Three-dimensional jitter compensation method and device for laser cutting and storage medium

Abstract

The invention discloses a three-dimensional jitter compensation method and device for laser cutting and a storage medium, and relates to the technical field of lasers, and the method comprises the steps that fast Fourier transform is carried out based on a vibration signal of a to-be-machined thin plate in the Z-axis direction, and a frequency spectrum feature is obtained; according to the frequency spectrum characteristics, combining a preset jitter filtering parameter set to carry out frequency domain filtering processing, and generating a filtering signal; reconstructing the filtering signal into a time domain compensation amount through inverse Fourier transform; based on the time domain compensation quantity, performing weighted fusion by combining the cutting acceleration and the cutting displacement deviation in the current cutting direction, and generating a three-dimensional compensation vector; and superposing the three-dimensional compensation vector to an original cutting path coordinate through a motion controller so as to correct the following state of the cutting head. The technical problem that the thin plate shakes due to nonlinear cutting force caused by interaction between high-speed movement of the cutting head and laser and materials is solved, and the stability of the thin plate during laser cutting is improved.

Description

Technical Field

[0001] This application relates to the technical field of lasers, and particularly to a three-dimensional jitter compensation method, device, and storage medium for laser cutting. Background Art

[0002] With its high-precision and non-contact processing characteristics, laser cutting technology has become the core process in precision manufacturing industries such as semiconductor packaging, flexible circuit board processing, and aerospace titanium alloy thin-walled part forming.

[0003] In related technologies, when cutting ultra-thin materials at high speed, it is inevitable for the ultra-thin materials to jitter. Especially in the processing of ultra-thin titanium alloys for aerospace and copper substrates of microelectronic devices, the high-speed movement of the cutting head and the non-linear cutting force caused by the interaction between the laser and the material lead to the jitter of the thin plate.

[0004] The above content is only used to assist in understanding the technical solution of this application and does not represent an admission that the above content is prior art. Summary of the Invention

[0005] The main purpose of this application is to provide a three-dimensional jitter compensation method, device, and storage medium for laser cutting, aiming to solve the technical problem that the non-linear cutting force caused by the high-speed movement of the cutting head and the interaction between the laser and the material leads to the jitter of the thin plate.

[0006] To achieve the above object, this application proposes a three-dimensional jitter compensation method for laser cutting, the method includes:

[0007] Performing a fast Fourier transform on the vibration signal of the to-be-processed thin plate in the Z-axis direction to obtain spectral characteristics;

[0008] According to the spectral characteristics, performing frequency-domain filtering processing in combination with a preset jitter filtering parameter set to generate a filtered signal;

[0009] Reconstructing the filtered signal into a time-domain compensation amount through an inverse Fourier transform;

[0010] Based on the time-domain compensation amount, performing weighted fusion in combination with the cutting acceleration and cutting displacement deviation in the current cutting direction to generate a three-dimensional compensation vector;

[0011] Adding the three-dimensional compensation vector to the original cutting path coordinates through a motion controller to correct the following state of the cutting head.

[0012] In one embodiment, by collecting the signal of the to-be-processed thin plate in the Z-axis direction at a certain moment and filtering the signal to obtain an original signal;

[0013] Based on the original signal, performing adaptive filtering to obtain the vibration signal.

[0014] In one embodiment, based on the spectral characteristics, a target frequency band related to the resonance of the thin plate to be processed is extracted;

[0015] Based on a preset jitter filtering parameter set, frequency-domain filtering processing is performed on the vibration components within the target frequency band to generate the filtered signal.

[0016] In one embodiment, based on the acceleration signal, an adaptive filter is used to obtain a filtered acceleration signal;

[0017] Based on the filtered acceleration signal, digital sampling is performed to obtain the cutting acceleration corresponding to the time stamp of the acceleration signal; and,

[0018] Based on the displacement data signal, displacement data information is obtained through resolution processing;

[0019] The displacement data information is compared with a preset displacement path to obtain the cutting displacement deviation.

[0020] In one embodiment, based on the time-domain compensation amount, the cutting acceleration, and the cutting displacement deviation, weighted fusion is performed according to a preset weight to generate a deviation compensation amount;

[0021] The deviation compensation amount is disassembled into axial compensation amounts according to a preset rule;

[0022] The axial compensation amounts are superimposed by a three-dimensional coordinate transformation matrix according to spatial vectors to generate a three-dimensional compensation vector including amplitude and direction information.

[0023] In one embodiment, based on the three-dimensional compensation vector, it is decomposed into a translation compensation component and a rotation compensation component through a coordinate transformation matrix;

[0024] The translation compensation component and the rotation compensation component are superimposed on the original cutting path coordinates by the motion controller to obtain the corrected target coordinates;

[0025] The motion controller corrects the following state based on the target coordinates.

[0026] In one embodiment, when the cutting head collides with the plate during movement, a collision alarm is triggered and the cutting head is automatically lifted by a safe height;

[0027] If the collision alarm has not stopped, the cutting head continues to be lifted;

[0028] If the collision alarm stops, the cutting head is no longer lifted, and a three-dimensional compensation vector is generated based on the current following state to update the following state.

[0029] In one embodiment, a data set is generated from the vibration signal, the cutting acceleration, and the cutting displacement deviation according to corresponding timestamps.

[0030] The data set is divided by cross-validation, with half of the data set used as a validation set and the remaining data set used as a training set.

[0031] The validation set generates a three-dimensional compensation verification vector through the three-dimensional jitter compensation method for laser cutting, and the training set is input into a basic frequency domain filtering model to output a three-dimensional compensation training vector.

[0032] The three-dimensional compensation verification vector is input into the basic frequency domain filtering model for comparison with the three-dimensional compensation training vector, and feedback compensation parameters are generated based on the comparison result.

[0033] Based on the feedback compensation parameters, the model parameters of the basic frequency domain filtering model are adjusted, and the basic frequency domain filtering model is repeatedly trained to obtain a target frequency domain filtering model.

[0034] In addition, to achieve the above object, the present application also proposes a three-dimensional jitter compensation device, which includes: a memory, a processor, and a computer program stored on the memory and executable on the processor. The computer program is configured to implement the steps of the three-dimensional jitter compensation method for laser cutting as described above.

[0035] In addition, to achieve the above object, the present application also proposes a storage medium, which is a computer-readable storage medium. A computer program is stored on the storage medium, and when the computer program is executed by a processor, it implements the steps of the three-dimensional jitter compensation method for laser cutting as described above.

[0036] The present application provides a three-dimensional jitter compensation method for laser cutting, which includes performing a fast Fourier transform on a vibration signal in the Z-axis direction of a thin plate to be processed to obtain spectral characteristics; performing frequency domain filtering processing on the spectral characteristics in combination with a preset jitter filtering parameter set to generate a filtered signal; reconstructing the filtered signal into a time-domain compensation amount through an inverse Fourier transform; performing weighted fusion on the time-domain compensation amount in combination with the cutting acceleration and the cutting displacement deviation in the current cutting direction to generate a three-dimensional compensation vector; and superimposing the three-dimensional compensation vector on the original cutting path coordinates through a motion controller to correct the following state of the cutting head. By processing the vibration signal in the Z-axis direction and combining the motion data of the cutting head, a three-dimensional compensation vector is generated, enabling the cutting head to timely change the following state to compensate for the jitter of the thin plate and improving the stability of the thin plate during laser cutting.

