A voltage swing condenser filter for the preparation of electronic-grade molybdenum hexafluoride and its control method.

Abstract

This invention relates to a pressure swing condenser filter for the preparation of electronic-grade molybdenum hexafluoride and its control method, comprising: a tank; a condenser pipe connected between a gas phase inlet and a liquid phase outlet, the condenser pipe being immersed in a low-temperature chamber; several controllable heat exchange layers made of an elastic flexible material, the condenser pipe having several through holes in the middle and later sections of the gas path, the controllable heat exchange layers covering the through holes respectively; a pressing molding component disposed within the condenser pipe and spaced apart from the controllable heat exchange layers; a pressurizing component disposed within the tank, the pressurizing component pressurizing the tank to cause the controllable heat exchange layers to expand into the condenser pipe and approach the pressing molding component, the expansion of the controllable heat exchange layer improving the heat exchange efficiency, causing the semi-solid molybdenum pentafluoride to solidify into blocky molybdenum pentafluoride crystals upon cooling; after the pressurizing component depressurizes the tank, the controllable heat exchange layers contract and cause the blocky molybdenum pentafluoride crystals to detach; and a filter plate.

Description

Technical Field

[0001] This invention relates to the field of molybdenum hexafluoride condensation filtration, specifically to a voltage swing condenser filter for the preparation of electronic-grade molybdenum hexafluoride and its control method. Background Technology

[0002] Molybdenum hexafluoride (MoF6) can be produced by reacting molybdenum powder with fluorine gas. During the preparation process, the resulting crude MoF6 gas contains other impurities, requiring purification. Among the impurities in the crude MoF6 gas, molybdenum pentafluoride is one of the most common byproducts. MoF6 has a boiling point of approximately 34°C, while molybdenum pentafluoride has a melting point of approximately 67°C. To remove molybdenum pentafluoride, current technology generally employs a condensation filtration method. The crude MoF6 gas is condensed to 0-10°C, liquefying the molybdenum hexafluoride and solidifying the molybdenum pentafluoride. This solid is then filtered through a filter to obtain a high-purity liquid MoF6.

[0003] During the condensation process, the temperature of the crude molybdenum hexafluoride gas gradually decreases. When the gas is cooled to between 60 and 67°C, the molybdenum pentafluoride in it forms a viscous semi-solid that adheres to the side wall of the condensation device. When the gas is cooled to between 40 and 60°C, the molybdenum pentafluoride forms fine crystals that are difficult to capture.

[0004] Existing technologies are insufficient to optimize the condensation and solidification process of molybdenum pentafluoride, thus failing to improve the condensation and purification accuracy of molybdenum hexafluoride.

[0005] The purpose of this invention is to design a voltage-switching condenser filter for the preparation of electronic-grade molybdenum hexafluoride and its control method, addressing the problems existing in the prior art. Summary of the Invention

[0006] To address the problems existing in the prior art, the present invention provides a voltage-switching condenser filter for the preparation of electronic-grade molybdenum hexafluoride and its control method, which can effectively solve at least one problem existing in the prior art.

[0007] The technical solution of this invention is:

[0008] A pressure swing condenser filter for the preparation of electronic-grade molybdenum hexafluoride, comprising:

[0009] The tank body is equipped with a cold water inlet, a cold water outlet, a gas phase inlet, and a liquid phase outlet, forming a low-temperature chamber inside the tank.

[0010] The condenser pipe connects the gas phase inlet and the liquid phase outlet, and is immersed in the low-temperature chamber.

[0011] The heat exchange controllable layer, which is made of a flexible material, has several through holes in the middle and rear section of the gas path of the condensation pipe, and the heat exchange controllable layer covers the through holes respectively.

