Report generator

Abstract

The invention discloses a report generator. The report generator comprises a processor, a memory and an actuator, the memory stores control chart list information and report generation mode information. The control chart list information includes a plurality of pieces of control chart information. The report generation mode information comprises a command execution plug-in, the command execution plug-in comprises a first command sequence, and each command of the first command sequence is used for simulating a keyboard operation instruction. And the processor is used for selecting the control chart list information and the report generation mode information according to a user instruction and controlling the executor to automatically generate the report graph. And the actuator adopts semiconductor quality management software. When the report graph is automatically generated, the executor sequentially executes according to the commands in the first command sequence and is used for inputting control chart information, obtaining a control chart and copying a screenshot of the control chart to form the required report graph. According to the method, automatic copying and screenshot of the semiconductor quality management software control chart can be realized, and automatic report generation is realized.

Description

Technical Field

[0001] The present invention relates to a semiconductor integrated circuit manufacturing control device, and particularly to a report generator. Background Art

[0002] LineWorks SPACE is a powerful SPC infrastructure solution launched by Camline and is widely used in the chip manufacturing industry. SPACE is the abbreviation of "Statistical Process Analysis & Control Environment" corresponding to the statistical process analysis and control environment.

[0003] Engineers often need to obtain the statistical process control (SPC) control charts (Charts) they are responsible for from the SPACE software and make them into Microsoft PowerPoint report files. However, the SPACE software does not support batch exporting of control charts to Microsoft PowerPoint files.

[0004] SPACE can only export control charts to PDF files as an alternative by using the Multiparameter Charts (MPC) function combined with the print preview function. However, this solution has the following disadvantages:

[0005] First, the page titles of multiple child control charts (ChildCharts) belonging to the same Chart are the same, and it is impossible to distinguish CKC. In the Camline LineWorks SPACE software, "CKC" represents a child control chart. As Figure 1 shown, it is a schematic diagram of the indistinguishable titles of multi-page control charts exported by an existing method in the lineworks SPACE software; it can be seen that the title 102a of the control chart 101a is the same as the title 102b of the control chart 101b on another page, and the two cannot be distinguished.

[0006] Second, there will be large blank areas when using a portrait report. As Figure 2 shown, it is a schematic diagram of the page of the control chart exported by an existing method in the lineworks SPACE software when using a portrait layout; there is a blank area 102 at the bottom of the control chart 101.

[0007] Third, using a landscape report can fill the entire page, but the view needs to be rotated first every time it is opened. As Figure 3 shown, it is a schematic diagram of the page of the control chart exported by an existing method in the lineworks SPACE software when using a landscape layout; it can be seen that the control chart 101c needs to be rotated 90 degrees clockwise first when reading.

[0008] Therefore, engineers usually do not adopt alternative solutions and still draw control charts one by one in the Camline LineWorks SPACE software by manually operating the mouse, and then paste the control charts into a Microsoft PowerPoint file, resulting in low efficiency.

[0009] Therefore, there is an urgent need to invent a report generator to automate the Camline LineWorks SPACE software to automatically generate SPC reports in Microsoft PowerPoint format for more timely and efficient monitoring of the semiconductor manufacturing process. Summary of the Invention

[0010] The technical problem to be solved by the present invention is to provide a report generator that can automatically copy and screenshot the control charts corresponding to the sample data of semiconductor manufacturing collected by semiconductor quality management software, and can further automatically paste them into the pages of the report and realize automatic report generation.

[0011] To solve the above technical problem, the report generator provided by the present invention includes: a processor, a memory, and an actuator.

[0012] The memory stores at least control chart list (CHARTLIST) information and report generation method (REPORTGENERATIONMETHODE) configuration information.

[0013] The control chart list information includes multiple control chart information required for the report.

[0014] The report generation method information includes at least a command execution plugin, and the command execution plugin includes a first command sequence. Each command in the first command sequence is used to simulate keyboard operation instructions, and each command corresponds to a shortcut key of the actuator or realizes keyboard input.

[0015] The processor is used to: select the control chart list information and the report generation method information according to the user's instruction, and control the actuator to automatically generate report graphics according to the selected control chart list information and the report generation method information.

[0016] The actuator uses semiconductor quality management software, which collects sample data in semiconductor manufacturing and has the function of forming control charts according to the sample data.

[0017] When automatically generating the report graph, the actuator sequentially executes each command in the first command sequence of the command execution plugin according to the command, which is used to implement the input of the corresponding control chart information in the control chart list information, obtain the corresponding control chart according to the input control chart information, and copy the screenshot of the control chart to form the required report graph.

[0018] A further improvement is that the semiconductor quality management software adopted by the actuator includes lineworksSPACE software.

[0019] A further improvement is that the control chart information includes: the value of the control chart name (CHARTNAME), the value of the control chart ID (CHARTID), the value of the sub-control chart name (CHILDCHARTNAME), and the value of the sub-control chart ID (CHILDCHARTID). The sub-control chart (CHILDCHART) is obtained by splitting the control chart according to the machine or cavity.

[0020] A further improvement is that the control chart information further includes: the number of samples.

[0021] A further improvement is that the control chart information further includes: the graph type selection parameter of the control chart. The graph types of the control chart include the mean chart, the standard deviation chart, and the raw data chart. The graph type selection parameter selects at least one of the mean chart, the standard deviation chart, and the raw data chart; when the graph type selection parameter is the standard control chart, the mean chart, the standard deviation chart, and the raw data chart are all selected.

[0022] A further improvement is that the first command sequence of the command execution plugin includes: a first command segment for implementing the input of the control chart ID value and the sub-control chart ID value, a second command segment for implementing the input of the number of samples, and a third command segment for implementing the copying of the control chart.