[0037] In summary, by obtaining vibration signals and integrating the motion data of the cutting head, the three-dimensional compensation vector generated by the present application can more effectively compensate for the jitter of the thin plate, overcoming the technical problem that the high-speed movement of the cutting head and the non-linear cutting force caused by the interaction between the laser and the material lead to the jitter of the thin plate, and improving the stability of the thin plate during laser cutting. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] The drawings herein are incorporated into and constitute a part of this specification, showing embodiments consistent with the present application and, together with the specification, are used to explain the principles of the present application.

[0039] To more clearly illustrate the technical solutions in the embodiments of the present application or in the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, for those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0040] Figure 1 Schematic flowchart of the first embodiment of the three-dimensional jitter compensation method for laser cutting of the present application;

[0041] Figure 2 Schematic flowchart of the fourth embodiment of the three-dimensional jitter compensation method for laser cutting of the present application;

[0042] Figure 3 Schematic flowchart of the fifth embodiment of the three-dimensional jitter compensation method for laser cutting of the present application;

[0043] Figure 4 Schematic flowchart of the sixth embodiment of the three-dimensional jitter compensation method for laser cutting of the present application;

[0044] Figure 5 Schematic flowchart of the seventh embodiment of the three-dimensional jitter compensation method for laser cutting of the present application;

[0045] Figure 6 Schematic flowchart of the eighth embodiment of the three-dimensional jitter compensation method for laser cutting of the present application;

[0046] Figure 7 Schematic structural diagram of the three-dimensional jitter compensation device of the present application.

[0047] The realization of the purpose, functional characteristics and advantages of the present application will be further described with reference to the embodiments and the drawings. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0048] It should be understood that the specific embodiments described herein are only used to explain the technical solutions of the present application and are not used to limit the present application.

[0049] In related technologies, when cutting ultra-thin materials at high speed, the ultra-thin materials will inevitably vibrate. Especially in the processing of ultra-thin titanium alloys for aerospace and copper substrates of microelectronic devices, the high-speed movement of the cutting head and the non-linear cutting force caused by the interaction between the laser and the material lead to the vibration of the thin plate.

[0050] This application provides a solution: First, perform a fast Fourier transform on the vibration signal of the thin plate to be processed in the Z-axis direction to obtain spectral characteristics; according to the spectral characteristics, perform frequency-domain filtering processing in combination with a preset jitter filtering parameter set to generate a filtered signal, and then reconstruct the filtered signal into a time-domain compensation amount through an inverse Fourier transform. Then, based on the time-domain compensation amount, perform weighted fusion in combination with the cutting acceleration and cutting displacement deviation in the current cutting direction to generate a three-dimensional compensation vector. Finally, superimpose the three-dimensional compensation vector on the original cutting path coordinates through a motion controller to correct the following state of the cutting head.

[0051] It should be noted that the execution subject of this embodiment can be a computing service device with data processing, network communication, and program running functions, such as a tablet computer, a personal computer, a mobile phone, etc., or an electronic device, a three-dimensional jitter compensation device, etc. that can implement the above functions. Hereinafter, taking the three-dimensional jitter compensation device as an example, this embodiment and the following embodiments will be described.

[0052] To better understand the technical solution of this application, the following will be described in detail in combination with the specification drawings and specific implementation manners.

[0053] An embodiment of this application provides a three-dimensional jitter compensation method for laser cutting. Refer to Figure 1 , Figure 1 This is a schematic flowchart of the first embodiment of the three-dimensional jitter compensation method for laser cutting in this application.

[0054] In this embodiment, the three-dimensional jitter compensation method for laser cutting includes steps S10 to S50:

[0055] Step S10, perform a fast Fourier transform on the vibration signal of the thin plate to be processed in the Z-axis direction to obtain spectral characteristics.

[0056] In this embodiment, the thin plate to be processed refers to a metal or non-metal thin plate material that needs to be processed in the laser cutting process. The vibration signal in the Z-axis direction is the time-domain acceleration data collected by the motor encoder of the cutting head in the direction perpendicular to the plane of the thin plate. The fast Fourier transform is an efficient algorithm for converting a time-domain signal into a frequency-domain signal and is used to analyze the vibration frequency components. The spectral characteristics refer to the key frequency components and their parametric descriptions shown after the signal is decomposed by the Fourier transform in the frequency domain.

[0057] As an alternative implementation, by collecting the vibration signal of the thin plate to be processed in the Z-axis direction during processing, performing a fast Fourier transform on the vibration signal, converting the time-domain signal in the vibration signal into a frequency-domain spectrum, and based on the frequency-domain spectrum, combining a preset jitter frequency identification rule, identifying the spectrum characteristics related to jitter, where the jitter frequency identification rule includes defining a preset frequency range.

[0058] By using the fast Fourier transform to convert the time-domain signal into a frequency-domain spectrum, identifying the characteristic frequency related to jitter, calling a preset set of jitter filtering parameters, multiplying the filter transfer function and the fast Fourier spectrum point by point in the frequency domain, filtering out the energy of the target frequency band, and generating a filtered signal.

[0059] Step S20, according to the spectrum characteristics, perform frequency-domain filtering processing in combination with a preset set of jitter filtering parameters to generate a filtered signal.

[0060] In this embodiment, the preset set of jitter filtering parameters is a frequency range set according to the device historical data or a theoretical model. The frequency-domain filtering processing refers to suppressing the signal energy of a specific frequency band through multiplication or convolution operations in the frequency domain. The filtered signal is the vibration data after frequency-domain processing, retaining the effective components and removing the noise or interference frequencies.

[0061] As an alternative implementation, according to the spectrum characteristics, call the corresponding preset set of jitter filtering parameters, generate a frequency-domain filter transfer function according to the set of jitter filtering parameters, multiply the frequency-domain filter transfer function and the spectrum characteristics point by point and perform frequency-domain filtering processing, and retain the filtered signal within the preset frequency range.

[0062] Step S30, reconstruct the filtered signal into a time-domain compensation amount through an inverse Fourier transform.

[0063] In this embodiment, the inverse Fourier transform is the inverse operation of the fast Fourier transform, which restores the frequency-domain signal to a time-domain waveform. Reconstruction refers to restoring the time-series form of the signal through mathematical operations. The time-domain compensation amount is a reverse control signal generated based on the filtered signal, which is used to cancel the original vibration.

[0064] As an alternative implementation, through the inverse Fourier transform, the filtered signal is transformed and calculated to restore it to a time-domain waveform. The real part data aligned with the time axis of the original vibration signal is intercepted as the compensation amount reference. The amplitude of the compensation amount is calibrated and the phase shift is corrected in combination with the dynamic response characteristics. The gain of the compensation amount is adjusted in the time domain using the transfer function matrix. Based on the compensation amount reference, amplitude calibration, phase shift correction, and gain adjustment, a time-domain compensation amount with the same amplitude and opposite phase as the original vibration is generated.

[0065] Step S40: Based on the time-domain compensation amount, perform weighted fusion by combining the cutting acceleration and the cutting displacement deviation in the current cutting direction to generate a three-dimensional compensation vector.

[0066] In this embodiment, the cutting direction refers to the traveling angle of the current motion trajectory of the laser head in the X / Y plane. The cutting acceleration is the instantaneous acceleration value of the cutting head along the tangent direction of the path. The cutting displacement deviation is the real-time position error between the actual position and the theoretical path. Weighted fusion means linearly or non-linearly combining different physical quantities according to preset weight coefficients. The three-dimensional compensation vector is a spatial vector that fuses the compensation amounts of the X / Y / Z axes and is used for multi-axis collaborative motion correction.