[0012] The compressed molding component is installed inside the condensation pipe and spaced apart from the heat exchange controllable layer;

[0013] A pressurizing component, installed within the tank, pressurizes the tank, causing the controllable heat exchange layer to expand into the condensation pipe and approach the compression molding component. This expansion increases heat exchange efficiency, allowing the semi-solid molybdenum pentafluoride adhering to the inner wall of the controllable heat exchange layer to fill the space between the compression molding component and the controllable heat exchange layer. The semi-solid molybdenum pentafluoride then solidifies upon cooling, forming blocky molybdenum pentafluoride crystals. Depressurization of the tank by the pressurizing component causes the controllable heat exchange layer to contract and detach the blocky molybdenum pentafluoride crystals.

[0014] The filter plate is installed on the side of the condenser pipe near the liquid phase outlet. The filter plate is used to intercept molybdenum pentafluoride block crystals and filter the fine molybdenum pentafluoride crystals generated in the condenser pipe downstream through the molybdenum pentafluoride block crystals.

[0015] Furthermore, the condensation pipe has through holes in the area corresponding to an internal temperature of 60℃-67℃.

[0016] Furthermore, the pressed molding part has an arc-shaped concave structure, and the side of the pressed molding part near the heat exchange controllable layer is provided with several protrusions. The protrusions give the formed molybdenum pentafluoride block crystals several fragile pores. After the heat exchange controllable layer shrinks, the molybdenum pentafluoride block crystals break through the fragile pores.

[0017] Furthermore, the protrusion has a structure in which the cross-sectional area gradually decreases from the end closer to the press-formed part to the end farther away from the press-formed part, and the top surface of the protrusion is set as a cross-shaped protrusion structure.

[0018] Furthermore, the pressurizing component includes a connecting cylinder that connects to the tank. A piston is installed inside the connecting cylinder, and the piston is driven by a corresponding piston drive cylinder. When the piston moves towards the inside of the tank inside the connecting cylinder, it pressurizes the inside of the tank.

[0019] Furthermore, both the cold water inlet and the cold water outlet are equipped with controllable valves. When the pressurizing component is working, the controllable valves close the cold water inlet and the cold water outlet.

[0020] Furthermore, the outer surface of the heat exchange controllable layer is provided with movable fins. The movable fins are used to adjust the heat exchange efficiency of the heat exchange controllable layer. When the heat exchange controllable layer is in a contracted state, the movable fins are close to the condenser pipe. When the heat exchange controllable layer is in an expanded state, the movable fins are away from the condenser pipe.

[0021] Furthermore, the movable fins are hinged to the outer surface of the heat exchange controllable layer, and a baffle plate is provided on the outer surface of the condensation pipe near the heat exchange controllable layer. The baffle plate has fin through holes. When the heat exchange controllable layer is in a contracted state, the hinged end of the movable fin is offset from the fin through hole.

[0022] Furthermore, a waste outlet is located on one side of the filter plate.

[0023] A control method for a pressure swing condenser filter used in the preparation of electronic-grade molybdenum hexafluoride is further provided, based on a pressure swing condenser filter used in the preparation of electronic-grade molybdenum hexafluoride, comprising the following steps:

[0024] S1, fill the tank with cold water, and introduce crude molybdenum hexafluoride gas into the condensation pipe to condense the crude molybdenum hexafluoride in the condensation pipe;

[0025] S2, executed every first time interval: control the pressurizing component to pressurize the tank and maintain it for a second time, causing the heat exchange controllable layer to expand into the condensation pipe and approach the compression molding component, so that the semi-solid molybdenum pentafluoride is cooled and solidified into molybdenum pentafluoride block crystals, and then control the pressurizing component to depressurize the tank, so that the heat exchange controllable layer contracts and the molybdenum pentafluoride block crystals fall off.

[0026] Therefore, the present invention provides the following effects and / or advantages:

[0027] This application utilizes a heat exchange controllable layer design. This layer has expansion properties, which can increase the contact area between the inner wall of the pipe and molybdenum pentafluoride under pressurization, thereby improving heat exchange efficiency. This alters the efficiency of molybdenum pentafluoride condensation and crystallization, causing the originally adhered semi-cured molybdenum pentafluoride to rapidly condense and solidify. Through the cooperation of the heat exchange controllable layer and the compression molding component, the solidified molybdenum pentafluoride block crystals break up and detach from the heat exchange controllable layer, forming a gravel-like structure. After being collected and intercepted by the filter plate, the molybdenum pentafluoride crystals form a filter layer near the filter plate, further intercepting the fine molybdenum pentafluoride crystals.

