Control method and system for processing surface shape of optical device

Abstract

The invention provides a control method and system for a surface shape of an optical device, and the method comprises the steps: carrying out the initial grinding and polishing of the optical device, carrying out the real-time detection through a multi-frequency-band stress detector, obtaining the stress distribution and surface wave front data, and obtaining an initial detection result; a phase shift interferometer and a composite laser confocal probe are used to carry out depth surface shape measurement based on the initial detection result, and adaptive finishing is carried out on an abnormal area to obtain a surface shape finishing log; according to the initial detection result and the finishing log, executing step-by-step load irradiation and stress tracking, and collecting surface shape change under photo-thermal coupling to obtain surface shape evolution information; and according to the surface shape evolution information, performing partition dynamic compensation and real-time detection until a surface shape control result meeting requirements is obtained. According to the method, secondary deformation caused by internal stress release is recognized and corrected through combination of multi-frequency-band stress detection and high-precision interference measurement, high-precision control over the surface shape of the optical device is achieved, and the method is suitable for scenes with high requirements for the surface shape of the optical element.

Description

Technical Field

[0001] The present invention relates to the technical field of device processing, and in particular to a method and system for controlling the processing surface shape of an optical device. Background Art

[0002] In high-energy laser optical systems, large-aperture high-purity optical glass or crystal materials are often used to manufacture key optical components such as reflectors and focusing lenses. These optical devices usually have complex free-form surfaces or reflective mirror structures, and their surface shape accuracy directly affects the imaging quality and beam focusing performance of the system. Existing optical device processing methods mainly rely on traditional grinding and polishing processes, and combine interferometers and other equipment to detect the surface morphology after processing to ensure that the surface shape error is within an acceptable range. However, due to the possibility of trace birefringence or uneven stress distribution inside high-purity materials, the release of internal stress after removing the surface material in traditional processing methods may cause secondary deformation on the surface of the optical device. This secondary deformation is often difficult to be discovered in time in conventional interference detection, resulting in the final optical device having problems such as sudden aberration, concave reflection surface or accumulated deformation in the edge area in actual high-energy laser applications, which seriously affects the performance and reliability of the optical system. Therefore, the existing technology cannot effectively solve the problem of secondary deformation caused by internal stress release in terms of surface shape control of optical device processing. Summary of the invention

[0003] The main purpose of the present invention is to solve the technical problem of secondary deformation caused by internal stress release in existing optical device processing methods; A first aspect of the present invention provides a method for controlling the processing surface shape of an optical device, the method comprising: Perform initial grinding and polishing on the optical device, and use a multi-band stress detector for real-time detection to obtain stress distribution information and surface wavefront data to obtain initial detection results; Using a phase-shifting interferometer and a composite laser confocal probe to perform depth surface shape measurement according to the initial detection result, and adaptively trimming the abnormal area of ​​the processed surface shape based on the measurement result to obtain a surface shape trimming log; According to the initial detection results and the surface shape modification log, step-by-step load irradiation and stress tracking processing are performed on the optical device to collect surface shape changes under light-thermal coupling to obtain surface shape evolution information; According to the surface shape evolution information, the optical device is subjected to partitioned dynamic compensation and real-time detection until a surface shape control result that meets preset requirements is obtained.

[0004] Optionally, in a first implementation of the first aspect of the present invention, the optical device is initially ground and polished, and a multi-band stress detector is used to perform real-time detection to obtain stress distribution information and surface wavefront data, and the initial detection result includes: Perform multi-level grinding and polishing on the surface of optical devices, and detect the surface morphology data after polishing; Performing band allocation processing on the multi-band stress detector according to the surface topography data, detecting the refractive index change of the optical device by using a polarization measurement method in the visible and near-infrared ranges, and obtaining a refractive index drift matrix; Performing a matching operation on the refractive index drift matrix and the surface morphology data after polishing, and screening the refractive index drift excess area and the local wavefront distortion area based on the matching result to obtain stress dispersion information; The surface wavefront data of the surface of the optical device is detected by a preset reference interferometer, and the stress distribution information and the surface wavefront data are used as initial detection results.

[0005] Optionally, in a second implementation of the first aspect of the present invention, the phase-shifting interferometer and the composite laser confocal probe are used to perform depth surface shape measurement according to the initial detection result, and the abnormal area of ​​the processed surface shape is adaptively trimmed based on the measurement result, and the surface shape trimming log is obtained, including: Using a phase-shifting interferometer to perform interference scanning processing on the refractive index drift excess region and the local wavefront distortion region of the optical device according to the initial detection result, to obtain scanning phase data; Performing interpolation fitting processing on the scanning phase data combined with the local height measurement result of the composite laser confocal probe to generate the curvature deviation distribution of the free-form surface or the reflective mirror area; Performing adaptive trimming processing on the area where the curvature deviation distribution exceeds a preset threshold through ion beam trimming, and collecting trimming parameters during trimming to obtain a corresponding list of trimming coordinates and removal amounts; The corresponding list is compared with the trimmed scanning phase data again, the correction status of each refractive index drift excess region and local wavefront distortion region is recorded, and the surface shape trimming log is output.

[0006] Optionally, in a third implementation of the first aspect of the present invention, the interpolation fitting process is performed on the scanning phase data in combination with the local height measurement result of the composite laser confocal probe to generate the curvature deviation distribution of the free-form surface or the reflective mirror area, including: Performing coordinate matching processing on the scanning phase data to obtain a multidimensional data index corresponding to a local height measurement result of the composite laser confocal probe; Segmentally extracting the multidimensional data index according to the surface detail level to obtain a multi-resolution data set; Performing a surface fitting operation on the multi-resolution data set by a cubic spline interpolation algorithm, and calculating the radian difference at each coordinate according to a pre-calibrated optical device curvature model; The free-form surface or the reflective mirror surface area is gradient divided according to the curvature difference to distinguish high deviation areas from low deviation areas, and obtain curvature deviation distribution.

