Fine tuning vacuum capacitor

Abstract

The invention relates to the technical field of capacitors, and discloses a fine-tuning vacuum capacitor. The fine tuning vacuum capacitor comprises a vacuum chamber, an electrode assembly and an adjusting assembly, and a vacuum cavity is arranged in the vacuum chamber; the electrode assembly is arranged in the vacuum cavity and comprises a first electrode ring group and a second electrode ring group which are in coupled connection; the adjusting assembly comprises an adjusting rod and an adjusting nut, the adjusting rod comprises a connecting section, a penetrating section and an adjusting section which are sequentially arranged, the connecting section is connected with the first electrode ring set or the second electrode ring set, the penetrating section penetrates through the vacuum cavity, the adjusting section extends out of the vacuum cavity and is in threaded connection with the adjusting nut, and the adjusting nut is rotationally arranged on the outer wall of the vacuum cavity. And the coupling length of the first electrode ring group and the second electrode ring group can be changed by screwing the adjusting nut. According to the fine-tuning vacuum capacitor, the capacitance value adjusting operation is simple and efficient, and the capacitance value adjusting process is more stable.

Description

Technical Field

[0001] The present invention relates to the technical field of capacitors, and in particular to a fine-tuning vacuum capacitor. Background Art

[0002] Vacuum capacitors are designed with a ceramic insulating shell, a vacuum dielectric, and electrodes made of high-conductivity oxygen-free copper. Compared to other capacitors, they offer advantages such as high voltage resistance, high current carrying capacity, low high-frequency losses, and self-healing after transient overloads, making them particularly suitable for high-frequency, high-voltage applications. Vacuum capacitors are widely used in equipment such as broadcast transmission, medical MRI, high-frequency heating, semiconductor etching, and plasma cleaning. In these high-frequency devices, vacuum capacitors form resonant circuits with high-frequency inductors, achieving high-frequency impedance matching and ensuring stable transmission of RF power.

[0003] Vacuum capacitors are primarily classified into two types: variable vacuum capacitors and fixed vacuum capacitors. Fine-tuning variable vacuum capacitors fall somewhere in between these two categories. The basic structure of a fine-tuning variable vacuum capacitor is similar to that of a variable vacuum capacitor, consisting primarily of two sets of electrodes sealed in a vacuum and a capacitance adjustment system. Because fine-tuning capacitors don't require long-term, continuous adjustment during operation, users have low expectations for the lifespan of the capacitance adjustment system. However, they do prefer simple and efficient capacitance adjustment.

[0004] In the prior art, referring to Figure 1 For example, in the patent application number 202110114780.2, an integrated fine-tuning ceramic vacuum capacitor includes a porcelain tube 1 and a cylindrical electrode ring group disposed in the porcelain tube 1. The cylindrical electrode ring group is composed of a stator electrode 2 fixed to one end of the porcelain tube 1 and a mover electrode 3 movably disposed in the other end of the porcelain tube 1. The stator electrode 2 and the mover electrode 3 are arranged relative to each other and at least partially coupled. The integrated fine-tuning ceramic vacuum capacitor also includes an adjusting screw 4. When adjusting, it is necessary to insert an Allen wrench into the hexagonal socket provided on the nut end face of the adjusting screw 4, manually rotate the Allen wrench, and drive the adjusting screw 4 to rotate to adjust the capacitance. That is, in the capacitance adjustment process of the above-mentioned integrated fine-tuning ceramic vacuum capacitor, not only are additional tools required, the operation is cumbersome, and the convenience is poor; but also, due to the size limitation of the mounting joint, the diameter of the adjusting screw 4 is small, and the thread engagement area is small, which makes it easy for jitter to occur during the adjustment process, and the capacitance adjustment stability is poor.

[0005] Therefore, there is an urgent need for a fine-tuning vacuum capacitor to solve the above problems. Summary of the Invention

[0006] Based on the above, the object of the present invention is to provide a fine-tuning vacuum capacitor with simple and efficient adjustment operation and a more stable capacitance adjustment process.