[0023] A further improvement is that the first command segment includes the following commands:

[0024] Command 11, used to send the keyboard instruction corresponding to the shortcut key for opening the first dialog box. The first dialog box has a first text box for inputting the control chart ID value and a second text box for inputting the sub-control chart ID value;

[0025] Command 12, used to send the keyboard instruction for inputting the control chart ID value in the first text box;

[0026] Command 13, used to send the keyboard instruction for moving the cursor to the second text box;

[0027] The 14th command is used to send a keyboard instruction for entering the sub-control chart ID value in the second text box;

[0028] The 15th command is used to send the keyboard instruction enter for clicking the setting completion button of the first dialog box.

[0029] A further improvement is that the second command segment includes the following commands:

[0030] The 21st command is used to send a keyboard instruction corresponding to the shortcut key for opening a second dialog box, and the second dialog box has a third text box for entering the number of samples;

[0031] The 22nd command is used to send a keyboard instruction for moving the cursor to the third text box;

[0032] The 23rd command is used to send a keyboard instruction for entering the number of samples in the third text box;

[0033] The 24th command is used to send the keyboard instruction enter for clicking the setting completion button of the second dialog box.

[0034] A further improvement is that the third command segment includes the following commands:

[0035] The 31st command is used to send a keyboard instruction corresponding to the shortcut key for copying a screenshot from the control chart interface;

[0036] The 32nd command is used to send a keyboard instruction corresponding to the shortcut key for closing the control chart interface.

[0037] A further improvement is that the first command sequence of the command execution plugin further includes a fourth command segment for implementing the setting of the graph type selection parameter, and the fourth command segment is completed before the third command segment; when the graph type selection parameter is a standard control chart, the fourth command segment is omitted.

[0038] A further improvement is that the fourth command segment includes the following commands:

[0039] The 41st command is used to send a keyboard instruction corresponding to the shortcut key for opening a third dialog box, and the third dialog box corresponds to the control chart menu;

[0040] The 42nd command is used to send a keyboard instruction for closing all control charts;

[0041] The 43rd command is used to send a keyboard instruction corresponding to the shortcut key for opening the third dialog box;

[0042] The 44th command is used to send a keyboard instruction for opening one of the selected mean chart, the standard deviation chart, and the raw data chart corresponding to the graph type selection parameter.

[0043] A further improvement is that the report generation method information further includes: a basic report format;

[0044] The report includes a Microsoft powerpoint report;

[0045] The basic format of the report includes: the cover and master of the Microsoft powerpoint report.

[0046] A further improvement is that the report generation method information further includes: a report editing plugin;

[0047] The report editing plugin is used to set the title of each page in the report, paste the report graphics into the page, and set the size and position of each report graphic in the corresponding page.

[0048] A further improvement is that the report editing plugin includes a second command sequence;

[0049] The second command sequence includes:

[0050] Create a new page of the report;

[0051] Set the name of the page of the report to the control chart name value plus the sub-control chart name value;

[0052] Paste the report graphics into the page of the report;

[0053] Set the height and width of the report graphics;

[0054] Set the position of the report graphics.

[0055] A further improvement is that the memory includes a database, a file system, and a first input / output component;

[0056] The basic report format is provided by a template file, and the template file is stored in the file system;

[0057] Both the control chart list information and the report generation method information are stored in the database;

[0058] The first input / output component is located at the client side, and both the database and the file system are located at the server side.

[0059] A further improvement is that in the database, the report generation method model corresponding to the report generation method information includes:

[0060] A template path, indicating the storage path of the template file used when generating the report;

[0061] The first plug-in name, representing the name of the report editing plug-in;

[0062] The second plug-in name, representing the name of the command execution plug-in;

[0063] The database designs a relational table according to the report generation method model to store the report generation method information.

[0064] A further improvement is that in the database, the control chart list model corresponding to the control chart list information includes:

[0065] The control chart list name (CHARTLISTNAME), the control chart name, the control chart ID, the sub-control chart name, and the sub-control chart ID.

[0066] The value of the control chart list name is defined by the user;

[0067] The database designs a relational table according to the control chart list model to store the control chart list information.

[0068] A further improvement is that the first input / output component includes a viewing interface and a maintenance interface;

[0069] Advanced users can query the report generation method information in the database from the viewing interface and download the template file to the local from the file system. Advanced users can create or update the report generation method information in the maintenance interface and upload the template file to the file system;

[0070] Ordinary users can query the control chart list information in the database from the viewing interface and can create or update the control chart list information in the maintenance interface.

[0071] A further improvement is that the processor includes a second input / output component and a core component;

[0072] Users can specify the report generation method information and the control chart list information required for generating the report from the second input / output component;

[0073] The second input / output component is also used to transfer the required report generation method information and control chart list information to the core component;

[0074] During the report generation process, the core component is used to automatically complete the following operations:

[0075] Use the template file to create a blank report;

[0076] Traverse each piece of the control chart information under the control chart list information provided by the user;

[0077] Invoke the command execution plug-in and send the required control chart information to the command execution plug-in. After the executor executes each command in the first command sequence according to the command execution plug-in, the reported graph is returned;

[0078] Invoke the report editing plug-in to copy the reported graph returned by the executor to the page of the report and edit it;

[0079] End the traversal.

[0080] By setting the control chart list information and the report generation method information, the present invention can, through the processor, call the command execution plug-in in the report generation method information to control the executor to obtain the corresponding control chart according to the corresponding control chart information in the control graph list information and perform copy and screenshot to obtain the required reported graph. In this way, it overcomes the defect that the existing semiconductor quality management software such as the lineworks SPACE software cannot export control charts in batches, and overcomes the defect of low efficiency caused by manually operating the mouse to draw control charts one by one and copy and paste them for export in the semiconductor quality management software. Therefore, the present invention can automatically copy and screenshot the control charts corresponding to the sample data of semiconductor manufacturing collected by the semiconductor quality management software, and can improve efficiency.