[0007] Optionally, in a fourth implementation of the first aspect of the present invention, performing step-by-step load irradiation and stress tracking processing on the optical device according to the initial detection result and the surface shape modification log, collecting the surface shape change under the photothermal coupling, and obtaining the surface shape evolution information includes: According to the initial detection results, the optical device is subjected to temperature module configuration processing under a step load irradiation environment, and a pre-segmented energy segment and temperature gradient are set; Performing step-wise illumination on the optical device according to the energy segment and the temperature gradient, collecting the interference fringe distribution in each energy segment with a high-speed interference detection device to obtain a time-sharing phase matrix, and using a temperature sensor to collect the temperature distribution of the optical device in each energy segment; Compare the time-sharing phase matrix with the trimming coordinates in the surface trimming log to determine the area where the abnormal wavefront drift occurs again, and record the deformation amplitude data of the area where the abnormal wavefront drift occurs in a high temperature or high energy environment; The deformation amplitude data is continuously differentially processed to obtain a deformation time series, and the deformation time series is correlated and mapped with the temperature distribution to output a stress accumulation curve and a boundary displacement state as surface shape evolution information.

[0008] Optionally, in a fifth implementation of the first aspect of the present invention, the continuous difference processing is performed on the deformation amplitude data to obtain a deformation time series, and the deformation time series is associated with the temperature distribution and mapped, and the stress accumulation curve and boundary displacement state output as the surface shape evolution information include: The deformation amplitude data is indexed and segmented according to the time step to obtain the deformation difference between adjacent moments; Performing differential operation on the deformation difference to generate a deformation time series and record it in a multidimensional matrix; Aligning the multidimensional matrix with the temperature distribution at the coordinate level, associating and matching the deformation value of each time node with the corresponding temperature value through linear interpolation, and obtaining a deformation-temperature mapping pair; Curve fitting operation is performed on the deformation-temperature mapping pair to generate a stress accumulation curve and track the boundary displacement changes in the mapping space to obtain the boundary displacement state.

[0009] Optionally, in a sixth implementation of the first aspect of the present invention, performing partitioned dynamic compensation on the optical device and real-time detection according to the surface shape evolution information until a surface shape control result meeting preset requirements is obtained includes: According to the surface shape evolution information, the optical device is partitioned and processed to define a number of high-energy sensitive areas and thermal coupling stress areas; Performing dynamic compensation processing on the high-energy sensitive area and the thermal coupling stress area through a programmable piezoelectric array to adjust the local curvature and position balance in real time; In the dynamic compensation process, a fast phase shift algorithm is used to perform interference fringe tracking processing on the optical device to obtain curvature and refractive index change data, and auxiliary polishing is performed on the curvature exceeding limit area based on the curvature and refractive index change data; The corrected curvature and refractive index change data in each energy segment or temperature range are checked step by step to obtain the surface deviation. If the surface deviation is within the set tolerance, the surface control result is obtained.

[0010] A second aspect of the present invention provides a control system for processing a surface shape of an optical device, the control system for processing a surface shape of an optical device comprising: The initial grinding and polishing detection module is used to perform initial grinding and polishing on optical devices. At the same time, a multi-band stress detector is used for real-time detection to obtain stress distribution information and surface wavefront data to obtain initial detection results. A depth measurement and trimming module is used to perform depth surface measurement according to the initial detection result by using a phase-shifting interferometer and a composite laser confocal probe, and to adaptively trim the abnormal area of ​​the processed surface shape based on the measurement result to obtain a surface shape trimming log; A load sharing tracking module is used to perform step-by-step load irradiation and stress tracking processing on the optical device according to the initial detection results and the surface shape modification log, collect surface shape changes under light-thermal coupling, and obtain surface shape evolution information; The dynamic compensation module is used to perform partitioned dynamic compensation and real-time detection on the optical device according to the surface shape evolution information until a surface shape control result that meets the preset requirements is obtained.

[0011] The control method and system for the surface shape of optical device processing described above performs initial grinding and polishing on the optical device, uses a multi-band stress detector for real-time detection, obtains stress distribution and surface wavefront data, and obtains initial detection results; uses a phase-shifting interferometer and a composite laser confocal probe to perform deep surface shape measurement based on the initial detection results, adaptively trims abnormal areas, and obtains a surface shape trimming log; performs step-load irradiation and stress tracking based on the initial detection results and the trimming log, collects surface shape changes under photothermal coupling, and obtains surface shape evolution information; performs partitioned dynamic compensation and real-time detection based on the surface shape evolution information until a surface shape control result that meets the requirements is obtained. This method combines multi-band stress detection with high-precision interferometry to identify and correct secondary deformation caused by internal stress release, and achieves high-precision control of the surface shape of optical devices. It is suitable for scenes with high requirements for the surface shape of optical components.

[0012] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention are realized and obtained by the structures particularly pointed out in the description, claims and drawings.

[0013] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 A schematic diagram of a first embodiment of a method for controlling the processing surface shape of an optical device according to an embodiment of the present invention; Figure 2 It is a schematic diagram of an embodiment of a control system for processing the surface shape of an optical device in an embodiment of the present invention. DETAILED DESCRIPTION

[0015] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0016] The terms "including" and "having" and any variations thereof mentioned in the embodiments of the present invention are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device end including a series of steps or units is not limited to the listed steps or units, but may optionally include other steps or units that are not listed, or may optionally include other steps or units that are inherent to these processes, methods, products or device ends.

[0017] To facilitate understanding of this embodiment, a method for controlling the surface shape of an optical device processed according to an embodiment of the present invention is first described in detail. Figure 1 As shown, the method comprises the following steps: 101. Perform initial grinding and polishing on the optical device, and use a multi-band stress detector for real-time detection to obtain stress distribution information and surface wavefront data to obtain initial detection results; In one embodiment of the present invention, the optical device is initially ground and polished, and a multi-band stress detector is used for real-time detection to obtain stress distribution information and surface wavefront data, and the initial detection result includes: performing multi-level grinding and polishing on the surface of the optical device, and detecting the surface morphology data after polishing; performing band allocation processing on the multi-band stress detector according to the surface morphology data, and detecting the refractive index change of the optical device using a polarization measurement method in the visible and near-infrared ranges to obtain a refractive index drift matrix; performing a matching operation on the refractive index drift matrix and the surface morphology data after polishing, and screening the refractive index drift excess area and the local wavefront distortion area based on the matching result to obtain stress distribution information; detecting the surface wavefront data of the surface of the optical device by a preset reference interferometer, and using the stress distribution information and surface wavefront data as the initial detection result.