[0007] To achieve the above object, the present invention adopts the following technical solutions:

[0008] Trimming vacuum capacitors, including:

[0009] A vacuum chamber, wherein a vacuum cavity is provided in the vacuum chamber;

[0010] An electrode assembly is disposed in the vacuum chamber, the electrode assembly comprising a first electrode ring group and a second electrode ring group coupled to each other;

[0011] An adjustment assembly includes an adjustment rod and an adjustment nut, wherein the adjustment rod includes a connecting section, a penetrating section, and an adjustment section arranged in sequence, the connecting section is connected to the first electrode ring group or the second electrode ring group, the penetrating section is penetrated through the vacuum chamber, the adjustment section extends out of the vacuum chamber and is threadedly connected to the adjustment nut, and the adjustment nut is rotatably arranged on the outer wall of the vacuum chamber. Screwing the adjustment nut can change the coupling length of the first electrode ring group and the second electrode ring group.

[0012] As a preferred solution for fine-tuning the vacuum capacitor, the electrode assembly also includes a first mounting disk, and the first electrode ring group is arranged on the first mounting disk; a bellows is also provided in the vacuum chamber, and the bellows is sleeved on the adjusting rod. The bellows can be extended and retracted in the axial direction, and one end is connected to the first mounting disk, and the other end is sealed with the inner wall of the vacuum chamber; the adjusting rod is also provided with an exhaust hole, and the exhaust hole is used to connect the outside world and the interior of the bellows.

[0013] As a preferred solution for fine-tuning the vacuum capacitor, the exhaust hole includes an axial exhaust hole and a radial exhaust hole that are interconnected. The axial exhaust hole extends along the axial direction of the adjustment rod, and the radial exhaust hole extends along the radial direction of the adjustment rod.

[0014] As a preferred solution for fine-tuning the vacuum capacitor, a plurality of radial exhaust holes are provided, and the plurality of radial exhaust holes are all connected to the axial exhaust hole.

[0015] As a preferred solution for fine-tuning a vacuum capacitor, the vacuum chamber includes a porcelain tube and a first base and a second base respectively arranged at both ends of the porcelain tube, the penetration section is slidably connected to the first base, the adjusting nut is rotatably set on the outer wall of the first base, and the second electrode ring group is set on the second base.

[0016] As a preferred solution for fine-tuning the vacuum capacitor, a positioning porcelain shaft is provided inside the first electrode ring group and the second electrode ring group, one end of the positioning porcelain shaft is fixedly connected to the second base, and the other end is slidably connected to the adjustment rod.

[0017] As a preferred solution for fine-tuning the vacuum capacitor, the adjustment assembly further includes a set screw, which is passed through the side wall of the adjustment nut and can abut against the outer wall of the adjustment section.

[0018] As a preferred solution for fine-tuning the vacuum capacitor, a plurality of the set screws are provided, and the plurality of set screws are evenly spaced along the axial direction of the adjusting nut.

[0019] As a preferred solution for fine-tuning the vacuum capacitor, the adjustment assembly is provided with two groups, and the electrode assembly also includes a first mounting disk and a second mounting disk, the first electrode ring group is provided on the first mounting disk, and the second electrode ring group is provided on the second mounting disk, wherein the adjustment rods of one group of the adjustment assemblies are connected to the first mounting disk, and the adjustment rods of the other group of the adjustment assemblies are connected to the second mounting disk.

[0020] As a preferred solution for fine-tuning the vacuum capacitor, a positioning ceramic shaft is provided inside the first electrode ring group and the second electrode ring group, one end of the positioning ceramic shaft is fixedly connected to the adjusting rod of one group of the adjusting components, and the other end is slidingly connected to the adjusting rod of the other group of the adjusting components.

[0021] The beneficial effects of the present invention are:

[0022] The present invention arranges an electrode assembly in the vacuum chamber of a vacuum chamber, and at the same time arranges an adjustment assembly that cooperates with the vacuum chamber and the electrode assembly, so as to adjust the coupling length of the first electrode ring group and the second electrode ring group, thereby achieving adjustment of the capacitance of the fine-tuning vacuum capacitor. Specifically, since the connecting section of the adjustment rod is connected to the first electrode ring group or the second electrode ring group, the penetration section is penetrated in the vacuum chamber, the adjustment section is threadedly connected to the adjustment nut, and since the adjustment nut is rotatably arranged on the outer wall of the vacuum chamber, when the adjustment nut is rotated, the adjustment rod can drive the electrode ring group connected thereto to move, thereby changing the coupling length. The arrangement of the adjustment nut is conducive to increasing the outer diameter of the adjustment rod, which is conducive to making the position of the electrode ring group more stable; at the same time, the adjustment nut is externally placed, so that the operator can adjust the capacitance by directly screwing the adjustment nut by hand, without the need for additional tools, and the adjustment process is simpler and more convenient; in addition, the outer diameter of the adjustment nut is larger, so the operating area is larger, so that the adjustment process is less likely to jitter, that is, the capacitance adjustment process is more stable and controlled. The cooperation between the adjustment section and the vacuum chamber is conducive to limiting the radial position of the adjustment rod, and effectively avoids the situation where the capacitance adjustment is suddenly changed due to the radial displacement of the adjustment rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in describing the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without any creative work.