[0081] On the basis of realizing the automatic copy and screenshot of the control chart, the present invention can further paste the reported graph into the report file through the processor. The report file can be established according to the template file corresponding to the basic report format set by the report generation method information. The format of the reported graph on the page of the report can be automatically set by the report editing plug-in. Finally, the automatic generation of reports such as Microsoft powerpoint report files can be realized, which can greatly improve the efficiency and convenience of report generation, so as to quickly obtain the control charts of the corresponding cavities of semiconductor manufacturing equipment such as the statistical process control (SPC) curve of semiconductor manufacturing sample data, so as to well monitor the semiconductor manufacturing process and improve the product yield. Brief Description of the Drawings

[0082] The following further describes the present invention in detail with reference to the drawings and specific embodiments:

[0083] Figure 1 It is a schematic diagram in which the titles of multi-page control charts exported by an existing method in the lineworks SPACE software cannot be distinguished;

[0084] Figure 2It is a schematic diagram when the page of the control chart of the lineworks SPACE software exported by an existing method adopts a vertical layout;

[0085] Figure 3 It is a schematic diagram when the page of the control chart of the lineworks SPACE software exported by an existing method adopts a horizontal layout;

[0086] Figure 4 It is a schematic diagram of the structure of the report generator according to the embodiment of the present invention;

[0087] Figures 5 - 7 It is a schematic diagram of the operations in each step of forming a control chart on a page in an example of the report generator according to the embodiment of the present invention;

[0088] Figure 8 It is Figure 7 A schematic diagram in which the titles of the corresponding pages can be independently distinguished;

[0089] Figure 9 It is a schematic diagram of the user operation interface of the report generator according to the embodiment of the present invention;

[0090] Figure 10 It is according to Figure 9 Schematic diagrams of each page of the report formed by the operations;

[0091] Figure 11 It is a schematic diagram of the operations corresponding to the steps of forming a control chart on a page in another example of the report generator according to the embodiment of the present invention;

[0092] Figure 12 It is a schematic diagram of forming a page in another example of the report generator according to the embodiment of the present invention. Detailed implementation manners

[0093] As Figure 4 shown, it is a schematic diagram of the structure of the report generator according to the embodiment of the present invention; the report generator according to the embodiment of the present invention includes: a processor 201, a memory 202, and an actuator 203.

[0094] The memory 202 stores at least control chart list information and report generation method information.

[0095] The control chart list information includes multiple control chart information required for the report.

[0096] The report generation method information includes at least a command execution plugin, the command execution plugin includes a first command sequence, each command of the first command sequence is used to simulate keyboard operation instructions, and each of the commands corresponds to a shortcut key of the actuator 203 or realizes keyboard input.

[0097] The processor 201 is configured to: select the control chart list information and the report generation method information according to a user instruction, and control the actuator 203 to automatically generate a report graph according to the selected control chart list information and the report generation method information.

[0098] The actuator 203 uses semiconductor quality management software, which collects sample data in semiconductor manufacturing and has a function of forming a control chart according to the sample data.

[0099] When automatically generating the report graph, the actuator 203 sequentially executes each command in the first command sequence of the command execution plug-in, to implement the input of the corresponding control chart information in the control chart list information, obtain the corresponding control chart according to the input control chart information, and copy a screenshot of the control chart to form the required report graph.

[0100] In an embodiment of the present invention, the semiconductor quality management software used by the actuator 203 includes the lineworksSPACE software 208.

[0101] The control chart information includes: a control chart name value, a control chart ID value, a sub-control chart name value, and a sub-control chart ID value. The sub-control chart is obtained by splitting the control chart according to a machine or a cavity.

[0102] The control chart information further includes: the number of samples.

[0103] The control chart information further includes: a graph type selection parameter of the control chart. The graph types of the control chart include a mean chart, a standard deviation chart, and a raw data chart. The graph type selection parameter selects at least one of the mean chart, the standard deviation chart, and the raw data chart; when the graph type selection parameter is a standard control chart, the mean chart, the standard deviation chart, and the raw data chart are all selected.

[0104] In an embodiment of the present invention, the first command sequence of the command execution plug-in includes: a first command segment for implementing the input of the control chart ID value and the sub-control chart ID value, a second command segment for implementing the input of the number of samples, and a third command segment for implementing the copying of the control chart.

[0105] In some embodiments, the first command segment includes the following commands:

[0106] Command No. 11, for sending a keyboard instruction corresponding to a shortcut key for opening a first dialog box. The first dialog box has a first text box for inputting the control chart ID value and a second text box for inputting the sub-control chart ID value;

[0107] The 12th command, used to send a keyboard instruction for inputting the control chart ID value in the first text box;

[0108] The 13th command, used to send a keyboard instruction for moving the cursor to the second text box;

[0109] The 14th command, used to send a keyboard instruction for inputting the sub-control chart ID value in the second text box;

[0110] The 15th command, used to send a keyboard instruction enter for clicking the setup completion button of the first dialog box.

[0111] The second command segment includes the following commands:

[0112] The 21st command, used to send a keyboard instruction corresponding to the shortcut key for opening the second dialog box, and the second dialog box has a third text box for inputting the sample number;

[0113] The 22nd command, used to send a keyboard instruction for moving the cursor to the third text box;

[0114] The 23rd command, used to send a keyboard instruction for inputting the sample number in the third text box;

[0115] The 24th command, used to send a keyboard instruction enter for clicking the setup completion button of the second dialog box.

[0116] The third command segment includes the following commands:

[0117] The 31st command, used to send a keyboard instruction corresponding to the shortcut key for copying a screenshot from the control chart interface;

[0118] The 32nd command, used to send a keyboard instruction corresponding to the shortcut key for closing the control chart interface.