[0067] As an alternative embodiment, based on preset weights, multiply the first weight by the time-domain compensation amount to obtain the first vector, multiply the second weight by the cutting acceleration to obtain the second vector, multiply the third weight by the cutting displacement deviation to obtain the third vector, add the second vector and the third vector and convert them into the X / Y-axis Cartesian coordinate system components through a homogeneous coordinate transformation matrix, and superimpose the X / Y-axis Cartesian coordinate system components with the first vector on the Z-axis to generate a three-dimensional compensation vector.

[0068] Step S50: Superimpose the three-dimensional compensation vector on the original cutting path coordinates through a motion controller to correct the following state of the cutting head.

[0069] In this embodiment, the motion controller is a hardware module used to drive a servo motor or an actuator, responsible for parsing path commands and outputting control signals. The original cutting path coordinates are the theoretical coordinate points of the cutting trajectory preset in the numerical control system. Superimposing means algebraically adding the compensation amount and the theoretical coordinates. The cutting head is the execution end that performs laser focusing and material processing. The following state is the relative position between the cutting head and the thin plate. When the thin plate vibrates, the cutting head follows in the same direction as the vibration of the thin plate through compensation.

[0070] As an alternative embodiment, convert the three-dimensional compensation vector into a compensation command consistent with the coordinate system of the motion controller according to the control period, transmit the compensation command to the motion controller, superimpose the three-dimensional compensation vector corresponding to the compensation command on the original cutting path coordinates through the motion controller to generate updated cutting path coordinates, and correct the following state of the cutting head to run according to the updated cutting path coordinates.

[0071] Exemplarily, a stainless-steel thin plate is used as the processing object, and a fiber laser cutting machine is used to perform linear cutting along the X-axis direction. The piezoelectric acceleration sensor installed at the center of the thin plate is used to collect the Z-axis vibration signal in real time. The 10-second time-domain waveform in the stable cutting stage is intercepted, and the frequency spectrum diagram is generated by performing a fast Fourier transform. The 450 Hz main vibration peak and the 120 Hz harmonic are identified. The preset band-stop filtering parameter set (center frequency 450 Hz ± 20 Hz, blocking attenuation -40 dB) is called to suppress the energy of the target frequency band in the frequency domain. The time-domain compensation signal is reconstructed through the inverse Fourier transform. The X-axis tangential acceleration (peak value 1.2 m / s2) and the Y-axis normal displacement deviation (±8 μm) of the servo system are read synchronously. After Kalman filtering fusion, a three-dimensional compensation vector (X: -0.4 μm, Y: +5.6 μm, Z: -14.8 μm) is generated according to the weight coefficients (acceleration 0.3, deviation 0.7). The compensation amount is superimposed on the theoretical path coordinates of the motion controller with a 1 ms control period. The look-ahead interpolation algorithm is used to smooth the trajectory mutation. After closed-loop verification by the grating ruler, it is shown that the RMS (Root Mean Square) value of the Z-axis vibration after compensation is reduced from 0.21 g to 0.06 g, and the X / Y tracking error ≤ 3 μm. Finally, a log file is generated to record the timestamp, compensation amount, and actual path data, realizing high-precision dynamic correction.

[0072] Due to the acquisition of the vibration signal and the integration of the motion data of the cutting head, the generated three-dimensional compensation vector can more effectively compensate for the jitter of the thin plate, overcoming the technical problem that the high-speed movement of the cutting head and the nonlinear cutting force caused by the interaction between the laser and the material lead to the jitter of the thin plate, and improving the stability of the thin plate during laser cutting.

[0073] Based on any of the above embodiments, in the second embodiment of the present application, before step S10, steps A11 to A12 are further included:

[0074] Step A11, collecting the signal of the to-be-processed thin plate in the Z-axis direction at a certain moment, and filtering the signal to obtain the original signal.

[0075] In this embodiment, a certain moment refers to a signal segment intercepted at a specific time point. Filtering is to filter out the vibration signals that do not belong to the Z-axis generated by the to-be-processed thin plate through a preprocessing algorithm. The original signal is the signal obtained by filtering out the signals that do not belong to the vibration generated by the to-be-processed thin plate on the Z-axis.

[0076] As an optional implementation manner, the vibration signal is collected at a certain moment or in real time, and the interference of the signals that do not belong to the jitter of the thin plate on the Z-axis is filtered out through a low-pass filter to obtain the original signal.

[0077] Step A12: Based on the original signal, perform adaptive filtering to obtain the vibration signal.

[0078] In this embodiment, environmental noise is an unwanted signal generated by external interference. Elimination is to remove the noise component through a signal processing algorithm. The vibration signal is the effective data reflecting the true vibration of the thin plate after removing the noise.

[0079] As an alternative implementation, perform adaptive filtering on the original signal using an adaptive threshold to suppress environmental noise to obtain a basic signal, and combine frequency-domain band-pass filtering to filter out the non-thin-plate vibration frequency band to obtain the vibration signal.

[0080] Exemplarily, taking an aluminum alloy thin plate as the test object, using a laser cutting machine to perform square hole cutting, rigidly fix a piezoelectric acceleration sensor on the geometric center of the thin plate in the Z-axis direction through a magnetic base, trigger the acquisition system to synchronously record 5 seconds of original signal at the moment of cutting start, use a low-pass filter (cutoff frequency 5 kHz, fourth order) to filter out high-frequency electromagnetic noise, generate an original signal file (including time stamp and acceleration g value), based on this signal, perform 5-layer decomposition using a wavelet basis, remove environmental noise through an improved threshold function, and superimpose 50 Hz - 2 kHz band-pass filtering after reconstruction. Finally, the signal-to-noise ratio of the vibration signal is increased from 12 dB to 28 dB, and the correlation coefficient of the time-domain waveform reaches 0.97.

[0081] Since the vibration signal in the Z-axis direction is obtained and the noise is removed, the generated compensation amount is more accurate, improving the reliability of the thin plate jitter compensation during laser cutting.

[0082] Based on any of the above embodiments, in the third embodiment of the present application, step S10 includes steps B11 to B12:

[0083] Step B11: Based on the spectral characteristics, extract the target frequency band related to the resonance of the to-be-processed thin plate.

[0084] In this embodiment, resonance is a phenomenon in which the amplitude of forced vibration of an object increases significantly at a specific frequency. The target frequency band is a specific frequency interval in the spectrum that overlaps with the natural frequency of the material and the excitation frequency of the processing equipment.

[0085] As an alternative implementation, perform frequency band positioning on the spectral characteristics through the natural frequency to obtain the peak frequency band of the target frequency band, combine process parameters to identify the coupled frequency band of the target frequency band, and then extract the amplitude and phase data of the target frequency band through a band-pass filter to obtain the target frequency band including the peak frequency band, coupled frequency band, amplitude, and phase data.

[0086] As an alternative implementation for obtaining the natural frequency, tap the corresponding thin plate through the experimental tapping method to obtain the natural frequency of the thin plate.

[0087] Step B12: Based on a preset dither filtering parameter set, perform frequency-domain filtering on the vibration components within the target frequency band to generate the filtered signal.

[0088] In this embodiment, the preset dither filtering parameter set is the filter parameters predefined according to the vibration characteristics of the device. The vibration components are the energy distributions corresponding to specific frequencies in the signal.

[0089] As an alternative implementation, generate a frequency-domain filter transfer function according to the dither filtering parameter set, multiply the frequency-domain filter transfer function point by point with the vibration components within the target frequency band for frequency-domain filtering, and retain the filtered signal within the preset frequency range.