[0018] Specifically, in the control method of the processing surface shape of optical devices, the initial grinding and polishing treatment and the real-time detection of multi-band stress detection are the key steps to ensure the final optical performance. First, the surface of the optical device is subjected to multi-level grinding and polishing. This process adopts a multi-stage process from coarse grinding to fine grinding and then to ultra-precision polishing. Each stage uses abrasives of different particle sizes and polishing liquids with optimized ratios to gradually remove the surface material and finely adjust the surface morphology. Specifically, coarser abrasives are used in the primary grinding stage to quickly remove excess material and form a preliminary curved surface shape; medium-sized abrasives are used in the intermediate grinding stage to further refine the surface and reduce roughness; and the final ultra-precision polishing stage uses extremely fine-grained polishing agents to achieve nano-level surface finish. The grinding and polishing parameters of each stage, such as feed speed, grinding pressure and polishing time, are precisely controlled to ensure the uniformity of material removal and the accuracy of surface morphology.

[0019] After polishing, a high-resolution surface profile measuring instrument (such as a white light interference microscope) is used to detect the polished surface morphology to obtain detailed surface morphology data. These data are usually expressed as a two-dimensional height distribution function. ,in and are surface coordinates, It indicates the height deviation of the surface at that point. Through mathematical tools such as Fourier transform, the surface topography data can be converted into frequency domain information, the spatial frequency components of the surface topography can be analyzed, and potential topography defects or uneven areas can be identified. Specifically, the surface topography data is calculated by the formula Perform Fourier transform, where represents the Fourier transform operation, and is the frequency domain coordinate. By analyzing The amplitude spectrum can determine the smoothness of the surface morphology and the spatial distribution characteristics of the wavefront error. Subsequently, the multi-band stress detector is processed for band allocation based on the surface morphology data. The multi-band stress detector covers two main bands: visible light (approximately 400-700 nanometers) and near-infrared light (approximately 700-2500 nanometers). First, the surface morphology data is input into the band allocation module, and the most suitable band for detecting internal stress release is determined through spatial frequency analysis. Specifically, based on the formula ,in For the best detection wavelength, The stress wave number is obtained by adjusting the working band of the multi-band stress detector to flexibly switch the wavelength in different regions to meet the detection needs of different stress release modes. The refractive index change of optical devices is detected by polarization measurement in the visible and near-infrared range to obtain the refractive index drift matrix. Polarization measurement uses a polarized light source to illuminate the surface of the optical device and uses a polarization analyzer to capture the refractive index changes caused by internal stress. These changes are measured by the formula ,in is the refractive index change, is the change in polarized light intensity, is the incident light intensity, and the refractive index drift matrix is ​​calculated The matrix records the refractive index changes of each point on the surface of the optical device in different bands, reflecting the tiny refractive index drift caused by the internal stress release. Matching the refractive index drift matrix with the surface morphology data after polishing is a key step in identifying stress concentration and wavefront distortion areas. The specific operation includes matching the refractive index drift matrix Surface morphology data Perform point-by-point comparisons using correlation analysis or image processing algorithms, such as cross-correlation functions , evaluate the consistency of the two matrices in space. By setting the threshold and , filter out the refractive index drift excess area and local wavefront distortion area, that is, select And the wavefront error These areas are automatically identified by image processing algorithms (such as edge detection based on template matching or convolutional neural networks) to improve the accuracy and efficiency of screening and ultimately obtain detailed stress dispersion information. The surface wavefront data of the surface of the optical device is detected by a preset reference interferometer to further improve the initial detection result. The reference interferometer adopts phase shift interferometry technology to generate an interference fringe image by superimposing the test beam and the reference beam, and uses a phase shift algorithm to generate an interference fringe image. unwrap The interference fringes are phase unwrapped to obtain continuous wavefront phase distribution data. These data are expressed by the formula ,in is the number of phase jumps to ensure the continuity and accuracy of the wavefront phase. Surface wavefront data Conduct comprehensive analysis, use multivariate regression analysis or principal component analysis (PCA) methods to establish a mathematical model between stress dispersion information and wavefront error, and form a complete initial test result This result not only includes the macroscopic morphology and microscopic stress distribution of the optical device surface, but also reveals the wavefront distortion caused by the internal stress release, providing comprehensive and accurate data support for subsequent deep surface measurement and adaptive trimming. Through this comprehensive detection method, potential surface control problems can be identified at the early stage of processing, ensuring that the optical device is accurately controlled and corrected in the subsequent processing steps, thereby improving the optical performance and reliability of the final product.

[0020] 102. Performing depth surface shape measurement according to the initial detection results using a phase-shifting interferometer and a composite laser confocal probe, and adaptively trimming the abnormal area of ​​the processed surface shape based on the measurement results to obtain a surface shape trimming log; In one embodiment of the present invention, the phase-shifting interferometer and the composite laser confocal probe are used to perform depth surface shape measurement according to the initial detection result, and the abnormal area of ​​the processed surface shape is adaptively trimmed based on the measurement result to obtain a surface shape trimming log, which includes: using the phase-shifting interferometer to perform interference scanning processing on the refractive index drift excess area and the local wavefront distortion area of ​​the optical device according to the initial detection result to obtain scanning phase data; interpolation fitting processing is performed on the scanning phase data in combination with the local height measurement result of the composite laser confocal probe to generate the curvature deviation distribution of the free surface or the reflective mirror area; ion beam trimming is used to perform adaptive trimming processing on the area where the curvature deviation distribution exceeds a preset threshold, and trimming parameters are collected during trimming to obtain a corresponding list of trimming coordinates and removal amounts; the corresponding list is compared with the trimmed scanning phase data again to record the correction status of each refractive index drift excess area and local wavefront distortion area, and output the surface shape trimming log.