[0119] The first command sequence of the command execution plug-in further includes a fourth command segment for implementing the setting of the graph type selection parameter, and the fourth command segment is completed before the third command segment; when the graph type selection parameter is a standard control chart, the fourth command segment is omitted.

[0120] The fourth command segment includes the following commands:

[0121] The 41st command, used to send a keyboard instruction corresponding to the shortcut key for opening the third dialog box, and the third dialog box corresponds to the control chart menu;

[0122] The 42nd command, used to send a keyboard instruction for closing all control charts;

[0123] The 43rd command, used to send a keyboard instruction corresponding to the shortcut key for opening the third dialog box;

[0124] Command 44, used to send a keyboard instruction to open one of the selected mean chart, the standard deviation chart, and the original data chart corresponding to the graphic type selection parameter.

[0125] In an embodiment of the present invention, the report generation method information further includes: a report basic format;

[0126] The report includes a Microsoft powerpoint report;

[0127] The basic format of the report includes: the cover and master of the Microsoft powerpoint report.

[0128] The report generation method information further includes: a report editing plugin;

[0129] The report editing plugin is used to set the title of each page in the report, paste the report graphics into the page, and set the size and position of each report graphic in the corresponding page.

[0130] In some embodiments, the report editing plugin includes a second command sequence;

[0131] The second command sequence includes:

[0132] Create a new page of the report;

[0133] Set the name of the page of the report to the control chart name value plus the sub-control chart name value;

[0134] Paste the report graphics into the page of the report;

[0135] Set the height and width of the report graphics;

[0136] Set the position of the report graphics.

[0137] In an embodiment of the present invention, the memory 202 includes a database 204, a file system 205, and a first input / output component 206a. The first input / output component 206a is an operation interface for users such as advanced users or ordinary users to operate, Figure 1 The situation when an advanced user operates is shown.

[0138] The report basic format is provided by a template file, and the template file is stored in the file system 205.

[0139] The control chart list information and the report generation method information are both stored in the database 204.

[0140] The memory 202 adopts a C / S structure, i.e., a client-server structure. The first input / output component 206a is located on the client side, and the database 204 and the file system 205 are both located on the server side.

[0141] In an embodiment of the present invention, in the database 204, the report generation method model corresponding to the report generation method information includes:

[0142] Template path (TEMPLATE), which represents the storage path of the template file used when generating the report.

[0143] First plug-in name (EDITIONMETHOD), which represents the name of the report editing plug-in.

[0144] Second plug-in name (EXECUTIONMETHOD), which represents the name of the command execution plug-in.

[0145] The database 204 designs a relational table according to the report generation method model to store the report generation method information.

[0146] In the database 204, the control chart list model corresponding to the control chart list information includes:

[0147] Control chart list name, control chart name, control chart ID, sub-control chart name, and sub-control chart ID value.

[0148] The value of the control chart list name is defined by the user.

[0149] The database 204 designs a relational table according to the control chart list model to store the control chart list information.

[0150] In an embodiment of the present invention, the first input / output component 206a includes a viewing interface and a maintenance interface;

[0151] Advanced users can query the report generation method information in the database 204 from the viewing interface and download the template file from the file system 205 to the local. Advanced users can create or update the report generation method information in the maintenance interface and upload the template file to the file system 205;

[0152] Ordinary users can query the control chart list information in the database 204 from the viewing interface and can create or update the control chart list information in the maintenance interface.

[0153] In an embodiment of the present invention, the processor 201 includes a second input / output component 206b and a core component 207. In some embodiments, the first input / output component 206a and the second input / output component 206b can adopt the same operation interface. In some embodiments, the first input / output component 206a and the second input / output component 206b can also be separately arranged.

[0154] The user can specify, from the second input / output component 206b, the report generation method information and the control chart list information required for generating the report.

[0155] The second input / output component 206b is further configured to transfer the required report generation method information and control chart list information to the core component 207.

[0156] During the report generation process, the core component 207 is configured to automatically perform the following operations:

[0157] Use the template file to create a blank report.

[0158] Traverse each piece of control chart information under the control chart list information provided by the user.

[0159] Call the command execution plug-in and send the required control chart information to the command execution plug-in. After the actuator 203 executes each command in the first command sequence according to the command execution plug-in, the report graph is returned.

[0160] Call the report editing plug-in to copy the report graph returned by the actuator 203 to the page of the report and edit it.

[0161] End the traversal.

[0162] In the embodiment of the present invention, by setting the control chart list information and the report generation method information, the command execution plug-in in the report generation method information can be called through the processor 201 to control the actuator 203 to obtain the corresponding control chart according to the corresponding control chart information in the control graph list information and perform copy and screenshot to obtain the required report graph. In this way, the defect that the semiconductor quality management software such as the lineworks SPACE software 208 in the prior art cannot batch export control charts and the defect of low efficiency caused by manually operating the mouse to draw control charts one by one and copy and paste for export in the semiconductor quality management software are overcome. Therefore, the embodiment of the present invention can automatically copy and screenshot the control charts corresponding to the sample data of semiconductor manufacturing collected by the semiconductor quality management software, and can improve efficiency.

[0163] On the basis of automatically copying and capturing the control chart, the embodiment of the present invention can further paste the report graph into the report file through the processor 201. The report file can be established according to the template file corresponding to the basic format of the report set by the report generation method information. The format of the report graph in the report page can be automatically set by the report editing plug-in. Finally, the automatic generation of reports such as Microsoft PowerPoint report files can be realized, which can greatly improve the efficiency and convenience of report generation, so as to quickly obtain sample data of semiconductor manufacturing, such as the control chart (such as SPC curve) of the corresponding cavity of semiconductor manufacturing equipment, so as to monitor the semiconductor manufacturing process well and improve the product yield.