[0090] Call the preset band-stop filter parameters, set the spectral amplitude of the target frequency band to zero or scale it according to the attenuation coefficient, verify the vibration amplitude attenuation rate after filtering through time-domain waveform comparison, and output the filtered signal aligned in time.

[0091] Exemplarily, conduct a laser cutting experiment using an aluminum alloy thin plate. Synchronously collect the vibration signals during the cutting process through a three-axis piezoelectric acceleration sensor, perform a fast Fourier transform on the Z-axis signal, separate the spectral main peak at 520 Hz (amplitude 0.6 g), the secondary peak at 120 Hz (amplitude 0.15 g), and the high-frequency noise (>5 kHz). Combine the results of the finite element modal analysis of the thin plate to extract the resonance target frequency band of 510 - 530 Hz. Call the preset blocking filter parameters (center frequency 520 Hz, bandwidth ±15 Hz, blocking attenuation -50 dB), attenuate the amplitude of the target frequency band to less than 5% in the frequency domain, reconstruct the filtered signal through inverse Fourier transform. The time-domain waveform shows that the amplitude of the 520 Hz component drops to 0.08 g, the signal-to-noise ratio increases from 18 dB to 32 dB, and the waveform correlation coefficient reaches 0.98. Output a data file containing the time stamp, the original signal, the filtered signal, and the spectral comparison chart for subsequent active vibration compensation control.

[0092] Due to the dither filtering parameter set, combined with the vibration components, it is possible to generate corresponding compensation parameters according to the settings of the dither parameters, improving the reliability of the thin plate dither compensation during laser cutting.

[0093] Based on any of the above embodiments, in the fourth embodiment of the present application, refer to Figure 2 , Figure 2 This is the flowchart of the fourth embodiment of the three-dimensional dither compensation method for laser cutting in the present application. Before step S30, it further includes steps C11 - C14:

[0094] Step C11: Based on the acceleration signal, obtain the filtered acceleration signal through adaptive filtering.

[0095] In this embodiment, the acceleration signal is an electrical signal output by a sensor that reflects the acceleration change of an object. The environmental noise is the non-target acceleration component caused by external interference. Adaptive filtering is to remove noise and retain the effective signal through filtering or algorithms.

[0096] As an alternative implementation, the acceleration signal is adaptively filtered by using an adaptive threshold to suppress the environmental noise, obtaining a basic acceleration signal, and filtering out the non-cutting head acceleration frequency band by combining frequency-domain band-pass filtering to obtain the acceleration signal.

[0097] Step C12: Based on the filtered acceleration signal, digital sampling is performed to obtain the cutting acceleration corresponding to the time stamp of the acceleration signal.

[0098] In this embodiment, digital sampling is a quantization process of converting a continuous analog signal into a discrete digital signal. The time stamp is an accurate time mark of a data point. The cutting acceleration is the dynamic acceleration value of the cutting head or the material during the processing.

[0099] As an alternative implementation, digital sampling is performed according to the filtered acceleration signal. The acceleration signal is converted into a discrete acceleration signal, and the cutting acceleration corresponding to the time stamp is obtained from the discrete acceleration signal.

[0100] Step C13: Based on the displacement data signal, displacement data information is obtained through a solution process.

[0101] In this embodiment, the displacement data signal is the real-time position information output by a position sensor. The solution process is to convert the original signal into a physical displacement quantity through coordinate transformation or data filtering. The displacement data information refers to the actual displacement data volume and the actual coordinate position of the cutting head.

[0102] As an alternative implementation, according to the collected X / Y-axis displacement data signal, through the coordinate transformation of the solution process, the displacement data signal is converted into the actual coordinate position according to the time stamp, obtaining the displacement data information including the corresponding time stamp and the actual coordinate position.

[0103] Step C14: Compare the displacement data information with a preset displacement path to obtain the cutting displacement deviation.

[0104] In this embodiment, the preset displacement path is the theoretical coordinate sequence of the cutting trajectory planned in the numerical control system. The comparison is to determine the deviation by calculating the difference between the actual position and the theoretical position. The cutting displacement deviation is the error amount by which the actual movement trajectory of the cutting head deviates from the theoretical path.

[0105] As an alternative implementation, the Euclidean distance is calculated between the actual displacement coordinates corresponding to the time stamp in the actual displacement data information and the coordinates in the preset displacement path with the same time stamp, so as to obtain the cutting displacement deviation.

[0106] It should be noted that steps C11, C12 are synchronized with steps C13, C14.

[0107] Exemplarily, taking a carbon steel thin plate as an object, an optical fiber laser cutting machine is used for arc cutting. The acceleration signal of the cutting head is collected by an acceleration sensor at a sampling rate of 100 kHz, decomposed by 6 layers using a wavelet basis, and environmental noise such as the 80 Hz vibration of the machine tool motor is removed through a preset threshold, generating cutting acceleration data with GPS synchronous time stamps. At the same time, the X / Y axis displacement signals are obtained in real time through a high-precision grating ruler. After the mechanical clearance noise is eliminated through Kalman filtering, it is compared with the preset arc path (radius 50 mm, center coordinates X = 300 mm / Y = 300 mm) in real time, and the displacement deviation is solved (the maximum normal deviation is 0.12 mm, and the tangential deviation is 0.05 mm). The acceleration and deviation data are fused and output as a structured file.

[0108] Since in the compensation operation, the cutting acceleration of the cutting head and the cutting displacement deviation are combined, it is possible to generate three-dimensional compensation data, improving the reliability of the thin plate jitter compensation during laser cutting.

[0109] Based on any of the above embodiments, in the fifth embodiment of the present application, refer to Figure 3 , Figure 3 is a schematic flowchart of the fifth embodiment of the three-dimensional jitter compensation method for laser cutting in the present application. Step S30 includes steps D11 to D13:

[0110] Step D11, based on the time domain compensation amount, the cutting acceleration, and the cutting displacement deviation, perform weighted fusion according to a preset weight to generate a deviation compensation amount.

[0111] In this embodiment, the preset weight is the contribution ratio coefficient of the time domain compensation amount, the cutting acceleration, and the cutting displacement deviation set according to process requirements. The deviation compensation amount is a multi-dimensional correction amount after fusing the acceleration and the deviation. The deviation compensation amount is a correction amount generated based on the position error.

[0112] As an alternative implementation, according to the preset weight, multiply the first weight by the time domain compensation amount to obtain the first vector, multiply the second weight by the cutting acceleration to obtain the second vector, multiply the third weight by the cutting displacement deviation to obtain the third vector, add the second vector and the third vector and convert them into X / Y axis Cartesian coordinate system components through a homogeneous coordinate transformation matrix, and superimpose the X / Y axis Cartesian coordinate system components with the first vector on the Z axis to generate a deviation compensation amount.

[0113] Step D12: Decompose the deviation compensation amount into axial compensation amounts for each axis according to a preset rule.

[0114] In this embodiment, the preset rule refers to a decomposition formula adaptively set through trigonometric functions based on the distribution relationship of the X, Y, and Z axes, which decomposes the deviation compensation amount into axial compensation amounts for the three axes.

[0115] As an alternative implementation, based on the preset rule, decompose the deviation compensation amount according to the decomposition formula in the preset rule, and decompose the deviation compensation amount into axial compensation amounts on the X-axis, Y-axis, and Z-axis through the formula.

[0116] Step D13: Superimpose the axial compensation amounts in space through a three-dimensional coordinate transformation matrix to generate a three-dimensional compensation vector containing amplitude and direction information.