[0021] Specifically, first, the surface of the optical device is subjected to multi-stage grinding and polishing. This process is divided into three stages: coarse grinding, fine grinding and ultra-precision polishing. Abrasives of different particle sizes and polishing liquids with optimized ratios are used in each stage to gradually remove the surface material and finely adjust the surface morphology. In the coarse grinding stage, abrasives with larger particle sizes (such as 10 microns) are used, and excess materials are quickly removed through higher feed speeds and grinding pressures to form a preliminary curved surface shape. Subsequently, the fine grinding stage is entered, and abrasives with medium particle sizes (such as 1 micron) are used to reduce surface roughness and reduce macroscopic morphology errors. Finally, in the ultra-precision polishing stage, polishing agents with extremely fine particle sizes (such as 0.1 microns) are used, and nanometer-level surface finish is achieved through low-speed feed and finely controlled grinding pressure. The processing parameters of each stage (such as feed speed) , Grinding pressure and polishing time Real-time monitoring and adjustment are performed through feedback control systems to ensure uniformity of material removal and accuracy of surface morphology. After completing multi-level grinding and polishing, high-resolution surface profile measuring instruments (such as white light interference microscopes) are used to detect the polished surface morphology to obtain detailed surface morphology data. These data are usually expressed as a two-dimensional height distribution function ,in and are surface coordinates, Indicates the height deviation of the surface at that point. In order to further analyze the spatial frequency components of the surface morphology, the Fourier transform formula is applied: ; in, is the surface topography data in the frequency domain, and is the frequency domain coordinate. By analyzing The amplitude spectrum of the surface morphology can identify the main spatial frequency components, and then detect potential morphological defects or uneven areas. Next, according to the surface morphology data, the multi-band stress detector is processed by band allocation. The multi-band stress detector covers two main bands: visible light (about 400-700 nanometers) and near-infrared light (about 700-2500 nanometers). First, the surface morphology data is converted into The input band allocation module determines the most suitable band for detecting internal stress release through spatial frequency analysis. Specifically, based on the formula: ; in, For the best detection wavelength, The working band of the detector is adjusted to flexibly switch the wavelength in different regions to meet the detection needs of different stress release modes. The refractive index change of the optical device is detected by polarization measurement in the visible and near-infrared range to obtain the refractive index drift matrix. Polarization measurement uses a polarized light source to illuminate the surface of the optical device and uses a polarization analyzer to capture the refractive index changes caused by the internal stress release. These changes are expressed by the formula ; in, is the refractive index change, is the change in polarized light intensity, is the incident light intensity, and the refractive index drift matrix is ​​calculated The matrix records the refractive index changes at various points on the surface of the optical device in different wavelengths, reflecting the tiny refractive index drift caused by the release of internal stress.

[0022] Then, the refractive index drift matrix is ​​matched with the surface morphology data after polishing. A correlation analysis algorithm such as a correlation function is used. , evaluate the consistency of the two matrices in space. By setting the threshold and , filter out And the wavefront error The areas with excessive refractive index drift and local wavefront distortion are identified. These areas are automatically identified through image processing algorithms (such as edge detection based on template matching or convolutional neural networks) to improve the accuracy and efficiency of screening, and finally obtain detailed stress dispersion information. Finally, the surface wavefront data of the optical device is detected by a preset reference interferometer to further improve the initial detection results. The reference interferometer uses phase shift interferometry technology to generate an interference fringe image by superimposing the test beam and the reference beam, and uses a phase shift algorithm: ; The interference fringes are phase unwrapped to obtain continuous wavefront phase distribution data. These data are expressed by the formula ; in, is the number of phase jumps to ensure the continuity and accuracy of the wavefront phase. Surface wavefront data Conduct comprehensive analysis, use multivariate regression analysis or principal component analysis (PCA) methods to establish a mathematical model between stress dispersion information and wavefront error, and form a complete initial test result .

[0023] Furthermore, the interpolation and fitting processing of the scanning phase data in combination with the local height measurement result of the composite laser confocal probe to generate the curvature deviation distribution of the free surface or the reflective mirror area includes: performing coordinate matching processing on the scanning phase data to obtain a multidimensional data index corresponding to the local height measurement result of the composite laser confocal probe; segmentally extracting the multidimensional data index according to the surface detail level to obtain a multi-resolution data set; performing surface fitting operation on the multi-resolution data set through a cubic spline interpolation algorithm, and calculating the curvature difference at each coordinate according to a pre-calibrated optical device curvature model; and performing gradient division processing on the free surface or the reflective mirror area according to the curvature difference to distinguish between high deviation areas and low deviation areas to obtain the curvature deviation distribution.

[0024] Specifically, first, coordinate matching processing is performed on the scanning phase data to ensure the consistency and accuracy of the data. This step is performed by matching the scanning phase data obtained by the phase shift interferometer Local height measurement results obtained with the composite laser confocal probe Perform spatial coordinate alignment. Use a rigid registration algorithm to minimize the mean square error (MSE) between the two data sets and calculate the optimal translation and rotation parameters so that the two data sets are highly consistent in the spatial coordinate system. The specific formula is as follows: ; By solving the above optimization problem, we can obtain the translation parameters and , and the scanning phase data and the local height measurement results are translated and rotated to generate a multidimensional data index corresponding to the local height measurement results of the composite laser confocal probe This process ensures that subsequent data fusion and fitting operations are based on accurately aligned spatial coordinates. Next, the multidimensional data index is segmented according to the surface detail level to obtain a multi-resolution data set. This step is achieved by analyzing the surface curvature change rate To determine the level of detail in different areas. Specifically, the curvature change rate of each point is calculated: ; According to the curvature change rate The surface is divided into high-detail level areas and low-detail level areas by using a threshold. High-detail level areas represent areas with dramatic changes in curvature, which require higher resolutions for fitting; low-detail level areas have gentle changes in curvature, so lower resolutions can be used. Using multi-resolution analysis methods, such as pyramid decomposition, the dataset is segmented and extracted into different resolution levels to form a multi-resolution dataset. This segmented extraction method can optimize computing resources and improve processing efficiency while ensuring fitting accuracy. Subsequently, the multi-resolution data set is subjected to surface fitting calculations using a cubic spline interpolation algorithm, and the radian difference at each coordinate is calculated according to a pre-calibrated optical device curvature model. In the specific implementation process, a theoretical curvature model of the optical device is first established. , and then use the cubic spline interpolation function For multi-resolution datasets Perform fitting to generate fitting surface The cubic spline interpolation formula is as follows: ; Determine interpolation coefficients by least squares method , so that the fitting surface is closest to the actual measured data. Calculate the radian difference ; This difference reflects the deviation between the actual machined surface shape and the designed curvature model, generating the curvature deviation distribution of the free-form surface or reflective mirror area. Finally, the free-form surface or the reflective mirror area is gradient-divided according to the curvature difference, and the high deviation area and the low deviation area are distinguished to obtain the curvature deviation distribution. This step is achieved by setting the curvature difference threshold , the radian deviation is divided into high deviation area and low deviation area, and the gradient analysis algorithm, such as Sobel operator, is used to further refine the boundary of the high deviation area to ensure accurate identification of the area that needs adaptive trimming. Finally, the generated radian deviation distribution The figure not only intuitively shows the overall accuracy of the optical device surface, but also clearly identifies the high-deviation areas that need to be focused on, providing an accurate positioning basis for subsequent adaptive trimming.