[0164] The following further details the embodiments of the present invention with the report being a Microsoft PowerPoint report and the semiconductor quality management software being the lineworks SPACE software 208:

[0165] In the embodiment of the present invention, the report generation method determines the basic formats of the Microsoft PowerPoint cover, master, etc. adopted by the report, and the method of editing the report page (such as setting the title of each page, pasting the control chart obtained from Camline LineWorks SPACE into the page, setting the size and position of each control chart in the page, etc.), and determines the command sequence for obtaining the specified control chart in Camline LineWorks SPACE; the report generation method is designed by advanced users, and advanced users can perform read / write operations on the report generation method information in the memory, which is called the report generation method maintenance process

[0166] The control chart list includes several control charts and can be generated into the same report. One control chart is allowed to be added to multiple control chart lists; the control chart list is maintained by ordinary users, and ordinary users can perform read / write operations on the control chart list information in the memory, which is called the control chart list maintenance process

[0167] In the embodiment of the present invention, the processor 201 is used to receive information such as the list of control charts that need to be added to the report and the report generation method provided by the user, and then apply the selected report generation method to instruct the actuator 203 to obtain the control charts listed in the selected list and automatically add them to the Microsoft PowerPoint report according to the requirements of the report generation method. This process is called the report generation process.

[0168] In the embodiments of the present invention, the representation of the report generation method (REPORT GENERATION METHODE) model includes: TEMPLATE (the storage path of the Microsoft PowerPoint report template file), EDITION METHOD (the name of the Microsoft PowerPoint report editing plugin), EXECUTION METHOD (the name of the command execution plugin that needs to be run by the executor).

[0169] TEMPLATE represents the storage path of the template to be used when generating the report; the template defines the basic formats such as the cover page and master page of the report, and a blank report file will be created with this file when generating the report.

[0170] EDITION METHOD represents the name of the plugin for editing the PowerPoint file when generating the report, that is, the name of the report editing plugin; the report editing plugin implements methods for editing the report pages, such as setting the title of each page, pasting the control charts obtained from Camline LineWorks SPACE onto the page, and setting the size and position of each control chart on the page.

[0171] EXECUTION METHOD represents the name of the plugin that enables the executor 202 to obtain the specified control chart according to the specified command sequence, that is, the first command sequence, when generating the report; the command execution plugin implements the execution of the command sequence for obtaining the specified control chart, that is, the first command sequence, in Camline LineWorks SPACE, and finally returns a screenshot of the specified control chart; that is, the first command sequence is a sequence of several commands, and each command simulates a keyboard operation instruction and can replace manual mouse repetitive operations.

[0172] In the embodiments of the present invention, the representation of the control chart list (CHART LIST) model includes:

[0173] CHART LIST NAME, CHART NAME, CHART ID, CHILD CHART NAME, CHILD CHART ID.

[0174] Among them, CHART LIST NAME is the name of a list defined by the user, and this list can contain several control charts that the user needs to view.

[0175] The values corresponding to CHART NAME (control chart name) and CHART ID (control chart ID) are the name and ID values of the "parameters" in the Camline LineWorks SPACE software, representing a main control chart.

[0176] The values corresponding to CHILDCHARTNAME (Sub - control Chart Name) and CHILDCHARTID (Sub - control Chart ID) are the values corresponding to the name and ID of the "CKC" (sub - control chart) in the Camline LineWorks SPACE software. The main control chart can be split into several sub - control charts according to certain conditions (usually split by machine / cavity).

[0177] The memory 202 has a C / S structure and consists of three parts: a database 204, a file system 205, and an IO input / output component, namely the first input / output component 206a, which is also the operation interface. Among them, the database 204 and the file system 205 are located on the server side, and the operation interface is located on the client side.

[0178] The database includes relational tables designed according to the aforementioned REPORTGENERATIONMETHODE model and the CHARTLIST model. That is, the specific values of each of the control chart list information are located in the table of the relational table designed according to the CHARTLIST model, and the corresponding control chart list information can be retrieved through the value of the control chart list name. Similarly, the corresponding values of each of the report generation method information are also located in the table of the relational table designed according to the report generation method model, and the specific values of the report generation method information can also be called in the table.

[0179] In the embodiment of the present invention, the process of maintaining the report generation method includes:

[0180] The IO input / output component (operation interface) of the above - mentioned memory 202 includes a viewing interface and a maintenance interface.

[0181] Advanced users can update the report generation method information in the database and upload template files to the server file system 205 in the maintenance interface of the memory 202.

[0182] Advanced users can query the report generation method information in the database and download template files from the server file system 205 to the local in the viewing interface.

[0183] The process of creating a new report generation method includes:

[0184] Advanced users select a template file in the maintenance interface and can upload it to the server file system 205.

[0185] Advanced users can import the report generation method information into the database 204 in tabular form in the maintenance interface.

[0186] The process of updating the report generation method includes:

[0187] Advanced users first download the template file to be updated from the viewing interface to the local; then modify the file; finally, select the template file in the maintenance interface and upload the new version to the server file system 205.

[0188] Advanced users first query the information on the generation method of the report to be updated in the viewing interface; then modify the table; finally, import the new version into the database 204 in the maintenance interface.

[0189] The process of viewing the report generation method includes:

[0190] Advanced users can download the template file to be viewed from the viewing interface to the local.

[0191] Advanced users can query the information on the generation method of the report to be viewed in the viewing interface.

[0192] In the embodiment of the present invention, the process of maintaining the control chart list includes:

[0193] The above-mentioned memory IO input / output component 206a, i.e., the operation interface, includes a viewing interface and a maintenance interface;

[0194] Ordinary users can update the control chart list information in the database in the maintenance interface of the memory.

[0195] Ordinary users can query the control chart list information in the database in the viewing interface.

