An adjustable interval multi-channel laser scribing processing system

Abstract

The application discloses a multi-channel laser scribing processing system with adjustable interval, adopts an octahedral beam splitter designed in a structure to replace a traditional polarization beam splitter, realizes efficient beam splitting, and only four optical elements are needed to complete multi-beam output, so that the optical path structure is obviously simplified, energy loss and manufacturing cost are reduced. Secondly, the controller is integrated to control a first displacement driving device (adjusting the position of incident light), a second displacement driving device (adjusting the interval between split laser beams) and a lens interval adjusting device, real-time monitoring of displacement precision is combined with a laser range finder, and the displacement amount is fed back by using the resistance change of a ball screw, so that a closed loop control is formed, continuous dynamic adjustment of the interval (Delta d) between laser beams is realized, the precision can reach the micron level, and the strict process requirement of minimizing the dead zone of perovskite batteries and the like is met.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of solar cell processing, in particular to a multi-channel laser scribing processing system with adjustable spacing. BACKGROUND

[0002] With the development of photovoltaic technology, laser scribing as a key process in the production of solar cells has become one of the research hotspots and plays an important role in the preparation of solar cells. This process selectively removes materials by high-energy laser beams, achieving non-contact processing, and its precision directly determines the size of the "dead zone" of the battery module, i.e. the non-power generation area from the outermost P1 line to the outermost P3 line. Studies have shown that for every 10 μm reduction in dead zone width, the effective power generation area of the battery can be increased by 0.5-1.2%, significantly affecting the photoelectric conversion efficiency and the service life of the module. Therefore, the core indicator of the laser scribing process is to minimize the dead zone. In addition to line width design, it is necessary to avoid P1 / P2 / P3 line spacing comparison or line merging, which requires high precision of the beam position control of the laser equipment.

[0003] At present, due to the significant differences in the physical properties of different material solar cells, the laser scribing process parameters are also different, which puts higher requirements on the flexibility and efficiency of laser scribing equipment processing. The line spacing between the laser beams emitted by multiple laser heads of the existing laser scribing equipment cannot be adjusted or the adjustment precision is not enough, which reduces the flexibility of the use of the laser scribing equipment, and the device used is more, the mechanical structure of the equipment is complex and the cost is high. SUMMARY

[0004] In order to solve the problems existing in the background art, the present application provides a multi-channel laser scribing processing system with adjustable spacing, which greatly reduces the number of optical elements (only four optical elements are required), realizes beam splitting, significantly reduces system cost and laser energy loss, and realizes continuous and accurate dynamic adjustment of beam spacing, breaking through the limitation of traditional mechanical splitting fixed light path.

[0005] In order to achieve the above purpose, the present application adopts the following technical scheme:

[0006] The present application provides a multi-channel laser scribing processing system with adjustable spacing, which includes a first mirror, a first displacement driving device, an octahedral beam splitter, a beam splitter, a second mirror, a second displacement driving device, a focusing lens assembly and a lens spacing adjustment device.

[0007] In a specific embodiment, the beam splitter is a non-polarized flat beam splitter. The laser beam is a collimated linearly polarized laser, and the laser beam can be pulsed laser or continuous laser. The polarization direction of the laser beam can be adjusted by a half-wave plate.

[0008] The first mirror changes the direction of the laser beam from horizontal to vertical downward, and the reflected laser beam enters the vertical a plane of the octahedral beam splitter located above. The light beam entering the inside of the octahedral beam splitter is divided into transmitted light and reflected light through the vertical b plane of the octahedral beam splitter located above. The reflected light and the transmitted light are emitted from the two vertical c plane and d plane of the octahedral beam splitter located below. The two emitted laser beams are again split by the beam splitter below into two vertically downward split laser beams and two horizontally split laser beams. The two horizontally split laser beams are reflected by the second mirror to become vertically downward. The four vertically downward split laser beams are focused to the scribing sample surface by the corresponding lenses in the focusing lens assembly.