[0025] 103. Perform step-by-step load irradiation and stress tracking processing on the optical device according to the initial detection results and the surface modification log, collect the surface shape changes under the light-thermal coupling, and obtain the surface shape evolution information; In one embodiment of the present invention, performing step-by-step load irradiation and stress tracking processing on the optical device according to the initial detection result and the surface shape modification log, collecting the surface shape changes under the photothermal coupling, and obtaining the surface shape evolution information includes: performing temperature module configuration processing on the optical device under the step-by-step load irradiation environment according to the initial detection result, and setting the pre-segmented energy segment and temperature gradient; performing step-by-step illumination on the optical device according to the energy segment and temperature gradient, and collecting the interference fringe distribution in each energy segment with the high-speed interference detection device to obtain a time-sharing phase matrix, and using a temperature sensor to collect the temperature distribution of the optical device in each energy segment; comparing the time-sharing phase matrix with the modification coordinates in the surface shape modification log to determine the area where the abnormal wavefront drift appears again, and recording the deformation amplitude data of the area with the abnormal wavefront drift in a high temperature or high energy environment; performing continuous difference processing on the deformation amplitude data to obtain a deformation time series, and correlating and mapping the deformation time series with the temperature distribution, and outputting a stress accumulation curve and a boundary displacement state as the surface shape evolution information.

[0026] Specifically, in the control method of the surface shape of optical devices, performing step-by-step load irradiation and stress tracking processing to collect surface shape changes under photothermal coupling is a key step to ensure that the optical device maintains a high-precision surface shape in a high-energy environment. First, based on the stress distribution information in the initial detection results, the temperature module configuration processing is performed on the optical device under the step-by-step load irradiation environment, and the pre-segmented energy segments and temperature gradients are set. Specifically, the finite element analysis (FEA) software is used to simulate the thermal stress of the optical device to determine the temperature response patterns of different areas in different energy segments. Through the formula: ; in, Indicates at time Coordinates The accumulated thermal stress For the Irradiation intensity in each energy range In order to correspond to the temperature gradient under the energy segment, the configuration of each energy segment and temperature gradient is determined by an optimization algorithm to achieve uniform stress distribution and minimize local stress concentration. The temperature module configuration ensures that in each energy segment, the temperature gradient of the optical device strictly changes according to the preset parameters by precisely controlling the power and irradiation time of the light source, thereby achieving the heat load distribution of the optical device. Subsequently, the optical device is subjected to step-by-step illumination according to the set energy segment and temperature gradient, and the interference fringe distribution in each energy segment is collected in conjunction with a high-speed interference detection device to obtain a time-sharing phase matrix. At the same time, a temperature sensor is used to collect the temperature distribution of the optical device in each energy segment. In the specific operation, a high-power adjustable laser source is used to apply illumination of different energy segments in turn. After each energy segment, a high-speed phase-shifting interferometer is used to record the interference fringe distribution on the surface of the optical device to generate a corresponding phase data matrix. At the same time, the temperature sensor (such as thermocouple or infrared thermal imager) arranged on the surface of the optical device records the temperature change in real time and generates a temperature distribution matrix By synchronously collecting interference fringe distribution and temperature distribution data, a time-sharing phase matrix is ​​constructed. and temperature field data ,These data provide the basis for subsequent wavefront drift detection and stress analysis. Next, the time-sharing phase matrix is ​​compared with the trimming coordinates in the surface modification log to determine the area where abnormal wavefront drift occurs again, and record the deformation amplitude data of the area with abnormal wavefront drift in high temperature or high energy environment. Specifically, using image matching algorithms, such as cross-correlation function , the phase matrix of the current energy segment with the trimmed coordinates in the trim log Perform spatial comparison to identify areas where the wavefront drift exceeds a preset threshold. For these areas, calculate the magnitude of the deformation ; in, To modify the reference phase data recorded in the log. By setting the deformation amplitude threshold , filter out the deformation amplitude area, record its deformation amplitude data ,These data reflect the wavefront drift caused by stress release on the surface of optical devices under high temperature or high energy environment, and provide accurate stress response information. Finally, the deformation amplitude data are continuously differentiated to obtain the deformation time series, and the deformation time series is correlated with the temperature distribution to output the stress accumulation curve and boundary displacement state as the surface shape evolution information. In the specific implementation, the deformation amplitude data are analyzed by time series analysis method. Perform first-order or second-order difference processing to generate deformation time series ; Then, data fusion technology is used to combine the deformation time series with the corresponding temperature distribution Perform correlation mapping, establish a mathematical model between deformation and temperature through multivariate regression analysis or machine learning algorithms (such as support vector machines or random forests), and generate stress accumulation curves and boundary displacement state The formula is as follows: ; ; in, Represents the correlation mapping function between deformation and temperature. In this way, the stress accumulation curve formed Describes the accumulation of stress at various points on the surface of the optical device at different time points, and the boundary displacement state It reflects the dynamic change of the boundary curvature of the optical device. Ultimately, the output stress accumulation curve and work displacement state provide detailed stress distribution and deformation trend data for subsequent dynamic compensation, ensuring that the optical device can maintain a stable surface shape in a high-energy environment and meet the requirements of high-precision optical systems.

[0027] Furthermore, the deformation amplitude data is continuously differentially processed to obtain a deformation time series, and the deformation time series is associated with the temperature distribution and mapped, and the stress accumulation curve and boundary displacement state as the surface evolution information are output, including: the deformation amplitude data is indexed and segmented according to the time step to obtain the deformation difference between adjacent moments; the deformation difference is differentially operated to generate a deformation time series and recorded in a multidimensional matrix; the multidimensional matrix is ​​aligned with the temperature distribution at the coordinate level, and the deformation value of each time node is associated and matched with the corresponding temperature value through linear interpolation to obtain a deformation-temperature mapping pair; and a curve fitting operation is performed on the deformation-temperature mapping pair to generate a stress accumulation curve and track the boundary displacement change in the mapping space to obtain a boundary displacement state.