[0028] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention are realized and obtained through the structures particularly pointed out in the description and the drawings.

[0029] It should be understood that the above summary and the following detailed description of the invention are exemplary and explanatory, and are intended to provide further explanation of the invention as claimed. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of an embodiment of the present invention.

[0031] Figure 2 This is a cross-sectional view of an embodiment of the present invention, wherein the heat exchange controllable layer is not expanded.

[0032] Figure 3 for Figure 2 Enlarged schematic diagram of part A.

[0033] Figure 4 This is a cross-sectional view of an embodiment of the present invention, wherein the heat exchange controllable layer expands.

[0034] Figure 5 This is an exploded view of the structure of the heat exchange controllable layer, the compression molding component, and the movable fins.

[0035] Figure 6 This is a schematic diagram of the protrusion.

[0036] Figure 7 This is a schematic diagram showing the state of molybdenum pentafluoride block crystals after they are intercepted by a filter plate.

[0037] Explanation of reference numerals in the attached figures:

[0038] Tank body 31, cold water inlet 311, cold water outlet 312, gas phase inlet 313, liquid phase outlet 314, waste outlet 315, condensation pipe 32, heat exchange controllable layer 33, compression molding part 34, protrusion 341, pressurizing part 35, connecting cylinder 351, piston 352, piston drive cylinder 353, movable fins 36, filter plate 37, baffle plate 38. Detailed Implementation

[0039] To facilitate understanding by those skilled in the art, the structure of the present invention will now be described in further detail with reference to the accompanying drawings:

[0040] refer to Figure 1-6 A pressure swing condenser filter for the preparation of electronic-grade molybdenum hexafluoride, comprising:

[0041] The tank body 31 is provided with a cold water inlet 311, a cold water outlet 312, a gas phase inlet 313, and a liquid phase outlet 314, and a low temperature cavity is formed inside the tank body 31.

[0042] In this embodiment, the cold water inlet 311 and the cold water outlet 312 are connected to the interior of the tank 31, thereby enabling the cold water to circulate inside the tank 31 and form a low-temperature chamber. Preferably, the cold water temperature of the cold water inlet 311 is 0-30°C. This temperature can better cool and condense the molybdenum hexafluoride in the crude molybdenum hexafluoride gas into a liquid phase, and at the same time cool and condense the molybdenum pentafluoride in the crude molybdenum hexafluoride gas into a solid phase.

[0043] A condensation pipe 32 is connected between the gas phase inlet 313 and the liquid phase outlet 314, and the condensation pipe 32 is immersed in the low temperature chamber;

[0044] In this embodiment, the condenser pipe 32 is used for the passage of crude molybdenum hexafluoride gas, and simultaneously allows the crude molybdenum hexafluoride gas to exchange heat with the surrounding cold water within the condenser pipe 32, thereby cooling and condensing the crude molybdenum hexafluoride gas. Furthermore, the crude molybdenum hexafluoride gas typically enters the condenser pipe 32 at a high temperature of above 150°C, and the temperature within the condenser pipe 32 gradually decreases along with the temperature of the gas path.

[0045] The heat exchange controllable layer 33, in several quantities, is made of an elastic and flexible material. The condensation pipe 32 has several through holes in the middle and rear section of the gas path, and the heat exchange controllable layer 33 covers the through holes respectively.

[0046] In this embodiment, when the heat exchange controllable layer 33 is not under stress, it lies flat covering the through-hole. At this time, the area of ​​the heat exchange controllable layer 33 is small, resulting in generally low efficiency in heat exchange with the surrounding cold water. However, when the heat exchange controllable layer 33 is under pressure and expands, its area increases, and the efficiency of heat exchange with the surrounding cold water increases. The heat exchange controllable layer 33 can be made of corrosion-resistant elastomers such as perfluoroelastomer rubber (FFKM).