[0117] In this embodiment, the three-dimensional coordinate transformation matrix is a mathematical tool for mapping the axial compensation amounts to a unified coordinate system. The axial compensation amounts are correction values in independent X / Y / Z directions. Space vector superposition is an operation of synthesizing multi-axis components into a three-dimensional vector.

[0118] As an alternative implementation, construct a three-dimensional coordinate transformation matrix according to the weight coefficients of the axial compensation amounts corresponding to the X-axis, Y-axis, and Z-axis, convert the X / Y / Z axial compensation amounts into space vectors in the workpiece coordinate system according to the three-dimensional coordinate transformation matrix, and generate a three-dimensional compensation vector containing amplitude and direction information by superimposing the space vectors with the initial coordinate vectors.

[0119] Exemplarily, taking a stainless steel thin plate as the test object, using a fiber laser cutting machine to perform S-shaped curve cutting, collecting vibration signals through a piezoelectric acceleration sensor at a sampling rate of 50 kHz, generating a filtered signal through band-stop filtering (center frequency 350 Hz, bandwidth ±15 Hz, attenuation -45 dB), reconstructing the time-domain compensation amount through inverse Fourier transform, synchronously reading the X-axis cutting acceleration (peak value ±2.5 m / s2) of the servo motor and the Y-axis displacement deviation (-0.15 mm) fed back by the grating scale, generating a deviation compensation amount (X: +0.5 μm, Y: -9.8 μm) by weighted fusion according to the preset weights (acceleration 0.4, deviation 0.6), performing trapezoidal integration on the time-domain compensation amount and superimposing Kalman filter smoothing, and mapping the X / Y / Z compensation amounts (X: +4 μm, Y: -9.8 μm, Z: -10.3 μm) into a three-dimensional compensation vector (amplitude 15.2 μm, direction angles θ = arctan(-9.8 / 4) = -68°, φ = arccos(-10.3 / 15.2) = 133°) through a homogeneous coordinate transformation matrix (including a 45° tilt attitude compensation of the cutting head).

[0120] Due to the data in three axial directions, including the thin plate jitter on the Z axis and the motion data of the cutting head on the X / Y axes, being jointly weighted and fused to obtain a three-dimensional compensation vector, the compensation effect is obvious, and the effectiveness of thin plate jitter compensation during laser cutting is improved.

[0121] Based on any of the above embodiments, in the sixth embodiment of the present application, referring to Figure 4 , Figure 4 is a schematic flowchart of the sixth embodiment of the three-dimensional jitter compensation method for laser cutting in the present application. Step S40 includes steps E11 to E13:

[0122] Step E11, decomposing the three-dimensional compensation vector into a translation compensation component and a rotation compensation component through a coordinate transformation matrix.

[0123] In this embodiment, the coordinate transformation matrix is a conversion tool for mathematically modeling the translation and rotation relationships between different coordinate systems. Decomposition is a mathematical operation for disassembling a vector into independent motion components. The translation compensation component is a pure displacement for correcting position deviation. The rotation compensation component is a rotational amount around an axis for correcting angular deviation.

[0124] As an optional implementation manner, input the three-dimensional compensation vector including the X axis, Y axis, and Z axis into the coordinate transformation matrix for decomposition, separate the translation component and the rotation component through singular value decomposition, superimpose the translation component on the interpolation path coordinates by the motion controller, and use the rotation component to drive the synchronous deflection of the rotation axis of the cutting head. Verify the feedback of the compensated position through a laser tracker, and generate the translation compensation component and the rotation compensation component based on the feedback.

[0125] Step E12, superimposing the translation compensation component and the rotation compensation component on the original cutting path coordinates through the motion controller to obtain the corrected target coordinates.

[0126] In this embodiment, superimposing is adding the compensation amount to the original value through mathematical operations. The original cutting path coordinates are the preset theoretical machining trajectory coordinate points. The corrected target coordinates are the actual execution coordinates after superimposing the compensation amount.

[0127] As an optional implementation manner, read the translation compensation component and the rotation compensation component through the motion controller, algebraically add the translation component to the original path coordinates with a unit control period, and use the rotation component to correct the rotation angle of the cutting head through a homogeneous coordinate transformation matrix to generate the target coordinates including the coordinate position and the rotation angle.

[0128] Step E13, the motion controller corrects the following state based on the target coordinates.

[0129] In this embodiment, the target coordinates are the actual execution position coordinates after compensation and correction.

[0130] As an alternative embodiment, the motion controller receives the target coordinates, compares the target coordinates with the running coordinates, combines the closed-loop feedback signals of the encoder or the grating scale to calculate the deviation between the actual position and the target coordinates, and adjusts the running parameters of the servo motor through the deviation to achieve the correction of the following state.

[0131] Exemplarily, the three-dimensional compensation vector is decomposed into a translation component (X = +5μm, Y = -3μm, Z = -8μm) and a rotation component (θx = 0.05°, θy = 0.1°, θz = 0.02°) through the homogeneous coordinate transformation matrix (including the Euler angles of the cutting head attitude). The motion controller superimposes the translation component on the original path coordinates at a 1ms period (for example, X is corrected from 150.000mm to 150.005mm, Y is corrected from 75.000mm to 74.997mm, Z is corrected from 0.000mm to -0.008mm), and the rotation component drives the rotation axis (C axis) to deflect by 0.1°. The following state correction is achieved through dynamic adjustment of the running parameters (the proportional gain is increased by 15% and the integral time is shortened by 20%) and acceleration feedforward control. The laser interferometer detects that the position error after compensation is ≤2μm and the angle deviation is ≤0.005°. The vibration RMS value is reduced from 0.3g to 0.07g. The corrected coordinates, compensation parameters, and the closed-loop data of the grating scale are output to the feedback file to meet the high-precision dynamic compensation requirements.

[0132] Since the three-dimensional compensation vector is decomposed and then superimposed on the cutting path coordinates, the state of the cutting head can be regulated at each moment, improving the accuracy of the thin plate jitter compensation during laser cutting.

[0133] Based on any of the above embodiments, in the seventh embodiment of the present application, referring to Figure 5 , Figure 5 is a schematic flow chart of the seventh embodiment of the three-dimensional jitter compensation method for laser cutting in the present application. After step S40, it further includes steps F11 to F13:

[0134] Step F11, when the cutting head collides with the plate during movement, a collision alarm will be triggered and the cutting head will be automatically lifted by a safe height.

[0135] In this embodiment, the collision with the plate means that the cutting head makes an unexpected contact with the workpiece or the fixture. The collision alarm is an audible and visual or software warning triggered after detecting the collision. The safe height is the preset Z-axis lifting distance to avoid secondary collisions. The automatic lifting is to drive the cutting head to urgently avoid through the servo motor or the pneumatic device.

[0136] As an optional implementation, a force sensor installed at the end of the cutting head monitors the X / Y / Z three-axis force and torque in real time. When the force in any direction exceeds the threshold and lasts for more than the preset time threshold, a collision alarm is triggered. An emergency stop command is sent to the motion controller through the bus, and the safety height parameters are called synchronously. The servo motor drives the cutting head to a safe position with maximum acceleration. After the lifting is completed, the motion axis is locked and the alarm stops.

[0137] Step F12: If the collision alarm has not stopped, the cutting head continues to be lifted.

[0138] In this embodiment, the risk of collision still exists when the lifting is continued, and the cutting head is continuously lifted vertically along the Z axis to a safe position for obstacle avoidance.