[0024] Figure 1 is a schematic diagram of an integrated fine-tuning ceramic vacuum capacitor provided in the background art;

[0025] Figure 2 is a cross-sectional view of a fine-tuning vacuum capacitor provided by a specific embodiment of the present invention;

[0026] Figure 3 It is a cross-sectional view of another fine-tuning vacuum capacitor provided by a specific embodiment of the present invention.

[0027] In the picture:

[0028] 1. Porcelain tube; 2. Stator electrode; 3. Mover electrode; 4. Adjusting screw;

[0029] 100, vacuum chamber; 101, vacuum chamber; 110, porcelain tube; 120, first base; 121, mounting threaded hole; 130, second base; 131, mounting platform;

[0030] 200, electrode assembly; 210, first electrode ring group; 220, second electrode ring group; 230, first mounting plate; 240, positioning porcelain shaft; 250, second mounting plate;

[0031] 300, adjustment assembly; 310, adjustment rod; 311, connection section; 312, penetration section; 313, adjustment section; 314, exhaust hole; 3141, axial exhaust hole; 3142, radial exhaust hole; 315, mounting section; 320, adjustment nut; 330, set screw;

[0032] 400. Bellows. DETAILED DESCRIPTION

[0033] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to explain the present invention, but are not to be construed as limiting the present invention.

[0034] In the description of the present invention, it should be noted that the terms "center," "up," "down," "left," "right," "vertical," "horizontal," "inside," and "outside" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of the present invention and simplify the description. They are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0035] Unless otherwise expressly specified or limited, the terms "mounted," "connected," "connect," and "fixed" should be interpreted broadly. For example, they may refer to fixed or removable connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of these terms in the present invention based on specific circumstances.

[0036] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0037] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0038] like Figure 2 and Figure 3As shown, this embodiment provides a fine-tuning vacuum capacitor, which includes a vacuum chamber 100, an electrode assembly 200 and an adjustment assembly 300. A vacuum chamber 101 is provided in the vacuum chamber 100; the electrode assembly 200 is provided in the vacuum chamber 101, and the electrode assembly 200 includes a first electrode ring group 210 and a second electrode ring group 220 coupled to each other; the adjustment assembly 300 includes an adjustment rod 310 and an adjustment nut 320, and the adjustment rod 310 includes a connecting section 311, a penetrating section 312 and an adjustment section 313 arranged in sequence, the connecting section 311 is connected to the first electrode ring group 210 or the second electrode ring group 220, the penetrating section 312 is penetrated in the vacuum chamber 100, and the adjustment section 313 extends out of the vacuum chamber 100 and is threadedly connected to the adjustment nut 320, and the adjustment nut 320 is rotatably provided on the outer wall of the vacuum chamber 100. Screwing the adjustment nut 320 can change the coupling length of the first electrode ring group 210 and the second electrode ring group 220.

[0039] By setting an electrode assembly 200 in the vacuum cavity 101 of the vacuum chamber 100, and setting an adjustment assembly 300 that cooperates with both the vacuum chamber 100 and the electrode assembly 200, it is used to adjust the coupling length of the first electrode ring group 210 and the second electrode ring group 220, thereby achieving adjustment of the capacitance of the fine-tuning vacuum capacitor. Specifically, since the connecting section 311 of the adjustment rod 310 is connected to the first electrode ring group 210 or the second electrode ring group 220, the penetration section 312 is penetrated by the vacuum chamber 100, and the adjustment section 313 is threadedly connected to the adjustment nut 320, and since the adjustment nut 320 is rotatably set on the outer wall of the vacuum chamber 100, when the adjustment nut 320 is rotated, the adjustment rod 310 can drive the electrode ring group connected thereto to move, thereby changing the coupling length. The setting of the adjusting nut 320 is conducive to increasing the outer diameter of the adjusting rod 310, which is conducive to making the position of the electrode ring group more stable; at the same time, the adjusting nut 320 is placed externally, so that the operator can directly adjust the capacitance by screwing the adjusting nut 320 by hand without the need for additional tools, making the adjustment process simpler and more convenient. In addition, the outer diameter of the adjusting nut 320 is larger, so the operating area is larger, making it less likely to shake during the adjustment process, that is, compared with the Figure 1 The prior art shows an integrated fine-tuning ceramic vacuum capacitor with a more stable and controllable capacitance adjustment process. The adjustment section 313 cooperates with the vacuum chamber 100 to limit the radial position of the adjustment rod 310, effectively preventing sudden changes in the capacitance adjustment caused by radial displacement of the adjustment rod 310.