[0047] The press-formed component 34 is disposed inside the condensation pipe 32 and spaced apart from the heat exchange controllable layer 33;

[0048] A pressurizing component 35 is disposed in the tank body 31. After the pressurizing component 35 pressurizes the tank body 31, the heat exchange controllable layer 33 expands into the condensation pipe 32 and approaches the compression molding component 34. After the heat exchange controllable layer 33 expands, the heat exchange efficiency is improved, and the semi-solid molybdenum pentafluoride adhering to the inner wall of the heat exchange controllable layer 33 fills the space between the compression molding component 34 and the heat exchange controllable layer 33, so that the semi-solid molybdenum pentafluoride is cooled and solidified into molybdenum pentafluoride block crystals. After the pressurizing component 35 depressurizes the tank body 31, the heat exchange controllable layer 33 contracts and the molybdenum pentafluoride block crystals fall off.

[0049] In this embodiment, in the middle and rear section of the condensing pipe 32, the molybdenum pentafluoride inside the condensing pipe 32 condenses to form an adhesive semi-solid. The pressing molding component 34 is disposed near the heat exchange controllable layer 33. After the heat exchange controllable layer 33 expands, the heat exchange controllable layer 33 approaches or adheres to the pressing molding component 34. At the same time, the pressing molding component 34 is used to press the molybdenum pentafluoride semi-solid adhering to the inner wall of the heat exchange controllable layer 33 into a mold. After a period of condensation, the molybdenum pentafluoride solidifies and forms an adhesive semi-solid that adheres to the inner surface of the unexpanded heat exchange controllable layer 33. At this time, the pressurizing component 35 pressurizes the tank 31, causing the heat exchange controllable layer 33 to expand under pressure. On the one hand, the expanded heat exchange controllable layer 33 has a larger area, which significantly increases the heat exchange efficiency with the surrounding cold water, causing the adhesive semi-solid molybdenum pentafluoride to cool rapidly and solidify into a solid. On the other hand, the heat exchange controllable layer 33 drives the adhesive semi-solid molybdenum pentafluoride to approach or adhere to the pressing molding component 34, so that the adhesive semi-solid molybdenum pentafluoride solidifies into a specific shape after pressing. Then, the pressure component depressurizes the tank 31. At this time, the heat exchange controllable layer 33 drives the solidified molybdenum pentafluoride block crystal away from the compression molding component 34. At the same time, the heat exchange controllable layer 33 contracts, causing the brittle molybdenum pentafluoride block crystal to detach from the molybdenum pentafluoride block crystal. Meanwhile, the molybdenum pentafluoride block crystal is a fragile solid, and it is easy to break the molybdenum pentafluoride block crystal during the contraction of the heat exchange controllable layer 33, making it into several small block structures that flow towards the liquid phase outlet 314 along with the liquid phase inside the condensation pipe 32.

[0050] A filter plate 37 is disposed on the side of the condensing pipe 32 near the liquid phase outlet 314. The filter plate 37 is used to intercept molybdenum pentafluoride block crystals and filter the fine molybdenum pentafluoride crystals generated by condensation in the latter part of the condensing pipe 32 through the molybdenum pentafluoride block crystals.

[0051] In the downstream section of the condensation pipe 32, molybdenum pentafluoride condenses to form fine crystals. In this embodiment, the filter plate 37 can intercept the blocky crystals of molybdenum pentafluoride. Simultaneously, after the blocky crystals of molybdenum pentafluoride irregularly gather on one side of the filter plate 37, the pores between the blocky crystals and the cracks in the blocky crystals effectively intercept the formation of fine crystals after the condensation of molybdenum pentafluoride. This achieves the function of detaching the semi-solidified molybdenum pentafluoride adhering to the condensation pipe 32 and using the detached blocky crystals of molybdenum pentafluoride as a filter material to filter the fine crystals of molybdenum pentafluoride.

[0052] Furthermore, the condensation pipe 32 is provided with through holes in the region corresponding to an internal temperature of 60°C-67°C.