[0009] The first mirror is driven by the first displacement driving device to move along the horizontal direction to adjust the position of the laser beam entering the a plane of the octahedral beam splitter, and further adjust the distance between the two laser beams emitted from the c plane and the d plane of the octahedral beam splitter.

[0010] The second mirror is driven by the second displacement driving device to move along the horizontal direction to adjust the distance between the second mirror and the beam splitter. The first displacement driving device and the second displacement driving device cooperate to continuously adjust the positions of the four vertically downward split laser beams and the distance between them.

[0011] The lens position adjusting device adjusts the positions of the lenses in the focusing lens assembly and the distance between them.

[0012] Further, the octahedral beam splitter is obtained by cutting two symmetrical corners from a cube beam splitter. The distance between the two laser beams emitted from the c plane and the d plane of the octahedral beam splitter is where θ2 is the refraction angle of the octahedral beam splitter, X5 is the side length of the cube, and X4 is the incident position of the light beam on the a plane of the octahedral beam splitter.

[0013] Specifically, the vertical b plane of the octahedral beam splitter located above is composed of multiple layers of film materials. Each layer of film material includes a high-reflection film layer and a high-transmission film layer arranged in sequence. The high-reflection film layer is made of zirconium dioxide material, and the high-transmission film layer is made of silicon dioxide material.

[0014] In a specific embodiment, the laser beam is turned by the first mirror and incident on the a plane of the octahedral beam splitter at θ1=45°, and then divided into two output beams. The material of the octahedral beam splitter is transparent glass material, for example, H-K9 material with a refractive index of 1.5067. According to the refraction law, the refraction angle θ2=27.989°, and θ4=θ2+45°=72.989° at this time. The b plane is composed of multiple layers of film materials, in which the high-reflection film layer of zirconium dioxide has a refractive index n H =2.1224, and the low-reflection film layer of silicon dioxide has a refractive index nL = 1.449, both are low absorption materials. The light beam passing through the b face can be divided into transmitted light and reflected light, and the reflected light is emitted from the c face, and the transmitted light is emitted from the d face. Since the c face is perpendicular to the a face, and the d face is parallel to the a face, finally the two beams of light are emitted from the c face and the d face at θ3= 45°, so the final two beams of laser are parallel to the incident laser. The interval Δd between the two output beams of the octahedral beam splitter can be adjusted by adjusting the position of the incident light beam to the a face of the octahedral beam splitter. The geometric configuration of the octahedral beam splitter is derived from the cutting of the opposite diagonal prism of the cube, and there is X5 = X1 + X2 + X3 in the octahedron. Use X4 to represent the incident position of the incident light beam on the a face of the octahedral beam splitter, where Finally,

[0015] In specific embodiments, the polarization state direction of the incident laser can be adjusted by setting a half-wave plate. Changing the polarization direction of the incident light can adjust the splitting ratio of the light beam at the b face of the octahedral beam splitter. For the transmittance and reflectance of the b face, the transmittance and reflectance of the b face can be obtained according to the Fresnel law, Total reflectance = r s + r p , total transmittance = t s + t p . Figure 5 The transmittance and reflectance of the light beam are calculated according to the polarization state of the incident light. It can be proved that when the polarization of the incident light is adjusted to a suitable polarization state, 1:1 splitting can be achieved. In summary, the octahedral beam splitter of the laser beam can be divided into two beams of laser with consistent energy, adjustable interval and parallel emission.

[0016] Further, a controller is further included, and the controller is in control connection with the first displacement driving device, the second displacement driving device and the lens interval adjusting device respectively. The displacement amount of the first displacement driving device is ΔX4 = 1 / 2(Δd 目标值 - Δd 预设值 ) controlled by the controller; the displacement amount of the second displacement driving device is ΔX = Δd 目标值 - Δd 预设值 controlled by the controller; and the displacement amount of the lens interval adjusting device is ΔX4 = 1 / 2(Δd 目标值 - Δd 预设值 ) controlled by the controller; wherein Δd 目标值 is a target interval value between the four split beams of laser, and Δd 预设值 is a preset interval value between the four split beams of laser (or a current interval value between the four split beams of laser).