[0196] The process of creating a new control chart list includes:

[0197] Ordinary users can import the control chart list information into the database in tabular form in the maintenance interface.

[0198] The process of updating the control chart list includes:

[0199] Ordinary users first query the information on the control chart list to be updated in the viewing interface; then modify the table; finally, import the new version into the database in the maintenance interface.

[0200] The process of viewing the control chart list includes:

[0201] Ordinary users can query the information on the control chart list to be viewed in the viewing interface.

[0202] In the embodiment of the present invention, the processor is composed of two parts: the IO input / output component, i.e., the second input / output component 206b, and the CORE component 207, i.e., the core).

[0203] The process of report generation includes:

[0204] After configuring the required report generation method and the list of required control charts in the generator 208, the user can specify the required report generation method and the list of required control charts in the IO input / output component (operation interface) of the processor.

[0205] The IO input / output component (operation interface) passes the information to the core component 207.

[0206] The following operations are automatically completed by the core component 207:

[0207] Use the Microsoft PowerPoint report template file, that is, the template file corresponding to TEMPLATE, to create a blank report file.

[0208] Traverse each control chart under the list of control charts provided by the user

[0209] Send the required information to the command execution plug-in that needs to run, that is, the plug-in corresponding to EXECUTIONMETHOD. The Camline LineWorks SPACE software 208 of the actuator 203 executes the command sequence in the plug-in and returns a screenshot of the control chart.

[0210] Call the specified report editing plug-in, that is, the plug-in corresponding to EDITIONMETHOD, copy the screenshot of the control chart returned by the actuator 203 to the page of the report file, and edit the format and content as required.

[0211] End the traversal

[0212] In the prior art, on the one hand, due to the drawbacks of the alternative solution of exporting control charts to PDF files by combining the SPACE MPC (Multiparameter Charts) function and the print preview function, engineers usually do not adopt the alternative solution and still manually operate the mouse to draw control charts one by one in the Camline LineWorks SPACE software, and then paste the control charts into the Microsoft PowerPoint file, resulting in low efficiency.

[0213] The embodiment of the present invention can automatically execute the pure keyboard operation command sequence by customizing the command execution plug-in (EXECUTIONMETHOD), completely replacing the manual mouse operation, and releasing 100% of the human resources to other important tasks.

[0214] On the other hand, the alternative solution of the prior art has the drawback of not supporting custom page titles. As Figure 1 shown, when a certain control chart is divided into multiple pages by machine, the page titles are the same and it is impossible to distinguish the machines.

[0215] In the embodiment of the present invention, by customizing the report editing plugin (EDITIONMETHOD), CHARTNAME (control chart name) and CHILDCHARTNAME (sub-control chart name) can be displayed in the page title, effectively differentiating the machines. As Figure 8 shown, the titles 310 and 310' are different, mainly due to the different sub-control chart names, so the machines can be effectively differentiated.

[0216] The following uses a specific example 1 to further illustrate the embodiment of the present invention:

[0217] The report generation method includes:

[0218] EDITIONMETHOD, that is, the name of the Microsoft PowerPoint report editing plugin is: CHARTNAME+CHILDCHARTNAME_One chart per page. The command sequence of the corresponding plugin, that is, the report editing plugin, includes:

[0219] Create a new slide;

[0220] Set the title to CHARTNAME+CHILDCHARTNAME;

[0221] Paste the screenshot copied by the actuator 203 onto the slide, that is, the page of the report;

[0222] Set the height and width of the picture;

[0223] Set the position of the picture.

[0224] EXECUTIONMETHOD, that is, the name of the command execution plugin that needs to be run by the actuator is: CHARTID+CHILDCHARTID+Number of samples_Standard control chart. The corresponding plugin of EXECUTIONMETHOD, that is, the command execution plugin, can achieve: drawing control charts specified by CHARTID+CHILDCHARTID with the specified number of samples, including mean chart, standard deviation chart, and raw data chart, and copying the three charts into one screenshot

[0225] The command sequence of the command execution plugin includes:

[0226] Send a keyboard instruction (bring up the GoTo dialog box): Ctrl+g. As Figure 5 shown, this command corresponds to the 11th command. The GoTo dialog box 301 is the first dialog box. Ctrl+g is the shortcut key to open the GoTo dialog box 301, and the 11th command can simulate the input of the Ctrl and g keys on the keyboard.

[0227] Send a keyboard instruction (input the SPC Channel Id): CHARTID of the control chart to be obtained. AsFigure 5 As shown, this command corresponds to the 12th command. Since the cursor is initially located in the first text box 302, directly enter the control chart ID value in the first text box 302.

[0228] Send a keyboard instruction (move the cursor to the SPC CKC Id text box): Tab. As Figure 5 As shown, this command corresponds to the 13th command. Move the cursor to the second text box 303 by pressing the Tab key.

[0229] Send a keyboard instruction (enter SPC CKC Id): The CHILDCHARTID of the control chart to be obtained. As Figure 5 As shown, this command corresponds to the 14th command. Enter the sub-control chart ID value in the second text box 303.

[0230] Send a keyboard instruction (click the Go To button): Enter. As Figure 5 As shown, this command corresponds to the 15th command. Click the Go To button by pressing the Enter key.

[0231] The above is the first command segment. Next, the second command segment is as follows, including:

[0232] Send a keyboard instruction (invoke the Selection Interval dialog box): Ctrl+o. As Figure 6 As shown, this command corresponds to the 21st command. The Selection Interval dialog box 305 is the second dialog box. Ctrl+o is the shortcut key to open the Selection Interval dialog box 305.

[0233] Send a keyboard instruction (move the cursor to the maximum sampling value text box): Four times Tab, twice Down, once Tab. As Figure 6 As shown, this command corresponds to the 22nd command. Move the cursor to the third text box 307 by pressing four times Tab, twice Down, once Tab.