[0028] Specifically, first, the deformation amplitude data is indexed and segmented according to the time step to obtain the deformation difference between adjacent moments. This process starts with the continuously collected deformation data and segments it according to a predetermined time step (for example, once per second) to accurately capture the tiny deformation changes of the optical device at different time points. Assume that the deformation amplitude data is at time and coordinates The value at Then, by index segmentation, the deformation difference between adjacent moments can be calculated: ; This differential calculation method can reveal the deformation change trend of the optical device in each time step and provide basic data for dynamic monitoring. In this way, the deformation differential data formed not only reflects the response change of the optical device surface in a short period of time, but also lays the foundation for the subsequent construction of the deformation time series. Next, the deformation differential is differentially calculated to generate a deformation time series and record it in a multidimensional matrix. This step constructs the deformation evolution path of the optical device during the entire processing process by further processing the segmented deformation differential data. The specific operation includes arranging the differential deformation data in chronological order to form a deformation time series containing multiple time nodes. . The sequence is organized into a multidimensional matrix, in which each dimension corresponds to time, X-coordinate and Y-coordinate, recording the deformation changes of the optical device at different times and spatial positions. This multidimensional matrix recording method can fully reflect the dynamic deformation characteristics of the optical device during the processing, which is convenient for subsequent stress analysis and cumulative curve generation. Subsequently, the multidimensional matrix is ​​aligned with the temperature distribution at the coordinate level, and the deformation value of each time node is associated and matched with the corresponding temperature value through linear interpolation to obtain a deformation-temperature mapping pair. This process first performs a temperature distribution data collected by the temperature sensor. Preprocessing, including denoising and standardization, is performed to ensure the accuracy and consistency of the data. Then, a linear interpolation algorithm is used to calculate the deformation time series. and temperature distribution data Interpolation matching is performed so that the deformation value of each time node can accurately correspond to a precise temperature value. Specifically, the formula is used: ; in, , and is the interpolation coefficient, which is determined by the least square method or other optimization algorithms to ensure the best match between the deformation data and the temperature data. It reflects the deformation response of optical devices under different temperature conditions and provides a key data basis for stress accumulation analysis. Finally, a curve fitting operation is performed on the deformation-temperature mapping pair to generate a stress accumulation curve and track the boundary displacement changes in the mapping space to obtain the boundary displacement state. This step fits the deformation-temperature mapping pair by applying a curve fitting algorithm, such as polynomial regression or support vector regression (SVR), to establish a mathematical relationship model between deformation and temperature. By formula: ; in, represents the stress accumulation curve, and is the regression coefficient, is a constant term that describes the optical device at a specific coordinate At the same time, using the boundary displacement state Tracks the curvature changes of the optical device boundary by comparing the current curvature With design curvature , evaluate the displacement state of the boundary area. The formula is as follows: ; This process uses curve fitting and boundary tracking methods to generate stress accumulation curves and boundary displacement states that not only describe the dynamic accumulation of stress in optical devices, but also reflect the deformation trend of the boundary area.

[0029] 104. Perform partitioned dynamic compensation on the optical device and perform real-time detection according to the surface shape evolution information until a surface shape control result that meets the preset requirements is obtained.

[0030] In one embodiment of the present invention, the method of performing zoned dynamic compensation and real-time detection on the optical device according to the surface shape evolution information until a surface shape control result that meets preset requirements is obtained includes: performing zoned division processing on the optical device according to the surface shape evolution information to define a plurality of high-energy sensitive areas and thermal coupling stress areas; performing dynamic compensation processing on the high-energy sensitive areas and thermal coupling stress areas through a programmable piezoelectric array to adjust the local curvature and position balance in real time; performing interference fringe tracking processing on the optical device using a fast phase shift algorithm during the dynamic compensation process to obtain curvature and refractive index change data, and performing auxiliary polishing on the curvature excess area based on the curvature and refractive index change data; and performing step-by-step inspection on the corrected curvature and refractive index change data in each energy segment or temperature range to obtain surface shape deviations. If the surface shape deviations are all within the set tolerances, a surface shape control result is obtained.

[0031] Specifically, first, the optical device is partitioned and processed according to the surface evolution information, and several high-energy sensitive areas and thermal coupling stress areas are defined. This process identifies the sensitivity of the optical device surface to high-energy irradiation and thermal load in different areas by spatially analyzing the stress accumulation curve and boundary displacement state in the surface evolution information. Using image segmentation algorithms, such as threshold-based segmentation or clustering algorithms (such as K-means clustering), the surface of the optical device is divided into multiple areas, including high-energy sensitive areas and thermal coupling stress areas. High-energy sensitive areas are usually located at the edges or specific functional areas of the optical device, which are prone to significant deformation and stress concentration under high-energy irradiation; while thermal coupling stress areas are distributed in the middle of the optical device or other areas that are more affected by heat. This partitioning process can accurately locate the areas that need to be compensated, optimize the allocation of compensation resources, and improve the efficiency and accuracy of overall surface control.

[0032] Subsequently, the high-energy sensitive area and the thermal coupling stress area are dynamically compensated by a programmable piezoelectric array to adjust the local curvature and position balance in real time. As a precision actuator, the programmable piezoelectric array can apply precise force or displacement at a microscopic scale to correct the local deformation of the surface of the optical device. In the specific operation, firstly, according to the partitioning result, the position and action parameters of the piezoelectric array are configured, and the control system issues instructions to adjust the voltage input of the piezoelectric element to achieve real-time compensation of the high-energy sensitive area and the thermal coupling stress area. The compensation process requires real-time monitoring of the curvature change of the surface of the optical device, and dynamically adjusts the output of the piezoelectric array through feedback control algorithms (such as PID control or fuzzy control) to ensure that the local curvature is consistent with the design curvature. In addition, a sensor network (such as strain gauges and displacement sensors) is used to collect the response data of the optical device surface during the compensation process in real time to ensure the accuracy and stability of the compensation. In this way, the local deformation of the surface of the optical device can be accurately corrected, and the overall surface shape accuracy is significantly improved.