[0017] Firstly, input the target laser beam interval in the controller, determine the interval changed by the first displacement driving device, the second displacement driving device and the lens interval adjusting device through calculation, and then adjust the positions of the first mirror, the second mirror and the focusing lens through the controller cooperating with the driving of the first displacement driving device, the second displacement driving device and the lens interval adjusting device, and finally output the laser beam with an interval of Δd. 目标值

[0018] Further, the first displacement driving device and the second displacement driving device are respectively provided with a laser range finder for monitoring the actual displacement amount thereof, the controller is in control connection with the laser range finder, the controller calculates the difference between the theoretical displacement amount and the actual displacement amount according to the actual displacement amount of the first displacement driving device and the second displacement driving device tested by the laser range finder, calculates the number of turns required for the driving motor to compensate the displacement amount difference, and controls the first displacement driving device and the second displacement driving device to make displacement compensation, so as to ensure the displacement accuracy of the first displacement driving device and the second displacement driving device.

[0019] Further, the focusing lens assembly comprises four lens bases, one focusing lens is correspondingly mounted on each lens base, the four lens bases are installed side by side on a support, and the lens interval adjusting device drives the four lens bases to move to correspondingly adjust the interval between the four focusing lenses.

[0020] In specific application, the lens base is slidably installed on the support, the lens base is driven by the lens interval adjusting device to slide along the support, and the interval between the four focusing lenses is correspondingly adjusted. The support can also be a telescopic slide rod, which is stretched or shortened along with the movement of the lens interval adjusting device, so as to realize the continuous adjustment of the interval between the adjacent focusing lenses.

[0021] Further, the lens interval adjusting device comprises three adjusting bases, a hinged frame, a hinged column, a driving motor and a ball screw, the adjusting base is arranged between two adjacent lens bases, the two ends of the adjusting base are installed on the support, a sliding groove is formed in the adjusting base, the hinged frame is arranged between the lens base and the adjusting base, the hinged frame is hinged by two hinged rods, the hinged end of the hinged frame is installed on the lens base, the two separated ends of the hinged frame are slidably installed in the sliding groove of the adjusting base through the hinged column, the four lens bases are respectively drivenly connected with the ball screw, and the driving motor drives the ball screw to move.

[0022] ​Further, one or more resistance measuring instruments are provided beside the lens base, the probes of the resistance measuring instruments are connected to the adjacent lens base, and the resistance measuring instruments determine the actual displacement amount of the distance between the adjacent focusing lenses by monitoring the change in resistance value.

[0023] The ball screw in the lens spacing adjustment device has a certain resistance value, the lens base is connected to the ball screw, and the probe of the resistance measuring instrument is connected to the adjacent lens base. When the driving motor drives the ball screw to move, the length of the ball screw in contact between the adjacent lens bases changes, and thus the resistance also changes. The actual displacement amount of the distance between the adjacent focusing lenses can be confirmed by monitoring the change in resistance value.

[0024] Further, the resistance measuring instrument is connected to the controller, the difference between the theoretical displacement amount and the actual displacement amount of the distance between the adjacent focusing lenses is calculated, and displacement compensation is controlled by the driving motor.

[0025] Compared with the prior art, the present application has the following beneficial effects:

[0026] 1. In the present application, an optimized octahedral beam splitter (based on transparent glass material, such as H-K9) is used to replace the traditional polarization beam splitter and complex beam splitting array. The light beam is split by the multilayer coating (such as zirconium dioxide high-reflection film and silicon dioxide low-reflection film) on the b face of the octahedral beam splitter, which greatly reduces the number of optical elements (only four optical elements are needed), significantly reduces the system cost and laser energy loss.