[0234] Send a keyboard instruction (enter the sample number): The sample number of the control chart to be obtained. As Figure 6 As shown, this command corresponds to the 23rd command. Enter the sample number in the third text box 307.

[0235] Send a keyboard instruction (click the OK button): Enter. As Figure 6 As shown, this command corresponds to the 24th command. Click the OK button by pressing the Enter key.

[0236] Next, the third command segment is as follows, including:

[0237] Send keyboard instruction (copy screenshot from the control chart interface): Ctrl+c. This command corresponds to Command 31, and Ctrl+c corresponds to the shortcut key for copying the screenshot.

[0238] Send keyboard instruction (close the control chart interface): Alt+F4. This command corresponds to Command 32, and Alt+F4 corresponds to the shortcut key for closing the control chart interface.

[0239] Finally, the obtained slide, i.e., the page, is as Figure 7 shown. It can be seen that the title 310 on page 309 includes the control chart name corresponding to the dashed box 310a and the sub-control chart name corresponding to the dashed box 310b. At the same time, the control chart includes a mean chart, a standard deviation chart, and an original data chart, a total of three charts.

[0240] The generation of one page in the above report generation method is all automatically realized. What an ordinary user needs to do is only to select the corresponding control chart list and report generation method, as Figure 9 shown, which is a schematic diagram of the user operation interface of the report generator according to an embodiment of the present invention; in the operation interface 311, select TEST1 corresponding to the marker 312 as the control chart list and input or select the corresponding report generation method in the text box corresponding to the marker 313. After selection, click the generate button to obtain the automatically generated report.

[0241] As Figure 10 is a schematic diagram of each page of the report formed according to the Figure 9 operation; Figure 10 in it, the report 314 includes multiple pages 309, and the first page is separately marked with 309a. The format of the first page can be determined according to the template.

[0242] In the above example, the graphic type selection parameter is a standard control chart, and the first command sequence does not include the fourth command segment.

[0243] The following further illustrates the case when the graphic type selection parameter is not a standard control chart in combination with Example 2:

[0244] EXECUTION METHOD (command execution plugin name that requires the actuator to run): CHARTID + CHILDCHARTID + number of samples_ only for the original data control chart. The corresponding command execution plugin can achieve: draw the control chart specified by CHARTID + CHILDCHARTID with the specified number of samples, only retain the original data chart, and copy it into a screenshot.

[0245] The command sequence of the command execution plugin is as follows:

[0246] Send keyboard command (bring up the GoTo dialog box): Ctrl+g

[0247] Send keyboard command (enter the SPC Channel Id): CHARTID of the control chart to be obtained

[0248] Send keyboard command (move the cursor to the SPC CKC Id text box): Tab

[0249] Send keyboard command (enter the SPC CKC Id): CHILDCHARTID of the control chart to be obtained

[0250] Send keyboard command (click the Go To button): Enter

[0251] Send keyboard command (bring up the Selection Interval dialog box): Ctrl+o

[0252] Send keyboard command (move the cursor to the maximum sampling value text box): Four Tabs, two Downs, one Tab

[0253] Send keyboard command (enter the sample number): Sample number of the control chart to be obtained

[0254] Send keyboard command (click the OK button): Enter

[0255] The above commands are the same as those in Example 1. In Example 2, it also includes:

[0256] Send keyboard command (open the Charts menu): Alt+c. As Figure 11 shown, the Charts menu in dialog box 315 can be opened by the Alt+c shortcut key, and this command corresponds to Command 41.

[0257] Send keyboard command (close all control charts): 0. As Figure 11 shown, the number 0 in the Charts menu in dialog box 315 corresponds to Remove all, and this command corresponds to Command 42.

[0258] Send keyboard command (open the Charts menu): Alt+c. This command corresponds to Command 43.

[0259] Send keyboard command (open the raw data chart): 4. As Figure 11 shown, the number 4 in the Charts menu in dialog box 315 corresponds to the raw data value, and this command corresponds to Command 44.

[0260] The above is the fourth command segment. After completion, proceed with the third command segment, including:

[0261] Send keyboard instruction (copy screenshot from the control chart interface): Ctrl+c.

[0262] Send keyboard instruction (close the control chart interface): Alt+F4.

[0263] As Figure 12 shown, it is a schematic diagram of forming a page in another example of the embodiment report generator of the present invention. It can be seen that page 309b only includes an original data control chart.

[0264] The present invention has been described in detail through specific embodiments, but these do not constitute limitations to the present invention. Without departing from the principle of the present invention, those skilled in the art can also make many deformations and improvements, which should also be regarded as the protection scope of the present invention.

Claims

1. A report generator, characterized in that: include: Processors, memory and actuators; The memory stores at least control chart list information and report generation method information; The control chart list information includes a plurality of control chart information required for the report; The report generation mode information at least includes a command execution plug-in, the command execution plug-in includes a first command sequence, each command of the first command sequence is used to simulate a keyboard operation instruction, and each command corresponds to a shortcut key of the executor or implements keyboard input; The processor is used to implement: selecting the control diagram list information and the report generation method information according to a user instruction, and controlling the actuator to automatically generate a report graph according to the selected control diagram list information and the report generation method information; The actuator uses semiconductor quality management software, which collects sample data collected during semiconductor manufacturing and has the function of forming a control chart based on the sample data; When the report graphics are automatically generated, the executor executes each command in the first command sequence of the command execution plug-in in sequence, so as to realize the input of the control chart information corresponding to the control chart list information and obtain the corresponding control chart according to the input control chart information and copy the screenshot of the control chart to form the required report graphics.

2. The report generator according to claim 1, characterized in that: The semiconductor quality management software used by the actuator includes lineworks SPACE software.

