Environmental measurement device

Abstract

An environment measuring device is controlled by a monitoring system and comprises a moving module, a lifting module and a measuring module. The lifting module is arranged on the moving module. The measuring module is arranged at one tail end of the lifting module. The moving module sequentially moves to a plurality of designated positions, and the lifting module lifts the measuring module to a plurality of heights to measure a plurality of groups of environmental data and transmits the environmental data back to the monitoring system.

Description

Technical Field

[0001] The invention relates to an automated environment monitoring technology, and in particular to an environment measuring device. Background Art

[0002] The existing semiconductor industry or related industries need to produce or store finished products in clean rooms. Clean rooms usually use high interior spaces. In order to ensure the quality of the air environment in the clean room, various sensors such as temperature, humidity, wind speed, and particles are installed to monitor environmental data in real time. When abnormal values ​​appear, the problem can be eliminated immediately. However, various sensors are installed in fixed positions, which limits the measurement height and makes it difficult to measure various environmental data at high places in the clean room. When environmental data is abnormal, inspection personnel need to take a lifting vehicle to the high place of the clean room to conduct environmental measurements to find the root cause of the problem.

[0003] However, the existing measurement method of using personnel with a lifting carrier takes too long and consumes a lot of manpower, which will affect the production and storage of finished products in the clean room. Summary of the invention

[0004] The object of the present invention is to provide an environment measurement device to solve at least one of the above problems.

[0005] The present invention provides an environment measuring device, which can automatically move to a designated position to be measured and rise to multiple heights to measure environmental data at corresponding heights, and transmit the environmental data back to a monitoring system.

[0006] The environmental measurement device of the present invention is controlled by a monitoring system, and includes a mobile module, a lifting module and a measuring module. The lifting module is configured on the mobile module. The measuring module is configured at one end of the lifting module. The mobile module moves to multiple designated positions in sequence, and the lifting module lifts the measuring module to multiple heights to measure multiple sets of environmental data, and transmits them back to the monitoring system.

[0007] In one embodiment of the present invention, the mobile module has a vehicle body, a support frame and a navigation component. The vehicle body has two driving wheels and a plurality of free wheels. The support frame is disposed on the top of the vehicle body. The navigation component is disposed on the support frame and coupled to the vehicle body.

[0008] In one embodiment of the present invention, the above-mentioned mobile module has a coordinate radar, multiple environmental radars and multiple cameras. The coordinate radar is configured on a top surface of the navigation component, the multiple environmental radars are configured on an outer edge of the support frame, and the camera is configured on the outer edge of the support frame and one of the cameras is located between the multiple environmental radars.

[0009] In one embodiment of the present invention, the above-mentioned lifting module has a body, a control panel and a telescopic component. The body is fixed on the frame and adjacent to the navigation component. The control panel is configured in the body. The telescopic component can be lifted and disposed on a top surface of the body and connected to the measuring module.

[0010] In one embodiment of the present invention, the lifting module has a rigid chain, a retracting assembly and a motor. The rigid chain is disposed on the machine body and connected to a plurality of column structures. The retracting assembly drives the rigid chain, and the motor is connected to the retracting assembly.

[0011] In one embodiment of the present invention, the control panel is adapted to start a motor to drive the retracting assembly to release or retract the rigid chain, and the rigid chain is adapted to stretch or contract a plurality of column structures.

[0012] In one embodiment of the present invention, a cable reel is further included, which is disposed in the machine body. One end of the cable reel extends into the plurality of column structures and is coupled to the measurement module, and the other end of the cable reel is coupled to the control panel.

[0013] In one embodiment of the present invention, the above-mentioned measurement module has a shell, an anemometer, a thermometer and a particle counter, a side of the shell forms a plurality of holes, the anemometer is arranged in the shell and partially overlaps with the plurality of holes, the thermometer and the humidity meter is arranged in the shell and is located below the anemometer, and the particle counter is arranged in the shell.

[0014] In one embodiment of the present invention, a signal transmission element is further included. The signal transmission element is coupled to the anemometer, the thermometer, the hygrometer and the particle counter and is suitable for transmitting a plurality of environmental data to the monitoring system.

[0015] In one embodiment of the present invention, an anti-collision radar is further included, which is disposed on the shell and protrudes out of the shell. The anti-collision radar is coupled to the lifting module.