[0027] 2. By controlling the first displacement driving device (adjusting the position of the incident light on the octahedral beam splitter), the second displacement driving device (adjusting the distance between the second mirror and the beam splitter), and the lens spacing adjustment device (adjusting the distance between the focusing lenses), combined with the laser range finder (monitoring the displacement accuracy of the first displacement driving device and the second displacement driving device) and the resistance measuring instrument (feedbacking the actual displacement amount of the focusing lenses through the resistance change of the ball screw), the continuous and accurate dynamic regulation of the light beam spacing is realized, breaking through the limitation of the traditional mechanical beam splitting fixed light path.

[0028] 3. The focusing lens spacing adjustment device uses a linkage mechanism composed of a hinged rod assembly, a telescopic slide rod, and a ball screw. The distance between the adjacent focusing lenses is continuously adjustable by the driving motor, and the fixed base of the focusing lens is aligned with the central axis of the octahedral beam splitter, ensuring the stability of the light path. This design greatly reduces the size of the optical system, which is suitable for industrial precision machining scenarios.

[0029] 4. By presetting the target light beam spacing (Δd), the controller automatically calculates the displacement amount required by each displacement stage (such as ΔX4 and ΔX), and compensates for the displacement error in real time (based on the feedback of the laser range finder and the resistance measuring instrument), forming a closed-loop control, which improves the adjustment efficiency and accuracy. Attached Figure Description

[0030] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0031] Figure 1 This is a diagram of the optical path structure of the multi-channel laser scribing system with adjustable spacing in this invention.

[0032] Figure 2 This is a schematic diagram illustrating the specific structure of the octahedral beam splitter in this invention;

[0033] Figure 3 This is a diagram illustrating the layered structure of plane b of the octahedral beam splitter in this invention.

[0034] Figure 4 This is a partial structural diagram of the focusing lens assembly and the lens spacing adjustment device in this invention;

[0035] Figure 5 This relates to the relationship between the polarization change of the incident light and the reflectivity and transmittance of the b-face of the octahedral beam splitter in this invention.

[0036] The specific reference numerals in the attached figures are as follows:

[0037] 1. First reflecting mirror; 2. First displacement driving device; 3. Octahedral beam splitter; 4. Beam splitter; 5. Second reflecting mirror; 6. Second displacement driving device; 7. Laser rangefinder; 8. Focusing lens assembly; 9. Lens base; 10. Focusing lens; 11. Support; 12. Lens spacing adjustment device; 13. Adjustment base; 14. Slide groove; 15. Hinge frame; 16. Hinge rod; 17. Hinge column; 18. Drive motor; 19. Ball screw; 20. Resistance measuring instrument; 21. Controller; 22. Scribbled sample; 23. Half-wave plate. Detailed Implementation

[0038] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0039] An embodiment of the present invention discloses a multi-channel laser scribing system with adjustable spacing, such as... Figure 1 and Figure 2 As shown, it includes a first reflecting mirror 1, a first displacement driving device 2, an octahedral beam splitter 3, a beam splitter 4, a second reflecting mirror 5, a second displacement driving device 6, a focusing lens assembly 8, and a lens spacing adjustment device 12.

[0040] The first mirror 1 changes the direction of the laser beam from horizontal to vertical downward, and the reflected laser beam enters the vertical plane a plane of the octahedral beam splitter 3 located above, and the light beam entering the inside of the octahedral beam splitter 3 is divided into transmitted light and reflected light through the vertical plane b plane of the octahedral beam splitter 3 located above, and the reflected light and the transmitted light are emitted from the two vertical planes c plane and d plane of the octahedral beam splitter 3 located below, respectively, and the two laser beams emitted are again divided by the beam splitter 4 below, into two beams of laser beams vertically downward and two beams of laser beams horizontally, and the two beams of laser beams horizontally are reflected by the second mirror 5 to change the direction to vertical downward, and the four beams of laser beams vertically downward are focused to the surface of the scribe sample 22 by the corresponding lenses in the focusing lens assembly 8.