[0053] In this embodiment, since the condenser pipe 32 only forms a semi-cured molybdenum pentafluoride adhesive in the region corresponding to an internal temperature of 60°C-67°C, setting this region allows for better coordination with the condensation process. Multiple temperature measurements can be performed on the condenser pipe 32 without through-holes to obtain the 60°C-67°C region, and then through-holes can be created in this region.

[0054] Furthermore, the compression molding part 34 has an arc-shaped concave structure. The side of the compression molding part 34 near the heat exchange controllable layer 33 is provided with a number of protrusions 341. The protrusions 341 give the formed molybdenum pentafluoride block crystals a number of fragile holes. After the heat exchange controllable layer 33 shrinks, the molybdenum pentafluoride block crystals break through the fragile holes.

[0055] In this embodiment, the protrusion 341 can control the structure of the formed molybdenum pentafluoride block crystals, making them flat and porous. During the contraction of the heat exchange controllable layer 33, the molybdenum pentafluoride block crystals can be squeezed and folded, causing them to break around the fragile pores and eventually fracture, thus forming fragmented molybdenum pentafluoride block crystals. Simultaneously, the pressed molding part 34 can be supported and connected to the inner wall of the condensing pipe 32 by several connecting rods, thereby allowing the pressed molding part 34 to be suspended above the inner wall of the condensing pipe 32. The detached molybdenum pentafluoride block crystals can then pass through the suspended space and flow backward with the internal liquid phase.

[0056] Furthermore, the protrusion 341 has a structure in which the cross-sectional area gradually decreases from one end close to the compression molding part 34 to the end away from the compression molding part 34, and the top surface of the protrusion 341 is configured as a cross-shaped protrusion structure.

[0057] In this embodiment, the gradually decreasing cross-sectional area of ​​the protrusion 341 allows the solidified molybdenum pentafluoride bulk crystals to form a trapezoidal structure. Simultaneously, the molybdenum pentafluoride bulk crystals near the heat exchange controllable layer 33 have a thinner structure. This thinner structure allows them to collide and break during the contraction of the heat exchange controllable layer 33, making it easier for the molybdenum pentafluoride bulk crystals to detach from the heat exchange controllable layer 33. Furthermore, the cross-shaped protrusion structure can create cross-shaped marks on the fragile pore edges of the molybdenum pentafluoride bulk crystals, facilitating their fracture.

[0058] Furthermore, the pressurizing component 35 includes a connecting cylinder 351, which communicates with the tank 31. A piston 352 is disposed inside the connecting cylinder 351. The piston 352 is driven by a corresponding piston drive cylinder 353. When the piston 352 moves inside the connecting cylinder 351 toward the inside of the tank 31, it pressurizes the inside of the tank 31.

[0059] In this embodiment, the pressure inside the tank 31 is increased by pressing the piston 352 inward.

[0060] Furthermore, both the cold water inlet 311 and the cold water outlet 312 are equipped with controllable valves. When the pressurizing component 35 is working, the controllable valves close the cold water inlet 311 and the cold water outlet 312.

[0061] In this embodiment, the controllable valve can prevent cold water from flowing out of the tank 31 and thus depressurizing during the operation of the pressurizing component 35.

[0062] Furthermore, the outer surface of the heat exchange controllable layer 33 is provided with movable fins 36. The movable fins 36 are used to adjust the heat exchange efficiency of the heat exchange controllable layer 33. When the heat exchange controllable layer 33 is in a contracted state, the movable fins 36 are close to the condensation pipe 32. When the heat exchange controllable layer 33 is in an expanded state, the movable fins 36 are away from the condensation pipe 32.

[0063] Furthermore, the movable fin 36 is hinged to the outer surface of the heat exchange controllable layer 33, and a baffle plate 38 is provided on the outer surface of the condensation pipe 32 near the heat exchange controllable layer 33. The baffle plate 38 has fin through holes. When the heat exchange controllable layer 33 is in a contracted state, the hinged end of the movable fin 36 is offset from the fin through holes.