[0040] Specifically, the electrode assembly 200 further includes a first mounting disk 230, which is disposed within the vacuum chamber 101 and is used to mount the first electrode ring assembly 210. For example, the connecting section 311 of the adjustment rod 310 is connected to the first mounting disk 230, and the capacitance is changed by changing the position of the first mounting disk 230 and the first electrode ring assembly 210. A bellows 400 is also provided within the vacuum chamber 101. The bellows 400 is sleeved on the adjustment rod 310, with one end of the bellows 400 connected to the first mounting disk 230 and the other end sealed to the inner wall of the vacuum chamber 100. It is worth noting that the bellows 400 is configured to be able to expand and contract along its axial direction, thereby adapting to changes in the distance between the first mounting disk 230 and the inner wall of the vacuum chamber 100 during the capacitance adjustment process. At the same time, the bellows 400 is sealedly connected to the first mounting plate 230 and the inner wall of the vacuum chamber 100 to ensure the vacuum degree of the space enclosed by the outer side of the bellows 400 and the inner side of the vacuum chamber 100.

[0041] In this embodiment, the adjustment rod 310 is further provided with an exhaust hole 314, which is used to connect the outside world to the interior of the bellows 400. The provision of the exhaust hole 314 ensures that the air pressure in the space between the inside of the bellows 400 and the outside of the adjustment rod 310 is consistent with atmospheric pressure, thus preventing the pressure change in this space caused by capacitance adjustment. This reduces capacitance fluctuations caused by pressure changes in this space and the torque required for adjustment, thereby making the capacitance of the fine-tuning vacuum capacitor more stable and reducing the effort required to adjust the capacitance.

[0042] Optionally, the exhaust hole 314 includes an axial exhaust hole 3141 and a radial exhaust hole 3142 that are interconnected. The axial exhaust hole 3141 extends along the axial direction of the adjustment rod 310, and the radial exhaust hole 3142 extends along the radial direction of the adjustment rod 310. By arranging the exhaust holes 314 in sections, processing and manufacturing are facilitated. Among them, there can be a single radial exhaust hole 3142.

[0043] Preferably, a plurality of radial exhaust holes 3142 are provided, and the plurality of radial exhaust holes 3142 are all communicated with the axial exhaust hole 3141. In addition, the plurality of radial exhaust holes 3142 are evenly spaced along the radial direction of the adjustment rod 310.

[0044] In this embodiment, Figure 1As shown, the vacuum chamber 100 includes a porcelain tube 110 and a first base 120 and a second base 130 respectively sealed at both ends of the porcelain tube 110. When only one adjustment assembly 300 is provided, and the first electrode ring group 210 is provided on the first mounting plate, and the adjustment rod 310 is connected to the first mounting plate 230, the penetration section 312 is slidably connected to the first base 120. The first base 120 is used to limit the radial displacement of the adjustment rod 310. The adjustment nut 320 is rotatably provided on the outer wall of the first base 120, and the second electrode ring group 220 is fixedly provided on the second base 130. It can be understood that in this case, the adjustment assembly 300 adjusts the capacitance by adjusting the position of the first electrode ring group 210 relative to the second electrode ring group 220.

[0045] Specifically, to ensure coaxiality between the first electrode ring assembly 210 and the second electrode ring assembly 220, a positioning porcelain shaft 240 is provided inside the first electrode ring assembly 210 and the second electrode ring assembly 220. One end of the positioning porcelain shaft 240 is fixedly connected to the second base 130, and the other end is slidably connected to the adjustment rod 310. Furthermore, a mounting section 315 is provided at the end of the connecting section 311 of the adjustment rod 310 away from the penetration section 312. The mounting section 315 penetrates the first mounting plate 230 and is slidably connected to the positioning porcelain shaft 240. The second base 130 is provided with a mounting platform 131 facing the first mounting plate 230. The mounting platform 131 is provided with a mounting groove, and the positioning porcelain shaft 240 is disposed in the mounting groove. In other embodiments, one end of the positioning ceramic shaft 240 can be fixedly connected to the adjusting rod 310, and the other end can be slidingly connected to the second base 130, or both ends of the positioning ceramic shaft 240 can be set to be slidingly connected to both the adjusting rod 310 and the second base 130. Those skilled in the art can make settings according to actual needs, and no specific limitations are made here.