[0041] The first mirror 1 is driven by the first displacement driving device 2 to move along the horizontal direction, and the position of the laser beam entering the a plane of the octahedral beam splitter 3 is adjusted, and then the distance between the two laser beams emitted from the c plane and the d plane of the octahedral beam splitter 3 is adjusted.

[0042] The second mirror 5 is driven by the second displacement driving device 6 to move along the horizontal direction, and the distance between the second mirror 5 and the beam splitter 4 is adjusted, and the first displacement driving device 2 and the second displacement driving device 6 cooperate to continuously adjust the positions of the four beams of laser beams vertically downward and the distances between them.

[0043] The positions of the focusing lenses 10 in the focusing lens assembly 8 and the distances between them are adjusted correspondingly by the lens distance adjusting device 12.

[0044] As shown in Figure 2 and Figure 3 The octahedral beam splitter 3 is obtained by cutting two symmetrical corners from a cube beam splitter, and the distance between the two laser beams emitted from the c plane and the d plane of the octahedral beam splitter 3 is Wherein, θ2 is the refraction angle of the octahedral beam splitter 3, X5 is the side length of the cube, and X4 is the incident position of the light beam on the a plane of the octahedral beam splitter 3. Specifically, the vertical plane b plane of the octahedral beam splitter 3 is composed of multiple layers of film materials, each layer of film material includes a high reflection film layer and a high transmission film layer arranged in sequence, the high reflection film layer is made of zirconium dioxide, and the high transmission film layer is made of silicon dioxide. The design of the high reflection film layer and the high transmission film layer needs to meet the requirements of specific transmittance and reflectance, and the performance needs to be stable in the target wavelength range. Preferably, the thickness of the high reflection film layer and the high transmission film layer is λ / 4 or an integer multiple of λ / 4, and λ is the wavelength of the laser; the number of layers of the high reflection film layer and the high transmission film layer is 10-30 layers.

[0045] In a specific embodiment, the laser beam is turned by the first mirror 1 and then incident on the a face of the octahedral beam splitter 3 at θ1=45°, and then divided into two output beams. The material of the octahedral beam splitter 3 is transparent glass material, for example, H-K9 material, with a refractive index of 1.5067. According to the refraction law, the refraction angle θ2=27.989°, and θ4=θ2+45°=72.989°. The b face is composed of multiple layers of film material, including high-reflection film layer zirconium dioxide with a refractive index n H =2.1224 and low-reflection film layer silicon dioxide with a refractive index n L =1.449, both of which are low-absorption materials. The beam passing through the b face can be divided into transmitted light and reflected light, with the reflected light emitted from the c face and the transmitted light emitted from the d face. Since the c face is perpendicular to the a face and the d face is parallel to the a face, the two beams are finally emitted from the c face and the d face at θ3=45°, so the final two laser beams are parallel to the incident laser beam. The interval Δd between the two output beams of the octahedral beam splitter 3 can be adjusted by adjusting the position of the incident beam on the a face of the octahedral beam splitter 3. The geometric configuration of the octahedral beam splitter 3 is derived from a cube with a diagonal prism cut off, and there is X5=X1+X2+X3 in the octahedron. X4 is used to represent the incident position of the incident beam on the a face of the octahedral beam splitter 3, where Finally, we get

[0046] In a specific embodiment, the polarization state of the incident laser beam can be adjusted by setting a half-wave plate 23, and the polarization direction of the incident light can be changed to adjust the light splitting ratio of the beam in the b face of the octahedral beam splitter 3. For the transmittance and reflectance of the b face, the Fresnel law can be used to obtain The total reflectance = r s +r p , and the total transmittance = t s +t p . Figure 5 The transmittance and reflectance of the beam are calculated according to the polarization state of the incident light. It can be proved that when the polarization of the incident light is adjusted to a suitable polarization state, the light splitting ratio can be 1:1. In summary, the laser beam passing through the octahedral beam splitter 3 can be divided into two beams with consistent energy, adjustable interval, and parallel emission.