[0016] Based on the above, the environmental measurement device of the present invention combines a mobile module, a lifting module and a measuring module. The mobile module can set a schedule or receive instructions from the monitoring system to automatically move to a designated position to be measured in the clean room. The lifting module can rise to multiple heights, allowing the measuring module to measure the environmental data at the corresponding heights and wirelessly transmit the environmental data to the monitoring system. After the measurement work at the designated position is completed, the lifting module lowers the measuring module to the origin, and the mobile module moves to the next designated position to perform the next measurement task. Through the automatic scheduling of the environmental measurement device and the feedback of environmental data, abnormal conditions in the clean room such as temperature, humidity, wind speed and particle content can be monitored in real time, and problems can be quickly eliminated. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1A It is a three-dimensional schematic diagram of an environment measuring device according to an embodiment of the present invention.

[0018] Figure 1B yes Figure 1A Block diagram of the environmental measurement device and monitoring system.

[0019] Figure 2A yes Figure 1A Exploded view of the environmental measurement device.

[0020] Figure 2B yes Figure 2A Schematic diagram of the component breakdown of the lifting module.

[0021] Figure 2C yes Figure 2A Schematic diagram of the component breakdown of the measurement module.

[0022] Figure 3A and Figure 3B yes Figure 1A A three-dimensional schematic diagram of an environmental measuring device rising to different heights.

[0023] Figure 4 yes Figure 1B Flow chart of measuring environmental data by an environmental measuring device.

[0024] The reference numerals are as follows:

[0025] 100: Environmental measurement device

[0026] 110: Mobile module

[0027] 111: Car body

[0028] 112: Frame

[0029] 113: Navigation Component

[0030] 114: Coordinate Radar

[0031] 115: Environmental Radar

[0032] 116: Camera

[0033] 120: Lifting module

[0034] 121: Body

[0035] 122: Control panel

[0036] 123: Column structure

[0037] 124: Rigid chain

[0038] 125: Retracting assembly

[0039] 126: Motor

[0040] 127: Cable reel

[0041] 130: Measurement module

[0042] 131: Shell

[0043] 132: Anemometer

[0044] 133: Thermometer and Hygrometer

[0045] 134: Particle Counter

[0046] 1341: Sampling Department

[0047] 135:Signal transmission parts

[0048] 136: Anti-collision radar

[0049] 200: Monitoring system

[0050] H: Porosity

[0051] W1: driving wheel

[0052] W2: Freewheel

[0053] D: Drive components

[0054] TS: Top surface

[0055] E1, E2: End

[0056] S1-S5: Steps DETAILED DESCRIPTION

[0057] refer to Figure 1A and Figure 1B The environmental measurement device 100 of the present invention is controlled by a monitoring system 200 and is suitable for use in clean rooms, warehouses or other similar internal spaces. The monitoring system 200 is used to display environmental data and measured locations in real time, allowing users to fully monitor abnormal conditions in the internal space.

[0058] refer to Figure 1A to Figure 1B The environment measuring device 100 includes a mobile module 110, a lifting module 120 and a measuring module 130. The driving speed of the mobile module 110 is, for example, 30 m / min and can automatically drive according to the schedule. The lifting module 120 is configured on the mobile module 110 and can automatically lift and lower, wherein the maximum extension of the lifting module 120 is 8 meters. The measuring module 130 is configured at one end of the lifting module 120 and is used to measure environmental data in the indoor space such as temperature and humidity, wind speed, and particle content.

[0059] refer to Figure 1A and Figure 1B , the moving module 110 moves to a plurality of designated positions in sequence, and the lifting module 120 lifts the measuring module 130 to a plurality of heights (see Figure 3Aand Figure 3B ) to measure multiple sets of environmental data and transmit them back to the monitoring system 200.

[0060] refer to Figure 1A and Figure 2A The mobile module 110 has a vehicle body 111 , a frame 112 , a navigation component 113 , a coordinate radar 114 , a plurality of environment radars 115 and two cameras 116 .

[0061] The vehicle body 111 has two driving wheels W1, a plurality of free wheels W2 and a driving assembly D. The two driving wheels W1 and the plurality of free wheels W2 are arranged at the outer edge of the vehicle body 111. The driving assembly D includes a battery, a motor and a transmission bearing, etc. The battery supplies power to the motor, and the motor drives the two driving wheels W1 through the transmission bearing, and the plurality of free wheels W2 swing freely as the two driving wheels W1 move.

[0062] The support frame 112 is disposed on the top of the vehicle body 111 and covers the driving assembly D. The navigation assembly 113 is disposed on the support frame 112 and coupled to the driving assembly D of the vehicle body 111. The navigation assembly 113 is connected to the monitoring system 200 via a wireless network. The coordinate radar 114 is disposed on a top surface TS of the navigation assembly 113 to detect the three-axis coordinates of the mobile module 110 when it moves to each designated position, and then transmits the three-axis coordinates back to the monitoring system 200 through the navigation assembly 113.