[0033] During the dynamic compensation process, a fast phase shift algorithm is used to track the interference fringes of the optical device to obtain the curvature and refractive index change data, and auxiliary polishing is performed on the curvature over-limit area based on the curvature and refractive index change data. The fast phase shift algorithm obtains multiple interference images by introducing a known phase shift amount (such as 90 degrees, 180 degrees, etc.) in the interferometer, and calculates the precise wavefront morphology through phase unpacking technology. This process can capture the tiny curvature changes and refractive index changes on the surface of the optical device in real time, and generate high-resolution curvature and refractive index change data. For the detected curvature over-limit area, the system automatically identifies and marks the area that needs further trimming, and starts the auxiliary polishing program. Auxiliary polishing usually uses precision polishing equipment, combined with real-time feedback control, to perform local material removal and morphology adjustment on the over-limit area to ensure that the curvature of these areas is restored to the design standard. Through this combination of auxiliary polishing and dynamic compensation, the overall morphology of the optical device surface can be further optimized to ensure the high accuracy and consistency of the final surface shape control results.

[0034] Finally, the corrected curvature and refractive index change data in each energy segment or temperature range are checked step by step to obtain the surface deviation. If the surface deviation is within the set tolerance, the surface control result is obtained. In the specific implementation, the interferometer and temperature sensor are used to collect the corrected curvature and refractive index data after each energy segment or temperature range, and compare and analyze them with the design standard. By calculating the deviation between the deformation variable and the design value: in, Indicated in coordinates The arc deviation at is the measured value, is the design value. Set the tolerance range , screen the deviation of each point to ensure that all deviations meet If the deviations in all areas are within the tolerance range, the system confirms that the surface shape control results meet the preset requirements and stops the compensation process; otherwise, dynamic compensation and auxiliary polishing continue until the surface shape deviations in all areas meet the design standards. Through this step-by-step inspection and feedback adjustment mechanism, the surface shape stability and high precision of optical devices in high-energy environments are ensured to meet the strict requirements of high-performance optical systems.

[0035] In this embodiment, the optical device is initially ground and polished, and a multi-band stress detector is used for real-time detection to obtain stress distribution and surface wavefront data, and the initial detection results are obtained; a phase-shifting interferometer and a composite laser confocal probe are used to perform deep surface shape measurement based on the initial detection results, and the abnormal area is adaptively trimmed to obtain a surface shape trimming log; based on the initial detection results and the trimming log, step-by-step load irradiation and stress tracking are performed to collect surface shape changes under photothermal coupling to obtain surface shape evolution information; based on the surface shape evolution information, partition dynamic compensation is performed and real-time detection is performed until a surface shape control result that meets the requirements is obtained. This method combines multi-band stress detection with high-precision interferometry to identify and correct secondary deformation caused by internal stress release, and achieves high-precision control of the surface shape of optical devices, which is suitable for scenes with high requirements for the surface shape of optical components.

[0036] The above describes the control method of the optical device processing surface shape in the embodiment of the present invention. The following describes the control system of the optical device processing surface shape in the embodiment of the present invention. Figure 2 In one embodiment of the present invention, a control system for processing the surface shape of an optical device includes: The initial grinding and polishing detection module 201 is used to perform initial grinding and polishing on the optical device, and at the same time use a multi-band stress detector to perform real-time detection to obtain stress distribution information and surface wavefront data to obtain initial detection results; The depth measurement and trimming module 202 is used to perform depth surface measurement according to the initial detection result by using a phase-shifting interferometer and a composite laser confocal probe, and to adaptively trim the abnormal area of ​​the processed surface shape based on the measurement result to obtain a surface shape trimming log; The load distribution tracking module 203 is used to perform step-by-step load irradiation and stress tracking processing on the optical device according to the initial detection result and the surface shape modification log, collect the surface shape changes under the light-heat coupling, and obtain the surface shape evolution information; The dynamic compensation module 204 is used to perform partitioned dynamic compensation and real-time detection on the optical device according to the surface shape evolution information until a surface shape control result that meets preset requirements is obtained.

[0037] In an embodiment of the present invention, the control system of the processing surface shape of the optical device runs the control method of the processing surface shape of the optical device. The control system of the processing surface shape of the optical device performs initial grinding and polishing on the optical device, uses a multi-band stress detector for real-time detection, obtains stress distribution and surface wavefront data, and obtains initial detection results; uses a phase-shifting interferometer and a composite laser confocal probe to perform deep surface shape measurement based on the initial detection results, adaptively trims abnormal areas, and obtains a surface shape trimming log; performs step-by-step load irradiation and stress tracking based on the initial detection results and the trimming log, collects surface shape changes under photothermal coupling, and obtains surface shape evolution information; performs partitioned dynamic compensation and real-time detection based on the surface shape evolution information until a surface shape control result that meets the requirements is obtained. This method combines multi-band stress detection with high-precision interferometry to identify and correct secondary deformation caused by internal stress release, and achieves high-precision control of the surface shape of optical devices. It is suitable for scenes with high requirements for the surface shape of optical components.

[0038] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the above-described system, device, or unit can refer to the corresponding process in the aforementioned method embodiment and will not be repeated here.

[0039] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art or the whole or part of the technical solution can be embodied in the form of a software product. The computer software product is stored in a storage medium, including several instructions to enable a computer device (which can be a personal computer, server, or network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM), random access memory (RAM), disk or optical disk and other media that can store program code.

[0040] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features thereof may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for controlling the surface shape of an optical device, characterized in that: The method for controlling the processing surface shape of an optical device comprises: Perform initial grinding and polishing on the optical device, and use a multi-band stress detector for real-time detection to obtain stress distribution information and surface wavefront data to obtain initial detection results; Using a phase-shifting interferometer and a composite laser confocal probe to perform depth surface shape measurement according to the initial detection result, and adaptively trimming the abnormal area of ​​the processed surface shape based on the measurement result to obtain a surface shape trimming log; According to the initial detection results and the surface shape modification log, step-by-step load irradiation and stress tracking processing are performed on the optical device to collect surface shape changes under light-thermal coupling to obtain surface shape evolution information; According to the surface shape evolution information, the optical device is subjected to partitioned dynamic compensation and real-time detection until a surface shape control result that meets preset requirements is obtained.