3. The report generator according to claim 2, characterized in that: The control chart information includes: a control chart name value, a control chart ID value, a sub-control chart name value and a sub-control chart ID value, and the sub-control chart is obtained by splitting the control chart according to the machine or cavity.

4. The report generator according to claim 3, characterized in that: The control chart information also includes: the number of samples.

5. The report generator according to claim 4, characterized in that: The control chart information also includes: a graph type selection parameter of the control chart, the graph types of the control chart include a mean graph, a standard deviation graph and an original data graph, the graph type selection parameter selects at least one of the mean graph, the standard deviation graph and the original data graph; when the graph type selection parameter is a standard control chart, the mean graph, the standard deviation graph and the original data graph are all selected.

6. The report generator according to claim 5, characterized in that: The first command sequence of the command execution plug-in includes: a first command segment for implementing the input of the control chart ID value and the sub-control chart ID value, a second command segment for implementing the input of the sample number, and a third command segment for implementing the copying of the control chart.

7. The report generator of claim 6, wherein: The first command segment includes the following commands: An 11th command is used to send a keyboard instruction corresponding to a shortcut key for opening a first dialog box, wherein the first dialog box has a first text box for inputting the control diagram ID value and a second text box for inputting the sub-control diagram ID value; A twelfth command is used to send a keyboard instruction to input the control diagram ID value in the first text box; The 13th command is used to send a keyboard instruction to move the cursor to the second text box; The 14th command is used to send a keyboard instruction to input the sub-control diagram ID value in the second text box; The 15th command is used to send the keyboard command enter for clicking the setting completion button of the first dialog box.

8. The report generator of claim 6, wherein: The second command segment includes the following commands: A 21st command is used to send a keyboard instruction corresponding to a shortcut key for opening a second dialog box, wherein the second dialog box has a third text box for inputting the number of samples; The 22nd command is used to send a keyboard instruction to move the cursor to the third text box; A 23rd command is used to send a keyboard instruction to input the number of samples in the third text box; The 24th command is used to send the keyboard command enter for clicking the setting completion button of the second dialog box.

9. The report generator of claim 6, wherein: The third command segment includes the following commands: Command 31 is used to send the keyboard command corresponding to the shortcut key for copying a screenshot from the control diagram interface; Command 32 is used to send a keyboard instruction corresponding to the shortcut key for closing the control diagram interface.

10. The report generator according to claim 6, characterized in that: The first command sequence of the command execution plug-in also includes a fourth command segment for implementing the graphic type selection parameter setting, and the fourth command segment is completed before the third command segment; when the graphic type selection parameter is a standard control chart, the fourth command segment is omitted.

11. The report generator of claim 10, wherein: The fourth command segment includes the following commands: A 41st command is used to send a keyboard instruction corresponding to a shortcut key for opening a third dialog box, wherein the third dialog box corresponds to a control diagram menu; Command 42 is used to send a keyboard command to close all control diagrams; The 43rd command is used to send a keyboard instruction corresponding to the shortcut key for opening the third dialog box; Command 44 is used to send a keyboard instruction to open one of the selected mean graph, the standard deviation graph and the original data graph corresponding to the graph type selection parameter.

12. The report generator of claim 4, wherein: The report generation method information also includes: basic report format; Said reports include Microsoft powerpoint reports; The basic format of the report includes: a cover page and a master page of the Microsoft PowerPoint report.

13. The report generator of claim 12, wherein: The report generation method information also includes: a report editing plug-in; The report editing plug-in is used to set the title of each page in the report, paste the report graphics into the page, and set the size and position of each report graphics in the corresponding page.

14. The report generator of claim 13, wherein: The report editing plug-in includes a second command sequence; The second command sequence includes: Create a new page for the report; Setting the name of the page of the report to the value of the control chart name plus the value of the sub-control chart name; Pasting the report graphic into a page of the report; Set the height and width of the report graphic; Sets the position of the report graphic.

15. The report generator of claim 14, wherein: The memory includes a database, a file system and a first input-output component; The basic report format is provided by a template file, and the template file is stored in the file system; The control chart list information and the report generation method information are stored in the database; The first input-output component is located at the client, and the database and the file system are both located at the server.

16. The report generator of claim 15, wherein: In the database, the report generation mode model corresponding to the report generation mode information includes: Template path, indicating the storage path of the template file used when generating the report; The first plug-in name indicates the name of the report editing plug-in; The second plug-in name indicates the name of the command execution plug-in; The database stores the report generation method information in a design relationship table according to the report generation method model.

17. The report generator of claim 15, wherein: In the database, the control chart list model corresponding to the control chart list information includes: Control chart list name, control chart name, control chart ID, sub-control chart name, and sub-control chart ID. The value of the control chart list name is defined by the user; The database stores the control chart list information according to the control chart list model design relationship table.

18. The report generator of claim 15, wherein: The first input-output component includes a viewing interface and a maintenance interface; The advanced user can query the report generation method information in the database from the viewing interface and download the template file from the file system to the local computer. The advanced user can create or update the report generation method information from the maintenance interface and upload the template file to the file system. Ordinary users can query the control chart list information in the database from the viewing interface and can create or update the control chart list information from the maintenance interface.

19. The report generator of claim 15, wherein: The processor includes a second input-output component and a core component; The user can specify the report generation method information and the control chart list information required to generate the report from the second input and output component; The second input-output component is also used to transmit the required report generation method information and the control chart list information to the core component; During the report generation process, the core components are used to automatically complete the following operations: Using the template file to create a blank report; Traversing each of the control diagram information under the control diagram list information provided by the user; calling the command execution plug-in and sending the required control diagram information to the command execution plug-in, and the executor returns the report diagram after executing each command of the first command sequence according to the command execution plug-in; Calling the report editing plug-in to copy the report graphics returned by the executor to a page of the report and edit it; End the traversal.

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