[0046] Optionally, the first base 120 and / or the second base 130 are provided with mounting threaded holes 121 for mounting the fine-tuning vacuum capacitor.

[0047] As an optional solution for fine-tuning vacuum capacitors, in order to ensure that the capacitance value after adjustment is stable and does not change, the adjustment component 300 also includes a set screw 330. The set screw 330 is inserted into the side wall of the adjustment nut 320. When the capacitance adjustment is completed, the set screw 330 can be screwed so that it abuts the outer wall of the adjustment section 313 to fix the position of the adjustment rod 310 relative to the adjustment nut 320. At this time, the adjustment nut 320 cannot be screwed, and the capacitance value is fixed. By providing the set screw 330, the fine-tuning vacuum capacitor can be used as a fixed capacitor in the device circuit for a long time without changing the capacitance value, which increases the applicable scenarios of the fine-tuning vacuum capacitor.

[0048] Optionally, one set screw 330 may be provided. Preferably, multiple set screws 330 are provided to improve the tightening effect. Further preferably, multiple set screws 330 are evenly spaced along the axial direction of the adjusting nut 320 to further increase the capacitance stability.

[0049] In another alternative approach to trimming vacuum capacitors, such as Figure 3 As shown, there are two groups of adjustment components 300, which are used to adjust the positions of the first electrode ring group 210 and the second electrode ring group 220 relative to the vacuum chamber 100, thereby adjusting the capacitance. The provision of two groups of adjustment components 300 makes the capacitance adjustment range of the fine-tuning vacuum capacitor wider, so users who use the fine-tuning vacuum capacitor have more choices.

[0050] Specifically, the electrode assembly 200 not only includes a first mounting plate 230 connected to the first electrode ring group 210, but also includes a second mounting plate 250 connected to the second electrode ring group 220, wherein the adjustment rod 310 of one group of adjustment assemblies 300 is connected to the first mounting plate 230, and the adjustment rod 310 of another group of adjustment assemblies 300 is connected to the second mounting plate 250.

[0051] In this embodiment, the second base 130 is no longer provided. Both ends of the porcelain tube 110 of the vacuum chamber 100 are provided as the first base 120. One end of the positioning porcelain shaft 240 is fixedly connected to the adjustment rod 310 of one set of adjustment assemblies 300, and the other end is slidably connected to the adjustment rod 310 of the other set of adjustment assemblies 300. The two adjustment rods 310 are respectively provided through the two first bases 120. In other embodiments, the two ends of the positioning porcelain shaft 240 can also be provided as movable connections with the two adjustment rods 310, which are not specifically limited here.

[0052] In summary, the above-mentioned fine-tuning vacuum capacitor utilizes an external adjustment nut 320 and set screw 330, making capacitance adjustment simpler and more convenient, and once fixed, the capacitance remains stable. Specifically, first, the adjustment nut 320 is positioned externally on the fine-tuning vacuum capacitor, allowing for direct manual operation, eliminating the need for tools. This makes capacitance adjustment more convenient, and the torque required for capacitance adjustment is reduced by approximately 30%. Second, a set screw 330 is positioned externally on the adjustment nut 320. After capacitance adjustment is complete, the set screw 330 is tightened to stabilize the capacitance, further enhancing stability. By providing the set screw 330, the capacitance change rate of the fine-tuning vacuum capacitor before and after vibration is reduced by more than 20% under specified vibration test conditions, meeting user requirements for capacitance stability. Furthermore, the adjustment rod 310 is bidirectionally positioned by the positioning ceramic shaft 240 and the base, ensuring stable and controlled capacitance adjustment. Furthermore, a vent hole 314 is provided on the positioning rod to reduce the torque required for capacitance adjustment, making capacitance adjustment more labor-efficient.

[0053] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there may be changes in the specific implementation methods and application scopes. The contents of this specification should not be understood as limiting the present invention.