[0047] The principle of the octahedral beam splitter 3 is based on the reflection and transmission principle of the Fresnel formula. According to the Fresnel formula, the linearly polarized light incident to an interface can be divided into s light and p light, and the reflectivity and transmissivity of s light and p light are obtained by the formula. As long as the incident angle and the material are determined, the reflectivity and transmissivity of s light and p light are determined. By planning the ratio of s polarization state and p polarization state of the incident light, the overall reflectivity and transmissivity (overall reflectivity = s light reflection + p light reflection) (overall transmissivity = s light transmission + p light transmission) can be adjusted. The purpose of the octahedral beam splitter 3 is to output the light beam 1:1.

[0048] Further comprising a controller 21, the controller 21 is in control connection with the first displacement driving device 2, the second displacement driving device 6 and the lens spacing adjusting device 12 respectively, the displacement amount of the first displacement driving device 2 is controlled by the controller 21 as ΔX4=1 / 2(Δd 目标值 -Δd 预设值 ); the displacement amount of the second displacement driving device 6 is controlled by the controller 21 as ΔX=Δd 目标值 -Δd 预设值 ; the displacement amount of the lens spacing adjusting device 12 is controlled by the controller 21 as ΔX4=1 / 2(Δd 目标值 -Δd 预设值 ); wherein, Δd 目标值 is the target spacing value between the four output split laser beams, and Δd 预设值 is the preset spacing value (or the current spacing value) between the four output split laser beams. First, input the target laser beam spacing in the controller 21, determine the spacing changed by the three displacement stages of the first displacement driving device 2, the second displacement driving device 6 and the lens spacing adjusting device 12 through calculation, and then drive the first displacement driving device 2, the second displacement driving device 6 and the lens spacing adjusting device 12 through the controller 21 to adjust the positions of the first mirror 1, the second mirror 5 and the focusing lens 10, and finally output the laser beam with a spacing of Δd 目标值 .

[0049] Wherein, the first displacement driving device 2 and the second displacement driving device 6 are respectively provided with a laser range finder 7 for monitoring the actual displacement amount thereof, the controller 21 is in control connection with the laser range finder 7, the controller 21 calculates the difference value between the theoretical displacement amount and the actual displacement amount of the first displacement driving device 2 and the second displacement driving device 6 according to the actual displacement amount tested by the laser range finder 7, calculates the number of turns required for the driving motor 18 to compensate the displacement amount difference, and controls the first displacement driving device 2 and the second displacement driving device 6 to make displacement compensation, so as to ensure the displacement accuracy of the first displacement driving device 2 and the second displacement driving device 6.

[0050] Wherein, asFigure 4 As shown, the focusing lens assembly 8 includes four lens bases 9, and one focusing lens 10 is installed on each lens base 9. The four lens bases 9 are installed side by side on a support 11, and the lens spacing adjustment device 12 drives the four lens bases 9 to move to adjust the spacing between the four focusing lenses 10. In specific applications, the lens bases 9 can be slidably installed on the support 11, and the lens spacing adjustment device 12 drives the lens bases 9 to slide along the support 11 to adjust the spacing between the four focusing lenses 10. The support 11 can also be a telescopic slide, which is stretched or shortened as the lens spacing adjustment device 12 moves to continuously adjust the spacing between adjacent focusing lenses 10.

[0051] The lens spacing adjustment device 12 includes three adjustment bases 13, a hinged frame 15, a hinged column 17, a drive motor 18, and a ball screw 19. An adjustment base 13 is arranged between adjacent two lens bases 9, and the two ends of the adjustment base 13 are installed on the support 11. A sliding groove 14 is formed in the adjustment base 13, and a hinged frame 15 is arranged between the lens base 9 and the adjustment base 13. The hinged frame 15 is formed by two hinged rods 16, and the hinged ends of the hinged frame 15 are installed on the lens base 9. The two separated ends of the hinged frame 15 are slidably installed in the sliding groove 14 of the adjustment base 13 through the hinged column 17. The four lens bases 9 are respectively drivenly connected to the ball screw 19, and the drive motor 18 drives the ball screw 19 to move.