[0139] As an optional implementation, if the collision alarm does not stop, the lifting position is verified in real time by using an absolute encoder, and if it is found that there is still a risk of collision, the cutting head continues to be lifted.

[0140] Step F13: if the collision alarm stops, the cutting head is no longer lifted, and the three-dimensional compensation vector is generated based on the current following state to update the following state.

[0141] In this embodiment, the collision alarm stop is a state in which the collision detection system cancels the alarm and resumes processing.

[0142] As an optional implementation, when the collision alarm is lifted, the motion controller terminates the lifting command and resumes processing. The vibration signal, acceleration signal and displacement data signal of the current following state are acquired in real time through the sensor. After the noise is eliminated by Kalman filtering, a three-dimensional compensation vector is generated according to the preset weight fusion, and mapped to the workpiece coordinate system through the homogeneous coordinate transformation matrix. The operating parameters of the motion controller are updated with the preset control cycle, and the compensated target coordinates are issued synchronously to update the following state of the cutting head.

[0143] For example, the six-dimensional force sensor monitors the force on the cutting head in real time. When the Z-axis contact force is detected to be greater than 60N (threshold) and lasts for more than 20ms, a collision alarm is triggered, the motion axis is stopped urgently, and the servo motor is used to move the cutting head at a speed of 3m / s. 2 The cutting head is lifted to a safe height (Z axis + 8mm) by acceleration. If the alarm does not stop (such as the force continues to be > 50N), the cutting head is accelerated at 1m / s 2The increment continues to lift until the Z axis is +15mm; if the alarm is released (Z axis force <10N for 50ms), the lifting stops and based on the current following state deviation (X axis +0.01mm, Y axis -0.008mm, Z axis +0.002mm) fed back by the grating ruler and the acceleration sensor data, a three-dimensional compensation vector (X: +5μm, Y: -4μm, Z: -1μm) is generated according to the weight (displacement 0.5, vibration 0.5), and the translation compensation vector is decomposed into the homogeneous transformation matrix. The motion controller updates the operating parameters (proportional gain + 12%) in a 0.5ms cycle, and superimposes the compensation amount on the target coordinates (X = 200.005mm, Y = 150.996mm, Z = 0.001mm). The laser tracker verifies that the position error is ≤ 2μm and the vibration RMS value is ≤ 0.05g. The alarm log, compensation vector and control parameters are output to the feedback file (including timestamp, coordinates, force curve and spectrum) to complete the collision recovery closed-loop control.

[0144] The collision alarm is set to protect the thin plate from damage, which provides better prevention and control of operational errors during the cutting process, thereby improving the safety and reliability of laser cutting.

[0145] Based on any of the above embodiments, in Embodiment 8 of the present application, refer to Figure 6 , Figure 6 This is a flow chart of the eighth embodiment of the three-dimensional jitter compensation method for laser cutting of the present application. After step C12, it also includes steps G11 to G15:

[0146] Step G11, generating a data set based on the vibration signal, the cutting acceleration and the cutting displacement deviation according to corresponding timestamps.

[0147] In this embodiment, the timestamp is the precise time mark of the data point acquisition moment. The data set is a multi-dimensional data set that is time-aligned and structured and stored.

[0148] As an optional implementation, vibration signals, cutting acceleration and displacement deviation are collected at a preset sampling rate, the time axis is unified through an interpolation algorithm, the vibration signal is low-pass filtered and detrended, the cutting acceleration is smoothed by sliding average, the displacement deviation is denoised by Kalman filtering, and the three types of data are merged into a structured data set according to timestamps.

[0149] Step G12, using cross-validation to divide the data set, using half of the data set as a validation set and the rest of the data set as a training set.

[0150] In this embodiment, cross validation is a method of dividing a data set into multiple subsets to alternately train and validate the model. The validation set is a data subset used to evaluate the generalization performance of the model. The training set is a data subset used to train the model parameters.

[0151] As an alternative implementation, a data set containing vibration signals with timestamp synchronization, cutting acceleration, and displacement deviation is divided into a training set and a validation set according to a certain ratio to ensure that the timestamps of the two types of data are continuous and uniformly distributed.

[0152] Step G13: The validation set generates a three-dimensional compensation verification vector through the three-dimensional jitter compensation method for laser cutting, and the training set is input into the basic frequency domain filtering model to output a three-dimensional compensation training vector.

[0153] In this embodiment, the basic frequency domain filtering model is a basic model established based on the core algorithms of fast Fourier transform and frequency domain filtering.

[0154] As an alternative implementation, the validation set is subjected to fast Fourier transform to obtain spectral features, and then, based on the spectral features, frequency domain filtering processing is performed in combination with a preset jitter filtering parameter set to generate a filtered signal. The filtered signal is reconstructed into a time domain compensation amount through inverse Fourier transform. Then, based on the time domain compensation amount, weighted fusion is performed in combination with the cutting acceleration and cutting displacement deviation in the current cutting direction to generate a three-dimensional compensation vector to generate a three-dimensional compensation verification vector. At the same time, the training set is input into the frequency domain filtering model, and after filtering and inverse transformation, a three-dimensional compensation training vector is output.

[0155] Step G14: Input the three-dimensional compensation verification vector into the basic frequency domain filtering model for comparison with the three-dimensional compensation training vector, and generate feedback compensation parameters based on the comparison result.

[0156] In this embodiment, the feedback compensation parameter is an adjustment parameter for optimizing the model or compensation strategy according to the comparison result.

[0157] As an alternative implementation, by calculating the axial error and correlation coefficient between the three-dimensional compensation verification vector and the three-dimensional compensation training vector, the parameters of the frequency domain filtering model are dynamically adjusted using the gradient descent method, and the model weights are iteratively updated with a preset learning rate through an optimizer, and feedback compensation parameters are generated.

[0158] Step G15: Based on the feedback compensation parameters, adjust the model parameters of the basic frequency domain filtering model, and repeatedly train the basic frequency domain filtering model to obtain a target frequency domain filtering model.

[0159] In this embodiment, the model parameter is the core configuration of the filter. The adjustment is to update the parameters through the gradient descent or heuristic algorithm. The repeated training is to iteratively optimize the model weights multiple times. The target frequency domain filtering model is a frequency filtering model that meets the accuracy requirements after optimization.

[0160] As an alternative implementation, based on the feedback compensation parameters, the filter parameter library of the basic frequency-domain filtering model is updated by an optimizer. The root mean square error and correlation coefficient are used as loss functions, and the training set is iteratively trained several times. The generalization performance is evaluated on the validation set in each round. When the continuous decrease amplitude of the validation loss reaches the threshold for a preset number of rounds, the early stopping mechanism is triggered, and finally the target frequency-domain filtering model is obtained.

[0161] As an alternative implementation of using the target frequency filtering model, by acquiring the vibration signal, cutting acceleration, and cutting displacement deviation in the cutting direction of the cutting head at a certain moment, and inputting the vibration signal, cutting acceleration, and cutting displacement deviation into the target frequency-domain filtering model, the target coordinates of the cutting head at this moment are obtained. The target frequency-domain filtering model transmits the target coordinates to the motion controller, and the motion controller corrects the following state of the cutting head based on the target coordinates.