Claims

1. Fine-tuning vacuum capacitor, characterized in that, include: A vacuum chamber (100), wherein a vacuum cavity (101) is provided in the vacuum chamber (100); An electrode assembly (200) is disposed in the vacuum chamber (101), the electrode assembly (200) comprising a first electrode ring group (210) and a second electrode ring group (220) coupled to each other; An adjustment assembly (300) comprises an adjustment rod (310) and an adjustment nut (320); the adjustment rod (310) comprises a connecting section (311), a penetrating section (312), and an adjustment section (313) which are sequentially arranged; the connecting section (311) is connected to the first electrode ring group (210) or the second electrode ring group (220); the penetrating section (312) is penetrated through the vacuum chamber (100); the adjustment section (313) extends out of the vacuum chamber (100) and is threadedly connected to the adjustment nut (320); the adjustment nut (320) is rotatably arranged on the outer wall of the vacuum chamber (100); and screwing the adjustment nut (320) can change the coupling length of the first electrode ring group (210) and the second electrode ring group (220).

2. The fine-tuning vacuum capacitor according to claim 1, characterized in that The electrode assembly (200) further comprises a first mounting disk (230), and the first electrode ring group (210) is arranged on the first mounting disk (230); a bellows (400) is further arranged in the vacuum chamber (101), and the bellows (400) is sleeved on the adjustment rod (310); the bellows (400) can be arranged to be telescopic along the axial direction, and one end is connected to the first mounting disk (230), and the other end is sealed to the inner wall of the vacuum chamber (100); the adjustment rod (310) is further provided with an exhaust hole (314), and the exhaust hole (314) is used to connect the outside world and the interior of the bellows (400).

3. The fine-tuning vacuum capacitor according to claim 2, characterized in that The exhaust hole (314) comprises an axial exhaust hole (3141) and a radial exhaust hole (3142) that are interconnected. The axial exhaust hole (3141) extends along the axial direction of the adjusting rod (310), and the radial exhaust hole (3142) extends along the radial direction of the adjusting rod (310).

4. The fine-tuning vacuum capacitor according to claim 3, characterized in that A plurality of radial exhaust holes (3142) are provided, and the plurality of radial exhaust holes (3142) are all connected to the axial exhaust hole (3141).

5. The fine-tuning vacuum capacitor according to claim 2, characterized in that: The vacuum chamber (100) comprises a porcelain tube (110) and a first base (120) and a second base (130) respectively arranged at both ends of the porcelain tube (110); the penetration section (312) is slidably connected to the first base (120); the adjusting nut (320) is rotatably arranged on the outer wall of the first base (120); and the second electrode ring group (220) is arranged on the second base (130).

6. The fine-tuning vacuum capacitor according to claim 5, characterized in that A positioning porcelain shaft (240) is provided inside the first electrode ring group (210) and the second electrode ring group (220), one end of the positioning porcelain shaft (240) is fixedly connected to the second base (130), and the other end is slidably connected to the adjustment rod (310).

7. The fine-tuning vacuum capacitor according to claim 1, wherein: The adjustment assembly (300) further comprises a set screw (330), wherein the set screw (330) is passed through the side wall of the adjustment nut (320) and can abut against the outer wall of the adjustment section (313).

8. The fine-tuning vacuum capacitor according to claim 7, characterized in that: A plurality of the set screws (330) are provided, and the plurality of set screws (330) are evenly spaced along the axial direction of the adjusting nut (320).

9. The fine-tuning vacuum capacitor according to claim 1, wherein: The adjustment assembly (300) is provided with two groups, and the electrode assembly (200) further includes a first mounting plate (230) and a second mounting plate (250), the first electrode ring group (210) is provided on the first mounting plate (230), and the second electrode ring group (220) is provided on the second mounting plate (250), wherein the adjustment rod (310) of one group of the adjustment assemblies (300) is connected to the first mounting plate (230), and the adjustment rod (310) of the other group of the adjustment assemblies (300) is connected to the second mounting plate (250).

10. The fine-tuning vacuum capacitor according to claim 9, characterized in that A positioning porcelain shaft (240) is provided inside the first electrode ring group (210) and the second electrode ring group (220), one end of the positioning porcelain shaft (240) is fixedly connected to the adjustment rod (310) of one group of the adjustment components (300), and the other end is slidably connected to the adjustment rod (310) of the other group of the adjustment components (300).

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