2. The method for controlling the processing surface shape of an optical device according to claim 1, characterized in that: The optical device is initially ground and polished, and a multi-band stress detector is used to perform real-time detection to obtain stress dispersion information and surface wavefront data, and the initial detection results include: Perform multi-level grinding and polishing on the surface of optical devices, and detect the surface morphology data after polishing; Performing band allocation processing on the multi-band stress detector according to the surface topography data, detecting the refractive index change of the optical device by using a polarization measurement method in the visible and near-infrared ranges, and obtaining a refractive index drift matrix; Performing a matching operation on the refractive index drift matrix and the surface morphology data after polishing, and screening the refractive index drift excess area and the local wavefront distortion area based on the matching result to obtain stress dispersion information; The surface wavefront data of the surface of the optical device is detected by a preset reference interferometer, and the stress distribution information and the surface wavefront data are used as initial detection results.

3. The method for controlling the processing surface shape of an optical device according to claim 2, characterized in that: The phase-shift interferometer and the composite laser confocal probe are used to perform depth surface shape measurement according to the initial detection result, and the abnormal area of ​​the processed surface shape is adaptively trimmed based on the measurement result to obtain the surface shape trimming log including: Using a phase-shifting interferometer to perform interference scanning processing on the refractive index drift excess region and the local wavefront distortion region of the optical device according to the initial detection result, to obtain scanning phase data; Performing interpolation fitting processing on the scanning phase data combined with the local height measurement result of the composite laser confocal probe to generate the curvature deviation distribution of the free-form surface or the reflective mirror area; Performing adaptive trimming processing on the area where the curvature deviation distribution exceeds a preset threshold through ion beam trimming, and collecting trimming parameters during trimming to obtain a corresponding list of trimming coordinates and removal amounts; The corresponding list is compared with the trimmed scanning phase data again, the correction status of each refractive index drift excess region and local wavefront distortion region is recorded, and the surface shape trimming log is output.

4. The method for controlling the processing surface shape of an optical device according to claim 3, characterized in that: The interpolation fitting process is performed on the scanning phase data in combination with the local height measurement result of the composite laser confocal probe to generate the radian deviation distribution of the free-form surface or the reflective mirror area, including: Performing coordinate matching processing on the scanning phase data to obtain a multidimensional data index corresponding to a local height measurement result of the composite laser confocal probe; Segmentally extracting the multidimensional data index according to the surface detail level to obtain a multi-resolution data set; Performing a surface fitting operation on the multi-resolution data set by a cubic spline interpolation algorithm, and calculating the radian difference at each coordinate according to a pre-calibrated optical device curvature model; The free-form surface or the reflective mirror surface area is gradient divided according to the curvature difference to distinguish high deviation areas from low deviation areas, and obtain curvature deviation distribution.

5. The method for controlling the processing surface shape of an optical device according to claim 1, characterized in that: The step-by-step load irradiation and stress tracking processing are performed on the optical device according to the initial detection result and the surface shape modification log, and the surface shape change under the light-thermal coupling is collected to obtain the surface shape evolution information, including: According to the initial detection results, the optical device is subjected to temperature module configuration processing under a step load irradiation environment, and a pre-segmented energy segment and temperature gradient are set; Performing step-wise illumination on the optical device according to the energy segment and the temperature gradient, collecting the interference fringe distribution in each energy segment with a high-speed interference detection device to obtain a time-sharing phase matrix, and using a temperature sensor to collect the temperature distribution of the optical device in each energy segment; Compare the time-sharing phase matrix with the trimming coordinates in the surface trimming log to determine the area where the abnormal wavefront drift occurs again, and record the deformation amplitude data of the area where the abnormal wavefront drift occurs in a high temperature or high energy environment; The deformation amplitude data is continuously differentially processed to obtain a deformation time series, and the deformation time series is correlated and mapped with the temperature distribution to output a stress accumulation curve and a boundary displacement state as surface shape evolution information.

6. The method for controlling the processing surface shape of an optical device according to claim 5, characterized in that: The continuous difference processing of the deformation amplitude data to obtain the deformation time series, and the deformation time series is associated with the temperature distribution and mapped, and the stress accumulation curve and boundary displacement state as the surface shape evolution information are output, including: The deformation amplitude data is indexed and segmented according to the time step to obtain the deformation difference between adjacent moments; Performing differential operation on the deformation difference to generate a deformation time series and record it in a multidimensional matrix; Aligning the multidimensional matrix with the temperature distribution at the coordinate level, associating and matching the deformation value of each time node with the corresponding temperature value through linear interpolation, and obtaining a deformation-temperature mapping pair; Curve fitting operation is performed on the deformation-temperature mapping pair to generate a stress accumulation curve and track the boundary displacement changes in the mapping space to obtain the boundary displacement state.

7. The method for controlling the processing surface shape of an optical device according to claim 1, characterized in that: The performing of partitioned dynamic compensation and real-time detection on the optical device according to the surface shape evolution information until a surface shape control result meeting preset requirements is obtained includes: According to the surface shape evolution information, the optical device is partitioned and processed to define a number of high-energy sensitive areas and thermal coupling stress areas; Performing dynamic compensation processing on the high-energy sensitive area and the thermal coupling stress area through a programmable piezoelectric array to adjust the local curvature and position balance in real time; In the dynamic compensation process, a fast phase shift algorithm is used to perform interference fringe tracking processing on the optical device to obtain curvature and refractive index change data, and auxiliary polishing is performed on the curvature exceeding limit area based on the curvature and refractive index change data; The corrected curvature and refractive index change data in each energy segment or temperature range are checked step by step to obtain the surface deviation. If the surface deviation is within the set tolerance, the surface control result is obtained.

8. A control system for processing the surface shape of an optical device, characterized in that: The control system for processing the surface shape of the optical device comprises: The initial grinding and polishing detection module is used to perform initial grinding and polishing on optical devices. At the same time, a multi-band stress detector is used for real-time detection to obtain stress distribution information and surface wavefront data to obtain initial detection results. A depth measurement and trimming module is used to perform depth surface measurement according to the initial detection result by using a phase-shifting interferometer and a composite laser confocal probe, and to adaptively trim the abnormal area of ​​the processed surface shape based on the measurement result to obtain a surface shape trimming log; A load sharing tracking module is used to perform step-by-step load irradiation and stress tracking processing on the optical device according to the initial detection results and the surface shape modification log, collect surface shape changes under light-thermal coupling, and obtain surface shape evolution information; The dynamic compensation module is used to perform partitioned dynamic compensation and real-time detection on the optical device according to the surface shape evolution information until a surface shape control result that meets the preset requirements is obtained.

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