[0063] A plurality of environmental radars 115 are disposed at an outer edge of the support frame 112, and two cameras 116 are respectively disposed at the outer edges (front end and rear end) of the support frame 112, and one of the cameras 116 is located between the plurality of environmental radars 115. The plurality of environmental radars 115 and the camera 116 are coupled to the navigation component 113, which is used to identify obstacles around the mobile module 110 and transmit the obstacles back to the navigation component 113, and the navigation component 113 adjusts the moving direction of the vehicle body 111 according to the identification result.

[0064] refer to Figure 2A and Figure 2B The lifting module 120 has a body 121, a control panel 122, a plurality of column structures 123, a rigid chain 124, a reeling assembly 125 and a motor 126. The body 121 is fixed to the support frame 112 and is adjacent to the navigation assembly 113. The control panel 122 is disposed in the body 121. The plurality of column structures 123 are telescopically disposed on a top surface of the body 121 and connected to the measuring module 130. The rigid chain 124 is disposed in the body 121 and connected to the plurality of column structures 123. The reeling assembly 125 links the rigid chain 124. The motor 126 is connected to the reeling assembly 125.

[0065] The control panel 122 is adapted to start the motor 126 to drive the retracting assembly 125 to release or retract the rigid chain 124, and the rigid chain 124 is adapted to stretch or contract the plurality of column structures 123. Specifically, when the retracting assembly 125 releases the rigid chain 124, the rigid chain 124 forms an upright state to drive the plurality of column structures 123 to extend, and when the retracting assembly 125 retracts the rigid chain 124, the rigid chain 124 drives the plurality of column structures 123 to shorten and form an overlapping state.

[0066] The lifting module 120 also includes a cable reel 127, which is disposed in the body 121. One end E1 of the cable reel 127 extends into the plurality of column structures 123 and is coupled to the measuring module 130. The other end E2 of the cable reel 127 is coupled to the control panel 122. The cable reel 127 supplies power from the control panel 122 to the measuring module 130, enabling it to perform measurement work.

[0067] refer to Figure 2A and Figure 2C The measurement module 130 has a housing 131, an anemometer 132, a thermo-hygrometer 133 and a particle counter 134. A plurality of holes H are formed on one side of the housing 131. The anemometer 132 is disposed in the housing 131 and partially overlaps the plurality of holes H. One end of the anemometer 132 protrudes from the housing 131 to facilitate the measurement of wind speed. The thermo-hygrometer 133 is disposed in the housing 131 and is located below the anemometer 132 to measure the temperature and humidity of the air. The particle counter 134 is disposed in the housing 131. A sampling portion 1341 of the particle counter 134 protrudes from the housing 131. The particle counter 134 detects the particle content in the air through the sampling portion 1341.

[0068] Mate Reference Figure 2B , Figure 2C and Figure 1B The measurement module 130 further includes a signal transmission element 135 and an anti-collision radar 136. The signal transmission element 135 is disposed in the housing 131 and is coupled to the anemometer 132, the thermohygrometer 133 and the particle counter 134 and is suitable for transmitting a plurality of environmental data measured by the anemometer 132, the thermohygrometer 133 and the particle counter 134 to the monitoring system 200 via a wireless network. The anti-collision radar 136 is disposed in the housing 131 and protrudes outside the housing 131. The anti-collision radar 136 is coupled to the control panel 122 of the lifting module 120. For example, referring to Figure 3A and Figure 3B When the lifting module 120 drives the measuring module 130 to rise, the anti-collision radar 136 is used to identify surrounding obstacles. If there is an obstacle, the anti-collision radar 136 will transmit an interrupt signal to the control panel 122 to stop the rising process, and then let the mobile module 110 fine-tune the coordinate position to avoid the obstacle and continue the measurement work.

[0069] Mate Reference Figure 1B , Figure 3A , Figure 3B and Figure 4 , the measurement process of the environment measurement device 100 of the present invention is described below:

[0070] In step S1, the monitoring system 200 constructs a virtual indoor space, the mobile module 110 moves to a designated position according to the navigation component 113, and the coordinate radar 114 transmits the three-axis coordinates of the designated position back to the monitoring system 200, so that the user can observe the exact position of the environment measurement device 100 in the virtual indoor space through the monitoring system 200.

[0071] Step S2, the control panel 122 of the lifting module 120 drives the retracting assembly 125 to release the rigid chain 124 through the motor 126, so that the rigid chain 124 stretches the plurality of column structures 123 to sequentially lift the measuring module 130 to a plurality of heights, specifically, the initial height (see Figure 1A ), the second height (see Figure 3A ) and the third height (see Figure 3B ). In other embodiments, multiple heights can be set as required.