[0052] The lens base 9 is provided with one or more resistance measuring instruments 20 on the side, and the probe of the resistance measuring instrument 20 is connected to the adjacent lens base 9. The resistance measuring instrument 20 determines the actual displacement amount of the distance change between adjacent focusing lenses 10 by monitoring the change of the resistance value. The ball screw 19 in the lens spacing adjustment device has a certain resistance value, and the lens base 9 is connected to the ball screw 19. The probe of the resistance measuring instrument 20 is connected to the adjacent lens base 9. When the drive motor 18 drives the ball screw 19 to move, the length of the ball screw 19 in contact between the adjacent lens bases 9 changes, and therefore the resistance also changes. The actual displacement amount of the distance change between adjacent focusing lenses 10 can be confirmed by monitoring the change of the resistance value.

[0053] The resistance measuring instrument 20 is controlled connected with a controller 21, which calculates the difference between the theoretical displacement amount and the actual displacement amount of the distance change between adjacent focusing lenses 10, and controls the drive motor 18 to make displacement compensation.

[0054] In the present application, an octahedral beam splitter (based on transparent glass material, such as H-K9) is used to replace the traditional polarization beamsplitter and complex beamsplitter array. The light beam is split by the multilayer coating (such as zirconium dioxide high-reflection film and silicon dioxide low-reflection film) on the b face of the octahedral beam splitter, which greatly reduces the number of optical elements (only four optical elements are needed), significantly reduces the system cost and laser energy loss. By controlling the controller 21 to integrate the first displacement driving device 2 (adjusting the position of the incident light on the octahedral beam splitter), the second displacement driving device 6 (adjusting the distance between the second mirror 5 and the beam splitter 4), and the lens distance adjusting device 12 (adjusting the distance between the focusing lenses 10), combined with the laser range finder 7 (monitoring the displacement accuracy of the first displacement driving device 2 and the second displacement driving device 6) and the resistance measuring instrument 20 (feedbacking the actual displacement of the focusing lens 10 through the resistance change of the ball screw 19), the continuous and accurate dynamic regulation of the light beam distance is realized, which breaks through the limitation of the traditional mechanical beamsplitting fixed optical path. The focusing lens 10 distance adjustable device uses a linkage mechanism composed of a hinged rod assembly, an extension slide and a ball screw 19, which controls the continuous adjustment of the distance between adjacent focusing lenses 10 through the driving motor 18, and at the same time, the fixed base of the focusing lens 10 is aligned with the central axis of the octahedral beam splitter, which ensures the stability of the optical path. This design greatly reduces the size of the optical system, which is suitable for industrial precision machining scenes. By presetting the target light beam distance (Δd), the controller 21 automatically calculates the required displacement amount of each displacement stage (such as ΔX4, ΔX), and compensates the displacement error in real time (based on the feedback of the laser range finder 7 and the resistance measuring instrument 20), forming a closed-loop control, which improves the adjustment efficiency and accuracy.

[0055] Although embodiments of the present application have been shown and described, it is to be understood that various modifications, substitutions, replacements and changes can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A pitch adjustable multi-path laser scribe processing system, characterized by, The first mirror, the first displacement driving device, the octahedral beam splitter, the beam splitter, the second mirror, the second displacement driving device, the focusing lens assembly and the lens spacing adjusting device are arranged in sequence. The first mirror is driven by the first displacement driving device to move along the horizontal direction, so as to adjust the position of the laser beam entering the vertical face a of the octahedral beam splitter, and further adjust the spacing between the two laser beams emitted from the vertical faces c and d of the octahedral beam splitter. The first mirror is driven by the first displacement driving device to move along the horizontal direction, so as to adjust the position of the laser beam entering the vertical face a of the octahedral beam splitter, and further adjust the spacing between the two laser beams emitted from the vertical faces c and d of the octahedral beam splitter. The second mirror is driven by the second displacement driving device to move along the horizontal direction, so as to adjust the distance between the second mirror and the beam splitter. The second mirror is driven by the second displacement driving device to move along the horizontal direction, so as to adjust the distance between the second mirror and the beam splitter. The octahedral beam splitter is obtained by cutting two symmetrical corners of a cubic beam splitter, and the interval between two beams of laser light emitted by the c face and the d face of the octahedral beam splitter Wherein, θ2 is the refraction angle of the octahedral beam splitter, X5 is the side length of the cubic, and X4 is the incident position of the light beam on the a face of the octahedral beam splitter.