[0162] Exemplarily, taking a stainless steel thin plate as the processing object, a fiber laser cutting machine is used for grid path cutting. The vibration signal is collected by an acceleration sensor at a sampling rate of 50 kHz, and the displacement deviation is recorded by a grating scale. The servo encoder collects the X / Y-axis cutting acceleration at 1 kHz. The time stamps are synchronized (accuracy ±1 μs) through the PTP protocol to generate a data set containing 100,000 samples (the fields include time stamps, triaxial vibration g values, X / Y accelerations m / s 2 2, triaxial displacement deviations μm). The data set is divided into a training set (50,000 samples) and a validation set (50,000 samples) in a ratio of 5:5. The validation set is input into a three-dimensional jitter compensation module (Kalman filter + weight fusion, vibration weight 0.5, acceleration 0.3, deviation 0.2) to generate a three-dimensional compensation validation vector (X: ±6 μm, Y: ±4 μm, Z: ±10 μm). The training set is input into the basic frequency-domain filtering model (band-stop filter bank: initial center frequency 300 Hz / 500 Hz, bandwidth ±20 Hz, attenuation -30 dB) to generate a three-dimensional compensation training vector (X: ±7 μm, Y: ±5 μm, Z: ±12 μm). The feedback compensation parameters (center frequency +15 Hz, bandwidth reduced to ±15 Hz, attenuation enhanced to -40 dB) are generated through axial error analysis (X-axis root mean square error = 1.2 μm, Y-axis 1.0 μm, Z-axis 2.5 μm) and correlation coefficient (R2 = 0.82). The Adam optimizer (learning rate 0.001, iteration 200 times) is used to adjust the model parameters. After the early stopping mechanism is triggered, the target frequency-domain filtering model (center frequency 315 Hz / 515 Hz) is obtained. After actual cutting verification and compensation, the vibration jitter is reduced by 50%, and the displacement error ≤ 2 μm. The model parameters and verification data are stored in the database for adaptive calling.

[0163] By suppressing the influence of thin plate vibration through dithering filter parameters, the vibration characteristics of the material are modeled as a frequency-domain filter model to achieve real-time vibration compensation, improving the efficiency of generating thin plate dithering compensation during laser cutting.

[0164] This application provides a three-dimensional dithering compensation device, which includes: at least one processor; and a memory communicatively connected to the at least one processor; wherein, the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor to enable the at least one processor to execute the three-dimensional dithering compensation method for laser cutting in Embodiment 1 above.

[0165] Refer to the following Figure 7 , which shows a schematic structural diagram of a three-dimensional dithering compensation device suitable for implementing the embodiments of this application. The three-dimensional dithering compensation device in the embodiments of this application may include, but is not limited to, mobile terminals such as mobile phones, laptop computers, three-dimensional dithering compensation devices, personal digital assistants (PDAs), tablet computers (PADs), portable multimedia players (PMPs), vehicle terminals (such as vehicle navigation terminals), etc., and fixed terminals such as three-dimensional dithering compensation devices, laser cutters, etc. Figure 7 The three-dimensional dithering compensation device shown is only an example and should not impose any limitations on the functions and usage scope of the embodiments of this application.

[0166] As Figure 7As shown, the three-dimensional jitter compensation device may include a processing device 1001 (such as a central processing unit, a graphics processing unit, etc.), which may perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) 1002 or a program loaded from a storage device 1003 into a random access memory (RAM) 1004. In the random access memory 1004, various programs and data required for the operation of the three-dimensional jitter compensation device are also stored. The processing device 1001, the read-only memory 1002, and the random access memory 1004 are connected to each other through a bus 1005. An input / output (I / O) interface 1006 is also connected to the bus. Generally, the following systems may be connected to the I / O interface 1006: an input device 1007 including, for example, a touch screen, a touchpad, a keyboard, a mouse, an image sensor, a microphone, an accelerometer, a gyroscope, etc.; an output device 1008 including, for example, a liquid crystal display (LCD), a speaker, a vibrator, etc.; a storage device 1003 including, for example, a magnetic tape, a hard disk, etc.; and a communication device 1009. The communication device 1009 may allow the three-dimensional jitter compensation device to communicate with other devices wirelessly or wiredly to exchange data. Although the figure shows a three-dimensional jitter compensation device with various systems, it should be understood that it is not required to implement or have all the shown systems. More or fewer systems may be alternatively implemented or had.

[0167] Specifically, according to the embodiments disclosed in the present application, the processes described above with reference to the flowcharts may be implemented as computer software programs. For example, the embodiments disclosed in the present application include a computer program product, which includes a computer program carried on a computer-readable medium, and the computer program contains program codes for executing the methods shown in the flowcharts. In such an embodiment, the computer program may be downloaded and installed from a network through the communication device, or installed from the storage device 1003, or installed from the read-only memory 1002. When the computer program is executed by the processing device 1001, the above functions defined in the methods of the embodiments disclosed in the present application are executed.

[0168] The three-dimensional jitter compensation device provided by the present application adopts the three-dimensional jitter compensation method of laser cutting in the above embodiments, and can solve the technical problem that the high-speed movement of the cutting head and the non-linear cutting force caused by the interaction between the laser and the material result in the jitter of the thin plate. Compared with the prior art, the beneficial effects of the three-dimensional jitter compensation device provided by the present application are the same as those of the three-dimensional jitter compensation method of laser cutting provided by the above embodiments, and the other technical features in the three-dimensional jitter compensation device are the same as those disclosed in the method of the previous embodiment, and will not be elaborated here.

[0169] It should be understood that each part disclosed in this application can be implemented by hardware, software, firmware, or a combination thereof. In the description of the above embodiments, specific features, structures, materials, or characteristics can be combined in a suitable manner in any one or more embodiments or examples.

[0170] As described above, the above is only the specific implementation manner of this application, but the protection scope of this application is not limited thereto. Any person skilled in the art within the technical scope disclosed in this application can easily think of changes or substitutions, which should all be covered within the protection scope of this application. Therefore, the protection scope of this application should be subject to the protection scope of the claims.

[0171] This application provides a computer-readable storage medium with computer-readable program instructions (i.e., computer programs) stored thereon, and the computer-readable program instructions are used to execute the three-dimensional jitter compensation method for laser cutting in the above embodiments.

[0172] The computer-readable storage medium provided by this application can be, for example, a USB flash drive, but is not limited to electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, devices, or any combination of the above. More specific examples of the computer-readable storage medium may include, but are not limited to: electrical connections with one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM), or flash memory, optical fibers, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination of the above. In this embodiment, the computer-readable storage medium can be any tangible medium containing or storing a program, and this program can be used by or in conjunction with an instruction execution system, device, or device. The program code contained on the computer-readable storage medium can be transmitted by any suitable medium, including but not limited to: wires, optical cables, radio frequency (RF), etc., or any suitable combination of the above.

[0173] The above computer-readable storage medium can be included in the three-dimensional jitter compensation device; it can also exist separately and not be assembled into the three-dimensional jitter compensation device.

[0174] The above computer-readable storage medium carries one or more programs, which, when executed by a three-dimensional jitter compensation device, cause the three-dimensional jitter compensation device to: perform a fast Fourier transform on the vibration signal of the thin plate to be processed in the Z-axis direction to obtain spectral characteristics; perform frequency-domain filtering processing on the basis of the spectral characteristics in combination with a preset jitter filtering parameter set to generate a filtered signal; reconstruct the filtered signal into a time-domain compensation amount through an inverse Fourier transform; perform weighted fusion on the basis of the time-domain compensation amount in combination with the cutting acceleration and the cutting displacement deviation in the current cutting direction to generate a three-dimensional compensation vector; and superimpose the three-dimensional compensation vector on the original cutting path coordinates through a motion controller to correct the following state of the cutting head.