[0072] Step S3, when the lifting module 120 is lifted from the initial height (see Figure 1A ) extends to the second height (see Figure 3A ) and the third height (see Figure 3B ) process, the anemometer 132, the thermometer 133 and the particle counter 134 of the measuring module 130 are at the initial height (see Figure 1A ), the second height (see Figure 3A ) and the third height (see Figure 3B ) measures multiple sets of environmental data (wind speed, temperature and humidity, and particulate content) to ensure the accuracy of the environmental data.

[0073] Step S4, the signal transmission element 135 transmits back the initial height (see Figure 1A ), the second height (see Figure 3A ) and the third height (see Figure 3B ) to the monitoring system 200, and thereby check whether there are any abnormalities in the multiple sets of environmental data at the specified location.

[0074] In step S5, after the aforementioned multiple sets of environmental data meet the standards, the control panel 122 of the lifting module 120 drives the retracting assembly 125 to retract the rigid chain 124 through the motor 126, so that the rigid chain 124 shrinks the multiple column structures 123 to lower the measuring module 130 to the origin. At this point, the environmental measuring device 100 has completed the measurement work at the specified position.

[0075] In step S6 , the mobile module 110 moves to the next designated location according to the built-in program of the navigation component 113 , and repeats the above steps S2 to S5 until the environment measurement device 100 completes the measurement work of all designated locations.

[0076] In summary, the environmental measurement device of the present invention combines a mobile module, a lifting module and a measuring module. The mobile module can set a schedule or receive instructions from the monitoring system to automatically move to a designated position to be measured in the clean room. The lifting module can rise to multiple heights, allowing the measuring module to measure the environmental data at the corresponding heights and wirelessly transmit the environmental data to the monitoring system. After the measurement work at the designated position is completed, the lifting module lowers the measuring module to the origin, and the mobile module moves to the next designated position to perform the next measurement task. Through the automatic scheduling of the environmental measurement device and the feedback of environmental data, abnormal conditions in the clean room such as temperature, humidity, wind speed and particle content can be monitored in real time, and problems can be quickly eliminated.

Claims

1. An environment measuring device, controlled by a monitoring system, comprising: A mobile module; A lifting module, configured on the moving module; as well as A measuring module is disposed at one end of the lifting module. The moving module moves to a plurality of designated positions in sequence, and the lifting module lifts the measuring module to a plurality of heights to measure a plurality of sets of environmental data, and transmits the data back to the monitoring system.

2. The environmental measurement device as described in claim 1, wherein the mobile module has a body, a frame and a navigation component, the body has two driving wheels and a plurality of free wheels, the frame is configured on the top of the body, and the navigation component is configured on the frame and coupled to the body.

3. An environmental measuring device as described in claim 2, wherein the mobile module has a coordinate radar, multiple environmental radars and multiple cameras, the coordinate radar is configured on a top surface of the navigation component, multiple environmental radars are configured on an outer edge of the frame, multiple cameras are configured on the outer edge of the frame and one of the cameras is located between the multiple environmental radars.

4. An environmental measuring device as described in claim 2, wherein the lifting module has a body, a control panel and a plurality of column structures, the body is fixed to the frame and adjacent to the navigation component, the control panel is configured in the body, and the plurality of column structures can be telescopically configured on a top surface of the body and connected to the measuring module.

5. The environmental measuring device as described in claim 4, wherein the lifting module has a rigid chain, a retracting assembly and a motor, the rigid chain is configured on the body and connects a plurality of the column structures, the retracting assembly links the rigid chain, and the motor is connected to the retracting assembly. 6 . The environment measuring device as claimed in claim 5 , wherein the control panel is suitable for starting the motor to drive the retracting assembly to release or retract the rigid chain, and the rigid chain is suitable for stretching or contracting the plurality of column structures.

7. The environmental measuring device as claimed in claim 4, further comprising a cable reel disposed in the body, one end of the cable reel extending into the plurality of column structures and coupled to the measuring module, and the other end of the cable reel coupled to the control panel.

8. An environmental measuring device as described in claim 1, wherein the measuring module has a shell, an anemometer, a thermometer and a particle counter, a side of the shell forms a plurality of holes, the anemometer is arranged on the shell and partially overlaps the plurality of holes, the thermometer and the humidity meter is arranged on the shell and is located below the anemometer, and the particle counter is arranged in the shell. 9 . The environmental measurement device as claimed in claim 8 , further comprising a signal transmission element, the signal transmission element is coupled to the anemometer, the thermometer and the particle counter and is suitable for transmitting a plurality of the environmental data to the monitoring system. 10 . The environment measuring device as claimed in claim 8 , further comprising an anti-collision radar disposed on the housing and protruding out of the housing, wherein the anti-collision radar is coupled to the lifting module.

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