2. The adjustable spacing multi-pass laser scribe processing system of claim 1, wherein, The lens spacing adjusting device adjusts the positions and spacing of the lenses in the focusing lens assembly.

3. The adjustable spacing multi-pass laser scribe processing system of claim 1, wherein, Also include a controller, the controller is respectively with the first displacement drive device, second displacement drive device and lens spacing adjustment device control connection, through the controller control the displacement amount of the first displacement drive device is ΔX4=1 / 2(Δd 目标值 -Δd 预设值 );Through the controller control the displacement amount of the second displacement drive device is ΔX=Δd 目标值 -Δd 预设值 ;Through the controller control the displacement amount of lens spacing adjustment device is ΔX4=1 / 2(Δd 目标值 -Δd 预设值 );Wherein, Δd 目标值 It is the target spacing value between the output four beams of split laser, Δd 预设值 It is the preset spacing value between the output four beams of split laser.

4. The adjustable spacing multi-pass laser scribe processing system of claim 3, wherein, The vertical face b of the octahedral beam splitter is composed of multiple layers of film materials, each layer of film material includes a high-reflection film layer and a high-transmission film layer arranged in sequence, the high-reflection film layer is made of zirconium dioxide, and the high-transmission film layer is made of silicon dioxide.

5. The adjustable spacing multi-pass laser scribe processing system of claim 3 or 4, wherein, The first displacement driving device and the second displacement driving device are respectively provided with a laser range finder for monitoring the actual displacement amount, the controller is in control connection with the laser range finder, and the controller calculates the difference between the theoretical displacement amount and the actual displacement amount according to the actual displacement amount of the first displacement driving device and the second displacement driving device tested by the laser range finder, and controls the first displacement driving device and the second displacement driving device to make displacement compensation. The focusing lens assembly includes four lens bases, one focusing lens is installed on each lens base, and the four lens bases are installed side by side on a support.

6. The adjustable spacing multi-pass laser scribe processing system of claim 5, wherein, The lens spacing adjusting device comprises three adjusting bases, hinged frames, hinged rods, hinged columns, driving motors and ball screws, the adjusting base is arranged between two adjacent lens bases, the adjusting base is mounted on the support at both ends, a sliding groove is formed in the adjusting base, the hinged frame is formed by two hinged rods, the hinged end of the hinged frame is mounted on the lens base, the two separated ends of the hinged frame are slidingly mounted in the sliding groove of the adjusting base through the hinged column, the four lens bases are respectively drivingly connected with the ball screws, and the driving motor drives the ball screw to move.

7. The adjustable spacing multi-pass laser scribe processing system of claim 6, wherein, One or more resistance measuring instruments are arranged beside the lens base, the probe of the resistance measuring instrument is connected to the adjacent lens base, and the resistance measuring instrument determines the actual displacement amount of the distance change between the adjacent focusing lenses by monitoring the change of the resistance value.

8. The adjustable spacing multi-pass laser scribe processing system of claim 7, wherein, The resistance measuring instrument is connected with the controller, the difference between the theoretical displacement amount and the actual displacement amount of the distance change between the adjacent focusing lenses is calculated, and the driving motor is controlled to make displacement compensation.

9. The adjustable spacing multi-pass laser scribe processing system of claim 1, wherein, A half-wave plate for regulating the polarization direction of the laser beam is arranged between the first reflecting mirror and the octahedral beam splitter.

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