[0064] In this embodiment, the movable fins 36 can help the heat exchange controllable layer 33 further improve the heat exchange efficiency after expansion. When the heat exchange controllable layer 33 is in an expanded state, the movable fins 36 move away from the condensation pipe 32, thereby improving the contact efficiency between the movable fins 36 and the cold water, thus improving the heat exchange efficiency. This allows the heat exchange controllable layer 33 to cool down rapidly after expansion, thereby solidifying the semi-cured molybdenum pentafluoride on the inner surface of the heat exchange controllable layer 33.

[0065] Through the structural design of the movable fin 36, when the heat exchange controllable layer 33 is in a contracted state, the hinged end of the movable fin 36 is close to the fin through hole, and is thus squeezed downward by the staggered fin through hole. When the heat exchange controllable layer 33 is in an expanded state, the hinged end of the movable fin 36 is away from the fin through hole, and the fin through hole swings the movable fin 36 outward to expand it.

[0066] Furthermore, a waste outlet 315 is provided on one side of the filter plate 37.

[0067] In this embodiment, after the condensation filtration is completed, the waste outlet 315 can be opened to recover molybdenum pentafluoride.

[0068] A control method for a pressure swing condenser filter used in the preparation of electronic-grade molybdenum hexafluoride is further provided, based on the aforementioned pressure swing condenser filter used in the preparation of electronic-grade molybdenum hexafluoride, comprising the following steps:

[0069] S1, cold water is filled into the tank 31, and crude molybdenum hexafluoride gas is introduced into the condensation pipe 32 to condense the crude molybdenum hexafluoride in the condensation pipe 32.

[0070] S2, executed every first time interval: control the pressurizing component 35 to pressurize the tank 31 and maintain it for a second time, causing the heat exchange controllable layer 33 to expand into the condensation pipe 32 and approach the compression molding component 34, causing the semi-solid molybdenum pentafluoride to be cooled and solidified into molybdenum pentafluoride block crystals, and then control the pressurizing component 35 to depressurize the tank 31, causing the heat exchange controllable layer 33 to contract and the molybdenum pentafluoride block crystals to fall off.

[0071] The principle of the control method has been explained above.

[0072] It should be noted that any reference signs placed between parentheses in the claims should not be construed as limiting the claims. The word "comprising" does not exclude the presence of components or steps not listed in the claims. The word "a" or "an" preceding a component does not exclude the presence of a plurality of such components. The invention can be implemented by means of hardware comprising several different components and by means of a suitably programmed computer. In a unit claim enumerating several means, several of these means may be embodied by the same item of hardware. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

[0073] Although preferred embodiments of the invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the invention.

[0074] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0075] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

Claims

1. A pressure swing condenser filter for the preparation of electronic-grade molybdenum hexafluoride, characterized in that: include: The tank (31) is provided with a cold water inlet (311), a cold water outlet (312), a gas phase inlet (313), and a liquid phase outlet (314), and a low temperature cavity is formed inside the tank (31); A condenser pipe (32) is connected between the gas phase inlet (313) and the liquid phase outlet (314), and the condenser pipe (32) is immersed in the low temperature cavity; The heat exchange controllable layer (33) is made of a number of elastic and flexible materials. The condensation pipe (32) has through holes in the area corresponding to the internal temperature of 60℃-67℃. The heat exchange controllable layer (33) covers the through holes respectively. A press-formed component (34) is disposed inside the condensation pipe (32) and spaced apart from the heat exchange controllable layer (33); A pressurizing component (35) is disposed in the tank body (31). After the pressurizing component (35) pressurizes the tank body (31), the heat exchange controllable layer (33) expands into the condensation pipe (32) and approaches the compression molding component (34). After the heat exchange controllable layer (33) expands, the heat exchange efficiency is improved, and the semi-solid molybdenum pentafluoride adhering to the inner wall of the heat exchange controllable layer (33) fills the space between the compression molding component (34) and the heat exchange controllable layer (33), so that the semi-solid molybdenum pentafluoride is cooled and solidified into molybdenum pentafluoride block crystals. After the pressurizing component (35) depressurizes the tank body (31), the heat exchange controllable layer (33) shrinks and the molybdenum pentafluoride block crystals fall off. A filter plate (37) is disposed on the side of the condenser pipe (32) near the liquid phase outlet (314). The filter plate (37) is used to intercept molybdenum pentafluoride block crystals and filter the fine molybdenum pentafluoride crystals generated by the condenser pipe (32) through the molybdenum pentafluoride block crystals.