[0175] Computer program code for performing the operations of the present application may be written in one or more programming languages or combinations thereof. The programming languages include object-oriented programming languages such as Java, Smalltalk, C++, and also include conventional procedural programming languages such as the "C" language or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, executed as a stand-alone software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (for example, by using an Internet service provider to connect through the Internet).

[0176] The flowcharts and block diagrams in the accompanying drawings illustrate the possible architectures, functions, and operations of systems, methods, and computer program products according to various embodiments of the present application. In this regard, each block in the flowchart or block diagram may represent a module, a program segment, or a part of code that contains one or more executable instructions for implementing a specified logical function. It should also be noted that, in some alternative implementations, the functions marked in the blocks may occur in a different order from that marked in the accompanying drawings. For example, two consecutive blocks shown may actually be executed substantially in parallel, and they may sometimes be executed in the reverse order, depending on the functions involved. It should also be noted that each block in the block diagram and / or flowchart, and the combination of blocks in the block diagram and / or flowchart, may be implemented by a dedicated hardware-based system for performing the specified functions or operations, or may be implemented by a combination of dedicated hardware and computer instructions.

[0177] The modules involved in the embodiments of the present application can be implemented in software or in hardware. Among them, the name of the module does not constitute a limitation on the unit itself in some cases.

[0178] The readable storage medium provided in the present application is a computer-readable storage medium, and the computer-readable storage medium stores computer-readable program instructions (i.e., computer programs) for executing the above-mentioned three-dimensional jitter compensation method for laser cutting, which can solve the technical problem of the thin plate jitter caused by the high-speed movement of the cutting head and the non-linear cutting force caused by the interaction between the laser and the material. Compared with the prior art, the beneficial effects of the computer-readable storage medium provided in the present application are the same as those of the three-dimensional jitter compensation method for laser cutting provided in the above embodiments, and will not be elaborated here.

[0179] The above are only some embodiments of the present application, and do not limit the patent scope of the present application. Any equivalent structural transformation made by using the content of the specification and drawings of the present application under the technical concept of the present application, or direct / indirect application in other related technical fields, is included in the patent protection scope of the present application.

Claims

1. A three-dimensional jitter compensation method for laser cutting, characterized in that, The method includes: Performing a fast Fourier transform on the vibration signal of the thin plate to be processed in the Z-axis direction to obtain spectral characteristics; According to the spectral characteristics, performing frequency-domain filtering processing in combination with a preset jitter filtering parameter set to generate a filtered signal; Reconstructing the filtered signal into a time-domain compensation amount through an inverse Fourier transform; Based on the time-domain compensation amount, performing weighted fusion in combination with the cutting acceleration and cutting displacement deviation in the current cutting direction to generate a three-dimensional compensation vector; Superimposing the three-dimensional compensation vector on the original cutting path coordinates through a motion controller to correct the following state of the cutting head.

2. The three-dimensional jitter compensation method for laser cutting according to claim 1, characterized in that, Before the step of performing a fast Fourier transform on the vibration signal of the thin plate to be processed in the Z-axis direction to obtain a frequency-domain spectrum, it further includes: Collecting the signal of the thin plate to be processed in the Z-axis direction at a certain moment and filtering the signal to obtain an original signal; Performing adaptive filtering based on the original signal to obtain the vibration signal.

3. The three-dimensional jitter compensation method for laser cutting according to claim 1, characterized in that The step of performing frequency-domain filtering processing in combination with a preset jitter filtering parameter set according to the spectral characteristics to generate a filtered signal includes: Based on the spectral characteristics, extracting a target frequency band related to the resonance of the thin plate to be processed; Based on the preset jitter filtering parameter set, performing frequency-domain filtering processing on the vibration components in the target frequency band to generate the filtered signal.

4. The three-dimensional jitter compensation method for laser cutting according to claim 1, wherein Before the step of performing weighted fusion in combination with the cutting acceleration and cutting displacement deviation in the current cutting direction based on the time-domain compensation amount to generate a three-dimensional compensation vector, it further includes: Based on the acceleration signal, performing adaptive filtering to obtain a filtered acceleration signal; Based on the filtered acceleration signal, performing digital sampling to obtain the cutting acceleration corresponding to the time stamp of the acceleration signal; and, Based on the displacement data signal, performing calculation processing to obtain displacement data information; Comparing the displacement data information with a preset displacement path to obtain the cutting displacement deviation.

5. The three-dimensional jitter compensation method for laser cutting according to claim 1, wherein The step of performing weighted fusion in combination with the cutting acceleration and cutting displacement deviation in the current cutting direction based on the time-domain compensation amount to generate a three-dimensional compensation vector includes: Performing weighted fusion on the time-domain compensation amount, the cutting acceleration, and the cutting displacement deviation according to a preset weight to generate a deviation compensation amount; Decomposing the deviation compensation amount into axial compensation amounts according to a preset rule; Superimposing the axial compensation amounts by a three-dimensional coordinate transformation matrix according to a spatial vector to generate a three-dimensional compensation vector including amplitude and direction information.

6. The three-dimensional jitter compensation method for laser cutting according to claim 1, wherein, The step of superimposing the three-dimensional compensation vector on the original cutting path coordinates through a motion controller to correct the following state of the cutting head includes: Based on the three-dimensional compensation vector, decomposing it into a translation compensation component and a rotation compensation component through a coordinate transformation matrix; Through the motion controller, superimposing the translation compensation component and the rotation compensation component on the original cutting path coordinates to obtain corrected target coordinates; The motion controller corrects the following state based on the target coordinates.

7. The three-dimensional jitter compensation method for laser cutting according to claim 1, wherein, After the step of superimposing the three-dimensional compensation vector on the original cutting path coordinates through a motion controller to correct the following state of the cutting head, the method further includes: When the cutting head hits the plate during movement, a collision alarm is triggered and the cutting head is automatically lifted by a safe height; If the collision alarm does not stop, the cutting head continues to be lifted; If the collision alarm stops, the cutting head is no longer lifted, and a three-dimensional compensation vector is generated based on the current following state to update the following state.

8. The three-dimensional jitter compensation method for laser cutting according to claim 4, wherein After the step of obtaining the cutting displacement deviation by performing a solution process on the displacement data signal and comparing it with a preset displacement path, the method further includes: Generating a data set with the vibration signal, the cutting acceleration, and the cutting displacement deviation according to corresponding timestamps; Dividing the data set by cross-validation, using half of the data set as a validation set and the remaining data set as a training set; The validation set generates a three-dimensional compensation verification vector through the three-dimensional jitter compensation method for laser cutting, and the training set is input into a basic frequency-domain filtering model to output a three-dimensional compensation training vector; Inputting the three-dimensional compensation verification vector into the basic frequency-domain filtering model to compare with the three-dimensional compensation training vector, and generating a feedback compensation parameter based on the comparison result; Adjusting the model parameters of the basic frequency-domain filtering model based on the feedback compensation parameter, and repeatedly training the basic frequency-domain filtering model to obtain a target frequency-domain filtering model.

9. A three-dimensional jitter compensation device, characterized in that, The three-dimensional jitter compensation device includes: a memory, a processor, and a computer program stored on the memory and executable on the processor, the computer program being configured to implement the steps of the three-dimensional jitter compensation method for laser cutting according to any one of claims 1 to 8.

10. A storage medium, characterized in that, The storage medium is a computer-readable storage medium, and a computer program is stored on the storage medium, and when the computer program is executed by a processor, it implements the steps of the three-dimensional jitter compensation method for laser cutting according to any one of claims 1 to 8.

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