove 602 is equal to the outer diameter of the intake pipe 104. The dust adhering to the outer surface of the intake pipe 104 can be removed through the groove 602, and the dust is located at the top of the connecting ring 603.

[0032] The air velocity in the connecting pipe 105 is monitored in real time by the wind speed detector 701. When the detected value is lower than the set threshold, the linkage control is executed - the power supply of the electromagnet 704 is cut off to make it demagnetized. At this time, the movable plate 703 will move to the movable range of the filter element 3 under the action of the clamp spring 702, and the electric lifting rod 601 is started to lift the energized annular electrostatic adsorption plate 604 to a predetermined position inside the filter element 3; because one end of the movable plate 703 is located inside the movable range of the filter element 3, when one of the edges of the filter element 3 contacts the movable plate 703, it compresses the clamp spring 702 until the movable plate 703 and the filter element 3 are in contact. The edges are separated, so that the movable plate 703 produces radial displacement under the action of the elastic restoring force of the clamp spring 702, and forms periodic collisions with the edges of the filter element 3 in a rotating state. The vibration frequency is positively correlated with the rotation speed of the filter element 3, and the vibration generated by the collision will cause the dust attached to the inner surface to fall off; at this time, the detached dust is adsorbed and gathered under the action of the electric field on the surface of the electrostatic adsorption plate 604; after the dust removal is completed, the electrostatic adsorption plate 604 is reset and powered off. At this time, the dust will fall into the interior of the dust collecting chamber 403 under the action of gravity, and finally the dust inside the dust collecting chamber 403 can be removed by an external dust suction device (not shown in the figure).

[0033] When the filter element 3 is damaged and needs to be replaced, first loosen the fixing bolts 103 and remove the upper shell 102, thereby driving the air intake pipe 104 to move upward and releasing the magnetic attraction between the annular magnet 507 and the magnetic sleeve 508, then rotate the connecting rod 506 to keep it away from the axial direction of the filter element 3, and finally align and crimp the plug-in slot of the new filter element 3 with the rubber column 406 of the transmission ring 404 to achieve the installation of the new filter element 3.

Claims

1. A vehicle air filter, characterized in that: include: A filter body, wherein an outer wall of the filter body is fixedly connected with a mounting ear (201), and a hexagon socket bolt (202) passing through the mounting ear (201) and connected to the vehicle thread; The filter body comprises a lower shell (101), an upper shell (102) plugged into the top of the lower shell (101), a fixing bolt (103) penetrating the upper shell (102) and threadedly connected to the lower shell (101), an air intake pipe (104) fixedly connected to the upper shell (102), and a connecting pipe (105) fixedly connected to the outer side wall of the lower shell (101) and connected to the air intake of the automobile engine; A filter element (3), the filter element (3) is rotatably disposed inside the lower housing (101) and is used to filter air entering the engine; A driving mechanism, the driving mechanism comprising a driving motor (401) fixedly connected to the inner bottom wall of the lower housing (101), a main gear (402) fixedly connected to the output end of the driving motor (401), and a transmission ring (404) movably arranged on the outer side wall of the main gear (402) for driving the filter element (3); an adjusting mechanism, the adjusting mechanism comprising a rotating shaft (502) rotatably connected to the inner wall of the lower housing (101), a cam (504) fixedly connected to the outer wall of the rotating shaft (502), and a connecting rod (506) movably arranged above the cam (504) for driving the air intake pipe (104) to move; A dust removal mechanism, the dust removal mechanism comprising a wind speed detector (701) fixedly connected to the inside of the connecting pipe (105), a clamp spring (702) fixedly connected to the inner wall of the lower shell (101), and a movable plate (703) movably arranged inside the lower shell (101) for knocking the filter element (3), the outer wall of the movable plate (703) being fixedly connected to the outer wall of the clamp spring (702); The dust collecting mechanism comprises an electrostatic adsorption plate (604) movably arranged inside the filter body and used for adsorbing dust.

2. The vehicle air filter according to claim 1, characterized in that: The driving mechanism further comprises a dust collecting chamber (403) fixedly connected to the interior of the lower housing (101), and a driven gear (405) fixedly connected to the outer wall of the transmission ring (404), the outer wall of the transmission ring (404) being rotatably connected to the inner top wall of the dust collecting chamber (403), and the driven gear (405) being located at the top of the dust collecting chamber (403).

3. The vehicle air filter according to claim 1, characterized in that: The driving mechanism further comprises a plurality of rubber columns (406) distributed in a ring array and fixedly connected to the top of the transmission ring (404), and a plurality of plug-in slots provided at the bottom of the filter element (3).

4. The vehicle air filter according to claim 1, characterized in that: The adjustment mechanism further comprises a first bevel gear (501) fixedly connected to the outer wall of the output end of the drive motor (401), and a second bevel gear (503) fixedly connected to the outer wall of the rotating shaft (502), wherein the first bevel gear (501) meshes with the second bevel gear (503).

5. The vehicle air filter according to claim 1, characterized in that: The adjustment mechanism further comprises a limiting groove formed on the outer wall of the cam (504), a roller (505) fitted on the bottom of the limiting groove, and a limiting sleeve (509) fixedly connected to the inner wall of the lower shell (101), wherein the top of the roller (505) is threadedly connected to the bottom of the connecting rod (506), and the connecting rod (506) passes through the limiting sleeve (509).

6. The vehicle air filter according to claim 1, characterized in that: The regulating mechanism further comprises an annular magnet (507) fixedly connected to the end surface of the connecting rod (506), and a magnetic sleeve (508) fixedly connected to the outer side wall of the air intake pipe (104).

7. The vehicle air filter according to claim 1, characterized in that: The dust removal mechanism further comprises an electromagnet (704) embedded in the inner wall of the lower shell (101), and the movable plate (703) is made of ferromagnetic material.

8. The vehicle air filter according to claim 1, characterized in that: The dust collecting mechanism further comprises an electric lifting rod (601) fixedly connected to the inner bottom wall of the lower housing (101), a groove (602) provided at the output end of the electric lifting rod (601), and a connecting ring (603) fixedly connected to the outer side wall of the output end of the electric lifting rod (601); The inner side wall of the electrostatic adsorption plate (604) is fixedly connected to the outer side wall of the connecting ring (603); the electrostatic adsorption plate (604) is an annular structure, and the height of the electrostatic adsorption plate (604) is higher than the height of the connecting ring (603).

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