2. The voltage swing condenser filter for preparing electronic-grade molybdenum hexafluoride according to claim 1, characterized in that: The compression molding part (34) has an arc-shaped concave structure. The side of the compression molding part (34) near the heat exchange controllable layer (33) is provided with a number of protrusions (341). The protrusions (341) give the formed molybdenum pentafluoride block crystals a number of fragile holes. After the heat exchange controllable layer (33) shrinks, the molybdenum pentafluoride block crystals break through the fragile holes.

3. The voltage swing condenser filter for preparing electronic-grade molybdenum hexafluoride according to claim 2, characterized in that: The protrusion (341) has a structure in which the cross-sectional area gradually decreases from one end close to the compression molding part (34) to the end away from the compression molding part (34), and the top surface of the protrusion (341) is configured as a cross-shaped protrusion structure.

4. The voltage swing condenser filter for preparing electronic-grade molybdenum hexafluoride according to claim 1, characterized in that: The pressurizing component (35) includes a connecting cylinder (351) that connects to the tank (31). A piston (352) is provided inside the connecting cylinder (351). The piston (352) is driven by a corresponding piston drive cylinder (353). When the piston (352) moves inside the connecting cylinder (351) toward the inside of the tank (31), it pressurizes the inside of the tank (31).

5. The voltage swing condenser filter for preparing electronic-grade molybdenum hexafluoride according to claim 1, characterized in that: Both the cold water inlet (311) and the cold water outlet (312) are equipped with controllable valves. When the pressurizing component (35) is working, the controllable valves close the cold water inlet (311) and the cold water outlet (312).

6. The voltage swing condenser filter for preparing electronic-grade molybdenum hexafluoride according to claim 1, characterized in that: The outer surface of the heat exchange controllable layer (33) is provided with movable fins (36). The movable fins (36) are used to adjust the heat exchange efficiency of the heat exchange controllable layer (33). When the heat exchange controllable layer (33) is in a contracted state, the movable fins (36) are close to the condenser pipe (32). When the heat exchange controllable layer (33) is in an expanded state, the movable fins (36) are away from the condenser pipe (32).

7. A voltage swing condenser filter for preparing electronic-grade molybdenum hexafluoride according to claim 6, characterized in that: The movable fin (36) is hinged to the outer surface of the heat exchange controllable layer (33). A baffle plate (38) is provided on the outer surface of the condensation pipe (32) near the heat exchange controllable layer (33). The baffle plate (38) has fin through holes. When the heat exchange controllable layer (33) is in a contracted state, the hinge end of the movable fin (36) is offset from the fin through holes.

8. A voltage swing condenser filter for preparing electronic-grade molybdenum hexafluoride according to claim 1, characterized in that: It includes a waste outlet (315) located on one side of the filter plate (37).

9. A control method for a voltage swing condenser filter used in the preparation of electronic-grade molybdenum hexafluoride, characterized in that: A pressure swing condenser filter for preparing electronic-grade molybdenum hexafluoride according to any one of claims 1-8 includes the following steps: S1, cold water is filled into the tank (31), and crude molybdenum hexafluoride gas is introduced into the condensation pipe (32) to condense the crude molybdenum hexafluoride in the condensation pipe (32); S2, executed every first time interval: control the pressurizing component (35) to pressurize the tank (31) and maintain it for a second time, so that the heat exchange controllable layer (33) expands into the condensation pipe (32) and approaches the compression molding component (34), so that the semi-solid molybdenum pentafluoride is cooled and solidified into molybdenum pentafluoride block crystals, and then control the pressurizing component (35) to depressurize the tank (31), so that the heat exchange controllable layer (33) contracts and the molybdenum pentafluoride block crystals fall off.

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